TW314506B - - Google Patents

Download PDF

Info

Publication number
TW314506B
TW314506B TW084112786A TW84112786A TW314506B TW 314506 B TW314506 B TW 314506B TW 084112786 A TW084112786 A TW 084112786A TW 84112786 A TW84112786 A TW 84112786A TW 314506 B TW314506 B TW 314506B
Authority
TW
Taiwan
Prior art keywords
ceramic material
patent application
atomic percent
substrate
composition
Prior art date
Application number
TW084112786A
Other languages
English (en)
Chinese (zh)
Original Assignee
Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics Nv filed Critical Philips Electronics Nv
Application granted granted Critical
Publication of TW314506B publication Critical patent/TW314506B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C04B35/117—Composites
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Composite Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Ceramic Products (AREA)
TW084112786A 1994-12-12 1995-11-30 TW314506B (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP94203601 1994-12-12

Publications (1)

Publication Number Publication Date
TW314506B true TW314506B (enExample) 1997-09-01

Family

ID=8217447

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084112786A TW314506B (enExample) 1994-12-12 1995-11-30

Country Status (7)

Country Link
US (2) US5571757A (enExample)
EP (1) EP0743929B1 (enExample)
JP (1) JPH09509394A (enExample)
KR (1) KR100404815B1 (enExample)
DE (1) DE69503472T2 (enExample)
TW (1) TW314506B (enExample)
WO (1) WO1996018589A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69635908T2 (de) * 1995-08-03 2006-11-23 Ngk Insulators, Ltd., Nagoya Gesinterte Aluminiumnitridkörper und deren Verwendung als Subtrat in einer Vorrichtung zur Herstellung von Halbleitern
US6495912B1 (en) * 2001-09-17 2002-12-17 Megic Corporation Structure of ceramic package with integrated passive devices
WO2003058644A2 (en) * 2001-10-11 2003-07-17 Arizona Board Of Regents Superhard dielectric compounds and methods of preparation
US7396779B2 (en) * 2003-09-24 2008-07-08 Micron Technology, Inc. Electronic apparatus, silicon-on-insulator integrated circuits, and fabrication methods
EP1673807B1 (en) 2003-10-10 2019-12-11 Taiwan Semiconductor Manufacturing Co., Ltd. Electronic Device
CN109053161B (zh) * 2018-08-31 2021-05-18 武汉科技大学 一种直接发泡Al2O3-AlN多孔复合材料及其制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE417818B (sv) * 1979-09-03 1981-04-13 Sandvik Ab Keramisk legering vesentligen omfattande aluminiumoxid samt nitrider och/eller karbonitrider av en eller flera metaller tillhorande grupperna iv b, v b och vi b i periodiska systemet samt en eller flera ...
FR2628414B1 (fr) * 1988-03-11 1992-01-17 Pechiney Electrometallurgie Materiau electrofondu polyphase a base d'alumine, d'oxycarbure et d'oxynitrure d'aluminium
US5075265A (en) * 1990-12-10 1991-12-24 Ford Motor Company Preparation of aluminum oxynitride from organosiloxydihaloalanes
DE69407832T2 (de) * 1993-02-18 1998-07-16 Koninkl Philips Electronics Nv Keramischer Körper

Also Published As

Publication number Publication date
DE69503472D1 (de) 1998-08-20
EP0743929B1 (en) 1998-07-15
EP0743929A1 (en) 1996-11-27
WO1996018589A1 (en) 1996-06-20
DE69503472T2 (de) 1999-03-04
KR100404815B1 (ko) 2004-02-05
US5571757A (en) 1996-11-05
JPH09509394A (ja) 1997-09-22
US5635429A (en) 1997-06-03
KR970701158A (ko) 1997-03-17

Similar Documents

Publication Publication Date Title
JP6182084B2 (ja) 緻密質複合材料、その製法、接合体及び半導体製造装置用部材
US4701427A (en) Sintered silicon carbide ceramic body of high electrical resistivity
JP2001080964A (ja) 多結晶ＳｉＣ成形体、その製法及びそれからなる応用品
TW397807B (en) Aluminium nitride sintered body
US7122490B2 (en) Aluminum nitride materials and members for use in the production of semiconductors
EP1201622A2 (en) A material with a low volume resistivity, aluminium nitride sintered body and article for manufacturing semiconductors
US5773733A (en) Alumina-aluminum nitride-nickel composites
US6607836B2 (en) Material of low volume resistivity, an aluminum nitride sintered body and a member used for the production of semiconductors
US20100227145A1 (en) Aluminum oxide sintered body, method for producing the same and member for semiconductor producing apparatus
CN104628392A (zh) 一种致密氮化铝-氮化硼复合材料的制备方法
CN113121252B (zh) 一种高导热SiC-AlN复合陶瓷的制备方法
JPS638261A (ja) 多結晶炭化ケイ素からの電気絶縁性基体材料と、アイソスタチツク熱間圧縮によるその製造方法
KR100404815B1 (ko) 세라믹 물질 기판
JP2642184B2 (ja) 窒化アルミニウム―六方晶窒化ほう素系焼結体の製造方法
JP2807430B2 (ja) 窒化アルミニウム焼結体およびその製造方法
JPH1112039A (ja) 高放熱リッド用の窒化アルミニウム系焼結体の製造方法
JP2752227B2 (ja) ＡｌＮ―ＢＮ系複合焼結体およびその製造方法
JP5073135B2 (ja) 窒化アルミニウム焼結体、その製造方法及び用途
JPS61270263A (ja) 高熱伝導性窒化アルミニウム焼結体の製造法
JPH01252584A (ja) 複合セラミックス焼結体およびその製造方法
JPH075378B2 (ja) 黒色窒化アルミニウム焼結体とその製造方法
JPH1081569A (ja) 高熱伝導性窒化アルミニウム焼結体及びその製造方法
JPH013075A (ja) 窒化アルミニウム質焼結体の製造方法
JPS62270468A (ja) 窒化アルミニウム質焼結体
JP2024145464A (ja) 複合材料焼結体、接合体、半導体製造装置用部材、および、複合材料焼結体の製造方法