TW301787B - - Google Patents

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Publication number
TW301787B
TW301787B TW84110827A TW84110827A TW301787B TW 301787 B TW301787 B TW 301787B TW 84110827 A TW84110827 A TW 84110827A TW 84110827 A TW84110827 A TW 84110827A TW 301787 B TW301787 B TW 301787B
Authority
TW
Taiwan
Prior art keywords
workpiece
electrode
plasma
voltage
item
Prior art date
Application number
TW84110827A
Other languages
English (en)
Chinese (zh)
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of TW301787B publication Critical patent/TW301787B/zh

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW84110827A 1995-09-29 1995-10-14 TW301787B (cg-RX-API-DMAC7.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US53692395A 1995-09-29 1995-09-29

Publications (1)

Publication Number Publication Date
TW301787B true TW301787B (cg-RX-API-DMAC7.html) 1997-04-01

Family

ID=51565732

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84110827A TW301787B (cg-RX-API-DMAC7.html) 1995-09-29 1995-10-14

Country Status (1)

Country Link
TW (1) TW301787B (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI387400B (zh) * 2008-10-20 2013-02-21 Ind Tech Res Inst 電漿系統

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI387400B (zh) * 2008-10-20 2013-02-21 Ind Tech Res Inst 電漿系統

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