TW280003B - Fabrication method of IC metal structure - Google Patents

Fabrication method of IC metal structure

Info

Publication number
TW280003B
TW280003B TW084113806A TW84113806A TW280003B TW 280003 B TW280003 B TW 280003B TW 084113806 A TW084113806 A TW 084113806A TW 84113806 A TW84113806 A TW 84113806A TW 280003 B TW280003 B TW 280003B
Authority
TW
Taiwan
Prior art keywords
contact hole
metal
shallow trench
forming
photoresist
Prior art date
Application number
TW084113806A
Other languages
English (en)
Inventor
Chorng-Guang Lii
Rong-Shian Sheu
Biing-Nan Tzeng
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW084113806A priority Critical patent/TW280003B/zh
Application granted granted Critical
Publication of TW280003B publication Critical patent/TW280003B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW084113806A 1995-12-23 1995-12-23 Fabrication method of IC metal structure TW280003B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW084113806A TW280003B (en) 1995-12-23 1995-12-23 Fabrication method of IC metal structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW084113806A TW280003B (en) 1995-12-23 1995-12-23 Fabrication method of IC metal structure

Publications (1)

Publication Number Publication Date
TW280003B true TW280003B (en) 1996-07-01

Family

ID=51397558

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084113806A TW280003B (en) 1995-12-23 1995-12-23 Fabrication method of IC metal structure

Country Status (1)

Country Link
TW (1) TW280003B (zh)

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Legal Events

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MK4A Expiration of patent term of an invention patent