TW344102B - Additive metallization process and structure - Google Patents
Additive metallization process and structureInfo
- Publication number
- TW344102B TW344102B TW085105956A TW85105956A TW344102B TW 344102 B TW344102 B TW 344102B TW 085105956 A TW085105956 A TW 085105956A TW 85105956 A TW85105956 A TW 85105956A TW 344102 B TW344102 B TW 344102B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- photosensitive polymer
- polymer layer
- metallization process
- additive
- Prior art date
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
An additive metallization process comprising the following steps: (a) forming a photosensitive polymer layer having a window on a silicon substrate having a dielectric layer and a device; (b) reserving the photosensitive polymer layer as a mask layer, and etching an exposed portion of the dielectric layer, thereby forming a contact hole in the additive structure consisted of the photosensitive polymer layer and the dielectric layer; (c) depositing a metal layer in the contact hole and on the surface of the photosensitive polymer layer; and (d) removing any excessive metal and sequentially carrying out a planarization process thereby obtaining a metal region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085105956A TW344102B (en) | 1996-05-20 | 1996-05-20 | Additive metallization process and structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW085105956A TW344102B (en) | 1996-05-20 | 1996-05-20 | Additive metallization process and structure |
Publications (1)
Publication Number | Publication Date |
---|---|
TW344102B true TW344102B (en) | 1998-11-01 |
Family
ID=58263697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085105956A TW344102B (en) | 1996-05-20 | 1996-05-20 | Additive metallization process and structure |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW344102B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6495451B2 (en) | 2000-01-06 | 2002-12-17 | Matsushita Electric Industrial Co., Ltd. | Method of forming interconnect |
-
1996
- 1996-05-20 TW TW085105956A patent/TW344102B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6495451B2 (en) | 2000-01-06 | 2002-12-17 | Matsushita Electric Industrial Co., Ltd. | Method of forming interconnect |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |