TW265470B - Process for capacitor with polysilicon pillar - Google Patents

Process for capacitor with polysilicon pillar

Info

Publication number
TW265470B
TW265470B TW84106346A TW84106346A TW265470B TW 265470 B TW265470 B TW 265470B TW 84106346 A TW84106346 A TW 84106346A TW 84106346 A TW84106346 A TW 84106346A TW 265470 B TW265470 B TW 265470B
Authority
TW
Taiwan
Prior art keywords
capacitor
insulator
polysilicon
forming
node contact
Prior art date
Application number
TW84106346A
Other languages
English (en)
Inventor
Jyh-Yeuan Lu
Horng-Huei Tzeng
Original Assignee
Vanguard Int Semiconduct Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vanguard Int Semiconduct Corp filed Critical Vanguard Int Semiconduct Corp
Priority to TW84106346A priority Critical patent/TW265470B/zh
Application granted granted Critical
Publication of TW265470B publication Critical patent/TW265470B/zh

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
TW84106346A 1995-06-20 1995-06-20 Process for capacitor with polysilicon pillar TW265470B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84106346A TW265470B (en) 1995-06-20 1995-06-20 Process for capacitor with polysilicon pillar

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84106346A TW265470B (en) 1995-06-20 1995-06-20 Process for capacitor with polysilicon pillar

Publications (1)

Publication Number Publication Date
TW265470B true TW265470B (en) 1995-12-11

Family

ID=51402143

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84106346A TW265470B (en) 1995-06-20 1995-06-20 Process for capacitor with polysilicon pillar

Country Status (1)

Country Link
TW (1) TW265470B (zh)

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