KR960011649B1 - Capacitor manufacture - Google Patents

Capacitor manufacture Download PDF

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Publication number
KR960011649B1
KR960011649B1 KR92021021A KR920021021A KR960011649B1 KR 960011649 B1 KR960011649 B1 KR 960011649B1 KR 92021021 A KR92021021 A KR 92021021A KR 920021021 A KR920021021 A KR 920021021A KR 960011649 B1 KR960011649 B1 KR 960011649B1
Authority
KR
South Korea
Prior art keywords
insulating layer
forming
polysilicone
forth
depositing
Prior art date
Application number
KR92021021A
Other languages
Korean (ko)
Other versions
KR940012625A (en
Inventor
Young-Kwon Chon
Original Assignee
Lg Semicon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Semicon Co Ltd filed Critical Lg Semicon Co Ltd
Priority to KR92021021A priority Critical patent/KR960011649B1/en
Publication of KR940012625A publication Critical patent/KR940012625A/en
Application granted granted Critical
Publication of KR960011649B1 publication Critical patent/KR960011649B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
    • H01L28/91—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by depositing layers, e.g. by depositing alternating conductive and insulating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
    • H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
    • H01L28/92—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by patterning layers, e.g. by etching conductive layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

The method of manufacturing capacitor comprises the steps of : forming a memory cell transistor, a first insulating layer(12), a second insulating layer(13) and a third insulating layer(14) on a semiconductor substrate(11); forming a buried contact hole by etching the first, the second and the third insulating layer selectively and depositing a doped polysilicone(15); depositing a forth insulating layer(16) on the polysilicone(15) and patterning the forth insulating layer to form a ridge(16); forming a side wall with a fifth insulating layer(17) on the side of the forth insulating layer(16); etching the polysilicone(15) to form a step part; removing the forth insulating layer(16) and forming a side wall with a sixth insulating layer(18); removing the fifth insulating layer(17) and the polysilicone(15); and forming a dielectric film and a plate after removing the sixth insulating layer(18).
KR92021021A 1992-11-10 1992-11-10 Capacitor manufacture KR960011649B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92021021A KR960011649B1 (en) 1992-11-10 1992-11-10 Capacitor manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92021021A KR960011649B1 (en) 1992-11-10 1992-11-10 Capacitor manufacture

Publications (2)

Publication Number Publication Date
KR940012625A KR940012625A (en) 1994-06-24
KR960011649B1 true KR960011649B1 (en) 1996-08-24

Family

ID=19342813

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92021021A KR960011649B1 (en) 1992-11-10 1992-11-10 Capacitor manufacture

Country Status (1)

Country Link
KR (1) KR960011649B1 (en)

Also Published As

Publication number Publication date
KR940012625A (en) 1994-06-24

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