TW260820B - Process of protecting B punchthrough oxide layer - Google Patents

Process of protecting B punchthrough oxide layer

Info

Publication number
TW260820B
TW260820B TW83110230A TW83110230A TW260820B TW 260820 B TW260820 B TW 260820B TW 83110230 A TW83110230 A TW 83110230A TW 83110230 A TW83110230 A TW 83110230A TW 260820 B TW260820 B TW 260820B
Authority
TW
Taiwan
Prior art keywords
oxide layer
protecting
punchthrough
punchthrough oxide
polysilicon
Prior art date
Application number
TW83110230A
Other languages
Chinese (zh)
Inventor
Ching-Shyang Shyu
Suey-Horng Chen
Chorng-Rong Lin
Wen-Tarng Suen
Yeun-Ding Horng
Huei-Huang Chen
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW83110230A priority Critical patent/TW260820B/en
Application granted granted Critical
Publication of TW260820B publication Critical patent/TW260820B/en

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Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

A process of protecting B punchthrough oxide layer by implanting P, that is applicable to one N-type semiconductor material, includes the following steps: (1) forming one oxide layer on the N-type semiconductor material (2) forming one polysilicon layer on he oxide layer, then implanting dopant with P into the polysilicon layer; (3) implanting dopant with P into the polysilicon.
TW83110230A 1994-11-05 1994-11-05 Process of protecting B punchthrough oxide layer TW260820B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW83110230A TW260820B (en) 1994-11-05 1994-11-05 Process of protecting B punchthrough oxide layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW83110230A TW260820B (en) 1994-11-05 1994-11-05 Process of protecting B punchthrough oxide layer

Publications (1)

Publication Number Publication Date
TW260820B true TW260820B (en) 1995-10-21

Family

ID=51401906

Family Applications (1)

Application Number Title Priority Date Filing Date
TW83110230A TW260820B (en) 1994-11-05 1994-11-05 Process of protecting B punchthrough oxide layer

Country Status (1)

Country Link
TW (1) TW260820B (en)

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