TW249313B - - Google Patents

Info

Publication number
TW249313B
TW249313B TW083101855A TW83101855A TW249313B TW 249313 B TW249313 B TW 249313B TW 083101855 A TW083101855 A TW 083101855A TW 83101855 A TW83101855 A TW 83101855A TW 249313 B TW249313 B TW 249313B
Authority
TW
Taiwan
Application number
TW083101855A
Original Assignee
Tokyo Electron Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Co filed Critical Tokyo Electron Co
Application granted granted Critical
Publication of TW249313B publication Critical patent/TW249313B/zh

Links

Classifications

    • H01L21/205—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32678—Electron cyclotron resonance
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
TW083101855A 1993-03-06 1994-03-03 TW249313B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7122593 1993-03-06

Publications (1)

Publication Number Publication Date
TW249313B true TW249313B (zh) 1995-06-11

Family

ID=13454531

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083101855A TW249313B (zh) 1993-03-06 1994-03-03

Country Status (3)

Country Link
US (1) US5554223A (zh)
KR (1) KR100294529B1 (zh)
TW (1) TW249313B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI581673B (zh) * 2011-09-13 2017-05-01

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JP5572329B2 (ja) * 2009-01-15 2014-08-13 株式会社日立ハイテクノロジーズ プラズマ処理装置およびプラズマ生成装置
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Publication number Priority date Publication date Assignee Title
TWI581673B (zh) * 2011-09-13 2017-05-01

Also Published As

Publication number Publication date
KR100294529B1 (ko) 2001-10-24
US5554223A (en) 1996-09-10
KR940022771A (ko) 1994-10-21

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