TW218051B - - Google Patents
Info
- Publication number
- TW218051B TW218051B TW080108644A TW80108644A TW218051B TW 218051 B TW218051 B TW 218051B TW 080108644 A TW080108644 A TW 080108644A TW 80108644 A TW80108644 A TW 80108644A TW 218051 B TW218051 B TW 218051B
- Authority
- TW
- Taiwan
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76227—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials the dielectric materials being obtained by full chemical transformation of non-dielectric materials, such as polycristalline silicon, metals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76237—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials introducing impurities in trench side or bottom walls, e.g. for forming channel stoppers or alter isolation behavior
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/05—Etch and refill
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910000640A KR940006696B1 (ko) | 1991-01-16 | 1991-01-16 | 반도체 소자의 격리막 형성방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW218051B true TW218051B (zh) | 1993-12-21 |
Family
ID=19309895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW080108644A TW218051B (zh) | 1991-01-16 | 1991-11-04 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5229315A (zh) |
JP (1) | JPH06105748B2 (zh) |
KR (1) | KR940006696B1 (zh) |
DE (1) | DE4139200C2 (zh) |
TW (1) | TW218051B (zh) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2608513B2 (ja) * | 1991-10-02 | 1997-05-07 | 三星電子株式会社 | 半導体装置の製造方法 |
US5433794A (en) * | 1992-12-10 | 1995-07-18 | Micron Technology, Inc. | Spacers used to form isolation trenches with improved corners |
JP2914117B2 (ja) * | 1993-08-28 | 1999-06-28 | 日本電気株式会社 | 半導体装置の製造方法 |
US5371036A (en) * | 1994-05-11 | 1994-12-06 | United Microelectronics Corporation | Locos technology with narrow silicon trench |
US5904539A (en) * | 1996-03-21 | 1999-05-18 | Advanced Micro Devices, Inc. | Semiconductor trench isolation process resulting in a silicon mesa having enhanced mechanical and electrical properties |
JP2000508474A (ja) * | 1996-04-10 | 2000-07-04 | アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド | 改善された平坦化方法を伴う半導体トレンチアイソレーション |
US5926713A (en) * | 1996-04-17 | 1999-07-20 | Advanced Micro Devices, Inc. | Method for achieving global planarization by forming minimum mesas in large field areas |
US5899727A (en) | 1996-05-02 | 1999-05-04 | Advanced Micro Devices, Inc. | Method of making a semiconductor isolation region bounded by a trench and covered with an oxide to improve planarization |
US6090685A (en) * | 1997-08-22 | 2000-07-18 | Micron Technology Inc. | Method of forming a LOCOS trench isolation structure |
KR100390894B1 (ko) * | 1997-12-16 | 2003-10-10 | 주식회사 하이닉스반도체 | 반도체 소자의 소자 분리막 형성방법 |
WO1999067817A1 (en) | 1998-06-22 | 1999-12-29 | Applied Materials, Inc. | Silicon trench etching using silicon-containing precursors to reduce or avoid mask erosion |
US6074954A (en) * | 1998-08-31 | 2000-06-13 | Applied Materials, Inc | Process for control of the shape of the etch front in the etching of polysilicon |
EP1077475A3 (en) * | 1999-08-11 | 2003-04-02 | Applied Materials, Inc. | Method of micromachining a multi-part cavity |
US6833079B1 (en) | 2000-02-17 | 2004-12-21 | Applied Materials Inc. | Method of etching a shaped cavity |
CA2479246C (en) * | 2002-03-13 | 2017-05-09 | Laurie E. Comstock | Method for overexpression of zwitterionic polysaccharides |
US7687400B2 (en) | 2005-06-14 | 2010-03-30 | John Trezza | Side stacking apparatus and method |
US7560813B2 (en) | 2005-06-14 | 2009-07-14 | John Trezza | Chip-based thermo-stack |
US7521806B2 (en) * | 2005-06-14 | 2009-04-21 | John Trezza | Chip spanning connection |
US7838997B2 (en) | 2005-06-14 | 2010-11-23 | John Trezza | Remote chip attachment |
US7786592B2 (en) | 2005-06-14 | 2010-08-31 | John Trezza | Chip capacitive coupling |
US7534722B2 (en) * | 2005-06-14 | 2009-05-19 | John Trezza | Back-to-front via process |
US7851348B2 (en) | 2005-06-14 | 2010-12-14 | Abhay Misra | Routingless chip architecture |
US7781886B2 (en) | 2005-06-14 | 2010-08-24 | John Trezza | Electronic chip contact structure |
US8456015B2 (en) | 2005-06-14 | 2013-06-04 | Cufer Asset Ltd. L.L.C. | Triaxial through-chip connection |
US7767493B2 (en) | 2005-06-14 | 2010-08-03 | John Trezza | Post & penetration interconnection |
US7989958B2 (en) * | 2005-06-14 | 2011-08-02 | Cufer Assett Ltd. L.L.C. | Patterned contact |
US7358191B1 (en) * | 2006-03-24 | 2008-04-15 | Spansion Llc | Method for decreasing sheet resistivity variations of an interconnect metal layer |
US7687397B2 (en) | 2006-06-06 | 2010-03-30 | John Trezza | Front-end processed wafer having through-chip connections |
WO2008048925A2 (en) * | 2006-10-17 | 2008-04-24 | Cufer Asset Ltd. L.L.C. | Wafer via formation |
US7670874B2 (en) | 2007-02-16 | 2010-03-02 | John Trezza | Plated pillar package formation |
US7850060B2 (en) * | 2007-04-05 | 2010-12-14 | John Trezza | Heat cycle-able connection |
US7748116B2 (en) * | 2007-04-05 | 2010-07-06 | John Trezza | Mobile binding in an electronic connection |
US7960210B2 (en) * | 2007-04-23 | 2011-06-14 | Cufer Asset Ltd. L.L.C. | Ultra-thin chip packaging |
EP2731617A4 (en) | 2011-07-12 | 2015-07-01 | Brigham & Womens Hospital | LIPID-CONTAINING PSA COMPOSITIONS, METHODS OF ISOLATION AND METHODS OF USING SAME |
CN113637040A (zh) | 2015-08-19 | 2021-11-12 | 哈佛学院院长及董事 | 脂化psa组合物和方法 |
CA3030974A1 (en) | 2016-07-15 | 2018-01-18 | President And Fellows Of Harvard College | Glycolipid compositions and methods of use |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4704786A (en) * | 1982-08-04 | 1987-11-10 | Westinghouse Electric Corp. | Method of forming a lateral bipolar transistor in a groove |
JPS59124141A (ja) * | 1982-12-28 | 1984-07-18 | Toshiba Corp | 半導体装置の製造方法 |
JPS61140175A (ja) * | 1984-12-13 | 1986-06-27 | Semiconductor Energy Lab Co Ltd | 被膜作製方法 |
US4633290A (en) * | 1984-12-28 | 1986-12-30 | Gte Laboratories Incorporated | Monolithic CMOS integrated circuit structure with isolation grooves |
JPS61191043A (ja) * | 1985-02-20 | 1986-08-25 | Toshiba Corp | 半導体装置 |
JPS621243A (ja) * | 1985-06-27 | 1987-01-07 | Toshiba Corp | 半導体装置の製造方法 |
JPS6223128A (ja) * | 1985-07-24 | 1987-01-31 | Hitachi Ltd | 素子分離領域の形成方法 |
JPS6316751A (ja) * | 1986-07-09 | 1988-01-23 | Matsushita Electric Ind Co Ltd | 転送電話装置 |
JP2576506B2 (ja) * | 1987-05-27 | 1997-01-29 | 日本電気株式会社 | Mos半導体装置 |
JPH01286436A (ja) * | 1988-05-13 | 1989-11-17 | Fujitsu Ltd | 半導体装置の製造方法 |
JPH02309652A (ja) * | 1989-05-24 | 1990-12-25 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JPH0387045A (ja) * | 1989-06-14 | 1991-04-11 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JPH0358484A (ja) * | 1989-07-27 | 1991-03-13 | Toshiba Corp | 半導体装置とその製造方法 |
JPH03109753A (ja) * | 1989-09-25 | 1991-05-09 | Fujitsu Ltd | 半導体装置の製造方法 |
US5061652A (en) * | 1990-01-23 | 1991-10-29 | International Business Machines Corporation | Method of manufacturing a semiconductor device structure employing a multi-level epitaxial structure |
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1991
- 1991-01-16 KR KR1019910000640A patent/KR940006696B1/ko not_active IP Right Cessation
- 1991-11-04 TW TW080108644A patent/TW218051B/zh not_active IP Right Cessation
- 1991-11-28 DE DE4139200A patent/DE4139200C2/de not_active Expired - Lifetime
-
1992
- 1992-01-16 JP JP4024335A patent/JPH06105748B2/ja not_active Expired - Fee Related
- 1992-01-16 US US07/822,020 patent/US5229315A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0555364A (ja) | 1993-03-05 |
KR940006696B1 (ko) | 1994-07-25 |
US5229315A (en) | 1993-07-20 |
DE4139200A1 (de) | 1992-07-23 |
KR920015603A (ko) | 1992-08-27 |
JPH06105748B2 (ja) | 1994-12-21 |
DE4139200C2 (de) | 1993-12-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |