TW202413875A - Two-phase immersion-cooling heat-dissipation structure having fins for facilitating bubble generation - Google Patents

Two-phase immersion-cooling heat-dissipation structure having fins for facilitating bubble generation Download PDF

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TW202413875A
TW202413875A TW111135638A TW111135638A TW202413875A TW 202413875 A TW202413875 A TW 202413875A TW 111135638 A TW111135638 A TW 111135638A TW 111135638 A TW111135638 A TW 111135638A TW 202413875 A TW202413875 A TW 202413875A
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fins
fin
functional
bubble generation
heat dissipation
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TW111135638A
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Chinese (zh)
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TWI819807B (en
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吳俊德
楊景明
邱昱維
葉子暘
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艾姆勒科技股份有限公司
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Abstract

A two-phase immersion-cooling heat-dissipation structure having fins for facilitating bubble generation is provided. The structure includes a substrate and a plurality of fins. The substrate has opposite fin and non-fin surfaces. The non-fin surface is used for contacting the heat source immersed in the two-phase coolant, and the fin surface is connected with the fins. At least half of the fins are functional fins. The included angle between at least one side of the functional fin and the fin surface is between 80 and 100 degrees. The center line average roughness Ra of the one side of the functional fin is less than 3μm, and the ten point average roughness Rz of the one side of the functional fin is not less than 12μm, so that the one side of the functional fin is a smooth surface, but having many deep holes, for facilitating the generation and detachment of bubbles.

Description

具有促進氣泡生成之鰭片的兩相浸沒式散熱結構Two-phase immersion heat sink with fins to promote bubble generation

本發明涉及一種散熱結構,具體來說是涉及一種具有促進氣泡生成之鰭片的兩相浸沒式散熱結構。The present invention relates to a heat dissipation structure, and more particularly to a two-phase immersion heat dissipation structure with fins for promoting bubble generation.

浸沒式冷卻技術是將發熱元件(如伺服器、磁碟陣列等)直接浸沒在不導電的冷卻液中,以透過冷卻液吸熱氣化帶走發熱元件運作所產生之熱能。然而,如何透過浸沒式冷卻技術更加有效地進行散熱一直是業界所需要解決的問題。Immersion cooling technology is to immerse heat-generating components (such as servers, disk arrays, etc.) directly in non-conductive cooling liquid, so that the cooling liquid absorbs heat and evaporates to remove the heat energy generated by the operation of the heat-generating components. However, how to dissipate heat more effectively through immersion cooling technology has always been a problem that the industry needs to solve.

有鑑於此,本發明人本於多年從事相關產品之開發與設計,有感上述缺失之可改善,乃特潛心研究並配合學理之運用,終於提出一種設計合理且有效改善上述缺失之本發明。In view of this, the inventor has been engaged in the development and design of related products for many years and feels that the above-mentioned deficiencies can be improved. Therefore, he has conducted intensive research and applied academic theories, and finally proposed the present invention which has a reasonable design and effectively improves the above-mentioned deficiencies.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種具有促進氣泡生成之鰭片的兩相浸沒式散熱結構。The technical problem to be solved by the present invention is to provide a two-phase immersion heat dissipation structure with fins that promote bubble generation in view of the shortcomings of the prior art.

本發明實施例公開了一種具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其包括有一散熱基底、以及多個鰭片,所述散熱基底具有相對的鰭片面與非鰭片面,所述非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸,所述鰭片面連接有所述多個鰭片,並且所述多個鰭片中至少有半數以上為功能性鰭片,所述功能性鰭片至少有一側面與所述鰭片面之夾角介於80度至100度,並且所述側面的中心線平均粗糙度Ra是小於3μm、且十點平均粗糙度Rz是不小於12μm,使所述側面為平滑之平面但分佈有多個較深之孔洞,從而能促進氣泡的生成與脫離。The embodiment of the present invention discloses a two-phase immersion heat dissipation structure with fins that promote bubble generation, which includes a heat dissipation base and a plurality of fins. The heat dissipation base has a fin surface and a non-fin surface that are opposite to each other. The non-fin surface is used to form contact with a heat source immersed in a two-phase cooling liquid. The fin surface is connected to the plurality of fins, and at least half of the plurality of fins are functional fins. The functional fin has at least one side surface with an angle of 80 to 100 degrees with the fin surface, and the centerline average roughness Ra of the side surface is less than 3 μm, and the ten-point average roughness Rz is not less than 12 μm, so that the side surface is a smooth plane but has a plurality of deeper holes distributed thereon, thereby promoting the generation and separation of bubbles.

在一優選實施例中,所述側面的十點平均粗糙度Rz是大於所述側面的中心線平均粗糙度Ra的六倍。In a preferred embodiment, the ten-point average roughness Rz of the side surface is greater than six times the centerline average roughness Ra of the side surface.

在一優選實施例中,所述功能性鰭片是針柱狀鰭片或板片狀鰭片的其一。In a preferred embodiment, the functional fin is one of a needle-shaped fin or a plate-shaped fin.

在一優選實施例中,所述功能性鰭片是由銅、銅合金、鋁合金的其一金屬所製成。In a preferred embodiment, the functional fin is made of one of copper, copper alloy and aluminum alloy.

在一優選實施例中,所述側面是通過研磨及/或珠擊方式所形成。In a preferred embodiment, the side surface is formed by grinding and/or bead peening.

在一優選實施例中,所述側面是通過化學腐蝕方式所形成。In a preferred embodiment, the side surface is formed by chemical etching.

在一優選實施例中,所述側面是通過沉積方式所形成。In a preferred embodiment, the side surface is formed by deposition.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only used for reference and description and are not used to limit the present invention.

以下是通過特定的具體實施例來說明本發明所公開有關的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。並且,附圖中相同或類似的部位以相同的標號標示。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。The following is a specific embodiment to illustrate the implementation methods disclosed by the present invention. Technical personnel in this field can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments. The details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple schematic illustrations and are not depicted according to actual sizes. Please note in advance. Moreover, the same or similar parts in the drawings are marked with the same reference numerals. The following implementation methods will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention. In addition, the term "or" used herein may include any one or more combinations of the associated listed items as appropriate.

[第一實施例][First embodiment]

請參閱圖1至圖2所示,其為本發明的第一實施例,本發明實施例提供一種具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,用於接觸浸沒於兩相冷卻液中的熱源/發熱元件。如圖1所示,根據本發明實施例所提供的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其包括有一散熱基底10、以及多個鰭片20。Please refer to FIG. 1 and FIG. 2, which are the first embodiment of the present invention. The embodiment of the present invention provides a two-phase immersion heat sink structure with fins that promote bubble generation, which is used to contact a heat source/heat generating element immersed in a two-phase cooling liquid. As shown in FIG. 1, the two-phase immersion heat sink structure with fins that promote bubble generation provided by the embodiment of the present invention includes a heat sink base 10 and a plurality of fins 20.

在本實施例中,散熱基底10可採用高導熱性材所製成,例如鋁、銅或其合金。散熱基底10可以是非多孔散熱板或是多孔散熱板。較佳來說,散熱基底10可以是浸沒於兩相冷卻液900(如電子氟化液)中且孔隙率大於8%的多孔散熱板,用於增加氣泡的生成量,以加強浸沒式散熱效果。In this embodiment, the heat sink base 10 can be made of a high thermal conductivity material, such as aluminum, copper or their alloys. The heat sink base 10 can be a non-porous heat sink or a porous heat sink. Preferably, the heat sink base 10 can be a porous heat sink immersed in a two-phase cooling liquid 900 (such as an electronic fluoride liquid) with a porosity greater than 8%, which is used to increase the amount of bubble generation to enhance the immersion heat dissipation effect.

在本實施例中,散熱基底10具有相背對的鰭片面101與非鰭片面102。散熱基底10的非鰭片面102用以與浸沒於兩相冷卻液900的熱源800形成接觸,這接觸可以是直接形成接觸或是透過中介層間接形成接觸。散熱基底10的鰭片面101則連接有多個鰭片20,並且散熱基底10與鰭片20可以是以金屬射出成型(Metal Injection Molding,MIM)方式或是以鏟削成型方式(Skiving process)一體地連接、或是以焊接方式連接。並且,鰭片20可以是針柱狀鰭片(pin fin)或是板片狀鰭片(plate fin),並且可以是由銅、銅合金或鋁合金所製成。In this embodiment, the heat sink base 10 has a fin surface 101 and a non-fin surface 102 facing each other. The non-fin surface 102 of the heat sink base 10 is used to form contact with the heat source 800 immersed in the two-phase cooling liquid 900, and this contact can be formed directly or indirectly through an intermediate layer. The fin surface 101 of the heat sink base 10 is connected to a plurality of fins 20, and the heat sink base 10 and the fins 20 can be integrally connected by metal injection molding (MIM) or skiving process, or connected by welding. Furthermore, the fin 20 may be a pin fin or a plate fin, and may be made of copper, copper alloy or aluminum alloy.

在本實施例中,多個鰭片20中至少有半數以上為功能性鰭片20a,且其可位於熱源800的正上方或對應熱源800的位置。並且,功能性鰭片20a至少有一側面201與鰭片面101之夾角介於80度至100度,也就是側面201與鰭片面101呈大致垂直狀。並且,由於浸沒式散熱效果主要取決於氣泡生成之速度與多寡,因此本實施例的功能性鰭片20a的側面201的中心線平均粗糙度Ra(center line average roughness Ra)必須是小於3μm、且十點平均粗糙度Rz(ten-point average roughness Rz)必須是不小於12μm,使得功能性鰭片20a的側面201為平滑之平面但分佈有多個較深之孔洞(如圖2所示意的),以藉由較深之孔洞有利於氣泡的生成,同時藉由較平滑之平面有利於氣泡生成之後的脫離,以加強浸沒式散熱效果。In this embodiment, at least half of the multiple fins 20 are functional fins 20a, and they can be located directly above the heat source 800 or at a position corresponding to the heat source 800. In addition, at least one side surface 201 of the functional fin 20a has an angle between 80 degrees and 100 degrees with the fin surface 101, that is, the side surface 201 and the fin surface 101 are substantially perpendicular. Furthermore, since the immersion heat dissipation effect mainly depends on the speed and amount of bubble generation, the center line average roughness Ra (center line average roughness Ra) of the side surface 201 of the functional fin 20a of the present embodiment must be less than 3 μm, and the ten-point average roughness Rz (ten-point average roughness Rz) must be not less than 12 μm, so that the side surface 201 of the functional fin 20a is a smooth plane but has a plurality of deeper holes (as shown in FIG. 2 ), so that the deeper holes are conducive to the generation of bubbles, and the smoother plane is conducive to the detachment of bubbles after generation, so as to enhance the immersion heat dissipation effect.

更進一步說,本實施例的功能性鰭片側面201的十點平均粗糙度Rz必須是大於中心線平均粗糙度Ra的六倍,才能使效果更為顯著。Furthermore, the ten-point average roughness Rz of the functional fin side surface 201 of the present embodiment must be six times greater than the center line average roughness Ra to achieve a more significant effect.

在本實施例中,功能性鰭片20a的側面201可以是通過研磨方式及/或珠擊方式(shot peening)所形成,也就是可利用硬質砂粒高速撞擊功能性鰭片20a,使功能性鰭片20a形成有預定的側面201。In this embodiment, the side surface 201 of the functional fin 20a may be formed by grinding and/or shot peening, that is, hard sand particles may be used to impact the functional fin 20a at high speed, so that the functional fin 20a is formed with a predetermined side surface 201.

在本實施例中,功能性鰭片20a的側面201可以是通過化學腐蝕方式所形成。進一步說,功能性鰭片20a的側面201可以是通過化學藥劑進行化學腐蝕所形成,並且可以是通過磷酸系微蝕劑、硫酸系微蝕劑或氯化鐵腐蝕劑進行化學腐蝕所形成。In this embodiment, the side surface 201 of the functional fin 20a can be formed by chemical etching. In other words, the side surface 201 of the functional fin 20a can be formed by chemical etching using a chemical agent, and can be formed by chemical etching using a phosphoric acid-based micro-etching agent, a sulfuric acid-based micro-etching agent, or a ferric chloride-based micro-etching agent.

在本實施例中,功能性鰭片20a的側面201也可以是通過沉積方式所形成。進一步說,功能性鰭片20a的側面201可以是通過液相沉積或氣相沉積(物理或化學氣相沉積)所形成。In this embodiment, the side surface 201 of the functional fin 20a can also be formed by deposition. Specifically, the side surface 201 of the functional fin 20a can be formed by liquid phase deposition or vapor phase deposition (physical or chemical vapor phase deposition).

[第二實施例][Second embodiment]

請參閱圖3所示,其為本發明的第二實施例。本實施例與第一實施例大致相同,其差異說明如下。Please refer to FIG3 , which is a second embodiment of the present invention. This embodiment is substantially the same as the first embodiment, and the differences are described as follows.

在本實施例中,功能性鰭片20b的側面201定義出相連的第一面2011與第二面2012,第一面2011與鰭片面101之夾角介於80度至100度,第二面2012與鰭片面101之夾角小於75度,使功能性鰭片20b的側面201之第二面2012與鰭片面101之間共同形成有銳角凹口結構C。因此,本實施例的功能性鰭片20b的側面201之第二面2012與鰭片面101之間共同形成有銳角凹口結構C,以此使熱源800的傳熱路徑可受到限制,而在銳角凹口結構C的尖角處產生局部高溫,因此本實施例不僅因為局部高溫可利於氣泡生成,也因為銳角凹口結構C可增加接觸面積而利於氣泡生成。In this embodiment, the side surface 201 of the functional fin 20b defines a first surface 2011 and a second surface 2012 connected to each other, the angle between the first surface 2011 and the fin surface 101 is between 80 degrees and 100 degrees, and the angle between the second surface 2012 and the fin surface 101 is less than 75 degrees, so that a sharp-angled notch structure C is formed between the second surface 2012 of the side surface 201 of the functional fin 20b and the fin surface 101. Therefore, a sharp-angled notch structure C is formed between the second surface 2012 of the side surface 201 of the functional fin 20b of the present embodiment and the fin surface 101, so that the heat transfer path of the heat source 800 can be limited, and local high temperature is generated at the sharp corner of the sharp-angled notch structure C. Therefore, the present embodiment is not only conducive to bubble generation because of the local high temperature, but also because the sharp-angled notch structure C can increase the contact area to facilitate bubble generation.

綜合以上所述,本發明提供的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其至少可以通過「散熱基底」、「多個鰭片」、「散熱基底具有相對的鰭片面與非鰭片面,非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸,鰭片面連接有所述多個鰭片」、「多個鰭片中至少有半數以上為功能性鰭片」、「功能性鰭片至少有一側面與鰭片面之夾角介於80度至100度,並且側面的中心線平均粗糙度Ra是小於3μm、且十點平均粗糙度Rz是不小於12μm」的技術方案,使得功能性鰭片的側面為平滑之平面但分佈有多個較深之孔洞,以藉由較深之孔洞有利於氣泡的生成,同時藉由較平滑之平面有利於氣泡生成之後的脫離,得以有效的強化整體浸沒式散熱效果。In summary, the two-phase immersion heat dissipation structure with fins that promote bubble generation provided by the present invention can at least be achieved through "heat dissipation base", "multiple fins", "the heat dissipation base has a fin surface and a non-fin surface opposite to each other, the non-fin surface is used to form contact with a heat source immersed in the two-phase cooling liquid, and the fin surface is connected to the multiple fins", "at least half of the multiple fins are functional fins", "at least one side of the functional fin is connected to the fin The side angle of the fin is between 80 and 100 degrees, the centerline average roughness Ra of the side is less than 3μm, and the ten-point average roughness Rz is not less than 12μm. The technical solution makes the side of the functional fin a smooth plane but with multiple deeper holes. The deeper holes are conducive to the formation of bubbles, and the smoother plane is conducive to the detachment of bubbles after formation, so as to effectively enhance the overall immersion heat dissipation effect.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。The contents disclosed above are only preferred feasible embodiments of the present invention and are not intended to limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made using the contents of the specification and drawings of the present invention are included in the scope of the patent application of the present invention.

10:散熱基底 101:鰭片面 102:非鰭片面 20:鰭片 20a,20b:功能性鰭片 201:側面 2011:第一面 2012:第二面 C:銳角凹口結構 800:熱源 900:兩相冷卻液 10: heat dissipation base 101: fin surface 102: non-fin surface 20: fin 20a, 20b: functional fin 201: side surface 2011: first surface 2012: second surface C: sharp notch structure 800: heat source 900: two-phase cooling liquid

圖1為本發明第一實施例的結構側視示意圖。FIG1 is a schematic side view of the structure of the first embodiment of the present invention.

圖2為圖1的II部分的放大示意圖。FIG. 2 is an enlarged schematic diagram of part II of FIG. 1 .

圖3為本發明第二實施例的結構側視示意圖。FIG3 is a schematic side view of the structure of the second embodiment of the present invention.

10:散熱基底 10: Heat dissipation base

101:鰭片面 101: Fin side

102:非鰭片面 102: Non-fin side

20:鰭片 20: Fins

20a:功能性鰭片 20a: Functional fins

201:側面 201: Side

800:熱源 800: Heat source

900:兩相冷卻液 900: Two-phase cooling liquid

Claims (7)

一種具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其包括有一散熱基底、以及多個鰭片,所述散熱基底具有相對的鰭片面與非鰭片面,所述非鰭片面用以與浸沒於兩相冷卻液的熱源形成接觸,所述鰭片面連接有所述多個鰭片,並且所述多個鰭片中至少有半數以上為功能性鰭片,所述功能性鰭片至少有一側面與所述鰭片面之夾角介於80度至100度,並且所述側面的中心線平均粗糙度Ra是小於3μm、且十點平均粗糙度Rz是不小於12μm,使所述側面為平滑之平面但分佈有多個較深之孔洞,從而能促進氣泡的生成與脫離。A two-phase immersion heat dissipation structure with fins for promoting bubble generation includes a heat dissipation base and a plurality of fins. The heat dissipation base has a fin surface and a non-fin surface opposite to each other. The non-fin surface is used to form contact with a heat source immersed in a two-phase cooling liquid. The fin surface is connected to the plurality of fins, and at least half of the plurality of fins are functional fins. The functional fin has at least one side surface with an angle between 80 and 100 degrees with the fin surface, and the centerline average roughness Ra of the side surface is less than 3 μm, and the ten-point average roughness Rz is not less than 12 μm, so that the side surface is a smooth plane but has a plurality of deeper holes distributed thereon, thereby promoting the generation and separation of bubbles. 如請求項1所述的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其中,所述側面的十點平均粗糙度Rz是大於所述側面的中心線平均粗糙度Ra的六倍。A two-phase immersion heat dissipation structure with fins that promote bubble generation as described in claim 1, wherein the ten-point average roughness Rz of the side surface is greater than six times the centerline average roughness Ra of the side surface. 如請求項1所述的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其中,所述功能性鰭片是針柱狀鰭片或板片狀鰭片的其一。A two-phase immersed heat dissipation structure with fins that promote bubble generation as described in claim 1, wherein the functional fin is one of a needle-shaped fin or a plate-shaped fin. 如請求項1所述的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其中,所述功能性鰭片是由銅、銅合金、鋁合金的其一金屬所製成。A two-phase immersion heat sink structure with fins that promote bubble generation as described in claim 1, wherein the functional fins are made of one metal selected from the group consisting of copper, copper alloy, and aluminum alloy. 如請求項1所述的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其中,所述側面是通過研磨及/或珠擊方式所形成。A two-phase immersion heat dissipation structure with fins that promote bubble generation as described in claim 1, wherein the side surface is formed by grinding and/or bead peening. 如請求項1所述的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其中,所述側面是通過化學腐蝕方式所形成。A two-phase immersion heat sink structure with fins that promote bubble generation as described in claim 1, wherein the side surface is formed by chemical etching. 如請求項1所述的具有促進氣泡生成之鰭片的兩相浸沒式散熱結構,其中,所述側面是通過沉積方式所形成。A two-phase immersion heat dissipation structure with fins that promote bubble generation as described in claim 1, wherein the side surface is formed by deposition.
TW111135638A 2022-09-21 2022-09-21 Two-phase immersion-cooling heat-dissipation structure having fins for facilitating bubble generation TWI819807B (en)

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