TW202338495A - 防護膜包裝體和防護膜收容體 - Google Patents

防護膜包裝體和防護膜收容體 Download PDF

Info

Publication number
TW202338495A
TW202338495A TW112110488A TW112110488A TW202338495A TW 202338495 A TW202338495 A TW 202338495A TW 112110488 A TW112110488 A TW 112110488A TW 112110488 A TW112110488 A TW 112110488A TW 202338495 A TW202338495 A TW 202338495A
Authority
TW
Taiwan
Prior art keywords
protective film
pellicle
outgassing
packaging body
adhesive
Prior art date
Application number
TW112110488A
Other languages
English (en)
Chinese (zh)
Inventor
伊藤健
種市大樹
Original Assignee
日商三井化學股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商三井化學股份有限公司 filed Critical 日商三井化學股份有限公司
Publication of TW202338495A publication Critical patent/TW202338495A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
TW112110488A 2022-03-22 2023-03-21 防護膜包裝體和防護膜收容體 TW202338495A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022045759 2022-03-22
JP2022-045759 2022-03-22

Publications (1)

Publication Number Publication Date
TW202338495A true TW202338495A (zh) 2023-10-01

Family

ID=88101092

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112110488A TW202338495A (zh) 2022-03-22 2023-03-21 防護膜包裝體和防護膜收容體

Country Status (5)

Country Link
JP (1) JP7701554B2 (https=)
KR (1) KR20240148395A (https=)
CN (1) CN118901043A (https=)
TW (1) TW202338495A (https=)
WO (1) WO2023182314A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61203383A (ja) * 1985-02-26 1986-09-09 ホ−ヤ株式会社 基板保持構造
JPH0624837Y2 (ja) * 1988-04-06 1994-06-29 ダイセル化学工業株式会社 ペリクル収納容器
JP2005321532A (ja) 2004-05-07 2005-11-17 Shin Etsu Chem Co Ltd 基板収納ケース
JP4324944B2 (ja) 2005-06-29 2009-09-02 信越ポリマー株式会社 精密部材収納容器
JP5209423B2 (ja) 2008-09-11 2013-06-12 旭化成イーマテリアルズ株式会社 ペリクル梱包構造体
JP5767730B2 (ja) 2014-03-20 2015-08-19 旭化成イーマテリアルズ株式会社 収納容器からの大型ペリクルの取出し方法

Also Published As

Publication number Publication date
KR20240148395A (ko) 2024-10-11
JP7701554B2 (ja) 2025-07-01
JPWO2023182314A1 (https=) 2023-09-28
CN118901043A (zh) 2024-11-05
WO2023182314A1 (ja) 2023-09-28

Similar Documents

Publication Publication Date Title
CN101427358B (zh) 半导体树脂模塑用脱模膜
JP4191668B2 (ja) 積層材
JP4292361B2 (ja) 精密基板保護フィルム
JPWO2017164352A1 (ja) フィルムロール梱包体及びその製造方法
JP6760270B2 (ja) ガスバリア性皮膜形成用コーティング剤およびガスバリア性フィルム
KR20120055489A (ko) 접합구조체의 제조방법 및 접합구조체
JP2019523804A (ja) ナノ粒子充填バリア接着剤組成物
CN114716758B (zh) 异味吸附成型品树脂组合物、异味吸附成型品以及包装材料
TW202338495A (zh) 防護膜包裝體和防護膜收容體
KR102925956B1 (ko) 포장체 및 그 제조 방법
WO2017209107A1 (ja) 積層シート、包装材料、および成形品
US12035478B2 (en) Apparatus and methods for packaging electronic components using a tape having desiccant entrained polymer on a reel
TW202500479A (zh) 防護膜收納容器用夾具、防護膜收容體及防護膜
WO2021039922A1 (ja) シーラント、シリコン材料の輸送用袋及びシリコン材料の梱包体
JP7666221B2 (ja) 積層体及びその製造方法、包装体並びに包装物品
TWI225455B (en) Packing material for molding materials and parts for semiconductor manufacturing equipment
JP2014123089A (ja) 酸素透過防止膜を含むドライフィルムフォトレジスト及びその製造方法
KR101522822B1 (ko) 유기전자장치용 봉지재 및 이를 포함하는 발광장치
JP5389794B2 (ja) 薄く脆い部品の包装方法
JP2002127294A (ja) ガスバリアフィルム、及びこれを用いた積層材
JPH05221458A (ja) チップ型電子部品包装用カバーテープ
JP5034618B2 (ja) 積層包装材料
JP7120236B2 (ja) フィルムロールおよびフィルム束
JP2000025146A (ja) 高防湿性積層体
JP2022098069A (ja) 収容袋