TW202315179A - 水晶器件的製造方法 - Google Patents

水晶器件的製造方法 Download PDF

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Publication number
TW202315179A
TW202315179A TW111135224A TW111135224A TW202315179A TW 202315179 A TW202315179 A TW 202315179A TW 111135224 A TW111135224 A TW 111135224A TW 111135224 A TW111135224 A TW 111135224A TW 202315179 A TW202315179 A TW 202315179A
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TW
Taiwan
Prior art keywords
gold
layer
metal
silver
crystal device
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TW111135224A
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English (en)
Chinese (zh)
Inventor
竹内公彦
矢部裕
Original Assignee
日商聚能股份有限公司
日商昭和真空股份有限公司
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Application filed by 日商聚能股份有限公司, 日商昭和真空股份有限公司 filed Critical 日商聚能股份有限公司
Publication of TW202315179A publication Critical patent/TW202315179A/zh

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
TW111135224A 2021-09-19 2022-09-16 水晶器件的製造方法 TW202315179A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021152722 2021-09-19
JP2021-152722 2021-09-19

Publications (1)

Publication Number Publication Date
TW202315179A true TW202315179A (zh) 2023-04-01

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ID=85602864

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111135224A TW202315179A (zh) 2021-09-19 2022-09-16 水晶器件的製造方法

Country Status (4)

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JP (1) JP7433592B2 (https=)
CN (1) CN117941252A (https=)
TW (1) TW202315179A (https=)
WO (1) WO2023042834A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637522U (https=) * 1979-08-28 1981-04-09
JP4428020B2 (ja) * 2003-10-29 2010-03-10 セイコーエプソン株式会社 圧電振動片とその励振電極の構造および電極形成方法ならびに、圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2013236290A (ja) * 2012-05-10 2013-11-21 Nippon Dempa Kogyo Co Ltd 水晶振動片、水晶デバイス、及び水晶振動片の製造方法
WO2015004755A1 (ja) * 2013-07-10 2015-01-15 株式会社シンクロン 光学式膜厚計，薄膜形成装置及び膜厚測定方法
JP6787467B2 (ja) * 2019-11-15 2020-11-18 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法

Also Published As

Publication number Publication date
JP7433592B2 (ja) 2024-02-20
CN117941252A (zh) 2024-04-26
JPWO2023042834A1 (https=) 2023-03-23
WO2023042834A1 (ja) 2023-03-23

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