JPWO2023042834A1 - - Google Patents
Info
- Publication number
- JPWO2023042834A1 JPWO2023042834A1 JP2022555910A JP2022555910A JPWO2023042834A1 JP WO2023042834 A1 JPWO2023042834 A1 JP WO2023042834A1 JP 2022555910 A JP2022555910 A JP 2022555910A JP 2022555910 A JP2022555910 A JP 2022555910A JP WO2023042834 A1 JPWO2023042834 A1 JP WO2023042834A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021152722 | 2021-09-19 | ||
| JP2021152722 | 2021-09-19 | ||
| PCT/JP2022/034326 WO2023042834A1 (ja) | 2021-09-19 | 2022-09-14 | 水晶デバイスの製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023042834A1 true JPWO2023042834A1 (https=) | 2023-03-23 |
| JP7433592B2 JP7433592B2 (ja) | 2024-02-20 |
Family
ID=85602864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022555910A Active JP7433592B2 (ja) | 2021-09-19 | 2022-09-14 | 水晶デバイスの製造法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7433592B2 (https=) |
| CN (1) | CN117941252A (https=) |
| TW (1) | TW202315179A (https=) |
| WO (1) | WO2023042834A1 (https=) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5637522U (https=) * | 1979-08-28 | 1981-04-09 | ||
| JP2005136575A (ja) * | 2003-10-29 | 2005-05-26 | Seiko Epson Corp | 圧電振動片とその励振電極の構造および電極形成方法ならびに、圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP2013236290A (ja) * | 2012-05-10 | 2013-11-21 | Nippon Dempa Kogyo Co Ltd | 水晶振動片、水晶デバイス、及び水晶振動片の製造方法 |
| WO2015004755A1 (ja) * | 2013-07-10 | 2015-01-15 | 株式会社シンクロン | 光学式膜厚計，薄膜形成装置及び膜厚測定方法 |
| JP2020025344A (ja) * | 2019-11-15 | 2020-02-13 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法 |
-
2022
- 2022-09-14 JP JP2022555910A patent/JP7433592B2/ja active Active
- 2022-09-14 CN CN202280062672.8A patent/CN117941252A/zh active Pending
- 2022-09-14 WO PCT/JP2022/034326 patent/WO2023042834A1/ja not_active Ceased
- 2022-09-16 TW TW111135224A patent/TW202315179A/zh unknown
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5637522U (https=) * | 1979-08-28 | 1981-04-09 | ||
| JP2005136575A (ja) * | 2003-10-29 | 2005-05-26 | Seiko Epson Corp | 圧電振動片とその励振電極の構造および電極形成方法ならびに、圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP2013236290A (ja) * | 2012-05-10 | 2013-11-21 | Nippon Dempa Kogyo Co Ltd | 水晶振動片、水晶デバイス、及び水晶振動片の製造方法 |
| WO2015004755A1 (ja) * | 2013-07-10 | 2015-01-15 | 株式会社シンクロン | 光学式膜厚計，薄膜形成装置及び膜厚測定方法 |
| JP2020025344A (ja) * | 2019-11-15 | 2020-02-13 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7433592B2 (ja) | 2024-02-20 |
| CN117941252A (zh) | 2024-04-26 |
| TW202315179A (zh) | 2023-04-01 |
| WO2023042834A1 (ja) | 2023-03-23 |
Similar Documents
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