CN117941252A - 水晶器件的制造方法 - Google Patents

水晶器件的制造方法 Download PDF

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Publication number
CN117941252A
CN117941252A CN202280062672.8A CN202280062672A CN117941252A CN 117941252 A CN117941252 A CN 117941252A CN 202280062672 A CN202280062672 A CN 202280062672A CN 117941252 A CN117941252 A CN 117941252A
Authority
CN
China
Prior art keywords
gold
layer
metal
silver
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280062672.8A
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English (en)
Chinese (zh)
Inventor
竹内公彦
矢部裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Juneng Co ltd
Showa Shinku Co Ltd
Original Assignee
Juneng Co ltd
Showa Shinku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juneng Co ltd, Showa Shinku Co Ltd filed Critical Juneng Co ltd
Publication of CN117941252A publication Critical patent/CN117941252A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
CN202280062672.8A 2021-09-19 2022-09-14 水晶器件的制造方法 Pending CN117941252A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021152722 2021-09-19
JP2021-152722 2021-09-19
PCT/JP2022/034326 WO2023042834A1 (ja) 2021-09-19 2022-09-14 水晶デバイスの製造法

Publications (1)

Publication Number Publication Date
CN117941252A true CN117941252A (zh) 2024-04-26

Family

ID=85602864

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280062672.8A Pending CN117941252A (zh) 2021-09-19 2022-09-14 水晶器件的制造方法

Country Status (4)

Country Link
JP (1) JP7433592B2 (https=)
CN (1) CN117941252A (https=)
TW (1) TW202315179A (https=)
WO (1) WO2023042834A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637522U (https=) * 1979-08-28 1981-04-09
JP4428020B2 (ja) * 2003-10-29 2010-03-10 セイコーエプソン株式会社 圧電振動片とその励振電極の構造および電極形成方法ならびに、圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2013236290A (ja) * 2012-05-10 2013-11-21 Nippon Dempa Kogyo Co Ltd 水晶振動片、水晶デバイス、及び水晶振動片の製造方法
WO2015004755A1 (ja) * 2013-07-10 2015-01-15 株式会社シンクロン 光学式膜厚計，薄膜形成装置及び膜厚測定方法
JP6787467B2 (ja) * 2019-11-15 2020-11-18 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法

Also Published As

Publication number Publication date
JP7433592B2 (ja) 2024-02-20
TW202315179A (zh) 2023-04-01
JPWO2023042834A1 (https=) 2023-03-23
WO2023042834A1 (ja) 2023-03-23

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