TW202306010A - Transfer apparatus - Google Patents

Abstract

The present disclosure provides a transfer apparatus including: a movable placement device configured to place a first carrying sheet in a first carrying area and place a second carrying sheet in a second carrying area; a pressing member movably arranged on one side of the first carrying area away from the second carrying area and configured to press the first carrying sheet in a predetermined moving direction from the first carrying area towards the second carrying area; and a pushing device movably arranged on the side of the first carrying area away from the second carrying area. The pushing device includes a pushing member configured to pass through the pressing member in the predetermined moving direction to push a target object. The pressing member includes a sidewall of which one side away from the first carrying area having a first opening which allows the pushing device to pass through.

Description

transfer device

The present disclosure relates to the technical field of semiconductor manufacturing, and in particular, relates to a transfer device.

In the manufacturing process of semiconductors, the multiple crystal grains that have been cut will be sorted by the grain transfer mechanism according to their appearance, quality or characteristics. At present, most die transfer mechanisms use a push pin in a push device to transfer die from a film to a printed circuit board (PCB: Printed Circuit Board). However, during the transfer process, due to the large area and elasticity of the film used to carry the die, if the pushing device directly pushes the film and then pushes the die, precise alignment cannot be achieved, and crystal flipping is prone to occur Or set the skew, etc., resulting in a lower yield.

The present disclosure is made in view of the above problems, and provides a transfer device capable of achieving precise alignment, avoiding crystal flipping or placing skew, and having a high yield.

In order to solve the above problems, the present disclosure provides a transfer device, which is used to transfer at least one object on a first carrier sheet to a second carrier sheet, the transfer device includes: a mobile placement device, which is used to transfer the first object placing the carrying sheet on the first carrying area and placing the second carrying sheet on the second carrying area, so that the first carrying sheet and the second carrying sheet are spaced apart from each other and can be relatively translated; the pressing member is movable is arranged on the side of the first carrying area away from the second carrying area, and the pressing member is used to press the first carrying sheet along the preset moving direction, so that the to-be-pressed side of the first carrying sheet The setting area of the pushed target is close to the second carrying sheet, the preset moving direction is the direction of the first carrying area towards the second carrying area; and a pushing device, which is movably arranged On the side of the first loading area away from the second loading area, the pushing device includes a pushing piece, and the front end of the pushing piece is used to pass through the pressing part along the preset moving direction. to push the target, wherein the pressing member includes a side wall, and a first notch is opened on the side of the side wall away from the first bearing area, and the first notch is used for the pushing device through.

In one embodiment, the pressing member forms a second notch, and the second notch is disposed on a side of the pressing member close to the first bearing area.

In one embodiment, the pressing member further includes a pressing ring and a mounting portion, the pressing ring defines the second notch, the mounting portion is arranged opposite to the pressing ring, the mounting portion and the The pressing rings are respectively arranged on both sides of the side wall.

In one embodiment, the connection between the bottom surface and the side surface of the pressing ring is rounded.

In one embodiment, the second notch is a circular hole.

In one embodiment, a perforation is further formed on the side wall, and the perforation is disposed opposite to the first notch.

The transfer device further includes an image capturing device, which is fixedly disposed on a side of the first carrying area away from the second carrying sheet, and is used for capturing an image of the object to be pushed.

In one embodiment, when the pushing device pushes the target, the relative positions of the pushing device, the pressing member and the image capturing device are coaxial.

In one embodiment, the pushing device includes a thimble cover, and the pushing piece can protrude out of the thimble cover.

In one embodiment, the mobile placement device includes a first placement part and a second placement part, and the first placement part and the second placement part are arranged in a manner of being spaced apart from each other and capable of relative translation.

Compared with the prior art, by setting the pressing member to press the first carrier sheet, when pushing the target object, the setting area of the target object to be pushed on the first carrier sheet is close to the second carrier sheet, which is easy to push the target object. Control the tension of the setting area of the target object, and adjust the distance between the setting area of the target object to be pushed on the first carrier sheet and the second carrier sheet, so that the pushing device can accurately push the target object, Avoid crystal flipping or placement skew, etc., and the yield rate is high.

The following description contains specific information related to the exemplary embodiments in this disclosure. The drawings in this disclosure and their accompanying detailed description are exemplary embodiments only. However, the present disclosure is not limited to such exemplary embodiments. Other variations and embodiments of the present disclosure will occur to those skilled in the art. Unless otherwise stated, identical or corresponding elements in the figures may be indicated by identical or corresponding reference numerals. Furthermore, the drawings and illustrations in this disclosure are generally not drawn to scale and are not intended to correspond to actual relative dimensions.

For purposes of consistency and ease of understanding, like features (although in some instances they are not) have been labeled by reference numerals in the exemplary figures. However, features in different implementations may differ in other respects and therefore should not be narrowly limited to those shown in the drawings.

The terms “first”, “second” and “third” in the description of the present disclosure and the above drawings are used to distinguish different items, rather than to describe a specific order. Furthermore, the term "comprise", as well as any variations thereof, is intended to cover a non-exclusive inclusion.

Hereinafter, the present disclosure will be described in detail with reference to the drawings and embodiments.

1 to 4, an embodiment of the present disclosure provides a transfer device 100, including a base 10, a moving and placing device 20, a pushing device 30, a pressing member 40, and an image capturing device 50, wherein the moving and placing device 20, The pushing device 30 , the pressing member 40 and the image capturing device 50 are all disposed on the base 10 .

The transfer device 100 in this embodiment is used to transfer at least one target object 200. In this embodiment, the target object 200 is described by taking a crystal grain as an example. In other embodiments, the transfer device 100 can also be used to transfer other objects. , are not limited here. Specifically, the transfer device 100 is used to set the first carrier sheet 60 and the second carrier sheet 70 on the mobile placement device 20, and place the first carrier sheet 60 on the first carrier sheet 60 through the pushing device 30, the pressing member 40 and the image capture device 50. The target object 200 is transferred to the second carrier sheet 70 .

In this embodiment, the surface of the first carrying surface 60 facing the second carrying sheet 70 is used to place at least one target object 200, specifically, the first carrying sheet 60 has a carrying surface 61 for carrying the target object 200 and a The bearing surface 61 is opposite to the contact surface 62 , and the bearing surface 61 faces the second bearing sheet 70 . The second carrier sheet 70 has a setting surface 71 for setting the target object 200 , and the setting surface 71 faces the first carrier sheet 60 .

It can be understood that, when the pushing member 31 pushes the target object 200 without piercing the first carrier sheet 60, the viscosity of the first carrier sheet 60 may be reduced due to the stretching of the surface of the first carrier sheet 60. When the viscosity of the carrying surface 61 is lower than that of the installation surface 71 , the target object 200 is more likely to detach from the first carrying sheet 60 and stick to the second carrying sheet 70 . Certainly, in other periods, for example, when the pressing member 30 described later does not press the first carrying sheet 60 , the viscosity of the carrying surface 61 may not be lower than that of the setting surface 71 , which is not limited here.

In this embodiment, the second carrier sheet 70 may be a printed circuit board (PCB), and an adhesive layer, such as glue, may be formed on the printed circuit board. In this embodiment, the target object 200 ie the crystal grain is taken as an example of a light-emitting diode crystal grain, and the first carrying sheet 60 and the second carrying sheet 70 are described by taking a blue tape as an example. In this embodiment, the first carrying piece 60 is fixed by an expand ring 63 , the expanding ring 63 includes an inner ring 631 and an outer ring 632 , and the periphery of the first carrying piece 60 passes through the inner ring 631 and the outer ring 632 fixed.

It can be understood that the peripheral edge of the first carrier sheet 60 is stretched by the expansion ring 63 , so that the first carrier sheet 60 expands to reduce its viscosity, so as to facilitate the subsequent transfer of the target object 200 .

Certainly, in other implementation manners, the first carrying sheet 60 may also be fixed and stretched through other structures, which is not limited herein.

The mobile placement device 20 includes a first placement part 21 and a second placement part 22 that are spaced apart from each other and can be relatively translated. The first placement part 21 and the second placement part 22 are used to place the first carrier sheet 60 and the second carrier sheet 70 respectively. , so that the first carrying sheet 60 and the second carrying sheet 70 are spaced apart from each other and can relatively translate, and the target object 200 on the first carrying sheet 60 is located between the first carrying sheet 60 and the second carrying sheet 70 .

Please refer to FIGS. 1 to 3 in combination. In this embodiment, the first placing part 21 has a first carrying area 23 for placing the first carrying sheet 60, and the second placing part 22 has a second carrying area 24 for The second carrier sheet 70 is placed. In this embodiment, the first carrying area 23 is an area that is consistent with the plane where the first carrying sheet 60 is located when the first carrying sheet 60 is placed on the first placement part 21, and the second carrying area 24 is the area on the first placing portion 21. When the second carrying sheet 70 is placed on the second placing portion 22 , it is in an area consistent with the plane where the second carrying sheet is located. In other words, each of the first carrying area 23 and the second carrying area 24 is defined as a virtual plane area, respectively used to reflect the positions of the first carrying sheet 60 and the second carrying sheet 70 when placed on the mobile placement device 20 . Therefore, it can be understood that when the moving placement device 20 changes the position of the first carrying sheet 60 and/or the second carrying sheet 70 , the positions of the first carrying area 23 and the second carrying area 24 will also change accordingly.

Further, the first placement part 21 is disposed on one side of the base 10, the first placement part 21 includes a first base 211 and a carrier plate 212, the first base 211 can be positioned in the first direction X relative to the base 10 Arranged to move, the carrier plate 212 is arranged on the first base 211 to be movable in the second direction Y, so that the target object 200 on the expansion ring 63 can move back and forth along the first direction X and the second direction Y, Therefore, it is convenient to place, take, and translate the expansion ring 63 .

The second placement part 22 is disposed on the other side of the base 10, the second placement part 22 includes a second base 221 and a clamping member 222, the second base 221 can move in the first direction X relative to the base 10 The clamping part 222 is used to clamp the second carrying sheet 70, and the clamping part 222 is arranged on the second base 221 so as to be movable in the second direction Y, so that the second carrying sheet 70 can move along the first The direction X and the second direction Y move back and forth, so as to facilitate placing, picking up and translating the second carrier sheet 70 .

The pushing device 30 is movably disposed on a side of the first carrying area 23 away from the second carrying piece 70 . In this embodiment, the pushing device 30 is movable in a horizontal plane and/or a vertical plane. Specifically, before pushing the target object 200, the pushing device 30 is located at the pushing preparation position, and when the target object 200 to be pushed is to be pushed, the pushing device 30 moves from the pushing preparation position to the pushing working position , after the pushing action ends, the pushing device 30 returns from the pushing working position to the pushing ready position, so that it moves back and forth. In this embodiment, the target object 200 refers to the crystal grains carried on the first carrier sheet 60, and the target object 200 to be pushed refers to the crystal grains on the first carrier sheet 60. When pushing the working position, the crystal grains located directly below the pushing member 31, the pushing preparation position refers to the preset initial position of the pushing device 30, and the pushing working position refers to the position where the pushing device 30 pushes the target 200. location.

Specifically, the pushing device 30 includes a pushing piece 31 and a thimble cover 32. The pushing piece 31 can protrude out of the cavity 320 of the thimble cover 32 to push the target 200, so that the object 200 on the first carrier sheet 60 The object 200 is transferred to the second carrier sheet 70 . In this embodiment, the pushing member 31 may be a needle.

Specifically, when the pusher 31 is about to push the target 200, the cavity 320 of the thimble cover 32 becomes a vacuum state, so that the bottom of the thimble cover 32 will absorb the first carrier sheet 60, so that the bottom of the thimble cover 32 Contact with the contact surface 62 of the first carrier sheet 60, then the pusher 31 stretches out of the ejector cover 32 and pushes the target object 200, so as to transfer the target object 200 from the first carrier sheet 60 to the second carrier sheet 70, after that, The pusher 31 returns to the ejector cover 32 . It can be understood that by disposing the ejector 31 protrudingly in the ejector cover 32 , when the ejector 31 pushes the target 200 , the bottom of the ejector cover 32 contacts the contact surface 62 of the first bearing sheet 60 , Therefore, it is possible to prevent the first carrier sheet 60 from being adhered to the front end of the pushing member 31 to be deflected, so that the pushing efficiency can be effectively improved.

Further, please refer to FIG. 5 , the pressing member 40 is movably disposed on the side of the first carrying area 23 away from the second carrying area 24 , and is used to press the first carrying sheet 60 so that the first carrying sheet 60 The setting area of the object 200 to be pushed is close to the second carrying sheet 70 .

It can be understood that, in this embodiment, the pressing member 40 can move in a vertical plane.

Specifically, before pushing the target object 200, the pressing member 40 is located at the pressing ready position, and when the target object 200 is to be pushed, the pressing member 40 moves from the pressing ready position to the pressing working position until the first carrier sheet 60 After all the objects 200 are transferred to the second carrier sheet 70, the pressing member 40 returns from the pressing working position to the pressing ready position. Of course, after pushing one (or several) targets 200 each time, the pressing member 40 may return from the pressing working position to the pressing preparation position, which is not limited. The pressing ready position refers to the default initial position of the pressing member 40 , and the pressing working position refers to the position where the pressing member 40 presses the first carrier sheet 60 .

Of course, in other embodiments, the pressing member 40 can also move in the horizontal plane and the vertical plane, which is not limited here.

It can be understood that, in this embodiment, it is only necessary to ensure that the area of the first carrying sheet 60 in contact with the pressing piece 40 , that is, the area corresponding to the pushing target 200 pushed by the pushing device 30 , moves toward the second under the pressing action of the pressing piece 40 . The carrier sheet 70 only needs to be close to each other, which is not limited here.

Specifically, please refer to FIG. 5 to FIG. 8 , the pressing member 40 forms a second notch 411 , and the second notch 411 is provided on the side of the pressing member 40 close to the first bearing area 23 for the push of the pushing device 30 . The front end of the pusher 31 passes along a preset moving direction to push at least one target 200 . In this embodiment, the second notch 411 is used for passing through the bottom of the ejector pin cover 32 and the ejector 31 . In this embodiment, the preset moving direction is the third direction Z described later, which can also be said to be the direction in which the first carrying area 23 faces the second carrying area 24 . Of course, in other implementation manners, corresponding adjustments can be made according to requirements, which is not limited here.

Further, the second notch 411 can be a closed notch, such as an "O" shape, a "mouth" shape, and the like. In other implementation manners, the second notch 411 may also be an open notch, such as a "C" or "ㄈ" shape. In this embodiment, the second notch 411 is a round hole, that is, an "O" shape. In some embodiments, although the second notch 411 is generally a circular hole or other closed notch, the edge of the second notch 411 may include one or more cutouts. Furthermore, taking the case where the edge of the second notch 411 has a notch as an example, the second notch 411 will be in the shape of a "C", and so on. Certainly, in other implementation manners, the second notch 411 may also have other shapes, which are not limited here.

Further, the pressing member 40 includes a pressing ring 41 , a side wall 42 and a mounting portion 43 , and the pressing ring 41 defines a second notch 411 .

It can be understood that the diameter of the second notch 411 is not particularly limited, as long as at least part of the pushing device 30 can be allowed to pass through, in this embodiment, the second notch 411 allows the bottom of the thimble cover 32 of the pushing device 30 to pass through, It is enough that the pushing member 31 pushes the target 200 without hindering it. More specifically, the diameter of the second notch 411 is greater than 6 mm. In a preferred embodiment, the diameter of the second notch 411 is 16 mm. In addition, in a specific embodiment, the inner diameter D1 of the pressing ring 41 is 13.5 mm, and the outer diameter D2 is 16.0 mm. In some embodiments, the inner diameter ranges from about 8 mm to 20 mm, and the ring width D3 of the pressing ring 41 ranges from about 1 mm to 2 mm.

It can be understood that by setting the diameter of the second notch 411 to allow the bottom of the thimble cover 32 to pass through, it is possible to reduce the friction between the first bearing piece 60 and the pressing ring 41 when the expansion ring 63 moves horizontally, and make the second gap 411 The tension in the area of a carrier sheet 60 that is in contact with the pressing member 40 is more stable. Of course, the diameter of the pressing ring 41 can be adjusted accordingly according to requirements, which is not limited here.

Further, the connection between the bottom surface 412 of the pressing ring 41 and the side surface 413 forms a rounded corner (R corner), and the arc angle of the R corner is, for example, 0.5 mm, so as to prevent the bottom surface 412 of the pressing ring 41 from contacting the first bearing The sheet 60 contacts, and the first carrier sheet 60 is scratched when the first carrier sheet 60 moves horizontally. In other embodiments, if the first carrying sheet 60 can withstand the friction of the pressing ring 41 moving on it without being scratched, it is also allowed to form the connection between the bottom surface 412 and the side surface 413 of the pressing ring 41 into other shapes. , such as an obtuse angle.

In this embodiment, the side wall 42 is disposed on the pressing ring 41 , and the side wall 42 is a hollow structure. Specifically, a first notch 420 is formed on the side of the side wall 42 away from the first carrying area 23 , and the first notch 420 allows the pushing device 30 to pass through. Specifically, the pushing device 30 passes through to move back and forth from the pushing ready position to the pushing working position.

It can be understood that the size of the first notch 420 is not limited, as long as it does not prevent the pushing device 30 from passing through the first notch 420 to and from the pushing ready position and the pushing working position. In this embodiment, the first notch 420 runs through both sides of the side wall 42 , that is, the first notch 420 extends from the side of the side wall 42 away from the pressing ring 41 to the pressing ring 41 .

In this embodiment, the preset moving direction is the longitudinal direction (or the length direction of the pusher 31 ), of course, in other embodiments, it can be adjusted according to requirements, which is not limited here.

Further, the side wall 42 is also provided with a through hole 422 . The through hole 422 is opposite to the first notch 420 .

In this embodiment, the mounting portion 43 is substantially in the shape of a “C”, and the mounting portion 43 is disposed opposite to the pressing ring 41 and respectively disposed on both sides of the side wall 42 .

Further, a plurality of mounting holes 430 are opened on the mounting portion 43 for mounting on the base 10 through a fixing mechanism (not shown). In this embodiment, the thickness of the mounting portion 43 increases with distance from the side wall 42 , so as to open mounting holes 430 on the mounting portion 43 to be mounted on the base 10 .

It can be understood that by setting the mounting portion 43 into a C-shape, one side of the pressing member 40 is provided with a side wall 42, while the other side is not provided with a first notch 420 for the pushing device 30 to pass through and move to the top. The push working position is directly above the position where the target object 200 is pushed. In addition, the first notch 420 is disposed opposite to the through hole 422 in the side wall 42 , so that the light sources (not shown) on both sides pass through the first notch 420 and the through hole 422 respectively, thereby facilitating lighting during image capturing.

Further, before the pressing member 40 presses the first carrying sheet 60 , the distance between the first carrying sheet 60 and the second carrying sheet 70 is a predetermined value, for example, 1.5 mm. The pressing member 40 can move along the third direction Z and press the first carrying piece 60 to further fine-tune the distance between the first carrying piece 60 and the second carrying piece 70 . For example, when the pressing member 40 presses the first carrying sheet 60, the pressing member 40 can press down along the third direction Z, so that the setting area of the target object 200 to be pushed on the first carrying sheet 60 and the second carrying sheet The distance between 70 is shortened to a specific value, such as 0.5 mm or less, such as 0.2 mm, 0.4 mm, etc.

Of course, in other embodiments, the pressing member 40 can also adopt other structures, as long as it can be pressed to the first carrying sheet 60, so that the setting area of the target object 200 to be pushed on the first carrying sheet 60 faces toward the second carrying sheet. 70 can be close, and its specific structure is not limited.

The image capturing device 50 is fixedly arranged on the base 10 through the fixing element 51 and is located on the side of the first carrying area 23 away from the second carrying area 24 for capturing an image of the object 200 to be pushed. For the fixing element 51 , a known fixing structure can be used, which will not be repeated here.

The setting of the image capture device 50 is not particularly limited, as long as it is set corresponding to the target object 200 and can capture an image of the target object 200 . In this embodiment, the image capturing device 50 may be a video camera (CCD), but is not limited thereto.

When pushing the target object 200, the relative position between the image capturing device 50 and the pushing device 30 is coaxial, and before the pushing device 30 pushes the target object 200, the image capturing device 50 can be used to take pictures and capture images. Then accurately calculate the position of the target object 200, thereby moving the target object 200 to be pushed to the center of the pushing device 30, that is, the target object 200 to be pushed, the pushing device 30, the pressing member 40 and the image capture device The relative positions between 50 are coaxial to ensure the positional accuracy of each target object 200 to be pushed and the push member 31 in the push device 30 can be pushed to the center of the target object 200, because the target object 200 is a crystal grains, small volume, about 0.08~0.15mm cuboid, if the push piece 31 deviates more than 0.01mm, it will easily lead to crystal flipping or lowering skew during the pushing process.

Preferably, in this embodiment, the image capturing device 50 captures an image of the target object 200 by directly and orthoscopically capturing an image.

In this embodiment, the pushing device 30, the pressing member 40 and the image capturing device 50 are on the same side. Of course, in other embodiments, the pushing device 30, the pressing member 40 and the image capturing device 50 may also be located on different sides. , as long as the pushing device 30 and the pressing member 40 are arranged on the same side. For example, the pushing device 30 and the pressing member 40 are located on a side different from the image capturing device 50. At this time, the image capturing device 50 is located on the side of the second carrying area 24 away from the first carrying sheet 60, and the pushing The device 30 and the pressing member 40 are located on a side of the first carrying sheet 60 away from the second carrying area 24 .

It can be understood that when the pushing device 30 is at the pushing ready position, the pushing device 30 will not affect the image capturing device 50 capturing the image of the target 200 in the pressing member 40 . The purpose of the pushing device 30 moving between the pushing ready position and the pushing working position is that the image capturing device 50 can easily capture the image of the target object 200 without additional optical reflection.

Please refer to (a) to (d) of FIG. 9 to further describe the action flow of the transfer device 100 moving and transferring the die.

Please refer to (a) of FIG. 9 , the image capture device 50 captures an image, and calculates the positional deviation d1 between the die 1 and the pushing position O, and the positional deviation d2 between the die 1 and the die 2 . It can be understood that the pushing position O is always kept constant, the position deviation d1 is the distance between the center of the grain 1 and the pushing position O, and the position deviation d2 is the distance between the center of the grain 1 and the center of the grain 2 distance. The positional deviation d2 may also be called pitch.

Next, referring to (b) of FIG. 9 , the die 1 is moved to the pushing position O according to d1. It can be understood that moving the die 1 to the pushing position O refers to moving the first carrier sheet 60 so that the die 1 overlaps the pushing position O, and the same is true for moving the die 2 to the pushing position O below. .

Next, the pushing device 30 moved from the pushing ready position to the pushing working position pushes the die 1 to transfer the die 1 from the first carrier 60 to the second carrier 70 .

Please refer to (c) of FIG. 9 , after pushing the die 1 to the second carrier 70 , the moving and placing device 20 moves the first carrier 60 according to d2 to move the die 2 to the pushing position O. However, since the pushing device 30 pushes the die 1, no matter whether the first carrier sheet 60 is punctured during the push, the tension or other characteristics of the first carrier sheet 60 may be changed, so that the first carrier sheet The positions of other dies (eg die 2, die 3) on 60 are changed. Therefore, if the die 2 is moved only according to d2, it may not be possible to move the die 2 to the pushing position O accurately. As shown in (c) of FIG. 9 , moving the die 2 by d2 alone cannot align the die 2 with the pushing position O accurately.

Next, similar to the action of (a) in FIG. 9 , the image capture device 50 captures the image of the die 2 and calculates the positional deviation between the die 2 and the pushing position O, and the position deviation between the die 2 and the next position. The positional deviation (ie, pitch) between the grains to be pushed (for example, grain 3). It should be noted that after pushing the die 1 , the pushing device 30 returns from the pushing working position to the pushing preparation position, so as not to hinder the image capturing device 50 from taking an image of the die 2 .

Afterwards, please refer to (d) of FIG. 9, similar to the action of (b) in FIG. The chip 60 is used to fine-tune the position of the die 2 so that the die 2 is precisely located at the pushing position O. The pushing device 30 will enter the pushing working position again from the pushing ready position to push the die 2 .

The actions of (a) to (d) in FIG. 9 above generally include the "image capture stage" in which the image capture device 50 captures the image of the die, and accurately moves the die to the "center ( center) positioning stage”, the “push pushing stage” of pushing the die to the second carrier 70, and the “pitch positioning stage” of moving the next die according to the pitch obtained in the imaging stage. In some embodiments, the above four stages can be executed sequentially and repeatedly to transfer the die on the first carrier 60 to the second carrier 70 one by one.

The transfer device 100 also includes a first driving device 80 for controlling the movement of the pressing member 40 in the vertical plane. More specifically, the first driving device 80 is used to control the pressing member 40 to move in the third direction Z (ie, the preset moving direction).

Further, the pressing member 40 can also move in the horizontal plane and the vertical plane under the control of the first driving device 80 . It can be understood that the pressing member 40 can move in a horizontal plane, so as to maintain or replace the pressing member 40 . In other words, in addition to moving along the vertical plane (that is, the plane including the first moving direction), the pressing member 40 is also allowed to move on the horizontal plane (such as moving from the maintenance position to the pressing preparation position, or returning from the pressing preparation position to the maintenance position), so as to facilitate Personnel repair or replace the pressing member 40 .

More specifically, after the expansion ring 63 is placed on the carrier tray 212, when the target object 200 on the first carrier sheet 60 is to be pushed, the pressing member 40 moves to the first position under the control of the first driving device 80. On the carrier sheet 60 and press the first carrier sheet 60, so that the setting area of the target object 200 to be pushed by the first carrier sheet 60 approaches the second carrier sheet 70, and keep pressing the first carrier sheet 60 until the first All the objects 200 on the carrying sheet 60 are transferred to the second carrying sheet 70 , and are moved to the pressing ready position under the control of the first driving device 80 . After the operator replaces the next expansion ring 63, the above actions are repeated.

The transfer device 100 also includes a second driving device 90, which is used to control the pushing device 30 to move along a specific trajectory. The specific trajectory may correspond to a position change of the pushing device 30 in the first direction X, the second direction Y, and/or the third direction. For example, the specific trajectory may be roughly arc-shaped. However, the present disclosure is not limited thereto, and the specific track can also be straight or in other shapes, as long as the specific track can allow the pushing device 30 to move back and forth in different specific positions (for example, the pushing preparation position, the pushing working position etc.) can be.

It can be understood that after the image capture device 50 captures the image of the object 200 to be pushed, the second driving device 90 controls the pushing device 30 to move from the pushing ready position to the pushing working position, and the pushing member 31 passes through the pushing position. After the object 200 is pushed by the part 40, the pushing device 30 returns to the pushing ready position from the pushing working position, and after the image capture device 50 takes an image of the next target 200 to be pushed, the second driving device 90 again controls the pushing device 30 to move from the pushing ready position to the pushing working position, and repeats this, so as to transfer the target object 200 on the first carrying sheet 60 to the second carrying sheet 70 .

The first carrier sheet 60 for placing the target object 200 has a relatively large area, and the tension is not easy to control when the pushing member 31 directly pushes the target object 200 on the first carrier sheet 60 , and easily spreads to the entire first carrier sheet 60 . However, in this embodiment, when pushing the target object 200, the pressing member 40 moves to contact with the contact surface 62 of the first carrier sheet 60 and presses the first carrier sheet 60, so that the object to be pushed by the first carrier sheet 60 The installation area of the target object 200 is close to the second bearing sheet 70 , so that the change of tension is not easy to spread to the whole first bearing sheet 60 , so it is easy to control the tension of the installation area of the object 200 to be pushed.

Further, due to material, processing and other reasons, the distance between the first carrier sheet 60 and the second carrier sheet 70 is relatively large, usually, the distance between the first carrier sheet 60 and the second carrier sheet 70 reaches more than 1.5mm, In the preferred working distance, that is, in the preferred solution, the distance between the first carrier sheet 60 and the second carrier sheet 70 needs to be less than 0.5 mm. In this embodiment, by setting the pressing member 40 to press the first carrier sheet 60, the setting area of the target object 200 to be pushed on the first carrier sheet 60 is approached to the second carrier sheet 70, so that the first carrier sheet 60 The distance between the setting area of the object 200 to be pushed and the second carrier sheet 70 is within a predetermined range, for example, less than 0.5 mm, so that the pushing member 31 pushes the object 200 . In this way, the distance between the first carrying piece 60 and the second carrying piece 70 can be effectively controlled by providing the pressing member 40 . Certainly, the distance between the setting area of the object 200 to be pushed on the first carrying sheet 60 and the second carrying sheet 70 can be adjusted accordingly according to requirements, which is not limited here.

In this embodiment, since the expansion ring 63 is usually placed manually and fixed by a fixed structure, in addition, there may also be tolerances when the inner ring 631 and the outer ring 632 in the expansion ring 63 are combined. 63 itself to achieve height control, so as to fine-tune the distance between the first carrier sheet 60 and the second carrier sheet 70, it requires higher cost.

This is because except that the area of the entire expansion ring 63 is large and difficult to control, it is difficult to ensure that the positions of the expansion ring 63 are placed manually, that is, there are differences in the placement positions of the expansion ring 63 at each stage, and it is difficult to place the first bearing The heights of the sheets 60 are adjusted to be consistent, so it is difficult to ensure the distance between the first carrier sheet 60 and the second carrier sheet 70 . However, in this embodiment, the first bearing sheet 60 is pressed by the pressing member 40, since the pressing working position of the pressing member 40 is fixed, so even if there is a difference in the placement position of the expansion ring 63 at each stage, through Pressing by the pressing member 40 can make the distance between the setting area of the object 200 to be pushed on the first carrying sheet 60 consistent with that of the second carrying sheet 70 , that is, height control can be easily realized.

For example, in the absence of the pressing member 40, it is assumed that the first carrier sheet 60 is not completely parallel to the second carrier sheet 70 when initially manually placed, for example, the left side of the first carrier sheet 60 is higher than the right side. When the target object 200 is on the left side of the first carrier sheet 60, the distance between the first carrier sheet 60 on the left side and the second carrier sheet 70 is relatively large; The distance between the second bearing sheet 70 is small, so even if the pushing device 30 pushes the target object 200 at the same position, that is, the pushing path is the same, the result of pushing will be different, that is to say, the two In both cases, the distance that the target object 200 moves to the second carrier sheet 70 after pushing the target object 200 is different. By setting the pressing member 40 to press the first carrier sheet 60, even if the above situation occurs, it can be ensured that when the left and right target objects 200 are pushed, the target objects 200 move to the second carrier sheet 70 at the same distance.

Moreover, industrial CCDs do not usually have an autofocus function due to the need for high-speed imaging. By setting the pressing ring 41 to press the first carrier sheet 60, the setting of the target object 200 to be pushed by the first carrier sheet 60 The area is kept at a fixed position and a fixed focal length can be maintained, so that the CCD can take images quickly and clearly.

In addition, after pushing the target object 200, the pushing device 30 moves to the pushing preparation position, so that the image capture device 50 can capture an image to locate the next target object 200 to be pushed, because the first carrier 60 is an elastic film, and as time and the number of objects 200 vary, it is easy to cause positional deviation of the first carrier sheet 60, but in this embodiment, by setting the pressing member 40 to press the first carrier sheet 60, it can effectively Make the first carrying sheet 60 move smoothly on the horizontal plane, so as to avoid the above situation.

Hereinafter, the method of transferring the target object 200 by the transferring device 100 of this embodiment will be described with reference to FIGS. 10 to 16 .

When using the transfer equipment 100 shown in FIG. 1 to carry out the picking process of the target object 200, an embodiment of the method for transferring the target object 200 in the present disclosure includes the following steps. It should be noted that the preparation and placement of the target object can be It is carried out by known techniques, therefore, it will not be repeated here.

First, please refer to FIG. 10 , the first carrying sheet 60 and the second carrying sheet 70 provided with the target object 200 are arranged on the first placement part 21 and the second placement part 22 respectively, and the target object 200 is positioned on the first placement part. Between the carrier sheet 60 and the second carrier sheet 70 . At this time, the pushing device 30 is at the pushing preparation position, and the pressing member 40 is at the maintenance position. In this embodiment, the pushing device 30 and the pressing member 40 are located on both sides of the axis A. As shown in FIG. In other words, the push preparation position and the maintenance position are located on both sides of the axis A. In some embodiments, the thrust preparation position and the maintenance position may be other positions not on the axis A.

Next, please refer to FIG. 11 , translate the first placement part 21 and the second placement part 22, so that the target object 200 on the first carrier sheet 60 is moved to the axis A of the image capture device 50 correspondingly, and through the image capture The device 50 detects the target object 200 . At this time, the pushing device 30 is at the pushing preparation position, and the pressing member 40 is at the pressing preparation position, that is, the pressing member 40 is coaxial with the image capturing device 50 .

Next, please refer to FIG. 12 , move the pressing member 40 onto the first carrier sheet 60, and press the first carrier sheet 60, so that the setting area of the target object 200 to be pushed on the first carrier sheet 60 faces toward the second carrier sheet 60. Piece 70 is close. At this time, the pushing device 30 is at the pushing preparation position.

Next, please refer to Fig. 13~Fig. 14, move the pushing device 30 from the pushing ready position to the pushing working position, that is, let the pushing piece 31 pass through the pressing ring 41 to push the first carrier piece 60, and push up Corresponding to the target object 200, the pushed target object 200 is directly transferred and glued on the second carrier sheet 70, so as to complete the target object 200 picking process.

Next, please refer to FIG. 15 , return the push piece 31 so that the push piece 31 retracts into the thimble cover 32 , at this time, the push device 30 is at the push work position, and the pressing piece 40 presses the first carrier piece 60 .

Next, please refer to FIG. 16 , the pushing device 30 returns to the pushing ready position, the pressing member 40 presses the first carrying piece 60, and translates the first carrying piece 60 and the second carrying piece 70, so as to enter and push the next one. Flow of the object 200.

It should be particularly noted here that, with the assistance of the initial carrier sheet in the pre-processing step, when the light-emitting surface of each target object 200 is covered and arranged on the carrier surface of the first carrier sheet 60, the target object 200 is formed by the first carrier sheet 60. 60 is transferred to the second carrier sheet 70 , the light-emitting surface of the target object 200 can be exposed against the installation surface of the second carrier sheet 70 . In addition, since the light-emitting surface of the target object 200 is placed on the first carrier sheet 60 first, the position of the target object 200 on the first carrier sheet 60 is also correspondingly reversed relative to the position on the initial carrier sheet, so , before the target object 200 is transferred, according to the position of the target object 200 that has been turned upside down, the corresponding adjustment control software performs position reversal processing.

The present disclosure is not limited to the above-mentioned embodiments, and various changes can be made within the scope indicated in the claims. Embodiments obtained by appropriately combining technical means disclosed in different embodiments are also included in the technical scope of the present disclosure. Inside. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.

100:Transfer device 200: Target 10: base 20: Mobile placement device 21: The first placement department 211: The first abutment 212: carrying plate 22: The second placement department 221:Second abutment 222: clamping piece 23: The first bearer area 24:Second bearing area 30: Pushing device 31: Pusher 32: Thimble cover 320: Cavity 40: Press piece 41: Press ring 411: second gap 42: side wall 420: The first gap 422: perforation 43: Installation department 430: Mounting hole 50: Image capture device 51: Fixed components 60: The first carrier sheet 61: bearing surface 62: contact surface 63: expansion ring 631: inner ring 632: outer ring 70: Second carrier sheet 71: Set the surface 80: The first driving device 90:Second driving device A: axis X: first direction Y: the second direction Z: third direction D1: Inner diameter of the pressing ring D2: Outer diameter of the pressing ring D3: ring width of pressing ring O: push position d1: position deviation d2: position deviation 1: grain 2: grain 3: grain

In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only For some embodiments of the application, those skilled in the art can also obtain other drawings based on these drawings without creative work. FIG. 1 is a three-dimensional structure diagram of a transfer device according to an embodiment of the present disclosure. Fig. 2 is a front view of the transfer device shown in Fig. 1 . Fig. 3 is a partially enlarged view of the transfer device shown in Fig. 2 . FIG. 4 is a partially enlarged view of the transfer device shown in FIG. 3 . FIG. 5 is a top view of a pressing member in the transfer device of FIG. 1 . FIG. 6 is a three-dimensional structural view of the pressing member shown in FIG. 5 . Fig. 7 is a front view of the pressing piece shown in Fig. 5 . Fig. 8 is a side view of the pressing piece shown in Fig. 5 . (a)-(d) of FIG. 9 are schematic diagrams of the action flow for moving and transferring crystal grains. Fig. 10 is a schematic flow chart of transferring objects by the transfer device. Fig. 11 is a schematic flow chart of transferring objects by the transfer device. Fig. 12 is a schematic flow chart of transferring objects by the transfer device. Fig. 13 is a schematic flow chart of transferring objects by the transfer device. Fig. 14 is a schematic flow chart of transferring objects by the transfer device. Fig. 15 is a schematic flow chart of transferring objects by the transfer device. Fig. 16 is a schematic flow chart of transferring objects by the transfer device.

100:Transfer device

10: base

20: Mobile placement device

21: The first placement department

211: The first abutment

212: carrying plate

22: The second placement department

221:Second abutment

222: clamping piece

30: Pushing device

40: Press piece

50: Image capture device

51: Fixed components

60: The first carrier sheet

80: The first driving device

90:Second driving device

X: first direction

Y: the second direction

Claims (10)

A transfer device for transferring at least one object on a first carrier sheet to a second carrier sheet, the transfer device comprising: a mobile placing device, which is used to place the first carrying sheet on the first carrying area and place the second carrying sheet on the second carrying area, so that the first carrying sheet and the second carrying sheet face each other spaced and relatively translational; A pressing member, which is movably arranged on a side of the first carrying area away from the second carrying area, and is used for pressing the first carrying sheet along a preset moving direction, so that the first carrying sheet The setting area of the target object to be pushed on a carrier sheet is close to the second carrier sheet, and the preset moving direction is a direction from the first carrying area toward the second carrying area; and A pushing device, which is movably arranged on a side of the first bearing area away from the second bearing area, the pushing device includes a pushing piece, and the front end of the pushing piece is used to move along the passing through the pressing member in a predetermined moving direction to push the target object, Wherein, the pressing member includes a side wall, and a first notch is formed on a side of the side wall away from the first bearing area, and the first notch is used for the pushing device to pass through. The transfer device according to claim 1, wherein the pressing member forms a second notch, and the second notch is disposed on a side of the pressing member close to the first carrying area. The transfer device according to claim 2, wherein the pressing member further includes a pressing ring and a mounting portion, the pressing ring defines the second notch, the mounting portion is disposed opposite to the pressing ring, and the mounting portion The portion and the pressing ring are respectively arranged on both sides of the side wall. The transfer device according to claim 1, wherein the junction of the bottom surface and the side surface of the pressing ring is rounded. The transfer device according to claim 1, wherein the second notch is a round hole. The transfer device according to claim 1, wherein a perforation is further formed on the side wall, and the perforation is disposed opposite to the first notch. The transfer device according to claim 1, wherein the transfer device further includes an image capture device, which is fixedly arranged on the side of the first carrying area away from the second carrying area, for Push the target object to take an image. The transfer device according to claim 7, wherein when the pushing device pushes the object, the relative positions of the pushing device, the pressing member and the image capturing device are coaxial. The transfer device according to claim 1, wherein the pushing device further includes a thimble cover, and the pushing piece can protrude out of the thimble cover. The transfer device according to claim 1, wherein the mobile placement device includes a first placement part and a second placement part, and the first placement part and the second placement part are arranged in a manner that they are spaced apart from each other and can be relatively translated .

Images