TWI812980B - Transfer apparatus - Google Patents

Abstract

The present disclosure provides a transfer apparatus including: a movable placement device configured to place a first carrying sheet in a first carrying area and place a second carrying sheet in a second carrying area; a pressing member movably arranged on one side of the first carrying area away from the second carrying area and configured to press the first carrying sheet in a predetermined moving direction from the first carrying area towards the second carrying area; and a pushing device movably arranged on the side of the first carrying area away from the second carrying area. The pushing device includes a pushing member configured to pass through the pressing member in the predetermined moving direction to push a target object. The pressing member includes a sidewall of which one side away from the first carrying area having a first opening which allows the pushing device to pass through.

Description

Transfer device

The present disclosure relates to the field of semiconductor manufacturing technology, and in particular, to a transfer device.

In the semiconductor manufacturing process, multiple cut dies are sorted and sorted according to their appearance, quality or characteristics through a die transfer mechanism. Currently, most die transfer mechanisms use an ejection pin in an ejection device to transfer die from a film to a printed circuit board (PCB). However, during the transfer process, due to the large area and elasticity of the film used to carry the die, if the ejection device directly pushes the film and then the die, precise alignment cannot be achieved and crystal flipping is prone to occur. Or the placement may be skewed, resulting in lower yield.

This disclosure is completed in view of the above problems, and provides a transfer device that can achieve precise alignment, avoid flipping or placing skew, and has a high yield.

In order to solve the above problem, the present disclosure provides a transfer device for transferring at least one target object on a first carrier sheet to a second carrier sheet. The transfer device includes: a moving placement device for moving the first carrier sheet. The bearing piece is placed in the first bearing area and the second bearing piece is placed in the second bearing area, so that the first bearing piece and the second bearing piece are spaced apart from each other and can move relative to each other; the pressing member is movable is disposed on the side of the first load-bearing area away from the second load-bearing area, and the pressing member is used to press the first load-bearing piece along the preset movement direction, so that the first load-bearing piece to be lifted The setting area of the pushed target object is close to the second bearing piece, and the preset moving direction is the direction of the first bearing area toward the second bearing area; and a pushing device is movably arranged. On the side of the first load-bearing area away from the second load-bearing area, the push device includes a push piece, the front end of the push piece is used to pass through the pressing force along the preset movement direction. A piece is used to push the target object, wherein the pressing piece includes a side wall, and a first notch is opened on the side of the side wall away from the first bearing area, and the first notch is used for the pushing device to pass through.

In one embodiment, the pressing member forms a second notch, and the second notch is provided on a side of the pressing member close to the first bearing area.

In one embodiment, the pressing member further includes a pressing ring and a mounting part, the pressing ring defines the second notch, the mounting part is arranged opposite to the pressing ring, the mounting part and the Pressing rings are respectively arranged on both sides of the side wall.

In one embodiment, the connection between the bottom surface and the side surface of the pressing ring forms a rounded corner.

In one embodiment, the second notch is a circular hole.

In one embodiment, a perforation is also formed on the side wall, and the perforation is arranged opposite to the first notch.

The transfer equipment further includes an image capturing device, which is fixedly disposed on a side of the first bearing area away from the second bearing sheet, and is used for capturing an image of the target object to be pushed.

In one embodiment, when the pushing device pushes the target object, the relative positions of the pushing device, the pressing member and the image capturing device are coaxial with each other.

In one embodiment, the pushing device includes an ejector pin cover, and the pushing member can protrude from the ejector pin cover.

In one embodiment, the mobile placement device includes a first placement part and a second placement part, and the first placement part and the second placement part are spaced apart from each other and can be relatively translated.

Compared with the existing technology, by arranging a pressing member to press the first carrying piece, when pushing the target object, the setting area of the target object to be pushed is closer to the second carrying piece, making it easier to push the target object. The tension of the setting area of the target object is controlled, and the distance between the setting area of the first carrying piece for the target object to be pushed and the second carrying piece is adjusted, so that the pushing device can accurately push the target object. Avoid flipping the crystal or placing it in a skewed state, and achieve a high yield rate.

The following description contains specific information related to the exemplary embodiments of the present disclosure. The drawings and accompanying detailed description in this disclosure are merely exemplary embodiments. However, the present disclosure is not limited to these exemplary embodiments. Other variations and embodiments of the present disclosure will occur to those skilled in the art. Unless otherwise stated, the same or corresponding elements in the drawings may be designated by the same or corresponding reference numerals. Furthermore, the drawings and illustrations in the present disclosure are generally not to scale and are not intended to correspond to actual relative dimensions.

For purposes of consistency and ease of understanding, identical features are identified by reference numbers in the illustrative drawings (although in some examples they are not). However, features in different embodiments may differ in other respects and therefore should not be narrowly limited to those shown in the drawings.

The terms “first”, “second” and “third” in the description of the present disclosure and the above-mentioned drawings are used to distinguish different objects, rather than describing a specific sequence. Furthermore, the term "includes" and any variations thereof are intended to cover non-exclusive inclusion.

Below, the present disclosure will be described in detail with reference to the accompanying drawings and embodiments.

Referring to FIGS. 1 to 4 , an embodiment of the present disclosure provides a transfer device 100 , including a base 10 , a mobile placement device 20 , a pushing device 30 , a pressing member 40 and an image capture device 50 , wherein the mobile placement device 20 , The pushing device 30 , the pressing member 40 and the image capturing device 50 are all arranged on the base 10 .

The transfer device 100 in this embodiment is used to transfer at least one target object 200. In this embodiment, the target object 200 is explained by taking a grain as an example. In other embodiments, the transfer device 100 can also be used to transfer other targets. Things are not limited here. Specifically, the transfer equipment 100 is used to place the first carrier sheet 60 and the second carrier sheet 70 on the mobile placement device 20 , and move the first carrier sheet 60 onto the mobile placement device 20 through the pushing device 30 , the pressing member 40 and the image capturing device 50 The target object 200 is transferred to the second carrier sheet 70 .

In this embodiment, the surface of the first bearing surface 60 facing the second bearing sheet 70 is used to place at least one target object 200. Specifically, the first bearing sheet 60 has a bearing surface 61 for bearing the target object 200 and a The bearing surface 61 is opposite to the contact surface 62 , and the bearing surface 61 faces the second bearing piece 70 . The second carrier sheet 70 has a setting surface 71 on which the target 200 is placed, and the setting surface 71 faces the first carrier sheet 60 .

It can be understood that when the pushing member 31 pushes the target object 200 without piercing the first carrier sheet 60 , the viscosity of the first carrier sheet 60 may be reduced due to the stretching of the surface of the first carrier sheet 60 . When the viscosity of the bearing surface 61 is lower than the viscosity of the setting surface 71 , the target object 200 is easier to separate from the first bearing sheet 60 and stick to the second bearing sheet 70 . Of course, at other times, for example, when the pressing member 30 described below does not press the first carrying sheet 60, the viscosity of the carrying surface 61 may not be lower than the viscosity of the setting surface 71, which is not limited here.

In this embodiment, the second carrier sheet 70 may be a printed circuit board (PCB), and an adhesive layer, such as glue, may be formed on the printed circuit board. In this embodiment, the target object 200 , that is, the die, takes a light-emitting diode die as an example, and the first carrier sheet 60 and the second carrier sheet 70 take a blue tape as an example. In this embodiment, the first carrier piece 60 is fixed through an expansion ring 63 . The expansion ring 63 includes an inner ring 631 and an outer ring 632 . The periphery of the first carrier piece 60 passes through the inner ring 631 and the outer ring 632 . fixed.

It can be understood that the peripheral edge of the first carrier sheet 60 is stretched by the expansion ring 63, so that the first carrier sheet 60 expands and reduces its viscosity, so as to facilitate the subsequent transfer of the target object 200.

Of course, in other embodiments, the first carrier sheet 60 can also be fixed and stretched through other structures, which is not limited here.

The mobile placement device 20 includes a first placement part 21 and a second placement part 22 that are spaced apart from each other and relatively translatable. The first placement part 21 and the second placement part 22 are used to place the first carrier sheet 60 and the second carrier sheet 70 respectively. , so that the first carrying piece 60 and the second carrying piece 70 are spaced apart from each other and can move relatively translationally, and the target 200 on the first carrying piece 60 is located between the first carrying piece 60 and the second carrying piece 70 .

Please refer to FIGS. 1 to 3 . In this embodiment, the first placement part 21 has a first bearing area 23 for placing the first bearing piece 60 , and the second placement part 22 has a second bearing area 24 for placing the first bearing piece 60 . The second carrier sheet 70 is placed. In this embodiment, the first bearing area 23 is an area consistent with the plane where the first bearing piece 60 is located when the first bearing piece 60 is placed on the first placement part 21 , and the second bearing area 24 is an area on the first bearing part 21 . When the two carrying pieces 70 are placed on the second placement part 22, the area is consistent with the plane where the second carrying piece is located. In other words, the first bearing area 23 and the second bearing area 24 are each defined as a virtual plane area, respectively used to reflect the positions of the first bearing piece 60 and the second bearing piece 70 when placed on the mobile placement device 20 . Therefore, it can be understood that when the moving and placing device 20 changes the position of the first bearing piece 60 and/or the second bearing piece 70 , the positions of the first bearing area 23 and the second bearing area 24 will also change accordingly.

Further, the first placement part 21 is provided on one side of the base 10. The first placement part 21 includes a first base 211 and a bearing tray 212. The first base 211 can be positioned in the first direction X relative to the base 10. movably disposed, the bearing plate 212 is movably disposed on the first base 211 in the second direction Y, so that the target 200 on the expansion ring 63 can move back and forth along the first direction X and the second direction Y, This makes it easy to place, pick up, and translate the expansion ring 63 .

The second placement part 22 is provided on the other side of the base 10. The second placement part 22 includes a second base 221 and a clamping member 222. The second base 221 can move in the first direction X relative to the base 10. is disposed, the clamping member 222 is used to clamp the second carrying piece 70, the clamping member 222 is disposed on the second base 221 movably in the second direction Y, so that the second carrying piece 70 can move along the first The direction X and the second direction Y move back and forth, thereby facilitating placement, picking up, and translation of the second carrier sheet 70 .

The pushing device 30 is movably disposed on a side of the first bearing area 23 away from the second bearing piece 70 . In this embodiment, the pushing device 30 is movable in the horizontal plane and/or the vertical plane. Specifically, before pushing the target object 200, the pushing device 30 is located in the pushing preparation position. When the target object 200 to be pushed is pushed, the pushing device 30 moves from the pushing preparation position to the pushing working position. , after the pushing action is completed, the pushing device 30 returns from the pushing working position to the pushing preparation position, and thus moves back and forth. In this embodiment, the target object 200 refers to the die carried on the first carrier sheet 60 , and the target object 200 to be pushed refers to the die on the first carrier sheet 60 . When the ejection device 30 is located in the pusher, When the pushing working position is in place, for the die located directly below the pushing member 31, the pushing preparation position refers to the preset initial position of the pushing device 30, and the pushing working position refers to the position when the pushing device 30 pushes the target object 200. location.

Specifically, the pushing device 30 includes a pushing member 31 and a ejector pin cover 32 . The pushing member 31 can protrude out of the cavity 320 of the ejector pin cover 32 to push the target object 200 , thereby pushing the target object 200 on the first carrier sheet 60 . The target object 200 is transferred to the second carrier sheet 70 . In this embodiment, the pushing member 31 may be a needle (Needle).

Specifically, when the pusher 31 pushes the target object 200 , the cavity 320 of the ejector pin cover 32 becomes a vacuum state. In this way, the bottom of the ejector pin cover 32 will absorb the first carrier piece 60 , so that the bottom of the ejector pin cover 32 After contacting the contact surface 62 of the first carrier sheet 60, the pushing member 31 extends out of the ejector pin cover 32 and pushes the target object 200 to transfer the target object 200 from the first carrier sheet 60 to the second carrier sheet 70. After that, The push piece 31 returns to the ejector pin cover 32 . It can be understood that by disposing the pushing member 31 protrudingly inside the ejector pin cover 32, after the pushing member 31 pushes the target object 200, the bottom of the ejector pin cover 32 contacts the contact surface 62 of the first carrier piece 60, Therefore, the first carrying piece 60 can be prevented from adhering to the front end of the pushing member 31 and being deflected. In this way, the pushing efficiency can be effectively improved.

Further, please refer to FIG. 5 , the pressing member 40 is movably disposed on the side of the first bearing area 23 away from the second bearing area 24 for pressing the first bearing piece 60 so that the first bearing piece 60 is The target object 200 to be pushed is disposed close to the second carrier sheet 70 .

It can be understood that in this embodiment, the pressing member 40 can move in the vertical plane.

Specifically, before pushing the target object 200, the pressing member 40 is located in the pressing preparation position. When the target object 200 is to be pushed, the pressing member 40 moves from the pressing preparation position to the pressing working position until the first carrying piece 60 is After all the targets 200 are transferred to the second carrier sheet 70 , the pressing member 40 returns from the pressing working position to the pressing preparation position. Of course, after pushing one (or several) target objects 200 each time, the pressing member 40 may return from the pressing working position to the pressing preparation position, which is not limited. The pressing preparation position refers to the default initial position of the pressing member 40 , and the pressing working position refers to the position where the pressing member 40 presses the first carrying piece 60 .

Of course, in other embodiments, the pressing member 40 can also move in the horizontal plane and the vertical plane, which is not limited here.

It can be understood that in this embodiment, as long as it is ensured that the area of the first carrier piece 60 that is in contact with the pressing member 40 , that is, the area corresponding to the area where the pushing device 30 pushes the target object 200 , will push toward the second object 200 under the pressing action of the pressing member 40 . The carrier piece 70 only needs to be close to each other, and there is no limitation here.

Specifically, please refer to FIGS. 5 to 8 . The pressing member 40 forms a second notch 411 . The second notch 411 is provided on the side of the pressing member 40 close to the first bearing area 23 for the pushing device 30 . The front end of the pushing member 31 passes along the preset moving direction to push at least one target object 200 . In this embodiment, the second notch 411 is used for the bottom of the ejector pin cover 32 and the pusher 31 to pass through. In this embodiment, the preset movement direction is the third direction Z described below, which can also be said to be the direction in which the first bearing area 23 faces the second bearing area 24 . Of course, in other implementations, corresponding adjustments can be made according to requirements, and there is no limitation here.

Furthermore, the second gap 411 may be a closed gap, such as an "O" shape, a "mouth" shape, etc. In other embodiments, the second notch 411 may also be an open notch, for example, in the shape of a "C" or a "U". In this embodiment, the second notch 411 is a round hole, that is, in an "O" shape. In some embodiments, although the second notch 411 is generally in the shape of a circular hole or other closed notch, the edge of the second notch 411 may include one or more cuts. Furthermore, taking the case where the edge of the second notch 411 has a cutout as an example, the second notch 411 will be in a "C" shape, and so on. Of course, in other implementations, the second notch 411 can also have other shapes, which are not limited here.

Further, the pressing member 40 includes a pressing ring 41 , a side wall 42 and a mounting part 43 . The pressing ring 41 defines a second notch 411 .

It can be understood that the diameter of the second notch 411 is not particularly limited as long as it allows at least part of the ejection device 30 to pass through. In this embodiment, the second notch 411 allows the bottom of the ejector pin cover 32 of the ejection device 30 to pass through. It is sufficient that it does not hinder the pushing member 31 from pushing the target object 200 . More specifically, the diameter of the second notch 411 is more than 6 mm. In a preferred embodiment, the diameter of the second notch 411 is 16 mm. In addition, in a specific embodiment, the inner diameter D1 of the pressing ring 41 is 13.5 mm, and the outer diameter D2 is 16.0 mm. In some embodiments, the inner diameter ranges from about 8 mm to 20 mm, and the ring width D3 of the pressing ring 41 ranges from about 1 to 2 mm.

It can be understood that by setting the diameter of the second notch 411 to allow the bottom of the ejector pin cover 32 to pass through, the friction between the first carrier piece 60 and the pressing ring 41 can be reduced when the expansion ring 63 moves horizontally, and the second gap can be The tension of the area in contact with the pressing member 40 in the carrier sheet 60 is more stable. Of course, the diameter of the pressing ring 41 can be adjusted accordingly according to requirements, and is not limited here.

Further, the connection between the bottom surface 412 of the pressing ring 41 and the side surface 413 forms a rounded corner (R angle). The arc angle of the R corner is, for example, 0.5 mm, to prevent the bottom surface 412 of the pressing ring 41 from contacting the first bearing. The pieces 60 are in contact with each other, and the first carrying piece 60 is scratched when the first carrying piece 60 moves horizontally. In other embodiments, if the first carrier piece 60 can withstand the friction of the pressing ring 41 moving on it without being scratched, the connection between the bottom surface 412 and the side surface 413 of the pressing ring 41 can also be formed into other shapes. , such as an obtuse angle.

In this embodiment, the side wall 42 is provided on the pressing ring 41 and has a hollow structure. Specifically, a first notch 420 is opened on the side of the side wall 42 away from the first bearing area 23 , and the first notch 420 allows the pushing device 30 to pass through. Specifically, the pushing device 30 passes through to move back and forth from the pushing preparation position to the pushing working position.

It can be understood that the size of the first notch 420 is not limited as long as it does not prevent the ejection device 30 from passing through the first notch 420 and traveling between the ejection preparation position and the ejection working position. In this embodiment, the first notch 420 runs through both sides of the side wall 42 , that is, the first notch 420 extends from the side of the side wall 42 away from the pressing ring 41 to the pressing ring 41 .

In this embodiment, the preset movement direction is the longitudinal direction (or the length direction of the pushing member 31). Of course, in other embodiments, it can be adjusted according to needs, and is not limited here.

Further, the side wall 42 is also provided with a through hole 422 . The through hole 422 is arranged opposite to the first notch 420 .

In the present embodiment, the mounting part 43 is generally in a "C" shape. The mounting part 43 is opposite to the pressing ring 41 and is respectively arranged on both sides of the side wall 42 .

Furthermore, a plurality of mounting holes 430 are opened in the mounting portion 43 for mounting on the base 10 through a fixing mechanism (not shown). In this embodiment, the thickness of the mounting portion 43 increases away from the side wall 42 so as to open a mounting hole 430 in the mounting portion 43 for mounting on the base 10 .

It can be understood that by arranging the mounting portion 43 in a C-shape, the pressing member 40 is provided with a side wall 42 on one side, and the other side is not provided with a first gap 420 for the pushing device 30 to pass through and move to the top. The pushing working position is directly above the position of pushing target 200 . In addition, the first notch 420 is arranged opposite to the through hole 422 in the side wall 42, which facilitates the light sources (not shown) on both sides to pass through the first notch 420 and the through hole 422 respectively, thereby facilitating lighting during image capture.

Further, before the pressing member 40 presses the first carrying piece 60, the distance between the first carrying piece 60 and the second carrying piece 70 is a predetermined value, such as 1.5 mm. The pressing member 40 can move along the third direction Z and press the first carrying piece 60 to further finely adjust the distance between the first carrying piece 60 and the second carrying piece 70 . For example, when the pressing member 40 presses the first carrier sheet 60, the pressing member 40 may press down along the third direction Z, so that the area where the target object 200 is to be pushed and the second carrier sheet are disposed. The distance between 70 is shortened to a specific value, such as 0.5mm or less, such as 0.2mm, 0.4mm, etc.

Of course, in other embodiments, the pressing member 40 can also adopt other structures, as long as it can press the first carrying piece 60 so that the area of the first carrying piece 60 where the target 200 is to be pushed moves toward the second carrying piece. 70 is sufficient, and its specific structure is not restricted.

The image capturing device 50 is fixedly installed on the base 10 through the fixing element 51 and is located on the side of the first bearing area 23 away from the second bearing area 24 for capturing images of the target object 200 to be pushed. For the fixing element 51, a known fixing structure can be used, which will not be described again.

The arrangement of the image capturing device 50 is not particularly limited, as long as it is arranged corresponding to the target object 200 and can capture the image of the target object 200 . In this embodiment, the image capturing device 50 may be a camera (CCD), but is not limited thereto.

When pushing the target object 200, the relative positions of the image capturing device 50 and the pushing device 30 are coaxial, and before the pushing device 30 pushes the target object 200, the image capturing device 50 can take pictures and capture images. Then, the position of the target object 200 is accurately calculated, thereby moving the target object 200 to be pushed to the center of the pushing device 30, that is, the target object 200 to be pushed, the pushing device 30, the pressing member 40 and the image capturing device The relative positions of 50 to each other are coaxial, ensuring the position accuracy of each target 200 to be pushed and the pushing piece 31 in the pushing device 30 to push to the center of the target 200, because the target 200 is a crystal. The particles are small in size, about 0.08~0.15mm rectangular parallelepiped. If the pushing piece 31 is offset by more than 0.01mm, it will easily cause the crystal to turn over or be skewed during the pushing process.

Preferably, in this embodiment, the image capturing device 50 captures the image of the target object 200 through direct, front-view imaging.

In this embodiment, the pushing device 30 , the pressing member 40 and the image capturing device 50 are on the same side. Of course, in other embodiments, the pushing device 30 , the pressing member 40 and the image capturing device 50 can also be located on different sides. , as long as the pushing device 30 and the pressing member 40 are arranged on the same side. For example, the pushing device 30 and the pressing member 40 are located on a different side from the image capturing device 50. At this time, the image capturing device 50 is located on the side of the second bearing area 24 away from the first bearing piece 60, and the pushing device 30 is located on a side away from the first bearing piece 60. The device 30 and the pressing member 40 are located on the side of the first carrying piece 60 away from the second carrying area 24 .

It can be understood that when the pushing device 30 is in the pushing preparation position, the pushing device 30 will not affect the image captured by the image capturing device 50 of the target object 200 in the pressing member 40 . The purpose of moving the pushing device 30 between the pushing preparation position and the pushing working position is that the image capturing device 50 can easily capture the image of the target object 200 without additional optical reflection.

Please refer to (a) to (d) of FIG. 9 for further explanation of the action flow of the transfer equipment 100 to move and transfer the die.

Referring to (a) of FIG. 9 , the image capturing device 50 captures an image and calculates the positional deviation d1 between the die 1 and the ejection position O, and the positional deviation d2 between the die 1 and the die 2 . It can be understood that the pushing position O always remains unchanged. The position deviation d1 is the distance between the center of grain 1 and the pushing position O. The position deviation d2 is the distance between the center of grain 1 and the center of grain 2. distance. The position deviation d2 can also be called the grain spacing (pitch).

Next, please refer to (b) of Figure 9. According to d1, die 1 is moved to the push position O. It can be understood that moving the die 1 to the ejection position O means moving the first carrier sheet 60 so that the die 1 overlaps with the ejection position O. The same applies to moving the die 2 to the ejection position O as described below. .

Then, the ejection device 30 moved from the ejection preparation position to the ejection working position pushes the die 1 to transfer the die 1 from the first carrier sheet 60 to the second carrier sheet 70 .

Referring to (c) of FIG. 9 , after pushing the die 1 to the second carrier piece 70 , the mobile placement device 20 moves the first carrier piece 60 according to d2 to move the die 2 to the push position O. However, after the ejection device 30 pushes the die 1, regardless of whether the first carrier sheet 60 is punctured during the push, the tension or other characteristics of the first carrier sheet 60 may change, causing the first carrier sheet to change. The positions of other grains on 60 (such as grain 2 and grain 3) change. Therefore, if the die 2 is moved only based on d2, it is likely that the die 2 cannot be accurately moved to the ejection position O. As shown in (c) of Figure 9, moving die 2 by d2 alone cannot accurately align die 2 with the push position O.

Next, similar to the action in (a) in FIG. 9 , the image capturing device 50 captures the image of the die 2 and calculates the positional deviation between the die 2 and the ejection position O, as well as the positional deviation between the die 2 and the next position. The position deviation (i.e. pitch) between the grains to be pushed (for example, grain 3). It should be noted that after completing pushing the die 1 , the ejection device 30 will return from the ejection working position to the ejection preparation position to avoid hindering the image capture device 50 from capturing the image of the die 2 .

Afterwards, please refer to (d) of FIG. 9 . Similar to the action of (b) in FIG. 9 , the moving and placing device 20 moves the first bearing according to the positional deviation between the die 2 and the pushing position O calculated above. The chip 60 is used to finely adjust the position of the die 2 so that the die 2 is accurately located at the pushing position O. The pushing device 30 will again enter the pushing working position from the pushing preparation position to push the die 2 .

The above-mentioned actions in (a) to (d) of FIG. 9 generally include the "imaging stage" in which the image capturing device 50 captures images of the die, and the "center (center)" of accurately moving the die to the ejection position O based on the imaging results. center) positioning stage", the "push stage" of pushing the die to the second carrier 70, and the "pitch positioning stage" of moving the next die according to the pitch obtained in the imaging stage. In some embodiments, the above four stages can be performed sequentially and repeatedly to transfer the dies on the first carrier sheet 60 to the second carrier sheet 70 one by one.

The transfer device 100 also includes a first driving device 80, which is used to control the pressing member 40 to move in the vertical plane. More specifically, the first driving device 80 is used to control the pressing member 40 to move in the third direction Z (ie, the preset movement direction).

Furthermore, the pressing member 40 can also move in the horizontal plane and the vertical plane under the control of the first driving device 80 . It can be understood that the pressing member 40 can be moved in a horizontal plane to repair or replace the pressing member 40 . In other words, in addition to moving along the vertical plane (ie, the plane including the first moving direction), the pressing member 40 is also allowed to move on the horizontal plane (for example, moving from the maintenance position to the pressing preparation position, or returning from the pressing preparation position to the maintenance position) to facilitate The personnel repair or replace the pressing member 40 .

More specifically, after the expansion ring 63 is placed on the carrier plate 212 and the target object 200 on the first carrier sheet 60 is to be pushed, the pressing member 40 moves to the first position under the control of the first driving device 80 . on the carrier piece 60 and press the first carrier piece 60 so that the area where the target 200 is to be pushed is closer to the second carrier piece 70 , and continue to press the first carrier piece 60 until the first All the target objects 200 on the carrier sheet 60 are transferred to the second carrier sheet 70 and moved to the pressing ready position under the control of the first driving device 80 . After the operator replaces the next expansion ring 63, the above action is repeated.

The transfer device 100 also includes a second driving device 90 for controlling the pushing device 30 to move along a specific trajectory. The specific trajectory may correspond to the position change of the pushing device 30 in the first direction X, the second direction Y, and/or the third direction. For example, the specific trajectory may be roughly arc-shaped. However, the present disclosure is not limited thereto. The specific trajectory may also be in a straight line or other shape, as long as the specific trajectory allows the ejection device 30 to move back and forth to different specific positions (for example, ejection preparation position, ejection working position). etc.).

It can be understood that after the image capturing device 50 captures an image of the target object 200 to be pushed, the second driving device 90 controls the pushing device 30 to move from the pushing preparation position to the pushing working position, and the pushing member 31 passes through the pushing position. After the object 40 pushes the target object 200, the pushing device 30 returns from the pushing working position to the pushing preparation position. After the image capturing device 50 captures an image of the next target object 200 to be pushed, the second driving device 90 again controls the ejection device 30 to move from the ejection preparation position to the ejection working position, and repeats this process to transfer the target object 200 on the first carrier sheet 60 to the second carrier sheet 70 .

The area of the first carrier sheet 60 for placing the target object 200 is relatively large. When the pushing member 31 directly pushes the target object 200 on the first carrier sheet 60, the tension is not easily controlled and may easily affect the entire first carrier sheet 60. In this embodiment, when pushing the target object 200, the pressing member 40 moves to contact the contact surface 62 of the first carrying piece 60 and presses the first carrying piece 60, so that the part of the first carrying piece 60 to be pushed is The installation area of the target object 200 is close to the second supporting sheet 70 , so that the change in tension is less likely to affect the entire first supporting sheet 60 , thereby making it easy to control the tension in the installation area of the target object 200 to be pushed.

Furthermore, due to reasons such as materials and processing, the distance between the first load-bearing piece 60 and the second load-bearing piece 70 is relatively large. Usually, the distance between the first load-bearing piece 60 and the second load-bearing piece 70 reaches more than 1.5 mm. The preferred working distance, that is, in the preferred solution, the distance between the first carrying piece 60 and the second carrying piece 70 needs to be less than 0.5 mm. In this embodiment, the pressing member 40 is provided to press the first carrying piece 60 so that the area where the target 200 to be pushed is closer to the second carrying piece 70 so that the area of the first carrying piece 60 is moved closer to the second carrying piece 70 . The distance between the area where the target object 200 is to be pushed and the second carrier sheet 70 is within a preset range, for example, 0.5 mm or less, so that the pushing member 31 can push the target object 200 easily. In this way, by providing the pressing member 40, the distance between the first carrying piece 60 and the second carrying piece 70 can be effectively controlled. Of course, the distance between the area where the target object 200 to be pushed is located on the first carrier piece 60 and the second carrier piece 70 can be adjusted accordingly according to requirements, and is not limited here.

In this embodiment, since the expansion ring 63 is usually placed manually and fixed by a fixed structure, in addition, there may also be tolerances when the inner ring 631 and the outer ring 632 in the expansion ring 63 are combined. 63 itself to achieve height control to fine-tune the distance between the first carrier piece 60 and the second carrier piece 70 will require higher costs.

This is because in addition to the large area of the entire expansion ring 63 making it difficult to control, it is also difficult to ensure that the manual placement of the expansion ring 63 is consistent. That is, the placement position of the expansion ring 63 at each stage is different, and it is difficult to place the first load-bearing The heights of the pieces 60 are adjusted to be consistent. In this case, it is difficult to ensure the distance between the first carrying piece 60 and the second carrying piece 70 . In this embodiment, the first carrier piece 60 is pressed by the pressing member 40. Since the pressing working position of the pressing member 40 is fixed, even if the placement position of the expansion ring 63 in each stage is different, the first carrying piece 60 can be pressed by By pressing the pressing member 40, the distance between the installation area of the target object 200 to be pushed on the first carrying piece 60 and the second carrying piece 70 can be consistent, that is, the height control can be easily realized.

For example, in the case where the pressing member 40 is not provided, it is assumed that the first carrying piece 60 is not completely parallel to the second carrying piece 70 during the initial manual placement. For example, the left side of the first carrying piece 60 is higher than the right side. In this way, during transfer When the target object 200 is on the left side of the first carrying piece 60, the distance between the first carrying piece 60 and the second carrying piece 70 on the left side is larger. On the contrary, when the target object 200 on the right side is transferred, the distance between the first carrying piece 60 on the right side is larger. The distance to the second carrying piece 70 is small. In this way, even if the pushing device 30 pushes the target object 200 at the same position, that is, the pushing path is the same, the pushing results will be different. That is to say, the two pushing devices 30 push the target object 200 at the same position. In this case, the actual distance that the target 200 moves to the second carrier piece 70 after pushing the target 200 is different. By arranging the pressing member 40 to press the first carrier sheet 60 , even if the above situation occurs, it can be ensured that when pushing the left and right target objects 200 , the target objects 200 move to the second carrier sheet 70 by the same distance.

Moreover, since industrial CCDs require high-speed imaging, they usually do not have an auto-focus function. By setting the pressing ring 41 to press the first carrier sheet 60, the target object 200 to be pushed on the first carrier sheet 60 is set. The area remains in a fixed position and can maintain a fixed focal length, allowing the CCD to capture images quickly and with clear images.

In addition, after pushing the target object 200, the pushing device 30 moves to the pushing preparation position to allow the image capturing device 50 to capture an image to position the next target object 200 to be pushed. Because the first carrier piece 60 is an elastic film. As time and the number of targets 200 vary, it is easy to cause positional deviation of the first carrier sheet 60. However, in this embodiment, by setting the pressing member 40 to press the first carrier sheet 60, it can effectively Therefore, the first carrying piece 60 can move smoothly on the horizontal plane, thereby avoiding the above situation.

Hereinafter, the method of transferring the target object 200 in the transfer device 100 of this embodiment will be described with reference to FIGS. 10 to 16 .

When using the transfer device 100 as shown in Figure 1 to perform the picking process of the target object 200, an embodiment of the method for transferring the target object 200 of the present disclosure includes the following steps. It should be noted that the preparation and placement of the target object can be It is carried out by well-known technology, so it will not be described again here.

First, please refer to FIG. 10 , the first carrying piece 60 and the second carrying piece 70 with the target 200 are placed on the first placing part 21 and the second placing part 22 respectively, and the target 200 is placed on the first placing part 22 . between the carrying piece 60 and the second carrying piece 70 . At this time, the pushing device 30 is in the pushing preparation position, and the pressing member 40 is in the maintenance position. In this embodiment, the pushing device 30 and the pressing member 40 are located on both sides of the axis A. In other words, the push preparation position and the maintenance position are located on both sides of the axis A. In some embodiments, the ejection preparation position and the maintenance position may be other positions not on axis A.

Next, please refer to FIG. 11 in conjunction with FIG. 11 to translate the first placement part 21 and the second placement part 22 so that the target object 200 on the first carrier sheet 60 moves to the axis A of the image capture device 50 and is captured through the image capture device 50 . The device 50 detects the target object 200. At this time, the pushing device 30 is in the pushing preparation position, and the pressing member 40 is in the pressing preparation position, that is, the pressing member 40 and the image capturing device 50 are coaxial.

Next, please refer to FIG. 12 , move the pressing member 40 to the first bearing piece 60 , and press the first bearing piece 60 so that the area where the target 200 to be pushed is positioned toward the second bearing piece 60 . Piece 70 is close. At this time, the pushing device 30 is in the pushing preparation position.

Next, please refer to Figures 13 and 14 to move the pushing device 30 from the pushing preparation position to the pushing working position, that is, let the pushing member 31 pass through the pressing ring 41 to push the first carrying piece 60 and lift it. Corresponding to the target object 200, the pushed target object 200 is directly transferred and adhered to the second carrier sheet 70 to complete the picking process of the target object 200.

Next, please refer to FIG. 15 , return the push piece 31 so that the push piece 31 retracts into the ejector pin cover 32 . At this time, the push device 30 is in the push working position, and the pressing piece 40 presses the first carrying piece 60 .

Next, please refer to Figure 16, the pushing device 30 returns to the pushing preparation position, the pressing member 40 presses the first carrying piece 60, and translates the first carrying piece 60 and the second carrying piece 70 to facilitate the pushing of the next pill. The process of target object 200.

What should be particularly noted here is that with the assistance of the initial carrier sheet in the pre-processing step, when the light-emitting surface of each target 200 is covered and disposed on the carrier surface of the first carrier sheet 60, the target object 200 is formed by the first carrier sheet. When 60 is transferred to the second carrier sheet 70, the light-emitting surface of the target object 200 can be exposed opposite the setting surface of the second carrier sheet 70. In addition, since the light-emitting surface of the target object 200 is first placed upside down on the first carrier sheet 60, the position of the target object 200 on the first carrier sheet 60 is also reversed relative to the position on the initial carrier sheet. Therefore, , before the target object 200 is transferred, the corresponding adjustment control software performs position flip processing according to the position of the target object 200 that has been flipped.

The present disclosure is not limited to the above-described embodiments, and various changes can be made within the scope indicated in the claims. Embodiments obtained by appropriately combining technical means disclosed in different embodiments are also included in the technical scope of the present disclosure. within. Furthermore, new technical features can be formed by combining the technical means disclosed in each embodiment.

100:Transfer equipment 200:Target 10: base 20:Mobile placement device 21:First placement department 211:First abutment 212: Carrying tray 22:Second placement department 221:Second abutment 222: Clamping piece 23: First bearing area 24: Second load-bearing area 30: Pushing device 31: Push piece 32:Thimble cover 320:Cavity 40: Pressing parts 41:Press ring 411:Second gap 42:Side wall 420: first gap 422:Perforation 43:Installation Department 430:Mounting hole 50:Image capture device 51: Fixed components 60: First carrier film 61: Bearing surface 62:Contact surface 63: Expanding ring 631:Inner ring 632:Outer ring 70:Second carrier piece 71: Setting surface 80: First drive device 90: Second drive device A:Axis X: first direction Y: second direction Z: third direction D1: inner diameter of the pressing ring D2: outer diameter of the pressing ring D3: Ring width of the pressing ring O: push position d1: position deviation d2: position deviation 1: grain 2:Granules 3: Grains

In order to more clearly explain the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only for the purpose of describing the embodiments or the prior art. For some embodiments of the application, those of ordinary skill in the art can also obtain other drawings based on these drawings without exerting creative efforts. FIG. 1 is a three-dimensional structural view of a transfer device according to an embodiment of the present disclosure. FIG. 2 is a front view of the transfer device shown in FIG. 1 . FIG. 3 is a partial enlarged view of the transfer device shown in FIG. 2 . FIG. 4 is a partial enlarged view of the transfer device shown in FIG. 3 . FIG. 5 is a top view of the pressing member in the transfer device of FIG. 1 . FIG. 6 is a perspective structural view of the pressing member shown in FIG. 5 . FIG. 7 is a front view of the pressing member shown in FIG. 5 . FIG. 8 is a side view of the pressing member shown in FIG. 5 . Figure 9 (a) ~ (d) is a schematic diagram of the action flow of moving and transferring crystal grains. Figure 10 is a schematic flowchart of the transfer device transferring the target object. Figure 11 is a schematic flowchart of a transfer device transferring a target object. Figure 12 is a schematic flowchart of a target object transferred by the transfer device. Figure 13 is a schematic flowchart of the transfer device transferring the target object. Figure 14 is a schematic flowchart of the transfer device transferring the target object. Figure 15 is a schematic flowchart of the transfer device transferring the target object. Figure 16 is a schematic flowchart of a target object transferred by the transfer device.

100:Transfer equipment

10: base

20:Mobile placement device

21:First placement department

211:First abutment

212: Carrying tray

22:Second placement department

221:Second abutment

222: Clamping piece

30: Pushing device

40: Pressing parts

50:Image capture device

51: Fixed components

60: First carrier film

80: First drive device

90: Second drive device

X: first direction

Y: second direction

Claims (9)

A transfer device for transferring at least one target object on a first carrier sheet to a second carrier sheet, the transfer device including: a moving placement device for placing the first carrier sheet in a first carrier area and placing the second bearing piece in the second bearing area, so that the first bearing piece and the second bearing piece are spaced apart from each other and relatively translatable; a pressing member is movably disposed on the first bearing piece. On the side of the area away from the second load-bearing area, the pressing member is used to press the first load-bearing piece along the preset movement direction, so that the target object to be pushed on the first load-bearing piece is positioned The area is close to the second load-bearing piece, and the preset movement direction is the direction of the first load-bearing area towards the second load-bearing area; and a pushing device is movably disposed on the first load-bearing area. On the side away from the second load-bearing area, the pushing device includes a pushing piece, and the front end of the pushing piece is used to pass through the pressing piece in the preset movement direction to push the target object , wherein the pressing member includes a side wall, and a first notch is opened on the side of the side wall away from the first bearing area. The first notch is used for the pushing device to pass through, and the side wall is also provided with a first notch. A perforation is formed, and the perforation is opposite to the first notch. The transfer equipment according to claim 1, wherein the pressing member forms a second notch, and the second notch is provided on a side of the pressing member close to the first bearing area. The transfer device according to claim 2, wherein the pressing member further includes a pressing ring and a mounting part, the pressing ring defines the second gap, the mounting part is arranged opposite to the pressing ring, and the mounting part The portion and the pressing ring are respectively arranged on both sides of the side wall. The transfer device according to claim 1, wherein the connection between the bottom surface and the side surface of the pressing ring forms a rounded corner. The transfer device according to claim 1, wherein the second notch is a round hole. The transfer equipment according to claim 1, wherein the transfer equipment further includes an image capture device fixedly disposed on a side of the first load-bearing area away from the second load-bearing area for capturing the torsion. Push the target object to take the image. The transfer equipment according to claim 6, wherein when the pushing device pushes the target object, the relative positions of the pushing device, the pressing member and the image capturing device are coaxial with each other. The transfer equipment according to claim 1, wherein the pushing device further includes an ejector pin cover, and the pushing member can protrude from the ejector pin cover. The transfer equipment according to claim 1, wherein the mobile placing device includes a first placing part and a second placing part, the first placing part and the second placing part are arranged in a mutually spaced and relatively translatable manner. .

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