TWM621021U - Transfer apparatus - Google Patents

Abstract

The present disclosure provides a transfer apparatus including: a movable placement device configured to place a first carrying sheet in a first carrying area and place a second carrying sheet in a second carrying area; a pressing member movably arranged on one side of the first carrying area away from the second carrying area and configured to press the first carrying sheet in a predetermined moving direction from the first carrying area towards the second carrying area; and a pushing device movably arranged on the side of the first carrying area away from the second carrying area. The pushing device includes a pushing member configured to pass through the pressing member in the predetermined moving direction to push a target object. The pressing member includes a sidewall of which one side away from the first carrying area having a first opening which allows the pushing device to pass through.

Description

Transfer equipment

The present disclosure relates to the field of semiconductor manufacturing technology, in particular, to a transfer device.

In the semiconductor manufacturing process, multiple diced dies are sorted and sorted according to their appearance, quality, or characteristics through a die transfer mechanism. At present, most of the die transfer mechanisms mostly transfer the die from a thin film to a printed circuit board (PCB: Printed Circuit Board) through an ejector pin in an ejector device. However, during the transfer process, due to the large area and elasticity of the film used to carry the crystal grains, if the pushing device directly pushes onto the film to push the crystal grains, precise alignment cannot be achieved, and crystal flipping is likely to occur. Or set aside skew, etc., resulting in a lower yield.

The present disclosure is completed in view of the above-mentioned problems, and provides a transfer device that can achieve precise alignment, avoid flipping or placing skew, and so on, and has a high yield.

In order to solve the above problems, the present disclosure provides a transfer device, which is used to transfer at least one target on a first carrier sheet to a second carrier sheet. The transfer device includes: a mobile placement device for transferring the first The load-bearing sheet is placed in the first load-bearing area and the second load-bearing sheet is placed in the second load-bearing area, so that the first load-bearing sheet and the second load-bearing sheet are spaced apart from each other and can be relatively translated; the pressing member is movable Is arranged on the side of the first bearing area away from the second bearing area, and the pressing member is used to press the first bearing sheet along a preset moving direction, so that the to-be-topped first bearing sheet The setting area of the object to be pushed is close to the second supporting sheet, and the preset moving direction is the direction of the first supporting area toward the second supporting area; and the pushing device is movably arranged On a side of the first bearing area away from the second bearing area, the pushing device includes a pushing piece, and the front end of the pushing piece is used to pass through the pressing along the preset moving direction. The pushing member is used to push the target, wherein the pressing member includes a side wall, a side of the side wall away from the first bearing area is provided with a first notch, and the first notch is used for the pushing device Through.

In one embodiment, the pressing member forms a second notch, and the second notch is disposed on a side of the pressing member close to the first bearing area.

In one embodiment, the pressing member further includes a pressing ring and a mounting portion, the pressing ring defines the second notch, the mounting portion is disposed opposite to the pressing ring, and the mounting portion and the mounting portion The pressing rings are respectively arranged on both sides of the side wall.

In one embodiment, the connection between the bottom surface and the side surface of the pressing ring forms a rounded corner.

In one embodiment, the second notch is a round hole.

In one embodiment, a through hole is formed on the side wall, and the through hole is disposed opposite to the first notch.

The transfer equipment further includes an image capturing device, which is fixedly arranged on a side of the first bearing area away from the second bearing sheet, and is used to capture images of the target to be pushed.

In one embodiment, when the pushing device pushes the target, the relative positions of the pushing device, the pressing member, and the image capturing device are coaxial with each other.

In one embodiment, the pushing device includes a thimble cover, and the pushing member can protrude from the thimble cover.

In one embodiment, the mobile placement device includes a first placement portion and a second placement portion, and the first placement portion and the second placement portion are arranged in a manner of being spaced apart from each other and relatively translationally movable.

Compared with the prior art, the first supporting sheet is pressed by the pressing member, so that when the target is pushed, the area of the first supporting sheet to be pushed is closer to the second supporting sheet, which makes it easier to push the target. The tension of the setting area of the target is controlled, and the distance between the setting area of the target to be pushed by the first supporting sheet and the second supporting sheet is adjusted, so that the pushing device can accurately push the target, Avoid flipping the crystal or placing the bottom skew, and the yield rate is high.

The following description contains specific information related to the exemplary embodiments in this disclosure. The drawings in this disclosure and the detailed description accompanying them are only exemplary embodiments. However, the present disclosure is not limited to these exemplary embodiments. Those skilled in the art will think of other variations and embodiments of this disclosure. Unless otherwise specified, the same or corresponding elements in the drawings may be indicated by the same or corresponding reference numerals. In addition, the drawings and illustrations in this disclosure are generally not drawn to scale, and are not intended to correspond to actual relative sizes.

For the purpose of consistency and ease of understanding, the same features are indicated by reference numerals in the exemplary drawings (although not so indicated in some examples). However, the features in different embodiments may be different in other aspects, and therefore should not be narrowly limited to the features shown in the drawings.

The terms "first", "second", and "third" in the specification of the present disclosure and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific sequence. In addition, the term "including" and any variations of them are intended to cover non-exclusive inclusion.

Hereinafter, the disclosure will be described in detail with reference to the accompanying drawings and embodiments.

1 to 4, an embodiment of the present disclosure provides a transfer device 100, including a base 10, a mobile placement device 20, a pushing device 30, a pressing member 40, and an image capturing device 50, wherein the mobile placement device 20, The pushing device 30, the pressing member 40 and the image capturing device 50 are all disposed on the base 10.

The transfer device 100 in this embodiment is used to transfer at least one target 200. In this embodiment, the target 200 is described by taking a crystal grain as an example. In other embodiments, the transfer device 100 can also be used to transfer other targets. Objects are not limited here. Specifically, the transfer device 100 is used to set the first carrier sheet 60 and the second carrier sheet 70 on the mobile placement device 20, and place the first carrier sheet 60 on the first carrier sheet 60 through the pushing device 30, the pressing member 40, and the image capturing device 50 The target 200 of is transferred to the second carrier 70.

In this embodiment, the surface of the first bearing surface 60 facing the second bearing sheet 70 is used to place at least one target 200. Specifically, the first bearing sheet 60 has a bearing surface 61 for bearing the target 200 and The supporting surface 61 is opposite to the contact surface 62, and the supporting surface 61 faces the second supporting sheet 70. The second supporting sheet 70 has a setting surface 71 for setting the target 200, and the setting surface 71 faces the first supporting sheet 60.

It can be understood that when the pushing member 31 pushes the target 200 and does not pierce the first carrier sheet 60, the viscosity of the first carrier sheet 60 may be reduced due to the stretching of the surface of the first carrier sheet 60. When the viscosity of the supporting surface 61 is lower than the viscosity of the setting surface 71, the target 200 is easier to separate from the first supporting sheet 60 and stick to the second supporting sheet 70. Of course, in other periods, for example, when the pressing member 30 described later does not press the first supporting sheet 60, the viscosity of the supporting surface 61 may not be lower than the viscosity of the setting surface 71, which is not limited here.

In this embodiment, the second carrier sheet 70 may be a printed circuit board (PCB), and an adhesive layer, such as glue, may be formed on the printed circuit board. In this embodiment, the target 200, that is, the die, is a light-emitting diode die as an example, and the first carrier sheet 60 and the second carrier sheet 70 are described by using a blue tape as an example. In this embodiment, the first carrier sheet 60 is fixed by an expand ring 63. The expansion ring 63 includes an inner ring 631 and an outer ring 632. The periphery of the first carrier sheet 60 passes through the inner ring 631 and the outer ring 632. fixed.

It can be understood that the peripheral edge of the first supporting sheet 60 is stretched by the expansion ring 63, so that the first supporting sheet 60 is expanded and its viscosity is reduced, so as to facilitate the subsequent transfer of the target 200.

Of course, in other embodiments, the first supporting sheet 60 can also be fixed and stretched by other structures, which is not limited herein.

The mobile placement device 20 includes a first placement portion 21 and a second placement portion 22 that are spaced apart and can be relatively translated. The first placement portion 21 and the second placement portion 22 are used to place the first carrier sheet 60 and the second carrier sheet 70, respectively. , So that the first supporting sheet 60 and the second supporting sheet 70 are spaced apart from each other and can be relatively translated, and the target 200 on the first supporting sheet 60 is located between the first supporting sheet 60 and the second supporting sheet 70.

Please refer to FIGS. 1 to 3 in combination. In this embodiment, the first placement portion 21 has a first supporting area 23 for placing the first supporting sheet 60, and the second placement portion 22 has a second supporting area 24 for placing Place the second carrier sheet 70. In this embodiment, the first bearing area 23 is an area that is consistent with the plane on which the first bearing sheet 60 is located when the first bearing sheet 60 is placed on the first placement portion 21, and the second bearing area 24 is located on the first bearing sheet 60. When the two supporting sheets 70 are placed on the second placement portion 22, an area consistent with the plane where the second supporting sheets is located. In other words, the first supporting area 23 and the second supporting area 24 are each defined as a virtual plane area, which respectively reflect the positions of the first supporting sheet 60 and the second supporting sheet 70 when placed on the mobile placement device 20. Therefore, it can be understood that when the mobile placement device 20 changes the positions of the first supporting sheet 60 and/or the second supporting sheet 70, the positions of the first supporting area 23 and the second supporting area 24 will also change accordingly.

Further, the first placement portion 21 is disposed on one side of the base 10. The first placement portion 21 includes a first base 211 and a carrier plate 212. The first base 211 can be in the first direction X relative to the base 10 The carrier plate 212 is movably arranged on the first base 211 in the second direction Y, so that the target 200 on the expansion ring 63 can move back and forth in the first direction X and the second direction Y. Thereby, it is convenient to place, take, and translate the expansion ring 63.

The second placement portion 22 is disposed on the other side of the base 10, and the second placement portion 22 includes a second base 221 and a clamping member 222. The second base 221 can move in the first direction X relative to the base 10 The clamping member 222 is used to clamp the second carrier sheet 70, and the clamping member 222 is movably arranged on the second base 221 in the second direction Y. In this way, the second carrier sheet 70 can move along the first The direction X and the second direction Y move back and forth, thereby facilitating the placement, taking, and translation of the second carrier sheet 70.

The pushing device 30 is movably disposed on a side of the first carrying area 23 away from the second carrying sheet 70. In this embodiment, the pushing device 30 can move on a horizontal plane and/or a vertical plane. Specifically, before pushing the target 200, the pushing device 30 is in the pushing preparation position. When the target 200 to be pushed is to be pushed, the pushing device 30 moves from the pushing preparation position to the pushing working position After the pushing action ends, the pushing device 30 returns from the pushing working position to the pushing ready position, and in this way, it moves back and forth. In this embodiment, the target 200 refers to the crystal grains carried on the first supporting sheet 60, and the target 200 to be pushed refers to the crystal grains on the first supporting sheet 60, and the pushing device 30 is located on the top. When pushing the working position, the die located directly below the pushing member 31, the pushing preparation position refers to the preset initial position of the pushing device 30, and the pushing working position refers to the position when the pushing device 30 pushes the target 200 Location.

Specifically, the pushing device 30 includes a pushing member 31 and a thimble cover 32. The pushing member 31 can protrude out of the cavity 320 of the thimble cover 32 to push the target 200, so as to push the target 200 on the first carrier sheet 60. The target 200 is transferred to the second carrier sheet 70. In this embodiment, the pushing member 31 may be a needle (Needle).

Specifically, when the pushing member 31 pushes the target 200, the cavity 320 of the thimble cover 32 becomes a vacuum state. In this way, the bottom of the thimble cover 32 will absorb the first carrier sheet 60, so that the bottom of the thimble cover 32 Contact with the contact surface 62 of the first supporting sheet 60, and then the pushing member 31 extends out of the thimble cover 32 and pushes the target 200 to transfer the target 200 from the first supporting sheet 60 to the second supporting sheet 70, and then, The ejector 31 returns to the ejector cover 32. It can be understood that by arranging the ejector 31 protrudingly in the ejector cover 32, after the ejector 31 pushes the target 200, the bottom of the ejector cover 32 contacts the contact surface 62 of the first carrier sheet 60, Therefore, it is possible to prevent the first carrier sheet 60 from sticking to the front end of the pushing member 31 and shifting. In this way, the pushing efficiency can be effectively improved.

Further, referring to FIG. 5, the pressing member 40 is movably disposed on the side of the first supporting area 23 away from the second supporting area 24, and is used to press the first supporting sheet 60 so that the pressure on the first supporting sheet 60 The setting area of the target 200 to be pushed is close to the second carrier sheet 70.

It can be understood that, in this embodiment, the pressing member 40 can move on a vertical surface.

Specifically, before pushing the target 200, the pressing member 40 is located at the pressing preparation position. When the target 200 is to be pushed, the pressing member 40 moves from the pressing preparation position to the pressing working position until the first carrier sheet 60 is pressed. After all the targets 200 are transferred to the second carrier sheet 70, the pressing member 40 returns from the pressing working position to the pressing ready position. Of course, it is also possible to return the pressing member 40 from the pressing working position to the pressing ready position after every one (or several) targets 200 are pushed out, which is not limited. The pressing preparation position refers to the default initial position of the pressing member 40, and the pressing working position refers to the position where the pressing member 40 presses the first carrier sheet 60.

Of course, in other embodiments, the pressing member 40 can also move on a horizontal plane and a vertical plane, which is not limited here.

It can be understood that, in this embodiment, as long as it is ensured that the area of the first carrier sheet 60 that is in contact with the pressing member 40 corresponds to the area where the pushing device 30 pushes the target 200 under the pressing action of the pressing member 40, it moves toward the second The supporting sheet 70 only needs to be close, and it is not limited here.

Specifically, referring to FIGS. 5 to 8, the pressing member 40 forms a second notch 411, and the second notch 411 is provided on the side of the pressing member 40 close to the first carrying area 23 for the top of the pushing device 30. The front end of the pushing member 31 passes along the preset moving direction to push at least one target 200. In this embodiment, the second notch 411 is used to allow the bottom of the thimble cover 32 and the pusher 31 to pass through. In this embodiment, the preset moving direction is the third direction Z described later, which can also be said to be the direction in which the first bearing area 23 faces the second bearing area 24. Of course, in other embodiments, corresponding adjustments can be made according to requirements, which is not limited here.

Further, the second gap 411 may be a closed gap, for example, in an "O" shape, a "口" shape, or the like. In other embodiments, the second gap 411 may also be an open gap, for example, in the shape of "C", "ㄈ", and the like. In this embodiment, the second notch 411 is a round hole, that is, in the shape of an "O". In some embodiments, although the second notch 411 is substantially a round hole or other closed notch, the edge of the second notch 411 may include one or more notches. Furthermore, taking the case where the edge of the second notch 411 has a notch as an example, the second notch 411 will have a "C" shape, and so on. Of course, in other embodiments, the second notch 411 can also have other shapes, which is not limited here.

Further, the pressing member 40 includes a pressing ring 41, a side wall 42 and a mounting portion 43, and the pressing ring 41 defines a second notch 411.

It can be understood that the diameter of the second gap 411 is not particularly limited, as long as it can allow at least part of the ejector device 30 to pass through. In this embodiment, the second gap 411 allows the bottom of the ejector pin cover 32 of the ejector device 30 to pass through. It does not prevent the pushing member 31 from pushing the target 200. More specifically, the diameter of the second notch 411 is 6 mm or more. In a preferred embodiment, the diameter of the second notch 411 is 16 mm. In addition, in a specific embodiment, the inner diameter D1 of the pressing ring 41 is 13.5 mm, and the outer diameter D2 is 16.0 mm. In some embodiments, the inner diameter ranges from about 8 mm to 20 mm, and the ring width D3 of the pressing ring 41 ranges from about 1 to 2 mm.

It can be understood that by setting the diameter of the second notch 411 to allow the bottom of the thimble cover 32 to pass through, the friction between the first carrier plate 60 and the pressing ring 41 can be reduced when the expansion ring 63 moves horizontally, and the The tension of the area in contact with the pressing member 40 in a carrier sheet 60 is more stable. Of course, the diameter of the pressing ring 41 can be adjusted accordingly according to requirements, which is not limited here.

Further, the connection between the bottom surface 412 of the pressing ring 41 and the side surface 413 forms a rounded corner (R angle), and the arc angle of the R angle is, for example, 0.5 mm to prevent the bottom surface 412 of the pressing ring 41 from being connected to the first load. The sheet 60 is in contact, and when the first supporting sheet 60 moves horizontally, the first supporting sheet 60 is scratched. In other embodiments, if the first carrier sheet 60 can bear the movement and friction of the pressing ring 41 on it without being scratched, it may also allow the connection between the bottom surface 412 and the side surface 413 of the pressing ring 41 to be formed into other shapes , Such as obtuse angles.

In this embodiment, the side wall 42 is disposed on the pressing ring 41, and the side wall 42 is a hollow structure. Specifically, a side of the side wall 42 away from the first bearing area 23 is provided with a first notch 420, and the first notch 420 allows the pushing device 30 to pass through. Specifically, the pushing device 30 is passed through to move back and forth from the pushing preparation position to the pushing working position.

It can be understood that the size of the first gap 420 is not limited, as long as it does not prevent the pushing device 30 from passing through the first gap 420 to go back and forth between the pushing preparation position and the pushing working position. In this embodiment, the first notch 420 penetrates both sides of the side wall 42, that is, the first notch 420 extends from the side of the side wall 42 away from the pressing ring 41 to the pressing ring 41.

In this embodiment, the preset moving direction is the longitudinal direction (or the length direction of the pusher 31). Of course, in other embodiments, it can be adjusted according to requirements, which is not limited here.

Furthermore, the side wall 42 is also provided with a through hole 422. The through hole 422 is opposite to the first notch 420.

In this embodiment, the mounting portion 43 is substantially shaped like a "C", and the mounting portion 43 is disposed opposite to the pressing ring 41, and is respectively disposed on both sides of the side wall 42.

Further, the mounting portion 43 is provided with a plurality of mounting holes 430 for mounting on the base 10 by a fixing mechanism (not shown). In this embodiment, the thickness of the mounting portion 43 increases as it moves away from the side wall 42, so that a mounting hole 430 is formed on the mounting portion 43 to be mounted on the base 10.

It can be understood that by setting the mounting portion 43 in a C shape, the pressing member 40 is provided with a side wall 42 on one side, and the other side is not provided with a first notch 420 for the pushing device 30 to pass through and move to the top. The pushing working position is directly above the position of pushing the target 200. In addition, the first notch 420 is disposed opposite to the perforation 422 in the side wall 42 so that light sources (not shown) on both sides can pass through the first notch 420 and the perforation 422 respectively, thereby facilitating lighting during image capturing.

Further, before the pressing member 40 presses the first supporting sheet 60, the distance between the first supporting sheet 60 and the second supporting sheet 70 is a predetermined value, for example, 1.5 mm. The pressing member 40 can move along the third direction Z and press the first supporting sheet 60 to further fine-tune the distance between the first supporting sheet 60 and the second supporting sheet 70. For example, when the pressing member 40 presses the first supporting sheet 60, the pressing member 40 can be pressed down in the third direction Z, so that the setting area of the target 200 to be pushed by the first supporting sheet 60 and the second supporting sheet The distance between 70 is shortened to a specific value, such as 0.5 mm or less, such as 0.2 mm, 0.4 mm, and so on.

Of course, in other embodiments, the pressing member 40 can also adopt other structures, as long as it can be pressed to the first supporting sheet 60, so that the setting area of the target 200 to be pushed by the first supporting sheet 60 faces the second supporting sheet. 70 can be close, and its specific structure is not limited.

The image capturing device 50 is fixedly disposed on the base 10 through the fixing element 51 and is located on the side of the first bearing area 23 away from the second bearing area 24, and is used to capture images of the target 200 to be pushed. For the fixing element 51, a well-known fixing structure can be used, which will not be repeated here.

The setting of the image capturing device 50 is not particularly limited, as long as it is set corresponding to the target 200 so that the target 200 can be imaged. In this embodiment, the image capturing device 50 may be a camera (CCD), but it is not limited thereto.

When pushing the target 200, the relative position between the image capturing device 50 and the pushing device 30 is coaxial, and before the pushing device 30 pushes the target 200, the image capturing device 50 can take pictures and images Then accurately calculate the position of the target 200, so that the target 200 to be pushed is moved to the exact center of the pushing device 30, that is, the target 200 to be pushed, the pushing device 30, the pressing member 40, and the image capturing device The relative position of 50 to each other is coaxial to ensure the position accuracy of each target 200 to be pushed and the pushing member 31 in the pushing device 30 can be pushed to the exact center of the target 200, because the target 200 is a crystal. Granules, small in volume, about 0.08~0.15mm rectangular parallelepiped, if the pusher 31 is offset by more than 0.01mm, it is easy to cause the crystal turning or the lowering skew during the pushing process.

Preferably, in this embodiment, the image capturing device 50 captures the target object 200 by directly viewing the image.

In this embodiment, the pushing device 30, the pressing member 40, and the image capturing device 50 are on the same side. Of course, in other embodiments, the pushing device 30, the pressing member 40, and the image capturing device 50 can also be located on different sides. , As long as the pushing device 30 and the pressing member 40 are arranged on the same side. For example, the pushing device 30 and the pressing member 40 are located on a side different from the image capturing device 50. At this time, the image capturing device 50 is located on the side of the second supporting area 24 away from the first supporting sheet 60, and the pushing The device 30 and the pressing member 40 are located on the side of the first supporting sheet 60 away from the second supporting area 24.

It can be understood that when the pushing device 30 is in the pushing preparation position, the pushing device 30 will not affect the image capturing device 50 of the target 200 in the pressing member 40. The purpose of the pushing device 30 moving between the pushing preparation position and the pushing working position is that the image capturing device 50 can easily capture the image of the target 200 without additional optical reflection.

Please refer to (a) to (d) of FIG. 9 to further describe the operation flow of the transfer device 100 to move and transfer the die.

Referring to (a) of FIG. 9, the image capturing device 50 takes an image, and calculates the position deviation d1 between the die 1 and the pushing position O, and the position deviation d2 between the die 1 and the die 2. It can be understood that the pushing position O is always constant, the position deviation d1 is the distance between the center of the die 1 and the pushing position O, and the position deviation d2 is between the center of the die 1 and the center of the die 2. distance. The position deviation d2 can also be referred to as the pitch.

Next, referring to FIG. 9(b), according to d1, the die 1 is moved to the pushing position O. It can be understood that moving the die 1 to the pushing position O means that by moving the first carrier 60, the die 1 overlaps the pushing position O. The following is the same for moving the die 2 to the pushing position O .

Then, the pushing device 30 moved from the pushing preparation position to the pushing working position pushes the die 1 to transfer the die 1 from the first supporting sheet 60 to the second supporting sheet 70.

Please refer to FIG. 9( c ). After the die 1 is pushed to the second supporting sheet 70, the mobile placement device 20 moves the first supporting sheet 60 according to d2 to move the die 2 to the pushing position O. However, since the pushing device 30 pushes the die 1, regardless of whether the first supporting sheet 60 is punctured during the pushing process, the tension or other characteristics of the first supporting sheet 60 may change, so that the first supporting sheet 60 The position of other crystal grains on 60 (for example, crystal grain 2, crystal grain 3) changes. Therefore, if the die 2 is moved only according to d2, it is likely that the die 2 cannot be accurately moved to the pushing position O. As shown in FIG. 9(c), moving the die 2 by d2 alone cannot accurately align the die 2 with the pushing position O.

Next, similar to the action of (a) in FIG. 9, the image capturing device 50 takes an image of the die 2, and calculates the position deviation between the die 2 and the pushing position O, and the die 2 and the next The position deviation (ie pitch) between the die to be pushed (for example, die 3). It should be noted that after the pushing device 30 has completed pushing the die 1, it will return to the pushing preparation position from the pushing working position to avoid hindering the image capturing device 50 from capturing images of the die 2.

Afterwards, please refer to Figure 9(d). Similar to the action of Figure 9(b), the mobile placement device 20 moves the first carrier according to the position deviation between the die 2 and the pushing position O calculated above. The sheet 60 fine-tunes the position of the die 2 so that the die 2 is accurately located at the pushing position O. The pushing device 30 will again enter the pushing working position from the pushing ready position to push the die 2.

The actions of (a) to (d) in FIG. 9 roughly include the "imaging stage" in which the image capturing device 50 captures the crystal grain, and accurately moves the crystal grain to the "center (") of the pushing position O according to the imaging result. center) positioning stage", the "pushing stage" of pushing the die to the second carrier 70, and the "pitch positioning stage" of moving the next die according to the pitch obtained during the imaging stage. In some embodiments, the above four stages can be performed sequentially and repeatedly to transfer the crystal grains on the first carrier sheet 60 to the second carrier sheet 70 one by one.

The transfer device 100 further includes a first driving device 80 for controlling the pressing member 40 to move in a vertical plane. More specifically, the first driving device 80 is used to control the pressing member 40 to move in the third direction Z (ie, the preset moving direction).

Further, the pressing member 40 can also be moved on a horizontal plane and a vertical plane under the control of the first driving device 80. It can be understood that the pressing member 40 can be moved on a horizontal plane to repair or replace the pressing member 40. In other words, in addition to moving along the vertical plane (that is, the plane containing the first movement direction), the pressing member 40 is also allowed to move on the horizontal plane (for example, from the maintenance position to the pressing preparation position, or from the pressing preparation position back to the maintenance position) for convenience The person repairs or replaces the pressing member 40.

More specifically, after the expansion ring 63 is placed on the carrier plate 212, when the target 200 on the first carrier sheet 60 is to be pushed, the pressing member 40 moves to the first under the control of the first driving device 80. On the supporting sheet 60 and pressing the first supporting sheet 60, so that the setting area of the target 200 to be pushed by the first supporting sheet 60 approaches the second supporting sheet 70, and the first supporting sheet 60 is continuously pressed until the first supporting sheet 60 is pressed. All the objects 200 on the supporting sheet 60 are transferred to the second supporting sheet 70, and under the control of the first driving device 80, they are moved to the pressing preparation position. After the operator replaces the next expansion ring 63, the above actions are repeated.

The transfer device 100 further includes a second driving device 90 which is used to control the pushing device 30 to move along a specific trajectory. The specific trajectory may correspond to changes in the position of the pushing device 30 in the first direction X, the second direction Y, and/or the third direction. For example, the specific trajectory may be substantially arc-shaped. However, the present disclosure is not limited to this. The specific trajectory can also be linear or other shapes, as long as the specific trajectory can be used for the pushing device 30 to move back and forth to different specific positions (for example, the pushing preparation position, the pushing working position Etc.).

It can be understood that after the image capturing device 50 captures the image of the target 200 to be pushed, the second driving device 90 controls the pushing device 30 to move from the pushing preparation position to the pushing working position, and the pushing member 31 passes through and presses After the piece 40 pushes the target 200, the pushing device 30 returns from the pushing working position to the pushing ready position. After the image capturing device 50 takes an image of the next target 200 to be pushed, the second driving device 90 again controls the pushing device 30 to move from the pushing preparation position to the pushing working position, and so on, so as to transfer the target 200 on the first supporting sheet 60 to the second supporting sheet 70.

The area of the first supporting sheet 60 for placing the target 200 is relatively large. When the pushing member 31 directly pushes the target 200 on the first supporting sheet 60, the tension is not easily controlled and easily spreads to the entire first supporting sheet 60. In this embodiment, when the target 200 is pushed, the pressing member 40 moves to contact with the contact surface 62 of the first supporting sheet 60 and presses the first supporting sheet 60, so that the first supporting sheet 60 is to be pushed. The setting area of the target 200 is close to the second supporting sheet 70, so that the change of tension does not easily spread to the entire first supporting sheet 60, so that the tension of the setting area of the target 200 to be pushed can be easily controlled.

Further, due to material, processing and other reasons, the distance between the first supporting sheet 60 and the second supporting sheet 70 is relatively large. Generally, the distance between the first supporting sheet 60 and the second supporting sheet 70 reaches 1.5 mm or more. The preferred working distance, that is, in a preferred solution, the distance between the first supporting sheet 60 and the second supporting sheet 70 needs to be 0.5 mm or less. In this embodiment, the first supporting sheet 60 is pressed by the pressing member 40, so that the setting area of the target 200 to be pushed by the first supporting sheet 60 approaches the second supporting sheet 70, so that the first supporting sheet 60 The distance between the setting area of the target 200 to be pushed and the second carrier sheet 70 is within a preset range, for example, 0.5 mm or less, so that the pushing member 31 pushes the target 200. In this way, by providing the pressing member 40, the distance between the first carrier sheet 60 and the second carrier sheet 70 can be effectively controlled. Of course, the distance between the setting area of the target 200 to be pushed on the first supporting sheet 60 and the second supporting sheet 70 can be adjusted accordingly according to requirements, which is not limited herein.

In this embodiment, since the expansion ring 63 is usually placed manually and fixed by a fixed structure, in addition, the inner ring 631 and the outer ring 632 in the expansion ring 63 may have tolerances when they are combined. The height control of 63 itself to fine-tune the distance between the first carrier sheet 60 and the second carrier sheet 70 requires a higher cost.

This is because in addition to the large area of the entire expansion ring 63 which is difficult to control, it is difficult to ensure that the positions of the expansion ring 63 manually placed are consistent. The height of the sheet 60 is adjusted to be the same, so it is difficult to ensure the distance between the first supporting sheet 60 and the second supporting sheet 70. In this embodiment, the first carrier sheet 60 is pressed by the pressing member 40. Since the pressing work position of the pressing member 40 is fixed, even if the placement position of the expansion ring 63 is different at each stage, The pressing member 40 is pressed to be able to make the distance between the setting area of the target 200 to be pushed on the first supporting sheet 60 and the second supporting sheet 70 consistent, that is, the height control can be easily achieved.

For example, if the pressing member 40 is not provided, it is assumed that the first carrier sheet 60 is not completely parallel to the second carrier sheet 70 when initially placed manually. For example, the left side of the first carrier sheet 60 is higher than the right side. When the target 200 is on the left side of the first carrying sheet 60, the distance between the first carrying sheet 60 on the left and the second carrying sheet 70 is relatively large. On the contrary, when the target 200 on the right is transferred, the first carrying sheet 60 on the right is The distance to the second carrier sheet 70 is small. Thus, even if the pushing device 30 pushes the target 200 at the same position, that is, the same pushing path, the pushing results will be different, that is, the two In this case, the distance that the target 200 moves to the second carrier sheet 70 after the target 200 is actually pushed is different. By setting the pressing member 40 to press the first supporting sheet 60, even if the above situation occurs, it can be ensured that when the target 200 on the left and right is pushed, the distance of the target 200 moving to the second supporting sheet 70 is the same.

Moreover, because industrial CCDs require high-speed imaging, they usually do not have the function of auto-focusing. By setting the pressing ring 41 to press the first carrier 60, the target 200 to be pushed on the first carrier 60 is set The area is kept at a fixed position, and a fixed focal length can be maintained, so that the CCD can take images quickly and image sharply.

In addition, after pushing the target 200, the pushing device 30 moves to the pushing preparation position so that the image capturing device 50 can take an image to locate the next target 200 to be pushed, because the first carrier sheet 60 is an elastic film. With time and the number of targets 200, it is easy to cause positional deviation of the first carrier sheet 60. In this embodiment, the first carrier sheet 60 is pressed by the pressing member 40, which can effectively Therefore, the first supporting sheet 60 is moved smoothly on the horizontal plane, so as to avoid the above-mentioned situation.

Hereinafter, the method of transferring the target object 200 of the transfer device 100 of the present embodiment will be described with reference to FIGS. 10 to 16.

When the transfer device 100 shown in FIG. 1 is used to perform the picking process of the target 200, an embodiment of the method for transferring the target 200 of the present disclosure includes the following steps. It should be noted that the preparation and placement of the target can be It is performed by a well-known technique, so it will not be repeated here.

First, referring to FIG. 10, the first supporting sheet 60 and the second supporting sheet 70 provided with the target 200 are respectively disposed on the first placement portion 21 and the second placement portion 22, and the target 200 is positioned on the first placement portion 21 and the second placement portion 22. Between the supporting sheet 60 and the second supporting sheet 70. At this time, the pushing device 30 is in the pushing preparation position, and the pressing member 40 is in the maintenance position. In this embodiment, the pushing device 30 and the pressing member 40 are located on both sides of the axis A. In other words, the jacking preparation position and the maintenance position are located on both sides of the axis A. In some embodiments, the pushing preparation position and the maintenance position may be other positions that are not on the axis A.

Next, referring to FIG. 11, the first placement portion 21 and the second placement portion 22 are translated, so that the target 200 on the first carrier sheet 60 is correspondingly moved to the axis A of the image capturing device 50, and image capturing is performed The device 50 detects the target 200. At this time, the pushing device 30 is located at the pushing preparation position, and the pressing member 40 is located at the pressing preparation position, that is, the pressing member 40 and the image capturing device 50 are coaxial.

Next, referring to FIG. 12, the pressing member 40 is moved to the first supporting sheet 60, and the first supporting sheet 60 is pressed, so that the setting area of the target 200 to be pushed on the first supporting sheet 60 faces the second supporting sheet. The piece 70 is close. At this time, the pushing device 30 is in the pushing preparation position.

Next, referring to FIGS. 13-14, move the pushing device 30 from the pushing preparation position to the pushing working position, that is, let the pushing member 31 pass through the pressing ring 41 to push the first carrier sheet 60, and push it up The corresponding target 200 is directly transferred and adhered to the second carrying sheet 70 to complete the picking process of the target 200.

Next, referring to FIG. 15, return the pushing member 31 to the position so that the pushing member 31 is retracted into the ejector cover 32. At this time, the pushing device 30 is in the pushing working position, and the pressing member 40 presses the first carrier 60 .

Next, referring to FIG. 16, the pushing device 30 returns to the pushing preparation position, and the pressing member 40 presses the first supporting sheet 60, and translates the first supporting sheet 60 and the second supporting sheet 70, so as to enter and push the next one. The flow of the target 200.

It should be particularly noted here that when the light-emitting surface of each target 200 is covered and arranged on the bearing surface of the first bearing sheet 60 with the aid of the initial bearing sheet in the pre-processing step, the target 200 is removed from the first bearing sheet 60. When 60 is transferred to the second supporting sheet 70, the light-emitting surface of the target 200 can be exposed opposite to the setting surface of the second supporting sheet 70. In addition, since the light-emitting surface of the target 200 is first placed on the first supporting sheet 60, the position of the target 200 on the first supporting sheet 60 is also correspondingly reversed relative to the position on the initial supporting sheet. Before the transfer of the target object 200, the position of the target object 200 that has been turned over will be adjusted and the control software will be adjusted to perform position reversal processing.

The present disclosure is not limited to the above-mentioned embodiments, and various changes can be made within the scope shown in the claims, and embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present disclosure. Inside. Further, by combining the technical means disclosed in the respective embodiments, new technical features can be formed.

100: Transfer equipment 200: target 10: Pedestal 20: Mobile placement device 21: The first placement part 211: The first abutment 212: Carrier plate 22: The second placement part 221: second abutment 222: Clamping parts 23: The first bearing area 24: The second bearing area 30: Pushing device 31: pusher 32: thimble cover 320: Cavity 40: Pressing piece 41: Press ring 411: second gap 42: side wall 420: first gap 422: perforation 43: Installation Department 430: mounting hole 50: Image capture device 51: fixed components 60: The first carrier sheet 61: bearing surface 62: contact surface 63: expansion ring 631: inner ring 632: Outer Ring 70: second carrier sheet 71: Set the surface 80: The first drive device 90: second drive device A: axis X: first direction Y: second direction Z: Third party D1: The inner diameter of the pressing ring D2: Outer diameter of pressing ring D3: The ring width of the pressing ring O: Push position d1: position deviation d2: position deviation 1: Die 2: Die 3: Die

In order to more clearly describe the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are merely present For some implementations of the application, for those of ordinary skill in the art, other drawings may be obtained based on these drawings without creative work. FIG. 1 is a three-dimensional structure diagram of a transfer device according to an embodiment of the present disclosure. Fig. 2 is a front view of the transfer device shown in Fig. 1. Fig. 3 is a partial enlarged view of the transfer device shown in Fig. 2. Fig. 4 is a partial enlarged view of the transfer device shown in Fig. 3. Fig. 5 is a top view of a pressing member in the transfer device of Fig. 1. Fig. 6 is a three-dimensional structural view of the pressing member shown in Fig. 5. Fig. 7 is a front view of the pressing member shown in Fig. 5. Fig. 8 is a side view of the pressing member shown in Fig. 5. (A) to (d) of FIG. 9 are schematic diagrams of the operation flow of moving and transferring the crystal grains. Fig. 10 is a schematic diagram of the process of transferring the target by the transfer device. Fig. 11 is a schematic diagram of the process of transferring the target by the transfer device. Fig. 12 is a schematic diagram of the process of transferring the target by the transfer device. Fig. 13 is a schematic diagram of the process of transferring the target by the transfer device. Fig. 14 is a schematic diagram of the process of transferring the target by the transfer device. Fig. 15 is a schematic diagram of the process of transferring the target by the transfer device. Fig. 16 is a schematic diagram of the process of transferring the target by the transfer device.

100: Transfer equipment

10: Pedestal

20: Mobile placement device

21: The first placement part

211: The first abutment

212: Carrier plate

22: The second placement part

221: second abutment

222: Clamping parts

30: Pushing device

40: Pressing piece

50: Image capture device

51: fixed components

60: The first carrier sheet

80: The first drive device

90: second drive device

X: first direction

Y: second direction

Claims (10)

A transfer device, which is used to transfer at least one target on a first carrier sheet to a second carrier sheet, the transfer device comprising: A mobile placement device for placing the first supporting sheet in a first supporting area and placing the second supporting sheet in a second supporting area so that the first supporting sheet and the second supporting sheet face each other Spaced and can be moved relatively; A pressing member, which is movably disposed on a side of the first bearing area away from the second bearing area, and the pressing member is used to press the first bearing sheet in a predetermined moving direction, so that the first bearing The setting area of the target to be pushed on a supporting sheet is close to the second supporting sheet, and the predetermined moving direction is the direction from the first supporting area to the second supporting area; and A pushing device, which is movably arranged on a side of the first bearing area away from the second bearing area, the pushing device includes a pushing piece, and the front end of the pushing piece is used to move along the The preset moving direction passes through the pressing member to push the target object, Wherein, the pressing member includes a side wall, a side of the side wall away from the first bearing area is provided with a first notch, and the first notch is used for the pushing device to pass through. The transfer device according to claim 1, wherein the pressing member forms a second notch, and the second notch is provided on a side of the pressing member close to the first carrying area. The transfer device according to claim 2, wherein the pressing member further includes a pressing ring and a mounting portion, the pressing ring defines the second notch, the mounting portion is disposed opposite to the pressing ring, and the mounting The part and the pressing ring are respectively arranged on both sides of the side wall. The transfer device according to claim 1, wherein the connection between the bottom surface and the side surface of the pressing ring forms a rounded corner. The transfer device according to claim 1, wherein the second notch is a round hole. The transfer device according to claim 1, wherein a perforation is further formed on the side wall, and the perforation is arranged opposite to the first notch. The transfer device according to claim 1, wherein the transfer device further includes an image capture device, which is fixedly disposed on a side of the first bearing area away from the second bearing area, and is used to The pushed target is taken for imaging. The transfer device according to claim 7, wherein when the pushing device pushes the target, the relative positions of the pushing device, the pressing member, and the image capturing device are coaxial with each other. The transfer device according to claim 1, wherein the pushing device further includes a thimble cover, and the pushing member can protrude from the thimble cover. The transfer device according to claim 1, wherein the mobile placement device includes a first placement portion and a second placement portion, and the first placement portion and the second placement portion are arranged in a manner of being spaced apart from each other and capable of being relatively translated .

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