CN115692272A - Transfer apparatus - Google Patents

Abstract

The present invention provides a transfer apparatus comprising: the moving and placing device is used for placing the first bearing sheet in the first bearing area and placing the second bearing sheet in the second bearing area, so that the first bearing sheet and the second bearing sheet are spaced in opposite directions and can move in opposite directions; the pressing piece is movably arranged on one side, away from the second bearing area, of the first bearing area and used for pressing the first bearing sheet along a preset moving direction, so that a setting area of a target object to be pushed of the first bearing sheet is close to the second bearing sheet, and the preset moving direction is the direction of the first bearing area towards the second bearing area; the pushing device is movably arranged on one side, away from the second bearing area, of the first bearing area and comprises a pushing piece, the pushing piece is used for penetrating through the pressing piece along a preset moving direction to push the target object, the pressing piece comprises a side wall, a first notch is formed in one side, away from the first bearing area, of the side wall, and the first notch is used for allowing the pushing device to penetrate through.

Description

Transfer apparatus

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a transfer device.

Background

In a semiconductor manufacturing process, a plurality of dies after being cut are sorted by a die transfer mechanism according to their appearance, quality or characteristics. Currently, most die transfer mechanisms employ a pusher pin in a pusher device to transfer a die from a film onto a Printed Circuit Board (PCB). However, in the transferring process, because the area of the film for carrying the die is large and has elasticity, if the pushing device directly pushes the film to push the die, precise alignment cannot be achieved, and the conditions of die flipping or downward deflection and the like are easy to occur, so that the yield is low.

Disclosure of Invention

The present invention has been made in view of the above problems, and provides a transfer apparatus capable of achieving precise alignment, avoiding the occurrence of flip-chip or down-skew, and having a high yield.

To solve the above problems, the present invention provides a transfer apparatus for transferring at least one target on a first carrier to a second carrier, the transfer apparatus comprising: the moving and placing device is used for placing the first bearing piece in a first bearing area and placing the second bearing piece in a second bearing area, so that the first bearing piece and the second bearing piece are spaced in opposite directions and can translate in opposite directions; the pressing piece is movably arranged on one side, away from the second bearing area, of the first bearing area and used for pressing the first bearing sheet along a preset moving direction, so that a setting area of the target object to be pushed of the first bearing sheet is close to the second bearing sheet, and the preset moving direction is the direction of the first bearing area towards the second bearing area; the pushing device is movably arranged on one side, away from the second bearing area, of the first bearing area and comprises a pushing piece, the front end of the pushing piece is used for penetrating through the pressing piece along the preset moving direction to push the target object, the pressing piece comprises a side wall, a first notch is formed in one side, away from the first bearing area, of the side wall, and the first notch is used for allowing the pushing device to penetrate through.

In an embodiment, the pressing member forms a second gap, and the second gap is disposed at a side of the pressing member close to the first bearing area.

In an embodiment, the pressing piece further includes a pressing ring and an installation part, the pressing ring defines the second notch, the installation part and the pressing ring are arranged relatively, the installation part and the pressing ring are arranged on two sides of the side wall respectively.

In an embodiment, a junction of the bottom surface and the side surface of the pressing ring is rounded.

In one embodiment, the second notch is a circular hole.

In an embodiment, a through hole is further formed on the side wall, and the through hole is disposed opposite to the first notch.

The transfer equipment further comprises an image capturing device which is fixedly arranged on one side of the first bearing area, which is far away from the second bearing sheet, and is used for capturing images of the target object to be pushed.

In an embodiment, when the pushing device pushes the target object, the pushing device, the pressing member and the image capturing device are coaxial.

In one embodiment, the ejector comprises an ejector pin cover, and the ejector member can protrude out of the ejector pin cover.

In one embodiment, the movable placement device includes a first placement portion and a second placement portion, and the first placement portion and the second placement portion are disposed at an interval in a manner of facing each other and are capable of relatively translating.

Compared with the prior art, the pressing piece is arranged to press the first bearing sheet, so that when the target object is pushed, the setting area of the target object to be pushed of the first bearing sheet is close to the second bearing sheet, the tension of the setting area of the target object to be pushed is easily controlled, and the distance between the setting area of the target object to be pushed of the first bearing sheet and the second bearing sheet is adjusted, so that the pushing device can accurately push the target object, the phenomena of crystal overturning, downward deflection and the like are avoided, and the yield is high.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a perspective view of a transfer apparatus according to an embodiment of the present invention.

Fig. 2 is a front view of the transfer apparatus shown in fig. 1.

Fig. 3 is a partially enlarged view of the transfer apparatus shown in fig. 2.

Fig. 4 is a partially enlarged view of the transfer apparatus shown in fig. 3.

Fig. 5 is a top view of a pressing member in the transfer apparatus of fig. 1.

Fig. 6 is a perspective view of the pressing member shown in fig. 5.

Fig. 7 is a front view of the pressing member shown in fig. 5.

Fig. 8 is a side view of the pressing member shown in fig. 5.

Fig. 9 (a) to (d) are schematic diagrams showing the operation flow of moving and transferring the crystal grains.

Fig. 10 is a schematic flow chart of the transfer apparatus transferring the target.

Fig. 11 is a schematic flow chart of the transfer apparatus transferring the target.

Fig. 12 is a schematic flow chart of the transfer apparatus transferring the target.

Fig. 13 is a schematic flow chart of the transfer apparatus transferring the target.

Fig. 14 is a schematic flow chart of the transfer apparatus transferring the target.

Fig. 15 is a schematic flow chart of the transfer apparatus transferring the target.

Fig. 16 is a schematic flow chart of the transfer apparatus transferring the target.

Detailed Description

The following description contains specific information pertaining to the exemplary embodiments of the present invention. The drawings in the present application and their accompanying detailed description are directed to merely exemplary embodiments. However, the present invention is not limited to these exemplary embodiments. Other variations and embodiments of the invention will occur to those skilled in the art. Unless otherwise indicated, identical or corresponding components in the figures may be indicated by identical or corresponding reference numerals. Furthermore, the drawings and illustrations in the present invention are generally not drawn to scale and are not intended to correspond to actual relative dimensions.

For purposes of consistency and ease of understanding, identical features are identified by reference numerals in the exemplary drawings (although not so identified in some examples). However, features in different embodiments may differ in other respects and should therefore not be limited narrowly to the features shown in the figures.

The terms "first", "second", and "third", etc. in the description of the present invention and the above-described drawings are used for distinguishing between different objects and not for describing a particular order. Furthermore, the terms "comprises" and any variations thereof, are intended to cover non-exclusive inclusions.

The present invention will be described in detail below with reference to the accompanying drawings and examples.

Referring to fig. 1 to 4, an embodiment of the invention provides a transfer apparatus 100, which includes a base 10, a mobile placement device 20, a pushing device 30, a pressing member 40, and an image capturing device 50, wherein the mobile placement device 20, the pushing device 30, the pressing member 40, and the image capturing device 50 are all disposed on the base 10.

The transfer apparatus 100 in this embodiment is used for transferring at least one target 200, in this embodiment, the target 200 is illustrated by taking a die as an example, and in other embodiments, the transfer apparatus 100 may also be used for transferring other targets, which is not limited herein. Specifically, the transferring apparatus 100 is configured to dispose the first carrier sheet 60 and the second carrier sheet 70 on the moving and placing device 20, and transfer the target object 200 on the first carrier sheet 60 onto the second carrier sheet 70 through the pushing device 30, the pressing member 40 and the image capturing device 50.

In this embodiment, a surface of the first carrier 60 facing the second carrier 70 is used for placing at least one object 200, specifically, the first carrier 60 has a carrier 61 for bearing the object 200 and a contact surface 62 opposite to the carrier 61, and the carrier 61 faces the second carrier 70. The second carrier sheet 70 has a mounting surface 71 on which the object 200 is mounted, and the mounting surface 71 faces the first carrier sheet 60.

It can be understood that, in the case that the pushing member 31 pushes the target object 200 without piercing the first carrier sheet 60, the viscosity of the first carrier sheet 60 may be reduced due to the surface of the first carrier sheet 60 being stretched, and at this time, in the case that the viscosity of the carrying surface 61 is lower than that of the setting surface 71, the target object 200 is easier to be separated from the first carrier sheet 60 and stick to the second carrier sheet 70. Of course, at other times, for example, when the pressing tool 30 described later does not press the first carrier sheet 60, the viscosity of the bearing surface 61 may not be lower than the viscosity of the mounting surface 71, and is not limited herein.

In this embodiment, the second carrier sheet 70 may be a Printed Circuit Board (PCB), and an adhesive layer, such as glue, may be formed on the PCB. In the present embodiment, the target 200, i.e., the die, is an led die, and the first carrier 60 and the second carrier 70 are blue (blue) films. In the present embodiment, the first sheet 60 is fixed by an expansion ring (expansion ring) 63, the expansion ring 63 includes an inner ring 631 and an outer ring 632, and the periphery of the first sheet 60 is fixed by the inner ring 631 and the outer ring 632.

It will be appreciated that the peripheral edge of the first carrier sheet 60 is stretched by the expansion ring 63 so that the first carrier sheet 60 expands to lower its viscosity for subsequent transfer of the target 200.

Of course, in other embodiments, the first carrier sheet 60 can also be fixedly stretched by other structures, which are not limited herein.

The movable placing device 20 includes a first placing portion 21 and a second placing portion 22 which are spaced apart from each other and can relatively translate, the first placing portion 21 and the second placing portion 22 are respectively used for placing the first carrier sheet 60 and the second carrier sheet 70, so that the first carrier sheet 60 and the second carrier sheet 70 can relatively translate while being spaced apart from each other, and the target 200 on the first carrier sheet 60 is located between the first carrier sheet 60 and the second carrier sheet 70.

Referring to fig. 1 to fig. 3, in the present embodiment, the first placing portion 21 has a first carrying area 23 for placing the first carrying sheet 60, and the second placing portion 22 has a second carrying area 24 for placing the second carrying sheet 70. In the present embodiment, the first carrier region 23 is a region that coincides with the plane of the first carrier sheet 60 when the first carrier sheet 60 is placed on the first placement unit 21, and the second carrier region 24 is a region that coincides with the plane of the second carrier sheet when the second carrier sheet 70 is placed on the second placement unit 22. In other words, the first bearing area 23 and the second bearing area 24 are each defined as a virtual plane area for reflecting the position of the first carrier sheet 60 and the second carrier sheet 70 when they are placed on the mobile placement device 20, respectively. It can be understood that when the mobile placement device 20 changes the position of the first carrier sheet 60 and/or the second carrier sheet 70, the positions of the first carrier region 23 and the second carrier region 24 will change accordingly.

Further, the first placing portion 21 is disposed on one side of the base 10, the first placing portion 21 includes a first base 211 and a bearing tray 212, the first base 211 is movably disposed in the first direction X relative to the base 10, and the bearing tray 212 is movably disposed on the first base 211 in the second direction Y, so that the target 200 on the expansion ring 63 can move back and forth in the first direction X and the second direction Y, thereby facilitating the placing, taking and translating of the expansion ring 63.

The second placing portion 22 is disposed on the other side of the base 10, the second placing portion 22 includes a second base 221 and a clamping member 222, the second base 221 is movably disposed in the first direction X relative to the base 10, the clamping member 222 is used for clamping the second carrier sheet 70, and the clamping member 222 is movably disposed on the second base 221 in the second direction Y, so that the second carrier sheet 70 can move back and forth along the first direction X and the second direction Y, thereby facilitating the placement, taking and translation of the second carrier sheet 70.

The pushing device 30 is movably disposed on a side of the first carrying area 23 facing away from the second carrying sheet 70. In this embodiment, the thruster 30 is movable in a horizontal and/or vertical plane. Specifically, before the target object 200 is pushed, the pushing device 30 is located at a pushing preparation position, when the target object 200 to be pushed is pushed, the pushing device 30 moves from the pushing preparation position to a pushing working position, and after the pushing action is finished, the pushing device 30 returns to the pushing preparation position from the pushing working position, and thus, the reciprocating movement is performed. In the present embodiment, the target 200 refers to a die carried on the first carrier 60, the target 200 to be pushed refers to a die located right below the pushing member 31 in the die on the first carrier 60 when the pushing device 30 is located at the pushing position, the pushing preparation position refers to a default initial position of the pushing device 30, and the pushing position refers to a position where the pushing device 30 pushes the target 200.

Specifically, the pushing device 30 includes a pushing member 31 and a needle cover 32, and the pushing member 31 can protrude out of the cavity 320 of the needle cover 32 to push the target 200, so as to transfer the target 200 on the first carrier 60 to the second carrier 70. In the present embodiment, the pushing member 31 may be a Needle (Needle).

Specifically, when the pushing element 31 is about to push the target 200, the cavity 320 of the needle cover 32 is in a vacuum state, so that the bottom of the needle cover 32 absorbs the first carrier sheet 60, the bottom of the needle cover 32 contacts the contact surface 62 of the first carrier sheet 60, then the pushing element 31 extends out of the needle cover 32 and pushes the target 200, so as to transfer the target 200 from the first carrier sheet 60 to the second carrier sheet 70, and then the pushing element 31 returns to the inside of the needle cover 32. It can be understood that, by disposing the pushing element 31 in the thimble cover 32 in a protruding manner, after the pushing element 31 pushes the target 200, the bottom of the thimble cover 32 contacts the contact surface 62 of the first carrier sheet 60, so as to prevent the first carrier sheet 60 from adhering to the front end of the pushing element 31 and deviating therefrom, and thus, the pushing efficiency can be effectively improved.

Further, referring to fig. 5, the pressing member 40 is movably disposed on a side of the first carrying area 23 away from the second carrying area 24 for pressing the first carrying sheet 60, so that the region of the first carrying sheet 60 where the target object 200 to be pushed is disposed is close to the second carrying sheet 70.

It is understood that, in the present embodiment, the pressing piece 40 can move in a vertical plane.

Specifically, the pressing member 40 is located at the pressing preparation position before the target 200 is ejected, and when the target 200 is to be ejected, the pressing member 40 is moved from the pressing preparation position to the pressing working position until the pressing member 40 returns from the pressing working position to the pressing preparation position after all the target 200 of the first carrier sheet 60 is transferred to the second carrier sheet 70. Of course, the pressing member 40 may be returned from the pressing operation position to the pressing preparation position after each ejection of one (or several) objects 200, which is not limited thereto. The pressing preparation position is a default initial position of the pressing member 40, and the pressing operation position is a position where the pressing member 40 presses the first carrier sheet 60.

Of course, in other embodiments, the pressing member 40 may be movable in a horizontal plane and a vertical plane, and is not limited thereto.

It is understood that, in the present embodiment, the area of the first carrier sheet 60 contacting the pressing member 40, that is, the area corresponding to the pushing target 200 by the pushing device 30, is ensured to approach the second carrier sheet 70 under the pressing action of the pressing member 40, and is not limited herein.

Specifically, referring to fig. 5 to 8, the pressing element 40 forms a second notch 411, and the second notch 411 is disposed at a side of the pressing element 40 close to the first bearing area 23, for allowing the front end of the pushing element 31 of the pushing device 30 to pass through along a predetermined moving direction to push the at least one target 200. In the present embodiment, the second notch 411 is used for the bottom of the ejector pin cover 32 and the ejector 31 to pass through. In the present embodiment, the predetermined moving direction is a third direction Z described later, and may be a direction in which the first carriage area 23 faces the second carriage area 24. Of course, in other embodiments, the adjustment may be performed according to the requirement, and is not limited herein.

Further, the second notch 411 may be a closed notch, for example, in an "O" shape, a "mouth" shape, etc. In other embodiments, the second notch 411 may be an open notch, for example, a shape of "C", "ㄈ". In this embodiment, the second notch 411 is a circular hole, i.e. in an "O" shape. In some embodiments, the second notch 411 is a substantially circular hole or other closed notch, but the edge of the second notch 411 may include one or more notches. Further, taking the case that the edge of the second notch 411 has a notch as an example, the second notch 411 will be "C" shaped, and so on. Of course, in other embodiments, the second notch 411 may have other shapes, and is not limited herein.

Further, the pressing member 40 includes a pressing ring 41, a side wall 42, and a mounting portion 43, the pressing ring 41 defining a second notch 411.

It is understood that the diameter of second notch 411 is not particularly limited as long as it can allow at least part of ejector 30 to pass through, and in the present embodiment, second notch 411 allows the bottom of ejector cap 32 of ejector 30 to pass through without interfering with ejector 31 for ejecting target 200. More specifically, the diameter of the second notch 411 is 6mm or more, and in a preferred embodiment, the diameter of the second notch 411 is 16mm. In one embodiment, the inner diameter D1 of the pressing ring 41 is 13.5mm, and the outer diameter D2 is 16.0mm. In some embodiments, the inner diameter ranges from about 8mm to about 20mm, and the ring width D3 of the pressing ring 41 ranges from about 1mm to about 2mm.

It can be understood that by setting the diameter of the second notch 411 to allow the bottom of the thimble cover 32 to pass through, it is possible to reduce the friction between the first carrier sheet 60 and the pressing ring 41 when the expanding ring 63 moves horizontally, and to stabilize the tension of the region of the first carrier sheet 60 that is in contact with the pressing piece 40. Of course, the diameter of the pressing ring 41 may be adjusted accordingly according to the requirement, and is not limited herein.

Further, a junction of the bottom surface 412 and the side surface 413 of the pressing ring 41 is rounded (R-angle), for example, 0.5mm, to prevent the bottom surface 412 of the pressing ring 41 from contacting the first carrier sheet 60 and to scrape the first carrier sheet 60 when the first carrier sheet 60 moves horizontally. In other embodiments, if the first carrier sheet 60 can bear the friction of the pressing ring 41 moving thereon without being scratched, it is also allowable to form the connection between the bottom surface 412 and the side surface 413 of the pressing ring 41 into other shapes, such as an obtuse angle.

In the present embodiment, the side wall 42 is provided on the pressing ring 41, and the side wall 42 has a hollow structure. Specifically, a first notch 420 is formed on a side of the sidewall 42 away from the first bearing area 23, and the pushing device 30 passes through the first notch 420. Specifically, the pusher 30 is passed through to reciprocate from the pushing preparation position to the pushing working position.

It is understood that the size of the first notch 420 is not limited as long as the pushing device 30 is not prevented from moving to and from the ready-to-push position and the pushing operation position through the first notch 420. In the present embodiment, the first notch 420 penetrates both sides of the side wall 42, that is, the first notch 420 extends from the side of the side wall 42 away from the pressing ring 41 to the pressing ring 41.

In this embodiment, the preset moving direction is a longitudinal direction (or a longitudinal direction of the pushing member 31), but of course, in other embodiments, the preset moving direction may be adjusted according to requirements, and is not limited herein.

Further, the sidewall 42 is provided with a through hole 422. The through hole 422 is disposed opposite to the first notch 420.

In the present embodiment, the mounting portion 43 is substantially C-shaped, and the mounting portion 43 is provided opposite to the pressing ring 41 and on both sides of the side wall 42.

Further, the mounting portion 43 is opened with a plurality of mounting holes 430 to be mounted on the base 10 by a fixing mechanism (not shown). In the present embodiment, the thickness of the mounting portion 43 increases as the distance from the side wall 42 increases, so that the mounting hole 430 is opened in the mounting portion 43 to be mounted on the base 10.

It can be understood that, by arranging the mounting portion 43 in a C shape, one side of the pressing member 40 is provided with the side wall 42, and the other side is not provided with the first notch 420 for allowing the pushing device 30 to pass through and move to the pushing working position, i.e. directly above the position for pushing the target object 200. In addition, the first notch 420 and the through hole 422 in the sidewall 42 are disposed opposite to each other, so that light sources (not shown) on two sides can pass through the first notch 420 and the through hole 422, respectively, thereby being helpful for lighting during image capture.

Further, before the pressing member 40 presses the first carrier sheet 60, the distance between the first carrier sheet 60 and the second carrier sheet 70 is a predetermined value, for example, 1.5mm. The pressing member 40 can move along the third direction Z and press the first carrier sheet 60 to further fine-tune the distance between the first carrier sheet 60 and the second carrier sheet 70. For example, when the pressing member 40 presses the first carrier sheet 60, the pressing member 40 may press down along the third direction Z, so that the distance between the arrangement region of the target object 200 to be ejected of the first carrier sheet 60 and the second carrier sheet 70 is shortened to a specific value, for example, 0.5mm or less, for example, 0.2mm, 0.4mm, and the like.

Of course, in other embodiments, the pressing member 40 can also adopt other structures as long as it can press the first carrier sheet 60 so that the arrangement region of the target object 200 to be ejected of the first carrier sheet 60 approaches the second carrier sheet 70, and the specific structure thereof is not limited.

The image capturing device 50 is fixedly disposed on the base 10 through a fixing assembly 51, and is located at a side of the first carrying area 23 away from the second carrying area 24, for capturing an image of the object 200 to be pushed. For the fixing member 51, a known fixing structure can be adopted, and a detailed description thereof is omitted.

The image capturing device 50 is not particularly limited, as long as it is disposed corresponding to the object 200 and can capture an image of the object 200. In the present embodiment, the image capturing device 50 may be a camera (CCD), but is not limited thereto.

When pushing the target 200, the relative positions of the image capturing device 50 and the pushing device 30 are coaxial, and before the pushing device 30 pushes the target 200, the image capturing device 50 can take a picture and image to accurately calculate the position of the target 200, so that the target 200 to be pushed moves to the center of the pushing device 30, that is, the relative positions of the target 200 to be pushed, the pushing device 30, the pressing member 40 and the image capturing device 50 are coaxial, thereby ensuring that the position accuracy of each target 200 to be pushed and the pushing member 31 in the pushing device 30 can push the center of the target 200, and if the target 200 is a crystal grain, the size is small and is a cuboid with a size of about 0.08-0.15 mm, if the pushing member 31 deviates by more than 0.01mm, the situation of crystal turnover or skew occurs in the pushing process.

Preferably, in the present embodiment, the image capturing device 50 captures an image of the object 200 through direct and front view imaging.

In the present embodiment, the pushing device 30, the pressing member 40 and the image capturing device 50 are located on the same side, but in other embodiments, the pushing device 30, the pressing member 40 and the image capturing device 50 may be located on different sides, so long as the pushing device 30 and the pressing member 40 are located on the same side. For example, the pushing device 30 and the pressing member 40 are located at a different side from the image capturing device 50, in this case, the image capturing device 50 is located at a side of the second carrying area 24 away from the first carrying sheet 60, and the pushing device 30 and the pressing member 40 are located at a side of the first carrying sheet 60 away from the second carrying area 24.

It can be understood that when the pushing device 30 is located at the pushing preparation position, the image capturing device 50 does not affect the capturing of the image of the target 200 in the pressing member 40 by the pushing device 30. The purpose of the pusher 30 moving between the pushing preparation position and the pushing work position is: the image capture device 50 can easily capture the image of the target 200 without additional optical reflection.

Referring to fig. 9 (a) - (d), the operation flow of the transferring apparatus 100 moving and transferring the die will be further described.

Referring to fig. 9 (a), the image capturing device 50 captures an image and calculates a position deviation d1 between the die 1 and the pushing position O and a position deviation d2 between the die 1 and the die 2. It can be understood that the pushing position O is always kept constant, the position deviation d1 is the distance between the center of the die 1 and the pushing position O, and the position deviation d2 is the distance between the center of the die 1 and the center of the die 2. The positional deviation d2 may also be referred to as a pitch (pitch).

Then, referring to fig. 9 (b), according to d1, the die 1 is moved to the pushing position O. It is understood that the movement of the die 1 to the pushing position O means that the die 1 overlaps the pushing position O by moving the first carrier sheet 60, and the same is true for the movement of the die 2 to the pushing position O.

Then, the pushing device 30 moving from the pushing preparation position to the pushing working position pushes the die 1 to transfer the die 1 from the first carrier 60 to the second carrier 70.

Referring to fig. 9 (c), after the die 1 is pushed to the second carrier 70, the moving and placing device 20 moves the first carrier 60 according to d2 to move the die 2 to the pushing position O. However, after the pushing device 30 pushes the die 1, no matter whether the first carrier sheet 60 is punctured during pushing or not, the tension or other characteristics of the first carrier sheet 60 may be changed, so that the positions of other dies (e.g., die 2, die 3) on the first carrier sheet 60 are changed. Therefore, it is likely that the die 2 cannot be accurately moved to the pushing position O by moving the die 2 only according to d2. As shown in fig. 9 (c), the die 2 is moved by d2 alone, and the die 2 cannot be aligned with the pushing position O precisely.

Next, similar to the operation of fig. 9 (a), the image capturing device 50 captures an image of the die 2, and calculates a position deviation between the die 2 and the pushing position O, and a position deviation (i.e., pitch) between the die 2 and a next die to be pushed (e.g., die 3). It should be noted that after the pushing device 30 finishes pushing the die 1, it will return to the pushing preparation position from the pushing working position to avoid obstructing the image capturing device 50 from capturing the image of the die 2.

Thereafter, referring to fig. 9 (d), similarly to the operation of fig. 9 (b), the moving and placing device 20 moves the first carrier sheet 60 to finely adjust the position of the die 2 according to the calculated position deviation between the die 2 and the pushing position O, so that the die 2 is precisely located at the pushing position O. The pushing device 30 will enter the pushing working position from the pushing preparation position again to push the die 2.

The operations (a) to (d) of fig. 9 generally include an image capturing step in which the image capturing device 50 captures an image of a die, a center positioning step in which the die is accurately moved to the pushing position O according to the image capturing result, a pushing step in which the die is pushed to the second carrier 70, and a pitch positioning step in which the next die is moved according to the pitch obtained in the image capturing step. In some embodiments, the above four stages may be sequentially and repeatedly performed to transfer the dies on the first carrier 60 onto the second carrier 70 one by one.

The transfer apparatus 100 further comprises a first driving device 80, the first driving device 80 being used to control the movement of the pressing member 40 in the vertical plane. More specifically, the first driving device 80 is used to control the pressing piece 40 to move in the third direction Z (i.e., the preset moving direction).

Further, the pressing member 40 may also be moved in the horizontal and vertical planes under the control of the first driving means 80. It will be appreciated that the pressing member 40 can be moved in a horizontal plane to perform maintenance or replacement of the pressing member 40. In other words, in addition to moving along a vertical plane (i.e., a plane including the first moving direction), the pressing member 40 is also allowed to move on a horizontal plane (e.g., from the maintenance position to the pressing preparation position, or from the pressing preparation position back to the maintenance position), so as to facilitate maintenance or replacement of the pressing member 40 by a person.

More specifically, when the target object 200 on the first carrier sheet 60 is to be pushed after the expansion ring 63 is placed on the carrier tray 212, the pressing member 40 moves onto the first carrier sheet 60 and presses the first carrier sheet 60 under the control of the first driving device 80, so that the region of the first carrier sheet 60 where the target object 200 is to be pushed approaches the second carrier sheet 70, and continuously keeps pressing the first carrier sheet 60 until all the target objects 200 on the first carrier sheet 60 are transferred onto the second carrier sheet 70, and moves to the pressing preparation position under the control of the first driving device 80. After the operator replaces the next expansion ring 63, the above operation is repeated.

The transfer apparatus 100 further comprises a second driving device 90 for controlling the thruster 30 to move along a specific trajectory. The specific trajectory may correspond to a change in position of the thrusting device 30 in the first direction X, the second direction Y, and/or the third direction. For example, the particular trajectory may be substantially arc-shaped. However, the disclosure is not limited thereto, and the specific track may be a straight line or other shapes, as long as the specific track allows the pushing device 30 to move back and forth at different specific positions (e.g., a pushing preparation position, a pushing working position, etc.).

It can be understood that after the image capturing device 50 images the target object 200 to be pushed, the second driving device 90 controls the pushing device 30 to move from the pushing preparation position to the pushing working position, after the pushing member 31 passes through the pushing member 40 to push the target object 200, the pushing device 30 returns to the pushing preparation position from the pushing working position, after the image capturing device 50 images the next target object 200 to be pushed, the second driving device 90 controls the pushing device 30 to move from the pushing preparation position to the pushing working position again, and such steps are repeated, so as to transfer the target object 200 on the first carrier sheet 60 to the second carrier sheet 70.

The area of the first carrier sheet 60 for placing the target object 200 is large, and the tension is not easy to be controlled when the pushing member 31 directly pushes the target object 200 on the first carrier sheet 60, so that the whole first carrier sheet 60 is easily affected. In the present embodiment, when the target object 200 is pushed, the pressing member 40 moves to contact the contact surface 62 of the first carrier sheet 60 and presses the first carrier sheet 60, so that the installation region of the target object 200 to be pushed of the first carrier sheet 60 is close to the second carrier sheet 70, and thus, the change of the tension is not likely to spread over the entire first carrier sheet 60, and the tension of the installation region of the target object 200 to be pushed is easily controlled.

Further, due to the material and processing, the distance between the first carrier sheet 60 and the second carrier sheet 70 is large, usually, the distance between the first carrier sheet 60 and the second carrier sheet 70 reaches 1.5mm or more, and the preferred working distance, that is, the preferred scheme, the distance between the first carrier sheet 60 and the second carrier sheet 70 needs to be 0.5mm or less. In the present embodiment, the pressing member 40 is arranged to press the first carrier sheet 60, so that the arrangement region of the target object 200 to be pushed of the first carrier sheet 60 is close to the second carrier sheet 70, and the distance between the arrangement region of the target object 200 to be pushed of the first carrier sheet 60 and the second carrier sheet 70 is within a preset range, for example, less than or equal to 0.5mm, so that the pushing member 31 pushes the target object 200. By providing the pressing member 40 in this manner, the distance between the first carrier sheet 60 and the second carrier sheet 70 can be effectively controlled. Of course, the distance between the region of the first carrier 60 where the target object 200 is to be pushed and the second carrier 70 can be adjusted according to the requirement, and is not limited herein.

In this embodiment, since the expansion ring 63 is usually manually placed and fixed by a fixing structure, and there may be tolerance in the combination of the inner ring 631 and the outer ring 632 in the expansion ring 63, if the height control is implemented by the expansion ring 63 itself to finely adjust the distance between the first carrier sheet 60 and the second carrier sheet 70, higher cost is required.

This is because, in addition to the fact that the entire expansion ring 63 is large in area and difficult to control, it is difficult to ensure that the positions at which the expansion rings 63 are manually placed are all the same, i.e., there is a difference in the placement positions of the expansion rings 63 at each stage, and it is difficult to adjust the heights of the first carrier sheets 60 to be the same, and thus, it is difficult to ensure the distance between the first carrier sheets 60 and the second carrier sheets 70. In contrast, in the present embodiment, since the pressing position of the pressing member 40 is fixed by the pressing member 40, even if there is a difference in the placement position of the expansion ring 63 at each stage, the distance between the installation region of the target object 200 to be pushed by the first carrier sheet 60 and the second carrier sheet 70 can be made uniform by the pressing member 40, that is, the height can be easily controlled.

For example, in the case that the pressing member 40 is not provided, it is assumed that the first carrier sheet 60 is not completely parallel to the second carrier sheet 70 during the initial manual placement, for example, the left side of the first carrier sheet 60 is higher than the right side, so that when the target 200 on the left side of the first carrier sheet 60 is transferred, the distance between the first carrier sheet 60 and the second carrier sheet 70 on the left side is larger, whereas when the target 200 on the right side is transferred, the distance between the first carrier sheet 60 and the second carrier sheet 70 on the right side is smaller, so that even if the pushing device 30 pushes the target 200 at the same position, that is, the pushing paths are the same, the pushing results are different, that is, the distance that the target 200 moves to the second carrier sheet 70 after actually pushing the target 200 is different in the two cases. Even if the pressing member 40 is provided to press the first carrier sheet 60, the distance that the target object 200 moves toward the second carrier sheet 70 is the same when the left and right target objects 200 are pushed.

Moreover, since the industrial CCD needs to take images at high speed, it usually does not have an auto-focusing function, and the pressing ring 41 is disposed to press the first carrier sheet 60, so that the region of the first carrier sheet 60 where the target object 200 is to be pushed is kept at a fixed position, and a fixed focal length can be maintained, so that the CCD can take images quickly and form clear images.

In addition, after the target object 200 is pushed, the pushing device 30 moves to the pushing preparation position to allow the image capturing device 50 to capture an image to position the next target object 200 to be pushed, because the first carrier sheet 60 is an elastic film, the position deviation of the first carrier sheet 60 is easily caused along with the time and the number of the target objects 200, and in the present embodiment, the pressing member 40 is arranged to press the first carrier sheet 60, so that the first carrier sheet 60 can effectively and stably move on the horizontal plane, thereby avoiding the above situation.

Hereinafter, a method of transferring the target 200 in the transfer apparatus 100 according to the present embodiment will be described with reference to fig. 10 to 16.

When the target 200 picking process is performed by using the transferring apparatus 100 shown in fig. 1, an embodiment of the method for transferring the target 200 of the present invention includes the following steps, it should be noted that the preparation and placement of the target can be performed by a conventional technique, and therefore, the detailed description thereof is omitted.

First, referring to fig. 10, the first carrier sheet 60 and the second carrier sheet 70 with the object 200 are respectively disposed on the first placing portion 21 and the second placing portion 22, and the object 200 is located between the first carrier sheet 60 and the second carrier sheet 70. At this time, the pusher 30 is located at the pushing preparation position, and the pressing member 40 is located at the maintenance position. In the present embodiment, the pushing device 30 and the pressing member 40 are located on both sides of the axis a. In other words, the thrust preparation position and the maintenance position are located on both sides of the axis a. In some embodiments, the ejection preparation position and the maintenance position may be other positions than on the axis a.

Referring to fig. 11, the first placing portion 21 and the second placing portion 22 are translated to move the target object 200 on the first carrier sheet 60 to the axis a of the image capturing device 50, and the target object 200 is detected by the image capturing device 50, at this time, the pushing device 30 is located at the pushing preparation position, and the pressing element 40 is located at the pressing preparation position, that is, the pressing element 40 is coaxial with the image capturing device 50.

Next, referring to fig. 12, the pressing member 40 is moved to the first carrier sheet 60, and the first carrier sheet 60 is pressed, so that the region of the first carrier sheet 60 where the target object 200 to be pushed is disposed is close to the second carrier sheet 70. At this time, the pusher 30 is located at the ready-to-push position.

Referring to fig. 13 to 14, the pushing device 30 is moved from the pushing preparation position to the pushing working position, that is, the pushing member 31 passes through the pressing ring 41 to push the first carrier sheet 60, and pushes up the corresponding target 200 to directly transfer and adhere the pushed target 200 to the second carrier sheet 70, so as to complete the picking process of the target 200.

Referring to fig. 15, the pushing member 31 is returned to the position, such that the pushing member 31 is retracted into the thimble cover 32, and at this time, the pushing device 30 is located at the pushing working position, and the pressing member 40 presses the first carrier sheet 60.

Referring to fig. 16, the pushing device 30 returns to the pushing preparation position, and the pressing member 40 presses the first carrier sheet 60 to translate the first carrier sheet 60 and the second carrier sheet 70, so as to enter a process of pushing the next target object 200.

It should be particularly noted that, with the aid of the initial carrier sheet of the preprocessing step, the light-emitting surface of each object 200 is disposed on the carrying surface of the first carrier sheet 60 in a covering manner, so that when the object 200 is transferred from the first carrier sheet 60 to the second carrier sheet 70, the light-emitting surface of the object 200 is exposed to the mounting surface of the second carrier sheet 70. In addition, since the light emitting surface of the object 200 is firstly placed on the first carrier sheet 60 in an inverted manner, the position of the object 200 on the first carrier sheet 60 is also correspondingly inverted with respect to the position on the initial carrier sheet, and therefore, before the object 200 is transferred, the position inversion processing is performed by adjusting the control software according to the position of the object 200 which is already inverted.

The present invention is not limited to the above embodiments, and various modifications can be made within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments are also included in the technical scope of the present invention. Further, by combining the technical means disclosed in the respective embodiments, new technical features can be formed.

Description of the reference numerals

100: transfer apparatus

200: target object

10: base seat

20: mobile placing device

21: a first placing part

211: first base station

212: bearing plate

22: second placing part

221: second base station

222: clamping piece

23: a first bearing area

24: second bearing area

30: pushing device

31: pushing piece

32: thimble cover

320: cavity body

40: pressing piece

41: pressing ring

411: second gap

42: side wall

420: first gap

422: perforation

43: mounting part

430: mounting hole

50: image acquisition device

51: fixing assembly

60: first bearing sheet

61: bearing surface

62: contact surface

63: expansion ring

631: inner ring

632: outer ring

70: second bearing sheet

71: setting surface

80: first driving device

90: second driving device

A: axial line

X: a first direction

Y: second direction

Z: third direction

D1: inner diameter of press ring

D2: outer diameter of press ring

D3: ring width of press ring

O: pushing position

d1: deviation of position

d2: deviation of position

1: die

2: die

3: crystal grain

Claims (10)

1. A transfer apparatus for transferring at least one target on a first carrier sheet to a second carrier sheet, the transfer apparatus comprising:

the moving and placing device is used for placing the first bearing piece in a first bearing area and placing the second bearing piece in a second bearing area, so that the first bearing piece and the second bearing piece are spaced in opposite directions and can translate in opposite directions;

the pressing piece is movably arranged on one side, away from the second bearing area, of the first bearing area and used for pressing the first bearing sheet along a preset moving direction, so that a setting area of the target object to be pushed of the first bearing sheet is close to the second bearing sheet, and the preset moving direction is the direction of the first bearing area towards the second bearing area; and

the pushing device is movably arranged on one side of the first bearing area, which is far away from the second bearing area, and comprises a pushing piece, the front end of the pushing piece is used for penetrating through the pressing piece along the preset moving direction to push the target object,

the pressing piece comprises a side wall, a first notch is formed in one side, far away from the first bearing area, of the side wall, and the first notch is used for the pushing device to penetrate through.

2. The transfer apparatus of claim 1,

the pressing piece forms a second gap, and the second gap is arranged on one side, close to the first bearing area, of the pressing piece.

3. The transfer apparatus according to claim 2,

the pressing piece further comprises a pressing ring and an installation part, the pressing ring is limited by the second notch, the installation part is arranged opposite to the pressing ring, and the installation part and the pressing ring are arranged on two sides of the side wall respectively.

4. The transfer apparatus according to claim 1,

the connecting part of the bottom surface and the side surface of the pressing ring forms a fillet.

5. The transfer apparatus of claim 1,

the second gap is a round hole.

6. The transfer apparatus according to claim 1,

a through hole is further formed in the side wall, and the through hole is opposite to the first notch.

7. The transfer apparatus according to claim 1,

the transfer equipment further comprises an image capturing device which is fixedly arranged on one side of the first bearing area, which is far away from the second bearing area, and is used for capturing images of the target object to be pushed.

8. The transfer apparatus according to claim 7,

when the pushing device pushes the target object, the relative positions of the pushing device, the pressing piece and the image capturing device are coaxial.

9. The transfer apparatus of claim 1,

the pushing device further comprises a thimble cover, and the pushing piece can protrude out of the thimble cover.

10. The transfer apparatus according to claim 1,

the movable placing device comprises a first placing part and a second placing part, wherein the first placing part and the second placing part are arranged in a mode of being opposite in interval and capable of relatively translating.

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