TW202221774A - Cutting device and manufacturing method for cut product - Google Patents

Abstract

The invention makes it possible to cut, by a blade, an object to be cut in which cutting lines in divided elements adjacent to each other are set on straight lines different from each other. A cutting device 100 of the invention cuts an object W to be cut along cutting lines CL1 and CL2, in which in the object W to be cut, multiple divided elements W1 and W2 are connected by a connection part W3 and the cutting lines CL1 and CL2 in the divided elements W1 and W2 adjacent to each other are set on different straight lines. The cutting device 100 includes: a cutting table 2, sucking and holding the object W to be cut; and a cutting mechanism 3, cutting, by a blade 31, the object W to be cut that is held on the cutting table 2. The cutting table 2 includes: a first table suction part 21, sucking one of the divided elements W1 in the divided elements W1 and W2 adjacent to each other; and a second table suction part 22, independent of the first table suction part 21 and sucking the other divided element W2.

Description

Cutting device and manufacturing method of cut product

The present invention relates to a cutting device and a method for manufacturing a cut product.

Conventionally, as disclosed in Patent Document 1, for example, among cutting devices for cutting workpieces such as wafer-scale package (Chip Scale Package, CSP) substrates, there is a cutting device including a cutting table. The table includes a plurality of first suction ports for suctioning the package, and a plurality of second suction ports for suctioning edge debris (debris area) adjacent to the package. In the cutting device, a plurality of first suction ports are arranged in an array corresponding to the arrangement structure of the package to be cut, and a plurality of second suction ports are arranged at a plurality of positions consistent with edge fragments. Near the perimeter of the first suction port. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2003-234310

[The problem to be solved by the invention]

On the other hand, in recent years, in semiconductor packages such as Small Outline Transistor (SOT) or Small Outline Integrated Circuit (SOIC), in order to use lead frames of the same size to manufacture more packages As shown in FIG. 10 , a resin-molded substrate formed by resin molding was produced using a lead frame formed by interlacing the leads.

However, in a resin-molded substrate using a lead frame formed by staggered leads, since the cutting lines of the package are not located on the same straight line, it is difficult to cut the conventional cutting device using a blade.

Therefore, the present invention has been made in order to solve the above-mentioned problems, and its main problem is to easily cut with a blade a cutting object whose cutting lines in mutually adjacent division elements are set on mutually different straight lines thing. [Means of Solving Problems]

That is, the cutting device of the present invention is a cutting object along which a plurality of division elements are connected by a connecting portion and the cutting lines in the adjacent division elements are set on mutually different straight lines. The cutting device for cutting the cutting line is characterized by comprising: a cutting table for adsorbing and holding the object to be cut; and a cutting mechanism for cutting by a blade and being held by the cutting table the cutting object, and the cutting table includes: a first table suction part, which suctions one of the divided elements adjacent to each other; and a second table suction part, which is independent The other division element is adsorbed on the first table adsorption part. [Effect of invention]

According to the present invention constituted as described above, it is possible to easily cut a cutting object whose cutting lines in mutually adjacent division elements are set on mutually different straight lines by a blade.

Hereinafter, the present invention will be described in further detail by way of examples. However, the present invention is not limited by the following description.

As described above, the cutting device of the present invention is an object to be cut in which a plurality of division elements are connected by a connecting portion, and the cutting lines in the adjacent division elements are set on mutually different straight lines. The cutting device for cutting along the cutting line is characterized by comprising: a cutting table for sucking and holding the object to be cut; and a cutting mechanism for cutting by a blade and performing the cutting operation the object to be cut held by a table, and the cutting table includes: a first table suction part for suctioning one of the divided elements adjacent to each other; and a second table suction part , which is independent of the first table adsorption part to adsorb the other said division element. In the case of this cutting device, since the cutting table includes a first table suction portion for sucking one of the adjacent division elements, and a second table suction portion for sucking the other of the adjacent division elements Therefore, the adsorption of only one or the other of the adjacent division elements can be released, and can be rearranged with respect to the cutting table or taken out from the cutting table. Thereby, it is possible to easily cut an object to be cut in which the cutting lines in the division elements adjacent to each other are set on straight lines different from each other by the blade.

The cutting device of the present invention can be considered as a specific embodiment for adsorbing only one or the other of the adjacent division elements, and rearranging them with respect to the cutting table or taking them out from the cutting table. It further includes a conveyance mechanism that conveys the object to be cut to the cutting table, and the conveyance mechanism includes a conveyance suction portion that suctions only one or the other of the adjacent division elements.

Preferably, the cutting table releases the first table suction part or the second table in a state in which the connecting part is cut by the cutting mechanism and the adjacent division elements are separated from each other. One of the table suction parts sucks the divided elements, and after the conveying mechanism has sucked the divided elements whose suction on the cutting table has been released, cut the adjacent divided elements with each other. The broken lines are aligned in such a way that they become on the same straight line. With this configuration, since the cutting lines adjacent to each other are aligned so as to be on the same straight line, the cutting lines of the adjacent division elements can be cut at one stroke.

As a specific embodiment of the object to be cut, it is considered that the plurality of division elements are arranged along the cutting direction by the blade, and the arrangement of these elements is divided into at least two groups, wherein the The cutting lines of the divided elements are located on the same straight line, and the cutting lines of the divided elements of another group are located on the same straight line. In the object to be cut having this structure, it is preferable that the first table suction part suctions the division elements of the one group, and the second table suction part suctions the division elements of the other group.

In this case, it is desirable to configure the conveyance mechanism according to the suction state of the cutting table, and it is considered that the conveyance mechanism includes a first conveyance suction part for suctioning the divided elements of one group, and suction for the other group. The second transfer suction part of the divided element.

Moreover, the manufacturing method of the cut product using the said cutting device is also an aspect of this invention.

<An embodiment of the present invention> Hereinafter, an embodiment of the cutting device of the present invention will be described with reference to the drawings. It should be noted that any of the drawings shown below are appropriately omitted or exaggerated and schematically drawn for easy understanding. The same symbols are attached to the same structural elements, and explanations are appropriately omitted.

<Overall structure of cutting device> The cutting device 100 of the present embodiment separates the cutting object W into a plurality of cut products P (products P) by cutting the cutting line CL0 to the cutting line CL2 set to the cutting object W.

Here, as shown in FIGS. 1 and 2 , the object to be cut W is connected to a plurality of division elements W1 and W2 by a connecting portion W3, and the division elements W1 and W2 adjacent to each other, the cutting line CL1 in the division element W2, and the cut The disconnection CL2 is set on a straight line different from each other. Each of the division elements W1 and W2 seals a plurality of wafers by resin molding, and here, the plurality of wafers are arranged in a row. In addition, leads are provided corresponding to the respective wafers. The plurality of dividing elements W1 and W2 are arranged along the cutting direction (left-right direction in FIG. 1 ) by the blade 31 (see FIG. 3 ), and both ends of these are connected by the connecting portion W3 . Specifically, the division elements W1 of the odd-numbered rows of one group and the division elements W2 of the even-numbered rows of the other group are configured such that the leads of these are interleaved. Thereby, the cutting lines CL1 of the division elements W1 in odd-numbered rows of one group are located on the same straight line, and the cutting lines CL2 of the division elements W2 in the even-numbered rows of the other group are located on the same straight line. Moreover, the cutting line CL1 of the division element W1 of odd-numbered rows and the cutting line CL2 of division element W2 of the even-numbered row are located on mutually different straight lines (refer FIG. 2). In addition, the code|symbol CL0 in FIG. 2 is a cutting line for cutting|disconnecting the connection part W3, and dividing into several division elements W1 and W2. In addition, the cutting line CL0 - the cutting line CL2 shown in each figure are imaginary lines which are scheduled to be cut by the blade 31, and are not displayed on the actual object to be cut W.

Specifically, as shown in FIG. 3 , the cutting device 100 includes a cutting table 2 that attracts and holds the object to be cut W; The cutting object W; the conveying mechanism 4 (hereinafter also referred to as the loader 4 ), which transports the cutting object W to the cutting table 2 ; and the unloading mechanism 5 (hereinafter also referred to as the unloader 5 ), which will be The cut product P cut on the cutting table 2 is carried out from the cutting table 2 .

As shown in FIG. 4 , the cutting table 2 suctions and holds the cutting object W, and includes: a first table suction part 21 for suctioning one of the adjacent divided elements W1 and W2; and The second table suction part 22 suctions the other divided element W2. In addition, the cutting table 2 is configured to be movable along at least the Y direction by a movement mechanism not shown. Moreover, the cutting table 2 may be comprised so that it may rotate in the (theta) direction by the rotation mechanism which is not shown in figure.

The first stage suction part 21 and the second stage suction part 22 are independent of each other, and are configured so that suction and stop can be switched independently of each other.

Specifically, the first table suction part 21 collectively suctions the division elements W1 of odd-numbered rows (1 row, 3 rows, 5 rows, ･･･) in the object W to be cut, and the second table suction part 22 collectively sucks The division element W2 of the even-numbered lines (2 lines, 4 lines, 6 lines, ･･･) in the object W is cut. That is, the cutting table 2 is configured to be able to independently switch between the suction or stop of the divided elements W1 in odd-numbered rows and the suction or stop of the divided elements W2 in even-numbered rows.

The first table suction part 21 includes: a first suction hole 21a opened on the upper surface of the cutting table 2; inside; and a first suction pump 21c connected to the first internal flow path 21b. In addition, the second table suction part 22 includes: a second suction hole 22a opened on the upper surface of the cutting table 2; and a second internal flow path 22b continuous with the second suction hole 22a and formed in the cutting table 2; and a second suction pump 22c connected to the second internal flow path 22b. In addition, the 1st suction pump 21c and the 2nd suction pump 22c may be made common, for example, the internal flow path connected to the suction pump may be switched using a switching valve not shown. Furthermore, instead of a suction pump, an ejector may also be used.

The cutting mechanism 3 cuts the object W to be cut into a linear shape, and as shown in FIG. 3 , includes a blade 31 , a rotating shaft portion 32 for rotating the blade 31 , and the rotating shaft portion 32 along at least the X direction and the Z direction. Moving mechanism (not shown). The rotation axis direction of the blade 31 is parallel to the upper surface of the cutting table 2, and here, is the direction along the horizontal direction. Then, by relatively moving the cutting table 2 and the cutting mechanism 3 , the cutting object W is cut by the blade 31 .

The loader 4 conveys the object to be cut W to the cutting table 2 from the object to be cut accommodating section 6 (refer to FIG. 3 ) in which the object to be cut W is accommodated. In addition, as will be described later, the loader 4 divides the adjacent division elements W1 and CL2 so that the cutting lines CL1 and CL2 of the division elements W1 and W2 adjacent to each other in the table 2 coincide with each other. One of the elements W2 moves.

Specifically, as shown in FIG. 5 , the loader 4 includes: a suction block 41 provided with a transfer suction part 411 and a transfer suction part 412 for suctioning the object to be cut W; and a moving mechanism (not shown), The adsorption block 41 is moved.

The suction block 41 is provided with a first transfer suction part 411 for suctioning adjacent divided elements W1 and one of the divided elements W2, and a second transfer suction part 412 for suctioning the other divided element W2. That is, the suction block 41 of the loader 4 includes the conveyance suction part 411 and the conveyance suction part 412 corresponding to each of the table suction parts 21 and 22 of the cutting table 2 .

Specifically, the first conveyance suction unit 411 suctions the division elements W1 in odd-numbered rows (1 row, 3 rows, 5 rows, ･･･) in the object to be cut W, and the second conveyance suction unit 412 sucks the cutting object Split element W2 of even-numbered rows (2 rows, 4 rows, 6 rows, ･･･) in W. That is, the loader 4 is configured so as to be able to independently switch between the suction or stop of the divided elements W1 of odd-numbered rows and the suction or stop of the divided elements W2 of even-numbered rows.

The first conveyance suction part 411 includes: a first suction hole 411a opened on the lower surface of the suction block 41; a first internal flow path 411b, continuous with the first suction hole 411a, formed inside the suction block 41; and The first suction pump 411c is connected to the first internal flow path 411b. Moreover, the adsorption|suction pad 411d made of resin is provided in the 1st adsorption|suction hole 411a, for example. In addition, the second transfer suction part 412 includes: a second suction hole 412a opened on the lower surface of the suction block 41; ; and a second suction pump 412c connected to the second internal flow path 412b. Furthermore, an adsorption pad 412d is provided in the second adsorption hole 412a. In addition to this, the first suction pump 411c and the second suction pump 412c may be used in common, and the internal flow path connected to the suction pump may be switched, for example, using a switching valve not shown.

The unloader 5 sucks the cut product P, and conveys the cut product P from the cutting table 2 to the cut product storage portion 7 (see FIG. 3 ). Specifically, as shown in FIG. 6 , the unloader 5 includes: a suction block 51 provided with a conveyance suction part 511 for suctioning the cut product P; and a moving mechanism (not shown) that moves the suction block 51 .

The conveyance and suction part 511 of the suction block 51 includes: suction holes 511a opened on the lower surface of the suction block 51; internal flow paths 511b continuous with the suction holes 511a and formed inside the suction block 51; and a suction pump 511c is connected to the internal flow path 511b. The adsorption|suction pad 511d made of resin is provided in the adsorption hole 511a, for example. As described above, the unloader 5 is different from the loader 4 in that it does not include two independent conveyance suction parts, but includes the conveyance suction part 511 that suctions the plurality of cut products P indiscriminately. Furthermore, in FIG. 6 , the adsorption holes 511a in the odd-numbered rows and the adsorption holes 511a in the even-numbered rows are arranged in a straight line along the Y direction, and they can also be staggered from each other.

<Cutting operation of the cutting device 100> The operation of the cutting device 100 will be described with reference to FIGS. 7 and 8 . In addition, the following cutting operation|movement is performed by controlling each part by the control part CTL (refer FIG. 3).

(1) Loading of the cutting object W The loader 4 sucks and holds the cutting object W accommodated in the cutting object accommodating section 6 , and transfers it to the cutting table 2 . The cutting object W conveyed to the cutting table 2 is sucked and held by the first table suction part 21 and the second table suction part 22 of the cutting table 2 (<Suction and Holding Cutting Object> in FIG. 7 . ). Here, the positioning of the object to be cut W with respect to the cutting table 2 is performed, for example, by fitting a positioning hole formed in the object to be cut W with a positioning pin provided in the cutting table 2 . Alternatively, it may be performed by fitting the positioning holes formed in the object to be cut W with the positioning pins provided in the loader 4 .

(2) Cutting of the connecting portion W3 The connecting portion W3 of the object to be cut W that is adsorbed and held by the cutting table 2 is cut by the cutting mechanism 3 (<cutting of the connecting portion> in FIGS. 7 and 8 ). In this embodiment, the connection part W3 which connects the both ends of the some division element W1, W2 is cut|disconnected, respectively. Thereby, the plurality of division elements W1 and W2 of the object to be cut W are in a state of being separated from each other. In this state, the cutting lines CL1 and CL2 of the dividing elements W1 of odd-numbered rows and the dividing elements W2 of even-numbered rows are located on different straight lines, and are not staggered (displaced) on the same straight line.

(3) The adsorption of the division elements W2 of the even-numbered rows is stopped. In a state where the connecting portion W3 is cut and the adjacent divided elements W1 and W2 are separated from each other, the cutting table 2 stops the suction of the divided elements W2 in the even rows by the second table suction portion 22 ( FIG. 7 . and <Suction stop/pull-up for even-numbered rows> in FIG. 8 . In addition, on the cutting table 2, the first table suction part 21 maintains the suction of the divided elements W1 in odd-numbered rows. Here, before stopping the suction by the second table suction part 22 , the suction pads of the loader 4 (specifically, the suction pads 412 d of the second conveyance suction part 412 ) are pressed against the division of the even-numbered rows in advance Element W2. Thereby, positional displacement of the division elements W2 of the even-numbered rows caused by stopping the suction of the second table suction part 22 of the cutting table 2 is prevented.

(4) Rearrangement of division elements W2 of even-numbered rows After the loader 4 sucks the even-numbered row divided elements W2 that have been stopped on the cutting table 2, the even-numbered row divided elements W2 are pulled up from the cutting table 2 (<even-numbered rows in FIGS. 7 and 8 ). Adsorption stop/pull-up >). Then, the loader 4 is rearranged so that the cutting line CL2 of the dividing element W2 of the even-numbered row and the cutting line CL1 of the dividing element W1 of the odd-numbered row are aligned on the same straight line (<even-numbered row in FIGS. 7 and 8 ). reconfiguration>). The divided elements W2 of the rearranged even-numbered rows are sucked and held on the cutting table 2 by the second table suction part 22 .

Here, the positioning in the rearrangement considering the division elements W2 of the even-numbered rows is performed in the following manner: (i) Before moving the division elements W2 of the even-numbered rows, the division elements W1 of the odd-numbered rows and the division elements of the even-numbered rows are determined by a camera with a camera. Image recognition is performed on the arrangement of W2 (for example, a feature part such as an edge portion and a lead portion), the movement amount of the positioning of the division elements W2 of the even-numbered lines is calculated by the image recognition, and the loader 4 is controlled based on the calculated movement amount. . In addition to this, the positioning in the rearrangement of the division elements W2 of the even-numbered rows can also be performed in the following manner: (ii) By making the positioning holes provided in the division elements W2 of the even-numbered rows and the cutting table provided in the cutting table 2, or (iii) the position adjustment amount of the division element W2 of the even-numbered row is preset, and the movement mechanism of the loader 4 is controlled based on the position adjustment amount.

(5) Cutting of the division elements W1 and W2 of odd-numbered lines and even-numbered lines After rearranging the division elements W2 of the even-numbered rows, the cutting mechanism 3 cuts the cutting line CL1 of the division elements W1 of the odd-numbered rows and the cutting line CL2 of the division elements W2 of the even-numbered rows on the same straight line (Fig. 8). <Breaking of odd-numbered and even-numbered lines>). Furthermore, before the cutting of the plurality of division elements W1 and W2, image recognition may be performed by a camera to confirm the cutting line CL1 of the division elements W1 in odd-numbered rows and the cutting line CL2 of the division elements W2 in even-numbered rows. on the same straight line.

(6) Carrying out the cut product P The unloader 5 suctions and holds the plurality of cut products P suctioned and held by the cutting table 2 , and transports them to the cut product storage section 7 . Here, before the suction of the cutting table 2 is released, the suction pads 511d of the unloader 5 can be pressed against the plurality of cutting products P, so that the positional deviation or misalignment of the plurality of cutting products P can be prevented. adsorption.

<Effects of the present embodiment> According to the cutting device 100 of the present embodiment, the cutting table 2 includes the first table suction part 21 for suctioning one of the adjacent division elements W1 and the division elements W2, and the first table suction part independent of the first table suction part 21 and the second table suction part 22 of the other one of the adjacent divided elements W1 and W2, the adsorption of only one or the other of the adjacent divided elements W1 and W2 can be released. , and relocate relative to the cutting table 2, or take it out from the cutting table 2. Thereby, it is possible to easily cut the cutting object W in which the adjacent division elements W1, the cutting line CL1 in the division element W2, and the cutting line CL2 are set on different straight lines by the blade 31. .

<Other variant embodiments> In addition, this invention is not limited to the said embodiment.

For example, in the above-described embodiment, the division elements W2 of the even-numbered rows are rearranged. However, by rearranging the division elements W1 of the odd-numbered rows, the cutting lines CL1 of the division elements W1 of the odd-numbered rows may be separated from each other. A structure in which the cutting lines CL2 of the division elements W2 of the even-numbered rows are aligned.

In the said embodiment, although the loader 4 is a structure including the 1st conveyance adsorption|suction part 411 and the 2nd conveyance adsorption|suction part 412, it may be set as the structure including only one of them. For example, when the loader 4 is configured to include only the first conveyance suction unit 411, when the object to be cut W is loaded into the cutting table 2, the loader 4 suctions and holds the division elements W1 in odd-numbered rows and move it in. In addition, after the connection part W3 is cut off, the first table suction part 21 of the cutting table 2 stops the suction of the divided elements W1 of odd-numbered rows, and the loader 4 restarts the suction of the stopped divided elements W1 of odd-numbered rows. configuration.

In the above-described embodiment, the loader 4 is used to relocate the division elements W1 and W2 of the odd-numbered or even-numbered rows, but the unloader 5 may be used to relocate the odd-numbered or even-numbered rows. The structure of the division element W1 and division element W2 of . In this case, similarly to the loader 4 of the above-described embodiment, the unloader 5 is configured to include a first transfer suction part for suctioning the divided elements W1 of odd-numbered rows, and a second transfer suction part for suctioning the divided elements W2 of even-numbered rows. structure.

Furthermore, in the above-described embodiment, only one of the division elements W1 and W2 of the odd-numbered or even-numbered rows is rearranged. The arrangement aspect of the disconnection CL2 may be a configuration in which both the division elements W1 and W2 of the odd-numbered rows and the even-numbered rows are rearranged.

In the above-described embodiment, the cutting line CL1 of the divided elements W1 of odd-numbered rows is aligned with the cutting line CL2 of divided elements W2 of even-numbered rows, and the cutting line CL2 of the divided elements W2 of even-numbered rows is cut in one fell swoop, but the following may be employed. For example, after cutting the connecting portion W3, the even-numbered rows of the divided elements W2 are taken out from the cutting table 2, and the cutting lines CL1 of the odd-numbered rows of the divided elements W1 are cut into pieces. Then, after the singulated cut product P is unloaded from the cutting table 2, the cutting table 2 is made to hold the even-numbered row division elements W2 by suction, and the cutting line CL2 of the even-numbered row division elements W2 is cut. Monolithic. Then, the singulated cut product P is carried out from the cutting table 2 .

The object to be cut W to be cut by the cutting device 100 of the present invention is not limited to the above-described embodiment, and may be a substrate such as a printed circuit board (Printed Circuit Board (PCB) substrate) without resin molding. . In this case, the object to be cut W is, as shown in FIG. 9 , a substrate in which a slit K is formed by, for example, engraving, and the substrate is connected by a connecting portion W3 to a plurality of divided elements having a substantially L-shape in plan view. W1, dividing element W2, and dividing element W1 adjacent to each other, cutting line CL1 and cutting line CL2 in dividing element W2 are set on mutually different straight lines. In such a cutting object W, as in the above-described embodiment, after cutting the connecting portion W3, the cutting line CL1 of the divided elements W1 in the odd-numbered rows and the cutting line CL2 of the divided elements W2 in the even-numbered rows are connected. After aligning, these can be cut in one fell swoop (<Align and cut off the cutting lines of odd-numbered and even-numbered rows> in FIG. 9 ). Moreover, after cutting the connection part W3, the division element W1 of an odd-numbered row and the division element W2 of an even-numbered row may be cut|disconnected separately (<Separately cutting odd-numbered row and even-numbered row> in FIG. 9).

The arrangement of the plurality of division elements in the object to be cut W in the above-described embodiment is divided into two groups (odd-numbered lines and even-numbered lines), and the division elements W1 of the odd-numbered lines and the division elements W2 of the even-numbered lines are divided by the cutting line CL1. The cutting lines CL2 are different from each other, but are not limited to the division elements of odd-numbered lines and the division elements of even-numbered lines, and can also be applied to division elements including division elements whose cutting lines are not located on the same straight line among a plurality of division elements. For example, the arrangement of the plurality of division elements of the cutting object W may be grouped in the same manner, for example, in two rows on the left and right. In addition to this, the object to be cut W may be one in which the arrangement of the plurality of division elements is divided into three or more groups.

In addition, this invention is not limited to the said embodiment, It cannot be overemphasized that various deformation|transformation are possible in the range which does not deviate from the summary. [Industrial Availability]

According to the present invention, it is possible to easily cut an object to be cut in which the cutting lines in the adjacent division elements are set on mutually different straight lines by the blade.

2: Cut off the workbench 3: Cut off mechanism 4: Loader (transport mechanism) 5: Unloader (carry out mechanism) 6: Cut the object storage part 7: Cut-off storage department 21: The first worktable adsorption part (the worktable adsorption part) 21a, 411a: the first adsorption hole 21b, 411b: first internal flow path 21c, 411c: First suction pump 22: Second table adsorption part (table adsorption part) 22a, 412a: the second adsorption hole 22b, 412b: Second internal flow path 22c, 412c: Second suction pump 31: Blades 32: Rotary shaft 41, 51: Adsorption block 100: Cut off device 411: The first conveying suction part (the conveying suction part) 411d, 412d, 511d: Adsorption pads 412: Second conveyance suction part (conveyance suction part) 511: conveying suction part 511a: adsorption hole 511b: Internal flow path 511c: Suction pump CL0, CL1, CL2: cut line CTL: Control Department K: Cut P: cut product W: cut the object W1: Split elements of odd-numbered rows (multiple split elements) W2: Split elements of even rows (multiple split elements) W3: Link

FIG. 1 is a plan view schematically showing an object to be cut. FIG. 2 is a partially enlarged plan view showing a cutting line for cutting an object. 3 is a plan view schematically showing the configuration of the cutting device according to the embodiment of the present invention. 4 is a plan view and a cross-sectional view schematically showing the configuration of the cutting table according to the same embodiment. 5 is a plan view and a cross-sectional view schematically showing the configuration of a conveying mechanism (loader) according to the same embodiment. 6 is a plan view and a cross-sectional view schematically showing the configuration of a carry-out mechanism (unloader) according to the same embodiment. 7 is a cross-sectional view showing each state of the cutting operation in the same embodiment. 8 is a plan view showing each state of the object to be cut in the cutting operation according to the same embodiment. 9 is a plan view showing an object to be cut and a method of cutting the same according to a modified embodiment. 10 is a plan view showing a resin-molded substrate using a lead frame formed by staggered leads.

2: Cut off the workbench

4: Loader (transport mechanism)

21: The first table adsorption part (table adsorption part)

22: Second worktable adsorption part (table adsorption part)

41: Adsorption block

411: The first conveying suction part (the conveying suction part)

412: Second conveyance suction part (conveyance suction part)

W: cut the object

W1: Split elements of odd-numbered rows (multiple split elements)

W2: Split elements of even rows (multiple split elements)

W3: Link

Claims (6)

A cutting device that connects a plurality of division elements by a connecting portion, and along the cutting line, a cutting object in which the cutting lines in the adjacent division elements are set on mutually different straight lines cut off and include: a cutting table to attract and hold the cutting object; and a cutting mechanism for cutting the object to be cut held by the cutting table with a blade, and The cutting table includes: a first table adsorption part for adsorbing one of the divided elements adjacent to each other; and a second table adsorption part independent from the first table adsorption part , and adsorb the other said segmentation element. The cutting device according to claim 1, further comprising: a conveying mechanism for conveying the object to be cut to the cutting table, and The conveyance mechanism includes a conveyance suction unit that suctions only one or the other of the adjacent divided elements. The cutting device according to claim 2, wherein the cutting table stops the first cutting element in a state where the connecting portion is cut by the cutting mechanism and the divided elements adjacent to each other are separated from each other. one of the table adsorption part or the second table adsorption part adsorbs the divided elements, The transfer mechanism aligns the divided elements that are adjacent to each other so that the cutting lines of the divided elements that are adjacent to each other are on the same straight line after attracting the divided elements that have been stopped on the cutting table. The cutting device according to any one of claim 1 to claim 3, wherein the plurality of dividing elements are arranged along a cutting direction based on the blade, and the arrangement aspects of these are divided into at least two groups , the cutting lines of the split elements of one group are located on the same straight line, and the cutting lines of the split elements of the other group are located on the same straight line, The first table adsorption part adsorbs the division elements of the one group, The second table suction part suctions the divided elements of the other group. The cutting device according to claim 2 or claim 3, or claim 4 referring to claim 2, wherein the conveying mechanism comprises: a first conveyance and adsorption unit for adsorbing the divided elements of the one group; and The second conveyance suction unit suctions the divided elements of the other group. A method of manufacturing a cut product using the cutting device according to any one of claims 1 to 5.

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