TWI826854B - Cutting device and manufacturing method for cut product - Google Patents

Abstract

The invention makes it possible to cut, by a blade, an object to be cut in which cutting lines in divided elements adjacent to each other are set on straight lines different from each other. A cutting device 100 of the invention cuts an object W to be cut along cutting lines CL1 and CL2, in which in the object W to be cut, multiple divided elements W1 and W2 are connected by a connection part W3 and the cutting lines CL1 and CL2 in the divided elements W1 and W2 adjacent to each other are set on different straight lines. The cutting device 100 includes: a cutting table 2, sucking and holding the object W to be cut; a cutting mechanism 3, cutting, by a blade 31, the object W to be cut; and a divided element conveyance part 10, conveying one of the divided elements W1 and W2 adjacent to each other from the cutting table 2 in a state where the connection part W3 is cut by the cutting mechanism 3 and the divided elements W1 and W2 are separated from each other.

Description

Cutting device and method of manufacturing cut product

The present invention relates to a cutting device and a method for manufacturing cut products.

Previously, as shown in Patent Document 1, for example, a cutting device including a transfer pad that sucks and holds a part of all wafers of a package substrate has been considered. In this cutting device, a plurality of areas adapted to the outer dimensions of the storage tray are set on the suction cup table, and the wafers are sucked and transferred uniformly by dividing the areas according to the transfer pads set therein. [Prior art documents] [Patent Document]

[Patent Document 1] Japanese Patent Application Laid-Open No. 2003-234310

[Problem to be solved by the invention]

On the other hand, in recent years, in semiconductor packages such as Small Outline Transistor (SOT) or Small Outline Integrated Circuit (SOIC), in order to use the same size lead frame to manufacture more packages body, and as shown in Figure 14, a resin molded substrate is manufactured using a lead frame in which leads are interlaced.

However, in a resin molded substrate using a lead frame formed by staggered leads, since the cutting lines of the package are not located on the same straight line, it is difficult to cut with a conventional cutting device using a blade.

Therefore, the present invention has been completed in order to solve the above-mentioned problems, and its main subject is to enable a cutting object to be easily cut with a blade in which cutting lines in mutually adjacent dividing elements are set on mutually different straight lines. things. [Means to solve the problem]

That is, the cutting device of the present invention is a cutting object along which a plurality of divided elements are connected by a connecting portion and the cutting lines in the divided elements adjacent to each other are set on mutually different straight lines. The cutting device for cutting the cutting line is characterized by including: a cutting table that attracts and holds the cutting object; a cutting mechanism that cuts the cutting object with a blade; and dividing The element transport unit transports one of the mutually adjacent divided elements from the cutting table in a state where the connecting part is cut by the cutting mechanism and the divided elements are separated from each other. [Effects of the invention]

According to the invention configured as described above, it is possible to easily cut an object to be cut with a blade in which the cutting lines in the dividing elements adjacent to each other are set on mutually different straight lines.

The present invention will be further described in detail below with examples. However, the present invention is not limited to the following description.

As mentioned above, the cutting device of the present invention is a cutting object in which a plurality of divided elements are connected by a connecting portion and the cutting lines in the divided elements adjacent to each other are set on mutually different straight lines. The cutting device for cutting along the cutting line is characterized in that it includes: a cutting table that attracts and holds the cutting object; a cutting mechanism that cuts the cutting object with a blade; and a divided element transport unit that transports one of the mutually adjacent divided elements from the cutting table in a state where the connecting part is cut by the cutting mechanism and the divided elements are separated from each other. According to this cutting device, since the dividing element transport unit is included in the cutting table to transport one of the dividing elements adjacent to each other in a state where the dividing elements are separated from each other, it is possible to take out the dividing elements adjacent to each other from the cutting table. One of the dividing elements. This makes it possible to easily cut an object to be cut with a blade in which the cutting lines in the dividing elements adjacent to each other are set on mutually different straight lines.

As a specific embodiment of the divided element transport unit, it is conceivable to transport one of the mutually adjacent divided elements from the cutting table to another cutting table. In the case of this structure, the dividing elements adjacent to each other are cut on different cutting tables. Furthermore, when cutting on different cutting tables, it can be cut by a common blade or by different blades.

Furthermore, as a specific embodiment of the divided element transport unit, it is conceivable to transport one of the mutually adjacent divided elements from the cutting table to the temporary holding table. In the case of this structure, the cutting mechanism sequentially cuts the dividing elements adjacent to each other. Specifically, after the divided element transport unit transports one of the adjacent divided elements to the temporary stage, the cutting mechanism cuts the other of the adjacent divided elements on the cutting table. Then, after the cut product is carried out from the cutting workbench, the divided element transport unit transports one of the adjacent divided elements from the temporary workbench to the cutting workbench, and the cutting mechanism performs the cutting operation. Cut off one of the adjacent divided elements on the stage.

Furthermore, as a specific embodiment of the divided element transport unit, it is considered that one of the divided elements adjacent to each other is transported and held from the cutting table. In the case of this structure, the cutting mechanism sequentially cuts the dividing elements adjacent to each other as in the case of transportation to the temporary workbench. Specifically, in a state where the divided element transport unit transports and holds one of the adjacent divided elements from the cutting table, the cutting mechanism cuts the other of the adjacent divided elements on the cutting table. One. Then, after the cut product is carried out from the cutting table, the divided element transport unit transports one of the mutually adjacent divided elements to the cutting table, and the cutting mechanism cuts each other on the cutting table. One of the adjacent dividing features.

In order to transport the divided elements by the divided element transport unit, it is desirable that the cutting table includes: a first table adsorption part for adsorbing one of the divided elements adjacent to each other; and a second The workbench adsorption part is independent of the first workbench adsorption part and adsorbs the other divided element. According to this structure, the adsorption of the divided elements conveyed only by the divided element conveying section can be stopped, and the divided elements can be transported reliably by the divided element conveying section.

As a specific embodiment for transporting the divided elements using the divided element transport unit, it is considered that the cutting table is in a state where the connecting portion is cut by the cutting mechanism and the divided elements are separated from each other. Stopping one of the first table adsorption part or the second table adsorption part from adsorbing the dividing element, and the dividing element transport part transports the cutting table from the cutting table The adsorption is stopped on the divided element.

As a specific implementation aspect of cutting the object, it is considered that the plurality of dividing elements are arranged along the cutting direction by the blade, and the arrangement aspect of these is divided into at least two groups, one of which is the The cutting lines of the dividing elements are located on the same straight line, and the cutting lines of the dividing elements of the other group are located on the same straight line. In the object to be cut with this structure, it is preferable that the divided element transport unit transports one of the one set of divided elements or the other set of divided elements.

Furthermore, it is preferable that the cutting device of the present invention includes: a conveying mechanism for conveying the cutting object to the cutting table; and an unloading mechanism for cutting the cut material on the cutting table. The product is transported out, and the transport mechanism or the transport mechanism functions as the divided element transport section. With this structure, the divided element conveying section can be constituted by the conveying mechanism or the unloading mechanism. Therefore, compared with the case where a divided element conveying section is separately provided in addition to the conveying mechanism and the unloading mechanism, the device structure can be simplified.

As for the specific implementation mode for the transport mechanism or the carry-out mechanism to function as the divided element transport section, it is considered that the transport mechanism or the carry-out mechanism includes: a first transport adsorption section that adsorbs one of the divided elements of the group; and The second conveying and adsorbing part adsorbs the divided elements of the other group independently of the first conveying and adsorbing part, and the conveying mechanism or the unloading mechanism uses the first conveying and adsorbing part or the second conveying and adsorbing part. The adsorption unit functions as the divided element transport unit.

Moreover, a method of manufacturing a cut product using the cutting device is also an aspect of the present invention.

<First embodiment of the present invention> Hereinafter, a first embodiment of the cutting device of the present invention will be described with reference to the drawings. In addition, for easy understanding, any of the figures shown below are appropriately omitted or exaggerated to schematically draw them. The same structural elements are labeled with the same symbols and descriptions are omitted appropriately.

＜Overall structure of cutting device＞ The cutting device 100 of this embodiment cuts the cutting object W at the cutting lines CL0 - cutting lines CL2 set therein, thereby singulating it into a plurality of cut products P (products P).

Here, as shown in FIGS. 1 and 2 , the cutting object W is connected to a plurality of dividing elements W1 and W2 via a connecting portion W3, and the dividing elements W1 and the cutting lines CL1 and the cutting lines in the dividing elements W2 are adjacent to each other. The broken lines CL2 are set on different straight lines. Each of the division elements W1 and W2 seals a plurality of wafers by resin molding. Here, the plurality of wafers are arranged in a row. In addition, leads are provided corresponding to each wafer. Furthermore, the plurality of divided elements W1 and W2 are arranged along the cutting direction (the left-right direction in FIG. 1 ) by the blade 31 (see FIG. 3 ), and both ends of these are connected by the connection part W3. Specifically, one group of the dividing elements W1 in the odd-numbered rows and the other group of the dividing elements W2 in the even-numbered rows are configured such that their leads are interlaced. Thereby, the cutting lines CL1 of the dividing elements W1 of one group of odd-numbered rows are located on the same straight line, and the cutting lines CL2 of the dividing elements W2 of the other group of even-numbered rows are located on the same straight line. Furthermore, the cutting line CL1 of the dividing element W1 in the odd-numbered rows and the cutting line CL2 of the dividing element W2 in the even-numbered rows are located on mutually different straight lines (see FIG. 2 ). In addition, symbol CL0 in FIG. 2 is a cutting line for cutting the connection part W3 and dividing it into a plurality of divided elements W1 and W2. In addition, the cutting lines CL0 to CL2 shown in each figure are virtual lines intended to be cut by the blade 31, and the actual cutting target object W is not shown.

Specifically, as shown in FIG. 3 , the cutting device 100 includes: a cutting table 2 that attracts and holds the cutting object W; and a cutting mechanism 3 that cuts the object held by the cutting table 2 with a blade 31 . The object to be cut W; the transport mechanism 4 (hereinafter also referred to as the loader 4) transports the object to be cut W to the cutting table 2; and the unloading mechanism 5 (hereinafter also referred to as the unloader 5) will be The cut product P cut on the cutting table 2 is carried out from the cutting table 2 .

The cutting table 2 adsorbs and holds the cutting object W. As shown in FIG. 4 , it includes: a first table adsorbing part 21 that adsorbs one of the divided elements W1 and divided elements W2 adjacent to each other; and The second workbench adsorption part 22 adsorbs another divided element W2. Furthermore, the cutting table 2 is configured to be movable in at least the Y direction by a moving mechanism not shown in the figure. In addition, the cutting table 2 may be configured to rotate in the θ direction by a rotation mechanism not shown in the figure.

The first table suction part 21 and the second table suction part 22 are independent of each other, and are configured to be able to switch suction and stop independently.

Specifically, the first table suction unit 21 collectively sucks the divided elements W1 in odd-numbered rows (1st row, 3rd row, 5th row, ･･･) of the cutting object W, and the second table suction unit 22 collectively sucks the divided elements W1 Cut off the dividing elements W2 of the even-numbered rows (2 rows, 4 rows, 6 rows, ･･･) in the object W. That is, the cutting table 2 is configured to be able to independently switch between the adsorption or stopping of the dividing elements W1 in the odd-numbered rows and the adsorption or stopping of the dividing elements W2 in the even-numbered rows.

The first table adsorption part 21 includes: a first adsorption hole 21a, which is opened on the upper surface of the cutting table 2; and a first internal flow path 21b, which is continuous with the first adsorption hole 21a and formed on the cutting table 2. inside; and the first suction pump 21c is connected to the first internal flow path 21b. Moreover, the second table adsorption part 22 includes: a second adsorption hole 22a, which is opened on the upper surface of the cutting table 2; and a second internal flow path 22b, which is continuous with the second adsorption hole 22a and is formed in the cutting table. 2; and the second suction pump 22c is connected to the second internal flow path 22b. Furthermore, the first suction pump 21c and the second suction pump 22c may be made common, and for example, a switching valve (not shown) may be used to switch the internal flow path connected to the suction pump. Furthermore, in addition to a suction pump, an ejector can also be used.

The cutting mechanism 3 cuts the cutting object W into a linear shape. As shown in FIG. 3 , the cutting mechanism 3 includes a blade 31 , a rotating shaft 32 that rotates the blade 31 , and a rotating shaft 32 that rotates the rotating shaft 32 along at least the X direction and the Z direction. Moving moving mechanism (not shown). The direction of the rotation axis of the blade 31 is parallel to the upper surface of the cutting table 2, here, it is the direction along the horizontal direction. Then, by relatively moving the cutting table 2 and the cutting mechanism 3, the cutting object W is cut by the blade 31.

The loader 4 transports the cutting object W from the cutting object storage part 6 (see FIG. 3 ) that accommodates the cutting object W to the cutting table 2 . Furthermore, as described below, the loader 4 causes the dividing elements W1 and W2 adjacent to each other in the cutting table 2 to coincide with the cutting lines CL1 and CL2 of the dividing elements W1 and W2 adjacent to each other. One of the elements W2 moves.

Specifically, as shown in FIG. 5 , the loader 4 includes an adsorption block 41 provided with a conveyance adsorption part 411 and a conveyance adsorption part 412 for adsorbing the cutting object W; and a moving mechanism (not shown), The adsorption block 41 is moved.

The adsorption block 41 is provided with a first conveyance adsorption part 411 that adsorbs one of the divided elements W1 and the divided elements W2 adjacent to each other, and a second conveyance adsorbing part 412 that adsorbs the other divided element W2. That is, the adsorption block 41 of the loader 4 includes the conveyance adsorption part 411 and the conveyance adsorption part 412 corresponding to the table adsorption part 21 and the table adsorption part 22 of the cutting table 2 .

Specifically, the first conveyance and adsorption unit 411 adsorbs the divided elements W1 in odd-numbered rows (line 1, line 3, line 5, ･･･) of the object to be cut W, and the second conveyance and adsorption unit 412 adsorbs the object to be cut. The dividing element W2 of the even-numbered rows (2 rows, 4 rows, 6 rows, ･･･) in W. That is, the loader 4 is configured to be able to independently switch between the adsorption or stopping of the divided elements W1 in the odd-numbered rows and the adsorption or stopping of the divided elements W2 in the even-numbered rows.

The first transport adsorption part 411 includes: a first adsorption hole 411a opening on the lower surface of the adsorption block 41; a first internal flow path 411b continuous with the first adsorption hole 411a and formed inside the adsorption block 41; and The first suction pump 411c is connected to the first internal flow path 411b. Furthermore, an adsorption pad 411d made of, for example, resin is provided in the first adsorption hole 411a. In addition, the second transport adsorption part 412 includes: a second adsorption hole 412a, which is opened on the lower surface of the adsorption block 41; and a second internal flow path 412b, which is continuous with the second adsorption hole 412a and is formed inside the adsorption block 41. ; And the second suction pump 412c is connected to the second internal flow path 412b. Furthermore, an adsorption pad 412d is provided in the second adsorption hole 412a. Alternatively, the first suction pump 411c and the second suction pump 412c may be configured in common, and for example, a switching valve (not shown) may be used to switch the internal flow path connected to the suction pump.

The loader 4 configured as described above is configured to separate one of the adjacent divided elements W1 and W2 in a state where the connecting portion W3 is cut by the cutting mechanism 3 and the divided elements W1 and W2 are separated from each other. The divided element transport unit 10 functions to transport the cutting elements from the cutting table 2 to other cutting tables 11 (see FIG. 3 ). The divided element transport unit 10 of this embodiment is configured using the second transport suction unit 412 of the loader 4 . That is, the divided element transport unit 10 transports the divided elements W2 of even-numbered rows from the cutting table 2 to other cutting tables 11 .

The unloader 5 absorbs the cut product P and transports the cut product P from the cutting table 2 to the cut product accommodating part 7 (see FIG. 3 ). Specifically, as shown in FIG. 6 , the unloader 5 includes: an adsorption block 51 provided with a conveyance adsorption part 511 and a conveyance adsorption part 512 for adsorbing the cut product P; and a moving mechanism (not shown) to move the The adsorption block 51 moves.

Specifically, the first conveyance and adsorption unit 511 adsorbs the cut products P of the dividing elements W1 in odd-numbered rows (line 1, line 3, line 5, ･･･) of the cutting object W, and the second conveyance and adsorption unit 512 The cut product P of the dividing element W2 in the even-numbered rows (2 rows, 4 rows, 6 rows, ･･･) of the cutting object W is adsorbed. That is, the unloader 5 is configured to be able to independently switch between the suction and stop of the cut products P of the divided elements W1 in the odd-numbered rows and the suction and stop of the cut products P of the divided elements W2 in the even-numbered rows.

The first transport adsorption part 511 includes: a first adsorption hole 511a opening on the lower surface of the adsorption block 51; a first internal flow path 511b continuous with the first adsorption hole 511a and formed inside the adsorption block 51; and The first suction pump 511c is connected to the first internal flow path 511b. Furthermore, an adsorption pad 511d made of, for example, resin is provided in the first adsorption hole 511a. In addition, the second transport adsorption part 512 includes: a second adsorption hole 512a, which is opened on the lower surface of the adsorption block 51; and a second internal flow path 512b, which is continuous with the second adsorption hole 512a and is formed inside the adsorption block 51. ; And the second suction pump 512c is connected to the second internal flow path 512b. Furthermore, an adsorption pad 512d is provided in the second adsorption hole 512a. Alternatively, the first suction pump 511c and the second suction pump 512c may be configured in common, and for example, a switching valve (not shown) may be used to switch the internal flow path connected to the suction pump. Furthermore, in FIG. 6 , the adsorption holes 512 a in odd-numbered rows and the adsorption holes 513 a in even-numbered rows are arranged in a straight line along the Y direction, and may also be staggered from each other.

<Cutting operation of the cutting device 100> The operation of the cutting device 100 will be described with reference to FIGS. 7 and 8 . In addition, the following cutting operation is performed by controlling each part using the control part CTL (refer FIG. 3).

(1) Transport of cutting object W The loader 4 attracts and holds the object to be cut W accommodated in the object to be cut accommodating portion 6 , and transports the object to the cutting table 2 . The object to be cut W conveyed to the cutting table 2 is adsorbed and held by the first table adsorbing part 21 and the second table adsorbing part 22 of the cutting table 2 (<Object to be cut is adsorbed and held> in FIG. 7 ). Here, positioning of the cutting object W with respect to the cutting table 2 is performed, for example, by fitting a positioning hole formed in the cutting object W with a positioning pin provided on the cutting table 2 . Alternatively, it can also be performed by fitting a positioning hole formed in the cutting object W with a positioning pin provided in the loader 4 .

(2) Cutting off the connection part W3 The connecting portion W3 of the cutting object W adsorbed and held by the cutting table 2 is cut by the cutting mechanism 3 (<cutting of the connecting portion> in FIG. 8 ). In this embodiment, the connecting portion W3 connecting both ends of the plurality of divided elements W1 and W2 is cut respectively. Thereby, the plurality of dividing elements W1 and W2 of the cutting object W are separated from each other. In this state, the cutting lines CL1 and CL2 of the dividing elements W1 in the odd-numbered rows and the dividing elements W2 in the even-numbered rows are located on different straight lines, but are not staggered (dislocated) on the same straight line.

(3) Transport the dividing elements W2 of the even-numbered rows to the other cutting table 11 In a state where the connecting portion W3 is cut and the adjacent divided elements W1 and W2 are separated from each other, the cutting table 2 stops the adsorption of the even-numbered rows of divided elements W2 by the second table suction unit 22 . Furthermore, the first table suction unit 21 maintains suction of the odd-numbered rows of dividing elements W1 on the cutting table 2 . Here, before stopping the suction by the second table suction unit 22, the suction pad (specifically, the suction pad 412d of the second transport suction unit 412) of the loader 4 of the divided element transport unit 10 is previously used. Press against the dividing element W2 of the even-numbered row. This prevents the positional deviation of the divided elements W2 of the even-numbered rows caused by stopping the suction of the second table suction part 22 of the cutting table 2 . Then, the second transport suction unit 412 of the loader 4 serving as the divided element transport unit 10 transports the even-numbered rows of divided elements W2 to other cutting tables 11 (<Transfer even-numbered rows to other cutting tables 11 in FIGS. 7 and 8 Break off the workbench>). Furthermore, the divided elements W2 of the even-numbered rows conveyed to the other cutting tables 11 are adsorbed and held by the suction portions 111 of the other cutting tables 11 . Here, the positioning of the even-numbered rows of dividing elements W2 with respect to the other cutting tables 11 is performed, for example, by considering image recognition of the arrangement of the even-numbered rows of dividing elements W2 (for example, edge portions, lead portions, and other feature portions) using a camera. wait.

(4) Cutting of the dividing elements W1 and W2 of odd-numbered rows and even-numbered rows After the even-numbered rows of divided elements W2 are transported to other cutting tables 11 , the cutting mechanism 3 cuts the cutting line CL1 of the odd-numbered rows of divided elements W1 on the cutting table 2 on the same straight line. In addition, on the other cutting table 11, the cutting lines CL2 of the even-numbered rows of dividing elements W2 on the same straight line are cut by other cutting mechanisms or the cutting mechanism 3 (<odd-numbered rows in Figs. 7 and 8 And the cutting off of even-numbered lines>). Furthermore, in this embodiment, the dual-axis system in which the cutting mechanism 3 is provided corresponding to each cutting table 2 and cutting table 11 is adopted (see FIG. 3 ), but it may also be adopted as a method for each cutting operation. The table 2 and the cutting table 11 are provided with a common cutting mechanism 3 of a single-rotation axis type.

(5) Unloading the cut product P The unloader 5 uses the first conveyance suction unit 511 to suck and hold the plurality of cut products P suctioned and held by the cutting table 2 , and transports them to the cut product storage unit 7 . Furthermore, the unloader 5 uses the second conveyance suction unit 512 to suction and hold the plurality of cut products P suctioned and held by the other cutting tables 11 , and transports them to the cut product storage unit 7 . Here, before releasing the suction of the cutting table 2 and other cutting tables 11, the suction pads 511d and 512d of the unloader 5 can be pressed against the plurality of cutting products P to prevent multiple cutting products P. The position of the cut product P is shifted or mistakenly adsorbed.

<Effects of the first embodiment> According to the cutting device 100 of the first embodiment, since the dividing element W1 and the dividing element W2 are separated from each other, one of the dividing elements W1 and W2 adjacent to each other is transported from the cutting table 2 to the other. The dividing element transport part 10 of the cutting table 11 can take out one of the dividing elements W1 and W2 that are adjacent to each other from the cutting table 2 and make the cutting table 2 and the cutting table 11 different. Keep. This allows the blade 31 to easily cut the object W in which the cutting lines CL1 and CL2 in the dividing elements W1 and W2 that are adjacent to each other are set on mutually different straight lines. .

<Second Embodiment of the Invention> Next, a second embodiment of the cutting device of the present invention will be described with reference to the drawings. Furthermore, the cutting device 100 of the second embodiment is structurally different from the first embodiment in that it does not include another cutting table 11 . In addition, other structures are the same as the said 1st embodiment.

Specifically, as shown in FIG. 9 , the cutting device 100 of the second embodiment transports only one of the divided elements W1 and W2 that are adjacent to each other to the temporarily placed stage 12 without cutting. Break the structure of the workbench. Here, it is considered that the temporary stage 12 has a structure including an adsorption part that adsorbs and holds the transported divided elements. By using the temporary table 12, the cutting mechanism 3 sequentially cuts the dividing elements W1 of the odd-numbered rows and the dividing elements W2 of the even-numbered rows on the cutting table 2.

In the cutting operation of the cutting device 100 having this structure, (1) conveyance of the cutting object W and (2) cutting of the connecting portion W3 are the same as in the above-described embodiment. Hereinafter, the operation after cutting of the connecting part W3 will be described.

(3) Move the even-numbered row dividing element W2 to the temporary workbench 12 In a state where the connecting portion W3 is cut and the adjacent divided elements W1 and W2 are separated from each other, the cutting table 2 stops the adsorption of the even-numbered rows of divided elements W2 by the second table suction unit 22 . Furthermore, the first table suction unit 21 maintains suction of the odd-numbered rows of dividing elements W1 on the cutting table 2 . Here, before stopping the suction by the second table suction unit 22, the suction pad (specifically, the suction pad 412d of the second transport suction unit 412) of the loader 4 of the divided element transport unit 10 is previously used. Press against the dividing element W2 of the even-numbered row. This prevents the positional deviation of the divided elements W2 of the even-numbered rows caused by stopping the suction of the second table suction part 22 of the cutting table 2 . Then, the second transport suction unit 412 of the loader 4 serving as the divided element transport unit 10 transports the even-numbered rows of divided elements W2 to the temporary stage 12 (<Transfer even-numbered rows to the temporary stage> in FIG. 10 ) . Here, when it is necessary to position the even-numbered rows of divided elements W2 with respect to the temporary workbench 12 , it may be considered that the arrangement of the even-numbered rows of divided elements W2 (for example, edge portions, lead portions, and other feature portions) may be performed using a camera. Image recognition and so on.

(4) Cutting off the dividing element W1 of the odd-numbered rows After the even-numbered rows of dividing elements W2 are transported to the temporary stage 12, the cutting mechanism 3 cuts the odd-numbered rows of dividing elements W1 on the cutting table 2 along the cutting line CL1 (< in Fig. 10 Cutting off odd-numbered lines >).

(5) Unloading the cut product P obtained by cutting the dividing elements W1 of odd-numbered rows The unloader 5 adsorbs and holds the plurality of cut products P adsorbed and held by the cutting table 2 , and transports them to the cut product storage portion 7 . Here, before releasing the suction of the cutting table 2, the suction pad 511d of the unloader 5 can be pressed against the plurality of cut products P to prevent the positional deviation or misalignment of the plurality of cut products P. Adsorption.

(6) Transport of even-numbered row dividing element W2 The second conveyance suction unit 412 of the loader 4 (divided element conveyance unit 10 ), which becomes the divided element conveying unit 10 , adsorbs and holds the divided elements W2 in the even-numbered rows on the temporary stage 12 , and conveys them to the cutting operation. Station 2 (<Transfer the even-numbered rows to the cutting table> in Figure 10). The divided elements W2 of the even-numbered rows conveyed to the cutting table 2 are sucked and held by the second table suction part 22 of the cutting table 2 . Here, the positioning of the even-numbered rows of dividing elements W2 with respect to the cutting table 2 may be performed, for example, by image recognition of the arrangement of the even-numbered rows of dividing elements W2 (for example, edge portions, lead portions, and other feature portions) using a camera. .

(7) Cutting off the dividing element W2 of the even-numbered rows After the even-numbered rows of dividing elements W2 are conveyed to the cutting table 2, the cutting mechanism 3 cuts the even-numbered rows of dividing elements W2 on the cutting table 2 along the cutting line CL2 (< in Fig. 10 Cutting off even-numbered lines>).

(8) Unloading the cut product P obtained by cutting the dividing elements W2 of the even-numbered rows The unloader 5 adsorbs and holds the plurality of cut products P adsorbed and held by the cutting table 2 , and transports them to the cut product storage portion 7 . Here, before releasing the suction of the cutting table 2, the suction pad 511d of the unloader 5 can be pressed against the plurality of cut products P to prevent the positional deviation or misalignment of the plurality of cut products P. Adsorption.

In addition, in the above description, it is assumed that the divided elements W2 of the even-numbered rows are transported to the temporary stage 12 by the divided element transporting unit 10 , but it may also be configured that the divided elements transporting unit 10 transports the divided elements W2 of the odd-numbered rows. The divided element W1 is transported to the temporary workbench 12 .

<Effects of the second embodiment> According to the cutting device 100 of the second embodiment, since the dividing element W1 and the dividing element W2 are separated from each other, one of the dividing elements W1 and W2 adjacent to each other is transported from the cutting table 2 to the temporary The divided element transport unit 10 of the table 12 is provided, so that one of the divided elements W1 and W2 adjacent to each other can be taken out from the cutting table 2 . This allows the blade 31 to easily cut the object W in which the cutting lines CL1 and CL2 in the dividing elements W1 and W2 that are adjacent to each other are set on mutually different straight lines. .

<Third Embodiment of the Invention> Next, a third embodiment of the cutting device of the present invention will be described with reference to the drawings. Furthermore, the cutting device 100 of the third embodiment is different in structure from the above-described embodiments in that it does not include another cutting table 11 and a temporary table 12 . In addition, other structures are the same as the said 1st embodiment.

Specifically, the cutting device 100 of the third embodiment does not transport one of the dividing elements W1 and W2 adjacent to each other to the other cutting table 11 or the temporary table 12, but as shown in FIG. 11 As shown in the figure, one of the divided elements W1 and W2 adjacent to each other is transported from the cutting table 2 and held therein.

In the cutting operation of the cutting device 100 having this structure, (1) conveyance of the cutting object W and (2) cutting of the connecting portion W3 are the same as in the above-described embodiment. Hereinafter, the operation after cutting of the connecting part W3 will be described.

(3) Transport and hold the dividing element W2 of the even-numbered rows In a state where the connecting portion W3 is cut and the adjacent divided elements W1 and W2 are separated from each other, the cutting table 2 stops the adsorption of the even-numbered rows of divided elements W2 by the second table suction unit 22 . Furthermore, the first table suction unit 21 maintains suction of the odd-numbered rows of dividing elements W1 on the cutting table 2 . Here, before stopping the suction by the second table suction unit 22, the suction pad (specifically, the suction pad 412d of the second transport suction unit 412) of the loader 4 of the divided element transport unit 10 is previously used. Press against the dividing element W2 of the even-numbered row. This prevents the positional deviation of the divided elements W2 of the even-numbered rows caused by stopping the suction of the second table suction part 22 of the cutting table 2 . Then, the second transport suction unit 412 of the loader 4 serving as the divided element transport unit 10 transports the even-numbered rows of divided elements W2 and holds them outside the cutting table 2 (<removal of even-numbered rows, odd-numbered rows in Fig. 12 Cut off>).

(4) Cutting off the dividing element W1 of the odd-numbered rows After the even-numbered rows of divided elements W2 are transported from the cutting table 2, the cutting mechanism 3 cuts the odd-numbered rows of divided elements W1 on the cutting table 2 at the cutting line CL1 (< in Fig. 12 Removal of even-numbered lines and cutting of odd-numbered lines>).

(5) Unloading the cut product P obtained by cutting the dividing elements W1 of odd-numbered rows The unloader 5 adsorbs and holds the plurality of cut products P adsorbed and held by the cutting table 2 , and transports them to the cut product storage portion 7 . Here, before releasing the suction of the cutting table 2, the suction pad 511d of the unloader 5 can be pressed against the plurality of cut products P to prevent the positional deviation or misalignment of the plurality of cut products P. Adsorption.

(6) Transport of even-numbered row dividing element W2 The second transport suction unit 412 of the loader 4 serving as the divided element transport unit 10 transports the held even-numbered rows of divided elements W2 to the cutting table 2 (<Transfer even-numbered rows to the cutting table> in FIG. 12 ). The divided elements W2 of the even-numbered rows conveyed to the cutting table 2 are sucked and held by the second table suction part 22 of the cutting table 2 . Here, the positioning of the even-numbered rows of dividing elements W2 with respect to the cutting table 2 may be performed, for example, by image recognition of the arrangement of the even-numbered rows of dividing elements W2 (for example, edge portions, lead portions, and other feature portions) using a camera. .

(7) Cutting off the dividing element W2 of the even-numbered rows After the even-numbered rows of dividing elements W2 are conveyed to the cutting table 2, the cutting mechanism 3 cuts the even-numbered rows of dividing elements W2 on the cutting table 2 along the cutting line CL2 (< in Fig. 12 Cutting off even-numbered lines>).

(8) Unloading the cut product P obtained by cutting the dividing elements W2 of the even-numbered rows The unloader 5 adsorbs and holds the plurality of cut products P adsorbed and held by the cutting table 2 , and transports them to the cut product storage portion 7 . Here, before releasing the suction of the cutting table 2, the suction pad 511d of the unloader 5 can be pressed against the plurality of cut products P to prevent the positional deviation or misalignment of the plurality of cut products P. Adsorption.

<Effects of the third embodiment> According to the cutting device 100 of the third embodiment, one of the dividing elements W1 and W2 adjacent to each other is transported from the cutting table 2 in a state where the dividing elements W1 and W2 are separated from each other. The divided element transport unit 10 can take out one of the divided elements W1 and W2 adjacent to each other from the cutting table 2 . This allows the blade 31 to easily cut the object W in which the cutting lines CL1 and CL2 in the dividing elements W1 and W2 that are adjacent to each other are set on mutually different straight lines. .

＜Other variations＞ In addition, this invention is not limited to each embodiment mentioned above.

For example, in the first embodiment, the dividing elements W2 of the even-numbered rows are transported to the other cutting tables 11 . However, the dividing elements W1 of the odd-numbered rows may be transported by the dividing element transport unit 10 . to other cutting table 11 structures. Alternatively, after the connection portion W3 is cut on the cutting table 2, the divided elements W1 of the odd-numbered rows and the divided elements W2 of the even-numbered rows are transported to different cutting operations by the divided element transport unit 10. The structure of the platform. Furthermore, in the second embodiment, the divided element transport unit 10 may be configured to transport the divided elements W1 of odd-numbered rows to the temporary workbench 12 . In the third embodiment, the divided element conveying unit 10 may be configured to transport the divided elements W1 of odd-numbered rows to the temporary workbench 12 . The divided element transport unit 10 transports and holds the structure of the divided elements W1 of odd-numbered rows.

In each of the above-described embodiments, the loader 4 is configured to include the first conveying and adsorbing portion 411 and the second conveying and adsorbing portion 412, but may be configured to include only any one of them. For example, when the loader 4 has a structure including only the first conveyance and adsorption part 411, when the cutting object W is conveyed to the cutting table 2, the loader 4 adsorbs and holds the divided elements W1 of odd-numbered rows. And move it. In addition, after cutting the connection part W3, the first table suction part 21 of the cutting table 2 stops suctioning the divided elements W1 of the odd-numbered rows, and the first conveyance suction part 411 of the loader 4 stops suctioning the odd-numbered rows. The dividing element W1 of the row is conveyed to another cutting table 11.

In addition, in each of the above-described embodiments, the loader 4 is configured to function as the divided element transport unit 10 , but the unloader 5 may be configured to function as the divided element transport unit 10 . In this case, the unloader 5 has a structure including a transport suction unit that suctions only one of the divided elements W1 of the odd-numbered rows or the divided elements W2 of the even-numbered rows.

In each of the above-described embodiments, the unloader 5 is configured to transport the cut products P of the divided elements W1 in the odd-numbered rows and the cut products P of the divided elements W2 in the even-numbered rows one by one to the cut product accommodating part 7. However, the unloader 5 The device 5 may adsorb both the cut products P of the dividing elements W1 in the odd-numbered rows and the cut products P of the dividing elements W2 in the even-numbered rows, and then transport them to the cut product storage part 7 .

The cutting object W cut by the cutting device 100 of the present invention is not limited to the above-described embodiment, and may also be a substrate without resin molding, such as a printed circuit board (Printed Circuit Board (PCB) substrate). . In this case, the object W to be cut is, as shown in FIG. 13 , a substrate with a cutout K formed by, for example, engraving and milling processing, and the substrate is connected to a plurality of divided elements that are approximately L-shaped in plan view through the connecting portion W3 W1, W2, and the cutting lines CL1 and CL2 in the dividing elements W1 and W2 adjacent to each other are set on mutually different straight lines. In this type of cutting object W, similarly to the above-mentioned embodiment, after cutting the connection part W3, one of the mutually adjacent divided elements may be transported to another cutting table 11 and cut, or It is cut sequentially using the temporary workbench 12 or by being held in the dividing element transport unit 10 .

The arrangement of the plurality of dividing elements in the cutting object W in each of the above embodiments is divided into two groups (odd-numbered rows and even-numbered rows). The cutting lines of the dividing elements W1 in the odd-numbered rows and the dividing elements W2 in the even-numbered rows CL1 and cutting line CL2 are different from each other, but are not limited to dividing elements of odd-numbered rows and dividing elements of even-numbered rows, and may also be applied to dividing elements including multiple dividing elements whose cutting lines are not located on the same straight line. For example, the arrangement of the plurality of divided elements of the cutting object W may be grouped in two identical rows on the left and right, for example. In addition, the cutting object W may be one in which the arrangement of a plurality of dividing elements is divided into three or more groups.

In addition, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the gist of the invention. [Industrial availability]

According to the present invention, it is possible to easily cut an object to be cut with a blade in which the cutting lines in the dividing elements adjacent to each other are set on mutually different straight lines.

2. 11: Cut off the workbench 3: Cut off mechanism 4:Loader (transport mechanism) 5: Unloader (move-out mechanism) 6: Cut off object storage part 7: Cut-off product storage department 10: Divided element transport department 12: Temporary workbench 21: The first workbench adsorption part (workbench adsorption part) 21a, 411a, 511a: first adsorption hole 21b, 411b, 511b: first internal flow path 21c, 411c, 511c: first suction pump 22: The second workbench adsorption part (workbench adsorption part) 22a, 412a, 512a: second adsorption hole 22b, 412b, 512b: Second internal flow path 22c, 412c, 512c: Second suction pump 31:Blade 32:Rotating shaft part 41, 51: Adsorption block 100: Cut-off device 111:Adsorption part 411, 511: First conveying and adsorbing part (conveying and adsorbing part) 411d, 412d, 511d, 512d: adsorption pad 412, 512: Second conveying and adsorbing part (conveying and adsorbing part) CL0, CL1, CL2: Cut off line CTL:Control Department K: incision P: cut product W: Cut off the object W1: Split elements of odd-numbered rows (multiple split elements) W2: Split elements of even-numbered rows (multiple split elements) W3: Connection Department

FIG. 1 is a plan view schematically showing an object to be cut. FIG. 2 is a partially enlarged plan view showing a cutting line of the object to be cut. 3 is a plan view schematically showing the structure of the cutting device according to the first embodiment of the present invention. 4 is a plan view and a cross-sectional view schematically showing the structure of the cutting table of the same embodiment. 5 is a plan view and a cross-sectional view schematically showing the structure of the transport mechanism (loader) of the same embodiment. 6 is a plan view and a cross-sectional view schematically showing the structure of the unloading mechanism (unloader) of the same embodiment. 7 is a cross-sectional view showing various states of the cutting operation in the same embodiment. 8 is a plan view showing various states of the cutting object in the cutting operation of the same embodiment. Fig. 9 is a plan view schematically showing the structure of a cutting device according to the second embodiment. 10 is a cross-sectional view showing various states of the cutting operation in the second embodiment. FIG. 11 is a plan view schematically showing the structure of a cutting device according to the third embodiment. 12 is a cross-sectional view showing various states of the cutting operation in the third embodiment. FIG. 13 is a plan view showing an object to be cut and a method of cutting the object according to the modified embodiment. FIG. 14 is a plan view showing a resin molded substrate using a lead frame in which leads are interlaced.

2. 11: Cut off the workbench

4: Loader (transport mechanism)

10: Divided element transport department

21: The first workbench adsorption part (workbench adsorption part)

22: Second workbench adsorption part (workbench adsorption part)

31:Blade

111:Adsorption part

411: First conveyance and adsorption part (conveyance and adsorption part)

412: Second conveyance and adsorption part (conveyance and adsorption part)

W: Cut off the object

W1: Split elements of odd-numbered rows (multiple split elements)

W2: Split elements for even-numbered rows (multiple split elements)

W3: Connection Department

Claims (10)

A cutting device that cuts an object to be cut along a plurality of dividing elements connected by a connecting portion and the cutting lines in the dividing elements adjacent to each other are set on mutually different straight lines. Cutting includes: a cutting table that adsorbs and holds the cutting object; a cutting mechanism that cuts the cutting object with a blade; and a dividing element transport unit that is connected to the connecting portion. In a state where the cutting mechanism cuts and the dividing elements are separated from each other, one of the dividing elements adjacent to each other is transported from the cutting table, and each of the dividing elements molds a plurality of wafers with resin. Sealing, wherein a plurality of the wafers are arranged in a row and one or more of the dividing elements are on the cutting line as a first straight line in a state where a plurality of the dividing elements are connected by the connecting portion, The first straight line and the second straight line are arranged staggeredly with one or more of the dividing elements on the cutting line as a second straight line. The cutting device according to claim 1, wherein the dividing element transport unit transports one of the mutually adjacent dividing elements from the cutting table to another cutting table. The cutting device according to claim 1, wherein the divided element transport unit transports one of the mutually adjacent divided elements from the cutting table to the temporary holding table. The cutting device according to claim 1, wherein the dividing element moves The transporting unit transports and holds one of the mutually adjacent divided elements from the cutting table. The cutting device according to any one of claims 1 to 4, wherein the cutting workbench includes: a first workbench adsorption part for adsorbing one of the divided elements adjacent to each other. element; and a second workbench adsorption part, independent of the first workbench adsorption part, adsorbs another of the divided elements. The cutting device according to claim 5, wherein the cutting table stops adsorption of the first table in a state where the connecting portion is cut by the cutting mechanism and the dividing elements are separated from each other. One of the part or the second table adsorption part adsorbs the divided element, and the divided element transport part transports the divided part whose adsorption is stopped on the cutting table from the cutting table. elements. The cutting device according to any one of Claims 1 to 4, wherein the plurality of dividing elements are arranged along a cutting direction by the blade, and the dividing element conveying section conveys the cutting elements as the The dividing element is on the cutting line of the first straight line or the dividing element is on the cutting line which is the second straight line. The cutting device according to any one of claims 1 to 4, including: a conveying mechanism for conveying the cutting object to the cutting table; and a carry-out mechanism for conveying the cutting object to the cutting table. The cut product cut on the workbench is carried out, and the transport mechanism or the carry-out mechanism functions as the dividing element transport section Function. The cutting device according to claim 7, which includes: a transport mechanism for transporting the cutting object to the cutting table; and a carry-out mechanism for transporting the cut pieces cut on the cutting table. The broken products are carried out, and the transport mechanism or the carry-out mechanism functions as the divided element transport section, wherein the transport mechanism or the carry-out mechanism includes a first transport adsorption section that adsorbs one of the divided elements of the group. elements; and a second conveying and adsorbing part, which is independent of the first conveying and adsorbing part, adsorbs the divided elements of the other group, and the conveying mechanism or the unloading mechanism uses the first conveying and adsorbing part or the The second transport and suction unit functions as the divided element transport unit. A method of manufacturing a cut product using the cutting device according to any one of claims 1 to 9.