TW202206383A - Dividing mechanism of brittle material substrate - Google Patents

Abstract

The present invention addresses the problem of providing a dividing mechanism for a fragile material substrate having a higher degree of freedom in dividing than in the prior art. A dividing mechanism of a brittle material substrate is provided with: a fixed part having a horizontal first upper surface; and a movable part disposed apart from the fixed part in a horizontal plane. The movable part has: a top plate which has a flat second upper surface and on which the brittle material substrate is placed and fixed together with the fixed part; and four lifting mechanisms which are vertically arranged at the positions which form the vertexes of the rectangle in a plan view, support the top plate from below and independently advance and retreat in the vertical direction. The posture of the top plate can be arbitrarily changed by combining the lifting actions of the four lifting mechanisms.

Description

Breaking mechanism for brittle material substrate

The present invention relates to a mechanism for dividing a brittle material substrate.

As a method for breaking a brittle material substrate such as a glass substrate, a method is widely known in which bending stress is applied to a substrate on which a scribe line is formed on the surface along a predetermined position for breaking, and a (vertical) crack is formed from the scribe. The scribe line stretches, breaking the brittle material substrate.

As a specific aspect of the division by this method, there is known a device for fixing both sides of a brittle material substrate on which a scribe line is formed across the scribe line, respectively. On the fixed table and the movable (tilting) table, by rotating or tilting the movable table in a plane perpendicular to the extending direction of the scribe line, cracks are extended from the scribe line, and the brittle material substrate is divided (for example, Refer to Patent Document 1 and Patent Document 2). [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2017-177453 [Patent Document 2] Japanese Patent Laid-Open No. 2019-196281

[Problems to be Solved by Invention]

In the case of the device disclosed in Patent Document 1, since the movement of the movable table is only rotation around a rotation axis, the brittle material substrate is limited to being subjected to rotation along the extending direction of the scribed line when it is split. The power of the rotating shaft.

In addition, in the case of the device disclosed in Patent Document 2, the tilt table is supported by one support shaft that can move forward and backward (elevate) in the vertical direction, and the tilt table and the support shaft are integrally formed so that the tilt table can be tilted along the vertical direction. In addition to the rotational movement in the plane perpendicular to the extending direction of the scribed line, the surface lifting and lowering movement (shifting movement in the vertical direction) of the entire tilt table is also possible.

However, in any case, the force acting on the brittle material substrate is limited to the force in the plane perpendicular to the extending direction of the scribe line.

In this regard, there is a certain demand for more appropriately and surely breaking various types of brittle material substrates by increasing the degree of freedom of breaking by applying a force to the brittle material substrate from various directions.

Therefore, it is necessary to displace or incline the movable table in various ways, but the apparatuses disclosed in Patent Document 1 and Patent Document 2 cannot perform the operation of inclining the movable table from the extending direction of the scribe line.

The present invention has been made in view of the above-mentioned problems, and aims to realize a breaking mechanism of a brittle material substrate with a higher degree of freedom of breaking than before. [means to solve the problem]

In order to solve the above-mentioned problems, the invention of claim 1 is a breaking mechanism for a brittle material substrate, which splits the brittle material substrate, comprising: a fixed portion having a horizontal first upper surface; and a movable portion in a horizontal plane. The fixed parts are arranged at intervals; the movable part has: a top plate having a flat second upper surface on which a brittle material substrate is mounted and fixed together with the fixed part; At the position of each vertex, each elevating mechanism is set to independently move forward and backward in the vertical direction while supporting the top plate from below; the posture of the top plate can be changed by combining the elevating actions of each of the four elevating mechanisms.

The invention of claim 2 is the breaking mechanism for a brittle material substrate according to claim 1, wherein the posture of the movable portion when the second upper surface is located in the same horizontal plane as the first upper surface is defined as the reference posture; The first upper surface and the second upper surface when the movable part is in the reference posture serve as the mounting and fixing surface of the brittle material substrate; the brittle material substrate is located at the predetermined linear dividing position on the brittle material substrate. In the form between the fixed part and the movable part, in a state of being placed and fixed on the placing and fixing surface, the elevating mechanism performs an ascending and descending motion, thereby dividing the brittle material substrate.

The invention of claim 3 is the breaking mechanism for a brittle material substrate according to claim 2, wherein in a state where the brittle material substrate is placed and fixed on the placing fixing surface, the predetermined breaking position is The direction in the extending horizontal plane is defined as the first direction, and the direction perpendicular to the first direction in the horizontal plane is defined as the second direction, and the four lifting mechanisms are connected to two of the first directions of the movable portion. Two of the end portions are respectively arranged, and at each of the end portions, the lift mechanisms are arranged to be separated in the second direction.

The invention of claim 4 is the breaking mechanism for a brittle material substrate according to claim 3, further comprising: a shaft rest connected to the upper end of each of the four lifting mechanisms; the shaft rest and the top plate directly or linked indirectly.

The invention of claim 5 is the breaking mechanism for a brittle material substrate according to claim 4, further comprising: a first linear guide provided in the four elevating mechanisms and away from the second direction Between the two lifting mechanisms of the fixed part or the above-mentioned pillows provided at the upper ends of the two lifting mechanisms near the fixed part, and the top plate; in accordance with the inclination of the top plate, the pillows follow the first Linear guides are guided.

The inventions of claims 6 and 7 are the brittle material substrate breaking mechanism according to claim 4 or 5, further comprising: a connecting plate extending in the second direction; The bearing rests provided on the upper end of the two lifting mechanisms provided at one end of the first direction are directly or indirectly connected to the connecting plate; between the connecting plate and the top plate, the two A second linear guide is provided at a position above each of the lifting mechanisms; the connecting plate is guided along the second linear guide in accordance with the inclination of the top plate.

The invention of claim 8 is the breaking mechanism for a brittle material substrate as set forth in claim 3, wherein, at each of the two end portions in the first direction, two of the four lifting mechanisms and the The connecting plates extending in the second direction are connected; each of the connecting plates is connected with a slider set to be freely guided by the guide rail, and the guide rail is extended in the second direction; in accordance with the inclination of the top plate, the slider along the The aforementioned guide rails are guided.

The invention of claim 9 is the breaking mechanism for a brittle material substrate according to any one of claims 1 to 8, further comprising: a holding member capable of holding the brittle material between the fixing portion and the top plate material substrate. [Inventive effect]

According to the invention of Claim 1 to Claim 9, the movable portion can be moved with a higher degree of freedom than before. For example, the tilt motion, the offset motion, and the three-dimensional motion may be performed individually, or any combination of the above motions may be performed. Thereby, a force can be applied to the brittle material substrate in a complex and flexible form that was not available before, and higher-precision breaking can be performed.

In particular, according to the invention of claim 8, the force for rotating the movable portion in the horizontal plane can also act.

<First Embodiment> <Outline of Breaking Mechanism> FIG. 1 and FIG. 2 are diagrams schematically (generally) showing the configuration of the breaking mechanism 100 according to the first embodiment of the present invention. More specifically, FIG. 1 is a schematic perspective view of the state of the breaking mechanism 100 viewed from above (overlooking), and FIG. 2 is a schematic perspective view of the state of the breaking mechanism 100 viewed from below.

The breaking mechanism 100 is a mechanism for breaking the brittle material substrate W along the predetermined breaking position L predetermined to be linear. Preferably, a scribe line is formed along at least one of the main surfaces of the brittle material substrate W along the planned breaking position L before breaking.

The breaking mechanism 100 mainly includes a fixed part 10 and a movable part 20 . The fixing part 10 is fixedly provided on the part of the stand (not shown), and has a horizontal upper surface 10a. On the other hand, the movable portion 20 is the same as the fixed portion 10 in that it is provided on a stand (not shown), but a top plate (movable table) 21 having a flat upper surface 21a is provided so as to be accompanied by the operation of the mechanism described later. Various forms are movable. The fixed portion 10 and the movable portion 20 are arranged to be spaced apart at predetermined intervals in the horizontal plane.

In the situation shown in FIGS. 1 and 2 , the upper surface 21a of the top plate 21 of the movable portion 20 and the upper surface 10a of the fixed portion 10 are the same level. In other words, both are located in one horizontal plane. In the present embodiment, the posture of the movable portion 20 in such a situation is referred to as a reference posture.

In the breaking mechanism 100, the movable portion 20 is in the reference posture, and the brittle material substrate W as the breaking object is loaded in such a state as to straddle the upper surface 10a of the fixed portion 10 and the upper surface 21a of the top plate 21 of the movable portion 20. The fixed state is defined as the initial state of the breaking action. In more detail, the brittle material substrate W is placed and fixed in a posture in which the predetermined breaking position L extends along the portion separating the fixed portion 10 and the movable portion 20 . Preferably, it is mounted and fixed so that the predetermined dividing position L is located in the center of the partition part between the fixed part 10 and the movable part 20 .

In FIGS. 1 and 2 and the subsequent drawings, the xyz coordinates of the right-handed system are added, and the extending direction of the predetermined breaking position L in the state where the brittle material substrate W is placed and fixed as described above is set as the x-axis. The direction of separation between the fixed portion 10 and the movable portion 20 is the y-axis direction, and the vertical direction is the z-axis direction.

Further, the brittle material substrate W is fixed to each of the upper surface 10a of the fixing portion 10 and the upper surface 21a of the top plate 21 . Various known methods can be applied to this fixing. For example, the upper surface 10a and the upper surface 21a may be provided with suction grooves (not shown in the figure) to perform suction and fixation, or the edge portion of the brittle material substrate W may be clamped and fixed by a teaching method not shown in the figure. state.

The movable portion 20 includes four elevating mechanisms 22 ( 22 a to 22 d ) as a structure for moving the top plate 21 . The lift mechanism 22 is realized by, for example, a combination of a ball screw and an AC servo motor.

The elevating mechanism 22 is erected in the vertical direction by fixing its lower end on a stand (not shown), and each upper part is independently movable (moving up and down) in the z-axis direction.

However, the upper ends of the respective lifting mechanisms 22 ( 22 a to 22 d ) are connected to the bolsters (bearings) 23 ( 23 a to 23 d ). In addition, each of the bolsters 23 ( 23 a to 23 d ) is indirectly connected to the top plate 21 in a form described later. Thereby, the top plate 21 can be inclined in various directions according to the combination of the lifting and lowering actions of the respective lifting mechanisms 22 .

In more detail, in FIGS. 1 and 2 and the following drawings, it is assumed that the elevating mechanisms 22a and 22b are arranged at the end 20a on the positive side in the x-axis direction of the movable portion 20, and the ends on the negative side in the x-axis direction are arranged. Elevating mechanisms 22c and 22d are arranged in the portion 20b, and each upper end portion is sequentially connected to the pillows 23a, 23b, 23c, and 23d. Further, in each of the end portions 20a and 20b, the elevating mechanisms 22a and 22c are arranged on the negative side in the y-axis direction near the fixing portion 10, and the raising and lowering mechanisms 22b and 22d are arranged on the positive side in the y-axis direction away from the fixing portion 10.

In other words, the four elevating mechanisms 22 are provided at positions that are the vertices of a rectangle in plan view, and support the top plate 21 from below at each position. Therefore, the distance between the elevating mechanism 22a and the elevating mechanism 22c in the x-axis direction and the distance between the elevating mechanism 22b and the elevating mechanism 22d are equal and constant, and the distance between the elevating mechanism 22a and the elevating mechanism 22b in the y-axis direction, and the elevating mechanism 22b are equal and constant. The distance between the mechanism 22c and the lifting mechanism 22d is also equal and constant.

The bolster 23a and the bolster 23b are connected to the connecting plate 24a extending in the y-axis direction at the ends on the positive side in the x-axis direction below the top plate 21 . More specifically, the pillow 23a is fixed to the connecting plate 24a, and the pillow 23b is connected to the y-axis linear guide 25a attached to the lower surface of the connecting plate 24a. The y-axis linear guide 25a is provided to guide the pillow 23b in the y-axis direction, whereby the pillow 23b can be displaced in the y-axis direction.

Similarly, the bolster 23c and the bolster 23d are connected to the connecting plate 24b extending in the y-axis direction at the end portion on the negative side in the x-axis direction below the top plate 21 . More specifically, the pillow 23c is fixed to the connecting plate 24b, and the pillow 23d is connected to the y-axis linear guide 25b attached to the lower surface of the connecting plate 24b. The y-axis linear guide 25b is provided so as to guide the pillow 23d in the y-axis direction, whereby the pillow 23d can also be displaced in the y-axis direction.

The y-axis linear guides 25a and 25b are provided for the purpose of securing the inclination angle when the top plate 21 is inclined in the yz plane. Based on the fixed arrangement position of each lift mechanism 22 in the horizontal plane, in order to lift the lift mechanism 22 to incline the top plate 21 in the yz plane, only in the range of a small inclination angle, the shaft rest 23 is adjusted according to the position of the top plate 21. Inclination relative to the lift mechanism 22 can also be achieved. However, in order to increase the inclination angle beyond the inclination limit of the bolster 23, it is necessary to relatively offset the part where the lift mechanisms 22b and 22d support the top plate 21 from below in the y-axis direction. In the breaking mechanism 100, by providing the y-axis linear guides 25a and 25b, the positions of the bolsters 23b and 23d, in other words, the positions where the lift mechanisms 22b and 22d support the top plate 21 from below can be made in the y-axis direction The relative offset allows the inclination of the top plate 21 in the yz plane to be freely set in a wide range of inclination angles.

Moreover, although the connecting plate 24b is directly fixed to the top plate 21, the connecting plate 24a is connected to the x-axis linear guides 26a and 26b attached to the end of the lower surface of the top plate 21 on the positive side in the x-axis direction. The x-axis linear guides 26a and 26b are provided at positions that are vertically above the elevating mechanisms 22a and 22b when the movable portion 20 is in the reference posture. Thereby, the link plate 24a can be displaced in the x-axis direction.

The x-axis linear guides 26a and 26b are provided for the purpose of securing the inclination angle when the top plate 21 is inclined in the zx plane. The reason and function are the same as those of the y-axis linear guides 25a and 25b.

By having the above-mentioned configuration, in the breaking mechanism 100, the connection state with the top plate 21 of each of the four elevating mechanisms 22 (22a to 22d) is different from each other.

Specifically, the elevating mechanism 22a and the top plate 21 are connected through the pillow block 23a, the connecting plate 24a, and the x-axis linear guide 26a.

Moreover, the lift mechanism 22b and the top plate 21 are connected via the pillow block 23b, the y-axis linear guide 25a, the connecting plate 24a, and the x-axis linear guide 26b.

In addition, the elevating mechanism 22c and the top plate 21 are connected through the pillow block 23c and the connecting plate 24b.

Moreover, the lift mechanism 22d and the top plate 21 are connected via the pillow block 23d, the y-axis linear guide 25b, and the connecting plate 24b.

In the breaking mechanism 100, the posture of the top plate 21 can be arbitrarily changed by the combination of the independent lifting and lowering actions of the respective lifting mechanisms 22a to 22d connected to the top plate 21 in the above-described different aspects.

＜Breaking action＞ In the breaking mechanism 100, various breaking actions can be performed by utilizing the feature that the posture of the top plate 21 can be arbitrarily changed by the combination of the independent lifting motions of the respective lifting mechanisms 22a to 22d described above. Hereinafter, these and the like will be described in order.

(Basic pose and in-plane motion) FIG. 3 is a diagram showing a situation when the breaking mechanism 100 is in the initial state of the breaking operation, which is shown for the purpose of comparison with the situations during various breaking operations described later. FIG. 3( a ) is a schematic perspective view in a different direction from FIG. 1 , and FIG. 3( b ) is a yz plan view.

In addition, hereinafter, the advancing and retreating state of the elevating mechanism 22 when the movable portion 20 is in the reference posture is referred to as a reference state.

4 to 9 are diagrams showing various operating states in which the movable portion 20 is operated while the top plate 21 is held parallel to the x-axis direction (no inclination occurs in the x-axis direction). Among these operations, since the top plate 21 is displaced (inclined) only in the yz plane, the operations are collectively referred to as in-plane operations. The in-plane motion includes forward tilt motion, reverse tilt motion, and offset motion, which will be described later. 4 to 9 are also the same as in FIG. 3 , the figure with reference numeral (a) is a perspective view, and the figure with reference numeral (b) is a yz plan view.

In addition, in each perspective view, a vector (inclination vector) indicating the inclination direction with reference to the horizontal plane when the top plate 21 is inclined in accordance with the operation of the movable portion 20 is expressed in a coordinate format. In addition, due to the inclination of the top plate 21, the portion of the brittle material substrate W placed on the top plate 21 is also inclined with the same inclination vector. However, hereinafter, for the sake of simplicity, this case is simply referred to as the inclination of the brittle material substrate W. As shown in FIG.

FIG. 4 shows a state in which the movable portion 20 operates so as to lift up the end portion on the positive side in the y-axis direction of the top plate 21 . The tilt vector of the top plate 21 in this case is represented by (0, +y, +z).

This is achieved by maintaining the elevating mechanism 22a and the elevating mechanism 22c not shown in Fig. 4(b) as shown in FIG. The elevating mechanism 22b and the elevating mechanism 22d not shown in Fig. 4(b) are raised in the positive z-axis direction as indicated by the arrow mark AR1a.

In addition, the pillow 23 b and the pillow 23 d not shown in FIG. 4( b ) are guided in the negative y-axis direction as indicated by the arrow AR1 b in accordance with the ascent of the elevating mechanisms 22 b and 22 d.

On the other hand, FIG. 5 shows the case where the movable part 20 operates so that the end part on the positive side in the y-axis direction of the top plate 21 is lowered. The tilt vector of the top plate 21 in this case is represented by (0, +y, -z).

This is achieved by maintaining the elevating mechanism 22a and the elevating mechanism 22c not shown in Fig. 5(b) as shown in Fig. 5(b) to remain stationary in the reference state, while The elevating mechanism 22b and the elevating mechanism 22d not shown in Fig. 5(b) are lowered in the negative z-axis direction as indicated by the arrow mark AR2a.

Further, with the descending of the lift mechanisms 22b and 22d, the pillow 23b and the pillow 23d not shown in Fig. 5(b) are guided in the positive y-axis direction as indicated by arrow mark AR2b.

Hereinafter, the operation of the movable portion 20 shown in FIGS. 4 and 5 is collectively referred to as a positive tilt operation, the former operation is also referred to as an upward positive tilt operation, and the latter operation is referred to as a downward positive tilt operation.

The positive tilt operation is a basic operation when the brittle material substrate W is broken. When the movable portion 20 operates in either the upward positive tilting motion or the downward positive tilting motion, in the brittle material substrate W, bending stress is generated around the planned breaking position L. When a scribe line is formed along the planned breaking position L, cracks extend from the scribe line due to the action of the bending stress, and the brittle material substrate W is split along the planned breaking position L. It is also possible to alternately repeat the positive inclination movements of the two sides.

FIG. 6 shows a state in which the movable portion 20 operates so as to lift up the end portion on the negative side in the y-axis direction of the top plate 21 . The tilt vector of the top plate 21 in this case is represented by (0, -y, +z). In addition, in FIG. 6 (the same is true for FIGS. 7 to 10 ), the brittle material substrate W is divided into a first portion W1 fixed to the fixed portion 10 and a second portion W2 fixed to the movable portion 20 . .

This is achieved by maintaining the elevating mechanism 22b and the elevating mechanism 22d (not shown in FIG. 6(b), as shown in FIG. The elevating mechanism 22a and the elevating mechanism 22c not shown in Fig. 6(b) are raised in the positive direction of the z-axis as indicated by the arrow mark AR3a.

In addition, the pillow 23b and the pillow 23d not shown in FIG. 6(b) are guided in the positive y-axis direction as indicated by the arrow mark AR3b in accordance with the rise of the elevating mechanisms 22a and 22c.

On the other hand, FIG. 7 shows the case where the movable portion 20 is operated so that the end portion on the negative side in the y-axis direction of the top plate 21 is lowered. The tilt vector of the top plate 21 in this case is represented by (0, -y, -z).

This is achieved by maintaining the elevating mechanism 22b and the elevating mechanism 22d (not shown in FIG. 7(b) as shown in FIG. The elevating mechanism 22a and the elevating mechanism 22c not shown in Fig. 7(b) are lowered in the negative z-axis direction as indicated by the arrow mark AR4a.

In addition, with the descending of the lift mechanisms 22a and 22c, the pillow 23b and the pillow 23d not shown in Fig. 7(b) are guided in the negative y-axis direction as indicated by arrow mark AR4b.

Hereinafter, the operation of the movable portion 20 shown in FIGS. 6 and 7 is collectively referred to as a reverse tilt operation, the former operation is also referred to as an ascending reverse tilt operation, and the latter operation is also referred to as a descending reverse tilt operation.

Depending on the nature and state of the brittle material substrate W, it is also possible to realize the severing process more quickly and with excellent quality by adopting the sequence of performing the reverse tilting action following the forward tilting action, rather than merely repeating the forward tilting action. situation. For example, it is possible to exemplify a state in which the downward inclination operation shown in FIG. 7 is performed after the upward forward inclination operation shown in FIG. 4 is performed, or after the downward forward inclination operation shown in FIG. 5 is performed, the operation shown in FIG. 6 is performed. The state of the rising and anti-tilting action, etc.

In addition, it is also possible to perform a reverse tilt operation together with the start of the split. In this case, shear stress acts on the predetermined breaking position L.

FIG. 8 shows a state in which the movable portion 20 operates so as to lift the entire top plate 21 up. The tilt vector of the top plate 21 in this case is represented by (0, 0, +z).

This is achieved by raising the elevating mechanism 22a and the elevating mechanism 22c not shown in FIG. 8(b) in the positive z-axis direction as indicated by the arrow AR5a, and also making the elevating mechanism 22b And the raising/lowering mechanism 22d which is not shown in FIG.8(b) raises to z-axis positive direction as shown by arrow mark AR5b.

In particular, when all the four elevating mechanisms 22 are raised in the same manner, the top plate 21 is raised with the upper surface 21a being kept horizontal.

On the other hand, FIG. 9 shows the case where the movable part 20 operates so as to lower the entire top plate 21 . The tilt vector of the top plate 21 in this case is represented by (0, 0, -z).

This is achieved by making the lifting mechanism 22a and the lifting mechanism 22c not shown in Fig. 9(b) move in the negative direction of the z-axis as indicated by the arrow mark AR6a as shown in Fig. 9(b). It descends, and the elevator mechanism 22b and the elevator mechanism 22d which are not shown in FIG.9(b) are also descend|fallen in the z-axis negative direction as shown by arrow mark AR6b.

In particular, when all the four lift mechanisms 22 descend in the same manner, the top plate 21 descends with the upper surface 21a of the top plate 21 being kept horizontal.

Hereinafter, the operations of the movable portion 20 shown in FIGS. 8 and 9 are collectively referred to as offset operations, the former operations are also referred to as up offset operations, and the latter operations are referred to as down offset operations.

There are cases in which the effect of realizing the splitting more quickly and with excellent quality is exhibited by performing the offset operation in the same manner as the reverse tilt operation after the forward tilt operation. For example, it is possible to exemplify a state in which the upward biasing operation shown in FIG. 8 is performed after the upward positive tilting operation shown in FIG. 4 is performed, or the downward positive tilting operation shown in FIG. The state of the falling offset action, etc.

In addition, it is also possible to carry out the offset operation together with the start of the division. In this case, shear stress acts on the predetermined breaking position L.

(3D action) FIGS. 10 to 13 are diagrams showing various operation states in which the movable portion 20 is operated in a state in which the top plate 21 is displaced (inclined) not only in the yz plane but also in the x-axis direction. These actions are collectively referred to as three-dimensional actions. 10 to 13 are the same as in FIGS. 3 to 9 , and the figures with reference numeral (a) are perspective views, and the figures with reference numeral (b) are yz plan views. 10 to 13 also show the inclination vector when the top plate 21 is inclined in accordance with the operation of the movable portion 20 as in FIGS. 3 to 9 .

FIG. 10 shows a state in which the movable portion 20 performs a three-dimensional operation in a state in which the ends of the top plate 21 on the negative side in the x-axis direction and on the positive side in the y-axis direction are lowered. The tilt vector of the top plate 21 in this case is represented by (-x, +y, -z).

This is achieved by, as shown in FIG. 10( b ), the elevating mechanism 22 a is maintained in a stationary state in a reference state, and the elevating mechanisms 22 b to 22 d are made as indicated by arrows AR7 a and AR7 b on the other hand. , and AR7c, respectively, descend in the negative direction of the z-axis in such a manner that the descending degree of the lift mechanism 22d becomes the largest.

At this time, along with the descending of the lift mechanisms 22b and 22d, the bolster 23b and the bolster 23d are guided in the positive direction of the y-axis as indicated by arrows AR7d and AR7e, respectively, and are indicated by arrows in FIG. 10( a ). As shown in AR7f, the connecting plate 24a is guided in the negative x-axis direction by the x-axis linear guides 26a and 26b (but not shown in FIG. 10(a) ).

On the other hand, FIG. 11 shows the case where the movable portion 20 performs three-dimensional operation in a state in which the ends of the top plate 21 on the positive side in the x-axis direction and on the positive side in the y-axis direction are lowered. The tilt vector of the top plate 21 in this case is represented by (+x, +y, -z).

This is achieved by, as shown in FIG. 11( b ), the elevating mechanism 22 c is maintained in a stationary state at the reference state, and the elevating mechanisms 22 a , 22 b and 22 d are made as indicated by arrows AR8 a on the other hand. , AR8b, and AR8c, respectively, descend in the negative direction of the z-axis in such a state that the descending degree of the lift mechanism 22b becomes the largest.

At this time, with the descending of the lift mechanisms 22b and 22d, the pillow 23b and the pillow 23d are guided in the positive y-axis direction as indicated by the arrow mark AR8d, and are indicated by the arrow mark AR8e in Fig. 11(a) . , the connecting plate 24a is guided to the positive direction of the x-axis by the x-axis linear guides 26a and 26b (but not shown in FIG. 11( a )).

In addition, FIG. 12 shows the case where the movable part 20 performs a three-dimensional operation in the state which raised the edge part of the positive side of the x-axis direction and the positive side of the y-axis direction of the top plate 21. As shown in FIG. The tilt vector of the top plate 21 in this case is represented by (+x, +y, +z).

This is achieved by, as shown in FIG. 12( b ), maintaining the elevating mechanism 22c in a stationary state at a reference state, and making the elevating mechanisms 22a , 22b and 22d , as indicated by arrows AR9a , on the other hand. As shown by , AR9b, and AR9c, the lift mechanism 22b rises in the positive direction of the z-axis in a state in which the lift degree of the lift mechanism 22b becomes the maximum.

At this time, the pillow 23b and the pillow 23d are guided in the negative direction of the y-axis, as indicated by arrow marks AR9d and AR9e, respectively, along with the rise of the elevating mechanisms 22b and 22d. Moreover, in FIG.12(a), as shown by arrow mark AR9f, the connecting plate 24a is guided to the x-axis negative direction by the x-axis linear guides 26a and 26b which are not shown in figure.

On the other hand, FIG. 13 shows a state in which the movable portion 20 performs a three-dimensional operation in a state where the ends of the top plate 21 on the negative side in the x-axis direction and on the positive side in the y-axis direction are lifted. The tilt vector of the top plate 21 in this case is represented by (-x, +y, +z).

This is achieved by, as shown in FIG. 13( b ), the elevating mechanism 22 a is maintained in the reference state, and on the other hand, the elevating mechanisms 22 b to 22 d are indicated by arrows AR10 a and AR10 b on the other hand. , and as shown in AR10c, the lift mechanism 22b ascends in the positive direction of the z-axis in such a state that the ascending degree of the ascending and descending mechanism 22b becomes the maximum.

At this time, as the lift mechanisms 22b and 22d rise, the pillow 23b and the pillow 23d are guided in the negative y-axis direction as indicated by the arrow mark AR10d, and as indicated by the arrow mark AR10e in Fig. 13(a) . , the connecting plate 24a is guided in the positive x-axis direction by the x-axis linear guides 26a and 26b not shown.

The four three-dimensional motions shown in FIGS. 10 to 13 are common in that the four elevating mechanisms 22 a to 22 d of the top plate 21 of the movable portion 20 are supported from below at the positions of the vertices of the rectangle in plan view. , by setting it up and down independently. According to this three-dimensional operation, a force in the vertical plane along the extending direction of the scribe line can act on the brittle material substrate W. FIG.

Such an operation is absolutely impossible in the conventional breaking mechanisms disclosed in Patent Document 1 and Patent Document 2.

When the brittle material substrate W with the scribe line formed along the planned cleavage position L is divided, these three-dimensional actions are combined with the positive tilt action, so that the crack from the scribe line can be extended, It occurs not only in the thickness direction of the brittle material substrate W, that is, the z-axis direction, but also in the extending direction of the predetermined split position L, that is, the x-axis direction. Depending on the nature and state of the brittle material substrate W, there are cases in which breaking can be achieved more quickly and with excellent quality by adopting a combination of these operations.

Further, in the breaking mechanism 100, by appropriately combining the lifting and lowering of the four lifting mechanisms 22a to 22d, it is not limited to the combination exemplified so far, and the forward tilting action, the reverse tilting action, the offset action, and the Arbitrary combinations of three-dimensional motions allow the movable portion 20 to move with an extremely high degree of freedom. As a result, a force can be applied to the brittle material substrate W in a complicated and flexible manner, as in the case of a human being to break with a hand, so that higher-precision breaking can be performed.

As described above, according to the present embodiment, the breaking mechanism for breaking the brittle material is configured as follows. That is, four lifting mechanisms are provided which are independently movable up and down, and the positions of the vertices of the rectangle in plan view are arranged from The structure of the top plate of the movable part of the brittle material substrate is mounted and fixed by the lower support and the fixed part. According to this, it is possible to make the movable part with a higher degree of freedom than before by appropriately combining the elevating actions of these four elevating mechanisms. Department action. For example, tilt motions, offset motions, and three-dimensional motions may be performed individually, or in any combination. As a result, a force can be applied to the brittle material substrate in a complex and flexible form that was not available before, and higher-precision breaking can be performed.

<Variation of the first embodiment> In the above-described embodiment, the y-axis linear guides 25a and 25b and the x-axis linear guides 26a and 26b are provided for the purpose of securing the inclination angle when the top plate 21 is inclined, but the inclination range of the top plate 21 may be small. In this case, these linear guides can also be omitted, and the connecting plates 24a and 24b can also be omitted, and the shaft rests 23 ( 23 a - 23 d ) connected with the upper ends of the respective lifting mechanisms 22 ( 22 a - 22 d ) are directly attached to the top plate 21 below.

Alternatively, only the y-axis linear guides 25a and 25b may be omitted, or only the x-axis linear guides 26a and 26b may be omitted.

Furthermore, in the above-described embodiment, the y-axis linear guides 25a and 25b are provided between the elevating mechanism 22b and the top plate 21 and between the elevating mechanism 22d and the top plate 21, but instead of this, the elevating mechanism 22a and the top plate 21 may be used. A state in which the y-axis linear guides 25 a and 25 b are provided between the top plates 21 and between the lift mechanism 22 c and the top plate 21 .

Furthermore, in the above-described embodiment, the x-axis linear guides 26a and 26b are provided between the elevating mechanism 22a and the top plate 21 and between the elevating mechanism 22b and the top plate 21, but instead of this, the elevating mechanism 22c and the top plate 21 may be used. A state in which the x-axis linear guides 26a and 26b are provided between the top plates 21 and between the lift mechanism 22d and the top plate 21 .

<Second Embodiment> <Outline of Breaking Mechanism> FIG. 14 is a diagram schematically (generally) showing the configuration of the breaking mechanism 200 according to the second embodiment of the present invention. More specifically, FIG. 14 is a schematic perspective view of a state in which the breaking mechanism 200 is viewed (overlooking) from above.

Since most of the constituent elements of the breaking mechanism 200 are common to those of the breaking mechanism 100 of the first embodiment, the same reference numerals are assigned to them, and detailed descriptions of matters common to the first embodiment are omitted. Hereinafter, the difference from the first embodiment will be mainly described.

The breaking mechanism 200 includes a fixed portion 10 and a movable portion 30 . The movable part 30 is the same as the movable part 20 of the breaking mechanism 100 , and includes a top plate 31 , four elevating mechanisms 32 ( 32 a to 32 d ) that are erected in the vertical direction and can be independently raised and lowered, and four The shaft rests 33 ( 33 a to 33 d ) to which the upper ends of the lift mechanisms 32 are connected are connected.

In FIG. 14 and the following drawings, it is assumed that the elevating mechanisms 32a and 32b are arranged on the end 30a on the positive side in the x-axis direction of the movable portion 30, and the elevating mechanisms 32c and 32d are arranged on the end 30b on the negative side in the x-axis direction. , and each upper end portion is sequentially connected to the bolsters 33a, 33b, 33c, and 33d. Further, in each of the end portions 30a and 30b, the elevating mechanisms 32a and 32c are arranged on the negative side in the y-axis direction, and the elevating mechanisms 32b and 32d are arranged on the positive side in the y-axis direction.

More specifically, the pillow 33 is fixed to the top plate 31 as in the modification of the first embodiment described above.

Further, the lifting mechanisms 32a and 32b are vertically fixed on the connecting plate 34a extending in the y-axis direction on the end portion 30a side, and the lifting mechanisms 32c and 32d are vertically fixed on the end portion 30b On the connecting plate 34b extending along the y-axis direction. The connecting plates 34a and 34b are connected to the y-axis sliders 35a and 35b, respectively, and the y-axis sliders 35a and 35b are respectively fixed along the y-axis direction extending in the y-axis direction not shown in FIGS. 14 to 19 . The guide rails 36a and 36b of the frame shown in the figure can guide freely.

The y-axis sliders 35a and 35b are provided for the purpose of securing the inclination angle and the rotation angle when the top plate 31 rotates while tilting during three-dimensional operation. As will be described later, the inclination and rotation of the top plate 31 are realized by horizontally moving the y-axis sliders 35a and 35b along the guide rails 36a and 36b along with the lifting and lowering motion of the lifting mechanism 32 (32a to 32d).

In the breaking mechanism 200 having the above-described configuration, unlike the breaking mechanism 100, the configuration of the movable portion 30 is symmetrical with respect to the yz plane.

＜Breaking action＞ Also in the breaking mechanism 200 having the above-described configuration, as with the breaking mechanism 100, various breaking operations can be performed by the combination of the independent lifting and lowering operations of the respective lifting mechanisms 32a to 32d connected to the top plate 31.

Regarding the in-plane motion without displacement in the x-axis direction, that is, the forward tilt motion, the reverse tilt motion, and the offset motion, since they are all caused by raising and lowering each of the lifting mechanisms 32a to 32d and the breaking mechanism 100 Since each of the mechanisms 22a to 22d is raised and lowered in the same manner, details are omitted. However, since the bolster 33 is directly fixed to the top plate 31 , the inclination range of the top plate 31 caused by each in-plane motion is within the inclination range of the bolster 33 .

Next, the three-dimensional operation of the movable portion 30 realized in the breaking mechanism 200 will be described. 15 to 18 are diagrams showing various operation modes of the three-dimensional operation of the movable portion 30 realized in the breaking mechanism 200 . In addition, in FIGS. 15 and 16 , as in FIGS. 3 to 13 , the figures with reference numeral (a) are perspective views, and the figures with reference numeral (b) are yz plan views. 4 to 13 , in FIGS. 15 and 16 , the inclination vector when the top plate 31 is inclined along with the operation of the movable portion 30 is also shown. On the other hand, in FIGS. 17 and 18 , only the yz plan view is shown.

FIG. 15 shows a state in which the movable portion 30 performs a three-dimensional operation in a state in which the ends of the top plate 31 on the positive side in the x-axis direction and on the positive side in the y-axis direction are lowered. The tilt vector of the top plate 31 in this case is represented by (+x, +y, -z).

This is achieved by, as shown in FIG. 15( b ), the elevating mechanism 32c is maintained in a stationary state in a reference state, and the elevating mechanisms 32a , 32b , and 32d are, as indicated by arrows, on the other hand. As shown in AR11a, AR11b, and AR11c, the lowering degree of the elevating mechanism 32b becomes the maximum, and it descends in the negative direction of the z-axis.

At this time, a force in the positive direction of the y-axis indicated by the arrow mark AR11e acts on the connecting plate 34a on which the lifting mechanism 32b with the largest descending degree is fixed, and the y-axis slider 35a connecting the connecting plate 34a, the y-axis The slider 35a is guided in the positive direction of the y-axis along the guide rail 36a. In addition, along with the movement of the y-axis slider 35a, a counterclockwise force is applied to the movable portion 30 to rotate in the horizontal plane.

Therefore, depending on the degree of crack extension at the planned breaking position L, along with the rotation of the movable portion 30, the end portion of the brittle material substrate W on the positive side in the x-axis direction is used as a starting point, and is fixed to the top plate 31 of the movable portion 30. The second portion W2 is separated from the first portion W1 of the brittle material substrate W fixed to the fixing portion 10 , and finally, as shown in FIG. 15( a ), the second portion W2 is inclined relative to the second portion 1 The state where the part W1 is inclined at a certain angle + θ in the horizontal plane.

On the other hand, FIG. 16 shows a case where the movable portion 30 performs three-dimensional operation in a state in which the ends of the top plate 31 on the negative side in the x-axis direction and on the positive side in the y-axis direction are lowered. The tilt vector of the top plate 31 in this case is represented by (-x, +y, -z).

This is achieved by, as shown in FIG. 16( b ), the elevating mechanism 32 a is kept stationary in the reference state, and the elevating mechanisms 32 b , 32 c , and 32 d are made as indicated by arrows on the other hand. As shown in AR12a, AR12b, and AR12c, the lowering degree of the lifting mechanism 32d becomes the maximum, and the lowering degree is lowered in the negative direction of the z-axis.

At this time, a force in the positive direction of the y-axis indicated by the arrow mark AR12d acts on the connecting plate 34b on which the lifting mechanism 32d with the greatest degree of descent is fixed, and on the y-axis slider 35b connecting the connecting plate 34b, the y-axis The slider 35b is guided in the positive direction of the y-axis along the guide rail 36b. In addition, along with the movement of the y-axis slider 35b, a clockwise force acts on the movable portion 30 in the horizontal plane.

Therefore, depending on the degree of crack extension in the planned breaking position L, along with the rotation of the movable portion 30, the brittle material substrate W starts from the end of the brittle material substrate W on the negative side in the x-axis direction from the x-axis direction of the brittle material substrate W. From the end on the negative side, the second part W2 fixed to the top plate 31 of the movable part 30 is separated from the first part W1 of the brittle material substrate W fixed to the fixed part 10 , and finally, as shown in FIG. 16( a ), In addition to the inclination of itself, the second portion W2 is in a state of being inclined at a certain angle - θ in the horizontal plane with respect to the first portion W1.

17 shows a state in which the movable portion 30 performs a three-dimensional operation in a state in which the ends of the top plate 31 on the positive side in the x-axis direction and on the positive side in the y-axis direction are lifted. The tilt vector of the top plate 31 in this case is represented by (+x, +y, +z).

This is achieved by, as shown in FIG. 17 , the elevating mechanism 32c is maintained in a stationary state in a reference state, and the elevating mechanisms 32a, 32b, and 32d are, as indicated by arrows AR13a, AR13b, on the other hand. , and as shown in AR13c, the lift mechanism 32b ascends in the positive direction of the z-axis in such a state that the ascending degree of the ascending and descending mechanism 32b becomes the maximum.

At this time, a force in the positive direction of the y-axis indicated by the arrow mark AR13d acts on the connecting plate 34a on which the elevating mechanism 32b with the highest degree of elevation is fixed, and the y-axis slider 35a connecting the connecting plate 34a, the y-axis The slider 35a is guided in the positive direction of the y-axis along the guide rail 36a. In addition, along with the movement of the y-axis slider 35a, a counterclockwise force acts on the movable portion 30 in the horizontal plane.

Therefore, in this case, as in the case shown in FIG. 15 , according to the degree of crack extension in the predetermined breaking position L, the end portion on the positive side in the x-axis direction of the brittle material substrate W is accompanied by the rotation of the movable portion 30 . As a starting point, from the end of the brittle material substrate W on the positive side in the x-axis direction, the second portion W2 of the top plate 31 fixed to the movable portion 30 is separated from the first portion W1 of the brittle material substrate W fixed to the fixed portion 10 , and finally, the second part W2 is inclined by a certain angle + θ in the horizontal plane with respect to the first part W1 in addition to its own inclination.

Furthermore, FIG. 18 shows a state in which the movable portion 30 performs a three-dimensional operation in a state in which the ends of the top plate 31 on the negative side in the x-axis direction and on the positive side in the y-axis direction are lifted. The tilt vector of the top plate 31 in this case is represented by (-x, +y, +z).

This is achieved by, as shown in FIG. 18 , the elevating mechanism 32a is maintained in a stationary state in a reference state, and the elevating mechanisms 32b, 32c, and 32d are made as indicated by arrows AR14a, AR14b on the other hand. , and as shown in AR14c, the lift mechanism 32d ascends in the positive direction of the z-axis in such a state that the ascending degree of the ascending and descending mechanism 32d becomes the maximum.

At this time, a force in the positive direction of the y-axis indicated by the arrow mark AR14d acts on the connecting plate 34b on which the elevating mechanism 32d with the highest degree of elevation is fixed, and the y-axis slider 35b connecting the connecting plate 34b, the y-axis The slider 35b is guided in the positive direction of the y-axis along the guide rail 36b. In addition, along with the movement of the y-axis slider 35b, a counterclockwise force acts on the movable portion 30 in the horizontal plane.

Therefore, in this case, as in the case shown in FIG. 16 , according to the degree of crack extension in the predetermined breaking position L, the end portion on the positive side in the x-axis direction of the brittle material substrate W is accompanied by the rotation of the movable portion 30 . As a starting point, from the end of the brittle material substrate W on the negative side in the x-axis direction, the second portion W2 of the top plate 31 fixed to the movable portion 30 is separated from the first portion W1 of the brittle material substrate W fixed to the fixed portion 10 , and finally, the second portion W2 is inclined by a certain angle −θ in the horizontal plane with respect to the first portion W1 in addition to its own inclination.

The three-dimensional operation realized in the breaking mechanism 200 as shown in FIGS. 15 to 18 is also the same as the three-dimensional operation in the first embodiment. It is absolutely impossible to carry out in the breaking mechanism.

Therefore, in the case of using the breaking mechanism 200 of the present embodiment to break a brittle material substrate W having a scribe line formed along the predetermined breaking position L, it is also possible to combine the three-dimensional action with the positive tilt action. The extension of the crack from the scribe line occurs not only in the thickness direction of the brittle material substrate W, that is, the z-axis direction, but also in the extending direction of the planned breaking position L, that is, the x-axis direction. Depending on the nature and state of the brittle material substrate W, there are cases in which breaking can be achieved more quickly and with excellent quality by adopting a combination of these operations.

Of course, in the breaking mechanism 200 of the present embodiment, the same as the breaking mechanism 100 of the first embodiment, by appropriately combining the lifting and lowering of the four lifting mechanisms 32a to 32d, positive tilting action, reverse tilting action can be obtained. Any combination of the tilting motion, the shifting motion, and the three-dimensional motion enables the movable portion 30 to operate with an extremely high degree of freedom. As a result, a force can be applied to the brittle material substrate W in a complicated and flexible manner, as in the case of a human being to break with a hand, so that higher-precision breaking can be performed.

In particular, when a three-dimensional operation is performed, a force to rotate the movable portion 30 in the horizontal plane is applied, whereby the extending direction along the planned breaking position L can be realized more quickly than in the first embodiment. extension of the crack.

As described above, in the present embodiment, also in the breaking mechanism for breaking the brittle material, the four top plates that support the movable portion can be raised and lowered from below at the positions of the vertices of the rectangle in plan view. The lifting and lowering operations of the mechanism are appropriately combined to operate the movable portion with a higher degree of freedom than before. At this time, a force to rotate the movable portion in the horizontal plane may also act. As a result, a force can be applied to the brittle material substrate in a complex and flexible form that has not been possible before, so that higher-precision breaking can be performed.

<Construction with panel suppressor> FIG. 19 is a diagram showing a case where the fixed part 10 and the movable part 30 of the breaking mechanism 200 are provided with panel restraining members (clamping members) 11 a and 11 b, respectively.

The panel restraining members 11a and 11b are provided so as to be in contact with the upper surface of the brittle material substrate W in order to further secure the fixing of the brittle material substrate W in the fixed portion 10 and the movable portion 30 at the time of cutting. , and each of the first portion W1 and the second portion W2 of the brittle material substrate W can be sandwiched between the fixed portion 10 or the movable portion 30 . In particular, it is effective in reinforcing the fixed state of the brittle material substrate W with respect to the movable portion 30 which may incline at the time of breaking. In view of this purpose, a panel suppressor may be provided only on the movable portion 30 .

In the case shown in FIG. 19 , the panel restraining members 11 a and 11 b are both in the shape of long rods extending in the x-axis direction in the horizontal plane and longer than the size of the brittle material substrate W, and are arranged in the z-axis direction. Lift freely.

In addition, the splitting mechanism 100 of the first embodiment may be provided with panel suppressors 11a and 11b.

In addition, the form of the panel suppressors 11a and 11b is not limited to those illustrated in FIG. 19 . For example, the brittle material substrate W may be in contact with the brittle material substrate W only in the vicinity of both ends in the x-axis direction.

<Outline of substrate cutting device> Finally, the outline of the substrate cutting device provided with the cutting mechanism will be described. FIG. 20 is a perspective view showing a schematic configuration of a substrate cutting apparatus 1000 provided with a cutting mechanism 200 according to the second embodiment, and FIG. 21 is a perspective view showing a main part of the substrate cutting apparatus 1000 . Among them, in FIGS. 20 and 21 , a more detailed configuration of the breaking mechanism 200 is illustrated.

In addition, in the substrate cutting apparatus 1000 shown in FIGS. 20 and 21 , the positive y-axis direction is the direction in which the brittle material substrate W is conveyed. The brittle material substrate W conveyed from the upstream side (the negative side in the y-axis direction) by a conveying means not shown is placed and fixed so as to straddle the fixed portion 10 and the movable portion 30 . Perform a break. And the 2nd part W2 of the brittle material board|substrate W obtained by this division is conveyed to the downstream side by the several board|substrate support conveyance mechanism 300, and is provided to the process of a subsequent step.

In the substrate cutting apparatus 1000 , a cutting mechanism 200 and a plurality of substrate supporting and conveying mechanisms 300 are provided on the stage 1001 . However, in FIG. 20, the illustration of the board|substrate support conveyance mechanism 300 and the panel suppressors 11a and 11b is abbreviate|omitted.

The main components of the breaking mechanism 200 are as described in the above-mentioned second embodiment. However, in FIGS. 20 and 21 , the upper surface 10a of the fixed portion 10 and the upper surface 31a of the top plate 31 of the movable portion 30 respectively show the adsorption grooves 10b and 31b omitted in FIGS. 14 to 18 . The adsorption grooves 10b and 31b are arranged in a lattice shape on the upper surface 10a of the fixing portion 10 and the upper surface 31a of the top plate 31 .

The plurality of substrate supporting and conveying mechanisms 300 are provided on the downstream side of the movable portion 30 in the conveying direction, in other words, on the positive side in the y-axis direction. More specifically, each substrate supporting and conveying mechanism 300 arranges a plurality of rollers (driven rollers) that are rotatable in a vertical plane including the substrate conveying direction and that support the substrate at the upper end in a plurality of rows along the conveying direction. Conveyor belt formed. Each of the substrate supporting and conveying mechanisms 300 is installed at predetermined intervals in the x-axis direction in parallel with the guide rails 36a and 36b.

In the substrate cutting apparatus 1000 , the second portion W2 of the brittle material substrate W obtained by the cutting operation in the cutting mechanism 200 is transported in the positive y-axis direction by a plurality of substrate supporting and transporting mechanisms 300 .

20 and 21 , the substrate cutting device 1000 provided with the dividing mechanism 200 is illustrated as an example, but the substrate dividing device provided with the dividing mechanism 100 without the dividing mechanism 200 is also configured in the same manner.

10: Fixed part 10a: (of the fixed part 10) the top 10b, 31b: adsorption tank 11a, 11b: Panel Suppressors 20, 30: Movable part 20a, 20b: end 21, 31: Top plate 21a: (of top plate 21) above 21b: (of top plate 21) below 22 (22a~22d), 32 (32a~32d): Lifting mechanism 23 (23a~23d), 33 (33a~33d): Axle pillow 24a, 24b, 34c, 34d: webs 25a, 25b: y-axis linear guide 26a, 26b: x-axis linear guide 31a: (of the top plate 31) above 35a, 35b: y-axis slide 36a, 36b: Rails 100, 200: Breaking mechanism 300: Substrate support conveying mechanism 1000: Substrate breaking device 1001: Stand L: Break the predetermined position W: Brittle material substrate W1: (Brittle Material Substrate) Part 1 W2: (Brittle Material Substrate) Part 2

FIG. 1 is a schematic perspective view of a state in which the breaking mechanism 100 is viewed from above. 2 is a schematic perspective view of the state of the breaking mechanism 100 viewed from below. [ Fig. 3 ] is a diagram showing a state when the breaking mechanism 100 is in the initial state of the breaking operation. FIG. 4 is a diagram showing a state in which the movable portion 20 performs a rising and positive tilting operation. FIG. 5 is a diagram showing a situation when the movable portion 20 performs a downward and positive tilting operation. FIG. 6 is a diagram showing a state in which the movable portion 20 performs an upward and reverse tilt operation. FIG. 7 is a diagram showing a state in which the movable portion 20 performs a descending and anti-tilting operation. [ Fig. 8] Fig. 8 is a diagram showing a situation in which the movable portion 20 performs an upward displacement operation. [ FIG. 9 ] A diagram showing a state in which the movable portion 20 performs a descending offset operation. FIG. 10 is a diagram showing an aspect of the three-dimensional operation of the movable portion 20 . FIG. 11 is a diagram showing one aspect of the three-dimensional motion of the movable portion 20 . FIG. 12 is a diagram showing an aspect of the three-dimensional operation of the movable portion 20 . FIG. 13 is a diagram showing an aspect of the three-dimensional operation of the movable portion 20 . 14 is a schematic perspective view of the state of the breaking mechanism 200 viewed from above. FIG. 15 is a diagram showing an aspect of the three-dimensional operation of the movable portion 30 . FIG. 16 is a diagram showing an aspect of the three-dimensional motion of the movable portion 30 . FIG. 17 is a diagram showing an aspect of the three-dimensional motion of the movable portion 30 . FIG. 18 is a diagram showing an aspect of the three-dimensional motion of the movable portion 30 . 19 is a diagram showing a case where the fixed portion 10 and the movable portion 30 of the breaking mechanism 200 are provided with panel restraining members 11 a and 11 b, respectively. 20 is a perspective view showing a schematic configuration of a substrate cutting device 1000 provided with a cutting mechanism 200 . FIG. 21 is a perspective view showing the main part of the substrate cutting device 1000 .

10: Fixed part

20: Movable part

20a, 20b: end

21: Top plate

21b: (of top plate 21) below

22(22a~22d): Lifting mechanism

23(23a~23d): Axle pillow

24a, 24b: connecting plate

25a, 25b: y-axis linear guide

26a, 26b: x-axis linear guide

100: Breaking mechanism

L: Break the predetermined position

W: Brittle material substrate

Claims (9)

A breaking mechanism for a brittle material substrate, which is used to break the brittle material substrate, has: a fixed portion having a horizontal first upper surface; and The movable part is arranged spaced apart from the fixed part in the horizontal plane; The aforementioned movable part has: a top plate having a flat second upper surface, and the brittle material substrate is mounted and fixed together with the fixing portion; and Four lifting mechanisms are erected in the vertical direction at positions that form the vertices of a rectangle when viewed from above, and each lifting mechanism is set to independently move forward and backward in the vertical direction while supporting the top plate from below; The posture of the top plate can be changed by combining the lifting motions of each of the four lifting mechanisms. The breaking mechanism for a brittle material substrate according to claim 1, wherein, Define the posture of the movable part when the second upper surface is in the same horizontal plane as the first upper surface as the reference posture; The first upper surface and the second upper surface when the movable part is in the reference posture become the mounting and fixing surfaces of the brittle material substrate; In a state where the brittle material substrate is placed and fixed on the placing fixing surface in such a manner that a predetermined linear dividing position is located between the fixing portion and the movable portion, the lifting mechanism moves up and down. action, thereby breaking the brittle material substrate. The breaking mechanism for a brittle material substrate according to claim 2, wherein, In a state where the brittle material substrate is mounted and fixed on the mounting and fixing surface, the direction in the horizontal plane extending from the predetermined breaking position is defined as the first direction, and the direction in the horizontal plane orthogonal to the first direction is defined as the first direction. When the direction is set to the second direction, The four elevating mechanisms are arranged two at each end of both ends of the movable portion in the first direction, and the elevating mechanisms are spaced apart in the second direction at each of the two ends. The breaking mechanism for a brittle material substrate according to claim 3, further comprising: A shaft rest, connected with the upper end of each of the aforementioned four lifting mechanisms; The above-mentioned bolster is directly or indirectly connected to the above-mentioned top plate. The breaking mechanism for a brittle material substrate according to claim 4, further comprising: The first linear guide is provided at the upper end of the two lifting mechanisms that are far from the fixing portion or the two lifting mechanisms that are close to the fixing portion among the four lifting mechanisms in the second direction. between the aforesaid axle bolster and the aforesaid top plate; In accordance with the inclination of the top plate, the bolster is guided along the first linear guide. The breaking mechanism for a brittle material substrate according to claim 4, further comprising: a connecting plate extending in the second direction; Among the four lifting mechanisms, the bearing rests provided at the upper ends of the two lifting mechanisms provided at one end of the first direction are directly or indirectly connected to the connecting plate; A second linear guide is provided at a position above each of the two lifting mechanisms between the connecting plate and the top plate; In accordance with the inclination of the top plate, the connecting plate is guided along the second linear guide. The breaking mechanism for a brittle material substrate according to claim 5, further comprising: a connecting plate extending in the second direction; Among the four lifting mechanisms, the bearing rests provided at the upper ends of the two lifting mechanisms provided at one end of the first direction are directly or indirectly connected to the connecting plate; A second linear guide is provided at a position above each of the two lifting mechanisms between the connecting plate and the top plate; In accordance with the inclination of the top plate, the connecting plate is guided along the second linear guide. The breaking mechanism for a brittle material substrate according to claim 3, wherein, At each of the two ends in the first direction, two of the four lifting mechanisms are connected to a connecting plate extending in the second direction; Each of the above-mentioned connecting plates is connected to a slider provided to be freely guided by the guide rail, and the guide rail is extended in the above-mentioned second direction; In accordance with the inclination of the top plate, the slider is guided along the guide rail. The breaking mechanism for a brittle material substrate according to any one of claims 1 to 8, further comprising: The holding member can hold the brittle material substrate between the fixing portion and the top plate.

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