TW202108522A - Scribing head and scribing device - Google Patents

Abstract

The invention provides a scribing head and a scribing device, which can safely and accurately scribe a thin substrate by sufficiently reducing the scribing load. The scribing head (1) is used for scribing the surface of a brittle material substrate (W) and is provided with a frame component (13), a cutting mechanism (23), a cutting holder (21), a first cylinder mechanism (25) and a second cylinder mechanism (27). The cutting holder (21) is supported so as to be slidable in the vertical direction with respect to the frame member (13), and holds the cutting mechanism (23). The first cylinder mechanism (25) applies a load toward the brittle material substrate (W) side to the dicing holder (21). The second cylinder mechanism (27) applies a load toward the opposite side of the brittle material substrate (W) to the dicing holder (21). The dicing holder (21) is moved toward the brittle material substrate (W) by a differential pressure thrust based on the first cylinder mechanism (25) and the second cylinder mechanism (27).

Description

Scribing head and scribing device

The present invention relates to a scribing head and a scribing device, in particular to a scribing head and a scribing device for scribing a brittle material substrate.

The brittle material substrate used as the panel substrate for FPD is usually manufactured by scribing a large mother substrate with a scribing device, and then dividing it into a predetermined size. For example, Patent Document 1 discloses a scribing device for scribing a glass substrate. The scribing device is equipped with: a platform for holding the glass substrate to be formed with a scribing groove in a horizontal state, a scribing head for scribing the glass substrate held on the platform, and a bridge with a guide rail installed for each scribing head to slide Pieces.

A cutter wheel installation mechanism is arranged at the lower part of the scoring head. The cutter wheel installation mechanism has a holder and a cutter wheel piece mounted on the holder. The knife wheel piece has a piece body and a knife wheel installed on it. The cutter wheel mounting mechanism can move up and down with respect to the scoring head body by the lifting mechanism of the scoring head, press-weld to the glass substrate held on the platform, and scribing the glass substrate by moving relative to the glass substrate . Thereby, a scribe groove is formed in the glass substrate. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 4948837

[The problem to be solved by the invention]

The thickness of glass substrates used for FPDs tends to gradually become thinner from 0.7 mm, which was the mainstream thickness, to 0.4 mm to 0.3 mm, which is the mainstream thickness for portable terminal applications, or below this thickness. When scribing such a thin glass substrate, it is necessary to accurately control the scribing load (load) of the glass substrate to be less than the conventional load range. The reason is that if the above requirements are not fulfilled, the cutter wheel will apply a larger scribing load to the glass substrate, and the glass substrate will be damaged during scribing, or the scribing groove may be formed in a state deviating from the predetermined scribing groove. However, it is not easy to adjust the scribing load on the glass substrate to a load smaller than the weight of the knife mechanism as a whole. The reason is that since the entire knife mechanism is slid in the up and down direction, the weight of the entire knife mechanism is applied to the glass substrate.

The object of the present invention is to make the scribing head scribe a thin substrate safely and accurately by setting the scribing load to be sufficiently small. [Means to Solve the Problem]

Hereinafter, a number of aspects will be described as means to solve the problem. These aspects can be combined arbitrarily as needed.

The scoring head of one aspect of the present invention is used for scribing the surface of a brittle material substrate, and includes a base, a knife mechanism, a knife holder, a first cylinder mechanism, and a second cylinder mechanism. The knife holder is supported so as to be slidable in the vertical direction with respect to the base, and holds the knife mechanism. The first cylinder mechanism applies a load toward the brittle material substrate side to the knife holder. The second cylinder mechanism applies a load to the knife holder facing the side opposite to the brittle material substrate. The load of the first cylinder mechanism is set to be greater than the load of the second cylinder mechanism, thereby using the differential thrust between the first cylinder mechanism and the second cylinder mechanism to move the knife holder toward the brittle material substrate. In this scoring head, the knife holder is moved to the brittle material substrate side by the differential pressure between the first cylinder mechanism and the second cylinder mechanism. Therefore, the load applied by the knife mechanism to the substrate can be extremely small. As a result, damage to the brittle material substrate of the thin plate can be avoided, and the scribing operation can be performed accurately.

The scoring head can be further equipped with a positioning mechanism for positioning the knife holder in the up and down direction. The positioning mechanism may have a supporting member that supports the knife holder so that the knife holder can be detached from the brittle material substrate side. In this scoring head, if the positioning mechanism positions the knife holder so that the knife mechanism abuts against the brittle material substrate, then the support member of the positioning mechanism is separated from the knife holder to the brittle material substrate side. As a result, the knife mechanism can only be pressed against the brittle material substrate by the differential thrust between the first cylinder mechanism and the second cylinder mechanism. This state is a state in which the brittle material substrate can be cut by the knife mechanism, that is, in the process of cutting the substrate by the knife mechanism, the positioning mechanism is separated from the cutting pressure system. As a result, the frictional resistance of each part of the positioning mechanism does not affect the cutting pressure system during the substrate cutting process.

The knife holder may further have a first piston member, a second piston member, and a load meter. The first piston member can be driven by the first cylinder mechanism. The second piston member may be provided on the side of the brittle material substrate of the first piston member and driven by the second cylinder mechanism. The load cell may be arranged between the first piston member and the second piston member. In the scribing unit, the dynamic pressure during the cutting process of the substrate can be measured by a load meter.

The knife holder may have a receiving member provided on the first piston member side of the second piston member, and an abutting member provided on the second piston member side of the first piston member and capable of contacting the receiving member. In the scoring unit, by using the receiving member and the abutting member to make the first piston member and the second piston member abut, the load can be transmitted between the two members.

The receiving member may have a spherical surface, and the abutting member may have a flat surface that abuts against the spherical surface. In this scoring unit, even if the center position of the first piston member and the second piston member are deviated, it can be absorbed.

The scoring head may further be provided with an air bearing that supports the knife holder in such a way that the knife holder can slide with respect to the base. In this scoring head, when the knife holder moves up and down, the frictional resistance is greatly reduced.

A scribing device according to another aspect of the present invention includes a substrate placement part, a scribing head for scribing the surface of a brittle material substrate, and a driving part for driving the scribing head. The scoring head includes a base, a knife mechanism, a knife holder, a first cylinder mechanism, and a second cylinder mechanism. The knife holder is supported so as to be slidable in the vertical direction with respect to the base, and holds the knife mechanism. The first cylinder mechanism applies a load toward the brittle material substrate side to the knife holder. The second cylinder mechanism applies a load to the knife holder facing the side opposite to the brittle material substrate. The load of the first cylinder mechanism is set to be greater than the load of the second cylinder mechanism, thereby using the differential thrust between the first cylinder mechanism and the second cylinder mechanism to move the knife holder toward the brittle material substrate. In this scribing device, the knife holder is moved toward the brittle material substrate by the differential pressure between the first cylinder mechanism and the second cylinder mechanism. Therefore, the load applied by the knife mechanism to the substrate can be extremely small. As a result, damage to the brittle material substrate of the thin plate can be avoided, and the scribing operation can be performed accurately. [Effects of Invention]

In the scribing head of the present invention, by making the scribing load sufficiently small, thin substrates can be scribed safely and accurately.

1. The first embodiment (1) Scribing device The scribing device 101 will be described with reference to FIG. 1. Figure 1 is a schematic perspective view of the scoring device. The scribing device 101 is a device for scribing a brittle material substrate W (hereinafter referred to as "substrate W"). The substrate W is, for example, a glass substrate, a ceramic substrate, a sapphire substrate, a silicon substrate, or the like. The pressure range of the scribing device 101 is, for example, 0.1-20 N, and the minimum pressure unit is, for example, 0.1 N. The scribing device 101 is suitable for scribing and forming thin glass substrates (for example, with a thickness of 0.1 to 0.3 mm). The scribing device 101 includes a stage 102 (an example of a substrate mounting portion) on which a substrate W is placed. The platform 102 is placed on a moving table 103, which can move along horizontal rails 105a, 105b, and is driven by a ball screw 107 that is rotated by a motor 106.

In addition, in the following description, the horizontal direction in which the rails 105a and 105b extend is referred to as the Y direction, and the horizontal direction orthogonal to the horizontal direction is referred to as the X direction. The platform 102 is provided with holding means (not shown) to hold the substrate W at a fixed position. The holding means is, for example, using air from a plurality of smaller suction holes (not shown) in the opening of the platform 102 for suction.

On the scribing device 101, a bridge 111 is erected along the X direction by the pillars 112a and 112b so as to straddle the moving table 103 and the platform 102. A guide 113 is installed on the bridge 111, and a scoring head 1 is arranged along the guide 113 in a manner movable in the X direction. A motor for driving the scribing head 1 (not shown, an example of a driving part) is provided. As described above, the cutter wheel 23b (described below) installed on the scribing head 1 of the scribing device 101 is lowered to the surface of the substrate W placed on the platform 102, pressed against the surface of the substrate W, and It moves relatively linearly, thereby processing a scribing groove for breaking on the surface of the substrate W.

(2) Outline of marking head The scribing head 1 will be described using FIGS. 2 to 7. Figure 2 is a three-dimensional view of the scoring head. Figure 3 is a cross-sectional view of the scoring head. Figure 4 is a side view of the inside of the scoring head. Figure 5 is a three-dimensional view of the inside of the scoring head. Figure 6 is a partial perspective view of the inside of the scoring head. Figure 7 is a schematic diagram showing the flow of air supply to the scoring head. The scribing head 1 forms a scribing groove by scribing the surface of the substrate W. The scoring head 1 mainly includes a frame member 13, a pressing mechanism 15, and a positioning mechanism 17. The pressing mechanism 15 and the positioning mechanism 17 are shown in FIGS. 3 and 4.

The frame member 13 (an example of the base) is a rectangular parallelepiped member composed of a plate member, and various members described below are housed inside. In addition, in the following description, in order to simplify the description, the structure fixed to the frame member 13 to maintain a static state is sometimes referred to as the frame member 13. The pressing mechanism 15 is a mechanism that generates a scribing load applied to the substrate during the scribing action. The positioning mechanism 17 (an example of the positioning mechanism) is a mechanism that moves the pressing mechanism 15 to a predetermined position relative to the substrate W. Furthermore, during the scribing action, the frictional resistance generated by the positioning mechanism 17 is prevented from acting on the pressing mechanism 15 (described below).

(3) Details of the marking head (3-1) Pressure mechanism The pressurizing mechanism 15 is provided with a main pressure cylinder and a differential pressure generating cylinder, and performs differential pressure control that generates a minute pressure as the difference between the main pressure cylinder and the differential pressure generating cylinder. For example, if the main pressure cylinder generates 5.1 N and the differential pressure generating cylinder generates 5.0 N, a slight pressure of 0.1 N will be obtained.

The pressing mechanism 15 has a knife holder 21 (an example of a knife holder). The knife holder 21 is supported so as to be slidable in the vertical direction with respect to the frame member 13 and holds the knife mechanism 23 (described later). The pressurizing mechanism 15 has a first cylinder mechanism 25 (an example of the first cylinder mechanism) as a master cylinder. The first cylinder mechanism 25 applies a load to the blade holder 21 toward the substrate W side. Specifically, the first air cylinder mechanism 25 includes a pump (not shown) or a regulator (not shown) as an air supply source that applies a downward load to the knife holder 21, and an air supply port 25a.

The pressurizing mechanism 15 has a second cylinder mechanism 27 (an example of the second cylinder mechanism) as a cylinder for differential pressure generation. The second cylinder mechanism 27 applies a load to the blade holder 21 toward the side opposite to the substrate W. Specifically, the second air cylinder mechanism 27 includes a pump (not shown) or a regulator (not shown) as an air supply source that applies an upward load to the knife holder 21, and an air supply port 27a. In the pressurizing mechanism 15, the knife holder 21 is moved to the substrate W side by using the differential pressure thrust of the first cylinder mechanism 25 and the second cylinder mechanism 27. Therefore, the load applied to the substrate W from the knife mechanism 23 can be extremely small. As a result, damage to the thin substrate W can be avoided, and the scribing operation can be performed accurately.

The knife holder 21 has a first piston rod 21A (an example of a first piston member) driven by a first cylinder mechanism 25. The knife holder 21 further has a second piston rod 21B (an example of a second piston member) provided on the substrate W side of the first piston rod 21A and driven by the second cylinder mechanism 27. The aforementioned air supply port 25a is connected to the space above the first piston rod 21A formed by the frame member 13. The aforementioned air supply port 27a is connected to the space around the second piston rod 21B formed by the frame member 13.

The knife holder 21 has a receiving member 51 (an example of the receiving member) provided on the first piston rod 21A side of the second piston rod 21B, and the second piston rod 21B side of the first piston rod 21A and can be abutted against The contact member 53 (an example of the contact member) of the receiving member. The receiving member 51 is composed of a ball and has a spherical surface. The abutting member 53 is a bolt that is fixed to the member on the side of the first piston rod 21A (specifically, the load cell 75 and the plate member 77 described below), and has a flat head abutting against the spherical surface. surface. Thus, by using the receiving member 51 and the abutting member 53 to abut the first piston rod 21A and the second piston rod 21B, the load can be transmitted between the two members. In addition, even if the center position (load point) of the first piston rod 21A and the second piston rod 21B has a deviation, it can be absorbed. Furthermore, since the contact member 53 is a magnet and the receiving member 51 is a magnetic body, the contact state with the receiving member 51 can be maintained at all times. In addition, by adopting the magnetic connection, the assembly and disassembly of the first piston rod 21A and the second piston rod 21B are easier.

The knife holder 21 is guided so as to be freely movable in the vertical direction with respect to the frame member 13. Specifically, the first piston rod 21A is supported by the first air bearing 61 so as to be slidable in the vertical direction with respect to the frame member 13. The upper part of the second piston rod 21B is guided via the second air bearing 63 and the lower part via the third air bearing 65 so as to be movable in the vertical direction with respect to the frame member 13. Therefore, the frictional resistance of the knife holder 21 is greatly reduced. The first air bearing 61 is connected to a pump (not shown) or a regulator (not shown) via an air supply port 61a (FIG. 7 ). The second air bearing 63 is connected to a pump (not shown) or a regulator (not shown) via an air supply port 63a (FIG. 7). The third air bearing 65 is connected to a pump (not shown) or a regulator (not shown) via an air supply port 65a (FIG. 7 ).

A load cell 75 (an example of a load meter) is arranged between the first piston rod 21A and the second piston rod 21B. With the load cell 75, the dynamic pressure during the cutting process of the substrate W can be measured. Thus, with the built-in load element 75, the load during the marking can be monitored. Furthermore, a plate member 77 is arranged on the side of the substrate W of the load cell 75.

The pressing mechanism 15 has a knife mechanism 23. The knife mechanism 23 is held by the lower end of the second piston rod 21B. Specifically, the second piston rod 21B has a slider 21a and a cylindrical connecting portion 21b provided to extend downward from the slider 21a, and the knife mechanism 23 is held by the connecting portion 21b. The knife mechanism 23 has a blade holder 23a held in the connecting portion 21b, and a knife wheel 23b provided at the lower end portion thereof so as to be rotatable by a horizontal axis.

(3-2) Positioning mechanism The positioning mechanism 17 is a mechanism for positioning the pressing mechanism 15, specifically, the position of the knife holder 21 in the up and down direction. The setting of the cutting amount is also performed by the positioning mechanism 17. The positioning mechanism 17 has a servo motor 31. The servo motor 31 is fixed on the upper surface of the frame member 13. The servo motor 31 has a motor main body portion 31a arranged in a vertical state, and a rotating shaft 31b extending downward from the main body portion. The ball screw 35 is connected to the rotating shaft 31 b via the coupling 33. The ball screw 35 is coaxial with the rotating shaft 31b of the servo motor 31, and rotates integrally with the rotating shaft 31b.

The positioning mechanism 17 has a nut member 37. The nut member 37 is screwed to the ball screw 35. Therefore, if the rotation of the rotation shaft 31b of the servo motor 31 causes the ball screw 35 to rotate, the nut member 37 is screwed in the vertical direction and slid in the vertical direction. As shown in FIGS. 4 to 6, the positioning mechanism 17 has a supporting member 39 (an example of a supporting member). The support member 39 supports the knife holder 21 so that the knife holder 21 can be detached from the substrate W side. Specifically, the supporting member 39 is composed of a positioning plate 39a fixed to the nut member 37 and extending to the side of the pressure mechanism 15, and a bolt 39b fixed to the positioning plate 39a. The bolt 39b can abut against or approach the plate member 77 from below.

Specifically, there are three bolts 39b, that is, the support member 39 supports the plate member 77 from below at three points. A coil spring 79 is arranged between the ball screw 35 and a part of the frame member 13. The coil spring 79 is compressed in a state where the knife holder 21 has been lowered. Therefore, when an abnormality occurs and the power is turned off, the tip of the blade can be lifted by the coil spring 79. Furthermore, in this embodiment, as shown in FIG. 5, two coil springs (coil spring) 79 are arrange|positioned.

(4) Scribing action First, the substrate W is transported and placed on the platform 102. Then, the scoring head 1 is moved in the X direction and positioned at a predetermined position.

Next, the operation of lowering the mold holder of the scribing head 1 will be described. As shown in FIG. 3, in the initial state, the pressure from the first cylinder mechanism 25 acts on the first piston rod 21A. In addition, since the first piston rod 21A is supported by the supporting member 39, the knife holder 21 does not move downward. At this time, a distance S1 (for example, 10 mm) is secured between the cutter wheel 23b and the substrate W. Next, as shown in FIG. 8, in the scoring head 1, the servo motor 31 is driven forward. Thereby, the ball screw 35 connected to the rotating shaft 31b of the servo motor 31 and the rotating shaft 31b integrally rotate in the same direction. And the nut member 37 is conveyed to the lower side using a screw thread. Therefore, the first piston rod 21A and the second piston rod 21B move downward together with the movement of the support member 39 in a mutually compressed state. Finally, the cutter wheel 23b abuts on the substrate W.

Then, as shown in FIG. 9, the support member 39 is moved downward by a distance S2 (for example, 2 mm), and a required scribing load is applied to the substrate W from the cutter wheel 23 b. As a result, the lower end of the cutter wheel 23b descends to a predetermined distance from the surface of the substrate W. At this time, the support member 39 is separated to a position below the distance S2 from the plate member 77, so the scribing load is generated only by the pressing mechanism 15.

As described above, in the scribing device 101, the knife holder 21 is moved to the substrate W side by the differential pressure thrust between the first cylinder mechanism 25 and the second cylinder mechanism 27. Therefore, the load applied to the substrate W from the knife mechanism 23 can be extremely small. As a result, damage to the substrate W of the thin plate can be avoided, and the scribing operation can be performed accurately.

As described above, in the scribing head 1, if the positioning mechanism 17 positions the knife holder 21 so that the knife mechanism 23 abuts the substrate W, then the support member 39 of the positioning mechanism 17 is separated from the knife holder 21 to the substrate W. W side. As a result, the knife mechanism 23 can be pressed against the substrate W only by the differential pressure of the first cylinder mechanism 25 and the second cylinder mechanism 27 afterwards. This state is a state in which the substrate W can be cut by the knife mechanism 23, that is, during the process of cutting the substrate W by the knife mechanism 23, the positioning mechanism 17 and the pressing mechanism 15 are separated. As a result, during the cutting process of the substrate W, the frictional resistance of each part of the positioning mechanism 17 does not affect the pressing mechanism 15.

Finally, as the scribing head 1 moves in the X direction, the cutter wheel 23b moves on the surface of the substrate W in a state of being welded to the substrate W under pressure by a predetermined scribing load. Thereby, a scribe groove is formed in the substrate W.

2. Other implementation forms As mentioned above, one embodiment of the present invention has been described, but the present invention is not limited to the above-mentioned embodiment, and various changes can be made without departing from the gist of the invention. In particular, the multiple embodiments and modification examples described in this specification can be arbitrarily combined as needed.

The connection between the first piston rod and the second piston rod can be a floating connection or a mechanical consolidation. The supporting member may also support the knife mechanism in a planar shape. The knife holder can also be an integral component. [Industrial availability]

The invention can be widely applied to scribing heads and scribing devices used for scribing brittle material substrates.

1: Scribe head 13: Frame member 15: Pressure mechanism 17: positioning mechanism 21: Knife holder 21A: 1st piston rod 21B: 2nd piston rod 21a: Slider 21b: connecting part 23: Knife mechanism 23a: slice holder 23b: knife wheel 25: The first cylinder mechanism 25a: Air supply path 27: 2nd cylinder mechanism 27a: Air supply path 31: Servo motor 31a: Motor body 31b: Rotation axis 33: Coupling 35: Ball screw 37: Nut member 39: supporting member 39a: positioning plate 39b: Bolt 51: Bearing component 53: abutment member 61: The first air bearing 61a: Air supply port 63: 2nd air bearing 63a: Air supply port 65: 3rd air bearing 65a: Air supply port 75: Load meter 77: plate member 79: Coil spring 101: Scribing device 102: platform 103: mobile station 105a: Orbit 105b: Orbit 106: Motor 107: Ball screw 111: Bridge 112a: Pillar 112b: Pillar 113: guide W: brittle material substrate

[Figure 1] A schematic perspective view of the scribing device. [Figure 2] is a three-dimensional view of the scribing head. [Figure 3] is a cross-sectional view of the scoring head. [Figure 4] is a side view of the inside of the scoring head. [Figure 5] A three-dimensional view of the inside of the scoring head. [Figure 6] A partial three-dimensional view of the inside of the scoring head. [Figure 7] is a schematic diagram showing the flow of air supply to the scribing head. [Figure 8] is a cross-sectional view of the scribing head. [Figure 9] is a cross-sectional view of the scoring head.

1: Scribe head

15: Pressure mechanism

17: positioning mechanism

21: Knife holder

21A: 1st piston rod

21B: 2nd piston rod

21a: Slider

21b: connecting part

23: Knife mechanism

23a: slice holder

23b: knife wheel

25: The first cylinder mechanism

25a: Air supply path

27: 2nd cylinder mechanism

27a: Air supply path

31: Servo motor

31a: Motor body

31b: Rotation axis

33: Coupling

35: Ball screw

37: Nut member

39: supporting member

39a: positioning plate

39b: Bolt

51: Bearing component

53: abutment member

61: The first air bearing

63: 2nd air bearing

65: 3rd air bearing

75: Load meter

77: plate member

79: Coil spring

W: brittle material substrate

Claims (7)

A scribing head for scribing the surface of a brittle material substrate, which has: Base Knife mechanism A knife holder, which is supported in a manner that is slidable in the vertical direction with respect to the base, and holds the knife mechanism; A first air cylinder mechanism that applies a load to the knife holder toward the side of the brittle material substrate; and A second cylinder mechanism that applies a load to the knife holder facing the opposite side of the brittle material substrate; The load of the first cylinder mechanism is set to be greater than the load of the second cylinder mechanism, whereby the knife holder is moved toward the brittle material substrate by the differential pressure between the first cylinder mechanism and the second cylinder mechanism. Such as the engraving head of claim 1, which Furthermore, it is equipped with a positioning mechanism for positioning the above-mentioned knife holder in the up and down direction, The positioning mechanism has a supporting member that supports the knife holder so that the knife holder can be detached from the brittle material substrate side. Such as the engraving head of claim 2, where The above-mentioned knife holder further has: The first piston member, which is driven by the above-mentioned first cylinder mechanism; A second piston member, which is provided on the side of the brittle material substrate of the first piston member, and is driven by the second cylinder mechanism; and The load meter is arranged between the first piston member and the second piston member. Such as the engraving head of claim 3, where The above-mentioned knife holder further has: A receiving member provided on the first piston member side of the second piston member; and The abutting member is provided on the second piston member side of the first piston member and can abut against the receiving member. Such as the engraving head of claim 4, where The receiving member has a spherical surface, and the abutting member has a flat surface that abuts on the spherical surface. Such as the scoring head of any one of claims 1 to 5, which Furthermore, an air bearing is provided which supports the said knife holder so that the said knife holder may slide with respect to the said base part. A scribing device, which is provided with: Substrate placement part; Scribing head, which is used for scribing the surface of brittle material substrate; and A driving part, which drives the above-mentioned scoring head; The above scoring head has: Base Knife mechanism A knife holder, which is supported in a manner that is slidable in the vertical direction with respect to the base, and holds the knife mechanism; A first air cylinder mechanism that applies a load to the knife holder toward the side of the brittle material substrate; and A second cylinder mechanism that applies a load to the knife holder facing the opposite side of the brittle material substrate; The load of the first cylinder mechanism is set to be greater than the load of the second cylinder mechanism, whereby the knife holder is moved toward the brittle material substrate by the differential pressure between the first cylinder mechanism and the second cylinder mechanism.

Images