JP5796774B2 - Cleaving method and apparatus for brittle plate - Google Patents

Cleaving method and apparatus for brittle plate Download PDF

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JP5796774B2
JP5796774B2 JP2011182156A JP2011182156A JP5796774B2 JP 5796774 B2 JP5796774 B2 JP 5796774B2 JP 2011182156 A JP2011182156 A JP 2011182156A JP 2011182156 A JP2011182156 A JP 2011182156A JP 5796774 B2 JP5796774 B2 JP 5796774B2
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brittle plate
anvil
cleaving
scribe line
mounting table
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JP2013043348A (en
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宏亮 中堀
宏亮 中堀
大介 大川
大介 大川
良弘 北川
良弘 北川
義隆 辻
義隆 辻
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Nippon Electric Glass Co Ltd
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Description

本発明は、脆性板材の割断方法と割断装置、より詳しくは、ガラス、結晶化ガラス、セラミック等の脆性材料から成る平板材を高い寸法精度で割断する脆性板材の割断方法と割断装置に関するものである。   The present invention relates to a cleaving method and cleaving apparatus for a brittle plate, and more particularly to a cleaving method and cleaving apparatus for a brittle plate that cleave a flat plate made of a brittle material such as glass, crystallized glass, and ceramic with high dimensional accuracy. is there.

従来、大寸のガラス板から所定寸法のガラス小片を得る場合、まず、大寸ガラス板の一のガラス面に工具やレーザ光によりスクライブ線を形成し、次いで、このスクライブ線を引き裂く方向にガラス板に応力を作用させてガラス板を割断する方法が採られている。   Conventionally, when obtaining a glass piece of a predetermined size from a large glass plate, first, a scribe line is formed on one glass surface of the large glass plate with a tool or laser light, and then the glass is cut in a direction to tear the scribe line. A method of cleaving a glass plate by applying a stress to the plate is employed.

例えば、特許文献1には、上面にスクライブ線を形成したガラス板を、下向きの一対の突起部を有するアンビルと上向きのプッシャとで上下から挟圧することによって、ガラス板に曲げ応力を作用させてガラス板をスクライブ線に沿って割断するガラス折断具が開示されている。   For example, in Patent Document 1, a glass plate having a scribe line formed on the upper surface is clamped from above and below by an anvil having a pair of downward projections and an upward pusher to cause bending stress to act on the glass plate. A glass breaker that breaks a glass plate along a scribe line is disclosed.

また、特許文献2には、レーザ光により上面に碁盤目状にスクライブ線を形成し、このガラス板の上面を治具で押さえながら、その下面側を線状ヘッドで押圧することにより、ガラス板を各スクライブ線に沿って割断する方法が開示されている。碁盤目状に形成された複数のスクライブ線のうち、一の方向のスクライブ線でガラス板を一端部から順に割断することにより、まず、複数の短冊状のガラス板を得て、次いで、これら複数の短冊状ガラス板を並べ、他の方向のスクライブ線を揃えて再び割断することにより、例えば光学素子用カバーガラス等の矩形のガラス小片を得ている。   Further, in Patent Document 2, a scribe line is formed in a grid pattern on the upper surface by laser light, and the lower surface side is pressed with a linear head while pressing the upper surface of the glass plate with a jig. Is disclosed along the scribe lines. First, a plurality of strip-shaped glass plates are obtained by cleaving a glass plate in order from one end portion with a scribe line in one direction among a plurality of scribe lines formed in a grid pattern. A rectangular glass piece such as a cover glass for an optical element, for example, is obtained by arranging the strip-shaped glass plates and aligning scribe lines in other directions and cleaving again.

実開昭62−37050号公報Japanese Utility Model Publication No. 62-37050 特開2004−221541号公報(段落0083、図5)JP 2004-221541 A (paragraph 0083, FIG. 5)

しかしながら、特許文献1に記載のガラス折断具は、プッシャをガラス板に対し直角方向に直線移動させてガラス板を押圧することができるものの、ガラス折断具を手持ちしながら手動で割断操作を行わなければならないことから、プッシャでスクライブ線の形成位置を正確にガラス板の下面側から押圧することが容易でなく、スクライブ線に沿って高い寸法精度でガラス板を割断することが困難であった。   However, although the glass breaker described in Patent Document 1 can press the glass plate by linearly moving the pusher in a direction perpendicular to the glass plate, it must be manually cleaved while holding the glass breaker. Therefore, it is not easy to accurately press the formation position of the scribe line from the lower surface side of the glass plate with a pusher, and it is difficult to cleave the glass plate with high dimensional accuracy along the scribe line.

また、特許文献2に記載のガラス割断方法は、大寸のガラス板から多数のガラス小片を効率的に得ることができるものの、各ガラス小片の割断面の欠損や突起、或いはガラス板面に対する直角度等について高い寸法精度を安定して得られないおそれがあり、したがって、その後のガラス小片の選別作業の負担が過大となり、高い信頼性と低コストが要求される例えば大量生産用の光学カバーガラス等の割断方法としては適していなかった。   Further, although the glass cleaving method described in Patent Document 2 can efficiently obtain a large number of glass pieces from a large glass plate, it is possible to directly obtain defects or protrusions on the cut cross section of each glass piece or the glass plate surface. There is a risk that high dimensional accuracy may not be stably obtained with respect to angles, etc., and therefore the burden of subsequent glass piece sorting work becomes excessive, and high reliability and low cost are required, for example, optical cover glass for mass production It was not suitable as a cleaving method.

本発明は、従来の脆性板材の割断方法に上記のような問題があったことに鑑みて為されたもので、スクライブ線が形成された脆性板材をそのスクライブ線に沿って高い寸法精度で割断することができる脆性板材の割断方法と割断装置を提供することを課題とする。   The present invention was made in view of the above-described problems in the conventional method of cleaving a brittle plate, and cleaves a brittle plate formed with a scribe line with high dimensional accuracy along the scribe line. It is an object of the present invention to provide a cleaving method and a cleaving apparatus for a brittle plate that can be performed.

本発明は、上面にスクライブ線が形成された脆性板材を、下向きの一対の突起部及び該突起部同士の間の窪み部を有するアンビルと、該アンビルの窪み部に対し接近離反移動する上向きのプッシャとにより上下から挟圧して該脆性板材を該スクライブ線に沿って割断する脆性板材の割断方法であって、
載置台上に前記スクライブ線を上にして載置された前記脆性板材の一端側を該載置台の端部から側方へ突出させ、該脆性板材の割断すべきスクライブ線を、該載置台の側方に上下動可能に設けられた前記プッシャの先端部の直上位置に位置決めする位置決め工程と、位置決めされた前記脆性板材の一端側を押し上げて該脆性板材の一端側を前記載置台から離間させる離間工程と、前記脆性板材の一端側を前記載置台から離間させたまま、前記アンビルの一対の突起部を該脆性板材の上面における前記スクライブ線に対する対称位置に当接させた状態で前記プッシャで該スクライブ線を該脆性板材の下面側から押圧することにより該脆性板材を該スクライブ線に沿って割断する割断工程と、を含むことを特徴とする。
The present invention relates to a brittle plate having a scribe line formed on its upper surface, an anvil having a pair of downward projections and a depression between the projections, and an upward movement that moves toward and away from the depression of the anvil. A method for cleaving a brittle plate material, which is clamped from above and below by a pusher and cleaves the brittle plate material along the scribe line,
One end side of the brittle plate placed on the mounting table with the scribe line facing upward is protruded laterally from the end of the mounting table, and the scribe line to be cleaved of the brittle plate is connected to the mounting table. Positioning step for positioning to a position directly above the tip of the pusher provided so as to be movable up and down on the side, and pushing up one end side of the positioned brittle plate to separate the one end of the brittle plate from the mounting table In the separation step, with the pusher in a state where the pair of protrusions of the anvil are in contact with the scribe line on the upper surface of the brittle plate while the one end side of the brittle plate is separated from the mounting table. And a cleaving step of cleaving the brittle plate along the scribe line by pressing the scribe line from the lower surface side of the brittle plate.

また、本発明は、前記離間工程において、前記プッシャで前記脆性板材の前記スクライブ線を下面側から押し上げて該脆性板材の一端側を前記載置台から離間させることを特徴とする。   Further, the present invention is characterized in that, in the separation step, the pusher pushes up the scribe line of the brittle plate material from the lower surface side to separate one end side of the brittle plate material from the mounting table.

また、本発明は、前記割断工程により前記脆性板材を割断して得られた割断片を、前記アンビルの窪み部に設けられた吸気孔を通じて該アンビルで吸引保持する保持工程と、該アンビルで吸引保持した割断片を、該アンビルを移動させて搬出する搬出工程と、を含むことを特徴とする。   Further, the present invention provides a holding step of sucking and holding the split piece obtained by cleaving the brittle plate material in the cleaving step with the anvil through an intake hole provided in a hollow portion of the anvil, and suction with the anvil. An unloading step of moving the anvil to unload it.

また、本発明は、上面にスクライブ線が形成された脆性板材を該スクライブ線に沿って割断する脆性板材の割断装置であって、
前記脆性板材を前記スクライブ線を上にして載置可能な載置台と、前記載置台の上方に設けられ、下向きの一対の突起部及び該突起部同士の間の窪み部を有するアンビルと、前記載置台の側方に上下動可能に設けられ、前記アンビルの窪み部に対し接近離反移動する上向きのプッシャと、前記載置台に設けられ、該載置台上に載置された前記脆性板材の一端側を該載置台の端部から側方へ突出させ、該脆性板材の割断すべきスクライブ線を前記プッシャの先端部の直上位置に位置決めする位置決め手段と、位置決めされた前記脆性板材の一端側を押上部で押し上げて該脆性板材の一端側を前記載置台から離間させる離間手段と、を備え、前記離間手段により前記脆性板材の一端側を前記載置台から離間させたまま、前記アンビルの一対の突起部を該脆性板材の上面における前記スクライブ線に対する対称位置に当接させた状態で前記プッシャで該スクライブ線を該脆性板材の下面側から押圧することにより該脆性板材を該スクライブ線に沿って割断することを特徴とする。
Further, the present invention is a brittle plate material cleaving device for cleaving along a scribe line a brittle plate material having a scribe line formed on the upper surface,
A mounting table on which the brittle plate material can be mounted with the scribe line facing up; an anvil provided above the mounting table and having a pair of downward projections and a depression between the projections; An upward pusher which is provided on the side of the mounting table so as to be movable up and down and moves toward and away from the depression of the anvil, and one end of the brittle plate material which is provided on the mounting table and placed on the mounting table A positioning means for projecting the side from the end of the mounting table to the side, and positioning a scribe line to be cut of the brittle plate material at a position directly above the tip of the pusher; and one end side of the positioned brittle plate material Separating means for lifting the brittle plate material away from the mounting table by pushing it up at the push-up portion, while the one end side of the brittle plate material is separated from the mounting table by the separating device. Protrusion Is pressed against the scribe line on the upper surface of the brittle plate, and the scribe line is pressed from the lower surface side of the brittle plate by the pusher to cleave the brittle plate along the scribe line. It is characterized by that.

また、本発明は、前記離間手段の押上部が、前記プッシャであることを特徴とする。   Further, the present invention is characterized in that the push-up portion of the separating means is the pusher.

また、本発明は、前記脆性板材を割断して得られた割断片を、前記アンビルの窪み部に設けられた吸気孔を通じて吸引する吸引手段と、前記吸引手段により該アンビルで吸引保持した割断片を、該アンビルを移動させて搬出する移動手段と、を備えることを特徴とする。   Further, the present invention provides a suction means for sucking a split piece obtained by cleaving the brittle plate material through an intake hole provided in a recess of the anvil, and a split piece sucked and held by the anvil by the suction means. And a moving means for moving the anvil to carry it out.

本発明に係る脆性板材の割断方法及び割断装置によれば、載置台上において脆性板材のスクライブ線をプッシャの先端部の直上位置に正確に位置決めした後、脆性板材をアンビルとプッシャとにより挟圧するので、プッシャでスクライブ線の形成位置を正確に脆性板材の下面側から押圧することができ、脆性板材をスクライブ線に沿って高い寸法精度で割断することができる。   According to the method and apparatus for cleaving a brittle plate according to the present invention, after the scribe line of the brittle plate is accurately positioned on the mounting table at a position immediately above the tip of the pusher, the brittle plate is clamped by the anvil and the pusher. Therefore, the pusher can accurately press the formation position of the scribe line from the lower surface side of the brittle plate, and the brittle plate can be cleaved along the scribe line with high dimensional accuracy.

しかも、脆性板材の一端側を載置台から離間させた状態で、脆性板材の一端側をアンビルとプッシャとにより挟圧するので、割断時に、アンビルの一対の突起部間において、脆性板材の一端側がスクライブ線について対称に湾曲変形し得る空間を確保することができ、脆性板材の一端側に対し曲げ応力を対称に作用させることができる。したがって、割断面の欠損や突起、或いは板面に対する直角度等について高い寸法精度で安定に脆性板材を割断することができる。   Moreover, since the one end side of the brittle plate member is sandwiched between the anvil and the pusher while the one end side of the brittle plate member is separated from the mounting table, the one end side of the brittle plate member is scribed between the pair of protrusions of the anvil at the time of cleaving. A space that can be curved and deformed symmetrically about the line can be secured, and bending stress can be applied symmetrically to one end side of the brittle plate material. Therefore, the brittle plate material can be cleaved stably with high dimensional accuracy with respect to cracks and protrusions in the cut section, perpendicularity to the plate surface, and the like.

また、離間手段の押上部をプッシャと共通化すれば、装置構成を簡素化することができる。また、プッシャで脆性板材の下面におけるスクライブ線の直下位置を押し上げることができるので、脆性板材の位置決め精度を安定に維持することができ、より高い寸法精度で割断作業を行うことができる。   Further, if the push-up portion of the separating means is shared with the pusher, the device configuration can be simplified. In addition, since the pusher can push up the position immediately below the scribe line on the lower surface of the brittle plate, the positioning accuracy of the brittle plate can be stably maintained, and the cleaving operation can be performed with higher dimensional accuracy.

また、吸引手段により割断直後の割断片をアンビルで吸引保持し、そして、移動手段によりアンビル自体を移動させて割断片を搬出すれば、従来のように、搬出時に、割断片が他の部材と接触して欠け、割れ等を生じるおそれがない。しかも、割断片を、アンビルの片側の突起部と窪み部とで支えて吸引保持することができるので、割断片の中央部を吸引していた従来の吸引ピンセットのように、例えばカバーガラス等の機能確保に重要な割断片の中央部を傷付けるおそれもない。   In addition, if the split piece immediately after the cutting is sucked and held by the anvil by the suction means, and the anvil itself is moved by the moving means and then the split piece is carried out, the split piece and the other members are unloaded at the time of unloading as in the prior art. There is no risk of chipping or cracking due to contact. Moreover, since the split piece can be supported by suction on one side of the anvil and the depression, it can be held by suction, for example, a cover glass or the like like the conventional suction tweezers that sucked the central part of the split piece. There is no risk of damaging the central part of the split piece, which is important for ensuring the function.

本実施形態の脆性板材の割断装置の全体側面図である。It is a whole side view of the cleaving apparatus of a brittle board material of this embodiment. 本実施形態の脆性板材の上面図であり、(a)は複数の格子状のスクライブ線のうち一の方向のスクライブ線11Aで割断した状態を表し、(b)は他の方向のスクライブ線11Bで割断した状態を表すものである。It is a top view of the brittle board | plate material of this embodiment, (a) represents the state cut | disconnected by the scribe line 11A of one direction among several grid-form scribe lines, (b) is the scribe line 11B of another direction. It represents the state cleaved by. 本実施形態の脆性板材の割断方法の各工程を説明する側面図であり、(a)は位置決め工程を表し、(b)は離間工程を表し、(c)、(d)は割断工程及び吸引工程を表すものである。It is a side view explaining each process of the cleaving method of the brittle board material of this embodiment, (a) represents a positioning process, (b) represents a separation process, (c), (d) is a cleaving process and suction. It represents a process. 本実施形態の脆性板材の割断方法の搬出工程を説明する側面図である。It is a side view explaining the carrying-out process of the cleaving method of the brittle board material of this embodiment. 本発明に係る他の実施形態の脆性板材の割断方法の各工程を説明する側面図である。It is a side view explaining each process of the cleaving method of the brittle board material of other embodiments concerning the present invention.

本実施形態の脆性板材の割断装置10は、図1に示すように、上面に複数のスクライブ線11が形成された脆性板材1を載置可能な載置台2と、載置台2の上方に設けられたアンビル3と、載置台2の側方に上下動可能に設けられ、アンビル3と協働して脆性板材1を上下から挟圧するプッシャ4と、載置台2に設けられ、脆性板材1を所定位置に位置決めする位置決め手段5と、位置決めされた脆性板材1の一端側を載置台2から離間させる離間手段6と、アンビル3に設けられ、脆性板材1を割断して得られた割断片をアンビル3で吸引保持する吸引手段7と、アンビル3自体を移動させて割断片を搬出する不図示の移動手段と、を備えている。   As shown in FIG. 1, the brittle plate material cleaving apparatus 10 according to the present embodiment is provided on the upper surface of the mounting table 2 on which the brittle plate material 1 having a plurality of scribe lines 11 formed thereon can be mounted. The anvil 3 and the side of the mounting table 2 are provided so as to be movable up and down. The pusher 4 that presses the brittle plate 1 from above and below in cooperation with the anvil 3 and the mounting table 2 are provided. Positioning means 5 for positioning at a predetermined position, separation means 6 for separating one end side of the positioned brittle plate 1 from the mounting table 2, and a split piece provided on the anvil 3 and obtained by cleaving the brittle plate 1 A suction means 7 for sucking and holding by the anvil 3 and a moving means (not shown) for moving the anvil 3 itself to carry out the split pieces are provided.

脆性板材1は、平板形状のガラス板やセラミックス板から成り、図2に示すように、その上面に、予め公知の熱加工レーザ切断装置により複数のスクライブ線11(11A、11B)が格子状に所定深さまで形成されている。脆性板材1は、まず、図2(a)に示すように、本実施形態の脆性板材の割断装置10によって、複数の格子状のスクライブ線のうち、一の方向のスクライブ線11Aにおいて一端部から順に割断され、複数の短冊状の割断片12が形成される。その後、図2(b)に示すように、得られた複数の短冊状の割断片12は、他の方向のスクライブ線11Bを揃えて並べられ、各スクライブ線11Bにおいて一端部から順に再び割断され、複数の矩形状の割断片13が形成される。本実施形態の脆性板材の割断装置10は、脆性板材として複数の短冊状の割断片12を並列させた状態で同時に割断することもできる。   The brittle plate 1 is made of a flat glass plate or ceramic plate. As shown in FIG. 2, a plurality of scribe lines 11 (11A, 11B) are formed in a lattice shape on the upper surface by a known thermal processing laser cutting device in advance. It is formed to a predetermined depth. First, as shown in FIG. 2A, the brittle plate 1 is cut from one end of the scribe line 11A in one direction among the plurality of grid-like scribe lines by the brittle plate cleaving device 10 of the present embodiment. Cleaving sequentially, a plurality of strip-shaped split pieces 12 are formed. After that, as shown in FIG. 2 (b), the obtained strip-shaped split pieces 12 are arranged with the scribe lines 11B in the other directions aligned, and the scribe lines 11B are cleaved again sequentially from one end. A plurality of rectangular split pieces 13 are formed. The brittle plate material cleaving apparatus 10 of the present embodiment can also cleave at the same time in a state where a plurality of strip-shaped pieces 12 are arranged in parallel as the brittle plate material.

載置台2は、図1に示すように、上部に水平な載置面21を有し、載置面21上に脆性板材1がそのスクライブ線11を上にして水平姿勢で載置される。また、載置台2には、載置された脆性板材1のスクライブ線11が載置台2の端部22と平行になるように脆性板材1の向きを規制する不図示のガイド機構が設けられている。   As shown in FIG. 1, the mounting table 2 has a horizontal mounting surface 21 on the top, and the brittle plate 1 is mounted on the mounting surface 21 in a horizontal posture with the scribe line 11 facing upward. The mounting table 2 is provided with a guide mechanism (not shown) that regulates the orientation of the brittle plate 1 so that the scribe line 11 of the mounted brittle plate 1 is parallel to the end 22 of the mounting table 2. Yes.

アンビル3は、載置台2の端部22と平行な方向(図1の紙面垂直方向)に延びる略長板形状を成しており、脆性板材1の全幅以上の長さを有する。アンビル3の下部には、互いに平行な一対の下向きの突起部31と、これら突起部31同士の間の窪み部32とが形成されており、窪み部32の中央33が、次述するプッシャ4の先端部41の直上に位置するように載置台2の上方に設けられている。   The anvil 3 has a substantially long plate shape extending in a direction parallel to the end portion 22 of the mounting table 2 (perpendicular to the plane of FIG. 1), and has a length that is equal to or greater than the full width of the brittle plate 1. A pair of downward projections 31 parallel to each other and a depression 32 between these projections 31 are formed at the lower part of the anvil 3, and the center 33 of the depression 32 is a pusher 4 described below. It is provided above the mounting table 2 so as to be located immediately above the front end portion 41.

プッシャ4は、載置台2の端部22の近傍に設けられており、載置台2の端部22と平行な方向(図1の紙面垂直方向)に延びる略長板形状を成し、脆性板材1の全幅以上の長さを有する。プッシャ4の上部には、載置台2の端部22と平行な先端部41が形成されており、上昇時に脆性板材1の下面と直線接触する。そして、プッシャ4の下方には、エアシリンダから成る押圧用アクチュエータ42が設けられており、この押圧用アクチュエータ42を作動させることによって、プッシャ4を鉛直方向上下に直線移動させることができ、プッシャ4の先端部41をアンビル3の窪み部32の中央33に対し接近離反移動させることができる。   The pusher 4 is provided in the vicinity of the end 22 of the mounting table 2 and has a substantially long plate shape extending in a direction parallel to the end 22 of the mounting table 2 (perpendicular to the plane of FIG. 1). 1 or more than the full width. A tip portion 41 parallel to the end portion 22 of the mounting table 2 is formed on the upper portion of the pusher 4 and is in linear contact with the lower surface of the brittle plate 1 when it is raised. Under the pusher 4, a pressing actuator 42 made of an air cylinder is provided. By operating the pressing actuator 42, the pusher 4 can be linearly moved up and down in the vertical direction. The tip 41 can be moved toward and away from the center 33 of the recess 32 of the anvil 3.

位置決め手段5は、載置台2の上部に設けられており、載置台2上の脆性板材1を直接押し出す押出部51と、押出部51を載置台2の載置面21に沿って水平に進退移動させる駆動部52とから構成されている。本実施形態の駆動部52は、不図示の制御モータにより駆動する送りねじ機構から構成されており、制御モータを作動させることによって、押出部51を正確に進退移動させることができる。このことで、位置決め手段5は、脆性板材1の一端側を載置台2の端部22から側方へ突出させ、割断すべきスクライブ線11をプッシャ4の先端部41の直上位置に正確に位置決めすることができる。   The positioning means 5 is provided in the upper part of the mounting table 2, and pushes the brittle plate 1 on the mounting table 2 directly, and the pushing unit 51 advances and retreats horizontally along the mounting surface 21 of the mounting table 2. It is comprised from the drive part 52 to move. The drive unit 52 of the present embodiment is composed of a feed screw mechanism that is driven by a control motor (not shown). By operating the control motor, the push-out unit 51 can be moved forward and backward accurately. Thus, the positioning means 5 causes the one end side of the brittle plate 1 to protrude from the end portion 22 of the mounting table 2 to the side, and accurately positions the scribe line 11 to be cut at a position directly above the tip end portion 41 of the pusher 4. can do.

離間手段6は、載置台2の端部22から突出した脆性板材1の一端側の下面を直接押し上げる押上部61と、押上部61を鉛直方向上下に直線移動させるエアシリンダから成る押上用アクチュエータ62とから構成されている。本実施形態では、離間手段6の押上部61をプッシャ4と共通化しており、押上部61はプッシャ4と一体に形成されている。このことで、押上用アクチュエータ62を作動させることによって、プッシャ4を鉛直方向上下に直線移動させることができ、プッシャ4で脆性板材1の一端側の下面を押し上げて脆性板材1の一端側を載置台2の載置面21から離間させることができる。   The separation means 6 includes a push-up portion 61 that directly pushes up the lower surface on one end side of the brittle plate 1 that protrudes from the end portion 22 of the mounting table 2, and a push-up actuator 62 that includes an air cylinder that linearly moves the push-up portion 61 in the vertical direction. It consists of and. In the present embodiment, the push-up portion 61 of the separating means 6 is shared with the pusher 4, and the push-up portion 61 is formed integrally with the pusher 4. Thus, by operating the push-up actuator 62, the pusher 4 can be linearly moved up and down in the vertical direction, and the pusher 4 pushes up the lower surface on one end side of the brittle plate 1 to mount one end side of the brittle plate 1. The mounting surface 2 can be separated from the mounting surface 21.

なお、離間手段6の押上部61を、プッシャ4と共通化せず、プッシャ4とは別個独立に設けてもよい。また、離間手段6の押上用アクチュエータ62を、プッシャ4の押圧用アクチュエータ42と共通化してもよい。また、プッシャ4の押圧用アクチュエータ42及び/又は離間手段6の押上用アクチュエータ62を、制御モータにより作動する送りねじ機構により構成してもよい。   Note that the push-up portion 61 of the separating means 6 may be provided separately from the pusher 4 without being shared with the pusher 4. Further, the push-up actuator 62 of the separating means 6 may be shared with the push actuator 42 of the pusher 4. Further, the pressing actuator 42 of the pusher 4 and / or the lifting actuator 62 of the separating means 6 may be constituted by a feed screw mechanism that is operated by a control motor.

吸引手段7は、上記アンビル3の窪み部32に開設された吸気孔71と、吸気孔71に吸気パイプ72を介して接続された不図示の吸気ポンプとから構成されている。この吸気ポンプを作動させることによって、吸気孔71を通じて窪み部32内の空気を吸引し、脆性板材1を割断して得られた割断片をアンビル3で吸引保持することができる。   The suction means 7 includes an intake hole 71 opened in the hollow portion 32 of the anvil 3 and an intake pump (not shown) connected to the intake hole 71 via an intake pipe 72. By operating this intake pump, the air in the recess 32 can be sucked through the intake hole 71 and the fragment obtained by cleaving the brittle plate 1 can be sucked and held by the anvil 3.

また、アンビル3は、不図示の移動手段によって、互いに直交する三軸方向に移動できるように構成されている。移動手段は、例えば送りねじ機構やラック−ピニオン機構等の公知の直線移動機構や、いわゆるロボットアーム等の移動機構を採用することができる。この移動手段を作動させることによって、アンビル3で吸引保持した割断片を、アンビル3自体を移動させて載置台2から搬出することができる。   Moreover, the anvil 3 is comprised so that it can move to the triaxial direction orthogonal to each other by the moving means not shown. As the moving means, for example, a known linear moving mechanism such as a feed screw mechanism or a rack-pinion mechanism, or a moving mechanism such as a so-called robot arm can be adopted. By operating the moving means, the split piece sucked and held by the anvil 3 can be carried out of the mounting table 2 by moving the anvil 3 itself.

以下、図3及び図4を参照しながら、本実施形態の脆性板材の割断装置10による脆性板材1の割断方法について説明する。   Hereinafter, the cleaving method of the brittle plate 1 by the brittle plate cleaving apparatus 10 of the present embodiment will be described with reference to FIGS. 3 and 4.

まず、図3(a)に示すように、上面にスクライブ線11が形成された脆性板材1を載置台2上に載置し、載置台2上の所定位置に位置決めする位置決め工程を行う。つまり、位置決め手段5の押出部51で脆性板材1を押し出すことによって、脆性板材1の一端側を載置台2の端部22から側方へ突出させ、脆性板材1の割断すべきスクライブ線11をプッシャ4の先端部41の直上位置に位置決めする。なお、脆性板材1を載置台2上に載置した後、脆性板材1の上面にスクライブ線11を形成し、その後、脆性板材1の位置決め工程を行うようにしてもよい。   First, as shown in FIG. 3A, a positioning process is performed in which the brittle plate 1 having the scribe line 11 formed on the upper surface is placed on the mounting table 2 and positioned at a predetermined position on the mounting table 2. That is, by extruding the brittle plate 1 at the pushing portion 51 of the positioning means 5, one end of the brittle plate 1 is protruded laterally from the end 22 of the mounting table 2, and the scribe line 11 to be cut off of the brittle plate 1 is formed. The pusher 4 is positioned at a position directly above the tip 41. In addition, after mounting the brittle board | plate material 1 on the mounting base 2, the scribe line 11 may be formed in the upper surface of the brittle board | plate material 1, and you may make it perform the positioning process of the brittle board | plate material 1 after that.

次いで、図3(b)に示すように、位置決めされた脆性板材1の一端側を押し上げて載置台2から離間させる離間工程を行う。つまり、離間手段6の押上用アクチュエータ62を作動させ、プッシャ4の先端部41で脆性板材1のスクライブ線11を下面側から押し上げることによって、脆性板材1の一端側を載置台2の載置面21から離間させる。このことで、アンビル3の一対の突起部31のうちの位置決め手段5側の突起部31の直下において、脆性板材1の下面と載置台2の載置面21との間に隙間Cを形成する。   Next, as shown in FIG. 3 (b), a separation step of pushing up one end side of the positioned brittle plate 1 and separating it from the mounting table 2 is performed. That is, by operating the push-up actuator 62 of the separating means 6 and pushing up the scribe line 11 of the brittle plate 1 from the lower surface side at the tip 41 of the pusher 4, one end side of the brittle plate 1 is placed on the placement surface of the placement table 2. 21. Thus, a gap C is formed between the lower surface of the brittle plate 1 and the mounting surface 21 of the mounting table 2 immediately below the protruding portion 31 on the positioning means 5 side of the pair of protruding portions 31 of the anvil 3. .

隙間Cの間隔は、脆性板材1の材質、寸法、スクライブ線11の深さ等に応じて適宜、設定することができる。例えば、2.5mmの間隔をあけて多数のスクライブ線11が格子状に形成された、縦200mm×横300mm×厚さ0.5mmのガラス材から成る脆性板材1を割断する場合、約0.2mmの隙間Cをあける。隙間Cの間隔は、数ミリ角の割断片を得る場合、0.01〜0.5mmが好ましく、数十ミリ角の割断片を得る場合、0.5〜3.0mmが好ましい。隙間Cの間隔が、0.01mmより小さいと、割断時に必要な隙間が確保できなくなり、脆性板材1を高い精度で割断できなくなる一方、隙間Cの間隔が、3.0mmを超えると、位置決めされた脆性板材1が位置ずれを起こすおそれが生じる。   The gap C can be appropriately set according to the material and dimensions of the brittle plate 1, the depth of the scribe line 11, and the like. For example, when the brittle plate 1 made of a glass material having a length of 200 mm, a width of 300 mm, and a thickness of 0.5 mm, in which a large number of scribe lines 11 are formed in a lattice shape with an interval of 2.5 mm, is about 0. Leave a gap C of 2 mm. The gap C is preferably 0.01 to 0.5 mm when obtaining several millimeter square pieces, and 0.5 to 3.0 mm is preferred when obtaining several tens of square pieces. If the gap C is smaller than 0.01 mm, a gap necessary for cleaving cannot be secured, and the brittle plate 1 cannot be cleaved with high accuracy. On the other hand, if the gap C exceeds 3.0 mm, positioning is performed. The brittle plate 1 may be displaced.

次いで、図3(c)、(d)に示すように、脆性板材1の一端側を載置台2から離間させたまま、脆性板材1の一端側をアンビル3とプッシャ4とにより上下から挟圧して脆性板材1を割断する割断工程を行う。本実施形態では、まず、図3(c)に示すように、プッシャ4で脆性板材1の一端側を下面側から支えたまま、アンビル3を鉛直方向に下降させることによって、アンビル3の一対の突起部31・31を脆性板材1の上面におけるスクライブ線11に対する対称位置に当接させ、次いで、図3(d)に示すように、押圧用アクチュエータ42を作動させることによって、プッシャ4でスクライブ線11を脆性板材1の下面側から押圧し、脆性板材1をスクライブ線11に沿って割断する。こうして、脆性板材1から所定寸法の割断片12を得る。   Next, as shown in FIGS. 3 (c) and 3 (d), the one end side of the brittle plate 1 is clamped from above and below by the anvil 3 and the pusher 4 while the one end of the brittle plate 1 is separated from the mounting table 2. Then, a cleaving process for cleaving the brittle plate 1 is performed. In this embodiment, first, as shown in FIG. 3C, a pair of anvils 3 is lowered by lowering the anvil 3 in the vertical direction while supporting one end of the brittle plate 1 from the lower surface side with the pusher 4. The protrusions 31 and 31 are brought into contact with the symmetric positions with respect to the scribe line 11 on the upper surface of the brittle plate member 1 and then the pressing actuator 42 is operated as shown in FIG. 11 is pressed from the lower surface side of the brittle plate 1, and the brittle plate 1 is cleaved along the scribe line 11. In this way, a split piece 12 having a predetermined size is obtained from the brittle plate 1.

次いで、割断工程により得られた割断片12を、アンビル3で吸引保持する保持工程を行う。つまり、図3(d)に示すように、割断直後に、割断片12を吸引手段7の吸気孔71を通じて吸引してアンビル3で保持する。本実施形態では、図3(c)に示すように、アンビル3の一対の突起部31を脆性板材1の上面に当接させる割断工程の段階から、吸引孔71による吸気を開始している。このことで、割断直後の割断片12を確実にアンビル3で吸引保持することができる。   Next, a holding step of sucking and holding the split piece 12 obtained by the cutting step with the anvil 3 is performed. That is, as shown in FIG. 3 (d), the split piece 12 is sucked through the suction hole 71 of the suction means 7 and held by the anvil 3 immediately after the cutting. In the present embodiment, as shown in FIG. 3C, intake from the suction hole 71 is started from the stage of the cleaving process in which the pair of protrusions 31 of the anvil 3 are brought into contact with the upper surface of the brittle plate 1. In this way, it is possible to reliably suck and hold the split piece 12 immediately after splitting with the anvil 3.

次いで、図4に示すように、アンビル3で保持した割断片12を、アンビル3自体を移動させて次工程へ搬出する搬出工程を行う。本実施形態では、まず、図4(a)に示すように、吸引手段7により割断片12を吸引したまま、不図示の移動手段によりアンビル3を鉛直方向に上昇させ、次いで、図4(b)に示すように、アンビル3を側方へ移動させることによって割断片12を載置台2から搬出する。   Next, as shown in FIG. 4, an unloading process is performed in which the split piece 12 held by the anvil 3 is moved to the next process by moving the anvil 3 itself. In this embodiment, first, as shown in FIG. 4 (a), the anvil 3 is raised in the vertical direction by a moving means (not shown) while the split piece 12 is sucked by the suction means 7, and then FIG. ), The split piece 12 is unloaded from the mounting table 2 by moving the anvil 3 to the side.

そして、アンビル3は、搬出先で吸気孔71による吸気を停止し、或いは、吸気孔71から噴気して割断片12を離した後、移動手段により、図3(a)に示す待機位置に復帰する。また、この搬出工程時に、プッシャ4は、図4(a)に示すように、押圧用アクチュエータ42及び押上用アクチュエータ62の作動により下降して待機位置に復帰する一方、図4(b)に示すように、位置決め手段5の押出部51が再び設定距離分、脆性板材1を押し出すことによって、次に割断すべきスクライブ線11をプッシャ4の先端部41の直上位置に位置決めする。こうして、脆性板材1の次のスクライブ線11における割断作業が行われる。   Then, the anvil 3 stops intake by the intake hole 71 at the carry-out destination, or blows off from the intake hole 71 to release the split piece 12, and then returns to the standby position shown in FIG. To do. Further, during this unloading process, the pusher 4 is lowered by the operation of the pressing actuator 42 and the lifting actuator 62 and returned to the standby position, as shown in FIG. 4A, while shown in FIG. 4B. As described above, the pushing portion 51 of the positioning means 5 pushes the brittle plate 1 again by a set distance, thereby positioning the scribe line 11 to be next cut at a position immediately above the tip portion 41 of the pusher 4. In this way, the cleaving operation on the next scribe line 11 of the brittle plate 1 is performed.

本実施形態の脆性板材の割断装置10によれば、寸法が一辺2.5±0.05mm×他辺2.5±0.05mm×厚さ0.5mmのガラス材から成る割断片について、割断面の直角度が90±3°以内、突起寸法20μm以内、欠け寸法が幅200μm以内、長さ300μm以内の高い寸法精度を実現することができた。   According to the cleaving apparatus 10 for a brittle plate material of the present embodiment, a split piece made of a glass material with dimensions of 2.5 ± 0.05 mm on one side × 2.5 ± 0.05 mm on the other side × 0.5 mm on the side It was possible to achieve high dimensional accuracy with the squareness of the cross section within 90 ± 3 °, the protrusion dimension within 20 μm, the chipping dimension within 200 μm width, and the length within 300 μm.

このように本実施形態の脆性板材の割断装置10及び割断方法によれば、位置決め手段5により載置台2上において脆性板材1のスクライブ線11をプッシャ4の先端部41の直上位置に正確に位置決めした後、脆性板材1をアンビル3とプッシャ4とにより挟圧するので、プッシャ4でスクライブ線11の形成位置を正確に脆性板材1の下面側から押圧することができ、脆性板材1をスクライブ線11に沿って高い寸法精度で割断することができる。   As described above, according to the cleaving apparatus 10 and the cleaving method for the brittle plate material of the present embodiment, the positioning means 5 accurately positions the scribe line 11 of the brittle plate material 1 on the mounting table 2 at a position immediately above the tip 41 of the pusher 4. After that, since the brittle plate 1 is sandwiched between the anvil 3 and the pusher 4, the pusher 4 can accurately press the formation position of the scribe line 11 from the lower surface side of the brittle plate 1. Can be cleaved with high dimensional accuracy.

しかも、離間手段6により脆性板材1の一端側を載置台2から離間させた状態で、脆性板材1の一端側をアンビル3とプッシャ4とにより挟圧するので、図3(c)に示すように、割断時に、アンビル3の一対の突起部31間において、脆性板材1の一端側がスクライブ線11について対称に湾曲変形し得る空間を確保することができ、脆性板材1の一端側に対し曲げ応力を対称に作用させることができる。したがって、割断面の欠損や突起、或いは板面に対する直角度等について高い寸法精度で安定に脆性板材1を割断することができる。   Moreover, since the one end side of the brittle plate 1 is clamped by the anvil 3 and the pusher 4 while the one end side of the brittle plate 1 is separated from the mounting table 2 by the separating means 6, as shown in FIG. 3 (c). During the cleaving, a space in which one end side of the brittle plate 1 can be curved and deformed symmetrically with respect to the scribe line 11 between the pair of protrusions 31 of the anvil 3 can be secured, and bending stress is applied to one end of the brittle plate 1. It can act symmetrically. Therefore, the brittle plate 1 can be cleaved stably with high dimensional accuracy with respect to the cracks and protrusions of the cut section, the perpendicularity to the plate surface, and the like.

仮に、脆性板材1の一端側を載置台2から離間させることなく、脆性板材1の一端側をアンビル3とプッシャ4とにより挟圧すると、割断時に、脆性板材1の一端側がアンビル3の位置決め手段5側の一の突起部31と載置台2とよって拘束され、或いは、脆性板材1の他端側が載置台2の載置面21と干渉することになり、脆性板材1に対し曲げ応力を対称に作用させることができず、割断面に所定の直角度等を実現することができない。   If one end side of the brittle plate 1 is sandwiched between the anvil 3 and the pusher 4 without separating one end of the brittle plate 1 from the mounting table 2, one end of the brittle plate 1 is positioned on the anvil 3 during cleaving. The other side of the brittle plate material 1 interferes with the placement surface 21 of the mounting table 2, and the bending stress is symmetrical with respect to the brittle plate material 1. Therefore, a predetermined squareness or the like cannot be realized in the split section.

また、本実施形態の脆性板材の割断装置10及び割断方法によれば、離間手段6の押上部61をプッシャ4と共通化しているので、装置構成を簡素化することができる。また、プッシャ4で脆性板材1の下面におけるスクライブ線11の直下位置を押し上げることができるので、脆性板材1の位置決め精度を安定に維持することができ、より高い寸法精度で割断作業を行うことができる。   Further, according to the brittle plate material cleaving device 10 and the cleaving method of the present embodiment, the push-up portion 61 of the separating means 6 is shared with the pusher 4, so that the device configuration can be simplified. Further, since the pusher 4 can push up the position immediately below the scribe line 11 on the lower surface of the brittle plate 1, the positioning accuracy of the brittle plate 1 can be stably maintained, and the cleaving operation can be performed with higher dimensional accuracy. it can.

また、本実施形態の脆性板材の割断装置10及び割断方法によれば、吸引手段7により割断直後の割断片12をアンビル3で吸引保持し、そして、移動手段によりアンビル3自体を移動させて割断片12を搬出するので、従来のように、搬出時に、割断片12が他の部材と接触して欠け、割れ等を生じるおそれがない。しかも、図4(a)に示すように、割断片12を、アンビル3の片側の突起部31の先端と窪み部32の底面とで支えて吸引保持することができるので、割断片の中央部を吸引していた従来の吸引ピンセットのように、例えばカバーガラス等の機能確保に重要な割断片12の中央部を傷付けるおそれもない。   Further, according to the brittle plate material cleaving apparatus 10 and the cleaving method of the present embodiment, the abutment piece 12 immediately after cleaving is sucked and held by the anvil 3 by the suction means 7, and the anvil 3 itself is moved by the moving means to be cleaved. Since the fragments 12 are carried out, there is no possibility that the broken pieces 12 will come into contact with other members at the time of carrying out, causing cracks, cracks, etc., as in the prior art. Moreover, as shown in FIG. 4 (a), the split piece 12 can be supported and sucked by the tip of the projection 31 on one side of the anvil 3 and the bottom surface of the recess 32, so that the central part of the split piece There is no risk of damaging the central portion of the split piece 12 that is important for ensuring the function of, for example, a cover glass or the like, unlike the conventional suction tweezers that sucked the water.

以上、本実施形態の脆性板材の割断装置及び割断方法について説明したが、本発明は他の実施形態でも実施することができる。   As mentioned above, although the cleaving apparatus and cleaving method of the brittle board | plate material of this embodiment were demonstrated, this invention can be implemented also in other embodiment.

例えば、上記実施形態では、割断工程において、図3(c)に示すように、アンビル3を下降させ、一対の突起部31・31を脆性板材1の上面に当接させた後、図3(d)に示すように、プッシャ4を上昇させて脆性板材1の下面を押圧しているが、本発明はこれに限定されるものではなく、図5(a)に示すように脆性板材1の一端側を載置台2から離間させた後、図5(b)に示すように、アンビル3を下降させて片側の突起部31のみを脆性板材1の上面に当接させ、次いで、図5(c)、(d)に示すように、プッシャ4を上昇させて脆性板材1の下面を押圧し、脆性板材1を割断するようにしてもよい。   For example, in the above embodiment, in the cleaving step, as shown in FIG. 3C, after the anvil 3 is lowered and the pair of protrusions 31 and 31 are brought into contact with the upper surface of the brittle plate 1, FIG. As shown in d), the pusher 4 is raised to press the lower surface of the brittle plate 1, but the present invention is not limited to this, and as shown in FIG. After separating one end side from the mounting table 2, as shown in FIG. 5B, the anvil 3 is lowered so that only one protrusion 31 is brought into contact with the upper surface of the brittle plate 1, and then FIG. As shown in c) and (d), the pusher 4 may be raised to press the lower surface of the brittle plate 1 to break the brittle plate 1.

また、アンビル3を、予め載置台2に対して例えば図5(b)に示す位置に待機させておき、アンビル3を下降動作させずに、プッシャ4の上昇動作のみによって、脆性板材1の離間工程及び割断工程を行うようにしてもよい。アンビル3とプッシャ4とによる相対的な挟圧動作については、割断すべき脆性板材1の材質、寸法、スクライブ線11の深さ等に応じて種々の設計変更が可能である。   In addition, the anvil 3 is made to stand by with respect to the mounting table 2 in advance, for example, at the position shown in FIG. 5B, and the brittle plate 1 is separated only by the raising operation of the pusher 4 without moving the anvil 3 downward. You may make it perform a process and a cleaving process. About relative clamping operation by the anvil 3 and the pusher 4, various design changes are possible according to the material of the brittle board | plate material 1 which should be cut, a dimension, the depth of the scribe line 11, etc. FIG.

また、本発明はその趣旨を逸脱しない範囲内で、当業者の知識に基づいて種々の改良、修正、変形を加えた態様で実施し得る。同一の作用又は効果が生じる範囲内でいずれかの発明特定事項を他の技術に置換した形態で実施しても良く、また、一体に構成されている発明特定事項を複数の部材から構成したり、複数の部材から構成されている発明特定事項を一体に構成した形態で実施してもよい。   In addition, the present invention can be carried out in a mode in which various improvements, modifications and variations are added based on the knowledge of those skilled in the art without departing from the spirit of the present invention. It may be implemented in a form in which any invention specific matter is replaced with another technology within a range where the same action or effect occurs, or the invention specific matter configured integrally may be constituted by a plurality of members. In addition, the invention specific items constituted by a plurality of members may be implemented in an integrated configuration.

10 脆性板材の割断装置
1 脆性板材
11 スクライブ線
12 割断片
2 載置台
3 アンビル
31 突起部
32 窪み部
4 プッシャ
41 先端部
5 位置決め手段
6 離間手段
61 押上部
7 吸引手段
71 吸気孔
C 脆性板材と載置台との間の隙間
DESCRIPTION OF SYMBOLS 10 Fragile board | plate material cutting apparatus 1 Brittle board | plate material 11 Scribe wire 12 Split piece 2 Mounting stand 3 Anvil 31 Protrusion part 32 Indentation part 4 Pusher 41 Tip part 5 Positioning means 6 Separation means 61 Push-up part 7 Suction means 71 Intake hole C With brittle board material Gap between the mounting table

Claims (4)

上面にスクライブ線が形成された脆性板材を、下向きの一対の突起部及び該突起部同士の間の窪み部を有するアンビルと、該アンビルの窪み部に対し接近離反移動する上向きのプッシャとにより上下から挟圧して該脆性板材を該スクライブ線に沿って割断する脆性板材の割断方法であって、
載置台上に前記スクライブ線を上にして載置された前記脆性板材の一端側を該載置台の端部から側方へ突出させ、該脆性板材の割断すべきスクライブ線を、該載置台の側方に上下動可能に設けられた前記プッシャの先端部の直上位置に位置決めする位置決め工程と、
位置決めされた前記脆性板材の一端側を押し上げて該脆性板材の一端側を前記載置台から離間させる離間工程と、
前記脆性板材の一端側を前記載置台から離間させたまま、前記アンビルの一対の突起部を該脆性板材の上面における前記スクライブ線に対する対称位置に当接させた状態で前記プッシャで該スクライブ線を該脆性板材の下面側から押圧することにより該脆性板材を該スクライブ線に沿って割断する割断工程と、
前記割断工程により前記脆性板材を割断して得られた割断片を、前記アンビルの窪み部に設けられた吸気孔を通じて該アンビルで吸引保持する保持工程と、
該アンビルで吸引保持した割断片を、該アンビルを移動させて搬出する搬出工程と、
を含むことを特徴とする脆性板材の割断方法。
A brittle plate having a scribe line formed on the upper surface is vertically moved by an anvil having a pair of downward projections and a depression between the projections, and an upward pusher that moves toward and away from the depression of the anvil. A method of cleaving the brittle plate material by crushing the brittle plate material along the scribe line,
One end side of the brittle plate placed on the mounting table with the scribe line facing upward is protruded laterally from the end of the mounting table, and the scribe line to be cleaved of the brittle plate is connected to the mounting table. A positioning step for positioning at a position directly above the tip of the pusher provided so as to be vertically movable laterally;
A separating step of pushing up one end side of the positioned brittle plate material and separating the one end side of the brittle plate material from the mounting table;
While the one end side of the brittle plate material is separated from the mounting table, the pusher pushes the scribe line with the pair of protrusions of the anvil in contact with the symmetric position with respect to the scribe line on the upper surface of the brittle plate material. A cleaving step of cleaving the brittle plate along the scribe line by pressing from the lower surface side of the brittle plate;
A holding step of sucking and holding the split piece obtained by cleaving the brittle plate material in the cleaving step with the anvil through an air intake hole provided in a hollow portion of the anvil;
An unloading step of unloading the split piece sucked and held by the anvil by moving the anvil;
A method for cleaving a brittle plate, comprising:
前記離間工程において、
前記プッシャで前記脆性板材の前記スクライブ線を下面側から押し上げて該脆性板材の一端側を前記載置台から離間させることを特徴とする請求項1に記載の脆性板材の割断方法。
In the separation step,
2. The method of cleaving a brittle plate according to claim 1, wherein the pusher pushes up the scribe line of the brittle plate from the lower surface side to separate one end of the brittle plate from the mounting table.
上面にスクライブ線が形成された脆性板材を該スクライブ線に沿って割断する脆性板材の割断装置であって、
前記脆性板材を前記スクライブ線を上にして載置可能な載置台と、
前記載置台の上方に設けられ、下向きの一対の突起部及び該突起部同士の間の窪み部を有するアンビルと、
前記載置台の側方に上下動可能に設けられ、前記アンビルの窪み部に対し接近離反移動する上向きのプッシャと、
前記載置台に設けられ、該載置台上に載置された前記脆性板材の一端側を該載置台の端部から側方へ突出させ、該脆性板材の割断すべきスクライブ線を前記プッシャの先端部の直上位置に位置決めする位置決め手段と、
位置決めされた前記脆性板材の一端側を押上部で押し上げて該脆性板材の一端側を前記載置台から離間させる離間手段と、
前記アンビルの窪み部に設けられた吸気孔を通じて前記脆性板材を吸引する吸引手段と、
前記アンビルを移動させる移動手段と、
を備え、
前記離間手段により前記脆性板材の一端側を前記載置台から離間させたまま、前記アンビルの一対の突起部を該脆性板材の上面における前記スクライブ線に対する対称位置に当接させた状態で前記プッシャで該スクライブ線を該脆性板材の下面側から押圧することにより該脆性板材を該スクライブ線に沿って割断し、
前記脆性板材を割断して得られた割断片を、前記吸引手段により該アンビルで吸引保持した状態で、前記移動手段により段該アンビルを移動させて搬出する脆性板材の割断装置。
A brittle plate cleaving device for cleaving along a scribe line a brittle plate having a scribe line formed on the upper surface,
A mounting table capable of mounting the brittle plate material with the scribe line facing upward;
An anvil which is provided above the mounting table and has a pair of downward projections and a depression between the projections;
An upward pusher which is provided on the side of the mounting table so as to be movable up and down, and moves closer to and away from the depression of the anvil;
One end side of the brittle plate material provided on the mounting table and projecting from the end of the mounting table to the side is provided on the mounting table, and a scribe line to be cleaved of the brittle plate material is provided at the tip of the pusher. Positioning means for positioning at a position directly above the part;
Separating means for pushing up one end side of the positioned brittle plate material with a push-up portion to separate one end side of the brittle plate material from the mounting table,
A suction means for sucking the brittle plate material through an intake hole provided in a hollow portion of the anvil;
Moving means for moving the anvil;
With
While the one end side of the brittle plate member is separated from the mounting table by the separating means, the pair of protrusions of the anvil are brought into contact with a symmetric position with respect to the scribe line on the upper surface of the brittle plate member. Cleaving the brittle plate along the scribe line by pressing the scribe line from the lower surface side of the brittle plate,
An apparatus for cleaving a brittle plate material, in which a split piece obtained by cleaving the brittle plate material is sucked and held by the anvil with the anvil, and the anvil is moved by the moving means and carried out .
前記離間手段の押上部が、前記プッシャである請求項3に記載の脆性板材の割断装置。   The brittle plate material cleaving apparatus according to claim 3, wherein the push-up portion of the separation means is the pusher.
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