TW202144677A - Fluid transportation actuator - Google Patents

Fluid transportation actuator Download PDF

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TW202144677A
TW202144677A TW109116602A TW109116602A TW202144677A TW 202144677 A TW202144677 A TW 202144677A TW 109116602 A TW109116602 A TW 109116602A TW 109116602 A TW109116602 A TW 109116602A TW 202144677 A TW202144677 A TW 202144677A
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Taiwan
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lengths
piezoelectric
actuator
sheet
thin plate
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TW109116602A
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Chinese (zh)
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莫皓然
張鈞俋
曾俊隆
陳世昌
廖家淯
黃啟峰
韓永隆
古暘
呂依庭
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研能科技股份有限公司
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Priority to TW109116602A priority Critical patent/TW202144677A/en
Priority to US17/314,197 priority patent/US20210363984A1/en
Priority to JP2021081319A priority patent/JP2021181782A/en
Publication of TW202144677A publication Critical patent/TW202144677A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0054—Special features particularities of the flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Abstract

A fluid transportation actuator is disclosed and includes a silencing jet orifice plate, a chamber frame, an actuator, an insulation frame and a conductive frame. The silencing jet orifice plate includes a silencing plate, a suspension plate and a central hole. The suspension plate is permitted to undergo a curvy vibration. The central hole is formed on the center of the suspension plate. The silencing plate is set and fixed on the central hole formed on the center of the suspension plate. The chamber frame is stacked on the suspension plate. The actuator is stacked on the chamber frame. Voltage can be applied to the actuator to make the actuator curvedly vibrate back and forth, and the actuator includes a thin piezoelectric plate pin. The insulation frame is stacked on the actuator. The conductive frame is stacked on the insulation frame and includes a conductive frame pin.

Description

流體傳輸致動器fluid transfer actuator

本案關於一種流體傳輸致動器，尤指一種具有不同金屬材質匹配組裝之流體傳輸致動器。This case is about a fluid transmission actuator, especially a fluid transmission actuator with matching assembly of different metal materials.

於現有技術中，流體傳輸致動器主要以傳統的機構部件堆疊而構成，並以每一個機構部件極小化或厚度薄化的方式，來達到整體裝置微型化、薄型化之目的。然而，傳統機構件在微小化後，其尺寸精度控制不易，且組裝精度同樣難以掌控，進而造成產品良率不一，甚至有流體傳送之流量不穩定等問題。機構件在微小化後，其單材質的流體傳輸致動器在驅動時，結構韌性不足，易受到干擾與驅動點辨別不清的問題。In the prior art, the fluid transmission actuator is mainly constructed by stacking traditional mechanical components, and the miniaturization or thickness reduction of each mechanical component is used to achieve the purpose of miniaturization and thinning of the overall device. However, after the miniaturization of traditional mechanical components, it is difficult to control the dimensional accuracy and the assembly accuracy is also difficult to control, resulting in different product yields and even unstable flow of fluid transmission. After the mechanical components are miniaturized, the single-material fluid transmission actuator has insufficient structural toughness when it is driven, and is susceptible to problems such as interference and unclear identification of the driving point.

再者，習知的流體傳輸致動器中，往往因輸出的流體無法有效地匯集，或是因元件尺寸過於微小而使流體推進的力道不足，進而導致流體輸送流量不足的問題。Furthermore, in the conventional fluid transmission actuators, the output fluid cannot be collected effectively, or because the size of the components is too small, the force of the fluid propulsion is insufficient, thereby causing the problem of insufficient fluid transmission flow.

本案之主要目的係提供一種流體傳輸致動器，包含：一消音噴氣孔片，包含一消音片、一懸浮片及一中空孔洞，懸浮片可彎曲振動，並於該懸浮片之中心具有該中空孔洞，該消音片套置固定於該懸浮片中心之該中空孔洞上；一腔體框架，承載疊置於該懸浮片上；一致動器，承載疊置於該腔體框架上，該致動器受施加電壓而產生往復式地彎曲振動，並具有一壓電薄板接腳；一絕緣框架，承載疊置於該致動器上；以及一導電框架，承載疊設置於該絕緣框架上，並具有一導電框架接腳；其中，該致動器、該腔體框架及該消音噴氣孔片之間形成一共振腔室，透過該致動器驅動帶動該消音噴氣孔片產生共振，使該消音噴氣孔片之該懸浮片產生往復式地振動位移，實現流體傳輸。The main purpose of this case is to provide a fluid transmission actuator, comprising: a sound-absorbing jet hole piece, including a sound-absorbing piece, a suspension piece and a hollow hole, the suspension piece can bend and vibrate, and the hollow piece has the hollow in the center of the suspension piece a hole, the sound-absorbing sheet is sleeved and fixed on the hollow hole in the center of the suspension sheet; a cavity frame is supported and stacked on the suspension sheet; an actuator is supported and stacked on the cavity frame, the actuator A voltage is applied to generate reciprocating bending vibration, and has a piezoelectric thin plate pin; an insulating frame, which is stacked on the actuator; and a conductive frame, which is stacked on the insulating frame and has A conductive frame pin; wherein, a resonance chamber is formed between the actuator, the cavity frame and the noise-cancelling jet hole sheet, and the noise-cancelling jet hole sheet is driven by the actuator to resonate, so that the noise-cancelling jet The suspension piece of the orifice piece produces a reciprocating vibration and displacement to realize fluid transmission.

體現本案特徵與優點的實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化，其皆不脫離本案的範圍，且其中的說明及圖示在本質上當作說明之用，而非用以限制本案。Embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially used for illustration rather than limiting this case.

本案所有圖示中，如左下方如有標示角方位（M、N、O、P）或邊方位（W、X、Y、Z），係為了定義出流體傳輸致動器的方位，以利精確定義出所述之角或邊。In all the illustrations in this case, if there is a marked angular orientation (M, N, O, P) or side orientation (W, X, Y, Z) in the lower left, it is to define the orientation of the fluid transmission actuator, so as to facilitate the The corner or edge is precisely defined.

本案提供一種流體傳輸致動器，請同時參閱第1圖及第2圖。一種流體傳輸致動器21，包含：一消音噴氣孔片211，包含一消音片211a、一懸浮片211b及一中空孔洞211c，懸浮片211b可彎曲振動，並於該懸浮片211b之中心具有該中空孔洞211c，該消音片211a套置固定於該懸浮片211b中心之該中空孔洞211c上；一腔體框架212，承載疊置於該懸浮片211b上；一致動器213，承載疊置於該腔體框架212上，該致動器213受施加電壓而產生往復式地彎曲振動，並具有一壓電薄板接腳213e；一絕緣框架214，承載疊置於該致動器213上；以及一導電框架215，承載疊設置於該絕緣框架214上，並具有一導電框架接腳215e；其中，該致動器213、該腔體框架212及該消音噴氣孔片211之間形成一共振腔室，透過該致動器213驅動帶動該消音噴氣孔片211產生共振，使該消音噴氣孔片211之該懸浮片211b產生往復式地振動位移，實現流體傳輸。本案之流體傳輸致動器21，致動器213包含：一壓電薄板213a，承載疊置於該腔體框架212上，該壓電薄板接腳213e係為該壓電薄板213a之一凸出部；一壓電厚板213b，承載疊置於該壓電薄板213a上；以及一壓電片213c，承載疊置於該壓電厚板213b上，該壓電片213c受施加電壓而驅動該壓電薄板213a及壓電厚板213b產生往復式地彎曲振動。This application provides a fluid transmission actuator, please refer to Figure 1 and Figure 2 at the same time. A fluid transmission actuator 21, comprising: a sound-absorbing jet hole piece 211, including a sound-absorbing piece 211a, a suspension piece 211b and a hollow hole 211c, the suspension piece 211b can bend and vibrate, and has the suspension piece 211b in the center A hollow hole 211c, the sound-absorbing sheet 211a is sleeved and fixed on the hollow hole 211c in the center of the suspension sheet 211b; a cavity frame 212 is supported and stacked on the suspension sheet 211b; an actuator 213 is supported and stacked on the suspension sheet 211b. On the cavity frame 212, the actuator 213 is subjected to the applied voltage to generate reciprocating bending vibration, and has a piezoelectric thin plate pin 213e; an insulating frame 214, which is supported and stacked on the actuator 213; and a The conductive frame 215 is stacked on the insulating frame 214 and has a conductive frame pin 215e; a resonance chamber is formed between the actuator 213 , the cavity frame 212 and the sound-absorbing air hole sheet 211 , through the actuator 213 to drive the noise-cancelling jet hole sheet 211 to resonate, so that the suspension piece 211b of the noise-cancelling jet hole sheet 211 reciprocally vibrates and displaces to achieve fluid transmission. In the fluid transmission actuator 21 of this application, the actuator 213 includes: a piezoelectric thin plate 213a, which is supported and stacked on the cavity frame 212, and the piezoelectric thin plate pin 213e is a protrusion of the piezoelectric thin plate 213a a piezoelectric thick plate 213b, which is supported and stacked on the piezoelectric thin plate 213a; and a piezoelectric sheet 213c, which is supported and stacked on the piezoelectric thick plate 213b, and the piezoelectric sheet 213c is driven by an applied voltage. The piezoelectric thin plate 213a and the piezoelectric thick plate 213b generate reciprocating bending vibration.

於本案實施例中，流體傳輸致動器21包含有依序堆疊之消音噴氣孔片211、腔體框架212、致動器213、絕緣框架214及導電框架215。消音噴氣孔片211包含了一個消音片211a、一懸浮片211b以及一中空孔洞211c。懸浮片211b具有四個懸浮片角(R1M、R1N、R1O及R1P)，受電力驅動之懸浮片211b可彎曲振動，懸浮片211b之正中央具有一中空孔洞211c。消音片211a鄰接於懸浮片211b之中空孔洞211c的上方。腔體框架212具有四個腔體框架角(R2M、R2N、R2O及R2P)，腔體框架212承載疊置於懸浮片211b上。致動器213承載疊置於腔體框架212上，致動器213並包含了一壓電薄板213a、一壓電厚板213b、一壓電片213c。致動器213受施加電壓而產生往復式地彎曲振動，並具有一壓電薄板接腳213e。壓電薄板接腳213e係為壓電薄板213a之一凸出部，用以接受輸入電壓。壓電薄板213a承載疊置於腔體框架212上。壓電厚板213b承載疊置於壓電薄板213a上。壓電片213c承載疊置於壓電厚板213b上。壓電片213c供施加電壓後發生形變以帶動壓電薄板213a及壓電厚板213b進行往復式彎曲振動。絕緣框架214具有四個絕緣框架角(R4M、R4N、R4O及R4P)，絕緣框架214則是承載疊置於致動器213上，即，絕緣框架214則是承載疊置於致動器213之壓電薄板213a上。導電框架215承載疊置於絕緣框架214上，並具有一導電框架接腳215e。導電框架接腳215e係為導電框架215之一凸出部，用以接受輸入電壓。致動器213、腔體框架212及消音噴氣孔片211之間形成一共振腔室，透過致動器213驅動帶動消音噴氣孔片211產生共振，使消音噴氣孔片211之懸浮片211b產生往復式地振動位移，實現流體傳輸。In the embodiment of this case, the fluid transmission actuator 21 includes a sound-absorbing air hole sheet 211 , a cavity frame 212 , an actuator 213 , an insulating frame 214 and a conductive frame 215 that are stacked in sequence. The sound-absorbing air hole sheet 211 includes a sound-absorbing sheet 211a, a suspension sheet 211b and a hollow hole 211c. The suspension plate 211b has four suspension plate corners (R1M, R1N, R1O and R1P). The suspension plate 211b driven by electricity can bend and vibrate. The center of the suspension plate 211b has a hollow hole 211c. The muffler sheet 211a is adjacent to the top of the hollow hole 211c in the suspension sheet 211b. The cavity frame 212 has four cavity frame corners (R2M, R2N, R2O, and R2P), and the cavity frame 212 is supported and stacked on the suspension sheet 211b. The actuator 213 is carried and stacked on the cavity frame 212, and the actuator 213 includes a piezoelectric thin plate 213a, a piezoelectric thick plate 213b, and a piezoelectric sheet 213c. The actuator 213 is subjected to an applied voltage to generate reciprocating bending vibration, and has a piezoelectric thin plate pin 213e. The piezoelectric thin plate pin 213e is a protruding part of the piezoelectric thin plate 213a for receiving the input voltage. The piezoelectric thin plate 213a is supported and stacked on the cavity frame 212 . The piezoelectric thick plate 213b is supported and stacked on the piezoelectric thin plate 213a. The piezoelectric sheet 213c is supported and stacked on the piezoelectric thick plate 213b. The piezoelectric sheet 213c is deformed after applying a voltage to drive the piezoelectric thin plate 213a and the piezoelectric thick plate 213b to perform reciprocating bending vibration. The insulating frame 214 has four insulating frame corners (R4M, R4N, R4O, and R4P), and the insulating frame 214 is supported and stacked on the actuator 213 , that is, the insulating frame 214 is supported and stacked on the actuator 213 . on the piezoelectric thin plate 213a. The conductive frame 215 is stacked on the insulating frame 214 and has a conductive frame pin 215e. The conductive frame pin 215e is a protruding portion of the conductive frame 215 for receiving the input voltage. A resonance chamber is formed between the actuator 213 , the cavity frame 212 and the sound-absorbing air hole sheet 211 , and the sound-absorbing air hole sheet 211 is driven by the actuator 213 to resonate, so that the suspension piece 211b of the sound-absorbing air hole sheet 211 reciprocates. Vibration and displacement to realize fluid transmission.

本案之流體傳輸致動器21，其中該壓電薄板213a與該壓電厚板213b係分別具有兩種不同的熱膨脹係數、兩種不同的撓曲度、兩種不同的剛性之金屬，且皆非為不鏽鋼。In the fluid transmission actuator 21 of the present application, the piezoelectric thin plate 213a and the piezoelectric thick plate 213b are metals with two different thermal expansion coefficients, two different deflection degrees, and two different rigidities, respectively, and both are Not stainless steel.

值得注意的是，壓電薄板213a與壓電厚板213b係分別具有兩種不同的熱膨脹係數，利用不同的熱膨脹係數的金屬材料所製作出的致動器213，可以避免產生兩個緊鄰的諧振頻率，避免相鄰的諧振頻率造成驅動頻率錯置的情況。同時降低致動器213的阻抗（電阻與電抗），藉以達到有效電力驅動提升致動器213的工作效率。且，相較於習知技術之致動器皆以單材質（如不鏽鋼），在單材質的微型鼓風機致動器驅動時，結構強韌性不足，易受到干擾。於本案實施例中，壓電薄板213a或壓電厚板213b其中之一之材料可以為磷青銅，亦或是壓電薄板213a與壓電厚板213b材料皆為磷青銅，但其磷青銅之化學成份組成比不同。可以理解的是，不同化學成分組成比，其熱膨脹係數、撓曲度、剛性亦不同。It is worth noting that the piezoelectric thin plate 213a and the piezoelectric thick plate 213b have two different thermal expansion coefficients, respectively. The actuator 213 made of metal materials with different thermal expansion coefficients can avoid the generation of two adjacent resonances. frequency, to avoid the situation where the driving frequency is displaced by adjacent resonant frequencies. At the same time, the impedance (resistance and reactance) of the actuator 213 is reduced, so as to achieve effective power driving and improve the working efficiency of the actuator 213 . Moreover, compared to the actuators in the prior art, which are all made of a single material (eg, stainless steel), when the single-material micro-blower actuator is driven, the structure is not strong enough and is easily disturbed. In this embodiment, the piezoelectric thin plate 213a or the piezoelectric thick plate 213b may be made of phosphor bronze, or both the piezoelectric thin plate 213a and the piezoelectric thick plate 213b may be made of phosphor bronze. The chemical composition ratio is different. It can be understood that different chemical composition ratios have different thermal expansion coefficients, degrees of deflection and rigidity.

請參閱第3圖及第4圖，分別為第1圖及第2圖之組合示意圖。接者請參閱第5圖，係為第3圖之尺寸標示示意圖。本案之流體傳輸致動器21，其中該壓電薄板213a具有至少一第一邊長L3aWY以及至少一第二邊長L3aXZ，該些第一邊長L3aWY之長度與該些第二邊長L3aXZ之長度相同；該壓電厚板213b具有至少一第三邊長L3bWY以及至少一第四邊長L3bXZ，該些第三邊長L3bWY之長度與該些第四邊長L3bXZ之長度相同；該壓電片213c具有至少一第五邊長L3cWY以及至少一第六邊長L3cXZ，該些第五邊長L3cWY與該些第六邊長L3cXZ之長度相同。Please refer to Figure 3 and Figure 4, which are schematic diagrams of the combination of Figure 1 and Figure 2, respectively. Please refer to Figure 5 for access, which is a schematic diagram of the dimensions of Figure 3. In the fluid transmission actuator 21 of the present application, the piezoelectric thin plate 213a has at least a first side length L3aWY and at least a second side length L3aXZ, and the length of the first side lengths L3aWY and the second side lengths L3aXZ have the same length; the piezoelectric thick plate 213b has at least a third side length L3bWY and at least a fourth side length L3bXZ, and the lengths of the third side lengths L3bWY and the fourth side lengths L3bXZ are the same; the piezoelectric The sheet 213c has at least one fifth side length L3cWY and at least one sixth side length L3cXZ, and the lengths of the fifth side lengths L3cWY and the sixth side lengths L3cXZ are the same.

壓電薄板213a具有四個邊長，分別為兩個第一邊長L3aWY以及兩個第二邊長L3aXZ。值得注意的是，壓電薄板213a可以是正方形，但不以此為限，於其他實施例中，壓電薄板213a可以是環形、圓形、長方形或是多邊形。壓電厚板213b具有四個邊長，分別為兩個第三邊長L3bWY以及兩個第四邊長L3bXZ。值得注意的是，壓電厚板213b可以是正方形，但不以此為限，於其他實施例中，壓電厚板213b可以是環形、圓形、長方形或是多邊形。壓電片213c具有四個邊長，分別為兩個第五邊長L3cWY以及兩個第六邊長L3cXZ。值得注意的是，壓電片213c可以是正方形，但不以此為限，於其他實施例中，壓電片213c可以是環形、圓形、長方形或是多邊形。導電框架215不含凸出部時（即不含導電框架接腳215e）具有四個邊長，分別為兩個第九邊長L5WYB以及兩個第八邊長L5XZ。值得注意的是，導電框架215含凸出部之最長邊長為一第七邊長L5WYA。The piezoelectric thin plate 213a has four side lengths, which are respectively two first side lengths L3aWY and two second side lengths L3aXZ. It should be noted that the piezoelectric thin plate 213a may be square, but not limited thereto, and in other embodiments, the piezoelectric thin plate 213a may be annular, circular, rectangular or polygonal. The piezoelectric thick plate 213b has four side lengths, which are respectively two third side lengths L3bWY and two fourth side lengths L3bXZ. It should be noted that the piezoelectric thick plate 213b may be square, but not limited thereto, and in other embodiments, the piezoelectric thick plate 213b may be annular, circular, rectangular or polygonal. The piezoelectric sheet 213c has four side lengths, which are respectively two fifth side lengths L3cWY and two sixth side lengths L3cXZ. It should be noted that the piezoelectric sheet 213c may be square, but not limited thereto, and in other embodiments, the piezoelectric sheet 213c may be annular, circular, rectangular or polygonal. When the conductive frame 215 does not contain the protruding portion (ie, does not contain the conductive frame pins 215e ), it has four side lengths, which are two ninth side lengths L5WYB and two eighth side lengths L5XZ respectively. It is worth noting that the longest side length of the conductive frame 215 including the protruding portion is a seventh side length L5WYA.

請參閱第6圖，係為第3圖之四角標示示意圖。本案之流體傳輸致動器21，其中該壓電薄板213a具有至少一壓電薄板角(R3aN或R3aO或R3aP)，且其皆係為圓角，且該些圓角之R角小於2.0mm，該壓電薄板213a具有至少另一壓電薄板角(R3aM)，且其係為非圓角。本案之流體傳輸致動器21，其中該壓電厚板213b具有至少一壓電厚板角(R3bM或R3bN或R3bO或R3bP)，且其皆係為圓角，且該些圓角之R角小於2.0mm。本案之流體傳輸致動器21，其中該壓電片213c具有四個壓電片角(R3cM、R3cN、R3cO及R3cP)，且其皆係為直角。Please refer to Figure 6, which is a schematic diagram of the four corners of Figure 3. In the fluid transmission actuator 21 of the present application, the piezoelectric thin plate 213a has at least one piezoelectric thin plate corner (R3aN or R3aO or R3aP), which are all rounded corners, and the R angle of the rounded corners is less than 2.0mm, The piezoelectric sheet 213a has at least one other piezoelectric sheet corner (R3aM), which is not rounded. In the fluid transmission actuator 21 of the present application, the piezoelectric thick plate 213b has at least one piezoelectric thick plate angle (R3bM or R3bN or R3bO or R3bP), which are all rounded corners, and the R corners of the rounded corners are less than 2.0mm. In the fluid transmission actuator 21 of the present application, the piezoelectric sheet 213c has four piezoelectric sheet angles (R3cM, R3cN, R3cO and R3cP), which are all right angles.

壓電片213c具有四個角，分別為壓電片角R3cM、壓電片角R3cN、壓電片角R3cO以及壓電片角R3cP，四個角皆為直角。值得注意的是，壓電片213c之四個角可依設計需求而改變，例如部分角或全部角改變為直角或斜角(單邊角)或多邊角。壓電厚板213b具有四個角，分別為壓電厚板角R3bM、壓電厚板角R3bN、壓電厚板角R3bO以及壓電厚板角R3bP，四個角皆為圓角，且圓角之R角小於2.0mm。值得注意的是，壓電厚板213b之四個角可依設計需求而改變，例如部分角或全部角改變為直角或斜角(單邊角)或多邊角。壓電薄板213a具有四個角，分別為壓電薄板角R3aM、壓電薄板角R3aN、壓電薄板角R3aO以及壓電薄板角R3aP。值得注意的是，壓電薄板213a之壓電薄板角R3aM係為斜角，壓電薄板角R3aN、壓電薄板角R3aO以及壓電薄板角R3aP皆為圓角，且圓角之R角小於2.0mm，壓電薄板213a之四個角可依設計需求而改變，例如部分角或全部角改變為圓角或斜角(單邊角)或多邊角。導電框架215具有四個角，分別為導電框架角R5M、導電框架角R5N、導電框架角R5O以及導電框架角R5P。值得注意的是，導電框架215之導電框架角R5M係為斜角，導電框架角R5N、導電框架角R5O以及導電框架角R5P皆為圓角，且圓角之R角小於2.0mm，導電框架215之四個角可依設計需求而改變，例如部分角或全部角改變為圓角或斜角(單邊角)或多邊角。The piezoelectric sheet 213c has four corners, namely the piezoelectric sheet angle R3cM, the piezoelectric sheet angle R3cN, the piezoelectric sheet angle R3cO, and the piezoelectric sheet angle R3cP, and the four corners are all right angles. It is worth noting that the four corners of the piezoelectric sheet 213c can be changed according to design requirements, for example, some or all of the corners can be changed to right angles, oblique angles (single-sided corners) or polygonal corners. The piezoelectric thick plate 213b has four corners, namely the piezoelectric thick plate corner R3bM, the piezoelectric thick plate corner R3bN, the piezoelectric thick plate corner R3bO, and the piezoelectric thick plate corner R3bP, and the four corners are all rounded and rounded. The R angle of the corner is less than 2.0mm. It is worth noting that the four corners of the piezoelectric thick plate 213b can be changed according to design requirements, for example, some or all of the corners can be changed to right angles, oblique angles (single-sided corners) or polygonal corners. The piezoelectric thin plate 213a has four corners, namely the piezoelectric thin plate corner R3aM, the piezoelectric thin plate corner R3aN, the piezoelectric thin plate corner R3aO, and the piezoelectric thin plate corner R3aP. It is worth noting that the piezoelectric thin plate angle R3aM of the piezoelectric thin plate 213a is an oblique angle, the piezoelectric thin plate angle R3aN, the piezoelectric thin plate angle R3aO and the piezoelectric thin plate angle R3aP are all rounded corners, and the R angle of the rounded corners is less than 2.0 mm, the four corners of the piezoelectric thin plate 213a can be changed according to design requirements, for example, some or all of the corners can be changed to rounded corners, beveled corners (single-sided corners) or polygonal corners. The conductive frame 215 has four corners, which are the conductive frame corner R5M, the conductive frame corner R5N, the conductive frame corner R5O, and the conductive frame corner R5P. It is worth noting that the conductive frame corner R5M of the conductive frame 215 is an oblique angle, the conductive frame corner R5N, the conductive frame corner R5O and the conductive frame corner R5P are all rounded corners, and the R angle of the rounded corners is less than 2.0mm, the conductive frame 215 The four corners can be changed according to design requirements, for example, some or all corners can be changed to rounded corners or beveled corners (single-sided corners) or polygonal corners.

請參閱第7圖，係為第6圖之切線A－A之剖面圖。請參閱第8圖，係為第6圖之壓電薄板213a、壓電厚板213b、壓電片213c之分解尺寸圖。本案之流體傳輸致動器21，其中該些第一邊長L3aWY之長度大於該些第三邊長L3bWY之長度，該些第一邊長L3aWY之長度大於該些第五邊長L3cWY之長度，該些第三邊長L3bWY之長度大於或等於該些第五邊長L3cWY之長度。本案之流體傳輸致動器21，其中該些第一邊長L3aWY之長度與該些第二邊長L3aXZ之長度介於5.0～16.0mm。本案之流體傳輸致動器21，其中該些第三邊長L3bWY之長度與該些第四邊長L3bXZ之長度介於3.5～9.5mm。本案之流體傳輸致動器21，其中該些第五邊長L3cWY之長度與該些第六邊長L3cXZ之長度介於2.95～9.0mm。Please refer to FIG. 7 , which is a cross-sectional view taken along the line AA in FIG. 6 . Please refer to FIG. 8 , which is an exploded dimension view of the piezoelectric thin plate 213 a , the piezoelectric thick plate 213 b , and the piezoelectric sheet 213 c in FIG. 6 . In the fluid transmission actuator 21 of the present case, the lengths of the first side lengths L3aWY are greater than the lengths of the third side lengths L3bWY, the lengths of the first side lengths L3aWY are greater than the lengths of the fifth side lengths L3cWY, The lengths of the third side lengths L3bWY are greater than or equal to the lengths of the fifth side lengths L3cWY. In the fluid transmission actuator 21 of the present application, the lengths of the first side lengths L3aWY and the lengths of the second side lengths L3aXZ are between 5.0 and 16.0 mm. In the fluid transmission actuator 21 of the present application, the lengths of the third side lengths L3bWY and the fourth side lengths L3bXZ are between 3.5 and 9.5 mm. In the fluid transmission actuator 21 of the present application, the lengths of the fifth side lengths L3cWY and the lengths of the sixth side lengths L3cXZ are between 2.95-9.0 mm.

即，壓電薄板213a之第一邊長L3aWY長度大於壓電厚板213b之第三邊長L3bWY長度大於或等於壓電片213c之第五邊長L3cWY長度。值得注意的是，以本案實施例為例，壓電薄板213a之第一邊長L3aWY之長度與第二邊長L3aXZ之長度相同、壓電厚板213b之第三邊長L3bWY之長度與第四邊長L3bXZ之長度相同、壓電片213c之第五邊長L3cWY之長度與第六邊長L3cXZ之長度相同以及導電框架215之第九邊長L5WYB之長度與第八邊長L5XZ之長度相同，但不以此為限，於其他實施例中，壓電薄板213a之第一邊長L3aWY之長度與第二邊長L3aXZ之長度可以不相同、壓電厚板213b之第三邊長L3bWY之長度與第四邊長L3bXZ之長度可以不相同、壓電片213c之第五邊長L3cWY之長度與第六邊長L3cXZ之長度可以不相同以及導電框架215之第九邊長L5WYB之長度與第八邊長L5XZ之長度可以不相同。於本案實施例中，壓電厚板213b之第三邊長L3bWY之長度與第四邊長L3bXZ之長度為8.40mm、壓電薄板213a之第一邊長L3aWY之長度與第二邊長L3aXZ之長度為12.80mm、導電框架215之第七邊長L5WYA之長度為15.20mm，但不以此為限，於其他實施例中，第一邊長L3aWY、第二邊長L3aXZ、第三邊長L3bWY、第四邊長L3bXZ、第五邊長L3cWY、第六邊長L3cXZ、第七邊長L5WYA、第八邊長L5XZ以及第九邊長L5WYB之長度可視設計需求調整。That is, the length of the first side L3aWY of the piezoelectric thin plate 213a is greater than the length of the third side L3bWY of the thick piezoelectric plate 213b is greater than or equal to the length of the fifth side L3cWY of the piezoelectric sheet 213c. It is worth noting that, taking the embodiment of this case as an example, the length of the first side length L3aWY of the piezoelectric thin plate 213a is the same as the length of the second side length L3aXZ, and the length of the third side length L3bWY of the piezoelectric thick plate 213b is the same as the length of the fourth side length L3bWY. The length of the side length L3bXZ is the same, the length of the fifth side length L3cWY of the piezoelectric sheet 213c is the same as the length of the sixth side length L3cXZ, and the length of the ninth side length L5WYB of the conductive frame 215 is the same as the length of the eighth side length L5XZ, But not limited to this, in other embodiments, the length of the first side length L3aWY of the piezoelectric thin plate 213a and the length of the second side length L3aXZ may be different, and the length of the third side length L3bWY of the piezoelectric thick plate 213b The length of the fourth side length L3bXZ may be different, the length of the fifth side length L3cWY of the piezoelectric sheet 213c may be different from the length of the sixth side length L3cXZ, and the length of the ninth side length L5WYB of the conductive frame 215 may be different from that of the eighth side length L5WYB. The lengths of the side lengths L5XZ can be different. In this embodiment, the length of the third side length L3bWY of the piezoelectric thick plate 213b and the length of the fourth side length L3bXZ are 8.40 mm, and the length of the first side length L3aWY and the second side length L3aXZ of the piezoelectric thin plate 213a The length is 12.80mm, and the length of the seventh side L5WYA of the conductive frame 215 is 15.20mm, but not limited to this. In other embodiments, the first side length L3aWY, the second side length L3aXZ, and the third side length L3bWY The lengths of the fourth side length L3bXZ, the fifth side length L3cWY, the sixth side length L3cXZ, the seventh side length L5WYA, the eighth side length L5XZ and the ninth side length L5WYB can be adjusted according to the design requirements.

本案之流體傳輸致動器，其中該些第五邊長L3cWY之長度與第三邊長L3bWY之長度之比例介於1:1～1:1.5。即，壓電片213c之第五邊長L3cWY之長度小於或等於第三邊長L3bWY之長度。In the fluid transmission actuator of the present application, the ratio of the lengths of the fifth side lengths L3cWY to the lengths of the third side lengths L3bWY ranges from 1:1 to 1:1.5. That is, the length of the fifth side length L3cWY of the piezoelectric sheet 213c is less than or equal to the length of the third side length L3bWY.

本案之流體傳輸致動器，其中該壓電厚板213b具有一壓電厚板厚度T3b，該壓電厚板厚度T3b介於0.05～0.5mm。本案之流體傳輸致動器，其中該壓電薄板213a具有一壓電薄板厚度T3a，該壓電薄板厚度T3a介於0.05～0.2mm。致動器213的厚度係由壓電薄板213a之一壓電薄板厚度T3a、壓電厚板213b之一壓電厚板厚度T3b以及壓電片213c之一壓電片厚度T3c所組合而成。壓電厚板厚度T3b介於0.05～0.5mm，壓電薄板厚度T3a介於0.05～0.2mm，且壓電厚板厚度T3b較壓電薄板厚度T3a厚。In the fluid transmission actuator of the present application, the piezoelectric thick plate 213b has a piezoelectric thick plate thickness T3b, and the piezoelectric thick plate thickness T3b ranges from 0.05 to 0.5 mm. In the fluid transmission actuator of the present application, the piezoelectric thin plate 213a has a piezoelectric thin plate thickness T3a, and the piezoelectric thin plate thickness T3a ranges from 0.05 to 0.2 mm. The thickness of the actuator 213 is composed of a piezoelectric thin plate thickness T3a of the piezoelectric thin plate 213a, a piezoelectric thick plate thickness T3b of the piezoelectric thick plate 213b, and a piezoelectric plate thickness T3c of the piezoelectric sheet 213c. The thickness T3b of the piezoelectric thick plate is between 0.05-0.5 mm, the thickness T3a of the piezoelectric thin plate is between 0.05-0.2 mm, and the thickness T3b of the piezoelectric thick plate is thicker than the thickness T3a of the piezoelectric thin plate.

綜上所述，本案所提供之流體傳輸致動器，透過具不同的熱膨脹係數、不同的撓曲度、不同的剛性之金屬製成致動器之壓電薄板與壓電厚板的設計，達到改善習知單材質的流體傳輸致動器在驅動時的阻抗、避免產身相緊鄰的諧振頻率造成驅動頻率錯置、透過磷青銅材質增強結構強韌性、透過壓電厚片圓角設計降低對壓電薄片的物理傷害等功效。To sum up, the fluid transmission actuator provided in this case, through the design of piezoelectric thin plates and piezoelectric thick plates of the actuator made of metals with different thermal expansion coefficients, different deflection degrees, and different rigidities, It can improve the impedance of the conventional single-material fluid transmission actuator during driving, avoid the driving frequency displacement caused by the adjacent resonant frequency, enhance the structural toughness through the phosphor bronze material, and reduce the reduction through the rounded corner design of the piezoelectric thick plate. Effects such as physical damage to piezoelectric sheets.

本案得由熟知此技術之人士任施匠思而為諸般修飾，然皆不脫如附申請專利範圍所欲保護者。This case can be modified by Shi Jiangsi, a person who is familiar with this technology, but all of them do not deviate from the protection of the scope of the patent application attached.

21:流體傳輸致動器 211:消音噴氣孔片 211a:消音片 211b:懸浮片 211c:中空孔洞 212:腔體框架 213:致動器 213a:壓電薄板 213b:壓電厚板 213c:壓電片 213e:壓電薄板接腳 214:絕緣框架 215:導電框架 215e:導電框架接腳 A－A:切線 L3aWY:第一邊長 L3bWY:第三邊長 L3cWY:第五邊長 L3aXZ:第二邊長 L3bXZ:第四邊長 L3cXZ:第六邊長 L5XZ:第八邊長 L5WYA:第七邊長 L5WYB:第九邊長 M、N、O、P:角方位 R1M、R1N、R1O、R1P:懸浮片角 R2M、R2N、R2O、R2P:腔體框架角 R3aM、R3aN、R3aO、R3aP:壓電薄板角 R3bM、R3bN、R3bO、R3bP:壓電厚板角 R3cM、R3cN、R3cO、R3cP:壓電片角 R4M、R4N、R4O、R4P:絕緣框架角 R5M、R5N、R5O、R5P:導電框架角 T3a:壓電薄板厚度 T3b:壓電厚板厚度 T3c:壓電片厚度 W、X、Y、Z:邊方位21: Fluid Transfer Actuator 211: Muffler air vents 211a: Muffler sheet 211b: Suspension tablets 211c: Hollow Hole 212: Cavity frame 213: Actuator 213a: Piezoelectric sheet 213b: Piezoelectric Thick Plate 213c: Piezoelectric sheet 213e: Piezoelectric sheet pin 214: Insulation frame 215: Conductive Frame 215e: Conductive frame pins A-A: Tangent L3aWY: first side length L3bWY: third side length L3cWY: Fifth side length L3aXZ: Second side length L3bXZ: Fourth side length L3cXZ: Sixth side length L5XZ: Eighth side length L5WYA: Seventh side length L5WYB: Ninth side length M, N, O, P: angular orientation R1M, R1N, R1O, R1P: Suspended sheet angle R2M, R2N, R2O, R2P: Cavity frame corners R3aM, R3aN, R3aO, R3aP: Piezoelectric sheet angle R3bM, R3bN, R3bO, R3bP: Piezoelectric Thick Plate Angle R3cM, R3cN, R3cO, R3cP: Piezoelectric sheet angle R4M, R4N, R4O, R4P: Insulating frame corners R5M, R5N, R5O, R5P: Conductive frame corners T3a: Piezoelectric sheet thickness T3b: Thickness of piezoelectric thick plate T3c: Piezo thickness W, X, Y, Z: edge orientation

第1圖為本案流體傳輸致動器之第一視角分解示意圖。 第2圖為本案流體傳輸致動器之第二視角分解示意圖。 第3圖為本案流體傳輸致動器之正面示意圖。 第4圖為本案流體傳輸致動器之反面示意圖。 第5圖為第3圖所示流體傳輸致動器之尺寸標示示意圖。 第6圖為第3圖所示流體傳輸致動器之四角標示示意圖。 第7圖為第6圖所示流體傳輸致動器之A－A切線剖面示意圖。 第8圖為第3圖所示流體傳輸致動器之厚度標示示意圖。FIG. 1 is an exploded schematic diagram of the fluid transmission actuator of the present invention from a first perspective. FIG. 2 is a schematic exploded view of the fluid transmission actuator of the present invention from a second perspective. FIG. 3 is a schematic front view of the fluid transmission actuator of the present invention. FIG. 4 is a schematic view of the reverse side of the fluid transmission actuator of the present invention. FIG. 5 is a schematic diagram showing the dimensions of the fluid transfer actuator shown in FIG. 3 . FIG. 6 is a schematic diagram showing the four corners of the fluid transfer actuator shown in FIG. 3 . FIG. 7 is a schematic cross-sectional view of the fluid transfer actuator shown in FIG. 6 along the AA tangent. FIG. 8 is a schematic diagram showing the thickness of the fluid transmission actuator shown in FIG. 3 .

21:流體傳輸致動器21: Fluid Transfer Actuator

213a:壓電薄板213a: Piezoelectric sheet

213b:壓電厚板213b: Piezoelectric Thick Plate

213c:壓電片213c: Piezoelectric sheet

213e:壓電薄板接腳213e: Piezoelectric sheet pin

214:絕緣框架214: Insulation frame

215:導電框架215: Conductive Frame

215e:導電框架接腳215e: Conductive frame pins

M、N、O、P:角方位M, N, O, P: angular orientation

R3aM:壓電薄板角R3aM: Piezoelectric sheet corner

R3bM:壓電厚板角R3bM: Piezoelectric Thick Plate Angle

R3cM:壓電片角R3cM: Piezoelectric sheet angle

R5M:導電框架角R5M: Conductive Frame Corner

W、X、Y、Z:邊方位W, X, Y, Z: edge orientation

Claims (14)

一種流體傳輸致動器，包含： 一消音噴氣孔片，包含一消音片、一懸浮片及一中空孔洞，該懸浮片可彎曲振動，並於該懸浮片之中心具有該中空孔洞，該消音片套置固定於該懸浮片中心之該中空孔洞上； 一腔體框架，承載疊置於該懸浮片上； 一致動器，承載疊置於該腔體框架上，該致動器受施加電壓而產生往復式地彎曲振動，並具有一壓電薄板接腳； 一絕緣框架，承載疊置於該致動器上；以及 一導電框架，承載疊設置於該絕緣框架上，並具有一導電框架接腳；其中，該致動器、該腔體框架及該消音噴氣孔片之間形成一共振腔室，透過該致動器驅動帶動該消音噴氣孔片產生共振，使該消音噴氣孔片之該懸浮片產生往復式地振動位移，實現流體傳輸。A fluid transfer actuator comprising: A sound-absorbing jet hole sheet, including a sound-absorbing sheet, a suspension sheet and a hollow hole, the suspension sheet can be bent and vibrated, and has the hollow hole in the center of the suspension sheet, the sound-absorbing sheet is sleeved and fixed on the center of the suspension sheet on the hollow hole; a cavity frame, loaded and stacked on the suspension sheet; an actuator, which is carried and stacked on the cavity frame, the actuator is subjected to an applied voltage to generate reciprocating bending vibration, and has a piezoelectric thin plate pin; an insulating frame, bearing and superimposed on the actuator; and a conductive frame, which is stacked on the insulating frame and has a conductive frame pin; wherein a resonance chamber is formed between the actuator, the cavity frame and the sound-absorbing air hole sheet, and through the actuation The actuator drives the sound-absorbing jet hole sheet to resonate, so that the suspension sheet of the sound-absorbing jet hole sheet generates a reciprocating vibration displacement to realize fluid transmission. 如請求項1所述之流體傳輸致動器，其中該致動器包含： 一壓電薄板，承載疊置於該腔體框架上，該壓電薄板接腳係為該壓電薄板之一凸出部； 一壓電厚板，承載疊置於該壓電薄板上；以及 一壓電片，承載疊置於該壓電厚板上，該壓電片受施加電壓而驅動該壓電薄板及該壓電厚板產生往復式地彎曲振動。The fluid transfer actuator of claim 1, wherein the actuator comprises: a piezoelectric thin plate, which is supported and stacked on the cavity frame, and the pin of the piezoelectric thin plate is a protruding part of the piezoelectric thin plate; a piezoelectric thick plate, which is supported and stacked on the piezoelectric thin plate; and A piezoelectric sheet is supported and stacked on the piezoelectric thick plate, and the piezoelectric sheet is subjected to an applied voltage to drive the piezoelectric thin plate and the piezoelectric thick plate to generate reciprocating bending vibration. 如請求項2所述之流體傳輸致動器，其中該壓電薄板與該壓電厚板係分別具有兩種不同的熱膨脹係數、兩種不同的撓曲度、兩種不同的剛性之金屬，且皆非為不鏽鋼。The fluid transmission actuator of claim 2, wherein the piezoelectric thin plate and the piezoelectric thick plate are metals with two different thermal expansion coefficients, two different degrees of deflection, and two different rigidities, respectively, And all are not stainless steel. 如請求項3所述之流體傳輸致動器，其中該壓電薄板具有至少一第一邊長以及至少一第二邊長，該些第一邊長之長度與該些第二邊長之長度相同； 該壓電厚板具有至少一第三邊長以及至少一第四邊長，該些第三邊長之長度與該些第四邊長之長度相同； 該壓電片具有至少一第五邊長以及至少一第六邊長，該些第五邊長與該些第六邊長之長度相同。The fluid transport actuator of claim 3, wherein the piezoelectric thin plate has at least a first side length and at least a second side length, the lengths of the first side lengths and the lengths of the second side lengths same; The piezoelectric thick plate has at least one third side length and at least one fourth side length, and the lengths of the third side lengths are the same as the lengths of the fourth side lengths; The piezoelectric sheet has at least one fifth side length and at least one sixth side length, and the lengths of the fifth side lengths and the sixth side lengths are the same. 如請求項4所述之流體傳輸致動器，其中該些第一邊長之長度大於該些第三邊長之長度，該些第一邊長之長度大於該些第五邊長之長度，該些第三邊長之長度大於或等於該些第五邊長之長度。The fluid transfer actuator of claim 4, wherein the lengths of the first side lengths are greater than the lengths of the third side lengths, the lengths of the first side lengths are greater than the lengths of the fifth side lengths, The lengths of the third side lengths are greater than or equal to the lengths of the fifth side lengths. 如請求項5所述之流體傳輸致動器，其中該些第五邊長之長度與該些第三邊長之長度之比例介於1:1～1:1.5。The fluid transmission actuator of claim 5, wherein the ratio of the lengths of the fifth side lengths to the lengths of the third side lengths ranges from 1:1 to 1:1.5. 如請求項5所述之流體傳輸致動器，其中該些第一邊長之長度與該些第二邊長之長度介於5.0～16.0mm。The fluid transmission actuator of claim 5, wherein the lengths of the first side lengths and the lengths of the second side lengths are between 5.0 and 16.0 mm. 如請求項5所述之流體傳輸致動器，其中該些第三邊長之長度與該些第四邊長之長度介於3.5～9.5mm。The fluid transmission actuator of claim 5, wherein the lengths of the third side lengths and the lengths of the fourth side lengths are between 3.5-9.5 mm. 如請求項5所述之流體傳輸致動器，其中該些第五邊長之長度與該些第六邊長之長度介於2.95～9.0mm。The fluid transmission actuator of claim 5, wherein the lengths of the fifth side lengths and the lengths of the sixth side lengths are between 2.95-9.0 mm. 如請求項3所述之流體傳輸致動器，其中該壓電薄板具有至少一壓電薄板角，且該至少一壓電薄板角係為圓角，且該些圓角之R角小於2.0mm，該壓電薄板具有至少另一壓電薄板角係為非圓角。The fluid transmission actuator of claim 3, wherein the piezoelectric thin plate has at least one piezoelectric thin plate corner, and the at least one piezoelectric thin plate corner is rounded, and the R angle of the rounded corners is less than 2.0 mm , the piezoelectric sheet has at least one other piezoelectric sheet whose corners are non-rounded. 如請求項3所述之流體傳輸致動器，其中該壓電厚板具有至少一壓電厚板角，且該至少一壓電厚板角係為圓角，且該些圓角之R角小於2.0mm。The fluid transmission actuator of claim 3, wherein the piezoelectric thick plate has at least one piezoelectric thick plate corner, and the at least one piezoelectric thick plate corner is rounded, and the rounded corners have an R angle less than 2.0mm. 如請求項11所述之流體傳輸致動器，其中該壓電厚板具有一壓電厚板厚度，該壓電厚板厚度介於0.05～0.5mm。The fluid transmission actuator of claim 11, wherein the piezoelectric thick plate has a thickness of the piezoelectric thick plate, and the thickness of the piezoelectric thick plate is between 0.05 and 0.5 mm. 如請求項3所述之流體傳輸致動器，其中該壓電片具有四個壓電片角，且該些壓電片角皆係為直角。The fluid transmission actuator of claim 3, wherein the piezoelectric sheet has four piezoelectric sheet corners, and the piezoelectric sheet corners are all right angles. 如請求項13所述之流體傳輸致動器，其中該壓電薄板具有一壓電薄板厚度，該壓電薄板厚度介於0.05～0.2mm。The fluid transmission actuator of claim 13, wherein the piezoelectric thin plate has a thickness of the piezoelectric thin plate, and the thickness of the piezoelectric thin plate is between 0.05 and 0.2 mm.
TW109116602A 2020-05-19 2020-05-19 Fluid transportation actuator TW202144677A (en)

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