US20210363984A1 - Fluid transportation actuator - Google Patents
Fluid transportation actuator Download PDFInfo
- Publication number
- US20210363984A1 US20210363984A1 US17/314,197 US202117314197A US2021363984A1 US 20210363984 A1 US20210363984 A1 US 20210363984A1 US 202117314197 A US202117314197 A US 202117314197A US 2021363984 A1 US2021363984 A1 US 2021363984A1
- Authority
- US
- United States
- Prior art keywords
- plate
- piezoelectric
- length
- side length
- fluid transportation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 59
- 230000030279 gene silencing Effects 0.000 claims abstract description 31
- 239000000725 suspension Substances 0.000 claims abstract description 29
- 238000009413 insulation Methods 0.000 claims abstract description 16
- 238000005452 bending Methods 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 229910000906 Bronze Inorganic materials 0.000 description 3
- 239000010974 bronze Substances 0.000 description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15D—FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOW OF GASES OR LIQUIDS
- F15D1/00—Influencing flow of fluids
- F15D1/02—Influencing flow of fluids in pipes or conduits
- F15D1/025—Influencing flow of fluids in pipes or conduits by means of orifice or throttle elements
Definitions
- the present disclosure relates to a fluid transportation actuator, and more particularly to a fluid transportation actuator assembled and combined with different metal materials.
- fluid transportation actuators are mainly constructed by stacking conventional mechanical components, and each mechanical component is miniaturized or thinned to achieve the goal of miniaturization and thinning of the overall device.
- the conventional mechanical components are miniaturized, it is not easy to control the dimensional accuracy, and the assembly accuracy is also difficult to control. It results in different product yields and even unstable fluid flow rates.
- the single-material fluid transportation actuator has the problem of insufficient structural toughness during being driven and easy to result in the problems of interference and unrecognizable of the driving point.
- the output fluid cannot be converged effectively or the element size is too small results in insufficient fluid propulsion force. It leads to the problem of insufficient amount of fluid transportation.
- the fluid transportation actuator includes a silencing jet orifice plate, a chamber frame, an actuator, an insulation frame and a conductive frame.
- the silencing jet orifice plate includes a silencing plate, a suspension plate and a central aperture.
- the suspension plate is permitted to undergo a bending vibration.
- the central aperture is formed on a center of the suspension plate.
- the silencing plate is disposed and fixed on the central aperture disposed at the center of the suspension plate.
- the chamber frame is carried and stacked on the suspension plate.
- the actuator is carried and stacked on the chamber frame.
- the actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto, and includes a piezoelectric-thin-plate pin.
- the insulation frame is carried and stacked on the actuator.
- the conductive frame is carried and stacked on the insulation frame, and includes a conductive-frame pin.
- a resonance chamber is collaboratively defined by the actuator, the chamber frame and the silencing jet orifice plate. When the silencing jet orifice plate is driven by the actuator in resonance, the suspension plate of the silencing jet orifice plate is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation.
- FIG. 1 is a perspective exploded view illustrating a fluid transportation actuator according to an embodiment of the present disclosure and taken from a first perspective;
- FIG. 2 is a perspective exploded view illustrating the fluid transportation actuator according to the embodiment of the present disclosure and taken from a second perspective;
- FIG. 3 is a top view illustrating the fluid transportation actuator according to the embodiment of the present disclosure
- FIG. 4 is a bottom view illustrating the fluid transportation actuator according to the embodiment of the present disclosure.
- FIG. 5 is a schematic diagram showing the dimensions of the fluid transportation actuator shown in FIG. 3 ;
- FIG. 6 is a schematic diagram showing the four corners of the fluid transportation actuator shown in FIG. 3 ;
- FIG. 7 is a cross-sectional view illustrating the fluid transportation actuator along the dash line AA.
- FIG. 8 is a schematic exploded view showing the respective dimensions of the fluid transportation actuator shown in FIG. 6 .
- the fluid transportation actuator 21 includes a silencing jet orifice plate 211 , a chamber frame 212 , an actuator 213 , an insulation frame 214 and a conductive frame 215 .
- the silencing jet orifice plate 211 includes a silencing plate 211 a , a suspension plate 211 b and a central aperture 211 c .
- the suspension plate 211 b is permitted to undergo a bending vibration.
- the central aperture 211 c is formed on a center of the suspension plate 211 b .
- the silencing plate 211 a is disposed and fixed on the central aperture 211 c formed at the center of the suspension plate 211 b .
- the chamber frame 212 is carried and stacked on the suspension plate 211 b .
- the actuator 213 is carried and stacked on the chamber frame 212 .
- the actuator 213 generates the bending vibration in a reciprocating manner as a voltage is applied thereto, and includes a piezoelectric-thin-plate pin 213 e .
- the insulation frame 214 is carried and stacked on the actuator 213 .
- the conductive frame 215 is carried and stacked on the insulation frame 214 , and includes a conductive-frame pin 215 e .
- a resonance chamber is collaboratively defined by the actuator 213 , the chamber frame 212 and the silencing jet orifice plate 211 .
- the suspension plate 211 b of the silencing jet orifice plate 211 is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation.
- the actuator 213 includes a piezoelectric thin plate 213 a , a piezoelectric thick plate 213 b and a piezoelectric element 213 c .
- the piezoelectric thin plate 213 a is carried and stacked on the chamber frame 212 .
- the piezoelectric-thin-plate pin 213 e is a protrusion of the piezoelectric thin plate 213 a .
- the piezoelectric thick plate 213 b is carried and stacked on the piezoelectric thin plate 213 a .
- the piezoelectric element 213 c is carried and stacked on the piezoelectric thick plate 213 b .
- the piezoelectric thin plate 213 a and the piezoelectric thick plate 213 b are driven to generate the bending vibration in the reciprocating manner.
- the fluid transportation actuator 21 includes the silencing jet orifice plate 211 , the chamber frame 212 , the actuator 213 , the insulation frame 214 and the conductive frame 215 , which are sequentially stacked.
- the silencing jet orifice plate 211 includes a silencing plate 211 a , a suspension plate 211 b and a central aperture 211 c .
- the suspension plate 211 b has four piezoelectric-thin-plate corners (R 1 M, R 1 N, R 1 O and R 1 P). When the suspension plate 211 b is driven by electricity, it is permitted to undergo a bending vibration.
- the central aperture 211 c is formed on a center of the suspension plate 211 b .
- the silencing plate 211 a is disposed adjacent to and above the central aperture 211 c disposed at the center of the suspension plate 211 b .
- the chamber frame 212 has four chamber-frame corners (R 2 M, R 2 N, R 2 O and R 2 P).
- the chamber frame 212 is carried and stacked on the suspension plate 211 b .
- the actuator 213 is carried and stacked on the chamber frame 212 .
- the actuator 213 includes a piezoelectric thin plate 213 a , a piezoelectric thick plate 213 b and a piezoelectric element 213 c . When a voltage is applied to the actuator 213 , the actuator 213 generates the bending vibration in a reciprocating manner.
- the actuator 213 further includes a piezoelectric-thin-plate pin 213 e .
- the piezoelectric-thin-plate pin 213 e is a protrusion of the piezoelectric thin plate 213 a for receiving the applied voltage.
- the piezoelectric thin plate 213 a is carried and stacked on the chamber frame 212 .
- the piezoelectric thick plate 213 b is carried and stacked on the piezoelectric thin plate 213 a .
- the piezoelectric element 213 c is carried and stacked on the piezoelectric thick plate 213 b .
- the insulation frame 214 has four insulation-frame corners (R 4 M, R 4 N, R 4 O and R 4 P).
- the insulation frame 214 is carried and stacked on the actuator 213 .
- the insulation frame 214 is carried and stacked on the piezoelectric thin plate 213 a of the actuator 213 .
- the conductive frame 215 is carried and stacked on the insulation frame 214 , and includes a conductive-frame pin 215 e .
- the conductive-frame pin 215 e is a protrusion of the conductive frame 215 for receiving the applied voltage.
- a resonance chamber is collaboratively defined by the actuator 213 , the chamber frame 212 and the silencing jet orifice plate 211 .
- the suspension plate 211 b of the silencing jet orifice plate 211 is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation.
- the piezoelectric thin plate 213 a and the piezoelectric thick plate 213 b are made of two metals having different thermal expansion coefficients, two different flexibilities and two different rigidities, and both are not stainless steel.
- the piezoelectric thin plate 213 a and the piezoelectric thick plate 213 b are made of two metals having different thermal expansion coefficients.
- the actuator 213 made of metal materials having different thermal expansion coefficients can avoid to generate two adjacent resonance frequencies, so as to prevent the driving frequency offset result from the adjacent resonance frequencies.
- the impedance (resistance and reactance) of the actuator 213 is reduced, so as to achieve effective electric driving and improve the working efficiency of the actuator 213 .
- the actuators made of a single material such as stainless steel
- the material of the piezoelectric thin plate 213 a or the piezoelectric thick plate 213 b is phosphor bronze.
- the materials of the piezoelectric thin plate 213 a and the piezoelectric thick plate 213 b are both phosphor bronzes, but each phosphor bronze has different chemical composition, respectively. It is understandable that the two phosphor bronzes with different chemical compositions have different thermal expansion coefficients, different flexibilities and different rigidities.
- the piezoelectric thin plate 213 a has at least one first side length L 3 a WY and at least one second side length L 3 a XZ.
- the length of the at least one first side length L 3 a WY and the length of the at least one second side length L 3 a XZ are the same.
- the piezoelectric thick plate 213 b has at least one third side length L 3 b WY and at least one fourth side length L 3 b XZ. Preferably but not exclusively, the length of the at least one third side length L 3 b WY and the length of the at least one fourth side length L 3 b XZ are the same.
- the piezoelectric element 213 c has at least one fifth side length L 3 c WY and at least one sixth side length L 3 c XZ. Preferably but not exclusively, the length of the at least one fifth side length L 3 c WY and the length of the at least one sixth side length L 3 c XZ are the same.
- the piezoelectric thin plate 213 a has four side lengths, which are two first side lengths L 3 a WY and two second side lengths L 3 a XZ, respectively.
- the piezoelectric thin plate 213 a may be square, but not limited thereto.
- the piezoelectric thin plate 213 a may be ring-shaped, circular, rectangular or polygonal.
- the piezoelectric thick plate 213 b has four side lengths, which are two third side lengths L 3 b WY and two fourth side lengths L 3 b XZ, respectively.
- the piezoelectric thick plate 213 b may be square, but the present disclosure is not limited thereto.
- the piezoelectric thick plate 213 b may be ring-shaped, circular, rectangular or polygonal.
- the piezoelectric element 213 c has four side lengths, which are two fifth side lengths L 3 c WY and two sixth side lengths L 3 c XZ, respectively.
- the piezoelectric element 213 c may be square, but not limited thereto.
- the piezoelectric element 213 c may be ring-shaped, circular, rectangular or polygonal.
- the conductive frame 215 excluding the protrusion has four side lengths, which are two ninth side lengths LSWYB and two eighth side lengths LSXZ, respectively.
- the conductive frame 215 has the longest side length, which includes the protrusion and is a seventh side length L 5 WYA.
- the piezoelectric thin plate 213 a includes at least one piezoelectric-thin-plate corner (R 3 a N, R 3 a O or R 3 a P).
- the at least one piezoelectric-thin-plate conner (R 3 a N, R 3 a O or R 3 a P) is a rounded corner, and the rounded corner has a radius less then 2.0 mm.
- the piezoelectric thin plate 213 a includes at least another piezoelectric-thin-plate corner (R 3 a M), which is a non-rounded corner.
- the piezoelectric thick plate 213 b includes at least one piezoelectric-thick-plate corner (R 3 b M, R 3 b N, R 3 b O or R 3 b P), the at least one piezoelectric-thick-plate corner (R 3 b M, R 3 b N, R 3 b O or R 3 b P) is a rounded corner, and the rounded corner has a radius less than 2.0 mm.
- the piezoelectric element 213 c includes four piezoelectric-element corners (R 3 c M, R 3 c N, R 3 c O and R 3 c P), and the four piezoelectric-element corners (R 3 c M, R 3 c N, R 3 c O and R 3 c P) are square corners.
- the piezoelectric element 213 c has four corners, which are the piezoelectric-element corner R 3 c M, the piezoelectric-element corner R 3 c N, the piezoelectric-element corner R 3 c O and the piezoelectric-element corner R 3 cP, respectively. All four corners of the piezoelectric element 213 c are square corners. Notably, the four corners of the piezoelectric element 213 c are adjustable according to the practical requirements. For example, part or all of the corners of the piezoelectric element 213 c can be changed into square corners, bevel corners (single-edge corners) or polygonal corners.
- the piezoelectric thick plate 213 b has four corners, which are the piezoelectric-thick-plate corner R 3 b M, the piezoelectric-thick-plate corner R 3 b N, the piezoelectric-thick-plate corner R 3 b O and the piezoelectric-thick-plate corner R 3 b P, respectively. All four corners of the piezoelectric thick plate 213 b are rounded corners, and the rounded corner has a radius less than 2.0 min. Notably, the four corners of the piezoelectric thick plate 213 b are adjustable according to the practical requirements.
- the piezoelectric thin plate 213 a has four corners, which are the piezoelectric-thin-plate corner R 3 a M, the piezoelectric-thin-plate corner R 3 a N, the piezoelectric-thin-plate corner R 3 a O and the piezoelectric-thin-plate corner R 3 a P.
- the piezoelectric-thin-plate corner R 3 a M of the piezoelectric thin plate 213 a is a bevel corner.
- the piezoelectric-thin-plate conner R 3 a N, the piezoelectric-thin-plate conner R 3 a O and the piezoelectric-thin-plate corner R 3 a P of the piezoelectric thin plate 213 a are rounded corners, and the rounded corner has a radius less then 2.0 mm.
- the four corners of the piezoelectric thin plate 213 a are adjustable according to the practical requirements. For example, part or all of the corners of the piezoelectric thin plate 213 a can be changed into rounded corners, bevel corners (single-edge corners) or polygonal corners.
- the conductive frame 215 has four corners, which are the conductive-frame corner RSM, the conductive-frame corner RSN, the conductive-frame corner R 50 and the conductive-frame corner RSP, respectively.
- the conductive-frame corner R 5 M of the conductive frame 215 is a bevel corner.
- the conductive-frame corner RSN, the conductive-frame corner R 50 and the conductive-frame corner R 5 P of the conductive frame 215 are rounded corners, and the rounded corner has a radius less then 2.0 mm.
- the four corners of the conductive frame 215 are adjustable according to the practical requirements. For example, part or all of the corners of the conductive frame 215 can be changed into rounded corners, bevel corners (single-edge corners) or polygonal corners.
- FIG. 7 is a cross-sectional view taken along the dash line AA in FIG. 6 .
- FIG. 8 which shows the respective dimensions of the piezoelectric thin plate 213 a , the piezoelectric thick plate 213 b and the piezoelectric element 213 c in FIG. 6 .
- the length of the first side length L 3 a WY is greater than the length of the third side length L 3 b WY.
- the length of the first side length L 3 a WY is greater than the length of the fifth side length L 3 c WY.
- the length of the third side length L 3 b WY is greater than or equal to the length of the fifth side L 3 c WY.
- the length of the first side length L 3 a WY and the length of the second side length L 3 a XZ range from 5.0 mm to 16.0 mm.
- the length of the third side length L 3 b WY and the length of the fourth side length L 3 b XZ range from 3.5 mm to 9.5 mm.
- the length of the fifth side length L 3 c WY and the length of the sixth side length L 3 c XZ range from 2.95 mm to 9.0 mm.
- the length of the first side length L 3 a WY of the piezoelectric thin plate 213 a is greater than the length of the third side length L 3 b WY of the piezoelectric thick 213 b .
- the length of the first side length L 3 a WY of the piezoelectric thin plate 213 a is greater than or equal to the length of the fifth side length L 3 c WY of the piezoelectric element 213 c .
- the length of the first side length L 3 a WY and the length of the second side length L 3 a XZ of the piezoelectric thin plate 213 a are the same
- the length of the third side length L 3 b WY and the length of the fourth side length L 3 b XZ of the piezoelectric thick plate 213 b are the same
- the length of the fifth side length L 3 c WY and the length of the sixth side length L 3 c XZ of the piezoelectric element 213 c are the same
- the length of the ninth side length LSWYB and the length of the eighth side length LSXZ of the conductive frame 215 are the same, but not limited thereto.
- the length of the first side length L 3 a WY and the length of the second side length L 3 a XZ of the piezoelectric thin plate 213 a are different
- the length of the third side length L 3 b WY and the length of the fourth side length L 3 b XZ of the piezoelectric thick plate 213 b are different
- the length of the fifth side length L 3 c WY and the length of the sixth side length L 3 c XZ of the piezoelectric element 213 c are different
- the length of the ninth side length L 5 WYB and the length of the eighth side length L 5 XZ of the conductive frame 215 are different.
- the length of the third side length L 3 b WY and the length of the fourth side length L 3 b XZ of the piezoelectric thick plate 213 b are 8.40 mm.
- the length of the first side length L 3 a WY and the length of the second side length L 3 a XZ of the piezoelectric thin plate 213 a are 12.80 mm.
- the length of the seventh side length L 5 WYA is 15.20 mm, but not limited thereto.
- the lengths of the first side length L 3 a WY, the second side length L 3 a XZ, the third side length L 3 b WY, the fourth side length L 3 b XZ, the fifth side length L 3 c WY, the sixth side length L 3 c XZ, the seventh side length L 5 WYA, the eighth side length L 5 XZ and the ninth side length L 5 WYB are adjustable according to the practical requirements.
- a ratio of the length of the fifth side length L 3 c WY to the length of the third side length L 3 b WY is in a range of 1:1 to 1:1.5. Namely, the length of the fifth side length L 3 c WY of the piezoelectric element 213 c is less than or equal to the length of the third side length L 3 b WY of the piezoelectric thick plate 213 b.
- the piezoelectric thick plate 213 b has a piezoelectric-thick-plate thickness T 3 b , and the piezoelectric-thick-plate thickness T 3 b ranges from 0.05 mm to 0.5 mm.
- the piezoelectric thin plate 213 a has a piezoelectric-thin-plate thickness T 3 a , and the piezoelectric-thin-plate thickness T 3 a ranges from 0.05 mm to 0.2 mm.
- the thickness of the actuator 213 is a combination of the piezoelectric-thin-plate thickness T 3 a of the piezoelectric thin plate 213 a , the piezoelectric-thick-plate thickness T 3 b of the piezoelectric thick plate 213 b and the piezoelectric-element thickness T 3 c of the piezoelectric element 213 c .
- the piezoelectric-thick-plate thickness T 3 b ranges from 0.05 to 0.5 mm
- the piezoelectric-thin-plate thickness T 3 a ranges from 0.05 to 0.2
- the piezoelectric-thick-plate thickness T 3 b is thicker than the piezoelectric-thin-plate thickness T 3 a.
- the present disclosure provides a fluid transportation actuator.
- the piezoelectric thin plate and piezoelectric thick plate of the actuator made of metals with different thermal expansion coefficients, different flexibilities and different rigidities, the driving impedance of the conventional single-material fluid transportation actuator is improved. It prevents the driving frequency from offset result from the adjacent resonance frequencies.
- the structural strength and toughness is enhanced by utilizing the material of phosphor bronze.
- the design of the rounded corners in the piezoelectric thick plate the physical damage to the piezoelectric thin plate is also reduced.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Manipulator (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
Abstract
Description
- The present disclosure relates to a fluid transportation actuator, and more particularly to a fluid transportation actuator assembled and combined with different metal materials.
- In the prior art, fluid transportation actuators are mainly constructed by stacking conventional mechanical components, and each mechanical component is miniaturized or thinned to achieve the goal of miniaturization and thinning of the overall device. However, while the conventional mechanical components are miniaturized, it is not easy to control the dimensional accuracy, and the assembly accuracy is also difficult to control. It results in different product yields and even unstable fluid flow rates. In addition, while the mechanical components are miniaturized, the single-material fluid transportation actuator has the problem of insufficient structural toughness during being driven and easy to result in the problems of interference and unrecognizable of the driving point.
- Furthermore, in the conventional fluid transportation actuator, the output fluid cannot be converged effectively or the element size is too small results in insufficient fluid propulsion force. It leads to the problem of insufficient amount of fluid transportation.
- An object of the present disclosure is to provide a fluid transportation actuator. In accordance with an aspect of the present disclosure, the fluid transportation actuator includes a silencing jet orifice plate, a chamber frame, an actuator, an insulation frame and a conductive frame. The silencing jet orifice plate includes a silencing plate, a suspension plate and a central aperture. The suspension plate is permitted to undergo a bending vibration. The central aperture is formed on a center of the suspension plate. The silencing plate is disposed and fixed on the central aperture disposed at the center of the suspension plate. The chamber frame is carried and stacked on the suspension plate. The actuator is carried and stacked on the chamber frame. The actuator generates the bending vibration in a reciprocating manner as a voltage is applied thereto, and includes a piezoelectric-thin-plate pin. The insulation frame is carried and stacked on the actuator. The conductive frame is carried and stacked on the insulation frame, and includes a conductive-frame pin. A resonance chamber is collaboratively defined by the actuator, the chamber frame and the silencing jet orifice plate. When the silencing jet orifice plate is driven by the actuator in resonance, the suspension plate of the silencing jet orifice plate is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation.
- The above contents of the present disclosure will become more readily apparent to those ordinarily skilled in the art after reviewing the following detailed description and accompanying drawings, in which:
-
FIG. 1 is a perspective exploded view illustrating a fluid transportation actuator according to an embodiment of the present disclosure and taken from a first perspective; -
FIG. 2 is a perspective exploded view illustrating the fluid transportation actuator according to the embodiment of the present disclosure and taken from a second perspective; -
FIG. 3 is a top view illustrating the fluid transportation actuator according to the embodiment of the present disclosure; -
FIG. 4 is a bottom view illustrating the fluid transportation actuator according to the embodiment of the present disclosure; -
FIG. 5 is a schematic diagram showing the dimensions of the fluid transportation actuator shown inFIG. 3 ; -
FIG. 6 is a schematic diagram showing the four corners of the fluid transportation actuator shown inFIG. 3 ; -
FIG. 7 is a cross-sectional view illustrating the fluid transportation actuator along the dash line AA; and -
FIG. 8 is a schematic exploded view showing the respective dimensions of the fluid transportation actuator shown inFIG. 6 . - The present disclosure will now be described more specifically with reference to the following embodiments. It is to be noted that the following descriptions of preferred embodiments of this disclosure are presented herein for purpose of illustration and description only. It is not intended to be exhaustive or to be limited to the precise form disclosed.
- In all the accompanying drawings of the present disclosure, if corner's orientations (M, N, O, P) or edge's orientations (W, X, Y, Z) are marked on at the lower left, it is to define the orientations of the fluid transportation actuator, so as to define the described corner or the described edge accurately.
- A fluid transportation actuator is provided in the present disclosure. Please refer to
FIGS. 1 and 2 . In the embodiment, thefluid transportation actuator 21 includes a silencingjet orifice plate 211, achamber frame 212, anactuator 213, aninsulation frame 214 and aconductive frame 215. The silencingjet orifice plate 211 includes asilencing plate 211 a, asuspension plate 211 b and acentral aperture 211 c. Thesuspension plate 211 b is permitted to undergo a bending vibration. Thecentral aperture 211 c is formed on a center of thesuspension plate 211 b. Thesilencing plate 211 a is disposed and fixed on thecentral aperture 211 c formed at the center of thesuspension plate 211 b. Thechamber frame 212 is carried and stacked on thesuspension plate 211 b. Theactuator 213 is carried and stacked on thechamber frame 212. Theactuator 213 generates the bending vibration in a reciprocating manner as a voltage is applied thereto, and includes a piezoelectric-thin-plate pin 213 e. Theinsulation frame 214 is carried and stacked on theactuator 213. Theconductive frame 215 is carried and stacked on theinsulation frame 214, and includes a conductive-frame pin 215 e. A resonance chamber is collaboratively defined by theactuator 213, thechamber frame 212 and the silencingjet orifice plate 211. When the silencingjet orifice plate 211 is driven by theactuator 213 in resonance, thesuspension plate 211 b of the silencingjet orifice plate 211 is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation. In the embodiment, theactuator 213 includes a piezoelectricthin plate 213 a, a piezoelectricthick plate 213 b and apiezoelectric element 213 c. The piezoelectricthin plate 213 a is carried and stacked on thechamber frame 212. Preferably but not exclusively, the piezoelectric-thin-plate pin 213 e is a protrusion of the piezoelectricthin plate 213 a. The piezoelectricthick plate 213 b is carried and stacked on the piezoelectricthin plate 213 a. Thepiezoelectric element 213 c is carried and stacked on the piezoelectricthick plate 213 b. When the voltage is applied to thepiezoelectric element 213 c, the piezoelectricthin plate 213 a and the piezoelectricthick plate 213 b are driven to generate the bending vibration in the reciprocating manner. - In the embodiment, the
fluid transportation actuator 21 includes the silencingjet orifice plate 211, thechamber frame 212, theactuator 213, theinsulation frame 214 and theconductive frame 215, which are sequentially stacked. The silencingjet orifice plate 211 includes asilencing plate 211 a, asuspension plate 211 b and acentral aperture 211 c. Thesuspension plate 211 b has four piezoelectric-thin-plate corners (R1M, R1N, R1O and R1P). When thesuspension plate 211 b is driven by electricity, it is permitted to undergo a bending vibration. Thecentral aperture 211 c is formed on a center of thesuspension plate 211 b. Thesilencing plate 211 a is disposed adjacent to and above thecentral aperture 211 c disposed at the center of thesuspension plate 211 b. Thechamber frame 212 has four chamber-frame corners (R2M, R2N, R2O and R2P). Thechamber frame 212 is carried and stacked on thesuspension plate 211 b. Theactuator 213 is carried and stacked on thechamber frame 212. In the embodiment, theactuator 213 includes a piezoelectricthin plate 213 a, a piezoelectricthick plate 213 b and apiezoelectric element 213 c. When a voltage is applied to theactuator 213, theactuator 213 generates the bending vibration in a reciprocating manner. Theactuator 213 further includes a piezoelectric-thin-plate pin 213 e. Preferably but not exclusively, the piezoelectric-thin-plate pin 213 e is a protrusion of the piezoelectricthin plate 213 a for receiving the applied voltage. The piezoelectricthin plate 213 a is carried and stacked on thechamber frame 212. The piezoelectricthick plate 213 b is carried and stacked on the piezoelectricthin plate 213 a. Thepiezoelectric element 213 c is carried and stacked on the piezoelectricthick plate 213 b. When the voltage is applied to thepiezoelectric element 213 c, the piezoelectricthin plate 213 a and the piezoelectricthick plate 213 b are driven to generate bending vibration in the reciprocating manner. In the embodiment, theinsulation frame 214 has four insulation-frame corners (R4M, R4N, R4O and R4P). Theinsulation frame 214 is carried and stacked on theactuator 213. Preferably but not exclusively, theinsulation frame 214 is carried and stacked on the piezoelectricthin plate 213 a of theactuator 213. Theconductive frame 215 is carried and stacked on theinsulation frame 214, and includes a conductive-frame pin 215 e. Preferably but not exclusively, the conductive-frame pin 215 e is a protrusion of theconductive frame 215 for receiving the applied voltage. In the embodiment, a resonance chamber is collaboratively defined by theactuator 213, thechamber frame 212 and the silencingjet orifice plate 211. When the silencingjet orifice plate 211 is driven by theactuator 213 in resonance, thesuspension plate 211 b of the silencingjet orifice plate 211 is vibrated and displaced in the reciprocating manner, so as to achieve fluid transportation. - In the
fluid transportation actuator 21 of the present disclosure, the piezoelectricthin plate 213 a and the piezoelectricthick plate 213 b are made of two metals having different thermal expansion coefficients, two different flexibilities and two different rigidities, and both are not stainless steel. - Notably, the piezoelectric
thin plate 213 a and the piezoelectricthick plate 213 b are made of two metals having different thermal expansion coefficients. Theactuator 213 made of metal materials having different thermal expansion coefficients can avoid to generate two adjacent resonance frequencies, so as to prevent the driving frequency offset result from the adjacent resonance frequencies. At the same time, the impedance (resistance and reactance) of theactuator 213 is reduced, so as to achieve effective electric driving and improve the working efficiency of theactuator 213. Moreover, comparing to the actuators made of a single material (such as stainless steel) in the prior art, when the micro-blower actuator of a single material is driven, the structural strength and toughness thereof is insufficient, and it is susceptible to interference. In the embodiment, the material of the piezoelectricthin plate 213 a or the piezoelectricthick plate 213 b is phosphor bronze. In another embodiment, the materials of the piezoelectricthin plate 213 a and the piezoelectricthick plate 213 b are both phosphor bronzes, but each phosphor bronze has different chemical composition, respectively. It is understandable that the two phosphor bronzes with different chemical compositions have different thermal expansion coefficients, different flexibilities and different rigidities. - Please refer to
FIGS. 3 and 4 , which are the views illustrating the assembly shown inFIGS. 1 and 2 . Moreover, please refer toFIG. 5 , which is a schematic diagram showing the dimensions of the fluid transportation actuator shown inFIG. 3 . In thefluid transportation actuator 21 of the present disclosure, the piezoelectricthin plate 213 a has at least one first side length L3 aWY and at least one second side length L3 aXZ. Preferably but not exclusively, the length of the at least one first side length L3 aWY and the length of the at least one second side length L3 aXZ are the same. The piezoelectricthick plate 213 b has at least one third side length L3 bWY and at least one fourth side length L3 bXZ. Preferably but not exclusively, the length of the at least one third side length L3 bWY and the length of the at least one fourth side length L3 bXZ are the same. Thepiezoelectric element 213 c has at least one fifth side length L3 cWY and at least one sixth side length L3 cXZ. Preferably but not exclusively, the length of the at least one fifth side length L3 cWY and the length of the at least one sixth side length L3 cXZ are the same. - In the embodiment, the piezoelectric
thin plate 213 a has four side lengths, which are two first side lengths L3 aWY and two second side lengths L3 aXZ, respectively. Notably, the piezoelectricthin plate 213 a may be square, but not limited thereto. In other embodiments, the piezoelectricthin plate 213 a may be ring-shaped, circular, rectangular or polygonal. In the embodiment, the piezoelectricthick plate 213 b has four side lengths, which are two third side lengths L3 bWY and two fourth side lengths L3 bXZ, respectively. Notably, the piezoelectricthick plate 213 b may be square, but the present disclosure is not limited thereto. In other embodiments, the piezoelectricthick plate 213 b may be ring-shaped, circular, rectangular or polygonal. In the embodiment, thepiezoelectric element 213 c has four side lengths, which are two fifth side lengths L3 cWY and two sixth side lengths L3 cXZ, respectively. Notably, thepiezoelectric element 213 c may be square, but not limited thereto. In other embodiments, thepiezoelectric element 213 c may be ring-shaped, circular, rectangular or polygonal. In the embodiment, theconductive frame 215 excluding the protrusion (Namely, the conductive-frame pin 215 e is excluded) has four side lengths, which are two ninth side lengths LSWYB and two eighth side lengths LSXZ, respectively. Notably, theconductive frame 215 has the longest side length, which includes the protrusion and is a seventh side length L5WYA. - Please refer to
FIG. 6 , which shows the four corners of the fluid transportation actuator shown inFIG. 3 . In thefluid transportation actuator 21 of the present disclosure, the piezoelectricthin plate 213 a includes at least one piezoelectric-thin-plate corner (R3 aN, R3 aO or R3 aP). Preferably but not exclusively, the at least one piezoelectric-thin-plate conner (R3 aN, R3 aO or R3 aP) is a rounded corner, and the rounded corner has a radius less then 2.0 mm. In the embodiment, the piezoelectricthin plate 213 a includes at least another piezoelectric-thin-plate corner (R3 aM), which is a non-rounded corner. In thefluid transportation actuator 21 of the present disclosure, the piezoelectricthick plate 213 b includes at least one piezoelectric-thick-plate corner (R3 bM, R3 bN, R3 bO or R3 bP), the at least one piezoelectric-thick-plate corner (R3 bM, R3 bN, R3 bO or R3 bP) is a rounded corner, and the rounded corner has a radius less than 2.0 mm. In thefluid transportation actuator 21 of the present disclosure, thepiezoelectric element 213 c includes four piezoelectric-element corners (R3 cM, R3 cN, R3 cO and R3 cP), and the four piezoelectric-element corners (R3 cM, R3 cN, R3 cO and R3 cP) are square corners. - In the embodiment, the
piezoelectric element 213 c has four corners, which are the piezoelectric-element corner R3 cM, the piezoelectric-element corner R3 cN, the piezoelectric-element corner R3 cO and the piezoelectric-element corner R3 cP, respectively. All four corners of thepiezoelectric element 213 c are square corners. Notably, the four corners of thepiezoelectric element 213 c are adjustable according to the practical requirements. For example, part or all of the corners of thepiezoelectric element 213 c can be changed into square corners, bevel corners (single-edge corners) or polygonal corners. In the embodiment, the piezoelectricthick plate 213 b has four corners, which are the piezoelectric-thick-plate corner R3 bM, the piezoelectric-thick-plate corner R3 bN, the piezoelectric-thick-plate corner R3 bO and the piezoelectric-thick-plate corner R3 bP, respectively. All four corners of the piezoelectricthick plate 213 b are rounded corners, and the rounded corner has a radius less than 2.0 min. Notably, the four corners of the piezoelectricthick plate 213 b are adjustable according to the practical requirements. For example, part or all of the corners of the piezoelectricthick plate 213 b can be changed into square corners, bevel corners (single-edge corners) or polygonal corners. In the embodiment, the piezoelectricthin plate 213 a has four corners, which are the piezoelectric-thin-plate corner R3 aM, the piezoelectric-thin-plate corner R3 aN, the piezoelectric-thin-plate corner R3 aO and the piezoelectric-thin-plate corner R3 aP. Notably, the piezoelectric-thin-plate corner R3 aM of the piezoelectricthin plate 213 a is a bevel corner. The piezoelectric-thin-plate conner R3 aN, the piezoelectric-thin-plate conner R3 aO and the piezoelectric-thin-plate corner R3 aP of the piezoelectricthin plate 213 a are rounded corners, and the rounded corner has a radius less then 2.0 mm. The four corners of the piezoelectricthin plate 213 a are adjustable according to the practical requirements. For example, part or all of the corners of the piezoelectricthin plate 213 a can be changed into rounded corners, bevel corners (single-edge corners) or polygonal corners. In the embodiment, theconductive frame 215 has four corners, which are the conductive-frame corner RSM, the conductive-frame corner RSN, the conductive-frame corner R50 and the conductive-frame corner RSP, respectively. Notably, the conductive-frame corner R5M of theconductive frame 215 is a bevel corner. The conductive-frame corner RSN, the conductive-frame corner R50 and the conductive-frame corner R5P of theconductive frame 215 are rounded corners, and the rounded corner has a radius less then 2.0 mm. The four corners of theconductive frame 215 are adjustable according to the practical requirements. For example, part or all of the corners of theconductive frame 215 can be changed into rounded corners, bevel corners (single-edge corners) or polygonal corners. - Please refer to
FIG. 7 , which is a cross-sectional view taken along the dash line AA inFIG. 6 . Please refer toFIG. 8 , which shows the respective dimensions of the piezoelectricthin plate 213 a, the piezoelectricthick plate 213 b and thepiezoelectric element 213 c inFIG. 6 . In thefluid transportation actuator 21 of the present disclosure, the length of the first side length L3 aWY is greater than the length of the third side length L3 bWY. The length of the first side length L3 aWY is greater than the length of the fifth side length L3 cWY. The length of the third side length L3 bWY is greater than or equal to the length of the fifth side L3 cWY. In thefluid transportation actuator 21 of the present disclosure, the length of the first side length L3 aWY and the length of the second side length L3 aXZ range from 5.0 mm to 16.0 mm. In thefluid transportation actuator 21 of the present disclosure, the length of the third side length L3 bWY and the length of the fourth side length L3 bXZ range from 3.5 mm to 9.5 mm. In thefluid transportation actuator 21 of the present disclosure, the length of the fifth side length L3 cWY and the length of the sixth side length L3 cXZ range from 2.95 mm to 9.0 mm. - In the embodiment, the length of the first side length L3 aWY of the piezoelectric
thin plate 213 a is greater than the length of the third side length L3 bWY of the piezoelectric thick 213 b. The length of the first side length L3 aWY of the piezoelectricthin plate 213 a is greater than or equal to the length of the fifth side length L3 cWY of thepiezoelectric element 213 c. Notably, preferably but not exclusively, in the embodiment, the length of the first side length L3 aWY and the length of the second side length L3 aXZ of the piezoelectricthin plate 213 a are the same, the length of the third side length L3 bWY and the length of the fourth side length L3 bXZ of the piezoelectricthick plate 213 b are the same, the length of the fifth side length L3 cWY and the length of the sixth side length L3 cXZ of thepiezoelectric element 213 c are the same, and the length of the ninth side length LSWYB and the length of the eighth side length LSXZ of theconductive frame 215 are the same, but not limited thereto. In other embodiments, the length of the first side length L3 aWY and the length of the second side length L3 aXZ of the piezoelectricthin plate 213 a are different, the length of the third side length L3 bWY and the length of the fourth side length L3 bXZ of the piezoelectricthick plate 213 b are different, the length of the fifth side length L3 cWY and the length of the sixth side length L3 cXZ of thepiezoelectric element 213 c are different, and the length of the ninth side length L5WYB and the length of the eighth side length L5XZ of theconductive frame 215 are different. Preferably but not exclusively, the length of the third side length L3 bWY and the length of the fourth side length L3 bXZ of the piezoelectricthick plate 213 b are 8.40 mm. Preferably but not exclusively, the length of the first side length L3 aWY and the length of the second side length L3 aXZ of the piezoelectricthin plate 213 a are 12.80 mm. Preferably but not exclusively, the length of the seventh side length L5WYA is 15.20 mm, but not limited thereto. In other embodiments, the lengths of the first side length L3 aWY, the second side length L3 aXZ, the third side length L3 bWY, the fourth side length L3 bXZ, the fifth side length L3 cWY, the sixth side length L3 cXZ, the seventh side length L5WYA, the eighth side length L5XZ and the ninth side length L5WYB are adjustable according to the practical requirements. - In the
fluid transportation actuator 21 of the present disclosure, a ratio of the length of the fifth side length L3 cWY to the length of the third side length L3 bWY is in a range of 1:1 to 1:1.5. Namely, the length of the fifth side length L3 cWY of thepiezoelectric element 213 c is less than or equal to the length of the third side length L3 bWY of the piezoelectricthick plate 213 b. - In the
fluid transportation actuator 21 of the present disclosure, the piezoelectricthick plate 213 b has a piezoelectric-thick-plate thickness T3 b, and the piezoelectric-thick-plate thickness T3 b ranges from 0.05 mm to 0.5 mm. In thefluid transportation actuator 21 of the present disclosure, the piezoelectricthin plate 213 a has a piezoelectric-thin-plate thickness T3 a, and the piezoelectric-thin-plate thickness T3 a ranges from 0.05 mm to 0.2 mm. The thickness of theactuator 213 is a combination of the piezoelectric-thin-plate thickness T3 a of the piezoelectricthin plate 213 a, the piezoelectric-thick-plate thickness T3 b of the piezoelectricthick plate 213 b and the piezoelectric-element thickness T3 c of thepiezoelectric element 213 c. Preferably but not exclusively, the piezoelectric-thick-plate thickness T3 b ranges from 0.05 to 0.5 mm, the piezoelectric-thin-plate thickness T3 a ranges from 0.05 to 0.2, and the piezoelectric-thick-plate thickness T3 b is thicker than the piezoelectric-thin-plate thickness T3 a. - In summary, the present disclosure provides a fluid transportation actuator. Through the design of the piezoelectric thin plate and piezoelectric thick plate of the actuator made of metals with different thermal expansion coefficients, different flexibilities and different rigidities, the driving impedance of the conventional single-material fluid transportation actuator is improved. It prevents the driving frequency from offset result from the adjacent resonance frequencies. The structural strength and toughness is enhanced by utilizing the material of phosphor bronze. Moreover, with the design of the rounded corners in the piezoelectric thick plate, the physical damage to the piezoelectric thin plate is also reduced.
- While the disclosure has been described in terms of what is presently considered to be the most practical and preferred embodiments, it is to be understood that the disclosure needs not be limited to the disclosed embodiments. On the contrary, it is intended to cover various modifications and similar arrangements included within the spirit and scope of the appended claims which are to be accorded with the broadest interpretation so as to encompass all such modifications and similar structures.
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW109116602 | 2020-05-19 | ||
TW109116602A TW202144677A (en) | 2020-05-19 | 2020-05-19 | Fluid transportation actuator |
Publications (1)
Publication Number | Publication Date |
---|---|
US20210363984A1 true US20210363984A1 (en) | 2021-11-25 |
Family
ID=78606220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US17/314,197 Abandoned US20210363984A1 (en) | 2020-05-19 | 2021-05-07 | Fluid transportation actuator |
Country Status (3)
Country | Link |
---|---|
US (1) | US20210363984A1 (en) |
JP (1) | JP2021181782A (en) |
TW (1) | TW202144677A (en) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120171062A1 (en) * | 2010-05-21 | 2012-07-05 | Murata Manufacturing Co., Ltd. | Fluid pump |
US20130058818A1 (en) * | 2011-09-06 | 2013-03-07 | Murata Manufacturing Co., Ltd. | Fluid control device |
US20130266461A1 (en) * | 2011-04-11 | 2013-10-10 | Murata Manufacturing Co., Ltd. | Actuator support structure and pump device |
US8721303B2 (en) * | 2009-10-01 | 2014-05-13 | Murata Manufacturing Co., Ltd. | Piezoelectric micro-blower |
US20150150470A1 (en) * | 2012-05-29 | 2015-06-04 | Omron Healthcare Co., Ltd. | Piezoelectric pump and blood-pressure information measurement device provided therewith |
US20180066649A1 (en) * | 2016-09-05 | 2018-03-08 | Microjet Technology Co., Ltd. | Miniature fluid control device |
-
2020
- 2020-05-19 TW TW109116602A patent/TW202144677A/en unknown
-
2021
- 2021-05-07 US US17/314,197 patent/US20210363984A1/en not_active Abandoned
- 2021-05-12 JP JP2021081319A patent/JP2021181782A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8721303B2 (en) * | 2009-10-01 | 2014-05-13 | Murata Manufacturing Co., Ltd. | Piezoelectric micro-blower |
US20120171062A1 (en) * | 2010-05-21 | 2012-07-05 | Murata Manufacturing Co., Ltd. | Fluid pump |
US20130266461A1 (en) * | 2011-04-11 | 2013-10-10 | Murata Manufacturing Co., Ltd. | Actuator support structure and pump device |
US20130058818A1 (en) * | 2011-09-06 | 2013-03-07 | Murata Manufacturing Co., Ltd. | Fluid control device |
US20150150470A1 (en) * | 2012-05-29 | 2015-06-04 | Omron Healthcare Co., Ltd. | Piezoelectric pump and blood-pressure information measurement device provided therewith |
US20180066649A1 (en) * | 2016-09-05 | 2018-03-08 | Microjet Technology Co., Ltd. | Miniature fluid control device |
Also Published As
Publication number | Publication date |
---|---|
TW202144677A (en) | 2021-12-01 |
JP2021181782A (en) | 2021-11-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11598330B2 (en) | Fluid control device and pump | |
US11073913B2 (en) | Device for producing haptic feedback | |
US10630258B2 (en) | Acoustic wave resonator and filter including the same | |
US11057017B2 (en) | Bulk-acoustic wave resonator | |
WO2018041241A1 (en) | Piezoelectric actuator and low frequency underwater projector | |
US20210363984A1 (en) | Fluid transportation actuator | |
US20180019726A1 (en) | Bulk acoustic wave resonator device | |
US4348609A (en) | Piezoelectric vibrator with spurious mode suppression | |
US11595022B2 (en) | Bulk-acoustic wave resonator | |
US6452313B2 (en) | Multilayer piezoelectric transformer | |
EP2555175A1 (en) | Transducer module | |
EP3961289A1 (en) | Micro mirror device | |
US20150102708A1 (en) | Piezoelectric device and method of fabricating the same | |
CN113685337B (en) | Fluid transfer actuator | |
US20130101145A1 (en) | Transducer module | |
US9705065B2 (en) | Piezoelectric actuator | |
US11277113B2 (en) | Bulk-acoustic wave resonator | |
US20240147865A1 (en) | Piezoelectric linear motor and electronic device | |
TW202107845A (en) | Bulk-acoustic wave resonator | |
EP3998505A1 (en) | Micromirror device | |
KR102483626B1 (en) | Bulk-acoustic wave resonator | |
JP2001068749A (en) | Laminated piezoelectric actuator | |
KR20050000886A (en) | Piezo-electric transformer with symmetric and asymmetric electrode structures | |
KR20210126966A (en) | Bulk-acoustic wave resonator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
AS | Assignment |
Owner name: MICROJET TECHNOLOGY CO., LTD., TAIWAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MOU, HAO-JAN;JHANG, JYUN-YI;TSENG, CHUN-LUNG;AND OTHERS;SIGNING DATES FROM 20220804 TO 20220828;REEL/FRAME:061024/0528 |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: FINAL REJECTION MAILED |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |