TW202116902A - 包含金屬氟化物粒子之可固化氟聚合物組成物及來自其之物品 - Google Patents
包含金屬氟化物粒子之可固化氟聚合物組成物及來自其之物品 Download PDFInfo
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- TW202116902A TW202116902A TW109129048A TW109129048A TW202116902A TW 202116902 A TW202116902 A TW 202116902A TW 109129048 A TW109129048 A TW 109129048A TW 109129048 A TW109129048 A TW 109129048A TW 202116902 A TW202116902 A TW 202116902A
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- particles
- metal fluoride
- metal
- curable fluoropolymer
- fluoropolymer composition
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- SXAWRMKQZKPHNJ-UHFFFAOYSA-M tetrapentylazanium;chloride Chemical compound [Cl-].CCCCC[N+](CCCCC)(CCCCC)CCCCC SXAWRMKQZKPHNJ-UHFFFAOYSA-M 0.000 description 1
- WAGFXJQAIZNSEQ-UHFFFAOYSA-M tetraphenylphosphonium chloride Chemical compound [Cl-].C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 WAGFXJQAIZNSEQ-UHFFFAOYSA-M 0.000 description 1
- BGQMOFGZRJUORO-UHFFFAOYSA-M tetrapropylammonium bromide Chemical compound [Br-].CCC[N+](CCC)(CCC)CCC BGQMOFGZRJUORO-UHFFFAOYSA-M 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
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- KSMYREBPTSSZDR-UHFFFAOYSA-M tributyl(prop-2-enyl)phosphanium;chloride Chemical compound [Cl-].CCCC[P+](CCCC)(CCCC)CC=C KSMYREBPTSSZDR-UHFFFAOYSA-M 0.000 description 1
- GQIUQDDJKHLHTB-UHFFFAOYSA-N trichloro(ethenyl)silane Chemical compound Cl[Si](Cl)(Cl)C=C GQIUQDDJKHLHTB-UHFFFAOYSA-N 0.000 description 1
- 125000004205 trifluoroethyl group Chemical group [H]C([H])(*)C(F)(F)F 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- YUYCVXFAYWRXLS-UHFFFAOYSA-N trimethoxysilane Chemical compound CO[SiH](OC)OC YUYCVXFAYWRXLS-UHFFFAOYSA-N 0.000 description 1
- MQAYPFVXSPHGJM-UHFFFAOYSA-M trimethyl(phenyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)C1=CC=CC=C1 MQAYPFVXSPHGJM-UHFFFAOYSA-M 0.000 description 1
- 239000005051 trimethylchlorosilane Substances 0.000 description 1
- SIOVKLKJSOKLIF-HJWRWDBZSA-N trimethylsilyl (1z)-n-trimethylsilylethanimidate Chemical compound C[Si](C)(C)OC(/C)=N\[Si](C)(C)C SIOVKLKJSOKLIF-HJWRWDBZSA-N 0.000 description 1
- KJWHEZXBZQXVSA-UHFFFAOYSA-N tris(prop-2-enyl) phosphite Chemical compound C=CCOP(OCC=C)OCC=C KJWHEZXBZQXVSA-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 239000005050 vinyl trichlorosilane Substances 0.000 description 1
- 239000004636 vulcanized rubber Substances 0.000 description 1
- 239000010456 wollastonite Substances 0.000 description 1
- 229910052882 wollastonite Inorganic materials 0.000 description 1
- 229940105963 yttrium fluoride Drugs 0.000 description 1
- RBORBHYCVONNJH-UHFFFAOYSA-K yttrium(iii) fluoride Chemical compound F[Y](F)F RBORBHYCVONNJH-UHFFFAOYSA-K 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/16—Halogen-containing compounds
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- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
- C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
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Abstract
本文所述者係一種可固化氟聚合物組成物,其包含:非晶形氟聚合物;及金屬氟化物之粒子,其中該等粒子實質上未經表面處理,且其中該金屬氟化物之該金屬包含鹼土金屬、第III族過渡金屬、及鑭系元素金屬中之至少一者。亦描述用該可經固化的氟聚合物組成物所製成之經固化的物品。
Description
描述包含非晶形氟聚合物及金屬氟化物之粒子的可固化組成物以及其經固化的物品。
所欲的是識別一種具有良好化學性能性質以及具有改善電漿蝕刻性能的氟化彈性體。
在一個態樣中,描述一種可固化氟聚合物組成物,其包含:非晶形氟聚合物;及金屬氟化物之粒子,其中該金屬氟化物之該金屬包含鹼土金屬、第III族過渡金屬粒子、及鑭系元素中之至少一者。
在另一態樣中,描述一種經固化的物品,其包含:氟彈性體;及金屬氟化物之粒子,其中該等粒子實質上未經表面處理,且其中該金屬氟化物之該金屬包含鹼土金屬、第III族過渡金屬粒子、及鑭系元素中之至少一者。
在另一態樣中,描述一種製造物品之方法,其包含:提供包含以下之可固化氟聚合物組成物:非晶形氟聚合物;及金屬氟化物之粒子,其中該等粒子實質上未經表面處理,且其中該金屬氟化物之該金屬包含鹼土金屬、第III族過渡金屬粒子、及鑭系元素中之至少一者;然後固化該可固化組成物。
以上的發明內容非意欲描述各實施例。本發明的一或多個實施例的細節也會在以下說明中提出。其他特徵、目標、以及優點於說明以及申請專利範圍中將為顯而易見。
如本文中所使用,用語
「一(a/an)」以及「該(the)」係可互換使用,並且意指一或多者;
「及/或(and/or)」係用於表示一或兩項陳述之事例可能發生,例如A及/或B包括(A及B)以及(A或B);
「主鏈(backbone)」係指聚合物之主要連續鏈;
「交聯(crosslinking)」係指使用化學鍵或化學基連接兩條預形成之聚合物鏈;
「固化部位(cure site)」係指可參與交聯的官能基;
「交互聚合(interpolymerized)」係指聚合在一起以形成聚合物主鏈之單體;
如本文中所使用,「乳膠(latex)」係指聚合物粒子在水性連續相中之分散體;
「單體(monomer)」是一種可進行聚合作用然後形成聚合物基本結構之部份的分子;
「有機(organic)」在所屬技術領域中具有通用含義,例如有機化合物係含碳化合物,但有一些例外/除外情況,包括:二元化合物,諸如碳化物、氧化碳、二硫化碳;三元化合物,諸如金屬氰化物、二氯化羰、羰基硫;及金屬碳酸鹽,諸如碳酸鈣;
「全氟化(perfluorinated)」意指衍生自烴、其中所有氫原子皆經氟原子置換之基團或化合物。然而,全氟化化合物仍可含有氟及碳原子以外的其他原子,像是氧原子、氯原子、溴原子以及碘原子;且
「聚合物(polymer)」係指具有至少30,000道耳頓、至少50,000道耳頓、至少100,000道耳頓、至少300,000道耳頓、至少500,000道耳頓、至少750,000道耳頓、至少1,000,000道耳頓、或甚至至少1,500,000道耳頓之數量平均分子量(Mn),且其分子量不會高至造成聚合物之過早膠化的巨觀結構。
亦如文中所述,以端點表述之範圍包括所有歸於該範圍內的數字(例如,1至10包括1.4、1.9、2.33、5.75、9.98等)。
亦如文中所述,「至少一」之表述包括一及大於一的所有數字(例如,至少2、至少4、至少6、至少8、至少10、至少25、至少50、至少100等)。
本揭露係關於非晶形氟聚合物組成物,其包含金屬氟化物粒子。這些非晶形氟聚合物組成物可隨後經固化以形成氟彈性體物品。
本揭露之金屬氟化物粒子包含金屬,其中金屬係鹼土金屬(亦即Be、Mg、Ca、Sr、Ba、及Ra)、第III族過渡金屬(亦即Sc及Y)、及/或鑭系元素系列金屬(亦即具有原子序為57至71者)。在一個實施例中,金屬係鹼土金屬。在一個實施例中,金屬係第III族過渡金屬。在又一實施例中,金屬係鑭系元素系列金屬。例示性金屬氟化物包括:氟化鈣、氟化鎂、氟化釔、及氟化鐿。在一個實施例中,金屬氟化物不是水溶性的,意指金屬氟化物具有在環境壓力(諸如1atm)及25℃下,每100g的水小於0.50g、0.40g、0.30g、0.20g、0.10g、0.05g、或甚至0.01g之水中溶解度。例如,LiF之溶解度在25℃下係0.13g/100mL;ZrF4在25℃下係1.388g/100mL;及AlF3在25℃下係0.559g/100mL,該些溶解度可在參考書中找到,諸如CRC Handbook of Chemistry and Physics,47th Edition,Weast,Robert C.,Ed.,pages B-149 to B-252、The Chemical Rubber Company,Cleveland:1966、及The Merck Index,9th ed.,Merck & Co.,Rahway,NJ,1976,pages 47 and 722。
本揭露之金屬氟化物粒子之形狀沒有特別限制。在一個實施例中,金屬氟化物粒子本質上係球形或橢圓形,意指當放大成二維影像時,粒子大致上呈現圓形,且沒有尖銳的角或邊緣。
金屬氟化物粒子之粒徑可基於在所屬技術領域中已知的技術來測定,例如顯微鏡、電阻抗、或光散射技術。
在一個實施例中,粒子在本質上係微米級(micron-sized),其中粒子具有至少750nm、1微米、2微米、5微米、10微米、或甚至20微米;及小於50微米、100微米、150微米、200微米、250微米、300微米、400微米、500微米、600微米、800微米、900微米、或甚至1000微米之平均直徑。
在一個實施例中,粒子具有小於500nm、400nm、300nm、200nm、或甚至100nm之平均直徑。
在一個實施例中,粒子在本質上係奈米級(nano-sized),其具有至少3nm、5nm、8nm、10nm、15nm、或甚至20nm;及至多約25nm、30nm、50nm、或甚至100nm之平均直徑。
在一個實施例中,金屬氟化物粒子基本上係純的,其包含單一金屬氟化物,然而,該等粒子可含有少量(例如,小於20wt%、10wt%、5wt%、1wt%、0.5wt%、0.3wt%、或甚至0.2wt%)的其他金屬,諸如銅或磷。
在一個實施例中,粒子包含金屬氟化物之組合,諸如氟化鐿與氟化鎂之組合。
本揭露之金屬氟化物粒子未經有機部份表面處理,意指粒子之表面幾乎不包含與粒子鍵合(經由離子鍵結、氫鍵結、凡得瓦力、或共價鍵合等)之有機化合物。通常,將電漿應用中使用之含金屬粒子經表面處理以改善其之性能。矽烷化劑、聚矽氧油、或矽烷偶
合劑係用於改質該等粒子表面之一些處理方法。矽烷化劑之實例係例如三甲基氯矽烷、二甲基二氯矽烷、六甲基二矽氮烷、N,O-雙(三甲基矽基)乙醯胺、N-三甲基矽基乙醯胺、N,N'-雙(三甲基矽基)脲、N-三甲基矽基二乙胺、N-三甲基矽基咪唑、三級丁基二甲基氯矽烷、及類似者。聚矽氧油之實例包括二甲基聚矽氧油。矽烷偶合劑之實例包括例如,乙烯基三氯矽烷、乙烯基參(β-甲氧基乙氧基)矽烷、乙烯基三乙氧基矽烷、乙烯基三甲氧基矽烷、γ-(甲基丙烯醯氧基丙基)三甲氧基矽烷、β-(3,4-環氧基環己基)乙基三甲氧基矽烷、γ-環氧丙氧基丙基三甲氧基矽烷、γ-環氧丙氧基丙基甲基二乙氧基矽烷、N-β-(胺基乙基)-γ-胺基丙基三甲氧基矽烷、N-β-(胺基乙基)-γ-胺基丙基甲基二乙氧基矽烷、γ-胺基丙基三乙氧基矽烷、N-苯基γ-胺基丙基三甲氧基矽烷、γ-巰基丙基三甲氧基矽烷、γ-氯丙基三甲氧基矽烷、及類似者。在本揭露中,已發現實質上未經表面處理之金屬氟化物粒子可以在電漿蝕刻條件下表現良好。在一個實施例中,如相較於金屬氟化物粒子之重量,金屬氟化物粒子表面上之有機部份的重量係小於20%、10%、5%、1%、0.5%、0.1%、0.05%、或甚至0.01%;或甚至在表面上無法偵測到有機部份。
當相較於可固化組成物之重量時,在可固化組成物中之金屬氟化物粒子係以至少0.1wt%、0.5wt%、1wt%、2wt%、4wt%、5wt%、8wt%、10wt%、或甚至12wt%;及至多10wt%、15wt%、20wt%、25wt%、或甚至30wt%之量使用。
本揭露提供具有非晶形氟聚合物之金屬氟化物粒子。如本文中所使用,非晶形氟聚合物係指藉由DSC(微差掃描熱量法)無法偵測到結晶特性的聚合物。若在DSC下進行研究,則非晶形氟聚合物將不具有熔點或不具有多於2毫焦耳/g(以DSC)之焓的熔融轉移。
本揭露之非晶形氟聚合物係高度氟化的,意指該非晶形氟聚合物之至少60%、70%、75%、90%、95%、或甚至99%的碳-氫鍵係被碳-氟鍵置換。在一個實施例中,非晶形氟聚合物係全氟化的,換言之,聚合物(不包括聚合起始或終止之部位)不包含C-H鍵,而是包含C-F鍵。
本揭露之非晶形氟聚合物係衍生自至少一種氟化單體。例示性氟化單體包括:四氟乙烯(tetrafluoroethylene,TFE)、氟乙烯(vinyl fluoride,VF)、二氟亞乙烯(vinylidene fluoride,VDF)、六氟丙烯(hexafluoropropylene,HFP)、五氟丙烯、三氟乙基、三氟氯乙烯(trifluorochloroethylene,CTFE)、(全)氟乙烯基醚(包括全氟烷基乙烯基醚及全氟烷氧基乙烯基醚)、全氟烯丙基醚(包括全氟烷基烯丙基醚及全氟烷氧基烯丙基醚)、全氟烷基乙烯基單體、氟化烷氧化物(諸如六氟環氧丙烷)、氟化苯乙烯、氟化矽氧烷、及其組合。
合適的(全)氟烷基乙烯基醚單體對應於以下通式:CF2=CF-O-Rf5或CH2=CH-O-Rf5,其中Rf5代表1個至10個、或甚至1個至5個碳原子之全氟烷基。全氟烷氧基乙烯基醚之實例包括對應於下式者:CF2=CF-O-Rf6,其中Rf6代表全氟化脂肪族基團,該全
氟化脂肪族基團含有一或多個氧原子以及至多12個、10個、8個、6個、或甚至4個碳原子。(全)氟乙烯基醚之具體實例包括全氟(甲基乙烯基)醚(perfluoro(methyl vinyl)ether,PMVE)、全氟(乙基乙烯基)醚(perfluoro(ethyl vinyl)ether,PEVE)、全氟(正丙基乙烯基)醚(perfluoro(n-propyl vinyl)ether,PPVE-1)、全氟-2-丙氧基丙基乙烯基醚(perfluoro-2-propoxypropylvinyl ether,PPVE-2)、全氟-3-甲氧基-正丙基乙烯基醚、全氟-2-甲氧基-乙基乙烯基醚、及CF3-(CF2)2-O-CF(CF3)-CF2-O-CF(CF3)-CF2-O-CF=CF2。
合適的(全)氟烷基烯丙基醚單體對應於以下通式:CF2=CF-CF2-O-Rf5或CH2=CH-CF2-O-Rf5,其中Rf5代表1個至10個、或甚至1個至5個碳原子之全氟烷基。全氟烷氧基烯丙基醚之實例包括對應於下式者:CF2=CF(CF2)-O-Rf7,其中Rf7代表全氟化脂肪族基團,該全氟化脂肪族基團含有一或多個氧原子以及至多個10個、8個、6個、或甚至4個碳原子。(全)氟烯丙基醚之具體實例包括:CF2=CF2-CF2-O-(CF2)nF,其中n係1至5之整數;及CF2=CF2-CF2-O-(CF2)x-O-(CF2)y-F,其中x係2至5之整數且y係1至5之整數。
此外,可將如在所屬技術領域中已知的固化部位單體在聚合期間加入,使得非晶形氟聚合物包含含碘、溴、及/或氮固化部位基團,其隨後可用於交聯非晶形氟聚合物複合物。
在一個實施例中,碘及溴固化部位基團可衍生自具有式:CX2=CX(Z)之單體,其中:(i)X各獨立地係H或F;且(ii)Z係I、Br、R f -U,其中U=I或Br,且R f =全氟化或部分全氟化伸烷基
(可選地含有O原子)。另外,可使用非氟化之溴-烯烴或碘-烯烴,例如乙烯基碘及烯丙基碘。例示性碘及溴固化部位基團可衍生自:CH2=CHI、CF2=CHI、CF2=CFI、CH2=CHCH2I、CF2=CFCF2I、CH2=CHCF2CF2I、CH2=CHCF2CF2CH2CH2I、CH2=CH(CF2)4I、CH2=CH(CF2)4CH2CH2I、CH2=CH(CF2)6I、CH2=CH(CF2)6CH2CH2I、CF2=CFCH2CH2I、CF2=CFCF2CF2I、CF2=CFOCF2CF2I、CF2=CFOCF2CF2CH2CH2I、CF2=CFOCF2CF2CF2I、CF2=CFOCF2CF2CF2CH2CH2I、CF2=CFOCF2CF2CH2I、CF2=CFOCF2CF2CF2CH2I、CF2=CFCF2OCH2CH2I、CF2=CFO(CF2)3-OCF2CF2I、CH2=CHBr、CF2=CHBr、CF2=CFBr、CH2=CHCH2Br、CF2=CFCF2Br、CH2=CHCF2CF2Br、CF2=CFOCF2CF2Br、CF2=CFCl、CF2=CFCF2Cl、及其混合物。
在一個實施例中,含氮固化部位基團可包含例如乙酸酯、己二酸酯、腈、脒、亞胺酸酯、醯胺肟、脒腙基團、或其組合。
例示性含氮固化部位基團可衍生自:CF2=CF-CF2-O-Rf-CN、CF2=CFO(CF2)wCN、CF2=CFO[CF2CF(CF3)O]g(CF2)vOCF(CF3)CN、CF2=CF[OCF2CF(CF3)]kO(CF2)uCN、及其混合物,其中w代表2至12之整數;g代表0至4之整數;k代表1或2;v代表0至6的整數;u代表1至6之整數,Rf係全氟伸烷基或二價全氟醚基團。具體
實例包括全氟(8-氰基-5-甲基-3,6-二氧雜-1-辛烯)、CF2=CFO(CF2)5CN、及CF2=CFO(CF2)3OCF(CF3)CN。
替代地,或除固化部位單體之外,可使用聚合起始劑及/或鏈轉移劑在氟聚合物上產生末端部位,其隨後可用於交聯非晶形氟聚合物。
在一個實施例中,相對於氟聚合物之總重量,非晶形氟聚合物包含至少0.1wt%、0.5wt%、1wt%、2wt%、或甚至2.5wt%的碘、溴、及/或腈基。在一個實施例中,相對於氟聚合物之總重量,氟聚合物包含不大於1wt%、2wt%、3wt%、5wt%、或甚至10wt%的碘、溴、及/或腈基。
在另一實例中,非晶形氟聚合物實質上係不含碘、溴、及/或腈固化部位,意指該氟聚合物包含小於0.1wt%、0.05wt%、0.01wt%、或甚至0.005wt%的I、Br、及C≡N、或甚至沒有I、Br、及C≡N。
在一個實施例中,非晶形氟聚合物係衍生自下列之交互聚合單體:(i)全氟化烯烴(諸如TFE及/或HFP);(ii)全氟乙烯基醚單體,諸如全氟(甲基乙烯基醚)、全氟(乙基乙烯基醚)、全氟(丙基乙烯基醚)、及全氟(丁基乙烯基醚),及/或全氟(烷氧基乙烯基醚)單體,諸如CF2=CFO[CF2CF(CF3)O]2CF2CF2CF3);及(iii)衍生自能夠給予可交聯基團之單體(諸如包含羧基(COOH)、烷氧基羰基(COOR)、氰基(CN)、碘原子、及溴化物原子、COOH基、COOR基、及CN基之單體)的結構單元。
在一個實施例中,非晶形氟聚合物係衍生自下列之交互聚合單體:(i)40莫耳%至90莫耳%的四氟乙烯;(ii)10莫耳%至60莫耳%的全氟乙烯基醚;及(iii)0莫耳%至5莫耳%的給予固化部位之單體。此類例示性非晶形氟聚合物包括:50莫耳%至75莫耳%的TFE、25莫耳%至50莫耳%的PMVE、及0.1莫耳%至20莫耳%的CF2=CFOCF2CF(CF3)OCF2CF2CN;50莫耳%至75莫耳%的TFE、25莫耳%至50莫耳%的PMVE、及0.1莫耳%至20莫耳%的CF2=CFOCF2CF2CF2OCF(CF3)CN;60莫耳%至85莫耳%的TFE、15莫耳%至40莫耳%的CF2=CF(OCF2CF(CF3))2OCF2CF2CF3、及0.1莫耳%至20莫耳%的/CF2=CFOCF2CF(CF3)OCF2CF2CN;50莫耳%至75莫耳%的TFE、25莫耳%至50莫耳%的PMVE、及0.1莫耳%至20莫耳%的CF2=CFOCF2CF(CF3)OCF2CF2I;50莫耳%至75莫耳%的TFE、25莫耳%至50莫耳%的PMVE、及0.1莫耳%至20莫耳%的CF2=CFOCF2CF2CF2OCF(CF3)I;及60莫耳%至85莫耳%的TFE、15莫耳%至40莫耳%的CF2=CF(OCF2CF(CF3))2OCF2CF2CF3、及0.1莫耳%至20莫耳%的/CF2=CFOCF2CF(CF3)OCF2CF2I。
在一個實施例中,非晶形氟聚合物係衍生自下列之交互聚合單體:(i)30莫耳%至90莫耳%的二氟亞乙烯、(ii)15莫耳%至40莫耳%的六氟丙烯、及(iii)0莫耳%至30莫耳%的四氟乙烯。
金屬氟化物粒子可在液相或粉末相中引入至非晶形氟聚合物中。例如,金屬氟化物粒子可在與非晶形氟聚合物混配期間加
入,或其等可在非晶形氟聚合物乳膠之聚合期間存在,或在凝聚前加至非晶形氟聚合物乳膠中。
本揭露之可固化氟聚合物組成物可使用在所屬技術領域中已知的化合物及技術來固化。可將固化劑加至可固化氟聚合物組成物中,以使非晶形氟聚合物固化成氟彈性體。此類固化劑係在所屬技術領域中已知的,且包括例如:過氧化物、雙胺基苯酚(諸如雙鄰胺基苯酚、己二酸酯、脒、形成三之固化劑(triazine-forming curing agent)(例如鎓,諸如銨、鏻、鋶、或錪)、或其組合。在用過氧化物固化劑固化非晶形氟聚合物之情況下,該氟聚合物包含Br、I、及/或CN固化部位,且較佳地過氧化物係有機過氧化物,諸如三級丁基過氧化物,其具有附接至過氧之氧(peroxy oxygen)的三級碳原子。
例示性過氧化物包括:過氧化苯甲醯、過氧化二異丙苯、過氧化二-三級丁基、2,5-二-甲基-2,5-二-三級丁基過氧己烷、過氧化2,4-二氯苯甲醯、1,1-雙(三級丁基過氧)-3,3,5-三甲基氯己烷、三級丁基過氧異丙基碳酸酯(TBIC)、三級丁基過氧2-乙基己基碳酸酯(TBEC)、三級戊基過氧2-乙基己基碳酸酯、三級己基過氧異丙基碳酸酯、碳過氧酸、O,O'-1,3-丙烷二基OO,OO'-雙(1,1-二甲基乙基)酯、三級丁基過氧苯甲酸酯、三級己基過氧-2-乙基己酸酯、三級丁基過氧2-乙基己酸酯、過氧化二(4-甲基苯甲醯)、過氧化月桂醯、及過氧化環己酮。其他合適的過氧化物固化劑係列示於美國專利第5,225,504號(Tatsu等人)中,其係以引用方式併入本文中。
過氧化物使用之量通常每100重量份的氟聚合物將係至少0.1重量份、0.2重量份、0.4重量份、0.6重量份、0.8重量份、1重量份、1.2重量份、或甚至1.5重量份;至多2重量份、2.25重量份、2.5重量份、2.75重量份、3重量份、3.5重量份、4重量份、4.5重量份、5重量份、或甚至5.5重量份。
助劑係用於藉由與自由基快速反應並潛在地抑制副反應及/或產生額外的交聯來改善過氧化物固化效率的反應性添加劑。助劑通過氫奪取(hydrogen abstraction)或來自過氧化物之自由基的加成來形成自由基,然後該些助劑自由基可通過Br、I、及/或腈部位與聚合物反應。助劑係所屬技術領域中已知的多官能多元不飽和化合物,且包括含烯丙基三聚氰酸酯、三聚異氰酸酯、及鄰苯二甲酸酯、二烯之均聚物、及二烯與乙烯基芳烴之共聚物。各種有用的助劑係可商購獲得的,包括二及三烯丙基化合物、二乙烯基苯、乙烯基甲苯、乙烯基吡啶、1,2-順-聚丁二烯、及其衍生物。例示性助劑包括甘油之二烯丙基醚、三烯丙基磷酸、己二酸二烯丙基酯、二烯丙基三聚氰胺、及三烯丙基三聚異氰酸酯(triallyl isoeyanurate,TAIC)、三(甲基)烯丙基三聚異氰酸酯(tri(methyl)allyl isocyanurate,TMAIC)、三(甲基)烯丙基三聚氰酸酯、聚三烯丙基三聚異氰酸酯(poly-triallyl isocyanurate,聚TAIC)、二甲苯-雙(二烯丙基三聚異氰酸酯)(xylylene-bis(diallyl isocyanurate),XBD)、N,N'-間-亞苯基雙馬來亞醯胺、鄰苯二甲酸二烯丙酯、參(二烯丙基胺)-s-三、亞磷酸三烯丙酯、1,2-聚丁二烯、二丙烯酸乙二醇酯、二丙烯酸二乙二醇酯、及其混合物。包含兩個末端不
飽和部位之例示性部分氟化化合物包括:CH2=CH-Rf1-CH=CH2,其中Rf1可係1至8個碳原子之全氟伸烷基及含氟TAIC(諸如揭示於美國專利第6191233號(Kishine等人)中者,其係以引用方式併入本文中)。
在一個實施例中,可固化組成物包含非晶形氟聚合物、過氧化物、及助劑,其中助劑使用之量通常每100重量份的氟聚合物將係至少0.1重量份、0.5重量份、或甚至1重量份;及每100重量份的氟聚合物至多2重量份、2.5重量份、3重量份、或甚至5重量份。
在用多羥基化合物固化非晶形氟聚合物之情況下,一般而言,氟聚合物包含碳-碳雙鍵及/或能夠沿著聚合物鏈形成碳-碳雙鍵,以形成氟彈性體。用於固化氟聚合物之多羥基化合物係在所屬技術領域中已知的,並且包括揭示於美國專利第3,876,654號(Pattison)及第4,233,421號(Worm)中,其等皆以引用方式併入本文中。代表性實例包括芳族多羥基化合物、較佳地為下列中之任一者:二、三、及四羥基苯、及雙酚。例示性芳族多羥基化合物包括:4,4'-六氟異亞丙基雙酚,更通常稱為雙酚AF(bisphenol AF)。進一步有用的實例包括4,4'-二羥基二苯基碸(亦稱為雙酚S(bisphenol S))、及4,4'-異亞丙基雙酚(亦稱為雙酚A(bisphenol A))、或4,4'(全氟丙烷-2,2-二基)二酚、二羥基二苯甲酮、氫醌、2,4,6-三巰基-S-三、4,4'-硫代聯苯酚、及其金屬鹽。
一般而言,相對於非晶形氟聚合物,使用至多2wt%、2.5wt%、3wt%、4wt%、4.5wt%、或甚至5wt%的多羥基化合物。
在一個實施例中,可固化組成物可包含有機鎓化合物以幫助與非晶形氟聚合物之交聯且/或可用於通過脫氟化氫而在聚合物上產生雙鍵。此類有機鎓化合物包括四級銨氫氧化物或鹽、四級鏻氫氧化物或鹽、及三元鋶氫氧化物或鹽。
簡言之,鏻鹽及銨鹽或化合物分別包含一個磷或氮的中心原子,藉由碳-磷(或碳-氮)共價鍵的方式與四個有機部份共價地鍵結,並與陰離子離子性相連。該等有機部份可相同或不同。
簡言之,鋶化合物係含硫有機化合物,在其中至少一個硫原子係藉由碳-硫共價鍵的方式與三個具有1至20個碳原子之有機部份共價地鍵結,並與陰離子離子性相連。該等有機部份可相同或不同。鋶化合物可以具有多於一個相對正電之硫原子,例如[(C6 H5)2 S+(CH2)4S+(C6H5)2]2Cl-,且兩個碳-硫共價鍵可以是在二價有機部份的碳原子之間,即硫原子可以係環狀結構中之雜原子。
有機鎓化合物係在所屬技術領域中已知的,諸如於美國專利第4,233,421號(Worm)、美國專利第4,912,171號(Grootaert等人)、美國專利第5,086,123號(Guenthner等人)、及美國專利第5,262,490號(Kolb等人)、及美國專利第5,929,169號中,所有其等之說明均以引用方式併入本文中。另一類有用的有機鎓化合物包括具有一或多個側接氟化烷基者。大致上,最有用的氟化鎓化合物係揭示於美國專利第5,591,804號(Coggio等人)中。
例示性有機鎓化合物包括:C3-C6對稱型四烷基銨鹽、不對稱型四烷基銨鹽(其中烷基碳之總和係在8與24之間)、及苄基
三烷基銨鹽(其中烷基碳之總和係在7與19之間)(例如四丁基溴化銨、四丁基氯化銨、苄基三丁基氯化銨、苄基三乙基氯化銨、四丁基硫酸氫銨、及四丁基氫氧化銨、苯基三甲基氯化銨、四戊基氯化銨、四丙基溴化銨、四己基氯化銨、及四庚基溴化銨、四甲基氯化銨);四級鏻鹽,諸如四丁基鏻鹽、四苯基氯化鏻、苄基三苯基氯化鏻、三丁基烯丙基氯化鏻、三丁基苄基氯化鏻、三丁基-2-甲氧基丙基氯化鏻、苄基二苯基(二甲基胺基)氯化鏻、8-苄基-1,8-重氮雙環[5.4.0]7-十一碳烯鎓氯化物、苄基參(二甲基胺基)氯化鏻、及雙(苄基二苯基膦)氯化亞胺。其他合適的有機鎓化合物包括1,8-二氮雜雙環[5.4.0]十一-7-烯及1,5-二氮雜雙環[4.3.0]壬-5-烯。針對四級銨鹽及四級鏻鹽,酚鹽係較佳的陰離子。
在一個實施例中,有機鎓化合物係每100份(以重量(克)計)的非晶形氟聚合物使用至少1毫莫耳、1.5毫莫耳、2毫莫耳、或甚至2.5毫莫耳,及至多3.5毫莫耳、4毫莫耳、4.5毫莫耳、或甚至5毫莫耳。
亦有其他已知的交聯系統,例如藉由使用具有引入腈基作為交聯點之含氟彈性體與有機錫化合物形成三環之三交聯系統(例如,JP58-152041A);類似地藉由使用具有引入腈基作為交聯點之含氟彈性體與雙胺基苯酚形成唑環之唑交聯系統(例如,JP59-109546A);與四胺化合物形成咪唑環之咪唑交聯系統(例如,JP59-109546A);及與雙胺基硫酚形成噻唑環之噻唑交聯系統(例如,JP8-104789A)。亦可採用以輻射或電子束交聯之方法。
特別較佳的交聯劑係具有複數個3-胺基-4-羥基苯基、3-胺基-4-巰基苯基、或3,4-二胺基苯基之化合物。其實例係例如2,2-雙(3-胺基-4-羥基苯基)六氟丙烷(通常稱為雙(胺基酚)AF(bis(aminophenol)AF))、2,2-雙-(3-胺基-4-巰基苯基)六氟丙烷、四胺基苯、雙-3,4-二胺基苯基甲烷、雙-3,4-二胺基苯基醚、2,2-雙(3,4-二胺基苯基)六氟丙烷、及類似者。
可加至可固化氟聚合物組成物中之可選的添加劑包括例如穩定劑(例如,抗氧化劑或UV及光穩定劑)、抗菌劑、顏料(例如,染料)、阻燃劑、藥劑、發泡劑、填料、加工助劑、顏料、填料、造孔劑、及類似者。使用此類添加劑以改善物理性質,諸如拉伸強度、密度、及模數。
此類填料包括:有機或無機填料(諸如黏土、矽土(SiO2)、氧化鋁、鐵紅、滑石、矽藻土、硫酸鋇、矽灰石(CaSiO3)、碳酸鈣(CaCO3)、氧化鈦、氧化鐵)、及碳黑填料,聚四氟乙烯粉末、PFA(TFE/全氟乙烯基醚共聚物)粉末、導電填料、散熱填料、及類似者,其等可作為可選的組分加至組成物中。所屬技術領域中具有通常知識者能夠選擇所需量之特定填料,以在經固化的產物中達成期望的物理特性。
在一個實施例中,可固化組成物及/或經固化的產物包含小於40重量%、30重量%、20重量%、15重量%、10重量%、5重量%、1重量%、或甚至0.1重量%的填料及/或可選的添加劑。
亦可以將習知佐劑併入本揭露之可固化組成物中,以增強所得經固化的產物之性質。例如,可使用酸受體來促進化合物的固化及熱穩定性。合適的酸受體可包括氧化鎂、氧化鉛、氧化鈣、氫氧化鈣、亞磷酸氫二鉛(dibasic lead phosphite)、氧化鋅、碳酸鋇、氫氧化鍶、碳酸鈣、水滑石、硬脂酸鹼金屬鹽、草酸鎂、或其組合。酸受體較佳地係以每單位重量的氟聚合物至少1重量%、2重量%、4重量%、或甚至5重量%;及至多10重量%、15重量%、或甚至20重量%範圍內之量使用。
在一個實施例中,可固化組成物包含具有至少10、或甚至至少12之pKa的強有機鹼,諸如1,8-雙-(二甲基胺基)萘,如揭示於美國專利第4,983,680號(Ojakaar)中,其係以引用方式併入本文中。在一個實施例中,以非晶形氟聚合物之量計,強有機鹼係以至少0.1wt%、0.2wt%、或甚至0.4wt%到至多0.6wt%、0.8wt%、1.0wt%、1.5wt%、或甚至2wt%之量使用。
在一個實施例中,可固化組成物(及所得經固化的物品)實質上係不含酸受體,意指每單位重量的氟聚合物,可固化組成物(或所得經固化的物品)含有以重量計小於0.5%、0.1%、0.05%、0.01%的酸受體、或甚至沒有酸受體。
包含非晶形氟聚合物、及複數個金屬氟化物粒子之可固化組成物可藉由使用一般橡膠加工機器(諸如開放輥、班伯里混合機(Banbury mixer)、或捏合機)混合上述組分來製備。組成物亦可藉由
使用密閉混合機之方法及自乳化混合物中共凝聚,然後將該混合物與固化劑及/或添加劑混配之方法來製備。
這個將各成分混合以產生這種含有其它成分的固體聚合物組成物的製程通常被稱為「混配」。這種設備包括橡膠碾磨機、密閉混合機(例如班伯里混合機)、及混合擠出機。在混合期間混合物之溫度一般將不會升高到約120℃以上。在混合期間,組分及添加劑係均勻地分佈在整個所得氟聚合物「複合物(compound)」或聚合物片材中。然後「複合物」可以在模具(例如空腔或轉移模具)中進行擠出或壓製,並於隨後進行烘箱固化。在替代的實施例中,固化可以在高壓釜中進行。
壓製經混配之混合物(例如加壓式固化)一般在約120℃至220℃、較佳地約140℃至200℃之溫度下進行約1分鐘至約15小時、經常約1分鐘至15分鐘之時期。在模塑該組成物中一般使用約700kPa至20,000kPa、較佳地約3400kPa至6800kPa之壓力。首先可將模具用釋離劑塗佈並預烘乾。
可使模製硫化橡膠在烘箱中在約140℃至240℃之溫度下、較佳地在約160℃至230℃之溫度下後固化約1小時至24小時或更久之時期,此取決於樣本之橫截面厚度。對於較厚之截面而言,後固化期間之溫度通常自該範圍之下限逐漸升高至期望之最高溫度。所用之最高溫度較佳為約260℃,並在此值下保持約1小時或更久。
在一個實施例中,經固化的物品中之金屬氟化物粒子係以至少5pphr、10pphr、15pphr、20pphr、或甚至25pphr(每百份
橡膠份(parts per hundred rubber),以重量計);至多60pphr、50pphr、40pphr、或甚至30pphr之量使用。
在一個實施例中,模製物品係藉由如在所屬技術領域中已知的特殊清潔方法來處理。例如,此類清潔方法包括用超純水洗滌、在某些溫度下用呈液體形式之乾淨有機化合物洗滌、用乾淨無機水溶液洗滌、乾式蝕刻清潔、或萃取清潔。此類清潔方法可用於減少微粒子之數目及/或金屬含量。
本文所揭露之經固化的氟聚合物物品係特別適用於半導體生產設備之各個部分。在本發明中,半導體生產設備不特別限於用於生產半導體之設備,而是涵蓋需要高度清潔度之半導體領域中使用之全部的製造設備,例如用於製造液晶面板及電漿板之設備。
具體而言,含氟彈性體模製物品可合適地用於生產用於密封需要具有高清潔度之半導體生產設備的密封材料。密封材料之實例係O形環、四方形環、快接密封、墊片、包裝、油封、軸承密封、唇形密封等。
因為與半導體工業中使用氟彈性體相關的嚴格要求。已開發各種測試方法以預測氟彈性體物品是否適於使用,包括化學穩定性。
一種此種測試方法係關於重量損失,其中將氟彈性體物品曝露於電漿中並判定其重量損失。在一個實施例中,氟彈性體顯示在氧電漿暴露後之重量損失百分比為小於3.0、2.0、或甚至1.0。在一
個實施例中,氟彈性體顯示在四氟化碳及氧電漿暴露後之重量損失百分比為小於3.0、2.0、或甚至1.0。
在一個實施例中,在電漿處理後,氟彈性體沒有變色,意指在電漿處理後,當用肉眼觀察時,氟彈性體在處理前與處理後之間沒有明顯的顏色變化。
在一個實施例中,當暴露於80℃的水中達168小時,氟彈性體顯示小於3%、2%、1%、或甚至0.5%的溶脹。在一個實施例中,當暴露於200℃的水中達168小時,氟彈性體顯示小於3%、2%、或甚至1.5%的溶脹。
實例
本發明中的各種修改與變更對於所屬技術領域中具有通常知識者將為顯而易見且不悖離本發明之範圍與精神。應理解,本發明不意欲受到本文所提出之說明性實施例及實例過度地限制,且此等實例及實施例僅係以舉例方式呈現,其中本發明之範疇僅意欲由本文提出如下之申請專利範圍所限制。
除非另外指明或顯而易見,所有材料係市售可得,例如來自Sigma-Aldrich Chemical Company,Milwaukee,WI,USA,或為所屬技術領域中具有通常知識者已知者。
在此章節中使用下列縮寫:mL=毫升、g=克、in=吋、cm=公分、μm=微米、nm=奈米、min=分鐘、h=小時、r.t.=室溫、℃=
攝氏度、phr=每百份橡膠之份數、sccm=標準立方公分、mTorr=毫托。表1中提供針對此章節中所用之材料的縮寫以及材料的描述。
平均粒徑
表1中由「*」標記之平均粒徑係藉由將所獲得之粒子分散在0.2%的六偏磷酸鈉水溶液中來獲得。粒徑係使用雷射散射粒徑分佈分析儀(partica LA-950V2,購自Horiba Ltd.,Kyoto,Japan)進行測量。未標記之平均粒徑係取自供應商。
混配
粉末摻合物(CE-2至CE-5及EX-1至EX-3)
將全氟彈性體(FFKM)、填料(氟化物或氧化物)、2phr的TAIC、及1.25phr的DBPH在6吋(15.24cm)開放輥碾磨機上混合。
乳膠摻合物(CE-1 SiO2乳膠)
將全氟彈性體乳膠(FFKM乳膠)及SiO2乳膠在塑膠杯中混合,並將混合物置於-40℃下16達小時。將冷的混合物置於室溫下4小時。然後用粗棉布自水中過濾出固體,將其溫和擠壓,然後放回去離子水中。然後攪拌此混合物以潤洗材料,並重複將固體過濾及潤洗的程序。將最終回收的固體置於130℃的批式烘箱中16小時。
將乾燥的材料、2phr的TAIC、及1.25phr的DBPH用6吋(15.24cm)開放輥碾磨機混合。
模製O形環
將其等在177℃下模製到O形環(AS568標準,AS 568-214)中達12分鐘。然後將其等在200℃下後固化達16小時。測試經加壓固化(press-cured)及經後固化之(post-cured)O形環之電漿耐受性(plasma resistance)及水溶脹性(water swelling),如下所述。結果係呈現於下表3及表4中。
電漿耐受性
將樣本在Mini-Lab Plasma Pod(可購自JLS Designs Ltd,Somerset,UK)中進行測試,並暴露於兩種不同的電漿條件下:(1)O2電漿:30sccm,100W,225mTorr;(2)CF4/O2電漿:3sccm(CF4),27sccm(O2),100W,225mTorr。將1/4大小的O型環在天平中秤重。將其等置於在電漿測試儀之盒上。將其等暴露於電漿氣體中3小時。然後將其等在天平中再次秤重,並根據下列方程式來計算重量損失%:
表2中所呈現的結果代表各樣本之三次重複的平均值。
水溶脹性
將樣本置於廣口玻璃瓶中進行80℃的測試,或將樣本置於耐壓不銹鋼管中進行200℃的測試。將1/2大小的D-214 O型環在天平中秤重。將其等放入廣口玻璃瓶中進行在80℃下測試或放入
耐壓不銹鋼管進行在200℃下測試。如表3所示,將瓶蓋蓋緊並置於80℃或200℃的烘箱中達168小時。將其等取出並再次用天平秤重,並藉由下列方程式來計算溶脹%:
然後將樣本在120℃之烘箱中乾燥16小時。將其等取出並再次用天平秤重,並藉由下列方程式來計算變化%:
本發明中可預見的各種修改與變更對於所屬技術領域中具有通常知識者將為顯而易見且不悖離本發明之範圍與精神。本發明不應限於本申請案中出於說明目的所提出之實施例。
Claims (22)
- 一種可固化氟聚合物組成物,其包含:非晶形氟聚合物;及金屬氟化物之粒子,其中該等粒子實質上未經表面處理,且其中該金屬氟化物之該金屬包含鹼土金屬、第III族過渡金屬、及鑭系元素金屬中之至少一者。
- 如請求項1之可固化氟聚合物組成物,其中該金屬氟化物具有在20℃及環境壓力下小於0.5g/100g之水中溶解度。
- 如前述請求項中任一項之可固化氟聚合物組成物,其中該金屬氟化物之該金屬包含由Ca、Mg、Y、及Yb所組成之群組中之至少一者。
- 如前述請求項中任一項之可固化氟聚合物組成物,其中金屬氟化物之該等粒子具有小於1mm之平均直徑。
- 如前述請求項中任一項之可固化氟聚合物組成物,其中金屬氟化物之該等粒子具有小於500nm之平均直徑。
- 如前述請求項中任一項之可固化氟聚合物組成物,其包含至少0.1wt%及至多30wt%的金屬氟化物之該等粒子。
- 如前述請求項中任一項之可固化氟聚合物組成物,其中該非晶形氟 聚合物係衍生自選自下列中之至少一者的單體:四氟乙烯、六氟丙烯、二氟亞乙烯、丙烯、全氟丙基乙烯基醚、CF2=CF-O-CF2-O-CF3、CF2=CF-O-CF2-O-CF2CF3、CH2=CF-CF3、全氟甲基乙烯基醚、3-甲氧基全氟丙基乙烯基醚、CF2CF-O-CF2-O-CF2CF2CF3、及CF2CF-O-CF2-O-CF2CF2CF2-O-C3F7。
- 如前述請求項中任一項之可固化氟聚合物組成物,其中該非晶形氟聚合物係全氟化的。
- 如請求項8之可固化氟聚合物組成物,其中該非晶形氟聚合物係衍生自全氟化烯烴及全氟化乙烯基醚中之至少一者。
- 如前述請求項中任一項之可固化氟聚合物組成物,其中該非晶形氟聚合物包含含碘及含溴固化部位基團中之至少一者。
- 如前述請求項中任一項之可固化氟聚合物組成物,其中該非晶形氟聚合物包含含氮固化部位基團。
- 如請求項11之可固化氟聚合物組成物,其中該含氮固化部位係選自下列中之至少一者:腈、亞胺酸酯(imidate)、醯胺肟、及脒腙。
- 如前述請求項中任一項之可固化氟聚合物組成物,其進一步包含固化劑。
- 一種製造物品之方法,其包含:提供如前述請求項中任一項之可固化氟聚合物組成物;然後固化該組成物。
- 一種經固化的物品,其包含:氟彈性體;及金屬氟化物之粒子,其中該等粒子實質上未經表面處理,且其中該金屬氟化物之該金屬包含鹼土金屬、第III族過渡金屬粒子、及鑭系元素中之至少一者。
- 如請求項16之經固化的物品,其中該氟彈性體係全氟化的。
- 如請求項16至17中任一項之經固化的物品,其中該金屬氟化物具有在20℃及環境壓力下小於0.5g/100g之水中溶解度。
- 如請求項16至18中任一項之經固化的物品,其中該金屬氟化物之該金屬包含由Ca、Mg、Y、及Yb所組成之群組中之至少一者。
- 如請求項16至19中任一項之經固化的物品,其中金屬氟化物之該等粒子具有小於1mm之平均直徑。
- 如請求項16至19中任一項之經固化的物品,其中金屬氟化物之該等 粒子具有小於500nm之平均直徑。
- 如請求項16至21中任一項之經固化的物品,其中該經固化的物品包含至少0.1wt%及至多30wt%的金屬氟化物之該等粒子。
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US201962892035P | 2019-08-27 | 2019-08-27 | |
US62/892,035 | 2019-08-27 |
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TW202116902A true TW202116902A (zh) | 2021-05-01 |
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EP (1) | EP4021967B1 (zh) |
JP (1) | JP2022546391A (zh) |
KR (1) | KR20220054792A (zh) |
CN (1) | CN114269844A (zh) |
TW (1) | TW202116902A (zh) |
WO (1) | WO2021038424A1 (zh) |
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US3876654A (en) | 1970-12-23 | 1975-04-08 | Du Pont | Fluoroelastomer composition |
US4233421A (en) | 1979-02-26 | 1980-11-11 | Minnesota Mining And Manufacturing Company | Fluoroelastomer composition containing sulfonium curing agents |
US4394489A (en) | 1982-02-25 | 1983-07-19 | E. I. Du Pont De Nemours & Co. | Fluoroelastomer curatives |
US4525539A (en) | 1982-12-02 | 1985-06-25 | E. I. Du Pont De Nemours And Company | Vulcanizable nitrile-containing perfluoroelastomer |
US5086123A (en) | 1984-02-27 | 1992-02-04 | Minnesota Mining And Manufacturing Company | Fluoroelastomer compositions containing fluoroaliphatic sulfonamides as curing agents |
US4912171A (en) | 1988-04-01 | 1990-03-27 | Minnesota Mining And Manufacturing Company | Fluoroelastomer curing process with phosphonium compound |
US4983680A (en) | 1988-05-25 | 1991-01-08 | E. I. Du Pont De Nemours And Company | Cured perfluoroelastomers and their preparation |
JP3259317B2 (ja) | 1992-02-14 | 2002-02-25 | 日本メクトロン株式会社 | パ−オキサイド加硫可能な含フッ素エラストマ−の製造方法 |
US5262490A (en) | 1992-08-24 | 1993-11-16 | Minnesota Mining And Manufacturing Company | Fluoroelastomer composition with organo-onium compounds |
JPH08104789A (ja) | 1994-10-04 | 1996-04-23 | Nippon Mektron Ltd | 含フッ素エラストマー組成物 |
US5591804A (en) | 1995-12-21 | 1997-01-07 | Minnesota Mining And Manufacturing Company | Fluorinated onium salts, curable compositions containing same, and method of curing using same |
CN1083440C (zh) | 1996-07-01 | 2002-04-24 | 大金工业株式会社 | 氟化三聚异氰尿酸三烯丙酯、含有该物质的硫化用弹性体的组合物以及硫化方法 |
US5728773A (en) | 1997-02-21 | 1998-03-17 | Minnesota Mining And Manufacturing Company | Fluoroelastomer composition with organo-onium and blocked-carbonate compounds |
KR20060115401A (ko) * | 2000-04-19 | 2006-11-08 | 다이낑 고오교 가부시키가이샤 | 탈착성이 우수한 불소함유 엘라스토머 성형품 및 그제조방법 |
JP2008001872A (ja) * | 2005-07-14 | 2008-01-10 | Jsr Corp | 硬化性樹脂組成物及び反射防止膜 |
KR102279977B1 (ko) * | 2014-03-06 | 2021-07-22 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 고도 플루오르화 엘라스토머 |
CN106566142A (zh) * | 2016-10-28 | 2017-04-19 | 当涂县金龙机械有限公司 | 一种高韧性三元氟橡胶非金属补偿器及其制备方法 |
WO2018089256A1 (en) * | 2016-11-09 | 2018-05-17 | 3M Innovative Properties Company | Peroxide curable partially fluorinated polymers |
WO2018136332A1 (en) * | 2017-01-18 | 2018-07-26 | 3M Innovative Properties Company | Fluorinated block copolymers derived from cure-site monomers |
KR102240635B1 (ko) * | 2017-10-18 | 2021-04-15 | 다이킨 고교 가부시키가이샤 | 가교성 엘라스토머 조성물 및 불소 고무 성형품 |
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- 2020-08-24 US US17/626,226 patent/US20220315732A1/en active Pending
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EP4021967B1 (en) | 2023-03-01 |
US20220315732A1 (en) | 2022-10-06 |
KR20220054792A (ko) | 2022-05-03 |
JP2022546391A (ja) | 2022-11-04 |
CN114269844A (zh) | 2022-04-01 |
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