TW202039404A - 有機溶劑的製造方法 - Google Patents

有機溶劑的製造方法 Download PDF

Info

Publication number
TW202039404A
TW202039404A TW109106862A TW109106862A TW202039404A TW 202039404 A TW202039404 A TW 202039404A TW 109106862 A TW109106862 A TW 109106862A TW 109106862 A TW109106862 A TW 109106862A TW 202039404 A TW202039404 A TW 202039404A
Authority
TW
Taiwan
Prior art keywords
groups
group
organic solvent
woven fabric
fabric layer
Prior art date
Application number
TW109106862A
Other languages
English (en)
Inventor
大橋智也
吉田豊之郎
佐佐卓
Original Assignee
日商日產化學股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日產化學股份有限公司 filed Critical 日商日產化學股份有限公司
Publication of TW202039404A publication Critical patent/TW202039404A/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D39/00Filtering material for liquid or gaseous fluids
    • B01D39/14Other self-supporting filtering material ; Other filtering material
    • B01D39/16Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
    • B01D39/1607Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous
    • B01D39/1623Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D39/00Filtering material for liquid or gaseous fluids
    • B01D39/14Other self-supporting filtering material ; Other filtering material
    • B01D39/16Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
    • B01D39/1607Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous
    • B01D39/1623Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin
    • B01D39/163Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin sintered or bonded
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D15/00Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08Selective adsorption, e.g. chromatography
    • B01D15/26Selective adsorption, e.g. chromatography characterised by the separation mechanism
    • B01D15/36Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D15/00Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D25/00Filters formed by clamping together several filtering elements or parts of such elements
    • B01D25/02Filters formed by clamping together several filtering elements or parts of such elements in which the elements are pre-formed independent filtering units, e.g. modular systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D29/00Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/11Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D35/00Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/02Filters adapted for location in special places, e.g. pipe-lines, pumps, stop-cocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D39/00Filtering material for liquid or gaseous fluids
    • B01D39/14Other self-supporting filtering material ; Other filtering material
    • B01D39/16Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/22Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/22Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material
    • B01J20/26Synthetic macromolecular compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07BGENERAL METHODS OF ORGANIC CHEMISTRY; APPARATUS THEREFOR
    • C07B63/00Purification; Separation; Stabilisation; Use of additives
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C41/00Preparation of ethers; Preparation of compounds having groups, groups or groups
    • C07C41/01Preparation of ethers
    • C07C41/34Separation; Purification; Stabilisation; Use of additives
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C41/00Preparation of ethers; Preparation of compounds having groups, groups or groups
    • C07C41/01Preparation of ethers
    • C07C41/34Separation; Purification; Stabilisation; Use of additives
    • C07C41/36Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C43/00Ethers; Compounds having groups, groups or groups
    • C07C43/02Ethers
    • C07C43/03Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
    • C07C43/04Saturated ethers
    • C07C43/13Saturated ethers containing hydroxy or O-metal groups
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C67/00Preparation of carboxylic acid esters
    • C07C67/48Separation; Purification; Stabilisation; Use of additives
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C67/00Preparation of carboxylic acid esters
    • C07C67/48Separation; Purification; Stabilisation; Use of additives
    • C07C67/56Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07CACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C69/00Esters of carboxylic acids; Esters of carbonic or haloformic acids
    • C07C69/66Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety
    • C07C69/67Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety of saturated acids
    • C07C69/708Ethers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04Additives and treatments of the filtering material
    • B01D2239/0407Additives and treatments of the filtering material comprising particulate additives, e.g. adsorbents
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04Additives and treatments of the filtering material
    • B01D2239/0414Surface modifiers, e.g. comprising ion exchange groups
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/04Additives and treatments of the filtering material
    • B01D2239/0471Surface coating material
    • B01D2239/0492Surface coating material on fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/06Filter cloth, e.g. knitted, woven non-woven; self-supported material
    • B01D2239/0604Arrangement of the fibres in the filtering material
    • B01D2239/0618Non-woven
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/06Filter cloth, e.g. knitted, woven non-woven; self-supported material
    • B01D2239/0604Arrangement of the fibres in the filtering material
    • B01D2239/0622Melt-blown
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/06Filter cloth, e.g. knitted, woven non-woven; self-supported material
    • B01D2239/065More than one layer present in the filtering material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/12Special parameters characterising the filtering material
    • B01D2239/1233Fibre diameter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2239/00Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/12Special parameters characterising the filtering material
    • B01D2239/1291Other parameters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)

Abstract

本發明為提供一種在半導體裝置製造之微影步驟,減低成為晶圓上之微小缺陷的原因之金屬雜質的有機溶劑的製造方法,或被純化有機溶劑的金屬減低方法。 本發明為一種有機溶劑的製造方法,其係包含通液在過濾器濾芯之步驟之有機溶劑的製造方法,前述過濾器濾芯的特徵為將複數種類之過濾用基布層合或纏繞在中空狀內筒之過濾器濾芯, 前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布, 前述過濾用基布包含不織布層A及不織布層B, 前述不織布層A係以化學鍵結磺酸基作為金屬吸附基的聚烯烴纖維構成, 前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。

Description

有機溶劑的製造方法
本發明係關於在半導體裝置製造之微影步驟,減低成為缺陷的原因之金屬雜質的有機溶劑的製造方法。
在半導體裝置製造之微影步驟中所使用之有機溶劑,尋求有成為晶圓上之微小缺陷(例如1~100nm左右,被稱為瑕疵(Defect)等)之原因的金屬雜質的減低。專利文獻1中揭示有金屬之吸附去除效率高的過濾器。 [先前技術文獻] [專利文獻]
[專利文獻1]日本特開2018-167223號公報
[發明欲解決之課題]
本發明為提供一種在半導體裝置製造之微影步驟,減低成為晶圓上之微小缺陷的原因之金屬雜質的有機溶劑的製造方法及有機溶劑的金屬減低方法。 [用以解決課題之手段]
本發明係包含以下。 [1] 一種有機溶劑的製造方法,其係包含通液在金屬去除用過濾器濾芯之步驟之有機溶劑的製造方法,前述金屬去除用過濾器濾芯的特徵為將複數種類之過濾用基布層合或纏繞在中空狀內筒之過濾器濾芯, 前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布, 前述過濾用基布包含不織布層A及不織布層B, 前述不織布層A係以化學鍵結磺酸基作為金屬吸附基的聚烯烴纖維構成, 前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。 [2] 如[1]所記載之有機溶劑的製造方法,其係進一步包含通液在微粒子去除用過濾器濾芯之步驟。 [3] 如[2]所記載之有機溶劑的製造方法,其中,上述微粒子去除用過濾器的材質係選自由聚乙烯及尼龍所成之群組中之至少一種。 [4] 如[1]~[3]中任一項所記載之有機溶劑的製造方法,其中,上述有機溶劑係作為阻劑下層膜形成用使用之有機溶劑。 [5] 如[4]所記載之有機溶劑的製造方法,其中,上述有機溶劑為選自由丙二醇單甲基醚、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚、γ-丁內酯、乳酸乙酯、乳酸丁酯及環己酮所成之群組中之至少一種。 [6] 一種被純化有機溶劑的金屬減低方法,其係將被純化有機溶劑通液在金屬去除用濾芯過濾器,減低金屬之方法,前述過濾器濾芯的特徵為將複數種類之過濾用基布層合或纏繞在中空狀內筒, 前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布, 前述過濾用基布包含不織布層A及不織布層B, 前述不織布層A係以化學鍵結磺酸基作為金屬吸附基的聚烯烴纖維構成, 前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。 [發明效果]
藉由使用本發明所記載之過濾器濾芯,進行有機溶劑的製造,可製造大幅減低金屬雜質之有機溶劑。藉由使用該有機溶劑,可減低在半導體製造步驟之微影步驟中的各種微小缺陷(瑕疵(Defect))。
<有機溶劑的製造方法>
本發明之有機溶劑的製造方法,係包含將於常溫為溶液狀之被純化有機溶劑通液在下述所詳述之金屬去除用過濾器濾芯之步驟。
上述通液步驟可藉由例如可將被純化有機溶劑作為市售品取得,通液在與使用該有機溶劑之製造設備(製造用容器)直接聯結(入口與出口之2處)之金屬去除用過濾器濾芯來進行。上述通液步驟可為1次或2次以上。上述通液步驟較佳為使用泵之循環過濾。較佳為除了本案的金屬去除用過濾器濾芯之外,並於以直列連結之微粒子去除用過濾器濾芯雙方通液有機溶劑使其循環。循環所需要的時間例如為3~144小時。過濾流量例如為1~1000L/小時。
<被純化有機溶劑> 於本案使用之被純化有機溶劑,雖推薦例如於下述所記載之微影步驟一般所使用之有機溶劑,但並非被限定於此等。
作為前述被純化有機溶劑,例如可列舉乙二醇單甲基醚、乙二醇單乙基醚、甲基溶纖劑乙酸酯、乙基溶纖劑乙酸酯、二乙二醇單甲基醚、二乙二醇單乙基醚、丙二醇、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單甲基醚乙酸酯、丙二醇丙基醚乙酸酯、甲苯、二甲苯、甲基乙基酮、甲基異丁基酮、環戊酮、環己酮、環庚酮、4-甲基-2-戊醇、2-羥基異丁酸甲酯、2-羥基異丁酸乙酯、乙氧基乙酸乙酯、乙酸2-羥基乙基、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸甲酯、丙酮酸甲酯、丙酮酸乙酯、乙酸乙酯、乙酸丁酯、乳酸乙酯、乳酸丁酯、2-庚酮、甲氧基環戊烷、苯甲醚、γ-丁內酯、N-甲基吡咯烷酮、N,N-二甲基甲醯胺及N,N-二甲基乙醯胺。此等之溶劑可單獨或組合2種以上使用。
此等之溶劑當中,較佳為丙二醇單甲基醚、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚、γ-丁內酯、乳酸乙酯、乳酸丁酯及環己酮等。特佳為丙二醇單甲基醚、丙二醇單甲基醚乙酸酯及丙二醇單乙基醚。
<過濾器濾芯> 作為本案之過濾器濾芯,較佳為日本特開2018-167223號公報所記載者。
本發明之過濾器濾芯,其係將複數種類之過濾用基布層合或纏繞在中空狀內筒之過濾器濾芯,其特徵為前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布,前述過濾用基布包含不織布層A及不織布層B,前述不織布層A係以化學鍵結磺酸基作為金屬吸附基的聚烯烴纖維構成,前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基(亞胺基二乙酸基)、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。
本發明,其係將複數種類之過濾用基布層合或纏繞在中空狀內筒之過濾器濾芯,前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布,前述過濾用基布包含不織布層A及不織布層B。而且,前述不織布層A係以化學鍵結碸基作為金屬吸附基的聚烯烴纖維構成,前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基(亞胺基二乙酸基)、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。藉此可效率良好地去除金屬。尚,結合不同種類之過濾用基布,成為1枚之過濾用基布者,亦包含在複數種類之過濾用基布。
在本發明,特佳為不織布層B係以化學鍵結亞胺基二乙醇基的聚烯烴纖維構成。係因為金屬之去除效率高。針對可吸附之金屬,磺酸基主要是吸附Na、Cu、K,亞胺基二乙醇基主要是吸附Cr、Al、Fe。
構成不織布A及B之聚烯烴纖維較佳為長纖維。這是因為長纖維不織布難以產生纖維屑,過濾器性能高。其中較佳為,每一面積的質量(每單位面積重量)為10~100g/m2 之熔噴(Meltblown)長纖維不織布。
構成前述不織布A及B之聚烯烴纖維的單纖維平均直徑較佳為0.2~10μm。若為前述的範圍,期待過濾器性能高。此外,由於可增大表面積(比表面積),亦增加接枝聚合反應的基材表面,故亦可期待提高接枝率。
聚烯烴纖維較佳為選自由聚丙烯、丙烯與乙烯之共聚物、聚乙烯及乙烯與碳數4以上之其他α-烯烴的共聚物所成之群組中之至少一種,特佳為高密度聚乙烯。此等之聚合物為惰性,對藥液安定,可以接枝聚合。
前述過濾器濾芯較佳為包含中空狀內筒及過濾用基布之過濾器濾芯,前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布,前述過濾用基布係藉由纏繞在前述中空狀內筒,而形成層合構造而成之過濾器濾芯。
本發明之過濾器係組裝前述過濾器濾芯之過濾器。例如過濾器濾芯係於內筒纏繞過濾用基布,並收納在容器。將過濾器濾芯組裝在過濾器的容器時,例如以於容器收納過濾器濾芯的狀態組裝在過濾器。尚,為濾芯型過濾器時,藉由僅交換過濾器濾芯,可再生過濾器機能。如交換每個過濾器的容器般,例如如膠囊型過濾器的情況亦包含在本發明。如膠囊型過濾器的情況,相當於過濾器濾芯的部分成為過濾部。
其次,說明於聚烯烴纖維化學鍵結各種官能基之方法。作為該方法,例如有於聚烯烴纖維照射電子束、γ線等之放射線後,與包含GMA等之反應性單體的乳膠液接觸之方法、使聚烯烴纖維與包含反應性單體的乳膠液接觸後,照射電子束、γ線等之放射線,並使反應性單體接枝聚合在聚烯烴纖維之方法等。照射電子束時,若達成通常為1~200kGy,較佳為5~100kGy,更佳為10~50kGy的照射量即可。照射較佳為於氮環境下進行。作為電子束照射裝置,可使用市售者,例如可使用EC250/15/180L(岩崎電氣(股)公司製)、EC300/165/800(岩崎電氣(股)公司製)、EPS300((股)NHVCorporation製)等作為區域光束(Area beam)型電子束照射裝置。
作為前述接枝聚合法,具體而言,例如可列舉液相接枝聚合法,將不織布藉由γ線或電子束等之放射線照射活性化後,浸漬在包含水、界面活性劑及反應性單體的乳膠,並於前述之不織布基材完成接枝聚合。其次,於前述基材所形成之接枝鏈,導入磺酸基、胺基、N-甲基-D-葡萄糖胺基或亞胺基二乙酸基(亞胺基二乙酸基)、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基、乙二胺三乙酸基等之機能性官能基,亦即離子交換基及/或螯合基。在本發明,特別是並未限定在液相接枝聚合法,亦可使用於單體之蒸氣接觸基材,進行聚合之氣相接枝聚合法、將基材浸漬在單體溶液後,從單體溶液取出,並於氣相中進行反應之含浸氣相接枝聚合法等。作為代表性機能性官能基之化學式,於(化1)表示磺酸基(SC基),於(化2)表示亞胺基二乙醇基(IDE基),於(化3)表示亞胺基二乙酸基(IDA基),於(化4)表示N-甲基-D-葡萄糖胺基(NMDG基)。
Figure 02_image001
Figure 02_image003
Figure 02_image005
Figure 02_image007
惟,在(化1)~(化3)之R為下述之聚乙烯(PE)+GMA(化5)或聚丙烯(PP)+GMA(化6)。在(化4)之R為甲基。
Figure 02_image009
Figure 02_image011
惟,在前述(化5)~(化6)之n、m為1以上之整數。
<微粒子去除用過濾器> 本發明之有機溶劑的製造方法,較佳為將上述被純化有機溶劑通液在上述過濾器濾芯後,進而通液微粒子去除用過濾器。微粒子去除用過濾器可使用本身公知者。作為微粒子去除用過濾器的材質,較佳為選自由聚乙烯及尼龍所成之群組中之至少一種。
微粒子去除用過濾器的孔徑通常為30nm以下,較佳為例如為0.1nm~30nm,例如為0.1nm~20nm,或例如為1nm~10nm。
<金屬減低方法> 本案之金屬減低方法,為一種被純化有機溶劑的金屬減低方法,其係將被純化有機溶劑通液在金屬去除用濾芯過濾器,減低金屬之方法,前述過濾器濾芯的特徵為將複數種類之過濾用基布層合或纏繞在中空狀內筒, 前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布, 前述過濾用基布包含不織布層A及不織布層B, 前述不織布層A係以化學鍵結磺酸基作為金屬吸附基的聚烯烴纖維構成, 前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。
藉由經由此步驟,可減低源自被純化有機溶劑所包含之原料或溶劑的金屬雜質,並減少於微影步驟之缺陷。 各種金屬雜質(例如Na、Cu、Cr、Al、Fe等)藉由上述金屬減低方法,可減低至例如0.5ppb以下、例如0.4ppb以下。 上述金屬雜質含量係以例如實施例所記載之方法求出。 [實施例]
於以下雖參照實施例等更加詳細說明本發明,但本發明並非因以下之實施例等而受到任何限制者。
<實施例1> 作為被純化有機溶劑,將丙二醇單甲基醚(PM-P:KH Neochem股份有限公司製)20L使用日本特開2018-167223所記載之濾芯過濾器(10inch)1個(倉敷纖維加工股份有限公司製),以每分鐘3L的流量實施100分鐘過濾。將過濾後之有機溶劑的金屬含量以ICP-MS(Agilent8800:Agilent Technologies股份有限公司製)測定。
<比較例1> 並未過濾實施例1所使用之被純化有機溶劑,而是以同樣的方法測定金屬含量。
<比較例2> 除了將實施例1之濾芯過濾器變更為濾芯過濾器(尼龍過濾器ABD1ANM3EH1(20nm尼龍過濾器):日本Pall股份有限公司製)之外,其他以與實施例1相同的方法實施過濾,並以同樣的方法測定金屬含量。
<比較例3> 除了將實施例1之濾芯過濾器變更為強酸性離子交換樹脂(XSC-1115-H:室町Chemicals股份有限公司製)20kg,進行4小時離子交換之外,其他以與實施例1相同的方法實施過濾,並以同樣的方法測定金屬含量。
<有機溶劑中的金屬濃度> 將測定實施實施例1之處理方法後的金屬濃度的結果示於表1。
Figure 02_image013
由表1之結果,實施例1顯示有效果地減低金屬濃度。
<實施例2> 作為被純化有機溶劑,將丙二醇單甲基醚乙酸酯(EL-PGMEA:東洋合成工業股份有限公司製)20L使用日本特開2018-167223所記載之濾芯過濾器(10inch)1個(倉敷纖維加工股份有限公司製),以每分鐘2L的流量實施50分鐘過濾。將過濾後之有機溶劑的金屬含量以ICP-MS(Agilent8800:Agilent Technologies股份有限公司製)測定。
<比較例4> 並未過濾實施例1所使用之被純化有機溶劑,而是以同樣的方法測定金屬含量。
Figure 02_image015
由表2之結果,實施例2顯示有效果地減低金屬濃度。 [產業上之可利用性]
根據本發明,可提供特別是減低金屬雜質的量之有機溶劑。

Claims (6)

  1. 一種有機溶劑的製造方法,其係包含通液在金屬去除用過濾器濾芯之步驟之有機溶劑的製造方法,前述金屬去除用過濾器濾芯的特徵為將複數種類之過濾用基布層合或纏繞在中空狀內筒之過濾器濾芯, 前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布, 前述過濾用基布包含不織布層A及不織布層B, 前述不織布層A係以化學鍵結磺酸基作為金屬吸附基的聚烯烴纖維構成, 前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。
  2. 如請求項1所記載之有機溶劑的製造方法,其係進一步包含通液在微粒子去除用過濾器濾芯之步驟。
  3. 如請求項2所記載之有機溶劑的製造方法,其中,上述微粒子去除用過濾器的材質係選自由聚乙烯及尼龍所成之群組中之至少一種。
  4. 如請求項1~3中任一項所記載之有機溶劑的製造方法,其中,上述有機溶劑係作為阻劑下層膜形成用使用之有機溶劑。
  5. 如請求項4所記載之有機溶劑的製造方法,其中,上述有機溶劑為選自由丙二醇單甲基醚、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚、γ-丁內酯、乳酸乙酯、乳酸丁酯及環己酮所成之群組中之至少一種。
  6. 一種被純化有機溶劑的金屬減低方法,其係將被純化有機溶劑通液在金屬去除用濾芯過濾器,減低金屬之方法,前述過濾器濾芯的特徵為將複數種類之過濾用基布層合或纏繞在中空狀內筒, 前述過濾用基布係於聚烯烴纖維化學鍵結金屬吸附基之不織布, 前述過濾用基布包含不織布層A及不織布層B, 前述不織布層A係以化學鍵結磺酸基作為金屬吸附基的聚烯烴纖維構成, 前述不織布層B係以化學鍵結選自由胺基、N-甲基-D-葡萄糖胺基、亞胺基二乙酸基、亞胺基二乙醇基、醯胺肟基、磷酸基、羧酸基及乙二胺三乙酸基所成之群組中之至少一種作為金屬吸附基的聚烯烴纖維構成。
TW109106862A 2019-03-11 2020-03-03 有機溶劑的製造方法 TW202039404A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-044162 2019-03-11
JP2019044162 2019-03-11

Publications (1)

Publication Number Publication Date
TW202039404A true TW202039404A (zh) 2020-11-01

Family

ID=72426386

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109106862A TW202039404A (zh) 2019-03-11 2020-03-03 有機溶劑的製造方法

Country Status (7)

Country Link
US (1) US20220096978A1 (zh)
JP (1) JPWO2020184306A1 (zh)
KR (1) KR20210134895A (zh)
CN (1) CN113574043A (zh)
FI (2) FI20215894A1 (zh)
TW (1) TW202039404A (zh)
WO (1) WO2020184306A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113226511A (zh) * 2018-12-20 2021-08-06 日产化学株式会社 光刻用涂布膜形成用组合物的制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5182793B2 (ja) * 2007-10-12 2013-04-17 独立行政法人日本原子力研究開発機構 液体濾過用カートリッジフィルタ
JP5896486B2 (ja) * 2014-02-26 2016-03-30 日本フイルコン株式会社 不織布状金属吸着材およびその製造方法
JP2016073922A (ja) * 2014-10-07 2016-05-12 信越化学工業株式会社 有機溶剤の精製装置
JP6737891B2 (ja) * 2016-09-15 2020-08-12 富士フイルム株式会社 有機溶剤の精製方法および有機溶剤の精製装置
JP6912244B2 (ja) * 2017-03-30 2021-08-04 倉敷繊維加工株式会社 フィルターカートリッジ及びフィルター

Also Published As

Publication number Publication date
JPWO2020184306A1 (zh) 2020-09-17
CN113574043A (zh) 2021-10-29
US20220096978A1 (en) 2022-03-31
FI20215894A1 (fi) 2021-08-25
WO2020184306A1 (ja) 2020-09-17
KR20210134895A (ko) 2021-11-11
FI20236373A1 (fi) 2023-12-14

Similar Documents

Publication Publication Date Title
US20070007196A1 (en) Filter cartridge for fluid for treating surface of electronic device substrate
KR102646311B1 (ko) 리간드-개질된 필터 및 액체 조성물로부터 금속을 감소시키는 방법
JP6912244B2 (ja) フィルターカートリッジ及びフィルター
JP2013061426A (ja) フォトレジスト膜形成用樹脂溶液の不純物除去方法、不純物除去用濾過部材及び不純物除去用濾過装置
JP7446498B2 (ja) 薬液及び薬液収容体
JP2003251118A (ja) 高容量金属捕捉能を有するフィルターカートリッジ
TW202039404A (zh) 有機溶劑的製造方法
JP6089179B2 (ja) セシウム除去用フィルターカートリッジの製造方法
KR20020042653A (ko) 중성 pH 용액용 여과 및 정제 시스템
US20050218068A1 (en) Filter cartridge
KR102393133B1 (ko) 웨트 세정 장치 및 웨트 세정 방법
JP2010234353A (ja) 水処理方法及び水処理部材
JPH0780262A (ja) 逆浸透膜および逆浸透膜分離素子の処理方法
JP2020082034A (ja) 複合半透膜
US20210260537A1 (en) Ligand-modified filter and methods for reducing metals from liquid compositions
US20220362720A1 (en) Porous poly (cyclic olefin) membranes
JP2024068470A (ja) 感光性樹脂組成物の精製方法
JP2002311600A (ja) 微粒子数の低減されたフォトレジスト液製品の製造方法
JP2020082048A (ja) 疎水性アニオン交換繊維及び該繊維を用いたニッケル溶液の精製方法
JP2013223847A (ja) 水処理方法および水処理装置
JP2020104050A (ja) ホウ素吸着カートリッジフィルタ及びこれを用いたホウ素処理方法