CN113574043A - 有机溶剂的制造方法 - Google Patents
有机溶剂的制造方法 Download PDFInfo
- Publication number
- CN113574043A CN113574043A CN202080019703.2A CN202080019703A CN113574043A CN 113574043 A CN113574043 A CN 113574043A CN 202080019703 A CN202080019703 A CN 202080019703A CN 113574043 A CN113574043 A CN 113574043A
- Authority
- CN
- China
- Prior art keywords
- organic solvent
- metal
- filter cartridge
- groups
- polyolefin fibers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003960 organic solvent Substances 0.000 title claims abstract description 52
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 229910052751 metal Inorganic materials 0.000 claims abstract description 60
- 239000002184 metal Substances 0.000 claims abstract description 60
- 239000000835 fiber Substances 0.000 claims abstract description 40
- 239000004745 nonwoven fabric Substances 0.000 claims abstract description 38
- 229920000098 polyolefin Polymers 0.000 claims abstract description 34
- 239000004744 fabric Substances 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000001914 filtration Methods 0.000 claims abstract description 20
- NBZBKCUXIYYUSX-UHFFFAOYSA-N iminodiacetic acid Chemical compound OC(=O)CNCC(O)=O NBZBKCUXIYYUSX-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000001179 sorption measurement Methods 0.000 claims abstract description 15
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 12
- 125000000542 sulfonic acid group Chemical group 0.000 claims abstract description 11
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims abstract description 10
- SFZULDYEOVSIKM-UHFFFAOYSA-N chembl321317 Chemical compound C1=CC(C(=N)NO)=CC=C1C1=CC=C(C=2C=CC(=CC=2)C(=N)NO)O1 SFZULDYEOVSIKM-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 150000002739 metals Chemical class 0.000 claims abstract description 8
- WWMUAXSIVIVGRV-BDVNFPICSA-N (2R,3R,4R,5S)-6-[amino(methyl)amino]hexane-1,2,3,4,5-pentol Chemical compound CN(N)C[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO WWMUAXSIVIVGRV-BDVNFPICSA-N 0.000 claims abstract 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract 3
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims abstract 3
- OUDSFQBUEBFSPS-UHFFFAOYSA-N ethylenediaminetriacetic acid Chemical compound OC(=O)CNCCN(CC(O)=O)CC(O)=O OUDSFQBUEBFSPS-UHFFFAOYSA-N 0.000 claims abstract 3
- -1 polyethylene Polymers 0.000 claims description 12
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims description 8
- 239000004698 Polyethylene Substances 0.000 claims description 8
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims description 8
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 claims description 8
- 229920000573 polyethylene Polymers 0.000 claims description 8
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims description 6
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 claims description 5
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004677 Nylon Substances 0.000 claims description 5
- 229920001778 nylon Polymers 0.000 claims description 5
- MRABAEUHTLLEML-UHFFFAOYSA-N Butyl lactate Chemical compound CCCCOC(=O)C(C)O MRABAEUHTLLEML-UHFFFAOYSA-N 0.000 claims description 4
- 239000001191 butyl (2R)-2-hydroxypropanoate Substances 0.000 claims description 4
- 229940116333 ethyl lactate Drugs 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 9
- 230000007547 defect Effects 0.000 abstract description 8
- 238000000206 photolithography Methods 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 230000000052 comparative effect Effects 0.000 description 8
- MBBZMMPHUWSWHV-BDVNFPICSA-N N-methylglucamine Chemical group CNC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO MBBZMMPHUWSWHV-BDVNFPICSA-N 0.000 description 7
- 238000010559 graft polymerization reaction Methods 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- SLSLCLVPVDMEHA-UHFFFAOYSA-N acetic acid;ethane-1,2-diamine Chemical group CC(O)=O.CC(O)=O.CC(O)=O.NCCN SLSLCLVPVDMEHA-UHFFFAOYSA-N 0.000 description 6
- 125000003277 amino group Chemical group 0.000 description 6
- 125000002843 carboxylic acid group Chemical group 0.000 description 6
- 239000004743 Polypropylene Substances 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229920001155 polypropylene Polymers 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000000839 emulsion Substances 0.000 description 3
- 125000000524 functional group Chemical group 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 2
- 239000002775 capsule Substances 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- 230000005251 gamma ray Effects 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- DMFAHCVITRDZQB-UHFFFAOYSA-N 1-propoxypropan-2-yl acetate Chemical compound CCCOCC(C)OC(C)=O DMFAHCVITRDZQB-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- HXDLWJWIAHWIKI-UHFFFAOYSA-N 2-hydroxyethyl acetate Chemical compound CC(=O)OCCO HXDLWJWIAHWIKI-UHFFFAOYSA-N 0.000 description 1
- WVYWICLMDOOCFB-UHFFFAOYSA-N 4-methyl-2-pentanol Chemical compound CC(C)CC(C)O WVYWICLMDOOCFB-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- XYVQFUJDGOBPQI-UHFFFAOYSA-N Methyl-2-hydoxyisobutyric acid Chemical compound COC(=O)C(C)(C)O XYVQFUJDGOBPQI-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- CGZZMOTZOONQIA-UHFFFAOYSA-N cycloheptanone Chemical compound O=C1CCCCCC1 CGZZMOTZOONQIA-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- CKSRFHWWBKRUKA-UHFFFAOYSA-N ethyl 2-ethoxyacetate Chemical compound CCOCC(=O)OCC CKSRFHWWBKRUKA-UHFFFAOYSA-N 0.000 description 1
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229920001903 high density polyethylene Polymers 0.000 description 1
- 239000004700 high-density polyethylene Substances 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 1
- SKTCDJAMAYNROS-UHFFFAOYSA-N methoxycyclopentane Chemical compound COC1CCCC1 SKTCDJAMAYNROS-UHFFFAOYSA-N 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- CWKLZLBVOJRSOM-UHFFFAOYSA-N methyl pyruvate Chemical compound COC(=O)C(C)=O CWKLZLBVOJRSOM-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920005606 polypropylene copolymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
- B01D39/1607—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous
- B01D39/1623—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
- B01D15/08—Selective adsorption, e.g. chromatography
- B01D15/26—Selective adsorption, e.g. chromatography characterised by the separation mechanism
- B01D15/36—Selective adsorption, e.g. chromatography characterised by the separation mechanism involving ionic interaction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
- B01D39/1607—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous
- B01D39/1623—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin
- B01D39/163—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres the material being fibrous of synthetic origin sintered or bonded
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D25/00—Filters formed by clamping together several filtering elements or parts of such elements
- B01D25/02—Filters formed by clamping together several filtering elements or parts of such elements in which the elements are pre-formed independent filtering units, e.g. modular systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/11—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
- B01D35/02—Filters adapted for location in special places, e.g. pipe-lines, pumps, stop-cocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/22—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/22—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising organic material
- B01J20/26—Synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07B—GENERAL METHODS OF ORGANIC CHEMISTRY; APPARATUS THEREFOR
- C07B63/00—Purification; Separation; Stabilisation; Use of additives
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C41/00—Preparation of ethers; Preparation of compounds having groups, groups or groups
- C07C41/01—Preparation of ethers
- C07C41/34—Separation; Purification; Stabilisation; Use of additives
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C41/00—Preparation of ethers; Preparation of compounds having groups, groups or groups
- C07C41/01—Preparation of ethers
- C07C41/34—Separation; Purification; Stabilisation; Use of additives
- C07C41/36—Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C43/00—Ethers; Compounds having groups, groups or groups
- C07C43/02—Ethers
- C07C43/03—Ethers having all ether-oxygen atoms bound to acyclic carbon atoms
- C07C43/04—Saturated ethers
- C07C43/13—Saturated ethers containing hydroxy or O-metal groups
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/48—Separation; Purification; Stabilisation; Use of additives
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/48—Separation; Purification; Stabilisation; Use of additives
- C07C67/56—Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
- C07C69/66—Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety
- C07C69/67—Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety of saturated acids
- C07C69/708—Ethers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/04—Additives and treatments of the filtering material
- B01D2239/0407—Additives and treatments of the filtering material comprising particulate additives, e.g. adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/04—Additives and treatments of the filtering material
- B01D2239/0414—Surface modifiers, e.g. comprising ion exchange groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/04—Additives and treatments of the filtering material
- B01D2239/0471—Surface coating material
- B01D2239/0492—Surface coating material on fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
- B01D2239/0604—Arrangement of the fibres in the filtering material
- B01D2239/0618—Non-woven
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
- B01D2239/0604—Arrangement of the fibres in the filtering material
- B01D2239/0622—Melt-blown
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
- B01D2239/065—More than one layer present in the filtering material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/12—Special parameters characterising the filtering material
- B01D2239/1233—Fibre diameter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/12—Special parameters characterising the filtering material
- B01D2239/1291—Other parameters
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Abstract
提供在半导体装置制造中的光刻工序中,成为晶片上的微小缺陷的原因的、金属杂质被减少了的有机溶剂的制造方法、或减少被精制有机溶剂中金属的方法。一种有机溶剂的制造方法,包含向金属除去用过滤筒进行通液的工序,所述金属除去用过滤筒是在中空状内筒层叠或卷绕有多个种类的过滤用基布的过滤筒,所述金属除去用过滤筒的特征在于,所述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,所述过滤用基布包含无纺布层A和无纺布层B,所述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,所述无纺布层B由化学结合有选自氨基、N‑甲基‑D‑葡糖胺基、亚氨基二乙酸基、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。
Description
技术领域
涉及在半导体装置制造中的光刻工序中,成为缺陷的原因的金属杂质被减少了的有机溶剂的制造方法。
背景技术
在半导体装置制造中的光刻工序中使用的有机溶剂要求成为晶片上的微小缺陷(例如1~100nm左右,被称为defect等)的原因的金属杂质的减少。在专利文献1中公开了金属的吸附除去效率高的过滤器。
现有技术文献
专利文献
专利文献1:日本特开2018-167223号公报
发明内容
发明所要解决的课题
提供在半导体装置制造中的光刻工序中,成为晶片上的微小缺陷的原因的金属杂质被减少了的有机溶剂的制造方法和有机溶剂的金属减少方法。
用于解决课题的方法
本发明包含以下方案。
[1]一种有机溶剂的制造方法,其包含向金属除去用过滤筒进行通液的工序,上述金属除去用过滤筒是在中空状内筒叠层或卷绕有多个种类的过滤用基布的过滤筒,该向金属除去用过滤筒的特征在于,
上述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,
上述过滤用基布包含无纺布层A和无纺布层B,
上述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,
上述无纺布层B由化学结合有选自氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。
[2]根据[1]所述的有机溶剂的制造方法,其还包含向微粒除去用过滤筒进行通液的工序。
[3]根据[2]所述的有机溶剂的制造方法,上述微粒除去用过滤筒的材质为选自聚乙烯和尼龙中的至少一种。
[4]根据[1]~[3]中任一项所述的有机溶剂的制造方法,上述有机溶剂为用于形成抗蚀剂下层膜的有机溶剂。
[5]根据[4]所述的有机溶剂的制造方法,上述有机溶剂为选自丙二醇单甲醚、丙二醇单甲醚乙酸酯、丙二醇单乙醚、γ-丁内酯、乳酸乙酯、乳酸丁酯、和环己酮中的至少一种。
[6]一种减少被精制有机溶剂中金属的方法,是将被精制有机溶剂向金属除去用过滤筒进行通液减少金属的方法,
上述过滤筒是在中空状内筒得层或卷绕有多个种类的过滤用基布的过滤筒,
上述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,
上述过滤用基布包含无纺布层A和无纺布层B,
上述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,
上述无纺布层B由化学结合有选自氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。
发明的效果
通过使用本发明记载的过滤筒进行有机溶剂的制造,可以制造金属杂质被大幅减少了的有机溶剂。通过使用该有机溶剂可以使半导体制造工序中的光刻工序中的各种微小缺陷(defect)减少。
具体实施方式
<有机溶剂的制造方法>
本发明的有机溶剂的制造方法包含将在常温下为溶液状的被精制有机溶剂向以下详述的金属除去用过滤筒进行通液的工序。
上述通液工序,例如可以购买市售品的被精制有机溶剂,将其向与使用该有机溶剂的制造设备(制造用容器)直接连结(入口和出口2处)的金属除去用过滤筒进行通液来进行。上述通液工序可以为1次或2次以上。上述通液工序优选为使用了泵的循环过滤。优选向除了本申请的金属除去用过滤筒以外还串联连接了的微粒除去用过滤筒这两者通液有机溶剂使其循环。循环所需要的时间例如为3~144小时。过滤流量例如为1~1000L/小时。
<被精制有机溶剂>
在本申请中使用的被精制有机溶剂推荐为例如下述记载的通常在光刻工序中使用的有机溶剂,但不限定于此。
作为上述被精制有机溶剂,可举出例如,乙二醇单甲醚、乙二醇单乙醚、甲基溶纤剂乙酸酯、乙基溶纤剂乙酸酯、二甘醇单甲醚、二甘醇单乙醚、丙二醇、丙二醇单甲醚、丙二醇单乙醚、丙二醇单甲醚乙酸酯、丙二醇丙醚乙酸酯、甲苯、二甲苯、甲基乙基酮、甲基异丁基酮、环戊酮、环己酮、环庚酮、4-甲基-2-戊醇、2-羟基异丁酸甲酯、2-羟基异丁酸乙酯、乙氧基乙酸乙酯、乙酸2-羟基乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸甲酯、丙酮酸甲酯、丙酮酸乙酯、乙酸乙酯、乙酸丁酯、乳酸乙酯、乳酸丁酯、2-庚酮、甲氧基环戊烷、茴香醚、γ-丁内酯、N-甲基吡咯烷酮、N,N-二甲基甲酰胺、和N,N-二甲基乙酰胺。这些溶剂可以单独使用或组合使用2种以上。
在这些溶剂中优选为丙二醇单甲醚、丙二醇单甲醚乙酸酯、丙二醇单乙醚、γ-丁内酯、乳酸乙酯、乳酸丁酯、和环己酮等。特别优选为丙二醇单甲醚、丙二醇单甲醚乙酸酯和丙二醇单乙醚。
<过滤筒>
作为本申请的过滤筒,优选为日本特开2018-167223号公报所记载的过滤筒。
本发明的过滤筒,其特征在于,是将多个种类的过滤用基布层叠或卷绕于中空状内筒的过滤筒,上述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,上述过滤用基布包含无纺布层A和无纺布层B,上述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,上述无纺布层B由化学结合有选自氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基(亚氨基二乙酸基)、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。
本发明是将多个种类的过滤用基布层叠或卷绕于中空状内筒的过滤筒,上述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,上述过滤用基布包含无纺布层A和无纺布层B。而且,上述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,上述无纺布层B由化学结合有选自氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基(亚氨基二乙酸基)、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。由此可以高效率地除去金属。另外,将不同种类的过滤用基布结合而制成1片过滤用基布的情况也包括在多个种类的过滤用基布的含义内。
在本发明中,无纺布层B特别优选由化学结合有亚氨基二乙醇基的聚烯烃纤维构成。因为金属的除去效率高。关于可以吸附的金属,磺酸基主要吸附Na、Cu、K,亚氨基二乙醇基主要吸附Cr、Al、Fe。
构成无纺布A和B的聚烯烃纤维优选为长纤维。因为长纤维无纺布不易产生纤维屑,过滤器性能高。其中优选为单位面积的质量(目付)为10~100g/m2的熔喷长纤维无纺布。
构成上述无纺布A和B的聚烯烃纤维的单纤维平均直径优选为0.2~10μm。如果为上述范围,则可期待过滤器性能高。此外,可以增大表面积(比表面积),接枝聚合反应的基材表面也增加,因此也可以期待提高接枝率。
聚烯烃纤维优选为选自聚丙烯、丙烯与乙烯的共聚物、聚乙烯、和乙烯与碳原子数4以上的其它α-烯烃的共聚物中的至少一种,特别优选为高密度聚乙烯。这些聚合物为非活性,对化学溶液是稳定的,能够进行接枝聚合。
上述过滤筒优选为下述过滤筒:是包含中空状内筒和过滤用基布的过滤筒,上述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,上述过滤用基布通过卷绕于上述中空状内筒从而形成叠层结构。
本发明的过滤器为并入了上述过滤筒的过滤器。例如,过滤筒在内筒卷绕过滤用基布,收纳于容器。在将过滤筒并入到过滤器的容器时,例如,在容器收纳了过滤筒的状态下并入到过滤器。另外,在筒型过滤器的情况下,通过仅交换过滤筒,可以将过滤器功能再生。连过滤器的容器一起交换那样的、例如胶囊型过滤器那样的情况也包含于本发明。在胶囊型过滤器那样的情况下,相当于过滤筒的部分成为过滤部。
接下来对使各种官能团与聚烯烃纤维化学结合的方法进行说明。作为该方法,具有例如,向聚烯烃纤维照射了电子射线、γ射线等放射线后使其与包含GMA等反应性单体的乳液接触的方法;在使聚烯烃纤维与包含反应性单体的乳液接触后照射电子射线、γ射线等放射线,使反应性单体与聚烯烃纤维接枝聚合的方法等。在照射电子射线的情况下,只要通常达到1~200kGy,优选为5~100kGy,更优选为10~50kGy的照射量即可。照射优选在氮气气氛下进行。作为电子射线照射装置,可以使用市售品,例如,作为区域束型电子射线照射装置,可以使用EC250/15/180L(岩崎电气(株)社制)、EC300/165/800(岩崎电气(株)社制)、EPS300((株)NHVコーポレーション制)等。
作为上述接枝聚合法,具体而言,可举出例如,液相接枝聚合法,将无纺布通过γ射线、电子射线等放射线照射而活化后,浸渍在包含水、表面活性剂和反应性单体的乳液中,使上述无纺布基材完成接枝聚合。接下来,向形成于上述基材的接枝链导入磺酸基、氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基(亚氨基二乙酸基)、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基、乙二胺三乙酸基等功能性官能团、即离子交换基和/或螯合基。在本发明中,不特别限定于液相接枝聚合法,也可以使用使基材与单体的蒸气接触而进行聚合的气相接枝聚合法、在将基材浸渍于单体溶液后从单体溶液取出而在气相中使反应进行的含浸气相接枝聚合法等。作为代表性的功能性官能团的化学式,在(化1)中显示磺酸基(SC基),在(化2)中显示亚氨基二乙醇基(IDE基),在(化3)中显示亚氨基二乙酸基(IDA基),在(化4)中显示N-甲基-D-葡糖胺基(NMDG基)。
其中,(化1)~(化3)中的R为下述聚乙烯(PE)+GMA(化5)或聚丙烯(PP)+GMA(化6)。(化4)中的R为甲基。
(化5)聚乙烯(PE)+GMA
(化6)聚丙烯(PP)+GMA
其中,上述(化5)~(化6)中的n、m为1以上的整数。
<微粒除去用过滤器>
本发明的有机溶剂的制造方法优选在将上述被精制有机溶剂向上述过滤筒通液后,进一步向微粒除去用过滤器通液。微粒除去用过滤器可以使用本身公知的物质。作为微粒除去用过滤器的材质,优选为选自聚乙烯和尼龙中的至少一种。
微粒除去用过滤器的孔径通常为30nm以下,优选为例如0.1nm~30nm、例如0.1nm~20nm、或例如1nm~10nm。
<金属减少方法>
本申请的减少金属的方法是用过滤筒对上述记载的被精制有机溶剂进行过滤而减少金属的方法,
上述过滤筒是在中空状内筒层叠或卷绕有多个种类的过滤用基布的过滤筒,
上述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,
上述过滤用基布包含无纺布层A和无纺布层B,
上述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,
上述无纺布层B由化学结合有选自氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基(亚氨基二乙酸基)、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。
通过经过该工序,从而可以减少包含于被精制有机溶剂的、来源于原料或溶剂的金属杂质,使光刻工序中的缺陷少。
各种金属杂质(例如Na、Cu、Cr、Al、Fe等)通过上述金属减少方法,可以减少到例如0.5ppb以下、例如0.4ppb以下。
上述金属杂质含量通过例如实施例所记载的方法而求出。
实施例
以下参照实施例等进一步详细地说明本发明,但本发明不受以下实施例等任何限制。
<实施例1>
将作为被精制有机溶剂的丙二醇单甲醚(PM-P:KHネオケム株式会社制)20L使用日本特开2018-167223所记载的筒式过滤器(10inch)1根(仓敷纤维加工株式会社制)以每分钟3L的流量实施了100分钟过滤。通过ICP-MS(Agilent8800:アジレントテクノロジー株式会社制)测定了过滤后的有机溶剂的金属含量。
<比较例1>
不将实施例1所使用的被精制有机溶剂过滤,通过同样的方法测定了金属含量。
<比较例2>
将实施例1的筒式过滤器改变为筒式过滤器(尼龙过滤器ABD1ANM3EH1(20nm尼龙过滤器):日本ポール株式会社制),除此以外,通过与实施例1同样的方法实施过滤,通过同样的方法测定了金属含量。
<比较例3>
将实施例1的筒式过滤器改变为强酸性离子交换树脂(XSC-1115-H:室町ケミカル株式会社制)20kg而进行了4小时离子交换,除此以外,通过与实施例1同样的方法实施过滤,通过同样的方法测定了金属含量。
<有机溶剂中的金属浓度>
将实施了实施例1的处理方法后的金属浓度的测定结果示于表1中。
[表1]
表1金属浓度测定结果(ppb)
实施例1 | 0.1 |
比较例1 | 0.4 |
比较例2 | 0.2 |
比较例3 | 1.3 |
由表1的结果显示出,实施例1对于金属浓度减少是有效果的。
<实施例2>
将作为被精制有机溶剂的丙二醇单甲醚乙酸酯(EL-PGMEA:东洋合成工业株式会社制)20L使用日本特开2018-167223所记载的筒式过滤器(10inch)1根(仓敷纤维加工株式会社制)以每分钟2L的流量实施了50分钟过滤。通过ICP-MS(Agilent8800:アジレントテクノロジー株式会社制)测定了过滤后的溶液的金属含量。
<比较例4>
不将实施例1所使用的溶剂过滤,通过同样的方法测定了金属含量。
[表2]
表2金属浓度测定结果(ppb)
实施例2 | 0.0 |
比较例4 | 3.9 |
由表2的结果显示出,实施例2对于金属浓度减少是有效果的。
产业可利用性根据本发明,可以提供特别是金属杂质的量被减少了的有机溶剂。
Claims (6)
1.一种有机溶剂的制造方法,包含向金属除去用过滤筒进行通液的工序,所述金属除去用过滤筒是在中空状内筒层叠或卷绕有多个种类的过滤用基布的过滤筒,所述金属除去用过滤筒的特征在于,
所述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,
所述过滤用基布包含无纺布层A和无纺布层B,
所述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,
所述无纺布层B由化学结合有选自氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。
2.根据权利要求1所述的有机溶剂的制造方法,其进一步包含向微粒除去用过滤筒进行通液的工序。
3.根据权利要求2所述的有机溶剂的制造方法,所述微粒除去用过滤筒的材质为选自聚乙烯和尼龙中的至少一种。
4.根据权利要求1~3中任一项所述的有机溶剂的制造方法,所述有机溶剂为用于形成抗蚀剂下层膜的有机溶剂。
5.根据权利要求4所述的有机溶剂的制造方法,所述有机溶剂为选自丙二醇单甲醚、丙二醇单甲醚乙酸酯、丙二醇单乙醚、γ-丁内酯、乳酸乙酯、乳酸丁酯和环己酮中的至少一种。
6.一种减少被精制有机溶剂中金属的方法,是将被精制有机溶剂向金属除去用过滤筒进行通液而减少金属的方法,
所述过滤筒是在中空状内筒层叠或卷绕有多个种类的过滤用基布的过滤筒,
所述过滤用基布为在聚烯烃纤维上化学结合有金属吸附基团的无纺布,
所述过滤用基布包含无纺布层A和无纺布层B,
所述无纺布层A由化学结合有磺酸基作为金属吸附基团的聚烯烃纤维构成,
所述无纺布层B由化学结合有选自氨基、N-甲基-D-葡糖胺基、亚氨基二乙酸基、亚氨基二乙醇基、偕胺肟基、磷酸基、羧酸基和乙二胺三乙酸基中的至少一种作为金属吸附基团的聚烯烃纤维构成。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019-044162 | 2019-03-11 | ||
JP2019044162 | 2019-03-11 | ||
PCT/JP2020/008972 WO2020184306A1 (ja) | 2019-03-11 | 2020-03-03 | 有機溶媒の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN113574043A true CN113574043A (zh) | 2021-10-29 |
Family
ID=72426386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202080019703.2A Pending CN113574043A (zh) | 2019-03-11 | 2020-03-03 | 有机溶剂的制造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20220096978A1 (zh) |
JP (1) | JPWO2020184306A1 (zh) |
KR (1) | KR20210134895A (zh) |
CN (1) | CN113574043A (zh) |
FI (2) | FI20215894A1 (zh) |
TW (1) | TW202039404A (zh) |
WO (1) | WO2020184306A1 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2020130005A1 (ja) * | 2018-12-20 | 2021-11-04 | 日産化学株式会社 | リソグラフィー用塗布膜形成組成物の製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009090259A (ja) * | 2007-10-12 | 2009-04-30 | Japan Atomic Energy Agency | 液体濾過用カートリッジフィルタ |
JP2016073922A (ja) * | 2014-10-07 | 2016-05-12 | 信越化学工業株式会社 | 有機溶剤の精製装置 |
CN105960280A (zh) * | 2014-02-26 | 2016-09-21 | 日本辉尔康株式会社 | 无纺布状金属吸附材料及其制造方法 |
WO2018051716A1 (ja) * | 2016-09-15 | 2018-03-22 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
JP2018167223A (ja) * | 2017-03-30 | 2018-11-01 | 倉敷繊維加工株式会社 | フィルターカートリッジ及びフィルター |
-
2020
- 2020-03-03 KR KR1020217023343A patent/KR20210134895A/ko unknown
- 2020-03-03 CN CN202080019703.2A patent/CN113574043A/zh active Pending
- 2020-03-03 WO PCT/JP2020/008972 patent/WO2020184306A1/ja active Application Filing
- 2020-03-03 TW TW109106862A patent/TW202039404A/zh unknown
- 2020-03-03 JP JP2021504958A patent/JPWO2020184306A1/ja active Pending
- 2020-03-03 FI FI20215894A patent/FI20215894A1/en unknown
- 2020-03-03 FI FI20236373A patent/FI20236373A1/en unknown
- 2020-03-03 US US17/429,989 patent/US20220096978A1/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009090259A (ja) * | 2007-10-12 | 2009-04-30 | Japan Atomic Energy Agency | 液体濾過用カートリッジフィルタ |
CN105960280A (zh) * | 2014-02-26 | 2016-09-21 | 日本辉尔康株式会社 | 无纺布状金属吸附材料及其制造方法 |
JP2016073922A (ja) * | 2014-10-07 | 2016-05-12 | 信越化学工業株式会社 | 有機溶剤の精製装置 |
WO2018051716A1 (ja) * | 2016-09-15 | 2018-03-22 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
JP2018167223A (ja) * | 2017-03-30 | 2018-11-01 | 倉敷繊維加工株式会社 | フィルターカートリッジ及びフィルター |
Also Published As
Publication number | Publication date |
---|---|
FI20236373A1 (en) | 2023-12-14 |
TW202039404A (zh) | 2020-11-01 |
US20220096978A1 (en) | 2022-03-31 |
WO2020184306A1 (ja) | 2020-09-17 |
KR20210134895A (ko) | 2021-11-11 |
FI20215894A1 (en) | 2021-08-25 |
JPWO2020184306A1 (zh) | 2020-09-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20070007196A1 (en) | Filter cartridge for fluid for treating surface of electronic device substrate | |
KR102646311B1 (ko) | 리간드-개질된 필터 및 액체 조성물로부터 금속을 감소시키는 방법 | |
JP6912244B2 (ja) | フィルターカートリッジ及びフィルター | |
CN102965929A (zh) | 一种改性丙纶无纺布制备方法及其应用 | |
KR101269674B1 (ko) | 편광판 제조시 발생된 폐액의 재활용 방법 | |
KR20140071943A (ko) | 과산화수소 수용액의 정제 방법 및 정제 장치 | |
WO2016136650A1 (ja) | 水中微粒子の除去装置及び超純水製造・供給システム | |
CN113574043A (zh) | 有机溶剂的制造方法 | |
JP6089179B2 (ja) | セシウム除去用フィルターカートリッジの製造方法 | |
JP2003251118A (ja) | 高容量金属捕捉能を有するフィルターカートリッジ | |
JP5762863B2 (ja) | アルコールの精製方法及び装置 | |
KR102393133B1 (ko) | 웨트 세정 장치 및 웨트 세정 방법 | |
JP2014055120A (ja) | アルコールの精製方法及び装置 | |
JPH0780262A (ja) | 逆浸透膜および逆浸透膜分離素子の処理方法 | |
KR20220125811A (ko) | 리간드-개질된 필터 및 액체 조성물로부터 금속을 감소시키는 방법 | |
JP7259919B1 (ja) | 有機溶媒の不純物除去方法 | |
JP2019210582A (ja) | 飲料製造用固定化タンニン繊維の製造方法及び該繊維の運用方法 | |
JP2024068470A (ja) | 感光性樹脂組成物の精製方法 | |
US20220184595A1 (en) | Membranes for acid-sensitive solvents | |
Singha et al. | Removal of hazardous metals from nuclear effluent using a process hybridisation technique | |
CN115279486A (zh) | 用于纯化溶剂的系统及方法 | |
JP2020082048A (ja) | 疎水性アニオン交換繊維及び該繊維を用いたニッケル溶液の精製方法 | |
JP2013223847A (ja) | 水処理方法および水処理装置 | |
JP2020116524A (ja) | カルボン酸誘導体を含む薬液を濾過する方法 | |
JPWO2020091007A1 (ja) | 複合半透膜 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |