TW201913111A - Testing device with temperature control testing area unit and test handler using the same capable of improving test quality - Google Patents

Testing device with temperature control testing area unit and test handler using the same capable of improving test quality Download PDF

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TW201913111A
TW201913111A TW106129800A TW106129800A TW201913111A TW 201913111 A TW201913111 A TW 201913111A TW 106129800 A TW106129800 A TW 106129800A TW 106129800 A TW106129800 A TW 106129800A TW 201913111 A TW201913111 A TW 201913111A
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test
temperature
measuring
temperature control
unit
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TW106129800A
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Chinese (zh)
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TWI627416B (en
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林正龍
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鴻勁精密股份有限公司
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Abstract

The invention provides a testing device with a temperature control testing area unit. The temperature control testing area unit is provided with a carrier having at least one testing area serving as a containing space, and at least one air-blowing opening for blowing preset temperature gas is formed on at least one side surface of the testing area. The testing area of the carrier can be used for being provided with at least one test device for testing the electronic components. The temperature control testing area unit directly blows the preset temperature gas to the testing area through the air blowing opening located in the inner side surface of the testing area, so that the testing area in the carrier forms a preset temperature simulation test environment. When a pressing tool of the testing device presses the electronic component to be tested in the testing device, the temperature control testing area unit can enable the electronic component to be tested to be located in the testing area with the preset test temperature for performing testing operation, so that the practical benefit of improving the test quality is achieved.

Description

具溫控測區單元之測試裝置及其應用之測試分類設備  Test device with temperature control zone unit and test classification device thereof  

本發明係提供一種於載具上設有可供配置測試器之測區,並利用位於測區內側面之吹氣口直接對測區吹送預設溫度之氣體,使測區迅速形成一預設溫度模擬測試環境,以於壓接具下壓電子元件時,可供測試器上之待測電子元件於測區內準確進行測試作業,進而提升測試品質的具溫控測區單元之測試裝置。 The invention provides a measuring area on a vehicle for which a tester can be arranged, and directly blows a gas of a preset temperature to the measuring area by using a blowing port located on a side of the measuring area, so that the measuring area rapidly forms a preset temperature. The test environment is used to test the electronic components in the tester when the electronic components are pressed, so that the electronic components to be tested on the tester can accurately perform the test operation, thereby improving the test quality of the test device with the temperature control zone unit.

在現今,電子元件應用於不同電子設備,由於電子設備所處之環境可能為高溫環境或低溫環境,因此,業者為確保電子元件之使用品質,於電子元件製作完成後,必須視其應用之環境溫度,將電子元件移載至測試分類設備,使其於預設溫度模擬測試環境中進行高溫測試作業或低溫測試作業,進而淘汰出不良品。 Nowadays, electronic components are used in different electronic devices. Since the environment in which electronic devices are located may be a high-temperature environment or a low-temperature environment, in order to ensure the quality of use of electronic components, after the electronic components are manufactured, the environment must be considered. Temperature, the electronic components are transferred to the test classification equipment, and the high temperature test operation or the low temperature test operation is performed in the preset temperature simulation test environment, thereby eliminating the defective products.

請參閱第1、2圖,係為電子元件測試分類設備之測試裝置的示意圖,該測試裝置係於機台11開設有通口111,並於機台11之下方配置一連接中央控制裝置(圖未示出)之測試機12,該測試機12係電性連接有電路板13,該電路板13上裝配有一具複數個測試座15之基板14,該基板14係鎖固於機台11,該測試座15係具有複數支探針151,探針151之第一端係電性連接電路板13,而第二端則電性連接待測電子元件16之電性接點,另於機台11之通口111及測試座15上方罩置固設一具門板171之冷測室17,該冷測室17係連通一輸送氮氣冷源之輸送管172,並於頂面裝配一作Z方向位移之壓接具18,該壓接具18係於相對應各測試座1 5之位置設有可下壓待測電子元件16之下壓部181;於使用時,該測試裝置利用輸送管172對冷測室17之內部輸送氮氣冷源,以使冷測室17之內部形成一低溫模擬測試環境,由於測試座15已承置待測之電子元件16,該測試裝置之壓接具18即作Z方向向下位移貼置於基板14,且蓋合於測試座15之上方,並以下壓部181下壓待測之電子元件16,使待測電子元件16之電性接點確實接觸測試座15之探針151而執行測試作業;惟,該測試裝置於測試座15之上方罩置一冷測室17之設計目的,係為了利用冷測室17內輸入之氮氣冷源使測試座15及待測電子元件16可處於低溫模擬測試環境而執行低溫測試作業,但該壓接具18於下壓待測電子元件16時,即會貼置於基板14之頂面,且蓋合於測試座15之上方,一旦冷測室17內之氮氣冷源受到壓接具18之阻擋而無法順利流入測試座15時,將導致測試座15內之溫度無法保持在預設低溫之測試溫度,亦即無法使待測之電子元件16於預設低溫測試環境準確執行測試作業,進而影響待測電子元件16之測試品質,尤其當待測電子元件16於測試時會使自身溫度升高,又在氮氣冷源無法順利流入測試座15的因素下,更將影響待測電子元件16之測試品質,造成無法有效提升測試品質之缺失。 Please refer to Figures 1 and 2 for a schematic diagram of a test device for an electronic component test classification device. The test device is provided with a port 111 on the machine table 11, and a connection central control device is arranged below the machine table 11 (Fig. The testing machine 12 is not shown. The testing machine 12 is electrically connected to a circuit board 13 . The circuit board 13 is mounted with a substrate 14 having a plurality of test sockets 15 . The substrate 14 is locked to the machine table 11 . The test stand 15 has a plurality of probes 151. The first end of the probe 151 is electrically connected to the circuit board 13, and the second end is electrically connected to the electrical contact of the electronic component 16 to be tested. The port 111 of the 11 and the test stand 15 are covered with a cold measuring chamber 17 with a door panel 171. The cold measuring chamber 17 is connected to a conveying pipe 172 for conveying a nitrogen gas source, and is assembled on the top surface for displacement in the Z direction. The crimping device 18 is disposed at a position corresponding to each of the test sockets 15 to press down the pressing portion 181 of the electronic component 16 to be tested; in use, the testing device utilizes the conveying tube 172 The inside of the cold measuring chamber 17 transports a nitrogen cold source to form a low temperature simulation test environment inside the cold measuring chamber 17, The test piece 15 has been mounted on the electronic component 16 to be tested, and the crimping device 18 of the test device is placed in the Z direction downwardly and placed on the substrate 14 and covered above the test seat 15, and the lower pressing portion 181 The electronic component 16 to be tested is pressed down, so that the electrical contact of the electronic component 16 to be tested does contact the probe 151 of the test stand 15 to perform the test operation; however, the test device is placed over the test stand 15 for a cold test. The purpose of the chamber 17 is to perform the low temperature test operation by using the nitrogen cold source input in the cold chamber 17, so that the test socket 15 and the electronic component 16 to be tested can be in a low temperature simulation test environment, but the crimping device 18 is pressed down. When the electronic component 16 is to be tested, it will be placed on the top surface of the substrate 14 and covered above the test socket 15. Once the nitrogen source in the cold chamber 17 is blocked by the crimping device 18, the test cannot be smoothly flowed into the test. When the seat is at 15 o'clock, the temperature in the test stand 15 cannot be maintained at the preset low temperature test temperature, that is, the electronic component 16 to be tested cannot accurately perform the test operation in the preset low temperature test environment, thereby affecting the electronic component 16 to be tested. Test quality, especially when the electronics to be tested Member 16 will rise in the temperature of the test itself, and can not flow into the test element holder 15 smoothly under a nitrogen cold source, but will affect the quality of the test element 16 of the DUT, resulting in deletion can not effectively improve the quality of the test.

本發明之目的一,係提供一種具溫控測區單元之測試裝置,其溫控測區單元係於一載具設有至少一為容置空間之測區,並於測區之至少一側面設有至少一吹送預設溫度氣體之吹氣口,該載具之測區可供裝配至少一測試電子元件之測試器,該溫控測區單元利用位於測區內側面之吹氣口直接對測區吹送預設溫度之氣體,使載具內之測區形成一預設溫度模擬測試環境,於測試裝置之壓接具下壓測試器內之待測電子元件時,該溫控測區單元可使待測之電子元件位於具有預設測試溫度之測區內準確進行測試作業,達到提升測試品質之實用效益。 The first object of the present invention is to provide a test device with a temperature-controlled measuring area unit, wherein the temperature-controlled measuring area unit is provided with at least one measuring area for accommodating space and at least one side of the measuring area. Providing at least one air blowing port for blowing a preset temperature gas, wherein the measuring area of the carrier is suitable for assembling at least one test device for testing electronic components, and the temperature control measuring unit directly uses the air blowing port located on the side of the measuring area to directly measure the measuring area The gas of the preset temperature is blown, so that the measuring area in the vehicle forms a preset temperature simulation test environment, and when the crimping device of the testing device presses down the electronic component to be tested in the testing device, the temperature control measuring unit can The electronic component to be tested is accurately placed in the test area with the preset test temperature to achieve the practical benefit of improving the test quality.

本發明之目的二,係提供一種具溫控測區單元之測試裝置,其中,該溫控測區單元之載具的測區係供裝配具探針之測試器,並利用位於測區側面之吹氣口對測區吹送預設測試溫度之氣體,而可先預冷或預熱該測試器之探針,以便更加迅速提供一預設溫度模擬測試環境,達到有效縮短測試前置作業時間之實用效益。 The second object of the present invention is to provide a test device with a temperature-controlled measuring area unit, wherein the measuring area of the vehicle of the temperature-controlled measuring area unit is used for assembling a tester with a probe, and is located on the side of the measuring area. The blowing port blows the gas of the preset test temperature to the measuring area, and the probe of the testing device can be pre-cooled or preheated, so as to provide a preset temperature simulation test environment more quickly, and the utility model can effectively shorten the test pre-operation time. benefit.

本發明之目的三,係提供一種應用具溫控測區單元之測試裝置的測試分類設備,其包含機台、供料裝置、收料裝置、本發明測試裝置、輸送裝置及中央控制裝置,該供料裝置係配置於機台上,並設有至少一容納待測電子元件之供料承置器,該收料裝置係配置於機台上,並設有至少一容納已測電子元件之收料承置器,該本發明測試裝置係配置於機台,並設有溫控測區單元、測試器及壓接具,以使電子元件確實於預設溫度模擬測試環境執行測試作業,該輸送裝置係配置於機台上,並設有至少一移載電子元件之移料器,該中央控制裝置係用以控制及整合各裝置作動,以執行自動化作業,達到提升作業效能之實用效益。 A third object of the present invention is to provide a test classification device using a test device with a temperature control zone unit, comprising a machine table, a feeding device, a receiving device, a testing device of the invention, a conveying device and a central control device, The feeding device is disposed on the machine table and is provided with at least one feeding device for accommodating the electronic component to be tested, and the receiving device is disposed on the machine table and is provided with at least one receiving electronic component to be tested. The material bearing device is configured on the machine table, and is provided with a temperature control measuring unit, a tester and a crimping device, so that the electronic component performs the testing operation in the simulated test environment in the preset temperature. The device is disposed on the machine and is provided with at least one shifting device for transferring electronic components. The central control device is used for controlling and integrating the operations of the devices to perform an automated operation, thereby achieving practical benefits of improving work efficiency.

〔習知〕  [study]  

11‧‧‧機台 11‧‧‧ machine

111‧‧‧通口 111‧‧‧ mouth

12‧‧‧測試機 12‧‧‧Testing machine

13‧‧‧電路板 13‧‧‧Circuit board

14‧‧‧基板 14‧‧‧Substrate

15‧‧‧測試座 15‧‧‧ test seat

151‧‧‧探針 151‧‧‧ probe

16‧‧‧電子元件 16‧‧‧Electronic components

17‧‧‧冷測室 17‧‧‧ Cold room

171‧‧‧門板 171‧‧‧ door panel

172‧‧‧輸送管 172‧‧‧ delivery tube

18‧‧‧壓接具 18‧‧‧Crimping tool

181‧‧‧下壓部 181‧‧‧Depression

〔本發明〕  〔this invention〕  

20‧‧‧測試裝置 20‧‧‧Testing device

21‧‧‧載具 21‧‧‧ Vehicles

211‧‧‧第一板體 211‧‧‧ first board

212‧‧‧第二板體 212‧‧‧Second plate

213‧‧‧第三板體 213‧‧‧ Third plate

2131‧‧‧第二通氣段 2131‧‧‧second ventilation section

214‧‧‧第四板體 214‧‧‧4th plate

2141‧‧‧第三通氣段 2141‧‧‧ Third ventilation section

215‧‧‧第五板體 215‧‧‧ fifth plate

2151‧‧‧承接部 2151‧‧‧Acceptance Department

2152‧‧‧凹部 2152‧‧‧ recess

2153‧‧‧第一通氣段 2153‧‧‧First ventilation section

216‧‧‧測區 216‧‧‧ survey area

217‧‧‧塊體 217‧‧‧ Block

2171‧‧‧吹氣口 2171‧‧‧Blowing port

2172‧‧‧長槽 2172‧‧‧Long slot

2181‧‧‧第一供氣管 2181‧‧‧First air supply pipe

2182‧‧‧第二供氣管 2182‧‧‧Second air supply pipe

22‧‧‧測試室 22‧‧‧Test room

221‧‧‧門板 221‧‧‧ Door panel

222‧‧‧輸送管 222‧‧‧ delivery tube

231‧‧‧測試座 231‧‧‧ test seat

2311‧‧‧探針 2311‧‧‧Probe

2312‧‧‧接合部 2312‧‧‧Intersection

232‧‧‧電路板 232‧‧‧PCB

233‧‧‧測試機 233‧‧‧Tester

241‧‧‧移動件 241‧‧‧Mobile parts

242‧‧‧壓接具 242‧‧‧Crimping tool

2421‧‧‧下壓部 2421‧‧‧Depression

243‧‧‧溫控件 243‧‧‧Warm control

30‧‧‧機台 30‧‧‧ machine

31‧‧‧通孔 31‧‧‧through hole

41‧‧‧電子元件 41‧‧‧Electronic components

50‧‧‧供料裝置 50‧‧‧Feeding device

51‧‧‧供料承置器 51‧‧‧Feeder

60‧‧‧收料裝置 60‧‧‧ receiving device

61‧‧‧收料承置器 61‧‧‧Receipt receiver

70‧‧‧輸送裝置 70‧‧‧Conveyor

71‧‧‧第一移料器 71‧‧‧First mover

72‧‧‧第一入料載台 72‧‧‧First feeding platform

73‧‧‧第二入料載台 73‧‧‧Second feed stage

74‧‧‧第二移料器 74‧‧‧Second shifter

75‧‧‧第三移料器 75‧‧‧third shifter

76‧‧‧第一出料載台 76‧‧‧First discharge stage

77‧‧‧第二出料載台 77‧‧‧Second discharge platform

78‧‧‧第四移料器 78‧‧‧fourth shifter

第1圖:習知電子元件測試裝置之使用示意圖(一)。 Figure 1: Schematic diagram of the use of a conventional electronic component test device (1).

第2圖:習知電子元件測試裝置之使用示意圖(二)。 Figure 2: Schematic diagram of the use of the conventional electronic component test device (2).

第3圖:本發明測試裝置之溫控測區單元的俯視圖。 Figure 3: Top view of the temperature controlled cell unit of the test device of the present invention.

第4圖:本發明溫控測區單元之剖視圖。 Figure 4 is a cross-sectional view of the temperature control cell unit of the present invention.

第5圖:係測試裝置之溫控測區單元與測試室、測試器之配置圖。 Figure 5: Configuration diagram of the temperature control unit and test room and tester of the test device.

第6圖:本發明溫控測區單元與測試座之裝配俯視圖。 Fig. 6 is a plan view showing the assembly of the temperature control measuring unit and the test seat of the present invention.

第7圖:本發明溫控測區單元之使用示意圖(一)。 Figure 7: Schematic diagram of the use of the temperature-controlled measuring zone unit of the present invention (1).

第8圖:係第7圖之局部放大示意圖。 Fig. 8 is a partially enlarged schematic view of Fig. 7.

第9圖:本發明溫控測區單元之使用示意圖(二)。 Figure 9: Schematic diagram of the use of the temperature control zone unit of the present invention (2).

第10圖:本發明溫控測區單元之使用示意圖(三)。 Figure 10: Schematic diagram of the use of the temperature-controlled measuring zone unit of the present invention (3).

第11圖:係第10圖之局部放大示意圖。 Figure 11 is a partial enlarged view of Fig. 10.

第12圖:本發明測試裝置應用於測試分類設備之示意圖。 Figure 12: Schematic diagram of the test device of the present invention applied to a test classification device.

為使 貴審查委員對本發明作更進一步之瞭解,茲舉一較佳實施例並配合圖式,詳述如後:請參閱第3、4圖,本發明具溫控測區單元之測試裝置20,其溫控測區單元係設有具至少一測區之載具21,該載具21可一體成型或由複數個板體所組成,於本實施例中,該載具21係設有二相互組裝之第一、二板體211、212,第一、二板體211、212間裝配有位於兩側之第三、四板體213、214,令第一、二板體211、212及第三、四板體213、214組裝成一中空框架,並於中空處裝配一具有至少一測區之第五板體215,該測區可為凹槽或鏤空之容置空間,於本實施例中,係於第五板體215開設複數個鏤空之測區216,以供裝配可測試電子元件之測試器(圖未示出),該測區216之至少一面凹設有承接部,供組裝測試器,於本實施例中,第五板體215係於測區216之第一、二面凹設有承接部2151供裝配測試器,另於載具21設有至少一可對測區216吹送預設溫度氣體之吹氣口,更進一步,該吹氣口可直接開設於第五板體215或另一獨立元件,於本實施例中,係於第五板體215設有至少一相通測區216之凹部2152,供裝配一塊體217,該塊體217係開設有複數個吹氣口2171,該吹氣口2171之第一端係相通於測區216,第二端則連通一尺寸較大之長槽2172,該長槽2172係連通至少一通氣道,該通氣道係連接供氣裝置(圖未示出),例如氮氣供氣裝置或低溫乾燥空氣裝置等,於本實施例中,該通氣道係於第五板體215設有至少一連通該塊體217之長槽2172的第一通氣段2153,複數個第一通氣段2153分別連通於第三板體213及第四板體214開設有之第二通氣段2131或第三通氣段2141,第二通氣段2131及第三通氣段2141則分別連通第一 供氣管2181及第二供氣管2182,第一供氣管2181及第二供氣管2182則連通氮氣供氣裝置(圖未示出)而輸送氮氣。 In order to make the present invention more fully understood by the reviewing committee, a preferred embodiment and a drawing will be described in detail as follows: Please refer to Figures 3 and 4, the testing device 20 of the present invention has a temperature-controlled measuring zone unit. The temperature control unit is provided with a carrier 21 having at least one measurement area, and the carrier 21 can be integrally formed or composed of a plurality of boards. In this embodiment, the carrier 21 is provided with two The first and second plates 211 and 212 are assembled to each other, and the first and second plates 211 and 212 are assembled with third and fourth plates 213 and 214 on both sides to make the first and second plates 211 and 212 and The third and fourth plates 213 and 214 are assembled into a hollow frame, and a fifth plate body 215 having at least one measuring area is assembled in the hollow portion. The measuring area can be a recessed or hollowed-out accommodating space, in this embodiment. In the fifth board body 215, a plurality of hollowed-out measuring areas 216 are opened for assembling testers (not shown) for testing electronic components, and at least one side of the measuring area 216 is recessed with a receiving portion for assembly. In the present embodiment, the fifth plate body 215 is attached to the first and second faces of the measuring area 216, and is provided with a receiving portion 2151 for assembly testing. And the carrier 21 is provided with at least one air blowing port for blowing a preset temperature gas to the measuring area 216. Further, the air blowing port can be directly opened to the fifth board body 215 or another independent component, in this embodiment. The fifth plate body 215 is provided with at least one recessed portion 2152 corresponding to the measuring area 216 for assembling a body 217. The block body 217 is provided with a plurality of air blowing ports 2171, and the first end of the air blowing port 2171 is connected. In the measuring area 216, the second end is connected to a large-sized long slot 2172, which is connected to at least one air passage, which is connected to a gas supply device (not shown), such as a nitrogen gas supply device or In the present embodiment, the air passage is provided in the fifth plate body 215 with at least one first ventilation section 2153 that communicates with the long groove 2172 of the block body 217, and the plurality of first ventilation sections 2153 respectively The second ventilation section 2131 or the third ventilation section 2141 is connected to the third plate body 213 and the fourth plate body 214, and the second ventilation section 2131 and the third ventilation section 2141 are respectively connected to the first air supply pipe 2181 and the second. The air supply pipe 2182, the first air supply pipe 2181 and the second air supply pipe 2182 are connected to the nitrogen gas. A gas supply device (not shown) delivers nitrogen gas.

請參閱第5、6圖,該測試裝置20係於機台30開設有通孔31,並於通孔31之上方裝配罩置一具門板221之測試室22,該測試室22並連通至少一輸送預溫氣體之輸送管222,輸送管222依測試作業所需而輸入高溫或低溫之預溫氣體至測試室22,該氣體可為氮氣或低溫乾燥空氣或高溫空氣等,於本實施例中,輸送管222係連接氮氣供氣裝置(圖未示出),以輸入低溫氮氣至測試室22,該溫控測區單元係以載具21之第一板體211及第二板體212鎖固於機台30之下方,令載具21之測區216位於機台30之通口31下方,該測試裝置20係於溫控測區單元之載具21的測區216設置至少一測試電子元件之測試器,於本實施例中,該測試器係設置具探針2311之測試座231,並於測試座231之第一、二面凸設有接合部2312,以跨置組裝於載具21之第五板體215的承接部2151,使測試座231位於測區216內,並令測試座231之探針2311位於塊體217之吹氣口2171側方,該測試座231之探針2311的第一端並電性連接一電路板232,該電路板232則電性連接一測試機233,該測試裝置20另於測試室22之內部裝配一由移動件241驅動作Z方向位移之壓接具242,以壓抵測試座231上之電子元件執行測試作業,該壓接具242並於相對應測試座231之位置設有下壓部2421,以下壓待測之電子元件,該壓接具242可為單純下壓電子元件之下壓件,亦或為可下壓及移載電子元件之壓移件,於本實施例中,該壓接具242係單純下壓電子元件,另該壓接具242並設有至少一溫控件243,以輔助待測之電子元件保持預設測試溫度,該溫控件243可為致冷晶片或加熱件或具預溫流體之本體等,於本實施例中,該溫控件243係為 致冷晶片。 Referring to FIGS. 5 and 6, the test device 20 is provided with a through hole 31 in the machine base 30, and a test chamber 22 covering a door panel 221 is disposed above the through hole 31, and the test chamber 22 is connected to at least one The conveying pipe 222 for conveying the preheating gas, the conveying pipe 222 inputs the high temperature or low temperature preheating gas to the test chamber 22 according to the test operation, and the gas may be nitrogen or low temperature dry air or high temperature air, etc., in this embodiment. The conveying pipe 222 is connected to a nitrogen gas supply device (not shown) to input low-temperature nitrogen gas to the test chamber 22, and the temperature control measuring unit is locked by the first plate body 211 and the second plate body 212 of the carrier 21. The test area 20 is located below the port 31 of the machine 30, and the test device 20 is disposed at the test area 216 of the carrier 21 of the temperature control unit to set at least one test electron. In the present embodiment, the tester is provided with a test stand 231 having a probe 2311, and a joint portion 2312 is protruded from the first and second faces of the test seat 231 to be assembled across the carrier. The receiving portion 2151 of the fifth plate body 215 of 21 causes the test seat 231 to be located in the measuring area 216, and the test seat 231 is The pin 2311 is located at the side of the air outlet 2171 of the block 217. The first end of the probe 2311 of the test stand 231 is electrically connected to a circuit board 232. The circuit board 232 is electrically connected to a test machine 233. 20, in the interior of the test chamber 22, a crimping device 242 driven by the moving member 241 for Z-direction displacement is mounted to press the electronic component on the test socket 231 to perform a test operation, and the crimping tool 242 is corresponding to the test seat. A pressing portion 2421 is disposed at a position of 231, and the electronic component to be tested is pressed below, and the crimping device 242 can be a pressing member under the simple pressing electronic component, or a pressing member capable of pressing and transferring the electronic component. In this embodiment, the crimping device 242 simply presses down the electronic component, and the crimping device 242 is provided with at least one temperature control 243 to assist the electronic component to be tested to maintain a preset test temperature. The control 243 can be a refrigerated wafer or a heating element or a body with a pre-warmed fluid. In the present embodiment, the temperature control 243 is a refrigerated wafer.

請參閱第7、8圖,欲執行電子元件低溫測試作業時,該測試裝置20係以輸送管222輸入低溫氮氣至測試室22之內部,令測試室22之內部形成一低溫模擬測試環境,由於壓接具242尚未作Z方向向下位移,該測試室22內之低溫氮氣即可通過機台30之通孔31而流入於溫控測區單元之載具21的測區216,又由於該溫控測區單元之第一供氣管2181及第二供氣管2182係連通氮氣供氣裝置(圖未示出),而可分別經由第三板體213及第四板體214之第二通氣段2131及第三通氣段2141將低溫氮氣輸送至第五板體215之第一通氣段2153,第一通氣段2153再將低溫氮氣輸送至塊體217之長槽2172,使低溫氮氣由長槽2172分流至複數個吹氣口2171,由複數個位於測區216內側面之吹氣口2171直接將低溫氮氣均勻吹送至測區216,不僅可先預冷測試座231之複數支探針2311,並可使溫控測區單元之測區216形成一低溫模擬測試環境。 Referring to Figures 7 and 8, in order to perform the low temperature test operation of the electronic component, the test device 20 inputs the low temperature nitrogen into the inside of the test chamber 22 by the transfer tube 222, so that the inside of the test chamber 22 forms a low temperature simulation test environment due to The crimping tool 242 has not been displaced downward in the Z direction, and the low temperature nitrogen gas in the test chamber 22 can flow into the measuring area 216 of the carrier 21 of the temperature control measuring unit through the through hole 31 of the machine 30, and The first air supply pipe 2181 and the second air supply pipe 2182 of the temperature control zone unit are connected to a nitrogen gas supply device (not shown), and may be respectively connected to the second ventilation section of the third plate body 213 and the fourth plate body 214. 2131 and the third venting section 2141 deliver the low temperature nitrogen gas to the first venting section 2153 of the fifth plate body 215, and the first venting section 2153 further transports the low temperature nitrogen gas to the long groove 2172 of the block body 217, so that the low temperature nitrogen gas is long groove 2172 Dividing to a plurality of air blowing ports 2171, a plurality of low-temperature nitrogen gases are directly blown to the measuring area 216 by a plurality of air blowing ports 2171 located on the inner side of the measuring area 216, and not only the plurality of probes 2311 of the test socket 231 can be pre-cooled, but also The temperature measurement zone unit 216 forms a low temperature simulation Test environment.

請參閱第9、10、11圖,由於該測試室22之內部具有低溫氮氣而形成一低溫模擬測試環境,一輸送裝置(圖未示出)之移料器係將待測電子元件41移入於測試室22內,並移載至溫控測區單元之測區216,而置放於測試座231上,使待測電子元件41之電性接點接觸測試座231之複數支探針2311;接著該壓接具242係由移動件241驅動作Z方向向下位移,並以下壓部2421下壓待測之電子元件41,使待測電子元件41之電性接點確實接觸測試座231之複數支探針2311,由於該溫控測區單元之塊體217的吹氣口2171係連通載具21之測區216內部,而可利用塊體217之複數個吹氣口2171由側方直接對測區216均勻吹送低溫氮氣,使載具21之測區216亦形成一預設低溫模擬測試環境;因此,該測試裝置20除了具有測試室22所形成之低溫模擬測 試環境外,更可利用溫控測區單元之測區216於測試座231周圍直接形成一低溫模擬測試環境,以確保待測之電子元件41處於低溫模擬測試環境,由於測試座231係電性連接電路板232,該電路板232又電性連接一測試機233,使得測試座231可對位於低溫模擬測試環境之待測電子元件41準確執行低溫測試作業,以確保電子元件41於預設低溫之模擬測試環境準確進行低溫測試,達到提升測試品質之實用效益。 Referring to Figures 9, 10 and 11, since the interior of the test chamber 22 has a low temperature nitrogen gas to form a low temperature simulation test environment, a feeder of a transport device (not shown) moves the electronic component 41 to be tested. The test chamber 22 is transferred to the test area 216 of the temperature control test area unit, and placed on the test stand 231, so that the electrical contact of the electronic component 41 to be tested contacts the plurality of probes 2311 of the test stand 231; Then, the crimping device 242 is driven by the moving member 241 to be displaced downward in the Z direction, and the pressing portion 2421 presses down the electronic component 41 to be tested, so that the electrical contact of the electronic component 41 to be tested does contact the test socket 231. The plurality of probes 2311 are connected to the inside of the measuring area 216 of the carrier 21 by the air blowing port 2171 of the block 217 of the temperature control measuring unit, and can be directly measured by the side by using a plurality of blowing ports 2171 of the block 217. The zone 216 uniformly blows the low temperature nitrogen gas, so that the measurement zone 216 of the carrier 21 also forms a preset low temperature simulation test environment; therefore, the test device 20 can utilize the temperature control even in the low temperature simulation test environment formed by the test chamber 22. The measuring area 216 of the measuring unit is directly formed around the test seat 231 A low temperature simulation test environment to ensure that the electronic component 41 to be tested is in a low temperature analog test environment. Since the test socket 231 is electrically connected to the circuit board 232, the circuit board 232 is electrically connected to a test machine 233, so that the test socket 231 can be The low-temperature test operation is accurately performed on the electronic component 41 to be tested located in the low-temperature simulation test environment to ensure that the electronic component 41 is accurately tested at a low temperature in a simulated low-temperature simulation environment, thereby achieving the practical benefit of improving the test quality.

請參閱第3、4、5、12圖,係本發明具溫控測區單元之測試裝置20應用於電子元件測試分類設備之示意圖,該測試分類設備係於機台30上配置有供料裝置50、收料裝置60、本發明測試裝置20、輸送裝置70及中央控制裝置(圖未示出);該供料裝置50係裝配於機台30,並設有至少一為供料盤之供料承置器51,用以容納至少一待測之電子元件;該收料裝置60係裝配於機台30,並設有至少一為收料盤之收料承置器61,用以容納至少一已測之電子元件;該本發明測試裝置20係裝配於機台30,並設有溫控測區單元、測試室、測試器及壓接具,以使電子元件確實於預設溫度模擬測試環境執行測試作業,於本實施例中,該測試室22係裝配於機台30之上方,並罩置於溫控測區單元之上方,該溫控測區單元係裝配於機台30,並設有一具測區216之載具21,且於測區216之至少一側面設有至少一吹送預設溫度氣體之吹氣口2171,該載具21之測區216可供裝配至少一測試電子元件之測試器,該測試器係設有電性連接之測試座231及電路板232,以對電子元件執行測試作業,該壓接具242可作Z方向位移下壓待測電子元件,該溫控測區單元之吹氣口2171對測區216吹送預設溫度之氣體,使測區216形成一預設溫度模擬測試環境,以供電子元件於測區216內準確進行測試作業;該輸送裝置70係裝配於機台30上,並設有至少一移載電子元件之移料器,於本實施例中,係設有第一移料器71,以於供料裝置50之供料 承置器51處取出待測之電子元件,並移載至第一入料載台72及第二入料載台73,第一入料載台72及第二入料載台73將待測電子元件載送至測試裝置20之側方,該輸送裝置70以第二移料器74及第三移料器75於第一入料載台72及第二入料載台73取出待測電子元件,並移入測試座231而執行測試作業,以及將測試座231之已測電子元件移載至第一出料載台76及第二出料載台77,第一出料載台76及第二出料載台77載出已測之電子元件,供第四移料器78取出已測電子元件,並依測試結果,而移載至收料裝置60之收料承置器61而分類收置,該中央控制裝置係用以控制及整合各裝置作動,以執行自動化作業,達到提升作業效能之實用效益。 Please refer to the figures 3, 4, 5 and 12, which are schematic diagrams of the testing device 20 with the temperature-controlled measuring area unit applied to the electronic component testing and sorting device, which is equipped with the feeding device on the machine table 30. 50, receiving device 60, testing device 20 of the present invention, conveying device 70 and central control device (not shown); the feeding device 50 is mounted on the machine table 30, and at least one is provided for the feeding tray a material receiver 51 for accommodating at least one electronic component to be tested; the receiving device 60 is mounted on the machine table 30, and is provided with at least one receiving receptacle 61 for receiving trays for accommodating at least A tested electronic component; the testing device 20 of the present invention is mounted on the machine 30, and is provided with a temperature control measuring unit, a testing room, a tester and a crimping device, so that the electronic component is indeed tested at a preset temperature. The environment performs a test operation. In this embodiment, the test chamber 22 is mounted above the machine 30 and is placed above the temperature control unit, and the temperature control unit is mounted on the machine 30, and A carrier 21 having a measuring area 216 is provided, and at least one side of the measuring area 216 is provided with at least one side a blowing port 2171 is blown to the preset temperature gas, and the measuring area 216 of the carrier 21 is for assembling a tester of at least one test electronic component, the tester is provided with an electrically connected test socket 231 and a circuit board 232, Performing a test operation on the electronic component, the crimping tool 242 can be used to press down the electronic component to be tested in the Z direction, and the air blowing port 2171 of the temperature control measuring unit blows a gas of a preset temperature to the measuring area 216, so that the measuring area 216 is formed. a preset temperature simulation test environment for the electronic component to accurately perform the test operation in the test area 216; the transport device 70 is mounted on the machine table 30, and is provided with at least one shifter for transferring electronic components, In the embodiment, a first feeder 71 is provided to take out the electronic component to be tested at the feeding device 51 of the feeding device 50, and transfer it to the first loading stage 72 and the second input. The material loading station 73, the first loading stage 72 and the second loading stage 73 carry the electronic component to be tested to the side of the testing device 20, and the conveying device 70 uses the second shifter 74 and the third shifting The hopper 75 takes out the electronic component to be tested on the first loading stage 72 and the second loading stage 73, and moves it into the measurement. The test operation is performed by the seat 231, and the tested electronic components of the test socket 231 are transferred to the first discharge stage 76 and the second discharge stage 77, the first discharge stage 76 and the second discharge stage. 77 carries out the measured electronic components for the fourth feeder 78 to take out the tested electronic components, and according to the test results, transfer to the receiving device 61 of the receiving device 60 for sorting and collecting, the central control The device is used to control and integrate the operation of each device to perform automated operations to achieve practical benefits of improving operational efficiency.

Claims (10)

一種具溫控測區單元之測試裝置,包含:溫控測區單元:係設有具至少一測區之載具,該載具係於該測區之至少一側面設有吹送預設溫度氣體之吹氣口,以使該測區形成一預溫模擬測試環境;測試器:係裝配於該溫控測區單元之測區,以測試電子元件。  A testing device with a temperature-controlled measuring zone unit, comprising: a temperature-controlled measuring zone unit: a carrier having at least one measuring zone, wherein the carrier is provided with a blowing preset temperature gas on at least one side of the measuring zone The air blowing port is such that the measuring area forms a pre-temperature simulation test environment; the tester is assembled in the measuring area of the temperature control measuring unit to test the electronic components.   依申請專利範圍第1項所述之具溫控測區單元之測試裝置,其中,該溫控測區單元之載具係為一體成型或由複數個板體所組成。  According to the test device of the temperature control measuring unit according to the first aspect of the patent application, the carrier of the temperature control measuring unit is integrally formed or composed of a plurality of plates.   依申請專利範圍第1項所述之具溫控測區單元之測試裝置,其中,該溫控測區單元之測區可為凹槽或鏤空之容置空間。  The testing device with the temperature-controlled measuring area unit according to the first aspect of the patent application, wherein the measuring area of the temperature-controlled measuring area unit can be a recessed or hollowed-out accommodating space.   依申請專利範圍第1項所述之具溫控測區單元之測試裝置,其中,該溫控測區單元之測區係於至少一面設有承接部,該測試器係設有至少一測試電子元件之測試座,並於該測試座設有至少一接合部,以組裝於該溫控測區單元之承接部。  The test device with a temperature-controlled measuring area unit according to the first aspect of the patent application, wherein the measuring area of the temperature-controlled measuring area unit is provided with a receiving portion on at least one side, and the tester is provided with at least one test electronic The test seat of the component is provided with at least one joint portion to be assembled to the receiving portion of the temperature control test zone unit.   依申請專利範圍第1項所述之具溫控測區單元之測試裝置,其中,該溫控測區單元之吹氣口係一體成型於該載具或設置於獨立塊體。  The test device with the temperature-controlled measuring zone unit according to the first aspect of the patent application, wherein the air-blowing port of the temperature-controlled measuring zone unit is integrally formed on the carrier or disposed on the independent block.   依申請專利範圍第5項所述之具溫控測區單元之測試裝置,其中,該溫控測區單元係於該載具之測區的至少一面設有凹部,供裝配該至少一具吹氣口之塊體。  The test device with a temperature-controlled measuring zone unit according to claim 5, wherein the temperature-controlled measuring zone unit is provided with a recess on at least one side of the measuring zone of the carrier for assembling the at least one blowing The block of the mouth.   依申請專利範圍第6項所述之具溫控測區單元之測試裝置,其中,該塊體之吹氣口的第一端係相通於該測區,第二端則連通一尺寸較大之長槽,該長槽係連通至少一通氣道,該通氣道係連接一供氣管。  According to the testing device of the temperature control measuring unit according to Item 6 of the patent application scope, the first end of the air blowing port of the block is connected to the measuring area, and the second end is connected to a large size. a trough connecting the at least one air passage, the air passage being connected to an air supply duct.   依申請專利範圍第1項所述之具溫控測區單元之測試裝置,更包含該測試裝置係設置至少一壓接電子元件之壓接具,該壓 接具係設置至少一溫控件。  The testing device with the temperature-controlled measuring unit according to the first aspect of the patent application, further comprising the testing device is provided with at least one crimping device for crimping electronic components, the crimping device being provided with at least one temperature control.   依申請專利範圍第1項所述之具溫控測區單元之測試裝置,其中,該測試裝置之溫控測區單元的載具係裝配於機台,該測試裝置係於該機台上且位於該載具之測區上方配置一具門板之測試室,該測試室並連通至少一輸送預溫氣體之輸送管。  According to the testing device of the temperature control measuring unit according to the first aspect of the patent application, wherein the carrier of the temperature control measuring unit of the testing device is mounted on the machine, the testing device is attached to the machine and A test chamber is disposed above the measuring area of the vehicle, and the test chamber is connected to at least one conveying pipe for conveying the preheating gas.   一種應用具溫控測區單元之測試裝置的測試分類設備,包含:機台;供料裝置:係配置於該機台上,並設有至少一供料承置器,用以容納至少一待測之電子元件;收料裝置:係配置於該機台上,並設有至少一收料承置器,用以容納至少一已測之電子元件;至少一依申請專利範圍第1項所述之具溫控測區單元之測試裝置:係配置於該機台,並設有該溫控測區單元及測試器,以使電子元件於預設溫度模擬測試環境執行測試作業;輸送裝置:係配置於該機台上,並設有至少一移料器,以移載電子元件;中央控制裝置:係用以控制及整合各裝置作動,以執行自動化作業。  A test classification device using a test device with a temperature-controlled measurement zone unit, comprising: a machine table; a feeding device: disposed on the machine platform, and provided with at least one feeding device for accommodating at least one waiting Measuring electronic component; receiving device: disposed on the machine, and provided with at least one receiving device for accommodating at least one tested electronic component; at least one according to claim 1 The test device with the temperature control measuring unit is disposed on the machine, and is provided with the temperature control measuring unit and the test device, so that the electronic component performs the testing operation in the preset temperature simulation test environment; the conveying device: It is disposed on the machine and is provided with at least one shifter for transferring electronic components. The central control device is used for controlling and integrating the operations of the devices to perform automated operations.  
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI708952B (en) * 2019-05-06 2020-11-01 美商第一檢測有限公司 Detecting apparatus
TWI715014B (en) * 2019-04-18 2021-01-01 鴻勁精密股份有限公司 Energy recovery temperature control structure and application of electronic component operation equipment
TWI763431B (en) * 2020-05-04 2022-05-01 南亞科技股份有限公司 Apparatus for testing semiconductor device and method of testing thereof

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI684012B (en) * 2018-12-11 2020-02-01 鴻勁精密股份有限公司 Substrate temperature control unit of test device and test classification equipment applied
CN111951877B (en) * 2019-05-16 2024-06-25 第一检测有限公司 Detection device
CN112309487B (en) * 2019-07-26 2024-04-12 第一检测有限公司 Chip test system
CN112845158B (en) * 2019-11-27 2023-11-17 鸿劲精密股份有限公司 Substrate temperature control unit of testing device and testing classification equipment applied by same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06188295A (en) * 1992-12-17 1994-07-08 Mitsubishi Electric Corp Temperature control apparatus of device under test
US6955211B2 (en) * 2002-07-17 2005-10-18 Applied Materials, Inc. Method and apparatus for gas temperature control in a semiconductor processing system
JP5621313B2 (en) * 2010-05-14 2014-11-12 セイコーエプソン株式会社 Electronic component inspection apparatus and electronic component conveying method
TWI481886B (en) * 2013-04-26 2015-04-21 Giga Byte Tech Co Ltd Testing system for eletrical circuit board
TWI585419B (en) * 2016-12-15 2017-06-01 Test equipment for electronic components operating equipment with anti - condensation unit and its application

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI715014B (en) * 2019-04-18 2021-01-01 鴻勁精密股份有限公司 Energy recovery temperature control structure and application of electronic component operation equipment
TWI708952B (en) * 2019-05-06 2020-11-01 美商第一檢測有限公司 Detecting apparatus
TWI763431B (en) * 2020-05-04 2022-05-01 南亞科技股份有限公司 Apparatus for testing semiconductor device and method of testing thereof

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