TW201911486A - 具有環形中介件之半導體器件總成 - Google Patents

具有環形中介件之半導體器件總成 Download PDF

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TW201911486A
TW201911486A TW107120163A TW107120163A TW201911486A TW 201911486 A TW201911486 A TW 201911486A TW 107120163 A TW107120163 A TW 107120163A TW 107120163 A TW107120163 A TW 107120163A TW 201911486 A TW201911486 A TW 201911486A
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semiconductor device
circuit elements
ring
interposer
shaped
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湯瑪士 H 金斯利
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美商美光科技公司
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Abstract

本發明提供一種半導體器件封裝。該封裝可包含:位於一基板上之一半導體晶粒堆疊,該基板包含複數個電接觸件;及一環形中介件,其安置於該基板上方且圍繞該半導體晶粒堆疊。該環形中介件可包含各電耦合至該複數個電接觸件之至少一對應者之複數個電路元件。該封裝可進一步包含安置於該環形中介件及該半導體晶粒堆疊上方之一蓋子。

Description

具有環形中介件之半導體器件總成
本發明大體上係關於半導體器件,且更特定言之係關於具有環形中介件之半導體器件。
經封裝半導體晶粒(包含記憶體晶片、微處理器晶片及成像器晶片)通常包含安裝於一基板上且包封於一塑膠保護性覆蓋層中或藉由一導熱蓋子覆蓋之一半導體晶粒。該晶粒包含功能特徵,諸如記憶體單元、處理器電路及/或成像器器件,以及電連接至該等功能特徵之接合墊。該等接合墊可電連接至在該保護性覆蓋層外部之終端以容許該晶粒連接至更高層級電路。
半導體製造者不斷減小晶粒封裝之尺寸以適於電子器件之空間約束,同時亦增加各封裝之功能容量以滿足操作參數。一種用於增加一半導體封裝之功能容量而實質上不增加由此覆蓋之表面積(即,該封裝之「佔用面積」)之方法係在一單個封裝中使多個半導體晶粒垂直堆疊於彼此頂部上。此等垂直堆疊之封裝中之晶粒可藉由使用矽通孔(TSV)使個別晶粒之接合墊與相鄰晶粒之接合墊電耦合而互連。
在垂直堆疊之封裝中,藉由一小區域中之諸多晶粒產生之熱量連同晶粒堆疊之高度可使熱管理具挑戰性。用於具有產生熱之晶粒堆疊之半導體封裝之熱管理之一方法已提供附接至晶粒堆疊(用於較佳熱傳導)及基板(用於較佳機械穩定性及晶粒保護)兩者之一熱傳導蓋子。此等蓋子可為單一式蓋子(例如,具有對晶粒堆疊提供之一凹部)或多部分蓋子(例如,具有圍繞晶粒堆疊且將一平坦上部蓋子連接至基板之一環形下部蓋子)。環形下部蓋子製造起來可能很昂貴,且對封裝器件之熱管理貢獻很小(例如,因為大部分熱量係在晶粒堆疊中產生且垂直地傳導至上部蓋子)。然而,環形下部蓋子佔半導體封裝之總體積之很大一部分。因此,需要具有更佳熱管理解決方案及更有效空間使用之半導體封裝。
相關申請案之交叉參考
本申請案含有與Thomas H. Kinsley之標題為「SEMICONDUCTOR DEVICE ASSEMBLIES WITH ELECTRICALLY FUNCTIONAL HEAT TRANSFER STRUCTURES」之一美國專利申請案有關之標的。其之揭示內容以引用的方式併入本文中之該相關申請案係讓與給Micron Technology公司且於2017年2月24日以美國申請案第15/442,392號申請。
本申請案含有與Thomas H. Kinsley之標題為「SEMICONDUCTOR DEVICE ASSEMBLIES WITH LIDS INCLUDING CIRCUIT ELEMENTS」之一同時申請之美國專利申請案有關之標的。其之揭示內容以引用的方式併入本文中之該相關申請案係讓與給Micron Technology公司且藉由代理人檔案號碼10829-9223.US00所識別。
在以下描述中,論述數種特定細節以提供本發明之實施例之一透徹及可行描述。然而,熟習相關技術者將認知可在不具有該等特定細節之一或多者之情況下實踐本發明。在其他例項中,未展示或未詳細描述通常與半導體器件相關聯之熟知結構或操作,以避免模糊本技術之其他態樣。一般而言,應理解,除本文中所揭示之該等特定實施例以外之各種其他器件、系統及方法可在本發明之範疇內。
如上文所論述,不斷設計對於更佳熱管理解決方案及更有效空間使用之需求愈來愈大之半導體器件。因此,根據本發明之半導體器件之若干實施例可提供具有環形中介件之半導體器件封裝,該等環形中介件提供超出習知環形下部蓋子可用之額外功能性(例如,藉由對諸如電容器、電阻器等之電路元件提供額外空間)。
本發明之若干實施例係關於包括環形中介件之半導體器件。在一項實施例中,一半導體器件封裝包含:位於一基板上方之一半導體晶粒堆疊,該基板包含複數個電接觸件;及一環形中介件,其安置於該基板上方且圍繞該半導體晶粒堆疊。該環形中介件可包含各電耦合至該複數個電接觸件之至少一對應者之複數個電路元件。該封裝可進一步包含安置於該環形中介件及該半導體晶粒堆疊上方之一蓋子。取決於該半導體晶粒堆疊之高度及電路元件之所要數量,可包含額外環形中介件。
下文描述具有環形中介件之半導體器件總成之若干實施例之特定細節。術語「半導體器件」大體上係指包含半導體材料之一固態器件。例如,一半導體器件可包含一半導體基板、晶圓或自一晶圓或基板單體化之晶粒。貫穿本發明,半導體器件通常在半導體晶粒之背景內容中進行描述;然而,半導體器件並不限於半導體晶粒。
術語「半導體器件封裝」可係指其中一或多個半導體器件併入至一共同封裝中之一配置。一半導體封裝可包含部分或完全囊封至少一半導體器件之一外殼或罩殼。一半導體器件封裝亦可包含承載一或多個半導體器件且附接至該罩殼或以其他方式併入至該罩殼中之一中介件基板。術語「半導體器件總成」可係指一或多個半導體器件、半導體器件封裝及/或基板(例如,中介件、支撐件或其他合適基板)之一總成。例如,可以離散封裝形式、條帶或矩陣形式及/或晶圓面板形式製造半導體器件總成。如本文中所使用,術語「垂直」、「橫向」、「上部」及「下部」可係指鑒於圖中所展示之定向之半導體器件或器件總成中之特徵之相對方向或位置。例如,「上部」及「最上方」可分別係指相較於另一特徵或相同特徵之部分,某一特徵較靠近或最靠近一頁之頂部定位。然而,此等術語應被廣義地解釋為包含具有其他定向之半導體器件,諸如其中頂部/底部、上方/下方、上面/下面、上/下及左/右可取決於定向而互換之反轉或傾斜定向。
圖1A至圖1E繪示經組態以具有一習知兩部分蓋子之一半導體器件總成100之部分平面視圖及截面視圖。圖1A繪示半導體器件總成100之封裝基板110之一平面視圖。半導體器件總成100包含在周邊安置於封裝基板110上之複數個電路元件120。電路元件120可包含表面安裝之離散電路元件,諸如電容器、電阻器、電感器及類似者。半導體器件總成100進一步包含安置於封裝基板110之上表面之一中間區域上方(即,在周邊安置之電路元件120之間)之一半導體晶粒堆疊130。電路元件120及半導體晶粒堆疊130兩者皆自封裝基板之該上表面向上延伸,因此需要可容納此等突出特徵之一蓋子。
圖1B繪示在一下部蓋子140安置於封裝基板110上方之後之半導體器件總成100之一部分平面視圖。下部蓋子140包含在其之一下表面中之用以容納電路元件120之凹部150 (在圖1B中用虛線繪示),且進一步包含半導體晶粒堆疊130延伸穿過之一開口160。
圖1C繪示在一上部蓋子170安置於下部蓋子140及半導體晶粒堆疊130上方之後之半導體器件總成100之一平面視圖。圖1C包含繪示沿著其分別展示圖1D及圖1E之截面之線D-D及E-E。如參考圖1D可見,下部蓋子140具有與半導體晶粒堆疊130之一上表面近似共面之一上表面,使得上部蓋子170可機械接觸下部蓋子140之該上表面及半導體晶粒堆疊130之該上表面兩者。如參考圖1D及圖1E兩者進一步可見,凹部150准許下部蓋子140容納自封裝基板110之一上表面向上延伸之電路元件120。如亦可見,半導體器件總成100包含用於提供至半導體器件總成100之半導體晶粒堆疊130及其他電路元件120之電連接能力之複數個封裝接觸件180 (例如,焊球)。
如相較於半導體晶粒堆疊130,給定藉由半導體器件總成100之電路元件120產生之熱量之相對較低量,半導體器件總成100之習知設計中之下部蓋子140並不提供顯著熱管理益處,尤其鑒於其提高之製造成本(例如,歸因於製造具有凹部之一環形金屬蓋子之複雜性)。因此,本發明之實施例提供經組態以支撐一上部蓋子同時對電耦合至一封裝基板之額外電路元件提供空間之一或多個環形中介件。
例如,圖2A至圖2E繪示根據本發明之一實施例組態之一半導體器件總成200之部分平面視圖及截面視圖。圖2A繪示半導體器件總成200之封裝基板210之一平面視圖。半導體器件總成200包含在周邊安置於封裝基板210上之第一複數個電路元件220。第一複數個電路元件220可包含表面安裝之離散電路元件,諸如電容器、電阻器、電感器及類似者。半導體器件總成200進一步包含安置於封裝基板210之上表面之一中間區域上方(即,在周邊安置之第一複數個電路元件220之間)之一半導體晶粒堆疊230。第一複數個電路元件220及半導體晶粒堆疊230兩者皆自封裝基板之該上表面向上延伸。封裝基板210亦包含在周邊圍繞半導體晶粒堆疊230安置之第一複數個電接觸件225。第一複數個電接觸件225經組態以提供至定位於一環形中介件上之額外電路元件之電連接能力,如下文參考圖2B更詳細描述。
參考圖2B,繪示根據本發明之一態樣之在一環形中介件240安置於封裝基板210上方之後之半導體器件總成200的一部分平面視圖。環形中介件240包含半導體晶粒堆疊230延伸穿過之一開口260。環形中介件240進一步包含其上安裝第二複數個電路元件255之一基板。在圖2B中所繪示之特定實施例中,第二複數個電路元件255自環形中介件240之基板之上表面向上延伸。在其他實施例中,第二複數個電路元件255可安裝於其之一下表面上,嵌入於基板內或其等之某一組合。環形中介件240進一步包含在其之基板之一下表面上之第二複數個電接觸件250 (在圖2B中用虛線繪示),其等經組態以電耦合至封裝基板210上之第一複數個電接觸件225。
圖2C繪示根據本發明之一態樣之在一上部蓋子270安置於環形中介件240及半導體晶粒堆疊230上方之後之半導體器件總成200的一平面視圖。上部蓋子270可包含對應於第二複數個電路元件255之凹部275。圖2C包含繪示沿著其分別展示圖2D及圖2E之截面之線D-D及E-E。如參考圖2D可見,環形中介件240具有與半導體晶粒堆疊230之一上表面近似共面之一上表面,使得上部蓋子270可機械接觸環形中介件240之該上表面及半導體晶粒堆疊230之該上表面兩者。如參考圖2D及圖2E兩者進一步可見,凹部275准許上部蓋子270容納自環形中介件240之一上表面向上延伸之第二複數個電路元件255。半導體器件總成200進一步包含用於提供至半導體器件總成200之半導體晶粒堆疊230及第一複數個電路元件220及第二複數個電路元件255之電連接能力之複數個封裝接觸件280 (例如,焊球)。
分別地,封裝基板210之第一複數個電接觸件225及環形中介件240之第二複數個電接觸件250可依熟習技術者已知之各種方式之任一者電耦合。例如,圖2E繪示電耦合第一複數個電接觸件225及第二複數個電接觸件250之各自者之複數個焊料接合件290。在其他實施例中,可使用其他互連技術,例如,包含銅至銅接合、丸狀物及墊、緊配合、機械等。儘管為清楚起見在圖2D或圖2E中未繪示,然半導體器件總成200亦可包含介於環形中介件240與封裝基板210之間及/或介於環形中介件240與蓋子270之間的一填充材料(例如,底填充、模製材料或類似者)。
儘管在圖2A至圖2E中繪示之前述實施例中,上部蓋子270係繪示為具有容納環形中介件240上之向上突出電路元件255之凹部275,然在其他實施例中,一半導體器件總成可包含經組態以與具有無凹部之一平坦下表面之一上部蓋子介接之一環形蓋子。在此方面,環形中介件及其上之複數個電路元件可經組態使得其上之至少最高電路元件之上表面與半導體晶粒堆疊之上表面共面,使得一平坦蓋子可與最上方晶粒及環形中介件上之至少一些電路元件接觸。替代性地,環形中介件之電路元件可提供於其之基板內,或自其之一下表面向下延伸,使得環形中介件之上表面不具有向上突出元件,藉此准許具有無凹部之一平坦下表面之一蓋子機械接觸環形中介件之一上表面。
例如,圖3A至圖3D繪示根據本發明之一實施例組態之一半導體器件總成300之部分平面視圖及截面視圖,其中提供具有內部安置之電路元件之一環形中介件。圖3A繪示根據本發明之一態樣之一半導體器件總成300之一部分平面視圖。半導體器件總成300係在一環形中介件340安置於封裝基板310上方之後但在增加一上部蓋子之前進行繪示。環形中介件340包含一半導體晶粒堆疊330延伸穿過之一開口360。環形中介件340進一步包含其中(例如,在其之上表面下面,或在其之下表面上方)安置第二複數個電路元件355之一基板。環形中介件340進一步包含在其之基板之一下表面上之第二複數個電接觸件350 (在圖3A中用虛線繪示),其等經組態以電耦合至封裝基板310上之第一複數個電接觸件325。
圖3B繪示根據本發明之一態樣之在一上部蓋子370安置於環形中介件340及半導體晶粒堆疊330上方之後之半導體器件總成300的一平面視圖。圖3B包含繪示沿著其分別展示圖3C及圖3D之截面之線C-C及D-D。如參考圖3C可見,環形中介件340具有與半導體晶粒堆疊330之一上表面近似共面之一上表面,使得上部蓋子370儘管具有實質上無凹部之一平坦下表面仍可機械接觸環形中介件340之該上表面及半導體晶粒堆疊330之該上表面兩者。
半導體器件總成300進一步包含封裝基板310上之第一複數個電接觸件325及環形中介件340上之第二複數個電接觸件350。第一複數個電接觸件325及第二複數個電接觸件350之各自者可依熟習技術者已知之各種方式之任一者電耦合。例如,圖3D繪示電耦合第一複數個電接觸件325及第二複數個電接觸件350之各自者之複數個焊料接合件390。在其他實施例中,可使用其他互連技術,例如,包含銅至銅接合、丸狀物及墊、緊配合、機械等。儘管為清楚起見在圖3C或圖3D中未繪示,然半導體器件總成300亦可包含介於環形中介件340與封裝基板310之間及/或介於環形中介件340與蓋子370之間的一填充材料(例如,底填充、模製材料或類似者)。半導體器件總成300進一步包含複數個封裝接觸件380 (例如,焊球),用於提供至半導體器件總成300之半導體晶粒堆疊330及第一複數個電路元件320及第二複數個電路元件355之電連接能力。
儘管在圖2A至圖3D中所繪示之前述例示性實施例中,繪示具有一單個環形中介件之半導體器件總成,然本發明之其他實施例可提供具有多個環形中介件之半導體器件總成。例如,圖4繪示根據本發明之一態樣之一半導體器件總成400之一截面視圖,其中提供多個環形中介件。半導體器件總成400包含一封裝基板410,一半導體晶粒堆疊430安置於封裝基板410之一上表面上。自封裝基板410之一上表面向上延伸之複數個電路元件420在周邊圍繞半導體晶粒堆疊430安置。封裝基板410亦包含在周邊圍繞半導體晶粒堆疊430配置之複數個電接觸件(在圖4之截面視圖中未繪示),其等經組態以提供至安置於第一環形中介件440及第二環形中介件445上之電路元件422及424之電連接能力。
第一環形中介件440及第二環形中介件445各包含半導體晶粒堆疊430延伸穿過之一開口,且各包含安置於其上且電耦合至封裝基板上之複數個電接觸件之複數個電路元件422及424。在此方面,第一環形中介件440可包含穿透電接觸件(例如,通孔及引線,未展示),用於提供封裝基板410之一些電接觸件與第二環形中介件445之複數個電路元件424之間的電連接能力。半導體器件總成400進一步包含一蓋子470,其具有與半導體晶粒堆疊430中之最上方晶粒以及與該最上方晶粒共面之電路元件424接觸之一平坦下表面。半導體器件總成400進一步包含複數個封裝接觸件480 (例如,焊球),用於提供至半導體器件總成400之半導體晶粒堆疊430及第一複數個電路元件420、第二複數個電路元件422及第三複數個電路元件424之電連接能力。
參考圖5,以截面繪示根據本發明之一實施例之具有多個環形中介件之又另一半導體器件總成500。半導體器件總成500包含一封裝基板510,一半導體晶粒堆疊530安置於封裝基板510之一上表面上。安置於封裝基板510之一上層內之第一複數個電路元件520在周邊圍繞半導體晶粒堆疊530安置。封裝基板510亦包含在周邊圍繞半導體晶粒堆疊530配置之第一複數個電接觸件525,其等經組態以提供至安置於第一環形中介件540及第二環形中介件545上之電路元件522及524之電連接能力。
第一環形中介件540及第二環形中介件545各包含半導體晶粒堆疊530延伸穿過之一開口,且各包含安置於其中且電耦合至封裝基板510上之複數個電接觸件525之複數個電路元件522及524。在此方面,第一環形中介件540可包含對應於封裝基板510上之第一複數個電接觸件525之第二複數個電接觸件550,一些第二複數個電接觸件550提供至第一環形中介件540上之第二複數個電路元件522之電連接能力,且其他第二複數個電接觸件550耦合至第三複數個電接觸件527,其等提供至第二環形中介件545上之第三複數個電路元件524之電連接能力(例如,透過第二環形中介件545上之第四複數個電接觸件552)。第一複數個電接觸件525及第二複數個電接觸件550及第三複數個電接觸件527及第四複數個電接觸件552之各自者可依熟習技術者已知之各種方式之任一者電耦合。例如,圖5繪示電耦合第一複數個電接觸件525及第二複數個電接觸件550之各自者之第一複數個焊料接合件590及電耦合第三複數個電接觸件527及第四複數個電接觸件552之各自者之第二複數個焊料接合件592。在其他實施例中,可使用其他互連技術,例如,包含銅至銅接合、丸狀物及墊、緊配合、機械等。
半導體器件總成500進一步包含複數個封裝接觸件580 (例如,焊球),其等用於提供至半導體器件總成500之半導體晶粒堆疊530及第一複數個電路元件520、第二複數個電路元件522及第三複數個電路元件524之電連接能力。半導體器件總成500進一步包含一蓋子570,其具有與半導體晶粒堆疊530中之最上方晶粒以及與該最上方晶粒共面之第二環形中介件545之上表面接觸之一平坦下表面。
儘管在前述例示性實施例中繪示具有一或兩個環形中介件之半導體器件總成,然在其他實施例中,可提供具有任何數目個環形中介件(例如,一個、兩個、三個、四個、五個、八個、十個、十六個等)之半導體器件總成。此外,儘管前面圖中所繪示之實例性實施例展示其中在周邊圍繞一半導體晶粒堆疊提供電路元件及封裝基板電接觸件之半導體器件總成,然在其他實施例中,電路元件及/或封裝基板電接觸件可位於一晶粒堆疊之少於所有側上(例如,位於一側上、位於兩個相對或相鄰側上、位於三側上等)。
上文參考圖2A至圖5所描述之經堆疊之半導體器件總成之任一者可併入至大量更大及/或更複雜系統之任一者中,該等系統之一代表性實例係圖6中示意性地展示之系統600。系統600可包含一半導體器件總成602、一電源604、一驅動器606、一處理器608及/或其他子系統或組件610。半導體器件總成602可包含大體上類似於上文參考圖2A至圖5所描述之半導體器件總成之特徵之特徵,且可因此包含一或多個環形中介件。所得系統600可執行廣泛多種功能之任一者,諸如記憶體儲存、資料處理及/或其他合適功能。因此,代表性系統600可包含(但不限於):手持式器件(例如,行動電話、平板電腦、數位讀取器及數位音訊播放器)、電腦、車輛、電器及其他產品。系統600之組件可容納於一單個單元中或遍及多個互連單元分佈(例如,透過一通信網路)。系統600之組件亦可包含遠端器件及廣泛多種電腦可讀媒體之任一者。
從前述內容將瞭解,本發明之特定實施例在本文中針對圖解說明目的而描述,但可在不偏離本發明之範疇之情況下做出各種修改。因此,除了受隨附申請專利範圍限制之外,本發明不受限制。
100‧‧‧半導體器件總成
110‧‧‧封裝基板
120‧‧‧電路元件
130‧‧‧半導體晶粒堆疊
140‧‧‧下部蓋子
150‧‧‧凹部
160‧‧‧開口
170‧‧‧上部蓋子
180‧‧‧封裝接觸件
200‧‧‧半導體器件總成
210‧‧‧封裝基板
220‧‧‧第一複數個電路元件
225‧‧‧第一複數個電接觸件
230‧‧‧半導體晶粒堆疊
240‧‧‧環形中介件
250‧‧‧電接觸件
255‧‧‧第二複數個電路元件/向上突出電路元件
260‧‧‧開口
270‧‧‧上部蓋子/蓋子
275‧‧‧凹部
280‧‧‧封裝接觸件
290‧‧‧焊料接合件
300‧‧‧半導體器件總成
310‧‧‧封裝基板
320‧‧‧第一複數個電路元件
325‧‧‧第一複數個電接觸件
330‧‧‧半導體晶粒堆疊
340‧‧‧環形中介件
350‧‧‧第二複數個電接觸件
355‧‧‧第二複數個電路元件
360‧‧‧開口
370‧‧‧上部蓋子/蓋子
380‧‧‧封裝接觸件
390‧‧‧焊料接合件
400‧‧‧半導體器件總成
410‧‧‧封裝基板
420‧‧‧電路元件/第一複數個電路元件
422‧‧‧電路元件/第二複數個電路元件
424‧‧‧電路元件/第三複數個電路元件
430‧‧‧半導體晶粒堆疊
440‧‧‧第一環形中介件
445‧‧‧第二環形中介件
470‧‧‧蓋子
480‧‧‧封裝接觸件
500‧‧‧半導體器件總成
510‧‧‧封裝基板
520‧‧‧第一複數個電路元件
522‧‧‧電路元件/第二複數個電路元件
524‧‧‧電路元件/第三複數個電路元件
525‧‧‧第一複數個電接觸件
527‧‧‧第三複數個電接觸件
530‧‧‧半導體晶粒堆疊
540‧‧‧第一環形中介件
545‧‧‧第二環形中介件
550‧‧‧第二複數個電接觸件
552‧‧‧第四複數個電接觸件
570‧‧‧蓋子
580‧‧‧封裝接觸件
590‧‧‧第一複數個焊料接合件
592‧‧‧第二複數個焊料接合件
600‧‧‧系統
602‧‧‧半導體器件總成
604‧‧‧電源
606‧‧‧驅動器
608‧‧‧處理器
610‧‧‧子系統或組件
圖1A至圖1E係包含一個兩件式蓋子之一半導體器件總成之簡化部分平面視圖及截面視圖。
圖2A至圖2E係根據本發明之一實施例之包含一環形中介件之一半導體器件總成之簡化部分平面視圖及截面視圖。
圖3A至圖3D係根據本發明之一實施例之包含一環形中介件之一半導體器件總成之簡化部分平面視圖及截面視圖。
圖4係根據本發明之一實施例之包含多個環形中介件之一半導體器件總成之一簡化截面視圖。
圖5係根據本發明之一實施例之包含多個環形中介件之一半導體器件總成之一簡化截面視圖。
圖6係展示包含根據本發明之一實施例組態之一半導體器件總成之一系統的一示意圖。

Claims (23)

  1. 一種半導體器件封裝,其包括: 一半導體晶粒堆疊,其位於一基板上; 該基板包含複數個電接觸件; 一環形中介件,其安置於該基板上方且圍繞該半導體晶粒堆疊,該環形中介件包含各電耦合至該複數個電接觸件之至少一對應者之複數個電路元件;及 一蓋子,其安置於該環形中介件及該半導體晶粒堆疊上方。
  2. 如請求項1之半導體器件封裝,其中該複數個電路元件自該環形中介件之一上表面向上延伸。
  3. 如請求項2之半導體器件封裝,其中該蓋子包含在其之一下表面中之用以容納該複數個電路元件之凹部。
  4. 如請求項3之半導體器件封裝,其中該等凹部之至少一者容納該複數個電路元件之一者以上。
  5. 如請求項1之半導體器件封裝,其中該複數個電路元件定位於該環形中介件之一基板內。
  6. 如請求項1之半導體器件封裝,其中該蓋子具有無凹部之一實質上平坦下表面。
  7. 如請求項1之半導體器件封裝,其中該複數個電路元件各經由該環形中介件之一下表面上之一或多個焊料連接件電耦合至該複數個電接觸件之至少該對應者。
  8. 如請求項1之半導體器件封裝,其中該複數個電路元件係第一複數個電路元件,且其中該基板進一步包含第二複數個電路元件。
  9. 如請求項8之半導體器件封裝,其中該第二複數個電路元件自該基板之一上表面向上延伸。
  10. 如請求項9之半導體器件封裝,其中該環形中介件之一下表面與該第二複數個電路元件之至少一者接觸。
  11. 如請求項8之半導體器件封裝,其中該第二複數個電路元件在周邊圍繞該半導體晶粒堆疊安置。
  12. 如請求項1之半導體器件封裝,其中該環形中介件係一第一環形中介件,且進一步包括安置於該第一環形中介件上方且圍繞該半導體晶粒堆疊之一第二環形中介件,該第二環形中介件包含各電耦合至該複數個電接觸件之至少一對應者之第二複數個電路元件。
  13. 如請求項1之半導體器件封裝,其進一步包括介於該環形中介件與該基板及該蓋子之至少一者之間的一填充材料。
  14. 一種半導體器件總成,其包括: 一基板,其具有其上具有複數個電接觸件之一上表面; 一半導體晶粒堆疊,其安置於該基板之該上表面上,該半導體晶粒堆疊在該基板之該上表面上延伸達一第一高度; 第一複數個電路元件,其等在該半導體晶粒堆疊周邊安置於該基板之該上表面上,該複數個電路元件在該基板之該上表面上延伸達小於該第一高度之一第二高度; 一環形中介件,其安置於該複數個電路元件上方,該環形中介件包含該半導體晶粒堆疊延伸穿過之一開口,該環形中介件進一步包含第二複數個電路元件,該第二複數個電路元件之各者電耦合至該複數個電接觸件之至少一者;及 一蓋子,其安置於該半導體晶粒堆疊及該環形中介件兩者上方。
  15. 如請求項14之半導體器件總成,其中該第二複數個電路元件自該環形中介件之一上表面向上延伸。
  16. 如請求項15之半導體器件總成,其中該蓋子包含在其之一下表面中之用以容納該第二複數個電路元件之凹部。
  17. 如請求項16之半導體器件總成,其中該等凹部之至少一者容納該第二複數個電路元件之一者以上。
  18. 如請求項14之半導體器件總成,其中該第二複數個電路元件定位於該環形中介件之一基板內。
  19. 如請求項14之半導體器件總成,其中該蓋子具有無凹部之一實質上平坦下表面。
  20. 如請求項14之半導體器件總成,其中該第二複數個電路元件各經由該環形中介件之一下表面上之一或多個焊料連接件電耦合至該複數個電接觸件之至少該對應者。
  21. 如請求項14之半導體器件總成,其中該第一複數個電路元件及該第二複數個電路元件在周邊圍繞該半導體晶粒堆疊安置。
  22. 如請求項14之半導體器件總成,其中該環形中介件係一第一環形中介件,且進一步包括安置於該第一環形中介件上方且圍繞該半導體晶粒堆疊之一第二環形中介件,該第二環形中介件包含各電耦合至該複數個電接觸件之至少一對應者之第三複數個電路元件。
  23. 如請求項14之半導體器件總成,其進一步包括介於該環形中介件與該基板及該蓋子之至少一者之間的一填充材料。
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TWI664700B (zh) 2019-07-01
CN110692132B (zh) 2023-04-04
CN110692132A (zh) 2020-01-14
US10679970B2 (en) 2020-06-09
WO2018231496A1 (en) 2018-12-20
US10096576B1 (en) 2018-10-09
US20180358329A1 (en) 2018-12-13
US11257792B2 (en) 2022-02-22

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