TW201803693A - Chuck table mechanism to rotatably and suctionably support a chuck table without using a tube and shorten maintenance time - Google Patents

Abstract

The subject of this invention is to rotatably and suctionably support a chuck table without using a tube and to shorten maintenance time. The solution of this invention is that a chuck table mechanism (50) comprises a fixed base (52) connected to an external suction source (94), a rotating means (51) rotatably disposed to the fixed base, and a chuck table (40) mounted on the upper part of the rotating means so as to be rotatably supported with respect to the fixed base. The rotating means is provided with a rotating base (54) rotatably disposed to the fixed base and an inserting part (55) detachably fixed to the rotational center position of the rotating base. The engagement end part (72) of the inserting part is engaged with the engagement concave part (73) of the fixed base so that the suction path (95) in the inserting part is connected to the communication path (97) of the fixed base and the opposite surfaces of the engaging end part and the engaging concave part are sealed by a seal ring (84).

Description

Suction table mechanism

The present invention relates to a chuck table mechanism that holds a workpiece in a processing device.

The surface of a workpiece such as a semiconductor wafer is divided into a plurality of areas by a grid-like scribe line (cut line), and devices such as ICs and LSIs are formed in each of the areas defined by the scribe line. In the device manufacturing process, the object to be processed is cut along a cutting path, thereby manufacturing each device wafer. The object to be processed is divided by a processing device such as a cutting device or a laser processing device. Each processing device is provided with a chuck table mechanism that rotatably arranges a chuck table that sucks and holds a workpiece (for example, see Patent Document 1).

The chuck table mechanism is a rotatable chuck table for a fixed base, and a negative pressure must be applied to the holding surface of the chuck table. Therefore, it is proposed to adopt a rotary joint structure in the chuck table mechanism. Multiple joints are provided at the joint between the sucker stage and the rotating base, and the tubes are connected to the suction source through the fixed base from the multiple joints. The suction force is given to the holding surface of the sucker table through the tube, and the rotation of the sucker table is not hindered by the tube.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2015-036179

However, in the machining operation, once the chuck table is rotationally driven, the tube is twisted as the chuck table is rotated. Once the machining operation is repeated and the twisting of each tube is repeated, fatigue is accumulated in each tube and deteriorates, and the joint portion of the tube is damaged and fragments are accumulated in the sucker table mechanism. Therefore, for the operator, there is a problem that the replacement work or cleaning work of the tube is cumbersome and requires long-term maintenance.

The present invention has been developed in view of this point, and it is an object of the present invention to provide a suction cup table mechanism that can rotate and attractably support a suction cup table without using a tube, and can shorten the maintenance time.

A suction cup table mechanism according to one aspect of the present invention is a suction cup table which is mounted on the upper part and rotatably supported. The suction cup table sucks and holds a workpiece to be processed and is characterized by having a fixed base which is connected to The communication path of the external attraction source will be formed inside; and a rotating means, which is rotatably arranged above the fixed base, and a suction cup table is installed on the upper part. The rotating means includes: a rotating base, which is rotatably disposed above the fixed base; and an inserting portion, which is configured to be detachably fixed to the rotating base at a rotation center and can be inserted into the fixing. The abutment, the insertion portion is provided with: an engaging end portion, which is formed to internally attract the suction path to the upper surface of the suction cup table, and is engaged with the engaging recess of the fixed abutment table. Parts are engaged with the engaging recesses, a seal ring is used to seal between an outer peripheral wall of the engaging ends and an inner wall of the engaging recesses of the fixed base, and the communication path and the suction path are sealed by link.

According to this configuration, while the rotation means is rotatably arranged on the fixed base, the insertion portion provided on the rotation means is inserted into the fixed base, and the suction path of the insertion portion and the communication path of the fixed base Will be connected. Thereby, the attraction | suction by an external attraction | suction source is given to a chuck table via the communication path of a fixed base, and the attraction | suction path of an insertion part. In addition, the engagement end portion of the insertion portion is engaged with the engagement recess portion of the fixed base, and the outer peripheral wall of the engagement end portion and the inner wall of the engagement recess portion are hermetically sealed with a seal ring. Therefore, it is possible to support the chuck table in a rotatable and attractive manner without causing air leakage. In addition, since a single path is formed by the suction path of the insertion portion and the communication path of the fixed base, the pressure loss in the path can be reduced and the attractive force can be improved. In addition, the simple operation of removing the insertion portion from the rotating base of the rotating means and pulling out the engagement end portion of the insertion portion from the engagement recess of the fixed base can easily replace the seal ring from above, which can greatly shorten Repair time.

In the chuck table mechanism according to an aspect of the present invention, the rotation means is held by the fixed base with a bearing, and the fixed base is provided with a rotation motor that rotates the rotation means.

According to the present invention, the suction cup table can be supported in a rotatable and attractive manner without using a tube. In addition, since the seal ring can be easily replaced from above by a simple operation of removing the insertion portion, the maintenance time required for the replacement operation of the seal ring can be greatly reduced.

40‧‧‧ Suction table

41‧‧‧ keep face

50‧‧‧ Suction table mechanism

51‧‧‧ Rotation means

52‧‧‧ fixed abutment

54‧‧‧ Rotary Abutment

55‧‧‧ Insertion

57‧‧‧bearing

72‧‧‧ Engagement end of insertion part

73‧‧‧ Engagement recess of fixed abutment

78‧‧‧Circular groove

84‧‧‧Sealing ring

91‧‧‧rotating motor

94‧‧‧ External Attraction Source

95‧‧‧ Attraction Path

97‧‧‧ Connected Path

W‧‧‧Processed

FIG. 1 is a perspective view of a cutting device according to this embodiment.

Fig. 2 is a schematic cross-sectional view of a chuck table mechanism of a comparative example.

Fig. 3 is a schematic cross-sectional view of a chuck table mechanism according to the present embodiment.

FIG. 4 is an explanatory diagram of the replacement operation of the seal ring of the present embodiment.

Hereinafter, a cutting device having a chuck table mechanism according to this embodiment will be described with reference to the drawings. FIG. 1 is a perspective view of a cutting device according to this embodiment. Fig. 2 is a schematic cross-sectional view of a chuck table mechanism of a comparative example. In the following description, a configuration in which the cutting device includes a chuck table mechanism is exemplified, but the configuration is not limited to this. The chuck table mechanism may be provided in, for example, another processing device such as a laser processing device or a grinding device.

As shown in FIG. 1, the cutting device 1 is configured to cut a workpiece W on a chuck table 40 with a cutting blade 26 and divide it into individual device wafers. The object to be processed W is a rectangular package substrate, and the surface of the substrate is divided by a grid-like tangent, and various devices are formed in each area divided by the scribe. The processed object W is not limited to a small package substrate such as a CSP (Chip Size Package) substrate and a wafer level chip size package (CSP) substrate, and may be a package substrate having a larger size than a CSP substrate.

A rectangular opening extending in the X-axis direction is formed on the upper surface of the housing 10 of the cutting device 1, and this opening is covered by a moving plate 11 and a bellows-shaped waterproof cover 12 that can be moved together with the chuck table 40. Below the waterproof cover 12 is provided a ball screw type moving mechanism (not shown) that moves the chuck table 40 in the X-axis direction. A holding surface 41 is formed on the surface of the chuck table 40 to suck and hold the workpiece W by a plurality of suction openings. The holding surface 41 is connected to a suction source via a fluid path in the chuck table 40, and sucks and holds the workpiece W by a negative pressure generated on the holding surface 41.

The chuck table 40 reciprocates between a transfer position in the center of the apparatus and a processing position facing the cutting means 24. FIG. 1 shows a state in which the chuck table 40 stands by at the transfer position. In the cabinet 10, a corner portion adjacent to the transfer position is lowered by one section, and the mounting table 14 is provided at the lowering position so as to be able to be raised and lowered. A cassette C that houses the workpiece W is placed on the mounting table 14. In the state where the cassette C is placed, the extraction position and the advance position of the workpiece W are adjusted in the height direction by raising and lowering the placement table 14.

A pair of centering guides 15 parallel to the Y-axis direction are provided behind the mounting table 14, and a workpiece W is accessed between the pair of centerers 15 and the cassette C. Push-pull mechanism 16. The pair of centerers 15 guides the access of the workpiece W of the push-pull mechanism 16 and positions the workpiece W in the X-axis direction. In addition, the push-pull mechanism 16 is used to extract the processed object W before processing from the cassette C to the pair of centerers 15, and the processed object W is further pushed into the card from the pair of centerers 15. Box C.

Near the pair of centerers 15 is a first transfer arm 17 for transferring a workpiece W between the centerers 15 and the chuck table 40. The workpiece W is conveyed by the rotation of the first conveying arm 17 with the conveying pad 19 at the tip of the L-shaped arm portion 18. A spinner washing mechanism 21 is provided behind the suction cup table 40 at the transfer position. The spinner washing mechanism 21 sprays washing water on the rotating spinner stage 22 to wash the workpiece W, and then replaces the washing water with spraying dry air to dry the workpiece W.

The housing 10 is provided with a support base 28 for supporting a cutting means 24 including a cutting blade 26. The cutting means 24 is configured by attaching a cutting blade 26 to the tip of a main shaft supported by a support table 28. The cutting blade 26 is formed into a disc shape by fixing a diamond grain with a bonding agent, for example. The cutting means 24 is a movement mechanism (not shown) that connects the cutting blade 26 in the Y-axis direction and the Z-axis direction. The cutting means 24 sprays the cleaning liquid from a plurality of spray nozzles, and relatively moves the cutting blade 26 rotating at a high speed relative to the chuck table 40, thereby cutting the workpiece W.

On the side 29 of the support table 28 is provided a The second conveying arm 31 that conveys the workpiece W between the 40 and the spinner washing mechanism 21. The workpiece W is transported by the forward and backward movement of the second transport arm 31 with a transport pad 33 that extends obliquely from the side surface 29 of the support base 28 to the front end of the front arm portion 32. Further, the support table 28 is provided with an outrigger support portion 35 that traverses the movement path of the chuck table 40, and the outrigger support portion 35 is an image pickup portion 36 that picks up the object W to be supported. The imaging image of the imaging unit 36 is used for the alignment of the cutting means 24 and the chuck table 40. Further, a monitor 37 that displays processing conditions and the like is mounted on the support table 28.

A suction cup table mechanism 50 (see FIG. 3) is provided in the cabinet 10 so that only the suction cup table 40 is exposed on the cabinet 10. The chuck table mechanism 50 rotates the chuck table 40 to position the cutting blade 26 at an orthogonal tangent path, and is used to hold the negative pressure of the workpiece W on the holding surface 41 of the chuck table 40. Therefore, the chuck table mechanism 50 has a rotary joint structure, and is configured to rotatably engage the chuck table 40 while suppressing air leakage to a fixed base on which a fluid path is formed.

However, as shown in the comparative example of FIG. 2, the general chuck table mechanism 100 uses a plurality of tubes 105 to realize a rotary joint structure. The rotary joint structure of the chuck table mechanism 100 of the comparative example is such that the rotation base 102 supporting the chuck table 101 is provided so as to surround the fixed base 103 having a cylindrical shape. A multi-joint 104 is provided in the center portion of the rotary base 102. The multi-joint 104 is a plurality of tubes 105 connected to each other. Each of the tubes 105 is connected from the multi-joint 104 to an external attraction source (not shown) by fixing the inside of the base 103. Icon). Then, the attraction force from the external attraction source comes through the tube 105. The holding surface 107 of the chuck table 101 is provided.

However, in this sucker table mechanism 100, the tube 105 is twisted with the rotation of the sucker table 101, so the tube 105 may be deteriorated and damaged over time, and the connection portion between the multi-joint 104 and the tube 105 may be damaged. Fragments generated by the damage of the tube 105 or the multi-joint 104 will accumulate inside the fixed base 103, and the replacement operation of the tube 105 or the multi-joint 104 and the cleaning operation in the fixed base 103 will be cumbersome and require long-term maintenance. problem. In addition, since the attraction force from the external attraction force is given to the holding surface 107 of the chuck table 101 via the plurality of tubes 105, the pressure loss in the tube 105 increases and the attraction force decreases.

Therefore, in the present embodiment, the rotary joint structure of the comparative example described above is changed, and instead of using a plurality of tubes 105, the chuck table 40 is rotatably and attractably supported. In addition, by simply removing a part of the parts of the chuck table mechanism 50, consumable members such as the seal ring 84 (see FIG. 3) inside the mechanism can be easily replaced, and maintenance time can be greatly reduced. In addition, the suction pad stage 40 and the external suction source 94 (see FIG. 3) are connected by a single path, thereby reducing pressure loss in the flow path and increasing suction power.

The chuck table mechanism according to this embodiment will be described below. Fig. 3 is a schematic cross-sectional view of a chuck table mechanism according to the present embodiment. In addition, the chuck table mechanism is not limited to the example shown in FIG. 3 as long as the seal ring can be replaced from above by attaching and detaching the insertion portion. For example, although the chuck table mechanism for a package substrate is taken as an example in the following description, the same configuration can be adopted for a chuck table mechanism for a semiconductor wafer or an optical device wafer.

As shown in FIG. 3, the chuck table mechanism 50 is rotatably supported by mounting a chuck table 40 on the upper portion. The chuck table 40 sucks and holds the workpiece W thereon, and is rotatably arranged above the fixed base 52. A rotation means 51 is provided. The rotation means 51 is provided with a chuck table 40 mounted on the upper part. The chuck table 40 has an upper and lower divided structure formed on the upper surface of the pedestal 42 in a detachable mounting table body 43. The table body 43 is formed around the upper portion of the suction port 44, and the lower portion fixed to the table 42 is formed in a flange shape. In the upper portion of the table body 43, the holding surface 41 is formed by a plurality of suction openings 44. In the lower portion of the table body 43, a mounting hole 46 for a bolt 45 is formed (see FIG. 4A).

In addition, the pedestal 42 is formed into a ring plate having a central opening, and a screw hole 47 (see FIG. 4A) is formed at a position corresponding to the mounting hole 46 (see FIG. 4A) of the table body 43. The front end of the bolt 45 protruding from the mounting hole 46 of the table body 43 is screwed into the screw hole 47 of the table 42, so that the table body 43 is detachably mounted on the table 42. By attaching the table body 43 to the pedestal 42, a communication chamber 96 is formed to communicate the plurality of suction ports 44 to the suction path 95 of the rotating means 51. Further, a mounting hole 49 (see FIG. 4B) for the bolt 48 is formed inward in the radial direction from the screw hole 47 (see FIG. 4A) of the pedestal 42.

The rotation means 51 is configured by connecting an insertion portion 55 that can be inserted into the fixed base 52 with a flange plate 56 on a rotating base 54 that is rotatably disposed above the fixed base 52. The rotary base 54 is formed in a large cylindrical shape so as to cover the upper portion of the fixed base 52, and is connected to the fixed base via a bearing 57 provided on the opposite surface of the rotary base 54 and the fixed base 52. Abutment 52. In addition, on the upper surface of the rotary base 54 is a table mounting surface 61 on which the suction pad table 40 is mounted, and on the table mounting surface 61 is formed a screw hole 62 (see FIG. 4B) corresponding to the mounting hole 49 (see FIG. 4B) of the base 42. (See Figure 4B). The front end of the bolt 48 protruding from the mounting hole 49 of the pedestal 42 is screwed into the screw hole 62 of the rotary base 54, so that the pedestal 42 is detachably mounted on the upper portion of the rotary base 54.

A ring-shaped flange plate 56 is attached to a plate mounting surface 63 which is one step lower than the table mounting surface 61 on the radially inner side of the upper surface of the rotary base 54. The radial outer side of the flange plate 56 is connected to the plate mounting surface 63, and the radial inner side of the flange plate 56 is connected to the upper end surface of the cylindrical insertion portion 55. The thickness of the flange plate 56 is consistent with the step difference between the table mounting surface 61 and the plate mounting surface 63, and the surface of the table mounting surface 61 and the upper surface of the flange plate 56 are the same. That is, the upper surface of the flange plate 56 also forms a part of the table mounting surface on which the chuck table 40 is mounted.

A mounting hole 65 (see FIG. 4C) for the bolt 64 is formed outside the flange plate 56 in the radial direction, and a screw hole 69 (see FIG. 4C) is formed on the plate mounting surface 63 at a position corresponding to the mounting hole 65. The screw hole 69 of the plate mounting surface 63 is screwed to the front end of the bolt 64 protruding from the mounting hole 65 of the flange plate 56, so that the flange plate 56 is detachably mounted on the plate mounting surface 63. The radial inner side of the flange plate 56 is exposed from an opening in the center of the pedestal 42, and a mounting hole 68 for a bolt 67 is formed in the exposed portion of the pedestal 42.

The insertion portion 55 is formed in a cylindrical shape extending from the flange plate 56 toward the communication path 97 of the fixed base 52. It is shaped inside the insertion part 55 A suction path 95 is formed to convey the attractive force of the communication path 97 from the fixed base 52 to the upper surface of the chuck table 40. A screw hole (not shown) is formed on the upper end surface of the insertion portion 55 at a position corresponding to the mounting hole 68 (see FIG. 4C) of the flange plate 56. The front end of the bolt 67 protruding from the mounting hole 68 of the flange plate 56 is screwed into the screw hole of the insertion portion 55, and the insertion portion 55 is detachably mounted on the flange plate 56. In this way, the insertion portion 55 is detachably fixed to the rotation center of the rotation base 54 via the flange plate 56.

On the upper surface of the flange plate 56, the plate mounting surface 63 of the rotary base 54, and the upper end surface of the insertion portion 55, annular grooves 75, 76, and 77 are respectively formed (see FIG. 4C). 76 and 77 are seal rings 81, 82, and 83, respectively. The pedestal 42 is sealed to the table mounting surface 61 via a seal ring 81, the flange plate 56 is sealed to the plate mounting surface 63 via a seal ring 82, and the upper end surface of the insertion portion 55 is sealed to the flange plate 56 via a seal ring 83. . Thereby, there is no possibility that air leaks from the joint surfaces between the members, and it is possible to suppress a decrease in the attractive force of the chuck table 40.

At the lower end of the insertion portion 55 is an engagement end portion 72 formed into the communication path 97 of the fixed base 52. The engaging end portion 72 is formed by reducing the diameter of the outer peripheral surface of the lower end side of the insertion portion 55 and is engaged in the engaging recessed portion 73 which is enlarged in diameter at the upper end side of the communication path 97 of the fixed base 52. An annular groove 78 is formed on the outer peripheral surface of the engagement end portion 72, and a seal ring 84 is attached to the annular groove 78. Once the engaging end portion 72 is engaged with the engaging recessed portion 73, a seal ring 84 is sealed between the outer peripheral wall of the engaging end portion 72 and the inner peripheral wall of the engaging recessed portion 73. This prevents air from leaking from the joint surface of the engagement end 72 and the engagement recess 73, and the communication path 97 and the suction path 95 are hermetically connected.

Further, by removing the chuck table 40 from the rotary base 54 and removing the flange plate 56 from the rotary base 54 and the insertion portion 55, the seal rings 81, 82, and 83 are exposed to the outside. Further, by removing the insertion portion 55 from the rotary base 54 together with the flange plate 56, the seal ring 84 is exposed to the outside. Therefore, there is no case where the entire rotation means 51 is removed from the fixed base 52, and only the consumable seal rings 81, 82, 83, and 84 can be easily replaced. In addition, in the seal rings 81, 82, and 83, a fixed seal is used, and in the seal ring 84, a sports seal is used. However, an O-ring may be used.

The fixed base 52 is configured by providing an upper base 87 on the lower base 86, and a communication path 97 is formed inside the upper base 87 and the lower base 86 to communicate with an external suction source 94. The communication path 97 of the fixed base 52 is a suction path 95 connected to the insertion portion 55, and the suction path 95 is a communication chamber 96 connected to the inside of the chuck table 40. Since a single path is formed by the communication path 97 and the suction path 95, pressure loss in the flow path does not occur, and the suction force from the external suction source 94 can be given to the holding surface 41 of the chuck table 40. A bearing 57 is provided on the upper base 87, and the rotary base 54 is rotatably held on the fixed base 52 by the bearing 57.

In addition, the rotary base 54 and the fixed base 52 are provided with a rotation motor 91 that rotates the rotation means 51. The rotation motor 91 is configured such that a rotor 93 connected to a rotation base 54 rotates around a stator 92 fixed to a fixed base 52. Coil wires and the like are mounted on the stator 92, and the rotor 93 is opposed to the stator 92 with a slight clearance There are plural magnets in the formula. When the coil 巻 of the stator 92 is energized, the rotor 93 rotates around the fixed base 52, and the rotating base 54 and the chuck stage 40 connected to the rotor 93 are rotated integrally.

In this way, the rotary joint of the chuck table mechanism 50 rotatably supports the chuck table 40 without leaking air. The suction force from the external suction source 94 can be given to the holding surface 41 of the chuck table 40. In addition, since the engaging end portion 72 of the insertion portion 55 and the engaging recessed portion 73 of the fixed base 52 slide through the seal ring 84, the seal ring 84 at the sliding portion is particularly liable to deteriorate. However, since the insertion portion 55 is detachably attached to the rotating base 54, the sealing ring 84 can be easily replaced by removing the insertion portion 55 from the rotating base 54.

The replacement operation of the seal ring will be described with reference to FIG. 4. FIG. 4 is an explanatory diagram of the replacement operation of the seal ring of the present embodiment. In addition, FIG. 4A shows the detaching operation of the table body, FIG. 4B shows the detaching operation of the pedestal, and FIG. 4C shows the detaching operation of the flange plate and the insertion portion. In the following description, the replacement operation of the seal ring provided between the engaging end portion of the rotating means and the engaging recessed portion of the fixed base will be described.

As shown in FIG. 4A, in the replacement operation of the seal ring 84 (see FIG. 4C), first, the operator loosens the bolts 45 on the outer peripheral portion of the stage body 43, and removes the stage body 43 from the upper surface of the stage 42. As a result, the bolts 48 for the stand 42 hidden inside the stand body 43 are exposed to the outside. Next, as shown in FIG. 4B, the bolts 48 of the pedestal 42 are relaxed by the operator, and the pedestal 42 is removed from the pedestal mounting surface 61 of the rotary base 54. Thereby, the bolt for the flange plate 56 hiding on the back side of the pedestal 42 64 is exposed to the outside, and the seal ring 81 of the annular groove 75 attached to the upper surface of the flange plate 56 is exposed to the outside.

Next, as shown in FIG. 4C, the operator loosens the bolts 64 on the radially outer side of the flange plate 56, removes the flange plate 56 from the plate mounting surface 63 of the rotary base 54, and fixes the flange plate 56 to the flange. The insertion portion 55 of the plate 56 is pulled out from the fixed base 52. Thereby, the seal ring 82 of the annular groove 76 attached to the board mounting surface 63 is exposed to the outside, and the seal ring 84 of the annular groove 78 attached to the engaging end portion 72 of the insertion portion 55 is exposed to the outside. Then, the degraded seal ring 84 in the annular groove 78 is removed, and after the new seal ring 84 is installed, the flange plate 56, the pedestal 42, and the table body 43 are attached in the reverse order of the removal operation described above.

In addition, during the replacement operation of the seal ring 84, the seal ring 81 of the annular groove 75 on the upper surface of the flange plate 56 and the seal ring 82 of the annular groove 76 on the plate mounting surface 63 may be replaced. In addition, in FIG. 4, the insertion portion 55 is fixed to the flange plate 56. However, the insertion portion 55 may be removed from the flange plate 56 and the seal of the annular groove 77 attached to the upper end surface of the insertion portion 55 may be replaced. Ring 83.

As described above, the chuck table mechanism 50 of this embodiment is the rotation means 51 rotatably disposed on the fixed base 52, and the insertion portion 55 provided on the rotation means 51 is inserted into the fixed base 52 and inserted. The suction path 95 of the portion 55 and the communication path 97 of the fixed base 52 are communicated. As a result, the suction force from the external suction source 94 is given to the chuck table 40 via the communication path 97 of the fixed base 52 and the suction path 95 of the insertion portion 55. Then, the engaging end portion 72 of the insertion portion 55 is engaged with the fixing portion. The engagement recess 73 of the base 52, the outer peripheral wall of the engagement end 72, and the inner wall of the engagement recess 73 are hermetically sealed with a seal ring 84. Therefore, there is no possibility of air leakage, and the chuck table 40 is rotatably and attractably supported. In addition, since a single path is formed by the suction path 95 of the insertion portion 55 and the communication path 97 of the fixed base 52, the pressure loss in the path can be reduced to improve the attractive force. Furthermore, the simple operation of removing the insertion portion 55 from the rotation base 54 of the rotation means 51 and pulling out the engagement end portion 72 of the insertion portion 55 from the engagement recess 73 of the fixed base 52 can be easily replaced from above. The seal ring 84 can greatly shorten the maintenance time.

In the above-mentioned embodiment, the suction surface 44 is formed in the holding surface 41 of the chuck table 40 in a large number, but the structure is not limited to this. The holding surface 41 of the chuck table 40 may be made of porous ceramics. In addition, the chuck table 40 has a structure in which the table body 43 is detachably attached to the table 42, but the table 42 and the table body 43 may be integrally formed.

In the above-mentioned embodiment, an electromagnetic motor is used as the rotation motor 91 for description, but the configuration is not limited to this. An electrostatic motor or an ultrasonic motor may be used as the rotation motor 91.

In the above-mentioned embodiment, the flange plate 56 is fixed to the rotary base 54 by screws, and the insertion portion 55 is fixed to the flange plate 56 by screws, thereby forming the insertion portion 55 to be fixed to the flange plate 56 via the flange plate 56. The configuration of the rotary base 54 is not limited to this configuration. The insertion portion 55 may be detachably fixed to the rotary base 54, and may be fixed to the rotary base 54 in any manner.

In the above embodiment, the external attraction source 94 is only It suffices that the suction surface can be imparted to the holding surface 41 of the chuck table 40 via the communication path 97 of the fixed base 52. For example, it may be configured by a suction pump or an ejector.

In the above-mentioned embodiment, the package substrate is used as the workpiece W. The workpiece W may be a workpiece to be processed, and may be a semiconductor wafer or an optical device wafer.

In the above-mentioned embodiment, the configuration in which the seal ring 84 is formed to be attached to the annular groove 78 formed on the outer side surface of the engagement end portion 72 of the insertion portion 55 is not limited to this configuration. The seal ring 84 is only required to be able to seal the space between the inner peripheral wall of the engaging recessed portion 73 and the outer peripheral wall of the engaging end portion 72. As shown in FIG. 3, the upper open end of the engagement recess 73 is recessed into a step shape, and the step 72a of the engagement end portion 72 enters this step recess 73a. However, the step recess 73a of the engagement recess 73 is recessed. A seal ring may be used to seal the stepped portion 72 a of the engaging end portion 72. In this case, an annular groove for mounting a seal ring may be formed on the bottom surface of the stepped recess 73 a of the engagement recess 73 so that the seal ring can be sandwiched by the engagement recess 73 and the engagement end 72 from the up-down direction. Even with such a configuration, the seal ring can be exposed to the outside by removing the insertion portion 55 from the rotary base 54.

In addition, although the embodiments and modifications of the present invention are described, other embodiments of the present invention may be combined with the above-mentioned embodiments and modifications in whole or in part.

In addition, the embodiments of the present invention are not limited to the above-described embodiments, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. As long as it can be improved by technology or Derived other technologies can be implemented using other methods to implement the technical idea of the present invention. Therefore, the scope of patent application is all embodiments covered by the scope of the technical idea of the present invention.

In addition, in the embodiment of the present invention, the configuration in which the present invention is applied to a chuck table mechanism has been described, but it can also be applied to a rotary joint structure that can rotate and attract the chuck table.

[Industrial availability]

As described above, the present invention has the effect of reducing the maintenance time while supporting the chuck table in a rotatable and attractive manner without using a tube, and is particularly useful for a chuck table mechanism for a package substrate.

40‧‧‧ Suction table

41‧‧‧ keep face

42‧‧‧ pedestal

43‧‧‧units

44‧‧‧ Attraction

45‧‧‧ Bolt

48‧‧‧ Bolt

50‧‧‧ Suction table mechanism

51‧‧‧ Rotation means

52‧‧‧ fixed abutment

54‧‧‧ Rotary Abutment

55‧‧‧ Insertion

56‧‧‧ flange plate

57‧‧‧bearing

61‧‧‧mounting surface

63‧‧‧Board mounting surface

64‧‧‧ Bolt

67‧‧‧Bolt

72‧‧‧ Engagement end of insertion part

72a‧‧‧stage

73a‧‧‧step depression

73‧‧‧ Engagement recess of fixed machine

78‧‧‧Circular groove

81‧‧‧sealing ring

82‧‧‧sealing ring

83‧‧‧Sealing ring

84‧‧‧Sealing ring

86‧‧‧Lower abutment

87‧‧‧upper abutment

91‧‧‧rotating motor

92‧‧‧ Stator

93‧‧‧rotor

94‧‧‧ External Attraction Source

95‧‧‧ Attraction Path

96‧‧‧ connecting room

97‧‧‧ Connected Path

W‧‧‧Processed

Claims (2)

A chuck table mechanism is mounted on an upper part and rotatably supported. The chuck table is used for attracting and holding an object to be processed, and is characterized by: a fixed base, which is connected to an external attraction source. The path will be formed inside; and a rotating means, which is rotatably arranged above the fixed base, and a suction cup stage is mounted on the upper part, the rotating means is provided with: a rotating base, which is rotatably arranged on the Above the fixed abutment; and an insertion portion configured to be detachably fixed to the rotating abutment at a rotation center and insertable into the fixed abutment, the insertion portion is provided with an engaging end portion that conveys attraction The suction path to the upper surface of the chuck table is formed inside, and is engaged with the engaging recess of the fixed base. Once the engaging end is engaged with the engaging recess, it is on the outer periphery of the engaging end. A sealing ring is sealed between the wall and the inner wall of the engaging recess of the fixed base, and the communication path and the suction path are connected. For example, the chuck table mechanism of the first patent application range, wherein the rotation means is held on the fixed base with a bearing, and the fixed base is provided with a rotation motor that rotates the rotation means.