TWI750816B - Substrate processing apparatus - Google Patents

Abstract

The invention relates to a substrate processing device, comprising: a rotary table on which wafers are placed on the upper surface of the rotary table; an annular sealing ring combined with the upper part of the rotary table and formed with a plurality of hooking grooves along the inner peripheral surface; a plurality of opening and closing units , set up to be able to interlock in the radial direction based on the vertical rotation center of the turntable, when performing the locking action, it is hooked to the hooking groove, and when the unlocking action is performed, it is disengaged from the hooking groove, thereby releasing the hooking ; and a power transmission unit, which is arranged in the setting space of the rotary table, and causes the opening and closing unit to be linked to the locking position or the unlocking position through an external force.

Description

Substrate processing equipment

The present invention relates to a substrate processing apparatus, and in particular, to a substrate processing apparatus that simplifies the bonding and separation process of the seal ring and can reduce the bonding error (distortion, etc.) of the seal ring.

Generally, processes such as etching and washing wafers need to be performed in the semiconductor manufacturing process, and a substrate processing apparatus is used in the process of etching or washing the wafers. The substrate processing apparatus for washing wafers is composed of a rotatable turntable on which the wafer is placed, and a seal ring connected to an edge region of the turntable in a ring shape, and supplies a processing liquid to the wafers placed on the turntable. However, according to the conventional substrate processing apparatus, the process of bonding the seal ring to the upper part of the turntable is complicated, and the bonding completion state of the seal ring is not fixed during bonding, and bonding errors (torsion, etc.) may occur. It will be the main reason for reducing the function of the sealing ring.

As a prior art document related to the present invention, there is Korean Patent Publication No. 10-2016-0122067, which was published on October 21, 2016, and the above prior art document discloses a wafer processing apparatus and a seal for the wafer processing apparatus ring.

technical problem

An object of the present invention is to provide a substrate processing apparatus capable of reducing coupling errors (twist etc.) of seal rings.

Another object of the present invention is to provide a substrate processing apparatus that can further improve the sealing performance of the seal ring and can prevent chemical liquid from permeating between the turntable and the seal ring.

technical solutions

The substrate processing apparatus according to the present invention includes: a rotary table on which wafers are placed on the upper surface of the rotary table; an annular sealing ring coupled to the upper part of the rotary table, and a plurality of hooking grooves are formed along the inner peripheral surface of the sealing ring ; A plurality of opening and closing units are arranged to be able to be linked in the radial direction with the vertical rotation center of the turntable as a reference. When performing a locking action, the opening and closing units are hooked to the hooking groove, and when performing an unlocking action, the opening and closing units are removed from the hook. The connecting groove is disengaged, thereby releasing the hooking; and the power transmission unit is arranged in the installation space of the rotary table, and the opening and closing unit is linked to the locking position or the unlocking position through an external force.

Preferably, the rotary table has a placement portion protruding along the side surface of the rotary table to place the lower end of the sealing ring, the lower end of the sealing ring is placed on the placement portion, and the inner peripheral surface of the sealing ring is closely attached to the side surface of the rotary table.

The opening and closing unit includes: a rotating shaft, which is arranged in the radial direction based on the vertical rotation center of the rotating table, and the lower end of the rotating shaft is penetratingly coupled to the rotating table in a horizontally rotatable manner; a driven gear is coupled to the rotating table in a horizontally rotatable manner The lower end of the rotating shaft; and the rod, which is combined with the upper end of the rotating shaft in a horizontally rotatable manner. When rotating to the locking position, the eccentric end to one side is hooked to the hooking groove, and when rotating to the unlocking position, it is connected to one side. The eccentric end of the side is released from the hooking slot, thereby releasing the hooking.

The lower surface of the lever further has a tapered surface, and the tapered surface is formed to be inclined upward toward the eccentric end. When the lever is rotated to the locking position, the tapered surface presses downward to support the lower surface of the hooking groove.

Preferably, the power transmission unit is mechanically engaged with the driven gear, so that the driven gear rotates to the locked position or the unlocked position. The power transmission unit includes: a rotating plate, which is rotatable in the locking direction or the unlocking direction with the vertical rotation center as a reference, and a plurality of guide holes are formed through the vertical direction in the radial direction; The holes are slidably coupled, and a moving serration is formed at one end of the connecting rod in the width direction to engage with the driven gear. Wherein, when the rotating plate rotates in the locking direction, the connecting rod slides to the outside of the rotating plate, so that the driven gear rotates to the locked position, and when the rotating plate rotates in the unlocking direction, the connecting rod moves in the direction of the vertical rotation center of the rotating plate. Slide so that the driven gear turns to the unlocked position. In addition, the guide hole has a shape of an elongated hole having a length in the oblique direction toward the vertical rotation center and the edge of the rotary plate, and one end on the longitudinal side of the connecting rod has a guide shaft which is slidably inserted into the guide hole. internal.

Preferably, the present invention further comprises: an elastic member, two ends of the elastic member are combined with the setting space and the rotating plate, and act a pulling force in the locking direction of the rotating plate.

Preferably, a plurality of fastening pins are vertically arranged on the rotary table along the upper surface of the placing portion, and the lower end of the sealing ring is recessed with fastening grooves for corresponding insertion of the fastening pins through concave-convex manner.

The rotary table further has: an annular outer gasket groove, which is continuously formed along the upper surface of the placement portion; and an annular outer gasket, which is inserted into the outer gasket groove correspondingly, and the outer gasket protrudes toward the upper part of the outer gasket groove. The upper end is in close contact with the lower end of the sealing ring.

In addition, an extension portion is formed on the seal ring to protrude along the inner peripheral surface, and the rotary table may further include: an annular inner gasket groove, the inner gasket groove is continuously formed along the upper surface of the edge side of the seal ring; and an annular inner seal The inner gasket is inserted into the inner gasket groove correspondingly, and the upper end protruding to the upper part of the inner gasket groove is closely attached to the lower surface or inner peripheral surface of the extension part.

effect of invention

The present invention utilizes the linear motion of the connecting pin linked with the rotational motion of the rotating plate to make the plurality of rods rotate to the locking position or the unlocking position, thereby simultaneously realizing the locking and unlocking of the rods, so the combination and separation process of the sealing ring is simple, and it has the advantages of This has the effect of producing a coupling error (twist, etc.) of the seal ring.

In addition, the present invention can further improve the sealing performance of the sealing ring by combining the sealing gasket with its own elasticity at the corresponding parts of the rotary table and the sealing ring, and has the effect of preventing the liquid medicine from penetrating between the rotary table and the sealing ring.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention and methods for achieving these advantages and features can be clearly illustrated with reference to the accompanying drawings and the detailed description of the embodiments. However, the present invention is not limited to the plurality of embodiments disclosed below, and can be further implemented in other various ways. These embodiments are only used to completely disclose the present invention, and are intended to fully inform those with ordinary knowledge in the art Provided for the protection scope of the present invention, the protection scope of the present invention is defined based on the scope of the patent application.

In addition, in the course of describing the present invention, if it is judged that the related conventional techniques and the like may obscure the gist of the present invention, the detailed description thereof will be omitted.

1 is a perspective view for illustrating a substrate processing apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view for illustrating a substrate processing apparatus according to an embodiment of the present invention from below, and FIG. 3 is a perspective view for illustrating a substrate processing apparatus according to an embodiment of the present invention A front cross-sectional view of a substrate processing apparatus according to an embodiment of the present invention. In addition, FIG. 4 is an exploded perspective view for illustrating a state in which the seal ring of the substrate processing apparatus according to an embodiment of the present invention is separated, and FIG. 5 is an exploded perspective view for illustrating a seal ring in the substrate processing apparatus according to an embodiment of the present invention. 6 is a bottom view for illustrating a power transmission unit in a substrate processing apparatus according to an embodiment of the present invention. In addition, FIG. 7 is a plan view for illustrating the connection relationship between the opening and closing unit and the power transmission unit in the substrate processing apparatus according to an embodiment of the present invention in detail, and FIG. 8 is a plan view for illustrating the substrate processing apparatus according to an embodiment of the present invention. An exploded perspective view of the middle and outer gasket grooves, and the outer and inner gasket grooves and the inner gasket, and FIG. 9 is a partial view for illustrating a state in which a taper surface is formed on a rod in a substrate processing apparatus according to an embodiment of the present invention. front sectional view.

As shown in FIGS. 1 to 9 , the substrate processing apparatus according to an embodiment of the present invention includes a rotary table 100 , a sealing ring 200 , an opening and closing unit 300 , a power transmission unit 400 and a driving unit 500 .

The upper part of the turntable 100 is placed on a wafer to be processed (eg, washed, etc.), and the vertical rotation center of the turntable 100 is coupled with a rotation shaft so as to be able to rotate horizontally. Wherein, the rotary table 100 may have the shape of a circular plate, and the rotating shaft of the rotary table 100 may transmit a rotational force through an additional rotational driving part (not shown). Various structures for horizontally supporting the wafer can be applied to the turntable 100, and a placement portion 101 may be formed protruding from the edge of the turntable 100 so that the lower end of the seal ring 200 described later can be placed. That is, when the seal ring 200 is coupled to the upper part of the turntable 100 , the inner peripheral surface of the seal ring 200 is in close contact with the side surface of the turntable 100 , and the lower end of the seal ring 200 is placed on the upper surface of the placement portion 101 .

The upper surface of the placing portion 101 is provided with a fastening pin 120 , and the fastening pins 120 may be vertically arranged along the upper surface of the placing portion 101 in a state where a plurality of fastening pins 120 are separated. Wherein, the fastening pin 120 may have a cylindrical shape whose side surfaces form a circumference, and the upper end of the fastening pin 120 may have a tapered shape whose diameter gradually decreases toward the upper portion.

The tightening pins 120 are configured to be inserted into the tightening grooves 220 of the seal ring 200 to be described later in a concave-convex manner, and can be formed in the same number as the tightening grooves 220 .

The sealing ring 200 is correspondingly coupled to the upper portion of the rotary table 100 , and the sealing ring 200 may have a ring shape corresponding to the edge of the rotary table 100 . Wherein, the center of the sealing ring 200 may penetrate up and down to form a hollow, and along the inner peripheral surface of the sealing ring 200 may continuously protrude to form an extension portion 201 .

The upper surface of the extension part 201 may have a taper whose height is gradually reduced toward the center direction, and the lower surface of the extension part 201 is placed on the upper surface of the turntable. That is, the protruding end of the extension part 201 may be closely attached to the upper surface of the rotary table 100 , and the lower end of the sealing ring 200 may be placed on the upper surface of the placing part 101 . At this time, the inner peripheral surface of the sealing ring 200 may be in close contact with the side surface of the turntable 100 , and the lower end of the sealing ring 200 is placed on the upper surface of the placing portion 101 .

A plurality of hooking grooves 210 may be recessed and formed on the inner peripheral surface of the sealing ring 200 at predetermined intervals along the circumferential direction. The hook groove 210 is a member for inserting and disengaging one end of the rod 330 to be described later, and the hook groove 210 may be formed to be recessed in the radial direction with reference to the center of the seal ring 200 . A fastening groove 220 is recessed at the lower end of the sealing ring 200 so that the upper end of the above-mentioned fastening pin 120 can be correspondingly inserted.

As shown in FIG. 3 , when the sealing ring 200 is combined with the upper part of the rotary table 100 , the fastening pin 120 is inserted vertically through the lower part of the fastening groove 220 , so the sealing ring 200 will not shake sideways. Also, an annular outer gasket groove 130 may be continuously formed along the upper surface of the placement portion 101 , and as shown in FIG. 3 , the outer gasket groove 130 may be located on the periphery of the fastening pin 120 .

At the same time, the outer gasket 150 can be inserted into the outer gasket groove 130 correspondingly, and the upper end of the outer gasket 150 protrudes to the upper part of the outer gasket groove 130 so as to closely adhere to the lower end of the sealing ring 200 . The outer gasket 150 can be made of a material with elastic restoring force (rubber, resin series, etc.), and one or more rows of outer gasket grooves 130 and outer gaskets 150 can be formed as required. The lower part of the outer gasket groove 130 may be recessed to the side to form a hanging platform extending wider in the radial direction, and the lower end of the outer gasket 150 may also have a corresponding hooking protrusion protruding. As shown in FIG. 3 , such an outer gasket 150 closely adheres to the lower end of the sealing ring 200 through its own elasticity, thereby achieving sealing to prevent the inflow of medicinal liquid between the sealing ring 200 and the placing portion 101 (not shown in the figure). ).

As shown in FIGS. 3 and 8 , an inner gasket groove 140 may be continuously formed on the upper surface of the rotary table 100 along the edge side upper surface. At the same time, the inner gasket 160 can be inserted into the inner gasket groove 140 correspondingly, and the upper end of the inner gasket 160 can closely adhere to the lower surface or inner peripheral surface of the above-mentioned extension part 201 . The inner gasket 160 can be made of an elastic material (rubber, resin, etc.), and one or more rows of inner gasket grooves 140 and inner gaskets 160 can be formed as required.

The lower part of the inner gasket groove 140 may be recessed laterally to form a hanging platform extending wider in the radial direction, and the lower end of the inner gasket 160 may also protrude with a corresponding hooking protrusion. As shown in FIG. 3 , such an inner gasket 160 closely adheres to the extension portion 201 of the sealing ring 200 through its own elasticity, so it can be sealed to prevent the inflow of chemical liquid ( Not shown), by adjusting the hardness of the inner gasket 160 and the outer gasket 150 in various ways, the sealing force of the sealing ring 200 can be adjusted in various ways.

On the other hand, although not specifically described, an independent structure (eg, a suction structure, a support structure, etc.) for horizontally positioning a wafer (not shown) may be provided inside the turntable 100 .

The opening and closing unit 300 is a member for hooking the seal ring 200 to the upper end of the turntable 100 or releasing the hook from the turntable 100 , and is provided so as to be able to interlock in the radial direction with reference to the vertical rotation center of the turntable 100 . . Such an opening and closing unit 300 will be hooked to the hooking groove 210 of the seal ring 200 when performing a locking operation, and will be released from the hooking groove 210 of the sealing ring 200 when performing an unlocking (Unlocking) operation. . In more detail, as shown in FIGS. 3 and 7 , the opening and closing unit 300 may have a rotating shaft 310 , a driven gear 320 , and a lever 330 .

The rotation shaft 310 is arranged in the radial direction with reference to the vertical rotation center C1 of the turntable 100 , and the lower end thereof is penetratingly coupled to the turntable 100 so as to be able to rotate horizontally. At this time, the lower end of the rotating shaft 310 may be vertically positioned inside the installation space 110 , and the driven gear 320 may be coupled to the lower end of the rotating shaft 310 .

The driven gear 320 can rotate horizontally together with the rotating shaft 310, and is engaged with the moving serrations 421 of the connecting rod 420 to be described later.

The lever 330 is a member that is horizontally rotatably coupled to the upper end of the rotating shaft 310, and the end eccentric to one side can be rotated to a locked position or an unlocked position. Wherein, when the rod 330 is rotated to the locking position, the eccentric end to one side is hooked to the hooking groove 210, and when it is rotated to the unlocking position, it is disengaged from the hooking groove 210, thereby releasing the hooking. That is to say, when the rod 330 is hooked to the hooking groove 210, the sealing ring 200 can be fixedly located on the upper part of the rotary table 100, and when the rod 330 is disengaged from the hooking groove 210, the sealing ring can be separated from the rotary table 100 200.

On the other hand, as shown in FIG. 9 , the lower surface of the rod 330 may be further formed with a tapered surface 331 inclined upward toward the eccentric end. When the rod 330 is rotated to the locking position, the tapered surface 331 presses the lower surface of the hooking groove 210 downward, so that the lower end of the sealing ring 200 can tightly abut the upper end of the outer gasket 150 .

The power transmission unit 400 is installed in the installation space 110 of the turntable 100 , and drives the rotation lever to the locked position or the unlocked position through an external force. In more detail, as shown in FIG. 6 , the power transmission unit 400 may have a rotating plate 410 and a plurality of connecting rods 420 .

The rotating plate 410 can rotate in the locking or unlocking direction based on the vertical rotation center C, and can act centrifugal force during rotation. Wherein, the rotating plate 410 may have the shape of a circular plate, and the vertical rotation center C1 of the rotating plate 410 may be formed with a hollow portion 412 penetrating up and down.

The guide hole 411 may have a shape of an elongated hole having a length in the oblique direction toward the vertical rotation center C of the rotating plate 410 and the edge of the rotating plate 410 . That is, both ends of the longitudinal side of the guide hole 411 are positioned obliquely in the direction of the vertical rotation center C of the rotating plate 410 and the edge side of the rotating plate 410, so that the guide shaft 422 described later can be rotated in both directions of the rotating plate 410 to the direction of the rotating plate 410. The locked or unlocked position moves linearly.

In addition, the rotating serrations 413 may be formed on the inner peripheral surface of the rotary plate 410 so as to engage with the drive gear 520 described later. The rotating saw teeth 413 can be arranged according to the same curvature as the rotation radius of the rotating plate 410 , and the rotating plate 410 can be rotated in the locking or unlocking direction through the rotational force transmitted to the rotating saw teeth 413 .

Moreover, the elastic member 440 may be further combined in the installation space 110 of the turntable 100 . Both ends of the elastic member 440 are coupled to the installation space 110 and the rotating plate 410 , and can act a pulling force in the locking direction of the rotating plate 410 . The elastic member 440 may have a coil spring shape, a first connecting portion 170 may be provided inside the setting space 110 to connect one end of the elastic member 440, and a second connecting portion 414 may be formed on the inner peripheral surface of the rotating plate 410 for connecting The other end on the opposite side of the elastic member 440 . Such an elastic member 440 can act a tensile elastic force in the locking rotation direction of the rotary plate 410 , and can realize various installation positions of the elastic member 440 and the application direction of the tensile elastic force as required.

The connecting rod 420 is a member for converting the rotational motion of the rotary plate 410 into a linear motion in the installation space 110 and transmitting it to the opening and closing unit 300 , and reciprocates in the radial direction with the vertical rotation center C of the rotary plate 410 as a reference move. One end of the connecting rod 420 in the longitudinal direction is slidably coupled along the guide hole 411 , and one end in the width direction of the connecting rod 420 is formed with a moving serration 421 along the longitudinal direction to engage with the driven gear 320 .

The moving serrations 421 are arranged along the longitudinal direction of the connecting rod 420 and are engaged with the vertical rotation center C2 of the driven gear 320 in an orthogonal manner.

In addition, one end on the longitudinal direction side of the connecting rod 420 opposite to the moving serration portion 421 may have a guide shaft 422 which is slidably inserted into the guide hole 411 . The guide shaft 422 can slide in the longitudinal direction of the guide hole 411 in a state of being vertically penetratingly coupled to the guide hole 411 . The guide shaft 422 may further have a bearing for reducing friction when moving along the guide hole 411 .

When the rotating plate 410 rotates in the locking direction, the connecting rod 420 will slide to the outside of the rotating plate 410, so that the driven gear 320 is rotated to the locking position. Conversely, when the rotating plate 410 rotates in the unlocking direction, it slides in the direction of the vertical rotation center C1 of the rotating plate 410 , so that the driven gear 320 is rotated to the unlocking position.

In addition, the installation space 110 of the rotary table 100 may further include a guide module 430 for slidably supporting the connecting rod 420 . The guide module 430 slidably supports the outside of the connecting rod 420 so that the connecting rod 420 can move toward the locking and unlocking directions without shaking in the width direction.

The driving unit 500 is a member for rotating the rotary plate 410 to the locked position or the unlocked position, and may include a motor 510 and a driving gear 520 .

The motor 510 is a member that is installed in the installation space to generate a driving force, and can be mechanically connected to the drive gear 520 , and the drive gear 520 is coupled to the drive shaft of the motor 510 in a horizontally rotatable manner. Among them, the driving gear 520 moves the rotating plate 410 to the locking position or the unlocking position in a state of engaging and engaging with the rotating serration portion 413 .

Hereinafter, referring to FIG. 3 , FIG. 6 and FIG. 7 , a sealing ring bonding process of a substrate processing apparatus according to an embodiment of the present invention will be described.

First, when the seal ring 200 is coupled to the upper portion of the turntable 100 , as shown in FIG. 3 , the fastening pins 120 of the turntable 100 are inserted into the fastening grooves 220 of the seal ring 200 . After that, when the drive shaft 511 of the motor 510 is rotated, the rotational force of the motor 510 causes the drive gear 520 to rotate in the locking direction, and at the same time, the rotating plate 410 rotates in the locking direction. At this time, the guide hole 411 of the rotating plate 410 moves to the locking position, and at the same time, the guide shaft 422 of the connecting rod 420 slides along the length direction of the guide hole 411 . At the same time, the connecting rod 420 moves to the locking position, and the driven gear 320 engaged with the moving serrations 421 of the connecting rod 420 rotates in the locking direction. At this time, through the rotation of the driven gear 320 , the rotating shaft 310 is rotated in the locking direction, and the eccentric end of the lever 330 is rotated in the locking direction and inserted into the hooking groove 210 . In this state, the coupling between the eccentric end of the rod 330 and the hook groove 210 is passed through, so that the seal ring 200 is not separated from the upper part of the turntable 100 .

In addition, through the combination of the fastening pin 120 and the fastening groove 220 , the sealing ring 200 can be arranged in the correct position, and the sealing ring 200 will not shake sideways through the supporting force of the fastening pin 120 . Furthermore, the upper end of the outer gasket 150 is closely in close contact with the lower end of the seal ring 200 , and the upper end of the inner gasket 160 is in close contact with the lower surface or the inner surface of the extension portion 201 formed on the inner peripheral surface of the sealing ring 200 peripheral surface. Conversely, when the seal ring 200 is separated from the upper portion of the rotary table 100, the drive shaft 511 of the motor 510 can be rotated in the unlocking direction and driven in the reverse order of the above-described locking order.

Finally, using the linear motion of the connecting rod 420 linked with the rotary motion of the rotating plate 410 according to an embodiment of the present invention, the plurality of rods 330 are rotated to the locking position or the unlocking position, so as to realize the locking and unlocking of the rods 330 at the same time. The coupling and separation process of the ring 200 is simple, and coupling errors (twisting, etc.) of the sealing ring 200 can be eliminated.

In addition, in the substrate processing apparatus according to an embodiment of the present invention, the inner sealing gasket 160 and the outer sealing gasket 150 with their own elasticity are respectively combined with the corresponding positions of the rotary table 100 and the sealing ring 200 , so that the sealing performance of the sealing ring 200 can be further improved. In addition, it is possible to prevent the chemical liquid from permeating between the rotary table 100 and the seal ring 200 .

In summary, the specific embodiments of the substrate processing apparatus according to the present invention have been described, but it is understood that various modifications can be made without departing from the scope of the present invention. Therefore, the scope of the present invention is not limited to the described embodiments, but should be determined based on the appended claims and equivalents. That is, the above-described embodiments are illustrative in all respects, and should be construed as non-limiting, and the scope of protection of the present invention should be limited by the scope of the patent application, rather than by the detailed description above. All changes or modifications derived from the meaning of the patent scope and the scope and equivalent concepts thereof are included in the protection scope of the present invention.

100: Rotary table 101: Placement Department 110: Setup Space 120: Fastening pin 130: Outer gasket groove 140: Inner gasket groove 150: Outer gasket 160: Inside gasket 170: The first connection part 200: sealing ring 201: Extensions 210: Mounting slot 220: Fastening slot 300: Opening and closing unit 310: Rotary axis 320: driven gear 330: Rod 331: Conical Surface 400: Power Transmission Unit 410: Rotary Plate 411: Pilot hole 412: hollow part 413: Turn the saw tooth 414: Second connector 420: connecting rod 421:Move the sawtooth 422: Guide shaft 430: Guide Module 440: elastic parts 500: Drive unit 510: Motor 511: Drive shaft 520: Drive Gear C, C1, C2: vertical rotation center

FIG. 1 is a perspective view for illustrating a substrate processing apparatus according to an embodiment of the present invention. 2 is a perspective view for illustrating a substrate processing apparatus according to an embodiment of the present invention from below. 3 is a front cross-sectional view for illustrating a substrate processing apparatus according to an embodiment of the present invention. 4 is an exploded perspective view for illustrating a state in which a seal ring of a substrate processing apparatus according to an embodiment of the present invention is separated. 5 is an enlarged perspective view of a main part for illustrating a hooking groove and a fastening groove of a seal ring in a substrate processing apparatus according to an embodiment of the present invention. 6 is a bottom view for illustrating a power transmission unit in a substrate processing apparatus according to an embodiment of the present invention. 7 is a plan view for illustrating in detail the connection relationship between the opening and closing unit and the power transmission unit in the substrate processing apparatus according to an embodiment of the present invention. 8 is an exploded perspective view for illustrating an outer gasket groove and an outer gasket and an inner gasket groove and an inner gasket in a substrate processing apparatus according to an embodiment of the present invention. 9 is a front cross-sectional view for partially showing a state in which the rod is formed with a tapered surface in the substrate processing apparatus according to an embodiment of the present invention.

100: Rotary table

200: sealing ring

201: Extensions

Claims (12)

A substrate processing device, comprising: a rotary table on which wafers are placed on the upper surface of the rotary table; a sealing ring, which is annular and is combined with the upper part of the rotary table, and a plurality of hooking grooves are formed along the inner peripheral surface of the sealing ring; A plurality of opening and closing units are arranged to be able to be interlocked in the radial direction with the vertical rotation center of the turntable as a reference. When performing a locking operation, the opening and closing units are hooked to the hooking groove, and when performing an unlocking operation, the opening and closing units are The opening and closing unit is disengaged from the hooking groove, thereby releasing the hooking; and A power transmission unit is arranged in a setting space of the rotary table, and the opening and closing unit is linked to the locking position or the unlocking position through external force. The substrate processing apparatus according to claim 1, wherein, The rotary table has a placement portion protruding along the side surface of the rotary table to place the lower end of the sealing ring, The lower end of the sealing ring is placed on the placing portion, and the inner peripheral surface of the sealing ring is in close contact with the side surface of the rotary table. The substrate processing apparatus according to claim 2, wherein, The opening and closing unit contains: a rotating shaft, which is arranged in the radial direction based on the vertical rotation center of the rotating table, and the lower end of the rotating shaft is penetratingly coupled to the rotating table in a horizontally rotatable manner; a driven gear coupled to the lower end of the rotating shaft in a horizontally rotatable manner; and A rod is combined with the upper end of the rotating shaft in a horizontally rotatable manner. When rotating to the locking position, the eccentric end of the rod is hooked to the hooking groove. When rotating to the unlocking position, the rod The eccentric end to one side is disengaged from the hooking slot, thereby releasing the hooking. The substrate processing apparatus according to claim 3, wherein, The lower surface of the lever further has a tapered surface, the tapered surface is formed to be inclined upward toward the eccentric end. When the lever is rotated to the locking position, the tapered surface pressurizes and supports the lower surface of the hooking slot downward. The substrate processing apparatus according to claim 3, wherein, The power transmission unit is mechanically engaged with the driven gear, so that the driven gear is rotated to the locked position or the unlocked position. The substrate processing apparatus according to claim 5, wherein, The power transfer unit contains: A rotating plate, which can be rotated in the locking direction or the unlocking direction with the vertical rotation center as the reference, and a plurality of guide holes are formed through the up and down in the radial direction; and A connecting rod, one end of the connecting rod on the longitudinal direction side is slidably coupled along the guide hole, and one end of the connecting rod in the width direction is formed with a moving serration to engage with the driven gear. The substrate processing apparatus according to claim 6, wherein, When the rotating plate rotates in the locking direction, the connecting rod slides to the outside of the rotating plate, so that the driven gear rotates to the locking position, and when the rotating plate rotates in the unlocking direction, the connecting rod slides toward the rotating plate. slid in the direction of the vertical center of rotation, so that the driven gear rotates to the unlocked position. The substrate processing apparatus according to claim 6, wherein, The guide hole has the shape of an elongated hole with a length in an oblique direction toward the vertical rotation center and edge of the rotary plate, One end on the longitudinal side of the connecting rod has a guide shaft, and the guide shaft is slidably inserted into the guide hole. The substrate processing apparatus of claim 6, further comprising: An elastic member, both ends of the elastic member are combined with the installation space and the rotating plate, and act a pulling force in the locking direction of the rotating plate. The substrate processing apparatus according to claim 2, wherein, A plurality of fastening pins are vertically arranged on the rotary table along the upper surface of the placing portion, A fastening groove is concavely formed at the lower end of the sealing ring, so that the fastening pin can be inserted correspondingly through the concave-convex manner. The substrate processing apparatus according to claim 2, wherein, The rotary table further includes: an outer gasket groove, which is annular and continuously formed along the upper surface of the placement portion; and An outer gasket is annular and is inserted into the outer gasket groove correspondingly, and the upper end of the outer gasket protruding toward the upper part of the outer gasket groove is in close contact with the lower end of the sealing ring. The substrate processing apparatus according to claim 2, wherein, An extension is formed on the sealing ring along the inner peripheral surface of the sealing ring, The rotary table further includes: an annular inner gasket groove, the inner gasket groove is continuously formed along the upper surface of the edge side of the rotary table; and an annular inner gasket, the inner gasket is correspondingly inserted into the inner side A gasket groove, and the upper end of the inner gasket protruding toward the upper part of the inner gasket groove is in close contact with the lower surface or inner peripheral surface of the extension part.

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