CN104096980B - laser cutting vacuum absorbing platform - Google Patents
laser cutting vacuum absorbing platform Download PDFInfo
- Publication number
- CN104096980B CN104096980B CN201410299397.9A CN201410299397A CN104096980B CN 104096980 B CN104096980 B CN 104096980B CN 201410299397 A CN201410299397 A CN 201410299397A CN 104096980 B CN104096980 B CN 104096980B
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- Prior art keywords
- drag chain
- connection block
- sucker
- motion mechanism
- vacuum
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Abstract
The present invention relates to a kind of laser cutting vacuum absorbing platform, this platform comprises vacuum absorbing platform assembly; The absorption platform transition connecting plate of described vacuum absorbing platform assembly is processed with the screwed hole be connected with rotary pneumatic pipe joint; Sucker Connection Block is positioned on absorption platform transition connecting plate, between the two with cavity, and both composition surface place sealings; Sucker Connection Block upper surface is processed with interlaced air flue; Vacuum cup is positioned on sucker Connection Block, and the reinforcement of its lower surface is supported in the upper surface of sucker Connection Block, both composition surface place sealings; Sucker Connection Block is distributed with multiple by the vacuum hole of air flue and cavity connects; The upper surface of vacuum cup is processed with latticed groove, and by the square that the upper surface of whole vacuum cup is divided into ranks to arrange, each square place is processed with the absorption open-work of vertical direction.The present invention can realize before cut workpiece cutting, in cutting process and the absorption of product after cutting, ensures the positional precision of product after cutting.
Description
Technical field
The present invention relates to a kind of laser cutting vacuum absorbing platform.
Background technology
Laser cutting is the new technology that a development is exceedingly fast, and has become development new industry, one of key technology of transformation traditional manufacture, is that laser applies the most rising field.The advantages such as laser cutting is wide with its cut coverage, cutting speed is high, joint-cutting is narrow, cut quality is good, heat affected area is little, processing flexibility is large, waited until in modern industry and applied very widely, laser cutting technique also becomes one of laser processing technology technology the most ripe.Along with the development of laser processing technology, laser processing is except except traditional industrial application, more and more be applied to more wide retrofit field, as military industry field, electronic product machining field, field of semiconductor processing etc., have higher requirement to laser cutting device in these fields.
Laser-scribing platform is the important component part of laser cutting device, and especially in laser fine cut field, laser-scribing platform, directly determines that can laser cutting device cut and the quality of cut quality.Therefore, in laser cutting field, especially in laser fine cut field, very high requirement is proposed to laser-scribing platform.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of laser cutting vacuum absorbing platform, and cut workpiece can be adsorbed onto on platform by this platform, cuts completely, and after cutting, product can not be scattered, and can not be shifted.The high position required precision of cutting can be met.
For solving the problems of the technologies described above, laser cutting vacuum absorbing platform of the present invention comprises vacuum absorbing platform assembly; Described vacuum absorbing platform assembly comprises absorption platform transition connecting plate, sucker Connection Block, vacuum cup, sealing ring on sucker, sucker lower seal; Absorption platform transition connecting plate is processed with screwed hole, and rotary pneumatic pipe joint is connected with this screwed hole; Sucker Connection Block is positioned on absorption platform transition connecting plate, between the two with cavity, and is sealed by sucker lower seal at composition surface, both peripheries place of cavity; Sucker Connection Block upper surface is processed with interlaced air flue; Vacuum cup is positioned on sucker Connection Block, and the reinforcement of its lower surface is supported in the upper surface of sucker Connection Block, and both surrounding composition surface places are by sealing ring sealing on sucker; Sucker Connection Block is distributed with multiple by the vacuum hole of air flue and cavity connects; The upper surface of vacuum cup is processed with latticed groove, and by the square that the upper surface of whole vacuum cup is divided into ranks to arrange, each square place is processed with the absorption open-work of vertical direction.
When needs vacuum, the gas of cavity between absorption platform transition connecting plate and sucker Connection Block, by tracheae and rotary pneumatic pipe joint, is first taken away by extraneous vacuum plant, makes this cavity form vacuum, and makes vacuum homogenizing; Simultaneously, by the vacuum hole on sucker Connection Block and air flue, the vacuum provided by vacuum hole is evenly distributed on the working face of whole vacuum cup bottom, equably vacuum power is acted in cut workpiece by the absorption open-work of vacuum cup again, realize the absorption before to cut workpiece cutting, the absorption of the absorption in cutting process and the rear product formed of cutting, can ensure the positional precision of cutting rear product.Upper surface due to vacuum cup is processed with latticed groove, as cutting and slagging channel, work piece cut can be become the product of different size specification.Because sucker Connection Block upper surface processes interlaced air flue, the reinforcement of vacuum cup lower surface is supported in the upper surface of sucker Connection Block, on the one hand can by the whole working face of vacuum homogenizing at vacuum cup, on the other hand, the effect of supporting vacuum cup can also be played, when avoiding work, due to the effect of vacuum adsorption force, vacuum cup is deformed.
Further, the present invention also comprises the square Ring like suction disc cover plate being positioned at vacuum cup periphery; The upper surface mid portion of described sucker Connection Block is processed with interlaced air flue, and periphery is plane; Sucker cover plate is connected with the periphery of sucker Connection Block, connects the upper surface of upper surface lower than vacuum cup of posterior sucker cover plate.
The end face of described absorption platform transition connecting plate is with bulge loop, and this bulge loop embeds the sunk part bottom sucker Connection Block and forms cavity with the bottom surface of this sunk part.
Further, the utility model also comprises X to straight-line motion mechanism, Y-direction straight-line motion mechanism, and θ is to rotational motion mechanism, rotating mechanism connecting plate, an X is to drag chain fixed head, and the 2nd X is to drag chain fixed head, and X is to drag chain, first Y-direction drag chain fixed head, the second Y-direction drag chain fixed head, Y-direction drag chain; Described X is connected to the movable member of straight-line motion mechanism with the fixed part of Y-direction straight-line motion mechanism; θ is connected with the movable member of Y-direction straight-line motion mechanism to the fixed part of rotational motion mechanism by rotating mechanism connecting plate, and θ is fixedly connected with absorption platform transition connecting plate to the movable member of rotational motion mechanism by absorption platform base; X is connected to the fixed part of straight-line motion mechanism to drag chain fixed head with X to one end of drag chain by an X, and the other end is connected to the movable member of straight-line motion mechanism with X to drag chain fixed head by the 2nd X; First Y-direction drag chain fixed head is connected to the movable member of straight-line motion mechanism with X, and the second Y-direction drag chain fixed head is connected with the movable member of Y-direction straight-line motion mechanism, and the two ends of Y-direction drag chain are connected with the first Y-direction drag chain fixed head and the second Y-direction drag chain fixed head respectively.
X of the present invention is to, Y-direction straight-line motion mechanism at right angle setting, θ is connected to rotational motion mechanism with Y-direction straight-line motion mechanism, absorption platform base is connected to θ on rotational motion mechanism, under can realizing the prerequisite of fixing at laser head, workpiece is carried out to the cutting completely of two vertical direction.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is the vertical view of workpiece.
Fig. 2 is the stereogram of laser cutting vacuum absorbing platform of the present invention.
Fig. 3 is the stereogram of vacuum absorbing platform assembly.
Fig. 4 is the cutaway view of vacuum absorbing platform assembly.
Fig. 5 is the partial sectional view of vacuum absorbing platform assembly.
Fig. 6 is sucker Connection Block vertical view.
Fig. 7 is vacuum cup stereogram of the present invention.
Embodiment
As shown in Figure 1, workpiece 9 is square, and its upper surface is with transverse cuts tag line 92 and longitudinally cut tag line 93, the multiple products 91 obtained after cutting.
As shown in Figure 2, laser cutting vacuum absorbing platform of the present invention comprises: X to straight-line motion mechanism, Y-direction straight-line motion mechanism, θ is to rotational motion mechanism, rotating mechanism connecting plate 7-15, one X is to drag chain fixed head 7-21, and the 2nd X is to drag chain fixed head 7-22, and X is to drag chain 7-23, first Y-direction drag chain fixed head 7-24, second Y-direction drag chain fixed head 7-25, Y-direction drag chain 7-26, vacuum absorbing platform assembly 7; Described X is connected to the movable member 7-12 of straight-line motion mechanism and the fixed part 7-13 of Y-direction straight-line motion mechanism; θ is connected with the movable member 7-14 of Y-direction straight-line motion mechanism to the fixed part 7-16 of rotational motion mechanism by rotating mechanism connecting plate 7-15, θ is fixedly connected with vacuum absorbing platform assembly 7 to the movable member 7-17 of rotational motion mechanism by absorption platform base 7-01, realize X to the motion with Y-direction two vertical direction by X to straight-line motion mechanism and Y-direction straight-line motion mechanism, realize 360 degree of rotary motions by θ to rotational motion mechanism.X is connected to drag chain fixed head 7-21 and X to the fixed part 7-11 of straight-line motion mechanism to one end of drag chain 7-23 by an X, and the other end is connected to drag chain fixed head 7-22 and X to the movable member 7-12 of straight-line motion mechanism by the 2nd X; First Y-direction drag chain fixed head 7-24 and X connects to the movable member 7-12 of straight-line motion mechanism, second Y-direction drag chain fixed head 7-25 is connected with the movable member 7-14 of Y-direction straight-line motion mechanism, and the two ends of Y-direction drag chain 7-26 are connected with the first Y-direction drag chain fixed head 7-24 and the second Y-direction drag chain fixed head 7-25 respectively.
As shown in figure 3 to figure 7, described vacuum absorbing platform assembly 7 comprises: absorption platform transition connecting plate 7-02, sucker Connection Block 7-03, be positioned at the square Ring like suction disc cover plate 7-04 of vacuum cup periphery, vacuum cup 7-05, sealing ring 7-07 on sucker, sucker lower seal 7-08.Absorption platform transition connecting plate 7-02 is processed with screwed hole, and rotary pneumatic pipe joint 7-06 is connected with this screwed hole; Design absorption platform transition connecting plate 7-02, effectively can prevent gas leakage, ensure the reliability of absorption.Sucker Connection Block 7-03 is positioned on absorption platform transition connecting plate 7-02, the end face of absorption platform transition connecting plate 7-02 is with bulge loop 7-022, and this bulge loop 7-022 embeds the sunk part bottom sucker Connection Block 7-03 and forms cavity 7-021 with the bottom surface of this sunk part; Sealed by sucker lower seal 7-08 at composition surface, both peripheries place of cavity 7-021, gas leakage can be prevented.Sucker Connection Block 7-03 upper surface is processed with interlaced air flue 7-032; Vacuum cup 7-05 is positioned on sucker Connection Block 7-03, the reinforcement 7-051 of its lower surface is supported in the upper surface of sucker Connection Block 7-03, on the one hand can by the whole working face of vacuum homogenizing at vacuum cup, on the other hand, the effect of supporting vacuum cup can also be played, when avoiding work, due to the effect of vacuum adsorption force, vacuum cup is deformed.The surrounding composition surface place of sucker Connection Block 7-03 and vacuum cup 7-05 is sealed by sealing ring 7-07 on sucker, can prevent gas leakage.Sucker Connection Block 7-03 is distributed with multiple vacuum hole 7-031 be communicated with cavity 7-021 by air flue 7-032.The upper surface of vacuum cup 7-05 is processed with latticed groove 7-053, and by the square 7-052 that the upper surface of whole vacuum cup 7-05 is divided into ranks to arrange, each square 7-052 place is processed with the absorption open-work 7-054 of vertical direction.The upper surface mid portion of described sucker Connection Block 7-03 is processed with interlaced air flue 7-032, and periphery is plane; Sucker cover plate 7-04 is connected with the periphery of sucker Connection Block 7-03, connects the upper surface of upper surface lower than vacuum cup 7-05 of posterior sucker cover plate 7-04, interferes to prevent cut workpiece 9 and sucker cover plate 7-04.Can equably vacuum power be acted in cut workpiece 9 by the absorption open-work 7-054 of vacuum cup, realize the absorption before cut workpiece 9 is cut, the absorption of the absorption in cutting process and the rear product formed of cutting, can ensure the positional precision of cutting rear product.
Claims (4)
1. a laser cutting vacuum absorbing platform, is characterized in that comprising vacuum absorbing platform assembly (7); Described vacuum absorbing platform assembly (7) comprises absorption platform transition connecting plate (7-02), sucker Connection Block (7-03), vacuum cup (7-05), sealing ring (7-07) on sucker, sucker lower seal (7-08); Absorption platform transition connecting plate (7-02) is processed with screwed hole, and rotary pneumatic pipe joint (7-06) is connected with this screwed hole; Sucker Connection Block (7-03) is positioned on absorption platform transition connecting plate (7-02), between the two with cavity (7-021), and sealed by sucker lower seal (7-08) at composition surface, both peripheries place of cavity (7-021); Sucker Connection Block (7-03) upper surface is processed with interlaced air flue (7-032); Vacuum cup (7-05) is positioned on sucker Connection Block (7-03), the reinforcement (7-051) of its lower surface is supported in the upper surface of sucker Connection Block (7-03), and both surrounding composition surface places are sealed by sealing ring on sucker (7-07); Sucker Connection Block (7-03) is distributed with multiple vacuum hole (7-031) be communicated with cavity (7-021) by air flue (7-032); The upper surface of vacuum cup (7-05) is processed with latticed groove (7-053), the square (7-052) being divided into ranks to arrange the upper surface of whole vacuum cup (7-05), each square (7-052) place is processed with the absorption open-work (7-054) of vertical direction.
2. laser cutting vacuum absorbing platform according to claim 1, characterized by further comprising the square Ring like suction disc cover plate (7-04) being positioned at vacuum cup periphery; The upper surface mid portion of described sucker Connection Block (7-03) is processed with interlaced air flue (7-032), and periphery is plane; Sucker cover plate (7-04) is connected with the periphery of sucker Connection Block (7-03), connects the upper surface of upper surface lower than vacuum cup (7-05) of posterior sucker cover plate (7-04).
3. laser cutting vacuum absorbing platform according to claim 1, it is characterized in that the end face of described absorption platform transition connecting plate (7-02) is with bulge loop (7-022), this bulge loop (7-022) embeds the sunk part of sucker Connection Block (7-03) bottom and forms cavity (7-021) with the bottom surface of this sunk part.
4. laser cutting vacuum absorbing platform according to claim 1, characterized by further comprising X to straight-line motion mechanism, Y-direction straight-line motion mechanism, θ is to rotational motion mechanism, rotating mechanism connecting plate (7-15), one X is to drag chain fixed head (7-21), 2nd X is to drag chain fixed head (7-22), X is to drag chain (7-23), first Y-direction drag chain fixed head (7-24), second Y-direction drag chain fixed head (7-25), Y-direction drag chain (7-26); Described X is connected to the movable member (7-12) of straight-line motion mechanism and the fixed part (7-13) of Y-direction straight-line motion mechanism; θ is connected with the movable member (7-14) of Y-direction straight-line motion mechanism to the fixed part (7-16) of rotational motion mechanism by rotating mechanism connecting plate (7-15), and θ is fixedly connected with absorption platform transition connecting plate (7-02) to the movable member (7-17) of rotational motion mechanism by absorption platform base (7-01); X is connected to the fixed part (7-11) of straight-line motion mechanism to drag chain fixed head (7-21) with X to one end of drag chain (7-23) by an X, and the other end is connected to the movable member (7-12) of straight-line motion mechanism with X to drag chain fixed head (7-22) by the 2nd X; First Y-direction drag chain fixed head (7-24) is connected to the movable member (7-12) of straight-line motion mechanism with X, second Y-direction drag chain fixed head (7-25) is connected with the movable member (7-14) of Y-direction straight-line motion mechanism, and the two ends of Y-direction drag chain (7-26) are connected with the first Y-direction drag chain fixed head (7-24) and the second Y-direction drag chain fixed head (7-25) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410299397.9A CN104096980B (en) | 2014-06-26 | 2014-06-26 | laser cutting vacuum absorbing platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410299397.9A CN104096980B (en) | 2014-06-26 | 2014-06-26 | laser cutting vacuum absorbing platform |
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| CN104096980A CN104096980A (en) | 2014-10-15 |
| CN104096980B true CN104096980B (en) | 2016-01-20 |
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| CN201410299397.9A Active CN104096980B (en) | 2014-06-26 | 2014-06-26 | laser cutting vacuum absorbing platform |
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| CN105014240B (en) * | 2014-04-29 | 2017-04-05 | 中国科学院福建物质结构研究所 | LED wafer laser cutting device and LED wafer laser cutting water transfer quadratic method |
| CN104362228B (en) * | 2014-11-19 | 2017-03-15 | 苏州德龙激光股份有限公司 | The high-accuracy motion platform of marble |
| CN105750737B (en) * | 2014-12-18 | 2018-01-09 | 泰科电子(上海)有限公司 | Diced system |
| JP6726473B2 (en) * | 2016-02-15 | 2020-07-22 | 株式会社ディスコ | Chuck table mechanism |
| JP6696851B2 (en) * | 2016-07-13 | 2020-05-20 | 株式会社ディスコ | Chuck table mechanism |
| CN106583944B (en) * | 2016-12-09 | 2019-06-14 | 无锡航亚科技股份有限公司 | A kind of device and method cutting forging flash |
| WO2018107439A1 (en) * | 2016-12-15 | 2018-06-21 | 深圳市柔宇科技有限公司 | Laser cutting work platform and laser cutting device |
| CN107855667A (en) * | 2017-11-29 | 2018-03-30 | 深圳市冰海科技有限公司 | For cutting the laser cutting device of FPC |
| CN108198772B (en) * | 2017-12-28 | 2020-11-17 | 武汉华星光电半导体显示技术有限公司 | Bearing assembly, cutting equipment and cutting method of flexible medium |
| CN109099850A (en) * | 2018-09-25 | 2018-12-28 | 深圳市航源智能设备有限公司 | A kind of FPC reinforcement 3D vision testing machine |
| CN110962083A (en) * | 2019-12-11 | 2020-04-07 | 东莞王氏港建机械有限公司 | Circuit substrate workbench |
| CN111776602B (en) * | 2020-06-05 | 2021-08-17 | 宜昌市三叶智能科技有限公司 | Hollow vacuum conveyor belt for intelligent robot end effector and use method |
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| JP2002324831A (en) * | 2001-04-26 | 2002-11-08 | Takatori Corp | Vacuum suction table |
| FR2831148B1 (en) * | 2001-10-22 | 2004-01-02 | Gemplus Card Int | METHOD AND DEVICE FOR HANDLING A WAFER |
| JP4541824B2 (en) * | 2004-10-14 | 2010-09-08 | リンテック株式会社 | Non-contact type adsorption holding device |
| NL1027929C2 (en) * | 2004-12-31 | 2006-07-03 | Fico Bv | Holder for supporting objects such as electronic components during separation using laser, comprises gas permeable flexible layer located above suction holes in support |
| JP4423357B1 (en) * | 2008-10-24 | 2010-03-03 | 株式会社タンケンシールセーコウ | Vacuum adsorption device |
| CN102476300A (en) * | 2010-11-30 | 2012-05-30 | 中国科学院大连化学物理研究所 | Vacuum adsorption equipment used for fixing thin-wall plane workpiece |
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Effective date of registration: 20211124 Address after: 528200 Room 302, floor 3, building 3, Tianfu technology center, No. 12, Xianan Road, Guicheng Street, Nanhai District, Foshan City, Guangdong Province Patentee after: Foshan Zhongke light microelectronics equipment Co.,Ltd. Address before: 130033 block B, 77 Yingkou Road, Jingkai District, Changchun City, Jilin Province Patentee before: CHANGCHUN GUANGHUA MICRO-ELECTRONIC EQUIPMENT ENGINEERING CENTER CO.,LTD. |