CN104096980A - Laser cutting vacuum adsorption platform - Google Patents

Laser cutting vacuum adsorption platform Download PDF

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Publication number
CN104096980A
CN104096980A CN201410299397.9A CN201410299397A CN104096980A CN 104096980 A CN104096980 A CN 104096980A CN 201410299397 A CN201410299397 A CN 201410299397A CN 104096980 A CN104096980 A CN 104096980A
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China
Prior art keywords
sucker
drag chain
vacuum
motion mechanism
fixed head
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Granted
Application number
CN201410299397.9A
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Chinese (zh)
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CN104096980B (en
Inventor
张德龙
吴玉彬
黄波
王忠生
刘轩
郑福志
金钊
张男男
田玉鑫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Foshan Zhongke light microelectronics equipment Co.,Ltd.
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CHANGCHUN GUANGHUA MICRO-ELECTRONICS EGUIPMENT ENGINEERING CENTER Co Ltd
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Priority to CN201410299397.9A priority Critical patent/CN104096980B/en
Publication of CN104096980A publication Critical patent/CN104096980A/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention relates to a laser cutting vacuum adsorption platform. The platform comprises a vacuum adsorption platform assembly; a threaded hole connected with a rotary air pipe joint is machined in an adsorption platform transition connection plate of the vacuum adsorption platform assembly; a sucker connection seat is positioned on the adsorption platform transition connection plate; a cavity is formed between the sucker connection seat and the adsorption platform transition connection plate of which the jointing surface is sealed; mutually staggered air paths are machined in the upper surface of the sucker connection seat; a vacuum sucker is positioned on the sucker connection seat; reinforcement ribs at the lower surface of the vacuum sucker are supported at the upper surface of the sucker connection seat; the jointing surface between the vacuum sucker and the sucker connection seat is sealed; multiple vacuum holes for communicating the air paths with the cavity are distributed in the upper end surface of the whole vacuum sucker; latticed grooves are machined in the upper end surface of the vacuum sucker to divide the upper end surface of the whole vacuum sucker into squares in row and line arraying; an adsorption through hole in the vertical direction is machined in each square. The adsorption of a product before, in and after the cutting process of a cut workpiece is realized and the position precision of the cut product is ensured.

Description

Laser cutting vacuum absorbing platform
Technical field
The present invention relates to a kind of laser cutting vacuum absorbing platform.
Background technology
Laser cutting is a new technology that development is exceedingly fast, and has become development new industry, and one of key technology of transformation traditional manufacture is the most rising field of laser application.The advantages such as laser cutting is wide with its cut coverage, cutting speed is high, joint-cutting is narrow, cut quality is good, heat affected area is little, processing flexibility is large, in modern industry, waited until application very widely, laser cutting technique also becomes one of the most ripe technology of laser processing technology.Along with the development of laser processing technology, Laser Processing is except traditional industrial application, more and more be applied to more wide retrofit field, as military industry field, electronic product machining field, field of semiconductor processing etc., have higher requirement to laser cutting device in these fields.
Laser-scribing platform is the important component part of laser cutting device, and especially in laser fine cut field, laser-scribing platform, directly determines that can laser cutting device cut and the quality of cut quality.Therefore,, in laser cutting field, especially in laser fine cut field, laser-scribing platform has been proposed to very high requirement.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of laser cutting vacuum absorbing platform, and this platform can be adsorbed onto cut workpiece on platform, cuts completely, and after cutting, product can not be scattered, and can not be shifted.Can meet the high position required precision of cutting.
For solving the problems of the technologies described above, laser cutting vacuum absorbing platform of the present invention comprises vacuum absorbing platform assembly; Described vacuum absorbing platform assembly comprises absorption platform transition connecting plate, sucker Connection Block, vacuum cup, sealing ring on sucker, sucker lower seal; In absorption platform transition connecting plate, be processed with screwed hole, rotary pneumatic pipe joint is connected with this screwed hole; Sucker Connection Block is positioned on absorption platform transition connecting plate, and between the two with cavity, and both composition surface places are sealed by sucker lower seal in the periphery of cavity; Sucker Connection Block upper surface is processed with interlaced air flue; Vacuum cup is positioned on sucker Connection Block, and the reinforcement of its lower surface is supported in the upper surface of sucker Connection Block, and both surrounding composition surface places are by sealing ring sealing on sucker; On sucker Connection Block, be distributed with multiple vacuum holes that air flue is communicated with cavity; The upper surface of vacuum cup is processed with latticed groove, and the upper surface of whole vacuum cup is divided into the square that ranks are arranged, and each square place is processed with the absorption open-work of vertical direction.
In the time of needs vacuum, extraneous vacuum plant, by tracheae and rotary pneumatic pipe joint, is first taken the gas of cavity between absorption platform transition connecting plate and sucker Connection Block away, makes this cavity form vacuum, and makes vacuum homogenizing; Simultaneously, by the vacuum hole on sucker Connection Block and air flue, the vacuum that vacuum hole is provided is evenly distributed on the working face of whole vacuum cup bottom, equably vacuum power is acted in cut workpiece by the absorption open-work of vacuum cup again, realize the absorption before cut workpiece cutting, the absorption of the product forming after the absorption in cutting process and cutting, the positional precision that can ensure to cut rear product.Because the upper surface of vacuum cup is processed with latticed groove, as cutting and slagging channel, work piece cut can be become to the product of different size specifications.Because sucker Connection Block upper surface is processed interlaced air flue, the reinforcement of vacuum cup lower surface is supported in the upper surface of sucker Connection Block, on the one hand can be by vacuum homogenizing the whole working face at vacuum cup, on the other hand, can also play the effect of supporting vacuum cup, while avoiding work, due to the effect of vacuum adsorption force, vacuum cup is deformed.
Further, the present invention also comprises the square Ring like suction disc cover plate that is positioned at vacuum cup periphery; The upper surface mid portion of described sucker Connection Block is processed with interlaced air flue, and periphery is plane; Sucker cover plate is connected with the periphery of sucker Connection Block, connects the upper surface of posterior sucker cover plate lower than the upper surface of vacuum cup.
The end face of described absorption platform transition connecting plate is with bulge loop, and this bulge loop embeds the sunk part of sucker Connection Block bottom and forms cavity with the bottom surface of this sunk part.
Further, the present invention also comprises that X is to straight-line motion mechanism, Y-direction straight-line motion mechanism, and θ is to rotational motion mechanism, rotating mechanism connecting plate, an X is to drag chain fixed head, and the 2nd X is to drag chain fixed head, and X is to drag chain, the first Y-direction drag chain fixed head, the second Y-direction drag chain fixed head, Y-direction drag chain; Described X is connected with the fixed part of Y-direction straight-line motion mechanism to the movable member of straight-line motion mechanism; θ is connected with the movable member of Y-direction straight-line motion mechanism by rotating mechanism connecting plate to the fixed part of rotational motion mechanism, and θ is fixedly connected with absorption platform transition connecting plate by absorption platform base to the movable member of rotational motion mechanism; X is connected to the fixed part of straight-line motion mechanism with X to drag chain fixed head by an X to one end of drag chain, and the other end is connected to the movable member of straight-line motion mechanism with X to drag chain fixed head by the 2nd X; The first Y-direction drag chain fixed head is connected to the movable member of straight-line motion mechanism with X, and the second Y-direction drag chain fixed head is connected with the movable member of Y-direction straight-line motion mechanism, and the two ends of Y-direction drag chain are connected with the first Y-direction drag chain fixed head and the second Y-direction drag chain fixed head respectively.
X of the present invention is to, Y-direction straight-line motion mechanism at right angle setting, θ is connected with Y-direction straight-line motion mechanism to rotational motion mechanism, absorption platform base is connected to θ on rotational motion mechanism, can realize under the fixing prerequisite of laser head, workpiece is carried out to the cutting completely of two vertical direction.
Brief description of the drawings
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
Fig. 1 is the top view of workpiece.
Fig. 2 is the stereogram of laser cutting vacuum absorbing platform of the present invention.
Fig. 3 is the stereogram of vacuum absorbing platform assembly.
Fig. 4 is the cutaway view of vacuum absorbing platform assembly.
Fig. 5 is the partial sectional view of vacuum absorbing platform assembly.
Fig. 6 is sucker Connection Block top view.
Fig. 7 is vacuum cup stereogram of the present invention.
Detailed description of the invention
As shown in Figure 1, workpiece 9 is square, and its upper surface is with transverse cuts tag line 92 and longitudinal cutting tag line 93, the multiple products 91 that obtain after cutting.
As shown in Figure 2, laser cutting vacuum absorbing platform of the present invention comprises: X is to straight-line motion mechanism, Y-direction straight-line motion mechanism, and θ is to rotational motion mechanism, rotating mechanism connecting plate 7-15, the one X is to drag chain fixed head 7-21, and the 2nd X is to drag chain fixed head 7-22, and X is to drag chain 7-23, the first Y-direction drag chain fixed head 7-24, the second Y-direction drag chain fixed head 7-25, Y-direction drag chain 7-26, vacuum absorbing platform assembly 7; Described X is connected to the movable member 7-12 of straight-line motion mechanism and the fixed part 7-13 of Y-direction straight-line motion mechanism; θ is connected with the movable member 7-14 of Y-direction straight-line motion mechanism by rotating mechanism connecting plate 7-15 to the fixed part 7-16 of rotational motion mechanism, θ is fixedly connected with vacuum absorbing platform assembly 7 by absorption platform base 7-01 to the movable member 7-17 of rotational motion mechanism, can by X to straight-line motion mechanism and Y-direction straight-line motion mechanism realize X to the motion of two vertical direction of Y-direction, can realize 360 degree to rotational motion mechanism by θ and rotatablely move.X is connected to the fixed part 7-11 of straight-line motion mechanism with X to drag chain fixed head 7-21 by an X to one end of drag chain 7-23, and the other end is connected to the movable member 7-12 of straight-line motion mechanism with X to drag chain fixed head 7-22 by the 2nd X; The first Y-direction drag chain fixed head 7-24 is connected to the movable member 7-12 of straight-line motion mechanism with X, the second Y-direction drag chain fixed head 7-25 is connected with the movable member 7-14 of Y-direction straight-line motion mechanism, and the two ends of Y-direction drag chain 7-26 are connected with the first Y-direction drag chain fixed head 7-24 and the second Y-direction drag chain fixed head 7-25 respectively.
As shown in Fig. 3~7, described vacuum absorbing platform assembly 7 comprises: absorption platform transition connecting plate 7-02, sucker Connection Block 7-03, be positioned at the square Ring like suction disc cover plate 7-04 of vacuum cup periphery, vacuum cup 7-05, sealing ring 7-07 on sucker, sucker lower seal 7-08.On absorption platform transition connecting plate 7-02, be processed with screwed hole, rotary pneumatic pipe joint 7-06 is connected with this screwed hole; The excessive connecting plate 13 of design absorption platform, can effectively prevent gas leakage, ensures the reliability of absorption.Sucker Connection Block 7-03 is positioned on absorption platform transition connecting plate 7-02, the end face of absorption platform transition connecting plate 7-02 is with bulge loop 7-022, and this bulge loop 7-022 embeds the sunk part of sucker Connection Block 7-03 bottom and forms cavity 7-021 with the bottom surface of this sunk part; In the periphery of cavity 7-021, both composition surface places are sealed by sucker lower seal 7-08, can prevent gas leakage.Sucker Connection Block 7-03 upper surface is processed with interlaced air flue 7-032; Vacuum cup 7-05 is positioned on sucker Connection Block 7-03, the reinforcement 7-051 of its lower surface is supported in the upper surface of sucker Connection Block 7-03, on the one hand can be by vacuum homogenizing the whole working face at vacuum cup, on the other hand, can also play the effect of supporting vacuum cup, while avoiding work, due to the effect of vacuum adsorption force, vacuum cup is deformed.The surrounding composition surface place of sucker Connection Block 7-03 and vacuum cup 7-05, by sealing ring 7-07 sealing on sucker, can prevent gas leakage.On sucker Connection Block 7-03, be distributed with multiple vacuum hole 7-031 that air flue 7-032 is communicated with cavity 7-021.The upper surface of vacuum cup 7-05 is processed with latticed groove 7-053, and the upper surface of whole vacuum cup 7-05 is divided into the square 7-052 that ranks are arranged, and each square 7-052 place is processed with the absorption open-work 7-054 of vertical direction.The upper surface mid portion of described sucker Connection Block 7-03 is processed with interlaced air flue 7-032, and periphery is plane; Sucker cover plate 7-04 is connected with the periphery of sucker Connection Block 7-03, connects the upper surface of posterior sucker cover plate 7-04 lower than the upper surface of vacuum cup 7-05, to prevent that cut workpiece 9 and sucker cover plate 7-04 from interfering.Absorption open-work 7-054 by vacuum cup can act on vacuum power in cut workpiece 9 equably, realize the absorption before cut workpiece 9 cuttings, the absorption of the product forming after the absorption in cutting process and cutting, the positional precision that can ensure to cut rear product.

Claims (4)

1. a laser cutting vacuum absorbing platform, is characterized in that comprising vacuum absorbing platform assembly (7); Described vacuum absorbing platform assembly (7) comprises absorption platform transition connecting plate (7-02), sucker Connection Block (7-03), vacuum cup (7-05), sealing ring on sucker (7-07), sucker lower seal (7-08); In absorption platform transition connecting plate (7-02), be processed with screwed hole, rotary pneumatic pipe joint (7-06) is connected with this screwed hole; Sucker Connection Block (7-03) is positioned on absorption platform transition connecting plate (7-02), sealed by sucker lower seal (7-08) between the two with cavity (7-021), and at both composition surface places, the periphery of cavity (7-021); Sucker Connection Block (7-03) upper surface is processed with interlaced air flue (7-032); Vacuum cup (7-05) is positioned on sucker Connection Block (7-03), the reinforcement (7-051) of its lower surface is supported in the upper surface of sucker Connection Block (7-03), and both surrounding composition surface places seal by sealing ring on sucker (7-07); On sucker Connection Block (7-03), be distributed with multiple vacuum holes (7-031) that air flue (7-032) is communicated with cavity (7-021); The upper surface of vacuum cup (7-05) is processed with latticed groove (7-053), the upper surface of whole vacuum cup (7-05) is divided into the square (7-052) that ranks are arranged, and each square (7-052) locates to be processed with the absorption open-work (7-054) of vertical direction.
2. laser cutting vacuum absorbing platform according to claim 1, characterized by further comprising the square Ring like suction disc cover plate (7-04) that is positioned at vacuum cup periphery; The upper surface mid portion of described sucker Connection Block (7-03) is processed with interlaced air flue (7-032), and periphery is plane; Sucker cover plate (7-04) is connected with the periphery of sucker Connection Block (7-03), connects the upper surface of posterior sucker cover plate (7-04) lower than the upper surface of vacuum cup (7-05).
3. laser cutting vacuum absorbing platform according to claim 1, it is characterized in that the end face of described absorption platform transition connecting plate (7-02) is with bulge loop (7-022), this bulge loop (7-022) embeds the sunk part of sucker Connection Block (7-03) bottom and forms cavity (7-021) with the bottom surface of this sunk part.
4. laser cutting vacuum absorbing platform according to claim 1, characterized by further comprising X to straight-line motion mechanism, Y-direction straight-line motion mechanism, θ is to rotational motion mechanism, rotating mechanism connecting plate (7-15), the one X is to drag chain fixed head (7-21), the 2nd X is to drag chain fixed head (7-22), X is to drag chain (7-23), the first Y-direction drag chain fixed head (7-24), the second Y-direction drag chain fixed head (7-25), Y-direction drag chain (7-26); Described X is connected to the movable member (7-12) of straight-line motion mechanism and the fixed part (7-13) of Y-direction straight-line motion mechanism; θ is connected with the movable member (7-14) of Y-direction straight-line motion mechanism by rotating mechanism connecting plate (7-15) to the fixed part (7-16) of rotational motion mechanism, and θ is fixedly connected with absorption platform transition connecting plate (7-02) by absorption platform base (7-01) to the movable member (7-17) of rotational motion mechanism; X is connected to the fixed part (7-11) of straight-line motion mechanism with X to drag chain fixed head (7-21) by an X to one end of drag chain (7-23), and the other end is connected to the movable member (7-12) of straight-line motion mechanism with X to drag chain fixed head (7-22) by the 2nd X; The first Y-direction drag chain fixed head (7-24) is connected to the movable member (7-12) of straight-line motion mechanism with X, the second Y-direction drag chain fixed head (7-25) is connected with the movable member (7-14) of Y-direction straight-line motion mechanism, and the two ends of Y-direction drag chain (7-26) are connected with the first Y-direction drag chain fixed head (7-24) and the second Y-direction drag chain fixed head (7-25) respectively.
CN201410299397.9A 2014-06-26 2014-06-26 laser cutting vacuum absorbing platform Active CN104096980B (en)

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CN104362228A (en) * 2014-11-19 2015-02-18 苏州德龙激光股份有限公司 Marble high-precision movement platform
CN105014240A (en) * 2014-04-29 2015-11-04 中国科学院福建物质结构研究所 LED wafer laser cutting device and LED wafer laser cutting levelness adjustment method
CN105750737A (en) * 2014-12-18 2016-07-13 泰科电子(上海)有限公司 Cutting system
CN106583944A (en) * 2016-12-09 2017-04-26 无锡航亚科技股份有限公司 Device and method for cutting flash of forging
CN107081855A (en) * 2016-02-15 2017-08-22 株式会社迪思科 Chuck table mechanism
CN107622971A (en) * 2016-07-13 2018-01-23 株式会社迪思科 Chuck table mechanism
CN107855667A (en) * 2017-11-29 2018-03-30 深圳市冰海科技有限公司 For cutting the laser cutting device of FPC
CN107980017A (en) * 2016-12-15 2018-05-01 深圳市柔宇科技有限公司 The workbench and laser cutting device of laser cutting
CN109099850A (en) * 2018-09-25 2018-12-28 深圳市航源智能设备有限公司 A kind of FPC reinforcement 3D vision testing machine
WO2019127715A1 (en) * 2017-12-28 2019-07-04 武汉华星光电半导体显示技术有限公司 Bearing assembly and cutting device, and method for cutting flexible medium
CN110962083A (en) * 2019-12-11 2020-04-07 东莞王氏港建机械有限公司 Circuit substrate workbench
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CN105014240A (en) * 2014-04-29 2015-11-04 中国科学院福建物质结构研究所 LED wafer laser cutting device and LED wafer laser cutting levelness adjustment method
CN105014240B (en) * 2014-04-29 2017-04-05 中国科学院福建物质结构研究所 LED wafer laser cutting device and LED wafer laser cutting water transfer quadratic method
CN104362228A (en) * 2014-11-19 2015-02-18 苏州德龙激光股份有限公司 Marble high-precision movement platform
CN104362228B (en) * 2014-11-19 2017-03-15 苏州德龙激光股份有限公司 The high-accuracy motion platform of marble
CN105750737A (en) * 2014-12-18 2016-07-13 泰科电子(上海)有限公司 Cutting system
CN105750737B (en) * 2014-12-18 2018-01-09 泰科电子(上海)有限公司 Diced system
CN107081855B (en) * 2016-02-15 2020-06-19 株式会社迪思科 Chuck worktable mechanism
CN107081855A (en) * 2016-02-15 2017-08-22 株式会社迪思科 Chuck table mechanism
CN107622971A (en) * 2016-07-13 2018-01-23 株式会社迪思科 Chuck table mechanism
CN107622971B (en) * 2016-07-13 2023-03-28 株式会社迪思科 Chuck worktable mechanism
CN106583944A (en) * 2016-12-09 2017-04-26 无锡航亚科技股份有限公司 Device and method for cutting flash of forging
CN107980017A (en) * 2016-12-15 2018-05-01 深圳市柔宇科技有限公司 The workbench and laser cutting device of laser cutting
WO2018107439A1 (en) * 2016-12-15 2018-06-21 深圳市柔宇科技有限公司 Laser cutting work platform and laser cutting device
CN107855667A (en) * 2017-11-29 2018-03-30 深圳市冰海科技有限公司 For cutting the laser cutting device of FPC
WO2019127715A1 (en) * 2017-12-28 2019-07-04 武汉华星光电半导体显示技术有限公司 Bearing assembly and cutting device, and method for cutting flexible medium
CN109099850A (en) * 2018-09-25 2018-12-28 深圳市航源智能设备有限公司 A kind of FPC reinforcement 3D vision testing machine
CN110962083A (en) * 2019-12-11 2020-04-07 东莞王氏港建机械有限公司 Circuit substrate workbench
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CN111776602B (en) * 2020-06-05 2021-08-17 宜昌市三叶智能科技有限公司 Hollow vacuum conveyor belt for intelligent robot end effector and use method

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