JP2018010953A - Chuck table mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To support a chuck table rotatably and attractively without using a tube, while shortening maintenance time.SOLUTION: A chuck table mechanism (50) includes a fixed base (52) connected with an external suction source (94), and rotary means (51) disposed rotatably for the fixed base, and supports a chuck table (40) attached to the upper part of the rotary means rotatably for the fixed base. The rotary means is provided with a rotary base (54) disposed rotatably for the fixed base, and an insertion part (55) detachably fixed to the rotation center position of the rotary base, and is configured so that when an engagement end (72) of the insertion part engages with an engagement recess (73) of the fixed base, a suction path (95) in the insertion part is coupled with a communication path (97) of the fixed base, and the facing surfaces of the engagement end and the engagement recess are sealed with a seal ring (84).SELECTED DRAWING: Figure 3

Description

  The present invention relates to a chuck table mechanism that holds a workpiece in a processing apparatus.

  The surface of a workpiece such as a semiconductor wafer is partitioned into a plurality of regions by grid-like streets (cutting lines), and devices such as ICs and LSIs are formed in the regions partitioned by the streets. In the device manufacturing process, individual device chips are manufactured by cutting a workpiece along a street. The workpiece is divided by a processing device such as a cutting device or a laser processing device. Each processing apparatus is provided with a chuck table mechanism in which a chuck table for sucking and holding a workpiece is rotatably arranged on a fixed base (for example, see Patent Document 1).

  The chuck table mechanism needs to be configured so that the chuck table can rotate with respect to the fixed base and to apply a negative pressure to the holding surface of the chuck table. For this reason, a chuck table mechanism employing a rotary joint structure has been proposed. A multi-joint in which a plurality of tubes are installed is provided at a joint location between the chuck table and the rotary base, and the tube is connected to the suction source from the multi-joint through the fixed base. A suction force is applied to the holding surface of the chuck table through the tube, and the rotation of the chuck table is not hindered by the tube.

Japanese Patent Laying-Open No. 2015-036179

  By the way, when the chuck table is rotationally driven during the machining operation, each tube is twisted with the rotation of the chuck table. When the processing operations are repeated and the twisting of each tube is repeated, fatigue accumulates in each tube and deteriorates. Further, the joint portion of the tube is damaged, and fragments are accumulated in the chuck table mechanism. For this reason, there has been a problem that the operator is troublesome to replace and clean the tube and requires long-term maintenance.

  The present invention has been made in view of this point, and provides a chuck table mechanism that can support a chuck table in a rotatable and suckable manner without using a tube, and can reduce maintenance time. Is one of the purposes.

  A chuck table mechanism according to one aspect of the present invention is a chuck table mechanism that rotatably supports a chuck table that holds and holds a workpiece on an upper surface, and a communication path that communicates with an external suction source is provided inside. A fixed base that is formed, and a rotating means that is rotatably disposed above the fixed base and that has a chuck table mounted thereon. The rotating means is rotatably disposed above the fixed base. A rotation base provided; and an insertion portion that is detachably fixed to the rotation base at the center of rotation and configured to be insertable into the fixed base. The insertion portion includes the chuck table. A suction path for transmitting a suction force is formed in the upper surface, and includes an engagement end portion that engages with an engagement recess portion of the fixed base, and when the engagement end portion engages with the engagement recess portion, An outer peripheral wall of the engagement end and an inner wall of the engagement recess of the fixed base In conjunction with the sealed by the seal ring, that the the communicating path and the suction path is connected, characterized by.

  According to this configuration, the rotating means is rotatably disposed on the fixed base, and the insertion portion provided on the rotating means is inserted into the fixed base, so that the suction path of the insertion portion and the fixed base communicate with each other. The route is communicated. Thereby, the suction force from the external suction source is applied to the chuck table through the communication path of the fixed base and the suction path of the insertion portion. The engaging end of the insertion portion is engaged with the engaging recess of the fixed base, and the space between the outer peripheral wall of the engaging end and the inner wall of the engaging recess is hermetically sealed with a seal ring. Therefore, the chuck table can be supported rotatably and suckable without causing an air leak. In addition, since one path is formed by the suction path of the insertion portion and the communication path of the fixed base, the pressure loss in the path is reduced and the suction force is improved. Furthermore, the seal ring can be easily replaced from above by a simple operation of removing the insertion portion from the rotation base of the rotation means and pulling out the engagement end of the insertion portion from the engagement recess of the fixed base. Maintenance time can be greatly reduced.

  In the chuck table mechanism of one embodiment of the present invention, the rotating means is held by a bearing on the fixed base, and the fixed base includes a rotation motor that rotates the rotating means.

  According to the present invention, the chuck table can be supported rotatably and suckable without using a tube. Further, since the seal ring can be easily replaced from above by a simple operation of removing the insertion portion, the maintenance time required for the replacement operation of the seal ring can be greatly shortened.

It is a perspective view of the cutting device of this Embodiment. It is a cross-sectional schematic diagram of the chuck table mechanism of a comparative example. It is a cross-sectional schematic diagram of the chuck table mechanism of the present embodiment. It is explanatory drawing of the replacement | exchange operation | work of the seal ring of this Embodiment.

  Hereinafter, a cutting apparatus provided with a chuck table mechanism according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of the cutting apparatus of the present embodiment. FIG. 2 is a schematic cross-sectional view of a chuck table mechanism of a comparative example. In addition, in the following description, although the structure provided with a chuck table mechanism in a cutting device is illustrated and demonstrated, it is not limited to this structure. The chuck table mechanism may be provided in other processing devices such as a laser processing device and a grinding device, for example.

  As shown in FIG. 1, the cutting apparatus 1 is configured to cut a workpiece W on a chuck table 40 with a cutting blade 26 and divide the workpiece into individual device chips. The workpiece W is a rectangular package substrate, the substrate surface is partitioned by a grid-like street, and various devices are formed in each region partitioned by the street. The workpiece W is not limited to a small package substrate such as a CSP (Chip Size Package) substrate or a wafer level CSP (Wafer Level Chip Size Package) substrate, but may be a package substrate having a size larger than the CSP substrate.

  A rectangular opening extending in the X-axis direction is formed on the upper surface of the housing 10 of the cutting apparatus 1, and this opening is covered with a movable plate 11 that can move together with the chuck table 40 and a bellows-shaped waterproof cover 12. Has been. Below the waterproof cover 12, a ball screw type moving mechanism (not shown) for moving the chuck table 40 in the X-axis direction is provided. On the surface of the chuck table 40, a holding surface 41 that sucks and holds the workpiece W is formed by a number of suction ports. The holding surface 41 is connected to a suction source through a fluid path in the chuck table 40, and the workpiece W is sucked and held by the negative pressure generated on the holding surface 41.

  The chuck table 40 is reciprocated between a delivery position at the center of the apparatus and a machining position facing the cutting means 24. FIG. 1 shows a state where the chuck table 40 stands by at the delivery position. In the housing 10, one corner portion adjacent to the delivery position is lowered by one step, and the mounting table 14 is provided at a lowered position so as to be lifted and lowered. On the mounting table 14, a cassette C that accommodates the workpiece W is mounted. By moving the mounting table 14 up and down with the cassette C mounted, the drawing position and the pushing position of the workpiece W are adjusted in the height direction.

  Behind the mounting table 14, a pair of centering guides 15 parallel to the Y-axis direction and a push-pull mechanism 16 for taking in and out the workpiece W between the pair of centering guides 15 and the cassette C are provided. . The pair of centering guides 15 guide the loading / unloading of the workpiece W by the push-pull mechanism 16 and position the workpiece W in the X-axis direction. The push-pull mechanism 16 pulls the workpiece W before processing from the cassette C to the pair of centering guides 15 and pushes the processed workpiece W into the cassette C from the pair of centering guides 15.

  In the vicinity of the pair of centering guides 15, a first transfer arm 17 for transferring the workpiece W between the centering guide 15 and the chuck table 40 is provided. As the first transfer arm 17 turns, the workpiece W is transferred by the transfer pad 19 at the tip of the L-shaped arm portion 18. A spinner cleaning mechanism 21 is provided behind the chuck table 40 at the delivery position. In the spinner cleaning mechanism 21, the cleaning water is sprayed toward the rotating spinner table 22 to clean the workpiece W, and then the workpiece W is dried by blowing dry air instead of the cleaning water. .

  On the housing 10, a support base 28 that supports the cutting means 24 including the cutting blade 26 is provided. The cutting means 24 is configured by attaching a cutting blade 26 to the tip of a spindle supported by a support base 28. The cutting blade 26 is formed into a disk shape by, for example, hardening diamond abrasive grains with a bonding agent. The cutting means 24 is connected to a moving mechanism (not shown) that moves the cutting blade 26 in the Y-axis direction and the Z-axis direction. In the cutting means 24, the cleaning liquid is sprayed from a plurality of spray nozzles, and the workpiece W is cut by moving the cutting blade 26 rotated at high speed relative to the chuck table 40.

  A second transfer arm 31 for transferring the workpiece W between the chuck table 40 and the spinner cleaning mechanism 21 is provided on the side surface 29 of the support base 28. As the second transfer arm 31 moves forward and backward, the workpiece W is transferred by the transfer pad 33 at the tip of the arm portion 32 extending obliquely forward from the side surface 29 of the support base 28. Further, the support base 28 is provided with a cantilever support portion 35 that traverses above the movement path of the chuck table 40, and the cantilever support portion 35 supports an imaging unit 36 that images the workpiece W. An image captured by the imaging unit 36 is used for alignment between the cutting unit 24 and the chuck table 40. A monitor 37 for displaying processing conditions and the like is placed on the support base 28.

  In the housing 10, a chuck table mechanism 50 (see FIG. 3) in which only the chuck table 40 is exposed on the housing 10 is accommodated. The chuck table mechanism 50 rotates the chuck table 40 to position the cutting blade 26 on orthogonal streets and to apply a negative pressure to hold the workpiece W on the holding surface 41 of the chuck table 40. For this reason, the chuck table mechanism 50 employs a rotary joint structure in which the chuck table 40 is rotatably coupled to the fixed base on which the fluid path is formed while suppressing air leakage.

  By the way, as shown in the comparative example of FIG. 2, the general chuck table mechanism 100 realizes a rotary joint structure using a plurality of tubes 105. In the rotary joint structure of the chuck table mechanism 100 of the comparative example, the rotary base 102 that supports the chuck table 101 is disposed so as to surround the cylindrical fixed base 103. A multi-joint 104 to which a plurality of tubes 105 are connected is installed at the central portion of the rotation base 102, and each tube 105 passes from the multi-joint 104 through the inside of the fixed base 103 to an external suction source (not shown). )It is connected to the. A suction force from an external suction source is applied to the holding surface 107 of the chuck table 101 through the tube 105.

  However, in this chuck table mechanism 100, since the tube 105 is twisted with the rotation of the chuck table 101, the tube 105 may be damaged due to aging, and the connecting portion between the multi joint 104 and the tube 105 may be damaged. Debris due to the breakage of the tube 105 and the multi-joint 104 accumulates in the fixed base 103, and the replacement work of the tube 105 and the multi-joint 104 and the cleaning work inside the fixed base 103 become troublesome, requiring a long-term maintenance. There was a problem of becoming. Further, since the suction force from the external suction force is applied to the holding surface 107 of the chuck table 101 through the plurality of tubes 105, the pressure loss in the tube 105 increases and the suction force decreases.

  Therefore, in the present embodiment, the rotary joint structure of the comparative example is changed to support the chuck table 40 so as to be rotatable and suckable without using a plurality of tubes 105. In addition, consumable members such as the seal ring 84 (see FIG. 3) inside the mechanism can be easily replaced by a simple removal operation for some parts of the chuck table mechanism 50, and the maintenance time can be greatly shortened. Can do. Further, by connecting the chuck table 40 and the external suction source 94 (see FIG. 3) through one path, the pressure loss in the flow path is reduced and the suction force is improved.

  Hereinafter, the chuck table mechanism of the present embodiment will be described. FIG. 3 is a schematic cross-sectional view of the chuck table mechanism of the present embodiment. Note that the chuck table mechanism is not limited to the example shown in FIG. 3 as long as the seal ring can be replaced from above by attaching and detaching the insertion portion. For example, in the following description, a chuck table mechanism for a package substrate is illustrated, but the same configuration can be applied to a chuck table mechanism for a semiconductor wafer or an optical device wafer.

  As shown in FIG. 3, the chuck table mechanism 50 has a chuck table 40 that sucks and holds the workpiece W on the upper surface and rotatably supports the chuck table 40, and a rotating means 51 that has the chuck table 40 mounted on the upper portion. It is configured so as to be rotatable above the fixed base 52. The chuck table 40 has a vertically split structure in which a table body 43 is detachably attached to the upper surface of a table base 42. The table main body 43 has a lower portion fixed to the table base 42 in a flange shape around an upper portion where a large number of suction ports 44 are formed. A holding surface 41 is formed in the upper part of the table body 43 by a number of suction ports 44, and mounting holes 46 (see FIG. 4A) for bolts 45 are formed in the lower part of the table body 43.

  Further, the table base 42 is formed in a ring plate shape having an open center, and a screw hole 47 (see FIG. 4A) is formed at a location corresponding to the mounting hole 46 (see FIG. 4A) of the table body 43. . The front end of the bolt 45 protruding from the mounting hole 46 of the table main body 43 is screwed into the screw hole 47 of the table base 42, so that the table main body 43 is detachably attached to the table base 42. By attaching the table main body 43 to the table base 42, a communication chamber 96 that allows the plurality of suction ports 44 to communicate with the suction path 95 of the rotating means 51 is formed. Further, a mounting hole 49 (see FIG. 4B) for the bolt 48 is formed on the radially inner side of the screw hole 47 (see FIG. 4A) of the table base 42.

  The rotating means 51 is configured by connecting an insertion portion 55 that can be inserted into the fixed base 52 with a flange plate 56 to a rotary base 54 that is rotatably disposed above the fixed base 52. The rotary base 54 is formed in a large cylinder shape so as to cover the upper part of the fixed base 52, and is attached to the fixed base 52 via a bearing 57 provided on the opposing surface of the rotary base 54 and the fixed base 52. It is connected. In addition, a table mounting surface 61 on which the chuck table 40 is mounted is formed on the upper surface of the rotation base 54, and the table mounting surface 61 has a position corresponding to the mounting hole 49 (see FIG. 4B) of the table base 42. A screw hole 62 (see FIG. 4B) is formed. The table base 42 is detachably attached to the upper portion of the rotation base 54 by screwing the tip of the bolt 48 protruding from the attachment hole 49 of the table base 42 into the screw hole 62 of the rotation base 54.

  On the radially inner side of the upper surface of the rotation base 54, a ring plate-like flange plate 56 is mounted on a plate mounting surface 63 formed one step lower than the table mounting surface 61. The radially outer side of the flange plate 56 is connected to the plate mounting surface 63, and the radially inner side of the flange plate 56 is connected to the upper end surface of the cylindrical insertion portion 55. The thickness of the flange plate 56 matches the level difference between the table mounting surface 61 and the plate mounting surface 63, and the table mounting surface 61 and the upper surface of the flange plate 56 are flush with each other. That is, the upper surface of the flange plate 56 is also a part of the table mounting surface on which the chuck table 40 is mounted.

  A mounting hole 65 (see FIG. 4C) for the bolt 64 is formed on the radially outer side of the flange plate 56, and a screw hole 69 (see FIG. 4C) is formed on the plate mounting surface 63 at a position corresponding to the mounting hole 65. Is formed. The flange plate 56 is detachably attached to the plate attachment surface 63 by screwing the tip of the bolt 64 protruding from the attachment hole 65 of the flange plate 56 into the screw hole 69 of the plate attachment surface 63. Further, the radially inner side of the flange plate 56 is exposed from the central opening of the table base 42, and a mounting hole 68 for a bolt 67 is formed in the exposed portion of the table base 42.

  The insertion portion 55 is formed in a cylindrical shape extending from the flange plate 56 toward the communication path 97 of the fixed base 52. Inside the insertion portion 55, a suction path 95 that transmits the suction force from the communication path 97 of the fixed base 52 to the upper surface of the chuck table 40 is formed. A screw hole (not shown) is formed at a position corresponding to the attachment hole 68 (see FIG. 4C) of the flange plate 56 on the upper end surface of the insertion portion 55. The tip of the bolt 67 protruding from the attachment hole 68 of the flange plate 56 is screwed into the screw hole of the insertion portion 55, so that the insertion portion 55 is detachably attached to the flange plate 56. Thus, the insertion portion 55 is detachably fixed to the rotation center of the rotation base 54 via the flange plate 56.

  Annular grooves 75, 76, 77 (see FIG. 4C) are formed on the upper surface of the flange plate 56, the plate mounting surface 63 of the rotating base 54, and the upper end surface of the insertion portion 55, respectively. , 77 are fitted with seal rings 81, 82, 83. The table base 42 is sealed to the table mounting surface 61 via the seal ring 81, the flange plate 56 is sealed to the plate mounting surface 63 via the seal ring 82, and the upper end surface of the insertion portion 55 is flanged via the seal ring 83. Sealed to plate 56. Thereby, the reduction of the suction force of the chuck table 40 is suppressed without air leaking from the mating surfaces of the members.

  An engaging end 72 is formed at the lower end of the insertion portion 55 so as to enter the communication path 97 of the fixed base 52. The engagement end portion 72 is formed by reducing the diameter of the outer peripheral surface on the lower end side of the insertion portion 55. The engagement end portion 72 is engaged in an engagement recess 73 whose diameter is increased on the upper end side of the communication path 97 of the fixed base 52. Has been. An annular groove 78 is formed on the outer peripheral surface of the engagement end portion 72, and a seal ring 84 is attached to the annular groove 78. When the engagement end 72 is engaged with the engagement recess 73, the seal ring 84 seals between the outer peripheral wall of the engagement end 72 and the inner peripheral wall of the engagement recess 73. Accordingly, the communication path 97 and the suction path 95 are connected in an airtight manner without air leaking from the mating surface of the engagement end 72 and the engagement recess 73.

  Further, by removing the chuck table 40 from the rotation base 54 and removing the flange plate 56 from the rotation base 54 and the insertion portion 55, the seal rings 81, 82, and 83 are exposed to the outside. Furthermore, the seal ring 84 is exposed to the outside by removing the insertion portion 55 from the rotation base 54 together with the flange plate 56. Therefore, it is possible to easily replace only the consumable seal rings 81, 82, 83, 84 without removing the entire rotating means 51 from the fixed base 52. A fixing seal is used for the seal rings 81, 82, and 83, and a motion seal is used for the seal ring 84, but an O-ring may be used for all of them.

  The fixed base 52 is configured by installing an upper base 87 on a lower base 86, and a communication path 97 that communicates with an external suction source 94 inside the upper base 87 and the lower base 86. Is formed. The communication path 97 of the fixed base 52 communicates with the suction path 95 of the insertion portion 55, and the suction path 95 communicates with the communication chamber 96 in the chuck table 40. Since one path is formed by the communication path 97 and the suction path 95, a suction force from the external suction source 94 can be applied to the holding surface 41 of the chuck table 40 without causing a pressure loss in the flow path. it can. A bearing 57 is provided on the upper base 87, and the rotating base 54 is rotatably held on the fixed base 52 by the bearing 57.

  The rotation base 54 and the fixed base 52 are provided with a rotation motor 91 that rotates the rotation means 51. The rotation motor 91 is configured such that a rotor 93 connected to the rotation base 54 rotates around the stator 92 fixed to the fixed base 52. A coil winding or the like is attached to the stator 92, and the rotor 93 is provided with a plurality of magnets so as to face the stator 92 with a slight gap. When the coil windings of the stator 92 are energized, the rotor 93 rotates about the fixed base 52, and the rotary base 54 and the chuck table 40 connected to the rotor 93 are integrally rotated.

  As described above, the rotary joint of the chuck table mechanism 50 rotatably supports the chuck table 40 and applies a suction force from the external suction source 94 to the holding surface 41 of the chuck table 40 without leaking air. It is possible. Further, since the engaging end portion 72 of the insertion portion 55 and the engaging concave portion 73 of the fixed base 52 slide through the seal ring 84, the seal ring 84 at this sliding portion is particularly easily deteriorated. However, since the insertion portion 55 is detachably attached to the rotation base 54, the seal ring 84 can be easily replaced by removing the insertion portion 55 from the rotation base 54.

  With reference to FIG. 4, the replacement work of the seal ring will be described. FIG. 4 is an explanatory diagram of the replacement work of the seal ring of the present embodiment. 4A shows the work for removing the table body, FIG. 4B shows the work for removing the table base, and FIG. 4C shows the work for removing the flange plate and the insertion portion. In the following description, replacement work of the seal ring provided between the engaging end of the rotating means and the engaging recess of the fixed base will be described.

  As shown in FIG. 4A, in the replacement operation of the seal ring 84 (see FIG. 4C), the bolts 45 on the outer peripheral portion of the table body 43 are first loosened by the operator, and the table body 43 is removed from the upper surface of the table base 42. As a result, the bolt 48 for the table base 42 hidden inside the table main body 43 is exposed to the outside. Next, as shown in FIG. 4B, the bolts 48 of the table base 42 are loosened by the operator, and the table base 42 is removed from the table mounting surface 61 of the rotation base 54. Thereby, the bolt 64 for the flange plate 56 hidden on the back side of the table base 42 is exposed to the outside, and the seal ring 81 mounted in the annular groove 75 on the upper surface of the flange plate 56 is exposed to the outside. .

  Next, as shown in FIG. 4C, the bolts 64 on the radially outer side of the flange plate 56 are loosened by the operator, the flange plate 56 is removed from the plate mounting surface 63 of the rotating base 54, and fixed to the flange plate 56. The inserted insertion portion 55 is pulled out from the fixed base 52. As a result, the seal ring 82 mounted in the annular groove 76 of the plate mounting surface 63 is exposed to the outside, and the seal ring 84 mounted in the annular groove 78 of the engagement end portion 72 of the insertion portion 55 is exposed to the outside. . After the deteriorated seal ring 84 in the annular groove 78 is removed and a new seal ring 84 is attached, the flange plate 56, the table base 42, and the table main body 43 are reversed in the reverse order of the above-described removal operation. It is attached.

  When the seal ring 84 is replaced, the seal ring 81 in the annular groove 75 on the upper surface of the flange plate 56 and the seal ring 82 in the annular groove 76 on the plate mounting surface 63 may be replaced. 4, the insertion portion 55 is fixed to the flange plate 56. However, the insertion portion 55 is removed from the flange plate 56, and the seal ring 83 attached to the annular groove 77 on the upper end surface of the insertion portion 55 is replaced. May be.

  As described above, in the chuck table mechanism 50 of the present embodiment, the rotating means 51 is rotatably disposed on the fixed base 52, and the insertion portion 55 provided on the rotating means 51 is provided on the fixed base 52. By being inserted, the suction path 95 of the insertion portion 55 and the communication path 97 of the fixed base 52 are communicated. Thereby, the suction force from the external suction source 94 is applied to the chuck table 40 through the communication path 97 of the fixed base 52 and the suction path 95 of the insertion portion 55. Further, the engagement end 72 of the insertion portion 55 is engaged with the engagement recess 73 of the fixed base 52, and the space between the outer peripheral wall of the engagement end 72 and the inner wall of the engagement recess 73 is hermetically sealed by the seal ring 84. Sealed. Therefore, the chuck table 40 can be supported in a rotatable and suckable manner without causing an air leak. In addition, since one path is formed by the suction path 95 of the insertion portion 55 and the communication path 97 of the fixed base 52, the pressure loss in the path is reduced and the suction force is improved. Further, the insertion portion 55 is removed from the rotation base 54 of the rotation means 51 and the engagement end portion 72 of the insertion portion 55 is pulled out from the engagement recess 73 of the fixed base 52. Therefore, the maintenance time can be greatly shortened.

  In the above-described embodiment, a large number of suction ports 44 are formed on the holding surface 41 of the chuck table 40. However, the present invention is not limited to this configuration. The holding surface 41 of the chuck table 40 may be made of porous ceramics and porous. Further, the chuck table 40 is configured such that the table main body 43 is detachably attached to the table base 42. However, the table base 42 and the table main body 43 may be integrally formed.

  In the above-described embodiment, the electromagnetic motor is exemplified and described as the rotary motor 91, but the present invention is not limited to this configuration. As the rotary motor 91, an electrostatic motor or an ultrasonic motor may be used.

  In the above-described embodiment, the flange plate 56 is screwed to the rotation base 54 and the insertion portion 55 is screwed to the flange plate 56, so that the insertion portion is inserted into the rotation base 54 via the flange plate 56. Although 55 was fixed, it is not limited to this structure. The insertion portion 55 only needs to be detachably fixed to the rotation base 54 and may be fixed to the rotation base 54 in any manner.

  In the above-described embodiment, the external suction source 94 only needs to be able to apply a suction force to the holding surface 41 of the chuck table 40 through the communication path 97 of the fixed base 52. For example, the external suction source 94 includes a suction pump or an ejector. May be.

  In the above-described embodiment, the package substrate is exemplified as the workpiece W. However, the workpiece W may be a workpiece to be processed, and may be a semiconductor wafer or an optical device wafer.

  In the above-described embodiment, the seal ring 84 is attached to the annular groove 78 formed on the outer surface of the engagement end portion 72 of the insertion portion 55. However, the present invention is not limited to this configuration. The seal ring 84 only needs to be able to seal between the inner peripheral wall of the engagement recess 73 and the outer peripheral wall of the engagement end 72. As shown in FIG. 3, the upper open end of the engagement recess 73 is recessed to form a step, and the step 72 a of the engagement end 72 enters the step-shaped recess 73 a. A space between the stepped depression 73a and the stepped portion 72a of the engagement end portion 72 may be sealed with a seal ring. In this case, an annular groove in which the seal ring is mounted is formed on the bottom surface of the stepped recess 73 a of the engagement recess 73, and the seal ring is sandwiched between the engagement recess 73 and the engagement end 72 from above and below. Good. Even in such a configuration, the seal ring can be exposed to the outside by removing the insertion portion 55 from the rotation base 54.

  Moreover, although embodiment and modification of this invention were demonstrated, what combined the said embodiment and modification as the other embodiment of this invention entirely or partially may be sufficient.

  The embodiments of the present invention are not limited to the above-described embodiments, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Further, if the technical idea of the present invention can be realized in another way by technological advancement or other derived technology, the method may be used. Accordingly, the claims cover all embodiments that can be included within the scope of the technical idea of the present invention.

  In the embodiment of the present invention, the configuration in which the present invention is applied to the chuck table mechanism has been described. However, the chuck table can also be applied to a rotary joint structure capable of rotating and sucking.

  As described above, the present invention has an effect that the chuck table can be rotated and sucked without using a tube, and the maintenance time can be shortened. In particular, the chuck table mechanism for a package substrate. Useful for.

40 Chuck table 41 Holding surface 50 Chuck table mechanism 51 Rotating means 52 Fixed base 54 Rotating base 55 Inserting part 57 Bearing 72 Engaging end part of the inserting part 73 Engaging recess part of the fixed base 78 Annular groove 84 Seal ring 91 Rotation Motor 94 External suction source 95 Suction path 97 Communication path W Workpiece

Claims (2)

A chuck table mechanism that rotatably supports a chuck table that holds a workpiece on the upper surface by suction,
A fixed base in which a communication path that communicates with an external suction source is formed; and a rotating means that is rotatably disposed above the fixed base and has a chuck table mounted thereon.
The rotating means is configured to be rotatably disposed above the fixed base, and to be detachably fixed to the rotary base at the center of rotation and to be inserted into the fixed base. An insertion portion, and
The insertion portion includes an engagement end portion that is formed inside with a suction path for transmitting a suction force to the upper surface of the chuck table and engages with an engagement recess of the fixed base,
When the engagement end engages with the engagement recess, a seal ring seals between the outer peripheral wall of the engagement end and the inner wall of the engagement recess of the fixed base, and the communication path And a suction path are connected to each other.   2. The chuck table mechanism according to claim 1, wherein the rotating means is held by a bearing on the fixed base, and the fixed base is provided with a rotation motor for rotating the rotating means.

Images