TW201734244A - 真空塗佈製程中的蓋板玻璃基材的靜電吸附 - Google Patents
真空塗佈製程中的蓋板玻璃基材的靜電吸附 Download PDFInfo
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Abstract
一種用於在具有被驅動旋轉的旋轉鼓的真空塗佈腔室中塗佈行動裝置2D或3D蓋板玻璃的靜電吸附設備及方法。此設備包括載具,此載具包括可移除地可安裝至旋轉鼓的液冷冷板。在3D蓋板玻璃的情況下,此載具包括帶有3D輪廓的一部分以匹配3D蓋板玻璃的3D輪廓。此載具進一步包括適於將蓋板玻璃適當固定抵靠此載具於藉由旋轉鼓的旋轉造成的離心力表面中的靜電吸附(ESC),此ESC發展足夠的夾緊力以可靠地將蓋板玻璃適當固定。
Description
本發明關於吸附或夾緊用於電漿處理的實質上二維(平坦或2D)蓋板玻璃基材及/或實質上三維(有時被當作彎曲的或3D)蓋板玻璃基材的一般領域,像是容許藉由物理氣相沉積,塗佈或處理可被施加至玻璃基材。尤其,本發明關於藉由誘導靜電極化(通常習知為靜電吸附或簡略為「ESC」)的這種吸附。
康寧公司是手持顯示器玻璃市場的領導市場供應者且已發展出符合市場需求的具有處理的許多顯示器玻璃組成物,像是抗微生物與抗刮塗佈。再者,已經出現與藍寶石玻璃競爭的改良抗刮塗佈的要求。在高度競爭的手持顯示器的世界中,低製造成本與快速生產為首要的,且因而生產高端抗刮塗佈的低成本、高容積製造處理在2D與3D蓋板玻璃基材兩者中是期望的。在此類真空塗佈處理期間,由於在處理持續期間的粒子動力學,基材會達到顯著的溫度。目前,在基材生產中通常達到230℃的溫度,其使得以習知技術(像是膠合膠帶)難以夾緊基材。在現行製造中,雙面膠方法被用於在塗佈系統中將基材附接至載具。此方法有三種不同的劣勢:(1)膠帶處理是勞力密集的且增加將載具設置用於下一次操作的時間及(2)在原始電漿環境中的膠合排氣造成污染,電漿處理腔室需要定期地清洗且增加更多的處理成本與時間,及(3)此膠合留下殘餘物於塗佈的玻璃基材上,其需要額外處理與塗佈後清洗,也進一步增加處理的成本與時間。
在產業中已嘗試暫時接合玻璃以用於處理的數種方法,但沒有顯著成功,像是玻璃-對-玻璃凡得瓦接合、以各種膠合組成物(像是現行用於生產中的聚醯亞胺(polyimide)膠合膠帶)的膠合接合、在玻璃表面上的聚合塗佈以改變表面能量,造成暫時接合足以強力維持至設想的終點處理,但當處理完成時足以弱化至解開接合,等等。有著夾緊與固持方法的幾種例子,但每一種都有其缺點。例如,將薄膜聚合塗佈加至載具表面上以改變表面能量需要PVD或CVD系統以產生所需的薄膜且其本身為非常昂貴的處理。在載具上的薄膜塗佈在特定處理操作間隔需要被剝除與替換,增加進一步的成本與複雜度。
靜電吸附(「ESC」)是一種技術,其中帶有平面場線(由高電壓電位產生)的靜電場被施加至由介電質隔開的平行電極且誘導在(玻璃)基材中的分子偶極。這些分子偶極本身與外部施加的電場對準,且因而被吸附累積於來自電極的場線。靜電吸附已經被用於其他產業/應用中,然而靜電吸附並非習知用於玻璃的PVD塗佈中(靜電吸附並非習知可行於此應用中)。
日本專利公開號JP2007036285A描述一種在一板/基材(由標題可推定為半導體晶圓)上的高溫金屬濺射處理,此板/基材被靜電吸附所夾緊以用於濺射處理,此靜電吸附被加熱於從100℃至150℃。
美國公開專利申請號US20140034241A1描述一種在電漿處理腔室中的靜電夾緊設備,其用於被使用於堆疊微處理器製造的三維SiOG基材(矽塗佈玻璃基材)的電漿蝕刻處理。
日本公開專利申請號JP2012124362A描述一種在濺射電漿處理中夾緊玻璃基材的靜電吸附,同時控制基材溫度。藉由在半導體產業中廣泛使用的使用氣體(通常是He)流動於在基材之後的ESC表面上的微通道中之技術以達成熱控制。
2006年的Choe,Hee-Hwan的論文「Basic Study of a Glass Substrate in a Dry Etching System」,Vacuum第81冊(2006)第344-346頁討論來自反應性離子蝕刻腔室中的電漿的電場的理論效應,與在玻璃基材上使用He的背側冷卻,及使用ESC以對抗與克服這些力。
因此,可見仍然存在著需求於解決吸附或夾緊用於電漿處理的實質上二維(平坦或2D)蓋板玻璃基材及/或實質上三維(有時稱為彎曲或3D)蓋板玻璃基材,像是容許藉由物理氣相沉積施加塗佈或處理至玻璃基材。本發明主要關於提供藉由誘導靜電極化(習知為靜電吸附或「ESC」)的這種吸附。
簡短敘述,本發明的第一例子關於用於在具有被驅動旋轉的旋轉鼓的真空塗佈腔室中塗佈行動裝置3D蓋板玻璃的吸附設備。此示例設備包括載具,載具包括可移除地可安裝於旋轉鼓的液冷冷板。較佳地,載具包括帶有3D輪廓的一部分以匹配3D蓋板玻璃的3D輪廓。再者,較佳地,載具進一步包括靜電吸附(ESC),其適以將3D蓋板玻璃適當地固定靠在載具的3D輪廓於藉由超過100rpm的旋轉鼓的旋轉造成的離心力的面中,ESC發展足夠的夾緊力以可靠地將蓋板玻璃適當地固定。
本發明的另一例子關於用於在具有旋轉鼓的塗佈腔室中塗佈蓋板玻璃的吸附設備。此設備包括可移除地可安裝於旋轉鼓的液冷冷板,與固定於冷板的靜電吸附(ESC)且適以將蓋板玻璃適當地固定在藉由旋轉鼓的旋轉造成的離心力的面中。
較佳地,ESC發展出夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的數倍。更佳地,ESC發展出夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的至少三倍。
較佳地,蓋板玻璃是用於手持裝置的彎曲蓋板玻璃,且吸附設備進一步包括安裝在ESC與冷板之間的彎曲接合器以匹配彎曲蓋板玻璃的曲度。
可選地,ESC可包含印刷的聚醯亞胺。
再者,可選周圍墊片可被定位相鄰ESC以密封蓋板玻璃至ESC的邊緣以避免背面濺射抵達蓋板玻璃的背側。
可選地,ESC被用於在超過攝氏100度的溫度的真空腔室中,同時液冷冷板適以維持ESC的溫度於攝氏35度或更低。
本發明的又另一例子可以具有超過3呎的直徑且被驅動旋轉超過100rpm的大旋轉鼓的塗佈腔室實行。本發明設備可包括可移除地可安裝於大旋轉鼓的液冷冷板與固定於冷板的靜電吸附(ESC)且適以將蓋板玻璃適當地固定於藉由大旋轉鼓超過100rpm的旋轉造成的離心力的面中。此ESC發展出足夠的夾緊力以可靠地將蓋板玻璃適當地平穩固定於大旋轉鼓的旋轉的面中。
本發明的又另一例子關於用於在具有在塗佈期間被驅動旋轉的大旋轉鼓的塗佈腔室中塗佈行動裝置蓋板玻璃的方法。此方法包含以下步驟: a. 提供複數個載具用於將多個蓋板玻璃暫時地安裝至旋轉鼓以用於塗佈此等蓋板玻璃; b. 提供多個靜電吸附(ESC)於此等載具; c. 當此等載具在塗佈腔室外且沒有安裝於旋轉鼓時,將此等蓋板玻璃安裝於此等ESC; d. 供給能量於此等ESC以將此等蓋板玻璃暫時地固定於此等靜電吸附與載具; e. 當此等ESC暫時地固定此等蓋板玻璃時,將此等載具安裝至旋轉鼓; f. 供給能量於此等ESC以將此等蓋板玻璃牢固地固定於此等載具,且因此牢固地固定於旋轉鼓,而不管籍由旋轉鼓的旋轉造成的離心力; g. 當此等蓋板玻璃牢固地固定於此等載具與旋轉鼓時,旋轉旋轉鼓及塗佈此等蓋板玻璃; h. 停止塗佈與旋轉鼓的旋轉; i. 不供給能量於此等ESC; j. 移除此等載具;以及 k. 從此等載具移除此等蓋板玻璃。
可選地,此等ESC發展出夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的數倍。更佳地,此等ESC發展出夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的至少三倍。
此方法可用於2D蓋板玻璃或用於手持裝置的彎曲蓋板玻璃。在彎曲(3D)蓋板玻璃的情況下,此等載具可包括彎曲接合器以匹配彎曲蓋板玻璃的曲度。
此類塗佈方法可與此等ESC使用以施加抗刮塗佈於蓋板玻璃。再者,此塗佈方法可可選地與在超過攝氏100度的溫度的真空塗佈腔室使用,且此方法可進一步包括提供帶有液冷冷板的多個載具以維持此等ESC的溫度於攝氏35度或更低。
本發明的又另一例子關於用於以一塗佈以塗佈行動裝置蓋板玻璃的改良製造方法,其中此塗佈經由濺射電漿處理施加,其中當塗佈進行時,此蓋板玻璃暫時地安裝在旋轉鼓上。此改良方法包含以ESC靜電夾緊蓋板玻璃於載具,載具暫時地固定於旋轉鼓,帶有足夠的夾緊力以適當地維持蓋板玻璃,而不管藉由鼓的旋轉造成的作用在蓋板玻璃上的離心力,否則當旋轉鼓旋轉時,離心力傾向將蓋板玻璃從旋轉鼓脫離。
本發明有利地提供用於精確地記錄與固持蓋板玻璃基材於定位以用於玻璃電漿塗佈處理的方法與設備,以維持高度的塗佈一致性,同時提供簡單與有效的方式以裝載與卸載處理的基材而沒有不欲的殘留物或損傷。
現在詳細地參照各種圖式,其中類似的參考特徵代表數個視圖之中類似的部件,圖 1
顯示用於在具有旋轉鼓D
的塗佈腔室C
中塗佈蓋板玻璃的複數個吸附設備10。如後續的圖式所示,設備10包括大致矩形的液冷冷板20,其可移除地可安裝於旋轉鼓D且具有帶有入口及出口22、24的U形冷水管線21。冷卻水可被驅使通過水管線21以冷卻於高周邊溫度(像是通常於PVD塗佈處理中所經受的)的表面中的冷板20。靜電吸附(ESC)30被固定於冷板20的上表面26且適於將蓋板玻璃G
適當地固定於藉由旋轉鼓D
的旋轉造成的離心力的面中。
較佳地,ESC 30發展夾緊力,其為藉由旋轉鼓D
的旋轉造成的離心力的數倍。更佳地,ESC 30發展夾緊力,其為藉由旋轉鼓D
的旋轉造成的離心力的至少3倍。可選地,ESC 30可包含印刷的聚醯亞胺。
再者,可選的周圍墊片31可被放置相鄰ESC 30的邊緣以密封蓋板玻璃G
至ESC 30的邊緣以避免背面濺射抵達蓋板玻璃G
的背側。可選地,ESC 30包括基底板或接合器板35,其可安裝於冷板20且可被塑形以匹配蓋板玻璃G
的特定輪廓。儘管在這些圖式中,蓋板玻璃G
於邊緣具有和緩的曲度,此領域中的熟習技藝者可理解到,藉由提供適於蓋板玻璃的曲度(或沒有曲度)的基底板,可塗佈具有更大許多曲度的蓋板玻璃或完全沒有曲度(平坦或2-D蓋板玻璃)的蓋板玻璃。因此,基底板做為像是接合器以將ESC 30接合至被處理的特定蓋板玻璃。基底板35包括周圍溝槽32用以於其中接收彈性墊片31。溝槽32的深度稍微小於墊片31未壓縮的高度,以於蓋板玻璃G
被吸附抵靠於墊片時,在墊片中創造出少許「碎裂」,提供有效且緊密密封接近於玻璃的邊緣。
可選地,ESC 30被用於在超過攝氏100度的溫度的真空腔室C
中,同時液冷冷板20被接合以維持ESC的溫度於攝氏35度或更低。
吸附10包括接合至3D蓋板玻璃的聚醯亞胺ESC 40。聚醯亞胺ESC 40僅與3D蓋板玻璃G
的平坦內部分相接觸。如前所述,ESC被供應有半導體抗電漿等級背面濺射防止墊片31。
可選地,如圖 4
所示,聚醯亞胺ESC包括PCB銅佈局50以用於聚醯亞胺軟性電路板CAD檔,其可被PCB(印刷電路板)製造者使用以製造軟性電路板。此佈局設計(圖樣)為商業上可行的設計以用於聚醯亞胺膜。上部與下部引線51、52具有銅墊53、54,其被焊接高電壓(24 kVDC)及高溫(250℃)導線55、56。
可選地,如圖 5
至7
所示,蓋板玻璃可為2D蓋板玻璃G2
。例如,圖 6
顯示聚醯亞胺ESC 140,其帶有2D蓋板玻璃基材G2
,2D蓋板玻璃基材G2
被吸附至聚醯亞胺ESC 140於冷板20上,冷板20將聚醯亞胺與基材於230℃烘箱中保持在最大35℃。為了測試此2D夾緊/吸附的效能,帶有多個康寧5318 IOX蓋板玻璃基材的這些ESC 140的3個ESC被夾緊3小時,同時以210 RPM自旋,產生正交於基材表面的10 G的離心力。此離心力被玻璃中的靜電場誘導極化所抵制,使玻璃被夾緊於ESC表面。因此,在此自旋期間,ESC 140更能夠將蓋板玻璃牢固地固持抵靠吸附設備。
如圖 6
所示,2D修飾蓋板玻璃顯示出聚醯亞胺ESC 140僅夾緊於蓋板玻璃G2
的乾淨區域。在實驗中,3個冷板被安裝至直徑為35 cm的旋轉支撐件,於250℃烘箱中且以210 RPM自旋,帶有如圖 6
所示的12.6 g蓋板玻璃樣品,造成1.08 N離心力,其超過鼓塗佈器範例計算而得的0.64 N。所以當施加於鼓塗佈器PVD處理時,本文所述的聚醯亞胺ESC超過要求的夾緊力是必要的以保持蓋板玻璃,夾緊達到20 g蓋板玻璃尺寸。若使用>20 g玻璃樣品,則ESC的區域可被增加以使更多的玻璃區域被ESC所夾緊。
如圖 7
所示,自旋設備夾具70被用於測試此等ESC且測試夾具70固持帶有冷板的3個聚醯亞胺2D(也可固持3D測試冷板)ESC,與從在軸件上的回轉2個埠接頭循環的冷卻水(見圖 7
的下部分)。圖 8
為3.6 kVdc集電環接點與250℃ 25 kVdc額定導線的特寫,其傳達出於此等ESC自旋時,此等ESC的充電電位。此自旋設備被放置於250℃烘箱中且軸件被外部連接至齒輪電動機,其轉動軸件於210 RPM。此產生0.11 N離心力於12.6 g蓋板玻璃基材上,其反映生產回轉塗佈系統。ESC有效地將蓋板玻璃適當固持,而不管旋轉及熱。
圖 9
為顯示3D蓋板玻璃G
被安裝於附貼在冷板20的接合器板35頂上的ESC 40的剖面示意圖。接合器板包括周圍溝槽以接收可壓縮墊片31。在此圖之特定示意例子中,墊片為球型且帶有一翼於其一側上。此墊片的形狀因而具有滑動特徵,當3D蓋板玻璃G
被壓在ESC上時,其提供寬廣的密封。
圖 10
圖解地顯示所執行的實驗且其確立被施加3 kVDC的聚醯亞胺ESC 40可夾緊且固持帶有附加200 g重量W
的康寧5318玻璃樣品1小時。
在又另一範例形式中,本發明可操作於具有直徑超過3呎且被驅動旋轉超過100rpm的大旋轉鼓的塗佈腔室。本發明設備可包括可移除地可安裝於大旋轉鼓的液冷冷板及固定於冷板的靜電吸附(ESC)且適於將蓋板玻璃適當固定於藉由超過100rpm的大旋轉鼓的旋轉造成的離心力的面中。此ESC發展足夠的夾緊力以可靠地將蓋板玻璃適當地平穩固定於大旋轉鼓的旋轉的面中。
可選地,此吸附設備用於在具有被驅動旋轉的旋轉鼓的真空塗佈腔室中塗佈行動裝置3D蓋板玻璃。範例設備包括載具,此載具包括可移除地可安裝於旋轉鼓的液冷冷板。較佳地,此載具包括帶有3D輪廓的一部分以匹配3D蓋板玻璃的3D輪廓。再者,較佳地,此載具進一步包括靜電吸附(ESC),其適於將3D蓋板玻璃適當地固定抵靠載具的3D輪廓於藉由超過100rpm的旋轉鼓的旋轉造成的離心力的面中,此ESC發展足夠的夾緊力以可靠地將蓋板玻璃適當固定。
較佳地,蓋板玻璃是用於手持裝置的彎曲蓋板玻璃及吸附設備進一步包括安裝於ESC與冷板之間的彎曲接合器以匹配彎曲蓋板玻璃的曲度。
為了增進玻璃基材與ESC間的平坦度與高度接觸,冷板可被加工至小於10μm的平坦度與小於1μm的表面粗糙度。為了將ESC附接至冷板,可使用烘乾的雙面膠帶或若ESC被放置在未固化的環氧樹脂上可使用熱環氧樹脂,且冷板被研磨至高度平坦度。此雙面膠帶可例如為Kapton®膠帶(來自DuPont的具有Kapton®聚醯亞胺的膠帶)。此雙面膠帶首先被烘烤於200℃1小時以蒸發通常用於黏附的矽酮油。此避免在塗佈處理期間,油汽化然後凝結於冷板及蓋板玻璃上。一旦經烘烤,此雙面膠帶被滾軋於聚醯亞胺ESC背側上,且然後此兩者被滾軋於冷板上。在3D部件的情況下,雙面膠帶被滾軋於冷板鋁3D接合器板上。為了避免機械應力於ESC的焊接接點上,引線被放置於由介電材料所製成的夾緊機構之間,以便不提供電弧路徑與短路ESC。
可使用額外的雙面膠帶圍繞焊接接點以提供提高的絕緣保護。沒有氣泡被封閉於ESC或雙面膠帶下是重要的,由於ESC是使用於高真空電漿環境中(1x10-4
Torr)。在真空下,氣泡會極大地擴張且造成蓋板玻璃脫離ESC。
在2D及3D兩者蓋板玻璃ESC/冷板組件中,墊片被用於密封蓋板玻璃背側的邊緣,以避免背面濺射。這些墊片具有沿著其長度的鰭條帶(flipper strip),如圖 8
的剖面顯示的。當蓋板玻璃藉由ESC的夾緊力被壓在墊片上時,鰭向下折疊於蓋板玻璃的內側邊緣,形成圍繞蓋板玻璃周圍的緊密寬廣密封。相同的機制可用於平坦2D蓋板玻璃上。
用於供應電源,3 kVdc ESC電源被設計與製造,由鋰離子電池與沒有極性切換的12 Vdc至3 kVdc高電壓模組所組成。3 kVdc ESC電源被設計與製造,由鋰離子電池與帶有高電壓極性切換的12 Vdc至3 kVdc高電壓模組所組成,以避免在蓋板玻璃基材中的永久極化。此兩種電源皆被用於與聚醯亞胺ESC的實驗。
使用於原型中的電源由鋰離子可充電電池與商業上可用的高電壓DC至DC轉換器(其採取12 VDC並提升至3 kVDC)所製成。也可使用第二電源,其結合定時器電路以於每13分鐘切換高壓輸出極性,以在塗佈處理期間,避免蓋板玻璃基材的永久極化。此外,任意的高電壓DC供應可與聚醯亞胺ESC使用,其中電位為3.6 kVDC。被供應用於典型處理的電流負載180個蓋板玻璃樣品,帶有一功率模組為3個ESC的群組,而每一個蓋板玻璃使用一個ESC,且由各個模組汲取的電流為300 mA,被供應用於典型處理的電流為180/3=60個模組x300 mA=18A。單一12 VDC 20A電源可驅動所有的180個ESC。為了避免蓋板玻璃基材中的分子的永久極化於處理溫度250℃與電場3.6 kVDC,可使用改變場定向的時變任意波形。此外,已經注意到ESC上的高電壓的極性也可被週期性地保存。
為了防止聚醯亞胺熱降解與保持基材冷卻,冷板被連接至冷卻器,其循環冷卻水通過冷板,保持冷板於23℃與25℃之間。實驗被進行於在230℃烘箱中保持ESC於35℃且在許多次實驗之後,沒有發現聚醯亞胺的降解。
帶有靜電吸附玻璃的實驗於PVD塗佈處理的介電質、氧化物、金屬、及半導體塗佈顯示出沒有影響於塗佈一致性或沉積速率於約50nm等級的非常薄塗佈與約200nm等級的薄塗佈。
為了將多個蓋板玻璃基材載入塗佈真空腔室中,帶有多個ESC安裝於其上的載具可被電源賦能且蓋板玻璃基材被放置在此等ESC上。電源可被關閉且可從此等ESC斷開供應,且蓋板玻璃基材的暫時接合產生並可被維持達2小時,同時載具從塗佈系統被載入或載出。一旦被負載於回轉鼓上,在塗佈處理期間,此等ESC可再一次連接至電源並保持被賦能,以確保當鼓旋轉時,蓋板玻璃樣品具有足夠的被施加的夾緊力。
於使用中,裝備集中在ESC上,此ESC為從聚醯亞胺膜堆疊商業上製造的,聚醯亞胺膜堆疊帶有被夾置在頂部與下部聚醯亞胺膜之間的叉指式(interdigital)銅電極。銅引線被顯現為如圖式所示。此引線被封裝在聚醯亞胺中,聚醯亞胺作為絕緣介電質。此引線被封端在銅墊中,高電壓高溫導線被焊接至銅墊以將ESC連接至電源。波狀銅軌跡被附加至引線以於當引線被彎曲圍繞冷板的邊緣時,容許可撓性而不破裂薄銅箔。或者,冷板可被供應有平緩蜿曲度邊緣以避免於銅箔中在引線附近的尖銳的角(彎曲)。
在一原型中,ESC電極區域被設計為10.0cm x 5.5cm的55cm2
之方形區域。為了測試夾緊力,7.73g的康寧5318蓋板玻璃樣品被切成10cm x 5.5cm,且一薄線鉤被熱膠黏至基材的中心。在冷板上的ESC被上下顛倒夾緊,使得線垂下且高電壓3 kVDC供應被連接至ESC。實驗重量被懸掛在鉤上以估量潛在地能使得玻璃從ESC脫離的負載。合計200g被懸掛在電極上且被維持1小時的測驗持續期間。不計算膠與鉤的重量,懸掛在樣品上的重量對於玻璃的重量的比率為200g/7.73g=>25G或等同於25.9倍的玻璃的重量之夾緊力。鼓塗佈器可例如具有1.5m鼓直徑且可自旋於100RPM。於是圓周為4.7m且RPS=100/60=1.7RPS,而速度v=4.7m/1.7RPS=2.8m/s,其為線速度。而離心力為: 對於7.73g蓋板玻璃: Fc=m(nω/60)2
/r=7.73x10-3
kg(100*2*π*0.75m/60)2
/0.75m=0.64N 若接觸區域為5.5cmx10cm或55cm2
於是區域=0.0055m2
而0.64/0.0055m2
=115.6N/m2
=1.18g/cm2
其為最小接合強度以固持部件,於部件自旋於旋轉在100RPM的1.5m直徑鼓的外側上時。在上述的實驗中,我們擁有207.73g的結合重量於10cmx5.5cm或55cm2
的接觸區域。207.73g/55cm2
=3.78g/cm2
於ESC上的3 kVDC場。3.87g/cm2
/1.18g/cm2
=3.3倍,需要使用在上述情況下的鼓塗佈器上的夾緊力。
儘管靜電吸附大體上不是新穎的,在此之前其並未被認為用於涉及高溫的電漿真空塗佈中的蓋板玻璃基材上。本發明容許靜電吸附被運用於此類應用中,其乃部分地藉由緩和靜電吸附的工作溫度(藉由主動冷卻靜電吸附)。此促進以>10G固持力夾緊2D或3D蓋板玻璃基材,容許在自旋塗佈操作期間(離心力對抗靜電夾緊力),蓋板玻璃基材被固持。在此之前,在工業上並未達成此類成果。
在如圖 11
所示的又另一例子中,本發明關於用於在具有在塗佈期間驅動旋轉的大旋轉鼓的塗佈腔室中塗佈行動裝置蓋板玻璃的方法110。此方法大體上包含以下步驟: 提供複數個載具用於將多個蓋板玻璃暫時地安裝至旋轉鼓以用於塗佈此等蓋板玻璃; 提供多個靜電吸附(ESC)於此等載具; 當此等載具在塗佈腔室外且沒有被安裝於旋轉鼓時,將此等蓋板玻璃安裝於該等ESC; 供給能量於該等ESC,以將此等蓋板玻璃暫時地固定於該等靜電吸附與載具; 當此等ESC暫時地固定此等蓋板玻璃時,將此等載具安裝至旋轉鼓; 供給能量於此等ESC,以將此等蓋板玻璃牢固地固定於此等載具,且因此牢固地固定於旋轉鼓,而不管籍由旋轉鼓的旋轉造成的離心力; 當此等蓋板玻璃牢固地固定於此等載具與旋轉鼓時,旋轉旋轉鼓及塗佈此等蓋板玻璃; 停止塗佈與旋轉鼓的旋轉; 不供給能量於此等ESC; 移除此等載具;以及 從此等載具移除此等蓋板玻璃。
如圖 11
所示,方法110可包括以下步驟: 111:將複數個載具連接至電源,此等載具具有用以將多個蓋板玻璃暫時地安裝於旋轉鼓以用以塗佈此等蓋板玻璃的多個ESC; 112:當此等載具在塗佈腔室外且沒有被安裝於旋轉鼓時,將此等蓋板玻璃安裝於此等ESC; 113:供給能量於此等ESC,以將此等蓋板玻璃暫時地固定於此等靜電吸附與載具; 114:不供給能量於此等ESC; 115與116:當此等ESC暫時地固定此等蓋板玻璃時,將此等載具安裝至旋轉鼓(將此等載具放置到負載鎖定中且機器人地將此等載具放置至塗佈器鼓上); 117:供給能量於此等ESC,以將此等蓋板玻璃牢固地固定於此等載具,且因此牢固地固定於旋轉鼓,而不管籍由旋轉鼓的旋轉造成的離心力; 118:當此等蓋板玻璃牢固地固定於此等載具與旋轉鼓時,旋轉旋轉鼓及塗佈此等蓋板玻璃,及停止塗佈與旋轉鼓的旋轉; 119:不供給能量於此等ESC; 121-122:從鼓及從負載鎖定移除此等載具; 123:從此等載具移除此等蓋板玻璃;以及 124:檢驗與封裝此等蓋板玻璃。
可選地,此等ESC發展夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的數倍。更佳地,此等ESC發展夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的至少3倍。
此方法可被用於手持裝置的2D蓋板玻璃或彎曲的(3D)蓋板玻璃。在彎曲的(3D)蓋板玻璃情況下,此等載具可包括彎曲接合器以匹配彎曲的蓋板玻璃的曲度,如上所述。
此類塗佈方法可與此等ESC使用以施加抗刮塗佈於蓋板玻璃。再者,此塗佈方法可以可選地使用在超過攝氏100度的溫度的真空塗佈腔室,且此方法可進一步包括提供帶有液冷冷板的此等載具以維持此等ESC的溫度於相對低的工作溫度,像是攝氏35度或更低。
在又另一範例形式中,本發明關於一種以一塗佈用於塗佈行動裝置蓋板玻璃的改良製造方法,其中此塗佈藉由濺射電漿處理施加,其中當此塗佈被供給時,此蓋板玻璃被暫時地安裝於旋轉鼓上。此改良包含以ESC將多個蓋板玻璃靜電夾緊至多個載具,此等載具暫時地固定於旋轉鼓且帶有足夠的夾緊力以適當地保持此等蓋板玻璃,而不管藉由鼓的旋轉造成的作用於此等蓋板玻璃上的離心力,否則當旋轉鼓旋轉時,將傾向於將蓋板玻璃從旋轉鼓脫離。
若干優點
在塗佈器中的蓋板玻璃基材的靜電吸附是一清洗技術,其不遺留需要清洗後處理的任何殘留物於處理的蓋板玻璃上。在塗佈器中的蓋板玻璃基材的靜電吸附具有非常低的勞力消耗(數秒,對比於目前的膠帶處理的10幾分鐘),允許迅速地載入與載出塗佈腔室。水冷保持聚醯亞胺與蓋板玻璃基材接近於室溫,所以聚醯亞胺ESC具有長使用壽命及數個使用循環不會由於暴露至在蓋板玻璃基材上的累積處理溫度上昇而老化。
聚醯亞胺ESC藉由各種印刷電路板製造廠以光圖案化方法可被簡單地製造且相較於商業上設計且製造的多個ESC(1000多美元) 為非常低成本(10幾美元至100多美元),且聚醯亞胺ESC的生產時間為數天(通常為5天),然而商業設計的多個ESC需要數個月以生產。聚醯亞胺ESC是由薄(0.13mm)膜所製成,為可撓性的,且可適用於輪廓化表面,使其成為用於3D蓋板玻璃基材的理想夾緊機制。
本發明有利地提供精確地記錄及固持蓋板玻璃基材於定位的方法及設備,以用於玻璃電漿塗佈處理而維持高度的塗佈一致性,同時提供簡單且有效率的手段以載入與載出處理的基材而沒有不欲之殘留物或損害。
在此描述的手持顯示器玻璃靜電吸附方法與設備提供低成本處理能力,藉由允許已存在的電漿薄膜沉積系統的簡單改裝,同時不受到在其中通常遭遇的高溫的負面影響。
雖然本發明已以較佳示意實施例的方式說明,在不悖離定義於隨附申請專利範圍中的本發明的精神與範疇下,此領域的熟習技藝者將理解各種改變、附加、刪減、與修飾可於其中完成。若干範例實施例包括下列實施例。
實施例1.一種用於在具有被驅動旋轉的旋轉鼓的真空塗佈腔室中塗佈行動裝置3D蓋板玻璃的吸附設備,此設備包含: 包括液冷冷板的載具且被可移除地可安裝於旋轉鼓; 此載具包括3D輪廓的一部分以匹配3D蓋板玻璃的3D輪廓;以及 此載具進一步包括靜電吸附(ESC)適以將3D蓋板玻璃適當地固定抵靠載具的3D輪廓於藉由超過100rpm的旋轉鼓的旋轉造成的離心力的面中,此ESC發展足夠的夾緊力以可靠地將蓋板玻璃適當固定。
實施例2.一種用於在具有旋轉鼓的塗佈腔室中塗佈蓋板玻璃的吸附設備,此設備包含: 可移除地可安裝於旋轉鼓的液冷冷板;以及 固定於冷板的靜電吸附(ESC)且適以將蓋板玻璃適當固定於藉由旋轉鼓的旋轉造成的離心力的面中。
實施例3.如實施例1或實施例2的吸附設備,其中ESC發展夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的數倍。
實施例4. 如實施例1或實施例2的吸附設備,其中ESC發展夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的至少3倍。
實施例5.如前述任一實施例的吸附設備,其中蓋板玻璃為用於手持裝置的彎曲蓋板玻璃,且其中吸附設備進一步包括安裝於ESC與冷板之間的彎曲接合器以匹配彎曲蓋板玻璃的曲度。
實施例6. 如前述任一實施例的吸附設備,其中ESC包含印刷的聚醯亞胺。
實施例7. 如前述任一實施例的吸附設備,進一步包含定位相鄰於ESC的周圍墊片以密封蓋板玻璃至ESC的邊緣以避免背面濺射抵達蓋板玻璃的背側。
實施例8. 如前述任一實施例的吸附設備,其中ESC被用於施加抗刮塗層於蓋板玻璃。
實施例9. 如前述任一實施例的吸附設備,其中ESC被用於超過攝氏100度的溫度的真空腔室中。
實施例10. 如實施例9的吸附設備,其中液冷冷板適於維持ESC的溫度於攝氏35度或更低。
實施例11.一種用於在具有被驅動旋轉超過100rpm的直徑超過3呎的大旋轉鼓的塗佈腔室中塗佈行動裝置蓋板玻璃的吸附設備,此設備包含: 可移除地可安裝於大旋轉鼓的液冷冷板;以及 固定於冷板的靜電吸附(ESC)且適於將蓋板玻璃適當固定於藉由超過100rpm的大旋轉鼓的旋轉造成的離心力的面中,此ESC發展足夠夾緊力以可靠地將蓋板玻璃適當固定。
實施例12.一種在具有在塗佈期間被驅動旋轉的大旋轉鼓的塗佈腔室中塗佈行動裝置蓋板玻璃的方法,此方法包含以下步驟: a. 提供複數個載具用於將多個蓋板玻璃暫時地安裝至旋轉鼓以用於塗佈此等蓋板玻璃; b. 提供多個靜電吸附(ESC)於此等載具; c. 當此等載具在塗佈腔室外且沒有被安裝於旋轉鼓時,將此等蓋板玻璃安裝於此等ESC; d. 供給能量於此等ESC,以將此等蓋板玻璃暫時地固定於此等靜電吸附與載具; e. 當此等ESC暫時固定此等蓋板玻璃時,將此等載具安裝至旋轉鼓; f. 供給能量於此等ESC,以將此等蓋板玻璃牢固地固定於此等載具,且因此牢固地固定於旋轉鼓,而不管籍由旋轉鼓的旋轉造成的離心力; g. 當此等蓋板玻璃牢固地固定於此等載具與旋轉鼓時,旋轉旋轉鼓及塗佈此等蓋板玻璃; h. 停止塗佈與旋轉鼓的旋轉; i. 不供給能量於此等ESC; j. 移除此等載具;以及 k. 從此等載具移除此等蓋板玻璃。
實施例13.如實施例12的塗佈方法,其中此等ESC發展夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的數倍。
實施例14.如實施例12或實施例13的塗佈方法,其中此等ESC發展夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的至少3倍。
實施例15.如實施例12-14中任一的塗佈方法,其中此等ESC其中蓋板玻璃為用於手持裝置的彎曲蓋板玻璃,且其中此等載具進一步包括彎曲接合器以匹配彎曲蓋板玻璃的曲度。
實施例16.如實施例12-15中任一的塗佈方法,其中此等ESC包含印刷的聚醯亞胺。
實施例17. 如實施例12-16中任一的塗佈方法,其中此等載具包括定位相鄰ESC的周圍墊片以密封蓋板玻璃至ESC的邊緣以避免背面濺射抵達蓋板玻璃的背側。
實施例18. 如實施例12-17中任一的塗佈方法,其中此等ESC被用於施加抗刮塗佈於蓋板玻璃。
實施例19. 如實施例12-18中任一的塗佈方法,其中此等ESC被用於超過攝氏100度的溫度的真空塗佈腔室,此方法進一步包含提供帶有液冷冷板的載具以維持此等ESC的溫度於攝氏35度或更低。
實施例20.在以一塗佈用於塗佈行動裝置蓋板玻璃的製造方法中,其中此塗佈藉由濺射電漿處理施加,其中當塗佈被施加時,蓋板玻璃被暫時地安裝於旋轉鼓上,其中的改良包含: 以ESC將蓋板玻璃靜電吸附至載具,載具暫時地固定於旋轉鼓,帶有足夠夾緊力以將蓋板玻璃適當保持,而不管藉由鼓的旋轉造成的作用於蓋板玻璃上的離心力,否則當旋轉鼓旋轉時,傾向於將蓋板玻璃從旋轉鼓脫離。
實施例21.如實施例20的方法,其中ESC發展夾緊力,其為藉由旋轉鼓的旋轉造成的離心力的數倍。
10‧‧‧吸附設備
20‧‧‧冷板
21‧‧‧水管線
22、24‧‧‧入口/出口
26‧‧‧上表面
30‧‧‧靜電吸附(ESC)
31‧‧‧周圍墊片
32‧‧‧溝槽
35‧‧‧基底板/接合器板
40‧‧‧聚醯亞胺ESC
50‧‧‧PCB銅佈局
51、52‧‧‧引線
53、54‧‧‧銅墊
55、56‧‧‧導線
70‧‧‧夾具
110‧‧‧方法
111~119、121~124‧‧‧步驟
140‧‧‧聚醯亞胺ESC
20‧‧‧冷板
21‧‧‧水管線
22、24‧‧‧入口/出口
26‧‧‧上表面
30‧‧‧靜電吸附(ESC)
31‧‧‧周圍墊片
32‧‧‧溝槽
35‧‧‧基底板/接合器板
40‧‧‧聚醯亞胺ESC
50‧‧‧PCB銅佈局
51、52‧‧‧引線
53、54‧‧‧銅墊
55、56‧‧‧導線
70‧‧‧夾具
110‧‧‧方法
111~119、121~124‧‧‧步驟
140‧‧‧聚醯亞胺ESC
圖 1
為根據本發明的第一較佳形式的用於在具有旋轉鼓的塗佈腔室中塗佈蓋板玻璃的若干吸附設備的圖解示意圖。
圖 2
為圖 1
的示意吸附設備的圖解透視示意圖,顯示出安裝於其上的3-D蓋板玻璃。
圖 3
為圖 2
的示意吸附設備的部分分解透視示意圖,顯示出安裝於其上的3-D蓋板玻璃。
圖 4
為被測試的圖 1
的示意吸附設備的圖解立視圖,顯示出安裝於其上的3-D蓋板玻璃。
圖 5
為圖 4
的吸附設備的一部分的圖解立視圖。
圖 6
為根據本發明的另一示意形式的顯示出吸附2D蓋板玻璃的吸附設備的圖解立視圖。
圖 7
為圖 4
的吸附設備的圖解立視圖且顯示被安裝至測試設備。
圖 8
為顯示於圖 7
的測試設備的一部分的圖解立視圖。
圖 9
為根據本發明的另一示意吸附設備的圖解截面視圖,顯示出安裝於其上的3-D蓋板玻璃。
圖 10
為圖 4
的吸附設備的圖解立視圖,且顯示為被安裝至另一測試設備與進行測試。
圖 11
為根據本發明的另一形式的用於在具有在塗佈期間被驅動旋轉的大旋轉鼓的塗佈腔室中塗佈行動裝置蓋板玻璃的示意方法的流程圖。
國內寄存資訊 (請依寄存機構、日期、號碼順序註記) 無
國外寄存資訊 (請依寄存國家、機構、日期、號碼順序註記) 無
(請換頁單獨記載) 無
10‧‧‧吸附設備
20‧‧‧冷板
21‧‧‧水管線
22、24‧‧‧入口/出口
30‧‧‧靜電吸附(ESC)
31‧‧‧周圍墊片
35‧‧‧基底板/接合器板
Claims (10)
- 一種用於在具有一旋轉鼓的一塗佈腔室中塗佈蓋板玻璃的吸附設備,該設備包含: 一液冷冷板,該液冷冷板可移除地可安裝至該旋轉鼓;以及一靜電吸附(ESC),該ESC固定至該冷板且適於將該蓋板玻璃適當固定於藉由該旋轉鼓的旋轉造成的離心力的面中。
- 如請求項1所述之吸附設備,其中該蓋板玻璃是用於手持裝置的彎曲的蓋板玻璃,且其中該吸附設備進一步包括一彎曲的接合器,該接合器安裝於該ESC與該冷板之間,以匹配該彎曲的蓋板玻璃的曲度。
- 如請求項1或請求項2所述之吸附設備,其中該ESC包含一印刷的聚醯亞胺(polyimide)。
- 如請求項1或請求項2所述之吸附設備,進一步包含一周圍墊片,該周圍墊片被定位相鄰該ESC,以密封該蓋板玻璃至該ESC的邊緣,以避免背面濺射抵達該蓋板玻璃的一背側。
- 一種用於在塗佈期間具有被驅動旋轉的一大旋轉鼓的一塗佈腔室中塗佈行動裝置蓋板玻璃的方法,該方法包含以下步驟: a. 提供複數個載具,該等載具用於將多個蓋板玻璃暫時安裝至該旋轉鼓以用於塗佈該等蓋板玻璃; b. 提供多個靜電吸附(ESC)於該等載具; c. 當該等載具在該塗佈腔室外且沒有被安裝於該旋轉鼓時,將該等蓋板玻璃安裝於該等ESC; d. 供給能量於該等ESC,以將該等蓋板玻璃暫地固定於該等靜電吸附與該等載具; e. 當該等ESC暫時地固定該等蓋板玻璃時,將該等載具安裝至該旋轉鼓; f. 供給能量於該等ESC,以將該等蓋板玻璃牢固地固定於該等載具,且因此牢固地固定於該旋轉鼓,而不管籍由該旋轉鼓的旋轉造成的離心力; g. 當該等蓋板玻璃牢固地固定於該等載具與該旋轉鼓時,旋轉該旋轉鼓及塗佈該等蓋板玻璃; h. 停止塗佈步驟與該旋轉鼓的旋轉; i. 不供給能量於該等ESC; j. 移除該等載具;以及 k. 從該等載具移除該等蓋板玻璃。
- 如請求項5所述之塗佈方法,其中該等ESC發展一夾緊力,該夾緊力是藉由該旋轉鼓的旋轉造成的離心力的至少3倍。
- 如請求項5所述之塗佈方法,其中該等ESC其中該蓋板玻璃是用於手持裝置的彎曲的蓋板玻璃,具其中該等載具進一步包括彎曲的接合器,以匹配該彎曲的蓋板玻璃的曲度。
- 如請求項5至7中任一項所述之塗佈方法,其中該等ESC包含一印刷的聚醯亞胺。
- 如請求項5至7中任一項所述之塗佈方法,其中該等ESC被用於施加一抗刮塗佈於該蓋板玻璃。
- 如請求項5至7中任一項所述之塗佈方法,其中該等ESC被用於超過攝氏100度的溫度的一真空塗佈腔室,該方法進一步包含提供多個液冷冷板於該等載具,以維持該等ESC的溫度於攝氏35度或更低。
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US (1) | US20190010603A1 (zh) |
KR (1) | KR20180098339A (zh) |
CN (1) | CN108474111A (zh) |
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US11844163B2 (en) | 2019-02-26 | 2023-12-12 | Delos Living Llc | Method and apparatus for lighting in an office environment |
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JPS6372877A (ja) * | 1986-09-12 | 1988-04-02 | Tokuda Seisakusho Ltd | 真空処理装置 |
US6284093B1 (en) * | 1996-11-29 | 2001-09-04 | Applied Materials, Inc. | Shield or ring surrounding semiconductor workpiece in plasma chamber |
US5870271A (en) * | 1997-02-19 | 1999-02-09 | Applied Materials, Inc. | Pressure actuated sealing diaphragm for chucks |
JP2005082837A (ja) * | 2003-09-05 | 2005-03-31 | Shin Meiwa Ind Co Ltd | 真空成膜方法、装置、及びそれらを用いて製造されたフィルタ |
JP4833014B2 (ja) | 2006-10-02 | 2011-12-07 | キヤノンアネルバ株式会社 | 高温リフロースパッタリング装置 |
JP4688230B2 (ja) * | 2008-10-09 | 2011-05-25 | 株式会社シンクロン | 成膜方法 |
WO2010058672A1 (ja) * | 2008-11-21 | 2010-05-27 | 芝浦メカトロニクス株式会社 | 基板処理方法及び基板処理装置 |
WO2010073330A1 (ja) * | 2008-12-25 | 2010-07-01 | キヤノンアネルバ株式会社 | スパッタリング装置 |
US8580693B2 (en) | 2010-08-27 | 2013-11-12 | Applied Materials, Inc. | Temperature enhanced electrostatic chucking in plasma processing apparatus |
JP2012124362A (ja) | 2010-12-09 | 2012-06-28 | Canon Anelva Corp | 絶縁性基板の静電吸着方法 |
US20150114297A1 (en) * | 2012-06-08 | 2015-04-30 | Sharp Kabushiki Kaisha | Vapor deposition device |
JP6152994B2 (ja) * | 2012-11-27 | 2017-06-28 | 株式会社クリエイティブテクノロジー | 静電チャック及びガラス基板処理方法 |
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- 2016-12-28 WO PCT/US2016/068853 patent/WO2017117207A1/en active Application Filing
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- 2016-12-28 CN CN201680077260.6A patent/CN108474111A/zh active Pending
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US20190010603A1 (en) | 2019-01-10 |
KR20180098339A (ko) | 2018-09-03 |
WO2017117207A1 (en) | 2017-07-06 |
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