TW201727073A - 真空泵之判斷系統及真空泵 - Google Patents

真空泵之判斷系統及真空泵 Download PDF

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Publication number
TW201727073A
TW201727073A TW105134243A TW105134243A TW201727073A TW 201727073 A TW201727073 A TW 201727073A TW 105134243 A TW105134243 A TW 105134243A TW 105134243 A TW105134243 A TW 105134243A TW 201727073 A TW201727073 A TW 201727073A
Authority
TW
Taiwan
Prior art keywords
vacuum pump
gas
parameter
determination
vacuum
Prior art date
Application number
TW105134243A
Other languages
English (en)
Chinese (zh)
Inventor
高橋克典
Original Assignee
埃地沃茲日本有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 埃地沃茲日本有限公司 filed Critical 埃地沃茲日本有限公司
Publication of TW201727073A publication Critical patent/TW201727073A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
TW105134243A 2015-11-06 2016-10-24 真空泵之判斷系統及真空泵 TW201727073A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015218605A JP2017089462A (ja) 2015-11-06 2015-11-06 真空ポンプの判断システム、および真空ポンプ

Publications (1)

Publication Number Publication Date
TW201727073A true TW201727073A (zh) 2017-08-01

Family

ID=58663000

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105134243A TW201727073A (zh) 2015-11-06 2016-10-24 真空泵之判斷系統及真空泵

Country Status (3)

Country Link
JP (1) JP2017089462A (fr)
TW (1) TW201727073A (fr)
WO (1) WO2017077970A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11371499B2 (en) 2018-04-17 2022-06-28 Dartpoint Tech. Co., Ltd. Pump control system and operating method thereof

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6942610B2 (ja) * 2017-07-14 2021-09-29 エドワーズ株式会社 真空ポンプ、該真空ポンプに適用される温度調節用制御装置、検査用治具、及び温度調節機能部の診断方法
WO2019013118A1 (fr) * 2017-07-14 2019-01-17 エドワーズ株式会社 Pompe à vide, dispositif de commande de réglage de température appliqué à une pompe à vide, outil d'inspection et procédé de diagnostic pour unité de fonction de réglage de température
JP7374158B2 (ja) * 2021-10-15 2023-11-06 株式会社荏原製作所 生成物除去装置、処理システム及び生成物除去方法
JP2023143517A (ja) * 2022-03-25 2023-10-06 エドワーズ株式会社 真空排気システム、真空ポンプ及び真空ポンプのクリーニング方法
WO2024134839A1 (fr) * 2022-12-22 2024-06-27 カンケンテクノ株式会社 Procédé de nettoyage pour pompe à vide sèche et dispositif de nettoyage pour pompe à vide sèche

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003232292A (ja) * 2002-02-08 2003-08-22 Boc Edwards Technologies Ltd 真空ポンプ
GB0217494D0 (en) * 2002-07-29 2002-09-04 Boc Group Plc Conditioning monitoring of pumps and pump systems
DE102004063058A1 (de) * 2004-12-22 2006-07-13 Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
GB0607616D0 (en) * 2006-04-18 2006-05-31 Boc Group Plc Vacuum pumping system
KR102020693B1 (ko) * 2012-04-24 2019-09-10 에드워즈 가부시키가이샤 배기 펌프의 퇴적물 검지 장치 및 배기 펌프

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11371499B2 (en) 2018-04-17 2022-06-28 Dartpoint Tech. Co., Ltd. Pump control system and operating method thereof

Also Published As

Publication number Publication date
JP2017089462A (ja) 2017-05-25
WO2017077970A1 (fr) 2017-05-11

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