WO2024134839A1 - Procédé de nettoyage pour pompe à vide sèche et dispositif de nettoyage pour pompe à vide sèche - Google Patents

Procédé de nettoyage pour pompe à vide sèche et dispositif de nettoyage pour pompe à vide sèche Download PDF

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WO2024134839A1
WO2024134839A1 PCT/JP2022/047432 JP2022047432W WO2024134839A1 WO 2024134839 A1 WO2024134839 A1 WO 2024134839A1 JP 2022047432 W JP2022047432 W JP 2022047432W WO 2024134839 A1 WO2024134839 A1 WO 2024134839A1
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WO
WIPO (PCT)
Prior art keywords
vacuum pump
dry vacuum
cleaning
temperature fluid
cleaning device
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PCT/JP2022/047432
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English (en)
Japanese (ja)
Inventor
道彦 柳澤
啓志 今村
隆介 杉浦
秀樹 吉川
Original Assignee
カンケンテクノ株式会社
北京康肯▲環▼保▲設▼▲備▼有限公司
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Application filed by カンケンテクノ株式会社, 北京康肯▲環▼保▲設▼▲備▼有限公司 filed Critical カンケンテクノ株式会社
Priority to PCT/JP2022/047432 priority Critical patent/WO2024134839A1/fr
Publication of WO2024134839A1 publication Critical patent/WO2024134839A1/fr

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  • the present invention relates to a method for cleaning a dry vacuum pump used in vacuum equipment and a cleaning device for a dry vacuum pump used in the method.
  • Dry vacuum pumps are installed in the exhaust systems of vacuum equipment such as CVD equipment and etching equipment used to manufacture semiconductors and liquid crystal panels. Since these dry vacuum pumps suck in post-reaction process gases that are exhausted from process equipment such as vacuum chambers, they are known to become susceptible to the buildup of deposits of powder, liquid, or gel-like substances inside the pumps after prolonged use, and in the worst cases, become unable to start due to solidified deposits.
  • Patent Document 1 JP Patent Publication No. 2021-195893 discloses a vacuum pump that rotates the rotor of a turbomolecular pump to exhaust gas, and that has a cleaning function unit for a cleaning function that cleans deposits in the vacuum pump and a deposit detection function unit for a deposit detection function that detects the deposits. According to this technique, it is possible to provide a vacuum pump that is capable of removing deposits without overhauling and is capable of detecting that the removal of deposits has been completed.
  • the main object of the present invention is therefore to provide a method for cleaning a dry vacuum pump that can remove deposits that have built up inside the pump and restore or extend the life of the pump in a shorter time and more easily than overhauling the pump, and a cleaning device for a dry vacuum pump used in the method.
  • the present invention provides a method for cleaning a dry vacuum pump having deposits accumulated therein, as described below, as shown in FIGS. That is, the method includes a start-up confirmation test S3 for confirming whether the dry vacuum pump can be started, a regeneration process S4 executed when the dry vacuum pump cannot be started, and a life extension process S6 executed when the dry vacuum pump can be started or when the dry vacuum pump can be started after the regeneration process S4.
  • the regeneration process S4 is a process of introducing a high-temperature fluid into the dry vacuum pump to remove the accumulated deposits.
  • the life extension process S6 is a process of introducing a high-temperature fluid into the dry vacuum pump while the dry vacuum pump is started, to remove the deposits remaining in the dry vacuum pump.
  • the present invention provides the following advantageous effects, for example.
  • a regeneration process or a life extension process is selected and executed, so that deposits inside the dry vacuum pump can be efficiently removed.
  • the high-temperature fluid is preferably at least one fluid selected from the group consisting of air, nitrogen, oxygen, argon, hydrofluoric acid and chlorine trifluoride heated to 50° C. or higher and 400° C. or lower.
  • the temperature of the high-temperature fluid is less than 50° C., it may be difficult to heat the deposits to reduce their viscosity, whereas if the temperature of the high-temperature fluid exceeds 400° C., it may adversely affect the seals attached to the dry vacuum pump.
  • the dry vacuum pump it is preferable to introduce active species into the dry vacuum pump in addition to the high-temperature fluid in the regeneration process and the life extension process, which can improve the effect of removing deposits, particularly when the deposits are mainly composed of strongly adherent substances such as SiO2 (silicon dioxide). Furthermore, when introducing the high-temperature fluid into the dry vacuum pump, it is also preferable to vary the pressure of the high-temperature fluid, and it is also preferable to repeatedly start and stop the dry vacuum pump while introducing the high-temperature fluid into the dry vacuum pump.
  • the "dry vacuum pump cleaning device” is a device for carrying out the above-mentioned method, and as shown in FIG. 3, for example, the dry vacuum pump cleaning device is configured as follows.
  • the dry vacuum pump 12 is characterized by comprising an inlet pipe 14 connected to an intake port of the dry vacuum pump 12, an outlet pipe 16 connected to an exhaust port of the dry vacuum pump 12, a high-temperature fluid supply means 18 for supplying a high-temperature fluid into the dry vacuum pump 12 via the inlet pipe 14, an atmospheric pressure exhaust line 16a and a reduced pressure exhaust line 16b formed by branching off a downstream end of the outlet pipe 16 and capable of switching the destination of gas, a vacuum pump 20 installed on the reduced pressure exhaust line 16b, and a detoxification device 22 provided downstream of the atmospheric pressure exhaust line 16a and the reduced pressure exhaust line 16b for detoxifying exhaust gas discharged from the dry vacuum pump 12.
  • an active species supplying means 24 for supplying active species into the dry vacuum pump 12 through the inlet pipe 14 . It is also preferable to provide a trap device 26 in the outlet pipe 16 for trapping components other than the gas discharged from the dry vacuum pump 12 .
  • a heating device 28 for heating the dry vacuum pump 12 from the outside, and it is particularly preferable that the heating means of the heating device 28 be induction heating. It is also preferable to further provide a preheating chamber for preheating the dry vacuum pump 12 which will perform the next cleaning operation.
  • the present invention provides a method for cleaning a dry vacuum pump that can remove deposits that have built up inside the pump and restore or extend the life of the pump in a shorter time and more easily than overhauling the pump, and a cleaning device for a dry vacuum pump used in the method.
  • FIG. 2 is a flowchart showing an example of a method for cleaning a dry vacuum pump according to the present invention.
  • 2A and 2B are flow charts showing subroutines in FIG. 1, in which FIG. 2A shows the subroutine for the regeneration treatment step, and FIG. 2B shows the subroutine for the life extension treatment step.
  • FIG. 1 is an explanatory diagram showing an overview of a cleaning device for a dry vacuum pump according to an embodiment of the present invention.
  • Fig. 1 is a flow chart showing an example of a method for cleaning a dry vacuum pump according to the present invention
  • Fig. 2 is a flow chart showing a subroutine in Fig. 1.
  • Fig. 3 is an explanatory diagram showing an outline of a dry vacuum pump cleaning device 10 according to an embodiment of the present invention.
  • the dry vacuum pump cleaning device 10 according to the present embodiment is a device for regenerating and extending the life of a dry vacuum pump 12 having deposits accumulated therein, and as shown in Fig.
  • the inlet pipe 14 is connected to the intake port of the dry vacuum pump 12 mounted in the cleaning chamber 32 covered by the hood 30, and is intended to introduce high-temperature fluids and the like into the dry vacuum pump 12.
  • the downstream end of the fluid supply pipe 50 of the high-temperature fluid supply means 18, which will be described later, is connected to this inlet pipe 14.
  • a pressure gauge 34 that measures the internal pressure is attached to this inlet pipe 14.
  • the outlet pipe 16 is connected to the exhaust port of the dry vacuum pump 12, which is installed in a cleaning chamber 32 covered by a hood 30, and is used to transport high-temperature fluid that flows through the dry vacuum pump 12 and becomes exhaust gas, as well as deposits that are expelled from inside the dry vacuum pump 12 by the high-temperature fluid.
  • the outlet pipe 16 branches at its downstream end to form two branches, one of which is an atmospheric pressure exhaust line 16a and the other is a reduced pressure exhaust line 16b.
  • a vacuum pump 20 is installed midway through the reduced pressure exhaust line 16b.
  • Switching valves 36 and 38 are attached to the atmospheric pressure exhaust line 16a and the reduced pressure exhaust line 16b, respectively, and by switching these valves, it is possible to select whether the exhaust gas, etc. flows through the atmospheric pressure exhaust line 16a or the reduced pressure exhaust line 16b. In the state shown in Figure 3, switching valve 36 is closed and switching valve 38 is open, so that the exhaust gas, etc. flows through the reduced pressure exhaust line 16b.
  • a trap device 26 (described later) is attached upstream of the branch of the outlet pipe 16, and an outlet valve 40 is attached between the trap device 26 and the branch of the outlet pipe 16, which is closed when pressurizing the dry vacuum pump 12 to which the outlet pipe 16 is connected.
  • Pressure gauges 42, 44, and 46 for measuring the internal pressure are attached to the trap device 26, the atmospheric exhaust line 16a, and the reduced pressure exhaust line 16b, respectively.
  • the trap device 26 is a device that captures deposits such as powder, liquid, or gel-like substances discharged from the dry vacuum pump 12 through the outlet pipe 16 in its internal space to prevent them from flowing downstream of the outlet pipe 16, and its interior is cooled by cooling water (not shown).
  • the high-temperature fluid supply means 18 is used to supply high-temperature fluid into the dry vacuum pump 12 with deposits adhering to its inside via the inlet pipe 14, and includes a fluid heating device 48 equipped with a heat source such as an electric heater, and a fluid supply pipe 50 that delivers the high-temperature fluid heated by the fluid heating device 48 to the inlet pipe 14.
  • a fluid heating device 48 equipped with a heat source such as an electric heater
  • a fluid supply pipe 50 that delivers the high-temperature fluid heated by the fluid heating device 48 to the inlet pipe 14.
  • the fluid to be heated by the fluid heating device 48 is preferably at least one selected from the group consisting of air, nitrogen, oxygen, argon, hydrofluoric acid, and chlorine trifluoride.
  • the temperature of the high-temperature fluid obtained by heating the fluid in the fluid heating device 48 is preferably within the range of 50°C or higher and 400°C or lower, as described above.
  • air (CDA; Clean Dry Air) and nitrogen ( N2 ) are supplied to the fluid heating device 48.
  • CDA is supplied to the fluid heating device 48 through a CDA supply line 52 whose gas supply amount is controlled by a mass flow controller 52a
  • N2 is supplied to the fluid heating device 48 through an N2 supply line 54 whose gas supply amount is similarly controlled by a mass flow controller 54a.
  • CDA is supplied to the fluid heating device 48 through the CDA supply line 52
  • an on-off valve 52b is opened
  • N2 is supplied to the fluid heating device 48 through the N2 supply line 54
  • an on-off valve 54b is opened.
  • the abatement device 22 is a device that abatements the exhaust gas discharged from the dry vacuum pump 12 via the outlet piping 16, the atmospheric exhaust line 16a or the reduced pressure exhaust line 16b.
  • This abatement device 22 may be of any type, such as a combustion type, thermal decomposition type, wet type, atmospheric pressure plasma type, adsorption type, water scrubber type, etc., but considering the space efficiency and abatement efficiency of the device, it is most suitable to use an atmospheric pressure plasma type.
  • reference numeral 56 in FIG. 3 denotes a pipe for releasing the exhaust gas that has been abatement-treated by the abatement device 22 into the atmosphere
  • reference numeral 58 denotes a fan that sucks in the exhaust gas.
  • the active species supply means 24 is provided as necessary to supply active species such as F (fluorine) radicals and O (oxygen) radicals to the dry vacuum pump 12 with deposits adhering to the inside through the inlet pipe 14. It has an active species generator 60 equipped with a plasma generating means such as a high-frequency induction coil for generating ICP (inductively coupled plasma), and an active species supply pipe 62 for supplying the active species generated by the active species generator 60 to the inlet pipe 14.
  • the active species supply pipe 62 is branched midway to provide a branch pipe 62a, the downstream end of which is connected to the upstream end of the outlet pipe 16, so that active species can also be supplied from the outlet pipe 16 to the dry vacuum pump 12.
  • An opening/closing valve 64 is attached to the branch pipe 62a, and this opening/closing valve 64 is opened when active species are supplied to the upstream end of the outlet pipe 16.
  • Ar (argon) gas necessary for generating plasma and NF 3 and O 2 as raw materials of active species are supplied to the active species generator 60.
  • Ar gas is supplied to the active species generator 60 through an Ar supply line 66 whose gas supply amount is controlled by a mass flow controller 66a
  • NF 3 is supplied to the active species generator 60 through an NF 3 supply line 68 whose gas supply amount is controlled by a mass flow controller 68a
  • O 2 is supplied to the active species generator 60 through an O 2 supply line 70 whose gas supply amount is controlled by a mass flow controller 70a.
  • the on-off valve 66b When Ar gas is supplied to the active species generator 60 through the Ar supply line 66 , the on-off valve 66b is opened, when NF3 is supplied to the active species generator 60 through the NF3 supply line 68, the on-off valve 68b is opened, and when O2 is supplied to the active species generator 60 through the O2 supply line 70, the on-off valve 70b is opened and at the same time the on-off valve 65 is closed.
  • a differential exhaust pipe 72 that communicates the inlet pipe 14 and the outlet pipe 16 as shown in Fig. 3. This is because, in order to generate active species in the active species generating device 60, it is necessary to start the plasma generating means (not shown) to turn NF3 , O2 , etc. into plasma. To do this, it is necessary to operate the vacuum pump 20 to evacuate the inside of the plasma generating means, but if the inside of the dry vacuum pump 12 is almost completely blocked by deposits, it is not possible to evacuate. In such a case, by opening the opening/closing valve 74 provided in this differential exhaust pipe 72, it becomes possible to evacuate the inside of the plasma generating means by the vacuum pump 20, and it becomes possible to operate the active species supplying means 24.
  • the cleaning device 10 for the dry vacuum pump of this embodiment configured as above further includes the following components.
  • the dry vacuum pump 12 to be regenerated and extended by the cleaning device 10 is composed of a lower main pump 12a and an upper booster pump 12b as shown in FIG. 3, if the inside of the pump is blocked when a high-temperature fluid is introduced into the pump from the inlet pipe 14 connected to the booster pump 12b side, the main pump 12a cannot be heated sufficiently.
  • a heating device 28 is provided to heat the main pump 12a.
  • the heating means of the heating device 28 a known method can be adopted, but it is particularly preferable to use induction heating (IH) which can directly heat the casing of the iron main pump 12a from the surface.
  • IH induction heating
  • the heating temperature by the heating device 28 is preferably set to 300°C or less, more preferably 250°C or less, so as not to melt the O-ring (made of fluororubber) of the pump (not shown).
  • the booster pump may also be heated.
  • the dry vacuum pump cleaning device 10 of this embodiment is provided with a second fluid heating device 76, which heats N2 supplied through a branch pipe 54c branched from the N2 supply line 54 to generate a high-temperature fluid.
  • CDA may also be used in addition to N2 .
  • the generated high-temperature fluid is supplied to the upstream end of the outlet pipe 16 through a fluid supply pipe 78.
  • Reference numeral 54d in FIG. 3 denotes an on-off valve that is opened when the second fluid heating device 76 is used.
  • the space within the cleaning chamber 32 covered by the hood 30 is connected to the atmospheric exhaust line 16a by the local booth exhaust pipe 80. Therefore, even if harmful exhaust gas leaks into the cleaning chamber 32 during replacement work of the dry vacuum pump 12, the leaked exhaust gas is sucked in via the local booth exhaust pipe 80, the atmospheric exhaust line 16a, the abatement device 22, and the fan 58, so it is safe.
  • a preheating chamber (not shown) is provided adjacent to the cleaning chamber 32 to preheat the dry vacuum pump 12 that will be cleaned next.
  • the dry vacuum pump 12 that is installed in this preheating chamber and awaits cleaning is also supplied with high-temperature fluid for preheating.
  • the dry vacuum pump cleaning device 10 of this embodiment configured as described above has each component housed in a single cabinet 82, and this cabinet 82 is fitted with a housing exhaust pipe 84 to prevent harmful gases from accumulating inside.
  • the method for cleaning a dry vacuum pump of the present invention includes the steps of "pre-operation inspection S1", "installation of the dry vacuum pump S2", “start-up check inspection S3”, and, if necessary, "regeneration process S4", “start-up check reinspection S5", "life extension process S6", "post-operation inspection S7", and “dry vacuum pump removal S8", in that order.
  • the most important steps are “start-up check inspection S3", “regeneration process S4", and "life extension process S6".
  • the pre-operation inspection S1 is a process to check whether the dry vacuum pump 12 cannot be started due to adhesion of deposits.
  • the inside of the pump is visually inspected from the intake and exhaust ports to check the state of the deposits. If necessary, the deposits are sampled and chemically analyzed (qualitatively analyzed).
  • the rotor is manually rotated using a torque wrench. If the torque at that time is below a predetermined standard value, such as 24 N ⁇ m or less or 60 N ⁇ m or less, "dry vacuum pump installation S2" is performed to install the dry vacuum pump 12 in the cleaning chamber 32. On the other hand, if the torque when the rotor is manually rotated using a torque wrench exceeds the predetermined standard value, it is preferable to exclude it from processing as it cannot be regenerated.
  • the dry vacuum pump 12 installed in the cleaning chamber 32 starts logging the current value and executes a "start-up confirmation test S3" to check the initial startup by exhausting at atmospheric pressure. If startup is possible, the "life extension process S6" is executed, and if startup is not possible (start-up is not possible), the "regeneration process S4" is executed. Also, if startup is possible, initial characteristics such as conductance and exhaust characteristics may be measured before the "regeneration process S4" or "life extension process S6".
  • the “regeneration process S4" is a process in which a high-temperature fluid is introduced into the dry vacuum pump 12 to remove any deposits remaining inside. As shown in FIG. 2A, "heating regeneration with atmospheric exhaust S4.1,” “heating regeneration with vacuum exhaust S4.2,” and “cycle exhaust S4.3” are carried out in this order.
  • Heat regeneration with atmospheric exhaust S4.1 is a process in which a predetermined flow rate of high-temperature fluid is introduced into the dry vacuum pump 12 from the inlet pipe 14 while adjusting the pressure within a range that does not cause excessive pressurization, and exhaust gases and the like discharged from the dry vacuum pump 12 via the outlet pipe 16 are sent to the abatement device 22 via the atmospheric exhaust line 16a. After this heat regeneration with atmospheric exhaust is performed for a predetermined time, such as 70 minutes, heat regeneration with vacuum exhaust S4.2 is performed.
  • Heat regeneration with vacuum exhaust S4.2 is a process in which a predetermined flow rate of high-temperature fluid is introduced into the dry vacuum pump 12 from the inlet pipe 14 while adjusting the pressure within a range that does not cause excessive pressurization, and exhaust gases and the like discharged from the dry vacuum pump 12 via the outlet pipe 16 are sent to the abatement device 22 while being evacuated by the vacuum pump 20 via the reduced pressure exhaust line 16b. After this heat regeneration with vacuum exhaust is performed for a predetermined time, such as 15 minutes, cycle exhaust S4.3 is performed.
  • cycle exhaust S4.3 high-temperature fluid is supplied from inlet pipe 14 while outlet valve 40 of outlet pipe 16 is closed to pressurize the inside of dry vacuum pump 12 with high-temperature fluid, and then when outlet valve 40 is opened, the high-temperature fluid inside dry vacuum pump 12 is discharged all at once, and the momentum of this high-temperature, high-pressure gas flow discharges the deposits inside.
  • This series of steps is repeated a predetermined number of times, for example 10 times, which is cycle exhaust S4.3.
  • exhaust gases discharged from dry vacuum pump 12 are vacuumed by vacuum pump 20, and are sent to decontamination device 22 through reduced pressure exhaust line 16b.
  • the dry vacuum pump 12 is subjected to a "start-up confirmation re-inspection S5" to check the initial startup by exhausting at atmospheric pressure. If the regeneration is successful and startup is possible, the "life extension process S6" is executed, and if startup is not possible (start-up is not possible), the "regeneration process S4" is executed again. Note that it is preferable to set an upper limit on the number of times the regeneration process S4 is repeated if startup is not possible after the start-up confirmation re-inspection S5, taking into consideration the protection of each part of the dry vacuum pump 12 and economic efficiency.
  • the “life extension process S6" is a process in which a high-temperature fluid is introduced into the dry vacuum pump 12 while it is started, and the deposits remaining inside the dry vacuum pump 12 are removed. As shown in FIG. 2B, “starting the dry vacuum pump S6.1” and “cleaning work S6.2” are carried out in that order. Of these, starting the dry vacuum pump S6.1 is, as the name suggests, a process in which the dry vacuum pump 12 is started.
  • Cleaning operation S6.2 is a process in which the above-mentioned "heating regeneration with atmospheric exhaust S4.1” and “heating regeneration with vacuum exhaust S4.2” are carried out continuously and integrally.
  • a predetermined flow rate of high-temperature fluid is introduced into the dry vacuum pump 12 from the inlet pipe 14 while being adjusted within a range that does not cause excessive pressure, and exhaust gases, etc. discharged from the dry vacuum pump 12 via the outlet pipe 16 are first sent to the decontamination device 22 via the atmospheric exhaust line 16a, and after a predetermined processing time, such as 60 minutes, are switched to being sent to the decontamination device 22 via the reduced pressure exhaust line 16b, and are sent to the decontamination device 22 while being evacuated by the vacuum pump 20 for a predetermined time, such as 30 minutes.
  • the dry vacuum pump 12 that has completed the life extension treatment process S6 is subjected to a "post-operation inspection S7."
  • This post-operation inspection S7 inspects the exhaust characteristics and conductance of the dry vacuum pump 12. If this inspection confirms that the performance of the dry vacuum pump 12 after the cleaning operation S6.2 has been restored, the current value logging is terminated and the "dry vacuum pump is removed S8" is performed, thereby completing the method for cleaning the dry vacuum pump of this embodiment.
  • either the regeneration process S4 or the life extension process S6 is selected and executed depending on whether the dry vacuum pump 12 can be started due to the deposits accumulated inside, so that the deposits inside the dry vacuum pump 12 can be efficiently removed.
  • the dry vacuum pump 12 is heated only with high-temperature fluid, but in the regeneration process S4, which is performed on a dry vacuum pump 12 that has so much deposits stuck inside that it cannot be started, it is preferable to use the heating device 28 to heat the main pump 12a as well.

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Abstract

La présente invention concerne un procédé de nettoyage pour une pompe à vide sèche dans laquelle un dépôt est accumulé, le procédé de nettoyage comprenant : une inspection de vérification d'activation pour vérifier la faisabilité de l'activation de la pompe à vide sèche ; une étape de traitement de reproduction effectuée lorsque l'activation de la pompe à vide sèche est impossible ; et une étape de traitement d'extension de durée de vie effectuée lorsque l'activation de la pompe à vide sèche est possible ou lorsque l'activation est rendue possible après l'étape de traitement de reproduction. Le procédé de nettoyage est caractérisé en ce que l'étape de traitement de reproduction se réfère à une étape consistant à introduire un fluide à haute température dans la pompe à vide sèche pour éliminer le dépôt accumulé, et que l'étape de traitement d'extension de durée de vie se réfère à une étape consistant à introduire un fluide à haute température dans la pompe à vide sèche dans un état d'activation pour éliminer le dépôt accumulé à l'intérieur de la pompe à vide sèche.
PCT/JP2022/047432 2022-12-22 2022-12-22 Procédé de nettoyage pour pompe à vide sèche et dispositif de nettoyage pour pompe à vide sèche WO2024134839A1 (fr)

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PCT/JP2022/047432 WO2024134839A1 (fr) 2022-12-22 2022-12-22 Procédé de nettoyage pour pompe à vide sèche et dispositif de nettoyage pour pompe à vide sèche

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PCT/JP2022/047432 WO2024134839A1 (fr) 2022-12-22 2022-12-22 Procédé de nettoyage pour pompe à vide sèche et dispositif de nettoyage pour pompe à vide sèche

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