JP2017089462A - 真空ポンプの判断システム、および真空ポンプ - Google Patents

真空ポンプの判断システム、および真空ポンプ Download PDF

Info

Publication number
JP2017089462A
JP2017089462A JP2015218605A JP2015218605A JP2017089462A JP 2017089462 A JP2017089462 A JP 2017089462A JP 2015218605 A JP2015218605 A JP 2015218605A JP 2015218605 A JP2015218605 A JP 2015218605A JP 2017089462 A JP2017089462 A JP 2017089462A
Authority
JP
Japan
Prior art keywords
vacuum pump
gas
determination system
parameter
determination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015218605A
Other languages
English (en)
Japanese (ja)
Inventor
高橋　克典
Katsunori Takahashi
克典 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Priority to JP2015218605A priority Critical patent/JP2017089462A/ja
Priority to TW105134243A priority patent/TW201727073A/zh
Priority to PCT/JP2016/082228 priority patent/WO2017077970A1/fr
Publication of JP2017089462A publication Critical patent/JP2017089462A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2015218605A 2015-11-06 2015-11-06 真空ポンプの判断システム、および真空ポンプ Pending JP2017089462A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015218605A JP2017089462A (ja) 2015-11-06 2015-11-06 真空ポンプの判断システム、および真空ポンプ
TW105134243A TW201727073A (zh) 2015-11-06 2016-10-24 真空泵之判斷系統及真空泵
PCT/JP2016/082228 WO2017077970A1 (fr) 2015-11-06 2016-10-31 Système de détermination de pompe à vide et pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015218605A JP2017089462A (ja) 2015-11-06 2015-11-06 真空ポンプの判断システム、および真空ポンプ

Publications (1)

Publication Number Publication Date
JP2017089462A true JP2017089462A (ja) 2017-05-25

Family

ID=58663000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015218605A Pending JP2017089462A (ja) 2015-11-06 2015-11-06 真空ポンプの判断システム、および真空ポンプ

Country Status (3)

Country Link
JP (1) JP2017089462A (fr)
TW (1) TW201727073A (fr)
WO (1) WO2017077970A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019013118A1 (fr) * 2017-07-14 2019-01-17 エドワーズ株式会社 Pompe à vide, dispositif de commande de réglage de température appliqué à une pompe à vide, outil d'inspection et procédé de diagnostic pour unité de fonction de réglage de température
JP2019019816A (ja) * 2017-07-14 2019-02-07 エドワーズ株式会社 真空ポンプ、該真空ポンプに適用される温度調節用制御装置、検査用治具、及び温度調節機能部の診断方法
JP2023059416A (ja) * 2021-10-15 2023-04-27 株式会社荏原製作所 生成物除去装置、処理システム及び生成物除去方法
WO2023182489A1 (fr) * 2022-03-25 2023-09-28 エドワーズ株式会社 Système d'évacuation, pompe à vide et procédé de nettoyage de pompe à vide

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI654376B (zh) 2018-04-17 2019-03-21 太琦科技股份有限公司 幫浦控制系統及其操作方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003232292A (ja) * 2002-02-08 2003-08-22 Boc Edwards Technologies Ltd 真空ポンプ
GB0217494D0 (en) * 2002-07-29 2002-09-04 Boc Group Plc Conditioning monitoring of pumps and pump systems
DE102004063058A1 (de) * 2004-12-22 2006-07-13 Leybold Vacuum Gmbh Verfahren zum Reinigen einer Vakuum-Schraubenpumpe
GB0607616D0 (en) * 2006-04-18 2006-05-31 Boc Group Plc Vacuum pumping system
JP6058642B2 (ja) * 2012-04-24 2017-01-11 エドワーズ株式会社 排気ポンプの堆積物検知装置及び排気ポンプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019013118A1 (fr) * 2017-07-14 2019-01-17 エドワーズ株式会社 Pompe à vide, dispositif de commande de réglage de température appliqué à une pompe à vide, outil d'inspection et procédé de diagnostic pour unité de fonction de réglage de température
JP2019019816A (ja) * 2017-07-14 2019-02-07 エドワーズ株式会社 真空ポンプ、該真空ポンプに適用される温度調節用制御装置、検査用治具、及び温度調節機能部の診断方法
US11549515B2 (en) 2017-07-14 2023-01-10 Edwards Japan Limited Vacuum pump, temperature adjustment controller used for vacuum pump, inspection tool, and method of diagnosing temperature-adjustment function unit
JP2023059416A (ja) * 2021-10-15 2023-04-27 株式会社荏原製作所 生成物除去装置、処理システム及び生成物除去方法
JP7374158B2 (ja) 2021-10-15 2023-11-06 株式会社荏原製作所 生成物除去装置、処理システム及び生成物除去方法
WO2023182489A1 (fr) * 2022-03-25 2023-09-28 エドワーズ株式会社 Système d'évacuation, pompe à vide et procédé de nettoyage de pompe à vide

Also Published As

Publication number Publication date
WO2017077970A1 (fr) 2017-05-11
TW201727073A (zh) 2017-08-01

Similar Documents

Publication Publication Date Title
WO2017077970A1 (fr) Système de détermination de pompe à vide et pompe à vide
CN109325692B (zh) 水管网的数据实时分析方法及装置
US7774165B2 (en) State monitoring of machines and technical installations
AU2009262099B2 (en) A method and apparatus for real time enhancing of the operation of a fluid transport pipeline
JP4138267B2 (ja) 半導体製造装置、真空ポンプの寿命予測方法及び真空ポンプの修理タイミング決定方法
JP2019082157A (ja) 検知装置、検知方法、およびプログラム
US20210116076A1 (en) Anomaly detection in pipelines and flowlines
CN107816386A (zh) 涡轮系统、计算机实现的监测方法以及计算机可读介质
US9101871B2 (en) Filter systems
US20120136819A1 (en) Turbine performance diagnostic system and methods
JP2007224918A (ja) 制限値超過を判断する方法
JP6482743B1 (ja) リスク評価装置、リスク評価システム、リスク評価方法、及び、リスク評価プログラム
WO2019124367A1 (fr) Dispositif de génération d'espace unitaire, système de diagnostic d'installation, procédé de génération d'espace unitaire, procédé de diagnostic d'installation et programme
CN107066424B (zh) 用于确定操作涡轮机的风险的系统与方法
CN114235108B (zh) 基于数据分析燃气流量计异常状态检测方法和装置
JP2009283580A (ja) 半導体装置の生産管理システム
US20140077623A1 (en) Spike trap logic to prevent unneeded interruption of industrial processes
KR101486015B1 (ko) 덕트 무게 실시간 모니터링 시스템
CN115680901A (zh) 用于估计涡轮机系统的入口过滤系统的完整性和效率以及用于建议缓解动作的系统和方法
CN114841382A (zh) 设备故障检测方法、装置及存储介质
KR20210116556A (ko) 원격 플라즈마 소스들에 대한 유지관리
JP2021174195A (ja) 異常予兆監視システム、異常予兆監視方法、及びプログラム
JP5402071B2 (ja) 省エネルギー支援システム
CN116862089B (zh) 一种食品生产厂房内排气路径规划系统
JP2008294115A (ja) 半導体製造装置の異常検知方法および異常検知装置