TW201721776A - 電子構件封裝以及包含該封裝的電子裝置 - Google Patents
電子構件封裝以及包含該封裝的電子裝置 Download PDFInfo
- Publication number
- TW201721776A TW201721776A TW105121976A TW105121976A TW201721776A TW 201721776 A TW201721776 A TW 201721776A TW 105121976 A TW105121976 A TW 105121976A TW 105121976 A TW105121976 A TW 105121976A TW 201721776 A TW201721776 A TW 201721776A
- Authority
- TW
- Taiwan
- Prior art keywords
- electronic component
- component package
- disposed
- passage
- package
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
- H01L23/5283—Cross-sectional geometry
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5384—Conductive vias through the substrate with or without pins, e.g. buried coaxial conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/562—Protection against mechanical damage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/20—Structure, shape, material or disposition of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0237—Disposition of the redistribution layers
- H01L2224/02372—Disposition of the redistribution layers connecting to a via connection in the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/023—Redistribution layers [RDL] for bonding areas
- H01L2224/0239—Material of the redistribution layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/0502—Disposition
- H01L2224/05025—Disposition the internal layer being disposed on a via connection of the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/05111—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/05116—Lead [Pb] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05124—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05139—Silver [Ag] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05144—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/05001—Internal layers
- H01L2224/05099—Material
- H01L2224/051—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05155—Nickel [Ni] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13012—Shape in top view
- H01L2224/13014—Shape in top view being circular or elliptic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/1301—Shape
- H01L2224/13016—Shape in side view
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13111—Tin [Sn] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/13116—Lead [Pb] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/13124—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13139—Silver [Ag] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13144—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13147—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/13138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/13155—Nickel [Ni] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1017—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
- H01L2225/1035—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the device being entirely enclosed by the support, e.g. high-density interconnect [HDI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1047—Details of electrical connections between containers
- H01L2225/1058—Bump or bump-like electrical connections, e.g. balls, pillars, posts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1094—Thermal management, e.g. cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01028—Nickel [Ni]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10252—Germanium [Ge]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1032—III-V
- H01L2924/10329—Gallium arsenide [GaAs]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1431—Logic devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1433—Application-specific integrated circuit [ASIC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1434—Memory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1434—Memory
- H01L2924/1435—Random access memory [RAM]
- H01L2924/1436—Dynamic random-access memory [DRAM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/186—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/206—Length ranges
- H01L2924/2064—Length ranges larger or equal to 1 micron less than 100 microns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3512—Cracking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3512—Cracking
- H01L2924/35121—Peeling or delaminating
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
一種電子構件封裝可包括:重新分配層,包括第一絕緣層、安置於第一絕緣層上的第一導電圖案、及第一通路,第一通路在穿透過第一絕緣層的同時連接至第一導電圖案;電子構件,安置於重新分配層上;以及囊封劑,囊封電子構件。第一通路具有水平橫截面形狀,在所述水平橫截面形狀中,在穿過第一通路的中心以及第一通路的第一邊緣點及第二邊緣點的第一方向上第一通路的第一邊緣點與第二邊緣點之間的距離短於在垂直於第一方向且穿過第一通路的中心以及第一通路的第三邊緣點及第四邊緣點的第二方向上第一通路的第三邊緣點與第四邊緣點之間的距離。
Description
本發明是有關於一種電子構件封裝以及一種包含該封裝的電子裝置。
電子構件封裝是一種用於將電子構件電性連接至例如電子裝置的主板等印刷電路板(printed circuit board,PCB)、並保護電子構件不受外部影響的封裝技術,並且與僅僅將電子構件嵌置於例如插板(interposer board)等印刷電路板中的技術有所區別。
近來,與電子構件相關的技術開發中的主要趨勢之一是減小構件的尺寸。因此,在封裝領域中,隨著小型電子構件等的需求的增加,一直需要具有大量引腳卻具有小的尺寸的封裝。應上述技術需求,近來,最終形成了執行電子構件的重新分配功能的重新分配層的圖案及通路(via)。
近來,在封裝技術中,重新分配層的通路的可靠性已變得突出。在其中為重新分配電子構件而引入的重新分配層的通路暴露於惡劣條件的情形中,可在所述通路中出現介面分層或破裂。因此,需要藉由改變所述通路的設計等來顯著減少由介面分層或破裂造成的缺陷,以顯著減少施加至所述通路的熱應力。
本發明的態樣可提供一種具有改善重新分配層的通路的可靠性的新穎結構的電子構件封裝及一種包含該封裝的電子裝置。
根據本發明的態樣,提供一種電子構件封裝,其中在重新分配層的各通路中,安置於所述重新分配層的應力集中的部分中的通路考慮到應力集中的方向而被形成為具有非圓形形狀,以可減少應力的集中。
以下,將參照附圖對本發明的實施例進行如下闡述。
然而,本發明可被示例成諸多不同的形式,而不應被視為僅限於本文中所述的具體實施例。確切而言,提供該些實施例是為了使此揭露內容將透徹及完整,並將向熟習此項技術者充分傳達本發明的範圍。
在本說明書通篇中,應理解,當稱一元件(例如,層、區、或晶圓(基板))位於另一元件「上」、「連接至」、或「耦合至」另一元件時,所述元件可直接位於所述另一元件「上」、直接「連接至」、或直接「耦合至」所述另一元件、抑或其間可存在其他中間元件。相比之下,當稱一元件「直接位於」另一元件「上」、「直接連接至」、或「直接耦合至」另一元件時,其間可不存在中間元件或層。在通篇中相同的編號指代相同的元件。本文中所使用的用語「及/或」包含相關列出項其中一或多個項的任意及所有組合。
將顯而易見,儘管本文中可能使用「第一」、「第二」、「第三」等用語來闡述各種部件、構件、區、層及/或區段,然而該些部件、構件、區、層及/或區段不應受限於該些用語。該些用語僅用於區分各個部件、構件、區、層或區段。因而,在不背離示例性實施例的教示內容的條件下,以下所論述的第一部件、構件、區、層或區段可被稱為第二部件、構件、區、層或區段。
在本文中,為易於說明,可使用例如「在…之上(above)」、「上方的(upper)」、「在…之下(below)」、及「下方的(lower)」等空間相對性用語來闡述圖中所示的一個元件相對於另一(其他)元件的關係。應理解,該些空間相對性用語旨在除圖中所繪示定向以外亦囊括裝置在使用或操作中的不同定向。舉例而言,若圖中的裝置被翻轉,則被闡述為在其他元件「之上」或「上方」的元件此時將被定向為在其他元件或特徵「之下」或「下方」。因此,依圖的具體方向而定,用語「在…之上」可囊括上方與下方兩種定向。所述裝置亦可具有其他定向(例如,旋轉90度或處於其他定向),且本文中所用的空間相對性描述語可相應地進行解釋。
本文所用術語僅用於闡述特定實施例,而非旨在限制本發明。除非上下文中清楚地另外指明,否則本文所用的單數形式「一」及「所述」旨在亦包含複數形式。更應理解,當在本說明書中使用用語「包含」時,是指明所陳述特徵、整數、步驟、操作、部件、元件、及/或其群組的存在,但不排除一或多個其他特徵、整數、步驟、操作、部件、元件及/或其群組的存在或添加。
以下,將參照說明本發明實施例的示意圖來闡述本發明的實施例。在圖式中,舉例而言,可估計會因製造技術及/或容差而造成對所示形狀的修改。因此,本發明的實施例不應被視為僅限於本文中所示區的特定形狀,而是例如包含由製造而引起的形狀變化。以下實施例亦可由其中的一者或其組合構成。
以下所闡述的本發明的內容可具有多種構型且在本文中可僅提出所需要的構型,但所述內容並非僅限於此。電子裝置
圖1是示意性地說明電子裝置系統的實例的方塊圖。參照圖1,電子裝置1000中可容置有母板1010。晶片相關構件1020、網路相關構件1030、其他構件1040等可物理地及/或電性地連接至母板1010。該些構件可耦合至以下將闡述的其他構件,藉此形成各種訊號線1090。
晶片相關構件1020可包括:記憶體晶片,例如揮發性記憶體(例如,動態隨機存取記憶體(dynamic random access memory,DRAM))、非揮發性記憶體(例如,唯讀記憶體(read only memory,ROM))、快閃記憶體等;應用程式處理器晶片,例如中央處理器(例如,中央處理單元(central processing unit,CPU))、圖形處理器(例如,圖形處理單元(graphic processing unit,GPU))、數位訊號處理器、密碼學處理器(cryptographic processor)、微處理器、微控制器等;及邏輯晶片,例如類比-數位轉換器(analog-to-digital converter,ADC)、應用專用積體電路(application-specific integrated circuit,ASIC)等。然而,晶片相關構件1020並非僅限於此,而是亦可包括其他類型的晶片相關構件。此外,該些構件1020可彼此組合。
網路相關構件1030可包括以下協定:例如,無線保真度(wireless-fidelity,Wi-Fi)(電氣及電子工程師學會(Institute of Electrical and Electronics Engineers,IEEE)802.11標準家族等)、全球互通微波存取(worldwide interoperability for microwave access,WiMAX)(IEEE 802.16標準家族等)、IEEE 802.20、長期演進(long term evolution,LTE)、僅支援資料的演進(evolution data only,Ev-DO)、高速封包存取+(high speed packet access +,HSPA+)、高速下行封包存取+(high speed downlink packet access +,HSDPA+)、高速上行封包存取+(high speed uplink packet access +,HSUPA+)、增強型資料GSM環境(enhanced data GSM environment,EDGE)、全球行動通訊系統(global system for mobile communication,GSM)、全球定位系統(global positioning system,GPS)、通用封包無線電服務(general packet radio service,GPRS)、分碼多重存取(code division multiple access,CDMA)、分時多重存取(time division multiple access,TDMA)、數位增強型無線電訊(digital enhanced cordless telecommunications,DECT)、藍芽、3G協定、4G協定、5G協定及繼上述協定之後指定的任何其他無線協定及有線協定。然而,網路相關構件1030並非僅限於此,且亦可包括多個其他無線標準或協定或者有線標準或協定中的任一者。此外,該些構件1030可彼此組合以及與上述晶片相關構件1020一起相互組合。
其他構件1040可包括高頻電感器、鐵氧體電感器(ferrite inductor)、功率電感器、鐵氧體珠粒、低溫共燒陶瓷(low temperature co-fired ceramic,LTCC)、電磁干擾(electro-magnetic interference,EMI)濾波器、多層陶瓷電容器(multilayer ceramic capacitor,MLCC)等。然而,其他構件1040並非僅限於此,而是亦可包括用於各種其他目的的被動構件等。此外,其他構件1040可與以上所述晶片相關構件1020及/或以上所述網路相關構件1030一起相互組合。
依電子裝置1000的種類而定,電子裝置1000可包括可物理地及/或電性地連接至母板1010或可不物理地及/或不電性地連接至母板1010的其他構件。該類其他構件的實例可包括照相機模組1050、天線1060、顯示器1070、電池1080、音訊編解碼器(圖中未示出)、視訊編解碼器(圖中未示出)、功率放大器(圖中未示出)、羅盤(圖中未示出)、加速度計(圖中未示出)、陀螺儀(圖中未示出)、揚聲器(圖中未示出)、大容量儲存裝置(例如,硬碟驅動機)(圖中未示出)、光碟(compact disk,CD)(圖中未示出)以及數位多功能光碟(digital versatile disk,DVD)(圖中未示出)。然而,該些其他構件並非僅限於此,而是依電子裝置1000的類型而定亦可包括用於各種目的的其他構件等。
電子裝置1000可為智慧型電話、個人數位助理、數位攝影機、數位照相機(digital still camera)、網路系統、電腦、監視器、平板電腦(tablet)、膝上型電腦、隨身型易網機(netbook)、電視、視訊遊戲機(video game machine)、智慧型手錶等。然而,電子裝置1000並非僅限於此,而是除上述電子裝置之外,可為用於處理資料的任何其他電子裝置。
圖2示意性地說明應用於電子裝置的電子構件封裝的實例。所述電子構件封裝可出於各種目的而用於如上所述的各種電子裝置1000中。舉例而言,主板1110可容置於智慧型電話1100的本體1101中,且各種電子構件1120可物理地及/或電性地連接至主板1110。此外,可物理地及/或電性地連接至主板1110或可不物理地及/或不電性地連接至主板1110的另一構件(例如,照相機模組1130)可容置於本體1101中。在此種情形中,電子構件1120中的某些電子構件可為如上所述的晶片相關構件,且電子構件封裝100可為例如晶片相關構件中的應用程式處理器,但電子構件120及電子構件封裝100並非僅限於此。電子構件封裝
圖3是示意性地說明安裝於板上的電子構件封裝的實例的剖視圖。參照圖3,根據實例的電子構件封裝100A可包括:重新分配層130;安置於重新分配層130上的電子構件120;以及囊封劑,囊封電子構件120。此外,電子構件封裝100A可包括:保護層150,安置於重新分配層130之下且具有開口153;以及連接端子155,安置於保護層150的開口153中。電子構件封裝100A可藉由連接端子155而安裝於板201上。連接端子155可連接至板201的安裝焊墊202上。電子構件封裝100A可安裝於板201上,以在電子裝置中用於各種目的。此處,板201可為所述電子裝置的具有各種電路圖案的主板,但並非僅限於此。
囊封劑110可為用於保護電子構件120的部件。囊封電子構件120的囊封劑的形狀並不受特別限制,而是只要所述囊封劑至少部分地包圍電子構件120,所述囊封劑便可具有任何形狀。囊封劑110的特定材料並不受特別限制。舉例而言,可使用絕緣材料作為囊封劑110的材料。此處,作為絕緣材料,可使用熱固性樹脂(例如,環氧樹脂)、熱塑性樹脂(例如,聚醯亞胺)或其中將增強材料(例如,玻璃纖維或無機填充劑)浸入於熱固性樹脂及熱塑性樹脂中的樹脂(例如,預浸體(prepreg)、味之素構成膜(Ajinomoto build-up film,ABF)、FR-4、雙馬來醯亞胺三嗪(bismaleimide triazine,BT)樹脂、感光成像介電(photo imagable dielectric,PID)樹脂等)。此外,亦可使用在此項技術中已知的模製材料,例如環氧樹脂模製化合物(epoxy molding compound,EMC)等。若需要,則囊封劑110中可含有導電顆粒以遮罩電磁波。可使用任何導電顆粒,只要其可遮罩電磁波即可。舉例而言,所述導電顆粒可由銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、焊料等形成。然而,該些材料僅為實例,且所述導電顆粒並非僅限於此。
可藉由此項技術中已知的方法來形成囊封劑110。舉例而言,可藉由層壓囊封劑110的前驅物以囊封電子構件120、並將經層壓的前驅物固化而形成囊封劑110。作為另外一種選擇,可藉由將形成囊封劑110的材料應用至黏合膜等以囊封電子構件120、並將所應用的材料固化來形成囊封劑110。作為層壓前驅物的方法,舉例而言,可使用如下方法:執行在高溫下按壓物體達預定時間的熱壓法、在減壓的同時使所述物體冷卻至室溫、然後在冷壓機中藉由冷卻分離加工工具等。作為應用所述材料的方法,舉例而言,可使用利用刮板(squeegee)應用油墨的絲網印刷方法、對油墨進行噴霧以應用油墨的噴塗印刷方法等。
電子構件120可為各種主動構件(例如,二極體、真空管、電晶體等)或被動構件(例如,電感器、電容器、電阻器等)。作為另外一種選擇,電子構件120可為積體電路(integrated circuit,IC)晶片,積體電路(IC)晶片是指其中將至少數百至數百萬或更多個各種元件彼此整合於一起的晶片。若需要,則電子構件120可為其中將積體電路以覆晶形式封裝的電子構件。晶體電路可為例如應用程式處理晶片,例如中央處理器(例如,中央處理單元(CPU))、圖形處理器(例如,圖形處理單元(GPU))、數位訊號處理器、密碼學處理器、微處理器、微控制器等,但並非僅限於此。電子構件120的厚度不受特別限制,且可依電子構件120的種類而變化。舉例而言,在其中電子構件為積體電路的情形中,電子元件120的厚度可為100微米至480微米,但並非僅限於此。
電子構件120可具有電性連接至重新分配層130的電極焊墊120P。電極焊墊120P可被設置成將電子構件120電性連接至外部,且可使用任何導電材料作為用於形成電極焊墊120P的材料,而對所述材料無特別限制。類似地,可使用銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、及其合金等作為導電材料,但用於形成電極焊墊120P的材料並非僅限於此。電極焊墊120P可由重新分配層130重新分配。電極焊墊120P可為嵌入式的或可突出。電極構件120可被安置成使電極焊墊120P面向重新分配層130。亦即,電子構件120可被安置成使主動層面向重新分配層130。
在其中電子構件120為積體電路的情形中,電極構件120可具有本體(未由參考編號指示)、保護層(未由參考編號指示)及電極焊墊120P。所述本體可例如基於主動晶圓而形成。在此種情形中,可使用矽(Si)、鍺(Ge)、砷化鎵(GaAs)等作為所述本體的基材(base material)。保護層可用以保護本體免受外部環境的損害且可例如由氧化物膜、氮化物膜等形成。作為另外一種選擇,保護層可由氧化物膜及氮化物膜構成的雙層形成。可使用例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、其合金等導電材料作為用於形成電極焊墊120P的材料。
重新分配層130可為用於重新分配電子構件120的電極焊墊120P的構型。具有各種功能的數十至數百個電極焊墊120P可藉由重新分配層130而被重新分配,且依其功能而經由連接端子155被物理地及/或電性地連接至外部。重新分配層130可包括:第一絕緣層131;第一導電圖案132,安置於第一絕緣層131上;以及第一通路133,在穿透過第一絕緣層131的同時連接至第一導電圖案132。重新分配層130可如圖2所示為單層,但並非僅限於此。亦即,重新分配層可由多個層構成。以下將提供對其的說明。
第一絕緣層131可用以保護第一導電圖案132及第一通路133,且若需要,第一絕緣層131可用以使第一導電圖案132與第一通路133絕緣。可使用絕緣材料作為形成第一絕緣層131的材料。作為所述絕緣材料,可使用熱固性樹脂(例如,環氧樹脂)、熱塑性樹脂(例如,聚醯亞胺)、其中將增強材料(例如,玻璃纖維或無機填充劑)浸入於熱固性樹脂及熱塑性樹脂中的樹脂(例如,預浸體、味之素構成膜(ABF)、FR-4、雙馬來醯亞胺三嗪(BT)樹脂等)。在使用感光性絕緣材料(例如,感光成像介電(photo imagable dielectric,PID)樹脂)的情形中,第一絕緣層131可被形成為厚度有所減少,且因此可輕易地實施具有精細間距的第一通路133。第一絕緣層131的厚度並不受特別限制。舉例而言,第一絕緣層可具有5微米至20微米左右的厚度。可藉由此項技術中已知的方法形成第一絕緣層131。舉例而言,可藉由層壓第一絕緣層131的前驅物並將經層壓的前驅物固化的方法、應用用於形成第一絕緣層131的材料並將所應用的材料固化的方法等而形成第一絕緣層131,但並非僅限於此。作為層壓前驅物的方法,舉例而言,可使用如下方法:執行在高溫下按壓物體達預定時間的熱壓法、在減壓的同時使所述物體冷卻至室溫、然後在冷壓機中藉由冷卻分離加工工具等。作為應用所述材料的方法,舉例而言,可使用利用刮板(squeegee)應用油墨的絲網印刷方法、對油墨進行噴霧來應用油墨的噴塗印刷方法等。作為後製程(post process),所述固化可為對絕緣材料進行乾燥以使其不會完全固化從而使用光刻法等。
第一導電圖案132可充當重新分配圖案,且可使用例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、其合金等導電材料作為用於形成第一導電圖案132的材料。第一導電圖案132可依對應層的設計而執行各種功能。舉例而言,第一導電圖案132可發揮接地(GND)圖案、功率(PWR)圖案、訊號(S)圖案等的作用。此處,訊號(S)圖案可包括除GND圖案、PWR圖案等以外的各種訊號圖案,例如資料訊號圖案等。此外,第一導電圖案132可發揮例如通路焊墊、連接端子焊墊等各種焊墊的作用。在其中第一導電圖案132用作焊墊的情形中,若需要,則可更於第一導電圖案132的表面上形成表面處理層(surface treatment layer)。舉例而言,可藉由電解鍍金、無電鍍金、有機可焊性保護(organic solderability preservative,OSP)表面處理或無電鍍錫、無電鍍銀、無電鍍鎳/置換鍍金、直接浸金(direct immersion gold,DIG)鍍覆、熱空氣焊料均塗(hot air solder leveling,HASL)等來形成所述表面處理層。第一導電圖案132的厚度並不受特別限制。舉例而言,第一導電圖案132可具有10微米至50微米左右的厚度。可藉由此項技術中已知的方法來形成第一導電圖案132。舉例而言,可藉由電解鍍銅、無電鍍銅等來形成第一導電圖案132。更詳言之,可藉由例如化學氣相沈積(chemical vapor deposition,CVD)方法、物理氣相沈積(physical vapor deposition,PVD)方法、濺鍍方法、減性方法、加性方法、半加性製程(semi-additive process,SAP)、經修改半加性製程(modified semi-additive process,MSAP)等方法來形成第一導電圖案132,但並非僅限於此。
第一通路133可將電極焊墊120P與形成於不同層上的第一導電圖案132電性連接至彼此,藉此在封裝100A中形成電性路徑。可使用例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、其合金等導電材料作為形成第一通路133的材料。第一通路133可用導電材料完全填充,或者藉由在通路孔的壁面上形成導電材料而形成。此外,可應用此項技術中已知的所有形狀,例如直徑向下減小的錐形形狀、直徑向下增大的倒錐形形狀、圓柱形狀等來作為第一通路133的形狀。可藉由此項技術中已知的方法形成第一通路133。舉例而言,可使用機械鑽孔及/或雷射鑽孔形成第一通路133。作為另外一種選擇,在其中第一絕緣層131含有感光性材料的情形中,可在利用光刻法形成通路孔後使用乾膜圖案、藉由電解鍍銅、無電鍍銅等形成第一通路133。
保護層150可用以保護重新分配層130等,且若需要,則保護層150可用以使重新分配層130等與外部絕緣。可使用絕緣材料作為形成保護層150的材料。可使用此項技術中已知的阻焊劑(solder resist)作為所述絕緣材料。亦即,保護層150可為此項技術中已知的阻焊劑。在某些情形中,可使用與形成第一絕緣層131相同的材料(例如,相同的PID樹脂)作為形成保護層150的材料。保護層150通常可為單層,但可視需要被構造成多個層。保護層150的厚度不受特別限制。舉例而言,除第一導電圖案132外的保護層150的厚度可為5微米至20微米左右,且考慮到第一導電圖案132的厚度,保護層150的厚度可為15微米至70微米左右。可藉由此項技術中已知的方法來形成保護層150。舉例而言,可藉由層壓保護層150的前驅物並將經層壓的前驅物固化的方法、應用形成保護層150的材料並將所應用的材料固化的方法等而形成保護層150,但並非僅限於此。作為層壓前驅物的方法,舉例而言,可使用如下方法:執行在高溫下按壓物體達預定時間的熱壓、在減壓的同時使所述物體冷卻至室溫、然後在冷壓機中藉由冷卻分離加工工具等。作為所述材料的方法,舉例而言,可使用利用刮板(squeegee)應用油墨的絲網印刷方法、對油墨進行噴霧來應用油墨的噴塗印刷方法等。作為後製程(subsequent process),所述固化可為對絕緣材料進行乾燥以使其不會完全固化從而使用光刻法等。
保護層150的開口153可暴露出第一導電圖案132中的某些。詳言之,開口153可暴露出第一導電圖案132中充當連接端子焊墊的圖案的至少一部分。開口153可為所謂的阻焊層限定(solder mask defined,SMD)型開口或所謂的非阻焊層限定(non-solder mask defined,NSMD)型開口。在某些情形中,開口153可為兩者的混合。可應用此項技術中已知的形狀,例如圓形、多邊形等作為開口153的形狀。可藉由此項技術中已知的方法形成保護層150的開口153。舉例而言,可使用機械鑽孔及/或雷射鑽孔或藉由光刻法來形成開口153。
連接端子155可為用於將電子構件封裝100A物理地及/或電性地連接至外部的構型。舉例而言,電子構件封裝100A可藉由連接端子155而安裝於電子裝置的主板上。連接端子155可安置於保護層150的開口153中且連接至藉由開口153而開放的第一導電圖案132。因此,連接端子155可電性連接至電子構件120。連接端子155可由例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、焊料等導電材料形成。然而,該些材料僅為實例,且連接端子155的材料並非僅限於此。連接端子155可為焊盤、球、引腳等。然而,一般而言,連接端子155可為球,例如,焊料球。連接端子155可被形成為多層結構或單層結構。在其中連接端子155被形成為多層結構的情形中,連接端子155可含有銅柱及焊料,而在其中連接端子155被形成為單層結構的情形中,連接端子155可含有錫-銀焊料或銅。然而,該些情形僅為實例,且連接端子155並非僅限於此。
連接端子155可安置於扇入區及/或扇出區中。扇入區意指在其中安置電子構件的區,而扇出區意指除在其中安置電子構件的區之外的區。亦即,根據實例的電子構件封裝100A可為扇入式封裝或扇出式封裝。連接端子155的特定數目、間隔、安置形狀等不受特別限制,而是可由熟習此項技術者依設計而進行充分地變化。舉例而言,依電子構件120的電極焊墊120P的數目而定,連接端子155的數目可為數十至數千,但並非僅限於此。連接端子155的數目可多於或少於上述範圍。可藉由回流(reflow)來固定連接端子155,且可藉由將連接端子155的一部分嵌置於保護層150中且將連接端子155的另一部分暴露於外部以增大固定力來提高可靠性。在某些情形中,可僅形成開口153,且視需要可藉由單獨製程而形成連接端子155。
圖4A至圖7C示意性地說明沿圖3所示的線I-I’截取的電子構件封裝的剖切平面圖的各種實例。參照圖4A、圖5A、圖6A及圖7A,可理解,在第一通路133中,應力集中於第一通路133的面向電子構件封裝100A的中心的部分上以及與其相對的部分上。因此,與其中第一通路133僅具有圓形形狀的情形相比,在增大存在應力集中的第一通路133的表面的區域的情形中,施加至第一通路133的應力可被分散,且因此,可提高可靠性。上述應力可主要集中於連接至電子構件120的電極焊墊120P的通路上,且因此,具有非圓形形狀的第一通路133是連接至電子構件120的電極焊墊120P的通路可為較佳的。在此種情形中,連接至電子構件120的電極焊墊120P的所有通路可被形成為具有上述非圓形形狀。然而,與先前技術相比,僅藉由將與安置於應力主要集中的區中的電極焊墊120P連接的第一通路133實施成上述的非圓形形狀,便可提高通路的可靠性。所述應力主要集中的區可依所應用的封裝而改變。舉例而言,所述區可為圖4A所示的電子構件120的最外部分的隅角Q1
、圖5A所示的電子構件120的最外部分的隅角部分Q2
、圖6A所示的電子構件120的最外部分Q3
或圖7A所示的電子構件120的外側部分的隅角部分Q4
,但並非僅限於此。此處,所述最外部分可意指可在其中安置通路的最外區,且所述外側部分可意指包括上述最外區的外側區。此處,在其中難以清楚地將外側區與內側區相互區分開的情形中,亦即,可將位於中心與最外部分之間的中間區解釋為外側區。此外,所述隅角可意指可在其中安置通路的某個區的頂點部分,且所述隅角部分可意指自所述頂點部分進行擴展以使得可更安置預定數目通路的隅角部分。同時,所述非圓形形狀不受特別限制,只要所述通路具有如下水平橫截面形狀即可:在所述水平橫截面形狀中,如附圖所示,一個方向上的距離短於在垂直於所述一個方向的另一方向上的距離。此處,所述距離可為如附圖所示的水平橫截面中連接所述通路的中心與所述通路的邊緣上兩個任意點的虛擬線的距離。
同時,參照圖4B、圖5B、圖6B及圖7B,當電子構件封裝100A的中心被定義為C1
(參見圖4A、圖5A、圖6A及圖7A)、第一通路133的中心被定義為C2
、連接C1
與C2
的虛擬線被定義為L1
、垂直於L1
並穿過C2
的虛擬線被定義為L2
、第一通路133的邊緣上所述邊緣與L1
相交的兩個點之間的距離被定義為D1
、且第一通路133的邊緣上所述邊緣與L2相交的兩個點之間的距離被定義為D2
時,具有非圓形形狀的第一通路133可滿足D1
<D2
。由於施加至第一通路133的應力如上所述集中於第一通路133的面向電子構件封裝100A的中心的部分以及與其相對的部分上,因而僅僅藉由安置具有非圓形形狀的第一通路133可難以獲得足夠的應力分散效果。相反,在安置具有滿足D1
<D2
的非圓形形狀的第一通路133的情形中,由於具有非圓形形狀的第一通路133的寬的部分被安置成靠近電子構件封裝100A的中心,因而應力可集中於所述寬的部分上,藉此獲得更優異的應力分散效果。
同時,參照圖4C、圖5C、圖6C及圖7C,當電子構件封裝100A的中心被定義為C1
、第一通路133的中心被定義為C2
、連接C1
與C2
的虛擬線被定義為L1
、跨越第一通路133在第一方向上的距離S1
的虛擬線與L1
之間的角度被定義為q1
、且跨越第一通路133在第二方向上的距離S2
的虛擬線與L1
之間的角度被定義為q2
時,具有非圓形形狀的第一通路133可滿足q1
<q2
。此處,距離S1
可為在水平橫截面上連接所述通路的中心與所述通路的邊緣上任兩個任意點的任何虛擬線的最短距離,且在垂直於由具有距離S1
的虛擬線確定的所述第一方向的第二方向上,連接所述通路的中心與所述通路的邊緣上兩個點的虛擬線的距離S2
大於S1
;或者距離S2
可為在水平橫截面上連接所述通路的中心與所述通路的邊緣上任兩個任意點的任何虛擬線的最長距離,且在垂直於由具有距離S2
的虛擬線確定的所述第二方向的第一方向上,連接所述通路的中心與所述通路的邊緣上兩個點的虛擬線的距離S1
小於S2
;抑或距離S1
可為在水平橫截面上連接所述通路的中心與所述通路的邊緣上任兩個任意點的任何虛擬線的最短距離,距離S2
可為連接所述通路的中心與所述通路的邊緣上任兩個任意點的任何虛擬線的最長距離,且由具有距離S1
的虛擬線確定的第一方向與由具有距離S2
的虛擬線確定的第二方向可互相垂直。在其中q1
小於q2
的情形中-此意味著類似於上文所述,具有非圓形形狀的第一通路133的寬的部分被安置成靠近電子構件封裝100A的中心,應力可集中於所述寬的部分上,藉此獲得更優異的應力分散效果。與此不同,在其中q1
等於或大於q2
的情形中-此意味著具有非圓形形狀的第一通路133的寬的部分被安置成遠離電子構件封裝100A的中心,應力可集中於窄的部分上,使得在獲得上述應力分散效果方面存在限制。q1
可等於0。
圖8A至圖8D示意性地說明應用至圖3所示的電子構件封裝的非圓形通路的各種實例。參照圖8A至圖8D,具有非圓形形狀的第一通路133的水平橫截面可具有如圖8A所示的卵形形狀或如圖8B所示的矩形形狀。此外,第一通路133的水平橫截面可具有如圖8C所示的菱形形狀或如圖8D所示的六角形形狀。然而,該些形狀僅僅是為了闡述第一通路133而建議的實例。亦即,具有非圓形形狀的第一通路133可具有除上述形狀之外的任何形狀,只要其具有上述應力分散效果即可。
圖9示意性地說明在將非圓形通路應用至圖3所示的電子構件封裝的情形中的應力減少效果。用於解釋所述效果的通路是連接至安置於電子構件封裝120的最外部分的隅角Q1
中的電極焊墊120P的第一通路133。可理解,在如上所述安置非圓形通路的情形中,施加至所述通路的應力較如在先前技術中一般應用圓形通路的情形減小。因此,可理解,通路的可靠性得到提高。
圖10是示意性地說明圖3所示的電子構件封裝的經修改的實例的剖視圖。參照圖10,根據實例的電子構件封裝100A可為所謂的堆疊封裝(Package on Package,PoP)型封裝。亦即,根據實例的電子構件封裝100A可更包括穿透過囊封劑110的穿透配線113。此外,電子構件封裝100A可更包括連接至穿透配線113的上連接端子165。其他構型與上述相同。
當另一封裝、用於表面安裝技術(Surface Mount Technology,SMT)的構件等安置於封裝100A上時,穿透配線113可用以將所述另一封裝、用於表面安裝技術(SMT)的構件等電性連接至電子構件120。可使用例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、其合金等導電材料作為用於形成穿透配線113的材料。穿透配線113的數目、間隔、安置形狀等不受特別限制,而是可由熟習此項技術者依設計而進行充分地變化,且不再對其予以贅述。可藉由此項技術中已知的方法形成穿透配線113。舉例而言,可利用機械鑽孔方法及/或雷射鑽孔方法、使用研磨顆粒的噴砂方法或使用電漿的乾式蝕刻方法來形成穿透配線113。作為另外一種選擇,在其中囊封劑110含有感光性材料的情形中,可在利用光刻法形成用於穿透配線的孔後利用乾膜圖案、藉由電解鍍銅、無電鍍銅等形成穿透配線113。
當另一封裝等安置於封裝100A上時,上連接端子165可充當將封裝100A連接至另一封裝等的連接單元。可由例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、焊料等導電材料形成上連接端子165。然而,該些材料僅為實例,且上連接端子165的材料並非僅限於此。上連接端子165可為焊盤、球、引腳等。然而,一般而言,上連接端子165可為球,例如焊料球。上連接端子165可被形成為多層結構或單層結構。在其中上連接端子165被形成為多層結構的情形中,上連接端子165可含有銅柱及焊料,而在其中上連接端子165被形成為單層結構的情形中,上連接端子165可含有錫-銀焊料或銅。然而,該些情形僅為實例,且上連接端子165並非僅限於此。上連接端子165可使用此項技術中已知的方法形成並藉由回流來固定。
圖11是示意性地說明圖3所示的電子構件封裝的另一經修改的實例的剖視圖。參照圖11,根據實例的電子構件封裝100A可為所謂的面板級封裝(Panel Level Package,PLP)型封裝。亦即,根據實例的電子構件封裝100A可更包括安置於重新分配層130上且具有貫穿孔的框架115。在此種情形中,電子構件120可安置於框架115的貫穿孔中。若需要,則金屬層116、117及118可安置於框架115的貫穿孔的內表面、框架115的上表面及/或框架115的下表面上。其他構型與上述相同。
框架115可被構造為支撐封裝100A,且由於框架115,可保持剛性並可確保厚度均勻性。框架115可具有上表面及與上表面相對的下表面,且可將貫穿孔形成為穿透過上表面與下表面之間。電子構件120可與框架115間隔開地安置於貫穿孔中,且因此框架115可包圍電子構件120的側表面。框架115的材料不受特別限制,只要框架115可支撐封裝即可。舉例而言,可使用絕緣材料。此處,作為絕緣材料,可使用熱固性樹脂(例如,環氧樹脂)、熱塑性樹脂(例如,聚醯亞胺)或其中將增強材料(例如,玻璃纖維或無機填充劑)浸入於熱固性樹脂及熱塑性樹脂中的樹脂(例如,預浸體(prepreg)、味之素構成膜(ABF)、FR-4、雙馬來醯亞胺三嗪(BT)樹脂等)。作為另外一種選擇,可使用具有優異的剛性及導熱率的金屬。在此種情形中,可使用Fe-Ni系合金作為所述金屬。此處,為確保與模製材料、層間絕緣材料等的黏著力,可在Fe-Ni系合金的表面上形成鍍Cu層。此外,可使用玻璃、陶瓷、塑膠等。框架115在其橫截面上的厚度不受特別限制,且可依電子構件120在其橫截面上的厚度而進行設計。舉例而言,依電子構件120的種類而定,框架115的厚度可為例如100微米至500微米左右。在其中封裝100A具有框架115的情形中,封裝100A可藉由以下製程來製造:製備具有貫穿孔的框架115,利用黏合膜等將電子構件120安置於貫穿孔中,形成囊封劑110,且然後作為後製程,安置重新分配層130。框架115可為具有多個貫穿孔的大型框架115,以達成封裝100A的大規模生產。可使用如上所述的框架115將多個封裝100A作為單體製成,且可然後切割所述多個封裝100A以形成個別封裝。
視需要安置於框架115的貫穿孔的內表面、框架115的上表面及/或框架115的下表面上的金屬層116、117及118可為用於改善熱輻射特性及/或遮罩電磁波的構型。可使用例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、其合金等具有高導熱率的金屬作為形成金屬層116、117及118的材料而不受特別限制。自電子構件120輻射出的熱量可藉由經過金屬層116、117及118的傳導、輻射及對流而朝向框架115的上部或下部分散。金屬層116、117及118的形成方法不受特別限制,且可藉由此項技術中已知的方法形成金屬層116、117及118。舉例而言,可藉由電解鍍銅或無電鍍銅等來形成金屬層116、117及118。更具體而言,可藉由例如化學氣相沈積(CVD)方法、物理氣相沈積(PVD)方法、濺鍍方法、減性方法、加性方法、半加性製程(SAP)方法、經修改半加性製程(MSAP)方法等方法來形成金屬層116、117及118,但金屬層116、117及118的形成方法並非僅限於此。
圖12是示意性地說明圖3所示的電子構件封裝的另一經修改的實例的剖視圖。參照圖12,根據實例的電子構件封裝100A可同時為所謂的面板級封裝(panel level package,PLP)型封裝及所謂的堆疊封裝(package on package,PoP)型封裝。亦即,根據實例的電子構件封裝100A可更包括穿透過框架115的穿透配線113,其中各種導電圖案112a及112b可安置於框架115的上表面及下表面上,且若需要,則金屬層116可安置於貫穿孔的內表面上。此外,電子構件封裝100A可更包括連接至穿透配線113的上連接端子165。其他構型與上述相同。
穿透配線113可僅穿透過框架115,且穿透配線113的特定數目、間隔、安置形狀等不受特別限制,而是可由熟習此項技術者依設計而進行充分地變化。在此種情形中,可藉由如上所述此項技術中已知的方法形成穿透配線113。上連接端子165可安置於在囊封劑110的上表面上形成的開口(未由參考編號指示)上,且上連接端子165的特定數目、間隔、安置形狀等不受特別限制,而是可由熟習此項技術者依設計而進行充分地變化。在此種情形中,可藉由如上所述此項技術中已知的方法形成所述開口(未由參考編號指示)及上連接端子165。
安置於框架115的上表面及下表面上的各種導電圖案112a及112b可為配線圖案及/或焊墊圖案,且由於配線如上所述可形成於框架115的上表面及下表面上,因而在封裝100A中可提供較寬的路由區,且因此,重新分配層130的設計自由度可更得到提高。亦可藉由如上所述此項技術中已知的方法形成各種導電圖案112a及112b。視需要安置於框架115的貫穿孔的內表面上的金屬層116可為用於改善熱輻射特性及/或遮罩電磁波的構型,且在其中金屬層116如上所述僅僅安置於貫穿孔的內表面上的情形中,金屬層116可具有充分的熱輻射效果及充分的電磁波遮罩效果。亦可藉由如上所述此項技術中已知的方法形成金屬層116。
圖13是示意性地說明圖3所示的電子構件封裝的另一經修改的實例的剖視圖。參照圖13,根據實例的電子構件封裝100A可同時為所謂的面板級封裝(PLP)型封裝及所謂的堆疊封裝(PoP)型封裝。亦即,具有與框架115的貫穿孔整合於一起的貫穿孔的內部絕緣層111a及內部絕緣層111b可更安置於框架115的上表面及/或下表面上。一直穿透至囊封劑110的開口(未由參考編號指示)可形成於第一內部絕緣層111a中,以使圖案112a可經由所述開口而部分地暴露在外。被暴露出的圖案112a可充當安置於封裝100A上的具有不同形狀或具有電子構件封裝的電子構件的打線接合的焊墊。其他構型與上述相同。
第一內部絕緣層111a及第一內部絕緣層111b可用於在安置電子構件120之前形成較大數目的配線圖案。隨著第一內部絕緣層111a及第一內部絕緣層111b的數目的增加,形成於對應層上的配線圖案的數目可增加,使得重新分配層130的數目可減少。因此,由於在安置電子構件120之後在形成重新分配層130期間發生缺陷而導致電子構件120不被使用的可能性可得到降低。亦即,可防止在安置電子構件之後由於過程缺陷而導致良率下降的問題。穿透過第一絕緣層111a及第一絕緣層111b的貫穿孔亦可形成於第一內部絕緣層111a及第一內部絕緣層111b中,且可與穿透過框架110的貫穿孔整合於一起。在此種情形中,電子構件120可安置於整合的貫穿孔中。可在第一內部絕緣層111a及第一內部絕緣層111b中形成各種導電圖案及通路(未由參考編號指示)。其形成方法與上述相同。
可使用絕緣材料作為第一絕緣層111a及第一絕緣層111b的材料。此處,作為絕緣材料,可使用熱固性樹脂(例如,環氧樹脂)、熱塑性樹脂(例如,聚醯亞胺)或其中將增強材料(例如,玻璃纖維或無機填充劑)浸入於熱固性樹脂及熱塑性樹脂中的樹脂(例如,預浸體、味之素構成膜(ABF)、FR-4、雙馬來醯亞胺三嗪(BT)樹脂等)。在使用感光性絕緣材料(例如,感光性絕緣樹脂)的情形中,絕緣層111a及絕緣層111b可被形成為較薄的,且可輕易地達成精細的間距。第一內部絕緣層111a及第一內部絕緣層111b中的每一者中所包含的絕緣材料可彼此相同或彼此不同。此外,第一內部絕緣層111a及第一內部絕緣層111b的厚度可近似彼此相同或彼此不同。在其中第一內部絕緣層111a及第一內部絕緣層111b的材料彼此相同、其厚度實質上彼此相同、且其層的數目彼此相同的情形中,第一內部絕緣層111a及第一內部絕緣層111b可基於框架115而彼此對稱。在此種情形中,可更易於控制翹曲。
圖14是示意性地說明安裝於板上的電子構件封裝的另一實例的剖視圖。參照圖14,類似地,根據另一實例的電子構件封裝100B可包括:重新分配層130及重新分配層140;電子構件120,安置於重新分配層130及140上;以及囊封劑110,囊封電子構件120。此外,電子構件封裝100B可包括:保護層150,安置於重新分配層130及重新分配層140之下且具有開口153;以及連接端子155,安置於保護層150的開口153中。電子構件封裝100B可經由連接端子155而安裝於板201上。然而,重新分配層130及重新分配層140可由多個層構成。以下,將對根據另一實例的電子構件封裝100B的構型進行闡述,但對與上述構型的說明重複的說明不再予以贅述,且僅對所增加的構件進行闡述。
重新分配層140可包括:第二絕緣層141,安置於第一絕緣層131上;第二導電圖案142,安置於第二絕緣層141上;以及第二通路143,在穿透過第二絕緣層141的同時將第一導電圖案132與第二導電圖案142連接至彼此。重新分配層140亦可如圖14所示為由較大數目的層構成的多層結構。由於所增加的重新分配層的內容與上述相同,因而不再對其予以贅述。
第二絕緣層141可用以保護第二導電圖案142、第二通路143等,且若需要,則第二絕緣層141可用以使第二導電圖案142與第二通路143絕緣。可使用絕緣材料作為形成第二絕緣層141的材料。作為絕緣材料,可使用熱固性樹脂(例如,環氧樹脂)、熱塑性樹脂(例如,聚醯亞胺)或其中將增強材料(例如,玻璃纖維或無機填充劑)浸入於熱固性樹脂及熱塑性樹脂中的樹脂(例如,預浸體、味之素構成膜(ABF)、FR-4、雙馬來醯亞胺三嗪(BT)樹脂等)。在使用感光性絕緣材料(例如,感光成像介電(PID)樹脂)的情形中,第二絕緣層141可被形成為較薄的,且因此,可更輕易地達成具有精細間距的第二通路143。第二絕緣層141的厚度不受特別限制。舉例而言,除第二導電圖案142外的第二絕緣層141的厚度可為5微米至20微米左右,且考慮到第二導電圖案142的厚度,第二絕緣層141可具有15微米至70微米左右的厚度。可藉由此項技術中已知的方法形成第二絕緣層141。舉例而言,可藉由層壓第二絕緣層141的前驅物並將經層壓的前驅物固化的方法、應用形成第二絕緣層141的材料並將所應用的材料固化的方法等而形成第二絕緣層141,但並非僅限於此。作為層壓前驅物的方法,舉例而言,可使用如下方法:執行在高溫下按壓物體達預定時間的熱壓法、在減壓的同時使所述物體冷卻至室溫、然後在冷壓機中藉由冷卻分離加工工具等。作為應用所述材料的方法,舉例而言,可使用利用刮板應用油墨的絲網印刷方法、對油墨進行噴霧以應用油墨的噴塗印刷方法等。作為後製程,所述固化可包括對囊封材料進行乾燥以使其不會完全固化從而使用光刻的方法等。
第二導電圖案142可充當重新分配圖案,且可使用例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、其合金等導電材料作為用於形成第二導電圖案142的材料。第二導電圖案142可依對應層的設計而定執行各種功能。舉例而言,第二導電圖案142可發揮接地(GND)圖案、功率(PWR)圖案、訊號(S)圖案等的作用。此處,訊號(S)圖案可包括除GND圖案、PWR圖案等以外的各種訊號圖案,例如資料訊號圖案等。此外,第二導電圖案142可發揮例如通路焊墊、連接端子焊墊等各種焊墊的作用。在其中第二導電圖案142用作焊墊的情形中,若需要,則可更於第二導電圖案142的表面上形成表面處理層。舉例而言,可藉由電解鍍金、無電鍍金、有機可焊性保護(OSP)表面處理或無電鍍錫、無電鍍銀、無電鍍鎳/置換鍍金、直接浸金(DIG)鍍覆、熱空氣焊料均塗(HASL)等來形成所述表面處理層。第二導電圖案142的厚度並不受特別限制。舉例而言,第二導電圖案142可具有10微米至50微米左右的厚度。可藉由此項技術中已知的方法形成第二導電圖案142。舉例而言,可藉由電解鍍銅、無電鍍銅等來形成第二導電圖案142。更詳言之,可藉由例如化學氣相沈積(CVD)方法、物理氣相沈積(PVD)方法、濺鍍方法、減性方法、加性方法、半加性製程(SAP)、經修改半加性製程(MSAP)等方法來形成第二導電圖案142,但第二導電圖案142的形成方法並非僅限於此。
第二通路143可將形成於不同層上的第一導電圖案132與第二導電圖案142電性連接至彼此,藉此在封裝100B中形成電性路徑。可使用例如銅(Cu)、鋁(Al)、銀(Ag)、錫(Sn)、金(Au)、鎳(Ni)、鉛(Pb)、其合金等導電材料作為用於形成第二通路143的材料。第二通路143可被完全填充以導電材料,或藉由在通路孔的壁面上形成導電材料而形成。此外,可應用此項技術中已知的所有形狀,例如直徑向下減小的錐形形狀、直徑向下增大的倒錐形形狀、圓柱形狀等作為第二通路143的形狀。可藉由此項技術中已知的方法形成第二通路143。舉例而言,可使用機械鑽孔及/或雷射鑽孔形成第二通路143。作為另外一種選擇,在其中第二絕緣層141含有感光性材料的情形中,可在利用光刻法形成通路孔後,利用乾膜圖案、藉由電解鍍銅、無電鍍銅等形成第二通路143。
圖15A至圖18C示意性地說明沿圖14所示的線II-II’截取的電子構件封裝的剖切平面圖的各種實例。參照圖15A、圖16A、圖17A及圖18A,可理解,在將安置於不同層上的第一導電圖案132與第二導電圖案142連接至彼此的第二通路142中,應力亦集中於第二通路143的面向電子構件封裝100B的中心的部分及與其相對的部分上。因此,在與如上所述根據先前技術的圓形形狀相比增大第二通路143的應力集中的部分的區域的情形中,應力可被分散,且因此,較在其中第二通路僅具有圓形形狀的情形中可靠性得到提高。在此種情形中,所有通路可被形成為具有如上所述的非圓形形狀,但相較先前技術,僅藉由將安置於應力主要集中的區中的第二通路143形成為具有如上所述的非圓形形狀,便可提高通路的可靠性。所述應力主要集中的區可依所應用的封裝而改變。舉例而言,當與在其中安置電子構件120的區對應的重新分配層140的區被定義為第一區X、且包圍第一區X的區被定義為第二區Y時,應力主要集中的區可為如圖15A所示的第一區X的最外部分的隅角r1
及/或第二區Y的最外部分的隅角R1
、如圖16A所示的第一區X的最外部分的隅角部分r1
及/或第二區Y的最外部分的隅角部分R2
、如圖17A所示的第一區X的最外部分r3
及/或第二區Y的最外部分R3
、或如圖18A所示的第一區X的最外部分的隅角及對第一區的最外部分的隅角及/或第二區Y的外側部分的隅角部分R4
進行包圍的第二區Y的部分r4
。然而,應力主要集中的區並非僅限於此。此處,最外部分可意指可在其中安置通路的最外區,且外側部分可意指包括如上所述的最外區的外側區。此處,在其中難以清楚地將外側區與內側區彼此區分開的情形中,可將中心與最外部分之間的中間區解釋為外側區。此外,隅角可意指可在其中安置通路的某個區的頂點部分,且隅角部分可意指自所述頂點部分擴展以使得更安置預定數目通路的隅角部分。同時,非圓形形狀並不受特別限制,只要通路具有如下的水平橫截面形狀即可:在所述水平橫截面形狀中,在第一方向上的距離S3
短於在垂直於所述第一方向的第二方向上的距離S4
。
同時,參照圖15B、圖16B、圖17B及圖18B,當電子構件封裝100B的中心被定義為C1
、第二通路143的中心被定義為C3
時、C1
與C3
連接至彼此的線被定義為L3
、垂直於L3
且穿過C3
的虛擬線被定義為L4
、第二通路143的邊緣上所述邊緣與L3
相交的兩個點之間的距離被定義為D3
、且第二通路143的所述邊緣上所述邊緣與L4
相交的兩個點之間的距離被定義為D4
時,具有非圓形形狀的第二通路143可滿足D3
<D4
。由於施加至第二通路143的應力如上所述集中於第二通路143的面向電子構件封裝100B的中心的部分及與其相對的部分上,因此可能難以僅藉由安置具有非圓形形狀的第二通路143來充分地分散應力。相反,在安置具有非圓形形狀的第二通路143以滿足D3
<D4
的情形中,由於具有非圓形形狀的第二通路143的寬的部分被安置成靠近電子構件封裝100B的中心,應力可集中於所述寬的部分,藉此獲得更優異的應力分散效果。
同時,參照圖15C、圖16C、圖17C及圖18C,當電子構件封裝100B的中心被定義為C1
、第二通路143的中心被定義為C3
、將C1
與C3
連接至彼此的虛擬線被定義為L3
、跨越第二通路143在所述第一方向上的距離S3
的虛擬線與L3
之間的角度被定義為q3
、且跨越第二通路143在所述第二方向上的距離S4
的虛擬線與L3
之間的角度被定義為q4
時,具有非圓形形狀的第二通路143可滿足q3
<q4
。此處,距離S3
可為在水平橫截面上連接第二通路143的中心與第二通路143的邊緣的任兩個任意點的任何虛擬線的最短距離,且在垂直於由具有距離S3
的虛擬線確定的所述第一方向的第二方向上,連接第二通路143的中心與第二通路143的邊緣上的兩個點的虛擬線的距離S4
大於S3
;或者距離S4
可為在水平橫截面上連接第二通路143的中心與第二通路143的邊緣上任兩個任意點的任何虛擬線的最長距離,且在垂直於由具有距離S4
的虛擬線確定的所述第二方向的第一方向上,連接第二通路143的中心與第二通路143的邊緣上的兩個點的虛擬線的距離S3
小於S4
;抑或距離S3
可為在水平橫截面上連接第二通路143的中心與第二通路143的邊緣上任兩個任意點的任何虛擬線的最短距離,距離S4
可為連接第二通路143的中心與第二通路143的邊緣上任兩個任意點的任何虛擬線的最長距離,且由具有距離S3
的虛擬線確定的第一方向與由具有距離S4
的虛擬線確定的第二方向可互相垂直。在其中q3
小於q4
的情形中,類似於上文所述,當具有非圓形形狀的第二通路143的寬的部分安置成靠近電子構件封裝100B的中心時,應力可集中於所述寬的部分上,藉此獲得改善的應力分散效果。與此不同,在其中q3
等於或大於q4
的情形中-此意味著具有非圓形形狀的第二通路143的所述寬的部分被安置成遠離電子構件封裝100B的中心,應力可集中於窄的部分上,因而在獲得上述應力分散效果方面存在限制。q3
可等於0。
圖19A至圖19D示意性地說明應用至如圖14所示的電子構件封裝的非圓形通路的各種實例。參照圖19A至圖19D,類似地,具有非圓形形狀的第二通路143的水平橫截面可具有如圖19A所示的卵形形狀或如圖19B所示的矩形形狀。此外,第二通路143的水平橫截面可具有如圖19C所示的菱形形狀或如圖19D所示的六角形形狀。然而,該些形狀僅僅是為了闡述第二通路143而建議的實例。亦即,具有非圓形形狀的第二通路143可具有除上述形狀之外的任何形狀,只要其可具有如上所述的應力分散效果即可。
圖20是示意性地說明圖14所示的電子構件封裝的經修改的實例的剖視圖。參照圖20,根據另一實例的電子構件封裝100B可為所謂的堆疊封裝(PoP)型封裝。亦即,根據另一實例的電子構件封裝100B可更包括穿透過囊封劑110的穿透配線113。此外,電子構件封裝100B可更包括連接至穿透配線113的上連接端子165。所述構型中的每一者均與上述相同。
圖21是示意性地說明圖14所示的電子構件封裝的另一經修改的實例的剖視圖。參照圖21,根據另一實例的電子構件封裝100B可為所謂的面板級封裝(PLP)型封裝。亦即,根據另一實例的電子構件封裝100B可更包括安置於重新分配層130及重新分配層140上且具有貫穿孔的框架115。在此種情形中,電子構件120可安置於框架115的貫穿孔中。若需要,則金屬層116、117及118可安置於框架115的貫穿孔的內表面、框架115的上表面上及/或框架115的下表面上。所述構型中的每一者均與上述相同。
圖22是示意性地說明圖14所示的電子構件封裝的另一經修改的實例的剖視圖。參照圖22,根據另一實例的電子構件封裝100B可同時為所謂的面板級封裝(PLP)型封裝及所謂的堆疊封裝(PoP)型封裝。亦即,根據另一實例的電子構件封裝100B可更包括穿透過框架115的穿透配線113,其中各種導電圖案112a及導電圖案112b可安置於框架115的上表面及下表面上,且若需要,則金屬層116可安置於貫穿孔的內表面上。此外,電子構件封裝100B可更包括連接至穿透配線113的上連接端子165。所述構型中的每一者均與上述相同。
圖23是示意性地說明圖14所示的電子構件封裝的另一經修改的實例的剖視圖。參照圖23,根據另一實例的電子構件封裝100B可同時為所謂的面板級封裝(PLP)型封裝及所謂的堆疊封裝(PoP)型封裝。亦即,具有與框架115的貫穿孔整合於一起的貫穿孔的內部絕緣層111a及內部絕緣層111b可更安置於框架115的上表面及/或下表面上。一直穿透至囊封劑110的開口(未由參考編號指示)可形成於第一內部絕緣層111a中,以使圖案112a可經由所述開口而部分地暴露在外。被暴露出的圖案112a可充當安置於封裝100B上的具有不同形狀或具有電子構件封裝的電子構件的打線接合的焊墊。其他構型與上述相同。
如上所述,根據本發明的示例性實施例,可提供其中重新分配層的通路的可靠性得到提高的電子構件封裝、以及包含該封裝的電子裝置。
儘管以上已示出並闡述了示例性實施例,但對於熟習此項技術者而言將顯而易見,在不背離由隨附申請專利範圍界定的本發明的範圍的條件下,可作出各種潤飾及變型。
100‧‧‧電子構件封裝 100A、100B‧‧‧封裝 110‧‧‧囊封劑 111a、111b‧‧‧內部絕緣層 112a、112b‧‧‧導電圖案 113‧‧‧穿透配線 115‧‧‧框架 116、117、118‧‧‧金屬層 120、1120‧‧‧電子構件 120P‧‧‧電極焊墊 130‧‧‧重新分配層 131‧‧‧第一絕緣層 132‧‧‧第一導電圖案 133‧‧‧第一通路 140‧‧‧重新分配層 141‧‧‧第二絕緣層 142‧‧‧第二導電圖案 143‧‧‧第二通路 150‧‧‧保護層 153‧‧‧開口 155‧‧‧連接端子 165‧‧‧上連接端子 201‧‧‧板 202‧‧‧安裝焊墊 1000‧‧‧電子裝置 1010‧‧‧母板 1020‧‧‧晶片相關構件 1030‧‧‧網路相關構件 1040‧‧‧其他構件 1050、1130‧‧‧照相機模組 1060‧‧‧天線 1070‧‧‧顯示器 1080‧‧‧電池 1090‧‧‧訊號線 1100‧‧‧智慧型電話 1101‧‧‧本體 1110‧‧‧主板 C1
、C2
、C3‧‧‧中心 D1
、D2
、D3
、D4‧‧‧距離 L1
、L2
、L3
、L4‧‧‧虛擬線 Q1‧‧‧隅角 Q2‧‧‧隅角部分 Q3‧‧‧最外部分 Q4‧‧‧隅角部分 X‧‧‧第一區 Y‧‧‧第二區 q1、q2
、q3
、q4‧‧‧角度 I-I’‧‧‧線 II-II’‧‧‧線
藉由結合附圖閱讀以下詳細說明,將更清楚地理解本發明的以上及其他態樣、特徵及優點,在附圖中: 圖1是示意性地說明電子裝置系統的實例的方塊圖。 圖2示意性地說明應用於電子裝置的電子構件封裝的實例。 圖3是示意性地說明所述電子構件封裝的實例的剖視圖。 圖4A至圖4C是所述電子構件封裝沿圖3所示的線I-I’截取的剖切平面圖。 圖5A至圖5C是所述電子構件封裝沿圖3所示的線I-I’截取的剖切平面圖。 圖6A至圖6C是所述電子構件封裝沿圖3所示的線I-I’截取的剖切平面圖。 圖7A至圖7C是所述電子構件封裝沿圖3所示的線I-I’截取的剖切平面圖。 圖8A至圖8D示意性地說明應用於圖3所示的電子構件封裝的非圓形通路的各種實例。 圖9示意性地說明應用於圖3所示的電子構件封裝的所述非圓形通路的應力減小。 圖10是示意性地說明圖3所示的電子構件封裝的經修改的實例的剖視圖。 圖11是示意性地說明圖3所示的電子構件封裝的經修改的實例的剖視圖。 圖12是示意性地說明圖3所示的電子構件封裝的經修改的實例的剖視圖。 圖13是示意性地說明圖3所示的電子構件封裝的經修改的實例的剖視圖。 圖14是示意性地說明所述電子構件封裝另一實例的剖視圖。 圖15A至圖15C是所述電子構件封裝沿圖14所示的線II-II’截取的剖切平面圖。 圖16A至圖16C是所述電子構件封裝沿圖14所示的線II-II’截取的剖切平面圖。 圖17A至圖17C是所述電子構件封裝沿圖14所示的線II-II’截取的剖切平面圖。 圖18A至圖18C是所述電子構件封裝沿圖14所示的線II-II’截取的剖切平面圖。 圖19A至圖19D示意性地說明應用於圖14所示的電子構件封裝的非圓形通路的各種實例。 圖20是示意性地說明圖14所示的電子構件封裝的經修改的實例的剖視圖。 圖21是示意性地說明圖14所示的電子構件封裝的經修改的實例的剖視圖。 圖22是示意性地說明圖14所示的電子構件封裝的經修改的實例的剖視圖。 圖23是示意性地說明圖14所示的電子構件封裝的經修改的實例的剖視圖。
100A‧‧‧封裝
110‧‧‧囊封劑
120‧‧‧電子構件
120P‧‧‧電極焊墊
130‧‧‧重新分配層
131‧‧‧第一絕緣層
132‧‧‧第一導電圖案
133‧‧‧第一通路
150‧‧‧保護層
153‧‧‧開口
155‧‧‧連接端子
201‧‧‧板
202‧‧‧安裝焊墊
I-I’‧‧‧線
Claims (36)
- 一種電子構件封裝,包括: 重新分配層,包括第一絕緣層、安置於所述第一絕緣層上的第一導電圖案、以及第一通路,所述第一通路在穿透過所述第一絕緣層的同時連接至所述第一導電圖案; 電子構件,安置於所述重新分配層上;以及 囊封劑,囊封所述電子構件, 其中所述第一通路具有水平橫截面形狀,在所述第一通路的所述水平橫截面形狀中,在第一方向上穿過所述第一通路的中心以及所述第一通路的第一邊緣點及第二邊緣點的虛擬線上的所述第一通路的所述第一邊緣點與所述第二邊緣點之間的距離小於在垂直於所述第一方向的第二方向上穿過所述第一通路的所述中心以及所述第一通路的第三邊緣點及第四邊緣點的虛擬線上的所述第一通路的所述第三邊緣點與所述第四邊緣點之間的距離。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述第一通路滿足D1 <D2 ,其中C1 是所述電子構件封裝的中心,C2 是所述第一通路的所述中心,L1 是連接C1 與C2 的虛擬線,L2 是垂直於L1 且穿過C2 的虛擬線,D1 是所述第一通路的邊緣上所述邊緣與L1 相交的兩個點之間的距離,且D2 是所述第一通路的所述邊緣上所述邊緣與L2 相交的兩個點之間的距離。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述第一通路滿足q1 <q2 ,其中C1 是所述電子構件封裝的中心,C2 是所述第一通路的所述中心,L1 是連接C1 與C2 的虛擬線,q1 是跨越所述第一通路在所述第一方向上的距離S1 的虛擬線與L1 之間的角度,且q2 是跨越所述第一通路在所述第二方向上的距離S2 的虛擬線與L1 之間的角度。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述第一通路連接至所述電子構件的安置於所述電子構件的最外隅角處的電極焊墊。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述第一通路連接至所述電子構件的安置於所述電子構件的最外隅角部分處的電極焊墊。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述第一通路連接至所述電子構件的位於所述電子構件的最外表面處的電極焊墊。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述第一通路連接至所述電子構件的安置於所述電子構件的外側部分的隅角部分處的電極焊墊。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述第一通路的所述水平橫截面形狀是卵形、矩形、菱形、或六角形。
- 如申請專利範圍第1項所述的電子構件封裝,其中所述重新分配層更包括安置於所述第一絕緣層上的第二絕緣層、安置於所述第二絕緣層上的第二導電圖案、以及第二通路,所述第二通路在穿透過所述第二絕緣層的同時將所述第一導電圖案與所述第二導電圖案連接至彼此, 所述第二通路具有水平橫截面形狀,在所述第二通路的所述水平橫截面形狀中,在第三方向上穿過所述第二通路的中心以及所述第二通路的第五邊緣點及第六邊緣點的虛擬線上的所述第二通路的所述第五邊緣點與所述第六邊緣點之間的距離短於在垂直於所述第三方向的第四方向上穿過所述第二通路的所述中心以及所述第二通路的第七邊緣點及第八邊緣點的虛擬線上的所述第二通路的所述第七邊緣點與所述第八邊緣點之間的距離。
- 如申請專利範圍第9項所述的電子構件封裝,其中所述第二通路滿足D3 <D4 ,其中C1 是所述電子構件封裝的中心,C3 是所述第二通路的所述中心,L3 是將C1 與C3 連接至彼此的虛擬線,L4 是垂直於L3 且穿過C3 的虛擬線,D3 是所述第二通路的邊緣上所述邊緣與L3 相交的兩個點之間的距離,且D4 是所述第二通路的所述邊緣上所述邊緣與L4 相交的兩個點之間的距離。
- 如申請專利範圍第9項所述的電子構件封裝,其中所述第二通路滿足q3 <q4 ,其中C1 是所述電子構件封裝的中心,C3 是所述第二通路的所述中心,L3 是將C1 與C3 連接至彼此的虛擬線,q3 是跨越所述第二通路在所述第三方向上的距離S3 的虛擬線與L3 之間的角度,且q4 是跨越所述第二通路在所述第四方向上的距離S4 的虛擬線與L3 之間的角度。
- 如申請專利範圍第9項所述的電子構件封裝,其中所述重新分配層包括與其中安置所述電子構件的區對應的第一區及包圍所述第一區的第二區,且 所述第二通路安置於所述第一區的最外部分的隅角與所述第二區的最外部分的隅角中的至少一者中。
- 如申請專利範圍第9項所述的電子構件封裝,其中所述重新分配層包括與其中安置所述電子構件的區對應的第一區以及包圍所述第一區的第二區,且 所述第二通路安置於所述第一區的最外部分的隅角部分與所述第二區的最外部分的隅角部分中的至少一者中。
- 如申請專利範圍第9項所述的電子構件封裝,其中所述重新分配層包括與其中安置所述電子構件的區對應的第一區以及包圍所述第一區的第二區,且 所述第二通路安置於所述第一區的最外部分與所述第二區的最外部分中的至少一者中。
- 如申請專利範圍第9項所述的電子構件封裝,其中所述重新分配層包括與其中安置所述電子構件的區對應的第一區以及包圍所述第一區的第二區,且 所述第二通路安置於所述第二區的外側部分的隅角部分處。
- 如申請專利範圍第9項所述的電子構件封裝,其中所述重新分配層包括與其中安置所述電子構件的區對應的第一區以及包圍所述第一區的第二區,且 所述第二通路安置於所述第一區的最外隅角處以及所述第二區的包圍所述第一區的所述最外部分的所述隅角的一部分處。
- 如申請專利範圍第1項所述的電子構件封裝,更包括: 保護層,安置於所述重新分配層之下並具有開口;以及 連接端子,安置於所述保護層的所述開口中。
- 如申請專利範圍第17項所述的電子構件封裝,其中所述保護層是阻焊劑層,且 所述連接端子是焊料球。
- 如申請專利範圍第1項所述的電子構件封裝,更包括框架,所述框架安置於所述重新分配層上且具有貫穿孔, 其中所述電子構件安置於所述框架的所述貫穿孔中。
- 如申請專利範圍第19項所述的電子構件封裝,更包括: 穿透過所述框架的穿透配線;以及 配線圖案,安置於所述框架的彼此相對的兩個表面上, 其中所述穿透配線及所述配線圖案電性連接至所述電子構件。
- 一種電子裝置,包括: 板;以及 電子構件封裝,安裝於所述板上, 其中所述電子構件封裝是如申請專利範圍第1項所述的電子構件封裝。
- 一種電子構件封裝,包括: 電子構件;以及 重新分配層,電性連接至所述電子構件且包括第一絕緣層、安置於所述第一絕緣層上的第一導電圖案、以及多個第一通路,所述多個第一通路在穿透過所述第一絕緣層的同時連接至所述第一導電圖案, 其中所述多個第一通路包括各自具有非圓形形狀的第一組第一通路。
- 如申請專利範圍第22項所述的電子構件封裝,其中所述第一組第一通路安置於位於對所述電子構件的隅角進行連接的線上的區上,且 各自具有圓形形狀的第二組第一通路安置於其他區上。
- 如申請專利範圍第23項所述的電子構件封裝,其中所述第一組第一通路更處於位於線上的區上並遠離所述電子構件的中心區,所述線穿過所述電子構件的中心且平行於所述電子構件的邊緣。
- 如申請專利範圍第22項所述的電子構件封裝,其中在垂直於所述電子構件與所述重新分配層的堆疊方向的第一平面中,在自非圓形第一通路的中心至所述電子構件的中心的第一方向上確定的所述非圓形第一通路的尺寸小於在垂直於所述第一方向的第二方向上確定的所述非圓形第一通路的尺寸。
- 如申請專利範圍第22項所述的電子構件封裝,其中在垂直於所述電子構件與所述重新分配層的堆疊方向的第一平面中,每一非圓形第一通路的形狀是卵形、矩形、菱形、或六角形。
- 如申請專利範圍第22項所述的電子構件封裝,其中所述重新分配層更包括第二絕緣層、安置於所述第二絕緣層上的第二導電圖案、及多個第二通路,所述多個第二通路在穿透過所述第二絕緣層的同時將所述第一導電圖案與所述第二導電圖案連接至彼此,且 所述多個第二通路包括各自具有非圓形形狀的第三組第二通路以及各自具有圓形形狀的第四組第二通路。
- 如申請專利範圍第27項所述的電子構件封裝,其中所述第三組第二通路安置於位於對所述電子構件的隅角進行連接的線上的區上。
- 如申請專利範圍第28項所述的電子構件封裝,其中所述第三組第二通路更處於位於線上的區上且遠離所述重新分配層的中心區,所述線穿過所述電子構件的中心且平行於所述電子構件的邊緣。
- 如申請專利範圍第27項所述的電子構件封裝,其中在垂直於所述電子構件與所述重新分配層的堆疊方向的第二平面中,在自非圓形第二通路的中心至所述電子構件的中心的第三方向上確定的所述非圓形第二通路的尺寸小於在垂直於所述第三方向的第四方向上確定的所述非圓形第二通路的尺寸。
- 一種電子構件封裝,包括: 重新分配層,包括絕緣層、安置於所述絕緣層上的導電圖案、以及通路,所述通路在穿透過所述絕緣層的同時連接至所述導電圖案;以及 電子構件,安置於所述重新分配層上, 其中在垂直於所述電子構件與所述重新分配層的堆疊方向的平面中所述通路的與連接所述通路的中心和所述電子構件的中心的第一線交叉的兩個邊緣點之間的距離短於在垂直於所述堆疊方向的所述平面中與穿過所述通路的所述中心的任何其他線相交的兩個邊緣點之間的距離。
- 如申請專利範圍第31項所述的電子構件封裝,其中所述通路連接至所述電子構件的安置於所述電子構件的最外隅角處的電極焊墊。
- 如申請專利範圍第31項所述的電子構件封裝,其中所述通路連接至所述電子構件的安置於所述電子構件的最外隅角部分處的電極焊墊。
- 如申請專利範圍第31項所述的電子構件封裝,其中所述通路連接至所述電子構件的位於所述電子構件的最外表面處的電極焊墊。
- 如申請專利範圍第31項所述的電子構件封裝,其中所述通路連接至所述電子構件的安置於所述電子構件的外側部分的隅角部分處的電極焊墊。
- 如申請專利範圍第31項所述的電子構件封裝,其中在垂直於所述堆疊方向的所述平面中,所述通路具有卵形形狀、矩形形狀、或六角形形狀。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2015-0174025 | 2015-12-08 | ||
KR1020150174025A KR102109569B1 (ko) | 2015-12-08 | 2015-12-08 | 전자부품 패키지 및 이를 포함하는 전자기기 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201721776A true TW201721776A (zh) | 2017-06-16 |
TWI683377B TWI683377B (zh) | 2020-01-21 |
Family
ID=58799819
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW107126237A TWI702662B (zh) | 2015-12-08 | 2016-07-13 | 電子構件封裝以及包含該封裝的電子裝置 |
TW105121976A TWI683377B (zh) | 2015-12-08 | 2016-07-13 | 電子構件封裝以及包含該封裝的電子裝置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW107126237A TWI702662B (zh) | 2015-12-08 | 2016-07-13 | 電子構件封裝以及包含該封裝的電子裝置 |
Country Status (4)
Country | Link |
---|---|
US (2) | US10032697B2 (zh) |
JP (1) | JP6471985B2 (zh) |
KR (1) | KR102109569B1 (zh) |
TW (2) | TWI702662B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10672727B2 (en) | 2018-01-02 | 2020-06-02 | Samsung Electronics Co., Ltd. | Semiconductor package providing protection from electrical noise |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102109569B1 (ko) * | 2015-12-08 | 2020-05-12 | 삼성전자주식회사 | 전자부품 패키지 및 이를 포함하는 전자기기 |
US10600748B2 (en) | 2016-06-20 | 2020-03-24 | Samsung Electronics Co., Ltd. | Fan-out semiconductor package |
US9836095B1 (en) * | 2016-09-30 | 2017-12-05 | Intel Corporation | Microelectronic device package electromagnetic shield |
JP6907765B2 (ja) * | 2017-07-04 | 2021-07-21 | 昭和電工マテリアルズ株式会社 | ファンアウト・ウエハレベルパッケージの仮固定方法 |
US10553527B2 (en) | 2017-09-12 | 2020-02-04 | Advanced Semiconductor Engineering, Inc. | Substrate and semiconductor device package |
KR20190082605A (ko) * | 2018-01-02 | 2019-07-10 | 삼성전자주식회사 | 반도체 패키지 |
KR102039711B1 (ko) * | 2018-03-13 | 2019-11-01 | 삼성전자주식회사 | 팬-아웃 부품 패키지 |
KR102556703B1 (ko) * | 2018-05-30 | 2023-07-18 | 삼성전기주식회사 | 패키지 기판 및 그 제조방법 |
KR102574410B1 (ko) * | 2018-11-27 | 2023-09-04 | 삼성전기주식회사 | 하이브리드 인터포저 및 이를 구비한 반도체 패키지 |
CN111341750B (zh) * | 2018-12-19 | 2024-03-01 | 奥特斯奥地利科技与系统技术有限公司 | 包括有导电基部结构的部件承载件及制造方法 |
KR102601583B1 (ko) | 2019-05-13 | 2023-11-13 | 삼성전자주식회사 | 반도체 패키지 |
KR102494920B1 (ko) * | 2019-05-21 | 2023-02-02 | 삼성전자주식회사 | 반도체 패키지 |
US11164837B1 (en) * | 2020-05-20 | 2021-11-02 | Micron Technology, Inc. | Semiconductor device packages with angled pillars for decreasing stress |
KR20220117583A (ko) * | 2021-02-17 | 2022-08-24 | 엘지이노텍 주식회사 | 회로기판 및 이를 포함하는 패키지 기판 |
US11710690B2 (en) * | 2021-04-19 | 2023-07-25 | Unimicron Technology Corp. | Package structure and manufacturing method thereof |
TWI758167B (zh) * | 2021-04-21 | 2022-03-11 | 欣興電子股份有限公司 | 封裝結構及其製作方法 |
US11682612B2 (en) | 2021-04-21 | 2023-06-20 | Unimicron Technology Corp. | Package structure and manufacturing method thereof |
US20230066375A1 (en) * | 2021-08-26 | 2023-03-02 | Micron Technology, Inc. | Apparatus including direct-contact heat paths and methods of manufacturing the same |
WO2023163043A1 (ja) * | 2022-02-28 | 2023-08-31 | 京セラ株式会社 | 配線基板 |
TWI848498B (zh) * | 2022-12-30 | 2024-07-11 | 万閎企業有限公司 | 具覆晶式晶片的晶片封裝結構 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000151111A (ja) | 1998-08-31 | 2000-05-30 | Toppan Printing Co Ltd | 半導体装置用基板 |
JP2002064274A (ja) | 2000-08-21 | 2002-02-28 | Toppan Printing Co Ltd | ビアホール構造とその形成方法およびこれを用いた多層配線基板 |
KR100348820B1 (ko) | 2000-12-28 | 2002-08-17 | 삼성전자 주식회사 | 고속 반도체 칩 패키지 및 이에 사용되는 기판 |
JP4818005B2 (ja) | 2006-07-14 | 2011-11-16 | Okiセミコンダクタ株式会社 | 半導体装置及びその製造方法 |
US20090278263A1 (en) * | 2008-05-09 | 2009-11-12 | Texas Instruments Incorporated | Reliability wcsp layouts |
KR101067106B1 (ko) | 2008-05-14 | 2011-09-22 | 삼성전기주식회사 | 웨이퍼 레벨 패키지 및 그 제조방법 |
JP2010092930A (ja) * | 2008-10-03 | 2010-04-22 | Fujikura Ltd | 半導体装置およびその製造方法 |
US8378466B2 (en) | 2009-11-19 | 2013-02-19 | Advanced Semiconductor Engineering, Inc. | Wafer-level semiconductor device packages with electromagnetic interference shielding |
US8884431B2 (en) * | 2011-09-09 | 2014-11-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaging methods and structures for semiconductor devices |
US8304867B2 (en) | 2010-11-01 | 2012-11-06 | Texas Instruments Incorporated | Crack arrest vias for IC devices |
JP2011155313A (ja) * | 2011-05-18 | 2011-08-11 | Casio Computer Co Ltd | 半導体装置 |
JP5558595B2 (ja) | 2012-03-14 | 2014-07-23 | 株式会社東芝 | 半導体装置及び半導体装置の製造方法 |
US8810024B2 (en) | 2012-03-23 | 2014-08-19 | Stats Chippac Ltd. | Semiconductor method and device of forming a fan-out PoP device with PWB vertical interconnect units |
US9082780B2 (en) | 2012-03-23 | 2015-07-14 | Stats Chippac, Ltd. | Semiconductor device and method of forming a robust fan-out package including vertical interconnects and mechanical support layer |
US9842798B2 (en) | 2012-03-23 | 2017-12-12 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming a PoP device with embedded vertical interconnect units |
KR20130124858A (ko) * | 2012-05-07 | 2013-11-15 | 삼성전자주식회사 | 반도체 패키지 |
US9704780B2 (en) | 2012-12-11 | 2017-07-11 | STATS ChipPAC, Pte. Ltd. | Semiconductor device and method of forming low profile fan-out package with vertical interconnection units |
JP6102398B2 (ja) | 2013-03-26 | 2017-03-29 | セイコーエプソン株式会社 | 半導体装置 |
JP6275989B2 (ja) | 2013-10-11 | 2018-02-07 | 日本特殊陶業株式会社 | セラミック配線基板 |
US9165885B2 (en) * | 2013-12-30 | 2015-10-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Staggered via redistribution layer (RDL) for a package and a method for forming the same |
US9576926B2 (en) * | 2014-01-16 | 2017-02-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pad structure design in fan-out package |
US9786618B2 (en) * | 2015-11-16 | 2017-10-10 | Taiwan Semiconductor Manufacturing Company Ltd. | Semiconductor structure and manufacturing method thereof |
KR102109569B1 (ko) * | 2015-12-08 | 2020-05-12 | 삼성전자주식회사 | 전자부품 패키지 및 이를 포함하는 전자기기 |
-
2015
- 2015-12-08 KR KR1020150174025A patent/KR102109569B1/ko active IP Right Grant
-
2016
- 2016-07-06 US US15/203,006 patent/US10032697B2/en active Active
- 2016-07-11 JP JP2016137119A patent/JP6471985B2/ja active Active
- 2016-07-13 TW TW107126237A patent/TWI702662B/zh active
- 2016-07-13 TW TW105121976A patent/TWI683377B/zh active
-
2018
- 2018-04-17 US US15/955,178 patent/US20180233432A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10672727B2 (en) | 2018-01-02 | 2020-06-02 | Samsung Electronics Co., Ltd. | Semiconductor package providing protection from electrical noise |
TWI712112B (zh) * | 2018-01-02 | 2020-12-01 | 南韓商三星電子股份有限公司 | 半導體封裝 |
Also Published As
Publication number | Publication date |
---|---|
TWI683377B (zh) | 2020-01-21 |
JP2017108099A (ja) | 2017-06-15 |
US10032697B2 (en) | 2018-07-24 |
KR102109569B1 (ko) | 2020-05-12 |
US20170162527A1 (en) | 2017-06-08 |
US20180233432A1 (en) | 2018-08-16 |
JP6471985B2 (ja) | 2019-02-20 |
TW201841269A (zh) | 2018-11-16 |
TWI702662B (zh) | 2020-08-21 |
KR20170067393A (ko) | 2017-06-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI702662B (zh) | 電子構件封裝以及包含該封裝的電子裝置 | |
US11626364B2 (en) | Fan-out semiconductor package and electronic device including the same | |
US11121066B2 (en) | Fan-out semiconductor package | |
US10770418B2 (en) | Fan-out semiconductor package | |
TWI746918B (zh) | 扇出型半導體封裝及其製造方法 | |
US9929117B2 (en) | Electronic component package and electronic device including the same | |
US10818621B2 (en) | Fan-out semiconductor package | |
TWI712131B (zh) | 扇出型半導體封裝 | |
TW201709777A (zh) | 扇出半導體封裝及其製造方法 | |
TWI669803B (zh) | 扇出型半導體封裝 | |
TWI712112B (zh) | 半導體封裝 | |
TW201824468A (zh) | 扇出型半導體封裝 |