TW201708897A - 光照射裝置 - Google Patents

光照射裝置 Download PDF

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Publication number
TW201708897A
TW201708897A TW105106149A TW105106149A TW201708897A TW 201708897 A TW201708897 A TW 201708897A TW 105106149 A TW105106149 A TW 105106149A TW 105106149 A TW105106149 A TW 105106149A TW 201708897 A TW201708897 A TW 201708897A
Authority
TW
Taiwan
Prior art keywords
workpiece
light irradiation
irradiation device
holding
light
Prior art date
Application number
TW105106149A
Other languages
English (en)
Chinese (zh)
Inventor
Yohei NAWAKI
Kentaro Nomoto
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW201708897A publication Critical patent/TW201708897A/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW105106149A 2015-04-02 2016-03-01 光照射裝置 TW201708897A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015075982A JP5983810B1 (ja) 2015-04-02 2015-04-02 光照射装置

Publications (1)

Publication Number Publication Date
TW201708897A true TW201708897A (zh) 2017-03-01

Family

ID=56843266

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105106149A TW201708897A (zh) 2015-04-02 2016-03-01 光照射裝置

Country Status (4)

Country Link
JP (1) JP5983810B1 (ja)
KR (1) KR20160118943A (ja)
CN (1) CN205539851U (ja)
TW (1) TW201708897A (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019123517A1 (ja) * 2017-12-18 2019-06-27 株式会社Ｆｕｊｉ 作業装置及びその制御方法
CN108594539B (zh) * 2018-03-12 2021-09-17 昆山龙腾光电股份有限公司 配向方法与配向系统
CN108761926A (zh) * 2018-05-09 2018-11-06 深圳市华星光电技术有限公司 配向微观检测设备及配向检测方法
JP7342680B2 (ja) * 2019-12-18 2023-09-12 ウシオ電機株式会社 光照射装置および光照射方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05344105A (ja) 1992-06-08 1993-12-24 Nippon Telegr & Teleph Corp <Ntt> 誤り除去通信方法
JP2009085865A (ja) * 2007-10-02 2009-04-23 Olympus Corp 基板検査装置
JP4495752B2 (ja) * 2007-11-06 2010-07-07 東京エレクトロン株式会社 基板処理装置及び塗布装置
JP5344105B1 (ja) * 2013-03-08 2013-11-20 ウシオ電機株式会社 光配向用偏光光照射装置及び光配向用偏光光照射方法
KR102222005B1 (ko) * 2014-01-09 2021-03-04 삼성디스플레이 주식회사 노광 장치 및 이를 이용한 노광 방법
JP2014123769A (ja) 2014-03-06 2014-07-03 Tokyo Ohka Kogyo Co Ltd 紫外線照射装置および紫外線照射方法
JP5734494B1 (ja) * 2014-05-29 2015-06-17 株式会社飯沼ゲージ製作所 光配向処理装置

Also Published As

Publication number Publication date
KR20160118943A (ko) 2016-10-12
JP5983810B1 (ja) 2016-09-06
CN205539851U (zh) 2016-08-31
JP2016197140A (ja) 2016-11-24

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