TW201704858A - Photo-sensitive resin composition, dry film, and printed wiring board - Google Patents

Photo-sensitive resin composition, dry film, and printed wiring board Download PDF

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TW201704858A
TW201704858A TW105102679A TW105102679A TW201704858A TW 201704858 A TW201704858 A TW 201704858A TW 105102679 A TW105102679 A TW 105102679A TW 105102679 A TW105102679 A TW 105102679A TW 201704858 A TW201704858 A TW 201704858A
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Taiwan
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resin composition
photosensitive resin
carboxyl group
group
film
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TW105102679A
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Chinese (zh)
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TWI656403B (en
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樋口倫也
橋本壯一
丸澤尙
田中信也
荒井貴
川里浩信
稻葉真司
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互應化學工業股份有限公司
新日鐵住金化學股份有限公司
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Priority claimed from JP2015014500A external-priority patent/JP6767090B2/en
Priority claimed from JP2016008984A external-priority patent/JP6391121B2/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits

Abstract

A light-sensitive resin composition contains a carboxyl-group-containing resin (A), an unsaturated compound (B), a photopolymerization initiator (C), an epoxy compound (D), and a component (E) containing at least one compound selected from the group comprising melamine and melamine derivatives. The carboxyl-group-containing resin (A) contains a carboxyl-group-containing resin (A1) having a bisphenol fluorene skeleton.

Description

感光性樹脂組成物、乾膜及印刷線路板(一) Photosensitive resin composition, dry film and printed wiring board (1)

本發明有關一種感光性樹脂組成物、乾膜、具備抗焊劑層之印刷線路板、及具備層間絕緣層之印刷線路板,該乾膜是前述感光性樹脂組成物的乾燥物,該抗焊劑層包含前述感光性樹脂組成物的硬化物,而該層間絕緣層包含前述感光性樹脂組成物的硬化物。 The present invention relates to a photosensitive resin composition, a dry film, a printed wiring board having a solder resist layer, and a printed wiring board having an interlayer insulating layer, wherein the dry film is a dried material of the photosensitive resin composition, and the solder resist layer A cured product of the photosensitive resin composition is contained, and the interlayer insulating layer contains a cured product of the photosensitive resin composition.

過去使用電絕緣性的樹脂組成物,用以形成印刷線路板的抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層等電絕緣性層。這樣的樹脂組成物,例如是感光性樹脂組成物。 In the past, an electrically insulating resin composition was used to form an electrically insulating layer such as a solder resist layer, a plating resist layer, an etch resist layer, and an interlayer insulating layer of a printed wiring board. Such a resin composition is, for example, a photosensitive resin composition.

已提案在感光性樹脂組成物中調配一種含羧基樹脂,用以對由感光性樹脂組成物所形成之層賦予較高的耐熱性,該含羧基樹脂具有雙酚茀骨架。例如日本專利第4508929號揭示使用一種具備茀骨架之含羧基樹脂,該含羧基樹脂是使茀環氧(甲基)丙烯酸酯與多元羧酸或其酸酐進行反應而獲得。 It has been proposed to formulate a carboxyl group-containing resin in a photosensitive resin composition for imparting high heat resistance to a layer formed of a photosensitive resin composition having a bisphenol fluorene skeleton. For example, Japanese Patent No. 4,508, 929 discloses the use of a carboxyl group-containing resin having an anthracene skeleton obtained by reacting a fluorene epoxy (meth) acrylate with a polyvalent carboxylic acid or an anhydride thereof.

有時會在由感光性樹脂組成物的硬化物所構成之層上形成鍍覆層,該感光性樹脂組成物含有具備雙酚茀骨架之含羧基樹脂。在硬化物上形成這樣的鍍覆層前,有時會以例如含有過錳酸鉀之氧化劑,來對硬化物之層的表面進行粗糙化,藉此使硬化物之層與鍍覆層的黏合性提升。然而,若利用前述氧化劑來對硬化物之層進行處理,則硬化物之層的表面會被腐蝕,該層的厚度會變薄。雖然具備雙酚茀骨架之含羧基樹脂,對於前述氧化劑具有較高的耐性,但是即便感光性樹脂組成物含有該含羧基樹脂,有時仍會由於前述氧化劑導致硬化物之層的厚度變薄。 A plating layer may be formed on the layer composed of the cured product of the photosensitive resin composition, and the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenol fluorene skeleton. Before forming such a plating layer on the cured product, the surface of the layer of the cured product may be roughened by, for example, an oxidizing agent containing potassium permanganate, thereby bonding the layer of the cured product to the plating layer. Sexual improvement. However, if the oxidizing agent is used to treat the layer of the cured product, the surface of the layer of the cured product is corroded, and the thickness of the layer is thinned. Although the carboxyl group-containing resin having a bisphenol fluorene skeleton has high resistance to the oxidizing agent, even if the photosensitive resin composition contains the carboxyl group-containing resin, the thickness of the layer of the cured product may be reduced due to the oxidizing agent.

具備雙酚茀骨架之含羧基樹脂,有時會使感光性樹脂組成物的顯影性下降。若為了提升顯影性而減少含羧基樹脂的分子量,則由硬化物所構成之層對於前述氧化劑的耐性會下降,會由於前述氧化劑導致硬化物之層的厚度進一步變薄。因此,難以藉由前述氧化劑來使由硬化物所構成之層的表面粗糙化,用以使硬化物與鍍覆層的黏合性提升。 The carboxyl group-containing resin having a bisphenol fluorene skeleton may lower the developability of the photosensitive resin composition. When the molecular weight of the carboxyl group-containing resin is reduced in order to improve the developability, the resistance of the layer composed of the cured product to the oxidizing agent is lowered, and the thickness of the layer of the cured product is further reduced by the oxidizing agent. Therefore, it is difficult to roughen the surface of the layer composed of the cured material by the oxidizing agent, so as to improve the adhesion between the cured product and the plating layer.

本發明的目的在於提供一種感光性樹脂組成物、乾膜、具備抗焊劑層之印刷線路板、及具備層間絕緣層之印刷線路板,該乾膜是前述感光性樹脂組成物的乾燥物,該抗焊劑層包含前述感光性樹脂組成物的硬化物,而該層間絕緣層包含前述感光性樹脂組成物的硬化物,並 且,即便該感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得優異的顯影性,而且在鍍覆處理的前步驟中,能夠使硬化物之層的厚度不易由於氧化劑導致變薄,並且能夠以氧化劑來對硬化物的表面進行粗糙化。 An object of the present invention is to provide a photosensitive resin composition, a dry film, a printed wiring board having a solder resist layer, and a printed wiring board including an interlayer insulating layer, wherein the dry film is a dried product of the photosensitive resin composition, The solder resist layer contains a cured product of the photosensitive resin composition, and the interlayer insulating layer contains a cured product of the photosensitive resin composition described above, and Further, even if the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, excellent developability can be obtained, and in the pre-step of the plating treatment, the thickness of the layer of the cured product can be hardly caused by the oxidizing agent. It is thinned and the surface of the cured product can be roughened with an oxidizing agent.

本發明的其中一態樣的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);環氧化合物(D);及,成分(E),其含有選自三聚氰胺和三聚氰胺衍生物的群組中的至少一種化合物;並且,前述含羧基樹脂(A)含有含羧基樹脂(A1),該含羧基樹脂(A1)具有雙酚茀骨架。 A photosensitive resin composition of one aspect of the present invention, comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C); an epoxy compound (D); and, component (E), which contains at least one compound selected from the group consisting of melamine and a melamine derivative; and the carboxyl group-containing resin (A) contains a carboxyl group-containing resin ( A1), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton.

本發明的其中一態樣的乾膜,是前述感光性樹脂組成物的乾燥物。 A dry film of one aspect of the present invention is a dried product of the photosensitive resin composition.

本發明的其中一態樣的印刷線路板,其具備層間絕緣層,該層間絕緣層包含前述感光性樹脂組成物。 A printed wiring board according to an aspect of the present invention includes an interlayer insulating layer containing the photosensitive resin composition.

本發明的其中一態樣的印刷線路板,其具備抗焊劑層,該抗焊劑層包含前述感光性樹脂組成物。 A printed wiring board according to an aspect of the present invention includes a solder resist layer containing the photosensitive resin composition.

根據本發明的其中一態樣,即便感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得優異的顯影性,而且在鍍覆處理的前步驟中,能夠使硬化物之層的厚度不易由於氧化劑導致變薄,並且能夠以氧化劑來對硬化物的表面進行粗糙化。 According to one aspect of the present invention, even if the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, excellent developability can be obtained, and in the pre-step of the plating treatment, the layer of the cured product can be obtained. The thickness is not easily thinned by the oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.

1‧‧‧芯材 1‧‧‧ core material

2‧‧‧絕緣層 2‧‧‧Insulation

3‧‧‧導體線路(第一導體線路) 3‧‧‧Conductor line (first conductor line)

4‧‧‧皮膜 4‧‧ ‧ film

5‧‧‧未曝光部分 5‧‧‧Unexposed parts

6‧‧‧孔 6‧‧‧ hole

7‧‧‧層間絕緣層 7‧‧‧Interlayer insulation

8‧‧‧第二導體線路 8‧‧‧Second conductor line

9‧‧‧穿孔鍍覆 9‧‧‧Perforated plating

10‧‧‧貫穿孔 10‧‧‧through holes

11‧‧‧印刷線路板 11‧‧‧Printed circuit board

第1圖A至第1圖E是表示本發明的其中一實施形態的多層印刷線路板的製造步驟之剖面圖。 Fig. 1 to Fig. 1E are cross-sectional views showing the steps of manufacturing a multilayer printed wiring board according to an embodiment of the present invention.

以下,說明本發明的其中一實施形態。再者,在以下說明中,「(甲基)丙烯酸」意指「丙烯酸」與「甲基丙烯酸」之中的至少其中一者。例如,(甲基)丙烯酸酯意指丙烯酸酯與甲基丙烯酸酯之中的至少其中一者。 Hereinafter, one embodiment of the present invention will be described. In the following description, "(meth)acrylic acid" means at least one of "acrylic acid" and "methacrylic acid". For example, (meth) acrylate means at least one of acrylate and methacrylate.

本實施形態的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);環氧化合物(D);及,成分(E)。 The photosensitive resin composition of the present embodiment, comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C); Epoxy compound (D); and, component (E).

含羧基樹脂(A),其含有含羧基樹脂(A1),該含羧基樹脂(A1)具有雙酚茀骨架。 The carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) having a bisphenol fluorene skeleton.

含羧基樹脂(A1),例如是中間體與酸酐之反應物,該中間體是環氧化合物(a1)與含不飽和基羧酸(a2)之反應物。環氧化合物(a1)具有雙酚茀骨架,該雙酚茀骨架是以下述式(1)來表示,且式(1)中R1~R8各自獨立地為氫、碳數1~5的烷基或鹵素。 The carboxyl group-containing resin (A1) is, for example, a reaction product of an intermediate and an acid anhydride, and the intermediate is a reaction product of an epoxy compound (a1) and an unsaturated group-containing carboxylic acid (a2). The epoxy compound (a1) has a bisphenol fluorene skeleton, and the bisphenol fluorene skeleton is represented by the following formula (1), and in the formula (1), R 1 to R 8 are each independently hydrogen and have a carbon number of 1 to 5. Alkyl or halogen.

含羧基樹脂(A1),是藉由下述方式來合成:使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,並使藉此獲得的中間體與酸酐進行反應。 The carboxyl group-containing resin (A1) is synthesized by reacting the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2), and reacting the intermediate obtained thereby with an acid anhydride.

式(1)中的R1~R8,各自可以是氫,亦可以是碳數1~5的烷基或鹵素。這是因為下述緣故:即便芳香環中的氫被低分子量的烷基或鹵素取代,也不會對含羧基樹脂(A1)有不良影響,反而有時也會提升包含了含羧基樹脂(A1)之感光性樹脂組成物的硬化物的耐熱性或阻燃性。 R 1 to R 8 in the formula (1) may each be hydrogen or may be an alkyl group having 1 to 5 carbon atoms or a halogen. This is because, even if the hydrogen in the aromatic ring is replaced by a low molecular weight alkyl group or a halogen, the carboxyl group-containing resin (A1) is not adversely affected, and the carboxyl group-containing resin (A1) is sometimes promoted. The heat resistance or flame retardancy of the cured product of the photosensitive resin composition.

成分(E),含有選自三聚氰胺和三聚氰胺衍生物的群組中的至少一種化合物。藉此,即便感光性樹脂組成物含有雙酚茀骨架,也能夠使感光性樹脂組成物的硬化物明顯地不易被含有過錳酸鉀之氧化劑腐蝕。亦即,藉由感光性樹脂組成物含有成分(E),能夠對感光性樹脂組成物的硬化物賦予對於前述氧化劑的耐性。藉此,在鍍覆處理的前步驟中,能夠使硬化物之層的厚度不易由於氧化劑導致變薄,並且能夠以氧化劑來對硬化物的表面進行粗糙化,用以使硬化物與由銅或金等所構成的鍍覆層的黏合性提升。 Component (E) contains at least one compound selected from the group consisting of melamine and melamine derivatives. Thereby, even if the photosensitive resin composition contains a bisphenol fluorene skeleton, the cured product of the photosensitive resin composition can be remarkably hardly corroded by the oxidizing agent containing potassium permanganate. In other words, the photosensitive resin composition-containing component (E) can impart resistance to the oxidizing agent to the cured product of the photosensitive resin composition. Thereby, in the pre-step of the plating treatment, the thickness of the layer of the cured product can be made less difficult to be thinned by the oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent to make the hardened material and the copper or The adhesion of the plating layer composed of gold or the like is improved.

在本實施形態中,成分(E)可僅含有三聚氰胺,亦可僅含有三聚氰胺衍生物,亦可含有三聚氰胺和三聚氰胺衍生物。三聚氰胺,是2,4,6-三胺基-1,3,5-三,且可自一般市售的化合物取得。又,三聚氰胺衍生物, 只要是於其一分子中具有1個三嗪環與胺基之化合物即可。作為三聚氰胺衍生物,可列舉例如:胍胺(guanamine);甲基胍胺;苯基胍胺;2,4-二胺基-6-甲基丙烯醯基氧乙基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪/異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯基氧乙基-S-三嗪/異三聚氰酸加成物等S-三嗪衍生物;以及,三聚氰胺-四氫鄰苯二甲酸鹽等三聚氰胺與酸酐之反應物。作為三聚氰胺衍生物的更詳細的具體例,可列舉:四國化成工業股份有限公司的產品名VD-1、產品名VD-2、產品名VD-3。三聚氰胺衍生物,較佳是於其一分子中具有1個三嗪環與2個以上胺基之化合物。在該2個以上胺基中,至少1個是不含-NH2基之取代基。亦即,三聚氰胺衍生物不包含三聚氰胺。在這樣的情形下,分散在感光性樹脂組成物中的三聚氰胺衍生物,能夠與金屬元素進行配位鍵結,該金屬元素包含在鍍覆層或芯材的導體線路中,並且位於與感光性樹脂組成物的接觸面。因此,能夠使感光性樹脂組成物的黏合性提升。作為前述金屬元素,可列舉例如:金、銀、銅、鎳。 In the present embodiment, the component (E) may contain only melamine, may contain only a melamine derivative, or may contain a melamine and a melamine derivative. Melamine is 2,4,6-triamino-1,3,5-three And can be obtained from generally commercially available compounds. Further, the melamine derivative may be a compound having one triazine ring and an amine group in one molecule thereof. As the melamine derivative, for example, guanamine; methyl decylamine; phenyl decylamine; 2,4-diamino-6-methylpropenyl oxyethyl-S-triazine, 2 -vinyl-4,6-diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine/isocyanuric acid adduct, 2,4-diamine S-triazine derivatives such as -6-methacryloyloxyethyl-S-triazine/isocyanuric acid addition; and melamine and anhydride such as melamine-tetrahydrophthalate The reactants. More specific examples of the melamine derivative include the product name VD-1 of Shikoku Chemical Industry Co., Ltd., the product name VD-2, and the product name VD-3. The melamine derivative is preferably a compound having one triazine ring and two or more amine groups in one molecule thereof. At least one of the two or more amine groups is a substituent having no -NH 2 group. That is, the melamine derivative does not contain melamine. In such a case, the melamine derivative dispersed in the photosensitive resin composition can be coordinate-bonded to a metal element contained in a conductor layer of a plating layer or a core material, and is located in photosensitivity. The contact surface of the resin composition. Therefore, the adhesiveness of the photosensitive resin composition can be improved. Examples of the metal element include gold, silver, copper, and nickel.

當成分(E)能夠溶解或難以溶解於感光性樹脂組成物中時,只要使平均粒徑20μm以下(較佳是15μm以下)的成分(E),在感光性樹脂組成物中分散即可。此時,成分(E)均勻地分散在感光性樹脂組成物中,因此能夠使成分(E)進一步易於與前述金屬元素進行配位鍵 結。藉此,能夠使感光性樹脂組成物的黏合性進一步提升。成分(E)的平均粒徑的下限,並無特別限定,可設成0.01μm以上。再者,成分(E)的平均粒徑,是在使成分(E)分散於未硬化的感光性樹脂組成物中的狀態下,藉由雷射繞射式粒度分佈測定裝置,設為D50來進行測定。 When the component (E) is soluble or difficult to dissolve in the photosensitive resin composition, the component (E) having an average particle diameter of 20 μm or less (preferably 15 μm or less) may be dispersed in the photosensitive resin composition. At this time, since the component (E) is uniformly dispersed in the photosensitive resin composition, the component (E) can be further easily coordinate-bonded to the metal element. Thereby, the adhesiveness of the photosensitive resin composition can be further improved. The lower limit of the average particle diameter of the component (E) is not particularly limited, and may be set to 0.01 μm or more. In addition, the average particle diameter of the component (E) is set to D 50 by a laser diffraction type particle size distribution measuring apparatus in a state in which the component (E) is dispersed in the uncured photosensitive resin composition. To carry out the measurement.

更具體地說明含羧基樹脂(A1)。為了合成含羧基樹脂(A1),首先使環氧化合物(a1)的至少一部分的環氧基(參照式(2)),與含不飽和基羧酸(a2)進行反應,藉此合成中間體。中間體具有下述式(3)所示的結構(S3),該結構(S3)是由環氧基與含不飽和基羧酸(a2)的開環加成反應所產生。亦即,中間體在結構(S3)中具有二級羥基,該二級羥基是由環氧基與含不飽和基羧酸(a2)的開環加成反應所產生。在式(3)中,A是含不飽和基羧酸殘基。 The carboxyl group-containing resin (A1) is more specifically described. In order to synthesize the carboxyl group-containing resin (A1), first, an epoxy group (refer to the formula (2)) of at least a part of the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2) to thereby synthesize an intermediate. . The intermediate has a structure (S3) represented by the following formula (3) which is produced by a ring-opening addition reaction of an epoxy group with an unsaturated group-containing carboxylic acid (a2). That is, the intermediate has a secondary hydroxyl group in the structure (S3) which is produced by a ring-opening addition reaction of an epoxy group with an unsaturated group-containing carboxylic acid (a2). In the formula (3), A is an unsaturated group-containing carboxylic acid residue.

繼而,使中間體中的二級羥基與酸酐進行反應。藉此,能夠合成含羧基樹脂(A1)。 The secondary hydroxyl group in the intermediate is then reacted with an anhydride. Thereby, the carboxyl group-containing resin (A1) can be synthesized.

酸酐可含有酸二酐(a3)和酸單酐(Monoanhydride)(a4)之中的至少其中一種。當酸酐含有酸單酐(a4)時,含羧基樹脂(A1)具有以式(1)來表示的雙酚茀骨架(S1)與下述式(4)所示的結構(S4)。 The acid anhydride may contain at least one of acid dianhydride (a3) and monoanhydride (a4). When the acid anhydride contains the acid monoanhydride (a4), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1) represented by the formula (1) and a structure (S4) represented by the following formula (4).

結構(S4)是藉由中間體的結構(S3)中的二級羥基與酸單酐(a4)中的酸酐基進行反應來產生。在式(4)中,A是含不飽和基羧酸殘基,B是酸單酐殘基。 The structure (S4) is produced by reacting a secondary hydroxyl group in the structure (S3) of the intermediate with an acid anhydride group in the acid monoanhydride (a4). In the formula (4), A is an unsaturated group-containing carboxylic acid residue, and B is an acid mono-anhydride residue.

當酸酐含有酸二酐(a3)時,含羧基樹脂(A1)具有雙酚茀骨架(S1)與下述式(5)所示的結構(S5)。 When the acid anhydride contains the acid dianhydride (a3), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1) and a structure (S5) represented by the following formula (5).

結構(S5),是藉由酸二酐(a3)中的2個酸酐基分別與中間體中的2個二級羥基進行反應來產生。亦即,結構(S5),是藉由酸二酐(a3)將2個二級羥基彼此進行交聯來生成。再者,可能會有:存在於1個分子的中間體中的2個二級羥基彼此被交聯的情形、與分別存在於2個分子的中間體中的2個二級羥基彼此被交聯的情形。若分別存在於2個分子的中間體中的2個二級羥基彼此被交聯時,則分子量會增加。在式(5)中,A是含不飽和基羧酸殘基,D是酸二酐殘基。 The structure (S5) is produced by reacting two acid anhydride groups in the acid dianhydride (a3) with two secondary hydroxyl groups in the intermediate. That is, the structure (S5) is produced by crosslinking two secondary hydroxyl groups with each other by acid dianhydride (a3). Furthermore, there may be a case where two secondary hydroxyl groups present in one molecule of the intermediate are cross-linked to each other, and two secondary hydroxyl groups respectively present in the intermediate of two molecules are cross-linked to each other. The situation. If two secondary hydroxyl groups respectively present in the intermediate of two molecules are cross-linked to each other, the molecular weight increases. In the formula (5), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.

能夠使中間體中的二級羥基與酸酐進行反應,來獲得含羧基樹脂(A1)。當酸酐含有酸二酐(a3)和酸單酐(a4)時,使中間體中的二級羥基中的一部份與酸二酐(a3)進行反應,且使中間體中的二級羥基中的另一部份與酸單酐(a4)進行反應。藉此,能夠合成含羧基樹脂(A1)。此時,含羧基樹脂(A1)具有雙酚茀骨架(S1)、結構(S4)及結構(S5)。 The secondary hydroxyl group in the intermediate can be reacted with an acid anhydride to obtain a carboxyl group-containing resin (A1). When the acid anhydride contains acid dianhydride (a3) and acid monoanhydride (a4), a part of the secondary hydroxyl group in the intermediate is reacted with the acid dianhydride (a3), and the secondary hydroxyl group in the intermediate is made. Another part of the reaction with the acid monoanhydride (a4). Thereby, the carboxyl group-containing resin (A1) can be synthesized. At this time, the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1), a structure (S4), and a structure (S5).

含羧基樹脂(A1)亦可能進一步具有以下述式(6)來表示的結構(S6)。結構(S6),是藉由下述方式來產生:在酸二酐(a3)中的2個酸酐基中,僅其中1個酸酐基與中間體中的二級羥基進行反應。在式(6)中,A是含不飽和基羧酸殘基,D是酸二酐殘基。 The carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6). The structure (S6) is produced by reacting only one of the two acid anhydride groups in the acid dianhydride (a3) with the secondary hydroxyl group in the intermediate. In the formula (6), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.

在合成中間體時,當環氧化合物(a1)中的一部分環氧基未進行反應而殘留時,含羧基樹脂(A1)可能具有如式(2)所示的結構(S2)亦即環氧基。又,當中間體中的一部分結構(S3)是未進行反應而殘留時,含羧基樹脂(A1)亦可能具有結構(S3)。 When the intermediate is synthesized, when a part of the epoxy group in the epoxy compound (a1) is left unreacted, the carboxyl group-containing resin (A1) may have a structure (S2) as shown in the formula (2). base. Further, when a part of the structure (S3) in the intermediate remains without reaction, the carboxyl group-containing resin (A1) may have a structure (S3).

當酸酐含有酸二酐(a3)時,藉由將合成含羧基樹脂(A1)時的反應條件最佳化,來減少含羧基樹脂(A1)中的結構(S2)和結構(S6)的數量,或自含羧基樹脂(A1)大體上將結構(S2)和結構(S6)去除。 When the acid anhydride contains acid dianhydride (a3), the number of structures (S2) and structures (S6) in the carboxyl group-containing resin (A1) is reduced by optimizing the reaction conditions for synthesizing the carboxyl group-containing resin (A1). Or the structure (S2) and the structure (S6) are substantially removed from the carboxyl group-containing resin (A1).

如上所述,含羧基樹脂(A1),可具有雙酚茀骨架(S1),且當酸酐含有酸單酐(a4)時可具有結構(S4),而當酸酐含有酸二酐(a3)時可具有結構(S5)。進一步,當酸酐含有酸單酐(a4)時,含羧基樹脂(A1),有時具有結構(S2)與結構(S3)之中的至少其中一種。又,當酸酐含有酸二酐(a3)時,含羧基樹脂(A1),有時具有結構(S2)與結構(S6)之中的至少其中一種。又,進一步當酸酐含有酸單酐(a4)與酸二酐(a3)時,含羧基樹脂 (A1)有時具有(S2)、結構(S3)及結構(S6)之中的至少其中一種。 As described above, the carboxyl group-containing resin (A1) may have a bisphenol fluorene skeleton (S1), and may have a structure (S4) when the acid anhydride contains the acid monoanhydride (a4), and when the acid anhydride contains the acid dianhydride (a3) It may have a structure (S5). Further, when the acid anhydride contains the acid monoanhydride (a4), the carboxyl group-containing resin (A1) sometimes has at least one of the structure (S2) and the structure (S3). Further, when the acid anhydride contains the acid dianhydride (a3), the carboxyl group-containing resin (A1) may have at least one of the structure (S2) and the structure (S6). Further, when the acid anhydride contains the acid monoanhydride (a4) and the acid dianhydride (a3), the carboxyl group-containing resin (A1) sometimes has at least one of (S2), structure (S3), and structure (S6).

又,當環氧化合物(a1)本身具有二級羥基時,亦即,例如當後述式(7)中是n=1以上時,含羧基樹脂(A1),有時也會具有藉由環氧化合物(a1)中的二級羥基與酸酐進行反應來產生的結構。 Further, when the epoxy compound (a1) itself has a secondary hydroxyl group, that is, for example, when n=1 or more in the following formula (7), the carboxyl group-containing resin (A1) sometimes has an epoxy group. A structure produced by reacting a secondary hydroxyl group in the compound (a1) with an acid anhydride.

再者,上述含羧基樹脂(A1)的結構,是依據技術常識來合理類推而得,現實上則無法藉由分析來特定出含羧基樹脂(A1)的結構。其理由如下所述。當環氧化合物(a1)本身具有二級羥基時(例如當在式(7)中n為1以上時),根據環氧化合物(a1)中的二級羥基的數量不同,含羧基樹脂(A1)的結構會有很大變化。又,在中間體與酸二酐(a3)進行反應時,如上所述,可能會有於中間體的存在於1個分子中的2個二級羥基彼此被酸二酐(a3)交聯的情形、與於中間體的分別存在於2個分子中的2個二級羥基彼此被酸二酐(a3)交聯的情形。因此,最終獲得的含羧基樹脂(A1),包含了相互結構不同之複數分子,因而即便分析含羧基樹脂(A1),也無法特定出其結構。 Further, the structure of the carboxyl group-containing resin (A1) is rationally derived based on technical common sense, and in reality, the structure of the carboxyl group-containing resin (A1) cannot be specified by analysis. The reason is as follows. When the epoxy compound (a1) itself has a secondary hydroxyl group (for example, when n is 1 or more in the formula (7)), the carboxyl group-containing resin (A1) differs depending on the amount of the secondary hydroxyl group in the epoxy compound (a1). The structure of the ) will vary greatly. Further, when the intermediate is reacted with the acid dianhydride (a3), as described above, there may be a case where the two secondary hydroxyl groups present in one molecule of the intermediate are cross-linked by the acid dianhydride (a3). In the case, the two secondary hydroxyl groups present in the two molecules in the intermediate are crosslinked by the acid dianhydride (a3), respectively. Therefore, the carboxyl group-containing resin (A1) finally obtained contains a plurality of molecules having different structures from each other, and thus even if the carboxyl group-containing resin (A1) is analyzed, the structure cannot be specified.

含羧基樹脂(A1),因為其具有源自含不飽和基羧酸(a2)的乙烯性不飽和基,所以具有光反應性。因此,含羧基樹脂(A1)能夠對感光性樹脂組成物賦予感光性(具體而言是紫外線硬化性)。又,含羧基樹脂(A1),因為其具有源自酸酐的羧基,所以能夠對感光性樹脂組成 物賦予基於鹼性水溶液之顯影性,該鹼性水溶液含有鹼金屬鹽和鹼金屬氫氧化物之中的至少其中一者。進一步,當酸酐含有酸二酐(a3)時,含羧基樹脂(A1)的分子量,取決於藉由酸二酐(a3)來進行之架橋的數量。因此,能夠獲得酸價與分子量經適度地調整後之含羧基樹脂(A1)。當酸酐含有酸二酐(a3)和酸單酐(a4)時,藉由控制酸二酐(a3)和酸單酐(a4)的量、以及酸單酐(a4)相對於酸二酐(a3)的量,能夠容易獲得所期望的分子量和酸價之含羧基樹脂(A1)。 The carboxyl group-containing resin (A1) has photoreactivity because it has an ethylenically unsaturated group derived from the unsaturated group-containing carboxylic acid (a2). Therefore, the carboxyl group-containing resin (A1) can impart photosensitivity (specifically, ultraviolet curability) to the photosensitive resin composition. Further, the carboxyl group-containing resin (A1) can be composed of a photosensitive resin because it has a carboxyl group derived from an acid anhydride. The material imparts developability based on an aqueous alkaline solution containing at least one of an alkali metal salt and an alkali metal hydroxide. Further, when the acid anhydride contains the acid dianhydride (a3), the molecular weight of the carboxyl group-containing resin (A1) depends on the number of bridging by the acid dianhydride (a3). Therefore, the carboxyl group-containing resin (A1) whose acid value and molecular weight are appropriately adjusted can be obtained. When the acid anhydride contains the acid dianhydride (a3) and the acid monoanhydride (a4), by controlling the amounts of the acid dianhydride (a3) and the acid monoanhydride (a4), and the acid monoanhydride (a4) relative to the acid dianhydride ( The amount of a3) can easily obtain a carboxyl group-containing resin (A1) having a desired molecular weight and acid value.

含羧基樹脂(A1)的重量平均分子量,較佳是在700~10000的範圍內。若重量平均分子量是700以上,則能夠進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。又,若重量平均分子量是10000以下,則能夠特別提升感光性樹脂組成物的基於鹼性水溶液之顯影性。重量平均分子量,進一步較佳是在900~8000的範圍內,特佳是在1000~5000的範圍內。 The weight average molecular weight of the carboxyl group-containing resin (A1) is preferably in the range of 700 to 10,000. When the weight average molecular weight is 700 or more, the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. Moreover, when the weight average molecular weight is 10,000 or less, the developability by the alkaline aqueous solution of the photosensitive resin composition can be particularly improved. The weight average molecular weight is further preferably in the range of 900 to 8,000, particularly preferably in the range of 1,000 to 5,000.

含羧基樹脂(A1)的固體成分酸價,較佳是在60~140mgKOH/g的範圍內。此時,能夠特別提升感光性樹脂組成物的顯影性。固體成分酸價,更佳是在80~135mgKOH/g的範圍內,進一步較佳是在90~130mgKOH/g的範圍內。 The solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH/g. In this case, the developability of the photosensitive resin composition can be particularly improved. The solid content acid value is more preferably in the range of 80 to 135 mgKOH/g, still more preferably in the range of 90 to 130 mgKOH/g.

含羧基樹脂(A1)的重量平均分子量(Mw),是由藉由膠體滲透層析法(Gel Permeation Chromatography,GPC)所進行的分子量測定結果來進行計算。利用膠體滲透層析法的分子量測定,能夠以例如下述條件來實行。 The weight average molecular weight (Mw) of the carboxyl group-containing resin (A1) is determined by colloidal permeation chromatography (Gel Permeation) The results of the molecular weight measurement performed by Chromatography, GPC) were calculated. The molecular weight measurement by colloidal osmosis chromatography can be carried out, for example, under the following conditions.

GPC裝置:昭和電工公司製造,商品名:SHODEX SYSTEM 11;管柱:SHODEX KF-800P、KF-005、KF-003、KF-001之4管串聯;移動相:四氫呋喃(Tetrahydrofuran,THF);流量:1ml/分鐘;管柱溫度:45℃;偵測器:折射率(RI)偵測器;換算:聚苯乙烯。 GPC device: manufactured by Showa Denko, trade name: SHODEX SYSTEM 11; pipe column: SHODEX KF-800P, KF-005, KF-003, KF-001 4 tube series; mobile phase: Tetrahydrofuran (THF); flow : 1 ml / min; column temperature: 45 ° C; detector: refractive index (RI) detector; conversion: polystyrene.

詳細地說明含羧基樹脂(A1)的原料及合成含羧基樹脂(A1)時的反應條件。 The raw material of the carboxyl group-containing resin (A1) and the reaction conditions when the carboxyl group-containing resin (A1) is synthesized will be described in detail.

環氧化合物(a1),具有例如下述式(7)所示的結構(S7)。式(7)中的n,例如是在0~20的範圍內的數。為了使含羧基樹脂(A1)的分子量為適當的值,n的平均,特佳是在0~1的範圍內。若n的平均在0~1的範圍內,尤其是當酸酐含有酸二酐(a3)時,則容易抑制由於酸二酐(a3)的加成所導致的過量的分子量增加。 The epoxy compound (a1) has a structure (S7) represented by the following formula (7), for example. n in the formula (7) is, for example, a number in the range of 0 to 20. In order to make the molecular weight of the carboxyl group-containing resin (A1) an appropriate value, the average of n is particularly preferably in the range of 0 to 1. If the average of n is in the range of 0 to 1, especially when the acid anhydride contains acid dianhydride (a3), it is easy to suppress an excessive molecular weight increase due to the addition of the acid dianhydride (a3).

含不飽和羧酸(a2),可含有例如於一分子中僅具有1個乙烯性不飽和基之化合物。更具體而言,含不飽和基羧酸(a2),可含有例如選自由下述所組成之群組中的至少一種化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、巴豆酸、桂皮酸、琥珀酸單(2-丙烯醯基氧乙基)酯、琥珀酸單(2-甲基丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯、鄰苯二甲酸單(2-丙烯醯基氧丙基)酯、鄰苯二甲酸單(2-甲基丙烯醯基氧丙基)酯、馬來酸單(2-丙烯醯基氧乙基)酯、馬來酸單(2-甲基丙烯醯基氧乙基)酯、丙烯酸β-羧基乙酯、四氫鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、四氫鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯、六氫鄰苯二甲酸單(2-丙烯醯基氧乙基)酯、及六氫鄰苯二甲酸單(2-甲基丙烯醯基氧乙基)酯。含不飽和基羧酸(a2)較佳是含有丙烯酸。 The unsaturated carboxylic acid (a2) may contain, for example, a compound having only one ethylenically unsaturated group in one molecule. More specifically, the unsaturated group-containing carboxylic acid (a2) may contain, for example, at least one compound selected from the group consisting of acrylic acid, methacrylic acid, and ω-carboxy-polycaprolactone (n≒). 2) monoacrylate, crotonic acid, cinnamic acid, succinic acid mono(2-propenyl methoxyethyl) ester, succinic acid mono(2-methylpropenyl oxyethyl) ester, phthalic acid mono ( 2-propenyl methoxyethyl) ester, mono(2-methylpropenyl oxyethyl) phthalate, mono(2-propenyl methoxypropyl) phthalate, o-phenyl phthalate Mono(2-methylpropenyloxypropyl)carboxylate, mono(2-propenyloxyethyl) maleate, mono(2-methylpropenyloxyethyl) maleate, Β-carboxyethyl acrylate, mono(2-propenyl methoxyethyl) tetrahydrophthalate, mono(2-methylpropenyl oxyethyl) tetrahydrophthalate, hexahydroortho Mono(2-propenyl methoxyethyl) phthalate, and mono(2-methylpropenyl oxyethyl) hexahydrophthalate. The unsaturated carboxylic acid (a2) preferably contains acrylic acid.

在使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應時,可採用公知的方法。例如,在環氧化合物(a1)的溶劑溶液中添加含不飽和基羧酸(a2),進一步視需要而添加熱聚合抑制劑和觸媒,並加以攪拌混合,藉此 獲得反應性溶液。可藉由利用常規方法,更佳是在60~150℃的溫度使該反應性溶液進行反應,特佳是在80~120℃的溫度使該反應性溶液進行反應,來獲得中間體。溶劑,可含有例如選自由下述所組成之群組中的至少一種成分:甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯(cellosolve acetate)、丁基賽璐蘇乙酸酯、卡必醇乙酸酯(carbitol acetate)、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯等乙酸酯類;及,二烷二醇醚類。熱聚合抑制劑,可含有例如氫醌和氫醌單甲醚之中的至少其中一者。觸媒,可含有例如選自由下述所組成之群組中的至少一種成分:苯甲基二甲基胺、三乙基胺等三級胺類;三甲基苯甲基氯化銨、甲基三乙基氯化銨等四級銨鹽類;三苯基膦、及三苯基銻(triphenyl stibine)。 When the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) are reacted, a known method can be employed. For example, an unsaturated group-containing carboxylic acid (a2) is added to a solvent solution of the epoxy compound (a1), and a thermal polymerization inhibitor and a catalyst are further added as needed, and stirred and mixed. A reactive solution is obtained. The reactive solution can be preferably reacted at a temperature of from 60 to 150 ° C by a conventional method, and it is particularly preferred to carry out the reaction at a temperature of from 80 to 120 ° C to obtain an intermediate. The solvent may contain, for example, at least one component selected from the group consisting of ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; ethyl acetate and butyl acetate; , acetic acid such as cellosolve acetate, butyl cyproterone acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, etc. Esters; and, dialkyl glycol ethers. The thermal polymerization inhibitor may contain, for example, at least one of hydroquinone and hydroquinone monomethyl ether. The catalyst may contain, for example, at least one component selected from the group consisting of tertiary amines such as benzyldimethylamine and triethylamine; trimethylbenzylammonium chloride, A a quaternary ammonium salt such as triethylammonium chloride; triphenylphosphine; and triphenyl stibine.

尤其,較佳是觸媒含有三苯基膦。亦即,較佳是:在三苯基膦的存在下,使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應。此時,能夠特別促進環氧化合物(a1)中的環氧基與含不飽和基羧酸(a2)的開環加成反應,而能夠達成95%以上、97%以上或大致100%的反應率(轉化率)。因此,能夠以較高的產率來獲得具有結構(S3)之中間體。又,在包含感光性樹脂組成物的硬化物之層中能夠抑制離子遷移的發生,而能夠進一步提升該層的絕緣可靠性。 In particular, it is preferred that the catalyst contains triphenylphosphine. That is, it is preferred to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in the presence of triphenylphosphine. In this case, the ring-opening addition reaction of the epoxy group in the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) can be particularly promoted, and a reaction of 95% or more, 97% or more, or approximately 100% can be achieved. Rate (conversion rate). Therefore, an intermediate having the structure (S3) can be obtained in a high yield. Further, in the layer containing the cured product of the photosensitive resin composition, the occurrence of ion migration can be suppressed, and the insulation reliability of the layer can be further improved.

在使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應時,相對於環氧化合物(a1)的1莫耳的環氧基,含不飽和基羧酸(a2)的量,較佳是在0.8~1.2莫耳的範圍內。此時,能夠獲得具有優異的感光性與保存穩定性之感光性樹脂組成物。 When the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2), the amount of the unsaturated group-containing carboxylic acid (a2) is 1 mol of the epoxy group of the epoxy compound (a1). Preferably, it is in the range of 0.8 to 1.2 moles. At this time, a photosensitive resin composition having excellent photosensitivity and storage stability can be obtained.

亦較佳是在氣泡產生的狀態下使環氧化合物(a1)與含不飽和基羧酸(a2)進行反應。此時,能夠抑制不飽和基的加成聚合反應,因此能夠抑制中間體的分子量的增加和中間體的溶液的膠化。又,能夠抑制最終產物也就是含羧基樹脂(A1)的過度著色。 It is also preferred to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in a state in which bubbles are generated. At this time, since the addition polymerization reaction of the unsaturated group can be suppressed, the increase in the molecular weight of the intermediate and the gelation of the solution of the intermediate can be suppressed. Further, excessive coloring of the final product, that is, the carboxyl group-containing resin (A1) can be suppressed.

以這樣的方式進行而獲得的中間體,具備羥基,該羥基是藉由環氧化合物(a1)的環氧基與含不飽和基羧酸(a2)的羧基的反應所生成。 The intermediate obtained in such a manner has a hydroxyl group which is produced by a reaction of an epoxy group of the epoxy compound (a1) with a carboxyl group of the unsaturated group-containing carboxylic acid (a2).

酸二酐(a3),是具有2個酸酐基之化合物。酸二酐(a3),可含有四羧酸的酸酐。酸二酐(a3),可含有例如選自由下述所組成之群組中的至少一種化合物:1,2,4,5-苯四甲酸二酐、二苯基酮四甲酸二酐、甲基環己烯四甲酸二酐、四甲酸二酐、萘-1,4,5,8-四甲酸二酐、乙烯四甲酸二酐、9,9’-雙(3,4-二羧基苯基)茀二酐、甘油雙(脫水偏苯三酸酯)單乙酸酯、乙二醇雙(脫水偏苯三酸酯)、3,3’,4,4’-二苯基碸四甲酸二酐、1,3,3a,4,5,9b-六氫-5(四氫-2,5-二側氧基-3-呋喃基)萘并[1,2-c]呋喃-1,3-二酮、1,2,3,4-丁烷四甲酸二酐、及3,3’,4,4’-聯苯四甲酸二酐。尤其,較佳是酸 二酐(a3)含有3,3’,4,4’-聯苯四甲酸二酐。亦即,較佳是式(5)和式(6)中的D包含3,3’,4,4’-聯苯四甲酸二酐殘基。此時,能夠確保感光性樹脂組成物的良好顯影性,同時進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸二酐(a3)整體,3,3’,4,4’-聯苯四甲酸二酐的量,較佳是在20~100莫耳%的範圍內,更佳是在40~100莫耳%的範圍內,但是不受限於這些範圍內。 The acid dianhydride (a3) is a compound having two acid anhydride groups. The acid dianhydride (a3) may contain an acid anhydride of a tetracarboxylic acid. The acid dianhydride (a3) may contain, for example, at least one compound selected from the group consisting of 1,2,4,5-benzenetetracarboxylic dianhydride, diphenyl ketone tetracarboxylic dianhydride, methyl Cyclohexene tetracarboxylic dianhydride, tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylene tetracarboxylic dianhydride, 9,9'-bis(3,4-dicarboxyphenyl) Sebacic anhydride, glycerol bis(hydrogen trimellitate) monoacetate, ethylene glycol bis(hydrogen trimellitate), 3,3',4,4'-diphenylphosphonium tetracarboxylic dianhydride 1,3,3a,4,5,9b-hexahydro-5(tetrahydro-2,5-di-oxy-3-furanyl)naphtho[1,2-c]furan-1,3- Diketone, 1,2,3,4-butanetetracarboxylic dianhydride, and 3,3',4,4'-biphenyltetracarboxylic dianhydride. In particular, it is preferably acid The dianhydride (a3) contains 3,3',4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferred that D in the formula (5) and the formula (6) contains a 3,3',4,4'-biphenyltetracarboxylic dianhydride residue. In this case, the good developability of the photosensitive resin composition can be ensured, and the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. The amount of 3,3',4,4'-biphenyltetracarboxylic dianhydride is preferably in the range of 20 to 100 mol%, more preferably 40 to 100, based on the total of the acid dianhydride (a3). Moore% is within the scope, but is not limited to these ranges.

酸單酐(a4),是具有1個酸酐基之化合物。酸單酐(a4),可含有二羧酸的酸酐。酸單酐(a4),可含有例如選自由下述所組成之群組中的至少一種化合物:鄰苯二甲酸酐、1,2,3,6-四氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、甲基納迪克酸酐(methyl nadic acid anhydride)、六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、琥珀酸酐、甲基琥珀酸酐、馬來酸酐、檸康酸酐、戊二酸酐、環己烷-1,2,4-三羧酸-1,2-酐、及伊康酸酐。尤其,較佳是酸單酐(a4)含有1,2,3,6-四氫鄰苯二甲酸酐。亦即,較佳是酸酐含有1,2,3,6-四氫鄰苯二甲酸酐。亦即,較佳是:含羧基樹脂(A1)具有結構(S4),且式(4)中的B包含1,2,3,6-四氫鄰苯二甲酸酐殘基。此時,能夠確保感光性樹脂組成物的良好顯影性,同時進一步抑制由感光性樹脂組成物所形成之皮膜的黏性,並且能夠進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸單酐(a4)整體,1,2,3,6-四氫鄰苯二甲酸酐的量,較佳是在 20~100莫耳%的範圍內,更佳是在40~100莫耳%的範圍內,但是不受限於這些範圍內。 The acid monoanhydride (a4) is a compound having one acid anhydride group. The acid monoanhydride (a4) may contain an acid anhydride of a dicarboxylic acid. The acid monoanhydride (a4) may contain, for example, at least one compound selected from the group consisting of phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyl four. Hydrogen phthalic anhydride, methyl nadic acid anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride, succinic anhydride, methyl succinic anhydride, maleic anhydride, lemon Tonic anhydride, glutaric anhydride, cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride, and itaconic anhydride. In particular, it is preferred that the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferred that the acid anhydride contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferred that the carboxyl group-containing resin (A1) has a structure (S4), and B in the formula (4) contains a 1,2,3,6-tetrahydrophthalic anhydride residue. In this case, the good developability of the photosensitive resin composition can be ensured, and the viscosity of the film formed of the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. The amount of 1,2,3,6-tetrahydrophthalic anhydride relative to the acid monoanhydride (a4) as a whole is preferably The range of 20 to 100 mol% is more preferably in the range of 40 to 100 mol%, but is not limited to these ranges.

在使中間體與酸酐進行反應時,可採用公知的方法。例如,在中間體的溶劑溶液中添加酸酐,進一步視需要而添加熱聚合抑制劑和觸媒,並加以攪拌混合,藉此獲得反應性溶液。可藉由利用常規方法,更佳是在60~150℃的溫度使該反應性溶液進行反應,特佳是在80~120℃的溫度使該反應性溶液進行反應,來獲得含羧基樹脂(A1)。作為溶劑、觸媒及聚合抑制劑,可使用適當的溶劑、觸媒及聚合抑制劑,亦可直接使用合成中間體時所使用的溶劑、觸媒及聚合抑制劑。 When the intermediate is reacted with an acid anhydride, a known method can be employed. For example, an acid anhydride is added to a solvent solution of an intermediate, and a thermal polymerization inhibitor and a catalyst are further added as needed, and stirred and mixed, whereby a reactive solution is obtained. The reactive solution can be reacted at a temperature of 60 to 150 ° C by a conventional method, and it is particularly preferable to carry out the reaction at a temperature of 80 to 120 ° C to obtain a carboxyl group-containing resin (A1). ). As the solvent, catalyst, and polymerization inhibitor, a suitable solvent, catalyst, and polymerization inhibitor can be used, and a solvent, a catalyst, and a polymerization inhibitor used in the synthesis of the intermediate can be used as it is.

尤其,較佳是觸媒含有三苯基膦。亦即,較佳是:在三苯基膦的存在下,使中間體與酸酐進行反應。此時,能夠特別促進中間體中的二級羥基與酸酐的反應,而能夠達成90%以上、95%以上、97%以上或大致100%的反應率(轉化率)。因此,能夠以較高的產率來獲得具有結構(S4)和結構(S5)中的至少一種結構之含羧基樹脂(A1)。又,在包含感光性樹脂組成物的硬化物之層中能夠抑制離子遷移的發生,而能夠進一步提升該層的絕緣可靠性。 In particular, it is preferred that the catalyst contains triphenylphosphine. That is, it is preferred to react the intermediate with an acid anhydride in the presence of triphenylphosphine. In this case, the reaction of the secondary hydroxyl group and the acid anhydride in the intermediate can be particularly promoted, and a reaction rate (conversion ratio) of 90% or more, 95% or more, 97% or more, or approximately 100% can be achieved. Therefore, the carboxyl group-containing resin (A1) having at least one of the structures (S4) and (S5) can be obtained in a high yield. Further, in the layer containing the cured product of the photosensitive resin composition, the occurrence of ion migration can be suppressed, and the insulation reliability of the layer can be further improved.

當酸酐含有酸二酐(a3)與酸單酐(a4)時,相對於環氧化合物(a1)的1莫耳的環氧基,酸二酐(a3)的量,較佳是在0.05~0.24莫耳的範圍內。又,相對於環氧化合物(a1)的1莫耳的環氧基,酸單酐(a4)的量,較佳 是在0.3~0.7莫耳的範圍內。此時,能夠容易獲得酸價與分子量經適度地調整後之含羧基樹脂(A1)。 When the acid anhydride contains the acid dianhydride (a3) and the acid monoanhydride (a4), the amount of the acid dianhydride (a3) is preferably 0.05% with respect to 1 mol of the epoxy group of the epoxy compound (a1). Within 0.24 moles. Further, the amount of the acid monoanhydride (a4) is preferably 1 mol of the epoxy group of the epoxy compound (a1). It is in the range of 0.3~0.7 m. At this time, the carboxyl group-containing resin (A1) whose acid value and molecular weight are appropriately adjusted can be easily obtained.

含羧基樹脂(A),可僅含有含羧基樹脂(A1),亦可進一步含有除了含羧基樹脂(A1)以外的含羧基樹脂(以下亦稱為含羧基樹脂(F))。 The carboxyl group-containing resin (A) may contain only the carboxyl group-containing resin (A1), and may further contain a carboxyl group-containing resin (hereinafter also referred to as a carboxyl group-containing resin (F)) other than the carboxyl group-containing resin (A1).

含羧基樹脂(F),可含有例如具有羧基但不具有光聚合性之化合物(以下稱為(F1)成分)。(F1)成分,含有例如乙烯性不飽和單體的聚合物,該乙烯性不飽和單體包含了具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,可含有下述化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯等。具有羧基之乙烯性不飽和化合物,亦可含有季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等與二元酸酐之反應物。乙烯性不飽和單體,可進一步含有下述不具有羧基之乙烯性不飽和化合物:鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或支鏈之脂肪族或脂環族(其中,環中可具有一部分不飽和鍵)的(甲基)丙烯酸酯等。 The carboxyl group-containing resin (F) may contain, for example, a compound having a carboxyl group but not having photopolymerization (hereinafter referred to as a component (F1)). The component (F1) contains a polymer such as an ethylenically unsaturated monomer, and the ethylenically unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated compound having a carboxyl group may contain the following compounds: acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≒2) monoacrylate, and the like. The ethylenically unsaturated compound having a carboxyl group may further contain a reaction product with a dibasic acid anhydride such as pentaerythritol triacrylate or pentaerythritol trimethacrylate. The ethylenically unsaturated monomer may further contain the following ethylenically unsaturated compound having no carboxyl group: 2-(meth)acryloxyethyl phthalate, 2-(methyl) propylene phthalate A (meth) acrylate or the like which is a methoxyethyl 2-hydroxyethyl ester, a linear or branched aliphatic or alicyclic group in which a ring may have a part of an unsaturated bond.

含羧基樹脂(F),可含有具有羧基和乙烯性不飽和基之化合物(以下稱為(F2)成分)。又,含羧基樹脂(F),可僅含有(F2)成分。(F2)成分,含有一種樹脂(以下稱為第一樹脂(g)),該樹脂是例如中間體與選自多元羧酸和其酸酐的群組中的至少一種化合物(g3)之反應物,該中間體是於一分子中具有2個以上環氧基之環氧化 合物(g1)與乙烯性不飽和化合物(g2)之反應物。第一樹脂(g),例如可使環氧化合物(g1)中的環氧基與乙烯性不飽和化合物(g2)中的羧基進行反應,然後對獲得的中間體加成化合物(g3)而獲得。環氧化合物(g1),可含有下述適當的環氧化合物:甲酚酚醛清漆型環氧化合物、苯酚酚醛清漆型環氧化合物、聯苯酚醛清漆型環氧化合物等。尤其,環氧化合物(g1),較佳是含有選自聯苯酚醛清漆型環氧化合物、甲酚酚醛清漆型環氧化合物的群組中的至少一種化合物。環氧化合物(g1),可僅含有聯苯酚醛清漆型環氧化合物,或可僅含有甲酚酚醛清漆型環氧化合物。此時,環氧化合物(g1)的主鏈中包含芳香族環,因此感光性樹脂組成物的硬化物明顯地不易被前述氧化劑腐蝕。環氧化合物(g1),可含有乙烯性不飽和化合物(h)的聚合物。乙烯性不飽和化合物(h),含有例如(甲基)丙烯酸環氧丙酯等具有環氧基之化合物(h1),或進一步含有鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯等不具有環氧基之化合物(h2)。乙烯性不飽和化合物(g2),較佳是含有丙烯酸或甲基丙烯酸之中的至少其中一者。化合物(g3),含有例如選自由下述所組成之群組中的一種以上的化合物:鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸等多元羧酸;及,這些多元羧酸的酸酐。尤其,化合物(g3),較佳是含有選自下述群組中的至少一種多元羧酸:鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸。 The carboxyl group-containing resin (F) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter referred to as a component (F2)). Further, the carboxyl group-containing resin (F) may contain only the component (F2). a component (F2) containing a resin (hereinafter referred to as a first resin (g)), which is, for example, a reaction product of an intermediate with at least one compound (g3) selected from the group consisting of polycarboxylic acids and anhydrides thereof, The intermediate is an epoxidation having two or more epoxy groups in one molecule. The reactant of the compound (g1) and the ethylenically unsaturated compound (g2). The first resin (g), for example, can be obtained by reacting an epoxy group in the epoxy compound (g1) with a carboxyl group in the ethylenically unsaturated compound (g2), and then adding the compound (g3) to the obtained intermediate. . The epoxy compound (g1) may contain an appropriate epoxy compound: a cresol novolak type epoxy compound, a phenol novolak type epoxy compound, a biphenol novolak type epoxy compound, and the like. In particular, the epoxy compound (g1) preferably contains at least one compound selected from the group consisting of a biphenol novolak type epoxy compound and a cresol novolak type epoxy compound. The epoxy compound (g1) may contain only a biphenol novolak type epoxy compound, or may contain only a cresol novolak type epoxy compound. At this time, since the aromatic ring is contained in the main chain of the epoxy compound (g1), the cured product of the photosensitive resin composition is remarkably hard to be corroded by the oxidizing agent. The epoxy compound (g1) may contain a polymer of the ethylenically unsaturated compound (h). The ethylenically unsaturated compound (h) contains an epoxy group-containing compound (h1) such as glycidyl (meth)acrylate or further contains 2-(methyl)propenyloxyethyl phthalate. The compound (h2) which does not have an epoxy group. The ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid or methacrylic acid. The compound (g3) contains, for example, one or more compounds selected from the group consisting of polycarboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid; Anhydrides of these polycarboxylic acids. In particular, the compound (g3) preferably contains at least one polycarboxylic acid selected from the group consisting of phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid.

(F2)成分,亦可含有一種樹脂(稱為第二樹脂(i)),該樹脂是乙烯性不飽和單體的聚合物與具有環氧基之乙烯性不飽和化合物之反應物,該乙烯性不飽和單體含有具有羧基之乙烯性不飽和化合物。乙烯性不飽和單體,可進一步含有不具有羧基之乙烯性不飽和化合物。第二樹脂(i),可藉由下述方式來獲得:使具有環氧基之乙烯性不飽和化合物,與聚合物中的一部分羧基進行反應。乙烯性不飽和單體,可進一步含有不具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,含有例如下述化合物:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等。不具有羧基之乙烯性不飽和化合物,含有例如下述化合物:鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或支鏈之脂肪族或脂環族(其中,環中可具有一部分不飽和鍵)的(甲基)丙烯酸酯等。具有環氧基之乙烯性不飽和性化合物,較佳是含有(甲基)丙烯酸環氧丙酯。 The component (F2) may further contain a resin (referred to as a second resin (i)) which is a reactant of a polymer of an ethylenically unsaturated monomer and an ethylenically unsaturated compound having an epoxy group, the ethylene The unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The second resin (i) can be obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of carboxyl groups in the polymer. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. An ethylenically unsaturated compound having a carboxyl group, for example, the following compounds: acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≒2) monoacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, etc. . An ethylenically unsaturated compound having no carboxyl group, and containing, for example, the following compound: 2-(methyl)propenyloxyethyl phthalate, 2-(methyl)propenyloxyethyl phthalate- 2-hydroxyethyl ester, a linear or branched aliphatic or alicyclic (wherein the ring may have a part of an unsaturated bond) (meth) acrylate or the like. The ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth)acrylate.

含羧基樹脂(A),僅含有含羧基樹脂(A1),或含有含羧基樹脂(A1)與含羧基樹脂(F)。含羧基樹脂(A),較佳是含有30質量%以上,更佳是含有50質量%以上,進一步較佳是含有100質量%的含羧基樹脂(A1)。此時,能夠使感光性樹脂組成物的硬化物的耐熱性和絕緣可靠性特別提升。又,能夠充分減少由感光性樹 脂組成物所形成之皮膜的黏性。進一步,能夠確保感光性樹脂組成物的基於鹼性水溶液之顯影性。 The carboxyl group-containing resin (A) contains only the carboxyl group-containing resin (A1) or the carboxyl group-containing resin (A1) and the carboxyl group-containing resin (F). The carboxyl group-containing resin (A) preferably contains 30% by mass or more, more preferably 50% by mass or more, and still more preferably 100% by mass of the carboxyl group-containing resin (A1). In this case, the heat resistance and insulation reliability of the cured product of the photosensitive resin composition can be particularly improved. Also, can be sufficiently reduced by the photosensitive tree The viscosity of the film formed by the lipid composition. Further, the developability based on the alkaline aqueous solution of the photosensitive resin composition can be ensured.

如上所述,感光性樹脂組成物,其含有:含羧基樹脂(A)、於一分子中具有至少1個乙烯性不飽和鍵之不飽和化合物(B)、光聚合起始劑(C)、環氧化合物(D)、及成分(E)。 As described above, the photosensitive resin composition contains a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (C). Epoxy compound (D) and component (E).

不飽和化合物(B),能夠對感光性樹脂組成物賦予光硬化性。不飽和化合物(B),可含有例如選自由下述所組成之群組中的至少一種化合物:(甲基)丙烯酸2-羥乙酯等單官能(甲基)丙烯酸酯;以及,二乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、ε-己內酯改質季戊四醇六丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯等多官能(甲基)丙烯酸酯。 The unsaturated compound (B) can impart photocurability to the photosensitive resin composition. The unsaturated compound (B) may contain, for example, at least one compound selected from the group consisting of: a monofunctional (meth) acrylate such as 2-hydroxyethyl (meth)acrylate; and, Alcohol di(meth)acrylate, trimethylolpropane di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(methyl) Acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ε-caprolactone modified pentaerythritol hexaacrylate, tricyclodecane dimethanol di(meth) acrylate, etc. Functional (meth) acrylate.

尤其,不飽和化合物(B),較佳是含有三官能化合物,亦即於一分子中具有3個不飽和鍵之化合物。此時,在對由感光性樹脂組成物所形成之皮膜進行曝光、顯影時,能夠提升解析度,同時能夠特別提升感光性樹脂組成物的基於鹼性水溶液之顯影性。三官能化合物,可含有例如選自由下述所組成之群組中的至少一種化合物:三羥甲基丙烷三(甲基)丙烯酸酯、EO改質三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、乙氧基化異 三聚氰酸三(甲基)丙烯酸酯、ε-己內酯改質參(2-丙烯醯氧基乙基)異三聚氰酸酯、及乙氧基化甘油三(甲基)丙烯酸酯。 In particular, the unsaturated compound (B) preferably contains a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule. In this case, when the film formed of the photosensitive resin composition is exposed and developed, the resolution can be improved, and the developability of the photosensitive resin composition based on the alkaline aqueous solution can be particularly improved. The trifunctional compound may contain, for example, at least one compound selected from the group consisting of trimethylolpropane tri(meth)acrylate, EO-modified trimethylolpropane tri(meth)acrylate , pentaerythritol tri(meth) acrylate, ethoxylated Tris(meth)acrylate, ε-caprolactone modified ginseng (2-propenyloxyethyl)isocyanate, and ethoxylated glycerol tri(meth)acrylate .

不飽和化合物(B),亦較佳是含有含磷化合物(含磷之不飽和化合物)。此時,能夠提升感光性樹脂組成物的硬化物的阻燃性。含磷之不飽和化合物,可含有例如選自由下述所組成之群組中的至少一種化合物:磷酸2-甲基丙烯醯基氧基乙酯(作為具體例,共榮社化學股份有限公司製造的商品型號LIGHT ESTER P-1M、和LIGHT ESTER P-2M)、磷酸2-丙烯醯基氧基乙酯(作為具體例,共榮社化學股份有限公司製造的商品型號LIGHT ACRYLATE P-1A)、磷酸二苯基-2-甲基丙烯醯基氧基乙酯(作為具體例,大八工業股份有限公司製造的商品型號MR-260)、以及昭和高分子股份有限公司製造的HFA系列(作為具體例,二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物也就是商品型號HFA-6003和HFA-6007、己內酯改質二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物也就是商品型號HFA-3003和HFA-6127等)。 The unsaturated compound (B) preferably also contains a phosphorus-containing compound (phosphorus-containing unsaturated compound). At this time, the flame retardancy of the cured product of the photosensitive resin composition can be improved. The phosphorus-containing unsaturated compound may contain, for example, at least one compound selected from the group consisting of 2-methylpropenyloxyethyl phosphate (as a specific example, manufactured by Kyoeisha Chemical Co., Ltd.) Product type LIGHT ESTER P-1M, and LIGHT ESTER P-2M), 2-propenyl methoxyethyl phosphate (as a specific example, the product model LIGHT ACRYLATE P-1A manufactured by Kyoeisha Chemical Co., Ltd.), Diphenyl-2-methylpropenyloxyethyl phosphate (as a specific example, the product model MR-260 manufactured by Daihatsu Industrial Co., Ltd.) and the HFA series manufactured by Showa Polymer Co., Ltd. For example, the addition reaction of dipentaerythritol hexaacrylate with HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) is also available in the product models HFA-6003 and HFA-6007. The addition reaction of caprolactone-modified dipentaerythritol hexaacrylate with HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) is also the product model HFA-3003 and HFA. -6127, etc.).

不飽和化合物(B),可含有預聚物。預聚物,可含有例如選自由下述所組成之群組中的至少一種化合物:先使具有乙烯性不飽和鍵之單體進行聚合,再加成乙烯性不飽和基而獲得之預聚物;以及,低聚(甲基)丙烯酸 酯預聚物類。低聚(甲基)丙烯酸酯預聚物類,可含有例如選自由下述所組成之群組中的至少一種成分:環氧基(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、胺酯(甲基)丙烯酸酯、醇酸樹脂(甲基)丙烯酸酯、矽氧樹脂(甲基)丙烯酸酯、及螺烷烴樹脂(spirane resin)(甲基)丙烯酸酯。 The unsaturated compound (B) may contain a prepolymer. The prepolymer may contain, for example, at least one compound selected from the group consisting of polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group. And, oligo(meth)acrylic acid Ester prepolymers. The oligomeric (meth) acrylate prepolymer may contain, for example, at least one component selected from the group consisting of epoxy (meth) acrylate, polyester (meth) acrylate, Amine ester (meth) acrylate, alkyd resin (meth) acrylate, oxime resin (meth) acrylate, and spirane resin (meth) acrylate.

光聚合起始劑(C),含有例如醯基氧化膦系光聚合起始劑(C1)。亦即,感光性樹脂組成物,含有例如醯基氧化膦系光聚合起始劑(C1)。此時,儘管感光性樹脂組成物含有含羧基樹脂(A1),仍能夠對感光性樹脂組成物賦予對於紫外線的高感光性。又,在包含感光性樹脂組成物的硬化物之層中抑制離子遷移的發生,且該層的絕緣可靠性進一步提升。 The photopolymerization initiator (C) contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). In other words, the photosensitive resin composition contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). In this case, although the photosensitive resin composition contains the carboxyl group-containing resin (A1), it is possible to impart high sensitivity to ultraviolet light to the photosensitive resin composition. Further, the occurrence of ion migration is suppressed in the layer containing the cured product of the photosensitive resin composition, and the insulation reliability of the layer is further improved.

又,醯基氧化膦系光聚合起始劑(C1),不易妨礙硬化物的電絕緣性。因此,藉由對感光性樹脂組成物進行曝光硬化,能夠獲得電性絕緣性優異的硬化物,且該硬化物適合作為例如抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層。 Further, the fluorenylphosphine oxide-based photopolymerization initiator (C1) is less likely to interfere with the electrical insulation of the cured product. Therefore, by subjecting the photosensitive resin composition to exposure curing, a cured product excellent in electrical insulating properties can be obtained, and the cured product is suitable as, for example, a solder resist layer, a plating resist layer, an etch resist layer, and an interlayer insulating layer.

醯基氧化膦系光聚合起始劑(C1),可含有例如選自由下述所組成之群組中的至少一種成分:2,4,6-三甲基苯甲醯基-二苯基-氧化膦、2,4,6-三甲基苯甲醯基-苯基-膦酸乙酯等單醯基氧化膦系光聚合起始劑;以及,雙-(2,6-二氯苯甲醯基)苯基氧化膦、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-1- 萘基氧化膦、雙-(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,4,6-三甲基苯甲醯基)苯基氧化膦、(2,5,6-三甲基苯甲醯基)-2,4,4-三甲基戊基氧化膦等雙醯基氧化膦系光聚合起始劑。尤其,較佳是醯基氧化膦系光聚合起始劑(C1)含有2,4,6-三甲基苯甲醯基-二苯基-氧化膦,亦較佳是醯基氧化膦系光聚合起始劑(C1)僅含有2,4,6-三甲基苯甲醯基-二苯基-氧化膦。 The fluorenylphosphine oxide-based photopolymerization initiator (C1) may contain, for example, at least one component selected from the group consisting of 2,4,6-trimethylbenzylidene-diphenyl- Monodecylphosphine oxide photopolymerization initiator such as phosphine oxide, 2,4,6-trimethylbenzimidyl-phenyl-phosphonic acid ethyl ester; and, bis-(2,6-dichlorobenzene) Mercapto) phenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)-2,5-dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)- 4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzylidene)-1- Naphthylphosphine oxide, bis-(2,6-dimethoxybenzylidene)phenylphosphine oxide, bis-(2,6-dimethoxybenzylidene)-2,4,4-tri Methyl amyl phosphine oxide, bis-(2,6-dimethoxybenzylidene)-2,5-dimethylphenylphosphine oxide, bis-(2,4,6-trimethylbenzene A bis-indenylphosphine oxide-based photopolymerization initiator such as phenylphosphine oxide or (2,5,6-trimethylbenzylidene)-2,4,4-trimethylpentylphosphine oxide. In particular, it is preferred that the fluorenylphosphine oxide-based photopolymerization initiator (C1) contains 2,4,6-trimethylbenzylidene-diphenyl-phosphine oxide, and is preferably a fluorenylphosphine oxide-based light. The polymerization initiator (C1) contains only 2,4,6-trimethylbenzimidyl-diphenyl-phosphine oxide.

光聚合起始劑(C),較佳是:除了醯基氧化膦系光聚合起始劑(C1)以外,還含有羥基酮系光聚合起始劑(C2)。亦即,感光性樹脂組成物,較佳是含有羥基酮系光聚合起始劑(C2)。此時,相較於不含有羥基酮系光聚合起始劑(C2)的情形,能夠對感光性樹脂組成物賦予進一步較高的感光性。藉此,當對由感光性樹脂組成物所形成之塗膜照射紫外線來使其硬化時,能夠使塗膜自其表面以至深部皆充分硬化。作為羥基酮系光聚合起始劑(C2),可列舉例如:1-羥基-環己基-苯基-酮、苯基乙醛酸甲酯、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苯甲基]苯基}-2-甲基-丙-1-酮、及2-羥基-2-甲基-1-苯基-丙-1-酮。 The photopolymerization initiator (C) preferably contains a hydroxyketone-based photopolymerization initiator (C2) in addition to the fluorenylphosphine oxide-based photopolymerization initiator (C1). That is, the photosensitive resin composition preferably contains a hydroxyketone-based photopolymerization initiator (C2). In this case, it is possible to impart further high photosensitivity to the photosensitive resin composition as compared with the case where the hydroxyketone-based photopolymerization initiator (C2) is not contained. As a result, when the coating film formed of the photosensitive resin composition is irradiated with ultraviolet rays to be cured, the coating film can be sufficiently cured from the surface to the deep portion. Examples of the hydroxyketone-based photopolymerization initiator (C2) include 1-hydroxy-cyclohexyl-phenyl-ketone, methyl phenylglyoxylate, and 1-[4-(2-hydroxyethoxy). -phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propenyl)-benzene Methyl]phenyl}-2-methyl-propan-1-one, and 2-hydroxy-2-methyl-1-phenyl-propan-1-one.

醯基氧化膦系光聚合起始劑(C1)與羥基酮系光聚合起始劑(C2)的質量比,較佳是在1:0.01~1: 10的範圍內。此時,能夠使在由感光性樹脂組成物所形成之塗膜的表面附近的硬化性與在深部的硬化性均衡地提升。 The mass ratio of the fluorenylphosphine oxide photopolymerization initiator (C1) to the hydroxyketone photopolymerization initiator (C2) is preferably from 1:0.01 to 1: Within the scope of 10. In this case, the hardenability in the vicinity of the surface of the coating film formed of the photosensitive resin composition and the hardenability in the deep portion can be uniformly adjusted.

光聚合起始劑(C),亦較佳是含有雙(二乙基胺基)二苯基酮(C3)。亦即,亦較佳是:感光性樹脂組成物含有醯基氧化膦系光聚合起始劑(C1)和雙(二乙基胺基)二苯基酮(C3),或感光性樹脂組成物含有醯基氧化膦系光聚合起始劑(C1)、羥基酮系光聚合起始劑(C2)及雙(二乙基胺基)二苯基酮(C3)。此時,當先對由感光性樹脂組成物所形成之塗膜進行部分曝光,再進行顯影時,因為沒有被曝光的部分的硬化受到抑制,所以使解析度變特別高。因此,能夠形成非常微細圖案之感光性樹脂組成物的硬化物。尤其,當由感光性樹脂組成物製作多層印刷線路板的層間絕緣層,並且以光刻法(photolithography)來在該層間絕緣層設置用於貫穿孔的小徑的孔時(參照第1圖),能夠精密且容易形成小徑的孔。 The photopolymerization initiator (C) preferably also contains bis(diethylamino)diphenyl ketone (C3). In other words, the photosensitive resin composition preferably contains a fluorenylphosphine oxide-based photopolymerization initiator (C1) and bis(diethylamino)diphenyl ketone (C3), or a photosensitive resin composition. A fluorenylphosphine oxide-based photopolymerization initiator (C1), a hydroxyketone-based photopolymerization initiator (C2), and bis(diethylamino)diphenyl ketone (C3) are contained. At this time, when the coating film formed of the photosensitive resin composition is partially exposed and developed, the hardening of the portion which is not exposed is suppressed, so that the resolution is particularly high. Therefore, it is possible to form a cured product of the photosensitive resin composition having a very fine pattern. In particular, when an interlayer insulating layer of a multilayer printed wiring board is produced from a photosensitive resin composition, and a hole having a small diameter for a through hole is provided in the interlayer insulating layer by photolithography (see FIG. 1) It is possible to form a hole with a small diameter precisely and easily.

相對於醯基氧化膦系光聚合起始劑(C1),雙(二乙基胺基)二苯基酮(C3)的量,較佳是在0.5~20質量%的範圍內。相對於醯基氧化膦系光聚合起始劑(C1),若雙(二乙基胺基)二苯基酮(C3)的量是0.5質量%以上,則使解析度變特別高。又,相對於醯基氧化膦系光聚合起始劑(C1),若雙(二乙基胺基)二苯基酮(C3)的 量是20質量%以下,則雙(二乙基胺基)二苯基酮(C3)不易妨礙感光性樹脂組成物的硬化物的電絕緣性。 The amount of bis(diethylamino)diphenyl ketone (C3) is preferably in the range of 0.5 to 20% by mass based on the fluorenylphosphine oxide-based photopolymerization initiator (C1). When the amount of bis(diethylamino)diphenyl ketone (C3) is 0.5% by mass or more with respect to the fluorenylphosphine oxide-based photopolymerization initiator (C1), the resolution is particularly high. Further, with respect to the fluorenylphosphine oxide-based photopolymerization initiator (C1), if bis(diethylamino)diphenyl ketone (C3) When the amount is 20% by mass or less, bis(diethylamino)diphenyl ketone (C3) is less likely to interfere with the electrical insulating properties of the cured product of the photosensitive resin composition.

感光性樹脂組成物,可進一步含有公知的光聚合促進劑、敏化劑(sensitizer)等。感光性樹脂組成物,可含有例如選自由下述所組成之群組中的至少一種成分:安息香與其烷基醚類;苯乙酮、苯偶醯二甲基縮酮等苯乙酮類;2-甲基蒽醌等蒽醌類;2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二異丙基噻噸酮等噻噸酮(thioxanthone)類;二苯基酮、4-苯甲醯基-4’-甲基二苯基硫醚等二苯基酮類;2,4-二異丙基二苯并哌喃酮等二苯并哌喃酮類(xanthone);以及,2-羥基-2-甲基-1-苯基-丙-1-酮等α-羥基酮類;2-甲基-1-[4-(甲硫基)苯基]-2-(N-嗎啉基)-1-丙酮等含氮原子之化合物。感光性樹脂組成物,除了光聚合起始劑(C)以外,還可含有對二甲基安息香酸乙酯、對二甲基胺基安息香酸異戊酯、苯甲酸2-二甲基胺基乙酯等三級胺系等公知的光聚合促進劑或敏化劑等。感光性樹脂組成物,可視需要而含有用於可見光曝光的光聚合起始劑和用於近紅外線曝光的光聚合起始劑之中的至少一種。感光性樹脂組成物,除了光聚合起始劑(C)以外,還可含有用於雷射曝光法的敏化劑也就是7-二乙基胺基-4-甲基香豆素等香豆素衍生物、羰花青(carbocyanine)色素系、二苯并哌喃(xanthene)色素系等。 The photosensitive resin composition may further contain a known photopolymerization accelerator, a sensitizer, or the like. The photosensitive resin composition may contain, for example, at least one component selected from the group consisting of benzoin and its alkyl ethers; acetophenones such as acetophenone and benzoin dimethyl ketal; - anthracene such as methyl hydrazine; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, a thioxanthone such as 2,4-diisopropylthioxanthone; a diphenyl ketone such as diphenyl ketone or 4-benzylidene-4'-methyldiphenyl sulfide; , xanthone such as 4-diisopropyldibenzopiperidone; and α-hydroxyl group such as 2-hydroxy-2-methyl-1-phenyl-propan-1-one a ketone; a compound containing a nitrogen atom such as 2-methyl-1-[4-(methylthio)phenyl]-2-(N-morpholinyl)-1-propanone. The photosensitive resin composition may contain, in addition to the photopolymerization initiator (C), ethyl p-dimethylbenzoate, p-dimethylamino benzoic acid isoamyl ester, and 2-dimethylamino benzoate. A known photopolymerization accelerator or sensitizer such as a tertiary amine such as ethyl ester. The photosensitive resin composition may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near-infrared exposure, as needed. The photosensitive resin composition may contain, in addition to the photopolymerization initiator (C), a sensitizer for laser exposure, that is, coumarin such as 7-diethylamino-4-methylcoumarin A derivative, a carbocyanine pigment, a xanthene pigment, or the like.

環氧化合物(D),能夠對感光性樹脂組成物賦予熱硬化性。環氧化合物(D),較佳是含有結晶性環氧樹脂。此時,能夠使感光性樹脂組成物的顯影性提升。又,環氧化合物(D),可進一步含有非晶性環氧樹脂。此處,「結晶性環氧樹脂」是具有熔點之環氧樹脂,「非晶性環氧樹脂」是不具有熔點之環氧樹脂。 The epoxy compound (D) can impart thermosetting properties to the photosensitive resin composition. The epoxy compound (D) preferably contains a crystalline epoxy resin. At this time, the developability of the photosensitive resin composition can be improved. Further, the epoxy compound (D) may further contain an amorphous epoxy resin. Here, the "crystalline epoxy resin" is an epoxy resin having a melting point, and the "amorphous epoxy resin" is an epoxy resin having no melting point.

結晶性環氧樹脂,較佳是含有例如選自由下述所組成之群組中的一種以上的成分:1,3,5-參(2,3-環氧丙基)-1,3,5-三嗪-2,4,6(1H,3H,5H)-三酮、氫醌型結晶性環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品名YDC-1312)、聯苯型結晶性環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品名YX-4000)、二苯基醚型結晶性環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、雙酚型結晶性環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品名YSLV-80XY)、肆(羥苯基)乙烷型結晶性環氧樹脂(作為具體例,日本化藥股份有限公司製造的商品型號GTR-1800)、雙酚茀型結晶性環氧樹脂(作為具體例,具有結構(S7)之環氧樹脂)。 The crystalline epoxy resin preferably contains, for example, one or more components selected from the group consisting of 1,3,5-gin(2,3-epoxypropyl)-1,3,5. - Triazine-2,4,6(1H,3H,5H)-trione, hydroquinone-type crystalline epoxy resin (as a specific example, trade name YDC-1312 manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), Biphenyl type crystalline epoxy resin (trade name: YX-4000, manufactured by Mitsubishi Chemical Corporation), and diphenyl ether type crystalline epoxy resin (for specific example, Nippon Steel & Sumitomo Chemical Co., Ltd.) Manufactured product model YSLV-80DE), bisphenol type crystalline epoxy resin (for example, YSLV-80XY, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), bismuth (hydroxyphenyl) ethane type crystallinity An epoxy resin (a specific example, a product model GTR-1800 manufactured by Nippon Kayaku Co., Ltd.) and a bisphenol fluorene-type crystalline epoxy resin (a specific example, an epoxy resin having a structure (S7)).

結晶性環氧樹脂,較佳是於一分子中具有2個環氧基。 The crystalline epoxy resin preferably has two epoxy groups in one molecule.

結晶性環氧樹脂,較佳是具有150~300g/eq的環氧當量。該環氧當量,是含有1克當量的環 氧基之結晶性環氧樹脂的克重量。結晶性環氧樹脂具有熔點。作為結晶性環氧樹脂的熔點,可列舉例如70~180℃。 The crystalline epoxy resin preferably has an epoxy equivalent of from 150 to 300 g/eq. The epoxy equivalent is a ring containing 1 gram equivalent The gram weight of the crystalline epoxy resin of the oxy group. The crystalline epoxy resin has a melting point. The melting point of the crystalline epoxy resin is, for example, 70 to 180 °C.

尤其,環氧化合物(D),較佳是含有熔點110℃以下的結晶性環氧樹脂。此時,特別提升感光性樹脂組成物的基於鹼性水溶液之顯影性。熔點110℃以下的結晶性環氧樹脂,可含有例如選自由下述所組成之群組中的至少一種成分:聯苯型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號YX-4000)、二苯基醚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80DE)、及雙酚型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號YSLV-80XY)、雙酚茀型結晶性環氧樹脂(作為具體例,具有結構(S7)之環氧樹脂)。 In particular, the epoxy compound (D) preferably contains a crystalline epoxy resin having a melting point of 110 ° C or lower. At this time, the developability based on the alkaline aqueous solution of the photosensitive resin composition is particularly improved. The crystalline epoxy resin having a melting point of 110 ° C or less may contain, for example, at least one component selected from the group consisting of biphenyl type epoxy resins (for example, a product model YX manufactured by Mitsubishi Chemical Corporation) -4000), diphenyl ether type epoxy resin (as a specific example, the product model YSLV-80DE manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), and bisphenol type epoxy resin (as a specific example, Nippon Steel & Sumitomo Metal Co., Ltd. The product model YSLV-80XY manufactured by Chemical Co., Ltd., and the bisphenol fluorene-type crystalline epoxy resin (for example, an epoxy resin having a structure (S7)).

非晶性環氧樹脂,可含有例如選自由下述所組成之群組中的至少一種成分:苯酚酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-775)、甲酚酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-695)、雙酚A酚醛清漆型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON N-865)、雙酚A型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號jER1001)、雙酚F型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號 jER4004P)、雙酚S型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON EXA-1514)、雙酚AD型環氧樹脂、聯苯酚醛清漆型環氧樹脂(作為具體例,日本化藥股份有限公司製造的商品型號NC-3000)、氫化雙酚A型環氧樹脂(作為具體例,新日鐵住金化學股份有限公司製造的商品型號ST-4000D)、萘型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-4032、EPICLON HP-4700、EPICLON HP-4770)、三級丁基鄰苯二酚型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-820)、雙環戊二烯型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICLON HP-7200)、金剛烷型環氧樹脂(作為具體例,出光興產股份有限公司製造的商品型號ADAMANTATE X-E-201)、特殊二官能型環氧樹脂(作為具體例,三菱化學股份有限公司製造的商品型號YL7175-500、及YL7175-1000;DIC股份有限公司製造的商品型號EPICLON TSR-960、EPICLON TER-601、EPICLON TSR-250-80BX、EPICLON 1650-75MPX、EPICLON EXA-4850、EPICLON EXA-4816、EPICLON EXA-4822、及EPICLON EXA-9726;新日鐵住金化學股份有限公司製造的商品型號YSLV-120TE)、橡膠狀核殼聚合物改質雙酚A型環氧樹脂(作為具體例,鐘化股份有限公司製造的商品型號 MX-156)、橡膠狀核殼聚合物改質雙酚F型環氧樹脂(作為具體例,鐘化股份有限公司製造的商品型號MX-136)、以及含橡膠粒子之雙酚F型環氧樹脂(作為具體例,鐘化股份有限公司製造的商品型號MX-130)。 The amorphous epoxy resin may contain, for example, at least one component selected from the group consisting of phenol novolak-type epoxy resins (as a specific example, the product model EPICLON N-775 manufactured by DIC Corporation) , a cresol novolak type epoxy resin (a specific example, a product model EPICLON N-695 manufactured by DIC Corporation), and a bisphenol A novolak type epoxy resin (as a specific example, a product model manufactured by DIC Corporation) EPICLON N-865), a bisphenol A type epoxy resin (a specific example, a product model jER1001 manufactured by Mitsubishi Chemical Corporation), and a bisphenol F type epoxy resin (a product manufactured by Mitsubishi Chemical Corporation as a specific example) model jER4004P), bisphenol S-type epoxy resin (as a specific example, product model EPICLON EXA-1514 manufactured by DIC Corporation), bisphenol AD type epoxy resin, and biphenyl novolac type epoxy resin (as a specific example, Nippon Chemical Co., Ltd. product type NC-3000), hydrogenated bisphenol A type epoxy resin (as a specific example, product model ST-4000D manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), naphthalene type epoxy resin (As a specific example, the product type EPICLON HP-4032, EPICLON HP-4700, EPICLON HP-4770 manufactured by DIC Corporation), and the tertiary butyl catechol type epoxy resin (as a specific example, DIC Corporation) The manufactured product model EPICLON HP-820), the dicyclopentadiene type epoxy resin (as a specific example, the product model EPICLON HP-7200 manufactured by DIC Corporation), and the adamantane type epoxy resin (as a specific example, Product model: ADAMANTATE XE-201), special bifunctional epoxy resin (as a specific example, the product model YL7175-500 and YL7175-1000 manufactured by Mitsubishi Chemical Corporation; DIC Co., Ltd. EPICLON TSR-960, EPICLON TER-601, EPICLON TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA-4850, EPICLON EXA-4816, EPICLON EXA-4822, and EPICLON EXA-9726 manufactured by the company; Product model YSLV-120TE manufactured by Tiejinjin Chemical Co., Ltd., rubber-like core-shell polymer modified bisphenol A epoxy resin (as a specific example, the product model manufactured by Zhonghua Co., Ltd. MX-156), rubbery core-shell polymer modified bisphenol F-type epoxy resin (as a specific example, the product model MX-136 manufactured by Chunghua Co., Ltd.), and bisphenol F-type epoxy containing rubber particles Resin (as a specific example, the product model MX-130 manufactured by Chung Ching Co., Ltd.).

環氧化合物(D),可含有含磷環氧樹脂。此時,能夠提升感光性樹脂組成物的硬化物的阻燃性。結晶性環氧樹脂中可含有含磷環氧樹脂,或非晶性環氧樹脂中可含有含磷環氧樹脂。含磷環氧樹脂,例如是磷酸改質雙酚F型環氧樹脂(作為具體例,DIC股份有限公司製造的商品型號EPICRON EXA-9726、及EPICRON EXA-9710)、新日鐵住金化學股份有限公司製造的商品型號EPOTORT FX-305等。 The epoxy compound (D) may contain a phosphorus-containing epoxy resin. At this time, the flame retardancy of the cured product of the photosensitive resin composition can be improved. The crystalline epoxy resin may contain a phosphorus-containing epoxy resin, or the amorphous epoxy resin may contain a phosphorus-containing epoxy resin. Phosphorus-containing epoxy resin, for example, phosphoric acid-modified bisphenol F-type epoxy resin (for example, EPICRON EXA-9726 and EPICRON EXA-9710, manufactured by DIC Corporation), Nippon Steel & Sumitomo Chemical Co., Ltd. The company's product model EPOTORT FX-305 and so on.

本實施形態的感光性樹脂組成物,可含有有機溶劑。有機溶劑,是基於下述目的而使用:感光性樹脂組成物的液狀化或清漆化、黏度的調整、塗佈性的調整、成膜性的調整等。 The photosensitive resin composition of the present embodiment may contain an organic solvent. The organic solvent is used for liquidification or varnishing of a photosensitive resin composition, adjustment of viscosity, adjustment of coatability, adjustment of film formability, and the like.

有機溶劑,可含有例如選自由下述所組成之群組中的至少一種化合物:乙醇、丙醇、異丙醇、己醇、乙二醇等直鏈、支鏈、2級或多元醇類;甲基乙基酮、環己酮等酮類;甲苯、二甲苯等芳香族烴類;Swasol系列(丸善石油化學公司製造)、Solvesso系列(埃克森美孚化學公司(ExxonMobil Chemical Company)製造)等石油系芳香族系混合溶劑;賽璐蘇、丁基賽璐蘇等賽璐蘇類;卡必醇、丁基卡必醇等卡必醇類;丙二醇甲基醚等丙 二醇烷基醚類;二丙二醇甲基醚等聚丙二醇烷基醚類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、卡必醇乙酸酯等乙酸酯類;以及,二烷二醇醚類。 The organic solvent may contain, for example, at least one compound selected from the group consisting of: linear, branched, quaternary or polyhydric alcohols such as ethanol, propanol, isopropanol, hexanol, ethylene glycol; Ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; Swasol series (manufactured by Maruzen Petrochemical Co., Ltd.), Solvesso series (manufactured by ExxonMobil Chemical Company), etc. Petroleum aromatic mixed solvent; celluloid, such as celecoxib, butyl acesulfame, etc.; carbitol, carbitol, butyl carbitol, etc. a glycol alkyl ether; a polypropylene glycol alkyl ether such as dipropylene glycol methyl ether; an acetate such as ethyl acetate, butyl acetate, celecoxib acetate or carbitol acetate; and a dioxane Glycol ethers.

在本實施形態中,較佳是感光性樹脂組成物含有無機填料(K)。此時,無機填料(K),具有下述傾向:比感光性樹脂組成物的硬化物更不易被前述氧化劑腐蝕。亦即,感光性樹脂組成物的硬化物,在其外表面具有易於被前述氧化劑腐蝕的地方與不易被腐蝕的地方。因此,當利用前述氧化劑來對含有無機填料(K)之硬化物的外表面進行粗糙化時,能夠利用前述氧化劑來適度地腐蝕硬化物的表面。藉此,能夠對硬化物賦予適合於鍍覆處理的粗糙面,且能夠使硬化物與前述鍍覆層的黏合性提升。 In the present embodiment, it is preferred that the photosensitive resin composition contains an inorganic filler (K). At this time, the inorganic filler (K) has a tendency to be less corroded by the oxidizing agent than the cured product of the photosensitive resin composition. That is, the cured product of the photosensitive resin composition has a portion on the outer surface which is easily corroded by the oxidizing agent and a portion which is hard to be corroded. Therefore, when the outer surface of the cured product containing the inorganic filler (K) is roughened by the aforementioned oxidizing agent, the surface of the cured product can be appropriately etched by the aforementioned oxidizing agent. Thereby, it is possible to impart a rough surface suitable for the plating treatment to the cured product, and it is possible to improve the adhesion between the cured product and the plating layer.

無機填料(K),可含有例如選自由下述所組成之群組中的一種以上的材料:硫酸鋇、結晶性二氧化矽、奈米二氧化矽、奈米碳管(carbon nanotube)、滑石、膨潤土、水滑石、氫氧化鋁、氫氧化鎂、及二氧化鈦。當無機填料(K)含有二氧化鈦、氧化鋅等白色材料時,能夠藉由前述白色材料來使感光性樹脂組成物和其硬化物白色化。 The inorganic filler (K) may contain, for example, one or more materials selected from the group consisting of barium sulfate, crystalline cerium oxide, nano cerium oxide, carbon nanotube, talc. , bentonite, hydrotalcite, aluminum hydroxide, magnesium hydroxide, and titanium dioxide. When the inorganic filler (K) contains a white material such as titanium oxide or zinc oxide, the photosensitive resin composition and the cured product thereof can be whitened by the white material.

感光性樹脂組成物中的無機填料(K)的量,可適當設定,但相對含羧基樹脂(A),無機填料(K)的量,較佳是在1~300質量%的範圍內,進一步較佳是在3~200質量%的範圍內,更佳是在5~100質量%的範圍內。 The amount of the inorganic filler (K) in the photosensitive resin composition can be appropriately set. However, the amount of the inorganic filler (K) relative to the carboxyl group-containing resin (A) is preferably in the range of 1 to 300% by mass. It is preferably in the range of 3 to 200% by mass, more preferably in the range of 5 to 100% by mass.

無機填料(K),較佳是包含二氧化矽(k)。二氧化矽(k),具有羥基。該羥基被認為能夠被前述氧化劑改質。因此,亦能夠利用前述氧化劑來對二氧化矽(k)的表面賦予粗糙面。當利用前述氧化劑來腐蝕感光性樹脂組成物的硬化物時,即便二氧化矽(k)位於硬化物的表面上的較難腐蝕的地方,也能夠利用前述氧化劑來適度地腐蝕該較難腐蝕的地方。藉此,能夠對硬化物賦予更適合於鍍覆處理的粗糙面,且能夠使硬化物與前述鍍覆層的黏合性進一步提升。 The inorganic filler (K) preferably contains cerium oxide (k). Cerium oxide (k) has a hydroxyl group. This hydroxyl group is considered to be capable of being modified by the aforementioned oxidizing agent. Therefore, it is also possible to impart a rough surface to the surface of the cerium oxide (k) by using the above oxidizing agent. When the oxidizing agent is used to etch the cured product of the photosensitive resin composition, even if the cerium oxide (k) is located in a hard-to-corrode place on the surface of the cured product, the oxidizing agent can be used to moderately corrode the hardly corrodible local. Thereby, it is possible to impart a rough surface which is more suitable for the plating treatment to the cured product, and it is possible to further improve the adhesion between the cured product and the plating layer.

二氧化矽(k),較佳是平均粒徑為1μm以下。藉由使二氧化矽(k)的平均粒徑成為1μm以下,能夠使形成於硬化物上的粗糙面的粗糙度較細緻。藉此,硬化物的表面積增加,伴隨著此情形,固著效果增加,而能夠使粗糙面與前述鍍覆層的黏合性提升。二氧化矽(k)的平均粒徑,其下限並無特別限定,例如,較佳是0.001μm以上。平均粒徑,是藉由雷射繞射式粒度分布測定裝置,設為D50來進行測定。二氧化矽(k)的平均粒徑,進一步較佳是0.1μm以下。此時,能夠使形成於硬化物上的粗糙面的粗糙度特別細緻。此外,在感光性樹脂組成物中能夠抑制曝光時的散射,藉此能夠使感光性樹脂組成物的解析度進一步提升。 The cerium oxide (k) preferably has an average particle diameter of 1 μm or less. By setting the average particle diameter of the cerium oxide (k) to 1 μm or less, the roughness of the rough surface formed on the cured product can be made fine. Thereby, the surface area of the cured product increases, and in this case, the fixing effect is increased, and the adhesion between the rough surface and the plating layer can be improved. The lower limit of the average particle diameter of the cerium oxide (k) is not particularly limited, and is, for example, preferably 0.001 μm or more. The average particle diameter was measured by a laser diffraction type particle size distribution measuring apparatus and set to D 50 . The average particle diameter of the cerium oxide (k) is more preferably 0.1 μm or less. At this time, the roughness of the rough surface formed on the cured product can be made particularly fine. Further, in the photosensitive resin composition, scattering at the time of exposure can be suppressed, whereby the resolution of the photosensitive resin composition can be further improved.

無機填料(K),僅含有二氧化矽(k),或含有二氧化矽(k)與二氧化矽(k)以外的無機填料。無機填料(K),較佳是含有30質量%以上的二氧化矽(k),更佳是 含有50質量%以上,進一步較佳是含有100質量%以上。此時,能夠使硬化物與前述鍍覆層的黏合性特別提升。 The inorganic filler (K) contains only cerium oxide (k) or an inorganic filler other than cerium (k) and cerium (k). The inorganic filler (K) preferably contains 30% by mass or more of cerium oxide (k), more preferably It is contained in an amount of 50% by mass or more, and more preferably 100% by mass or more. In this case, the adhesion between the cured product and the plating layer can be particularly improved.

感光性樹脂組成物,較佳是含有矽烷耦合劑。此時,能夠使無機填料(K)的分散性提升。進一步,亦能夠使感光性樹脂組成物的解析度提升。 The photosensitive resin composition preferably contains a decane coupling agent. At this time, the dispersibility of the inorganic filler (K) can be improved. Further, the resolution of the photosensitive resin composition can also be improved.

矽烷耦合劑,是一種化合物,其含有矽原子,並且含有選自-OCH3基、-OC2H5基、及-OCOCH3基的群組的2~4個水解性基團。矽烷耦合劑,除了水解性基團以外,還可含有胺基、環氧基、乙烯(烯丙)基、甲基丙烯醯基、巰基、異氰酸基、硫醚基等反應性基團、或甲基。 The decane coupling agent is a compound containing a ruthenium atom and containing 2 to 4 hydrolyzable groups selected from the group consisting of -OCH 3 group, -OC 2 H 5 group, and -OCOCH 3 group. The decane coupling agent may further contain a reactive group such as an amine group, an epoxy group, an ethylene (allyl) group, a methacryl fluorenyl group, a decyl group, an isocyanate group or a thioether group, in addition to the hydrolyzable group. Or methyl.

作為矽烷耦合劑,可列舉例如:3-(2-胺基乙基胺基)丙基二甲氧基甲基矽烷、3-(2-胺基乙基胺基)丙基三乙氧基矽烷、3-(2-胺基乙基胺基)丙基三甲氧基矽烷、3-胺基丙基二乙氧基甲基矽烷、3-胺基丙基三乙氧基矽烷、3-胺基丙基三甲氧基矽烷等胺基化合物;3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基三乙氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-環氧丙氧基丙基(二甲氧基)甲基矽烷、二乙氧基(3-環氧丙氧基丙基)甲基矽烷等環氧類;3-丙烯醯氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三乙氧基矽烷、3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷、3-甲基丙烯醯氧基丙基甲基二乙氧基矽烷等(甲基)丙烯酸酯類;乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、對苯乙烯基三甲氧基矽烷、二乙氧基甲 基乙烯基矽烷、乙烯基參(2-甲氧基乙氧基)矽烷等乙烯化合物;烯丙基三乙氧基矽烷、烯丙基三甲氧基矽烷等烯丙化合物;對苯乙烯基三甲氧基矽烷等苯乙烯化合物;3-異氰酸基丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷等異氰酸酯類;3-脲基丙基三甲氧基矽烷、3-脲基丙基三乙氧基矽烷等脲類;(3-巰基丙基)三乙氧基矽烷、(3-巰基丙基)三甲氧基矽烷等巰化合物類;雙(三乙氧基矽基丙基)四硫化物等硫化物類;正矽酸四乙酯、甲基三甲氧基矽烷等。 As the decane coupling agent, for example, 3-(2-aminoethylamino)propyldimethoxymethylnonane, 3-(2-aminoethylamino)propyltriethoxydecane can be cited. , 3-(2-Aminoethylamino)propyltrimethoxydecane, 3-aminopropyldiethoxymethylnonane, 3-aminopropyltriethoxydecane, 3-Amino Amino compound such as propyltrimethoxydecane; 3-glycidoxypropyltrimethoxydecane, 3-glycidoxypropyltriethoxydecane, 2-(3,4-epoxy ring Epoxy such as hexyl)ethyltrimethoxydecane, 3-glycidoxypropyl(dimethoxy)methylnonane, diethoxy(3-glycidoxypropyl)methyldecane 3-propenyloxypropyltrimethoxydecane, 3-methylpropenyloxypropyltrimethoxydecane, 3-methylpropenyloxypropyltriethoxydecane, 3-methylpropene (meth) acrylates such as methoxypropyl methyl dimethoxy decane, 3-methyl propylene methoxy propyl methyl diethoxy decane; vinyl trimethoxy decane, vinyl triethyl Oxydecane, p-styryltrimethoxydecane, diethoxymethyl Vinyl compounds such as vinyl vinyl hydride, vinyl ginseng (2-methoxyethoxy) decane; allyl compounds such as allyl triethoxy decane and allyl trimethoxy decane; p-styryl trimethoxy a styrene compound such as decane; an isocyanate such as 3-isocyanatopropyltrimethoxydecane or 3-isocyanatopropyltriethoxydecane; 3-ureidopropyltrimethoxydecane, 3- Ureas such as ureidopropyltriethoxydecane; hydrazine compounds such as (3-mercaptopropyl)triethoxydecane and (3-mercaptopropyl)trimethoxydecane; bis(triethoxyindenyl) Sulfide such as propyl) tetrasulfide; tetraethyl ortho-decylate; methyltrimethoxydecane.

在本實施形態中,前述氧化劑,可以是能夠作為除膠渣液來取得的氧化劑。這樣的氧化劑,可含有例如選自下述群組中的至少一種過錳酸鹽:過錳酸鈉及過錳酸鉀。 In the present embodiment, the oxidizing agent may be an oxidizing agent which can be obtained as a desmear liquid. Such an oxidizing agent may contain, for example, at least one permanganate selected from the group consisting of sodium permanganate and potassium permanganate.

適當調整感光性樹脂組成物中的成分的量,使得感光性樹脂組成物具有光硬化性且能夠藉由鹼性溶液來進行顯影。 The amount of the component in the photosensitive resin composition is appropriately adjusted so that the photosensitive resin composition has photocurability and can be developed by an alkaline solution.

相對於感光性樹脂組成物的固體成分量,含羧基樹脂(A)的量,若在5~85質量%的範圍內則較佳,若在10~75質量%的範圍內則更佳,若在30~60質量%的範圍內則進一步較佳。 The amount of the carboxyl group-containing resin (A) is preferably in the range of 5 to 85% by mass, more preferably in the range of 10 to 75% by mass, based on the solid content of the photosensitive resin composition. It is further preferably in the range of 30 to 60% by mass.

相對於含羧基樹脂(A),不飽和化合物(B)的量,若在1~50質量%的範圍內則較佳,若在10~45質量%的範圍內則更佳,若在21~40質量%的範圍內則進一步較佳。 The amount of the unsaturated compound (B) is preferably in the range of 1 to 50% by mass based on the carboxyl group-containing resin (A), and more preferably in the range of 10 to 45% by mass. Further preferably, it is in the range of 40% by mass.

相對於含羧基樹脂(A),光聚合起始劑(C)的量,較佳是在0.1~30質量%的範圍內,若在1~25質量%的範圍內則進一步較佳。 The amount of the photopolymerization initiator (C) is preferably in the range of 0.1 to 30% by mass based on the carboxyl group-containing resin (A), and more preferably in the range of 1 to 25% by mass.

有關環氧化合物(D)的量,相對於含羧基樹脂(A)中包含的1當量的羧基,較佳是環氧化合物(D)中包含的環氧基的當量的合計量在0.7~2.5的範圍內,更佳是在0.7~2.3的範圍內,若在0.7~2.0的範圍內則進一步較佳。又,相對於含羧基樹脂(A)中包含的1當量的羧基,較佳是結晶性環氧樹脂中包含的環氧基的當量的合計量在0.1~2.0的範圍內,若在0.2~1.9的範圍內則更佳,若在0.3~1.5的範圍內則進一步較佳。 The amount of the epoxy compound (D) is preferably 0.7 to 2.5 in terms of the equivalent amount of the epoxy group contained in the epoxy compound (D) with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). The range is preferably in the range of 0.7 to 2.3, and further preferably in the range of 0.7 to 2.0. In addition, the total amount of the epoxy groups contained in the crystalline epoxy resin is preferably in the range of 0.1 to 2.0, and in the range of 0.2 to 1.9, based on 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). The range is more preferably in the range of 0.3 to 1.5.

相對於含羧基樹脂(A),成分(E)的量,較佳是在0.1~10質量%的範圍內,若在0.5~5質量%的範圍內則進一步較佳。 The amount of the component (E) is preferably in the range of 0.1 to 10% by mass based on the carboxyl group-containing resin (A), and more preferably in the range of 0.5 to 5% by mass.

當感光性樹脂組成物含有有機溶劑時,有機溶劑的量,較佳是:以在使由感光性樹脂組成物所形成之塗膜乾燥時有機溶劑能夠迅速地揮發而消失的方式,亦即以有機溶劑不殘留在乾燥膜中的方式,來進行調整。尤其,相對於感光性樹脂組成物整體,有機溶劑的量,較佳是在0~99.5質量%的範圍內,若在15~60質量%的範圍內則進一步較佳。再者,有機溶劑的適當比例,會根據塗佈方法等而不同,因此,較佳是視塗佈方法來適當調節比例。 When the photosensitive resin composition contains an organic solvent, the amount of the organic solvent is preferably such that the organic solvent can be quickly volatilized and disappeared when the coating film formed of the photosensitive resin composition is dried, that is, The organic solvent is adjusted in such a manner that it does not remain in the dried film. In particular, the amount of the organic solvent is preferably in the range of 0 to 99.5% by mass, and more preferably in the range of 15 to 60% by mass, based on the entire photosensitive resin composition. Further, the appropriate ratio of the organic solvent varies depending on the coating method and the like. Therefore, it is preferred to appropriately adjust the ratio depending on the coating method.

再者,固體成分量,是指從感光性樹脂組成物將溶劑等揮發性成分去除後餘留的所有成分的合計量。 In addition, the solid content amount is a total amount of all the components remaining after the volatile component such as a solvent is removed from the photosensitive resin composition.

只要在不妨礙本實施形態的功效的範圍內,感光性樹脂組成物,可進一步含有上述成分以外的成分。 The photosensitive resin composition may further contain components other than the above components, within a range that does not impair the effects of the embodiment.

感光性樹脂組成物,可含有選自由下述所組成之群組中的至少一種樹脂:經以己內醯胺、肟、丙二酸酯等封閉後之甲苯二異氰酸酯系、嗎啉二異氰酸酯系、異佛酮二異氰酸酯系及六亞甲基二異氰酸酯系封閉異氰酸酯;三聚氰胺樹脂、正丁基化三聚氰胺樹脂、異丁基化三聚氰胺樹脂、丁基化尿素樹脂、丁基化三聚氰胺尿素共縮合樹脂、苯胍胺(benzoguanamine)系共縮合樹脂等胺基樹脂;前述以外的各種熱硬化性樹脂;紫外線硬化性環氧基(甲基)丙烯酸酯;將(甲基)丙烯酸加成在雙酚A型、苯酚酚醛清漆型、甲酚酚醛清漆型、脂環型等環氧樹脂而獲得之樹脂;以及,鄰苯二甲酸二烯丙酯樹脂、苯氧樹脂、胺酯樹脂、氟樹脂等高分子化合物。 The photosensitive resin composition may contain at least one resin selected from the group consisting of toluene diisocyanate and morpholine diisocyanate which are blocked with caprolactam, hydrazine, malonate or the like. , isophorone diisocyanate and hexamethylene diisocyanate blocked isocyanate; melamine resin, n-butyl melamine resin, isobutylated melamine resin, butylated urea resin, butylated melamine urea co-condensation resin, An amide-based resin such as a benzoguanamine-based co-condensation resin; a thermosetting resin other than the above; an ultraviolet curable epoxy (meth) acrylate; and a (meth)acrylic acid in a bisphenol A type a resin obtained by an epoxy resin such as a phenol novolak type, a cresol novolac type, or an alicyclic type; and a polymer compound such as a diallyl phthalate resin, a phenoxy resin, an amine ester resin, or a fluororesin .

感光性樹脂組成物,可含有用來使環氧化合物(D)硬化的硬化劑。硬化劑,可含有例如選自由下述所組成之群組中的至少一種成分:咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等咪唑衍生物;雙氰胺、苯甲基二甲基胺、4-(二甲胺基)-N,N-二甲基苯甲基胺、4-甲氧基-N,N-二甲基苯甲基胺、4-甲基-N,N-二甲基苯甲基胺等胺化合物;己二醯肼、癸二醯肼等醯肼化合物;三苯基膦等磷化合物;酸酐;酚;硫醇;路易斯酸胺錯合物;及,鎓鹽。這些成 分的市售品,例如有:四國化成股份有限公司製造的2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(皆為咪唑系化合物的商品名);San-Apro股份有限公司製造的U-CAT3503N、U-CAT3502T(皆為二甲基胺的封閉異氰酸酯化合物的商品名);DBU、DBN、U-CATSA102、U-CAT5002(皆為二環式脒化合物及其鹽)。 The photosensitive resin composition may contain a curing agent for curing the epoxy compound (D). The hardener may contain, for example, at least one component selected from the group consisting of imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenyl Imidazole derivatives such as imidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole; dicyandiamide, benzene Methyl dimethylamine, 4-(dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl -N,N-dimethylbenzylamine and other amine compounds; ruthenium compounds such as hexamethylenedifluoride and ruthenium dioxime; phosphorus compounds such as triphenylphosphine; acid anhydride; phenol; thiol; Lewis acid amine And; 鎓 salt. These into For the commercial products, for example, 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (all trade names of imidazole compounds) manufactured by Shikoku Chemicals Co., Ltd.; U manufactured by San-Apro Co., Ltd. -CAT3503N, U-CAT3502T (trade names of blocked isocyanate compounds of dimethylamine); DBU, DBN, U-CATSA102, U-CAT5002 (all of which are bicyclic guanidine compounds and salts thereof).

感光性樹脂組成物,可含有選自由下述所組成之群組中的至少一種成分:硬化促進劑;著色劑;聚矽氧、丙烯酸酯等的共聚物;塗平劑(leveling agent);矽烷耦合劑等黏合性賦予劑;搖變劑(thixotropic agent);聚合抑制劑;防光暈劑;阻燃劑;消泡劑;抗氧化劑;界面活性劑;以及,高分子分散劑。 The photosensitive resin composition may contain at least one component selected from the group consisting of a curing accelerator; a colorant; a copolymer of polyfluorene oxide, acrylate, etc.; a leveling agent; Cohesive imparting agent such as a coupling agent; a thixotropic agent; a polymerization inhibitor; an antihalation agent; a flame retardant; an antifoaming agent; an antioxidant; a surfactant; and a polymer dispersing agent.

感光性樹脂組成物中的胺化合物的含量,以盡可能減少為佳。若以這樣的方式進行,則不易損及由感光性樹脂組成物的硬化物所構成之層的電絕緣性。尤其,相對於含羧基樹脂(A),胺化合物的量,較佳是6質量%以下,若是4質量%以下則進一步較佳。 The content of the amine compound in the photosensitive resin composition is preferably as small as possible. When it is carried out in this manner, the electrical insulation of the layer composed of the cured product of the photosensitive resin composition is not easily impaired. In particular, the amount of the amine compound is preferably 6% by mass or less based on the carboxyl group-containing resin (A), and more preferably 4% by mass or less.

可藉由下述方式來調製感光性樹脂組成物:調配如上所述之感光性樹脂組成物的原料,並藉由使用例如三輥研磨機(three-roll mill)、球磨機(ball mill)、砂磨機(sand mill)等之公知的混練方法來進行混練。當感光性樹脂組成物的原料中包含液狀成分、黏度較低的成分等時,可藉由下述方式來調配感光性樹脂組成物:首先 將原料中除了液狀成分、黏度較低的成分以外的部分進行混練,然後在獲得的混合物中,添加液狀成分、黏度較低的成分等並加以混合。 The photosensitive resin composition can be prepared by blending a raw material of the photosensitive resin composition as described above, and by using, for example, a three-roll mill, a ball mill, and a sand. A well-known kneading method such as a sand mill is used for kneading. When the raw material of the photosensitive resin composition contains a liquid component or a component having a low viscosity, the photosensitive resin composition can be prepared by the following method: A portion other than the liquid component and the component having a low viscosity is kneaded in the raw material, and then a liquid component, a component having a low viscosity, and the like are added to the obtained mixture and mixed.

考慮到保存穩定性等,可藉由將感光性樹脂組成物的一部分成分混合來調製第一劑,並藉由將其餘成分混合來調製第二劑。亦即,感光性樹脂組成物可具備第一劑與第二劑。此時,例如,可藉由將感光性樹脂組成物的成分中的不飽和化合物(B)、一部分有機溶劑及熱硬化性成分,預先混合並加以分散來調製第一劑,並藉由將感光性樹脂組成物的成分中的其餘成分混合並加以分散來調製第二劑。此時,可適時將需要量之第一劑與第二劑混合來調製混合液,並使該混合液硬化來獲得硬化物。 In consideration of storage stability and the like, the first agent can be prepared by mixing a part of components of the photosensitive resin composition, and the second agent can be prepared by mixing the remaining components. That is, the photosensitive resin composition may have a first agent and a second agent. In this case, for example, the first compound can be prepared by premixing and dispersing the unsaturated compound (B), a part of the organic solvent, and the thermosetting component in the component of the photosensitive resin composition, and sensitizing The remaining components of the components of the resin composition are mixed and dispersed to prepare a second agent. At this time, the required amount of the first agent and the second agent may be mixed at appropriate to prepare a mixed solution, and the mixed solution is hardened to obtain a cured product.

本實施形態的感光性樹脂組成物,適合於用於印刷線路板的電絕緣性材料。尤其,感光性樹脂組成物,適合於抗焊劑層、抗鍍劑層、抗蝕刻劑層、層間絕緣層等電絕緣性層的材料。 The photosensitive resin composition of this embodiment is suitable for an electrically insulating material used for a printed wiring board. In particular, the photosensitive resin composition is suitable for a material such as a solder resist layer, a plating resist layer, an etch resist layer, or an interlayer insulating layer.

本實施形態的感光性樹脂組成物,較佳是具有如下所述之性質:即便是厚度25μm的皮膜,也能夠藉由碳酸鈉水溶液來進行顯影。此時,能夠藉由光刻法,由感光性樹脂組成物來製作充分厚的電絕緣性層,因此,能夠將感光性樹脂組成物廣泛地應用於製作印刷線路板中的層間絕緣層、抗焊劑層等。當然,亦能夠由感光性樹脂組成物來製作比厚度25μm更薄的電絕緣性層。 The photosensitive resin composition of the present embodiment preferably has a property of being developed by an aqueous solution of sodium carbonate even in the case of a film having a thickness of 25 μm. In this case, since a sufficiently thick electrically insulating layer can be produced from the photosensitive resin composition by photolithography, the photosensitive resin composition can be widely applied to the production of an interlayer insulating layer in a printed wiring board. Flux layer, etc. Of course, it is also possible to produce an electrically insulating layer thinner than the thickness of 25 μm from the photosensitive resin composition.

可藉由下述方法來確認厚度25μm的皮膜是否能夠藉由碳酸鈉水溶液來進行顯影。藉由在適當的基材上塗佈感光性樹脂組成物,來形成濕潤塗膜,然後以80℃對該濕潤塗膜加熱30分鐘,藉此形成厚度25μm的皮膜。在將負型光罩直接地緊貼於該皮膜上的狀態下,以500mJ/cm2的條件對皮膜照射紫外線,來實行曝光,該負型光罩具有使紫外線穿透之曝光部、及遮蔽紫外線之非曝光部。在曝光後,實行下述處理:先以0.2MPa的噴射壓力來對皮膜噴射30℃的1%碳酸鈉(Na2CO3)水溶液90秒,再以0.2MPa的噴射壓力來噴射純水90秒。在該處理後觀察皮膜,結果皮膜中的對應於非曝光部的部分被去除且無法確認到殘渣時,則可判斷厚度25μm的皮膜能夠藉由碳酸鈉水溶液來進行顯影。 Whether or not the film having a thickness of 25 μm can be developed by an aqueous solution of sodium carbonate can be confirmed by the following method. The wet coating film was formed by coating a photosensitive resin composition on a suitable substrate, and then the wet coating film was heated at 80 ° C for 30 minutes to form a film having a thickness of 25 μm. Exposure was carried out by irradiating the film with ultraviolet rays at a condition of 500 mJ/cm 2 in a state in which the negative mask was directly adhered to the film, and the negative mask had an exposure portion for blocking ultraviolet rays and shielding. Non-exposure part of ultraviolet light. After the exposure, the following treatment was carried out: a 1% sodium carbonate (Na 2 CO 3 ) aqueous solution at 30 ° C was sprayed on the film at an injection pressure of 0.2 MPa for 90 seconds, and then pure water was sprayed at a spray pressure of 0.2 MPa for 90 seconds. . When the film was observed after the treatment, and the portion corresponding to the non-exposed portion in the film was removed and the residue could not be confirmed, it was confirmed that the film having a thickness of 25 μm can be developed by an aqueous solution of sodium carbonate.

以下參照第1圖A至第1圖E,來說明印刷線路板的製造方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成之層間絕緣層。在本方法中,是藉由光刻法來在層間絕緣層上形成貫穿孔。 Hereinafter, an example of a method of manufacturing a printed wiring board having an interlayer insulating layer formed of the photosensitive resin composition of the present embodiment will be described with reference to FIG. 1 to FIG. In the method, a through hole is formed on the interlayer insulating layer by photolithography.

首先,如第1圖A所示,準備芯材1。芯材1,具備例如至少一絕緣層2與至少一導體線路3。設置在芯材1的其中一面上的導體線路3,以下稱為第一導體線路3。如第1圖B所示,在芯材1的其中一面上,由感光性樹脂組成物形成皮膜4。皮膜4的形成方法,例如有塗佈法與乾膜法。 First, as shown in FIG. 1A, the core material 1 is prepared. The core material 1 is provided with, for example, at least one insulating layer 2 and at least one conductor line 3. The conductor line 3 provided on one side of the core material 1 is hereinafter referred to as a first conductor line 3. As shown in Fig. 1B, a film 4 is formed on one surface of the core material 1 from a photosensitive resin composition. The method of forming the film 4 includes, for example, a coating method and a dry film method.

在塗佈法中,例如在芯材1上塗佈感光性樹脂組成物,來形成濕潤薄膜。感光性樹脂組成物的塗佈方法,可選自公知的方法,例如由下述方法所組成之群組:浸漬法、噴霧法、旋轉塗佈法、輥塗佈法、簾幕式塗佈法(curtain coating)、及網版印刷法。繼而,為了使感光性樹脂組成物中的有機溶劑揮發,例如在60~120℃的範圍內的溫度下,使濕潤塗膜乾燥,藉此能夠獲得皮膜4。 In the coating method, for example, a photosensitive resin composition is applied onto the core material 1 to form a wet film. The coating method of the photosensitive resin composition may be selected from known methods, for example, a group consisting of a dipping method, a spray method, a spin coating method, a roll coating method, and a curtain coating method. (curtain coating), and screen printing. Then, in order to volatilize the organic solvent in the photosensitive resin composition, for example, the wet coating film is dried at a temperature in the range of 60 to 120 ° C, whereby the film 4 can be obtained.

在乾膜法中,首先在由聚酯等所作成的適當的支撐體上塗佈感光性樹脂組成物,再進行乾燥,藉此在支撐體上形成感光性樹脂組成物的乾燥物也就是乾膜。藉此,獲得一種積層體,其具備乾膜與用來支撐乾膜的支撐體。先將該積層體中的乾膜疊合於芯材1上,再對乾膜與芯材1施加壓力,繼而自乾膜將支撐體剝離,藉此自支撐體上將乾膜轉印至芯材1上。藉此,在芯材1上設置由乾膜所構成之皮膜4。 In the dry film method, first, a photosensitive resin composition is applied onto a suitable support made of polyester or the like, and dried, whereby a dried product of a photosensitive resin composition is formed on the support, that is, dried. membrane. Thereby, a laminated body having a dry film and a support for supporting the dry film is obtained. First, the dry film in the laminate is superposed on the core material 1, and then the dry film is pressed against the core material 1, and then the support is peeled off from the dry film, thereby transferring the dry film to the core from the support. On the material 1. Thereby, the film 4 composed of the dry film is provided on the core material 1.

如第1圖C所示,藉由對皮膜4進行曝光,來使皮膜4部分硬化。因此,例如先將負型光罩緊貼於皮膜4上,再對皮膜4照射紫外線。負型光罩具備使紫外線穿透之曝光部、及遮蔽紫外線之非曝光部,且非曝光部是設置在與貫穿孔10的位置一致的位置。負型光罩,例如是遮罩膜(mask film)或乾板(dry plate)等曝光用具(photo tool)。紫外線的光源,可選自由例如下述所組成之群組:化學燈(chemical lamp)、低壓水銀燈、中 壓水銀燈、高壓水銀燈、超高壓水銀燈、氙氣燈、及金屬鹵素燈。 As shown in Fig. 1C, the film 4 is partially cured by exposure to the film 4. Therefore, for example, the negative mask is attached to the film 4, and the film 4 is irradiated with ultraviolet rays. The negative photomask includes an exposure portion that allows ultraviolet rays to pass through, and a non-exposure portion that blocks ultraviolet rays, and the non-exposed portion is provided at a position that coincides with the position of the through hole 10. The negative mask is, for example, a photo tool such as a mask film or a dry plate. The source of ultraviolet light can be selected, for example, from the group consisting of: chemical lamp, low pressure mercury lamp, medium Pressure mercury lamp, high pressure mercury lamp, ultra high pressure mercury lamp, xenon lamp, and metal halide lamp.

再者,曝光方法,可以是使用負型光罩之方法以外的方法。例如,可藉由直接描繪法來對皮膜4進行曝光,該直接描繪法是將自光源發出的紫外線僅照射在皮膜4的所欲曝光的部分。適用於直接描繪法的光源,可選自由例如下述所組成之群組:高壓水銀燈、超高壓水銀燈、金屬鹵素燈、g線(436nm)、h線(405nm)、i線(365nm);以及,g線、h線及i線之中的2種以上的組合。 Further, the exposure method may be a method other than the method using a negative mask. For example, the film 4 can be exposed by a direct drawing method in which ultraviolet rays emitted from a light source are irradiated only on the portion of the film 4 to be exposed. A light source suitable for the direct drawing method may be selected, for example, from the group consisting of a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a metal halide lamp, a g line (436 nm), an h line (405 nm), an i line (365 nm); A combination of two or more of the g line, the h line, and the i line.

又,在乾膜法中,可先將該積層體的乾膜疊合於芯材1上,然後在不剝離支撐體的情形下,透過支撐體來對由乾膜所構成之皮膜4照射紫外線,藉此對皮膜4進行曝光,繼而在顯影處理前自皮膜4剝離支撐體。 Further, in the dry film method, the dry film of the laminate may be laminated on the core material 1, and then the film 4 composed of the dry film may be irradiated with ultraviolet rays through the support without peeling off the support. Thereby, the film 4 is exposed, and then the support is peeled off from the film 4 before the development process.

繼而,藉由對皮膜4實施顯影處理,來去除第1圖C所示的皮膜4的未曝光部分5,藉此,以第1圖D所示的方式,來在要形成貫穿孔10的位置上設置孔6。在顯影處理中,可視感光性樹脂組成物的組成而使用適當的顯影液。顯影液,例如是鹼性水溶液或有機胺,該鹼性水溶液含有鹼金屬鹽和鹼金屬氫氧化物之中的至少其中一者。鹼性水溶液,更具體而言,含有例如選自由下述所組成之群組中的至少一種成分:碳酸鈉、碳酸鉀、碳酸銨、碳酸氫鈉、碳酸氫鉀、碳酸氫銨、氫氧化鈉、氫氧化鉀、氫氧化銨、氫氧化四甲基銨、及氫氧化鋰。鹼性水溶液中的溶劑,可僅為水,亦可為水與低級醇類等親水性有機溶劑的混合 物。有機胺,可含有例如選自由下述所組成之群組中的至少一種成分:單乙醇胺、二乙醇胺、三乙醇胺、單異丙醇胺、二異丙醇胺、及三異丙醇胺。 Then, by performing development processing on the film 4, the unexposed portion 5 of the film 4 shown in Fig. 1C is removed, whereby the through hole 10 is formed in the manner shown in Fig. 1D. Set the hole 6 on it. In the development treatment, an appropriate developer can be used depending on the composition of the photosensitive resin composition. The developing solution is, for example, an alkaline aqueous solution or an organic amine containing at least one of an alkali metal salt and an alkali metal hydroxide. The alkaline aqueous solution, more specifically, contains, for example, at least one component selected from the group consisting of sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, ammonium hydrogencarbonate, sodium hydroxide , potassium hydroxide, ammonium hydroxide, tetramethylammonium hydroxide, and lithium hydroxide. The solvent in the alkaline aqueous solution may be only water or a mixture of water and a hydrophilic organic solvent such as a lower alcohol. Things. The organic amine may contain, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine.

顯影液,較佳是含有鹼金屬鹽和鹼金屬氫氧化物中的至少其中一者之鹼性水溶液,特佳是碳酸鈉水溶液。此時,能夠達成作業環境的提升和廢棄物處理的負擔減少。 The developer is preferably an aqueous alkaline solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. At this time, it is possible to achieve an increase in the working environment and a reduction in the burden of waste disposal.

繼而,藉由對皮膜4進行加熱來使其硬化。加熱的條件,例如,加熱溫度是在120~200℃的範圍內,加熱時間是在30~120分鐘的範圍內。若以這樣的方式進行來使皮膜4進行熱硬化,則能夠提升層間絕緣層7的強度、硬度、耐化學藥品性等性能。 Then, the film 4 is hardened by heating it. The heating conditions, for example, the heating temperature is in the range of 120 to 200 ° C, and the heating time is in the range of 30 to 120 minutes. When the film 4 is thermally cured in this manner, the properties such as strength, hardness, and chemical resistance of the interlayer insulating layer 7 can be improved.

可視需要而在加熱前或加熱後、或在加熱前與加熱後,對皮膜4進一步照射紫外線。此時,能夠使皮膜4的光硬化進一步進行。 The film 4 is further irradiated with ultraviolet rays before or after heating, or before and after heating, as needed. At this time, the photocuring of the film 4 can be further performed.

根據以上所述,能夠在芯材1上設置層間絕緣層7,該層間絕緣層7是由感光性樹脂組成物的硬化物所構成。可藉由加成法等公知的方法,來在該層間絕緣層7上設置第二導體線路8和穿孔鍍覆9。藉此,如第1圖E所示,能夠獲得印刷線路板11,其具備:第一導體線路3;第二導體線路8;層間絕緣層7,其介於第一導體線路3與第二導體線路8之間;以及,貫穿孔10,其將第一導體線路3與第二導體線路8進行電性連接。再者,在第1圖E中, 穿孔鍍覆9具有將孔6的內面被覆之筒狀的形狀,但是亦可在孔6的內側整體填充有穿孔鍍覆9。 According to the above, the interlayer insulating layer 7 can be provided on the core material 1, and the interlayer insulating layer 7 is composed of a cured product of a photosensitive resin composition. The second conductor line 8 and the perforated plating 9 may be provided on the interlayer insulating layer 7 by a known method such as an additive method. Thereby, as shown in FIG. 1E, a printed wiring board 11 having the first conductor line 3, the second conductor line 8, and the interlayer insulating layer 7 interposed between the first conductor line 3 and the second conductor can be obtained. Between the lines 8; and the through hole 10, the first conductor line 3 and the second conductor line 8 are electrically connected. Furthermore, in Figure 1E, The perforated plating 9 has a tubular shape in which the inner surface of the hole 6 is covered, but a perforated plating 9 may be entirely filled inside the hole 6.

又,在設置如第1圖E這樣的穿孔鍍覆9前,可對孔6的內側面整體與層間絕緣層7的一部分外表面進行粗糙化。以這樣的方式進行,來對層間絕緣層7的一部分外表面與孔6的內側面進行粗糙化,藉此能夠提升芯材1與穿孔鍍覆9的黏合性。 Further, before the perforated plating 9 as in FIG. 1E is provided, the entire inner surface of the hole 6 and a part of the outer surface of the interlayer insulating layer 7 can be roughened. In such a manner, a part of the outer surface of the interlayer insulating layer 7 and the inner surface of the hole 6 are roughened, whereby the adhesion of the core material 1 to the perforated plating 9 can be improved.

在對層間絕緣層7的一部分外表面與孔6的內側面整體進行粗糙化時,可以與一般的除膠渣處理相同的順序來實行,該除膠渣處理使用了市售的用於除膠渣的膨潤液與除膠渣液。然而,並不受限於此方式,亦可適當採用下述能夠對硬化物賦予粗糙面的手法:電漿處理、UV處理或臭氧處理等。 When the outer surface of a part of the interlayer insulating layer 7 and the inner surface of the hole 6 are roughened as a whole, it can be carried out in the same order as the general desmear treatment, which is commercially available for degumming. Swelling liquid of slag and degreasing liquid. However, the present invention is not limited to this, and the following method capable of imparting a rough surface to the cured product may be suitably employed: plasma treatment, UV treatment, ozone treatment, and the like.

在設置穿孔鍍覆9時,可對粗糙化後的一部分的外表面與孔6的內側面,實施無電解金屬鍍覆處理,來形成起始線路。之後,以電解金屬鍍覆處理來使電解質鍍覆液中的金屬析出在起始線路上,藉此能夠形成穿孔鍍覆9。 When the perforated plating 9 is provided, an electroless metal plating treatment may be performed on the outer surface of the roughened portion and the inner surface of the hole 6 to form an initial line. Thereafter, the metal in the electrolyte plating solution is deposited on the starting line by electrolytic metal plating treatment, whereby the perforated plating 9 can be formed.

說明製造印刷線路板的方法的一例,該印刷線路板具備由本實施形態的感光性樹脂組成物所形成之抗焊劑層。 An example of a method of manufacturing a printed wiring board comprising a solder resist layer formed of the photosensitive resin composition of the present embodiment will be described.

首先,準備芯材。芯材,具備例如至少一絕緣層與至少一導體線路。在芯材的設置有導體線路的面上,由感光性樹脂組成物形成皮膜。作為皮膜的形成方法,可 列舉塗佈法與乾膜法。作為塗佈法與乾膜法,可採用與上述形成層間絕緣層時相同的方法。藉由對皮膜進行曝光來使部分進行硬化。曝光方法,亦可採用與上述形成層間絕緣層時相同的方法。繼而,藉由對皮膜實施顯影處理,來去除皮膜的未曝光部分,藉此,皮膜的曝光後的部分殘留於芯材上。繼而,藉由對芯材上的皮膜進行加熱,來使其進行熱硬化。顯影方法和加熱方法,亦可採用與上述形成層間絕緣層時相同的方法。在加熱前或加熱後、或在加熱前與加熱後,對皮膜進一步照射紫外線。此時,能夠使皮膜的光硬化進一步進行。 First, prepare the core material. The core material is provided with, for example, at least one insulating layer and at least one conductor line. A film is formed from a photosensitive resin composition on a surface of the core material on which the conductor line is provided. As a method of forming a film, The coating method and the dry film method are listed. As the coating method and the dry film method, the same method as in the case of forming the interlayer insulating layer described above can be employed. The portion is hardened by exposing the film. The exposure method may be the same as the above-described method of forming the interlayer insulating layer. Then, the unexposed portion of the film is removed by subjecting the film to development treatment, whereby the exposed portion of the film remains on the core material. Then, the film on the core material is thermally hardened by heating it. The developing method and the heating method may be the same as those in the case of forming the interlayer insulating layer described above. The film is further irradiated with ultraviolet rays before or after heating, or before and after heating. At this time, the photocuring of the film can be further performed.

根據以上所述,能夠在芯材上設置抗焊劑層,該抗焊劑層是由感光性樹脂組成物的硬化物所構成。藉此,能夠獲得一種印刷線路板,其具備:芯材,其具備絕緣層與其上的導體線路;以及,抗焊劑層,其部分地包覆了芯材的設置有導體線路的面。 According to the above, the solder resist layer can be provided on the core material, and the solder resist layer is composed of a cured product of the photosensitive resin composition. Thereby, it is possible to obtain a printed wiring board comprising: a core material having an insulating layer and a conductor line thereon; and a solder resist layer partially covering the surface of the core material on which the conductor line is provided.

[實施例] [Examples]

以下,藉由實施例來具體地說明本發明。 Hereinafter, the present invention will be specifically described by way of examples.

(1)合成例A-1~合成例A-7、以及合成例B-1和合成例B-3~合成例B-4 (1) Synthesis Example A-1 to Synthesis Example A-7, and Synthesis Example B-1 and Synthesis Example B-3 to Synthesis Example B-4

在安裝有回流冷卻器、溫度計、空氣吹入管及攪拌機之四頸燒瓶內,添加表1和表2中的「第一反應」欄中所示的原料成分,並在有氣泡產生的狀態下攪拌這些原料成分,藉此調配混合物。於四頸燒瓶內,在有氣泡產生的狀態下一面攪拌該混合物,一面以「第一反應」欄的「反應 條件」欄中所示的反應溫度和反應時間來進行加熱。藉此,調配中間體的溶液。 In a four-necked flask equipped with a reflux condenser, a thermometer, an air blowing tube, and a stirrer, the raw material components shown in the "First Reaction" column in Tables 1 and 2 were added, and stirred in the presence of bubbles. These raw material ingredients are used to formulate the mixture. In the four-necked flask, the mixture was stirred while the bubbles were present, and the reaction was carried out in the "first reaction" column. Heating is carried out by the reaction temperature and the reaction time shown in the Conditions column. Thereby, a solution of the intermediate is formulated.

繼而,在四頸燒瓶內的中間體的溶液中,投入表1和表2的「第二反應」欄中所示的原料成分,並在有氣泡產生的狀態下一面攪拌四頸燒瓶內的溶液,一面以「第二反應」欄的「反應條件(1)」欄中所示的反應溫度和反應時間來進行加熱。繼而,除了合成例B-1、B-3及合成例B-4以外,其餘則在有氣泡產生的狀態下一面攪拌四頸燒瓶內的溶液,一面以「第二反應」欄的「反應條件(2)」欄中所示的反應溫度和反應時間來進行加熱。藉此,獲得含羧基樹脂的65質量%溶液。含羧基樹脂的重量平均分子量和酸價,如表1和表2所示。成分間的莫耳比亦表示於表1及2中。 Then, the raw material components shown in the "second reaction" column of Tables 1 and 2 were charged into the solution of the intermediate in the four-necked flask, and the solution in the four-necked flask was stirred while the bubbles were generated. The heating was carried out by the reaction temperature and the reaction time shown in the column of "Reaction conditions (1)" in the "second reaction" column. Then, in addition to the synthesis examples B-1 and B-3 and the synthesis example B-4, the solution in the four-necked flask was stirred while the bubbles were generated, and the reaction conditions in the "second reaction" column were used. The reaction temperature and reaction time shown in the column (2) are heated. Thereby, a 65 mass% solution of the carboxyl group-containing resin was obtained. The weight average molecular weight and acid value of the carboxyl group-containing resin are shown in Tables 1 and 2. The molar ratio between the components is also shown in Tables 1 and 2.

再者,表1和表2中的(a1)欄中所示的成分的詳細內容如下所述。 Further, the details of the components shown in the column (a1) in Tables 1 and 2 are as follows.

‧環氧化合物1:環氧當量250g/eq的雙酚茀型環氧化合物,其以式(7)來表示,且式(7)中的R1~R8皆為氫。 ‧Epoxy compound 1: A bisphenol fluorene type epoxy compound having an epoxy equivalent of 250 g/eq, which is represented by the formula (7), and all of R 1 to R 8 in the formula (7) are hydrogen.

‧環氧化合物2:環氧當量279g/eq的雙酚茀型環氧化合物,其以式(7)來表示,且式(7)中的R1和R5皆為甲基,R2~R4及R6~R8皆為氫。 ‧Epoxy compound 2: a bisphenol fluorene type epoxy compound having an epoxy equivalent of 279 g/eq, which is represented by the formula (7), and R 1 and R 5 in the formula (7) are each a methyl group, R 2 ~ R 4 and R 6 to R 8 are all hydrogen.

又,表1及2中的(g1)欄中所示的成分的詳細內容如下所述。 The details of the components shown in the column (g1) in Tables 1 and 2 are as follows.

‧環氧化合物A:聯苯酚醛清漆型環氧樹脂(日本化藥股份有限公司製造的商品名NC-3000-H,環氧當量288g/eq)。 ‧Epoxy compound A: a biphenol novolak type epoxy resin (trade name: NC-3000-H, manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent: 288 g/eq).

‧環氧化合物B:甲酚酚醛清漆型環氧樹脂(新日鐵住金化學股份有限公司製造的商品名YDC-700-5,環氧當量203g/eq)。 ‧Epoxy compound B: cresol novolac type epoxy resin (trade name YDC-700-5, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., epoxy equivalent: 203 g/eq).

又,表1和表2中的(a2)欄中所示的成分的詳細內容如下所述。 Further, the details of the components shown in the column (a2) in Tables 1 and 2 are as follows.

‧ω-羧基-聚己內酯(n≒2)單丙烯酸酯:東亞合成股份有限公司製造,商品名ARONIX M-5300(數量平均分子量290)。 ‧ ω-carboxy-polycaprolactone (n≒2) monoacrylate: manufactured by Toagosei Co., Ltd., trade name ARONIX M-5300 (number average molecular weight 290).

(2)合成例B-2 (2) Synthesis Example B-2

在安裝有回流冷卻器、溫度計、氮氣取代用玻璃管及攪拌機之四頸燒瓶內,添加75質量份的甲基丙烯酸、85質量份的甲基丙烯酸甲酯、20質量份的苯乙烯、20份的甲基丙烯酸丁酯、430質量份的二丙二醇單甲基醚、及5質量份的偶氮雙異丁腈。在氮氣氣流下以75℃對該四頸燒瓶內的溶液加熱5小時,來進行聚合反應,藉此獲得濃度32%的共聚物溶液。 75 parts by mass of methacrylic acid, 85 parts by mass of methyl methacrylate, 20 parts by mass of styrene, and 20 parts were placed in a four-necked flask equipped with a reflux condenser, a thermometer, a glass tube for nitrogen replacement, and a stirrer. Butyl methacrylate, 430 parts by mass of dipropylene glycol monomethyl ether, and 5 parts by mass of azobisisobutyronitrile. The solution in the four-necked flask was heated at 75 ° C for 5 hours under a nitrogen gas stream to carry out a polymerization reaction, whereby a copolymer solution having a concentration of 32% was obtained.

在該共聚物溶液中,添加0.1質量份的氫醌、50質量份的甲基丙烯酸環氧丙酯、及0.8質量份的二甲基苯甲基胺,並以80℃加熱24小時,藉此進行加成反應。藉此,獲得含羧基樹脂(B-1)的37%溶液。含羧基樹脂(B-1)的重量平均分子量是31790,固體成分酸價是120mgKOH/g。 0.1 parts by mass of hydroquinone, 50 parts by mass of glycidyl methacrylate, and 0.8 parts by mass of dimethylbenzylamine were added to the copolymer solution, and heated at 80 ° C for 24 hours. The addition reaction is carried out. Thereby, a 37% solution of the carboxyl group-containing resin (B-1) was obtained. The weight average molecular weight of the carboxyl group-containing resin (B-1) was 31,790, and the acid value of the solid content was 120 mgKOH/g.

[表1] [Table 1]

[表2] [Table 2]

以三輥研磨機來混練後述表3~表7的「組成」欄中所示的一部分成分。繼而將該混練物轉移至燒瓶內, 並將後述表3~表7中所示的所有成分攪拌混合,藉此獲得除了實施例8以外的實施例及比較例的感光性樹脂組成物。在製作感光性樹脂組成物時,使三聚氰胺和三聚氰胺衍生物的群組中的至少一種,均勻地分散在感光性樹脂組成物中。再者,表3~表7中所示的成分的詳細內容如下所述。 A part of the components shown in the "Composition" column of Tables 3 to 7 described later were mixed by a three-roll mill. The kneaded product is then transferred to the flask, The photosensitive resin compositions of the examples and the comparative examples other than Example 8 were obtained by stirring and mixing all the components shown in Tables 3 to 7 described later. At the time of producing a photosensitive resin composition, at least one of a group of melamine and a melamine derivative is uniformly dispersed in a photosensitive resin composition. Further, the details of the components shown in Tables 3 to 7 are as follows.

‧不飽和化合物(TMPTA):三羥甲基丙烷三丙烯酸酯。 ‧ Unsaturated compound (TMPTA): Trimethylolpropane triacrylate.

‧不飽和化合物(DPHA):二季戊四醇六丙烯酸酯。 ‧ Unsaturated compound (DPHA): dipentaerythritol hexaacrylate.

‧光聚合起始劑(TPO):2,4,6-三甲基苯甲醯基-二苯基-氧化膦(巴斯夫公司製造,商品型號Irgacure TPO)。 ‧ Photopolymerization initiator (TPO): 2,4,6-trimethylbenzimidyl-diphenyl-phosphine oxide (manufactured by BASF Corporation, trade name Irgacure TPO).

‧光聚合起始劑(IC819):雙(2,4,6-三甲基苯甲醯基)苯基氧化膦(巴斯夫公司製造,商品型號Irgacure 819)。 ‧ Photopolymerization initiator (IC819): bis(2,4,6-trimethylbenzylidene)phenylphosphine oxide (manufactured by BASF Corporation, trade name Irgacure 819).

‧光聚合起始劑(IC184):1-羥基-環己基-苯基-酮(巴斯夫公司製造,商品型號Irgacure 184)。 ‧ Photopolymerization initiator (IC184): 1-hydroxy-cyclohexyl-phenyl-ketone (manufactured by BASF Corporation, trade name Irgacure 184).

‧光聚合起始劑(IC1173):2-羥基-2-甲基-1-苯基-丙-1-酮(巴斯夫公司製造,商品型號Irgacure 1173)。 ‧ Photopolymerization initiator (IC1173): 2-hydroxy-2-methyl-1-phenyl-propan-1-one (manufactured by BASF Corporation, trade name Irgacure 1173).

‧光聚合起始劑(EAB):4,4’-雙(二乙基胺基)二苯基酮。 ‧ Photopolymerization initiator (EAB): 4,4'-bis(diethylamino)diphenyl ketone.

‧光聚合起始劑(IC907):2-甲基-1-(4-甲基硫苯基)-2-(N-嗎啉基)丙-1-酮(巴斯夫公司製造,商品型號Irgacure 907)。 ‧Photopolymerization initiator (IC907): 2-methyl-1-(4-methylthiophenyl)-2-(N-morpholinyl)propan-1-one (manufactured by BASF Corporation, product type Irgacure 907 ).

‧光聚合起始劑(DETX):2,4-二乙基2,4-二乙基噻噸-9-酮。 ‧ Photopolymerization initiator (DETX): 2,4-diethyl 2,4-diethyl thioxanthene-9-one.

‧結晶性環氧樹脂(YX4000):聯苯型結晶性環氧樹脂(三菱化學股份有限公司製造的商品名YX-4000,熔點105℃,環氧當量187g/eq)。 ‧ Crystalline epoxy resin (YX4000): biphenyl type crystalline epoxy resin (trade name YX-4000, manufactured by Mitsubishi Chemical Corporation, melting point 105 ° C, epoxy equivalent: 187 g/eq).

‧結晶性環氧樹脂(YSLV80XY):雙酚型結晶性環氧樹脂(新日鐵住金化學股份有限公司製造的商品名YSLV-80XY,熔點75~85℃,環氧當量192g/eq) ‧ Crystalline epoxy resin (YSLV80XY): bisphenol-type crystalline epoxy resin (trade name: YSLV-80XY, manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd., melting point: 75-85 ° C, epoxy equivalent: 192 g/eq)

‧非晶性環氧樹脂(MX-130):含橡膠粒子之雙酚F型環氧樹脂(鐘化股份有限公司製造,商品型號Kane Ace MX-130) ‧Amorphous epoxy resin (MX-130): Bisphenol F-type epoxy resin containing rubber particles (manufactured by Chunghua Co., Ltd., product model Kane Ace MX-130)

‧非晶性環氧樹脂(EXA-4816):非晶性環氧樹脂溶液,是以固體成分為90%的方式,將含長鏈碳鏈之雙酚A型環氧樹脂(DIC股份有限公司製造,商品型號EPICLON EXA-4816,液狀樹脂,環氧當量410g/eq)溶於二乙二醇單乙基醚乙酸酯而得的溶液(以固體成分90%來換算的環氧當量是455.56g/eq)。 ‧Amorphous epoxy resin (EXA-4816): Amorphous epoxy resin solution, bisphenol A type epoxy resin containing long chain carbon chain (DIC Co., Ltd.) in a solid content of 90% Manufactured, product model EPICLON EXA-4816, liquid resin, epoxy equivalent 410 g / eq) dissolved in diethylene glycol monoethyl ether acetate solution (the epoxy equivalent in terms of solid content of 90% is 455.56g/eq).

‧三聚氰胺:日產化學工業股份有限公司製造,三聚氰胺微粉,以平均粒徑為8μm的方式分散在感光性樹脂組成物中。 ‧ Melamine: Made of Nissan Chemical Industry Co., Ltd., melamine fine powder, dispersed in a photosensitive resin composition in an average particle diameter of 8 μm.

‧三聚氰胺衍生物:三聚氰胺與1,2,3,6-四氫鄰苯二酸酐之反應物也就是三聚氰胺-四氫鄰苯二甲酸鹽,以平均粒徑為6μm的方式分散在感光性樹脂組成物中。 ‧ Melamine derivative: a reaction product of melamine and 1,2,3,6-tetrahydrophthalic anhydride, that is, melamine-tetrahydrophthalic acid salt, dispersed in a photosensitive resin in an average particle diameter of 6 μm In the composition.

‧抗氧化劑:受阻酚系抗氧化劑,巴斯夫公司製造,商品型號IRGANOX 1010。 ‧Antioxidant: A hindered phenolic antioxidant, manufactured by BASF, under the trade designation IRGANOX 1010.

‧無機填料(PMA-ST):無機填料的分散液,奈米矽溶膠(日產化學製造,商品型號PMA-ST:分散媒為丙二醇單甲基醚乙酸酯,SiO2含有率30%,平均粒徑10~15nm)。 ‧Inorganic filler (PMA-ST): dispersion of inorganic filler, nano sol (produced by Nissan Chemical Co., Ltd., product model PMA-ST: propylene glycol monomethyl ether acetate, SiO 2 content 30%, average Particle size 10~15nm).

‧無機填料(A-8):結晶性二氧化矽(Unimin公司製造的IMSIL A-8,平均粒徑2~3μm)。 ‧ Inorganic filler (A-8): Crystalline cerium oxide (IMSIL A-8 manufactured by Unimin Co., Ltd., average particle diameter 2 to 3 μm).

‧無機填料(B30):硫酸鋇(堺化學工業股份有限公司製造,商品型號BARIACE B30,平均粒徑0.3μm)。 ‧ Inorganic filler (B30): Barium sulfate (manufactured by Dai Chemical Industry Co., Ltd., product model BARIACE B30, average particle diameter 0.3 μm).

‧無機填料(B31):硫酸鋇(堺化學工業股份有限公司製造,商品型號BARIACE B31,平均粒徑0.3μm)。 ‧ Inorganic filler (B31): Barium sulfate (manufactured by Dai Chemical Industry Co., Ltd., product model BARIACE B31, average particle diameter 0.3 μm).

‧消泡劑:信越矽利光股份有限公司製造,商品型號KS-66。 ‧ Defoamer: manufactured by Shin-Etsu Lee Co., Ltd., product model KS-66.

‧界面活性劑(F-477):DIC股份有限公司製造,商品型號MEGAFACE F-477。 ‧ Surfactant (F-477): Manufactured by DIC Corporation, product model MEGAFACE F-477.

‧界面活性劑(F-470):DIC股份有限公司製造,商品型號MEGAFACE F-470。 ‧ Surfactant (F-470): Manufactured by DIC Corporation, product model MEGAFACE F-470.

‧流變調節劑:BYK Japan股份有限公司製造,商品型號BYK-430。 ‧ Rheology regulator: manufactured by BYK Japan Co., Ltd., product model BYK-430.

‧矽烷耦合劑:3-環氧丙氧基丙基三甲氧基矽烷。 ‧ decane coupling agent: 3-glycidoxypropyltrimethoxydecane.

‧溶劑(EDGAC):二乙二醇單乙基醚乙酸酯。 ‧ Solvent (EDGAC): Diethylene glycol monoethyl ether acetate.

‧溶劑(MEK):甲基乙基酮。 ‧ Solvent (MEK): methyl ethyl ketone.

[實施例1~9和比較例1~2] [Examples 1 to 9 and Comparative Examples 1 to 2]

[製作測試片] [production test piece]

以下述順序來製作實施例1~9和比較例1~2各自的測試片。 Test pieces of each of Examples 1 to 9 and Comparative Examples 1 and 2 were produced in the following order.

<實施例1~7、9及比較例1~2> <Examples 1 to 7, 9 and Comparative Examples 1 to 2>

準備具備厚度35μm銅箔之玻璃環氧覆銅積層板(FR-4型)。在該玻璃環氧覆銅積層板上,以減成法來形成作為導體線路的梳型電極,藉此獲得印刷線路板,該梳型電極的線寬/間距為50μm/50μm。以MEC股份有限公司製造的商品型號CZ-8100,來溶解並去除該印刷線路板的導體線路的厚度1μm左右的表面部分,藉此對導體線路進行粗糙化。在該印刷線路板的其中一面的整個面上,以網版印刷法來塗佈感光性樹脂組成物,藉此形成濕潤塗膜。以80℃對該濕潤塗膜加熱30分鐘,來進行預備乾燥,藉此形成膜厚25μm的皮膜。在將具有非曝光部之負型光罩直接與該皮膜接觸的狀態下,以500mJ/cm2的條件對皮膜照射紫外線來實行曝光,該非曝光部具有包含直徑50μm的圓形形狀之圖案。對曝光後的皮膜實施顯影處理。在顯影處理時,以0.2MPa的噴射壓力對皮膜噴射30℃的1%碳酸鈉水溶液90秒。繼而,藉由以0.2MPa的噴射壓力對皮膜噴射純水90秒,來清洗皮膜。藉此,去除皮膜的未曝光部分,並在皮膜上形成孔。繼而,以1000mJ/cm2的條件來對皮膜照射紫外線。並且,以150℃對皮膜加熱60分鐘。藉此,在印刷線路板(芯材)上形成由感光性樹脂組成物所構成之層。藉此獲得測試片。 A glass epoxy copper clad laminate (FR-4 type) having a copper foil having a thickness of 35 μm was prepared. On the glass epoxy-clad laminate, a comb-shaped electrode as a conductor line was formed by a subtractive method, thereby obtaining a printed wiring board having a line width/space of 50 μm/50 μm. A conductor portion CZ-8100 manufactured by MEC Co., Ltd. was used to dissolve and remove the surface portion of the conductor wiring of the printed wiring board having a thickness of about 1 μm, thereby roughening the conductor wiring. A photosensitive resin composition is applied on the entire surface of one side of the printed wiring board by a screen printing method, thereby forming a wet coating film. The wet coating film was heated at 80 ° C for 30 minutes to carry out preliminary drying to form a film having a film thickness of 25 μm. Exposure was carried out by irradiating the film with ultraviolet rays under conditions of 500 mJ/cm 2 in a state where the negative mask having the non-exposed portion was directly in contact with the film, and the non-exposed portion had a circular shape including a diameter of 50 μm. The developed film is subjected to development treatment. At the time of development processing, a 1% sodium carbonate aqueous solution of 30 ° C was sprayed on the film at an ejection pressure of 0.2 MPa for 90 seconds. Then, the film was washed by spraying pure water on the film at an ejection pressure of 0.2 MPa for 90 seconds. Thereby, the unexposed portion of the film is removed, and a hole is formed in the film. Then, the film was irradiated with ultraviolet rays at a condition of 1000 mJ/cm 2 . Further, the film was heated at 150 ° C for 60 minutes. Thereby, a layer composed of a photosensitive resin composition is formed on the printed wiring board (core material). Thereby a test piece is obtained.

<實施例8> <Example 8>

以三輥研磨機來混練後述表4的「組成」欄中所示的成分,藉此獲得感光性樹脂組成物。在製作該感光性樹脂組成物時,使三聚氰胺均勻地分散在感光性樹脂組成物中。 The components shown in the "composition" column of Table 4, which will be described later, were kneaded by a three-roll mill to obtain a photosensitive resin composition. When the photosensitive resin composition is produced, melamine is uniformly dispersed in the photosensitive resin composition.

先以塗敷器(applicator)將該感光性樹脂組成物塗佈在聚對苯二甲酸乙二酯製的薄膜上,再藉由以80~110℃進行加熱,來使其乾燥,藉此在薄膜上形成厚度25μm的乾膜。 First, the photosensitive resin composition is applied onto a film made of polyethylene terephthalate by an applicator, and then dried by heating at 80 to 110 ° C. A dry film having a thickness of 25 μm was formed on the film.

將乾膜加熱層合於與實施例1~7、9及比較例1~2時相同的印刷線路板上。加熱層合,是藉由真空層合機並以0.5MPa、80℃、1分鐘的條件來實行。藉此,在印刷線路板上形成厚度25μm的皮膜。藉由對該皮膜實施與實施例1~7、9及比較例1~2相同的處理,來在印刷線路板(芯材)上形成由感光性樹脂組成物的硬化物(亦可稱為乾膜的硬化物)所構成之層。再者,聚對苯二甲酸乙二酯製的薄膜,是在顯影步驟前自皮膜剝離。藉此獲得測試片。 The dry film was heated and laminated on the same printed wiring board as in Examples 1 to 7, 9 and Comparative Examples 1 and 2. The heating lamination was carried out by a vacuum laminator at a condition of 0.5 MPa, 80 ° C, and 1 minute. Thereby, a film having a thickness of 25 μm was formed on the printed wiring board. By performing the same treatments as in Examples 1 to 7 and 9 and Comparative Examples 1 and 2 on the film, a cured product of a photosensitive resin composition (also referred to as dry) is formed on a printed wiring board (core material). The layer formed by the cured film of the film. Further, the film made of polyethylene terephthalate was peeled off from the film before the development step. Thereby a test piece is obtained.

[評估試驗] [evaluation test]

以下述順序來評估實施例1~9及比較例1~2各自的測試片。將其結果表示於下述表3和表4中。 The test pieces of each of Examples 1 to 9 and Comparative Examples 1 and 2 were evaluated in the following order. The results are shown in Tables 3 and 4 below.

(1)黏性 (1) Viscosity

在製作各實施例和比較例的測試片時,於皮膜曝光後自皮膜取下負型光罩時的皮膜的黏性程度,是以下述方式進行評估。 In the preparation of the test pieces of the respective Examples and Comparative Examples, the degree of stickiness of the film when the negative mask was removed from the film after exposure of the film was evaluated in the following manner.

A:在自皮膜取下負型光罩時沒有抗性的感覺,且在取下負型光罩後的皮膜上,未確認到黏貼的痕跡。 A: There was no feeling of resistance when the negative mask was removed from the film, and no trace of adhesion was observed on the film after the negative mask was removed.

B:在自皮膜取下負型光罩時有抗性的感覺,且在取下負型光罩後的皮膜上,確認到黏貼的痕跡。 B: A feeling of resistance was obtained when the negative mask was removed from the film, and a mark of adhesion was confirmed on the film after the negative mask was removed.

C:難以自皮膜取下負型光罩,且若強行取下負型光罩,則皮膜破損。 C: It is difficult to remove the negative mask from the film, and if the negative mask is forcibly removed, the film is broken.

再者,關於黏性評估為C之比較例2,並未實行以下除了黏性以外的評估。又,關於實施例8,是自乾膜形成皮膜,因此未實行黏性的評估。 Further, with respect to Comparative Example 2 in which the viscosity evaluation was C, the following evaluations other than the viscosity were not performed. Further, in Example 8, since the film was formed from the dry film, the evaluation of the viscosity was not performed.

(2)解析度 (2) Resolution

觀察在各實施例和比較例的測試片中的由硬化物所構成之層上形成的孔,並以下述方式評估其結果。 The pores formed on the layer composed of the cured product in the test pieces of the respective Examples and Comparative Examples were observed, and the results were evaluated in the following manner.

A:孔的底部的直徑是40μm以上。 A: The diameter of the bottom of the hole is 40 μm or more.

B:孔的底部的直徑是25μm以上但小於40μm。 B: The diameter of the bottom of the hole is 25 μm or more but less than 40 μm.

C:孔的底部的直徑小於25μm、或未形成明確的孔。 C: The diameter of the bottom of the hole is less than 25 μm, or a clear hole is not formed.

(3)耐鍍覆性 (3) Plating resistance

先在各實施例和比較例的測試片中的由硬化物所構成之層上,使用市售的無電鍍鎳浴來形成鍍鎳層,再使用市售的無電鍍金浴來形成鍍金層。藉此,在由硬化物所構成之層上,形成由鍍鎳層和鍍金層所構成之金屬層。以目視觀察由硬化物所構成之層和金屬層。又,對於金屬層實行玻璃紙黏著膠帶剝離試驗。以下述方式評估其結果。 First, a nickel-plated layer was formed on a layer composed of a cured product in the test pieces of the respective Examples and Comparative Examples using a commercially available electroless nickel plating bath, and a gold-plated layer was formed using a commercially available electroless gold plating bath. Thereby, a metal layer composed of a nickel plating layer and a gold plating layer is formed on the layer composed of the cured product. The layer composed of the cured material and the metal layer were visually observed. Further, a cellophane adhesive tape peeling test was performed on the metal layer. The results were evaluated in the following manner.

A:由硬化物所構成之層和金屬層的外觀未確認到異常,且沒有發生由於玻璃紙黏著膠帶剝離試驗導致金屬層剝離的情形。 A: The appearance of the layer composed of the cured product and the metal layer was not confirmed to be abnormal, and the peeling of the metal layer due to the cellophane adhesive tape peeling test did not occur.

B:在由硬化物所構成之層確認到變色,但是沒有發生由於玻璃紙黏著膠帶剝離試驗導致金屬層剝離的情形。 B: Discoloration was confirmed in the layer composed of the cured product, but the peeling of the metal layer due to the cellophane adhesive tape peeling test did not occur.

C:確認到由硬化物所構成之層浮起,且發生由於玻璃紙黏著膠帶剝離試驗導致金屬層剝離的情形 C: It was confirmed that the layer composed of the cured product floated, and the peeling of the metal layer due to the peeling test of the cellophane adhesive tape occurred.

(4)線間絕緣性 (4) Insulation between wires

一面對各實施例和比較例的測試片中的導體線路(梳型電極)施加直流(DC)30V的偏電壓(bias voltage),一面將印刷線路板暴露在121℃、97%的相對溼度(relative humidity,R.H.)的試驗環境下100小時。在該試驗環境下持續測定由硬化物所構成之層的梳型電極間的電阻值,並依據下述評估基準來評估其結果。 A bias voltage of direct current (DC) of 30 V was applied to the conductor line (comb electrode) in the test piece of each of the examples and the comparative examples, and the printed wiring board was exposed to 121 ° C and a relative humidity of 97%. (relative humidity, RH) test environment for 100 hours. The resistance value between the comb-shaped electrodes of the layer composed of the cured product was continuously measured in this test environment, and the results were evaluated in accordance with the following evaluation criteria.

A:自試驗開始時至經過100小時為止之間,電阻值一直維持在106Ω以上。 A: The resistance value is maintained at 10 6 Ω or more from the start of the test to the lapse of 100 hours.

B:自試驗開始時至經過80小時為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過100小時前,電阻值小於106Ω。 B: The resistance value was maintained at 10 6 Ω or more from the start of the test to the lapse of 80 hours, but the resistance value was less than 10 6 Ω from the start of the test to 100 hours before the test.

C:自試驗開始時至經過60小時為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過80小時前,電阻值小於106Ω。 C: The resistance value was maintained at 10 6 Ω or more from the start of the test to the lapse of 60 hours, but the resistance value was less than 10 6 Ω from the start of the test to 80 hours before the test.

D:自試驗開始時至經過60小時前,電阻值小於106Ω。 D: The resistance value was less than 10 6 Ω from the start of the test until 60 hours passed.

(5)層間絕緣性 (5) interlayer insulation

在各實施例和比較例的測試片中的由硬化物所構成之層上,黏貼導電膠帶。一面對該導電膠帶施加DC100V的偏電壓,一面將印刷線路板暴露在121℃、97%R.H.的試驗環境下50小時。在該試驗環境下持續測定由硬化物所構成之層的導體線路與導電膠帶之間的電阻值,並依據下述評估基準來評估其結果。 A conductive tape was adhered to the layer composed of the cured material in the test pieces of the respective Examples and Comparative Examples. While applying a bias voltage of DC 100 V to the conductive tape, the printed wiring board was exposed to a test environment of 121 ° C and 97% R.H. for 50 hours. The resistance value between the conductor wiring of the layer composed of the cured product and the conductive tape was continuously measured in this test environment, and the results were evaluated in accordance with the following evaluation criteria.

A:自試驗開始時至經過50小時為止之間,電阻值一直維持在106Ω以上。 A: The resistance value was maintained at 10 6 Ω or more from the start of the test until 50 hours passed.

B:自試驗開始時至經過35小時為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過50小時前,電阻值小於106Ω。 B: The resistance value was maintained above 10 6 Ω from the start of the test to 35 hours, but the resistance value was less than 10 6 Ω from the start of the test until 50 hours passed.

C:自試驗開始時至經過20小時為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過35小時前,電阻值小於106Ω。 C: The resistance value was maintained above 10 6 Ω from the start of the test to the lapse of 20 hours, but the resistance value was less than 10 6 Ω from the start of the test to 35 hours before the test.

D:自試驗開始時至經過20小時前,電阻值小於106Ω。 D: The resistance value was less than 10 6 Ω from the start of the test until 20 hours passed.

(6)玻璃轉化溫度 (6) Glass transition temperature

在鐵氟龍(註冊商標)製的構件上形成由硬化物所構成之層。由硬化物所構成之層的形成方法,設為與在形成測試片中的由硬化物所構成之層時相同。先自構件剝離由硬化物所構成之層,再藉由熱機械分析(Thermal Mechanical Analysis,TMA)來測定該層的玻璃轉化溫度。 A layer composed of a cured product is formed on a member made of Teflon (registered trademark). The method of forming the layer composed of the cured product is the same as that in the case of forming a layer composed of a cured product in the test piece. The layer composed of the cured material was first peeled off from the member, and the glass transition temperature of the layer was measured by Thermal Mechanical Analysis (TMA).

(7)鍍銅黏合性試驗 (7) Copper plating adhesion test

(7-1)粗糙化耐性 (7-1) Roughness tolerance

以依據一般的除膠渣處理之下述順序,來使各實施例和比較例的測試片中的由硬化物所構成之層的外表面粗糙化。使用作為用於除膠渣的膨潤液來銷售的膨潤液(日本阿托科技股份有限公司製造的Swelling Dip Securiganth P),在60℃實行膨潤處理5分鐘,來使硬化物的表面膨潤。並且,對於該膨潤後的表面實行熱水清洗。繼而,使用含有過錳酸鉀且作為除膠渣液來銷售的氧化劑(日本阿托科技股份有限公司製造的Concentrate Compact CP),在80℃實行粗糙化處理10分鐘,來對熱水清洗後的表面進行粗糙化。對於以這樣的方式來粗糙化後的表面,實行熱水清洗,進一步,使用中和液(日本阿托科技股份有限公司製造的Reduction solution Securiganth P),在40℃去除該表面上的除膠渣液的殘渣5分鐘。並且,對中和後的表面進行清洗。測定以這樣的方式進行被賦予粗糙面的皮膜(由感光性樹脂組成物的硬化物所構成之層)的膜厚,並依據下述評估基準來評估硬化物對於除膠渣液的粗糙化耐性。 The outer surfaces of the layers composed of the cured materials in the test pieces of the respective examples and comparative examples were roughened in the following order according to the general desmear treatment. The swelling liquid (Swelling Dip Securiganth P manufactured by Ato Technology Co., Ltd., Japan, which is sold as a swelling liquid for desmear) was subjected to a swelling treatment at 60 ° C for 5 minutes to swell the surface of the cured product. Further, hot water washing is performed on the swollen surface. Then, an oxidizing agent (Concentrate Compact CP manufactured by Ato Technology Co., Ltd.) containing potassium permanganate and sold as a desmear liquid was used, and roughening treatment was carried out at 80 ° C for 10 minutes to clean the hot water. The surface is roughened. For the surface roughened in this manner, hot water washing is performed, and further, using a neutralizing liquid (Reduction solution Securiganth P manufactured by Ato Technology Co., Ltd., Japan), the desmear on the surface is removed at 40 ° C. The residue of the liquid was 5 minutes. Also, the surface after neutralization is cleaned. The film thickness of the rough surface-coated film (the layer composed of the cured product of the photosensitive resin composition) was measured in such a manner, and the roughening resistance of the cured product to the desmear liquid was evaluated in accordance with the following evaluation criteria. .

A:由於粗糙化所導致的膜厚的減少量大於0μm但小於3.5μm。 A: The reduction in film thickness due to roughening is more than 0 μm but less than 3.5 μm.

B:由於粗糙化所導致的膜厚的減少量為3.5μm以上但小於10μm。 B: The amount of reduction in film thickness due to roughening is 3.5 μm or more but less than 10 μm.

C:由於粗糙化所導致的膜厚的減少量為10μm以上。 C: The amount of reduction in film thickness due to roughening is 10 μm or more.

(7-2)鍍銅層的黏合性 (7-2) Adhesion of copper plating layer

以上述(7-1)的方法,來對各實施例和比較例的測試片中的由硬化物所構成之層賦予粗糙面,之後使用市售的 藥液,來以無電鍍銅處理在測試片的粗糙面上形成起始線路。以150℃來將該起始線路與硬化物一起進行加熱1小時。進一步藉由電鍍銅處理,來在2A/dm2的電流密度下自市售的藥液直接析出厚度33μm的銅於起始線路上。繼而,以180℃來對析出有銅的測試片進行加熱30分鐘,來形成鍍銅層。依據下述評估基準,來評估以這樣的方式來形成的鍍銅層與測試片中的硬化物的黏合性。此處,若在無電鍍銅處理後和電鍍銅處理後的加熱時皆未在測試片上確認到起泡(blistering),則以下述順序來評估鍍銅層與硬化物的黏合強度。該黏合強度是依照日本工業標準(JIS)-C6481來進行測定。 The layer composed of the cured product in the test pieces of the respective Examples and Comparative Examples was subjected to a rough surface by the method of the above (7-1), and then a commercially available chemical liquid was used to be treated with electroless copper plating. The starting line is formed on the rough surface of the sheet. The starting line was heated with the hardened material at 150 ° C for 1 hour. Further, by electroplating copper treatment, copper having a thickness of 33 μm was directly deposited on the starting line from a commercially available chemical solution at a current density of 2 A/dm 2 . Then, the test piece in which copper was deposited was heated at 180 ° C for 30 minutes to form a copper plating layer. The adhesion of the copper plating layer formed in such a manner to the cured product in the test piece was evaluated in accordance with the following evaluation criteria. Here, if blistering was not confirmed on the test piece after the electroless copper plating treatment and the heating after the electroplating copper treatment, the adhesion strength between the copper plating layer and the cured product was evaluated in the following order. The adhesive strength was measured in accordance with Japanese Industrial Standard (JIS)-C6481.

S:在無電鍍銅處理後的加熱時未確認到起泡,且在電鍍銅處理後的加熱時亦未確認到起泡。又,銅的黏合強度是0.4kN/m以上。 S: No foaming was observed at the time of heating after the electroless copper plating treatment, and no foaming was observed even during heating after the electroplating copper treatment. Further, the bonding strength of copper is 0.4 kN/m or more.

A:在無電鍍銅處理後的加熱時未確認到起泡,且在電鍍銅處理後的加熱時亦未確認到起泡。又,銅的黏合強度是0.3kN/m以上但小於0.4kN/m。 A: No foaming was observed at the time of heating after the electroless copper plating treatment, and no foaming was observed even during heating after the electroplating copper treatment. Further, the bonding strength of copper is 0.3 kN/m or more but less than 0.4 kN/m.

B:在無電鍍銅處理後的加熱時未確認到起泡,且在電鍍銅處理後的加熱時亦未確認到起泡。又,銅的黏合強度小於0.3kN/m。 B: No foaming was observed at the time of heating after the electroless copper plating treatment, and no foaming was observed even during heating after the electroplating copper treatment. Further, the bonding strength of copper is less than 0.3 kN/m.

C:在無電鍍銅處理後的加熱時、或在電鍍銅處理後的加熱時確認到起泡。 C: Foaming was confirmed at the time of heating after electroless copper plating treatment or heating after electroplating copper treatment.

將實施例1~9和比較例1~2的評估結果表示於下述表3~4中。 The evaluation results of Examples 1 to 9 and Comparative Examples 1 and 2 are shown in Tables 3 to 4 below.

[表3] [table 3]

[表4] [Table 4]

[實施例10~21和比較例3~6] [Examples 10 to 21 and Comparative Examples 3 to 6]

[製作測試片] [production test piece]

先以塗敷器將實施例10~21和比較例3~6的感光性樹脂組成物,塗佈在聚對苯二甲酸乙二酯製的薄膜上,再藉由以95℃進行加熱25分鐘,來使其乾燥,藉此在薄膜上形成厚度25μm的乾膜。 First, the photosensitive resin compositions of Examples 10 to 21 and Comparative Examples 3 to 6 were applied onto a film made of polyethylene terephthalate by an applicator, and further heated at 95 ° C for 25 minutes. To dry it, a dry film having a thickness of 25 μm was formed on the film.

以與實施例8相同的方式進行,來製作實施例10~21和比較例3~6各自的測試片。其中,在剛將乾膜加熱層合於印刷線路板上後,最初的曝光時的紫外線的強度設定成250mJ/cm2。並且,在以1000mJ/cm2的條件來對皮膜照射紫外線後,對皮膜加熱的溫度也設定成160℃。 Test pieces of each of Examples 10 to 21 and Comparative Examples 3 to 6 were produced in the same manner as in Example 8. Here, immediately after the dry film was heated and laminated on the printed wiring board, the intensity of the ultraviolet ray at the time of the first exposure was set to 250 mJ/cm 2 . Further, after the film was irradiated with ultraviolet rays under the conditions of 1000 mJ/cm 2 , the temperature at which the film was heated was also set to 160 °C.

[評估試驗] [evaluation test]

以下述順序來評估實施例10~21和比較例3~6各自的測試片。將其結果表示於下述表5~表7中。 The test pieces of each of Examples 10 to 21 and Comparative Examples 3 to 6 were evaluated in the following order. The results are shown in Tables 5 to 7 below.

(8)顯影性 (8) developability

針對各實施例和比較例,在前述顯影處理後,觀察印刷線路板的非曝光部,並以下述方式評估其結果。 For each of the examples and comparative examples, after the development processing described above, the non-exposed portion of the printed wiring board was observed, and the results were evaluated in the following manner.

良好:未曝光的皮膜已完全被去除。 Good: The unexposed film has been completely removed.

不適當:一部分的未曝光皮膜殘留在印刷線路板上。 Inappropriate: A portion of the unexposed film remains on the printed wiring board.

(9)解析度 (9) Resolution

以與實施例1~9和比較例1~2的測試片相同的順序、及相同的評估基準,來評估各實施例和比較例的測試片的解析度。 The resolution of the test pieces of the respective examples and comparative examples was evaluated in the same order as the test pieces of Examples 1 to 9 and Comparative Examples 1 and 2, and the same evaluation criteria.

(10)耐鍍覆性 (10) Plating resistance

以與實施例1~9和比較例1~2的測試片相同的順序、及相同的評估基準,來評估各實施例和比較例的測試片的耐鍍覆性。 The plating resistance of the test pieces of the respective examples and comparative examples was evaluated in the same order as the test pieces of Examples 1 to 9 and Comparative Examples 1 and 2, and the same evaluation criteria.

(11)線間絕緣性 (11) Insulation between wires

將暴露時間設成150小時,此外則以與實施例1~9和比較例1~2的測試片相同的順序,來持續測定各實施例和比較例的測試片中的梳型電極間的電阻值。依據下述評估基準來評估其結果。 The exposure time was set to 150 hours, and the resistance between the comb electrodes in the test pieces of the respective examples and comparative examples was continuously measured in the same order as the test pieces of Examples 1 to 9 and Comparative Examples 1 and 2. value. The results were evaluated according to the following evaluation criteria.

A:自試驗開始時至經過150小時為止之間,電阻值一直維持在106Ω以上。 A: The resistance value was maintained at 10 6 Ω or more from the start of the test to 150 hours.

B:自試驗開始時至經過100小時為止之間,電阻值一直維持在106Ω以上,但是自試驗開始時至經過150小時前,電阻值小於106Ω。 B: The resistance value was maintained above 10 6 Ω from the start of the test to the elapse of 100 hours, but the resistance value was less than 10 6 Ω from the start of the test to 150 hours before the test.

C:自試驗開始時至經過100小時前,電阻值小於106Ω。 C: The resistance value was less than 10 6 Ω from the start of the test until 100 hours passed.

(12)層間絕緣性 (12) interlayer insulation

將試驗環境設成85℃、85%R.H.,且將暴露時間設成2000小時,此外則以與實施例1~8和比較例1~3的測試片相同的順序,來持續測定各實施例和比較例的測試片中的導體線路與導電膠帶之間的電阻值。依據下述評估基準來評估其結果。 The test environment was set to 85 ° C, 85% RH, and the exposure time was set to 2000 hours. Further, the examples were continuously measured in the same order as the test pieces of Examples 1 to 8 and Comparative Examples 1 to 3. The resistance value between the conductor line and the conductive tape in the test piece of the comparative example. The results were evaluated according to the following evaluation criteria.

A:自試驗開始時至經過2000小時為止之間,電阻值一直維持在108Ω以上。 A: The resistance value was maintained above 10 8 Ω from the start of the test to 2000 hours.

B:自試驗開始時至經過1000小時為止之間,電阻值一直維持在108Ω以上,但是自試驗開始時至經過2000小時前,電阻值小於106Ω。 B: The resistance value was maintained above 10 8 Ω from the start of the test to 1000 hours, but the resistance value was less than 10 6 Ω from the start of the test to 2000 hours.

C:自試驗開始時至經過1000小時前,電阻值小於108Ω。 C: The resistance value is less than 10 8 Ω from the start of the test to 1000 hours before the test.

(13)壓力鍋試驗(pressure cooker test,PCT) (13) Pressure cooker test (PCT)

將各實施例和比較例的測試片放置在121℃、100%R.H.的環境下120小時,之後依據下述評估基準來評估由硬化物所構成之層的外觀。 The test pieces of the respective examples and comparative examples were placed in an environment of 121 ° C and 100% R.H. for 120 hours, and then the appearance of the layer composed of the cured product was evaluated in accordance with the following evaluation criteria.

A:在由硬化物所構成之層未觀察到異常。 A: No abnormality was observed in the layer composed of the cured product.

B:在由硬化物所構成之層觀察到變色。 B: Discoloration was observed in the layer composed of the cured product.

C:在由硬化物所構成之層觀察到大幅度變色,且發生一部份膨脹。 C: A large discoloration was observed in the layer composed of the cured product, and a part of the expansion occurred.

(14)鍍銅黏合性試驗 (14) Copper plating adhesion test

先以塗敷器將各實施例和比較例的感光性樹脂組成物,塗佈在聚對苯二甲酸乙二酯製的薄膜上,再藉由以95℃進行加熱25分鐘,來使其乾燥,藉此在薄膜上形成厚度30μm的乾膜。 The photosensitive resin composition of each of the examples and the comparative examples was applied onto a film made of polyethylene terephthalate by an applicator, and then dried by heating at 95 ° C for 25 minutes. Thereby, a dry film having a thickness of 30 μm was formed on the film.

使用該乾膜,並藉由與上述相同的方法,來獲得測試片。 The dry film was used, and a test piece was obtained by the same method as described above.

(14-1)粗糙化耐性 (14-1) Roughness tolerance

以與實施例1~9和比較例1~2相同的順序,來對各實施例和比較例的測試片的外表面賦予粗糙面,並且評估硬化物對於除膠渣液的粗糙化耐性。 The outer surfaces of the test pieces of the respective examples and comparative examples were given a rough surface in the same order as in the examples 1 to 9 and the comparative examples 1 and 2, and the roughening resistance of the cured product to the desmear liquid was evaluated.

(14-2)鍍銅層的黏合性 (14-2) Adhesion of copper plating layer

以與實施例1~9和比較例1~2相同的順序,在各實施例和比較例的測試片中的由硬化物所構成之層上形成鍍銅層,並且評估該鍍銅層與硬化物的黏合強度。 In the same order as in Examples 1 to 9 and Comparative Examples 1 and 2, a copper plating layer was formed on the layer composed of the cured material in the test pieces of the respective Examples and Comparative Examples, and the copper plating layer and the hardened layer were evaluated. The bonding strength of the object.

將實施例10~21和比較例3~6的評估結果表示於下述表5~7中。 The evaluation results of Examples 10 to 21 and Comparative Examples 3 to 6 are shown in Tables 5 to 7 below.

[表5] [table 5]

[表6] [Table 6]

[表7] [Table 7]

由以上的實施形態可知,本發明的第1態樣的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵; 光聚合起始劑(C);環氧化合物(D);及,成分(E),其含有選自三聚氰胺和三聚氰胺衍生物的群組中的至少一種化合物;並且,前述含羧基樹脂(A)含有含羧基樹脂(A1),該含羧基樹脂(A1)具有雙酚茀骨架。 According to the above embodiment, the photosensitive resin composition of the first aspect of the present invention contains: a carboxyl group-containing resin (A); and an unsaturated compound (B) having at least one ethylenic unsaturation in one molecule. key; Photopolymerization initiator (C); epoxy compound (D); and component (E) containing at least one compound selected from the group consisting of melamine and melamine derivatives; and, the aforementioned carboxyl group-containing resin (A) The carboxyl group-containing resin (A1) is contained, and the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton.

根據第1態樣,即便感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得優異的顯影性,而且在鍍覆處理的前步驟中,能夠使包含感光性樹脂組成物的硬化物之層的厚度不易由於氧化劑導致變薄,並且能夠以氧化劑來對硬化物的表面進行粗糙化。 According to the first aspect, even if the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, excellent developability can be obtained, and in the pre-plating step, the photosensitive resin composition can be contained. The thickness of the layer of the cured product is not easily thinned by the oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.

在第2態樣的感光性樹脂組成物中,針對第1態樣,前述含羧基樹脂(A1)可以是中間體與酸酐之反應物,該中間體是具有雙酚茀骨架之環氧化合物(a1)與含不飽和基羧酸(a2)之反應物。 In the photosensitive resin composition of the second aspect, in the first aspect, the carboxyl group-containing resin (A1) may be a reaction product of an intermediate and an acid anhydride, and the intermediate is an epoxy compound having a bisphenol fluorene skeleton ( A1) a reactant with an unsaturated carboxylic acid (a2).

根據第2態樣,能夠對感光性樹脂組成物賦予優異的顯影性。 According to the second aspect, excellent developability can be imparted to the photosensitive resin composition.

在第3態樣的感光性樹脂組成物中,針對第1或第2態樣,前述環氧化合物(D)可含有結晶性環氧樹脂。 In the photosensitive resin composition of the third aspect, the epoxy compound (D) may contain a crystalline epoxy resin in the first or second aspect.

根據第3態樣,能夠使感光性樹脂組成物的顯影性提升。 According to the third aspect, the developability of the photosensitive resin composition can be improved.

第4態樣的感光性樹脂組成物,針對第1至第3態樣中的任一態樣,可進一步含有無機填料(K)。 The photosensitive resin composition of the fourth aspect may further contain an inorganic filler (K) in any of the first to third aspects.

根據第4態樣,能夠對感光性樹脂組成物的硬化物賦予適合於鍍覆處理的粗糙面,且能夠使硬化物與前述鍍覆層的黏合性提升。 According to the fourth aspect, it is possible to impart a rough surface suitable for the plating treatment to the cured product of the photosensitive resin composition, and it is possible to improve the adhesion between the cured product and the plating layer.

在第5態樣的感光性樹脂組成物中,針對第4態樣,前述無機填料(K)可含有二氧化矽(k)。 In the photosensitive resin composition of the fifth aspect, the inorganic filler (K) may contain cerium oxide (k) in the fourth aspect.

根據第5態樣,即便二氧化矽(k)位於感光性樹脂組成物的硬化物的表面上的較難腐蝕的地方,也能夠適度地腐蝕該較難腐蝕的地方。藉此,能夠對硬化物賦予更適合於鍍覆處理的粗糙面,且能夠使硬化物與前述鍍覆層的黏合性進一步提升。 According to the fifth aspect, even if the cerium oxide (k) is located on a surface of the cured product of the photosensitive resin composition which is hard to corrode, the hardly corroded portion can be moderately corroded. Thereby, it is possible to impart a rough surface which is more suitable for the plating treatment to the cured product, and it is possible to further improve the adhesion between the cured product and the plating layer.

在第6態樣的感光性樹脂組成物中,針對第5態樣,前述二氧化矽(k)的平均粒徑可以是1μm以下。 In the photosensitive resin composition of the sixth aspect, the cerium oxide (k) may have an average particle diameter of 1 μm or less in the fifth aspect.

根據第6態樣,能夠使形成於感光性樹脂組成物的硬化物上的粗糙面的粗糙度較細緻。藉此,硬化物的表面積增加,伴隨著此情形,固著效果增加,而能夠使粗糙面與鍍覆層的黏合性提升。 According to the sixth aspect, the roughness of the rough surface formed on the cured product of the photosensitive resin composition can be made fine. Thereby, the surface area of the cured product increases, and in this case, the fixing effect is increased, and the adhesion between the rough surface and the plating layer can be improved.

在第7態樣的感光性樹脂組成物中,針對第1至第6態樣中的任一態樣,前述光聚合起始劑(C)可含有醯基氧化膦系光聚合起始劑(C1)。 In the photosensitive resin composition of the seventh aspect, the photopolymerization initiator (C) may contain a mercaptophosphine oxide-based photopolymerization initiator for any of the first to sixth aspects ( C1).

根據第7態樣,儘管感光性樹脂組成物含有含羧基樹脂(A1),當以紫外線對感光性樹脂組成物進行曝光時,仍能夠對感光性樹脂組成物賦予高感光性。又,能夠獲得電性絕緣性優異的硬化物。 According to the seventh aspect, the photosensitive resin composition contains the carboxyl group-containing resin (A1), and when the photosensitive resin composition is exposed to ultraviolet light, high sensitivity can be imparted to the photosensitive resin composition. Moreover, a cured product excellent in electrical insulating properties can be obtained.

在第8態樣的感光性樹脂組成物中,針對第1至第7態樣中的任一態樣,前述光聚合起始劑(C)可含有羥基酮系光聚合起始劑(C2)。 In the photosensitive resin composition of the eighth aspect, the photopolymerization initiator (C) may contain a hydroxyketone photopolymerization initiator (C2) for any of the first to seventh aspects. .

根據第8態樣,相較於不含有羥基酮系光聚合起始劑(C2)的情形,能夠對感光性樹脂組成物賦予進一步較高的感光性。 According to the eighth aspect, it is possible to impart further high photosensitivity to the photosensitive resin composition as compared with the case where the hydroxyketone-based photopolymerization initiator (C2) is not contained.

在第9態樣的感光性樹脂組成物中,針對第1至第8態樣中的任一態樣,前述光聚合起始劑(C)可含有雙(二乙基胺基)二苯基酮(C3)。 In the photosensitive resin composition of the ninth aspect, the photopolymerization initiator (C) may contain bis(diethylamino)diphenyl group in any of the first to eighth aspects. Ketone (C3).

根據第9態樣,當先對由感光性樹脂組成物所形成之塗膜進行部分曝光,再進行顯影時,沒有被曝光的部分的硬化受到抑制,藉此解析度變特別高。因此,能夠以感光性樹脂組成物的硬化物來形成非常微細的圖案。 According to the ninth aspect, when the coating film formed of the photosensitive resin composition is partially exposed and developed, the hardening of the portion not exposed is suppressed, whereby the resolution is particularly high. Therefore, a very fine pattern can be formed with the cured product of the photosensitive resin composition.

第10態樣的乾膜,是第1至第9態樣中的任一態樣的感光性樹脂組成物的乾燥物。 The dry film of the tenth aspect is a dried product of the photosensitive resin composition of any of the first to ninth aspects.

根據第10態樣,即便感光性樹脂組成物含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得優異的顯影性,而且在鍍覆處理的前步驟中,能夠使包含乾膜的硬化物之層的厚度不易由於氧化劑導致變薄,並且能夠以氧化劑來對硬化物的表面進行粗糙化。 According to the tenth aspect, even if the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenol fluorene skeleton, excellent developability can be obtained, and in the pre-step of the plating treatment, a cured product containing a dry film can be obtained. The thickness of the layer is not easily thinned by the oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.

第11態樣的印刷線路板,其具備層間絕緣層,該層間絕緣層包含第1至第9態樣中的任一態樣的感光性樹脂組成物的硬化物。 A printed wiring board according to an eleventh aspect, comprising: an interlayer insulating layer comprising a cured product of the photosensitive resin composition of any one of the first to ninth aspects.

根據第11態樣,能夠獲得一種印刷線路板,其具備優異的層間絕緣層。 According to the eleventh aspect, it is possible to obtain a printed wiring board which is provided with an excellent interlayer insulating layer.

第12態樣的印刷線路板,其具備抗焊劑層,該抗焊劑層包含第1至第9態樣中的任一態樣的感光性樹脂組成物的硬化物。 A printed wiring board according to a twelfth aspect, comprising a solder resist layer comprising a cured product of the photosensitive resin composition of any one of the first to ninth aspects.

根據第12態樣,能夠獲得一種印刷線路板,其具備優異的抗焊劑層。 According to the twelfth aspect, it is possible to obtain a printed wiring board which is provided with an excellent solder resist layer.

第13態樣的感光性樹脂組成物的製造方法,其包含下述步驟:使具有雙酚茀骨架之環氧化合物(a1)與含不飽和基羧酸(a2)進行反應,來獲得中間體之步驟;使前述中間體與酸酐進行反應,來合成含羧基樹脂(A1)之步驟;及,將含有前述含羧基樹脂(A1)之含羧基樹脂(A)、於一分子中具有至少一個乙烯性不飽和鍵之不飽和化合物(B)、光聚合起始劑(C)、環氧化合物(D)、及成分(E)加以混合,來獲得感光性樹脂組成物之步驟;並且,前述成分(E)含有選自三聚氰胺和三聚氰胺衍生物的群組中的至少一種化合物。 A method for producing a photosensitive resin composition according to a thirteenth aspect, which comprises the steps of: reacting an epoxy compound (a1) having a bisphenol fluorene skeleton with an unsaturated group-containing carboxylic acid (a2) to obtain an intermediate a step of synthesizing the intermediate and the acid anhydride to synthesize the carboxyl group-containing resin (A1); and, the carboxyl group-containing resin (A) containing the carboxyl group-containing resin (A1), having at least one ethylene in one molecule a step of obtaining a photosensitive resin composition by mixing an unsaturated compound (B) having an unsaturated bond, a photopolymerization initiator (C), an epoxy compound (D), and a component (E); (E) at least one compound containing a group selected from the group consisting of melamine and melamine derivatives.

根據第13態樣,即便含有具有雙酚茀骨架之含羧基樹脂,也能夠獲得具有優異的顯影性之感光性樹脂組成物。而且在鍍覆處理的前步驟中對感光性樹脂組成物的硬化物賦予粗糙面時,能夠使包含乾膜的硬化物之層的厚度不易由於氧化劑導致變薄。 According to the thirteenth aspect, even if a carboxyl group-containing resin having a bisphenol fluorene skeleton is contained, a photosensitive resin composition having excellent developability can be obtained. Further, when a rough surface is applied to the cured product of the photosensitive resin composition in the pre-step of the plating treatment, the thickness of the layer of the cured product including the dry film can be prevented from being thinned by the oxidizing agent.

1‧‧‧芯材 1‧‧‧ core material

2‧‧‧絕緣層 2‧‧‧Insulation

3‧‧‧導體線路(第一導體線路) 3‧‧‧Conductor line (first conductor line)

4‧‧‧皮膜 4‧‧ ‧ film

5‧‧‧未曝光部分 5‧‧‧Unexposed parts

6‧‧‧孔 6‧‧‧ hole

7‧‧‧層間絕緣層 7‧‧‧Interlayer insulation

8‧‧‧第二導體線路 8‧‧‧Second conductor line

9‧‧‧穿孔鍍覆 9‧‧‧Perforated plating

10‧‧‧貫穿孔 10‧‧‧through holes

11‧‧‧印刷線路板 11‧‧‧Printed circuit board

Claims (12)

一種感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其於一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);環氧化合物(D);及,成分(E),其含有選自三聚氰胺和三聚氰胺衍生物的群組中的至少一種化合物;並且,前述含羧基樹脂(A)含有含羧基樹脂(A1),該含羧基樹脂(A1)具有雙酚茀骨架。 A photosensitive resin composition comprising: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; a photopolymerization initiator (C); an epoxy compound (D); and, component (E), which contains at least one compound selected from the group consisting of melamine and a melamine derivative; and the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton. 如請求項1所述之感光性樹脂組成物,其中,前述含羧基樹脂(A1)是中間體與酸酐之反應物,該中間體是具有雙酚茀骨架之環氧化合物(a1)與含不飽和基羧酸(a2)之反應物。 The photosensitive resin composition according to claim 1, wherein the carboxyl group-containing resin (A1) is a reaction product of an intermediate and an acid anhydride, and the intermediate is an epoxy compound (a1) having a bisphenol fluorene skeleton and containing The reactant of the saturated carboxylic acid (a2). 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述環氧化合物(D)含有結晶性環氧樹脂。 The photosensitive resin composition according to claim 1 or 2, wherein the epoxy compound (D) contains a crystalline epoxy resin. 如請求項1或請求項2所述之感光性樹脂組成物,其中,該感光性樹脂組成物進一步含有無機填料(K)。 The photosensitive resin composition according to claim 1 or 2, wherein the photosensitive resin composition further contains an inorganic filler (K). 如請求項4所述之感光性樹脂組成物,其中,前述無機填料(K)含有二氧化矽(k)。 The photosensitive resin composition according to claim 4, wherein the inorganic filler (K) contains cerium oxide (k). 如請求項5所述之感光性樹脂組成物,其中,前述二氧化矽(k)的平均粒徑是1μm以下。 The photosensitive resin composition according to claim 5, wherein the cerium oxide (k) has an average particle diameter of 1 μm or less. 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述光聚合起始劑(C)含有醯基氧化膦系光聚合起始劑(C1)。 The photosensitive resin composition according to claim 1 or 2, wherein the photopolymerization initiator (C) contains a fluorenylphosphine oxide-based photopolymerization initiator (C1). 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述光聚合起始劑(C)含有羥基酮系光聚合起始劑(C2)。 The photosensitive resin composition according to claim 1 or 2, wherein the photopolymerization initiator (C) contains a hydroxyketone photopolymerization initiator (C2). 如請求項1或請求項2所述之感光性樹脂組成物,其中,前述光聚合起始劑(C)含有雙(二乙基胺基)二苯基酮(C3)。 The photosensitive resin composition according to claim 1 or 2, wherein the photopolymerization initiator (C) contains bis(diethylamino)diphenyl ketone (C3). 一種乾膜,其是如請求項1至請求項9中任一項所述之感光性樹脂組成物的乾燥物。 A dry film which is a dried product of the photosensitive resin composition according to any one of claims 1 to 9. 一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含如請求項1至請求項9中任一項所述之感光性樹脂組成物的硬化物。 A printed wiring board comprising an interlayer insulating layer comprising a cured product of the photosensitive resin composition according to any one of claims 1 to 9. 一種印刷線路板,其具備抗焊劑層,該抗焊劑層包含如請求項1至請求項9中任一項所述之感光性樹脂組成物的硬化物。 A printed wiring board comprising a solder resist layer, the solder resist layer comprising a cured product of the photosensitive resin composition according to any one of claims 1 to 9.
TW105102679A 2015-01-28 2016-01-28 Photo-sensitive resin composition, dry film, and printed wiring board (1) TWI656403B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI776864B (en) * 2017-03-28 2022-09-11 日商味之素股份有限公司 Photosensitive resin composition

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI655239B (en) * 2016-12-21 2019-04-01 日商三菱化學股份有限公司 Curable resin composition, and film, molded article, prepreg, and fiber-reinforced plastic using the same
KR20190043896A (en) * 2017-10-19 2019-04-29 삼성전기주식회사 Photo curable and thermo curable resin composition and cured product thereof
CN108610456B (en) * 2018-05-15 2020-06-12 南京驭新光电技术有限公司 Photosensitive epoxy resin composition and preparation method and application thereof

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651735A (en) * 1979-10-03 1981-05-09 Asahi Chem Ind Co Ltd Photoreactive composition
WO2000058788A1 (en) * 1999-03-26 2000-10-05 Nippon Steel Chemical Co., Ltd. Photopolymerizable layered product with high resolution and semiconductor device made with the same
JP4082834B2 (en) * 1999-11-02 2008-04-30 日本化薬株式会社 Resin composition and cured products thereof
JP4082835B2 (en) * 1999-11-02 2008-04-30 日本化薬株式会社 Resin composition and cured products thereof
JP3912405B2 (en) * 2003-11-11 2007-05-09 三菱化学株式会社 Curable composition, cured product, color filter, and liquid crystal display device
JP2005189841A (en) * 2003-12-01 2005-07-14 Showa Denko Kk Curable flame retardant composition for resist, method for curing the same and use
JP4683182B2 (en) * 2004-09-28 2011-05-11 山栄化学株式会社 Photosensitive thermosetting resin composition, resist-coated printed wiring board and method for producing the same
JP5814691B2 (en) * 2011-08-11 2015-11-17 互応化学工業株式会社 Resin resin composition
JP2015134844A (en) * 2012-05-15 2015-07-27 日本化薬株式会社 Reactive polyester compound, and active energy ray-curable resin composition using the same
JP6524572B2 (en) * 2013-07-01 2019-06-05 互応化学工業株式会社 Composition for solder resist and printed wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI776864B (en) * 2017-03-28 2022-09-11 日商味之素股份有限公司 Photosensitive resin composition

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WO2016121395A1 (en) 2016-08-04

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