TW201937288A - Photosensitive resin composition, dry film and printed wiring board capable of suppressing excessive decrease in the thickness of cured product caused by oxidizing agent - Google Patents

Photosensitive resin composition, dry film and printed wiring board capable of suppressing excessive decrease in the thickness of cured product caused by oxidizing agent Download PDF

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TW201937288A
TW201937288A TW108103251A TW108103251A TW201937288A TW 201937288 A TW201937288 A TW 201937288A TW 108103251 A TW108103251 A TW 108103251A TW 108103251 A TW108103251 A TW 108103251A TW 201937288 A TW201937288 A TW 201937288A
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resin composition
photosensitive resin
acid
organic filler
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TWI784125B (en
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樋口倫也
藤原勇佐
鈴木文人
田中信也
橋本壯一
荒井貴
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日商互應化學工業股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

An object of the invention is to provide a photosensitive resin composition capable of being formed as a cured product by curing, wherein, when the surface of the cured product is roughened by treating with an oxidizing agent, an excessive decrease in the thickness of the cured product caused by the oxidizing agent can be suppressed, and non-uniform surface after the treatment can be suppressed. The photosensitive resin composition of the invention comprises: a carboxyl-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, a photopolymerization initiator (C), an epoxy compound (D), an organic filler (E) containing an organic filler with a carboxyl group (E1), and a triazine resin (F). The triazine resin (F) satisfies at least one of the following conditions: the triazine resin (F) is in a liquid state at 25 DEG C; and the photosensitive resin composition contains a solvent (H) and the triazine resin (F) dissolves in the solvent (H) at 25 DEG C.

Description

感光性樹脂組成物、乾膜及印刷線路板Photosensitive resin composition, dry film and printed wiring board

本發明關於:一種感光性樹脂組成物;一種乾膜,其含有該感光性樹脂組成物;一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含該感光性樹脂組成物的硬化物;及,一種印刷線路板,其具備阻焊劑層,該阻焊層包含該感光性樹脂組成物的硬化物。The present invention relates to: a photosensitive resin composition; a dry film containing the photosensitive resin composition; a printed wiring board having an interlayer insulating layer, the interlayer insulating layer containing a cured product of the photosensitive resin composition; And, a printed wiring board including a solder resist layer including a cured product of the photosensitive resin composition.

以往,為了形成印刷線路板的電絕緣性層,使用了各種硬化性的樹脂組成物,該電絕緣性層是阻焊劑層、鍍抗蝕層(plating resist layer)、抗蝕劑層、層間絕緣層等。如此的樹脂組成物,例如是感光性樹脂組成物。Conventionally, in order to form an electrically insulating layer of a printed wiring board, various curable resin compositions have been used. The electrically insulating layer is a solder resist layer, a plating resist layer, a resist layer, and interlayer insulation. Layers etc. Such a resin composition is, for example, a photosensitive resin composition.

為了對由感光性樹脂組成物所形成的層賦予高耐熱性,而實行使感光性樹脂組成物含有環氧化合物的方法,該感光性樹脂組成物含有含羧基樹脂。當在由該感光性樹脂組成物的硬化物所構成之層(以下,亦稱為硬化物層)上形成鍍覆層時,在鍍覆處理的前處理步驟中,有時會將硬化物層的表面利用例如含有過錳酸鉀之氧化劑進行粗糙化。此時,硬化物層的表面有時會被上述氧化劑過度地腐蝕,而造成硬化層的厚度變薄。In order to impart high heat resistance to a layer formed of a photosensitive resin composition, a method of containing an epoxy compound in the photosensitive resin composition is performed, and the photosensitive resin composition contains a carboxyl group-containing resin. When a plating layer is formed on a layer (hereinafter, also referred to as a cured material layer) composed of a cured material of the photosensitive resin composition, the cured material layer may be formed in a pretreatment step of the plating process. The surface is roughened using, for example, an oxidant containing potassium permanganate. At this time, the surface of the hardened layer may be excessively corroded by the oxidizing agent, and the thickness of the hardened layer may be reduced.

專利文獻1(國際公開第2017/125966號)中,提案有一種方法,其在感光性樹脂組成物中調配有機填料與三聚氰胺,藉此來抑制將其硬化物層的表面進行粗糙化時的過度的腐蝕。Patent Document 1 (International Publication No. 2017/125966) proposes a method of blending organic fillers and melamine in a photosensitive resin composition, thereby suppressing excessive surface roughening of the surface of the cured resin layer. Corrosion.

然而,專利文獻1的感光性樹脂組成物,當利用氧化劑將其硬化物層進行粗糙化時,有時會在硬化物層的表面上部分地產生較大的坑洞,因此,硬化物層的表面有時會有不均勻的情況。However, in the photosensitive resin composition of Patent Document 1, when the hardened material layer is roughened by an oxidizing agent, large pits may be partially formed on the surface of the hardened material layer. The surface may sometimes be uneven.

本發明的目的在於提供下述技術:一種感光性樹脂組成物,其藉由硬化成為硬化物,當利用氧化劑處理該硬化物的表面來進行粗糙化時,能夠抑制由於氧化劑所造成的硬化物的厚度過度地減少,且能夠抑制處理後的表面變得不均勻的情況;一種乾膜,其是該感光性樹脂組成物的乾燥物;一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含感光性樹脂組成物的硬化物;及,一種印刷線路板,其具備阻焊劑層,該阻焊劑層包含感光性樹脂組成物的硬化物。An object of the present invention is to provide a photosensitive resin composition which is hardened to become a hardened material, and when the surface of the hardened material is roughened with an oxidizing agent, the hardening of the hardened material due to the oxidizing agent is suppressed. The thickness is excessively reduced, and the unevenness of the treated surface can be suppressed; a dry film is a dried product of the photosensitive resin composition; a printed wiring board includes an interlayer insulating layer, and the interlayer insulating layer A hardened product containing a photosensitive resin composition; and a printed wiring board including a solder resist layer containing a hardened product of a photosensitive resin composition.

本發明的一態樣中的感光性樹脂組成物含有:含羧基樹脂(A);不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);環氧化合物(D);有機填料(E),其包含具有羧基之有機填料(E1);及,三氮雜苯樹脂(F)。並且,前述三氮雜苯樹脂(F),滿足下述之中的至少一條件:在25℃時是液狀狀態;及,前述感光性樹脂組成物含有溶劑(H),且在25℃時會溶解於前述溶劑(H)中。The photosensitive resin composition in one aspect of the present invention contains: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C ); An epoxy compound (D); an organic filler (E) containing an organic filler (E1) having a carboxyl group; and a triazabenzene resin (F). In addition, the triazine resin (F) satisfies at least one of the following conditions: it is in a liquid state at 25 ° C; and the photosensitive resin composition contains a solvent (H), and at 25 ° C Will dissolve in the aforementioned solvent (H).

本發明的一態樣中的乾膜,含有前述感光性樹脂組成物。The dry film in one aspect of the present invention contains the photosensitive resin composition.

本發明的一態樣中的印刷線路板具備層間絕緣層,該層間絕緣層包含前述感光性樹脂組成物的硬化物。A printed wiring board according to an aspect of the present invention includes an interlayer insulating layer including a cured product of the photosensitive resin composition.

本發明的一態樣中的印刷線路板具備阻焊劑層,該阻焊劑層包含前述感光性樹脂組成物的硬化物。A printed wiring board according to an aspect of the present invention includes a solder resist layer including a cured product of the photosensitive resin composition.

以下,說明用以實施本發明的形態。再者,以下說明中,所謂「(甲基)丙烯酸」,意指「丙烯酸」與「甲基丙烯酸」之中的至少一種。例如:「(甲基)丙烯酸酯」,意指「丙烯酸酯」及「甲基丙烯酸酯」之中的至少一種。Hereinafter, the aspect for implementing this invention is demonstrated. In the following description, the "(meth) acrylic acid" means at least one of "acrylic acid" and "methacrylic acid". For example: "(meth) acrylate" means at least one of "acrylate" and "methacrylate".

當製作印刷線路板時,該印刷線路板具備包含感光性樹脂組成物的硬化物之層(以下,亦稱為「硬化物層」),本發明人關注以下特性:當實施鍍覆處理前利用氧化劑對硬化物層的表面進行粗糙化時,硬化物層的厚度的穩定性和硬化物表面的均勻性、及粗糙化後的鍍覆處理時的硬化物層與鍍覆層的密合性。When a printed wiring board is manufactured, the printed wiring board includes a layer containing a cured material of a photosensitive resin composition (hereinafter, also referred to as a "cured material layer"). The inventors paid attention to the following characteristics: When the surface of the hardened layer is roughened by the oxidizing agent, the stability of the thickness of the hardened layer, the uniformity of the surface of the hardened layer, and the adhesion between the hardened layer and the plating layer during the plating treatment after roughening.

當在含有含羧基樹脂之感光性樹脂組成物的硬化物層上形成鍍覆層時,在鍍覆處理之前,有時會利用含有過錳酸鉀之氧化劑(以下,只要沒有特別限定,僅稱為氧化劑)使硬化物層的表面粗糙化。此時,硬化物層的表面會由於氧化劑的作用而被過度地腐蝕,從而導致硬化物層的厚度(硬化物層的膜厚)變薄、或在硬化物層的表面產生裂縫這樣的問題。When a plating layer is formed on a hardened layer of a photosensitive resin composition containing a carboxyl-containing resin, an oxidizing agent containing potassium permanganate (hereinafter, it is only called as long as it is not particularly limited) before the plating treatment. (Oxidizing agent) roughens the surface of the hardened material layer. At this time, the surface of the hardened material layer is excessively corroded by the action of the oxidizing agent, which causes problems such as the thickness of the hardened material layer (thickness of the hardened material layer) becoming thin, or cracks occurring on the surface of the hardened material layer.

另一方面,藉由在含有含羧基樹脂之感光性樹脂組成物中調配三聚氰胺化合物,可期待耐粗糙化性的提升,例如當將硬化物層的表面進行粗糙化時,可期待其對於除膠渣處理的氧化劑的耐腐蝕性等,該三聚氰胺化合物包含三聚氰胺和三聚氰胺衍生物。並且,在鍍覆處理的前處理步驟中,若藉由上述氧化劑使感光性樹脂組成物的硬化物層的表面粗糙化,便能夠抑制其膜厚的減少。然而,已知當感光性樹脂組成物含有三聚氰胺或三聚氰胺衍生物時,若將該硬化物層進行粗糙化,會在表面上產生較大的坑洞。因此,已知經粗糙化的硬化物層表面容易變得不均勻,而會降低鍍覆處理後的剝離強度。因此,已知會降低鍍覆層與硬化物層的密合性。On the other hand, by blending a melamine compound in a photosensitive resin composition containing a carboxyl-containing resin, improvement in roughening resistance can be expected. For example, when roughening the surface of a hardened layer, it can be expected that The slag-treated oxidant has corrosion resistance and the like, and the melamine compound includes melamine and a melamine derivative. In addition, in the pre-treatment step of the plating treatment, if the surface of the cured product layer of the photosensitive resin composition is roughened by the oxidizing agent, it is possible to suppress a decrease in the film thickness thereof. However, it is known that when the photosensitive resin composition contains a melamine or a melamine derivative, roughening the hardened material layer may cause large pits on the surface. For this reason, it is known that the surface of the roughened hardened | cured material layer becomes uneven easily, and the peeling strength after a plating process is reduced. Therefore, it is known that the adhesiveness of a plating layer and a hardened | cured material layer is reduced.

有鑑於上述問題,發明人努力研究的結果,發現一種感光性樹脂組成物的組合,進而完成本發明:藉由該感光性樹脂組成物的組合,能夠抑制對該感光性樹脂組成物的硬化物層進行粗糙面化處理所造成的厚度過度地減少,並且即便對經粗糙化的硬化物層的表面實施鍍覆處理,仍能夠實現與鍍覆層的密合性。In view of the above-mentioned problems, as a result of intensive research by the inventors, a combination of photosensitive resin compositions was found, and the present invention was completed. The combination of the photosensitive resin compositions can suppress the cured product of the photosensitive resin composition. The thickness of the layer due to the roughening treatment is excessively reduced, and even if the surface of the roughened hardened layer is subjected to a plating treatment, the adhesion with the plating layer can be achieved.

本實施形態中的感光性樹脂組成物,其含有:含羧基樹脂(A);不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);環氧化合物(D);有機填料(E),其包含具有羧基之有機填料(E1);及,三氮雜苯樹脂(F)。並且,三氮雜苯樹脂(F)滿足下述之中的至少一條件:在25℃時是液狀狀態;及,感光性樹脂組成物含有溶劑(H),且在25℃時會溶解於感光性樹脂組成物中的溶劑(H)中。此處,本實施形態中的三氮雜苯樹脂(F),是具有1個以上的胺基在三氮雜苯骨架上之胺基三氮雜苯與甲醛之縮合物、或使該縮合物聚合所獲得的熱硬化性樹脂;該三氮雜苯樹脂(F),具有至少一個三氮雜苯骨架,且具有鍵結在該三氮雜苯骨架上的胺基。再者,將於後述的各成分的說明中,針對三氮雜苯樹脂(F)的具體的結構、物性和種類等進行說明。The photosensitive resin composition in this embodiment contains: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; and a photopolymerization initiator (C) An epoxy compound (D); an organic filler (E) containing an organic filler (E1) having a carboxyl group; and a triazabenzene resin (F). In addition, the triazabenzene resin (F) satisfies at least one of the following conditions: it is in a liquid state at 25 ° C; and the photosensitive resin composition contains a solvent (H) and is soluble in 25 ° C In the solvent (H) in the photosensitive resin composition. Here, the triazabenzene resin (F) in this embodiment is a condensation product of an aminotriazabenzene and formaldehyde having one or more amino groups on a triazabenzene skeleton, or the condensation product A thermosetting resin obtained by polymerization; the triazabenzene resin (F) has at least one triazabenzene skeleton and has an amine group bonded to the triazabenzene skeleton. The specific structure, physical properties, and types of the triazabenzene resin (F) will be described in the description of each component described later.

本發明的感光性樹脂組成物具有上述特性的理由,仍不清楚,但是認為是因為有機填料(E1)與三氮雜苯樹脂(F)在感光性樹脂組成物中具有以下作用所致。The reason why the photosensitive resin composition of the present invention has the aforementioned characteristics is still unclear, but it is thought that the organic filler (E1) and the triazabenzene resin (F) have the following effects in the photosensitive resin composition.

首先,若感光性樹脂組成物含有具有羧基之有機填料(E1),有機填料(E1)中的羧基,能夠在熱硬化時與感光性樹脂組成物所含有的環氧化合物(例如環氧化合物(D))進行反應。藉此,在硬化物層的內部變得可含有均勻地分散的有機填料(E1)。因此,在利用氧化劑將硬化層的表面進行粗糙化的階段,亦能夠使有機填料(E1)中未經反應的羧基進行改質。亦即,在硬化物層所含有的有機填料(E1)之中,位於硬化物層的表面附近的有機填料(E1),在將硬化物層的表面進行粗糙化的階段會變得容易被改質。經如此操作而改質的有機填料(E1),會變得容易從硬化物層被去除。藉此,能夠對硬化物層的表面賦予粗糙面。並且,若感光性樹脂組成物進一步含有三氮雜苯樹脂(F),即便在利用氧化劑將硬化物層進行粗糙化時,仍能夠使硬化物層不易被腐蝕。因此,藉由感光性樹脂組成物含有三氮雜苯樹脂(F),在鍍覆處理前將感光性樹脂組成物的硬化物表面進行粗糙化時,便能夠抑制硬化物層的厚度過度地減少。又,對於粗糙化後的硬化物層的表面,難以產生部分且較大的坑洞,因此可抑制粗糙化後的表面變得不均勻的情況。這被認為是因為三氮雜苯樹脂(F)滿足下述條件中的至少一條件,所以在感光性樹脂組成物中亦具有高分散性,該條件是:三氮雜苯樹脂(F)在25℃中是液狀狀態;及,感光性樹脂組成物含有溶劑(H),且在25℃時三氮雜苯樹脂(F)會溶解於感光性樹脂組成物中的溶劑(H)中。藉此,能夠對提升硬化物層與由銅或金等所構成之鍍覆層的密合性有所貢獻。First, if the photosensitive resin composition contains an organic filler (E1) having a carboxyl group, the carboxyl group in the organic filler (E1) can be combined with an epoxy compound (for example, an epoxy compound ( D)) Perform the reaction. This makes it possible to contain a uniformly dispersed organic filler (E1) inside the hardened material layer. Therefore, even when the surface of the hardened layer is roughened with an oxidizing agent, the unreacted carboxyl group in the organic filler (E1) can be modified. That is, among the organic fillers (E1) contained in the hardened material layer, the organic fillers (E1) located near the surface of the hardened material layer can be easily changed at the stage of roughening the surface of the hardened material layer. quality. The organic filler (E1) modified in this way is easily removed from the hardened material layer. Thereby, a rough surface can be provided on the surface of a hardened | cured material layer. In addition, if the photosensitive resin composition further contains a triazabenzene resin (F), even when the hardened material layer is roughened with an oxidizing agent, the hardened material layer can be made less likely to be corroded. Therefore, when the photosensitive resin composition contains a triazabenzene resin (F), when the surface of the cured product of the photosensitive resin composition is roughened before the plating treatment, it is possible to suppress an excessive reduction in the thickness of the cured product layer. . In addition, since the roughened surface of the hardened material layer is difficult to generate partial and large pits, the unevenness of the roughened surface can be suppressed. This is considered to be because the triazabenzene resin (F) satisfies at least one of the following conditions, and therefore has high dispersibility in the photosensitive resin composition. The condition is that the triazabenzene resin (F) is The liquid state is at 25 ° C; and the photosensitive resin composition contains a solvent (H), and the triazabenzene resin (F) is dissolved in the solvent (H) in the photosensitive resin composition at 25 ° C. Thereby, it can contribute to the improvement of the adhesiveness of a hardened | cured material layer and the plating layer which consists of copper, gold, etc.

如同上述,本實施形態中,在利用氧化劑處理硬化物層的表面來進行粗糙化時,能夠抑制由於氧化劑造成的硬化物的厚度過度地減少,且能夠抑制處理後的表面變得不均勻的情況。因此,當在表面經粗糙化的硬化物層上形成鍍覆層時,能夠實現提升硬化物層與鍍覆層的密合性。As described above, in the present embodiment, when the surface of the hardened material layer is roughened by using an oxidizing agent, the thickness of the hardened material due to the oxidizing agent can be prevented from being excessively reduced, and the treated surface can be prevented from becoming uneven. . Therefore, when the plating layer is formed on the hardened layer having a roughened surface, the adhesion between the hardened layer and the plated layer can be improved.

詳細地說明構成本實施形態中的感光性樹脂組成物的各成分。Each component which comprises the photosensitive resin composition in this embodiment is demonstrated in detail.

含羧基樹脂(A),較佳是包含具有乙烯性不飽和基且具有羧基之含羧基樹脂。藉由含羧基樹脂(A)具有乙烯性不飽和基,含有含羧基樹脂(A)之感光性樹脂組成物會具有光反應性。因此,含羧基樹脂(A),能夠對感光性樹脂組成物賦予感光性,具體而言能夠賦予紫外線硬化性。The carboxyl group-containing resin (A) is preferably a carboxyl group-containing resin having an ethylenically unsaturated group and a carboxyl group. When the carboxyl group-containing resin (A) has an ethylenically unsaturated group, the photosensitive resin composition containing the carboxyl group-containing resin (A) has photoreactivity. Therefore, the carboxyl group-containing resin (A) can impart photosensitivity to the photosensitive resin composition, and specifically can impart ultraviolet curability.

含羧基樹脂(A),較佳是包含具有芳香環之含羧基樹脂。藉由含羧基樹脂(A)包含芳香環,能夠對含有含羧基樹脂(A)之感光性樹脂組成物的硬化物賦予高耐熱性和高絕緣可靠性。含羧基樹脂(A)更佳是包含具有多環芳香環之含羧基樹脂,該多環芳香環是聯苯骨架、萘骨架、茀骨架及蒽骨架中的任一種。藉由含羧基樹脂(A)包含聯苯骨架、萘骨架、茀骨架及蒽骨架中的任一種的多環芳香環,便能夠對含有含羧基樹脂(A)之感光性樹脂組成物的硬化物賦予更高的耐熱性和絕緣可靠性。含羧基樹脂(A)進一步較佳是包含具有雙酚茀骨架之含羧基樹脂。藉由含羧基樹脂(A)包含雙酚茀骨架,便能夠對含有含羧基樹脂(A)之感光性樹脂組成物的硬化物賦予進一步更高的耐熱性和絕緣可靠性。The carboxyl group-containing resin (A) preferably contains a carboxyl group-containing resin having an aromatic ring. When the carboxyl group-containing resin (A) contains an aromatic ring, the cured product of the photosensitive resin composition containing the carboxyl group-containing resin (A) can be provided with high heat resistance and high insulation reliability. The carboxyl group-containing resin (A) is more preferably a carboxyl group-containing resin having a polycyclic aromatic ring, and the polycyclic aromatic ring is any one of a biphenyl skeleton, a naphthalene skeleton, a fluorene skeleton, and an anthracene skeleton. When the carboxyl group-containing resin (A) contains a polycyclic aromatic ring of any of a biphenyl skeleton, a naphthalene skeleton, a fluorene skeleton, and an anthracene skeleton, a cured product of a photosensitive resin composition containing a carboxyl group resin (A) can be used. Provides higher heat resistance and insulation reliability. The carboxyl group-containing resin (A) is more preferably a carboxyl group-containing resin having a bisphenol fluorene skeleton. When the carboxyl group-containing resin (A) contains a bisphenol fluorene skeleton, it is possible to impart further higher heat resistance and insulation reliability to the cured product of the photosensitive resin composition containing the carboxyl group-containing resin (A).

含羧基樹脂(A),較佳是含有如下述說明的具有雙酚茀骨架之含羧基樹脂(A1)。含羧基樹脂(A1),例如是下述中間體與酸酐(a3)的反應物,該中間體是環氧化合物(a1)與羧酸(a2)的反應物,該環氧化合物(a1)具有由下述式(1)表示的雙酚茀骨架,該羧酸(a2)包含含不飽和基羧酸(a2-1)。在式(1)中,R1 ~R8 各自獨立地是氫、碳數1以上且5以下的烷基或鹵素。含羧基樹脂(A1),是藉由下述方式來合成:使具有由下述式(1)表示的雙酚茀骨架(S1)之環氧化合物(a1)、與包含含不飽和基羧酸(a2-1)之羧酸(a2)進行反應,並使藉此所獲得的中間體與酸酐(a3)進行反應而得。The carboxyl group-containing resin (A) is preferably a carboxyl group-containing resin (A1) having a bisphenol fluorene skeleton as described below. The carboxyl group-containing resin (A1) is, for example, a reactant of the following intermediate and an acid anhydride (a3), the intermediate is a reactant of an epoxy compound (a1) and a carboxylic acid (a2), and the epoxy compound (a1) has The bisphenol fluorene skeleton represented by the following formula (1), and the carboxylic acid (a2) contains an unsaturated group-containing carboxylic acid (a2-1). In Formula (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen. The carboxyl group-containing resin (A1) is synthesized by combining an epoxy compound (a1) having a bisphenol fluorene skeleton (S1) represented by the following formula (1) and an unsaturated group-containing carboxylic acid The carboxylic acid (a2) of (a2-1) is reacted, and the intermediate obtained by this is reacted with an acid anhydride (a3).

式(1)中,R1 ~R8 各自獨立地是氫、碳數1以上且5以下的烷基或鹵素。亦即,在式(1)中的各個R1 ~R8 ,可以是氫,亦可以是碳數1以上且5以下的烷基或鹵素。這是因為下述緣故所致:芳香環中的氫即便被低分子量的烷基或鹵素取代,仍不會對含羧基樹脂(A1)的物性造成不良的影響,有時反而會有提升包含含羧基樹脂(A1)之感光性樹脂組成物的硬化物的耐熱性、或難燃性的情況。In Formula (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or a halogen. That is, each of R 1 to R 8 in formula (1) may be hydrogen, or may be an alkyl group or a halogen group having 1 to 5 carbon atoms. This is due to the fact that even if the hydrogen in the aromatic ring is replaced by a low-molecular-weight alkyl or halogen, the physical properties of the carboxyl-containing resin (A1) will not be adversely affected. In the case of a cured product of a photosensitive resin composition of a carboxyl resin (A1), heat resistance or flame retardancy may be obtained.

藉由含羧基樹脂(A1)具有源自環氧化合物(a1)且由式(1)表示的雙酚茀骨架,能夠賦予感光性樹脂組成物的硬化物高耐熱性和高絕緣可靠性。又,藉由含羧基樹脂(A1)具有源自酸酐(a3)的羧基,能夠賦予感光性樹脂組成物優異的顯影性。進一步,藉由感光性樹脂組成物含有環氧樹脂,能夠賦予感光性樹脂組成物熱硬化性。When the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton derived from the epoxy compound (a1) and represented by the formula (1), it is possible to impart high heat resistance and high insulation reliability to the cured product of the photosensitive resin composition. Further, since the carboxyl group-containing resin (A1) has a carboxyl group derived from the acid anhydride (a3), it is possible to impart excellent developability to the photosensitive resin composition. Furthermore, when the photosensitive resin composition contains an epoxy resin, it is possible to impart thermosetting properties to the photosensitive resin composition.

含羧基樹脂(A1)例如能夠藉由下述說明的操作來合成。為了合成含羧基樹脂(A1),首先,藉由使環氧化合物(a1)的環氧基(參照式(2))的至少一部分、與包含含不飽和基羧酸(a2-1)之羧酸(a2)進行反應,來合成中間體。中間體的合成,被定義為第一反應。中間體具有下述式(3)表示的結構(S3),該結構(S3)是藉由環氧基與羧酸(a2)的開環加成反應所產生。亦即,中間體在結構(S3)中具有二級羥基,該二級羥基是藉由環氧基與羧酸(a2)的開環加成反應所產生。在式(3)中,A是羧酸殘基。該A包含含不飽和基羧酸殘基。The carboxyl group-containing resin (A1) can be synthesized by, for example, the operations described below. In order to synthesize a carboxyl group-containing resin (A1), first, at least a part of the epoxy group (see formula (2)) of the epoxy compound (a1) and a carboxyl group containing an unsaturated group-containing carboxylic acid (a2-1) The acid (a2) is reacted to synthesize an intermediate. The synthesis of an intermediate is defined as the first reaction. The intermediate has a structure (S3) represented by the following formula (3), and the structure (S3) is produced by a ring-opening addition reaction of an epoxy group and a carboxylic acid (a2). That is, the intermediate has a secondary hydroxyl group in the structure (S3), and the secondary hydroxyl group is produced by a ring-opening addition reaction of an epoxy group with a carboxylic acid (a2). In formula (3), A is a carboxylic acid residue. The A contains an unsaturated carboxylic acid residue.

繼而,使中間體中的二級羥基與酸酐(a3)進行反應。藉此,便能夠合成含羧基樹脂(A1)。中間體與酸酐(a3)的反應,被定義為第二反應。酸酐(a3)可包含酸一酐或酸二酐。所謂酸一酐,是具有一個酸酐基之化合物,其是在一分子內的2個羧基經脫水縮合而成。所謂酸二酐,是具有兩個酸酐基之化合物,其是在一分子內的4個羧基經脫水縮合而成。Then, the secondary hydroxyl group in the intermediate is reacted with the acid anhydride (a3). Thereby, a carboxyl group-containing resin (A1) can be synthesized. The reaction between the intermediate and the acid anhydride (a3) is defined as the second reaction. The acid anhydride (a3) may include an acid monoanhydride or an acid dianhydride. The so-called acid monoanhydride is a compound having one acid anhydride group, which is formed by dehydration condensation of two carboxyl groups in one molecule. The so-called acid dianhydride is a compound having two acid anhydride groups, which is formed by dehydration condensation of 4 carboxyl groups in one molecule.

酸酐(a3)可包含酸二酐(a3-2)和酸一酐(a3-1)中的至少1種。當酸酐(a3)含有酸一酐(a3-1)時,含羧基樹脂(A1)具有由式(1)表示的雙酚茀骨架(S1)、與由下述式(4)表示的結構(S4)。The acid anhydride (a3) may contain at least one of an acid dianhydride (a3-2) and an acid monoanhydride (a3-1). When the acid anhydride (a3) contains the acid monoanhydride (a3-1), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1) represented by the formula (1) and a structure represented by the following formula (4) ( S4).

結構(S4),藉由中間體的結構(S3)中的二級羥基、與酸一酐(a3-1)中的酸酐基進行反應而產生。在式(4)中,A是羧酸殘基,B是酸一酐殘基。該A包含含不飽和基羧酸殘基。The structure (S4) is generated by reacting a secondary hydroxyl group in the structure (S3) of the intermediate with an acid anhydride group in the acid monoanhydride (a3-1). In formula (4), A is a carboxylic acid residue and B is an acid-anhydride residue. The A contains an unsaturated carboxylic acid residue.

當酸酐(a3)包含酸二酐(a3-2)時,含羧基樹脂(A1)具有由式(1)表示的雙酚茀骨架(S1)、與由下述式(5)表示的結構(S5)。When the acid anhydride (a3) contains an acid dianhydride (a3-2), the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1) represented by the formula (1) and a structure represented by the formula (5) S5).

結構(S5),藉由酸二酐(a3-2)中的兩個酸酐基、與中間體中的兩個二級羥基分別進行反應而產生。亦即,結構(S5),藉由酸二酐(a3-2)將兩個二級羥基的羥基彼此交聯而產生。再者,可能是下述情況:中間體的一分子中存在有兩個二級羥基彼此被交聯;及,分別存在於中間體的兩個分子中的兩個二級羧基彼此被交聯。The structure (S5) is generated by reacting two acid anhydride groups in the acid dianhydride (a3-2) with two secondary hydroxyl groups in the intermediate. That is, the structure (S5) is generated by cross-linking the hydroxyl groups of two secondary hydroxyl groups with each other by an acid dianhydride (a3-2). Furthermore, it may be the case that two secondary hydroxyl groups are cross-linked to each other in one molecule of the intermediate; and two secondary carboxyl groups that are respectively present in two molecules of the intermediate are cross-linked to each other.

若在分別存在於中間體的兩個分子中的兩個二級羥基彼此被交聯,分子量會增加。在式(5)中,A是羧酸殘基,D是酸二酐殘基。該A包含含不飽和基羧酸殘基。If two secondary hydroxyl groups in two molecules respectively present in the intermediate are cross-linked to each other, the molecular weight increases. In formula (5), A is a carboxylic acid residue and D is an acid dianhydride residue. The A contains an unsaturated carboxylic acid residue.

使中間體中的二級羥基與酸酐(a3)反應便能夠獲得含羧基樹脂(A1)。當酸酐(a3)含有酸二酐(a3-2)和酸一酐(a3-1)時,可使中間體中的一部分的二級羥基與酸二酐(a3-2)進行反應,並使中間體中的另一部分的二級羥基與酸一酐(a3-1)進行反應。藉此,能夠合成含羧基樹脂(A1)。此時,含羧基樹脂(A1)具有雙酚茀骨架(S1)、結構(S4)及結構(S5)。By reacting the secondary hydroxyl group in the intermediate with the acid anhydride (a3), a carboxyl group-containing resin (A1) can be obtained. When the acid anhydride (a3) contains an acid dianhydride (a3-2) and an acid monoanhydride (a3-1), a part of the secondary hydroxyl groups in the intermediate can be reacted with the acid dianhydride (a3-2), and The other secondary hydroxyl group in the intermediate is reacted with the acid monoanhydride (a3-1). Thereby, a carboxyl group-containing resin (A1) can be synthesized. At this time, the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1), a structure (S4), and a structure (S5).

含羧基樹脂(A1),可進一步具有由下述式(6)表示的結構(S6)。結構(S6),藉由酸二酐(a3-2)中的兩個酸酐基之中的僅只一個與中間體中的二級羥基進行反應而產生。在式(6)中,A是羧酸殘基,D是酸二酐殘基。該A包含含不飽和基羧酸殘基。The carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6). The structure (S6) is generated by reacting only one of the two acid anhydride groups in the acid dianhydride (a3-2) with a secondary hydroxyl group in the intermediate. In Formula (6), A is a carboxylic acid residue and D is an acid dianhydride residue. The A contains an unsaturated carboxylic acid residue.

合成中間體時,當環氧化合物(a1)中的一部分的環氧基未經反應而仍殘存時,含羧基樹脂(A1)可具有由式(2)表示的結構(S2),亦即具有環氧基。又,當中間體中的一部分的結構(S3)未經反應而仍殘存時,含羧基樹脂(A1)亦可具有結構(S3)。When synthesizing an intermediate, when a part of the epoxy group in the epoxy compound (a1) remains without reaction, the carboxyl group-containing resin (A1) may have a structure (S2) represented by the formula (2), that is, Epoxy. When a part of the structure (S3) in the intermediate is left unreacted, the carboxyl group-containing resin (A1) may have the structure (S3).

當酸酐(a3)含有酸二酐(a3-2)時,藉由將合成含羧基樹脂(A1)時的反應條件進行最佳化,可降低含羧基樹脂(A1)中的結構(S2)和結構(S6)的數量,或者可使結構(S2)和結構(S6)自含羧基樹脂(A1)中大致消失。When the acid anhydride (a3) contains an acid dianhydride (a3-2), by optimizing the reaction conditions when synthesizing the carboxyl-containing resin (A1), the structure (S2) and the carboxyl-containing resin (A1) can be reduced. The number of the structures (S6) or the structures (S2) and (S6) can be substantially eliminated from the carboxyl-containing resin (A1).

如同上述,含羧基樹脂(A1)具有雙酚茀骨架(S1),並且能夠是下述情況:當酸酐含有酸一酐(a3-1)時具有結構(S4);當酸酐含有酸二酐(a3-2)時具有結構(S5)。進一步,當酸酐(a3)含有酸一酐(a3-1)時,含羧基樹脂(A1),有時具有結構(S2)與結構(S3)中的至少一種。又,當酸酐(a3)含有酸二酐(a3-2)時,含羧基樹脂(A1),有時具有結構(S2)與結構(S6)中的至少一種。又,進一步,當酸酐(a3)含有酸一酐(a3-1)與酸二酐(a3-2)時,含羧基樹脂(A1),有時具有結構(S2)、結構(S3)、及結構(S6)中的至少一種。As described above, the carboxyl group-containing resin (A1) has a bisphenol fluorene skeleton (S1), and can be a case where the acid anhydride has an acid monoanhydride (a3-1) and has a structure (S4); when the acid anhydride contains an acid dianhydride ( a3-2) has a structure (S5). Furthermore, when the acid anhydride (a3) contains an acid monoanhydride (a3-1), the carboxyl group-containing resin (A1) may have at least one of a structure (S2) and a structure (S3). When the acid anhydride (a3) contains the acid dianhydride (a3-2), the carboxyl group-containing resin (A1) may have at least one of a structure (S2) and a structure (S6). Furthermore, when the acid anhydride (a3) contains an acid monoanhydride (a3-1) and an acid dianhydride (a3-2), the carboxyl group-containing resin (A1) may have a structure (S2), a structure (S3), and At least one of the structures (S6).

又,當環氧化合物(a1)本身具有二級羥基時,亦即,例如當後述的式(7)中n=1以上時,含羧基樹脂(A1),有時亦具有藉由環氧化合物(a1)中的二級羥基與酸酐(a3)進行反應所產生的結構。When the epoxy compound (a1) itself has a secondary hydroxyl group, that is, when n = 1 or more in the formula (7) described later, for example, the carboxyl group-containing resin (A1) may have an epoxy compound. Structure in which a secondary hydroxyl group in (a1) reacts with an acid anhydride (a3).

再者,上述含羧基樹脂(A1)的結構能夠基於技術常識來合理地類推,並且就現實而言,無法藉由分析來特定含羧基樹脂(A1)的結構。其理由如下。當環氧化合物(a1)本身具有二級羥基時(例如,當後述的式(7)中n為1以上時),會因為環氧化合物(a1)中的二級羥基的數量而使含羧基樹脂(A1)的結構產生巨大的變化。又,當中間體與酸二酐(a3-2)進行反應時,如同上述,可能產生下述情況:存在於中間體的一分子中的兩個二級羥基彼此以酸二酐(a3-2)進行交聯;及,分別存在於中間體的兩個分子中的兩個二級羧基彼此以酸二酐(a3-2)進行交聯。因此,最終所獲得的含羧基樹脂(A1)會包含結構互為不同的複數個分子,從而即便分析含羧基樹脂(A1)仍無法特定其結構。Furthermore, the structure of the carboxyl-containing resin (A1) can be reasonably analogized based on technical common sense, and in reality, the structure of the carboxyl-containing resin (A1) cannot be specified by analysis. The reason is as follows. When the epoxy compound (a1) itself has a secondary hydroxyl group (for example, when n in Formula (7) described below is 1 or more), the number of secondary hydroxyl groups in the epoxy compound (a1) may cause a carboxyl group. The structure of the resin (A1) has changed drastically. In addition, when the intermediate is reacted with the acid dianhydride (a3-2), as described above, the following may occur: two secondary hydroxyl groups present in one molecule of the intermediate are mutually acid dianhydride (a3-2). ) Performing cross-linking; and, two secondary carboxyl groups respectively present in two molecules of the intermediate are cross-linked with each other with an acid dianhydride (a3-2). Therefore, the carboxyl-containing resin (A1) finally obtained includes a plurality of molecules having different structures from each other, so that even if the carboxyl-containing resin (A1) is analyzed, its structure cannot be specified.

因為含羧基樹脂(A1)具有源自含不飽和基羧酸(a2-1)的乙烯性不飽和基,所以具有光反應性。因此,含羧基樹脂(A1),能夠對感光性樹脂組成物賦予感光性(具體而言是紫外線硬化性)。又,因為含羧基樹脂(A1)具有源自酸酐(a3)的羧基,所以能夠賦予感光性樹脂組成物藉由鹼性水溶液所產生的顯影性,該鹼性水溶液含有鹼金屬鹽和鹼金屬氫化物中的至少一種。進一步,當酸酐(a3)含有酸二酐(a3-2)時,含羧基樹脂(A1)的分子量會與藉由酸二酐(a3-2)所產生的交聯的數量呈正相關。因此,可獲得酸值與分子量被適度地調整的含羧基樹脂(A1)。當酸酐(a3)含有酸二酐(a3-2)和酸一酐(a3-1)時,藉由控制酸二酐(a3-2)和酸一酐(a3-1)的量、及酸一酐(a3-1)相對於酸二酐(a3-2)的量,可容易地獲得期望的分子量和酸值的含羧基樹脂(A1)。Since the carboxyl group-containing resin (A1) has an ethylenically unsaturated group derived from an unsaturated group-containing carboxylic acid (a2-1), it has photoreactivity. Therefore, the carboxyl group-containing resin (A1) can impart photosensitivity (specifically, ultraviolet curability) to the photosensitive resin composition. Further, since the carboxyl group-containing resin (A1) has a carboxyl group derived from the acid anhydride (a3), it can impart developability to a photosensitive resin composition by an alkaline aqueous solution containing an alkali metal salt and an alkali metal hydrogenation. At least one of these. Further, when the acid anhydride (a3) contains the acid dianhydride (a3-2), the molecular weight of the carboxyl group-containing resin (A1) is positively related to the number of crosslinks generated by the acid dianhydride (a3-2). Therefore, a carboxyl group-containing resin (A1) whose acid value and molecular weight are moderately adjusted can be obtained. When the acid anhydride (a3) contains the acid dianhydride (a3-2) and the acid monoanhydride (a3-1), the amount of the acid dianhydride (a3-2) and the acid monoanhydride (a3-1) and the acid The amount of the monoanhydride (a3-1) relative to the acid dianhydride (a3-2) can easily obtain a carboxyl group-containing resin (A1) having a desired molecular weight and acid value.

含羧基樹脂(A1)的重量平均分子量較佳是700以上且10000以下。若重量平均分子量是700,可進一步抑制由感光性樹脂組成物所形成的覆膜的黏性,並進一步提升硬化物的絕緣可靠性和耐鍍覆性。又,若重量平均分子量是10000以下,尤其可提升感光性樹脂組成物藉由鹼性水溶液所產生的顯影性。重量平均分子量進一步較佳是900以上且8000以下,特別較佳是1000以上且5000以下。The weight average molecular weight of the carboxyl group-containing resin (A1) is preferably 700 or more and 10,000 or less. When the weight average molecular weight is 700, the viscosity of the coating film formed from the photosensitive resin composition can be further suppressed, and the insulation reliability and plating resistance of the cured product can be further improved. In addition, if the weight average molecular weight is 10,000 or less, the developability of the photosensitive resin composition with an alkaline aqueous solution can be improved. The weight average molecular weight is more preferably 900 or more and 8,000 or less, and particularly preferably 1,000 or more and 5,000 or less.

含羧基樹脂(A1)的固體成分酸值較佳是60mg KOH/g以上且140mg KOH/g以下。此時,尤其可提升感光性樹脂組成物的顯影性。固體成分酸值,更佳是80mg KOH/g以上且135mg KOH/g以下,進一步較佳是90mg KOH/g以上且130mg KOH/g以下。The solid content acid value of the carboxyl group-containing resin (A1) is preferably 60 mg KOH / g or more and 140 mg KOH / g or less. In this case, the developability of the photosensitive resin composition can be particularly improved. The solid content acid value is more preferably 80 mg KOH / g or more and 135 mg KOH / g or less, and still more preferably 90 mg KOH / g or more and 130 mg KOH / g or less.

含羧基樹脂(A1)的多分散性較佳是1.0以上且4.8以下。此時,能夠一邊確保由感光性樹脂組成物所形成的硬化物的良好的絕緣可靠性和耐鍍覆性(例如,無電解鎳/金鍍覆處理時的耐白化性),一邊賦予感光性樹脂組成物優異的顯影性。含羧基樹脂(A1)的多分散性更佳是1.1以上且4.0以下,進一步較佳是1.2以上且2.8以下。再者,多分散性是含羧基樹脂(A1)的重量平均分子量(Mw)相對於數量平均分子量(Mn)的比值(Mw/Mn)。The polydispersity of the carboxyl group-containing resin (A1) is preferably 1.0 or more and 4.8 or less. At this time, the photosensitivity can be imparted while ensuring good insulation reliability and plating resistance (for example, whitening resistance during electroless nickel / gold plating treatment) of the cured product formed from the photosensitive resin composition. The resin composition has excellent developability. The polydispersity of the carboxyl group-containing resin (A1) is more preferably 1.1 or more and 4.0 or less, and even more preferably 1.2 or more and 2.8 or less. The polydispersity is the ratio (Mw / Mn) of the weight average molecular weight (Mw) to the number average molecular weight (Mn) of the carboxyl group-containing resin (A1).

含羧基樹脂(A1)的重量平均分子量(Mw),可從藉由膠透層析術(Gel Permeation Chromatography,GPC)的分子量測定結果來算出。利用膠透層析術的分子量測定,例如能夠利用以下的條件來實行。
GPC裝置:昭和電工公司製造的SHODEX SYSTEM 11;
管柱:SHODEX KF-800P、KF-005、KF-003、KF-001的四支串聯;
流動相:四氫呋喃(THF);
流量:1 mL/分鐘;
管柱溫度:45℃;
偵測器:折射率(RI);
換算:聚苯乙烯。
The weight average molecular weight (Mw) of the carboxyl group-containing resin (A1) can be calculated from the molecular weight measurement results by gel permeation chromatography (GPC). The molecular weight measurement by gel permeation chromatography can be performed under the following conditions, for example.
GPC device: SHODEX SYSTEM 11 manufactured by Showa Denko Corporation;
Tubing: SHODEX KF-800P, KF-005, KF-003, KF-001 four in series;
Mobile phase: tetrahydrofuran (THF);
Flow: 1 mL / min;
Column temperature: 45 ° C;
Detector: refractive index (RI);
Conversion: polystyrene.

詳細地說明含羧基樹脂(A1)的原料、及合成含羧基樹脂(A1)時的反應條件。The raw materials of the carboxyl-containing resin (A1) and the reaction conditions when synthesizing the carboxyl-containing resin (A1) will be described in detail.

環氧化合物(a1),例如具有由下述式(7)表示的結構(S7)。式(7)中的n,例如是0以上且20以下的數。為了適當控制含羧基樹脂(A1)的分子量,n的平均特佳是0以上且1以下。若n的平均在0以上且1以下的範圍內,即使在酸酐(a3)含有酸二酐(a3-2)時,仍可容易控制由於酸二酐(a3-2)的加成所造成的分子量的過度增加。The epoxy compound (a1) has, for example, a structure (S7) represented by the following formula (7). N in formula (7) is a number of 0 or more and 20 or less, for example. In order to appropriately control the molecular weight of the carboxyl group-containing resin (A1), the average of n is particularly preferably 0 or more and 1 or less. If the average of n is in the range of 0 or more and 1 or less, even when the acid dianhydride (a3-2) is contained in the acid anhydride (a3), the addition of the acid dianhydride (a3-2) can be easily controlled Excessive increase in molecular weight.

羧酸(a2)包含含不飽和基羧酸(a2-1)。羧酸(a2)可僅包含含不飽和基羧酸(a2-1)。或者,羧酸(a2)可包含:含不飽和基羧酸(a2-1)、及含不飽和基羧酸(a2-1)以外的羧酸。The carboxylic acid (a2) includes an unsaturated group-containing carboxylic acid (a2-1). The carboxylic acid (a2) may include only the unsaturated group-containing carboxylic acid (a2-1). Alternatively, the carboxylic acid (a2) may include an unsaturated group-containing carboxylic acid (a2-1) and a carboxylic acid other than the unsaturated group-containing carboxylic acid (a2-1).

含不飽和基羧酸(a2-1),能夠含有例如:在一分子中僅具有1個乙烯性不飽和基之化合物。更具體而言,含不飽和基羧酸(a2-1),能夠含有例如選自由下述化合物所組成之群組中的至少一種:丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、巴豆酸、肉桂酸、琥珀酸2-丙烯醯氧基乙酯、琥珀酸2-甲基丙烯醯氧基乙酯、鄰苯二甲酸2-丙烯醯氧基乙酯、鄰苯二甲酸2-甲基丙烯醯氧基乙酯、鄰苯二甲酸2-丙烯醯氧基丙酯、鄰苯二甲酸2-甲基丙烯醯氧基丙酯、馬來酸2-丙烯醯氧基乙酯、馬來酸2-甲基丙烯醯氧基乙酯、丙烯酸β-羧乙酯、四氫鄰苯二甲酸2-丙烯醯氧基乙酯、四氫鄰苯二甲酸2-甲基丙烯醯氧基乙酯、六氫鄰苯二甲酸2-丙烯醯氧基乙酯、及六氫鄰苯二甲酸2-甲基丙烯醯氧基乙酯。較佳是含不飽和基羧酸(a2-1)含有丙烯酸。The unsaturated group-containing carboxylic acid (a2-1) can contain, for example, a compound having only one ethylenically unsaturated group in one molecule. More specifically, the unsaturated group-containing carboxylic acid (a2-1) can contain, for example, at least one selected from the group consisting of acrylic acid, methacrylic acid, and ω-carboxy-polycaprolactone ( n ≒ 2) Monoacrylate, crotonic acid, cinnamic acid, 2-propenyloxyethyl succinate, 2-methacrylic acid ethoxyethyl succinate, 2-propenyloxyethyl phthalate , 2-methacrylic acid ethoxyethyl phthalate, 2-propenemethyl oxypropyl phthalate, 2-methacrylic acid oxypropyl phthalate, 2-propylene maleate Ethyl ethoxylate, 2-methacryl ethoxylate maleate, β-carboxyethyl acrylate, 2-acryl ethoxylate tetrahydrophthalate, 2-tetrahydrophthalate 2- Methacryloxyethyl, hexahydrophthalic acid 2-propenyloxyethyl, and 2-methacryloxyethyl hexahydrophthalate. The unsaturated group-containing carboxylic acid (a2-1) preferably contains acrylic acid.

羧酸(a2)可包含多元酸(a2-2)。多元酸(a2-2)是在1分子內的2個以上的氫原子能夠被金屬原子取代的酸。多元酸(a2-2)較佳是具有2個以上的羧基。此時,環氧化合物(a1)會與含不飽和基羧酸(a2-1)及多元酸(a2-2)雙方進行反應。多元酸(a2-2)將環氧化合物(a1)的2個存在於分子中的環氧基進行交聯,藉此來獲得分子量的增加。藉此,能夠進一步控制由感光性樹脂組成物所形成的覆膜的黏性,並進一步提升硬化物的絕緣可靠性和耐鍍覆性。The carboxylic acid (a2) may include a polyacid (a2-2). The polybasic acid (a2-2) is an acid in which two or more hydrogen atoms in one molecule can be replaced by metal atoms. The polybasic acid (a2-2) preferably has two or more carboxyl groups. At this time, the epoxy compound (a1) reacts with both the unsaturated group-containing carboxylic acid (a2-1) and the polybasic acid (a2-2). The polybasic acid (a2-2) obtains an increase in molecular weight by crosslinking two epoxy groups present in the molecule of the epoxy compound (a1). Thereby, it is possible to further control the viscosity of the coating film formed of the photosensitive resin composition, and to further improve the insulation reliability and plating resistance of the cured product.

多元酸(a2-2)較佳是包含二羧酸。多元酸(a2-2)例如能夠含有選自由下述化合物所組成之群組中的一種以上:4-環己烯-1,2-二甲酸、草酸、丙二酸、琥珀酸、戊二酸、己二酸、庚二酸、辛二酸、壬二酸、癸二酸、馬來酸、富馬酸、鄰苯二甲酸、間苯二甲酸、對苯二甲酸。較佳是:多元酸(a2-2)含有4-環己烯-1,2-二甲酸。The polybasic acid (a2-2) preferably contains a dicarboxylic acid. The polybasic acid (a2-2) can contain, for example, one or more members selected from the group consisting of 4-cyclohexene-1,2-dicarboxylic acid, oxalic acid, malonic acid, succinic acid, and glutaric acid. , Adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, maleic acid, fumaric acid, phthalic acid, isophthalic acid, terephthalic acid. Preferably, the polybasic acid (a2-2) contains 4-cyclohexene-1,2-dicarboxylic acid.

當使環氧化合物(a1)與羧酸(a2)進行反應時,能夠採用習知的方法。例如:在環氧化合物(a1)的溶劑溶液中加入羧酸(a2),進一步依據需要來加入熱聚合抑制劑和觸媒並攪拌混合,藉此獲得反應性溶液。藉由慣用方法而在較佳為60℃以上且150℃以下、特佳為80℃以上且120℃以下的溫度使該反應性溶液進行反應,便能夠獲得中間體。此時的溶劑,能夠含有例如選自由下述成分所組成之群組中的至少一種:甲基乙基酮、環己酮等的酮類;甲苯、二甲苯等的芳香族烴類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、丁基賽璐蘇乙酸酯、卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲基醚乙酸酯等的乙酸酯類;及,二烷二醇醚類。熱聚合抑制劑含有例如:氫醌及氫醌單甲基醚之中的至少一種。觸媒能夠含有例如選自由下述成分所組成之群組中的至少一種:苯甲基二甲基胺、三乙胺等的三級胺類;氯化三甲基苯甲銨、氯化甲基三乙銨等的四級銨鹽類;三苯膦;及,三苯䏲。When the epoxy compound (a1) and the carboxylic acid (a2) are reacted, a conventional method can be adopted. For example, a carboxylic acid (a2) is added to a solvent solution of the epoxy compound (a1), and a thermal polymerization inhibitor and a catalyst are further added and mixed as required to obtain a reactive solution. By reacting this reactive solution at a temperature of preferably 60 ° C. or higher and 150 ° C. or lower, particularly preferably 80 ° C. or higher and 120 ° C. or lower by a conventional method, an intermediate can be obtained. The solvent at this time can contain, for example, at least one selected from the group consisting of ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene; ethyl acetate Acetate, butyl acetate, cellulose acetate, butylcellulose acetate, carbitol acetate, butylcarbitol acetate, propylene glycol monomethyl ether acetate, etc. And dioxane glycol ethers. The thermal polymerization inhibitor contains, for example, at least one of hydroquinone and hydroquinone monomethyl ether. The catalyst can contain, for example, at least one selected from the group consisting of tertiary amines such as benzyldimethylamine, triethylamine, and the like; trimethylbenzyl chloride, and methyl chloride Quaternary ammonium salts such as triethylammonium; triphenylphosphine; and triphenylphosphonium.

觸媒尤其較佳是含有三苯膦。亦即,較佳是:在三苯膦存在下使環氧化合物(a1)與羧酸(a2)進行反應。此時,尤其可促進環氧化合物(a1)中的環氧基與羧酸(a2)的開環加成反應,而能夠達成95%以上、或97%以上、或幾乎100%的反應率(轉化率)。因此,能夠以高產率獲得具有結構(S3)之中間體。又,可在包含感光性樹脂組成物的硬化物之層中抑制離子遷移的發生,而進一步提升包含該層的絕緣可靠性。The catalyst is particularly preferably one containing triphenylphosphine. That is, it is preferred that the epoxy compound (a1) and the carboxylic acid (a2) are reacted in the presence of triphenylphosphine. In this case, in particular, the ring-opening addition reaction of the epoxy group in the epoxy compound (a1) and the carboxylic acid (a2) can be promoted, and a reaction rate of 95% or more, or 97% or more, or almost 100% can be achieved ( Conversion rate). Therefore, an intermediate having the structure (S3) can be obtained in a high yield. In addition, it is possible to suppress the occurrence of ion migration in the layer containing the cured product of the photosensitive resin composition, and to further improve the insulation reliability including the layer.

使環氧化合物(a1)與羧酸(a2)進行反應時,相對於環氧化合物(a1)的1莫耳的環氧基,羧酸(a2)的量較佳是0.5莫耳以上且1.2莫耳以下。此時,能夠獲得具有優異的感光性和穩定性之感光性樹脂組成物。從相同的觀點來看,相對於環氧化合物(a1)的1莫耳的環氧基,含不飽和基羧酸(a2-1)的量較佳是在0.5莫耳以上且1.2 莫耳以下,更佳是0.8莫耳以上且1.2莫耳以下。或者,當羧酸(a2)包含含不飽和基羧酸(a2-1)以外的羧酸時,相對於環氧化合物(a1)的1莫耳的環氧基,含不飽和基羧酸(a2-1)的量可以是0.5莫耳以上且0.95莫耳以下。又,當羧酸(a2)包含多元酸(a2-2)時,相對於環氧化合物(a1)的1莫耳的環氧基,多元酸(a2-2)的量較佳是0.025莫耳以上且0.25莫耳以下。此時,可獲得具有優異的感光性及穩定性之感光性樹脂組成物。When the epoxy compound (a1) and the carboxylic acid (a2) are reacted, the amount of the carboxylic acid (a2) is preferably 0.5 mol or more and 1.2 relative to 1 mol of epoxy group of the epoxy compound (a1). Moore below. In this case, a photosensitive resin composition having excellent sensitivity and stability can be obtained. From the same viewpoint, the amount of unsaturated carboxylic acid (a2-1) is preferably 0.5 mol or more and 1.2 mol or less with respect to 1 mol epoxy group of the epoxy compound (a1). It is more preferably 0.8 mol or more and 1.2 mol or less. Alternatively, when the carboxylic acid (a2) contains a carboxylic acid other than the unsaturated carboxylic acid (a2-1), the unsaturated carboxylic acid (e.g., 1 mole) of the epoxy compound (a1) contains an unsaturated carboxylic acid ( The amount of a2-1) may be 0.5 mol or more and 0.95 mol or less. When the carboxylic acid (a2) contains a polyacid (a2-2), the amount of the polyacid (a2-2) is preferably 0.025 mol relative to 1 mol of epoxy group of the epoxy compound (a1). Above and below 0.25 mol. In this case, a photosensitive resin composition having excellent sensitivity and stability can be obtained.

如此地操作所獲得的中間體,具備利用環氧化合物(a1)的環氧基與羧酸(a2)的羧基的反應所產生的羥基。The intermediate thus obtained is provided with a hydroxyl group produced by a reaction between an epoxy group of the epoxy compound (a1) and a carboxyl group of the carboxylic acid (a2).

酸一酐(a3-1)是具有一個酸酐基之化合物。酸一酐(a3-1)能夠含有二羧酸的酸酐。酸一酐(a3-1)能夠含有例如選自由下述化合物所組成之群組中的至少一種:鄰苯二甲酸酐、1,2,3,6-四氫鄰苯二甲酸酐、甲基四氫鄰苯二甲酸酐、甲基納迪克酸酐、六氫鄰苯二甲酸酐、甲基六氫鄰苯二甲酸酐、琥珀酸酐、甲基琥珀酸酐、馬來酸酐、檸康酸酐、戊二酸酐、環己烷1,2,4-三甲酸-1,2-酐、及伊康酸酐。尤其,酸一酐(a3-1) 較佳是含有1,2,3,6-四氫鄰苯二甲酸酐。亦即,含羧基樹脂(A1)較佳是具有結構(S4),並且式(4)中的B包含1,2,3,6-四氫鄰苯二甲酸殘基。此時,能夠一邊確保感光性樹脂組成物的良好的顯影性,一邊進一步抑制由感光性樹脂組成物所形成的覆膜的黏性,並進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸一酐(a3-1)整體,1,2,3,6-四氫鄰苯二甲酸酐的量較佳是20莫耳%以上且100莫耳%以下,更佳是在40莫耳%以上且100莫耳%以下,但並未限定於該範圍內。The acid monoanhydride (a3-1) is a compound having one acid anhydride group. The acid monoanhydride (a3-1) can contain an acid anhydride of a dicarboxylic acid. The acid monoanhydride (a3-1) can contain, for example, at least one selected from the group consisting of phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyl Tetrahydrophthalic anhydride, methylnadic anhydride, hexahydrophthalic anhydride, methylhexahydrophthalic anhydride, succinic anhydride, methylsuccinic anhydride, maleic anhydride, citraconic anhydride, glutaric acid Acid anhydride, cyclohexane 1,2,4-tricarboxylic acid-1,2-anhydride, and itaconic anhydride. In particular, the acid monoanhydride (a3-1) preferably contains 1,2,3,6-tetrahydrophthalic anhydride. That is, the carboxyl group-containing resin (A1) preferably has a structure (S4), and B in the formula (4) contains a 1,2,3,6-tetrahydrophthalic acid residue. In this case, while ensuring good developability of the photosensitive resin composition, it is possible to further suppress the viscosity of the film formed from the photosensitive resin composition, and further improve the insulation reliability and plating resistance of the cured product. The amount of 1,2,3,6-tetrahydrophthalic anhydride is preferably 20 mol% or more and 100 mol% or less, more preferably 40 mol, relative to the entire acid monoanhydride (a3-1). The ears are not less than 100% and not more than 100%.

酸二酐(a3-2)是具有兩個酸酐基之化合物。酸二酐(a3-2)能夠含有四羧酸之酸酐。酸二酐(a3-2),能夠含有例如選自由下述化合物所組成之群組中的至少一種:1,2,4,5-苯四羧酸二酐、二苯基酮四羧酸二酐、甲基環己烷四羧酸二酐、四羧酸二酐、萘-1,4,5,8-四羧酸二酐、伸乙基四羧酸二酐、9,9’-雙(3,4-二羧苯) 茀二酐、丙三醇雙偏苯三酸酐單乙酯(glycerine bisanhydrotrimellitate monoacetate)、乙二醇雙偏苯三酸酐、3,3’,4,4’-二苯碸四羧酸二酐、1,3,3a,4,5,9b-六氫-5(四氫-2,5-二氧-3-喃基)萘并-[1,2-c] 呋喃-1,3-二酮、1,2,3,4-丁烷四羧酸二酐及3,3’,4,4’-聯苯四羧酸二酐。尤其,酸二酐(a3-2)較佳是含有3,3’,4,4’-聯苯四羧酸二酐。亦即,較佳是式(5)和式(6)中的D包含3,3’,4,4’-聯苯四羧酸二酐殘基。此時,能夠一邊確保感光性樹脂組成物的良好的顯影性,一邊進一步抑制由感光性樹脂組成物所形成的覆膜的黏性,並進一步提升硬化物的絕緣可靠性和耐鍍覆性。相對於酸二酐(a3-2)整體,3,3’,4,4’-聯苯四羧酸二酐的量較佳是20莫耳%以上且100莫耳%以下,更佳是40莫耳%以上且100莫耳%以下,但並未限定於該範圍內。The acid dianhydride (a3-2) is a compound having two acid anhydride groups. The acid dianhydride (a3-2) can contain an acid anhydride of a tetracarboxylic acid. The acid dianhydride (a3-2) can contain, for example, at least one selected from the group consisting of 1,2,4,5-benzenetetracarboxylic dianhydride, diphenylketone tetracarboxylic acid di Anhydride, methylcyclohexanetetracarboxylic dianhydride, tetracarboxylic dianhydride, naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylene tetracarboxylic dianhydride, 9,9'-bis (3,4-Dicarboxybenzene) dianhydride, glycerine bisanhydrotrimellitate monoacetate, ethylene glycol bistrimellitic anhydride, 3,3 ', 4,4'-diphenylarsinetetracarboxylic acid di Anhydride, 1,3,3a, 4,5,9b-Hexahydro-5 (tetrahydro-2,5-diox-3-anyl) naphtho- [1,2-c] furan-1,3- Dione, 1,2,3,4-butanetetracarboxylic dianhydride and 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. In particular, the acid dianhydride (a3-2) preferably contains 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferable that D in the formulae (5) and (6) contains a 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride residue. In this case, while ensuring good developability of the photosensitive resin composition, it is possible to further suppress the viscosity of the film formed from the photosensitive resin composition, and further improve the insulation reliability and plating resistance of the cured product. The amount of 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride is preferably 20 mol% or more and 100 mol% or less with respect to the entire acid dianhydride (a3-2), more preferably 40 Molar% or more and 100 Molar% or less are not limited to this range.

為了使中間體與酸酐(a3)進行反應,可採用習知的方法。例如,將酸酐(a3)添加至中間體的溶劑溶液中,進一步依據需要加入熱聚合抑制劑和觸媒並進行攪拌來混合,藉此而獲得反應性溶液。依據通常的方法,在更佳為60℃以上且150℃以下、特佳為80℃以上且120℃以下的溫度使該反應性溶液反應,藉此便可獲得含羧基樹脂(A1)。作為溶劑、觸媒及聚合抑制劑,能夠使用適當的成分,並能夠直接使用被用於中間體的合成時的溶劑、觸媒及聚合抑制劑。In order to make the intermediate react with the acid anhydride (a3), a conventional method can be used. For example, an acid anhydride (a3) is added to a solvent solution of the intermediate, and a thermal polymerization inhibitor and a catalyst are further added and mixed as needed to obtain a reactive solution. The carboxyl group-containing resin (A1) can be obtained by reacting the reactive solution at a temperature of more preferably 60 ° C. to 150 ° C., particularly preferably 80 ° C. to 120 ° C., according to a general method. As a solvent, a catalyst, and a polymerization inhibitor, an appropriate component can be used, and the solvent, a catalyst, and a polymerization inhibitor used at the time of synthesis of an intermediate can be used directly.

觸媒尤其較佳是含有三苯膦。亦即,較佳是在三苯膦存在下使中間體與酸酐(a3)進行反應。此時,尤其可促進中間體中的二級羥基與酸酐(a3)的反應,而能夠達成90%以上、95%以上、97%以上或大致100%的反應率(轉換率)。因此,能夠以高產率獲得具有結構(S4)和結構(S5)中的至少其中一結構之含羧基樹脂(A1)。又,可抑制在包含感光性樹脂組成物的硬化物之層中發生離子遷移,而進一步提升該層的絕緣可靠性。The catalyst is particularly preferably one containing triphenylphosphine. That is, it is preferred to react the intermediate with the acid anhydride (a3) in the presence of triphenylphosphine. In this case, the reaction between the secondary hydroxyl group in the intermediate and the acid anhydride (a3) is particularly promoted, and a reaction rate (conversion rate) of 90% or more, 95% or more, 97% or more, or approximately 100% can be achieved. Therefore, the carboxyl group-containing resin (A1) having at least one of the structure (S4) and the structure (S5) can be obtained in high yield. In addition, ion migration can be suppressed in a layer containing a cured product of a photosensitive resin composition, and the insulation reliability of the layer can be further improved.

當酸酐(a3)含有酸二酐(a3-2)與酸一酐(a3-1)時,相對於環氧化合物(a1)的1莫耳的環氧基,酸二酐(a3-2)的量較佳是0.05莫耳以上且0.24莫耳以下。又,相對於環氧化合物(a1)的1莫耳的環氧基,酸一酐(a3-1)的量較佳是0.3莫耳以上且0.7莫耳以下。此時,可容易獲得酸值與分子量經適度調整的含羧基樹脂(A1)。When the acid anhydride (a3) contains the acid dianhydride (a3-2) and the acid monoanhydride (a3-1), the acid dianhydride (a3-2) is relative to 1 mole of epoxy group of the epoxy compound (a1). The amount is preferably 0.05 mol or more and 0.24 mol or less. The amount of the acid monoanhydride (a3-1) is preferably 0.3 mol or more and 0.7 mol or less with respect to 1 mol of epoxy group of the epoxy compound (a1). In this case, a carboxyl group-containing resin (A1) whose acid value and molecular weight are appropriately adjusted can be easily obtained.

較佳是在空氣起泡下使中間體與酸酐(a3)進行反應。此時,可抑制所產生的含羧基樹脂(A1)分子量過度地變大,藉此尤其能夠提升感光性樹脂組成物藉由鹼性水溶液所產生的顯影性。The intermediate is preferably reacted with the acid anhydride (a3) under air bubbling. In this case, it is possible to suppress the molecular weight of the carboxyl group-containing resin (A1) generated from becoming excessively large, thereby improving the developability of the photosensitive resin composition by an alkaline aqueous solution.

含羧基樹脂(A),可以僅含有含羧基樹脂(A1)或僅含有含羧基樹脂(A1)以外的含羧基樹脂,亦可以含有含羧基樹脂(A1)與含羧基樹脂(A1)以外的含羧基樹脂。含羧基樹脂(A1)以外的含羧基樹脂,包含不具有雙酚茀骨架之含羧基樹脂(以下,亦稱為含羧基樹脂(A2))。The carboxyl-containing resin (A) may contain only the carboxyl-containing resin (A1) or only a carboxyl-containing resin other than the carboxyl-containing resin (A1), or may contain a carboxyl-containing resin (A1) and a carboxyl-containing resin other than the Carboxy resin. The carboxyl group resin other than the carboxyl group resin (A1) includes a carboxyl group resin (hereinafter, also referred to as a carboxyl group resin (A2)) having no bisphenol fluorene skeleton.

含羧基樹脂(A2),例如能夠含有具有羧基但不具有光聚合性之化合物(以下,亦稱為(A2-1)成分)。(A2-1)成分,例如含有乙烯性不飽和單體之聚合物,該乙烯性不飽和單體包含具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,能夠含有丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯等的化合物。具有羧基之乙烯性不飽和化合物,亦能夠含有季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等與二元酸酐之反應物。乙烯性不飽和單體,可以進一步包含不具有羧基之乙烯性不飽和單體,該不具有羧基之乙烯性不飽和單體是鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或分枝的脂肪族或脂環族(其中,環中可部分地具有不飽和鍵)的(甲基)丙烯酸酯等。The carboxyl group-containing resin (A2) can contain, for example, a compound (hereinafter, also referred to as (A2-1) component) having a carboxyl group but having no photopolymerizable property. (A2-1) A component is, for example, a polymer containing an ethylenically unsaturated monomer containing an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated compound having a carboxyl group can contain compounds such as acrylic acid, methacrylic acid, ω-carboxyl-polycaprolactone (n ≒ 2) monoacrylate, and the like. The ethylenically unsaturated compound having a carboxyl group can also contain a reactant of pentaerythritol triacrylate, pentaerythritol trimethacrylate, and the like with a dibasic acid anhydride. The ethylenically unsaturated monomer may further include an ethylenically unsaturated monomer having no carboxyl group. The ethylenically unsaturated monomer having no carboxyl group is 2- (meth) acryloxyethyl phthalate, 2- (meth) acryloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or cycloaliphatic (wherein the ring may have partially unsaturated bonds) ( (Meth) acrylates and the like.

含羧基樹脂(A2),亦可以含有具有羧基和乙烯性不飽和基之化合物(以下,亦稱為(A2-2)成分)。又,含羧基樹脂(A2)亦可以僅含有(A2-2)成分。(A2-2)成分,例如含有一種樹脂(稱為第一樹脂(x)),該樹脂是環氧化合物(x1)與乙烯性不飽和化合物(x2)之反應物也就是中間體、與選自由多元羧酸及其酸酐的群組中的至少一種化合物(x3)之反應物,該環氧化合物(x1)在一分子中含有具有2個以上的環氧基。第一樹脂(x),例如可以使化合物(x3)加成在中間體來獲得,該中間體是使環氧化合物(x1)中的環氧基與乙烯性不飽和化合物(x2)中的羧基進行反應所獲得。環氧化合物(x1)能夠含有甲酚酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、聯苯酚醛清漆型環氧樹脂等的適當的環氧樹脂。尤其,環氧化合物(x1)較佳是含有選自由聯苯酚醛清漆型環氧樹脂化合物、甲酚酚醛清漆型環氧化合物的群組中的至少1種化合物。環氧化合物(x1)可以僅含有聯苯酚醛清漆型化合物、或亦可以僅含有甲酚酚醛清漆型環氧化合物。此時,因為環氧化合物(x1)的主鏈上包含有芳香環,所以感光性樹脂組成物的硬化物,例如能夠降低由於含有過錳酸鉀等之氧化劑所造成的顯著地被腐蝕的程度。環氧化合物(x1)可以含有乙烯性不飽和化合物(z)的聚合物。乙烯性不飽和化合物(z)例如含有(甲基)丙烯酸縮水甘油酯等的具有環氧基之化合物(z1)、或進一步含有鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯等不具有環氧基之化合物(z2)。乙烯性不飽和化合物(x2)較佳是含有丙烯酸和甲基丙烯酸之中的至少一種。化合物(x3)含有例如:選自由多元羧酸及該等多元羧酸的酐所組成之群組中的一種以上的化合物,該多元羧酸為鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸等。尤其,化合物(x3)較佳是含有選自鄰苯二甲酸、四氫鄰苯二甲酸、甲基四氫鄰苯二甲酸的群組中的至少1種多元羧酸。The carboxyl group-containing resin (A2) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter, also referred to as (A2-2) component). The carboxyl group-containing resin (A2) may contain only the (A2-2) component. The component (A2-2) contains, for example, a resin (referred to as a first resin (x)), which is a reactant of an epoxy compound (x1) and an ethylenically unsaturated compound (x2), that is, an intermediate, and A reactant of at least one compound (x3) in the group of free polycarboxylic acids and their anhydrides, and the epoxy compound (x1) contains two or more epoxy groups in one molecule. The first resin (x) can be obtained, for example, by adding compound (x3) to an intermediate which is an epoxy group in epoxy compound (x1) and a carboxyl group in ethylenically unsaturated compound (x2). Obtained by carrying out the reaction. The epoxy compound (x1) can contain appropriate epoxy resins, such as a cresol novolak-type epoxy resin, a phenol novolak-type epoxy resin, and a biphenol novolak-type epoxy resin. In particular, the epoxy compound (x1) preferably contains at least one compound selected from the group consisting of a biphenol novolac epoxy compound and a cresol novolac epoxy compound. The epoxy compound (x1) may contain only a biphenol novolak-type compound, or may contain only a cresol novolak-type epoxy compound. At this time, since the main chain of the epoxy compound (x1) contains an aromatic ring, the cured product of the photosensitive resin composition can reduce, for example, a significant degree of corrosion caused by an oxidant such as potassium permanganate. . The epoxy compound (x1) may contain a polymer of an ethylenically unsaturated compound (z). The ethylenically unsaturated compound (z) contains, for example, a compound having an epoxy group (z1) such as glycidyl (meth) acrylate, or further contains 2- (meth) acryloxyethyl phthalate, and the like Compound (z2) having no epoxy group. The ethylenically unsaturated compound (x2) preferably contains at least one of acrylic acid and methacrylic acid. The compound (x3) contains, for example, one or more compounds selected from the group consisting of polycarboxylic acids and anhydrides of the polycarboxylic acids, and the polycarboxylic acids are phthalic acid, tetrahydrophthalic acid, and formic acid. Tetrahydrophthalic acid and the like. In particular, the compound (x3) preferably contains at least one polycarboxylic acid selected from the group consisting of phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid.

(A2-2)成分亦可以含有樹脂(稱為第二樹脂(y)),該樹脂是乙烯性不飽和單體的聚合物與具有環氧基之乙烯性不飽和化合物之反應物,該乙烯性不飽和單體含有具有羧基之乙烯性不飽和化合物。乙烯性不飽和單體可以進一步含有不具有羧基之乙烯性不飽和化合物。第二樹脂(y),是藉由使具有環氧基之乙烯性不飽和化合物在聚合物中的一部分的羧基上進行反應而得。乙烯性不飽和單體可以進一步含有不具有羧基之乙烯性不飽和化合物。具有羧基之乙烯性不飽和化合物,含有例如丙烯酸、甲基丙烯酸、ω-羧基-聚己內酯(n≒2)單丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇三甲基丙烯酸酯等的化合物。不具有羧基之乙烯性不飽和化合物,含有例如鄰苯二甲酸2-(甲基)丙烯醯氧基乙酯、鄰苯二甲酸2-(甲基)丙烯醯氧基乙基-2-羥乙酯、直鏈或分枝的脂肪族或脂環族(其中,環中可部分地具有不飽和鍵)的(甲基)丙烯酸酯等化合物。具有環氧基之乙烯性不飽和化合物,較佳是含有(甲基)丙烯酸縮水甘油酯。The component (A2-2) may also contain a resin (referred to as a second resin (y)), which is a reaction product of a polymer of an ethylenically unsaturated monomer and an ethylenically unsaturated compound having an epoxy group. The unsaturated unsaturated monomer contains an ethylenically unsaturated compound having a carboxyl group. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The second resin (y) is obtained by reacting an ethylenically unsaturated compound having an epoxy group on a part of a carboxyl group in a polymer. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The ethylenically unsaturated compound having a carboxyl group includes compounds such as acrylic acid, methacrylic acid, ω-carboxyl-polycaprolactone (n ≒ 2) monoacrylate, pentaerythritol triacrylate, pentaerythritol trimethacrylate, and the like. An ethylenically unsaturated compound having no carboxyl group, and contains, for example, 2- (meth) acryloxyethyl phthalate, 2- (meth) acryloxyethyl-2-hydroxyethyl phthalate Compounds such as esters, linear or branched aliphatic or alicyclic (wherein the ring may have unsaturated bonds in part), and the like. The ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth) acrylate.

含羧基樹脂(A),可以僅含有含羧基樹脂(A1),可以僅含有含羧基樹脂(A2)、或含有含羧基樹脂(A1)與含羧基樹脂(A2)。含羧基樹脂(A)較佳是含有30質量%以上的含羧基樹脂(A1),更佳是含有50質量%以上,進一步較佳是含有60質量%以上,更進一步較佳是含有100質量%。此時,尤其能夠使感光性樹脂組成物的硬化物的耐熱性和絕緣可靠性提升。又,能夠充分地降低由感光性樹脂組成物所形成的覆膜的黏性。進一步,能夠確保感光性樹脂組成物藉由鹼性水溶液所產生的顯影性。The carboxyl-containing resin (A) may contain only the carboxyl-containing resin (A1), may contain only the carboxyl-containing resin (A2), or may contain the carboxyl-containing resin (A1) and the carboxyl-containing resin (A2). The carboxyl-containing resin (A) preferably contains 30% by mass or more of the carboxyl-containing resin (A1), more preferably contains 50% by mass or more, still more preferably contains 60% by mass or more, and still more preferably contains 100% by mass . In this case, in particular, the heat resistance and insulation reliability of the cured product of the photosensitive resin composition can be improved. In addition, it is possible to sufficiently reduce the viscosity of a film formed of a photosensitive resin composition. Furthermore, the developability of the photosensitive resin composition with an alkaline aqueous solution can be secured.

不飽和化合物(B)能夠賦予感光性樹脂組成物光硬化性。不飽和化合物(B)能夠含有例如選自由單官能(甲基)丙烯酸酯及多官能(甲基)丙烯酸酯所組成之群組中的至少一種化合物,該單官能(甲基)丙烯酸酯是(甲基)丙烯酸2-羥乙酯等,該多官能(甲基)丙烯酸酯是二乙二醇二(甲基)丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、ε-己內酯改質二季戊四醇六丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯等。The unsaturated compound (B) can impart photocurability to the photosensitive resin composition. The unsaturated compound (B) can contain, for example, at least one compound selected from the group consisting of a monofunctional (meth) acrylate and a polyfunctional (meth) acrylate, and the monofunctional (meth) acrylate is ( 2-hydroxyethyl meth) acrylate and the like, and the multifunctional (meth) acrylates are diethylene glycol di (meth) acrylate, trimethylolpropane di (meth) acrylate, and trimethylol Propane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ε-hexane Lactone modified dipentaerythritol hexaacrylate, tricyclodecane dimethanol di (meth) acrylate, etc.

尤其,不飽和化合物(B)較佳是含有三官能化合物,也就是在一分子中具有3個不飽和鍵之化合物。此時,可提升將由感光性樹脂組成物所形成的覆膜進行曝光及顯影時的解析性,並且尤其可提升感光性樹脂組成物藉由鹼性水溶液所產生的顯影性。三官能化合物,能夠含有例如選自由下述化合物所組成之群組中的至少一種:三羥甲基丙烷三(甲基)丙烯酸酯、EO改質三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、乙氧化異三聚氰酸三(甲基)丙烯酸酯及ε-己內酯改質參-(2-丙烯氧基乙基) 三聚異氰酸酯及三(甲基)丙烯酸乙氧化縮水甘油酯。In particular, the unsaturated compound (B) is preferably a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule. In this case, it is possible to improve the resolution when the film formed of the photosensitive resin composition is exposed and developed, and in particular, the developability of the photosensitive resin composition by an alkaline aqueous solution can be improved. The trifunctional compound can contain, for example, at least one selected from the group consisting of trimethylolpropane tri (meth) acrylate, EO modified trimethylolpropane tri (meth) acrylate , Pentaerythritol tri (meth) acrylate, ethoxylated isotricyanate tri (meth) acrylate, and ε-caprolactone modification parameters- (2-propenyloxyethyl) trimeric isocyanate and tris (methyl Based) ethoxylated glycidyl acrylate.

不飽和化合物(B)較佳是含有含磷化合物(含磷不飽和化合物)。此時,可提升感光性樹脂組成物的硬化物的難燃性。含磷不飽和化合物能夠含有例如選自由以下成分所組成之群組中的至少一種:酸式磷酸2-甲基丙烯醯氧基乙酯(作為具體例是共榮社化學股份有限公司製的型號LIGHT ESTER P-1M、及LIGHT ESTER P-2M)、酸式磷酸2-丙烯醯氧基乙酯(作為具體例是共榮社化學股份有限公司製的型號LIGHT ACRYLATE P-1A)、磷酸二苯基-2-甲基丙烯醯氧基乙酯(作為具體例是大八工業股份有限公司製的型號MR-260)、以及昭和高分子股份有限公司製的HFA系列(作為具體例是二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物亦即型號HFA-6003及HFA-6007;己內酯改質二季戊四醇六丙烯酸酯與HCA(9,10-二氫-9-氧雜-10-磷雜菲-10-氧化物)的加成反應物亦即型號HFA-3003及HFA-6127等)。The unsaturated compound (B) preferably contains a phosphorus-containing compound (phosphorus-containing unsaturated compound). In this case, the flame retardancy of the hardened | cured material of the photosensitive resin composition can be improved. The phosphorus-containing unsaturated compound can contain, for example, at least one selected from the group consisting of 2-methacrylic acid oxyethyl phosphate (a specific example is a model manufactured by Kyoeisha Chemical Co., Ltd. LIGHT ESTER P-1M and LIGHT ESTER P-2M), 2-acrylic acid oxyethyl phosphate (specific examples are LIGHT ACRYLATE P-1A manufactured by Kyoeisha Chemical Co., Ltd.), diphenyl phosphate 2-Methacryl-2-methoxyethyl ester (specific example is model MR-260 manufactured by Daiba Industrial Co., Ltd.), and HFA series manufactured by Showa Polymer Co., Ltd. (specific example is dipentaerythritol six Addition reactants of acrylate with HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide), namely models HFA-6003 and HFA-6007; caprolactone modified two Addition reactants of pentaerythritol hexaacrylate with HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) are types HFA-3003 and HFA-6127, etc.).

不飽和化合物(B)亦可以含有預聚物。預聚物能夠含有例如:使具有乙烯性不飽和鍵之單體進行聚合後再將乙烯性不飽和基進行加成而得的預聚物;及,由寡聚(甲基)丙烯酸酯預聚物類所組成之群組中的至少一種化合物。寡聚(甲基)丙烯酸酯預聚物類,能夠含有例如選自由下述成分所組成之群組中的至少一種:環氧(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、胺酯(urethane)(甲基)丙烯酸酯、醇酸(alkyd)樹脂(甲基)丙烯酸酯、矽氧樹脂(甲基)丙烯酸酯、及螺烷烴(spirane)樹脂(甲基)丙烯酸酯。The unsaturated compound (B) may contain a prepolymer. The prepolymer can contain, for example, a prepolymer obtained by polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group; and prepolymerizing with an oligo (meth) acrylate At least one compound in a group of species. The oligo (meth) acrylate prepolymers can contain, for example, at least one selected from the group consisting of epoxy (meth) acrylate, polyester (meth) acrylate, and amine. Urethane (meth) acrylate, alkyd resin (meth) acrylate, silicone resin (meth) acrylate, and spirane resin (meth) acrylate.

光聚合起始劑(C),含有例如醯基氧化膦系光聚合起始劑(C1)。亦即,感光性樹脂組成物含有例如醯基氧化膦系光聚合起始劑(C1)。此時,當利用紫外線對感光性樹脂組成物進行曝光時能夠對感光性樹脂組成物賦予高感光性。此外,能夠在包含感光性樹脂組成物的硬化物之層中抑制離子遷移的發生,而更加提升該層的絕緣可靠性。The photopolymerization initiator (C) contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). That is, the photosensitive resin composition contains, for example, a fluorenylphosphine oxide-based photopolymerization initiator (C1). In this case, when the photosensitive resin composition is exposed by ultraviolet rays, high sensitivity can be imparted to the photosensitive resin composition. In addition, it is possible to suppress the occurrence of ion migration in the layer containing the cured product of the photosensitive resin composition, and to further improve the insulation reliability of the layer.

又,醯基氧化膦系光聚合起始劑(C1)不易妨礙硬化物的電氣絕緣性。因此,藉由將感光性樹脂組成物進行曝光來硬化,便可獲得電絕緣性優異的硬化物,並且該硬化物例如適合作成阻焊劑層、鍍抗蝕層、抗蝕劑層、層間絕緣層。The fluorenylphosphine oxide-based photopolymerization initiator (C1) does not easily interfere with the electrical insulation of the cured product. Therefore, by exposing and curing the photosensitive resin composition, a cured product having excellent electrical insulation properties can be obtained. The cured product is suitable for use as, for example, a solder resist layer, a plating resist, a resist layer, and an interlayer insulating layer. .

醯基氧化膦系光聚合起始劑(C1),能夠含有例如選自由下述成分所組成之群組中的至少一種:2,4,6-三甲基苯甲醯基二苯基氧化膦、2,4,6-三甲基苯甲醯基乙基苯基次膦酸酯等單醯基氧化膦系光聚合起始劑;以及,雙(2,6-二氯苯甲醯基)苯基氧化膦、雙(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙(2,6-二氯苯甲醯基)-1-萘基氧化膦、雙(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙(2,4,6-三甲基苯甲醯基)苯基氧化膦、(2,5,6-三甲基苯甲醯基)-2,4,4-三甲基戊基氧化膦等的雙醯基氧化膦系光聚合起始劑。尤其,醯基氧化膦系光聚合起始劑(C1)較佳是含有2,4,6-三甲基苯甲醯基二苯基氧化膦,且醯基氧化膦系光聚合起始劑(C1)僅包含2,4,6-三甲基苯甲醯基二苯基氧化膦亦較佳。The fluorenylphosphine oxide-based photopolymerization initiator (C1) can contain, for example, at least one selected from the group consisting of 2,4,6-trimethylbenzylfluorenyldiphenylphosphine oxide Monofluorenylphosphine oxide-based photopolymerization initiators such as 2,4,6-trimethylbenzylideneethylphenylphosphinate, and bis (2,6-dichlorobenzylidene) Phenylphosphine oxide, bis (2,6-dichlorobenzyl) -2,5-dimethylphenylphosphine oxide, bis (2,6-dichlorobenzyl) -4-propylbenzene Phosphine oxide, bis (2,6-dichlorobenzylidene) -1-naphthylphosphine oxide, bis (2,6-dimethoxybenzylidene) phenylphosphine oxide, bis (2,6 -Dimethoxybenzyl) -2,4,4-trimethylpentylphosphine oxide, bis (2,6-dimethoxybenzyl) -2,5-dimethylphenyl Phosphine oxide, bis (2,4,6-trimethylbenzyl) phenylphosphine oxide, (2,5,6-trimethylbenzyl) -2,4,4-trimethylpentane Difluorinyl phosphine oxide-based photopolymerization initiators such as phosphine oxide. In particular, the fluorenylphosphine oxide-based photopolymerization initiator (C1) preferably contains 2,4,6-trimethylbenzylfluorenyldiphenylphosphine oxide, and the fluorenylphosphine oxide-based photopolymerization initiator ( C1) It is also preferred that it contains only 2,4,6-trimethylbenzylidene diphenylphosphine oxide.

光聚合起始劑(C),較佳是除了醯基氧化膦系光聚合起始劑(C1)以外,也含有羥基酮系光聚合起始劑(C2)。亦即,感光性樹脂組成物較佳是含有羥基酮系光聚合起始劑(C2)。此時,相較於不含羥基酮系光聚合起始劑(C2)的情形,能夠對感光性樹脂組成物賦予更高的感光性。藉此,當對由感光性樹脂組成物所形成的塗膜照射紫外線來進行硬化時,能夠使塗膜自其表面至深部皆充分地硬化。作為羥基酮系光聚合起始劑(C2),可列舉例如:1-羥基環己基苯基酮、苯乙醛酸甲酯、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基丙醯基)苯甲基]苯基}-2-甲基丙-1-酮、及2-羥基-2-甲基-1-苯基丙-1-酮。The photopolymerization initiator (C) preferably contains a hydroxyketone-based photopolymerization initiator (C2) in addition to the fluorenylphosphine oxide-based photopolymerization initiator (C1). That is, the photosensitive resin composition preferably contains a hydroxyketone-based photopolymerization initiator (C2). In this case, it is possible to impart higher sensitivity to the photosensitive resin composition than in the case where the hydroxyketone-based photopolymerization initiator (C2) is not contained. Accordingly, when the coating film formed of the photosensitive resin composition is irradiated with ultraviolet rays to be cured, the coating film can be sufficiently cured from the surface to the deep part. Examples of the hydroxyketone-based photopolymerization initiator (C2) include 1-hydroxycyclohexylphenyl ketone, methyl phenylglyoxylate, and 1- [4- (2-hydroxyethoxy) phenyl]- 2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1- {4- [4- (4- (2-hydroxy-2-methylpropanyl) benzyl] phenyl}- 2-methylpropan-1-one and 2-hydroxy-2-methyl-1-phenylpropan-1-one.

醯基氧化膦系光聚合起始劑(C1)與羥基酮系光聚合起始劑(C2)的質量比,較佳是在1:0.01~1:10的範圍內。此時,能夠平衡性良好地提升由感光性樹脂組成物所形成的塗膜的表面附近的硬化性及深部的硬化性。此處,由於感光性樹脂組成物含有有機填料(E),有機填料(E)在曝光時有時會在感光性樹脂組成物內造成光散射。此時,可能會產生無法藉由感光性樹脂組成物獲得良好的顯影性的問題。從這樣的觀點來看,為了獲得使解析性提升而顯影性良好的感光性樹脂組成物,醯基氧化膦系光聚合起始劑(C1)與羥基酮系光聚合起始劑(C2)的質量比,特佳是在1:0.01~1:1的範圍內。The mass ratio of the fluorenyl phosphine oxide-based photopolymerization initiator (C1) to the hydroxyketone-based photopolymerization initiator (C2) is preferably in the range of 1: 0.01 to 1:10. In this case, the hardenability in the vicinity of the surface and the hardenability in the deep portion of the coating film formed of the photosensitive resin composition can be improved in a well-balanced manner. Here, since the photosensitive resin composition contains an organic filler (E), the organic filler (E) may cause light scattering in the photosensitive resin composition during exposure. In this case, there may be a problem that good developability cannot be obtained with the photosensitive resin composition. From such a viewpoint, in order to obtain a photosensitive resin composition that improves the resolution and has good developability, the fluorenyl phosphine oxide-based photopolymerization initiator (C1) and the hydroxyketone-based photopolymerization initiator (C2) The quality ratio is particularly preferably in the range of 1: 0.01 to 1: 1.

光聚合起始劑(C)較佳是含有具有二苯基酮骨架之光聚合起始劑(C3)。亦即,感光性樹脂組成物較佳是含有醯基氧化膦系光聚合起始劑(C1)及具有二苯基酮骨架之光聚合起始劑(C3)、或是含有醯基氧化膦系光聚合起始劑(C1)、羥基酮系光聚合起始劑(C2)及具有二苯基酮骨架之光聚合起始劑(C3)。此時,對由感光性樹脂組成物所形成的塗膜的部分地進行曝光再進行顯影時,因為可抑制未曝光的部分的硬化,解析性會變得特別高。因此,能夠在感光性樹脂組成物的硬化物形成非常微細的圖案。尤其,當從感光性樹脂組成物製作多層印刷線路板的層間絕緣層並且以光微影法來於此層間絕緣層中設置用於貫穿孔的直徑小的孔時(參照第1圖),能夠精密且容易地形成直徑小的孔。具有二苯基酮骨架之光聚合起始劑(C3)可列舉例如雙(二乙胺基)二苯基酮。The photopolymerization initiator (C) preferably contains a photopolymerization initiator (C3) having a diphenylketone skeleton. That is, the photosensitive resin composition preferably contains a fluorenylphosphine oxide-based photopolymerization initiator (C1) and a photopolymerization initiator (C3) having a diphenylketone skeleton, or contains a fluorenylphosphine oxide-based system. A photopolymerization initiator (C1), a hydroxyketone-based photopolymerization initiator (C2), and a photopolymerization initiator (C3) having a diphenylketone skeleton. At this time, when a part of the coating film formed of the photosensitive resin composition is exposed and then developed, since the hardening of the unexposed part can be suppressed, the resolution becomes particularly high. Therefore, a very fine pattern can be formed on the cured product of the photosensitive resin composition. In particular, when an interlayer insulating layer of a multilayer printed wiring board is produced from a photosensitive resin composition, and a photolithography method is used to provide a small-diameter hole for the through-hole in the interlayer insulating layer (see FIG. 1), Precisely and easily form a small diameter hole. Examples of the photopolymerization initiator (C3) having a diphenylketone skeleton include bis (diethylamino) diphenylketone.

相對於醯基氧化膦系光聚合起始劑(C1),具有二苯基酮骨架之光聚合起始劑(C3)的量較佳是0.5質量以上且20質量%以下。若相對於醯基氧化膦系光聚合起始劑(C1),具有二苯基酮骨架之光聚合起始劑(C3)的量是0.5質量%以上,顯影性會變得特別高。又,若相對於醯基氧化膦系光聚合起始劑(C1),具有二苯基酮骨架之光聚合起始劑(C3)的量是20質量%以下,具有二苯基酮骨架之光聚合起始劑(C3)不易妨礙感光性樹脂組成物的硬化物的電絕緣性。從同樣的觀點來看,相對於醯基氧化膦系光聚合起始劑(C1),雙(二乙胺基)二苯基酮的量較佳是0.5質量%以上且20質量%以下。此處,由於感光性樹脂組成物含有有機填料(E),有機填料(E)在曝光時有時會在感光性樹脂組成物內造成光散射。此時,可能會產生無法藉由感光性樹脂組成物獲得良好的顯影性的問題。從這樣的觀點來看,為了獲得解析性良好的感光性樹脂組成物,相對於醯基氧化膦系光聚合起始劑(C1),具有二苯基酮骨架之光聚合起始劑(C3)的量特佳是在1質量%以上且18質量%以下。從同樣的觀點來看,相對於醯基氧化膦系光聚合起始劑(C1),雙(二乙胺基)二苯基酮的量特佳是在1質量%以上且18質量%以下。The amount of the photopolymerization initiator (C3) having a diphenylketone skeleton relative to the fluorenylphosphine oxide-based photopolymerization initiator (C1) is preferably 0.5 mass or more and 20 mass% or less. When the amount of the photopolymerization initiator (C3) having a diphenylketone skeleton is 0.5% by mass or more with respect to the fluorenylphosphine oxide-based photopolymerization initiator (C1), the developability is particularly high. When the amount of the photopolymerization initiator (C3) having a diphenylketone skeleton is 20% by mass or less with respect to the fluorenylphosphine oxide-based photopolymerization initiator (C1), the light having a diphenylketone skeleton The polymerization initiator (C3) does not easily interfere with the electrical insulation of the cured product of the photosensitive resin composition. From the same viewpoint, the amount of bis (diethylamino) diphenyl ketone is preferably 0.5% by mass or more and 20% by mass or less based on the fluorenylphosphine oxide-based photopolymerization initiator (C1). Here, since the photosensitive resin composition contains an organic filler (E), the organic filler (E) may cause light scattering in the photosensitive resin composition during exposure. In this case, there may be a problem that good developability cannot be obtained with the photosensitive resin composition. From such a viewpoint, in order to obtain a photosensitive resin composition having good resolution, the photopolymerization initiator (C3) having a diphenylketone skeleton is used in comparison with the fluorenylphosphine oxide-based photopolymerization initiator (C1). The amount is particularly preferably 1 mass% or more and 18 mass% or less. From the same viewpoint, the amount of bis (diethylamino) diphenyl ketone is particularly preferably 1% by mass or more and 18% by mass or less based on the fluorenylphosphine oxide-based photopolymerization initiator (C1).

感光性樹脂組成物,可以進一步含有習知的光聚合促進劑、敏化劑等。例如,感光性樹脂組成物能夠含有選自由下述成分所組成之群組中的至少一種:1,2-辛二酮1-[4-(苯硫)-2-(O-苯甲醯肟)]、乙酮1[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-1-(O-乙醯肟)等的肟酯類;安息香及其烷基醚類;苯乙酮、二苯乙二酮二甲基縮酮等的苯乙酮類;2-甲基蒽醌等的蒽醌類;2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二異丙基噻噸酮等的噻噸酮(thioxanthone)類;二苯基酮、4-苯甲醯基-4’-甲基二苯基硫醚等的二苯基酮類;2,4-二異丙基呫噸酮等的呫噸酮(xanthone)類;以及,2-羥基-2-甲基-1-苯基丙-1-酮等的α-羥基酮類;2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基-1-丙酮等的含氮原子之化合物。感光性樹脂組成物可含有:光聚合起始劑(C);以及,對二甲基苯甲酸乙酯、對二甲胺基苯甲酸異戊酯、2-二甲胺基乙基苯甲酸酯等的三級胺系等的習知的光聚合促進劑和敏化劑等。感光性樹脂組成物,可依據需要來含有用於可見光曝光的光聚合起始劑及用於近紅外線曝光的光聚合起始劑之中的至少一種。感光性樹脂組成物可含有:光聚合起始劑(C);以及,雷射曝光法用敏化劑亦即7-二乙胺基-4-甲基香豆素等的香豆素衍生物、羰花青(carbocyanine)色素系、呫噸色素系等。The photosensitive resin composition may further contain a conventional photopolymerization accelerator, a sensitizer, and the like. For example, the photosensitive resin composition can contain at least one selected from the group consisting of 1,2-octanedione 1- [4- (phenylthio) -2- (O-benzidine oxime) )], Ethyl ketone 1 [9-ethyl-6- (2-methylbenzyl) -9H-carbazol-3-yl] -1- (O-acetimoxime) and other oxime esters; Benzoin and its alkyl ethers; acetophenones such as acetophenone, diacetophenone dimethyl ketal; anthraquinones such as 2-methylanthraquinone; 2,4-dimethylthioxanthone Ketones, 2,4-diethylthioxanthone, 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diisopropylthioxanthone, and other thioxanthone Class; diphenyl ketones, such as diphenyl ketone, 4-benzyl-4'-methyldiphenyl sulfide; xanthone such as 2,4-diisopropyl xanthone ); And α-hydroxy ketones such as 2-hydroxy-2-methyl-1-phenylpropan-1-one; 2-methyl-1- [4- (methylthio) phenyl]- A nitrogen atom-containing compound such as 2-morpholinyl-1-acetone. The photosensitive resin composition may contain: a photopolymerization initiator (C); and ethyl p-dimethylbenzoate, iso-amyl p-dimethylaminobenzoate, and 2-dimethylaminoethylbenzoic acid. Conventional photopolymerization accelerators and sensitizers such as tertiary amines such as esters. The photosensitive resin composition may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near-infrared light exposure as needed. The photosensitive resin composition may contain: a photopolymerization initiator (C); and a coumarin derivative such as 7-diethylamino-4-methylcoumarin, which is a sensitizer for a laser exposure method. , Carbocyanine pigments, xanthene pigments, etc.

環氧化合物(D)能夠對感光性樹脂組成物賦予熱硬化性。環氧化合物(D)較佳是含有結晶性環氧樹脂(D1)。此時,能夠使感光性樹脂組成物的顯影性提升。進一步,因為有機填料(E1)具有羧基,所以利用有機填料(E1)可使結晶性環氧樹脂(D1)的相溶性提升,而能夠防止感光性樹脂組成物中的結晶性環氧樹脂(D1)的再結晶化。又,環氧化合物(D)可進一步含有非晶性環氧樹脂(D2)。此處,「結晶性環氧樹脂」是具有熔點的環氧樹脂,「非晶性環氧樹脂」是不具熔點的環氧樹脂。The epoxy compound (D) can impart thermosetting properties to the photosensitive resin composition. The epoxy compound (D) preferably contains a crystalline epoxy resin (D1). In this case, the developability of the photosensitive resin composition can be improved. Furthermore, since the organic filler (E1) has a carboxyl group, the compatibility of the crystalline epoxy resin (D1) can be improved by using the organic filler (E1), and the crystalline epoxy resin (D1) in the photosensitive resin composition can be prevented. ). The epoxy compound (D) may further contain an amorphous epoxy resin (D2). Here, the "crystalline epoxy resin" is an epoxy resin having a melting point, and the "amorphous epoxy resin" is an epoxy resin having no melting point.

結晶性環氧樹脂(D1),較佳是含有例如選自由下述成分所組成之群組中選出的一種以上:1,3,5-參(2,3-環氧基丙基)-1,3,5-三氮雜苯-2,4,6(1H,3H,5H)-三酮、氫醌型結晶性環氧樹脂(作為具體例是新日鐵住金化學股份有限公司製的商品名YDC-1312)、聯苯型結晶性環氧樹脂(作為具體例是三菱化學股份有限公司製的商品名YX-4000)、二苯基醚型結晶性環氧樹脂(作為具體例是新日鐵住金化學股份有限公司製的型號YSLV-80DE)、雙酚型結晶性環氧樹脂(作為具體例是新日鐵住金化學股份有限公司製的商品名YSLV-80XY)、肆酚乙烷型結晶性環氧樹脂(作為具體例是日本化藥股份有限公司製的型號GTR-1800)、雙酚茀型結晶性環氧樹脂(作為具體例是具有結構(S7)之環氧樹脂)。The crystalline epoxy resin (D1) preferably contains one or more selected from the group consisting of, for example: 1,3,5-ginseng (2,3-epoxypropyl) -1 , 3,5-triazabenzene-2,4,6 (1H, 3H, 5H) -trione, hydroquinone type crystalline epoxy resin (a specific example is a product made by Nippon Steel & Sumitomo Chemical Co., Ltd. Name YDC-1312), biphenyl type crystalline epoxy resin (as a specific example, a trade name of YX-4000 manufactured by Mitsubishi Chemical Corporation), diphenyl ether type crystalline epoxy resin (as a specific example, Shinichi Model YSLV-80DE manufactured by Tetsusumi Jin Chemical Co., Ltd.), bisphenol type crystalline epoxy resin (as a specific example, the product name is YSLV-80XY manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd.), and phenol ethane type A specific example is a model GTR-1800 manufactured by Nippon Kayaku Co., Ltd., and a bisphenol fluorene type crystalline epoxy resin (as a specific example, an epoxy resin having a structure (S7)).

結晶性環氧樹脂(D1),較佳是在1分子中具有2個環氧基。此時,能夠使硬化物在反覆的溫度變化中不容易產生裂縫。The crystalline epoxy resin (D1) preferably has two epoxy groups in one molecule. In this case, it is possible to make the hardened material less prone to cracks during repeated temperature changes.

結晶性環氧樹脂(D1),較佳是具有150~300 g/eq的環氧當量。該環氧當量是含有1g當量(克當量)的環氧基之結晶性環氧樹脂(D1)的g重量。結晶性環氧樹脂(D1)具有熔點。作為結晶性環氧樹脂(D1)的熔點,可列舉例如:70℃以上且180℃以下。The crystalline epoxy resin (D1) preferably has an epoxy equivalent of 150 to 300 g / eq. This epoxy equivalent is the g weight of the crystalline epoxy resin (D1) containing an epoxy group of 1 g equivalent (gram equivalent). The crystalline epoxy resin (D1) has a melting point. Examples of the melting point of the crystalline epoxy resin (D1) include 70 ° C to 180 ° C.

尤其,環氧化合物(D)較佳是含有熔點110℃以下的結晶性環氧樹脂(D1-1)。此時,尤其可提升感光性樹脂組成物藉由鹼性水溶液所產生的顯影性。熔點110℃以下的結晶性環氧樹脂(D1-1),能夠含有例如選自由下述成分所組成之群組中的至少一種:聯苯型環氧樹脂(作為具體例是三菱化學股份有限公司製造的型號YX-4000)、聯苯醚型環氧樹脂(作為具體例是新日鐵住金化學股份有限公司製造的型號YSLV-80DE)、及雙酚型環氧樹脂(作為具體例是新日鐵住金化學股份有限公司製造的型號YSLV-80XY)、雙酚茀型結晶性環氧樹脂(作為具體例是具有結構(S7)之環氧樹脂)。In particular, the epoxy compound (D) preferably contains a crystalline epoxy resin (D1-1) having a melting point of 110 ° C or lower. In this case, in particular, the developability of the photosensitive resin composition with an alkaline aqueous solution can be improved. The crystalline epoxy resin (D1-1) having a melting point of 110 ° C. or lower may contain, for example, at least one selected from the group consisting of a biphenyl epoxy resin (a specific example is Mitsubishi Chemical Corporation) Model YX-4000 manufactured), biphenyl ether type epoxy resin (model NSLV-80DE manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. as a specific example), and bisphenol type epoxy resin (Sinichi as a specific example) Model No. YSLV-80XY manufactured by Tetsusui Jin Chemical Co., Ltd.), bisphenol fluorene type crystalline epoxy resin (specifically, an epoxy resin having a structure (S7)).

非晶性環氧樹脂(D2),較佳是含有例如選自由下述成分所組成之群組中的至少一種:苯酚酚醛清漆型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON N-775)、甲酚酚醛清漆型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON N-695)、雙酚A酚醛清漆型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON N-865)、雙酚A型環氧樹脂(作為具體例是三菱化學股份有限公司製造的型號jER1001)、雙酚F型環氧樹脂(作為具體例是三菱化學股份有限公司製造的型號jER4004P)、雙酚S型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON EXA-1514)、雙酚AD型環氧樹脂、聯苯酚醛清漆型環氧樹脂(作為具體例是日本化藥股份有限公司製造的型號NC-3000)、氫化雙酚A型環氧樹脂(作為具體例是新日鐵住金化學股份有限公司製造的型號ST-4000D)、萘型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON HP-4032、EPICLON HP-4700、EPICLON HP-4770)、三級丁基兒茶酚型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON HP-820)、雙環戊二烯型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON HP-7200)、金剛烷型環氧樹脂(作為具體例是出光興產股份有限公司製造的型號ADAMANTATE X-E-201)、特殊二官能型環氧樹脂(作為具體例是三菱化學股份有限公司製造的型號YL7175-500及YL7175-1000;DIC股份有限公司製造的型號EPICLON TSR-960、EPICLON TER-601、EPICLON TSR-250-80BX、EPICLON 1650-75MPX、EPICLON EXA-4850、EPICLON EXA-4816、EPICLON EXA-4822、及EPICLON EXA-9726;新日鐵住金化學股份有限公司製造的型號YSLV-120TE)、橡膠狀核殼聚合物改質雙酚A型環氧樹脂(作為具體例是KANEKA股份有限公司製造的型號MX-156)、橡膠狀核殼聚合物改質雙酚F型環氧樹脂(作為具體例是KANEKA股份有限公司製造的型號MX-136)及含橡膠粒子之雙酚F型環氧樹脂(作為具體例是KANEKA股份有限公司製造的型號MX-130)。The amorphous epoxy resin (D2) preferably contains, for example, at least one selected from the group consisting of a phenol novolac epoxy resin (a specific example is the model EPICLON manufactured by DIC Corporation) N-775), cresol novolac epoxy resin (as a specific example, model EPICLON N-695 manufactured by DIC Corporation), bisphenol A novolac epoxy resin (as a specific example, manufactured by DIC Corporation) Model EPICLON N-865), bisphenol A type epoxy resin (as a specific example, model jER1001 manufactured by Mitsubishi Chemical Corporation), bisphenol F type epoxy resin (as a specific example, manufactured by Mitsubishi Chemical Corporation) Model jER4004P), bisphenol S-type epoxy resin (model EPICLON EXA-1514 manufactured by DIC Corporation as a specific example), bisphenol AD-type epoxy resin, biphenol novolac-type epoxy resin (specific examples are Model NC-3000 manufactured by Nippon Kayaku Co., Ltd.), hydrogenated bisphenol A type epoxy resin (as a specific example, model ST-4000D manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), naphthalene type epoxy resin (as Specific examples Models EPICLON HP-4032, EPICLON HP-4700, EPICLON HP-4770 manufactured by DIC Co., Ltd., and tertiary butyl catechol type epoxy resin (specific examples are model EPICLON HP-820 manufactured by DIC Co., Ltd. ), Dicyclopentadiene type epoxy resin (as a specific example, the model EPICLON HP-7200 manufactured by DIC Corporation), adamantane type epoxy resin (as a specific example, a model ADAMANTATE XE manufactured by Idemitsu Kosan Co., Ltd. -201), special bifunctional epoxy resin (as specific examples are models YL7175-500 and YL7175-1000 manufactured by Mitsubishi Chemical Corporation; models EPICLON TSR-960, EPICLON TER-601, EPICLON manufactured by DIC Corporation) TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA-4850, EPICLON EXA-4816, EPICLON EXA-4822, and EPICLON EXA-9726; Nippon Steel & Sumikin Chemical Co., Ltd. model YSLV-120TE), rubber-like Core-shell polymer modified bisphenol A type epoxy resin (model MX-156 manufactured by KANEKA Co., Ltd. as a specific example), rubber-like core-shell polymer modified bisphenol F type epoxy resin (a specific example is KANEKA shares Model MX-136 manufactured by Limited) and a bisphenol F type epoxy resin containing rubber particles of (Specific examples are manufactured by KANEKA Co. Model MX-130).

環氧化合物(D)可以含有含磷環氧樹脂。此時,感光性樹脂組成物的硬化物的難燃性會提升。含磷環氧樹脂可被包含在結晶性環氧樹脂(D1)中、或被包含在非晶性環氧樹脂(D2)中。含磷環氧樹脂可列舉例如:磷酸改質雙酚F型環氧樹脂(作為具體例是DIC股份有限公司製造的型號EPICLON EXA-9726、及EPICLON EXA-9710)、新日鐵住金化學股份有限公司製造的型號Epotohto FX-305等。The epoxy compound (D) may contain a phosphorus-containing epoxy resin. In this case, the flame retardancy of the cured product of the photosensitive resin composition is improved. The phosphorus-containing epoxy resin may be contained in the crystalline epoxy resin (D1) or the amorphous epoxy resin (D2). Examples of the phosphorus-containing epoxy resin include: phosphoric acid modified bisphenol F-type epoxy resin (specific examples are EPICLON EXA-9726 and EPICLON EXA-9710 manufactured by DIC Corporation), and Nippon Steel & Sumitomo Chemical Co., Ltd. Epotohto FX-305 made by the company.

有機填料(E)能夠對感光性樹脂組成物賦予流變性。有機填料(E)包含有機填料(E1)。有機填料(E1)具有羧基。在該羧基之中,部分的羧基可暴露於有機填料(E1)的表面。The organic filler (E) can impart rheology to the photosensitive resin composition. The organic filler (E) includes an organic filler (E1). The organic filler (E1) has a carboxyl group. Among the carboxyl groups, a part of the carboxyl groups may be exposed on the surface of the organic filler (E1).

有機填料(E1)在感光性樹脂組成物中具有高相溶性,而能夠對感光性樹脂組成物賦予更強的流變性。感光性樹脂組成物藉由含有具有羧基之有機填料(E1),能夠使感光性樹脂組成物的顯影性提升。The organic filler (E1) has high compatibility in the photosensitive resin composition, and can impart stronger rheology to the photosensitive resin composition. The photosensitive resin composition can improve the developability of the photosensitive resin composition by containing the organic filler (E1) having a carboxyl group.

又,感光性樹脂組成物藉由含有有機填料(E1),能夠進一步降低起因於感光性樹脂組成物的流動性所造成的硬化物層的不均勻性。藉此,便能夠使硬化物層的厚度容易變得均勻。此時,感光性樹脂組成物可以不含有流變控制劑。In addition, by containing the organic filler (E1) in the photosensitive resin composition, it is possible to further reduce unevenness of the cured product layer due to the fluidity of the photosensitive resin composition. Thereby, the thickness of a hardened | cured material layer can be made uniform easily. In this case, the photosensitive resin composition may not contain a rheology control agent.

有機填料(E1)的羧基,藉由使羧酸單體進行聚合或交聯,便能夠作為其產物中的側鏈來形成,該羧酸單體例如是丙烯酸、甲基丙烯酸、巴豆酸、馬來酸、富馬酸、伊康酸等。羧酸單體具有羧基與聚合性不飽和雙鍵。有機填料(E1)能夠提高感光性樹脂組成物的流變性,所以可使感光性樹脂組成物的穩定性(尤其是保存穩定性)提升。進一步,有機填料(E1)因為具有羧基,故能夠使含有感光性樹脂組成物之硬化物的顯影性提升,並且能夠使結晶性環氧化合物的相溶性提升而防止在感光性樹脂組成物中的結晶化。有機填料(E1)的羧基含量例如較佳是有機填料(E1)的酸值以由酸-鹼滴定所獲得的酸值計為1mg KOH/g以上且60mg KOH/g以下。若酸值小於1mg KOH/g,則會有感光性樹脂組成物的穩定性及硬化物的顯影性降低的疑慮。若酸值大於60mg KOH/g,則會有硬化物的耐濕可靠性降低的疑慮。有機填料(E1)的酸值更佳為3mg KOH/g以上且40mg KOH/g以下。The carboxyl group of the organic filler (E1) can be formed as a side chain in a product by polymerizing or crosslinking a carboxylic acid monomer. The carboxylic acid monomer is, for example, acrylic acid, methacrylic acid, crotonic acid, or horse Acid, fumaric acid, itaconic acid, etc. The carboxylic acid monomer has a carboxyl group and a polymerizable unsaturated double bond. Since the organic filler (E1) can improve the rheology of the photosensitive resin composition, the stability (especially storage stability) of the photosensitive resin composition can be improved. Furthermore, since the organic filler (E1) has a carboxyl group, it can improve the developability of the cured product containing the photosensitive resin composition, and can improve the compatibility of the crystalline epoxy compound and prevent the resin from being contained in the photosensitive resin composition. Crystallize. The carboxyl group content of the organic filler (E1) is preferably, for example, an acid value of the organic filler (E1), which is 1 mg KOH / g or more and 60 mg KOH / g or less based on the acid value obtained by acid-base titration. When the acid value is less than 1 mg KOH / g, there is a concern that the stability of the photosensitive resin composition and the developability of the cured product may decrease. If the acid value is more than 60 mg KOH / g, there is a concern that the moisture resistance reliability of the hardened product will decrease. The acid value of the organic filler (E1) is more preferably 3 mg KOH / g or more and 40 mg KOH / g or less.

有機填料(E1)較佳是具有羥基。在該羥基中,部分的羥基可暴露於有機填料(E1)的表面。如此,藉由有機填料(E1)具有羥基,便能夠進一步提升感光性樹脂組成物中的有機填料(E1)的分散性。The organic filler (E1) preferably has a hydroxyl group. Among the hydroxyl groups, a part of the hydroxyl groups may be exposed on the surface of the organic filler (E1). As described above, when the organic filler (E1) has a hydroxyl group, the dispersibility of the organic filler (E1) in the photosensitive resin composition can be further improved.

有機填料(E1)的平均一次粒徑較佳是1μm以下。藉由有機填料(E1)的平均一次粒徑設為1μm以下,能夠效率良好地提高感光性樹脂組成物的流變性。因此,感光性樹脂組成物的穩定性會進一步提升。又,藉由有機填料(E1)的平均一次粒徑設為1μm以下,能夠使被形成在硬化物的粗糙面的粗糙度變得細緻。藉此,伴隨硬化物的表面積增加會使錨定效果變大,而能夠使粗糙面與前述鍍覆層的密合性提升。有機填料(E1)的平均一次粒徑的下限沒有特別限定,例如較佳是0.001μm以上。平均一次粒徑是使用雷射繞射式粒度分布測定裝置來以D50 的形式測定。有機填料(E1)的平均一次粒徑更佳是0.4μm以下,進一步較佳是0.1μm以下。此時,能夠使被形成在硬化物的粗糙面的粗糙度變得特別細緻。再加上能夠在感光性樹脂組成物中抑制曝光時的散射,藉此,能夠使感光性樹脂組成物的解析性進一步提升。The average primary particle diameter of the organic filler (E1) is preferably 1 μm or less. When the average primary particle diameter of the organic filler (E1) is 1 μm or less, the rheology of the photosensitive resin composition can be efficiently improved. Therefore, the stability of the photosensitive resin composition is further improved. In addition, when the average primary particle diameter of the organic filler (E1) is 1 μm or less, the roughness of the rough surface formed on the hardened product can be made fine. Thereby, the anchoring effect becomes large with the increase of the surface area of the hardened | cured material, and the adhesiveness of a rough surface and the said plating layer can be improved. The lower limit of the average primary particle diameter of the organic filler (E1) is not particularly limited, but is preferably 0.001 μm or more. The average primary particle diameter was measured as a D 50 using a laser diffraction particle size distribution measuring device. The average primary particle diameter of the organic filler (E1) is more preferably 0.4 μm or less, and still more preferably 0.1 μm or less. In this case, the roughness of the rough surface formed on the hardened material can be made particularly fine. In addition, it is possible to suppress scattering at the time of exposure in the photosensitive resin composition, whereby the resolution of the photosensitive resin composition can be further improved.

有機填料(E1),在感光性樹脂組成物中較佳是以最大粒徑小於1.0μm的方式進行分散,更佳是以小於0.5μm的方式進行分散。最大粒徑是藉由雷射繞射式粒度分布測定裝置進行測定。或者,最大粒徑可利用穿透型電子顯微鏡(TEM)觀察硬化物來測定。有機填料(E1)有時會在感光性樹脂組成物中凝集(例如會形成二次粒子),此時,最大粒徑意指凝集後的粒子尺寸。若在分散狀態時的有機填料(E1)的最大粒徑在前述範圍內,便能夠使被形成在硬化物的粗糙面的粗糙度變得更加細緻。再加上可在感光性樹脂組成物中抑制曝光時的散射,藉此,感光性樹脂組成物的解析性會進一步提升。又,感光性樹脂組成物的穩定性會提升。特佳是有機填料(E1)的平均一次粒徑是0.1μm以下,並且有機填料(E1)是以0.5μm以下的粒徑的方式進行分散。再者,當發生粒子的凝集時,最大粒徑通常會大於平均一次粒徑。The organic filler (E1) is preferably dispersed in the photosensitive resin composition such that the maximum particle diameter is less than 1.0 μm, and more preferably dispersed in a manner smaller than 0.5 μm. The maximum particle diameter is measured by a laser diffraction type particle size distribution measuring device. Alternatively, the maximum particle diameter can be measured by observing the hardened material with a transmission electron microscope (TEM). The organic filler (E1) may be aggregated in the photosensitive resin composition (for example, secondary particles may be formed). In this case, the maximum particle size means the particle size after aggregation. When the maximum particle diameter of the organic filler (E1) in the dispersed state is within the aforementioned range, the roughness of the rough surface formed on the hardened material can be made finer. In addition, it is possible to suppress scattering during exposure in the photosensitive resin composition, thereby improving the resolution of the photosensitive resin composition. In addition, the stability of the photosensitive resin composition is improved. It is particularly preferable that the average primary particle diameter of the organic filler (E1) is 0.1 μm or less, and the organic filler (E1) is dispersed so as to have a particle diameter of 0.5 μm or less. Furthermore, when agglomeration of particles occurs, the maximum particle diameter is usually larger than the average primary particle diameter.

有機填料(E1)較佳是包含橡膠成分。又,有機填料(E1)較佳是僅包含橡膠成分。橡膠成分能夠對感光性樹脂組成物的硬化物賦予柔軟性。橡膠成分能藉由樹脂來構成。橡膠成分較佳是包含選自由交聯丙烯酸系橡膠、交聯NBR、交聯MBS及交聯SBR所組成之群組中的至少一種聚合物。此時,橡膠成分能夠對感光性樹脂組成物的硬化物賦予優異的柔軟性。進一步,能夠對硬化物層的表面賦予更加適當的粗糙面。此處,橡膠成分包含使構成上述的聚合物的單體進行共聚合時所形成的交聯結構。NBR一般而言為丁二烯與丙烯腈的共聚物,而被分類為腈類橡膠。MBS一般而言為由甲基丙烯酸甲酯、丁二烯、苯乙烯3種成分所構成之共聚物,而被分類為丁二烯系橡膠。SBR一般而言為苯乙烯與丁二烯的共聚物,而被分類為苯乙烯橡膠。作為有機填料(E1)的具體例,可舉例如:JSR股份有限公司製造的型號XER-91-MEK、JSR股份有限公司製造的型號XER-32-MEK、JSR股份有限公司製造的型號XSK-500等。該等有機填料(E1)中,XER-91-MEK是平均一次粒徑為0.07μm且具有羧基之交聯橡膠(NBR),是以該交聯橡膠的含有比例為15重量%的甲基乙基酮分散液的形式來提供,其酸值是10.0mg KOH/g。XER-32-MEK是以相對於分散液總量含量為17重量%的方式,使羧基改質氫化腈橡膠的聚合物(線狀粒子)分散於甲基乙基酮中而成的分散液。又,XSK-500是平均一次粒徑為0.07μm且具有羧基和羥基之交聯橡膠(SBR),是以該交聯橡膠的含有比例為15重量%的甲基乙基酮分散液的形式來提供。如此,有機填料(E1)能夠以分散液來調配於感光性樹脂組成物中。亦即,橡膠成分能夠以分散液來調配於感光性樹脂組成物中。又,作為有機填料(E1)的具體例,除了上述以外還可舉例如:JSR股份有限公司製造的型號XER-92等。The organic filler (E1) preferably contains a rubber component. The organic filler (E1) preferably contains only a rubber component. The rubber component can impart flexibility to the cured product of the photosensitive resin composition. The rubber component can be composed of a resin. The rubber component preferably contains at least one polymer selected from the group consisting of a crosslinked acrylic rubber, a crosslinked NBR, a crosslinked MBS, and a crosslinked SBR. In this case, the rubber component can impart excellent flexibility to the cured product of the photosensitive resin composition. Furthermore, the surface of the hardened | cured material layer can be provided with a more appropriate rough surface. Here, the rubber component includes a crosslinked structure formed when the monomers constituting the above-mentioned polymer are copolymerized. NBR is generally a copolymer of butadiene and acrylonitrile, and is classified as a nitrile rubber. MBS is generally a copolymer composed of three components: methyl methacrylate, butadiene, and styrene, and is classified as a butadiene rubber. SBR is generally a copolymer of styrene and butadiene, and is classified as a styrene rubber. Specific examples of the organic filler (E1) include, for example, model XER-91-MEK manufactured by JSR Corporation, model XER-32-MEK manufactured by JSR Corporation, and model XSK-500 manufactured by JSR Corporation Wait. Among these organic fillers (E1), XER-91-MEK is a crosslinked rubber (NBR) having an average primary particle diameter of 0.07 μm and having a carboxyl group, and is a methyl ethyl ester containing 15% by weight of the crosslinked rubber The ketone was provided as a dispersion with an acid value of 10.0 mg KOH / g. XER-32-MEK is a dispersion obtained by dispersing a polymer (linear particles) of a carboxyl-modified hydrogenated nitrile rubber in methyl ethyl ketone so that the total content of the dispersion is 17% by weight. XSK-500 is a crosslinked rubber (SBR) having an average primary particle diameter of 0.07 μm and having a carboxyl group and a hydroxyl group, and is in the form of a methyl ethyl ketone dispersion containing 15% by weight of the crosslinked rubber. provide. In this way, the organic filler (E1) can be prepared as a dispersion liquid in the photosensitive resin composition. That is, a rubber component can be mix | blended with a photosensitive resin composition as a dispersion liquid. As a specific example of the organic filler (E1), in addition to the above, for example, model XER-92 manufactured by JSR Co., Ltd. and the like can be mentioned.

有機填料(E1)可含有橡膠成分以外的粒子成分。此時,有機填料(E1)能夠含有選自由具有羧基之丙烯酸系樹脂微粒子、及具有羧基之纖維素微粒子所組成之群組中的至少1種粒子成分。具有羧基之丙烯酸系樹脂微粒子,能夠含有選自由非交聯苯乙烯-丙烯酸系樹脂微粒子及交聯苯乙烯-丙烯酸系樹脂微粒子所組成之群組中的至少1種粒子成分。作為非交聯苯乙烯-丙烯酸系樹脂微粒子的具體例,可列舉例如:Nippon paint Industrial Coatings股份有限公司製造的型號FS-201(平均一次粒徑為0.5μm)。作為交聯苯乙烯-丙烯酸系樹脂微粒子的具體例,可列舉例如:Nippon paint Industrial Coatings股份有限公司製造的型號MG-351(平均一次粒徑為1.0μm)及型號BGK-001(平均一次粒徑為1.0μm)。又,有機填料(E1)可以含有選自上述橡膠成分丙烯酸系樹脂微粒子及纖維素微粒子的粒子成分以外的粒子成分。此時,有機填料(E1)能夠含有具有羧基之粒子成分。亦即,該具有羧基之粒子成分可與選自橡膠成分、丙烯酸系樹脂微粒子及纖維素微粒子的粒子成分不同。The organic filler (E1) may contain particle components other than a rubber component. At this time, the organic filler (E1) can contain at least one particle component selected from the group consisting of acrylic resin fine particles having a carboxyl group and cellulose fine particles having a carboxyl group. The acrylic resin fine particles having a carboxyl group may contain at least one particle component selected from the group consisting of non-crosslinked styrene-acrylic resin fine particles and crosslinked styrene-acrylic resin fine particles. Specific examples of the non-crosslinked styrene-acrylic resin fine particles include, for example, model FS-201 (average primary particle size: 0.5 μm) manufactured by Nippon paint Industrial Coatings Co., Ltd. Specific examples of the crosslinked styrene-acrylic resin fine particles include, for example, model MG-351 (average primary particle diameter of 1.0 μm) and model BGK-001 (average primary particle diameter) manufactured by Nippon paint Industrial Coatings Co., Ltd. 1.0 μm). The organic filler (E1) may contain a particle component other than the particle components selected from the rubber component acrylic resin fine particles and cellulose fine particles. In this case, the organic filler (E1) can contain a particle component having a carboxyl group. That is, the particle component having a carboxyl group may be different from a particle component selected from a rubber component, acrylic resin fine particles, and cellulose fine particles.

有機填料(E),可以進一步包含有機填料(E1)以外的有機填料。有機填料(E1)以外的有機填料,可以不具有羧基。有機填料(E1)以外的有機填料,平均一次粒徑可以大於1μm。其中,從效率良好地獲得流變性的觀點、對硬化物賦予粗糙面的觀點、及使感光性樹脂組成物的解析性提升的觀點來看,感光性樹脂組成物較佳是不包含有機填料(E1)以外的有機填料。The organic filler (E) may further include an organic filler other than the organic filler (E1). Organic fillers other than the organic filler (E1) may not have a carboxyl group. Organic fillers other than the organic filler (E1) may have an average primary particle diameter larger than 1 μm. Among them, the photosensitive resin composition preferably does not contain an organic filler from the viewpoint of efficiently obtaining rheology, the viewpoint of providing a roughened surface to the cured product, and the viewpoint of improving the resolution of the photosensitive resin composition ( E1) other organic fillers.

有機填料(E),可以僅含有有機填料(E1)、或可以含有有機填料(E1)與有機填料(E1)以外的有機填料。有機填料(E),較佳是含有30質量%以上的有機填料(E1),更佳是含有50質量%以上,進一步較佳是含有100質量%。此時,感光性樹脂組成物的穩定性會進一步提升。又,此時,對感光性樹脂組成物的硬化物賦予粗糙面會變得更加容易。藉此,能夠使硬化物與鍍覆層的密合性進一步提升。The organic filler (E) may contain only the organic filler (E1), or may contain organic fillers other than the organic filler (E1) and the organic filler (E1). The organic filler (E) preferably contains 30% by mass or more of the organic filler (E1), more preferably contains 50% by mass or more, and even more preferably 100% by mass. At this time, the stability of the photosensitive resin composition is further improved. In this case, it is easier to provide a roughened surface to the cured product of the photosensitive resin composition. Thereby, the adhesiveness of a hardened | cured material and a plating layer can be improved more.

三氮雜苯樹脂(F),如同前述,滿足下述之中的至少一條件:在25℃時是液狀狀態;及,感光性樹脂組成物含有溶劑(H),且在25℃時三氮雜苯樹脂(F)會溶解於溶劑(H)中。換句話說,三氮雜苯樹脂(F)可以僅滿足在25℃時是液狀狀態,亦可以僅滿足感光性樹脂組成物含有溶劑(H),且在25℃時三氮雜苯樹脂(F)會溶解於溶劑(H)中。或者,三氮雜苯樹脂(F)滿足兩種條件:在25℃時是液狀狀態;及,感光性樹脂組成物含有溶劑(H),且在25℃時三氮雜苯樹脂(F)會溶解於溶劑(H)中。三氮雜苯樹脂(F),藉由滿足上述任一條件,當調整感光性樹脂組成物時,能夠以液狀狀態或溶液狀態來調整三氮雜苯樹脂(F),並且三氮雜苯樹脂(F)能夠在感光性樹脂組成物中具有高分散性。尤其,只要三氮雜苯樹脂(F)在25℃時是液狀狀態,在感光性樹脂組成物中三氮雜苯樹脂(F)會具有特別高的分散性。此時,藉由感光性樹脂組成物的分散性優異而塗佈性變得良好,便能夠對感光性樹脂組成物的硬化物降低不均勻產生的情況。因此,即便對感光性樹脂組成物在粗糙化後的硬化物層的表面賦予粗糙面,仍能夠維持其表面的均勻性。藉此,便能夠使硬化物層、由銅或金等所構成之鍍覆層的密合性提升。進一步,因為感光性樹脂組成物含有三氮雜苯樹脂(F),所以即便在利用氧化劑將感光性樹脂組成物的硬化層進行粗糙化時,仍能夠降低硬化物層被腐蝕的程度。因此,在鍍覆處理前將硬化物層的表面進行粗糙化時,能夠使硬化物層的厚度不易變薄。The triazabenzene resin (F), as described above, satisfies at least one of the following conditions: a liquid state at 25 ° C; and a photosensitive resin composition containing a solvent (H), and at 25 ° C The azabenzene resin (F) is dissolved in the solvent (H). In other words, the triazine resin (F) can satisfy only the liquid state at 25 ° C, or only the photosensitive resin composition containing the solvent (H), and the triazine resin at 25 ° C ( F) Will dissolve in the solvent (H). Alternatively, the triazabenzene resin (F) satisfies two conditions: it is in a liquid state at 25 ° C; and the photosensitive resin composition contains a solvent (H), and the triazabenzene resin (F) at 25 ° C Will dissolve in solvent (H). The triazabenzene resin (F) satisfies any of the above conditions. When the photosensitive resin composition is adjusted, the triazabenzene resin (F) can be adjusted in a liquid state or a solution state. The resin (F) can have high dispersibility in the photosensitive resin composition. In particular, as long as the triazabenzene resin (F) is in a liquid state at 25 ° C, the triazabenzene resin (F) has a particularly high dispersibility in the photosensitive resin composition. In this case, since the dispersibility of the photosensitive resin composition is excellent and the coatability becomes good, it is possible to reduce occurrence of unevenness in the cured product of the photosensitive resin composition. Therefore, even if a rough surface is provided on the surface of the cured resin layer of the photosensitive resin composition after roughening, the surface uniformity can be maintained. Thereby, the adhesiveness of the hardened | cured material layer and the plating layer which consists of copper, gold, etc. can be improved. Furthermore, since the photosensitive resin composition contains a triazabenzene resin (F), even when the hardened layer of the photosensitive resin composition is roughened with an oxidizing agent, the degree of corrosion of the hardened layer can be reduced. Therefore, when the surface of a hardened | cured material layer is roughened before a plating process, the thickness of a hardened | cured material layer can hardly become thin.

本實施形態中,感光性樹脂組成物可含有溶劑(H),當三氮雜苯樹脂(F)在25℃時是液狀狀態時,感光性樹脂組成物可以不含溶劑(H)。其中,從感光性樹脂組成物的液狀化或清漆化、黏度調整、塗佈性的調整、成膜性的調整等的觀點來看,即便當三氮雜苯樹脂(F)在25℃時是液狀狀態時,較佳是含有溶劑(H)。當含有溶劑(H)時,即便當三氮雜苯樹脂(F)在25℃時是液狀狀態時,在25℃仍能夠溶解於溶劑(H)。In this embodiment, the photosensitive resin composition may contain a solvent (H), and when the triazabenzene resin (F) is in a liquid state at 25 ° C, the photosensitive resin composition may not contain the solvent (H). Among these, from the viewpoints of liquefaction or varnishing of the photosensitive resin composition, adjustment of viscosity, adjustment of coatability, adjustment of film-forming property, etc., even when the triazabenzene resin (F) is at 25 ° C When it is in a liquid state, it is preferable to contain a solvent (H). When the solvent (H) is contained, even when the triazabenzene resin (F) is in a liquid state at 25 ° C, it can be dissolved in the solvent (H) at 25 ° C.

溶劑(H),含有例如選自由下述化合物所組成之群組中的至少一種:水;直鏈、分枝、2級或多元的醇類,其是乙醇、異丁醇、1-丁醇、異丙醇、己醇、乙二醇、3-甲基-3-甲氧基丁醇等;甲基乙基酮、環己酮等的酮類;甲苯、二甲苯等的芳香族烴類;SWASOL系列(丸善石油化學公司製造)、Solvesso系列(ExxonMobil Chemical公司製造)等的石油系芳香族系混合溶劑;賽璐蘇、丁基賽璐蘇等的賽璐蘇類;卡必醇、丁基卡必醇等的卡必醇類;乙二醇單異丙基醚、乙二醇單丁基醚、丙二醇甲基醚等的烷二醇烷基醚;二丙二醇甲基醚等的聚丙二醇烷基醚;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、卡必醇乙酸酯等的乙酸酯類;及,二烷二醇醚類。The solvent (H) contains, for example, at least one selected from the group consisting of: water; linear, branched, secondary, or polyhydric alcohols, which are ethanol, isobutanol, 1-butanol , Isopropanol, hexanol, ethylene glycol, 3-methyl-3-methoxybutanol, etc .; ketones such as methyl ethyl ketone, cyclohexanone; aromatic hydrocarbons such as toluene and xylene ; Petroleum-based aromatic mixed solvents such as SWASOL series (manufactured by Maruzen Petrochemical Co., Ltd.), Solvesso series (manufactured by ExxonMobil Chemical Co., Ltd.); celluloids such as celluloid, butylcellulose, etc .; carbitol, butyl Carbitols such as carbitol; alkyl glycol alkyl ethers such as ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether, and propylene glycol methyl ether; polypropylene glycols such as dipropylene glycol methyl ether Alkyl ethers; acetates such as ethyl acetate, butyl acetate, cellulose acetate, and carbitol acetate; and dioxane glycol ethers.

當感光性樹脂組成物含有溶劑(H)時,三氮雜苯(F)在25℃時,較佳是對選自由下述溶劑所組成之群組中的至少一種具有溶解性:異丁醇、1-丁醇、異丙醇、乙二醇單異丙基醚、3-甲基-3-甲氧基丁醇、乙二醇單丁基醚、二甲苯及水。換句話說,溶劑(H)較佳是包含選自由異丁醇、1-丁醇、異丙醇、乙二醇單異丙基醚、3-甲基-3-甲氧基丁醇、乙二醇單丁基醚、二甲苯及水所組成之群組中的至少一種。此時,能夠以三氮雜苯樹脂(F)對溶劑(H)具有溶解性的方式來選擇感光樹脂組成物中的溶劑。三氮雜苯樹脂(F)對於溶劑的溶解性,例如相對於100質量份的異丁醇或1-丁醇,只要確認到在80℃時三氮雜苯樹脂(F)可溶解70質量份以上,並且在25℃時可維持溶液狀態即可。又,三氮雜苯樹脂(F)在25℃可溶解於溶劑(H),例如能夠藉由下述方式確認:當將該等調配於感光性樹脂組成物中時,以與在感光性樹脂組成物中的質量比相同的質量比來混合溶劑(H)與三氮雜苯樹脂(F)。When the photosensitive resin composition contains a solvent (H) and triazabenzene (F) at 25 ° C, it is preferably soluble in at least one selected from the group consisting of the following solvents: isobutanol , 1-butanol, isopropanol, ethylene glycol monoisopropyl ether, 3-methyl-3-methoxybutanol, ethylene glycol monobutyl ether, xylene, and water. In other words, the solvent (H) preferably contains a solvent selected from the group consisting of isobutanol, 1-butanol, isopropanol, ethylene glycol monoisopropyl ether, 3-methyl-3-methoxybutanol, ethyl At least one of the group consisting of glycol monobutyl ether, xylene, and water. At this time, the solvent in the photosensitive resin composition can be selected so that the triazabenzene resin (F) has solubility in the solvent (H). The solubility of the triazabenzene resin (F) in a solvent, for example, with respect to 100 parts by mass of isobutanol or 1-butanol, if it is confirmed that the triazabenzene resin (F) can dissolve 70 parts by mass at 80 ° C. Above, and the solution state can be maintained at 25 ° C. The triazabenzene resin (F) is soluble in the solvent (H) at 25 ° C, and it can be confirmed, for example, that when these are formulated in a photosensitive resin composition, they are compatible with the photosensitive resin. The solvent (H) and the triazabenzene resin (F) are mixed with the same mass ratio in the composition.

三氮雜苯樹脂(F)是具有至少一個鍵結在三氮雜苯骨架上的胺基之胺基三氮雜苯與甲醛之縮合物、或將該縮合物聚合所獲得的熱硬化性樹脂。因此,三氮雜苯樹脂(F),具有至少一個三氮雜苯骨架,且具有至少一個鍵結在該三氮雜苯骨架上的胺基。胺基可以是一級胺基、二級胺基及三級胺基中的任一者。尤其,胺基較佳是二級胺基或三級胺基,並且較佳是不為一級胺基。亦即,三氮雜苯樹脂(F)較佳是不具有一級胺基。在一個三氮雜苯骨架中,能夠鍵結1個以上且3個以下的胺基,但是鍵結在三氮雜苯骨架上的胺基,可以僅包含二級胺基,亦可以僅包含三級胺基、或可包含二級胺基與三級胺基兩者。此時,即便利用氧化劑處理硬化物層的表面來進行粗糙化,仍能夠維持其表面的均勻性,並且能夠使硬化物層與鍍覆層的密合性提升。The triazabenzene resin (F) is a condensation product of an aminotriazabenzene and formaldehyde having at least one amine group bonded to a triazabenzene skeleton, or a thermosetting resin obtained by polymerizing the condensation product . Therefore, the triazabenzene resin (F) has at least one triazabenzene skeleton and has at least one amine group bonded to the triazabenzene skeleton. The amine group may be any of a primary amine group, a secondary amine group, and a tertiary amine group. In particular, the amine group is preferably a secondary amine group or a tertiary amine group, and is preferably not a primary amine group. That is, the triazabenzene resin (F) preferably does not have a primary amine group. In a triazabenzene skeleton, one or more amine groups can be bonded, but the amine group bonded to the triazabenzene skeleton may include only secondary amine groups, or only three The secondary amine group, or may include both secondary and tertiary amine groups. At this time, even if the surface of the hardened material layer is roughened with an oxidizing agent, the surface uniformity can be maintained, and the adhesion between the hardened material layer and the plating layer can be improved.

三氮雜苯樹脂(F)例如是:鍵結在三氮雜苯骨架上的3個胺基皆為一級胺基也就是三聚氰胺(1,3,5-三氮雜苯-2,4,6-三胺)與甲醛之縮合物、或將該縮合物聚合所獲得的熱硬化性樹脂。此時,三氮雜苯樹脂(F)包含例如:三聚氰胺所具有的各一級胺基中的至少一個氫原子被羥甲基化而成的羥甲基化合物、或該羥甲基化合物中的羥基進一步被烷氧化而成的化合物。The triazine resin (F) is, for example, that the three amine groups bonded to the triazine skeleton are all primary amine groups, that is, melamine (1,3,5-triazabenzene-2,4,6 -A condensate of triamine) and formaldehyde, or a thermosetting resin obtained by polymerizing the condensate. At this time, the triazine resin (F) includes, for example, a methylol compound in which at least one hydrogen atom in each primary amine group of melamine is methylated, or a hydroxyl group in the methylol compound. A compound which is further alkoxylated.

三氮雜苯樹脂(F),較佳是具有選自由N-羥甲基(-N(CH2 OH)H基)及N-烷氧基烷基(-N(R9 OR10 )H基)所組成之群組中的至少一種來作為二級胺基。此時,即便利用氧化劑來處理硬化物層的表面來進行粗糙化,仍能夠維持其表面的均勻性,並且能夠使硬化物層與鍍覆層的密合性提升。上述的R9 ,例如是直鏈或分枝的烴,具體而言,R9 例如是:甲烯基、伸乙基、伸丙基或伸丁基。又,R10 例如是碳數1以上且4以下的烷基,具體而言,R10 例如是:甲基、乙基、丙基或丁基。丙基是1-丙基或2-丙基(異丙基),丁基是正丁基、二級丁基、異丁基或三級丁基。二級胺基更佳是選自由N-羥甲基、N-烷氧基甲基所組成之群組中的至少一種胺基。The triazabenzene resin (F) preferably has a group selected from the group consisting of N-hydroxymethyl (-N (CH 2 OH) H group) and N-alkoxyalkyl (-N (R 9 OR 10 ) H group At least one of the groups consisting of) is used as a secondary amine group. At this time, even if the surface of the hardened layer is roughened by using an oxidizing agent, the surface uniformity can be maintained, and the adhesion between the hardened layer and the plating layer can be improved. The aforementioned R 9 is , for example, a linear or branched hydrocarbon. Specifically, R 9 is, for example, a methylenyl group, an ethylidene group, a propylidene group, or a butylene group. R 10 is, for example, an alkyl group having 1 to 4 carbon atoms. Specifically, R 10 is, for example, methyl, ethyl, propyl, or butyl. Propyl is 1-propyl or 2-propyl (isopropyl), and butyl is n-butyl, secondary butyl, isobutyl or tertiary butyl. The secondary amine group is more preferably at least one amine group selected from the group consisting of N-hydroxymethyl and N-alkoxymethyl.

又,三氮雜苯樹脂(F),較佳是具有選自由N,N-二羥甲基(-N(CH2 OH)2 基)、N-羥甲基-N-烷氧基烷基(-N(CH2 OH)(R11 OR12 )基)、N,N-雙(烷氧基烷)基(-N(R11 OR12 )2 基、-N(R11 OR12 )(R13 OR14 )基、及-N(R13 OR14 )2 基)所組成之群組中的至少一種來作為三級胺基。此時,即便利用氧化劑來處理硬化物層的表面來進行粗糙化,仍能夠維持其表面的均勻性,並且能夠使硬化物層與鍍覆層的密合性提升。上述R11 和R13 例如各自獨立地是直鏈狀或分枝狀的烴,具體而言,R11 和R13 例如是:甲烯基、伸乙基、伸丙基或伸丁基。又,R12 和R14 例如各自獨立地是碳數1以上且4以下的烷基,具體而言,R12 和R14 例如各自獨立地是:甲基、乙基、丙基或丁基。丙基是1-丙基或2-丙基(異丙基),丁基是正丁基、二級丁基、異丁基或三級丁基。The triazabenzene resin (F) preferably has a material selected from the group consisting of N, N-dimethylol (-N (CH 2 OH) 2 group) and N-hydroxymethyl-N-alkoxyalkyl group. (-N (CH 2 OH) (R 11 OR 12 ) group), N, N-bis (alkoxyalkyl) group (-N (R 11 OR 12 ) 2 group, -N (R 11 OR 12 ) ( At least one of the group consisting of R 13 OR 14 ) group and -N (R 13 OR 14 ) 2 group) is used as a tertiary amine group. At this time, even if the surface of the hardened layer is roughened by using an oxidizing agent, the surface uniformity can be maintained, and the adhesion between the hardened layer and the plating layer can be improved. The above-mentioned R 11 and R 13 are each independently a linear or branched hydrocarbon, and specifically, R 11 and R 13 are, for example, a alkenyl group, an ethylene group, a propyl group, or a butylene group. R 12 and R 14 are each independently an alkyl group having 1 to 4 carbon atoms, and specifically, R 12 and R 14 are each independently a methyl group, an ethyl group, a propyl group, or a butyl group. Propyl is 1-propyl or 2-propyl (isopropyl), and butyl is n-butyl, secondary butyl, isobutyl or tertiary butyl.

三級胺基更佳是選自由N,N-二羥甲基、N-羥甲基-N-烷氧基甲基及N,N-雙(烷氧基甲基)所組成之群組中的至少一種基團。N,N-雙(烷氧基甲基)的例子,包含:-N(CH2 OCH3 )2 、-N(CH2 OBu)2 、及-N(CH2 OCH3 )(CH2 OBu)(Bu表示丁基)。The tertiary amino group is more preferably selected from the group consisting of N, N-dimethylol, N-hydroxymethyl-N-alkoxymethyl, and N, N-bis (alkoxymethyl) At least one group. Examples of N, N-bis (alkoxymethyl) include: -N (CH 2 OCH 3 ) 2 , -N (CH 2 OBu) 2 , and -N (CH 2 OCH 3 ) (CH 2 OBu) (Bu means butyl).

鍵結在三氮雜苯骨架上的三級胺基,進一步較佳是N,N-雙(烷氧基甲基)或N-羥甲基-N-烷氧基甲基。此處,N,N-雙(烷氧基甲基)是-N(CH2 OR12 )2 基、-N(CH2 OR12 )(CH2 OR14 )基、或-N(CH2 OR14 )2 基,N-羥甲基-N-烷氧基甲基是(-N(CH2 OH)(CH2 OR12 )基。又,與上述相同,R12 和R14 較佳是各自獨立地是碳數1以上且4以下的烷基。具體而言,R12 和R14 較佳是例如各自獨立地是甲基、乙基、丙基或丁基。丙基是1-丙基或2-丙基(異丙基),丁基是正丁基、二級丁基、異丁基或三級丁基。此時,即便對粗糙化後的硬化物層的表面賦予粗糙面,仍能夠維持其表面的更高的均勻性,並且能夠使硬化物層與鍍覆層的密合性進一步提升。The tertiary amine group bonded to the triazabenzene skeleton is more preferably N, N-bis (alkoxymethyl) or N-hydroxymethyl-N-alkoxymethyl. Here, N, N-bis (alkoxymethyl) is -N (CH 2 OR 12 ) 2 group, -N (CH 2 OR 12 ) (CH 2 OR 14 ) group, or -N (CH 2 OR 14 ) 2 groups, and N-hydroxymethyl-N-alkoxymethyl is a (-N (CH 2 OH) (CH 2 OR 12 ) group. Also, as described above, R 12 and R 14 are preferably each Independently, it is an alkyl group having 1 to 4 carbon atoms. Specifically, R 12 and R 14 are each preferably independently methyl, ethyl, propyl, or butyl. For example, propyl is 1-propyl. Or 2-propyl (isopropyl), and butyl is n-butyl, secondary butyl, isobutyl, or tertiary butyl. In this case, even if the roughened surface of the hardened layer is given a rough surface, It can maintain higher uniformity of the surface, and can further improve the adhesion between the hardened layer and the plating layer.

作為三氮雜苯樹脂(F)的具體的產品,可列舉例如:日本氫特工業(Cytec Industries Japan)股份有限公司製造的製品名CYMEL 300、CYMEL 301、CYMEL 303、CYMEL 350、CYMEL 370、CYMEL 771、CYMEL 325、CYMEL 327、CYMEL 703、CYMEL 712、CYMEL 715、CYMEL 701、CYMEL 267、CYMEL 285、CYMEL 232、CYMEL 235、CYMEL 236、CYMEL 238、CYMEL 211、CYMEL254、CYMEL 204、MYCOAT 212、CYMEL 202、CYMEL 207、MYCOAT 506、MYCOAT 508、CYMEL1123、MYCOAT 102、MYCOAT 105、MYCOAT 106、CYMEL 1128;DIC股份有限公司製造的製品名AMIDIR J-820-60、AMIDIR L-109-65、AMIDIR L-117-60、AMIDIR L-127-60、AMIDIR 13-548、AMIDIR G-821-60、AMIDIR L-110-60、AMIDIR L-125-60、AMIDIR L-166-60B、AMIDIR L-105-60、AMIDIR S-695、AMIDIR S-683-IM、AMIDIR TD-126及AMIDIR 15-594;及,三和化學股份有限公司製造的製品名MW-30MLF、MW-30M、MW-30LF、MW-30、MW-22、MS-11、MW-12LF、MS-001、MZ-351、MX-730、MX-750、MX-706、MX-035、MX-45、MX-410、BL-60及BX-4000等。Specific examples of the triazine resin (F) include, for example, product names CYMEL 300, CYMEL 301, CYMEL 303, CYMEL 350, CYMEL 370, and CYMEL manufactured by Cytec Industries Japan Co., Ltd. 771, CYMEL 325, CYMEL 327, CYMEL 703, CYMEL 712, CYMEL 715, CYMEL 701, CYMEL 267, CYMEL 285, CYMEL 232, CYMEL 235, CYMEL 236, CYMEL 238, CYMEL 211, CYMEL254, CYMEL 204, MYMCOAT 212 202, CYMEL 207, MYCOAT 506, MYCOAT 508, CYMEL1123, MYCOAT 102, MYCOAT 105, MYCOAT 106, CYMEL 1128; product names AMIDIR J-820-60, AMIDIR L-109-65, AMIDIR L- 117-60, AMIDIR L-127-60, AMIDIR 13-548, AMIDIR G-821-60, AMIDIR L-110-60, AMIDIR L-125-60, AMIDIR L-166-60B, AMIDIR L-105-60 , AMIDIR S-695, AMIDIR S-683-IM, AMIDIR TD-126 and AMIDIR 15-594; and, the product names MW-30MLF, MW-30M, MW-30LF, MW-30 manufactured by Sanwa Chemical Co., Ltd. , MW-22, MS-11, MW-12LF, MS-001, MZ-351, MX-730, MX-750, MX-706, MX-035, MX-45, MX-410, BL-60 BX-4000 and the like.

三氮雜苯樹脂(F)的數量平均分子量較佳是170以上且10000以下,更佳是180以上且5000以下,進一步較佳是200以上且3000以下。The number average molecular weight of the triazabenzene resin (F) is preferably 170 or more and 10,000 or less, more preferably 180 or more and 5,000 or less, and still more preferably 200 or more and 3,000 or less.

又,若感光性樹脂組成物含有三氮雜苯樹脂(F),例如當在被設置於鍍覆層或芯材上的導體線路之上形成硬化物層時,被分散於感光性樹脂組成物中的三氮雜苯樹脂(F)可在與硬化物層的接觸面中的金屬元素形成配位鍵結。因此,能夠使感光性樹脂組成物的硬化物層與鍍覆層的密合性進一步提升。作為金屬元素,可列舉例如:金、銀、銅、鎳。When the photosensitive resin composition contains a triazabenzene resin (F), for example, when a hardened material layer is formed on a conductor line provided on a plating layer or a core material, the photosensitive resin composition is dispersed in the photosensitive resin composition. The triazabenzene resin (F) in can form a coordination bond in a metal element in a contact surface with the hardened layer. Therefore, the adhesiveness of the hardened | cured material layer of a photosensitive resin composition and a plating layer can be improved more. Examples of the metal element include gold, silver, copper, and nickel.

本實施形態中,感光性樹脂組成物可不包含三氮雜苯樹脂(F)以外的三氮雜苯樹脂,但是仍能夠在達成本發明的效果的範圍內含有三氮雜苯樹脂(F)以外的三氮雜苯樹脂。三氮雜苯樹脂(F)以外的三氮雜苯樹脂的例子包含三聚氰胺衍生物及三聚氰二胺(guanamine)衍生物,該三聚氰胺衍生物不滿足下述二個條件:三氮雜苯樹脂(F)在25℃時是液狀狀態;及,感光性樹脂組成物含有溶劑(H),且在25℃時三氮雜苯樹脂(F)對於感光性樹脂組成物中的溶劑(H)具有溶解性。In this embodiment, the photosensitive resin composition may not contain a triazabenzene resin other than the triazabenzene resin (F), but it can still contain other than the triazabenzene resin (F) within a range that achieves the effects of the present invention. Triazabenzene resin. Examples of the triazine resin other than the triazine resin (F) include a melamine derivative and a guanamine derivative, and the melamine derivative does not satisfy the following two conditions: a triazine resin (F) a liquid state at 25 ° C; and the photosensitive resin composition contains a solvent (H), and the triazabenzene resin (F) at 25 ° C to the solvent (H) in the photosensitive resin composition Soluble.

感光性樹脂組成物較佳是進一步含有耦合劑(G)。耦合劑(G)包含耦合劑(G1),耦合劑(G1)含有選自由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中的至少一種原子。耦合劑(G1)進一步具有兩個以上選自由烷氧基、醯氧基及醇鹽基所組成之群組中的官能基。亦即,感光性樹脂組成物較佳是進一步含有耦合劑(G),耦合劑(G)含有耦合劑(G1),耦合劑(G1)含有選自由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中的至少一種原子,且具有兩個以上選自由烷氧基、醯氧基及醇鹽基所組成之群組中的官能基。耦合劑(G1)藉由與含羧基樹脂(A)和有機填料(E1)所含有的羧基的反應或相互作用,可提高感光性樹脂組成物中的有機填料(E1)的分散性,所以可使感光性樹脂組成物的流變性和穩定性(尤其是保存穩定性)提升。耦合劑(G1)可以具有兩個以上的烷氧基,可以具有兩個以上的醯氧基,亦可以具有兩個以上的醇鹽基。又,耦合劑(G1)可以具有兩個以上選自由烷氧基、醯氧基及醇鹽基所組成之群組中的不同的官能基。選自由烷氧基、醯氧基及醇鹽基所組成之群組中的官能基,較佳是直接鍵結在選自矽原子、鋁原子、鈦原子及鋯原子中的至少一個原子上。The photosensitive resin composition preferably further contains a coupling agent (G). The coupling agent (G) includes a coupling agent (G1), and the coupling agent (G1) contains at least one atom selected from the group consisting of a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom. The coupling agent (G1) further has two or more functional groups selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. That is, the photosensitive resin composition preferably further contains a coupling agent (G), the coupling agent (G) contains a coupling agent (G1), and the coupling agent (G1) contains a member selected from the group consisting of silicon atoms, aluminum atoms, titanium atoms and zirconium atoms At least one atom in the group formed, and has two or more functional groups selected from the group consisting of alkoxy, fluorenyloxy, and alkoxide groups. The coupling agent (G1) can improve the dispersibility of the organic filler (E1) in the photosensitive resin composition by reacting or interacting with the carboxyl group-containing resin (A) and the carboxyl group contained in the organic filler (E1). Improve the rheology and stability (especially storage stability) of the photosensitive resin composition. The coupling agent (G1) may have two or more alkoxy groups, may have two or more alkoxy groups, or may have two or more alkoxide groups. The coupling agent (G1) may have two or more different functional groups selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. The functional group selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group is preferably directly bonded to at least one atom selected from a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom.

耦合劑(G1)特佳是含有矽原子。當耦合劑(G1)含有矽原子時,作為耦合劑(G1)可列舉例如:四乙氧基矽烷、四甲氧基矽烷、乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基甲基二乙氧基矽烷、乙烯基甲基二甲氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-縮水甘油氧基丙基甲基二甲氧基矽烷、3-縮水甘油氧基丙基三甲氧基矽烷、3-縮水甘油氧基丙基甲基二乙氧基矽烷、3-縮水甘油氧基丙基三乙氧基矽烷、3-縮水甘油氧基丙基甲基二甲氧基矽烷、對苯乙烯基三甲氧基矽烷、N-2-(胺乙基)-3-胺丙基甲基二甲氧基矽烷、N-2-(胺乙基)-3-胺丙基三甲氧基矽烷、3-胺丙基甲基二甲氧基矽烷、3-胺丙基甲基二乙氧基矽烷、3-胺丙基三甲氧基矽烷、3-胺丙基三乙氧基矽烷、3-(2-胺乙基胺基)丙基三乙氧基矽烷、N,N-二甲基-3-(三甲氧基矽烷基)丙胺、3-三乙氧基矽烷基-N-(1,3-二甲基亞丁基)丙胺、N-苯基-3-胺丙基三甲氧基矽烷、3-巰基丙基甲基二甲氧基矽烷、3-巰基丙基三甲氧基矽烷、3-巰基丙基三乙氧基矽烷、3-甲基丙烯醯氧基丙基甲基二甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基甲基二乙氧基矽烷、3-甲基丙烯醯氧基丙基三乙氧基矽烷、烯丙基三乙氧基矽烷、烯丙基三甲氧基矽烷、烯丙基氯二甲基矽烷、3-氯丙基三甲氧基矽烷、3-氯丙基三乙氧基矽烷、3-氯丙基二甲氧基甲基矽烷、氯甲基三乙氧基矽烷、氯甲基三甲氧基矽烷、3-氯丙基甲基二乙氧基矽烷、3-異氰酸酯丙基三乙氧基矽烷、3-丙烯醯氧基丙基三甲氧基矽烷、雙(三乙氧基矽烷丙基)四硫醚、環己基三甲氧基矽烷、甲基三乙氧基矽烷、甲基三甲氧基矽烷、乙基三乙氧基矽烷、乙基三甲氧基矽烷、己基三甲氧基矽烷、己基三乙氧基矽烷、十六烷基三甲氧基矽烷、十八烷基三乙氧基矽烷、十八烷基三甲氧基矽烷、正辛基三乙氧基矽烷、正辛基三甲氧基矽烷、十二烷基三乙氧基矽烷、十二烷基三甲氧基矽烷、丙基三甲氧基矽烷、丙基三乙氧基矽烷、苯甲基三乙氧基矽烷、甲苯基二甲氧基矽烷、甲苯基二乙氧基矽烷、苯基三乙氧基矽烷、苯基三甲氧基矽烷、對甲苯基三甲氧基矽烷、4-乙烯基苯基三甲氧基矽烷、1-萘基三甲氧基矽烷、3,3,3-三氟丙基三甲氧基矽烷、11-五氟苯氧基十一烷基三甲氧基矽烷、五氟苯基三甲氧基矽烷、11-疊氮基十一烷基三甲氧基矽烷、2-氰乙基三乙氧基矽烷、及乙烯基三乙醯氧基矽烷等。The coupling agent (G1) is particularly preferably one containing silicon atoms. When the coupling agent (G1) contains a silicon atom, examples of the coupling agent (G1) include tetraethoxysilane, tetramethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinyl Methyldiethoxysilane, vinylmethyldimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-glycidyloxypropylmethyldimethoxy Silane, 3-glycidyloxypropyltrimethoxysilane, 3-glycidyloxypropylmethyldiethoxysilane, 3-glycidyloxypropyltriethoxysilane, 3-glycidyl Oxypropylmethyldimethoxysilane, p-styryltrimethoxysilane, N-2- (aminoethyl) -3-aminopropylmethyldimethoxysilane, N-2- (amine (Ethyl) -3-aminopropyltrimethoxysilane, 3-aminopropylmethyldimethoxysilane, 3-aminopropylmethyldiethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3- (2-aminoethylamino) propyltriethoxysilane, N, N-dimethyl-3- (trimethoxysilyl) propylamine, 3 -Triethoxysilyl-N- (1,3-dimethylbutylene) propylamine, N-phenyl-3-amine Trimethoxysilane, 3-mercaptopropylmethyldimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-mercaptopropyltriethoxysilane, 3-methacryloxypropyl Methyldimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropylmethyldiethoxysilane, 3-methacryloxypropyl Triethoxysilane, allyltriethoxysilane, allyltrimethoxysilane, allylchlorodimethylsilane, 3-chloropropyltrimethoxysilane, 3-chloropropyltriethyl Oxysilane, 3-chloropropyldimethoxymethylsilane, chloromethyltriethoxysilane, chloromethyltrimethoxysilane, 3-chloropropylmethyldiethoxysilane, 3-isocyanate Propyltriethoxysilane, 3-propenyloxypropyltrimethoxysilane, bis (triethoxysilanepropyl) tetrasulfide, cyclohexyltrimethoxysilane, methyltriethoxysilane, Methyltrimethoxysilane, ethyltriethoxysilane, ethyltrimethoxysilane, hexyltrimethoxysilane, hexyltriethoxysilane, cetyltrimethoxysilane, octadecane Triethoxysilane, octadecyltrimethoxysilane, n-octyltriethoxysilane, n-octyltrimethoxysilane, dodecyltriethoxysilane, dodecyltrimethoxysilane , Propyltrimethoxysilane, propyltriethoxysilane, benzyltriethoxysilane, tolyldimethoxysilane, tolyldiethoxysilane, phenyltriethoxysilane, benzene Trimethoxysilane, p-tolyltrimethoxysilane, 4-vinylphenyltrimethoxysilane, 1-naphthyltrimethoxysilane, 3,3,3-trifluoropropyltrimethoxysilane, 11 -Pentafluorophenoxyundecyltrimethoxysilane, pentafluorophenyltrimethoxysilane, 11-azidoundecyltrimethoxysilane, 2-cyanoethyltriethoxysilane, and Vinyl triethoxysilane and the like.

當耦合劑(G1)含有鋁原子時,作為耦合劑(G1)可列舉例如:二異丙酸乙醯基烷氧基鋁、乙醯乙酸單乙酯二異丙氧基鋁、及參(乙醯乙酸乙酯)鋁等。When the coupling agent (G1) contains an aluminum atom, examples of the coupling agent (G1) include ethyl acetoxy aluminum diisopropoxide, aluminum monoethyl acetate diisopropoxide, and ginseng (ethyl醯 ethyl acetate) aluminum and the like.

當耦合劑(G1)含有鈦原子時,作為耦合劑(G1)可列舉例如:異丙基三硬脂醯基鈦、異丙基參(焦磷酸二辛酯)鈦、四辛基雙(磷酸二(十三烷酯))鈦、肆(2,2-二烯丙氧基甲基-1-丁基)磷酸雙(二(十三烷酯))鈦、雙(焦磷酸二辛酯)氧基乙酸鈦、及雙(焦磷酸二辛酯)伸乙基鈦等。When the coupling agent (G1) contains a titanium atom, examples of the coupling agent (G1) include: isopropyltristearate titanium, isopropyl ginseng (dioctyl pyrophosphate) titanium, and tetraoctylbis (phosphoric acid) Di (tridecyl ester)) titanium, bis (di (tridecyl) phosphate) (2,2-diallyloxymethyl-1-butyl) phosphate, bis (dioctyl pyrophosphate) Titanium oxyacetate, and bis (dioctyl pyrophosphate) ethylene titanate.

當耦合劑(G1)含有鋯原子時,作為耦合劑(G1)可列舉例如:四正丙醇鋯、及四正丁醇鋯。When the coupling agent (G1) contains a zirconium atom, examples of the coupling agent (G1) include zirconium tetra-n-propoxide and zirconium tetra-n-butoxide.

耦合劑(G1)較佳是含有矽原子。耦合劑(G1)藉由含有矽原子,可有效地提高感光性樹脂組成物中的有機填料(E1)的分散性。因此,感光性樹脂組成物的流變性和穩定性會進一步提升。耦合劑(G1)可以是矽烷耦合劑。The coupling agent (G1) preferably contains a silicon atom. The coupling agent (G1) can effectively improve the dispersibility of the organic filler (E1) in the photosensitive resin composition by containing a silicon atom. Therefore, the rheology and stability of the photosensitive resin composition are further improved. The coupling agent (G1) may be a silane coupling agent.

耦合劑(G1),較佳是含有選自甲氧基、乙氧基及乙醯氧基中的官能基。甲氧基、乙氧基被分類為烷氧基。又,乙醯氧基被分類為醯氧基。耦合劑(G1)可以僅含有甲氧基,可以僅含有乙氧基,亦可以僅含有醯氧基。又,耦合劑(G1)可含有選自甲氧基、乙氧基及乙醯氧基中的不同官能基。耦合劑(G1)藉由含有選自甲氧基、乙氧基及醯氧基中的官能基,會提升有機填料(E1)與耦合劑(G1)的反應性,而使感光性樹脂組成物中的有機填料(E1)變得更不容易發生凝集。因此,感光性樹脂組成物的流變性和穩定性會進一步提升。又,感光性樹脂組成物可獲得良好的解析性。The coupling agent (G1) preferably contains a functional group selected from the group consisting of a methoxy group, an ethoxy group, and an ethoxy group. Methoxy and ethoxy are classified as alkoxy. The ethoxy group is classified as a methoxy group. The coupling agent (G1) may contain only a methoxy group, only an ethoxy group, or only a fluorenyl group. The coupling agent (G1) may contain different functional groups selected from the group consisting of methoxy, ethoxy, and ethoxy. The coupling agent (G1) contains a functional group selected from the group consisting of a methoxy group, an ethoxy group, and a fluorenyl group, thereby improving the reactivity of the organic filler (E1) and the coupling agent (G1), thereby making the photosensitive resin composition The organic filler (E1) becomes less prone to agglutination. Therefore, the rheology and stability of the photosensitive resin composition are further improved. In addition, the photosensitive resin composition can obtain good resolution.

耦合劑(G1)較佳是含有2~4個選自烷氧基、醯氧基及醇鹽基中的官能基。耦合劑(G1)可含有2~4個烷氧基,可含有2~4個醯氧基,可含有2~4個醇鹽基。例如,耦合劑(G1)可含有2~4個甲氧基,可含有2~4個乙氧基,可含有2~4個乙醯氧基。又,耦合劑(G1)可含有2~4個選自烷氧基、醯氧基及醇鹽基中的不同的官能基。耦合劑(G1)藉由含有2~4個選自烷氧基、醯氧基及醇鹽基中的官能基,能夠抑制由於有機填料(E1)與耦合劑(G1)的反應所造成的過剩的交聯反應,而能夠使感光性樹脂組成物中的有機填料(E1)的分散性提升並同時抑制凝膠化。The coupling agent (G1) preferably contains 2 to 4 functional groups selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. The coupling agent (G1) may contain 2 to 4 alkoxy groups, may contain 2 to 4 alkoxy groups, and may contain 2 to 4 alkoxide groups. For example, the coupling agent (G1) may contain 2 to 4 methoxy groups, may contain 2 to 4 ethoxy groups, and may contain 2 to 4 ethoxy groups. The coupling agent (G1) may contain 2 to 4 different functional groups selected from alkoxy, fluorenyl, and alkoxide groups. The coupling agent (G1) can contain an excess of 2 to 4 functional groups selected from the group consisting of alkoxy, fluorenyloxy, and alkoxide groups, which can be caused by the reaction between the organic filler (E1) and the coupling agent (G1). The cross-linking reaction can improve the dispersibility of the organic filler (E1) in the photosensitive resin composition and suppress gelation at the same time.

耦合劑(G1),較佳是具有選自由胺基、環氧基、乙烯基、(甲基)丙烯酸基、巰基、異氰酸酯基及硫醚基所組成之群組中的至少一種官能基。耦合劑(G1)藉由含有選自由胺基、環氧基、乙烯基、(甲基)丙烯酸基、巰基、異氰酸酯基及硫醚基中的至少一種官能基,而能夠與有機填料(E1)中所包含的羧基進行反應,而進一步效率良好地提高感光性樹脂組成物中的有機填料(E1)的分散性。因此,感光性樹脂組成物的流變性、穩定性(特別是保存穩定性)及解析性會進一步提升。The coupling agent (G1) preferably has at least one functional group selected from the group consisting of an amine group, an epoxy group, a vinyl group, a (meth) acrylic group, a mercapto group, an isocyanate group, and a thioether group. The coupling agent (G1) can interact with the organic filler (E1) by containing at least one functional group selected from the group consisting of an amine group, an epoxy group, a vinyl group, a (meth) acrylic group, a mercapto group, an isocyanate group, and a thioether group. The carboxyl group contained in the reaction proceeds to further improve the dispersibility of the organic filler (E1) in the photosensitive resin composition with good efficiency. Therefore, the rheology, stability (especially storage stability) and resolution of the photosensitive resin composition are further improved.

當耦合劑(G1)含有胺基時,胺基例如可導入胺烷基。又,當耦合劑(G1)含有環氧基時,環氧基例如可導入縮水甘油氧基。當耦合劑(G1)含有乙烯基時,乙烯基例如可直接鍵結在矽原子。耦合劑(G1)藉由具有胺基、環氧基或乙烯基,可提高與有機填料(E1)的反應性,而進一步效率良好地提高感光性樹脂組成物中的有機填料(E1)的分散性。耦合劑(G1)較佳是具有環氧基或乙烯基。藉由耦合劑(G1)具有環氧基或乙烯基,感光性樹脂組成物的線間絕緣性會提高,而穩定性會進一步提升。When the coupling agent (G1) contains an amine group, for example, an amine group can be introduced into the amine group. When the coupling agent (G1) contains an epoxy group, for example, an epoxy group can be introduced into a glycidyloxy group. When the coupling agent (G1) contains a vinyl group, the vinyl group can be directly bonded to a silicon atom, for example. The coupling agent (G1) can improve the reactivity with the organic filler (E1) by having an amine group, an epoxy group or a vinyl group, and further improve the dispersion of the organic filler (E1) in the photosensitive resin composition efficiently. Sex. The coupling agent (G1) preferably has an epoxy group or a vinyl group. When the coupling agent (G1) has an epoxy group or a vinyl group, the insulation between the wires of the photosensitive resin composition is improved, and the stability is further improved.

耦合劑(G),可進一步包含耦合劑(G1)以外的耦合劑。前述耦合劑(G1)以外的耦合劑,可不含有選自由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中的至少一種原子。耦合劑(G1)以外的耦合劑,可不具有兩個以上選自烷氧基、醯氧基及醇鹽基中的官能基。其中,從效率良好地獲得有機填料(E1)的分散性的觀點、以及使感光性樹脂組成物的流變性及穩定性提升的觀點來看,感光性樹脂組成物可不含耦合劑(G1)以外的耦合劑。The coupling agent (G) may further include a coupling agent other than the coupling agent (G1). The coupling agent other than the coupling agent (G1) may not contain at least one atom selected from the group consisting of a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom. The coupling agent other than the coupling agent (G1) may not have two or more functional groups selected from the group consisting of an alkoxy group, a fluorenyloxy group, and an alkoxide group. Among them, the photosensitive resin composition may not contain other than the coupling agent (G1) from the viewpoint of efficiently obtaining the dispersibility of the organic filler (E1) and from the viewpoint of improving the rheology and stability of the photosensitive resin composition. Couplant.

耦合劑(G)可以僅包含耦合劑(G1)、或可含有耦合劑(G1)與耦合劑(G1)以外的耦合劑。耦合劑(G)較佳是含有30質量%以上的耦合劑(G1),更佳是含有50質量%以上,進一步較佳是含有100質量%。此時,尤其能夠使感光性樹脂組成物中的有機填料(E)的分散性提升。The couplant (G) may include only the couplant (G1), or may include a couplant (G1) and a couplant other than the couplant (G1). The coupling agent (G) preferably contains 30% by mass or more of the coupling agent (G1), more preferably contains 50% by mass or more, and even more preferably 100% by mass. In this case, the dispersibility of the organic filler (E) in the photosensitive resin composition can be particularly improved.

感光性樹脂組成物中的成分的量,能夠以感光性樹脂組成物具有光硬化性並且能夠以鹼性溶液進行顯影的方式來適當調整。The amount of the components in the photosensitive resin composition can be appropriately adjusted so that the photosensitive resin composition has photocurability and can be developed in an alkaline solution.

相對於感光性樹脂組成物的固體成分量,含羧基樹脂(A)的量較佳是5質量%以上且85質量%以下,更佳是10質量%以上且75質量%以下,進一步較佳是30質量%以上且60質量%以下。又,相對於感光性樹脂組成物的固體成分量,含羧基樹脂(A1)的量較佳是5質量%以上且85質量%以下,更佳是10質量%以上且75質量%以下,進一步較佳是30質量%以上且60質量%以下。The amount of the carboxyl group-containing resin (A) is preferably 5 mass% or more and 85 mass% or less, more preferably 10 mass% or more and 75 mass% or less with respect to the solid content of the photosensitive resin composition, and more preferably 30 mass% or more and 60 mass% or less. In addition, the amount of the carboxyl group-containing resin (A1) is preferably 5 mass% or more and 85 mass% or less, more preferably 10 mass% or more and 75 mass% or less with respect to the solid content of the photosensitive resin composition. It is preferably 30% by mass or more and 60% by mass or less.

相對於含羧基樹脂(A),不飽和化合物(B)的量較佳是1質量%以上且50質量%以下,更佳是10質量%以上且45質量%以下,進一步較佳是在21質量%以上且40質量%以下的範圍內。The amount of the unsaturated compound (B) relative to the carboxyl group-containing resin (A) is preferably 1% by mass or more and 50% by mass or less, more preferably 10% by mass or more and 45% by mass or less, and still more preferably 21% by mass. % To 40% by mass.

相對於含羧基樹脂(A),光聚合起始劑(C)的量較佳是0.1質量%以上且30質量%以下,更佳是1質量%以上且25質量%以下。The amount of the photopolymerization initiator (C) relative to the carboxyl group-containing resin (A) is preferably 0.1% by mass or more and 30% by mass or less, and more preferably 1% by mass or more and 25% by mass or less.

有關環氧化合物(D)的量,相對於含羧基樹脂(A)所包含的1當量的羧基,環氧化合物(D)所包含的環氧基的當量合計較佳是0.7以上且2.5以下,更佳是0.7以上且2.3以下,進一步較佳是0.7以上且2.0以下。又,相對於含羧基樹脂(A)所包含的1當量的羧基,結晶性環氧樹脂(D1)所包含的環氧基的當量合計較佳是0.1以上且2.0以下,更佳是0.2以上且1.9以下,進一步較佳是0.3以上且1.5以下。或者,相對於含羧基樹脂(A)所包含的1當量的羧基,結晶性環氧樹脂(D1)所包含的環氧基的當量合計可以是0.7以上且2.5以下。The amount of the epoxy compound (D) is preferably 0.7 or more and 2.5 or less, based on 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). It is more preferably 0.7 or more and 2.3 or less, and still more preferably 0.7 or more and 2.0 or less. The total equivalent weight of the epoxy group contained in the crystalline epoxy resin (D1) is preferably 0.1 or more and 2.0 or less, and more preferably 0.2 or more and 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A). 1.9 or less, more preferably 0.3 or more and 1.5 or less. Alternatively, the total equivalent weight of the epoxy group contained in the crystalline epoxy resin (D1) may be 0.7 or more and 2.5 or less with respect to 1 equivalent of the carboxyl group contained in the carboxyl group-containing resin (A).

當將含羧基樹脂(A)的含量設為100質量份時,有機填料(E)的含量較佳是1質量份以上且40質量份以下。藉由有機填料(E)的含量設在該範圍內,感光性樹脂組成物的流變性會提高,而穩定性會提升。又,能夠將感光性樹脂組成物的硬化物的表面進行適度地粗糙化,藉此能夠提升硬化物的粗糙面與鍍覆層的密合性。當將含羧基樹脂(A)的含量設為100質量份時,有機填料(E)的含量更佳是5質量份以上且20質量份以下,進一步較佳是10質量份以上且17質量份以下。相對於感光性樹脂組成物的固體成分量,有機填料(E1)的含量較佳是1質量%以上且25質量%以下。若在該範圍內,便能夠對由感光性樹脂組成物所形成的硬化物賦予解析性,進一步,當在對在該硬化物中已賦予粗糙面的硬化物層實施鍍覆處理而形成鍍覆層時,能夠使其硬化物層與鍍覆層的密合性進一步提升。有機填料(E1)的含量更佳是2質量%以上且20質量%以下,進一步較佳是3質量%以下且18質量%以下。特佳是4質量%以上且16質量%以下。當將含羧基樹脂(A)的含量設為100質量份時,橡膠成分的含量較佳是在1~40質量份的範圍內,更佳是在5~20質量份的範圍內,進一步較佳是在10~17質量份。When the content of the carboxyl group-containing resin (A) is 100 parts by mass, the content of the organic filler (E) is preferably 1 part by mass or more and 40 parts by mass or less. When the content of the organic filler (E) is set within this range, the rheology of the photosensitive resin composition is improved, and the stability is improved. Moreover, the surface of the hardened | cured material of the photosensitive resin composition can be moderately roughened, and the adhesiveness of the rough surface of a hardened | cured material and a plating layer can be improved by this. When the content of the carboxyl group-containing resin (A) is 100 parts by mass, the content of the organic filler (E) is more preferably 5 parts by mass or more and 20 parts by mass or less, and still more preferably 10 parts by mass or more and 17 parts by mass or less. . The content of the organic filler (E1) is preferably 1% by mass or more and 25% by mass or less based on the solid content of the photosensitive resin composition. Within this range, it is possible to impart resolution to a hardened material formed of a photosensitive resin composition, and further, to perform plating treatment on a hardened material layer having a roughened surface provided in the hardened material to form a plating. When it is laminated, the adhesion between the hardened material layer and the plating layer can be further improved. The content of the organic filler (E1) is more preferably 2% by mass or more and 20% by mass or less, and still more preferably 3% by mass or less and 18% by mass or less. Particularly preferred is 4% by mass or more and 16% by mass or less. When the content of the carboxyl group-containing resin (A) is 100 parts by mass, the content of the rubber component is preferably within a range of 1 to 40 parts by mass, more preferably within a range of 5 to 20 parts by mass, and further preferably It is 10 to 17 parts by mass.

相對於含羧基樹脂(A),三氮雜苯樹脂(F)的含量較佳是0.5質量%以上且20質量%以下。若在該範圍內,當將粗糙面賦予在感光性樹脂組成物的硬化物上時,能夠進一步抑制此時的硬化物層的厚度減少的情況,並能夠進一步抑制粗糙化處理後的表面變得不均勻的情況。又,若在該範圍內,能夠維持由感光性樹脂組成物所構成得硬化物的解析性。進一步,當對在該硬化物中已賦予粗糙面的硬化物層實施鍍覆處理而形成鍍覆層時,能夠使其硬化物層與鍍覆層的密合性更加提升。三氮雜苯樹脂(F)的含量更佳是1質量%以上且18質量%以下,進一步較佳是1.5質量%以上且15質量%以下,特佳是2質量%以上且12質量%以下。The content of the triazabenzene resin (F) relative to the carboxyl group-containing resin (A) is preferably 0.5% by mass or more and 20% by mass or less. Within this range, when a roughened surface is provided on the hardened body of the photosensitive resin composition, the thickness of the hardened body layer at this time can be further suppressed, and the surface after the roughening treatment can be further suppressed. Uneven situation. Moreover, if it is this range, the resolution of the hardened | cured material which consists of a photosensitive resin composition can be maintained. Furthermore, when the hardened | cured material layer which has been provided with the rough surface in this hardened | cured material is plated, and a plating layer is formed, the adhesiveness of a hardened | cured material layer and a plating layer can be improved more. The content of the triazabenzene resin (F) is more preferably 1% by mass or more and 18% by mass or less, further preferably 1.5% by mass or more and 15% by mass or less, and particularly preferably 2% by mass or more and 12% by mass or less.

當感光性樹脂組成物含有耦合劑(G)時,當將含羧基樹脂(A)的含量設為100質量份時,耦合劑(G)的含量較佳是0.01質量份以上且7質量份以下。藉由耦合劑(G)的含量設在該範圍內,可防止感光性樹脂組成物中的有機填料(E)的凝集,而分散性會提升。當將有機填料(E)的含量設為100質量份時,耦合劑(G)的含量更佳是0.05質量份以上且5質量份以下。又,將含羧基樹脂(A)的含量設為100質量份時,耦合劑(G1)的含量較佳是0.01質量份以上且7質量份以下。藉由耦合劑(G1)的含量設在該範圍內,可效率良好地防止感光性樹脂組成物中的有機填料(E)的凝集,而分散性會有效地提升。當將有機填料(E1)的含量設為100質量份時,耦合劑(G1)的含量更佳是0.05質量份以上且5質量份以下。When the photosensitive resin composition contains a coupling agent (G), when the content of the carboxyl group-containing resin (A) is 100 parts by mass, the content of the coupling agent (G) is preferably 0.01 parts by mass or more and 7 parts by mass or less . When the content of the coupling agent (G) is set within this range, aggregation of the organic filler (E) in the photosensitive resin composition can be prevented, and dispersibility can be improved. When the content of the organic filler (E) is 100 parts by mass, the content of the coupling agent (G) is more preferably 0.05 parts by mass or more and 5 parts by mass or less. When the content of the carboxyl group-containing resin (A) is 100 parts by mass, the content of the coupling agent (G1) is preferably 0.01 parts by mass or more and 7 parts by mass or less. When the content of the coupling agent (G1) is set within this range, aggregation of the organic filler (E) in the photosensitive resin composition can be effectively prevented, and dispersibility can be effectively improved. When the content of the organic filler (E1) is 100 parts by mass, the content of the coupling agent (G1) is more preferably 0.05 parts by mass or more and 5 parts by mass or less.

當感光性樹脂組成物含有溶劑(H)時,溶劑(H)的量可依據三氮雜苯樹脂(F)的特性來適當調整。例如,能夠以當將由感光性樹脂組成物所形成的塗膜乾燥時使快速地溶劑(H)揮發不見,亦即使溶劑不殘留在乾燥膜中的方式來調整。相對於感光性樹脂組成物整體,溶劑(H)的量較佳是在大於0質量%且99.5質量%以下的範圍內,更佳是在15質量%以上且60質量%以下的範圍內。再者,有機溶劑的適合的比例,會因為感光性樹脂組成物的調整方法、塗佈方法等而不同,所以較佳是依據其調整方法、塗佈方法等來適當調整為適當比例。When the photosensitive resin composition contains a solvent (H), the amount of the solvent (H) can be appropriately adjusted depending on the characteristics of the triazabenzene resin (F). For example, it can adjust so that the solvent (H) may be rapidly evaporated when a coating film formed from a photosensitive resin composition is dried, and even if a solvent does not remain in a dry film. The amount of the solvent (H) is preferably in the range of more than 0% by mass and 99.5% by mass or less, and more preferably in the range of 15% by mass or more and 60% by mass or less with respect to the entire photosensitive resin composition. The appropriate ratio of the organic solvent varies depending on the method of adjusting the photosensitive resin composition, the method of coating, and the like. Therefore, it is preferable to appropriately adjust the ratio to the appropriate ratio according to the method of adjusting, the method of coating, and the like.

再者,所謂的固體成分量,是指自感光性樹脂組成物去除溶劑等的揮發性成分後的總成分的合計量。The term “solid content” refers to the total amount of the total components after removing volatile components such as solvents from the photosensitive resin composition.

在不妨礙本實施形態的效果的範圍內,感光性樹脂組成物可以進一步含有上述成分以外的成分。The photosensitive resin composition may further contain components other than the above components within a range that does not impede the effects of the present embodiment.

感光性樹脂組成物可含有無機填料。此時,會降低由感光性樹脂組成物所形成的膜的硬化收縮。無機填料,能夠含有例如選自由下述材料所組成之群組中的一種以上:硫酸鋇、結晶性氧化矽、奈米氧化矽、奈米碳管、滑石、皂土、水滑石、氫氧化鋁、氫氧化鎂、及氧化鈦。當無機填料含有氧化鈦、氧化鋅等的白色材料時,能夠利用前述白色材料使感光性樹脂組成物及其硬化物白色化。感光性樹脂組成物中的無機填料的比例可適當設定,但是較佳是在相對於含羧基樹脂(A)為0~300質量%的範圍內。The photosensitive resin composition may contain an inorganic filler. In this case, the curing shrinkage of the film formed of the photosensitive resin composition is reduced. The inorganic filler can contain, for example, one or more members selected from the group consisting of barium sulfate, crystalline silica, nano silica, nano carbon tubes, talc, bentonite, hydrotalcite, and aluminum hydroxide , Magnesium hydroxide, and titanium oxide. When the inorganic filler contains a white material such as titanium oxide and zinc oxide, the photosensitive resin composition and the cured product thereof can be whitened by the white material. The proportion of the inorganic filler in the photosensitive resin composition can be appropriately set, but it is preferably within a range of 0 to 300% by mass based on the carboxyl group-containing resin (A).

感光性樹脂組成物可含有選自由下述樹脂所組成之群組中的至少一種:經以己內醯胺、肟(oxime)、丙二酸酯等來封端的甲苯二異氰酸酯系、嗎啉二異氰酸酯系、異佛酮二異氰酸酯系、及六亞甲基二異氰酸酯系等的經封端的異氰酸酯;丁基化尿素樹脂;前述以外的各種熱硬化性樹脂;紫外線硬化性環氧基(甲基)丙烯酸酯;使(甲基)丙烯酸加成在雙酚A型、苯酚酚醛清漆型、甲酚酚醛清漆型、脂環型等的環氧樹脂上而得的樹脂;及,鄰苯二甲酸二烯丙酯樹脂、苯氧樹脂、胺酯樹脂、氟樹脂等的高分子化合物。The photosensitive resin composition may contain at least one selected from the group consisting of toluene diisocyanate-based capped with caprolactam, oxime, malonate, etc., and morpholine diisocyanate. Blocked isocyanates such as isocyanate, isophorone diisocyanate, and hexamethylene diisocyanate; butylated urea resins; various thermosetting resins other than the above; UV-curable epoxy (methyl) Acrylates; resins obtained by adding (meth) acrylic acid to epoxy resins such as bisphenol A type, phenol novolac type, cresol novolac type, and alicyclic type; and phthalic dienes Polymer compounds such as propyl resin, phenoxy resin, amine ester resin, and fluororesin.

感光性樹脂組成物可含有硬化劑,該硬化劑是用以使環氧化合物(D)硬化。硬化劑能夠含有例如選自由下述成分所組成之群組中的至少一種:咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等的咪唑衍生物;二氰二胺、苯甲基二甲胺、4-(二甲胺基)-N,N-二甲基苯甲胺、4-甲氧基-N,N-二甲基苯甲胺、4-甲基-N,N-二甲基苯甲胺等的胺化合物;己二醯肼、癸二醯肼等的醯肼化合物;三苯膦等的磷化合物;酸酐;苯酚;硫醇;路易斯酸胺錯合物;及,鎓鹽。該等成分的市售物可舉例如:四國化成股份有限公司製的2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(皆為咪唑系化合物的商品名);San-Apro股份有限公司製的U-CAT3503N、U-CAT3502T(皆為二甲胺的封端異氰酸酯化合物的商品名);DBU、DBN、U-CATSA102、U-CAT5002(皆為二環式脒(amidine)化合物及其鹽)。The photosensitive resin composition may contain a hardener for hardening an epoxy compound (D). The hardener can contain, for example, at least one selected from the group consisting of imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole , 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole, and other imidazole derivatives; dicyandiamine, Benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4-methyl-N , Amine compounds such as N-dimethylbenzylamine; hydrazine compounds such as hexamethylene hydrazine and sebacic acid; phosphorus compounds such as triphenylphosphine; acid anhydrides; phenols; thiols; ; And, onium salts. Examples of commercially available products of these ingredients include: 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (all are trade names of imidazole compounds) manufactured by Shikoku Chemical Co., Ltd .; manufactured by San-Apro Co., Ltd. U-CAT3503N, U-CAT3502T (both are the trade names of blocked isocyanate compounds of dimethylamine); DBU, DBN, U-CATSA102, U-CAT5002 (all are amidine compounds and their salts) .

感光性樹脂組成物可含有三氮雜苯樹脂(F)以外的密合性賦予劑。作為密合性賦予劑可列舉例如:乙胍嗪(acetoguanamine,2,4-二胺基-6-甲基-1,3,5-三氮雜苯)和苯胍嗪(benzoguanamine,2,4-二胺基-6-苯基-1,3,5-三氮雜苯)等的胍嗪衍生物;及,2,4-二胺基-6-甲基丙烯醯氧基乙基-s-三氮雜苯、2-乙烯基-4,6-二胺基-s-三氮雜苯、2-乙烯基-4,6-二胺基-s-三氮雜苯‧異氰脲酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-s-三氮雜苯‧異氰脲酸加成物等的s-三氮雜苯衍生物。The photosensitive resin composition may contain an adhesion-imparting agent other than the triazabenzene resin (F). Examples of the adhesiveness-imparting agent include acetoguanamine (2,4-diamino-6-methyl-1,3,5-triazabenzene) and benzoguanamine (2,4) -Diamino-6-phenyl-1,3,5-triazabenzene) and other guanazine derivatives; and 2,4-diamino-6-methacryloxyethyl-s -Triazabenzene, 2-vinyl-4,6-diamino-s-triazabenzene, 2-vinyl-4,6-diamin-s-triazabenzene, isocyanuric acid S-triazabenzene derivatives such as adducts, 2,4-diamino-6-methacryloxyethyl-s-triazabenzene, isocyanuric acid adducts, and the like.

感光性樹脂組成物可在不妨礙本發明的效果的範圍內含有三聚氰胺,但是較佳是不含有三聚氰胺。再者,當含有三聚氰胺時,將含羧基樹脂(A)的含量設為100質量份時,三聚氰胺的含量較佳是0.1質量%以上且6質量%以下。The photosensitive resin composition may contain melamine within a range that does not inhibit the effect of the present invention, but it is preferable that it does not contain melamine. When melamine is contained, when the content of the carboxyl group-containing resin (A) is 100 parts by mass, the content of melamine is preferably 0.1% by mass or more and 6% by mass or less.

感光性樹脂組成物可含有流變控制劑。藉由流變控制劑,感光性樹脂組成物的黏性會變得適當。作為流變控制劑,可列舉例如:尿素改質中極性聚醯胺(BIGCHEMI JAPAN股份有限公司製造的型號BYK-430、BYK-431)、聚羥基羧酸醯胺(BIGCHEMI JAPAN股份有限公司製造的型號BYK-405)、改質尿素(BIGCHEMI JAPAN股份有限公司製造的型號BYK-410、BYK-411、BYK-420)、高分子尿素衍生物(BIGCHEMI JAPAN股份有限公司製造的型號BYK-415)、尿素改質胺酯(BIGCHEMI JAPAN股份有限公司製造的型號BYK-425)、聚胺酯(BIGCHEMI JAPAN股份有限公司製造的型號BYK-428)蓖麻油蠟、聚乙烯蠟、聚醯胺蠟、皂土、二氧化矽、二氧化矽凝膠、高嶺土、黏土。其中,感光性樹脂組成物藉由有機填料(E1)可獲得更加適當化的黏性。因此,感光性樹脂組成物可以不含有流變控制劑。The photosensitive resin composition may contain a rheology control agent. With the rheology control agent, the viscosity of the photosensitive resin composition becomes appropriate. Examples of the rheology controlling agent include polar polyamidonium (models BYK-430 and BYK-431 manufactured by Bigchemi Japan Co., Ltd.) and polyhydroxycarboxamide (manufactured by Bigchemi Japan Co., Ltd.) in urea modification. Model BYK-405), modified urea (models BYK-410, BYK-411, BYK-420 manufactured by Bigchemi Japan Co., Ltd.), polymer urea derivatives (model BYK-415 manufactured by Bigchemi Japan Co., Ltd.), Urea modified amine ester (model BYK-425 manufactured by Bigchemi Japan Co., Ltd.), polyurethane (model BYK-428 manufactured by Bigchemi Japan Co., Ltd.) castor oil wax, polyethylene wax, polyamide wax, bentonite, two Silica, silica gel, kaolin, clay. Among these, the photosensitive resin composition can obtain more suitable viscosity by using the organic filler (E1). Therefore, the photosensitive resin composition may not contain a rheology control agent.

感光性樹脂組成物可含有選自由下述成分所組成之群組中的至少一種:硬化促進劑;著色劑;矽氧、丙烯酸酯等的共聚物;塗平(leveling)劑;觸變劑;聚合抑制劑;防光暈劑;阻燃劑;消泡劑;抗氧化劑;界面活性劑;顏料;及,高分子分散劑。The photosensitive resin composition may contain at least one selected from the group consisting of: a hardening accelerator; a colorant; a copolymer of silicone, acrylate, and the like; a leveling agent; a thixotropic agent; Polymerization inhibitors; anti-halation agents; flame retardants; defoamers; antioxidants; surfactants; pigments; and polymer dispersants.

為了調製本實施形態的感光性樹脂組成物,例如混合感光性樹脂組成物的原料,並藉由例如使用三輥研磨機、球磨機、砂磨機等的習知揉合方法來揉合,便能夠調製感光性樹脂組成物。當原料中含有液狀的成分、黏度低的成分等時,可藉由下述方式調製感光性樹脂組成物:首先將原料中的除了液狀的成分、黏度低的成分以外的部分揉合來調製成混合物後,在所獲得的混合物中加入液狀的成分、黏度低的成分並混合。當感光性樹脂組成物包含溶劑(H)時,可將部分或全部的溶劑(H)的與三氮雜苯樹脂(F)混合後再與其餘原料進行混合。In order to prepare the photosensitive resin composition of the present embodiment, for example, the raw materials of the photosensitive resin composition are mixed and kneaded by a conventional kneading method using, for example, a three-roll mill, a ball mill, or a sand mill. A photosensitive resin composition is prepared. When the raw material contains a liquid component, a low viscosity component, etc., the photosensitive resin composition can be prepared in the following manner: First, knead a portion of the raw material other than the liquid component and the low viscosity component. After being prepared into a mixture, a liquid component and a component having a low viscosity are added to the obtained mixture and mixed. When the photosensitive resin composition contains a solvent (H), a part or all of the solvent (H) may be mixed with the triazabenzene resin (F) and then mixed with the remaining raw materials.

考慮保存穩定性等,可以藉由混合部分的感光性樹脂組成物的成分來調製第一劑,並藉由混合其餘成分來調製成第二劑。亦即,感光性樹脂組成物可具備第一劑與第二劑。此時,例如感光性樹脂組成物的成分中,可以藉由預先使不飽和化合物(B)、部分的溶劑(H)及熱硬化性成分混合並分散來調製第一劑,並藉由使感光性樹脂組成物的成分中的其餘部分混合並分散來調製第二劑。此時,適時地混合需要量的第一劑與第二劑來調製混合液,並且使該混合液硬化便能夠獲得硬化物。In consideration of storage stability and the like, the first agent can be prepared by mixing the components of the photosensitive resin composition, and the second agent can be prepared by mixing the remaining components. That is, the photosensitive resin composition may include a first agent and a second agent. At this time, for example, among the components of the photosensitive resin composition, the first agent can be prepared by mixing and dispersing the unsaturated compound (B), a part of the solvent (H), and the thermosetting component in advance, and by light-sensitive The rest of the components of the resin composition are mixed and dispersed to prepare a second agent. At this time, a required amount of the first agent and the second agent are mixed in a timely manner to prepare a mixed liquid, and the hardened body can be obtained by hardening the mixed liquid.

本實施形態中的感光性樹脂組成物,適於印刷線路板用的電絕緣性材料。感光性樹脂組成物尤其適於電絕緣性層的材料,該電絕緣性層是阻焊劑層、鍍抗蝕層、抗蝕劑層、層間絕緣層等。The photosensitive resin composition in this embodiment is suitable for an electrically insulating material for a printed wiring board. The photosensitive resin composition is particularly suitable for a material of an electrically insulating layer, which is a solder resist layer, a resist plating layer, a resist layer, an interlayer insulating layer, and the like.

本實施形態中的感光性樹脂組成物,較佳是即便是厚度25μm的覆膜,仍具有能夠以碳酸鈉水溶液進行顯影這樣的性質。此時,因為能夠利用光微影法由感光性樹脂組成物來製作充分厚的電絕緣性的層,故能夠廣泛地應用於用以製作印刷線路板中的層間絕緣層、阻焊劑層等。理所當然,亦能夠由感光性樹脂組成物來製作厚度薄於25μm的電絕緣性的層。The photosensitive resin composition in this embodiment preferably has a property that it can be developed with a sodium carbonate aqueous solution even if it is a film having a thickness of 25 μm. At this time, since a sufficiently thick electrically insulating layer can be produced from a photosensitive resin composition by a photolithography method, it can be widely used for producing an interlayer insulating layer, a solder resist layer, and the like in a printed wiring board. As a matter of course, an electrically insulating layer having a thickness of less than 25 μm can also be produced from the photosensitive resin composition.

厚度25μm的覆膜是否能夠以碳酸鈉水溶液進行顯影,能夠利用以下的方法來確認。藉由在適當的基材上塗佈感光性樹脂組成物而形成濕潤塗膜,將該濕潤塗膜在80℃中加熱40分鐘,藉此形成厚度25μm的覆膜。以負型遮罩直接緊貼在該覆膜上的狀態,在500mJ/cm2 的條件下對覆膜照射紫外線來實行曝光,該負型遮罩具有紫外線可穿透的曝光部與可遮蔽紫外線的非曝光部。曝光後,以0.2MPa的噴射壓力對覆膜噴射30℃的1%Na2 CO3 水溶液90秒鐘,再以0.2MPa的噴射壓力實行噴射純水90秒鐘的處理。在該處理後觀察覆膜的結果,當確認到對應於覆膜中的非曝光部的部分被去除而無法辨識到殘渣時,便判斷為厚度25μm的覆膜能夠以碳酸鈉水溶液進行顯影。再者,針對其他厚度(例如30μm)的覆膜,亦能夠同樣地確認是否能夠以碳酸鈉水溶液進行顯影。Whether a film having a thickness of 25 μm can be developed with an aqueous sodium carbonate solution can be confirmed by the following method. A wet coating film was formed by coating a photosensitive resin composition on an appropriate substrate, and the wet coating film was heated at 80 ° C. for 40 minutes to form a coating film having a thickness of 25 μm. The negative mask is directly attached to the film, and the film is irradiated with ultraviolet rays under the condition of 500 mJ / cm 2 to perform exposure. The negative mask has an ultraviolet-transmissive exposure portion and can block ultraviolet rays. Non-exposed section. After the exposure, the film was sprayed with a 1% Na 2 CO 3 aqueous solution at 30 ° C. for 90 seconds at a spray pressure of 0.2 MPa, and then sprayed with pure water for 90 seconds at a spray pressure of 0.2 MPa. As a result of observing the coating film after this treatment, when it was confirmed that the portion corresponding to the non-exposed portion in the coating film was removed and no residue could be recognized, it was determined that the coating film having a thickness of 25 μm could be developed with an aqueous sodium carbonate solution. In addition, it is possible to similarly confirm whether or not development can be performed with a sodium carbonate aqueous solution for a film having another thickness (for example, 30 μm).

以下,參照第1圖A~第1圖E來說明藉由本實施形態的具備有由感光性樹脂組成物所形成的層間絕緣層之印刷線路板的製造方法的一例。本方法中,是利用光微影法來於層間絕緣層中形成貫穿孔。Hereinafter, an example of a method for manufacturing a printed wiring board including an interlayer insulating layer formed of a photosensitive resin composition according to the present embodiment will be described with reference to FIGS. 1A to 1E. In this method, a photolithography method is used to form a through hole in the interlayer insulating layer.

首先,準備如第1圖A所示的芯材1。芯材1具備例如至少一絕緣層2與至少一導體線路3。以下,將被設置在芯材1的其中一面上的導體線路3稱為第一導體線路3。如第1圖B所示,在芯材1的其中一面上由感光性樹脂組成物形成覆膜4。覆膜4的形成方法,例如有塗佈法與乾膜法。First, the core material 1 shown in FIG. 1A is prepared. The core material 1 includes, for example, at least one insulating layer 2 and at least one conductor line 3. Hereinafter, the conductor line 3 provided on one surface of the core material 1 is referred to as a first conductor line 3. As shown in FIG. 1B, the coating film 4 is formed of a photosensitive resin composition on one surface of the core material 1. Methods for forming the coating film 4 include, for example, a coating method and a dry film method.

塗佈法,例如將感光性樹脂組成物塗佈在芯材1上來形成濕潤塗膜。感光性樹脂組成物的塗佈方法可選自由習知的方法所組成的群組,例如:浸漬法、噴霧法、旋轉塗佈法、輥塗佈法、簾幕塗佈法、及網版印刷法。繼而,為了使感光性樹脂組成物中的有機溶劑揮發,能夠在例如60~120℃的範圍內的溫度使濕潤塗膜乾燥,藉此獲得覆膜4。The coating method is, for example, applying a photosensitive resin composition to the core material 1 to form a wet coating film. The coating method of the photosensitive resin composition may be selected from a group consisting of a conventionally known method, such as a dipping method, a spray method, a spin coating method, a roll coating method, a curtain coating method, and a screen printing method. law. Then, in order to volatilize the organic solvent in the photosensitive resin composition, the wet coating film can be dried at a temperature in a range of, for example, 60 to 120 ° C. to obtain the coating film 4.

乾膜法,首先將感光性樹脂組成物塗佈於聚酯等製成的適當的支撐體上後再進行乾燥,藉此在支撐體上形成感光性樹脂組成物的乾燥物也就是乾膜。藉此,獲得一種積層體(附有支撐體之乾膜),其具備:乾膜;及,支撐體,其是用以支撐乾膜。將該積層體中的乾膜重疊在芯材1後,對乾膜與芯材1施加壓力,繼而自乾膜將支撐體剝離,藉此將乾膜自支撐體上轉印至芯材1上。藉此,於芯材1上設置由乾膜所構成之覆膜4。In the dry film method, a photosensitive resin composition is first coated on an appropriate support made of polyester or the like and then dried, thereby forming a dried film of the photosensitive resin composition on the support, that is, a dry film. Thereby, a laminated body (a dry film with a support) is provided, which includes: a dry film; and a support, which is used to support the dry film. After the dry film in the laminated body is superposed on the core material 1, pressure is applied to the dry film and the core material 1, and then the support is peeled from the dry film, thereby transferring the dry film from the support to the core material 1. . Thereby, a cover film 4 made of a dry film is provided on the core material 1.

藉由將覆膜4進行曝光,而像第1圖C所示地這樣將覆膜4部分地進行硬化。因此,例如將負型遮罩緊貼在覆膜4後,對覆膜4照射紫外線。負型遮罩具備:使紫外線可穿透的曝光部、及遮蔽紫外線的非曝光部,非曝光部是設置於與貫穿孔10的位置相符的位置。負型遮罩為例如:遮罩薄膜、乾板等光掩膜(photo tool)。紫外線的光源是例如選自:化學燈、低壓水銀燈、中壓水銀燈、高壓水銀燈、超高壓水銀燈、氙氣燈、金屬鹵化物燈、發光二極體(LED)、釔鋁石榴石雷射(YAG)、g射線(436 nm)、h射線(405 nm)、i射線(365 nm);及,由g射線、h射線及i射線所組成之群組中的兩種以上的組合。紫外線的光源並未限定於該等例子,只要是能夠照射可使感光性樹脂組成物硬化的紫外線的光源即可。By exposing the coating film 4, the coating film 4 is partially cured as shown in FIG. 1C. Therefore, for example, after the negative mask is closely adhered to the coating film 4, the coating film 4 is irradiated with ultraviolet rays. The negative mask includes an exposure portion that allows ultraviolet rays to pass through, and a non-exposure portion that shields ultraviolet rays, and the non-exposure portions are provided at positions corresponding to the positions of the through holes 10. The negative mask is, for example, a photo tool such as a mask film or a dry plate. The ultraviolet light source is selected from, for example, chemical lamps, low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, metal halide lamps, light-emitting diodes (LEDs), yttrium aluminum garnet lasers (YAG) , G-ray (436 nm), h-ray (405 nm), i-ray (365 nm); and, a combination of two or more of the group consisting of g-ray, h-ray, and i-ray. The ultraviolet light source is not limited to these examples, and any light source may be used as long as it can irradiate ultraviolet rays that can cure the photosensitive resin composition.

再者,曝光方法,可採用一種使用負型遮罩的方法以外的方法。例如:以直接描繪法來對覆膜4進行曝光,該直接描繪法是將從光源發出的紫外線僅照射在覆膜4上的要曝光的部分。應用於直接描繪法的光源是例如選自:化學燈、低壓水銀燈、中壓水銀燈、高壓水銀燈、超高壓水銀燈、氙氣燈、金屬鹵化物燈、LED、YAG、g射線(436 nm)、h射線(405 nm)、i射線(365 nm);及,g射線、h射線及i射線所組成之群組中的兩種以上的組合。紫外線的光源並未限定於該等例子,只要是能夠照射可使感光性樹脂組成物硬化的紫外線的光源即可。The exposure method may be a method other than a method using a negative mask. For example, the cover film 4 is exposed by a direct drawing method in which only the portion to be exposed is irradiated with ultraviolet rays emitted from a light source on the cover film 4. The light source used in the direct drawing method is, for example, selected from: chemical lamps, low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, metal halide lamps, LEDs, YAG, g-rays (436 nm), h-rays (405 nm), i-rays (365 nm); and combinations of two or more of the groups consisting of g-rays, h-rays, and i-rays. The ultraviolet light source is not limited to these examples, and any light source may be used as long as it can irradiate ultraviolet rays that can cure the photosensitive resin composition.

又,乾膜法中,可將積層體中的乾膜重疊在芯材1後,在不將支撐體剝離的情形下透過支撐體來對由乾膜所構成之覆膜4照射紫外線,來對覆膜4進行曝光,繼而在進行顯影處理前將支撐體從覆膜4剝離。In the dry film method, after the dry film in the laminate is superimposed on the core material 1, the support film 4 made of the dry film can be irradiated with ultraviolet rays through the support without peeling off the support. The cover film 4 is exposed, and then the support is peeled from the cover film 4 before the development process is performed.

繼而,藉由對覆膜4實施顯影處理,將第1圖C所示的覆膜4的未曝光的部分5去除,藉此,如第1圖D所示的這樣在要形成貫穿孔10的位置設置孔6。顯影處理能夠依據感光性樹脂組成物的組成來使用適當的顯影液。顯影液例如是:含有鹼金屬鹽及鹼金屬氫氧化物中的至少一種之鹼性水溶液、或有機胺。鹼性水溶液更具體而言含有例如選自由下述成分所組成之群組中的至少一種:碳酸鈉、碳酸鉀、碳酸銨、碳酸氫鈉、碳酸氫鉀、碳酸氫銨、氫氧化鈉、氫氧化鉀、氫氧化銨、氫氧化四甲銨、及氫氧化鋰。鹼性水溶液中的溶劑可僅為水、或為水與低級醇等的親水性有機溶劑之混合物。有機胺含有例如選自由下述成分所組成之群組中的至少一種:單乙醇胺、二乙醇胺、三乙醇胺、單異丙醇胺、二異丙醇胺及三異丙醇胺。Then, the developing process is performed on the coating film 4 to remove the unexposed portion 5 of the coating film 4 shown in FIG. 1C, thereby, as shown in FIG. Position setting hole 6. The development process can use an appropriate developing solution depending on the composition of the photosensitive resin composition. The developing solution is, for example, an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, or an organic amine. The alkaline aqueous solution more specifically contains, for example, at least one selected from the group consisting of sodium carbonate, potassium carbonate, ammonium carbonate, sodium bicarbonate, potassium bicarbonate, ammonium bicarbonate, sodium hydroxide, hydrogen Potassium oxide, ammonium hydroxide, tetramethylammonium hydroxide, and lithium hydroxide. The solvent in the alkaline aqueous solution may be only water or a mixture of water and a hydrophilic organic solvent such as a lower alcohol. The organic amine contains, for example, at least one selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine, and triisopropanolamine.

顯影液較佳為含有鹼金屬鹽及鹼金屬氫氧化物中的至少一種之鹼性水溶液,特佳為碳酸鈉水溶液。此時,能夠達成提升操作環境及減輕廢棄物處理的負擔。The developing solution is preferably an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. In this case, it is possible to improve the operating environment and reduce the burden on waste disposal.

繼而,藉由加熱覆膜4而使其硬化。加熱的條件例如是:加熱溫度在120~200℃的範圍內,加熱時間在30~120分鐘的範圍內。若如此操作來使覆膜4硬化,能夠提升層間絕緣層7的強度、硬度、耐化學藥品性等的性能。Then, the coating film 4 is hardened by heating it. The heating conditions are, for example, a heating temperature in a range of 120 to 200 ° C and a heating time in a range of 30 to 120 minutes. If the cover film 4 is hardened in this way, the strength, hardness, chemical resistance, and other properties of the interlayer insulating layer 7 can be improved.

依據需要,可在加熱前及加熱後之中的任一方或雙方對覆膜4進一步照射紫外線。此時,能夠使覆膜4的光硬化更進一步進行。As required, the film 4 may be further irradiated with ultraviolet rays before or after heating. In this case, the photocuring of the coating film 4 can be further advanced.

層間絕緣膜7的厚度無特別限定,可在5~50μm的範圍內。The thickness of the interlayer insulating film 7 is not particularly limited, and may be within a range of 5 to 50 μm.

藉由以上操作,在芯材1上設置由感光性樹脂組成物的硬化物所構成之層間絕緣層7。能夠利用添加法(additive process)等的習知方法,在該層間絕緣層7上設置第二導體線路8及孔鍍覆9。藉此,如第1圖E所示的這樣獲得印刷線路板11,印刷線路板11具備:第一導體線路3;第二導體線路8;層間絕緣層7,其介於第一導體線路3與第二導體線路8之間;及,貫穿孔10,其是用以將第一導體線路3與第二導體線路8電性連接。再者,第1圖E中,孔鍍覆9具有將孔6的內面覆蓋的筒狀的形狀,但亦可將孔鍍覆9填充在孔6的內側整體中。As described above, the interlayer insulating layer 7 made of the cured product of the photosensitive resin composition is provided on the core material 1. A second conductive line 8 and a hole plating 9 can be provided on the interlayer insulating layer 7 by a known method such as an additive process. Thereby, the printed wiring board 11 is obtained as shown in FIG. 1E, and the printed wiring board 11 is provided with: a first conductor line 3; a second conductor line 8; and an interlayer insulating layer 7 interposed between the first conductor line 3 and Between the second conductor lines 8; and a through hole 10 for electrically connecting the first conductor lines 3 and the second conductor lines 8. In FIG. 1E, the hole plating 9 has a cylindrical shape that covers the inner surface of the hole 6. However, the hole plating 9 may be filled in the entire inner side of the hole 6.

又,在設置如第1圖E這樣的孔鍍覆9之前,能夠對孔6的內側的面的整體與層間絕緣層7的部分的外表面進行粗糙化。如此操作,藉由將層間絕緣層7的部分的外表面、孔6的內側的面進行粗糙化,能夠提升芯材1與孔鍍覆9的密合性。In addition, before the hole plating 9 as shown in FIG. 1E is provided, the entire inner surface of the hole 6 and the outer surface of the part of the interlayer insulating layer 7 can be roughened. In this way, by roughening the outer surface of the part of the interlayer insulating layer 7 and the surface inside the hole 6, the adhesion between the core material 1 and the hole plating 9 can be improved.

為了將層間絕緣層7的部分的外表面、孔6的內側的面進行粗糙化,能夠實施與使用氧化劑的一般性的除膠渣處理相同的步驟。例如,使氧化劑接觸於層間絕緣層7的外表面來對層間絕緣層7賦予粗糙面。但是並未限定於該方法,亦能夠適當地採用對電漿處理、UV處理或臭氧處理等的對硬化物賦予粗糙面的方法。In order to roughen the outer surface of the part of the interlayer insulating layer 7 and the surface inside the hole 6, the same procedure as that of a general slag removal treatment using an oxidizing agent can be performed. For example, an oxidizing agent is brought into contact with the outer surface of the interlayer insulating layer 7 to provide a rough surface to the interlayer insulating layer 7. However, the method is not limited to this method, and a method of applying a rough surface to a hardened material such as plasma treatment, UV treatment, or ozone treatment can also be adopted as appropriate.

氧化劑可以是能夠購買用來作為除膠渣液的氧化劑。例如,可藉由市售的除膠渣用膨潤液與除膠渣液來構成氧化劑。如此的氧化劑,例如能夠含有選自由過錳酸鈉和過錳酸鉀所組成之群組中的至少一種過錳酸鹽。The oxidant may be an oxidant that can be purchased for use as a desmear liquid. For example, the oxidizing agent can be constituted by a commercially available sizing liquid and a sizing liquid. Such an oxidant can contain, for example, at least one permanganate selected from the group consisting of sodium permanganate and potassium permanganate.

為了設置孔鍍覆9,能夠對經粗糙化的部分的外表面與孔6的內側的面實施無電解金屬鍍覆處理,來形成初期線路。之後,利用電解金屬鍍覆處理來使電解質鍍覆液中的金屬於初期線路上析出,藉此便能夠形成孔鍍覆9。In order to provide the hole plating 9, the outer surface of the roughened portion and the surface inside the hole 6 may be subjected to an electroless metal plating treatment to form an initial line. After that, the metal in the electrolytic plating solution is precipitated on the initial line by electrolytic metal plating treatment, and thereby the hole plating 9 can be formed.

說明具備有藉由本實施形態的由感光性樹脂組成物所形成的阻焊劑層之印刷線路板的製造方法。A method for manufacturing a printed wiring board including a solder resist layer formed of a photosensitive resin composition according to this embodiment will be described.

首先,準備芯材。芯材例如具備:至少一絕緣層與至少一導體線路。在芯材的設置有導體線路的面上,由感光性樹脂組成物來形成覆膜。作為覆膜的形成方法,可列舉塗佈法與乾膜法。作為塗佈法與乾膜法,能夠採用與上述形成層間絕緣層時相同的方法。藉由將覆膜曝光便能夠使其部分地硬化。曝光方法亦能夠採用與上述形成層間絕緣層時相同的方法。繼而,藉由對覆膜實施顯影處理,來去除覆膜的未曝光的部分,藉此,使覆膜經曝光的部分殘留在芯材上。First, prepare a core material. The core material includes, for example, at least one insulating layer and at least one conductor line. A film is formed of a photosensitive resin composition on the surface of the core material on which the conductor lines are provided. Examples of the method for forming the film include a coating method and a dry film method. As the coating method and the dry film method, the same method as in the case of forming the interlayer insulating layer described above can be adopted. The film can be partially hardened by exposing it. The exposure method can be the same as that in the case of forming the interlayer insulating layer. Then, the film is subjected to a development process to remove the unexposed portion of the film, thereby leaving the exposed portion of the film on the core material.

繼而,藉由將芯材上的覆膜加熱來進行熱硬化。顯影方法和加熱方法亦能夠採用與上述形成層間絕緣層時相同的方法。依據需要,可在加熱前及加熱後之中的任一方或雙方對覆膜進一步照射紫外線。此時,能夠使覆膜的光硬化更進一步進行。Then, the film on the core material is heated to perform thermal curing. The developing method and the heating method can be the same as those described above when the interlayer insulating layer is formed. As required, the film may be further irradiated with ultraviolet rays before or after heating. In this case, the photocuring of the film can be further advanced.

阻焊劑層的厚度沒有特別限定,可以在5~50μm的範圍內。The thickness of the solder resist layer is not particularly limited, and may be within a range of 5 to 50 μm.

藉由以上操作,可在芯材上設置由感光性樹脂組成物的硬化物所構成之阻焊劑層。藉此,可獲得一種印刷線路板,其具備:芯材,其具備絕緣層與位於絕緣層上的導體線路;及,阻焊劑層,其部分地包覆芯材中的設置有導體線路的面。再者,阻焊劑層可以與前述層間絕緣層同樣地設置有粗糙面。藉此,能夠使阻焊劑層與構成導體線路和焊球等的金屬材料的密合性提升。With the above operations, a solder resist layer composed of a cured product of a photosensitive resin composition can be provided on the core material. Thereby, it is possible to obtain a printed wiring board including: a core material including an insulating layer and a conductor circuit on the insulating layer; and a solder resist layer partially covering a surface of the core material on which the conductor circuit is provided. . The solder resist layer may be provided with a rough surface similarly to the interlayer insulating layer. Thereby, the adhesiveness of a solder resist layer and the metal material which comprises a conductor line, a solder ball, etc. can be improved.

本實施形態,能夠由感光性樹脂組成物的乾燥物也就是乾膜、或由感光性樹脂組成物的塗膜來特別良好地形成阻焊劑層和層間絕緣層等的電絕緣性層。藉由對該電絕緣性層賦予粗糙面,便能夠提升電絕緣性層與金屬材料的密合性。
[實施例]
In this embodiment, an electrically insulating layer such as a solder resist layer and an interlayer insulating layer can be formed particularly favorably from a dried material of the photosensitive resin composition, that is, a dry film or a coating film of the photosensitive resin composition. By providing a rough surface to the electrically insulating layer, the adhesion between the electrically insulating layer and the metal material can be improved.
[Example]

以下,藉由實施例來具體地說明本發明。Hereinafter, the present invention will be specifically described by way of examples.

(1)含羧基樹脂的合成
(1-1)合成例A-1~合成例A-4及合成例B-1~合成例B-3
在安裝有回流冷卻器、溫度計、空氣噴吹管及攪拌機之四頸燒瓶內,加入表1中表示於「第一反應」欄的成分,藉由在空氣起泡下攪拌該等成分來調製成混合物。將該混合物在燒瓶內一面在空氣起泡下攪拌,一面以表示於「反應條件」欄的反應溫度和反應時間的條件進行加熱。藉此,調製中間體的溶液。
繼而,在燒瓶內的中間體的溶液中倒入表示於表1的「第二反應」欄的成分,一面在空氣起泡下攪拌,一面以表示於「反應條件(1)」欄的反應溫度和反應時間的條件進行加熱。繼而,除了合成例B-1~合成例B-3以外,一面在空氣起泡下攪拌,一面以表示於「反應條件(2)」欄的反應溫度和反應時間的條件進行加熱。藉此獲得含羧基樹脂的65質量%溶液。含羧基樹脂的多分散性(其中,不包含合成例B-1~合成例B-3的含羧基樹脂)、重量平均分子量及酸值如同表1中所示。成分間的莫耳比亦顯示於表1。
再者,表(1)中的(a1)欄所示的成分的詳細如同下述。
‧環氧化合物1:一種雙酚茀型環氧化合物,其由式(7)所示,且式(7)中的R1 ~R8 皆為羥基,環氧當量為250 g/eq。
‧環氧化合物2:一種雙酚茀型環氧化合物,其由式(7)所示,且式(7)中的R1 和R5 皆為甲基、R2 ~R4 和R6 ~R8 皆為氫,環氧當量為279 g/eq。
又,表1中的(g1)欄所示的成分的詳細如同下述。
‧環氧化合物3:聯苯酚醛清漆型環氧樹脂(日本化藥股份有限公司製造的製品名NC-3000-H,環氧當量288 g/eq)。
‧環氧化合物4:甲醛酚醛清漆型環氧樹脂(新日鐵住金化學股份有限公司製造,型號YDC-700-5,環氧當量203 g/eq)。
‧環氧化合物5:雙酚A型環氧樹脂(三菱化學股份有限公司製造,型號jER1001,環氧當量472 g/eq)。
又,表1中的(a2)或(g2)欄所示的成分的詳情如下所述。
‧ω-羧基-聚己內酯(n≒2)單丙烯酸酯:東亞合成股份有限公司製造,商品名Aronix M-5300(數量平均分子量290)。
(1) Synthesis of carboxyl-containing resin
(1-1) Synthesis Example A-1 to Synthesis Example A-4 and Synthesis Example B-1 to Synthesis Example B-3
In a four-necked flask equipped with a reflux cooler, a thermometer, an air blowing tube, and a stirrer, the components shown in the "First Reaction" column in Table 1 were added, and the components were prepared by stirring the components with air bubbles . This mixture was stirred in the flask under the bubbling of air while heating the mixture under the conditions of the reaction temperature and reaction time shown in the "Reaction Conditions" column. Thereby, a solution of the intermediate was prepared.
Next, the components shown in the "Second Reaction" column of Table 1 were poured into the solution of the intermediate in the flask, and the reaction temperature shown in the "Reaction Conditions (1)" column was stirred while being bubbled with air. And reaction conditions. Next, in addition to Synthesis Example B-1 to Synthesis Example B-3, the mixture was heated under conditions of reaction temperature and reaction time shown in the column of "Reaction Conditions (2)" while being stirred under the bubbling of air. Thus, a 65% by mass solution of a carboxyl group-containing resin was obtained. The polydispersity of the carboxyl group-containing resin (excluding the carboxyl group-containing resins of Synthesis Examples B-1 to B-3), the weight average molecular weight, and the acid value are as shown in Table 1. The mole ratios between the components are also shown in Table 1.
The details of the components shown in the column (a1) in Table (1) are as follows.
‧Epoxy compound 1: A bisphenol fluorene type epoxy compound, which is represented by formula (7), and R 1 to R 8 in formula (7) are all hydroxyl groups, and the epoxy equivalent is 250 g / eq.
‧Epoxy compound 2: A bisphenol fluorene type epoxy compound, which is represented by formula (7), and R 1 and R 5 in formula (7) are both methyl groups, R 2 to R 4 and R 6 to R 8 is all hydrogen and epoxy equivalent is 279 g / eq.
The details of the components shown in the column (g1) in Table 1 are as follows.
‧Epoxy compound 3: Biphenol novolac epoxy resin (product name NC-3000-H manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 288 g / eq).
‧Epoxy compound 4: formaldehyde novolac epoxy resin (manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., model YDC-700-5, epoxy equivalent 203 g / eq).
‧Epoxy Compound 5: Bisphenol A epoxy resin (manufactured by Mitsubishi Chemical Corporation, model jER1001, epoxy equivalent 472 g / eq).
The details of the components shown in the column (a2) or (g2) in Table 1 are as follows.
‧Ω-carboxy-polycaprolactone (n ≒ 2) monoacrylate: manufactured by Toa Synthesis Co., Ltd. under the trade name Aronix M-5300 (number average molecular weight 290).

[表1]


[Table 1]


[實施例1~23、比較例1~5]
將一部分的後述的表2~5所示的成分利用三輥研磨機揉合後,藉由在燒瓶內攪拌並混合後述的表2~5所示的全部成分,來獲得感光性樹脂組成物。製作感光性樹脂組成物時,當使用三聚氰胺的情況,在感光性樹脂組成物中使其均勻地分散。再者,表2~表5所示的成分的詳情如下所述。
‧不飽和化合物A:三羥甲基丙烷三丙烯酸酯。
‧不飽和化合物B:三環癸烷二甲醇二丙烯酸酯。
‧不飽和化合物C:ε-己內酯改質二季戊四醇六丙烯酸酯(日本化藥股份有限公司製造,型號KAYARAD DPCA-20)
‧光聚合起始劑A:2,4,6-三甲基苯甲醯基二苯基氧化膦(BASF公司製造,型號Irgacure TPO)。
‧光聚合起始劑B:1-羥基環己基苯基酮(BASF公司製造,型號Irgacure 184)
‧光聚合起始劑C:4,4’-雙(二乙胺) 二苯基酮。
‧結晶性環氧樹脂A:聯苯型結晶性環氧樹脂(三菱化學股份有限公司製造的品名YX-4000,熔點105℃,環氧當量187 g/eq)。
‧結晶性環氧樹脂B:雙酚型結晶性環氧樹脂(新日鐵住金化學股份有限公司製造的品名YSLV-80XY,熔點75~85℃,192 g/eq)。
‧非晶性環氧樹脂C的溶液:使含長鏈碳鏈雙酚A型環氧樹脂(DIC股份有限公司製造,型號EPICLON EXA-4816,液狀樹脂,環氧當量410g/eq)以固體成分作為基準計為90%地溶解於二乙二醇單乙基醚乙酸酯而成的溶液(以固體成分為90%換算計的環氧當量是455.56 g/eq)。
‧非晶型環氧樹脂D的溶液:將聯苯酚醛清漆型環氧樹脂(日本化藥股份有限公司製造的品名NC-3000,軟化點53~63℃,環氧當量280g/eq)以固體成分作為基準計為80%地溶解於二乙二醇單乙基醚乙酸酯而成的溶液(以固體成分為80%換算計的環氧當量是350 g/eq)。
‧具有羧基之有機填料A的分散液:以相對於分散液總量的含量為15重量%的方式,使平均一次粒徑0.07μm的交聯橡膠(NBR)分散於甲基乙基酮中而成的分散液(JSR股份有限公司製造,型號XER-91-MEK,酸值10.0 mg KOH/g)。
‧含有羧基之有機填料B的分散液:以相對於分散液總量的含量為17重量%的方式,使羧基改質氫化腈橡膠的聚合物(線狀粒子)分散於甲基乙基酮中而成的分散液(JSR股份有限公司製造,型號XER-32-MEK)。
‧具有羧基和羥基之有機填料C的分散液:以相對於分散液總量的含量為15重量%的方式,使平均一次粒徑0.07μm的交聯橡膠(SBR)分散於甲基乙基酮中而成的分散液(JSR股份有限公司製造,型號XSK-500)。
‧具有環氧基之有機填料:粉末狀,平均一次粒徑0.3μm的縮水甘油基改質丙烯腈丁二烯橡膠。
‧馬來酸改質聚丁二烯:Sartomer公司製造的型號Ricon 130 MA 8。
‧三氮雜苯樹脂A:具有N-(CH2 OR)(CH2 OR’)基(R和R’各自獨立地是甲基或正丁基)之甲基丁基化三聚氰胺甲醛樹脂(日本氫特工業股份有限公司製造,品名CYMEL 235,數量平均分子量630,聚合度1.4,在25℃時為液狀狀態)。
‧三氮雜苯樹脂B:具有N-(CH2 OCH3 )基之醯亞胺基型三聚氰胺甲醛樹脂的異丁醇溶液(不揮發成分80%,日本氫特工業股份有限公司製造,品名CYMEL325,數量平均分子量1000,聚合度2.3,在25℃時為液狀狀態,溶劑是異丁醇)。
‧三氮雜苯樹脂C:具有N-(CH2 OCH3 )H基之醯亞胺基型苯胍胺甲醛樹脂的3-甲基-3甲氧基丁醇溶液(不揮發成分80%,日本氫特工業股份有限公司製造,品名MYCOAT 105,聚合度1.32,在25℃時為溶液狀態,溶劑是3-甲基-3甲氧基丁醇)。
‧三聚氰胺:日產化學工業股份有限公司製造,微粉三聚氰胺,在感光性樹脂組成物中以平均粒徑8μm進行分散。
‧矽烷耦合劑(GP-TMS):3-縮水甘油氧基丙基三甲氧基矽烷。
‧耦合劑(TEOS):四乙氧基矽烷。
‧耦合劑(MTMS):甲基三甲氧基矽烷。
‧耦合劑(AEAP-MDMS):N-(2-胺乙基)-3-胺丙基甲基二甲氧基矽烷。
‧耦合劑(VL-TMS):乙烯基三甲氧基矽烷。
‧抗氧化劑:受阻酚系抗氧化劑(BASF公司製造,型號IRGANOX 1010)。
‧界面活性劑:DIC股份有限公司製造,型號MEGAFAC F-477。
‧流變控制劑:BIGCHEMI JAPAN股份有限公司製造,型號BYK-430。
‧溶劑A:二乙二醇單乙基醚乙酸酯。
‧溶劑B:甲基乙基酮。
[Examples 1 to 23, Comparative Examples 1 to 5]
A part of the components shown in Tables 2 to 5 described below was kneaded with a three-roll mill, and then all the components shown in Tables 2 to 5 described below were stirred and mixed in a flask to obtain a photosensitive resin composition. When a photosensitive resin composition is produced, when melamine is used, it is dispersed uniformly in the photosensitive resin composition. The details of the components shown in Tables 2 to 5 are as follows.
‧Unsaturated compound A: Trimethylolpropane triacrylate.
‧Unsaturated compound B: tricyclodecane dimethanol diacrylate.
‧Unsaturated compound C: ε-caprolactone modified dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd., model KAYARAD DPCA-20)
‧Photopolymerization initiator A: 2,4,6-trimethylbenzylidene diphenylphosphine oxide (manufactured by BASF, model Irgacure TPO).
‧Photopolymerization initiator B: 1-hydroxycyclohexylphenyl ketone (manufactured by BASF, model Irgacure 184)
‧Photopolymerization initiator C: 4,4'-bis (diethylamine) diphenyl ketone.
‧Crystalline epoxy resin A: Biphenyl type crystalline epoxy resin (product name YX-4000 manufactured by Mitsubishi Chemical Corporation, melting point 105 ° C, epoxy equivalent 187 g / eq).
‧Crystalline epoxy resin B: Bisphenol-type crystalline epoxy resin (product name: YSLV-80XY manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., melting point: 75-85 ° C, 192 g / eq).
‧Amorphous solution of amorphous epoxy resin C: Long chain carbon chain bisphenol A type epoxy resin (manufactured by DIC Corporation, model EPICLON EXA-4816, liquid resin, epoxy equivalent 410g / eq) is used as a solid The component was 90% dissolved in diethylene glycol monoethyl ether acetate as a reference solution (the epoxy equivalent was 455.56 g / eq in terms of 90% solid content conversion).
‧Amorphous epoxy resin solution D: Biphenol novolac epoxy resin (product name: NC-3000 manufactured by Nippon Kayaku Co., Ltd., softening point: 53-63 ° C, epoxy equivalent: 280 g / eq): solid The component was based on a solution in which 80% was dissolved in diethylene glycol monoethyl ether acetate (the epoxy equivalent was 350 g / eq based on 80% conversion of solid content).
‧ Dispersion liquid of organic filler A having a carboxyl group: a crosslinked rubber (NBR) having an average primary particle diameter of 0.07 μm is dispersed in methyl ethyl ketone so that the content of the total dispersion liquid is 15% by weight. The resulting dispersion (manufactured by JSR Corporation, model XER-91-MEK, acid value 10.0 mg KOH / g).
‧ Dispersion liquid of organic filler B containing carboxyl group: The polymer (linear particles) of carboxyl modified hydrogenated nitrile rubber is dispersed in methyl ethyl ketone so that the content of the carboxyl group-containing filler is 17% by weight. The resulting dispersion (manufactured by JSR Corporation, model XER-32-MEK).
‧ Dispersion of organic filler C with carboxyl and hydroxyl groups: The crosslinked rubber (SBR) having an average primary particle diameter of 0.07 μm is dispersed in methyl ethyl ketone so that the content relative to the total amount of the dispersion is 15% by weight. Dispersion liquid (made by JSR Corporation, model XSK-500).
‧Epoxy-based organic filler: powdery, glycidyl modified acrylonitrile butadiene rubber with average primary particle diameter of 0.3 μm.
‧ Maleic acid modified polybutadiene: Model Ricon 130 MA 8 manufactured by Sartomer.
‧Triazabenzene resin A: Methylbutylated melamine formaldehyde resin having N- (CH 2 OR) (CH 2 OR ') groups (R and R' are each independently methyl or n-butyl) (Japan (Product name: CYMEL 235, number average molecular weight: 630, polymerization degree: 1.4, liquid state at 25 ° C).
‧Triazabenzene resin B: Isobutanol solution of N- (CH 2 OCH 3 ) -based imino-type melamine formaldehyde resin (non-volatile content 80%, manufactured by Japan Hydro Industry Co., Ltd., product name CYMEL325 , The number average molecular weight is 1000, the degree of polymerization is 2.3, the liquid state is at 25 ° C, and the solvent is isobutanol).
‧Triazabenzene resin C: 3-methyl-3methoxybutanol solution of N- (CH 2 OCH 3 ) H group imino-type benzoguanamine formaldehyde resin (non-volatile content 80%, Manufactured by Japan Hydro Industrial Co., Ltd. under the product name MYCOAT 105, with a polymerization degree of 1.32, in a solution state at 25 ° C, and the solvent is 3-methyl-3methoxybutanol).
‧Melamine: manufactured by Nissan Chemical Industry Co., Ltd., a fine powder of melamine, dispersed in a photosensitive resin composition with an average particle size of 8 μm.
‧ Silane coupling agent (GP-TMS): 3-Glycidoxypropyltrimethoxysilane.
‧Coupling agent (TEOS): Tetraethoxysilane.
‧Coupling agent (MTMS): methyltrimethoxysilane.
‧Coupling agent (AEAP-MDMS): N- (2-aminoethyl) -3-aminopropylmethyldimethoxysilane.
‧Coupling agent (VL-TMS): vinyltrimethoxysilane.
‧Antioxidant: Hindered phenolic antioxidant (manufactured by BASF, model IRGANOX 1010).
‧Surfactant: Made by DIC Corporation, model MEGAFAC F-477.
‧Rheology control agent: manufactured by Bigchemi Japan Co., Ltd., model BYK-430.
‧Solvent A: Diethylene glycol monoethyl ether acetate.
‧Solvent B: methyl ethyl ketone.

(1-2)試驗片的製作
利用塗佈機將各實施例和比較例的感光性樹脂組成物塗佈在聚對苯二甲酸乙二酯製的薄膜上後,藉由在95℃加熱25分鐘來使其乾燥,藉此在薄膜上形成厚度30μm的乾膜。
準備具備厚度17.5μm的銅箔之玻璃環氧基附銅積層板(FR-4型)。利用減成法(subtractive method),在該玻璃環氧基附銅積層板上形成線幅/間距為30μm/30μm的梳型電極來作為導體線路,藉此獲得印刷線路板(芯材)。利用蝕刻劑(MEC股份有限公司製造的型號CZ-8101)將該印刷線路板的導體線路中的厚度1μm左右的表面溶解而去除,藉此將導體線路進行粗糙化。利用真空疊層機將上述乾膜加熱並疊層在該印刷線路板的其中一面的表面上。加熱疊層的條件設為0.5MPa、80℃、1分鐘。藉此,在印刷線路板上形成由上述乾膜所構成之覆膜。在對該覆膜直接緊貼負型遮罩的狀態下,以250mJ/cm2 的條件對覆膜照射紫外線,該負型遮罩具有包含直徑100μm或40μm的圓形形狀之圖案且具有非曝光部。對曝光後的覆膜實施顯影處理。
當進行顯影處理時,以0.2MPa噴射壓力對覆膜噴射30℃的1%Na2 CO3 水溶液90秒鐘。繼而,以0.2MPa的噴射壓力對覆膜噴射純水90秒鐘。藉此,去除覆膜中未經曝光的部分,而在覆膜上形成孔。
再者,在曝光後且顯影之前,將聚對苯二甲酸乙二酯製的薄膜自乾膜(覆膜)剝離。
繼而,將覆膜在180℃加熱120分鐘。藉此,在印刷線路板(芯材)上形成由感光性樹脂組成物的硬化物(亦可稱為乾膜的硬化物)所構成之層。藉此來獲得試驗片。
(1-2) Preparation of test piece The photosensitive resin composition of each Example and Comparative Example was coated on a film made of polyethylene terephthalate with a coater, and then heated at 95 ° C for 25 minutes. It was dried in minutes to form a dry film having a thickness of 30 μm on the film.
A glass epoxy-based copper-clad laminate (FR-4 type) including a copper foil with a thickness of 17.5 μm was prepared. Using a subtractive method, a comb-shaped electrode having a line width / spacing of 30 μm / 30 μm was formed on the glass epoxy-copper-clad laminate as a conductor line, thereby obtaining a printed wiring board (core material). The surface of the conductor wiring of this printed wiring board having a thickness of about 1 μm is dissolved and removed with an etchant (model CZ-8101 manufactured by MEC Co., Ltd.), thereby roughening the conductor wiring. The dry film was heated and laminated on a surface of one side of the printed wiring board using a vacuum laminator. The conditions for heating the laminate were set to 0.5 MPa, 80 ° C, and 1 minute. Thereby, a coating film composed of the dry film is formed on a printed wiring board. The film is irradiated with ultraviolet rays at a condition of 250 mJ / cm 2 in a state where the film is directly in close contact with a negative mask. The negative mask has a pattern including a circular shape with a diameter of 100 μm or 40 μm and is non-exposed. unit. The exposed film is subjected to a development process.
When the development process was performed, the coating was sprayed with a 1% Na 2 CO 3 aqueous solution at 30 ° C. for 90 seconds at a spray pressure of 0.2 MPa. Then, pure water was sprayed on the film at a spray pressure of 0.2 MPa for 90 seconds. Thereby, the unexposed part of the film is removed, and holes are formed in the film.
The polyethylene terephthalate film was peeled from the dry film (film) after exposure and before development.
Then, the film was heated at 180 ° C for 120 minutes. Thereby, a layer composed of a cured product of the photosensitive resin composition (also referred to as a cured product of a dry film) is formed on the printed wiring board (core material). Thereby, a test piece was obtained.

[評價試驗]
依據下述步驟來評價實施例1~23和比較例1~5的各試驗片。將其結果顯示於下述表2~5。再者,下述(1)~(8)是對具有由厚度30μm的乾膜所形成的覆膜之試驗片或各試驗片實施特定的處理來進行評價。
[Evaluation test]
The test pieces of Examples 1 to 23 and Comparative Examples 1 to 5 were evaluated according to the following procedures. The results are shown in Tables 2 to 5 below. The following (1) to (8) are evaluated by performing a specific treatment on a test piece or each test piece having a film formed of a dry film having a thickness of 30 μm.

(1)顯影性
針對各實施例和比較例的試驗片,觀察上述的顯影處理後和除膠渣處理後的印刷線路板的非曝光部,並依據下述方式來評價其結果。再者,除膠渣處理是依據後述的「(6)耐粗糙化性」的評價試驗的方法來實施處理。
A:未經曝光的覆膜全部都被去除。
B:在直徑100μm的開口部,雖然在顯影後仍發現殘渣,但在除膠渣處理後未發現殘渣。
C:一部分的未經曝光的覆膜仍殘留在印刷線路板上。
(1) Developability With respect to the test pieces of each of the examples and comparative examples, the non-exposed portions of the printed wiring board after the above development treatment and after the desmear removal treatment were observed, and the results were evaluated in the following manner. It should be noted that the desmearing treatment is carried out in accordance with a method of an evaluation test of "(6) roughening resistance" described later.
A: All unexposed films are removed.
B: In the opening portion having a diameter of 100 μm, although residues were still found after development, no residues were found after the desmearing treatment.
C: A part of the unexposed film remains on the printed wiring board.

(2)解析性
針對各實施例和比較例的試驗片,觀察已形成在由硬化物所構成之層上的直徑40μm的開口部的孔,並依據下述方式來評價其結果。
A:孔的底的直徑是30μm以上。
B:孔的底的直徑是20μm以上且小於30μm。
C:孔的底的直徑小於20μm、或並未形成明確的孔。
(2) Resolvability For the test pieces of each of the examples and comparative examples, the holes having a diameter of 40 μm in the openings formed in the layer made of the cured product were observed, and the results were evaluated in the following manner.
A: The diameter of the bottom of the hole is 30 μm or more.
B: The diameter of the bottom of the hole is 20 μm or more and less than 30 μm.
C: The diameter of the bottom of the hole is less than 20 μm, or no clear hole is formed.

(3)耐鍍覆性
在各實施例和比較例的試驗片的導體線路中的被暴露在外的部分上,使用市售的無電解鎳鍍覆浴來形成鎳鍍覆層後,使用市售的無電解金鍍覆浴來形成金鍍覆層。以目視觀察由硬化物所構成之層和金屬層。又,對由硬化物所構成之層實行賽璐玢黏著膠帶剝離試驗。依照下述方式來評價其結果。
A:沒有確認到由硬化物所構成之層和金屬層的外觀發生異常,並且由硬化物所構成之層沒有產生由於賽璐玢黏著膠帶剝離試驗所造成的剝離。
B:確認到由硬化物所構成之層發生變色,但是由硬化物所構成之層沒有產生由於賽璐玢黏著膠帶剝離試驗所造成的剝離。
C:確認到由硬化物所構成之層發生突起,並且由硬化物所構成之層產生由於賽璐玢黏著膠帶剝離試驗所造成的剝離。
(3) Plating resistance After the nickel plating layer was formed on the exposed portions of the conductor lines of the test pieces of each of the examples and comparative examples by using a commercially available electroless nickel plating bath, a commercially available one was used. Electroless gold plating bath to form a gold plating layer. The layers made of hardened material and metal layers were visually observed. A celluloid adhesive tape peeling test was performed on the layer composed of the cured product. The results were evaluated in the following manner.
A: No abnormality was observed in the appearance of the layer made of the hardened material and the metal layer, and the layer made of the hardened material did not peel off due to the celluloid adhesive tape peeling test.
B: Discoloration of the layer composed of the cured product was confirmed, but the layer composed of the cured product did not peel off due to the celluloid adhesive tape peeling test.
C: It was confirmed that protrusions occurred in the layer composed of the cured product, and peeling caused by the celluloid adhesive tape peeling test occurred in the layer composed of the cured product.

(4)線間絕緣層
對各實施例和比較例的試驗片中的導體線路(梳型電極)一邊施加DC30V的偏壓,一邊將印刷線路板暴露在121℃、97%R.H.(相對溼度)的試驗環境下100小時。在該試驗環境下,經時地測定在該環境中的由硬化物所構成之層的梳型電極間的電阻值,並依據以下的評價基準來評價其結果。
A:從開始試驗時到經過100小時的期間,電阻值一直維持在106 Ω以上。
B:從開始試驗時到經過80小時的期間,電阻值一直維持在106 Ω以上,但是從開始試驗時到經過100小時之前,電阻值變得小於106 Ω。
C:從開始試驗時到經過80小時的期間,電阻值變得小於106 Ω。
(4) Inter-wire insulation layer Exposed the printed wiring board to 121 ° C and 97% RH (relative humidity) while applying a bias voltage of 30 V DC to the conductor lines (comb electrodes) in the test pieces of each of the examples and comparative examples 100 hours under the test environment. In this test environment, the resistance value between the comb-shaped electrodes of the layer composed of the hardened material in this environment was measured over time, and the results were evaluated based on the following evaluation criteria.
A: The resistance value was maintained at 10 6 Ω or more from the time when the test was started until 100 hours passed.
B: The resistance value was maintained at 10 6 Ω or more from the start of the test to the elapse of 80 hours, but the resistance value became less than 10 6 Ω from the start of the test to 100 hours elapsed.
C: During the period from the start of the test to the elapse of 80 hours, the resistance value became less than 10 6 Ω.

PCT(壓力鍋試驗,Pressure Cooker Test)
將各實施例和比較例的試驗片放置在121℃、100R.H.的環境下100小時後,依據下述的評價基準來評價由硬化物所構成之層的外觀。
A:在由硬化物所構成之層上沒有發現異常。
B:在由硬化物所構成之層上發現變色。
C:在由硬化物所構成之層上發現大範圍的變色並且有一部分產生膨脹。
PCT (Pressure Cooker Test)
After the test pieces of each example and comparative example were left in an environment of 121 ° C. and 100 R.H. for 100 hours, the appearance of a layer composed of a cured product was evaluated according to the following evaluation criteria.
A: No abnormality was found on the layer made of hardened material.
B: Discoloration was found on the layer made of hardened material.
C: A wide range of discoloration was observed on the layer composed of the hardened material, and a part thereof was swelled.

(6)耐粗糙化性
針對各實施例和比較例的試驗片,在鍍覆處理的前步驟中,利用依據一般性的除膠渣處理之步驟,將由硬化物所構成之層的外表面進行粗糙化。使用市售膨潤處理液(ATOTECH Japan股份有限公司製,Swelling Dip Securiganth P)來作為除膠渣用膨潤液,在60℃對由硬化物所構成之層的外表面進行膨潤處理5分鐘,而使硬化物的表面膨潤。並且,對經膨潤後的表面進行熱水洗。繼而,使用含有過錳酸鉀的市售氧化劑(ATOTECH Japan股份有限公司製,Concentrate Compact CP)來作為除膠渣液,在80℃對由硬化物所構成之層的表面進行粗糙化處理10分鐘,而對經熱水洗的表面進行粗糙化。對如此粗糙化後的硬化物表面進行熱水洗,並進一步在40℃中使用中和液(ATOTECH Japan股份有限公司製,Reduction Solution Securiganth P)來處理在硬化物表面的殘渣5分鐘,藉此來去除殘渣。並且,將中和後的硬化物表面進行水洗。經過如此操作,測定被賦予有粗糙面之由感光性樹脂組成物的硬化物所構成之層的厚度,並依據以下的評價基準來評價硬化物對於除膠渣液的耐粗糙化性。
A:由於粗糙化所造成的厚度減少小於3μm。
B:由於粗糙化所造成的厚度減少是3μm以上且小於6μm。
C:由於粗糙化所造成的厚度減少是6μm以上。
(6) Roughness resistance For the test pieces of each of the examples and comparative examples, in the previous step of the plating process, the outer surface of the layer composed of the hardened material was subjected to a step of removing the slag in accordance with the general process Roughening. A commercially available swelling treatment solution (Swelling Dip Securiganth P, manufactured by ATOTECH Japan Co., Ltd.) was used as a swelling solution for deslagging, and the outer surface of the layer composed of the cured product was swelling at 60 ° C. for 5 minutes, so that The hardened surface swells. Then, the swollen surface was washed with hot water. Then, a commercially available oxidant (Concentrate Compact CP, manufactured by ATOTECH Japan Co., Ltd.) containing potassium permanganate was used as a desmearing solution, and the surface of the layer composed of the cured product was roughened at 80 ° C for 10 minutes. , And roughen the surface washed with hot water. The surface of the hardened product thus roughened was washed with hot water, and a neutralization solution (Reduction Solution Securiganth P, manufactured by ATOTECH Japan Co., Ltd.) was further used to treat the residue on the surface of the hardened product for 5 minutes at 40 ° C. Remove residue. And the surface of the hardened | cured material after neutralization was washed with water. In this way, the thickness of the layer made of the cured product of the photosensitive resin composition provided with the rough surface was measured, and the roughened resistance of the cured product to the degumming solution was evaluated according to the following evaluation criteria.
A: The reduction in thickness due to roughening is less than 3 μm.
B: The reduction in thickness due to roughening is 3 μm or more and less than 6 μm.
C: The reduction in thickness due to roughening is 6 μm or more.

(7)粗糙化穩定性
針對各實施例和比較例的試驗片,藉由上述(6)的方法,觀察被賦予有粗糙面之感光性樹脂組成物的硬化物層的表面,並依據以下的評價基準來評價。
A:成為均勻的粗糙化表面。
B:雖然在表面上發現了些微的裂縫,但是在其他部分仍成為均勻的粗糙化表面。
C:成為不均勻的粗糙化表面、或在表面上產生大範圍的裂縫。
(7) Roughening stability With respect to the test pieces of each of the examples and comparative examples, the surface of the hardened layer of the photosensitive resin composition provided with a rough surface was observed by the method of (6) above, and based on the following Evaluation criteria to evaluate.
A: It becomes a uniform rough surface.
B: Although slight cracks were found on the surface, it became a uniform roughened surface in other parts.
C: It becomes an uneven roughened surface, or a wide range of cracks occur on the surface.

(8)銅鍍覆層的密合性
針對各實施例和比較例的試驗片,依據上述(6)的方法在由硬化物所構成之層上賦予粗糙面後,使用市售的液體藥劑並利用無電解銅鍍覆處理在試驗片的粗糙面上形成初期線路。將設置有該初期線路之試驗片在150℃加熱1小時。
繼而,藉由電解銅鍍覆處理,以2A/dm2 的電流密度自市售的液體藥劑中直接析出厚度33μm的銅,繼而將析出有銅之試驗片在180℃中加熱30分鐘,而形成銅鍍覆層。依據以下的評價基準來評價如此操作所形成的銅鍍覆層與試驗片中的硬化物的密合性。
此處,當無電解銅鍍覆處理後和電解銅鍍覆處理後的兩者在加熱時的試驗片沒有確認到起泡時,依據下述的步驟來評價銅鍍覆層與硬化物的密合強度。密合強度是依據日本工業規格JIS C6481來測定。再者,為了確認銅鍍覆層的密合穩定性,實行4次試驗。
A:在無電解銅鍍覆處理後且加熱時沒有確認到起泡,且在電解銅鍍覆處理後且加熱時亦沒有確認到起泡。並且,在4次的試驗中,銅的密合強度皆為0.6kN/m以上。又,剝離強度的最大值與最小值的差值小於0.2kN/m。
B:在無電解銅鍍覆處理後且加熱時沒有確認到起泡,且在電解銅鍍覆處理後且加熱時亦沒有確認到起泡。但是,在4次的試驗中,銅的密合強度有小於0.6kN/m的情況。又,剝離強度的最大值與最小值的差值小於0.2kN/m。
C:在無電解銅鍍覆處理後且加熱時、或在電解銅鍍覆處理後且加熱時確認到起泡。又,雖然在無電解銅鍍覆處理後且加熱時、或在電解銅鍍覆處理後且加熱時沒有確認到起泡,但是剝離強度的最大值與最小值的差值是0.2kN/m以上。
(8) Adhesion of copper plating layer For the test pieces of each of the examples and comparative examples, a rough surface was provided on the layer made of hardened material according to the method of (6) above, and then a commercially available liquid agent was used. An electroless copper plating process was used to form an initial circuit on the rough surface of the test piece. The test piece provided with the initial circuit was heated at 150 ° C for 1 hour.
Then, by electrolytic copper plating treatment, copper having a thickness of 33 μm was directly precipitated from a commercially available liquid agent at a current density of 2 A / dm 2 , and then a test piece having the copper precipitated was heated at 180 ° C. for 30 minutes to form Copper plating. The adhesion between the copper plating layer formed in this way and the cured product in the test piece was evaluated according to the following evaluation criteria.
Here, when no blistering was observed in the test piece during heating of both the electroless copper plating treatment and the electrolytic copper plating treatment, the adhesion between the copper plating layer and the cured product was evaluated according to the following procedure.合 Strength. The adhesion strength is measured in accordance with Japanese Industrial Standard JIS C6481. In addition, in order to confirm the adhesion stability of the copper plating layer, four tests were performed.
A: After the electroless copper plating process, no foaming was confirmed during heating, and after the electrolytic copper plating process, no foaming was also confirmed during heating. In addition, in four tests, the adhesion strength of copper was 0.6 kN / m or more. The difference between the maximum value and the minimum value of the peel strength is less than 0.2 kN / m.
B: After the electroless copper plating treatment, no foaming was confirmed during heating, and after the electrolytic copper plating treatment, no foaming was confirmed during heating. However, in four tests, the adhesion strength of copper may be less than 0.6 kN / m. The difference between the maximum value and the minimum value of the peel strength is less than 0.2 kN / m.
C: Foaming was confirmed after the electroless copper plating treatment and heating, or after the electrolytic copper plating treatment and heating. In addition, although no blistering was observed during the electroless copper plating process and during heating, or after the electrolytic copper plating process and during heating, the difference between the maximum and minimum peel strengths was 0.2 kN / m or more. .

[表2]



[Table 2]



[表3]



[table 3]



[表4]

[Table 4]

[表5]



[table 5]



(總結)
如以上結果顯示,本發明的第一態樣中的感光性樹脂組成物含有:含羧基樹脂(A);不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵;光聚合起始劑(C);環氧化合物(D);有機填料(E),其包含具有羧基之有機填料(E1);及,三氮雜苯樹脂(F)。並且三氮雜苯樹脂(F)滿足下述之中的至少一條件:在25℃時是液狀狀態;及,感光性樹脂組成物含有溶劑(H),且在25℃時三氮雜苯樹脂(F)會溶解於溶劑(H)中。
(to sum up)
As shown by the above results, the photosensitive resin composition in the first aspect of the present invention contains: a carboxyl group-containing resin (A); an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule; light A polymerization initiator (C); an epoxy compound (D); an organic filler (E) containing an organic filler (E1) having a carboxyl group; and a triazabenzene resin (F). The triazabenzene resin (F) satisfies at least one of the following conditions: the liquid state is at 25 ° C; and the photosensitive resin composition contains a solvent (H), and the triazabenzene is at 25 ° C. The resin (F) is dissolved in the solvent (H).

第一態樣的感光性樹脂組成物,藉由硬化會成為硬化物,當利用氧化劑處理該硬化物的表面來進行粗糙化時,其能夠抑制由於氧化劑所造成的硬化物的厚度過度地減少,且能夠抑制處理後的表面變得不均勻的情況。The photosensitive resin composition of the first aspect becomes a hardened material by hardening. When the surface of the hardened material is roughened with an oxidizing agent, it can suppress an excessive reduction in the thickness of the hardened material due to the oxidizing agent. In addition, it is possible to suppress the unevenness of the surface after the treatment.

第二態樣的感光性樹脂組成物,是針對第一態樣,其中,三氮雜苯樹脂(F),具有至少一個三氮雜苯骨架,且具有至少一個鍵結在三氮雜苯骨架上的胺基。胺基是二級胺基或三級胺基。The second aspect of the photosensitive resin composition is directed to the first aspect, wherein the triazabenzene resin (F) has at least one triazabenzene skeleton and has at least one bond to the triazabenzene skeleton. On the amine group. The amine group is a secondary amine group or a tertiary amine group.

根據第二態樣,即便利用氧化劑處理硬化物層的表面來進行粗糙化,仍能夠維持其表面的均勻性,並且能夠使硬化物層與鍍覆層的密合性提升。According to the second aspect, even if the surface of the hardened layer is roughened with an oxidizing agent, the surface uniformity can be maintained, and the adhesion between the hardened layer and the plating layer can be improved.

第三態樣的感光性樹脂組成物,是針對第二態樣,其中,二級胺基是N-羥甲基或N-烷氧基烷基,三級胺基是N,N-二羥甲基、N-羥甲基-N-烷氧基烷基或N,N-雙(烷氧基烷基)。The third aspect of the photosensitive resin composition is directed to the second aspect, wherein the secondary amine group is N-hydroxymethyl or N-alkoxyalkyl, and the tertiary amine group is N, N-dihydroxy. Methyl, N-hydroxymethyl-N-alkoxyalkyl or N, N-bis (alkoxyalkyl).

根據第三態樣,即便利用氧化劑處理硬化物層的表面來進行粗糙化,仍能夠維持其表面的均勻性,並且能夠使硬化物層與鍍覆層的密合性提升。According to the third aspect, even if the surface of the hardened layer is roughened with an oxidizing agent, the surface uniformity can be maintained, and the adhesion between the hardened layer and the plating layer can be improved.

第四態樣的感光性樹脂組成物,是針對第二態樣或第三態樣,其中,三級胺基是選自由-N(CH2 OR12 )2 基、-N(CH2 OR12 )(CH2 OR14 )基、-N(CH2 OR14 )2 基及-N(CH2 OH)(CH2 OR12 )基所組成之群組中的至少一種基團。R12 和R14 各自獨立地是碳數1以上且4以下的烷基。The fourth aspect of the photosensitive resin composition is directed to the second aspect or the third aspect, wherein the tertiary amine group is selected from the group consisting of -N (CH 2 OR 12 ) 2 and -N (CH 2 OR 12 ) (CH 2 OR 14 ) group, -N (CH 2 OR 14 ) 2 group, and -N (CH 2 OH) (CH 2 OR 12 ) group. R 12 and R 14 are each independently an alkyl group having 1 to 4 carbon atoms.

根據第四態樣,即便利用氧化劑處理硬化物層的表面來進行粗糙化,仍能夠維持其表面的均勻性,並且能夠使硬化物層與鍍覆層的密合性提升。According to the fourth aspect, even if the surface of the hardened layer is roughened with an oxidizing agent, the surface uniformity can be maintained, and the adhesion between the hardened layer and the plating layer can be improved.

第五態樣的感光性樹脂組成物,是針對第一態樣~第四態樣中的任一態樣,其中,相對於感光性樹脂組成物的固體成分總量,前述有機填料(E1)的量是1質量%以上且25質量%以下。The fifth aspect of the photosensitive resin composition is directed to any one of the first aspect to the fourth aspect, wherein the organic filler (E1) with respect to the total solid content of the photosensitive resin composition. The amount is 1 mass% or more and 25 mass% or less.

根據第五態樣,能夠對由感光性樹脂組成物所構成之硬化物賦予解析性,進一步當在對該硬化物賦予粗糙面而成的硬化物層上實施鍍覆處理來形成鍍覆層時,能夠使此時的硬化物層與鍍覆層的密合性更加提升。According to the fifth aspect, it is possible to impart resolution to a hardened material composed of a photosensitive resin composition, and further to form a plating layer by subjecting the hardened material layer having a roughened surface to the hardened material to form a plating layer. , The adhesion between the hardened layer and the plating layer at this time can be further improved.

第六態樣的感光性樹脂組成物,是針對第一態樣~第五態樣中的任一態樣,其中,相對於含羧基樹脂(A)的量,三氮雜苯樹脂(F)的量是0.5質量%且20質量%以下。The sixth aspect of the photosensitive resin composition is directed to any of the first aspect to the fifth aspect, wherein the triazabenzene resin (F) is relative to the amount of the carboxyl group-containing resin (A). The amount is 0.5% by mass to 20% by mass.

根據第六態樣,當對感光性樹脂組成物的硬化物賦予粗糙面時,能夠更加抑制此時的硬化物層的厚度減少,並且能夠更加抑制粗糙面化處理後的表面變得不均勻的情況。又,若在該範圍內,能夠維持由感光性樹脂組成物所構成之硬化物的解析性。進一步,此時,當在對該硬化物賦予粗糙面而成的硬化物層上實施鍍覆處理來形成鍍覆層時,能夠使此時的硬化物層與鍍覆層的密合性更加提升。According to the sixth aspect, when a roughened surface is provided to the cured product of the photosensitive resin composition, the reduction in thickness of the hardened layer at this time can be further suppressed, and the unevenness of the surface after the roughened surface treatment can be further suppressed. Happening. Moreover, if it is this range, the resolution of the hardened | cured material which consists of a photosensitive resin composition can be maintained. Further, at this time, when a plating layer is formed on the hardened material layer obtained by providing the hardened surface with a rough surface to form a plating layer, the adhesion between the hardened material layer and the plated layer at this time can be further improved. .

第七態樣的感光性樹脂組成物,是針對第一態樣~第六態樣中的任一態樣,其中,有機填料(E1)的平均一次粒徑是1μm以下。The seventh aspect of the photosensitive resin composition is directed to any one of the first aspect to the sixth aspect, wherein the average primary particle diameter of the organic filler (E1) is 1 μm or less.

根據第七態樣,可效率良好地提高感光性樹脂組成物的流變性。因此,感光性樹脂組成物的穩定性會進一步提升。又,此時,被形成在硬化物的粗糙面的粗糙度能夠變得細緻。藉此,伴隨硬化物的表面積增加會使錨定效果變大,而能夠提升與前述鍍覆層的密合性。According to the seventh aspect, the rheology of the photosensitive resin composition can be efficiently improved. Therefore, the stability of the photosensitive resin composition is further improved. At this time, the roughness of the rough surface formed on the hardened material can be made fine. Thereby, the anchoring effect becomes large as the surface area of the hardened material increases, and the adhesion with the plating layer can be improved.

第八態樣的感光性樹脂組成物,是針對第一態樣~第七態樣中的任一態樣,其中,有機填料(E1)包含橡膠成分。An eighth aspect of the photosensitive resin composition is any one of the first aspect to the seventh aspect, wherein the organic filler (E1) contains a rubber component.

根據第八態樣,能夠對感光性樹脂組成物的硬化物賦予柔軟性。According to the eighth aspect, flexibility can be imparted to the cured product of the photosensitive resin composition.

第九態樣的感光性樹脂組成物,是針對第八態樣,其中,橡膠成分含有選自由交聯丙烯酸系橡膠、交聯NBR、交聯MBS及交聯SBR所組成之群組中的至少一種聚合物。The ninth aspect of the photosensitive resin composition is directed to the eighth aspect, wherein the rubber component contains at least one selected from the group consisting of crosslinked acrylic rubber, crosslinked NBR, crosslinked MBS, and crosslinked SBR. A polymer.

根據第九態樣,橡膠成分能夠對感光性樹脂組成物的硬化物賦予優異的柔軟性。進一步,能夠對硬化物層的表面賦予更加適當的粗糙面。According to the ninth aspect, the rubber component can impart excellent flexibility to the cured product of the photosensitive resin composition. Furthermore, the surface of the hardened | cured material layer can be provided with a more appropriate rough surface.

第十態樣的感光性樹脂組成物,是針對第一態樣~第九態樣中的任一態樣,其中,含羧基樹脂(A)包含具有雙酚茀骨架之含羧基樹脂。The tenth aspect of the photosensitive resin composition is any one of the first aspect to the ninth aspect, wherein the carboxyl group-containing resin (A) includes a carboxyl group-containing resin having a bisphenol fluorene skeleton.

根據第十態樣,感光性樹脂組成物的硬化物可具有更加高的耐熱性和絕緣可靠性。According to the tenth aspect, the cured product of the photosensitive resin composition can have higher heat resistance and insulation reliability.

第十一態樣的感光性樹脂組成物,是針對第一態樣~第十態樣中的任一態樣,其中,進一步含有耦合劑(G)。耦合劑(G)具有選自由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中的至少一種原子,並且進一步包含耦合劑(G1),該耦合劑(G1)具有兩個以上選自由烷氧基、醯氧基及醇鹽基所組成之群組中的官能基。The eleventh aspect of the photosensitive resin composition is any one of the first aspect to the tenth aspect, and further includes a coupling agent (G). The coupling agent (G) has at least one atom selected from the group consisting of a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom, and further includes a coupling agent (G1), which has two or more options Free functional groups in the group consisting of alkoxy, fluorenyl and alkoxide groups.

根據第十一態樣,耦合劑(G1)藉由與含羧基樹脂(A)和有機填料(E1)所含有的羧基的反應或相互作用,可提高感光性樹脂組成物中的有機填料(E1)的分散性,故可使感光性樹脂組成物的流變性和穩定性(尤其是保存穩定性)提升。According to the eleventh aspect, the coupling agent (G1) can improve the organic filler (E1) in the photosensitive resin composition by reaction or interaction with the carboxyl group-containing resin (A) and the carboxyl group contained in the organic filler (E1). ), The rheology and stability (especially storage stability) of the photosensitive resin composition can be improved.

第十二態樣的感光性樹脂組成物,是針對第十一態樣,其中,耦合劑(G1)具有矽原子。The twelfth aspect of the photosensitive resin composition is the eleventh aspect, wherein the coupling agent (G1) has a silicon atom.

根據第十二態樣,感光性樹脂組成物中的有機填料(E1)的分散性會效率良好地提高。因此,感光性樹脂組成物的流變性和穩定性會進一步提升。According to the twelfth aspect, the dispersibility of the organic filler (E1) in the photosensitive resin composition is effectively improved. Therefore, the rheology and stability of the photosensitive resin composition are further improved.

第十三態樣的感光性樹脂組成物,是針對第十一或十二態樣,其中,耦合劑(G1)進一步具有選自由胺基、環氧基、乙烯基、(甲基)丙烯酸基、巰基、異氰酸酯基及硫醚基所組成之群組中的至少一種官能基。The thirteenth aspect of the photosensitive resin composition is directed to the eleventh or twelfth aspect, wherein the coupling agent (G1) further has a group selected from the group consisting of an amine group, an epoxy group, a vinyl group, and a (meth) acrylic group. At least one functional group in the group consisting of sulfhydryl group, isocyanate group and thioether group.

根據第十三態樣,能夠與有機填料(E1)中所包含的羧基進行反應,而進一步效率良好地提高感光性樹脂組成物中的有機填料(E1)的分散性。因此,感光性樹脂組成物的流變性、穩定性(尤其是保存穩定性)及解析性會進一步提升。According to the thirteenth aspect, it is possible to react with the carboxyl group contained in the organic filler (E1), and to further improve the dispersibility of the organic filler (E1) in the photosensitive resin composition more efficiently. Therefore, the rheology, stability (especially storage stability) and resolution of the photosensitive resin composition are further improved.

第十四態樣的乾膜,含有第一~第十三態樣中任一態樣所述之感光性樹脂組成物。A fourteenth aspect of the dry film includes the photosensitive resin composition according to any one of the first to thirteenth aspects.

第十四態樣的乾膜中,藉由硬化來形成硬化物,在利用氧化劑處理表面來進行粗糙面化時,能夠抑制此時由於氧化劑所造成的硬化物的厚度過度地減少,且能夠抑制處理後的表面變得不均勻的情況。又,由該乾膜能夠尤其良好地形成阻焊劑層和層間絕緣層等電絕緣性層。In the fourteenth aspect of the dry film, a hardened material is formed by hardening. When the surface is roughened with an oxidizing agent, the thickness of the hardened material due to the oxidizing agent at this time can be suppressed from being excessively reduced, and it can be suppressed. The treated surface becomes uneven. In addition, an electrically insulating layer such as a solder resist layer and an interlayer insulating layer can be formed particularly favorably from this dry film.

第十五態樣的印刷線路版,具備層間絕緣層,該層間絕緣層包含第一~第十三態樣中任一態樣所述之感光性樹脂組成物的硬化物。A fifteenth aspect of the printed wiring board includes an interlayer insulating layer including a cured product of the photosensitive resin composition according to any one of the first to thirteenth aspects.

根據第十五態樣,層間絕緣層藉由賦予有粗糙面,而能夠使層間絕緣層與金屬材料的密合性提升。According to the fifteenth aspect, the interlayer insulating layer can be provided with a rough surface to improve the adhesion between the interlayer insulating layer and the metal material.

第十六態樣的印刷線路板,具備阻焊劑層,該阻焊劑層包含第一~第十三態樣中任一態樣所述之感光性樹脂組成物的硬化物。A sixteenth aspect of the printed wiring board includes a solder resist layer including a cured product of the photosensitive resin composition according to any one of the first to thirteenth aspects.

根據第十六態樣,阻焊劑層藉由賦予有粗糙面,而能夠使層間絕緣層與金屬材料的密合性提升。According to the sixteenth aspect, the roughening of the solder resist layer can improve the adhesion between the interlayer insulating layer and the metal material.

1‧‧‧芯材1‧‧‧ core material

2‧‧‧絕緣層 2‧‧‧ Insulation

3‧‧‧第一導體線路 3‧‧‧ the first conductor line

4‧‧‧覆膜 4‧‧‧ film

5‧‧‧覆膜的未曝光的部分 5‧‧‧ unexposed part of the film

6‧‧‧孔 6‧‧‧hole

7‧‧‧層間絕緣膜 7‧‧‧ interlayer insulation film

8‧‧‧第二導體線路 8‧‧‧Second Conductor Line

9‧‧‧孔鍍覆 9‧‧‧hole plating

10‧‧‧貫穿孔 10‧‧‧through hole

第1圖A~E是顯示製造本發明的一實施形態中的多層印刷線路板的步驟的剖面圖。FIGS. 1A to 1E are cross-sectional views showing a step of manufacturing a multilayer printed wiring board according to an embodiment of the present invention.

國內寄存資訊 (請依寄存機構、日期、號碼順序註記)
Domestic storage information (please note in order of storage organization, date, and number)
no

國外寄存資訊 (請依寄存國家、機構、日期、號碼順序註記)
Information on foreign deposits (please note according to the order of the country, institution, date, and number)
no

Claims (17)

一種感光性樹脂組成物,其含有: 含羧基樹脂(A); 不飽和化合物(B),其在一分子中具有至少一個乙烯性不飽和鍵; 光聚合起始劑(C); 環氧化合物(D); 有機填料(E),其包含具有羧基之有機填料(E1);及, 三氮雜苯樹脂(F); 並且,前述三氮雜苯樹脂(F) ,滿足下述條件之中的至少一條件:在25℃時是液狀狀態;及,前述感光性樹脂組成物含有溶劑(H),且在25℃時前述三氮雜苯樹脂(F)會溶解於溶劑(H)中。A photosensitive resin composition containing: Carboxyl-containing resin (A); Unsaturated compound (B), which has at least one ethylenically unsaturated bond in one molecule; Photopolymerization initiator (C); Epoxy compound (D); An organic filler (E) comprising an organic filler (E1) having a carboxyl group; and, Triazabenzene resin (F); The triazabenzene resin (F) satisfies at least one of the following conditions: the liquid state is at 25 ° C; and the photosensitive resin composition contains a solvent (H) at 25 ° C At this time, the aforementioned triazabenzene resin (F) is dissolved in the solvent (H). 如請求項1所述之感光性樹脂組成物,其中,前述三氮雜苯樹脂(F),具有至少一個三氮雜苯骨架,且具有至少一個鍵結在前述三氮雜苯骨架上的胺基, 前述胺基是二級胺基或三級胺基。The photosensitive resin composition according to claim 1, wherein the triazabenzene resin (F) has at least one triazabenzene skeleton and at least one amine bonded to the triazabenzene skeleton. base, The aforementioned amine group is a secondary amine group or a tertiary amine group. 如請求項2所述之感光性樹脂組成物,其中,前述二級胺基是N-羥甲基或N-烷氧基烷基, 前述三級胺基是N,N-二羥甲基、N-羥甲基-N-烷氧基烷基或N,N-雙(烷氧基烷基)。The photosensitive resin composition according to claim 2, wherein the secondary amine group is N-methylol or N-alkoxyalkyl, The tertiary amine group is N, N-dimethylol, N-hydroxymethyl-N-alkoxyalkyl, or N, N-bis (alkoxyalkyl). 如請求項2或3所述之感光性樹脂組成物,其中,前述三級胺基是選自由-N(CH2 OR12 )2 基、-N(CH2 OR12 )(CH2 OR14 )基、-N(CH2 OR14 )2 基及-N(CH2 OH)(CH2 OR12 )基所組成之群組中的至少一種基團, 前述R12 和R14 各自獨立地是碳數1以上且4以下的烷基。The photosensitive resin composition according to claim 2 or 3, wherein the tertiary amine group is selected from the group consisting of -N (CH 2 OR 12 ) 2 and -N (CH 2 OR 12 ) (CH 2 OR 14 ) At least one group in the group consisting of -N (CH 2 OR 14 ) 2 group and -N (CH 2 OH) (CH 2 OR 12 ) group, each of the aforementioned R 12 and R 14 is independently carbon An alkyl group having a number of 1 or more and 4 or less. 如請求項1~3中任一項所述之感光性樹脂組成物,其中,相對於前述感光性樹脂組成物的固體成分總量,前述有機填料(E1)的量是1質量%以上且25質量%以下。The photosensitive resin composition according to any one of claims 1 to 3, wherein the amount of the organic filler (E1) is 1% by mass or more and 25% with respect to the total solid content of the photosensitive resin composition. Mass% or less. 如請求項1~3中任一項所述之感光性樹脂組成物,其中,相對於前述含羧基樹脂(A)的量,前述三氮雜苯樹脂(F)的量是0.5質量%且20質量%以下。The photosensitive resin composition according to any one of claims 1 to 3, wherein the amount of the triazabenzene resin (F) is 0.5% by mass and 20% with respect to the amount of the carboxyl group-containing resin (A). Mass% or less. 如請求項1~3中任一項所述之感光性樹脂組成物,其中,前述有機填料(E1)的平均一次粒徑是1μm以下。The photosensitive resin composition as described in any one of Claims 1-3 whose average primary particle diameter of the said organic filler (E1) is 1 micrometer or less. 如請求項1~3中任一項所述之感光性樹脂組成物,其中,前述有機填料(E1)包含橡膠成分。The photosensitive resin composition according to any one of claims 1 to 3, wherein the organic filler (E1) contains a rubber component. 如請求項8所述之感光性樹脂組成物,其中,前述橡膠成分含有選自由交聯丙烯酸系橡膠、交聯NBR、交聯MBS及交聯SBR所組成之群組中的至少一種聚合物。The photosensitive resin composition according to claim 8, wherein the rubber component contains at least one polymer selected from the group consisting of a crosslinked acrylic rubber, a crosslinked NBR, a crosslinked MBS, and a crosslinked SBR. 如請求項1~3中任一項所述之感光性樹脂組成物,其中,前述含羧基樹脂(A)包含具有雙酚茀骨架之含羧基樹脂。The photosensitive resin composition according to any one of claims 1 to 3, wherein the carboxyl group-containing resin (A) includes a carboxyl group-containing resin having a bisphenol fluorene skeleton. 如請求項1~3中任一項所述之感光性樹脂組成物,其中,進一步含有耦合劑(G), 前述耦合劑(G)具有選自由矽原子、鋁原子、鈦原子及鋯原子所組成之群組中的至少一種原子,並且進一步包含耦合劑(G1),該耦合劑(G1)具有兩個以上選自由烷氧基、醯氧基及醇鹽基所組成之群組中的官能基。The photosensitive resin composition according to any one of claims 1 to 3, further comprising a coupling agent (G), The coupling agent (G) has at least one atom selected from the group consisting of a silicon atom, an aluminum atom, a titanium atom, and a zirconium atom, and further includes a coupling agent (G1), which has two or more A functional group selected from the group consisting of alkoxy, fluorenyloxy, and alkoxide groups. 如請求項11所述之感光性樹脂組成物,其中,前述耦合劑(G1)具有矽原子。The photosensitive resin composition according to claim 11, wherein the coupling agent (G1) has a silicon atom. 如請求項11所述之感光性樹脂組成物,其中,前述耦合劑(G1) 進一步具有選自由胺基、環氧基、乙烯基、(甲基)丙烯酸基、巰基、異氰酸酯基及硫醚基所組成之群組中的至少一種官能基。The photosensitive resin composition according to claim 11, wherein the coupling agent (G1) further has a member selected from the group consisting of an amine group, an epoxy group, a vinyl group, a (meth) acrylic group, a mercapto group, an isocyanate group, and a thioether group. At least one functional group in the formed group. 如請求項12所述之感光性樹脂組成物,其中,前述耦合劑(G1) 進一步具有選自由胺基、環氧基、乙烯基、(甲基)丙烯酸基、巰基、異氰酸酯基及硫醚基所組成之群組中的至少一種官能基。The photosensitive resin composition according to claim 12, wherein the coupling agent (G1) further has a member selected from the group consisting of an amine group, an epoxy group, a vinyl group, a (meth) acrylic group, a mercapto group, an isocyanate group, and a thioether group. At least one functional group in the formed group. 一種乾膜,其含有請求項1~14中任一項所述之感光性樹脂組成物。A dry film containing the photosensitive resin composition according to any one of claims 1 to 14. 一種印刷線路板,其具備層間絕緣層,該層間絕緣層包含請求項1~14中任一項所述之感光性樹脂組成物的硬化物。A printed wiring board including an interlayer insulating layer including a cured product of the photosensitive resin composition according to any one of claims 1 to 14. 一種印刷線路板,其具備阻焊劑層,該阻焊劑層包含請求項1~14中任一項所述之感光性樹脂組成物的硬化物。A printed wiring board including a solder resist layer containing a cured product of the photosensitive resin composition according to any one of claims 1 to 14.
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