WO2016121395A1 - Light-sensitive resin composition, dry film, and printed circuit board - Google Patents

Light-sensitive resin composition, dry film, and printed circuit board Download PDF

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Publication number
WO2016121395A1
WO2016121395A1 PCT/JP2016/000428 JP2016000428W WO2016121395A1 WO 2016121395 A1 WO2016121395 A1 WO 2016121395A1 JP 2016000428 W JP2016000428 W JP 2016000428W WO 2016121395 A1 WO2016121395 A1 WO 2016121395A1
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WO
WIPO (PCT)
Prior art keywords
resin composition
photosensitive resin
carboxyl group
group
acid
Prior art date
Application number
PCT/JP2016/000428
Other languages
French (fr)
Japanese (ja)
Inventor
倫也 樋口
橋本 壯一
尚 丸澤
田中 信也
貴 荒井
浩信 川里
真司 稲葉
Original Assignee
互応化学工業株式会社
新日鉄住金化学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2015014500A external-priority patent/JP6767090B2/en
Priority claimed from JP2016008984A external-priority patent/JP6391121B2/en
Application filed by 互応化学工業株式会社, 新日鉄住金化学株式会社 filed Critical 互応化学工業株式会社
Priority to CN201680007349.5A priority Critical patent/CN107209457B/en
Priority to KR1020187033307A priority patent/KR20180125634A/en
Priority to KR1020177021274A priority patent/KR20170102307A/en
Publication of WO2016121395A1 publication Critical patent/WO2016121395A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits

Definitions

  • the present invention relates to a photosensitive resin composition, a dry film that is a dried product of the photosensitive resin composition, a printed wiring board including a solder resist layer that includes a cured product of the photosensitive resin composition, and the photosensitive resin composition.
  • the present invention relates to a printed wiring board including an interlayer insulating layer containing a cured product.
  • an electrically insulating resin composition has been used to form electrically insulating layers such as a solder resist layer, a plating resist layer, an etching resist layer, and an interlayer insulating layer of a printed wiring board.
  • a resin composition is, for example, a photosensitive resin composition.
  • Japanese Patent No. 4508929 discloses the use of a carboxyl group-containing resin having a fluorene skeleton obtained by reacting fluorene epoxy (meth) acrylate with a polyvalent carboxylic acid or an anhydride thereof.
  • a plating layer may be formed on a layer made of a cured product of a photosensitive resin composition containing a carboxyl group-containing resin having a bisphenolfluorene skeleton.
  • the surface of the cured product layer is roughened with an oxidizing agent containing, for example, potassium permanganate, so that the cured product layer and the plating layer are obtained. May improve the adhesion.
  • the cured product layer is treated with the oxidizing agent, the surface of the cured product layer may be corroded, and the thickness of the layer may be reduced.
  • a carboxyl group-containing resin having a bisphenolfluorene skeleton has a relatively high resistance to the oxidizing agent, but even if the photosensitive resin composition contains this carboxyl group-containing resin, the thickness of the cured product layer is not oxidized. May become thinner with the agent.
  • a carboxyl group-containing resin having a bisphenolfluorene skeleton may reduce the developability of the photosensitive resin composition. If the molecular weight of the carboxyl group-containing resin is decreased in order to improve developability, the resistance of the cured layer to the oxidizing agent is reduced, and the thickness of the cured product layer is further reduced with the oxidizing agent. May end up. For this reason, in order to improve the adhesiveness of hardened
  • the object of the present invention is to obtain an excellent developability even when the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, and in the preceding step of the plating treatment,
  • a photosensitive resin composition capable of making it difficult to reduce the thickness of the cured product with an oxidizing agent and roughening the surface of the cured product with an oxidizing agent, a dry film that is a dried product of the photosensitive resin composition, It is providing a printed wiring board provided with the soldering resist layer containing the hardened
  • a photosensitive resin composition includes a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, a photopolymerization initiator ( C), an epoxy compound (D), and a component (E) containing at least one compound selected from the group of melamine and melamine derivatives, wherein the carboxyl group-containing resin (A) is a bisphenolfluorene skeleton. Containing a carboxyl group-containing resin (A1).
  • the dry film according to one embodiment of the present invention is a dried product of the photosensitive resin composition.
  • a printed wiring board according to an aspect of the present invention includes an interlayer insulating layer containing a cured product of the photosensitive resin composition.
  • a printed wiring board according to an aspect of the present invention includes a solder resist layer containing a cured product of the photosensitive resin composition.
  • the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, excellent developability can be obtained, and curing can be performed in the previous step of the plating treatment.
  • the thickness of the product layer can be made difficult to reduce with an oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.
  • FIGS. 1A to 1E are cross-sectional views illustrating steps of manufacturing a multilayer printed wiring board according to an embodiment of the present invention.
  • (meth) acryl means at least one of “acryl” and “methacryl”.
  • (meth) acrylate means at least one of acrylate and methacrylate.
  • the photosensitive resin composition according to this embodiment includes a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (C). And an epoxy compound (D) and a component (E).
  • the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) having a bisphenolfluorene skeleton.
  • the carboxyl group-containing resin (A1) is, for example, a reaction product of an intermediate that is a reaction product of the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) and an acid anhydride.
  • the epoxy compound (a1) is represented by the following formula (1), and in the formula (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or halogen, and a bisphenolfluorene skeleton. Have.
  • the carboxyl group-containing resin (A1) is synthesized by reacting the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2), and reacting the resulting intermediate with an acid anhydride.
  • Each of R 1 to R 8 in Formula (1) may be hydrogen, but may be an alkyl group having 1 to 5 carbon atoms or halogen. This is because even if hydrogen in the aromatic ring is substituted with a low molecular weight alkyl group or halogen, the physical properties of the carboxyl group-containing resin (A1) are not adversely affected, but rather the photosensitive resin composition containing the carboxyl group-containing resin (A1). This is because the heat resistance or flame retardancy of the cured product may be improved.
  • Component (E) contains at least one compound from the group of melamine and melamine derivatives.
  • a component (E) may contain only a melamine, may contain only a melamine derivative, and may contain a melamine and a melamine derivative.
  • Melamine is 2,4,6-triamino-1,3,5-triazine and is generally available from commercially available compounds.
  • the melamine derivative may be a compound having one triazine ring and an amino group in one molecule. Examples of melamine derivatives include guanamine; acetoguanamine; benzoguanamine; 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-4,6-diamino-S-triazine, 2-vinyl-4,6.
  • -S-triazine derivatives such as diamino-S-triazine isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triazine isocyanuric acid adduct; and melamine such as melamine-tetrahydrophthalate
  • melamine derivatives include Shikoku Kasei Kogyo Co., Ltd. product name VD-1, product name VD-2, and product name VD-3.
  • the melamine derivative is preferably a compound having one triazine ring and two or more amino groups in one molecule.
  • the melamine derivative does not contain melamine.
  • the melamine derivative dispersed in the photosensitive resin composition is included in, for example, the conductive wiring of the plating layer or the core material and arranged with the metal element located on the contact surface with the photosensitive resin composition. Join. For this reason, the adhesiveness of the photosensitive resin composition can be improved.
  • the metal element include gold, silver, copper, and nickel.
  • the component (E) When the component (E) is soluble or hardly soluble in the photosensitive resin composition, the component (E) having an average particle size of 20 ⁇ m or less, preferably 15 ⁇ m or less is dispersed in the photosensitive resin composition. Good. In this case, since the component (E) is uniformly dispersed in the photosensitive resin composition, the component (E) is more easily coordinated with the metal element. Thereby, the adhesiveness of the photosensitive resin composition can further be improved. Although the minimum of the average particle diameter of a component (E) is not specifically limited, It can be 0.01 micrometer or more. The average particle diameter of Component (E), by a laser diffraction particle size distribution measuring apparatus in a state of being dispersed component (E) in the photosensitive resin composition of the uncured, measured as D 50.
  • the carboxyl group-containing resin (A1) will be described more specifically.
  • the carboxyl group-containing resin (A1) first, at least a part of the epoxy group (see formula (2)) of the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2).
  • the intermediate is then synthesized.
  • the intermediate has a structure (S3) represented by the following formula (3) generated by a ring-opening addition reaction between an epoxy group and an unsaturated group-containing carboxylic acid (a2). That is, the intermediate has a secondary hydroxyl group generated by a ring-opening addition reaction between an epoxy group and an unsaturated group-containing carboxylic acid (a2) in the structure (S3).
  • A is an unsaturated group-containing carboxylic acid residue.
  • carboxyl group-containing resin (A1) can be synthesized.
  • the acid anhydride may contain at least one of acid dianhydride (a3) and acid monoanhydride (a4).
  • the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1) represented by the formula (1) and a structure (S4) represented by the following formula (4). And have.
  • the structure (S4) is generated by the reaction between the secondary hydroxyl group in the intermediate structure (S3) and the acid anhydride group in the acid monoanhydride (a4).
  • A is an unsaturated group-containing carboxylic acid residue
  • B is an acid monoanhydride residue.
  • the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1) and a structure (S5) represented by the following formula (5).
  • Structure (S5) is generated by the reaction between two acid anhydride groups in acid dianhydride (a3) and two secondary hydroxyl groups in the intermediate. That is, the structure (S5) is generated by crosslinking the two secondary hydroxyl groups with the acid dianhydride (a3).
  • the case where two secondary hydroxyl groups present in one molecule of the intermediate are crosslinked and the case where two secondary hydroxyl groups present in each of the two molecules of the intermediate are crosslinked It is possible.
  • the two secondary hydroxyl groups present in the two molecules of the intermediate are cross-linked, the molecular weight increases.
  • A is an unsaturated group-containing carboxylic acid residue
  • D is an acid dianhydride residue.
  • a secondary hydroxyl group in the intermediate and an acid anhydride can be reacted to obtain a carboxyl group-containing resin (A1).
  • the acid anhydride contains an acid dianhydride (a3) and an acid monoanhydride (a4)
  • a part of the secondary hydroxyl group in the intermediate is reacted with the acid dianhydride (a3)
  • Another part of the secondary hydroxyl groups in the intermediate is reacted with acid monoanhydride (a4).
  • carboxyl group-containing resin (A1) can be synthesized.
  • the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1), a structure (S4), and a structure (S5).
  • the carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6).
  • the structure (S6) occurs when only one of the two acid anhydride groups in the acid dianhydride (a3) reacts with the secondary hydroxyl group in the intermediate.
  • A is an unsaturated group-containing carboxylic acid residue
  • D is an acid dianhydride residue.
  • the carboxyl group-containing resin (A1) has a structure (S2) represented by the formula (2), that is, an epoxy group It is possible. Further, when a part of the structure (S3) in the intermediate remains unreacted, the carboxyl group-containing resin (A1) may have the structure (S3).
  • the structure (S2) in the carboxyl group-containing resin (A1) is optimized by optimizing the reaction conditions during the synthesis of the carboxyl group-containing resin (A1).
  • the number of structures (S6) is reduced, or the structure (S2) and the structure (S6) are almost eliminated from the carboxyl group-containing resin (A1).
  • the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1), and has a structure (S4) when the acid anhydride contains acid monoanhydride (a4).
  • S1 bisphenolfluorene skeleton
  • S4 structure when the acid anhydride contains acid monoanhydride (a4).
  • the carboxyl group-containing resin (A1) may have at least one of the structure (S2) and the structure (S3).
  • carboxyl group-containing resin (A1) may have at least 1 type in a structure (S2) and a structure (S6).
  • the carboxyl group-containing resin (A1) has a structure (S2), a structure (S3), a structure ( And at least one of S6).
  • the carboxyl group-containing resin (A1) is an epoxy compound (a1). It may have a structure produced by the reaction between the secondary secondary hydroxyl group and the acid anhydride.
  • the structure of the above-mentioned carboxyl group-containing resin (A1) is reasonably inferred based on the common general technical knowledge, and the structure of the carboxyl group-containing resin (A1) cannot be specified by analysis.
  • the reason is as follows.
  • the epoxy compound (a1) itself has a secondary hydroxyl group for example, when n is 1 or more in the formula (7)
  • the carboxyl group-containing resin depends on the number of secondary hydroxyl groups in the epoxy compound (a1).
  • the structure of (A1) changes greatly.
  • the intermediate and the acid dianhydride (a3) react, as described above, two secondary hydroxyl groups present in one molecule of the intermediate are acid dianhydrides (a3).
  • the carboxyl group-containing resin (A1) finally obtained contains a plurality of molecules having different structures, and even when the carboxyl group-containing resin (A1) is analyzed, the structure cannot be specified.
  • the carboxyl group-containing resin (A1) Since the carboxyl group-containing resin (A1) has an ethylenically unsaturated group derived from the unsaturated group-containing carboxylic acid (a2), it has photoreactivity. For this reason, carboxyl group-containing resin (A1) can impart photosensitivity (specifically, ultraviolet curable) to the photosensitive resin composition. Moreover, since the carboxyl group-containing resin (A1) has a carboxyl group derived from an acid anhydride, the photosensitive resin composition contains at least one of an alkali metal salt and an alkali metal hydroxide. It is possible to impart developability with an aqueous solution.
  • the acid anhydride contains an acid dianhydride (a3)
  • the molecular weight of the carboxyl group-containing resin (A1) depends on the number of crosslinks by the acid dianhydride (a3). For this reason, the carboxyl group-containing resin (A1) in which the acid value and the molecular weight are appropriately adjusted is obtained.
  • the acid anhydride contains acid dianhydride (a3) and acid dianhydride (a4)
  • a carboxyl group-containing resin (A1) having a desired molecular weight and acid value can be easily obtained.
  • the weight average molecular weight of the carboxyl group-containing resin (A1) is preferably in the range of 700 to 10,000.
  • the weight average molecular weight is 700 or more, the tackiness of the film formed from the photosensitive resin composition is further suppressed, and the insulation reliability and plating resistance of the cured product are further improved.
  • the developability by the alkaline aqueous solution of the photosensitive resin composition improves especially that a weight average molecular weight is 10,000 or less.
  • the weight average molecular weight is more preferably in the range of 900 to 8000, and particularly preferably in the range of 1000 to 5000.
  • the solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH / g. In this case, the developability of the photosensitive resin composition is particularly improved.
  • the solid content acid value is more preferably in the range of 80 to 135 mgKOH / g, and still more preferably in the range of 90 to 130 mgKOH / g.
  • the weight average molecular weight (Mw) of the carboxyl group-containing resin (A1) is calculated from the molecular weight measurement result by gel permeation chromatography.
  • the molecular weight measurement by gel permeation chromatography can be performed, for example, under the following conditions.
  • GPC device SHODEX SYSTEM 11, manufactured by Showa Denko KK
  • the epoxy compound (a1) has a structure (S7) represented by the following formula (7), for example.
  • N in the formula (7) is a number in the range of 0 to 20, for example.
  • the average of n is particularly preferably in the range of 0-1. If the average of n is in the range of 0 to 1, particularly when the acid anhydride contains acid dianhydride (a3), an excessive increase in molecular weight due to addition of acid dianhydride (a3) is likely to be suppressed. Become.
  • the unsaturated group-containing carboxylic acid (a2) can contain, for example, a compound having only one ethylenically unsaturated group in one molecule. More specifically, unsaturated group-containing carboxylic acid (a2) is, for example, acrylic acid, methacrylic acid, ⁇ -carboxy-polycaprolactone (n ⁇ 2) monoacrylate, crotonic acid, cinnamic acid, 2-acryloyloxyethyl succinate.
  • the reactive solution is obtained by adding the unsaturated group-containing carboxylic acid (a2) to the solvent solution of the epoxy compound (a1), further adding a thermal polymerization inhibitor and a catalyst as necessary, and stirring and mixing.
  • An intermediate can be obtained by reacting this reactive solution at a temperature of preferably 60 to 150 ° C., particularly preferably 80 to 120 ° C., by a conventional method.
  • Solvents include, for example, ketones such as methyl ethyl ketone and cyclohexanone, and aromatic hydrocarbons such as toluene and xylene, and ethyl acetate, butyl acetate, cellosolve acetate, butyl cellosolve acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether It can contain at least one component selected from the group consisting of acetates such as acetate and dialkyl glycol ethers.
  • the thermal polymerization inhibitor contains, for example, at least one of hydroquinone and hydroquinone monomethyl ether.
  • the catalyst is at least selected from the group consisting of tertiary amines such as benzyldimethylamine and triethylamine, quaternary ammonium salts such as trimethylbenzylammonium chloride and methyltriethylammonium chloride, triphenylphosphine, and triphenylstibine.
  • tertiary amines such as benzyldimethylamine and triethylamine
  • quaternary ammonium salts such as trimethylbenzylammonium chloride and methyltriethylammonium chloride
  • triphenylphosphine triphenylstibine.
  • a kind of component can be contained.
  • the catalyst contains triphenylphosphine. That is, it is preferable to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in the presence of triphenylphosphine. In this case, the ring-opening addition reaction between the epoxy group and the unsaturated group-containing carboxylic acid (a2) in the epoxy compound (a1) is particularly accelerated, and the reaction rate (conversion) is 95% or more, 97% or more, or almost 100%. Rate). For this reason, the intermediate body which has a structure (S3) is obtained with a high yield. Moreover, generation
  • the amount of the unsaturated group-containing carboxylic acid (a2) relative to 1 mol of the epoxy group of the epoxy compound (a1) is 0.8 to 1. It is preferably within a range of 2 moles. In this case, a photosensitive resin composition having excellent photosensitivity and storage stability can be obtained.
  • the intermediate thus obtained comprises a hydroxyl group generated by a reaction between the epoxy group of the epoxy compound (a1) and the carboxyl group of the unsaturated group-containing carboxylic acid (a2).
  • Acid dianhydride (a3) is a compound having two acid anhydride groups.
  • the acid dianhydride (a3) can contain an anhydride of tetracarboxylic acid.
  • Acid dianhydride (a3) is, for example, 1,2,4,5-benzenetetracarboxylic dianhydride, benzophenone tetracarboxylic dianhydride, methylcyclohexene tetracarboxylic dianhydride, tetracarboxylic dianhydride, Naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylenetetracarboxylic dianhydride, 9,9'-bis (3,4-dicarboxyphenyl) fluorene dianhydride, glycerin bisanhydrotri Melitate monoacetate, ethylene glycol bisanhydro trimellitate, 3,3 ', 4,4'-diphenylsulfone tetracarboxylic dianhydride, 1,3,
  • the acid dianhydride (a3) preferably contains 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferable that D in Formula (5) and Formula (6) includes a 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride residue. In this case, while ensuring good developability of the photosensitive resin composition, it is possible to further suppress the tackiness of a film formed from the photosensitive resin composition and further improve the insulation reliability and plating resistance of the cured product. .
  • the amount of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride relative to the total amount of acid dianhydride (a3) is preferably in the range of 20 to 100 mol%, and in the range of 40 to 100 mol%. Although it is more preferable to be within, it is not restricted to these ranges.
  • Acid monoanhydride (a4) is a compound having one acid anhydride group.
  • the acid monoanhydride (a4) can contain an anhydride of a dicarboxylic acid.
  • Examples of the acid monoanhydride (a4) include phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylnadic acid anhydride, hexahydrophthalic anhydride, methylhexa Hydrophthalic anhydride, succinic anhydride, methyl succinic anhydride, maleic anhydride, citraconic anhydride, glutaric anhydride, cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride, and It can contain at least one compound selected from the group consisting of itaconic anhydride.
  • the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. That is, the acid anhydride preferably contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferable that the carboxyl group-containing resin (A1) has the structure (S4), and B in the formula (4) includes a 1,2,3,6-tetrahydrophthalic anhydride residue.
  • the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. That is, the acid anhydride preferably contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferable that the carboxyl group-containing resin (A1) has the structure (S4), and B in the formula (4) includes a 1,2,3,6-tetrahydrophthalic anhydride residue.
  • the amount of 1,2,3,6-tetrahydrophthalic anhydride relative to the total amount of acid monoanhydride (a4) is preferably in the range of 20 to 100 mol%, and preferably in the range of 40 to 100 mol%. Although more preferable, it is not limited to these ranges.
  • a known method can be employed. For example, an acid anhydride is added to the solvent solution of the intermediate, and a thermal polymerization inhibitor and a catalyst are further added as necessary, followed by stirring and mixing to obtain a reactive solution. By reacting this reactive solution at a temperature of preferably 60 to 150 ° C., particularly preferably 80 to 120 ° C., a carboxyl group-containing resin (A1) can be obtained by a conventional method.
  • a solvent, catalyst and polymerization inhibitor appropriate ones can be used, and the solvent, catalyst and polymerization inhibitor used in the synthesis of the intermediate can also be used as they are.
  • the catalyst contains triphenylphosphine. That is, it is preferable to react an intermediate with an acid anhydride in the presence of triphenylphosphine. In this case, the reaction between the secondary hydroxyl group and the acid anhydride in the intermediate is particularly accelerated, and a reaction rate (conversion rate) of 90%, 95%, 97%, or almost 100% can be achieved. For this reason, the carboxyl group-containing resin (A1) having at least one of the structure (S4) and the structure (S5) is obtained in a high yield. Moreover, generation
  • the amount of the acid dianhydride (a3) is 1 mol of the epoxy group of the epoxy compound (a1), A range of 0.05 to 0.24 mol is preferred.
  • the amount of acid monoanhydride (a4) is preferably in the range of 0.3 to 0.7 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). In this case, the carboxyl group-containing resin (A1) in which the acid value and the molecular weight are appropriately adjusted can be easily obtained.
  • the carboxyl group-containing resin (A) may contain only the carboxyl group-containing resin (A1), or a carboxyl group-containing resin other than the carboxyl group-containing resin (A1) (hereinafter also referred to as carboxyl group-containing resin (F)). May further be contained.
  • the carboxyl group-containing resin (F) can contain, for example, a compound having a carboxyl group and not having photopolymerizability (hereinafter referred to as (F1) component).
  • (F1) A component contains the polymer of the ethylenically unsaturated monomer containing the ethylenically unsaturated compound which has a carboxyl group, for example.
  • the ethylenically unsaturated compound having a carboxyl group can contain compounds such as acrylic acid, methacrylic acid, and ⁇ -carboxy-polycaprolactone (n ⁇ 2) monoacrylate.
  • the ethylenically unsaturated compound having a carboxyl group can also contain a reaction product of pentaerythritol triacrylate, pentaerythritol trimethacrylate and the like with a dibasic acid anhydride.
  • Ethylenically unsaturated monomers include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or alicyclic (provided that It may further contain an ethylenically unsaturated compound having no carboxyl group, such as (meth) acrylic acid ester (which may partially have an unsaturated bond in the ring).
  • the carboxyl group-containing resin (F) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter referred to as (F2) component). Moreover, carboxyl group-containing resin (F) may contain only the (F2) component.
  • the component (F2) includes, for example, an intermediate that is a reaction product of an epoxy compound (g1) having two or more epoxy groups in one molecule and an ethylenically unsaturated compound (g2), a polyvalent carboxylic acid and its anhydride.
  • a resin (referred to as a first resin (g)) that is a reaction product with at least one compound (g3) selected from the group of substances.
  • the first resin (g) is obtained by adding the compound (g3) to an intermediate obtained by reacting the epoxy group in the epoxy compound (g1) with the carboxyl group in the ethylenically unsaturated compound (g2).
  • the epoxy compound (g1) can contain an appropriate epoxy compound such as a cresol novolac epoxy compound, a phenol novolac epoxy compound, or a biphenyl novolac epoxy compound.
  • the epoxy compound (g1) preferably contains at least one compound selected from the group of biphenyl novolac type epoxy compounds and cresol novolac type epoxy compounds.
  • the epoxy compound (g1) may contain only a biphenyl novolac type epoxy compound or may contain only a cresol novolac type epoxy compound.
  • the epoxy compound (g1) may contain a polymer of the ethylenically unsaturated compound (h).
  • the ethylenically unsaturated compound (h) contains a compound (h1) having an epoxy group such as glycidyl (meth) acrylate, or further has no epoxy group such as 2- (meth) acryloyloxyethyl phthalate.
  • the ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid and methacrylic acid.
  • the compound (g3) contains one or more compounds selected from the group consisting of polyvalent carboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid, and anhydrides of these polyvalent carboxylic acids.
  • the compound (g3) preferably contains at least one polycarboxylic acid selected from the group of phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid.
  • the component (F2) is a resin (second resin) that is a reaction product of a polymer of an ethylenically unsaturated monomer containing an ethylenically unsaturated compound having a carboxyl group and an ethylenically unsaturated compound having an epoxy group. (I)) may be contained.
  • the ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group.
  • the second resin (i) can be obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of the carboxyl group in the polymer.
  • the ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group.
  • the ethylenically unsaturated compound having a carboxyl group include compounds such as acrylic acid, methacrylic acid, ⁇ -carboxy-polycaprolactone (n ⁇ 2) monoacrylate, pentaerythritol triacrylate, and pentaerythritol trimethacrylate.
  • Examples of the ethylenically unsaturated compound having no carboxyl group include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or fatty acid It contains a compound such as a (meth) acrylic acid ester of a cyclic group (however, it may have a partially unsaturated bond in the ring).
  • the ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth) acrylate.
  • the carboxyl group-containing resin (A) contains only the carboxyl group-containing resin (A1) or the carboxyl group-containing resin (A1) and the carboxyl group-containing resin (F).
  • the carboxyl group-containing resin (A) preferably contains 30% by mass or more of the carboxyl group-containing resin (A1), more preferably 50% by mass or more, and still more preferably 100% by mass.
  • the heat resistance and insulation reliability of the cured product of the photosensitive resin composition can be particularly improved.
  • membrane formed from the photosensitive resin composition can fully be reduced.
  • the developability of the photosensitive resin composition with an alkaline aqueous solution can be secured.
  • the photosensitive resin composition includes a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (C). And an epoxy compound (D) and a component (E).
  • the unsaturated compound (B) can impart photocurability to the photosensitive resin composition.
  • the unsaturated compound (B) is, for example, a monofunctional (meth) acrylate such as 2-hydroxyethyl (meth) acrylate; and diethylene glycol di (meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) Acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ⁇ -caprolactone modified pentaerythritol hexaacrylate, tricyclodecandi
  • At least one compound selected from the group consisting of polyfunctional (meth) acrylates such as methanol di (meth) acrylate
  • the unsaturated compound (B) preferably contains a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule.
  • a trifunctional compound that is, a compound having three unsaturated bonds in one molecule.
  • Trifunctional compounds include, for example, trimethylolpropane tri (meth) acrylate, EO modified trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, ethoxylated isocyanuric acid tri (meth) acrylate and ⁇ -caprolactone modified It can contain at least one compound selected from the group consisting of tris- (2-acryloxyethyl) isocyanurate and ethoxylated glycerin tri (meth) acrylate.
  • the unsaturated compound (B) contains a phosphorus-containing compound (phosphorus-containing unsaturated compound).
  • Phosphorus-containing unsaturated compounds include, for example, 2-methacryloyloxyethyl acid phosphate (specific examples: product number light ester P-1M and light ester P-2M manufactured by Kyoeisha Chemical Co., Ltd.), 2-acryloyloxyethyl acid phosphate (Specific examples are product number light acrylate P-1A manufactured by Kyoeisha Chemical Co., Ltd.), diphenyl-2-methacryloyloxyethyl phosphate (specific examples are product number MR-260 manufactured by Daihachi Industry Co., Ltd.), and Showa Polymer Co., Ltd.
  • HFA series (part number HFA-6003, which is an addition reaction product of dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) as a specific example, and HFA-6007, caprolactone Product No. HFA-3003, HFA-6127, etc., which are addition reaction products of modified dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) It can contain at least one compound selected from the group.
  • the unsaturated compound (B) may contain a prepolymer.
  • the prepolymer is at least one selected from the group consisting of, for example, a prepolymer obtained by polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group, and oligo (meth) acrylate prepolymers These compounds can be contained.
  • Oligo (meth) acrylate prepolymers include, for example, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) acrylate, alkyd resin (meth) acrylate, silicone resin (meth) acrylate, and spirane resin (meth) acrylate At least one component selected from the group consisting of:
  • the photopolymerization initiator (C) contains, for example, an acyl phosphine oxide photopolymerization initiator (C1). That is, the photosensitive resin composition contains, for example, an acyl phosphine oxide photopolymerization initiator (C1).
  • the photosensitive resin composition contains the carboxyl group-containing resin (A1), high sensitivity to ultraviolet rays can be imparted to the photosensitive resin composition.
  • cured material of the photosensitive resin composition is suppressed, and the insulation reliability of the same layer improves further.
  • the acylphosphine oxide photopolymerization initiator (C1) is unlikely to hinder the electrical insulation of the cured product. For this reason, by curing the photosensitive resin composition by exposure, a cured product having excellent electrical insulation can be obtained.
  • This cured product can be used as, for example, a solder resist layer, a plating resist layer, an etching resist layer, or an interlayer insulating layer. Is preferred.
  • Acylphosphine oxide photopolymerization initiators (C1) include monoacyl such as 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, 2,4,6-trimethylbenzoyl-ethyl-phenyl-phosphinate, etc.
  • Phosphine oxide photopolymerization initiator and bis- (2,6-dichlorobenzoyl) phenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2 , 6-Dichlorobenzoyl) -4-propylphenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -1-naphthylphosphine oxide, bis- (2,6-dimethoxybenzoyl) phenylphosphine oxide, bis- (2,6-dimethoxybe Zoyl) -2,4,4-trimethylpentylphosphine oxide, bis- (2,6-dimethoxybenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2,4,6-trimethylbenzoyl) phenylphosphine Contains at least one component selected from the group consist
  • the acylphosphine oxide photopolymerization initiator (C1) preferably contains 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, and the acylphosphine oxide photopolymerization initiator (C1) contains 2, It is also preferred to contain only 4,6-trimethylbenzoyl-diphenyl-phosphine oxide.
  • the photopolymerization initiator (C) preferably contains a hydroxyketone photopolymerization initiator (C2) in addition to the acylphosphine oxide photopolymerization initiator (C1). That is, the photosensitive resin composition preferably contains a hydroxyketone photopolymerization initiator (C2). In this case, higher photosensitivity can be imparted to the photosensitive resin composition as compared with the case where the hydroxyketone photopolymerization initiator (C2) is not contained. Thereby, when irradiating and hardening an ultraviolet-ray to the coating film formed from the photosensitive resin composition, it becomes possible to fully harden a coating film over the deep part from the surface.
  • Examples of the hydroxyketone photopolymerization initiator (C2) include 1-hydroxy-cyclohexyl-phenyl-ketone, phenylglyoxyc acid methyl ester, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy -2-Methyl-1-propan-1-one, 2-hydroxy-1- ⁇ 4- [4- (2-hydroxy-2-methyl-propionyl) -benzyl] phenyl ⁇ -2-methyl-propane-1- On and 2-hydroxy-2-methyl-1-phenyl-propan-1-one.
  • the mass ratio of the acylphosphine oxide photopolymerization initiator (C1) and the hydroxyketone photopolymerization initiator (C2) is preferably in the range of 1: 0.01 to 1:10. In this case, the curability in the vicinity of the surface of the coating film formed from the photosensitive resin composition and the curability in the deep portion can be improved in a well-balanced manner.
  • the photopolymerization initiator (C) preferably contains bis (diethylamino) benzophenone (C3). That is, the photosensitive resin composition contains an acyl phosphine oxide photopolymerization initiator (C1) and bis (diethylamino) benzophenone (C3), or an acyl phosphine oxide photopolymerization initiator (C1), a hydroxyketone type. It is also preferable to contain a photopolymerization initiator (C2) and bis (diethylamino) benzophenone (C3). In this case, when developing after partially exposing the coating film formed from the photosensitive resin composition, since the hardening of the part which is not exposed is suppressed, resolution becomes especially high.
  • cured material of the photosensitive resin composition of a very fine pattern can be formed.
  • an interlayer insulating layer of a multilayer printed wiring board is prepared from a photosensitive resin composition and a small-diameter hole for a through hole is provided in the interlayer insulating layer by a photolithography method (see FIG. 1), the small-diameter hole is formed. Precise and easy to form.
  • the amount of bis (diethylamino) benzophenone (C3) relative to the acylphosphine oxide photopolymerization initiator (C1) is preferably in the range of 0.5 to 20% by mass.
  • the amount of bis (diethylamino) benzophenone (C3) with respect to the acylphosphine oxide photopolymerization initiator (C1) is 0.5% by mass or more, the resolution is particularly high.
  • the amount of bis (diethylamino) benzophenone (C3) relative to the acylphosphine oxide-based photopolymerization initiator (C1) is 20% by mass or less, the electrical insulation of the cured product of the photosensitive resin composition is increased to bis (diethylamino). ) Benzophenone (C3) is difficult to inhibit.
  • the photosensitive resin composition may further contain a known photopolymerization accelerator, sensitizer and the like.
  • the photosensitive resin composition includes benzoin and its alkyl ethers; acetophenones such as acetophenone and benzyldimethyl ketal; anthraquinones such as 2-methylanthraquinone; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2- Thioxanthones such as isopropylthioxanthone, 4-isopropylthioxanthone and 2,4-diisopropylthioxanthone; benzophenones such as benzophenone and 4-benzoyl-4′-methyldiphenyl sulfide; xanthones such as 2,4-diisopropylxanthone; ⁇ -hydroxyketones such as hydroxy-2-methyl-1-phenyl-propan-1-one; 2-methyl-1- [4-
  • the photosensitive resin composition includes known photopolymerization initiators (C) and tertiary amines such as p-dimethylbenzoic acid ethyl ester, p-dimethylaminobenzoic acid isoamyl ester, and 2-dimethylaminoethylbenzoate. You may contain a photoinitiator, a sensitizer, etc.
  • the photosensitive resin composition may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near infrared exposure, if necessary.
  • the photosensitive resin composition contains a photopolymerization initiator (C) and a coumarin derivative such as 7-diethylamino-4-methylcoumarin, which is a sensitizer for laser exposure, a carbocyanine dye system, a xanthene dye system, and the like. May be.
  • the epoxy compound (D) can impart thermosetting properties to the photosensitive resin composition.
  • the epoxy compound (D) preferably contains a crystalline epoxy resin. In this case, the developability of the photosensitive resin composition can be improved.
  • the epoxy compound (D) may further contain an amorphous epoxy resin.
  • the “crystalline epoxy resin” is an epoxy resin having a melting point
  • the “amorphous epoxy resin” is an epoxy resin having no melting point.
  • Examples of crystalline epoxy resins include 1,3,5-tris (2,3-epoxypropyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione, hydroquinone type crystals Epoxy resin (specifically, product name YDC-1312 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), biphenyl type crystalline epoxy resin (specifically, product name YX-4000 manufactured by Mitsubishi Chemical Corporation), diphenyl ether type crystalline epoxy resin (specifically For example, Nippon Steel & Sumikin Chemical Co., Ltd., product number YSLV-80DE), bisphenol type crystalline epoxy resin (specifically, Nippon Steel & Sumikin Chemical Co., Ltd.
  • product name YSLV-80XY tetrakisphenol ethane type crystalline epoxy resin (specific example) Nippon Kayaku Co., Ltd. product number GTR-1800), bisphenolfluorene type
  • the crystalline epoxy resin preferably has two epoxy groups in one molecule.
  • the crystalline epoxy resin preferably has an epoxy equivalent of 150 to 300 g / eq. This epoxy equivalent is the gram weight of a crystalline epoxy resin containing 1 gram equivalent of epoxy groups.
  • the crystalline epoxy resin has a melting point. Examples of the melting point of the crystalline epoxy resin include 70 to 180 ° C.
  • the epoxy compound (D) preferably contains a crystalline epoxy resin having a melting point of 110 ° C. or lower.
  • the developability of the photosensitive resin composition with an alkaline aqueous solution is particularly improved.
  • biphenyl type epoxy resins specifically, product number YX-4000 manufactured by Mitsubishi Chemical Corporation
  • biphenyl ether type epoxy resins specifically, product number YSLV manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.
  • a bisphenol-type epoxy resin specifically, product number YSLV-80XY manufactured by Nippon Steel & Sumikin Chemical
  • a bisphenolfluorene-type crystalline epoxy resin specifically, an epoxy resin having the structure (S7). At least one component.
  • Amorphous epoxy resins include, for example, phenol novolac type epoxy resins (specifically, product number EPICLON N-775 manufactured by DIC Corporation) and cresol novolac type epoxy resins (specific examples, product number EPICLON N-695 manufactured by DIC Corporation).
  • Bisphenol A novolac type epoxy resin (specific example, product number EPICLON N-865 manufactured by DIC Corporation), bisphenol A type epoxy resin (specific example, product number jER1001 manufactured by Mitsubishi Chemical Corporation), bisphenol F type epoxy resin (specific example As product number jER4004P manufactured by Mitsubishi Chemical Co., Ltd.), bisphenol S type epoxy resin (specifically, product number EPICLON EXA-1514 manufactured by DIC Corporation), bisphenol AD type epoxy resin, biphenyl novolac Type epoxy resin (part number NC-3000 manufactured by Nippon Kayaku Co., Ltd.), hydrogenated bisphenol A type epoxy resin (part number ST-4000D manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), naphthalene type epoxy resin (particular Examples include DIC Corporation part numbers EPICLON HP-4032, EPICLON HP-4700, EPICLON HP-4770), tertiary butyl catechol type epoxy resin (specific examples DIC Corporation part number EPICLON HP-820), dicyclopentad
  • Type epoxy resin (specifically, product number EPICLON HP-7200 manufactured by DIC), adamantane type epoxy resin (specific example, product number ADAMANTATE X-E-201 manufactured by Idemitsu Kosan Co., Ltd.), special bifunctional epoxy resin (tool)
  • product numbers YL7175-500 and YL7175-1000 manufactured by Mitsubishi Chemical Corporation product numbers EPICLON TSR-960, EPICLON TER-601, EPICLON TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA- manufactured by DIC Corporation 4850, EPICLON EXA-4816, EPICLON EXA-4822, and EPICLON EXA-9726
  • product number YSLV-120TE manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. rubber core-shell polymer modified bisphenol A type epoxy resin (specifically, manufactured by Kaneka Corporation) Product number MX-156), rubber-like core-shell polymer modified
  • the epoxy compound (D) may contain a phosphorus-containing epoxy resin.
  • the phosphorus-containing epoxy resin may be contained in the crystalline epoxy resin or may be contained in the amorphous epoxy resin.
  • Examples of the phosphorus-containing epoxy resin include phosphoric acid-modified bisphenol F type epoxy resin (specific examples, product numbers EPICLON EXA-9726 and EPICLON EXA-9710 manufactured by DIC Corporation), and product number Epototo FX-305 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. Etc.
  • the photosensitive resin composition according to this embodiment may contain an organic solvent.
  • the organic solvent is used for the purpose of liquefaction or varnishing of the photosensitive resin composition, viscosity adjustment, application property adjustment, film formation property adjustment, and the like.
  • Organic solvents include, for example, linear, branched, secondary or polyhydric alcohols such as ethanol, propyl alcohol, isopropyl alcohol, hexanol and ethylene glycol; ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene Petroleum aromatic mixed solvents such as Swazol series (manufactured by Maruzen Petrochemical Co., Ltd.) and Solvesso series (manufactured by Exxon Chemical Co.); cellosolves such as cellosolve and butylcellosolve; Tolls; propylene glycol alkyl ethers such as propylene glycol methyl ether; polypropylene glycol alkyl ethers such as dipropylene glycol methyl ether; ethyl acetate, butyl acetate, cellosolve acetate, cal Acetic acid esters such as tall acetate; as well as containing at least
  • the photosensitive resin composition contains an inorganic filler (K).
  • the inorganic filler (K) tends to be less corroded by the oxidizing agent than the cured product of the photosensitive resin composition. That is, the cured product of the photosensitive resin composition has a portion that is easily corroded by the oxidizing agent and a portion that is not easily corroded on the outer surface thereof. For this reason, when roughening the outer surface of the hardened
  • the inorganic filler (K) is, for example, one or more materials selected from the group consisting of barium sulfate, crystalline silica, nanosilica, carbon nanotubes, talc, bentonite, hydrotalcite, aluminum hydroxide, magnesium hydroxide, and titanium oxide. Can be contained.
  • the inorganic filler (K) contains a white material such as titanium oxide or zinc oxide, the photosensitive resin composition and its cured product can be whitened with the white material.
  • the amount of the inorganic filler (K) in the photosensitive resin composition is appropriately set, but the amount of the inorganic filler (K) with respect to the carboxyl group-containing resin (A) is in the range of 1 to 300% by mass. Preferably, it is in the range of 3 to 200% by mass, more preferably in the range of 5 to 100% by mass.
  • the inorganic filler (K) preferably contains silica (k).
  • Silica (k) has a hydroxyl group. This hydroxyl group is considered to be modified with the oxidizing agent. For this reason, a rough surface can be imparted to the surface of silica (k) with the oxidizing agent.
  • the cured product of the photosensitive resin composition is corroded with the oxidizing agent, even if it is a difficult corrosion site where silica (k) is located on the surface of the cured product, the difficult corrosion site is appropriately corroded with the oxidizing agent. be able to.
  • the rough surface more suitable for a plating process can be provided to hardened
  • Silica (k) preferably has an average particle size of 1 ⁇ m or less.
  • the lower limit of the average particle diameter of silica (k) is not particularly limited, but is preferably 0.001 ⁇ m or more, for example.
  • the average particle size by a laser diffraction particle size distribution measuring device, is measured as D 50.
  • the average particle size of silica (k) is more preferably 0.1 ⁇ m or less. In this case, the roughness of the rough surface formed in the cured product can be made particularly fine. In addition, scattering during exposure can be suppressed in the photosensitive resin composition, whereby the resolution of the photosensitive resin composition can be further improved.
  • the inorganic filler (K) contains only silica (k) or silica (k) and an inorganic filler other than silica (k).
  • the inorganic filler (K) preferably contains 30% by mass or more of silica (k), more preferably 50% by mass or more, and still more preferably 100% by mass. In this case, the adhesion between the cured product and the plating layer can be particularly improved.
  • the photosensitive resin composition preferably contains a silane coupling agent.
  • the dispersibility of the inorganic filler (K) can be improved.
  • the resolution of the photosensitive resin composition can also be improved.
  • the silane coupling agent is a compound containing a silicon atom and 2 to 4 hydrolyzable groups selected from the group of —OCH 3 group, —OC 2 H 5 group, and —OCOCH 3 group.
  • Silane coupling agents may contain reactive groups such as amino groups, epoxy groups, vinyl (allyl) groups, methacryl groups, mercapto groups, isocyanate groups, sulfide groups, or methyl groups in addition to hydrolyzable groups. Good.
  • silane coupling agents include 3- (2-aminoethylamino) propyldimethoxymethylsilane, 3- (2-aminoethylamino) propyltriethoxysilane, and 3- (2-aminoethylamino) propyltrimethoxysilane.
  • Amino compounds such as 3-aminopropyldiethoxymethylsilane, 3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, Epoxys such as 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-glycidyloxypropyl (dimethoxy) methylsilane, diethoxy (3-glycidyloxypropyl) methylsilane, 3-acryloxypropyltrimethoxysila (Meth) acrylates such as 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropylmethyldiethoxysilane, vinyltrimethoxysilane
  • the oxidizing agent may be an oxidizing agent available as a desmear liquid.
  • Such an oxidizing agent can contain, for example, at least one permanganate selected from the group of sodium permanganate and potassium permanganate.
  • the amount of the component in the photosensitive resin composition is appropriately adjusted so that the photosensitive resin composition has photocurability and can be developed with an alkaline solution.
  • the amount of the carboxyl group-containing resin (A) relative to the solid content of the photosensitive resin composition is preferably within the range of 5 to 85% by mass, more preferably within the range of 10 to 75% by mass, and 30 to 60%. If it is in the range of mass%, it is still more preferable.
  • the amount of the unsaturated compound (B) relative to the carboxyl group-containing resin (A) is preferably in the range of 1 to 50% by mass, more preferably in the range of 10 to 45% by mass, and 21 to 40% by mass. If it is in the range, it is more preferable.
  • the amount of the photopolymerization initiator (C) relative to the carboxyl group-containing resin (A) is preferably in the range of 0.1 to 30% by mass, and more preferably in the range of 1 to 25% by mass.
  • the total of the equivalents of epoxy groups contained in the epoxy compound (D) is 0.7 to 2.5 with respect to 1 equivalent of carboxyl groups contained in the carboxyl group-containing resin (A). Is preferably in the range of 0.7 to 2.3, more preferably in the range of 0.7 to 2.0. Further, the total of the equivalents of the epoxy groups contained in the crystalline epoxy resin is preferably in the range of 0.1 to 2.0 with respect to 1 equivalent of the carboxyl groups contained in the carboxyl group-containing resin (A), A range of 0.2 to 1.9 is more preferable, and a range of 0.3 to 1.5 is more preferable.
  • the amount of the component (E) relative to the carboxyl group-containing resin (A) is preferably in the range of 0.1 to 10% by mass, more preferably in the range of 0.5 to 5% by mass.
  • the amount of the organic solvent is such that when the coating film formed from the photosensitive resin composition is dried, the organic solvent is quickly volatilized and eliminated, that is, the organic solvent. Is preferably adjusted so as not to remain in the dry film.
  • the amount of the organic solvent relative to the entire photosensitive resin composition is preferably in the range of 0 to 99.5% by mass, and more preferably in the range of 15 to 60% by mass.
  • a ratio is suitably adjusted according to the application method.
  • solid content is a total amount of all the components remove
  • the photosensitive resin composition may further contain components other than the above components.
  • Photosensitive resin composition comprising tolylene diisocyanate, morpholine diisocyanate, isophorone diisocyanate and hexamethylene diisocyanate blocked isocyanates blocked with caprolactam, oxime, malonic acid ester, etc .; melamine resin, n-butylated melamine resin , Amino resins such as isobutylated melamine resin, butylated urea resin, butylated melamine urea cocondensation resin, benzoguanamine cocondensation resin; various other thermosetting resins; ultraviolet curable epoxy (meth) acrylate; bisphenol A type , Phenol novolak type, cresol novolak type, alicyclic type and other epoxy resins obtained by adding (meth) acrylic acid; and diallyl phthalate resin, phenoxy resin, urethane resin, fluorine resin At least one resin selected from the group consisting of polymer compounds may be contained.
  • the photosensitive resin composition may contain a curing agent for curing the epoxy compound (D).
  • the curing agent include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- (2 Imidazole derivatives such as -cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, Amine compounds such as 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic hydrazide and sebacic acid hydrazide; phosphorus compounds such as triphenylphosphine; acid anhydr
  • Photosensitive resin composition includes curing accelerator; colorant; copolymer such as silicone and acrylate; leveling agent; adhesion imparting agent such as silane coupling agent; thixotropic agent; polymerization inhibitor; antihalation agent; An antifoaming agent; an antioxidant; a surfactant; and at least one component selected from the group consisting of polymer dispersants.
  • the content of the amine compound in the photosensitive resin composition is preferably as small as possible. If it does in this way, the electrical insulation of the layer which consists of hardened
  • the amount of the amine compound relative to the carboxyl group-containing resin (A) is preferably 6% by mass or less, and more preferably 4% by mass or less.
  • the photosensitive resin composition can be prepared by blending the raw materials of the photosensitive resin composition as described above and kneading by a known kneading method using, for example, a three-roll, ball mill, sand mill or the like.
  • the raw material of the photosensitive resin composition contains a liquid component, a low viscosity component, etc.
  • the part of the raw material excluding the liquid component, the low viscosity component, etc. is first kneaded, and the resulting mixture is
  • the photosensitive resin composition may be prepared by adding and mixing a liquid component, a component having a low viscosity, and the like.
  • the first agent may be prepared by mixing a part of the components of the photosensitive resin composition
  • the second agent may be prepared by mixing the rest of the components.
  • the photosensitive resin composition may include a first agent and a second agent.
  • the unsaturated compound (B), a part of the organic solvent, and the thermosetting component are mixed in advance and dispersed to prepare the first agent.
  • the second agent may be prepared by mixing and dispersing the remainder of the components of the conductive resin composition. In this case, it is possible to prepare a mixed solution by mixing the necessary amount of the first agent and the second agent in a timely manner and curing the mixed solution to obtain a cured product.
  • the photosensitive resin composition according to this embodiment is suitable for an electrically insulating material for a printed wiring board.
  • the photosensitive resin composition is suitable for materials for electrically insulating layers such as a solder resist layer, a plating resist layer, an etching resist layer, and an interlayer insulating layer.
  • the photosensitive resin composition according to the present embodiment preferably has such a property that even a 25 ⁇ m thick film can be developed with an aqueous sodium carbonate solution.
  • the photosensitive resin composition since it is possible to produce a sufficiently thick electrically insulating layer from the photosensitive resin composition by a photolithography method, the photosensitive resin composition is used as an interlayer insulating layer, a solder resist layer, etc. in a printed wiring board. It can be widely applied to fabricate. Of course, it is also possible to produce an electrically insulating layer having a thickness of less than 25 ⁇ m from the photosensitive resin composition.
  • a wet paint film is formed by applying the photosensitive resin composition on a suitable substrate, and this wet paint film is heated at 80 ° C. for 30 minutes to form a film having a thickness of 25 ⁇ m.
  • the film is exposed by irradiating the film with ultraviolet rays under a condition of 500 mJ / cm 2 with a negative mask having an exposed part that transmits ultraviolet rays and a non-exposed part that blocks ultraviolet rays directly applied. After the exposure, a 1% Na 2 CO 3 aqueous solution at 30 ° C.
  • the film having a thickness of 25 ⁇ m can be developed with an aqueous sodium carbonate solution when a portion corresponding to the non-exposed portion of the film is removed and no residue is observed.
  • FIGS. 1A to 1E an example of a method for producing a printed wiring board including an interlayer insulating layer formed from the photosensitive resin composition according to the present embodiment will be described with reference to FIGS. 1A to 1E.
  • a through hole is formed in the interlayer insulating layer by photolithography.
  • a core material 1 is prepared as shown in FIG. 1A.
  • the core material 1 includes, for example, at least one insulating layer 2 and at least one conductor wiring 3.
  • the conductor wiring 3 provided on one surface of the core material 1 is hereinafter referred to as a first conductor wiring 3.
  • a film 4 is formed on one surface of the core material 1 from a photosensitive resin composition. Examples of the method for forming the film 4 include a coating method and a dry film method.
  • a photosensitive resin composition is applied on the core material 1 to form a wet paint film.
  • the method for applying the photosensitive resin composition is selected from the group consisting of known methods such as dipping, spraying, spin coating, roll coating, curtain coating, and screen printing.
  • the wet coating film is dried at a temperature in the range of 60 to 120 ° C., for example, whereby the coating film 4 can be obtained.
  • a photosensitive resin composition is first applied on an appropriate support made of polyester or the like and then dried to form a dry film that is a dried product of the photosensitive resin composition on the support. To do. Thereby, a laminated body provided with a dry film and the support body which supports a dry film is obtained. After the dry film in this laminate is overlaid on the core material 1, pressure is applied to the dry film and the core material 1, and then the support is peeled from the dry film, so that the dry film is placed on the core material 1 from the support. Transfer to Thereby, the coating 4 made of a dry film is provided on the core material 1.
  • the coating 4 is partially cured by exposing the coating 4 as shown in FIG. 1C.
  • a negative mask is applied to the film 4 and then the film 4 is irradiated with ultraviolet rays.
  • the negative mask includes an exposure part that transmits ultraviolet light and a non-exposure part that blocks ultraviolet light, and the non-exposure part is provided at a position that matches the position of the through hole 10.
  • the negative mask is a photo tool such as a mask film or a dry plate.
  • the ultraviolet light source is selected from the group consisting of chemical lamps, low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, and metal halide lamps, for example.
  • the exposure method may be a method other than a method using a negative mask.
  • the film 4 may be exposed by a direct drawing method in which only the portion of the film 4 to be exposed is irradiated with ultraviolet rays emitted from a light source.
  • the light source applied to the direct drawing method is, for example, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a metal halide lamp, g-line (436 nm), h-line (405 nm), i-line (365 nm), and g-line, h-line, and i-line. It is selected from the group consisting of two or more kinds of combinations.
  • the film 4 is exposed by irradiating the film 4 made of the dry film with ultraviolet rays through the support without peeling the support after the dry film in the laminate is stacked on the core material 1. Subsequently, the support may be peeled off from the film 4 before development processing.
  • the coating 4 is developed to remove the unexposed portion 5 of the coating 4 shown in FIG. 1C, whereby the hole 6 is formed at the position where the through hole 10 is formed as shown in FIG. 1D.
  • an appropriate developer according to the composition of the photosensitive resin composition can be used.
  • the developer is, for example, an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, or an organic amine.
  • the alkaline aqueous solution is, for example, sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, ammonium hydrogen carbonate, sodium hydroxide, potassium hydroxide, ammonium hydroxide, tetramethyl ammonium hydroxide and water. It contains at least one component selected from the group consisting of lithium oxide.
  • the solvent in the alkaline aqueous solution may be water alone or a mixture of water and a hydrophilic organic solvent such as lower alcohols.
  • the organic amine contains, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine and triisopropanolamine.
  • the developer is preferably an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. In this case, it is possible to improve the work environment and reduce the burden of waste disposal.
  • the coating 4 is cured by heating.
  • the heating conditions are, for example, a heating temperature range of 120 to 200 ° C. and a heating time range of 30 to 120 minutes.
  • the coating film 4 may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film 4 can be further advanced.
  • the interlayer insulating layer 7 made of a cured product of the photosensitive resin composition is provided on the core material 1.
  • the second conductor wiring 8 and the hole plating 9 can be provided on the interlayer insulating layer 7 by a known method such as an additive method.
  • a printed wiring board 11 having a through hole 10 for electrically connecting the first conductor wiring 3 and the second conductor wiring 8 is obtained.
  • the hole plating 9 has a cylindrical shape that covers the inner surface of the hole 6, but the entire inner side of the hole 6 may be filled with the hole plating 9.
  • the entire inner surface of the hole 6 and a part of the outer surface of the interlayer insulating layer 7 can be roughened. In this manner, the adhesion between the core material 1 and the hole plating 9 can be improved by roughening a part of the outer surface of the interlayer insulating layer 7 and the inner side surface of the hole 6.
  • the present invention is not limited to this, and a method of imparting a rough surface to a cured product such as plasma treatment, UV treatment, or ozone treatment can be appropriately employed.
  • an initial wiring can be formed by subjecting a part of the roughened outer surface and the inner side surface of the hole 6 to electroless metal plating. Thereafter, the hole plating 9 can be formed by depositing a metal in the electrolyte plating solution on the initial wiring by electrolytic metal plating.
  • the core material includes, for example, at least one insulating layer and at least one conductor wiring.
  • a film is formed from the photosensitive resin composition on the surface of the core material where the conductor wiring is provided.
  • Examples of the method for forming the film include a coating method and a dry film method.
  • the coating method and the dry film method the same method as that for forming the interlayer insulating layer can be employed.
  • the film is partially cured by exposure. The exposure method can be the same as the method for forming the interlayer insulating layer.
  • the film is subjected to a development process to remove the unexposed part of the film, whereby the exposed part of the film remains on the core material.
  • the coating on the core material is heated and cured.
  • the developing method and the heating method can be the same as the method for forming the interlayer insulating layer.
  • the film may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film can be further advanced.
  • a solderless resist layer made of a cured product of the photosensitive resin composition is provided on the core material.
  • a printed wiring board provided with the core material provided with an insulating layer and the conductor wiring on it, and the soldering resist layer which partially covers the surface in which the conductor wiring in a core material is provided is obtained.
  • Epoxy compound 1 a bisphenolfluorene type epoxy compound represented by the formula (7) and having an epoxy equivalent of 250 g / eq, wherein R 1 to R 8 in the formula (7) are all hydrogen.
  • Epoxy compound 2 epoxy equivalent 279 g represented by the formula (7), wherein R 1 and R 5 in the formula (7) are all methyl groups, and R 2 to R 4 and R 6 to R 8 are all hydrogen / Eq bisphenolfluorene type epoxy compound.
  • Epoxy compound A biphenyl novolac type epoxy resin (product name NC-3000-H manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 288 g / eq).
  • Epoxy compound B Cresol novolac type epoxy resin (product name YDC-700-5, manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., epoxy equivalent 203 g / eq).
  • ⁇ -carboxy-polycaprolactone (n ⁇ 2) monoacrylate manufactured by Toagosei Co., Ltd., trade name Aronix M-5300 (number average molecular weight 290).
  • Photopolymerization initiator (TPO) 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (product number Irgacure TPO manufactured by BASF).
  • Photopolymerization initiator (IC819) bis- (2,4,6-trimethylbenzoyl) phenylphosphine oxide (manufactured by BASF, product number Irgacure 819).
  • Photopolymerization initiator (IC1173) 2-hydroxy-2-methyl-1-phenyl-propan-1-one (manufactured by BASF, product number Irgacure 1173).
  • Photopolymerization initiator (EAB) 4,4′-bis (diethylamino) benzophenone.
  • Photopolymerization initiator (IC907) 2-methyl-1- (4-methylthiophenyl) -2-morpholinopropan-1-one (manufactured by BASF, product number Irgacure 907).
  • Photopolymerization initiator (DETX) 2,4-diethylthioxanthen-9-one.
  • Amorphous epoxy resin (EXA-4816): solution of amorphous epoxy resin; long-chain carbon chain-containing bisphenol A type epoxy resin (manufactured by DIC, product number EPICLON EXA-4816, liquid resin, epoxy equivalent 410 g / eq) A solution having a solid content of 90% and dissolved in diethylene glycol monoethyl ether acetate (epoxy equivalent in terms of solid content of 90% is 455.56 g / eq).
  • Melamine manufactured by Nissan Chemical Industries, Ltd., fine melamine; dispersed in the photosensitive resin composition with an average particle size of 8 ⁇ m.
  • Melamine derivative Melamine-tetrahydrophthalate which is a reaction product of melamine and 1,2,3,6-tetrahydrophthalic anhydride; dispersed in the photosensitive resin composition with an average particle size of 6 ⁇ m.
  • Antioxidant A hindered phenol antioxidant, manufactured by BASF, product number IRGANOX 1010.
  • Inorganic filler (A-8) crystalline silica (manufactured by Unimin, IMSIL A-8, average particle size of 2 to 3 ⁇ m).
  • Antifoaming agent manufactured by Shin-Etsu Silicone, product number KS-66.
  • Silane coupling agent 3-glycidoxypropyltrimethoxysilane.
  • Example 1 to 9 and Comparative Examples 1 and 2 [Production of test pieces] Each test piece of Examples 1 to 9 and Comparative Examples 1 and 2 was produced by the following procedure.
  • Examples 1 to 7, 9 and Comparative Examples 1 and 2 A glass epoxy copper clad laminate (FR-4 type) provided with a 35 ⁇ m thick copper foil was prepared.
  • a comb-type electrode having a line width / space width of 50 ⁇ m / 50 ⁇ m was formed as a conductor wiring on the glass epoxy copper clad laminate by a subtractive method, thereby obtaining a printed wiring board.
  • the conductor wiring was roughened by dissolving and removing the surface portion of the printed wiring board having a thickness of about 1 ⁇ m with a product number CZ-8100 manufactured by MEC Co., Ltd.
  • a wet paint film was formed by applying the photosensitive resin composition to the entire surface of the printed wiring board by screen printing.
  • This wet coating film was heated at 80 ° C. for 30 minutes and preliminarily dried to form a film having a thickness of 25 ⁇ m.
  • the film was exposed by irradiating the film with ultraviolet rays under the condition of 500 mJ / cm 2 in a state where a negative mask having a non-exposed portion having a pattern including a circular shape with a diameter of 50 ⁇ m was directly applied.
  • the exposed film was developed.
  • a 1% Na 2 CO 3 aqueous solution at 30 ° C. was sprayed onto the film for 90 seconds at a spray pressure of 0.2 MPa.
  • the coating film was washed by spraying pure water at a spray pressure of 0.2 MPa for 90 seconds.
  • the film was irradiated with ultraviolet rays under the condition of 1000 mJ / cm 2 .
  • the film was then heated at 150 ° C. for 60 minutes. This formed the layer which consists of hardened
  • Example 8 A photosensitive resin composition was obtained by kneading the components shown in the “Composition” column of Table 4 below with three rolls. When producing this photosensitive resin composition, melamine was uniformly dispersed in the photosensitive resin composition.
  • the photosensitive resin composition was applied on a polyethylene terephthalate film with an applicator and then dried by heating at 80 to 110 ° C. to form a dry film having a thickness of 25 ⁇ m on the film.
  • a dry film was heat-laminated on the same printed wiring board as in Examples 1 to 7 and 9 and Comparative Examples 1 and 2.
  • the heat lamination was performed with a vacuum laminator under conditions of 0.5 MPa, 80 ° C., and 1 minute. Thereby, a film having a thickness of 25 ⁇ m was formed on the printed wiring board.
  • a cured product of the photosensitive resin composition cured product of a dry film
  • the printed wiring board core material
  • Tackiness When the test pieces of each Example and Comparative Example were prepared, the degree of tackiness of the coating when the negative mask was removed from the coating after exposure of the coating was evaluated as follows. A: Resistance is not felt when removing the negative mask from the film, and no sticking marks are observed on the film after the negative mask is removed. B: Resistance was felt when the negative mask was removed from the coating, and sticking marks were observed on the coating after the negative mask was removed. C: It was difficult to remove the negative mask from the coating, and the coating was damaged when the negative mask was forcibly removed.
  • A No abnormality was observed in the appearance of the layer made of the cured product and the metal layer, and the metal layer was not peeled by the cellophane adhesive tape peel test.
  • B Although discoloration was recognized in the layer which consists of hardened
  • C Lifting of the layer made of the cured product was observed, and the metal layer was peeled off by the cellophane adhesive tape peeling test.
  • the conductive tape was affixed on the layer which consists of hardened
  • B The electric resistance value was always maintained at 10 6 ⁇ or more until 35 hours passed from the start of the test, but the electric resistance value became less than 10 6 ⁇ before 50 hours passed from the start of the test.
  • C The electric resistance value was always maintained at 10 6 ⁇ or more until 20 hours passed from the start of the test, but the electric resistance value became less than 10 6 ⁇ before 35 hours passed from the start of the test.
  • D The electric resistance value was less than 10 6 ⁇ before 20 hours passed from the start of the test.
  • Copper plating adhesion test (7-1) Roughening resistance The outer surface of the cured layer in the test pieces of each Example and Comparative Example was roughened by the following procedure based on a general desmear treatment. It was. Swelling treatment (Swelling Dip Securigans P manufactured by Atotech Japan Co., Ltd.) commercially available as a swelling liquid for desmear was performed at 60 ° C. for 5 minutes to swell the surface of the cured product. Then, the swollen surface was washed with hot water.
  • Swelling treatment Silicon Dip Securigans P manufactured by Atotech Japan Co., Ltd.
  • membrane layer which consists of hardened
  • cured material with respect to a desmear liquid was evaluated by the following evaluation criteria.
  • C The reduction in film thickness due to roughening is 10 ⁇ m or more.
  • the adhesion between the copper plating layer thus formed and the cured product in the test piece was evaluated according to the following evaluation criteria.
  • the adhesion strength between the copper plating layer and the cured product was evaluated by the following procedure. This adhesion strength was measured according to JIS-C6481. S: Blisters were not confirmed during heating after the electroless copper plating treatment, and no blisters were confirmed during heating after the electrolytic copper plating treatment.
  • the adhesive strength of copper was 0.4 kN / m or more.
  • Example 10 to 21 and Comparative Examples 3 to 6 [Production of test pieces] Each of the photosensitive resin compositions of Examples 10 to 21 and Comparative Examples 3 to 6 was coated on a polyethylene terephthalate film with an applicator and then dried by heating at 95 ° C. for 25 minutes. A dry film having a thickness of 25 ⁇ m was formed on the film.
  • Test pieces of Examples 10 to 21 and Comparative Examples 3 to 6 were produced in the same manner as in Example 8. However, the intensity of ultraviolet rays at the time of the first exposure immediately after laminating the dry film on the printed wiring board was set to 250 mJ / cm 2 . And the temperature which heats the membrane
  • the test environment is 85 ° C., 85% R.D. H.
  • the conductor wiring and the conductive tape in the test pieces of each Example and Comparative Example were The electrical resistance value of was constantly measured. The results were evaluated according to the following evaluation criteria.
  • C The electric resistance value was less than 10 8 ⁇ before 1000 hours passed from the start of the test.
  • the photosensitive resin composition of the first aspect according to the present invention is a non-polymer having a carboxyl group-containing resin (A) and at least one ethylenically unsaturated bond in one molecule.
  • the carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) having a bisphenolfluorene skeleton.
  • the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, excellent developability can be obtained, and in the previous step of the plating treatment, The thickness of the layer containing the cured product of the resin composition can be made difficult to reduce with an oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.
  • the carboxyl group-containing resin (A1) is an epoxy compound (a1) having a bisphenolfluorene skeleton and an unsaturated group-containing carboxylic acid (a2). It may be a reaction product of an intermediate that is a reactant and an acid anhydride.
  • the epoxy compound (D) may contain a crystalline epoxy resin.
  • the developability of the photosensitive resin composition can be improved.
  • the photosensitive resin composition of the fourth aspect may further contain an inorganic filler (K) in any one of the first to third aspects.
  • the rough surface suitable for a plating process can be provided to the hardened
  • the inorganic filler (K) may contain silica (k).
  • the difficult corrosion location can be appropriately corroded.
  • the rough surface more suitable for a plating process can be provided to hardened
  • the average particle diameter of the silica (k) may be 1 ⁇ m or less.
  • cured material of the photosensitive resin composition can be made fine.
  • the anchor effect increases as the surface area of the cured product increases, and the adhesion between the rough surface and the plating layer can be improved.
  • the photopolymerization initiator (C) contains an acylphosphine oxide photopolymerization initiator (C1). May be.
  • the photosensitive resin composition contains the carboxyl group-containing resin (A1)
  • the photosensitive resin composition has high photosensitivity when the photosensitive resin composition is exposed to ultraviolet rays. Can be granted.
  • cured material excellent in electrical insulation is obtained.
  • the photopolymerization initiator (C) may contain a hydroxyketone photopolymerization initiator (C2). Good.
  • higher photosensitivity can be imparted to the photosensitive resin composition as compared with the case where no hydroxyketone photopolymerization initiator (C2) is contained.
  • the photopolymerization initiator (C) may contain bis (diethylamino) benzophenone (C3).
  • the ninth aspect when the coating film formed from the photosensitive resin composition is partially exposed and then developed, the resolution is particularly improved by suppressing the curing of the unexposed part. . For this reason, it becomes possible to form a very fine pattern with the hardened
  • the dry film of the tenth aspect is a dried product of the photosensitive resin composition of any one of the first to ninth aspects.
  • the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, excellent developability can be obtained, and in the previous step of the plating treatment, a dry film can be obtained.
  • the thickness of the layer containing the cured product can be made difficult to reduce with an oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.
  • the printed wiring board according to the eleventh aspect includes an interlayer insulating layer containing a cured product of the photosensitive resin composition according to any one of the first to ninth aspects.
  • a printed wiring board having an excellent interlayer insulating layer can be obtained.
  • the printed wiring board according to the twelfth aspect includes a solder resist layer containing a cured product of the photosensitive resin composition according to any one of the first to ninth aspects.
  • a printed wiring board having an excellent solder resist layer can be obtained.
  • the method for producing a photosensitive resin composition comprises reacting an epoxy compound (a1) having a bisphenolfluorene skeleton with an unsaturated group-containing carboxylic acid (a2) to obtain an intermediate, An intermediate and an acid anhydride are reacted to synthesize a carboxyl group-containing resin (A1), a carboxyl group-containing resin (A) containing the carboxyl group-containing resin (A1), and an ethylenically unsaturated bond An unsaturated compound (B) having at least one per molecule, a photopolymerization initiator (C), an epoxy compound (D), and a component (E) are mixed to obtain a photosensitive resin composition.
  • the component (E) contains at least one compound selected from the group of melamine and melamine derivatives.
  • a photosensitive resin composition having excellent developability can be obtained even when a carboxyl group-containing resin having a bisphenolfluorene skeleton is contained. And when giving a rough surface to the hardened

Abstract

A light-sensitive resin composition contains a carboxyl-group-containing resin (A), an unsaturated compound (B), a photopolymerization initiator (C), an epoxy compound (D), and a component (E) containing at least one compound selected from the group comprising melamine and melamine derivatives. The carboxyl-group-containing resin (A) contains a carboxyl-group-containing resin (A1) having a bisphenol fluorene skeleton.

Description

感光性樹脂組成物、ドライフィルム、及びプリント配線板Photosensitive resin composition, dry film, and printed wiring board
 本発明は、感光性樹脂組成物、前記感光性樹脂組成物の乾燥物であるドライフィルム、前記感光性樹脂組成物の硬化物を含むソルダーレジスト層を備えるプリント配線板、及び前記感光性樹脂組成物の硬化物を含む層間絶縁層を備えるプリント配線板に関する。 The present invention relates to a photosensitive resin composition, a dry film that is a dried product of the photosensitive resin composition, a printed wiring board including a solder resist layer that includes a cured product of the photosensitive resin composition, and the photosensitive resin composition. The present invention relates to a printed wiring board including an interlayer insulating layer containing a cured product.
 従来、プリント配線板の、ソルダーレジスト層、メッキレジスト層、エッチングレジスト層、層間絶縁層等の電気絶縁性の層を形成するために電気絶縁性の樹脂組成物が使用されている。このような樹脂組成物は、例えば感光性樹脂組成物である。 Conventionally, an electrically insulating resin composition has been used to form electrically insulating layers such as a solder resist layer, a plating resist layer, an etching resist layer, and an interlayer insulating layer of a printed wiring board. Such a resin composition is, for example, a photosensitive resin composition.
 感光性樹脂組成物から形成される層に高い耐熱性を付与するために、感光性樹脂組成物にビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂を配合することが提案されている。例えば特許第4508929号には、フルオレンエポキシ(メタ)アクリレートを多価カルボン酸又はその無水物と反応させて得られるフルオレン骨格を備えるカルボキシル基含有樹脂を用いることが開示されている。 In order to impart high heat resistance to a layer formed from a photosensitive resin composition, it has been proposed to add a carboxyl group-containing resin having a bisphenolfluorene skeleton to the photosensitive resin composition. For example, Japanese Patent No. 4508929 discloses the use of a carboxyl group-containing resin having a fluorene skeleton obtained by reacting fluorene epoxy (meth) acrylate with a polyvalent carboxylic acid or an anhydride thereof.
 ビスフェノールフルオレン骨格を備えるカルボキシル基含有樹脂を含有する感光性樹脂組成物の硬化物からなる層にメッキ層を形成する場合がある。このようなメッキ層を硬化物に形成する前に、硬化物の層の表面を、例えば過マンガン酸カリウムを含有する酸化剤で前記層の表面を粗化することで硬化物の層とメッキ層との密着性を向上させることがある。しかし、硬化物の層を前記酸化剤で処理すると、硬化物の層の表面が腐食され、この層の厚みが薄くなることがある。ビスフェノールフルオレン骨格を備えるカルボキシル基含有樹脂は前記酸化剤に対して比較的高い耐性を有するが、このカルボキシル基含有樹脂を感光性樹脂組成物が含有しても、硬化物の層の厚みが前記酸化剤により薄くなることがある。 A plating layer may be formed on a layer made of a cured product of a photosensitive resin composition containing a carboxyl group-containing resin having a bisphenolfluorene skeleton. Before forming such a plating layer on the cured product, the surface of the cured product layer is roughened with an oxidizing agent containing, for example, potassium permanganate, so that the cured product layer and the plating layer are obtained. May improve the adhesion. However, when the cured product layer is treated with the oxidizing agent, the surface of the cured product layer may be corroded, and the thickness of the layer may be reduced. A carboxyl group-containing resin having a bisphenolfluorene skeleton has a relatively high resistance to the oxidizing agent, but even if the photosensitive resin composition contains this carboxyl group-containing resin, the thickness of the cured product layer is not oxidized. May become thinner with the agent.
 ビスフェノールフルオレン骨格を備えるカルボキシル基含有樹脂は、感光性樹脂組成物の現像性を低下させることがある。現像性を向上するために、カルボキシル基含有樹脂の分子量を小さくすると、硬化物からなる層の、前記酸化剤に対する耐性が低下してしまい、前記酸化剤で硬化物の層の厚みを更に薄くさせてしまうことがある。このため、硬化物とメッキ層との密着性を向上させるために、硬化物からなる層の表面を前記酸化剤で粗化させることが困難であった。 A carboxyl group-containing resin having a bisphenolfluorene skeleton may reduce the developability of the photosensitive resin composition. If the molecular weight of the carboxyl group-containing resin is decreased in order to improve developability, the resistance of the cured layer to the oxidizing agent is reduced, and the thickness of the cured product layer is further reduced with the oxidizing agent. May end up. For this reason, in order to improve the adhesiveness of hardened | cured material and a plating layer, it was difficult to roughen the surface of the layer which consists of hardened | cured material with the said oxidizing agent.
 本発明の目的は、感光性樹脂組成物がビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂を含有していても、優れた現像性を得ることができ、しかもメッキ処理の前工程で、硬化物の層の厚みを酸化剤で薄くさせ難くすることができ、且つ硬化物の表面を酸化剤で粗化することができる感光性樹脂組成物、前記感光性樹脂組成物の乾燥物であるドライフィルム、前記感光性樹脂組成物の硬化物を含むソルダーレジスト層を備えるプリント配線板、及び前記感光性樹脂組成物の硬化物を含む層間絶縁層を備えるプリント配線板を提供することである。 The object of the present invention is to obtain an excellent developability even when the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, and in the preceding step of the plating treatment, A photosensitive resin composition capable of making it difficult to reduce the thickness of the cured product with an oxidizing agent and roughening the surface of the cured product with an oxidizing agent, a dry film that is a dried product of the photosensitive resin composition, It is providing a printed wiring board provided with the soldering resist layer containing the hardened | cured material of the photosensitive resin composition, and a printed wiring board provided with the interlayer insulation layer containing the hardened | cured material of the said photosensitive resin composition.
 本発明の一態様に係る感光性樹脂組成物は、カルボキシル基含有樹脂(A)と、エチレン性不飽和結合を一分子中に少なくとも一つ有する不飽和化合物(B)と、光重合開始剤(C)と、エポキシ化合物(D)と、メラミン及びメラミン誘導体の群から選択される少なくとも1種の化合物を含有する成分(E)とを含有し、前記カルボキシル基含有樹脂(A)がビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂(A1)を含有する。 A photosensitive resin composition according to one embodiment of the present invention includes a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, a photopolymerization initiator ( C), an epoxy compound (D), and a component (E) containing at least one compound selected from the group of melamine and melamine derivatives, wherein the carboxyl group-containing resin (A) is a bisphenolfluorene skeleton. Containing a carboxyl group-containing resin (A1).
 本発明の一態様に係るドライフィルムは、前記感光性樹脂組成物の乾燥物である。 The dry film according to one embodiment of the present invention is a dried product of the photosensitive resin composition.
 本発明の一態様に係るプリント配線板は、前記感光性樹脂組成物の硬化物を含む層間絶縁層を備える。 A printed wiring board according to an aspect of the present invention includes an interlayer insulating layer containing a cured product of the photosensitive resin composition.
 本発明の一態様に係るプリント配線板は、前記感光性樹脂組成物の硬化物を含むソルダーレジスト層を備える。 A printed wiring board according to an aspect of the present invention includes a solder resist layer containing a cured product of the photosensitive resin composition.
 本発明の一態様によれば、感光性樹脂組成物がビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂を含有していても、優れた現像性を得ることができ、しかもメッキ処理の前工程で、硬化物の層の厚みを酸化剤で薄くさせ難くすることができ、且つ硬化物の表面を酸化剤で粗化することができる。 According to one embodiment of the present invention, even if the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, excellent developability can be obtained, and curing can be performed in the previous step of the plating treatment. The thickness of the product layer can be made difficult to reduce with an oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.
図1A乃至図1Eは、本発明の一実施形態に係る多層プリント配線板を製造する工程を示す断面図である。1A to 1E are cross-sectional views illustrating steps of manufacturing a multilayer printed wiring board according to an embodiment of the present invention.
 以下、本発明の一実施形態について説明する。尚、以下の説明において、「(メタ)アクリル」とは、「アクリル」と「メタクリル」のうち少なくとも一方を意味する。例えば、(メタ)アクリレートは、アクリレートとメタクリレートとのうち少なくとも一方を意味する。 Hereinafter, an embodiment of the present invention will be described. In the following description, “(meth) acryl” means at least one of “acryl” and “methacryl”. For example, (meth) acrylate means at least one of acrylate and methacrylate.
 本実施形態に係る感光性樹脂組成物は、カルボキシル基含有樹脂(A)と、エチレン性不飽和結合を一分子中に少なくとも一つ有する不飽和化合物(B)と、光重合開始剤(C)と、エポキシ化合物(D)と、成分(E)とを含有する。 The photosensitive resin composition according to this embodiment includes a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (C). And an epoxy compound (D) and a component (E).
 カルボキシル基含有樹脂(A)は、ビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂(A1)を含有する。 The carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) having a bisphenolfluorene skeleton.
 カルボキシル基含有樹脂(A1)は、例えば、エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)との反応物である中間体と、酸無水物と、の反応物である。エポキシ化合物(a1)は、下記式(1)で示され、式(1)中、R~Rは各々独立に水素、炭素数1~5のアルキル基又はハロゲンである、ビスフェノールフルオレン骨格を有する。 The carboxyl group-containing resin (A1) is, for example, a reaction product of an intermediate that is a reaction product of the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) and an acid anhydride. The epoxy compound (a1) is represented by the following formula (1), and in the formula (1), R 1 to R 8 are each independently hydrogen, an alkyl group having 1 to 5 carbon atoms, or halogen, and a bisphenolfluorene skeleton. Have.
 カルボキシル基含有樹脂(A1)は、エポキシ化合物(a1)と、不飽和基含有カルボン酸(a2)とを反応させ、それにより得られた中間体と、酸無水物とを反応させることで合成される。 The carboxyl group-containing resin (A1) is synthesized by reacting the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2), and reacting the resulting intermediate with an acid anhydride. The
Figure JPOXMLDOC01-appb-C000001
Figure JPOXMLDOC01-appb-C000001
 式(1)におけるR1~R8の各々は、水素でもよいが、炭素数1~5のアルキル基又はハロゲンでもよい。なぜなら、芳香環における水素が低分子量のアルキル基又はハロゲンで置換されても、カルボキシル基含有樹脂(A1)の物性に悪影響はなく、むしろカルボキシル基含有樹脂(A1)を含む感光性樹脂組成物の硬化物の耐熱性或いは難燃性が向上する場合もあるからである。 Each of R 1 to R 8 in Formula (1) may be hydrogen, but may be an alkyl group having 1 to 5 carbon atoms or halogen. This is because even if hydrogen in the aromatic ring is substituted with a low molecular weight alkyl group or halogen, the physical properties of the carboxyl group-containing resin (A1) are not adversely affected, but rather the photosensitive resin composition containing the carboxyl group-containing resin (A1). This is because the heat resistance or flame retardancy of the cured product may be improved.
 成分(E)は、メラミン及びメラミン誘導体の群から少なくとも1種の化合物を含有する。これにより、感光性樹脂組成物がビスフェノールフルオレン骨格を含有していても、感光性樹脂組成物の硬化物を、例えば過マンガン酸カリウムを含有する酸化剤により著しく腐食され難くする。すなわち感光性樹脂組成物が成分(E)を含有することで、感光性樹脂組成物の硬化物に前記酸化剤に対する耐性を付与することができる。これにより、硬化物と、銅や金等からなるメッキ層との密着性を向上させるために、メッキ処理の前工程で、硬化物の層の厚みを前記酸化剤で薄くさせ難くすることができ、且つ硬化物の表面を前記酸化剤で粗化することができる。 Component (E) contains at least one compound from the group of melamine and melamine derivatives. Thereby, even if the photosensitive resin composition contains the bisphenol fluorene skeleton, the cured product of the photosensitive resin composition is hardly made corroded by an oxidizing agent containing, for example, potassium permanganate. That is, when the photosensitive resin composition contains the component (E), resistance to the oxidizing agent can be imparted to the cured product of the photosensitive resin composition. As a result, in order to improve the adhesion between the cured product and the plating layer made of copper, gold, or the like, it is possible to make it difficult to reduce the thickness of the cured product layer with the oxidizing agent in the previous step of the plating process. In addition, the surface of the cured product can be roughened with the oxidizing agent.
 本実施形態では、成分(E)が、メラミンのみを含有してもよく、メラミン誘導体のみを含有してもよく、メラミン及びメラミン誘導体を含有してもよい。メラミンは、2,4,6-トリアミノ-1,3,5-トリアジンであり、一般的に市販されている化合物から入手可能である。また、メラミン誘導体は、その一分子中に1つのトリアジン環と、アミノ基とを有する化合物であるとよい。メラミン誘導体としては、例えばグアナミン;アセトグアナミン;ベンゾグアナミン;2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン、2-ビニル-4,6-ジアミノ-S-トリアジン、2-ビニル-4,6-ジアミノ-S-トリアジン・イソシアヌル酸付加物、2,4-ジアミノ-6-メタクリロイルオキシエチル-S-トリアジン・イソシアヌル酸付加物等のS-トリアジン誘導体;並びにメラミン-テトラヒドロフタル酸塩等のメラミンと酸無水物との反応物が、挙げられる。メラミン誘導体の、より詳細な具体例として、四国化成工業株式会社の製品名VD-1、製品名VD-2、製品名VD-3が挙げられる。メラミン誘導体は、その一分子中に1つのトリアジン環と、2つ以上のアミノ基とを有する化合物であることが好ましい。この2つ以上のアミノ基のうち、少なくとも1つは-NHの基を含まない置換基である。すなわち、メラミン誘導体はメラミンを含まない。このような場合、感光性樹脂組成物中に分散しているメラミン誘導体が、例えばメッキ層やコア材の導体配線に含まれ、且つ感光性樹脂組成物との接触面に位置する金属元素と配位結合する。このため感光性樹脂組成物の密着性を向上させることができる。前記金属元素として、例えば金、銀、銅、ニッケルが挙げられる。 In this embodiment, a component (E) may contain only a melamine, may contain only a melamine derivative, and may contain a melamine and a melamine derivative. Melamine is 2,4,6-triamino-1,3,5-triazine and is generally available from commercially available compounds. The melamine derivative may be a compound having one triazine ring and an amino group in one molecule. Examples of melamine derivatives include guanamine; acetoguanamine; benzoguanamine; 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-4,6-diamino-S-triazine, 2-vinyl-4,6. -S-triazine derivatives such as diamino-S-triazine isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triazine isocyanuric acid adduct; and melamine such as melamine-tetrahydrophthalate A reaction product with an acid anhydride is mentioned. Specific examples of the melamine derivative include Shikoku Kasei Kogyo Co., Ltd. product name VD-1, product name VD-2, and product name VD-3. The melamine derivative is preferably a compound having one triazine ring and two or more amino groups in one molecule. Of the two or more amino groups, at least one is a substituent that does not contain a —NH 2 group. That is, the melamine derivative does not contain melamine. In such a case, the melamine derivative dispersed in the photosensitive resin composition is included in, for example, the conductive wiring of the plating layer or the core material and arranged with the metal element located on the contact surface with the photosensitive resin composition. Join. For this reason, the adhesiveness of the photosensitive resin composition can be improved. Examples of the metal element include gold, silver, copper, and nickel.
 成分(E)が感光性樹脂組成物に対して溶解可能、或いは難溶解である場合、平均粒子径が20μm以下、好ましくは15μm以下の成分(E)を、感光性樹脂組成物中で分散させるとよい。この場合、感光性樹脂組成物中に成分(E)が均一に分散しているため、成分(E)は前記金属元素と更に配位結合しやすくなる。これにより、感光性樹脂組成物の密着性を更に向上させることができる。成分(E)の平均粒子径の下限は、特に限定されないが、0.01μm以上にすることができる。なお、成分(E)の平均粒子径は、成分(E)を未硬化の感光性樹脂組成物中で分散させた状態でレーザ回折式粒度分布測定装置により、D50として測定される。 When the component (E) is soluble or hardly soluble in the photosensitive resin composition, the component (E) having an average particle size of 20 μm or less, preferably 15 μm or less is dispersed in the photosensitive resin composition. Good. In this case, since the component (E) is uniformly dispersed in the photosensitive resin composition, the component (E) is more easily coordinated with the metal element. Thereby, the adhesiveness of the photosensitive resin composition can further be improved. Although the minimum of the average particle diameter of a component (E) is not specifically limited, It can be 0.01 micrometer or more. The average particle diameter of Component (E), by a laser diffraction particle size distribution measuring apparatus in a state of being dispersed component (E) in the photosensitive resin composition of the uncured, measured as D 50.
 カルボキシル基含有樹脂(A1)について、より具体的に説明する。カルボキシル基含有樹脂(A1)を合成するためには、まずエポキシ化合物(a1)のエポキシ基(式(2)参照)の少なくとも一部と、不飽和基含有カルボン酸(a2)とを反応させることで、中間体を合成する。中間体は、エポキシ基と不飽和基含有カルボン酸(a2)との開環付加反応により生じた下記式(3)に示す構造(S3)を有する。すなわち、中間体は、構造(S3)中に、エポキシ基と不飽和基含有カルボン酸(a2)との開環付加反応により生じた二級の水酸基を有する。式(3)において、Aは不飽和基含有カルボン酸残基である。 The carboxyl group-containing resin (A1) will be described more specifically. In order to synthesize the carboxyl group-containing resin (A1), first, at least a part of the epoxy group (see formula (2)) of the epoxy compound (a1) is reacted with the unsaturated group-containing carboxylic acid (a2). The intermediate is then synthesized. The intermediate has a structure (S3) represented by the following formula (3) generated by a ring-opening addition reaction between an epoxy group and an unsaturated group-containing carboxylic acid (a2). That is, the intermediate has a secondary hydroxyl group generated by a ring-opening addition reaction between an epoxy group and an unsaturated group-containing carboxylic acid (a2) in the structure (S3). In Formula (3), A is an unsaturated group-containing carboxylic acid residue.
Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003
 次に、中間体中の二級の水酸基と酸無水物とを反応させる。これにより、カルボキシル基含有樹脂(A1)を合成できる。 Next, the secondary hydroxyl group in the intermediate is reacted with an acid anhydride. Thereby, carboxyl group-containing resin (A1) can be synthesized.
 酸無水物は、酸二無水物(a3)及び酸一無水物(a4)のうち少なくとも1つを含有してもよい。酸無水物が酸一無水物(a4)を含有する場合、カルボキシル基含有樹脂(A1)は式(1)で示されるビスフェノールフルオレン骨格(S1)と、下記式(4)に示す構造(S4)とを有する。 The acid anhydride may contain at least one of acid dianhydride (a3) and acid monoanhydride (a4). When the acid anhydride contains acid monoanhydride (a4), the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1) represented by the formula (1) and a structure (S4) represented by the following formula (4). And have.
 構造(S4)は、中間体の構造(S3)中の二級の水酸基と、酸一無水物(a4)における酸無水物基とが反応することで生じる。式(4)において、Aは不飽和基含有カルボン酸残基であり、Bは酸一無水物残基である。 The structure (S4) is generated by the reaction between the secondary hydroxyl group in the intermediate structure (S3) and the acid anhydride group in the acid monoanhydride (a4). In Formula (4), A is an unsaturated group-containing carboxylic acid residue, and B is an acid monoanhydride residue.
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
 酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)は、ビスフェノールフルオレン骨格(S1)と、下記式(5)に示す構造(S5)とを有する。 When the acid anhydride contains an acid dianhydride (a3), the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1) and a structure (S5) represented by the following formula (5).
 構造(S5)は、酸二無水物(a3)中の二つの酸無水物基と、中間体における二つの二級の水酸基とが、それぞれ反応することで生じる。すなわち、構造(S5)は、二つの二級の水酸基同士を酸二無水物(a3)が架橋することで生成する。なお、中間体の一つの分子中に存在する二つの二級の水酸基同士が架橋される場合と、中間体の二つの分子中にそれぞれ存在する二つの二級の水酸基同士が架橋される場合とが、ありうる。中間体の二つの分子中にそれぞれ存在する二つの二級の水酸基同士が架橋されると、分子量が増大する。式(5)において、Aは不飽和基含有カルボン酸残基であり、Dは酸二無水物残基である。 Structure (S5) is generated by the reaction between two acid anhydride groups in acid dianhydride (a3) and two secondary hydroxyl groups in the intermediate. That is, the structure (S5) is generated by crosslinking the two secondary hydroxyl groups with the acid dianhydride (a3). In addition, the case where two secondary hydroxyl groups present in one molecule of the intermediate are crosslinked and the case where two secondary hydroxyl groups present in each of the two molecules of the intermediate are crosslinked It is possible. When the two secondary hydroxyl groups present in the two molecules of the intermediate are cross-linked, the molecular weight increases. In Formula (5), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
 中間体中の二級の水酸基と酸無水物とを反応させてカルボキシル基含有樹脂(A1)を得ることができる。酸無水物が酸二無水物(a3)及び酸一無水物(a4)を含有する場合、中間体中の二級の水酸基のうちの一部と酸二無水物(a3)とを反応させ、中間体中の二級の水酸基のうちの別の一部と酸一無水物(a4)とを反応させる。これにより、カルボキシル基含有樹脂(A1)を合成できる。この場合、カルボキシル基含有樹脂(A1)は、ビスフェノールフルオレン骨格(S1)と、構造(S4)と、構造(S5)とを有する。 A secondary hydroxyl group in the intermediate and an acid anhydride can be reacted to obtain a carboxyl group-containing resin (A1). When the acid anhydride contains an acid dianhydride (a3) and an acid monoanhydride (a4), a part of the secondary hydroxyl group in the intermediate is reacted with the acid dianhydride (a3), Another part of the secondary hydroxyl groups in the intermediate is reacted with acid monoanhydride (a4). Thereby, carboxyl group-containing resin (A1) can be synthesized. In this case, the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1), a structure (S4), and a structure (S5).
 カルボキシル基含有樹脂(A1)が、更に下記式(6)で示す構造(S6)を有することもありうる。構造(S6)は、酸二無水物(a3)中の二つの酸無水物基のうち、一つのみが、中間体における二級の水酸基と反応することで生じる。式(6)において、Aは不飽和基含有カルボン酸残基であり、Dは酸二無水物残基である。 The carboxyl group-containing resin (A1) may further have a structure (S6) represented by the following formula (6). The structure (S6) occurs when only one of the two acid anhydride groups in the acid dianhydride (a3) reacts with the secondary hydroxyl group in the intermediate. In Formula (6), A is an unsaturated group-containing carboxylic acid residue, and D is an acid dianhydride residue.
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
 中間体の合成時にエポキシ化合物(a1)中のエポキシ基の一部が未反応のまま残存する場合、カルボキシル基含有樹脂(A1)は式(2)に示す構造(S2)、すなわちエポキシ基を有することがありうる。また、中間体における構造(S3)の一部が未反応のまま残存する場合に、カルボキシル基含有樹脂(A1)は構造(S3)を有することもありうる。 When some of the epoxy groups in the epoxy compound (a1) remain unreacted during the synthesis of the intermediate, the carboxyl group-containing resin (A1) has a structure (S2) represented by the formula (2), that is, an epoxy group It is possible. Further, when a part of the structure (S3) in the intermediate remains unreacted, the carboxyl group-containing resin (A1) may have the structure (S3).
 酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)の合成時の反応条件を最適化することで、カルボキシル基含有樹脂(A1)中の構造(S2)、及び構造(S6)の数を低減し、或いは、カルボキシル基含有樹脂(A1)から構造(S2)、及び構造(S6)を殆どなくしている。 When the acid anhydride contains acid dianhydride (a3), the structure (S2) in the carboxyl group-containing resin (A1) is optimized by optimizing the reaction conditions during the synthesis of the carboxyl group-containing resin (A1). In addition, the number of structures (S6) is reduced, or the structure (S2) and the structure (S6) are almost eliminated from the carboxyl group-containing resin (A1).
 上記のように、カルボキシル基含有樹脂(A1)は、ビスフェノールフルオレン骨格(S1)を有し、酸無水物が酸一無水物(a4)を含有する場合は構造(S4)を有し、酸無水物が酸二無水物(a3)を含有する場合は構造(S5)を有することができる。さらに、酸無水物が酸一無水物(a4)を含有する場合、カルボキシル基含有樹脂(A1)は、構造(S2)と構造(S3)とのうち少なくとも一種を有することがある。また、酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)は、構造(S2)と、構造(S6)とのうち少なくとも一種を有することがある。また更に、酸無水物が酸一無水物(a4)と酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)は、構造(S2)と、構造(S3)と、構造(S6)とのうち少なくとも一種を有することがある。 As described above, the carboxyl group-containing resin (A1) has a bisphenolfluorene skeleton (S1), and has a structure (S4) when the acid anhydride contains acid monoanhydride (a4). When a thing contains an acid dianhydride (a3), it can have a structure (S5). Further, when the acid anhydride contains acid monoanhydride (a4), the carboxyl group-containing resin (A1) may have at least one of the structure (S2) and the structure (S3). Moreover, when an acid anhydride contains an acid dianhydride (a3), carboxyl group-containing resin (A1) may have at least 1 type in a structure (S2) and a structure (S6). Furthermore, when the acid anhydride contains acid monoanhydride (a4) and acid dianhydride (a3), the carboxyl group-containing resin (A1) has a structure (S2), a structure (S3), a structure ( And at least one of S6).
 また、エポキシ化合物(a1)自体が二級の水酸基を有する場合、すなわち例えば後述する式(7)においてn=1以上である場合には、カルボキシル基含有樹脂(A1)は、エポキシ化合物(a1)中の二級の水酸基と酸無水物とが反応することで生じる構造を有することもある。 When the epoxy compound (a1) itself has a secondary hydroxyl group, that is, for example, when n = 1 or more in the formula (7) described later, the carboxyl group-containing resin (A1) is an epoxy compound (a1). It may have a structure produced by the reaction between the secondary secondary hydroxyl group and the acid anhydride.
 なお、上述のカルボキシル基含有樹脂(A1)の構造は技術常識に基づいて合理的に類推されており、カルボキシル基含有樹脂(A1)の構造を分析によって特定することは現実にはできない。その理由は次の通りである。エポキシ化合物(a1)自体が二級の水酸基を有する場合(例えば式(7)においてnが1以上である場合)には、エポキシ化合物(a1)中の二級の水酸基の数によってカルボキシル基含有樹脂(A1)の構造が大きく変化してしまう。また、中間体と酸二無水物(a3)とが反応する際には、上述の通り、中間体の一つの分子中に存在する二つの二級の水酸基同士が酸二無水物(a3)で架橋される場合と、中間体の二つの分子中にそれぞれ存在する二つの二級の水酸基同士が酸二無水物(a3)で架橋される場合とが、ありうる。このため、最終的に得られるカルボキシル基含有樹脂(A1)は、互いに構造の異なる複数の分子を含み、カルボキシル基含有樹脂(A1)を分析してもその構造を特定できない。 In addition, the structure of the above-mentioned carboxyl group-containing resin (A1) is reasonably inferred based on the common general technical knowledge, and the structure of the carboxyl group-containing resin (A1) cannot be specified by analysis. The reason is as follows. When the epoxy compound (a1) itself has a secondary hydroxyl group (for example, when n is 1 or more in the formula (7)), the carboxyl group-containing resin depends on the number of secondary hydroxyl groups in the epoxy compound (a1). The structure of (A1) changes greatly. When the intermediate and the acid dianhydride (a3) react, as described above, two secondary hydroxyl groups present in one molecule of the intermediate are acid dianhydrides (a3). There may be a case where two secondary hydroxyl groups respectively present in two molecules of the intermediate are crosslinked with an acid dianhydride (a3). For this reason, the carboxyl group-containing resin (A1) finally obtained contains a plurality of molecules having different structures, and even when the carboxyl group-containing resin (A1) is analyzed, the structure cannot be specified.
 カルボキシル基含有樹脂(A1)は、不飽和基含有カルボン酸(a2)に由来するエチレン性不飽和基を有しているから、光反応性を有する。このため、カルボキシル基含有樹脂(A1)は、感光性樹脂組成物に、感光性(具体的には紫外線硬化性)を付与できる。また、カルボキシル基含有樹脂(A1)は、酸無水物に由来するカルボキシル基を有しているから、感光性樹脂組成物に、アルカリ金属塩及びアルカリ金属水酸化物のうち少なくとも一方を含有するアルカリ性水溶液による現像性を付与できる。さらに、酸無水物が酸二無水物(a3)を含有する場合、カルボキシル基含有樹脂(A1)の分子量は、酸二無水物(a3)による架橋の数に依存する。このため、酸価と分子量とが適度に調整されたカルボキシル基含有樹脂(A1)が得られる。酸無水物が酸二無水物(a3)及び酸一無水物(a4)を含有する場合、酸二無水物(a3)及び酸一無水物(a4)の量、並びに酸二無水物(a3)に対する酸一無水物(a4)の量を制御することで、所望の分子量及び酸価のカルボキシル基含有樹脂(A1)が容易に得られる。 Since the carboxyl group-containing resin (A1) has an ethylenically unsaturated group derived from the unsaturated group-containing carboxylic acid (a2), it has photoreactivity. For this reason, carboxyl group-containing resin (A1) can impart photosensitivity (specifically, ultraviolet curable) to the photosensitive resin composition. Moreover, since the carboxyl group-containing resin (A1) has a carboxyl group derived from an acid anhydride, the photosensitive resin composition contains at least one of an alkali metal salt and an alkali metal hydroxide. It is possible to impart developability with an aqueous solution. Furthermore, when the acid anhydride contains an acid dianhydride (a3), the molecular weight of the carboxyl group-containing resin (A1) depends on the number of crosslinks by the acid dianhydride (a3). For this reason, the carboxyl group-containing resin (A1) in which the acid value and the molecular weight are appropriately adjusted is obtained. When the acid anhydride contains acid dianhydride (a3) and acid dianhydride (a4), the amount of acid dianhydride (a3) and acid dianhydride (a4), and acid dianhydride (a3) By controlling the amount of the acid monoanhydride (a4) with respect to, a carboxyl group-containing resin (A1) having a desired molecular weight and acid value can be easily obtained.
 カルボキシル基含有樹脂(A1)の重量平均分子量は700~10000の範囲内であることが好ましい。重量平均分子量が700以上であると、感光性樹脂組成物から形成される皮膜のタック性が更に抑制される共に硬化物の絶縁信頼性及び耐メッキ性が更に向上する。また、重量平均分子量が10000以下であると、感光性樹脂組成物のアルカリ性水溶液による現像性が特に向上する。重量平均分子量は、900~8000の範囲内であることが更に好ましく、1000~5000の範囲内であることが特に好ましい。 The weight average molecular weight of the carboxyl group-containing resin (A1) is preferably in the range of 700 to 10,000. When the weight average molecular weight is 700 or more, the tackiness of the film formed from the photosensitive resin composition is further suppressed, and the insulation reliability and plating resistance of the cured product are further improved. Moreover, the developability by the alkaline aqueous solution of the photosensitive resin composition improves especially that a weight average molecular weight is 10,000 or less. The weight average molecular weight is more preferably in the range of 900 to 8000, and particularly preferably in the range of 1000 to 5000.
 カルボキシル基含有樹脂(A1)の固形分酸価は60~140mgKOH/gの範囲内であることが好ましい。この場合、感光性樹脂組成物の現像性が特に向上する。固形分酸価は、より好ましくは80~135mgKOH/gの範囲内であり、更に好ましくは90~130mgKOH/gの範囲内である。 The solid content acid value of the carboxyl group-containing resin (A1) is preferably in the range of 60 to 140 mgKOH / g. In this case, the developability of the photosensitive resin composition is particularly improved. The solid content acid value is more preferably in the range of 80 to 135 mgKOH / g, and still more preferably in the range of 90 to 130 mgKOH / g.
 カルボキシル基含有樹脂(A1)の重量平均分子量(Mw)は、ゲル・パーミエーション・クロマトグラフィによる分子量測定結果から算出される。ゲル・パーミエーション・クロマトグラフィでの分子量測定は、例えば、次の条件の下で行うことができる。 The weight average molecular weight (Mw) of the carboxyl group-containing resin (A1) is calculated from the molecular weight measurement result by gel permeation chromatography. The molecular weight measurement by gel permeation chromatography can be performed, for example, under the following conditions.
 GPC装置:昭和電工社製 SHODEX SYSTEM 11、
 カラム:SHODEX KF-800P,KF-005,KF-003,KF-001の4本直列、
 移動相:THF、
 流量:1ml/分、
 カラム温度:45℃、
 検出器:RI、
 換算:ポリスチレン。
GPC device: SHODEX SYSTEM 11, manufactured by Showa Denko KK
Column: 4 series of SHODEX KF-800P, KF-005, KF-003, KF-001,
Mobile phase: THF,
Flow rate: 1 ml / min
Column temperature: 45 ° C
Detector: RI,
Conversion: Polystyrene.
 カルボキシル基含有樹脂(A1)の原料、並びにカルボキシル基含有樹脂(A1)の合成時の反応条件について詳しく説明する。 The raw material of the carboxyl group-containing resin (A1) and the reaction conditions during the synthesis of the carboxyl group-containing resin (A1) will be described in detail.
 エポキシ化合物(a1)は、例えば下記式(7)に示す構造(S7)を有する。式(7)中のnは、例えば0~20の範囲内の数である。カルボキシル基含有樹脂(A1)の分子量を適切な値にするためには、nの平均は0~1の範囲内であることが特に好ましい。nの平均が0~1の範囲内であれば、特に酸無水物が酸二無水物(a3)を含有する場合、酸二無水物(a3)の付加による過剰な分子量の増大が抑制されやすくなる。 The epoxy compound (a1) has a structure (S7) represented by the following formula (7), for example. N in the formula (7) is a number in the range of 0 to 20, for example. In order to set the molecular weight of the carboxyl group-containing resin (A1) to an appropriate value, the average of n is particularly preferably in the range of 0-1. If the average of n is in the range of 0 to 1, particularly when the acid anhydride contains acid dianhydride (a3), an excessive increase in molecular weight due to addition of acid dianhydride (a3) is likely to be suppressed. Become.
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
 不飽和基含有カルボン酸(a2)は、例えば一分子中にエチレン性不飽和基を1個のみ有する化合物を含有できる。より具体的には、不飽和基含有カルボン酸(a2)は、例えばアクリル酸、メタクリル酸、ω-カルボキシ-ポリカプロラクトン(n≒2)モノアクリレート、クロトン酸、桂皮酸、2-アクリロイルオキシエチルコハク酸、2-メタクリロイルオキシエチルコハク酸、2-アクリロイルオキシエチルフタル酸、2-メタクリロイルオキシエチルフタル酸、2-アクリロイルオキシプロピルフタル酸、2-メタクリロイルオキシプロピルフタル酸、2-アクリロイルオキシエチルマレイン酸、2-メタクリロイルオキシエチルマレイン酸、β-カルボキシエチルアクリレート、2-アクリロイルオキシエチルテトラヒドロフタル酸、2-メタクリロイルオキシエチルテトラヒドロフタル酸、2-アクリロイルオキシエチルヘキサヒドロフタル酸、及び2-メタクリロイルオキシエチルヘキサヒドロフタル酸からなる群から選択される少なくとも一種の化合物を含有できる。好ましくは、不飽和基含有カルボン酸(a2)はアクリル酸を含有する。 The unsaturated group-containing carboxylic acid (a2) can contain, for example, a compound having only one ethylenically unsaturated group in one molecule. More specifically, unsaturated group-containing carboxylic acid (a2) is, for example, acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≈2) monoacrylate, crotonic acid, cinnamic acid, 2-acryloyloxyethyl succinate. Acid, 2-methacryloyloxyethyl succinic acid, 2-acryloyloxyethyl phthalic acid, 2-methacryloyloxyethyl phthalic acid, 2-acryloyloxypropyl phthalic acid, 2-methacryloyloxypropyl phthalic acid, 2-acryloyloxyethyl maleic acid, 2-methacryloyloxyethyl maleic acid, β-carboxyethyl acrylate, 2-acryloyloxyethyl tetrahydrophthalic acid, 2-methacryloyloxyethyl tetrahydrophthalic acid, 2-acryloyloxyethyl hexahydrophthalic acid And at least one compound selected from the group consisting of 2-methacryloyloxyethyl hexahydrophthalic acid. Preferably, unsaturated group containing carboxylic acid (a2) contains acrylic acid.
 エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを反応させるに当たっては、公知の方法が採用され得る。例えば、エポキシ化合物(a1)の溶剤溶液に不飽和基含有カルボン酸(a2)を加え、更に必要に応じて熱重合禁止剤及び触媒を加えて攪拌混合することで、反応性溶液を得る。この反応性溶液を常法により好ましくは60~150℃、特に好ましくは80~120℃の温度で反応させることで、中間体を得ることができる。溶剤は、例えばメチルエチルケトン、シクロヘキサノン等のケトン類、及びトルエン、キシレン等の芳香族炭化水素類、及び酢酸エチル、酢酸ブチル、セロソルブアセテート、ブチルセロソルブアセテート、カルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールモノメチルエーテルアセテート等の酢酸エステル類、及びジアルキルグリコールエーテル類からなる群から選択される少なくとも一種の成分を含有できる。熱重合禁止剤は例えばハイドロキノン及びハイドロキノンモノメチルエーテルのうち少なくとも一方を含有する。触媒は例えばベンジルジメチルアミン、トリエチルアミン等の第3級アミン類、トリメチルベンジルアンモニウムクロライド、メチルトリエチルアンモニウムクロライド等の第4級アンモニウム塩類、トリフェニルフォスフィン、及びトリフェニルスチビンからなる群から選択される少なくとも一種の成分を含有できる。 In reacting the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2), a known method may be employed. For example, the reactive solution is obtained by adding the unsaturated group-containing carboxylic acid (a2) to the solvent solution of the epoxy compound (a1), further adding a thermal polymerization inhibitor and a catalyst as necessary, and stirring and mixing. An intermediate can be obtained by reacting this reactive solution at a temperature of preferably 60 to 150 ° C., particularly preferably 80 to 120 ° C., by a conventional method. Solvents include, for example, ketones such as methyl ethyl ketone and cyclohexanone, and aromatic hydrocarbons such as toluene and xylene, and ethyl acetate, butyl acetate, cellosolve acetate, butyl cellosolve acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether It can contain at least one component selected from the group consisting of acetates such as acetate and dialkyl glycol ethers. The thermal polymerization inhibitor contains, for example, at least one of hydroquinone and hydroquinone monomethyl ether. The catalyst is at least selected from the group consisting of tertiary amines such as benzyldimethylamine and triethylamine, quaternary ammonium salts such as trimethylbenzylammonium chloride and methyltriethylammonium chloride, triphenylphosphine, and triphenylstibine. A kind of component can be contained.
 触媒が特にトリフェニルフォスフィンを含有することが好ましい。すなわち、トリフェニルフォスフィンの存在下で、エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを反応させることが好ましい。この場合、エポキシ化合物(a1)におけるエポキシ基と不飽和基含有カルボン酸(a2)との開環付加反応が特に促進され、95%以上、或いは97%以上、或いはほぼ100%の反応率(転化率)を達成できる。このため、構造(S3)を有する中間体が高い収率で得られる。また、感光性樹脂組成物の硬化物を含む層におけるイオンマイグレーションの発生が抑制され、同層の絶縁信頼性が更に向上する。 It is particularly preferable that the catalyst contains triphenylphosphine. That is, it is preferable to react the epoxy compound (a1) with the unsaturated group-containing carboxylic acid (a2) in the presence of triphenylphosphine. In this case, the ring-opening addition reaction between the epoxy group and the unsaturated group-containing carboxylic acid (a2) in the epoxy compound (a1) is particularly accelerated, and the reaction rate (conversion) is 95% or more, 97% or more, or almost 100%. Rate). For this reason, the intermediate body which has a structure (S3) is obtained with a high yield. Moreover, generation | occurrence | production of the ion migration in the layer containing the hardened | cured material of the photosensitive resin composition is suppressed, and the insulation reliability of the same layer improves further.
 エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを反応させる際のエポキシ化合物(a1)のエポキシ基1モルに対する不飽和基含有カルボン酸(a2)の量は0.8~1.2モルの範囲内であることが好ましい。この場合、優れた感光性と保存安定性とを有する感光性樹脂組成物が得られる。 When the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) are reacted, the amount of the unsaturated group-containing carboxylic acid (a2) relative to 1 mol of the epoxy group of the epoxy compound (a1) is 0.8 to 1. It is preferably within a range of 2 moles. In this case, a photosensitive resin composition having excellent photosensitivity and storage stability can be obtained.
 エポキシ化合物(a1)と不飽和基含有カルボン酸(a2)とを、エアバブリング下で反応させることも好ましい。この場合、不飽和基の付加重合反応が抑制されるから、中間体の分子量の増大及び中間体の溶液のゲル化を抑制できる。また、最終生成物であるカルボキシル基含有樹脂(A1)の過度な着色を抑制できる。 It is also preferable to react the epoxy compound (a1) and the unsaturated group-containing carboxylic acid (a2) under air bubbling. In this case, since the addition polymerization reaction of the unsaturated group is suppressed, the increase in the molecular weight of the intermediate and the gelation of the intermediate solution can be suppressed. Moreover, the excessive coloring of carboxyl group-containing resin (A1) which is a final product can be suppressed.
 このようにして得られる中間体は、エポキシ化合物(a1)のエポキシ基と不飽和基含有カルボン酸(a2)のカルボキシル基との反応で生成された水酸基を備える。 The intermediate thus obtained comprises a hydroxyl group generated by a reaction between the epoxy group of the epoxy compound (a1) and the carboxyl group of the unsaturated group-containing carboxylic acid (a2).
 酸二無水物(a3)は、酸無水物基を二つ有する化合物である。酸二無水物(a3)は、テトラカルボン酸の無水物を含有できる。酸二無水物(a3)は、例えば1,2,4,5-ベンゼンテトラカルボン酸二無水物、ベンゾフェノンテトラカルボン酸二無水物、メチルシクロヘキセンテトラカルボン酸二無水物、テトラカルボン酸二無水物、ナフタレン-1,4,5,8-テトラカルボン酸二無水物、エチレンテトラカルボン酸二無水物、9,9’-ビス(3,4-ジカルボキシフェニル)フルオレン二無水物、グリセリンビスアンヒドロトリメリテートモノアセテート、エチレングリコールビスアンヒドロトリメリテート、3,3’,4,4’-ジフェニルスルホンテトラカルボン酸二無水物、1,3,3a,4,5,9b-ヘキサヒドロ-5(テトラヒドロ-2,5-ジオキソ-3-フラニル)ナフト〔1,2-c〕フラン-1,3-ジオン、1,2,3,4-ブタンテトラカルボン酸二無水物、及び3,3’,4,4’-ビフェニルテトラカルボン酸二無水物からなる群から選択される少なくとも一種の化合物を含有できる。特に酸二無水物(a3)が3,3’,4,4’-ビフェニルテトラカルボン酸二無水物を含有することが好ましい。すなわち、式(5)及び式(6)におけるDが3,3’,4,4’-ビフェニルテトラカルボン酸二無水物残基を含むことが好ましい。この場合、感光性樹脂組成物の良好な現像性を確保しながら、感光性樹脂組成物から形成される皮膜のタック性を更に抑制すると共に硬化物の絶縁信頼性及び耐メッキ性を更に向上できる。酸二無水物(a3)全体に対する3,3’,4,4’-ビフェニルテトラカルボン酸二無水物の量は20~100モル%の範囲内であることが好ましく、40~100モル%の範囲内であることがより好ましいが、これらの範囲に限られない。 Acid dianhydride (a3) is a compound having two acid anhydride groups. The acid dianhydride (a3) can contain an anhydride of tetracarboxylic acid. Acid dianhydride (a3) is, for example, 1,2,4,5-benzenetetracarboxylic dianhydride, benzophenone tetracarboxylic dianhydride, methylcyclohexene tetracarboxylic dianhydride, tetracarboxylic dianhydride, Naphthalene-1,4,5,8-tetracarboxylic dianhydride, ethylenetetracarboxylic dianhydride, 9,9'-bis (3,4-dicarboxyphenyl) fluorene dianhydride, glycerin bisanhydrotri Melitate monoacetate, ethylene glycol bisanhydro trimellitate, 3,3 ', 4,4'-diphenylsulfone tetracarboxylic dianhydride, 1,3,3a, 4,5,9b-hexahydro-5 (tetrahydro -2,5-dioxo-3-furanyl) naphtho [1,2-c] furan-1,3-dione, 1,2,3,4-buta Tetracarboxylic dianhydride, and 3,3 ', may contain at least one compound selected from the group consisting of 4,4'-biphenyl tetracarboxylic acid dianhydride. In particular, the acid dianhydride (a3) preferably contains 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride. That is, it is preferable that D in Formula (5) and Formula (6) includes a 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride residue. In this case, while ensuring good developability of the photosensitive resin composition, it is possible to further suppress the tackiness of a film formed from the photosensitive resin composition and further improve the insulation reliability and plating resistance of the cured product. . The amount of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride relative to the total amount of acid dianhydride (a3) is preferably in the range of 20 to 100 mol%, and in the range of 40 to 100 mol%. Although it is more preferable to be within, it is not restricted to these ranges.
 酸一無水物(a4)は、酸無水物基を一つ有する化合物である。酸一無水物(a4)は、ジカルボン酸の無水物を含有できる。酸一無水物(a4)は、例えばフタル酸無水物、1,2,3,6-テトラヒドロ無水フタル酸、メチルテトラヒドロフタル酸無水物、メチルナジック酸無水物、ヘキサヒドロフタル酸無水物、メチルヘキサヒドロフタル酸無水物、コハク酸無水物、メチルコハク酸無水物、マレイン酸無水物、シトラコン酸無水物、グルタル酸無水物、シクロヘキサン-1,2,4-トリカルボン酸-1,2-無水物、及びイタコン酸無水物からなる群から選択される少なくとも一種の化合物を含有できる。特に酸一無水物(a4)が1,2,3,6-テトラヒドロ無水フタル酸を含有することが好ましい。すなわち、酸無水物が1,2,3,6-テトラヒドロ無水フタル酸を含有することが好ましい。すなわち、カルボキシル基含有樹脂(A1)が構造(S4)を有し、式(4)におけるBが1,2,3,6-テトラヒドロ無水フタル酸残基を含むことが好ましい。この場合、感光性樹脂組成物の良好な現像性を確保しながら、感光性樹脂組成物から形成される皮膜のタック性を更に抑制すると共に硬化物の絶縁信頼性及び耐メッキ性を更に向上できる。酸一無水物(a4)全体に対する1,2,3,6-テトラヒドロ無水フタル酸の量は20~100モル%の範囲内であることが好ましく、40~100モル%の範囲内であることがより好ましいが、これらの範囲に限られない。 Acid monoanhydride (a4) is a compound having one acid anhydride group. The acid monoanhydride (a4) can contain an anhydride of a dicarboxylic acid. Examples of the acid monoanhydride (a4) include phthalic anhydride, 1,2,3,6-tetrahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylnadic acid anhydride, hexahydrophthalic anhydride, methylhexa Hydrophthalic anhydride, succinic anhydride, methyl succinic anhydride, maleic anhydride, citraconic anhydride, glutaric anhydride, cyclohexane-1,2,4-tricarboxylic acid-1,2-anhydride, and It can contain at least one compound selected from the group consisting of itaconic anhydride. It is particularly preferred that the acid monoanhydride (a4) contains 1,2,3,6-tetrahydrophthalic anhydride. That is, the acid anhydride preferably contains 1,2,3,6-tetrahydrophthalic anhydride. That is, it is preferable that the carboxyl group-containing resin (A1) has the structure (S4), and B in the formula (4) includes a 1,2,3,6-tetrahydrophthalic anhydride residue. In this case, while ensuring good developability of the photosensitive resin composition, it is possible to further suppress the tackiness of a film formed from the photosensitive resin composition and further improve the insulation reliability and plating resistance of the cured product. . The amount of 1,2,3,6-tetrahydrophthalic anhydride relative to the total amount of acid monoanhydride (a4) is preferably in the range of 20 to 100 mol%, and preferably in the range of 40 to 100 mol%. Although more preferable, it is not limited to these ranges.
 中間体と酸無水物とを反応させるに当たっては、公知の方法が採用され得る。例えば中間体の溶剤溶液に酸無水物を加え、更に必要に応じて熱重合禁止剤及び触媒を加えて攪拌混合することで、反応性溶液を得る。この反応性溶液を常法により好ましくは60~150℃、特に好ましくは80~120℃の温度で反応させることで、カルボキシル基含有樹脂(A1)が得られる。溶剤、触媒及び重合禁止剤としては、適宜のものが使用でき、中間体の合成時に使用した溶剤、触媒及び重合禁止剤をそのまま使用することもできる。 In reacting the intermediate with the acid anhydride, a known method can be employed. For example, an acid anhydride is added to the solvent solution of the intermediate, and a thermal polymerization inhibitor and a catalyst are further added as necessary, followed by stirring and mixing to obtain a reactive solution. By reacting this reactive solution at a temperature of preferably 60 to 150 ° C., particularly preferably 80 to 120 ° C., a carboxyl group-containing resin (A1) can be obtained by a conventional method. As the solvent, catalyst and polymerization inhibitor, appropriate ones can be used, and the solvent, catalyst and polymerization inhibitor used in the synthesis of the intermediate can also be used as they are.
 触媒が特にトリフェニルフォスフィンを含有することが好ましい。すなわち、トリフェニルフォスフィンの存在下で、中間体と、酸無水物とを反応させることが好ましい。この場合、中間体における二級の水酸基と酸無水物との反応が特に促進され、90%以上、95%以上、97%以上、或いはほぼ100%の反応率(転化率)を達成できる。このため、構造(S4)及び構造(S5)のうち少なくとも一方の構造を有するカルボキシル基含有樹脂(A1)が高い収率で得られる。また、感光性樹脂組成物の硬化物を含む層におけるイオンマイグレーションの発生が抑制され、同層の絶縁信頼性が更に向上する。 It is particularly preferable that the catalyst contains triphenylphosphine. That is, it is preferable to react an intermediate with an acid anhydride in the presence of triphenylphosphine. In this case, the reaction between the secondary hydroxyl group and the acid anhydride in the intermediate is particularly accelerated, and a reaction rate (conversion rate) of 90%, 95%, 97%, or almost 100% can be achieved. For this reason, the carboxyl group-containing resin (A1) having at least one of the structure (S4) and the structure (S5) is obtained in a high yield. Moreover, generation | occurrence | production of the ion migration in the layer containing the hardened | cured material of the photosensitive resin composition is suppressed, and the insulation reliability of the same layer improves further.
 酸無水物が酸二無水物(a3)と酸一無水物(a4)とを含有する場合、エポキシ化合物(a1)のエポキシ基1モルに対して、酸二無水物(a3)の量は、0.05~0.24モルの範囲内であることが好ましい。また、エポキシ化合物(a1)のエポキシ基1モルに対して、酸一無水物(a4)の量は0.3~0.7モルの範囲内であることが好ましい。この場合、酸価と分子量とが適度に調整されたカルボキシル基含有樹脂(A1)が容易に得られる。 When the acid anhydride contains an acid dianhydride (a3) and an acid monoanhydride (a4), the amount of the acid dianhydride (a3) is 1 mol of the epoxy group of the epoxy compound (a1), A range of 0.05 to 0.24 mol is preferred. The amount of acid monoanhydride (a4) is preferably in the range of 0.3 to 0.7 mol with respect to 1 mol of the epoxy group of the epoxy compound (a1). In this case, the carboxyl group-containing resin (A1) in which the acid value and the molecular weight are appropriately adjusted can be easily obtained.
 カルボキシル基含有樹脂(A)は、カルボキシル基含有樹脂(A1)のみを含有してもよく、カルボキシル基含有樹脂(A1)以外のカルボキシル基含有樹脂(以下、カルボキシル基含有樹脂(F)ともいう)を更に含有してもよい。 The carboxyl group-containing resin (A) may contain only the carboxyl group-containing resin (A1), or a carboxyl group-containing resin other than the carboxyl group-containing resin (A1) (hereinafter also referred to as carboxyl group-containing resin (F)). May further be contained.
 カルボキシル基含有樹脂(F)は、例えば、カルボキシル基を有し光重合性を有さない化合物(以下、(F1)成分という)を含有できる。(F1)成分は、例えばカルボキシル基を有するエチレン性不飽和化合物を含むエチレン性不飽和単量体の重合体を含有する。カルボキシル基を有するエチレン性不飽和化合物は、アクリル酸、メタクリル酸、ω-カルボキシ-ポリカプロラクトン(n≒2)モノアクリレート等の化合物を含有できる。カルボキシル基を有するエチレン性不飽和化合物は、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート等と二塩基酸無水物との反応物も含有できる。エチレン性不飽和単量体は、2-(メタ)アクリロイロキシエチルフタレート、2-(メタ)アクリロイロキシエチル-2-ヒドロキシエチルフタレート、直鎖又は分岐の脂肪族或いは脂環族(但し、環中に一部不飽和結合を有してもよい)の(メタ)アクリル酸エステル等の、カルボキシル基を有さないエチレン性不飽和化合物を更に含有してもよい。 The carboxyl group-containing resin (F) can contain, for example, a compound having a carboxyl group and not having photopolymerizability (hereinafter referred to as (F1) component). (F1) A component contains the polymer of the ethylenically unsaturated monomer containing the ethylenically unsaturated compound which has a carboxyl group, for example. The ethylenically unsaturated compound having a carboxyl group can contain compounds such as acrylic acid, methacrylic acid, and ω-carboxy-polycaprolactone (n≈2) monoacrylate. The ethylenically unsaturated compound having a carboxyl group can also contain a reaction product of pentaerythritol triacrylate, pentaerythritol trimethacrylate and the like with a dibasic acid anhydride. Ethylenically unsaturated monomers include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or alicyclic (provided that It may further contain an ethylenically unsaturated compound having no carboxyl group, such as (meth) acrylic acid ester (which may partially have an unsaturated bond in the ring).
 カルボキシル基含有樹脂(F)は、カルボキシル基及びエチレン性不飽和基を有する化合物(以下、(F2)成分という)を含有してもよい。またカルボキシル基含有樹脂(F)は、(F2)成分のみを含有してもよい。(F2)成分は、例えば一分子中に二個以上のエポキシ基を有するエポキシ化合物(g1)とエチレン性不飽和化合物(g2)との反応物である中間体と、多価カルボン酸及びその無水物の群から選択される少なくとも一種の化合物(g3)との反応物である樹脂(第一の樹脂(g)という)を含有する。第一の樹脂(g)は、例えばエポキシ化合物(g1)中のエポキシ基と、エチレン性不飽和化合物(g2)中のカルボキシル基とを反応させて得られた中間体に化合物(g3)を付加させて得られる。エポキシ化合物(g1)は、クレゾールノボラック型エポキシ化合物、フェノールノボラック型エポキシ化合物、ビフェニルノボラック型エポキシ化合物等の適宜のエポキシ化合物を含有できる。特にエポキシ化合物(g1)はビフェニルノボラック型エポキシ化合物、クレゾールノボラック型エポキシ化合物の群から選択される少なくとも1種の化合物を含有することが好ましい。エポキシ化合物(g1)は、ビフェニルノボラック型エポキシ化合物のみを含有してもよく、或いはクレゾールノボラック型エポキシ化合物のみを含有してもよい。この場合、エポキシ化合物(g1)の主鎖に芳香族環が含まれるので、感光性樹脂組成物の硬化物が前記酸化剤により著しく腐食され難くなる。エポキシ化合物(g1)は、エチレン性不飽和化合物(h)の重合体を含有してもよい。エチレン性不飽和化合物(h)は、例えばグリシジル(メタ)アクリレート等のエポキシ基を有する化合物(h1)を含有し、或いは更に2-(メタ)アクリロイロキシエチルフタレート等のエポキシ基を有さない化合物(h2)を含有する。エチレン性不飽和化合物(g2)は、アクリル酸及びメタクリル酸のうち少なくとも一方を含有することが好ましい。化合物(g3)は、例えばフタル酸、テトラヒドロフタル酸、メチルテトラヒドロフタル酸等の多価カルボン酸と、これらの多価カルボン酸の無水物とからなる群から選択される一種以上の化合物を含有する。特に化合物(g3)はフタル酸、テトラヒドロフタル酸、メチルテトラヒドロフタル酸の群から選択される少なくとも1種の多価カルボン酸を含有することが好ましい。 The carboxyl group-containing resin (F) may contain a compound having a carboxyl group and an ethylenically unsaturated group (hereinafter referred to as (F2) component). Moreover, carboxyl group-containing resin (F) may contain only the (F2) component. The component (F2) includes, for example, an intermediate that is a reaction product of an epoxy compound (g1) having two or more epoxy groups in one molecule and an ethylenically unsaturated compound (g2), a polyvalent carboxylic acid and its anhydride. A resin (referred to as a first resin (g)) that is a reaction product with at least one compound (g3) selected from the group of substances. For example, the first resin (g) is obtained by adding the compound (g3) to an intermediate obtained by reacting the epoxy group in the epoxy compound (g1) with the carboxyl group in the ethylenically unsaturated compound (g2). Can be obtained. The epoxy compound (g1) can contain an appropriate epoxy compound such as a cresol novolac epoxy compound, a phenol novolac epoxy compound, or a biphenyl novolac epoxy compound. In particular, the epoxy compound (g1) preferably contains at least one compound selected from the group of biphenyl novolac type epoxy compounds and cresol novolac type epoxy compounds. The epoxy compound (g1) may contain only a biphenyl novolac type epoxy compound or may contain only a cresol novolac type epoxy compound. In this case, since an aromatic ring is contained in the main chain of the epoxy compound (g1), the cured product of the photosensitive resin composition is hardly corroded by the oxidizing agent. The epoxy compound (g1) may contain a polymer of the ethylenically unsaturated compound (h). The ethylenically unsaturated compound (h) contains a compound (h1) having an epoxy group such as glycidyl (meth) acrylate, or further has no epoxy group such as 2- (meth) acryloyloxyethyl phthalate. Contains compound (h2). The ethylenically unsaturated compound (g2) preferably contains at least one of acrylic acid and methacrylic acid. The compound (g3) contains one or more compounds selected from the group consisting of polyvalent carboxylic acids such as phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid, and anhydrides of these polyvalent carboxylic acids. . In particular, the compound (g3) preferably contains at least one polycarboxylic acid selected from the group of phthalic acid, tetrahydrophthalic acid, and methyltetrahydrophthalic acid.
 (F2)成分は、カルボキシル基を有するエチレン性不飽和化合物を含有するエチレン性不飽和単量体の重合体とエポキシ基を有するエチレン性不飽和化合物との反応物である樹脂(第二の樹脂(i)という)を含有してもよい。エチレン性不飽和単量体はカルボキシル基を有さないエチレン性不飽和化合物を更に含有してもよい。第二の樹脂(i)は、重合体におけるカルボキシル基の一部にエポキシ基を有するエチレン性不飽和化合物を反応させることで得られる。エチレン性不飽和単量体は、カルボキシル基を有さないエチレン性不飽和化合物を更に含有してもよい。カルボキシル基を有するエチレン性不飽和化合物は、例えばアクリル酸、メタクリル酸、ω-カルボキシ-ポリカプロラクトン(n≒2)モノアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールトリメタクリレート等の化合物を含有する。カルボキシル基を有さないエチレン性不飽和化合物は、例えば2-(メタ)アクリロイロキシエチルフタレート、2-(メタ)アクリロイロキシエチル-2-ヒドロキシエチルフタレート、直鎖又は分岐の脂肪族或いは脂環族(但し、環中に一部不飽和結合を有してもよい)の(メタ)アクリル酸エステル等の化合物を含有する。エポキシ基を有するエチレン性不飽和化合物は、グリシジル(メタ)アクリレートを含有することが好ましい。 The component (F2) is a resin (second resin) that is a reaction product of a polymer of an ethylenically unsaturated monomer containing an ethylenically unsaturated compound having a carboxyl group and an ethylenically unsaturated compound having an epoxy group. (I)) may be contained. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. The second resin (i) can be obtained by reacting an ethylenically unsaturated compound having an epoxy group with a part of the carboxyl group in the polymer. The ethylenically unsaturated monomer may further contain an ethylenically unsaturated compound having no carboxyl group. Examples of the ethylenically unsaturated compound having a carboxyl group include compounds such as acrylic acid, methacrylic acid, ω-carboxy-polycaprolactone (n≈2) monoacrylate, pentaerythritol triacrylate, and pentaerythritol trimethacrylate. Examples of the ethylenically unsaturated compound having no carboxyl group include 2- (meth) acryloyloxyethyl phthalate, 2- (meth) acryloyloxyethyl-2-hydroxyethyl phthalate, linear or branched aliphatic or fatty acid It contains a compound such as a (meth) acrylic acid ester of a cyclic group (however, it may have a partially unsaturated bond in the ring). The ethylenically unsaturated compound having an epoxy group preferably contains glycidyl (meth) acrylate.
 カルボキシル基含有樹脂(A)は、カルボキシル基含有樹脂(A1)のみ、又はカルボキシル基含有樹脂(A1)とカルボキシル基含有樹脂(F)とを含有する。カルボキシル基含有樹脂(A)は、カルボキシル基含有樹脂(A1)を30質量%以上含有することが好ましく、50質量%以上含有することがより好ましく、100質量%含有することが更に好ましい。この場合、感光性樹脂組成物の硬化物の耐熱性及び絶縁信頼性を特に向上させることができる。また、感光性樹脂組成物から形成される皮膜のタック性を十分に低減できる。更に、感光性樹脂組成物の、アルカリ性水溶液による現像性を確保できる。 The carboxyl group-containing resin (A) contains only the carboxyl group-containing resin (A1) or the carboxyl group-containing resin (A1) and the carboxyl group-containing resin (F). The carboxyl group-containing resin (A) preferably contains 30% by mass or more of the carboxyl group-containing resin (A1), more preferably 50% by mass or more, and still more preferably 100% by mass. In this case, the heat resistance and insulation reliability of the cured product of the photosensitive resin composition can be particularly improved. Moreover, the tackiness of the film | membrane formed from the photosensitive resin composition can fully be reduced. Furthermore, the developability of the photosensitive resin composition with an alkaline aqueous solution can be secured.
 上述の通り、感光性樹脂組成物は、カルボキシル基含有樹脂(A)と、エチレン性不飽和結合を一分子中に少なくとも一つ有する不飽和化合物(B)と、光重合開始剤(C)と、エポキシ化合物(D)と、成分(E)とを含有する。 As described above, the photosensitive resin composition includes a carboxyl group-containing resin (A), an unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule, and a photopolymerization initiator (C). And an epoxy compound (D) and a component (E).
 不飽和化合物(B)は、感光性樹脂組成物に光硬化性を付与できる。不飽和化合物(B)は、例えば2-ヒドロキシエチル(メタ)アクリレート等の単官能(メタ)アクリレート;並びにジエチレングリコールジ(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、ε―カプロラクトン変性ペンタエリストールヘキサアクリレート、トリシクロデカンジメタノールジ(メタ)アクリレート等の多官能(メタ)アクリレートからなる群から選択される少なくとも一種の化合物を含有できる。 The unsaturated compound (B) can impart photocurability to the photosensitive resin composition. The unsaturated compound (B) is, for example, a monofunctional (meth) acrylate such as 2-hydroxyethyl (meth) acrylate; and diethylene glycol di (meth) acrylate, trimethylolpropane di (meth) acrylate, trimethylolpropane tri (meth) Acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, ε-caprolactone modified pentaerythritol hexaacrylate, tricyclodecandi At least one compound selected from the group consisting of polyfunctional (meth) acrylates such as methanol di (meth) acrylate can be contained.
 特に不飽和化合物(B)は、三官能の化合物、すなわち一分子中に不飽和結合を3つ有する化合物を含有することが好ましい。この場合、感光性樹脂組成物から形成される皮膜を露光・現像する場合の解像性が向上すると共に、感光性樹脂組成物のアルカリ性水溶液による現像性が特に向上する。三官能の化合物は、例えばトリメチロールプロパントリ(メタ)アクリレート、EO変性トリメチロールプロパントリ(メタ)アクリレート、ペンタエリストールトリ(メタ)アクリレート、エトキシ化イソシアヌル酸トリ(メタ)アクリレート及びε-カプロラクトン変性トリス-(2-アクリロキシエチル)イソシアヌレート及びエトキシ化グリセリントリ(メタ)アクリレートからなる群から選択される少なくとも一種の化合物を含有できる。 Particularly, the unsaturated compound (B) preferably contains a trifunctional compound, that is, a compound having three unsaturated bonds in one molecule. In this case, the resolution when the film formed from the photosensitive resin composition is exposed and developed is improved, and the developability of the photosensitive resin composition with an alkaline aqueous solution is particularly improved. Trifunctional compounds include, for example, trimethylolpropane tri (meth) acrylate, EO modified trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, ethoxylated isocyanuric acid tri (meth) acrylate and ε-caprolactone modified It can contain at least one compound selected from the group consisting of tris- (2-acryloxyethyl) isocyanurate and ethoxylated glycerin tri (meth) acrylate.
 不飽和化合物(B)は、リン含有化合物(リン含有不飽和化合物)を含有することも好ましい。この場合、感光性樹脂組成物の硬化物の難燃性が向上する。リン含有不飽和化合物は、例えば2-メタクリロイロキシエチルアシッドフォスフェート(具体例として共栄社化学株式会社製の品番ライトエステルP-1M、及びライトエステルP-2M)、2-アクリロイルオキシエチルアシッドフォスフェート(具体例として共栄社化学株式会社製の品番ライトアクリレートP-1A)、ジフェニル-2-メタクリロイルオキシエチルフォスフェート(具体例として大八工業株式会社製の品番MR-260)、並びに昭和高分子株式会社製のHFAシリーズ(具体例としてジペンタエリストールヘキサアクリレートとHCA(9,10-ジヒドロ-9-オキサ-10-フォスファフェナントレン-10-オキサイド)との付加反応物である品番HFA-6003、及びHFA-6007、カプロラクトン変性ジペンタエリストールヘキサアクリレートとHCA(9,10-ジヒドロ-9-オキサ-10-フォスファフェナントレン-10-オキサイド)との付加反応物である品番HFA-3003、及びHFA-6127等)からなる群から選択される少なくとも一種の化合物を含有できる。 It is also preferable that the unsaturated compound (B) contains a phosphorus-containing compound (phosphorus-containing unsaturated compound). In this case, the flame retardancy of the cured product of the photosensitive resin composition is improved. Phosphorus-containing unsaturated compounds include, for example, 2-methacryloyloxyethyl acid phosphate (specific examples: product number light ester P-1M and light ester P-2M manufactured by Kyoeisha Chemical Co., Ltd.), 2-acryloyloxyethyl acid phosphate (Specific examples are product number light acrylate P-1A manufactured by Kyoeisha Chemical Co., Ltd.), diphenyl-2-methacryloyloxyethyl phosphate (specific examples are product number MR-260 manufactured by Daihachi Industry Co., Ltd.), and Showa Polymer Co., Ltd. HFA series (part number HFA-6003, which is an addition reaction product of dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) as a specific example, and HFA-6007, caprolactone Product No. HFA-3003, HFA-6127, etc., which are addition reaction products of modified dipentaerystol hexaacrylate and HCA (9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide) It can contain at least one compound selected from the group.
 不飽和化合物(B)は、プレポリマーを含有してもよい。プレポリマーは、例えばエチレン性不飽和結合を有するモノマーを重合させてからエチレン性不飽和基を付加して得られるプレポリマー、並びにオリゴ(メタ)アクリレートプレポリマー類からなる群から選択される少なくとも一種の化合物を含有できる。オリゴ(メタ)アクリレートプレポリマー類は、例えばエポキシ(メタ)アクリレート、ポリエステル(メタ)アクリレート、ウレタン(メタ)アクリレート、アルキド樹脂(メタ)アクリレート、シリコーン樹脂(メタ)アクリレート、及びスピラン樹脂(メタ)アクリレートからなる群から選択される少なくとも一種の成分を含有できる。 The unsaturated compound (B) may contain a prepolymer. The prepolymer is at least one selected from the group consisting of, for example, a prepolymer obtained by polymerizing a monomer having an ethylenically unsaturated bond and then adding an ethylenically unsaturated group, and oligo (meth) acrylate prepolymers These compounds can be contained. Oligo (meth) acrylate prepolymers include, for example, epoxy (meth) acrylate, polyester (meth) acrylate, urethane (meth) acrylate, alkyd resin (meth) acrylate, silicone resin (meth) acrylate, and spirane resin (meth) acrylate At least one component selected from the group consisting of:
 光重合開始剤(C)は、例えばアシルフォスフィンオキサイド系光重合開始剤(C1)を含有する。すなわち、感光性樹脂組成物は例えばアシルフォスフィンオキサイド系光重合開始剤(C1)を含有する。この場合、感光性樹脂組成物がカルボキシル基含有樹脂(A1)を含有するにもかかわらず、感光性樹脂組成物に、紫外線に対する高い感光性を付与できる。また、感光性樹脂組成物の硬化物を含む層におけるイオンマイグレーションの発生が抑制され、同層の絶縁信頼性が更に向上する。 The photopolymerization initiator (C) contains, for example, an acyl phosphine oxide photopolymerization initiator (C1). That is, the photosensitive resin composition contains, for example, an acyl phosphine oxide photopolymerization initiator (C1). In this case, although the photosensitive resin composition contains the carboxyl group-containing resin (A1), high sensitivity to ultraviolet rays can be imparted to the photosensitive resin composition. Moreover, generation | occurrence | production of the ion migration in the layer containing the hardened | cured material of the photosensitive resin composition is suppressed, and the insulation reliability of the same layer improves further.
 また、アシルフォスフィンオキサイド系光重合開始剤(C1)は硬化物の電気絶縁性を阻害しにくい。このため、感光性樹脂組成物を露光硬化することで、電気的絶縁性に優れた硬化物が得られ、この硬化物は、例えばソルダーレジスト層、メッキレジスト層、エッチングレジスト層、層間絶縁層として好適である。 Also, the acylphosphine oxide photopolymerization initiator (C1) is unlikely to hinder the electrical insulation of the cured product. For this reason, by curing the photosensitive resin composition by exposure, a cured product having excellent electrical insulation can be obtained. This cured product can be used as, for example, a solder resist layer, a plating resist layer, an etching resist layer, or an interlayer insulating layer. Is preferred.
 アシルフォスフィンオキサイド系光重合開始剤(C1)は、例えば2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド、2,4,6-トリメチルベンゾイル-エチル-フェニル-フォスフィネート等のモノアシルフォスフィンオキサイド系光重合開始剤、並びにビス-(2,6-ジクロロベンゾイル)フェニルフォスフィンオキサイド、ビス-(2,6-ジクロロベンゾイル)-2,5-ジメチルフェニルフォスフィンオキサイド、ビス-(2,6-ジクロロベンゾイル)-4-プロピルフェニルフォスフィンオキサイド、ビス-(2,6-ジクロロベンゾイル)-1-ナフチルフォスフィンオキサイド、ビス-(2,6-ジメトキシベンゾイル)フェニルフォスフィンオキサイド、ビス-(2,6-ジメトキシベンゾイル)-2,4,4-トリメチルペンチルフォスフィンオキサイド、ビス-(2,6-ジメトキシベンゾイル)-2,5-ジメチルフェニルフォスフィンオキサイド、ビス-(2,4,6-トリメチルベンゾイル)フェニルフォスフィンオキサイド、(2,5,6-トリメチルベンゾイル)-2,4,4-トリメチルペンチルフォスフィンオキサイド等のビスアシルフォスフィンオキサイド系光重合開始剤からなる群から選択される少なくとも一種の成分を含有できる。特にアシルフォスフィンオキサイド系光重合開始剤(C1)が2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイドを含有することが好ましく、アシルフォスフィンオキサイド系光重合開始剤(C1)が2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイドのみを含有することも好ましい。 Acylphosphine oxide photopolymerization initiators (C1) include monoacyl such as 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, 2,4,6-trimethylbenzoyl-ethyl-phenyl-phosphinate, etc. Phosphine oxide photopolymerization initiator, and bis- (2,6-dichlorobenzoyl) phenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2 , 6-Dichlorobenzoyl) -4-propylphenylphosphine oxide, bis- (2,6-dichlorobenzoyl) -1-naphthylphosphine oxide, bis- (2,6-dimethoxybenzoyl) phenylphosphine oxide, bis- (2,6-dimethoxybe Zoyl) -2,4,4-trimethylpentylphosphine oxide, bis- (2,6-dimethoxybenzoyl) -2,5-dimethylphenylphosphine oxide, bis- (2,4,6-trimethylbenzoyl) phenylphosphine Contains at least one component selected from the group consisting of bisacylphosphine oxide photopolymerization initiators such as fin oxide and (2,5,6-trimethylbenzoyl) -2,4,4-trimethylpentylphosphine oxide it can. In particular, the acylphosphine oxide photopolymerization initiator (C1) preferably contains 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, and the acylphosphine oxide photopolymerization initiator (C1) contains 2, It is also preferred to contain only 4,6-trimethylbenzoyl-diphenyl-phosphine oxide.
 光重合開始剤(C)はアシルフォスフィンオキサイド系光重合開始剤(C1)に加えてヒドロキシケトン系光重合開始剤(C2)を含有することが好ましい。すなわち感光性樹脂組成物はヒドロキシケトン系光重合開始剤(C2)を含有することが好ましい。この場合、ヒドロキシケトン系光重合開始剤(C2)を含有しない場合と比べて、感光性樹脂組成物に更に高い感光性を付与できる。これにより、感光性樹脂組成物から形成される塗膜に紫外線を照射して硬化させる場合、塗膜をその表面から深部に亘って十分に硬化させることが可能となる。ヒドロキシケトン系光重合開始剤(C2)としては、例えば1-ヒドロキシ-シクロヘキシル-フェニル-ケトン、フェニルグリオキシックアシッドメチルエステル、1-[4-(2-ヒドロキシエトキシ)-フェニル]-2-ヒドロキシ-2-メチル-1-プロパン-1-オン、2-ヒドロキシ-1-{4-[4-(2-ヒドロキシ-2-メチル-プロピオニル)-ベンジル]フェニル}-2-メチル-プロパン-1-オン及び2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オンが挙げられる。 The photopolymerization initiator (C) preferably contains a hydroxyketone photopolymerization initiator (C2) in addition to the acylphosphine oxide photopolymerization initiator (C1). That is, the photosensitive resin composition preferably contains a hydroxyketone photopolymerization initiator (C2). In this case, higher photosensitivity can be imparted to the photosensitive resin composition as compared with the case where the hydroxyketone photopolymerization initiator (C2) is not contained. Thereby, when irradiating and hardening an ultraviolet-ray to the coating film formed from the photosensitive resin composition, it becomes possible to fully harden a coating film over the deep part from the surface. Examples of the hydroxyketone photopolymerization initiator (C2) include 1-hydroxy-cyclohexyl-phenyl-ketone, phenylglyoxyc acid methyl ester, 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy -2-Methyl-1-propan-1-one, 2-hydroxy-1- {4- [4- (2-hydroxy-2-methyl-propionyl) -benzyl] phenyl} -2-methyl-propane-1- On and 2-hydroxy-2-methyl-1-phenyl-propan-1-one.
 アシルフォスフィンオキサイド系光重合開始剤(C1)とヒドロキシケトン系光重合開始剤(C2)との質量比は、1:0.01~1:10の範囲内であることが好ましい。この場合、感光性樹脂組成物から形成される塗膜の表面付近における硬化性と深部における硬化性とを、バランス良く向上させることができる。 The mass ratio of the acylphosphine oxide photopolymerization initiator (C1) and the hydroxyketone photopolymerization initiator (C2) is preferably in the range of 1: 0.01 to 1:10. In this case, the curability in the vicinity of the surface of the coating film formed from the photosensitive resin composition and the curability in the deep portion can be improved in a well-balanced manner.
 光重合開始剤(C)は、ビス(ジエチルアミノ)ベンゾフェノン(C3)を含有することも好ましい。すなわち、感光性樹脂組成物がアシルフォスフィンオキサイド系光重合開始剤(C1)及びビス(ジエチルアミノ)ベンゾフェノン(C3)を含有し、或いはアシルフォスフィンオキサイド系光重合開始剤(C1)、ヒドロキシケトン系光重合開始剤(C2)及びビス(ジエチルアミノ)ベンゾフェノン(C3)を含有することも好ましい。この場合、感光性樹脂組成物から形成される塗膜を部分的に露光してから現像する場合、露光されない部分の硬化が抑制されるから、解像性が特に高くなる。このため、非常に微細なパターンの感光性樹脂組成物の硬化物を形成できる。特に、感光性樹脂組成物から多層プリント配線板の層間絶縁層を作製すると共にこの層間絶縁層にスルーホールのための小径の穴をフォトリソグラフィー法で設ける場合(図1参照)、小径の穴を精密且つ容易に形成できる。 The photopolymerization initiator (C) preferably contains bis (diethylamino) benzophenone (C3). That is, the photosensitive resin composition contains an acyl phosphine oxide photopolymerization initiator (C1) and bis (diethylamino) benzophenone (C3), or an acyl phosphine oxide photopolymerization initiator (C1), a hydroxyketone type. It is also preferable to contain a photopolymerization initiator (C2) and bis (diethylamino) benzophenone (C3). In this case, when developing after partially exposing the coating film formed from the photosensitive resin composition, since the hardening of the part which is not exposed is suppressed, resolution becomes especially high. For this reason, the hardened | cured material of the photosensitive resin composition of a very fine pattern can be formed. In particular, when an interlayer insulating layer of a multilayer printed wiring board is prepared from a photosensitive resin composition and a small-diameter hole for a through hole is provided in the interlayer insulating layer by a photolithography method (see FIG. 1), the small-diameter hole is formed. Precise and easy to form.
 アシルフォスフィンオキサイド系光重合開始剤(C1)に対するビス(ジエチルアミノ)ベンゾフェノン(C3)の量は、0.5~20質量%の範囲内であることが好ましい。アシルフォスフィンオキサイド系光重合開始剤(C1)に対するビス(ジエチルアミノ)ベンゾフェノン(C3)の量が0.5質量%以上であると、解像性が特に高くなる。また、アシルフォスフィンオキサイド系光重合開始剤(C1)に対するビス(ジエチルアミノ)ベンゾフェノン(C3)の量が20質量%以下であると、感光性樹脂組成物の硬化物の電気絶縁性をビス(ジエチルアミノ)ベンゾフェノン(C3)が阻害しにくい。 The amount of bis (diethylamino) benzophenone (C3) relative to the acylphosphine oxide photopolymerization initiator (C1) is preferably in the range of 0.5 to 20% by mass. When the amount of bis (diethylamino) benzophenone (C3) with respect to the acylphosphine oxide photopolymerization initiator (C1) is 0.5% by mass or more, the resolution is particularly high. Further, when the amount of bis (diethylamino) benzophenone (C3) relative to the acylphosphine oxide-based photopolymerization initiator (C1) is 20% by mass or less, the electrical insulation of the cured product of the photosensitive resin composition is increased to bis (diethylamino). ) Benzophenone (C3) is difficult to inhibit.
 感光性樹脂組成物は、更に公知の光重合促進剤、増感剤等を含有してもよい。例えば感光性樹脂組成物は、ベンゾインとそのアルキルエーテル類;アセトフェノン、ベンジルジメチルケタール等のアセトフェノン類;2-メチルアントラキノン等のアントラキノン類;2,4-ジメチルチオキサントン、2,4-ジエチルチオキサントン、2-イソプロピルチオキサントン、4-イソプロピルチオキサントン、2,4-ジイソプロピルチオキサントン等のチオキサントン類;ベンゾフェノン、4-ベンゾイル-4’-メチルジフェニルスルフィド等のベンゾフェノン類;2,4-ジイソプロピルキサントン等のキサントン類;並びに2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オン等のα-ヒドロキシケトン類;2-メチル-1-[4-(メチルチオ)フェニル]-2-モルフォリノ-1-プロパノン等の窒素原子を含む化合物からなる群から選択される少なくとも一種の成分を含有できる。感光性樹脂組成物は、光重合開始剤(C)と共に、p-ジメチル安息香酸エチルエステル、p-ジメチルアミノ安息香酸イソアミルエステル、2-ジメチルアミノエチルベンゾエート等の第三級アミン系等の公知の光重合促進剤や増感剤等を含有してもよい。感光性樹脂組成物は、必要に応じて、可視光露光用の光重合開始剤及び近赤外線露光用の光重合開始剤のうちの少なくとも一種を含有してもよい。感光性樹脂組成物は、光重合開始剤(C)と共に、レーザ露光法用増感剤である7-ジエチルアミノ-4-メチルクマリン等のクマリン誘導体、カルボシアニン色素系、キサンテン色素系等を含有してもよい。 The photosensitive resin composition may further contain a known photopolymerization accelerator, sensitizer and the like. For example, the photosensitive resin composition includes benzoin and its alkyl ethers; acetophenones such as acetophenone and benzyldimethyl ketal; anthraquinones such as 2-methylanthraquinone; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2- Thioxanthones such as isopropylthioxanthone, 4-isopropylthioxanthone and 2,4-diisopropylthioxanthone; benzophenones such as benzophenone and 4-benzoyl-4′-methyldiphenyl sulfide; xanthones such as 2,4-diisopropylxanthone; Α-hydroxyketones such as hydroxy-2-methyl-1-phenyl-propan-1-one; 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-1-propanone It can contain at least one component selected from the group consisting of compounds containing a nitrogen atom. The photosensitive resin composition includes known photopolymerization initiators (C) and tertiary amines such as p-dimethylbenzoic acid ethyl ester, p-dimethylaminobenzoic acid isoamyl ester, and 2-dimethylaminoethylbenzoate. You may contain a photoinitiator, a sensitizer, etc. The photosensitive resin composition may contain at least one of a photopolymerization initiator for visible light exposure and a photopolymerization initiator for near infrared exposure, if necessary. The photosensitive resin composition contains a photopolymerization initiator (C) and a coumarin derivative such as 7-diethylamino-4-methylcoumarin, which is a sensitizer for laser exposure, a carbocyanine dye system, a xanthene dye system, and the like. May be.
 エポキシ化合物(D)は、感光性樹脂組成物に熱硬化性を付与できる。エポキシ化合物(D)は、結晶性エポキシ樹脂を含有することが好ましい。この場合、感光性樹脂組成物の現像性を向上させることができる。またエポキシ化合物(D)は、非晶性エポキシ樹脂を更に含有してもよい。ここで「結晶性エポキシ樹脂」は融点を有するエポキシ樹脂であり、「非晶性エポキシ樹脂」は融点を有さないエポキシ樹脂である。 The epoxy compound (D) can impart thermosetting properties to the photosensitive resin composition. The epoxy compound (D) preferably contains a crystalline epoxy resin. In this case, the developability of the photosensitive resin composition can be improved. The epoxy compound (D) may further contain an amorphous epoxy resin. Here, the “crystalline epoxy resin” is an epoxy resin having a melting point, and the “amorphous epoxy resin” is an epoxy resin having no melting point.
 結晶性エポキシ樹脂は、例えば、1,3,5-トリス(2,3-エポキシプロピル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン、ハイドロキノン型結晶性エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品名YDC-1312)、ビフェニル型結晶性エポキシ樹脂(具体例として三菱化学株式会社製の品名YX-4000)、ジフェニルエーテル型結晶性エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品番YSLV-80DE)、ビスフェノール型結晶性エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品名YSLV-80XY)、テトラキスフェノールエタン型結晶性エポキシ樹脂(具体例として日本化薬株式会社製の品番GTR-1800)、ビスフェノールフルオレン型結晶性エポキシ樹脂(具体例として構造(S7)を有するエポキシ樹脂)からなる群から選択される一種以上の成分を含有することが好ましい。 Examples of crystalline epoxy resins include 1,3,5-tris (2,3-epoxypropyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trione, hydroquinone type crystals Epoxy resin (specifically, product name YDC-1312 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), biphenyl type crystalline epoxy resin (specifically, product name YX-4000 manufactured by Mitsubishi Chemical Corporation), diphenyl ether type crystalline epoxy resin (specifically For example, Nippon Steel & Sumikin Chemical Co., Ltd., product number YSLV-80DE), bisphenol type crystalline epoxy resin (specifically, Nippon Steel & Sumikin Chemical Co., Ltd. product name YSLV-80XY), tetrakisphenol ethane type crystalline epoxy resin (specific example) Nippon Kayaku Co., Ltd. product number GTR-1800), bisphenolfluorene type Preferably contains one or more components selected from the group consisting of (epoxy resin having a structure as a specific example (S7)) sex epoxy resin.
 結晶性エポキシ樹脂は、1分子中に2個のエポキシ基を有することが好ましい。 The crystalline epoxy resin preferably has two epoxy groups in one molecule.
 結晶性エポキシ樹脂は150~300g/eqのエポキシ当量を有することが好ましい。このエポキシ当量は、1グラム当量のエポキシ基を含有する結晶性エポキシ樹脂のグラム重量である。結晶性エポキシ樹脂は融点を有する。結晶性エポキシ樹脂の融点としては、例えば70~180℃が挙げられる。 The crystalline epoxy resin preferably has an epoxy equivalent of 150 to 300 g / eq. This epoxy equivalent is the gram weight of a crystalline epoxy resin containing 1 gram equivalent of epoxy groups. The crystalline epoxy resin has a melting point. Examples of the melting point of the crystalline epoxy resin include 70 to 180 ° C.
 特にエポキシ化合物(D)は、融点110℃以下の結晶性エポキシ樹脂を含有することが好ましい。この場合、感光性樹脂組成物のアルカリ性水溶液による現像性が特に向上する。融点110℃以下の結晶性エポキシ樹脂は、例えばビフェニル型エポキシ樹脂(具体例として三菱化学株式会社製の品番YX-4000)、ビフェニルエーテル型エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品番YSLV-80DE)、及びビスフェノール型エポキシ樹脂(具体例として新日鉄住金化学製の品番YSLV-80XY)、ビスフェノールフルオレン型結晶性エポキシ樹脂(具体例として構造(S7)を有するエポキシ樹脂)からなる群から選択される少なくとも一種の成分を含有できる。 In particular, the epoxy compound (D) preferably contains a crystalline epoxy resin having a melting point of 110 ° C. or lower. In this case, the developability of the photosensitive resin composition with an alkaline aqueous solution is particularly improved. Crystalline epoxy resins having a melting point of 110 ° C. or lower are, for example, biphenyl type epoxy resins (specifically, product number YX-4000 manufactured by Mitsubishi Chemical Corporation), biphenyl ether type epoxy resins (specifically, product number YSLV manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.) -80DE), and a bisphenol-type epoxy resin (specifically, product number YSLV-80XY manufactured by Nippon Steel & Sumikin Chemical), a bisphenolfluorene-type crystalline epoxy resin (specifically, an epoxy resin having the structure (S7)). At least one component.
 非晶性エポキシ樹脂は、例えば、フェノールノボラック型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON N-775)、クレゾールノボラック型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON N-695)、ビスフェノールAノボラック型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON N-865)、ビスフェノールA型エポキシ樹脂(具体例として三菱化学株式会社製の品番jER1001)、ビスフェノールF型エポキシ樹脂(具体例として三菱化学株式会社製の品番jER4004P)、ビスフェノールS型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON EXA-1514)、ビスフェノールAD型エポキシ樹脂、ビフェニルノボラック型エポキシ樹脂(具体例として日本化薬株式会社製の品番NC-3000)、水添ビスフェノールA型エポキシ樹脂(具体例として新日鉄住金化学株式会社製の品番ST-4000D)、ナフタレン型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON HP-4032、EPICLON HP-4700、EPICLON HP-4770)、ターシャリーブチルカテコール型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON HP-820)、ジシクロペンタジエン型エポキシ樹脂(具体例としてDIC製の品番EPICLON HP-7200)、アダマンタン型エポキシ樹脂(具体例として出光興産株式会社製の品番ADAMANTATE X-E-201)、特殊二官能型エポキシ樹脂(具体例として、三菱化学株式会社製の品番YL7175-500、及びYL7175-1000;DIC株式会社製の品番EPICLON TSR-960、EPICLON TER-601、EPICLON TSR-250-80BX、EPICLON 1650-75MPX、EPICLON EXA-4850、EPICLON EXA-4816、EPICLON EXA-4822、及びEPICLON EXA-9726;新日鉄住金化学株式会社製の品番YSLV-120TE)、ゴム状コアシェルポリマー変性ビスフェノールA型エポキシ樹脂(具体例として株式会社カネカ製の品番MX-156)、ゴム状コアシェルポリマー変性ビスフェノールF型エポキシ樹脂(具体例として株式会社カネカ製の品番MX-136)、並びにゴム粒子含有ビスフェノールF型エポキシ樹脂(具体例として株式会社カネカ製の品番カネエースMX-130)からなる群から選択される少なくとも一種の成分を含有することが好ましい。 Amorphous epoxy resins include, for example, phenol novolac type epoxy resins (specifically, product number EPICLON N-775 manufactured by DIC Corporation) and cresol novolac type epoxy resins (specific examples, product number EPICLON N-695 manufactured by DIC Corporation). Bisphenol A novolac type epoxy resin (specific example, product number EPICLON N-865 manufactured by DIC Corporation), bisphenol A type epoxy resin (specific example, product number jER1001 manufactured by Mitsubishi Chemical Corporation), bisphenol F type epoxy resin (specific example As product number jER4004P manufactured by Mitsubishi Chemical Co., Ltd.), bisphenol S type epoxy resin (specifically, product number EPICLON EXA-1514 manufactured by DIC Corporation), bisphenol AD type epoxy resin, biphenyl novolac Type epoxy resin (part number NC-3000 manufactured by Nippon Kayaku Co., Ltd.), hydrogenated bisphenol A type epoxy resin (part number ST-4000D manufactured by Nippon Steel & Sumikin Chemical Co., Ltd.), naphthalene type epoxy resin (particular Examples include DIC Corporation part numbers EPICLON HP-4032, EPICLON HP-4700, EPICLON HP-4770), tertiary butyl catechol type epoxy resin (specific examples DIC Corporation part number EPICLON HP-820), dicyclopentadiene. Type epoxy resin (specifically, product number EPICLON HP-7200 manufactured by DIC), adamantane type epoxy resin (specific example, product number ADAMANTATE X-E-201 manufactured by Idemitsu Kosan Co., Ltd.), special bifunctional epoxy resin (tool) For example, product numbers YL7175-500 and YL7175-1000 manufactured by Mitsubishi Chemical Corporation; product numbers EPICLON TSR-960, EPICLON TER-601, EPICLON TSR-250-80BX, EPICLON 1650-75MPX, EPICLON EXA- manufactured by DIC Corporation 4850, EPICLON EXA-4816, EPICLON EXA-4822, and EPICLON EXA-9726; product number YSLV-120TE manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., rubber core-shell polymer modified bisphenol A type epoxy resin (specifically, manufactured by Kaneka Corporation) Product number MX-156), rubber-like core-shell polymer modified bisphenol F type epoxy resin (as a specific example, product number MX-136 manufactured by Kaneka Corporation), It is preferable to contain at least one component selected from the group consisting of rubber particle-containing bisphenol F type epoxy resin (specifically, product number Kane Ace MX-130 manufactured by Kaneka Corporation).
 エポキシ化合物(D)はリン含有エポキシ樹脂を含有してもよい。この場合、感光性樹脂組成物の硬化物の難燃性が向上する。リン含有エポキシ樹脂は結晶性エポキシ樹脂に含有されてもよいし、或いは非晶性エポキシ樹脂に含有されてもよい。リン含有エポキシ樹脂は、例えば、リン酸変性ビスフェノールF型エポキシ樹脂(具体例としてDIC株式会社製の品番EPICLON EXA-9726、及びEPICLON EXA-9710)、新日鉄住金化学株式会社製の品番エポトートFX-305等である。 The epoxy compound (D) may contain a phosphorus-containing epoxy resin. In this case, the flame retardancy of the cured product of the photosensitive resin composition is improved. The phosphorus-containing epoxy resin may be contained in the crystalline epoxy resin or may be contained in the amorphous epoxy resin. Examples of the phosphorus-containing epoxy resin include phosphoric acid-modified bisphenol F type epoxy resin (specific examples, product numbers EPICLON EXA-9726 and EPICLON EXA-9710 manufactured by DIC Corporation), and product number Epototo FX-305 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. Etc.
 本実施形態に係る感光性樹脂組成物は、有機溶剤を含有してもよい。有機溶剤は、感光性樹脂組成物の液状化又はワニス化、粘度調整、塗布性の調整、造膜性の調整などの目的で使用される。 The photosensitive resin composition according to this embodiment may contain an organic solvent. The organic solvent is used for the purpose of liquefaction or varnishing of the photosensitive resin composition, viscosity adjustment, application property adjustment, film formation property adjustment, and the like.
 有機溶剤は、例えばエタノール、プロピルアルコール、イソプロピルアルコール、ヘキサノール、エチレングリコール等の直鎖、分岐、2級或いは多価のアルコール類;メチルエチルケトン、シクロヘキサノン等のケトン類;トルエン、キシレン等の芳香族炭化水素類;スワゾールシリーズ(丸善石油化学社製)、ソルベッソシリーズ(エクソン・ケミカル社製)等の石油系芳香族系混合溶剤;セロソルブ、ブチルセロソルブ等のセロソルブ類;カルビトール、ブチルカルビトール等のカルビトール類;プロピレングリコールメチルエーテル等のプロピレングリコールアルキルエーテル類;ジプロピレングリコールメチルエーテル等のポリプロピレングリコールアルキルエーテル類;酢酸エチル、酢酸ブチル、セロソルブアセテート、カルビトールアセテート等の酢酸エステル類;並びにジアルキルグリコールエーテル類からなる群から選択される少なくとも一種の化合物を含有できる。 Organic solvents include, for example, linear, branched, secondary or polyhydric alcohols such as ethanol, propyl alcohol, isopropyl alcohol, hexanol and ethylene glycol; ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene and xylene Petroleum aromatic mixed solvents such as Swazol series (manufactured by Maruzen Petrochemical Co., Ltd.) and Solvesso series (manufactured by Exxon Chemical Co.); cellosolves such as cellosolve and butylcellosolve; Tolls; propylene glycol alkyl ethers such as propylene glycol methyl ether; polypropylene glycol alkyl ethers such as dipropylene glycol methyl ether; ethyl acetate, butyl acetate, cellosolve acetate, cal Acetic acid esters such as tall acetate; as well as containing at least one compound selected from the group consisting of dialkyl glycol ethers.
 本実施形態では、感光性樹脂組成物が無機フィラー(K)を含有することが好ましい。この場合、無機フィラー(K)は、感光性樹脂組成物の硬化物よりも、前記酸化剤で腐食され難い傾向にある。すなわち、感光性樹脂組成物の硬化物は、その外表面に前記酸化剤で腐食されやすい箇所と腐食されにくい箇所とを有する。このため、無機フィラー(K)を含有する硬化物の外表面を前記酸化剤で粗化する場合、硬化物の表面を前記酸化剤で適度に腐食させることができる。これによりメッキ処理に適した粗面を硬化物に付与することができ、硬化物と前記メッキ層との密着性を向上させることができる。 In this embodiment, it is preferable that the photosensitive resin composition contains an inorganic filler (K). In this case, the inorganic filler (K) tends to be less corroded by the oxidizing agent than the cured product of the photosensitive resin composition. That is, the cured product of the photosensitive resin composition has a portion that is easily corroded by the oxidizing agent and a portion that is not easily corroded on the outer surface thereof. For this reason, when roughening the outer surface of the hardened | cured material containing an inorganic filler (K) with the said oxidizing agent, the surface of hardened | cured material can be corroded moderately with the said oxidizing agent. Thereby, the rough surface suitable for the plating treatment can be imparted to the cured product, and the adhesion between the cured product and the plating layer can be improved.
 無機フィラー(K)は、例えば硫酸バリウム、結晶性シリカ、ナノシリカ、カーボンナノチューブ、タルク、ベントナイト、ハイドロタルサイト、水酸化アルミニウム、水酸化マグネシウム、及び酸化チタンからなる群から選択される一種以上の材料を含有できる。無機フィラー(K)が酸化チタン、酸化亜鉛等の白色材料を含有する場合、感光性樹脂組成物及びその硬化物を前記白色材料で白色化させることができる。 The inorganic filler (K) is, for example, one or more materials selected from the group consisting of barium sulfate, crystalline silica, nanosilica, carbon nanotubes, talc, bentonite, hydrotalcite, aluminum hydroxide, magnesium hydroxide, and titanium oxide. Can be contained. When the inorganic filler (K) contains a white material such as titanium oxide or zinc oxide, the photosensitive resin composition and its cured product can be whitened with the white material.
 感光性樹脂組成物中の無機フィラー(K)の量は適宜設定されるが、カルボキシル基含有樹脂(A)に対する無機フィラー(K)の量は、1~300質量%の範囲内であることが好ましく、3~200質量%の範囲内であることがさらに好ましく、5~100質量%の範囲内であることがより好ましい。 The amount of the inorganic filler (K) in the photosensitive resin composition is appropriately set, but the amount of the inorganic filler (K) with respect to the carboxyl group-containing resin (A) is in the range of 1 to 300% by mass. Preferably, it is in the range of 3 to 200% by mass, more preferably in the range of 5 to 100% by mass.
 無機フィラー(K)は、シリカ(k)を含むことが好ましい。シリカ(k)は水酸基を有する。この水酸基は前記酸化剤で変性されると考えられる。このため、シリカ(k)の表面にも前記酸化剤で粗面を付与することができる。前記酸化剤で感光性樹脂組成物の硬化物を腐食させる場合、硬化物の表面でシリカ(k)が位置する難腐食箇所であっても、その難腐食箇所を前記酸化剤で適度に腐食させることができる。これにより、よりメッキ処理に適した粗面を硬化物に付与することができ、硬化物と前記メッキ層との密着性をさらに向上させることができる。 The inorganic filler (K) preferably contains silica (k). Silica (k) has a hydroxyl group. This hydroxyl group is considered to be modified with the oxidizing agent. For this reason, a rough surface can be imparted to the surface of silica (k) with the oxidizing agent. When the cured product of the photosensitive resin composition is corroded with the oxidizing agent, even if it is a difficult corrosion site where silica (k) is located on the surface of the cured product, the difficult corrosion site is appropriately corroded with the oxidizing agent. be able to. Thereby, the rough surface more suitable for a plating process can be provided to hardened | cured material, and the adhesiveness of hardened | cured material and the said plating layer can further be improved.
 シリカ(k)は、平均粒子径が1μm以下であることが好ましい。シリカ(k)の平均粒子径が1μm以下となることで、硬化物に形成される粗面の粗さを細かくすることができる。これにより硬化物の表面積が増加することに伴ってアンカー効果が大きくなり粗面と前記メッキ層との密着性を向上させることができる。シリカ(k)の平均粒子径は、その下限は特に限定されないが、例えば、0.001μm以上であることが好ましい。平均粒子径は、レーザ回折式粒度分布測定装置により、D50として測定される。シリカ(k)の平均粒子径は0.1μm以下であることがさらに好ましい。この場合、硬化物に形成される粗面の粗さを特に細かくすることができる。加えて露光時の散乱を感光性樹脂組成物中で抑えることができ、これにより感光性樹脂組成物の解像性をさらに向上させることができる。 Silica (k) preferably has an average particle size of 1 μm or less. When the average particle diameter of silica (k) is 1 μm or less, the roughness of the rough surface formed on the cured product can be reduced. As a result, as the surface area of the cured product increases, the anchor effect increases and the adhesion between the rough surface and the plating layer can be improved. The lower limit of the average particle diameter of silica (k) is not particularly limited, but is preferably 0.001 μm or more, for example. The average particle size by a laser diffraction particle size distribution measuring device, is measured as D 50. The average particle size of silica (k) is more preferably 0.1 μm or less. In this case, the roughness of the rough surface formed in the cured product can be made particularly fine. In addition, scattering during exposure can be suppressed in the photosensitive resin composition, whereby the resolution of the photosensitive resin composition can be further improved.
 無機フィラー(K)は、シリカ(k)のみ、又はシリカ(k)とシリカ(k)以外の無機フィラーとを含有する。無機フィラー(K)は、シリカ(k)を30質量%以上含有することが好ましく、50質量%以上含有することがより好ましく、100質量%含有することが更に好ましい。この場合、硬化物と前記メッキ層との密着性を特に向上させることができる。 The inorganic filler (K) contains only silica (k) or silica (k) and an inorganic filler other than silica (k). The inorganic filler (K) preferably contains 30% by mass or more of silica (k), more preferably 50% by mass or more, and still more preferably 100% by mass. In this case, the adhesion between the cured product and the plating layer can be particularly improved.
 感光性樹脂組成物は、シランカップリング剤を含有することが好ましい。この場合、無機フィラー(K)の分散性を向上させることができる。更に感光性樹脂組成物の解像性も向上させることもできる。 The photosensitive resin composition preferably contains a silane coupling agent. In this case, the dispersibility of the inorganic filler (K) can be improved. Furthermore, the resolution of the photosensitive resin composition can also be improved.
 シランカップリング剤は、ケイ素原子を含有し、且つ-OCH基、-OC基、及び-OCOCH基の群から選択される2~4つの加水分解性基を含有する化合物である。シランカップリング剤は加水分解性基の他に、アミノ基、エポキシ基、ビニル(アリル)基、メタクリル基、メルカプト基、イソシアネート基、スルフィド基等の反応性基、あるいはメチル基を含有してもよい。 The silane coupling agent is a compound containing a silicon atom and 2 to 4 hydrolyzable groups selected from the group of —OCH 3 group, —OC 2 H 5 group, and —OCOCH 3 group. . Silane coupling agents may contain reactive groups such as amino groups, epoxy groups, vinyl (allyl) groups, methacryl groups, mercapto groups, isocyanate groups, sulfide groups, or methyl groups in addition to hydrolyzable groups. Good.
 シランカップリング剤としては、例えば、3-(2-アミノエチルアミノ)プロピルジメトキシメチルシラン、3-(2-アミノエチルアミノ)プロピルトリエトキシシラン、3-(2-アミノエチルアミノ)プロピルトリメトキシシラン、3-アミノプロピルジエトキシメチルシラン、3-アミノプロピルトリエトキシシラン、3-アミノプロピルトリメトキシシラン等のアミノ化合物、3-グリシドキシプロピルトリメトキシシラン、3-グリシドキシプロピルトリエトキシシラン、2-(3,4-エポキシシクロヘキシル)エチルトリメトキシシラン、3-グリシジロキシプロピル(ジメトキシ)メチルシラン、ジエトキシ(3-グリシジロキシプロピル)メチルシラン等のエポキシ類、3-アクリロキシプロピルトリメトキシシラン、3-メタクリロキシプロピルトリメトキシシラン、3-メタクリロキシプロピルトリエトキシシラン、3-メタクリロキシプロピルメチルジメトキシシラン、3-メタクリロキシプロピルメチルジエトキシシラン等の(メタ)アクリレート類、ビニルトリメトキシシラン、ビニルトリエトキシシラン、p-スチリルトリメトキシシラン、ジエトキシメチルビニルシラン、ビニルトリス(2-メトキシエトキシ)シラン等のビニル化合物、アリルトリエトキシシラン、アリルトリメトキシシラン等のアリル化合物、p-スチリルトリメトキシシラン等のスチリル化合物、3-イソシアナトプロピルトリメトキシシラン、3-イソシアナトプロピルトリエトキシシラン等のイソシアネート類、3-ウレイドプロピルトリメトキシシラン、3-ウレイドプロピルトリエトキシシラン等のウレイド類、(3-メルカプトプロピル)トリエトキシシラン、(3-メルカプトプロピル)トリメトキシシラン等のメルカプト化合物類、ビス(トリエトキシシリルプロピル)テトラスルフィド等のスルフィド類、オルトケイ酸テトラエチル、メチルトリメトキシシラン等が挙げられる。 Examples of silane coupling agents include 3- (2-aminoethylamino) propyldimethoxymethylsilane, 3- (2-aminoethylamino) propyltriethoxysilane, and 3- (2-aminoethylamino) propyltrimethoxysilane. Amino compounds such as 3-aminopropyldiethoxymethylsilane, 3-aminopropyltriethoxysilane, 3-aminopropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropyltriethoxysilane, Epoxys such as 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-glycidyloxypropyl (dimethoxy) methylsilane, diethoxy (3-glycidyloxypropyl) methylsilane, 3-acryloxypropyltrimethoxysila (Meth) acrylates such as 3-methacryloxypropyltrimethoxysilane, 3-methacryloxypropyltriethoxysilane, 3-methacryloxypropylmethyldimethoxysilane, 3-methacryloxypropylmethyldiethoxysilane, vinyltrimethoxysilane, Vinyl compounds such as vinyltriethoxysilane, p-styryltrimethoxysilane, diethoxymethylvinylsilane, vinyltris (2-methoxyethoxy) silane, allyl compounds such as allyltriethoxysilane, allyltrimethoxysilane, p-styryltrimethoxysilane Styryl compounds such as 3-isocyanatopropyltrimethoxysilane, isocyanates such as 3-isocyanatopropyltriethoxysilane, 3-ureidopropyltrimethoxysilane, 3- Ureides such as raidpropyltriethoxysilane, mercapto compounds such as (3-mercaptopropyl) triethoxysilane, (3-mercaptopropyl) trimethoxysilane, sulfides such as bis (triethoxysilylpropyl) tetrasulfide, orthosilicate Examples include tetraethyl acid and methyltrimethoxysilane.
 本実施形態では、前記酸化剤はデスミア液として入手可能な酸化剤であってもよい。このような酸化剤は、例えば過マンガン酸ナトリウムや過マンガン酸カリウムの群から選択される少なくとも1種の過マンガン酸塩を含有することができる。 In this embodiment, the oxidizing agent may be an oxidizing agent available as a desmear liquid. Such an oxidizing agent can contain, for example, at least one permanganate selected from the group of sodium permanganate and potassium permanganate.
 感光性樹脂組成物中の成分の量は、感光性樹脂組成物が光硬化性を有しアルカリ性溶液で現像可能であるように、適宜調整される。 The amount of the component in the photosensitive resin composition is appropriately adjusted so that the photosensitive resin composition has photocurability and can be developed with an alkaline solution.
 感光性樹脂組成物の固形分量に対するカルボキシル基含有樹脂(A)の量は、5~85質量%の範囲内であれば好ましく、10~75質量%の範囲内であればより好ましく、30~60質量%の範囲内であれば更に好ましい。 The amount of the carboxyl group-containing resin (A) relative to the solid content of the photosensitive resin composition is preferably within the range of 5 to 85% by mass, more preferably within the range of 10 to 75% by mass, and 30 to 60%. If it is in the range of mass%, it is still more preferable.
 カルボキシル基含有樹脂(A)に対する不飽和化合物(B)の量は、1~50質量%の範囲内であれば好ましく、10~45質量%の範囲内であればより好ましく、21~40質量%の範囲内であれば更に好ましい。 The amount of the unsaturated compound (B) relative to the carboxyl group-containing resin (A) is preferably in the range of 1 to 50% by mass, more preferably in the range of 10 to 45% by mass, and 21 to 40% by mass. If it is in the range, it is more preferable.
 カルボキシル基含有樹脂(A)に対する光重合開始剤(C)の量は、0.1~30質量%の範囲内であることが好ましく、1~25質量%の範囲内であれば更に好ましい。 The amount of the photopolymerization initiator (C) relative to the carboxyl group-containing resin (A) is preferably in the range of 0.1 to 30% by mass, and more preferably in the range of 1 to 25% by mass.
 エポキシ化合物(D)の量に関しては、エポキシ化合物(D)に含まれるエポキシ基の当量の合計が、カルボキシル基含有樹脂(A)に含まれるカルボキシル基1当量に対して0.7~2.5の範囲内であることが好ましく、0.7~2.3の範囲内であることがより好ましく、0.7~2.0の範囲内であれば更に好ましい。また、結晶性エポキシ樹脂に含まれるエポキシ基の当量の合計が、カルボキシル基含有樹脂(A)に含まれるカルボキシル基1当量に対して0.1~2.0の範囲内であることが好ましく、0.2~1.9の範囲内であればより好ましく、0.3~1.5の範囲内であれば更に好ましい。 Regarding the amount of the epoxy compound (D), the total of the equivalents of epoxy groups contained in the epoxy compound (D) is 0.7 to 2.5 with respect to 1 equivalent of carboxyl groups contained in the carboxyl group-containing resin (A). Is preferably in the range of 0.7 to 2.3, more preferably in the range of 0.7 to 2.0. Further, the total of the equivalents of the epoxy groups contained in the crystalline epoxy resin is preferably in the range of 0.1 to 2.0 with respect to 1 equivalent of the carboxyl groups contained in the carboxyl group-containing resin (A), A range of 0.2 to 1.9 is more preferable, and a range of 0.3 to 1.5 is more preferable.
 カルボキシル基含有樹脂(A)に対する成分(E)の量は、0.1~10質量%の範囲内であることが好ましく、0.5~5質量%の範囲内であれば更に好ましい。 The amount of the component (E) relative to the carboxyl group-containing resin (A) is preferably in the range of 0.1 to 10% by mass, more preferably in the range of 0.5 to 5% by mass.
 感光性樹脂組成物が有機溶剤を含有する場合、有機溶剤の量は、感光性樹脂組成物から形成される塗膜を乾燥させる際に速やかに有機溶剤が揮散して無くなるように、すなわち有機溶剤が乾燥膜に残存しないように、調整されることが好ましい。特に、感光性樹脂組成物全体に対する有機溶剤の量は、0~99.5質量%の範囲内であることが好ましく、15~60質量%の範囲内であれば更に好ましい。なお、有機溶剤の好適な割合は、塗布方法などにより異なるので、塗布方法に応じて割合が適宜調節されることが好ましい。 When the photosensitive resin composition contains an organic solvent, the amount of the organic solvent is such that when the coating film formed from the photosensitive resin composition is dried, the organic solvent is quickly volatilized and eliminated, that is, the organic solvent. Is preferably adjusted so as not to remain in the dry film. In particular, the amount of the organic solvent relative to the entire photosensitive resin composition is preferably in the range of 0 to 99.5% by mass, and more preferably in the range of 15 to 60% by mass. In addition, since the suitable ratio of an organic solvent changes with application methods etc., it is preferable that a ratio is suitably adjusted according to the application method.
 なお、固形分量とは、感光性樹脂組成物から溶剤などの揮発性成分を除いた、全成分の合計量のことである。 In addition, solid content is a total amount of all the components remove | excluding volatile components, such as a solvent, from the photosensitive resin composition.
 本実施形態の効果を阻害しない限りにおいて、感光性樹脂組成物は、上記成分以外の成分を更に含有してもよい。 As long as the effects of the present embodiment are not impaired, the photosensitive resin composition may further contain components other than the above components.
 感光性樹脂組成物は、カプロラクタム、オキシム、マロン酸エステル等でブロックされたトリレンジイソシアネート系、モルホリンジイソシアネート系、イソホロンジイソシアネート系及びヘキサメチレンジイソシアネート系のブロックドイソシアネート;メラミン樹脂、n-ブチル化メラミン樹脂、イソブチル化メラミン樹脂、ブチル化尿素樹脂、ブチル化メラミン尿素共縮合樹脂、ベンゾグアナミン系共縮合樹脂等のアミノ樹脂;前記以外の各種熱硬化性樹脂;紫外線硬化性エポキシ(メタ)アクリレート;ビスフェノールA型、フェノールノボラック型、クレゾールノボラック型、脂環型等のエポキシ樹脂に(メタ)アクリル酸を付加して得られる樹脂;並びにジアリルフタレート樹脂、フェノキシ樹脂、ウレタン樹脂、フッ素樹脂等の高分子化合物からなる群から選択される少なくとも一種の樹脂を含有してもよい。 Photosensitive resin composition comprising tolylene diisocyanate, morpholine diisocyanate, isophorone diisocyanate and hexamethylene diisocyanate blocked isocyanates blocked with caprolactam, oxime, malonic acid ester, etc .; melamine resin, n-butylated melamine resin , Amino resins such as isobutylated melamine resin, butylated urea resin, butylated melamine urea cocondensation resin, benzoguanamine cocondensation resin; various other thermosetting resins; ultraviolet curable epoxy (meth) acrylate; bisphenol A type , Phenol novolak type, cresol novolak type, alicyclic type and other epoxy resins obtained by adding (meth) acrylic acid; and diallyl phthalate resin, phenoxy resin, urethane resin, fluorine resin At least one resin selected from the group consisting of polymer compounds may be contained.
 感光性樹脂組成物は、エポキシ化合物(D)を硬化させるための硬化剤を含有してもよい。硬化剤は、例えば、イミダゾール、2-メチルイミダゾール、2-エチルイミダゾール、2-エチル-4-メチルイミダゾール、2-フェニルイミダゾール、4-フェニルイミダゾール、1-シアノエチル-2-フェニルイミダゾール、1-(2-シアノエチル)-2-エチル-4-メチルイミダゾール等のイミダゾール誘導体;ジシアンジアミド、ベンジルジメチルアミン、4-(ジメチルアミノ)-N,N-ジメチルベンジルアミン、4-メトキシ-N,N-ジメチルベンジルアミン、4-メチル-N,N-ジメチルベンジルアミン等のアミン化合物;アジピン酸ヒドラジド、セバシン酸ヒドラジド等のヒドラジン化合物;トリフェニルフォスフィン等のリン化合物;酸無水物;フェノール;メルカプタン;ルイス酸アミン錯体;及びオニウム塩からなる群から選択される少なくとも一種の成分を含有できる。これらの成分の市販品は、例えば、四国化成株式会社製の2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(いずれもイミダゾール系化合物の商品名)、サンアプロ株式会社製のU-CAT3503N、U-CAT3502T(いずれもジメチルアミンのブロックイソシアネート化合物の商品名)、DBU、DBN、U-CATSA102、U-CAT5002(いずれも二環式アミジン化合物及びその塩)である。 The photosensitive resin composition may contain a curing agent for curing the epoxy compound (D). Examples of the curing agent include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole, 1- (2 Imidazole derivatives such as -cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, Amine compounds such as 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic hydrazide and sebacic acid hydrazide; phosphorus compounds such as triphenylphosphine; acid anhydrides; phenols; mercaptans; And It can contain at least one component selected from the group consisting um salt. Commercially available products of these components include, for example, 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (both trade names of imidazole compounds) manufactured by Shikoku Kasei Co., Ltd., U-CAT3503N, U -CAT3502T (all are trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and salts thereof).
 感光性樹脂組成物は、硬化促進剤;着色剤;シリコーン、アクリレート等の共重合体;レベリング剤;シランカップリング剤等の密着性付与剤;チクソトロピー剤;重合禁止剤;ハレーション防止剤;難燃剤;消泡剤;酸化防止剤;界面活性剤;並びに高分子分散剤からなる群から選択される少なくとも一種の成分を含有してもよい。 Photosensitive resin composition includes curing accelerator; colorant; copolymer such as silicone and acrylate; leveling agent; adhesion imparting agent such as silane coupling agent; thixotropic agent; polymerization inhibitor; antihalation agent; An antifoaming agent; an antioxidant; a surfactant; and at least one component selected from the group consisting of polymer dispersants.
 感光性樹脂組成物中のアミン化合物の含有量はできるだけ少ないことが好ましい。このようにすれば、感光性樹脂組成物の硬化物からなる層の電気絶縁性が損なわれにくい。特にカルボキシル基含有樹脂(A)に対するアミン化合物の量は6質量%以下であることが好ましく、4質量%以下であれば更に好ましい。 The content of the amine compound in the photosensitive resin composition is preferably as small as possible. If it does in this way, the electrical insulation of the layer which consists of hardened | cured material of the photosensitive resin composition will not be impaired easily. In particular, the amount of the amine compound relative to the carboxyl group-containing resin (A) is preferably 6% by mass or less, and more preferably 4% by mass or less.
 上記のような感光性樹脂組成物の原料が配合され、例えば三本ロール、ボールミル、サンドミル等を用いる公知の混練方法によって混練されることにより、感光性樹脂組成物が調製され得る。感光性樹脂組成物の原料に液状の成分、粘度の低い成分等が含まれる場合には、原料のうち液状の成分、粘度の低い成分等を除く部分をまず混練し、得られた混合物に、液状の成分、粘度の低い成分等を加えて混合することで、感光性樹脂組成物を調製してもよい。 The photosensitive resin composition can be prepared by blending the raw materials of the photosensitive resin composition as described above and kneading by a known kneading method using, for example, a three-roll, ball mill, sand mill or the like. In the case where the raw material of the photosensitive resin composition contains a liquid component, a low viscosity component, etc., the part of the raw material excluding the liquid component, the low viscosity component, etc. is first kneaded, and the resulting mixture is The photosensitive resin composition may be prepared by adding and mixing a liquid component, a component having a low viscosity, and the like.
 保存安定性等を考慮して、感光性樹脂組成物の成分の一部を混合することで第一剤を調製し、成分の残部を混合することで第二剤を調製してもよい。すなわち、感光性樹脂組成物は、第一剤と第二剤とを備えてもよい。この場合、例えば、感光性樹脂組成物の成分のうち、不飽和化合物(B)、有機溶剤の一部、及び熱硬化性成分を予め混合して分散させることで第一剤を調製し、感光性樹脂組成物の成分のうち、残部を混合して分散させることで第二剤を調製してもよい。この場合、適時必要量の第一剤と第二剤とを混合して混合液を調製し、この混合液を硬化させて硬化物を得ることができる。 In consideration of storage stability and the like, the first agent may be prepared by mixing a part of the components of the photosensitive resin composition, and the second agent may be prepared by mixing the rest of the components. That is, the photosensitive resin composition may include a first agent and a second agent. In this case, for example, among the components of the photosensitive resin composition, the unsaturated compound (B), a part of the organic solvent, and the thermosetting component are mixed in advance and dispersed to prepare the first agent. The second agent may be prepared by mixing and dispersing the remainder of the components of the conductive resin composition. In this case, it is possible to prepare a mixed solution by mixing the necessary amount of the first agent and the second agent in a timely manner and curing the mixed solution to obtain a cured product.
 本実施形態に係る感光性樹脂組成物は、プリント配線板用の電気絶縁性材料に適している。特に感光性樹脂組成物は、ソルダーレジスト層、メッキレジスト層、エッチングレジスト層、層間絶縁層等の、電気絶縁性の層の材料に適している。 The photosensitive resin composition according to this embodiment is suitable for an electrically insulating material for a printed wiring board. In particular, the photosensitive resin composition is suitable for materials for electrically insulating layers such as a solder resist layer, a plating resist layer, an etching resist layer, and an interlayer insulating layer.
 本実施形態に係る感光性樹脂組成物は、厚み25μmの皮膜であっても炭酸ナトリウム水溶液で現像可能であるような性質を有することが好ましい。この場合、十分に厚い電気絶縁性の層を感光性樹脂組成物からフォトリソグラフィー法で作製することが可能であるため、感光性樹脂組成物を、プリント配線板における層間絶縁層、ソルダーレジスト層等を作製するために広く適用可能である。勿論、感光性樹脂組成物から厚み25μmより薄い電気絶縁性の層を作製することも可能である。 The photosensitive resin composition according to the present embodiment preferably has such a property that even a 25 μm thick film can be developed with an aqueous sodium carbonate solution. In this case, since it is possible to produce a sufficiently thick electrically insulating layer from the photosensitive resin composition by a photolithography method, the photosensitive resin composition is used as an interlayer insulating layer, a solder resist layer, etc. in a printed wiring board. It can be widely applied to fabricate. Of course, it is also possible to produce an electrically insulating layer having a thickness of less than 25 μm from the photosensitive resin composition.
 厚み25μmの皮膜が炭酸ナトリウム水溶液で現像可能であるかどうかは、次の方法で確認できる。適当な基材上に感光性樹脂組成物を塗布することで湿潤塗膜を形成し、この湿潤塗膜を80℃で30分加熱することで、厚み25μmの皮膜を形成する。この皮膜に紫外線を透過する露光部と紫外線を遮蔽する非露光部とを有するネガマスクを直接当てた状態で、皮膜に500mJ/cm2の条件で紫外線を照射して露光を行う。露光後に、皮膜に30℃の1%Na2CO3水溶液を0.2MPaの噴射圧で90秒間噴射してから、純水を0.2MPaの噴射圧で90秒間噴射する処理を行う。この処理後に皮膜を観察した結果、皮膜における非露光部に対応する部分が除去されて残渣が認められない場合に、厚み25μmの皮膜が炭酸ナトリウム水溶液で現像可能であると判断できる。 Whether or not a 25 μm thick film can be developed with an aqueous sodium carbonate solution can be confirmed by the following method. A wet paint film is formed by applying the photosensitive resin composition on a suitable substrate, and this wet paint film is heated at 80 ° C. for 30 minutes to form a film having a thickness of 25 μm. The film is exposed by irradiating the film with ultraviolet rays under a condition of 500 mJ / cm 2 with a negative mask having an exposed part that transmits ultraviolet rays and a non-exposed part that blocks ultraviolet rays directly applied. After the exposure, a 1% Na 2 CO 3 aqueous solution at 30 ° C. is jetted for 90 seconds at a jetting pressure of 0.2 MPa, and then pure water is jetted for 90 seconds at a jetting pressure of 0.2 MPa. As a result of observing the film after this treatment, it can be determined that the film having a thickness of 25 μm can be developed with an aqueous sodium carbonate solution when a portion corresponding to the non-exposed portion of the film is removed and no residue is observed.
 以下に、本実施形態による感光性樹脂組成物から形成された層間絶縁層を備えるプリント配線板を製造する方法の一例を、図1Aから図1Eを参照して説明する。本方法では、層間絶縁層にフォトリソグラフィー法でスルーホールを形成する。 Hereinafter, an example of a method for producing a printed wiring board including an interlayer insulating layer formed from the photosensitive resin composition according to the present embodiment will be described with reference to FIGS. 1A to 1E. In this method, a through hole is formed in the interlayer insulating layer by photolithography.
 まず、図1Aに示すようにコア材1を用意する。コア材1は、例えば少なくとも一つの絶縁層2と少なくとも一つの導体配線3とを備える。コア材1の一面上に設けられている導体配線3を、以下、第一の導体配線3という。図1Bに示すように、コア材1の一面上に、感光性樹脂組成物から皮膜4を形成する。皮膜4の形成方法は、例えば、塗布法とドライフィルム法とがある。 First, a core material 1 is prepared as shown in FIG. 1A. The core material 1 includes, for example, at least one insulating layer 2 and at least one conductor wiring 3. The conductor wiring 3 provided on one surface of the core material 1 is hereinafter referred to as a first conductor wiring 3. As shown in FIG. 1B, a film 4 is formed on one surface of the core material 1 from a photosensitive resin composition. Examples of the method for forming the film 4 include a coating method and a dry film method.
 塗布法では、例えばコア材1上に感光性樹脂組成物を塗布して湿潤塗膜を形成する。感光性樹脂組成物の塗布方法は、公知の方法、例えば浸漬法、スプレー法、スピンコート法、ロールコート法、カーテンコート法、及びスクリーン印刷法からなる群から選択される。続いて、感光性樹脂組成物中の有機溶剤を揮発させるために、例えば60~120℃の範囲内の温度下で湿潤塗膜を乾燥させ、これによって、皮膜4を得ることができる。 In the coating method, for example, a photosensitive resin composition is applied on the core material 1 to form a wet paint film. The method for applying the photosensitive resin composition is selected from the group consisting of known methods such as dipping, spraying, spin coating, roll coating, curtain coating, and screen printing. Subsequently, in order to volatilize the organic solvent in the photosensitive resin composition, the wet coating film is dried at a temperature in the range of 60 to 120 ° C., for example, whereby the coating film 4 can be obtained.
 ドライフィルム法では、まずポリエステルなどでできた適宜の支持体上に感光性樹脂組成物を塗布してから乾燥することで、支持体上に感光性樹脂組成物の乾燥物であるドライフィルムを形成する。これにより、ドライフィルムと、ドライフィルムを支持する支持体とを備える積層体が得られる。この積層体におけるドライフィルムをコア材1に重ねてから、ドライフィルムとコア材1に圧力をかけ、続いて支持体をドライフィルムから剥離することで、ドライフィルムを支持体上からコア材1上へ転写する。これにより、コア材1上に、ドライフィルムからなる皮膜4が設けられる。 In the dry film method, a photosensitive resin composition is first applied on an appropriate support made of polyester or the like and then dried to form a dry film that is a dried product of the photosensitive resin composition on the support. To do. Thereby, a laminated body provided with a dry film and the support body which supports a dry film is obtained. After the dry film in this laminate is overlaid on the core material 1, pressure is applied to the dry film and the core material 1, and then the support is peeled from the dry film, so that the dry film is placed on the core material 1 from the support. Transfer to Thereby, the coating 4 made of a dry film is provided on the core material 1.
 皮膜4を露光することで図1Cに示すように皮膜4を部分的に硬化させる。そのために、例えばネガマスクを皮膜4に当ててから、皮膜4に紫外線を照射する。ネガマスクは、紫外線を透過させる露光部と紫外線を遮蔽する非露光部とを備え、非露光部はスルーホール10の位置と合致する位置に設けられる。ネガマスクは、例えばマスクフィルム、乾板等のフォトツールである。紫外線の光源は、例えばケミカルランプ、低圧水銀灯、中圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノンランプ及びメタルハライドランプからなる群から選択される。 The coating 4 is partially cured by exposing the coating 4 as shown in FIG. 1C. For this purpose, for example, a negative mask is applied to the film 4 and then the film 4 is irradiated with ultraviolet rays. The negative mask includes an exposure part that transmits ultraviolet light and a non-exposure part that blocks ultraviolet light, and the non-exposure part is provided at a position that matches the position of the through hole 10. The negative mask is a photo tool such as a mask film or a dry plate. The ultraviolet light source is selected from the group consisting of chemical lamps, low-pressure mercury lamps, medium-pressure mercury lamps, high-pressure mercury lamps, ultra-high-pressure mercury lamps, xenon lamps, and metal halide lamps, for example.
 なお、露光方法は、ネガマスクを用いる方法以外の方法であってもよい。例えば光源から発せられる紫外線を皮膜4の露光すべき部分のみに照射する直接描画法で皮膜4を露光してもよい。直接描画法に適用される光源は、例えば高圧水銀灯、超高圧水銀灯、メタルハライドランプ、g線(436nm)、h線(405nm)、i線(365nm)、並びにg線、h線及びi線のうちの二種以上の組み合わせからなる群から選択される。 The exposure method may be a method other than a method using a negative mask. For example, the film 4 may be exposed by a direct drawing method in which only the portion of the film 4 to be exposed is irradiated with ultraviolet rays emitted from a light source. The light source applied to the direct drawing method is, for example, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a metal halide lamp, g-line (436 nm), h-line (405 nm), i-line (365 nm), and g-line, h-line, and i-line. It is selected from the group consisting of two or more kinds of combinations.
 また、ドライフィルム法では、積層体におけるドライフィルムをコア材1に重ねてから、支持体を剥離することなく、支持体を通して紫外線をドライフィルムからなる皮膜4に照射することで皮膜4を露光し、続いて現像処理前に皮膜4から支持体を剥離してもよい。 In the dry film method, the film 4 is exposed by irradiating the film 4 made of the dry film with ultraviolet rays through the support without peeling the support after the dry film in the laminate is stacked on the core material 1. Subsequently, the support may be peeled off from the film 4 before development processing.
 続いて、皮膜4に現像処理を施すことで、図1Cに示す皮膜4の露光されていない部分5を除去し、これにより、図1Dに示すようにスルーホール10が形成される位置に穴6を設ける。現像処理では、感光性樹脂組成物の組成に応じた適宜の現像液を使用できる。現像液は、例えばアルカリ金属塩及びアルカリ金属水酸化物のうち少なくとも一方を含有するアルカリ性水溶液、又は有機アミンである。アルカリ性水溶液は、より具体的には例えば炭酸ナトリウム、炭酸カリウム、炭酸アンモニウム、炭酸水素ナトリウム、炭酸水素カリウム、炭酸水素アンモニウム、水酸化ナトリウム、水酸化カリウム、水酸化アンモニウム、水酸化テトラメチルアンモニウム及び水酸化リチウムからなる群から選択される少なくとも一種の成分を含有する。アルカリ性水溶液中の溶媒は、水のみであっても、水と低級アルコール類等の親水性有機溶媒との混合物であってもよい。有機アミンは、例えばモノエタノールアミン、ジエタノールアミン、トリエタノールアミン、モノイソプロパノールアミン、ジイソプロパノールアミン及びトリイソプロパノールアミンからなる群から選択される少なくとも一種の成分を含有する。 Subsequently, the coating 4 is developed to remove the unexposed portion 5 of the coating 4 shown in FIG. 1C, whereby the hole 6 is formed at the position where the through hole 10 is formed as shown in FIG. 1D. Is provided. In the development process, an appropriate developer according to the composition of the photosensitive resin composition can be used. The developer is, for example, an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, or an organic amine. More specifically, the alkaline aqueous solution is, for example, sodium carbonate, potassium carbonate, ammonium carbonate, sodium hydrogen carbonate, potassium hydrogen carbonate, ammonium hydrogen carbonate, sodium hydroxide, potassium hydroxide, ammonium hydroxide, tetramethyl ammonium hydroxide and water. It contains at least one component selected from the group consisting of lithium oxide. The solvent in the alkaline aqueous solution may be water alone or a mixture of water and a hydrophilic organic solvent such as lower alcohols. The organic amine contains, for example, at least one component selected from the group consisting of monoethanolamine, diethanolamine, triethanolamine, monoisopropanolamine, diisopropanolamine and triisopropanolamine.
 現像液は、アルカリ金属塩及びアルカリ金属水酸化物のうち少なくとも一方を含有するアルカリ性水溶液であることが好ましく、炭酸ナトリウム水溶液であることが特に好ましい。この場合、作業環境の向上及び廃棄物処理の負担軽減を達成できる。 The developer is preferably an alkaline aqueous solution containing at least one of an alkali metal salt and an alkali metal hydroxide, and particularly preferably an aqueous sodium carbonate solution. In this case, it is possible to improve the work environment and reduce the burden of waste disposal.
 続いて、皮膜4を加熱することで硬化させる。加熱の条件は、例えば加熱温度120~200℃の範囲内、加熱時間30~120分間の範囲内である。このようにして皮膜4を熱硬化させると、層間絶縁層7の強度、硬度、耐薬品性等の性能が向上する。 Subsequently, the coating 4 is cured by heating. The heating conditions are, for example, a heating temperature range of 120 to 200 ° C. and a heating time range of 30 to 120 minutes. When the film 4 is thermally cured in this manner, the performance of the interlayer insulating layer 7 such as strength, hardness, and chemical resistance is improved.
 必要により、加熱前と加熱後のうちの一方又は両方で、皮膜4に更に紫外線を照射してもよい。この場合、皮膜4の光硬化を更に進行させることができる。 If necessary, the coating film 4 may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film 4 can be further advanced.
 以上により、コア材1上に、感光性樹脂組成物の硬化物からなる層間絶縁層7が設けられる。この層間絶縁層7上に、アディティブ法などの公知の方法で、第二の導体配線8及びホールめっき9を設けることができる。これにより、図1Eに示すように、第一の導体配線3、第二の導体配線8、第一の導体配線3と第二の導体配線8との間に介在する層間絶縁層7、並びに第一の導体配線3と第二の導体配線8とを電気的に接続するスルーホール10を備えるプリント配線板11が得られる。なお、図1Eにおいて、ホールめっき9は穴6の内面を覆う筒状の形状を有するが、穴6の内側全体にホールめっき9が充填されていてもよい。 Thus, the interlayer insulating layer 7 made of a cured product of the photosensitive resin composition is provided on the core material 1. The second conductor wiring 8 and the hole plating 9 can be provided on the interlayer insulating layer 7 by a known method such as an additive method. As a result, as shown in FIG. 1E, the first conductor wiring 3, the second conductor wiring 8, the interlayer insulating layer 7 interposed between the first conductor wiring 3 and the second conductor wiring 8, and the first conductor wiring A printed wiring board 11 having a through hole 10 for electrically connecting the first conductor wiring 3 and the second conductor wiring 8 is obtained. In FIG. 1E, the hole plating 9 has a cylindrical shape that covers the inner surface of the hole 6, but the entire inner side of the hole 6 may be filled with the hole plating 9.
 また、図1Eのようなホールめっき9を設ける前に、穴6の内側面全体と層間絶縁層7の外表面の一部とを粗化することができる。このようにして、層間絶縁層7の外表面の一部と、穴6の内側面とを粗化することでコア材1とホールめっき9との密着性を向上することができる。 Further, before the hole plating 9 as shown in FIG. 1E is provided, the entire inner surface of the hole 6 and a part of the outer surface of the interlayer insulating layer 7 can be roughened. In this manner, the adhesion between the core material 1 and the hole plating 9 can be improved by roughening a part of the outer surface of the interlayer insulating layer 7 and the inner side surface of the hole 6.
 層間絶縁層7の外表面の一部と穴6の内側面全体とを粗化するにあたって、市販のデスミア用膨潤液とデスミア液を用いた一般的なデスミア処理と同じ手順で行うことができる。しかし、これに限らず、プラズマ処理、UV処理やオゾン処理等の硬化物に粗面を付与する手法を適宜採用することができる。 In roughening a part of the outer surface of the interlayer insulating layer 7 and the entire inner surface of the hole 6, the same procedure as a general desmear process using a commercially available swelling liquid for desmear and desmear liquid can be performed. However, the present invention is not limited to this, and a method of imparting a rough surface to a cured product such as plasma treatment, UV treatment, or ozone treatment can be appropriately employed.
 ホールめっき9を設けるにあたって、粗化された外表面の一部と、穴6の内側面とに無電解金属メッキ処理を施して初期配線を形成することができる。その後電解金属メッキ処理で初期配線に電解質メッキ液中の金属を析出させることでホールめっき9を形成することができる。 When the hole plating 9 is provided, an initial wiring can be formed by subjecting a part of the roughened outer surface and the inner side surface of the hole 6 to electroless metal plating. Thereafter, the hole plating 9 can be formed by depositing a metal in the electrolyte plating solution on the initial wiring by electrolytic metal plating.
 本実施形態による感光性樹脂組成物から形成されたソルダーレジスト層を備えるプリント配線板を製造する方法の一例を説明する。 An example of a method for producing a printed wiring board provided with a solder resist layer formed from the photosensitive resin composition according to the present embodiment will be described.
 まず、コア材を用意する。コア材は、例えば少なくとも一つの絶縁層と少なくとも一つの導体配線とを備える。コア材の導体配線が設けられている面上に、感光性樹脂組成物から皮膜を形成する。皮膜の形成方法として、塗布法とドライフィルム法が挙げられる。塗布法とドライフィルム法としては、上記の層間絶縁層を形成する場合と同じ方法を採用できる。皮膜を露光することで部分的に硬化させる。露光方法も、上記の層間絶縁層を形成する場合と同じ方法を採用できる。続いて、皮膜に現像処理を施すことで、皮膜の露光されていない部分を除去し、これにより、コア材上に、皮膜の露光された部分が残存する。続いて、コア材上の皮膜を加熱することで熱硬化させる。現像方法及び加熱方法も、上記の層間絶縁層を形成する場合と同じ方法を採用できる。必要により、加熱前と加熱後のうちの一方又は両方で、皮膜に更に紫外線を照射してもよい。この場合、皮膜の光硬化を更に進行させることができる。 First, prepare the core material. The core material includes, for example, at least one insulating layer and at least one conductor wiring. A film is formed from the photosensitive resin composition on the surface of the core material where the conductor wiring is provided. Examples of the method for forming the film include a coating method and a dry film method. As the coating method and the dry film method, the same method as that for forming the interlayer insulating layer can be employed. The film is partially cured by exposure. The exposure method can be the same as the method for forming the interlayer insulating layer. Subsequently, the film is subjected to a development process to remove the unexposed part of the film, whereby the exposed part of the film remains on the core material. Subsequently, the coating on the core material is heated and cured. The developing method and the heating method can be the same as the method for forming the interlayer insulating layer. If necessary, the film may be further irradiated with ultraviolet rays before or after heating. In this case, photocuring of the film can be further advanced.
 以上により、コア材上に、感光性樹脂組成物の硬化物からなるソルダーレレジスト層が設けられる。これにより、絶縁層とその上の導体配線とを備えるコア材、並びにコア材における導体配線が設けられている面を部分的に覆うソルダーレジスト層を備える、プリント配線板が得られる。 As described above, a solderless resist layer made of a cured product of the photosensitive resin composition is provided on the core material. Thereby, a printed wiring board provided with the core material provided with an insulating layer and the conductor wiring on it, and the soldering resist layer which partially covers the surface in which the conductor wiring in a core material is provided is obtained.
 以下、本発明を実施例によって具体的に説明する。 Hereinafter, the present invention will be specifically described by way of examples.
 (1)合成例A-1~合成例A-7、並びに合成例B-1及び合成例B-3~合成例B-4
 還流冷却器、温度計、空気吹き込み管及び攪拌機を取付けた四つ口フラスコ内に、表1及び2中の「第一反応」欄に示す原料成分を加えて、これらをエアバブリング下で攪拌することで混合物を調製した。この混合物を四つ口フラスコ内でエアバブリング下で攪拌しながら、「第一反応」欄の「反応条件」欄に示す反応温度及び反応時間で加熱した。これにより、中間体の溶液を調製した。
(1) Synthesis Example A-1 to Synthesis Example A-7, Synthesis Example B-1 and Synthesis Example B-3 to Synthesis Example B-4
Into a four-necked flask equipped with a reflux condenser, a thermometer, an air blowing tube and a stirrer, the raw material components shown in the “First Reaction” column in Tables 1 and 2 are added, and these are stirred under air bubbling. To prepare a mixture. The mixture was heated at the reaction temperature and reaction time shown in the “Reaction Conditions” column of the “First Reaction” column while stirring under air bubbling in a four-necked flask. This prepared an intermediate solution.
 続いて、四つ口フラスコ内の中間体の溶液に表1及び2の「第二反応」欄に示す原料成分を投入し、エアバブリング下で四つ口フラスコ内の溶液を攪拌しながら「第二反応」欄の「反応条件(1)」欄に示す反応温度及び反応時間で加熱した。続いて、合成例B-1、B-3及び合成例B-4を除き、エアバブリング下で四つ口フラスコ内の溶液を攪拌しながら「第二反応」欄の「反応条件(2)」欄に示す反応温度及び反応時間で加熱した。これにより、カルボキシル基含有樹脂の65質量%溶液を得た。カルボキシル基含有樹脂の重量平均分子量、及び酸価は表1及び2中に示す通りである。成分間のモル比も表1及び2に示している。 Subsequently, the raw material components shown in the “second reaction” column of Tables 1 and 2 were added to the intermediate solution in the four-necked flask, and the “first reaction” was performed while stirring the solution in the four-necked flask under air bubbling. It heated at the reaction temperature and reaction time which are shown in the "reaction condition (1)" column of the "two reactions" column. Subsequently, except for Synthesis Examples B-1, B-3 and Synthesis Example B-4, “Reaction Conditions (2)” in the “Second Reaction” column while stirring the solution in the four-necked flask under air bubbling. Heated at the reaction temperature and reaction time indicated in the column. This obtained a 65 mass% solution of carboxyl group-containing resin. The weight average molecular weight and acid value of the carboxyl group-containing resin are as shown in Tables 1 and 2. The molar ratio between the components is also shown in Tables 1 and 2.
 なお、表1及び2中の(a1)欄に示す成分の詳細は次の通りである。
・エポキシ化合物1:式(7)で示され、式(7)中のR1~R8がすべて水素であるエポキシ当量250g/eqのビスフェノールフルオレン型エポキシ化合物。
・エポキシ化合物2:式(7)で示され、式(7)中のR及びRがいずれもメチル基、R~R及びR~Rがいずれも水素であるエポキシ当量279g/eqのビスフェノールフルオレン型エポキシ化合物。
In addition, the detail of the component shown in the (a1) column of Table 1 and 2 is as follows.
Epoxy compound 1: a bisphenolfluorene type epoxy compound represented by the formula (7) and having an epoxy equivalent of 250 g / eq, wherein R 1 to R 8 in the formula (7) are all hydrogen.
Epoxy compound 2: epoxy equivalent 279 g represented by the formula (7), wherein R 1 and R 5 in the formula (7) are all methyl groups, and R 2 to R 4 and R 6 to R 8 are all hydrogen / Eq bisphenolfluorene type epoxy compound.
 また、表1及び2中の(g1)欄に示す成分の詳細は次の通りである。
・エポキシ化合物A:ビフェニルノボラック型エポキシ樹脂(日本化薬株式会社製の品名NC-3000-H、エポキシ当量288g/eq)。
・エポキシ化合物B:クレゾールノボラック型エポキシ樹脂(新日鉄住金化学株式会社製の品名YDC-700-5、エポキシ当量203g/eq)。
Moreover, the detail of the component shown in the (g1) column of Table 1 and 2 is as follows.
Epoxy compound A: biphenyl novolac type epoxy resin (product name NC-3000-H manufactured by Nippon Kayaku Co., Ltd., epoxy equivalent 288 g / eq).
Epoxy compound B: Cresol novolac type epoxy resin (product name YDC-700-5, manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., epoxy equivalent 203 g / eq).
 また、表1及び2中の(a2)欄に示される成分の詳細は次の通りである。
・ω-カルボキシ-ポリカプロラクトン(n≒2)モノアクリレート:東亜合成株式会社製、商品名アロニックスM-5300(数平均分子量290)。
Moreover, the detail of the component shown by the (a2) column in Table 1 and 2 is as follows.
Ω-carboxy-polycaprolactone (n≈2) monoacrylate: manufactured by Toagosei Co., Ltd., trade name Aronix M-5300 (number average molecular weight 290).
 (2)合成例B-2
 還流冷却器、温度計、窒素置換基用ガラス管及び攪拌機を取り付けた四つ口フラスコ中に、メタクリル酸75質量部、メチルメタクリレート85質量部、スチレン20質量部、ブチルメタクリレート20部、ジプロピレングリコールモノメチルエーテル430質量部、及びアゾビスイソブチロニトリル5質量部を加えた。この四つ口フラスコ内の溶液を窒素気流下で75℃で5時間加熱して重合反応を進行させることで、濃度32%の共重合体溶液を得た。
(2) Synthesis example B-2
In a four-necked flask equipped with a reflux condenser, thermometer, glass tube for nitrogen substituent and stirrer, 75 parts by weight of methacrylic acid, 85 parts by weight of methyl methacrylate, 20 parts by weight of styrene, 20 parts by weight of butyl methacrylate, dipropylene glycol 430 parts by mass of monomethyl ether and 5 parts by mass of azobisisobutyronitrile were added. The solution in the four-necked flask was heated at 75 ° C. for 5 hours under a nitrogen stream to advance the polymerization reaction, thereby obtaining a copolymer solution having a concentration of 32%.
 この共重合体溶液に、ハイドロキノン0.1質量部、グリシジルメタクリレート50質量部、及びジメチルベンジルアミン0.8質量部を加え、80℃で24時間加熱することで付加反応を進行させた。これにより、カルボキシル基含有樹脂(B-1)の37%溶液を得た。カルボキシル基含有樹脂(B-1)の重量平均分子量は31790、固形分酸価は120mgKOH/gであった。 To this copolymer solution, 0.1 part by mass of hydroquinone, 50 parts by mass of glycidyl methacrylate and 0.8 part by mass of dimethylbenzylamine were added, and the addition reaction was allowed to proceed by heating at 80 ° C. for 24 hours. As a result, a 37% solution of the carboxyl group-containing resin (B-1) was obtained. The weight average molecular weight of the carboxyl group-containing resin (B-1) was 31790, and the solid content acid value was 120 mgKOH / g.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 後掲の表3~表7の「組成」の欄に示す成分の一部を3本ロールで混練した。次にこの混練物をフラスコ内に移して後掲の表3~表7に示す全成分を撹拌混合することで、実施例8を除く実施例及びに比較例の感光性樹脂組成物を得た。感光性樹脂組成物を作製する際、メラミン及びメラミン誘導体の群のうち少なくとも1種を感光性樹脂組成物中で均一に分散させた。なお、表3~表7に示される成分の詳細は次の通りである。
・不飽和化合物(TMPTA):トリメチロールプロパントリアクリレート。
・不飽和化合物(DPHA):ジペンタエリスリトールヘキサアクリレート。
・光重合開始剤(TPO):2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド(BASF社製、品番Irgacure TPO)。
・光重合開始剤(IC819):ビス-(2,4,6-トリメチルベンゾイル)フェニルフォスフィンオキサイド(BASF社製、品番Irgacure 819)。
・光重合開始剤(IC184):1-ヒドロキシ-シクロヘキシル-フェニル-ケトン(BASF社製、品番Irgacure 184)。
・光重合開始剤(IC1173):2-ヒドロキシ-2-メチル-1-フェニル-プロパン-1-オン(BASF社製、品番Irgacure 1173)。
・光重合開始剤(EAB):4,4’-ビス(ジエチルアミノ)ベンゾフェノン。
・光重合開始剤(IC907):2-メチル-1-(4-メチルチオフェニル)-2-モルフォリノプロパン-1-オン(BASF社製、品番Irgacure 907)。
・光重合開始剤(DETX):2,4-ジエチルチオキサンテン-9-オン。
・結晶性エポキシ樹脂(YX4000):ビフェニル型結晶性エポキシ樹脂(三菱化学株式会社製の品名YX-4000、融点105℃、エポキシ当量187g/eq)。
・結晶性エポキシ樹脂(YSLV80XY):ビスフェノール型結晶性エポキシ樹脂(新日鉄住金化学株式会社製の品名YSLV-80XY、融点75~85℃、192g/eq)。
・非晶性エポキシ樹脂(MX-130):ゴム粒子含有ビスフェノールF型エポキシ樹脂(株式会社カネカ製、品番カネエースMX-130)。
・非晶性エポキシ樹脂(EXA-4816):非晶性エポキシ樹脂の溶液;長鎖炭素鎖含有ビスフェノールA型エポキシ樹脂(DIC製、品番EPICLON EXA-4816、液状樹脂、エポキシ当量410g/eq)を固形分90%でジエチレングリコールモノエチルエーテルアセテートに溶解した溶液(固形分90%換算のエポキシ当量は、455.56g/eq)。
・メラミン:日産化学工業株式会社製、微粉メラミン;感光性樹脂組成物中において平均粒子径8μmで分散。
・メラミン誘導体:メラミンと1,2,3,6-テトラヒドロ無水フタル酸との反応物であるメラミン-テトラヒドロフタル酸塩;感光性樹脂組成物中において平均粒子径6μmで分散。
・酸化防止剤:ヒンダードフェノール系酸化防止剤、BASF社製、品番IRGANOX 1010。
・無機フィラー(PMA-ST):無機フィラーの分散液;ナノシリカゾル(日産化学製、品番PMA-ST;分散媒プロピレングリコールモノメチルエーテルアセテート、SiО含有率30%、平均粒子径10~15nm)。
・無機フィラー(A-8):結晶性シリカ(Unimin社製、IMSIL A-8、平均粒子径2~3μm)。
・無機フィラー(B30):硫酸バリウム(堺化学工業株式会社製、品番バリエースB30、平均粒子径0.3μm)。
・無機フィラー(B31):硫酸バリウム(堺化学工業株式会社製、品番バリエースB31、平均粒子径0.3μm)。
・消泡剤:信越シリコーン株式会社製、品番KS-66。
・界面活性剤(F-477):DIC製、品番メガファックF-477。
・界面活性剤(F-470):DIC製、品番メガファックF-470。
・レオロジーコントロール剤:ビッグケミー・ジャパン株式会社製、品番BYK-430。
・シランカップリング剤:3-グリシドキシプロピルトリメトキシシラン。
・溶剤(EDGAC):ジエチレングリコールモノエチルエーテルアセテート。
・溶剤(MEK):メチルエチルケトン。
A part of the components shown in the column of “Composition” in Tables 3 to 7 below were kneaded with three rolls. Next, this kneaded product was transferred into a flask, and all components shown in Tables 3 to 7 below were stirred and mixed to obtain photosensitive resin compositions of Examples and Comparative Examples other than Example 8. . When producing the photosensitive resin composition, at least one of the group of melamine and melamine derivatives was uniformly dispersed in the photosensitive resin composition. Details of the components shown in Tables 3 to 7 are as follows.
Unsaturated compound (TMPTA): trimethylolpropane triacrylate.
Unsaturated compound (DPHA): dipentaerythritol hexaacrylate.
Photopolymerization initiator (TPO): 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (product number Irgacure TPO manufactured by BASF).
Photopolymerization initiator (IC819): bis- (2,4,6-trimethylbenzoyl) phenylphosphine oxide (manufactured by BASF, product number Irgacure 819).
Photopolymerization initiator (IC184): 1-hydroxy-cyclohexyl-phenyl-ketone (product number Irgacure 184, manufactured by BASF).
Photopolymerization initiator (IC1173): 2-hydroxy-2-methyl-1-phenyl-propan-1-one (manufactured by BASF, product number Irgacure 1173).
Photopolymerization initiator (EAB): 4,4′-bis (diethylamino) benzophenone.
Photopolymerization initiator (IC907): 2-methyl-1- (4-methylthiophenyl) -2-morpholinopropan-1-one (manufactured by BASF, product number Irgacure 907).
Photopolymerization initiator (DETX): 2,4-diethylthioxanthen-9-one.
Crystalline epoxy resin (YX4000): Biphenyl type crystalline epoxy resin (product name YX-4000 manufactured by Mitsubishi Chemical Corporation, melting point 105 ° C., epoxy equivalent 187 g / eq).
Crystalline epoxy resin (YSLV80XY): Bisphenol type crystalline epoxy resin (product name YSLV-80XY, manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., melting point 75 to 85 ° C., 192 g / eq).
Amorphous epoxy resin (MX-130): Rubber particle-containing bisphenol F type epoxy resin (manufactured by Kaneka Corporation, product number Kane Ace MX-130).
Amorphous epoxy resin (EXA-4816): solution of amorphous epoxy resin; long-chain carbon chain-containing bisphenol A type epoxy resin (manufactured by DIC, product number EPICLON EXA-4816, liquid resin, epoxy equivalent 410 g / eq) A solution having a solid content of 90% and dissolved in diethylene glycol monoethyl ether acetate (epoxy equivalent in terms of solid content of 90% is 455.56 g / eq).
Melamine: manufactured by Nissan Chemical Industries, Ltd., fine melamine; dispersed in the photosensitive resin composition with an average particle size of 8 μm.
Melamine derivative: Melamine-tetrahydrophthalate which is a reaction product of melamine and 1,2,3,6-tetrahydrophthalic anhydride; dispersed in the photosensitive resin composition with an average particle size of 6 μm.
Antioxidant: A hindered phenol antioxidant, manufactured by BASF, product number IRGANOX 1010.
Inorganic filler (PMA-ST): dispersion of inorganic filler; nano silica sol (manufactured by Nissan Chemical Co., product number PMA-ST; dispersion medium propylene glycol monomethyl ether acetate, SiO 2 content 30%, average particle size 10 to 15 nm).
Inorganic filler (A-8): crystalline silica (manufactured by Unimin, IMSIL A-8, average particle size of 2 to 3 μm).
Inorganic filler (B30): Barium sulfate (manufactured by Sakai Chemical Industry Co., Ltd., product number Variace B30, average particle size 0.3 μm).
Inorganic filler (B31): barium sulfate (manufactured by Sakai Chemical Industry Co., Ltd., product number Variace B31, average particle size 0.3 μm).
Antifoaming agent: manufactured by Shin-Etsu Silicone, product number KS-66.
Surfactant (F-477): manufactured by DIC, product number MegaFuck F-477
Surfactant (F-470): manufactured by DIC, product number Megafac F-470
-Rheology control agent: manufactured by Big Chemy Japan, product number BYK-430.
Silane coupling agent: 3-glycidoxypropyltrimethoxysilane.
Solvent (EDGAC): Diethylene glycol monoethyl ether acetate.
Solvent (MEK): methyl ethyl ketone.
 [実施例1~9及び比較例1~2]
 [テストピースの作製]
 実施例1~9及び比較例1~2の各々のテストピースを下記の手順で作製した。
[Examples 1 to 9 and Comparative Examples 1 and 2]
[Production of test pieces]
Each test piece of Examples 1 to 9 and Comparative Examples 1 and 2 was produced by the following procedure.
 <実施例1~7、9及び比較例1~2>
 厚み35μmの銅箔を備えるガラスエポキシ銅張積層板(FR-4タイプ)を用意した。このガラスエポキシ銅張積層板にサブトラクティブ法で導体配線としてライン幅/スペース幅が50μm/50μmであるくし型電極を形成し、これによりプリント配線板を得た。このプリント配線板の導体配線における厚み1μm程度の表面部分を、メック株式会社製の品番CZ-8100で溶解除去することにより、導体配線を粗化した。このプリント配線板の一面全面に感光性樹脂組成物をスクリーン印刷法で塗布することで、湿潤塗膜を形成した。この湿潤塗膜を80℃で30分加熱して予備乾燥することで、膜厚25μmの皮膜を形成した。この皮膜に、直径50μmの円形形状を含むパターンを有する非露光部を有するネガマスクを直接当てた状態で、皮膜に500mJ/cm2の条件で紫外線を照射して露光を行った。露光後の皮膜に現像処理を施した。現像処理に当たっては、皮膜に30℃の1%Na2CO3水溶液を0.2MPaの噴射圧で90秒間噴射した。続いて皮膜に純水を0.2MPaの噴射圧で90秒間噴射することで皮膜を洗浄した。これにより、皮膜における露光されていない部分を除去して、皮膜に穴を形成した。続いて皮膜に1000mJ/cmの条件で紫外線を照射した。そして、皮膜を150℃で60分間加熱した。これにより、プリント配線板(コア材)上に、感光性樹脂組成物の硬化物からなる層を形成した。これによりテストピースを得た。
<Examples 1 to 7, 9 and Comparative Examples 1 and 2>
A glass epoxy copper clad laminate (FR-4 type) provided with a 35 μm thick copper foil was prepared. A comb-type electrode having a line width / space width of 50 μm / 50 μm was formed as a conductor wiring on the glass epoxy copper clad laminate by a subtractive method, thereby obtaining a printed wiring board. The conductor wiring was roughened by dissolving and removing the surface portion of the printed wiring board having a thickness of about 1 μm with a product number CZ-8100 manufactured by MEC Co., Ltd. A wet paint film was formed by applying the photosensitive resin composition to the entire surface of the printed wiring board by screen printing. This wet coating film was heated at 80 ° C. for 30 minutes and preliminarily dried to form a film having a thickness of 25 μm. The film was exposed by irradiating the film with ultraviolet rays under the condition of 500 mJ / cm 2 in a state where a negative mask having a non-exposed portion having a pattern including a circular shape with a diameter of 50 μm was directly applied. The exposed film was developed. In the development process, a 1% Na 2 CO 3 aqueous solution at 30 ° C. was sprayed onto the film for 90 seconds at a spray pressure of 0.2 MPa. Subsequently, the coating film was washed by spraying pure water at a spray pressure of 0.2 MPa for 90 seconds. Thereby, the part which was not exposed in a film | membrane was removed, and the hole was formed in the film | membrane. Subsequently, the film was irradiated with ultraviolet rays under the condition of 1000 mJ / cm 2 . The film was then heated at 150 ° C. for 60 minutes. This formed the layer which consists of hardened | cured material of the photosensitive resin composition on a printed wiring board (core material). As a result, a test piece was obtained.
 <実施例8>
 後掲の表4の「組成」の欄に示す成分を3本ロールで混練することで、感光性樹脂組成物を得た。この感光性樹脂組成物を作製する際、メラミンを感光性樹脂組成物中で均一に分散させた。
<Example 8>
A photosensitive resin composition was obtained by kneading the components shown in the “Composition” column of Table 4 below with three rolls. When producing this photosensitive resin composition, melamine was uniformly dispersed in the photosensitive resin composition.
 この感光性樹脂組成物を、ポリエチレンテレフタレート製のフィルム上にアプリケータで塗布してから、80~110℃で加熱することで乾燥させることにより、フィルム上に厚み25μmのドライフィルムを形成した。 The photosensitive resin composition was applied on a polyethylene terephthalate film with an applicator and then dried by heating at 80 to 110 ° C. to form a dry film having a thickness of 25 μm on the film.
 実施例1~7、9及び比較例1~2の場合と同様のプリント配線板にドライフィルムを加熱ラミネートした。加熱ラミネートは、真空ラミネーターで0.5MPa、80℃、1分間の条件でおこなった。これにより、プリント配線板上に厚み25μmの皮膜を形成した。この皮膜に、実施例1~7、9及び比較例1~2と同じ処理を施すことで、プリント配線板(コア材)上に感光性樹脂組成物の硬化物(ドライフィルムの硬化物ともいえる)からなる層を形成した。尚、ポリエチレンテレフタレート製のフィルムは現像工程の前に皮膜から剥した。これによりテストピースを得た。 A dry film was heat-laminated on the same printed wiring board as in Examples 1 to 7 and 9 and Comparative Examples 1 and 2. The heat lamination was performed with a vacuum laminator under conditions of 0.5 MPa, 80 ° C., and 1 minute. Thereby, a film having a thickness of 25 μm was formed on the printed wiring board. By subjecting this film to the same treatment as in Examples 1 to 7, 9 and Comparative Examples 1 and 2, it can be said that a cured product of the photosensitive resin composition (cured product of a dry film) on the printed wiring board (core material). ) Was formed. The polyethylene terephthalate film was peeled off from the film before the development process. As a result, a test piece was obtained.
 [評価試験]
 実施例1~9及び比較例1~2の各々のテストピースを、下記手順で評価した。その結果を下記表3及び表4に示す。
[Evaluation test]
The test pieces of Examples 1 to 9 and Comparative Examples 1 and 2 were evaluated by the following procedure. The results are shown in Tables 3 and 4 below.
 (1)タック性
 各実施例及び比較例のテストピースの作製時に、被膜の露光後に被膜からネガマスクを取り外す際の被膜のタック性の程度を、次に示すように評価した。
A:被膜からネガマスクを取り外す際に抵抗が感じられず、ネガマスクを取り外した後の被膜には貼付痕が認められない。
B:被膜からネガマスクを取り外す際に抵抗が感じられ、ネガマスクを取り外した後の被膜には貼付痕が認められた。
C:被膜からネガマスクを取り外すことが困難であり、無理にネガマスクを取り外すと被膜が破損した。
(1) Tackiness When the test pieces of each Example and Comparative Example were prepared, the degree of tackiness of the coating when the negative mask was removed from the coating after exposure of the coating was evaluated as follows.
A: Resistance is not felt when removing the negative mask from the film, and no sticking marks are observed on the film after the negative mask is removed.
B: Resistance was felt when the negative mask was removed from the coating, and sticking marks were observed on the coating after the negative mask was removed.
C: It was difficult to remove the negative mask from the coating, and the coating was damaged when the negative mask was forcibly removed.
 尚、タック性評価がCである比較例2については、以下のタック性以外の評価を行っていない。また、実施例8については、ドライフィルムから皮膜を形成したため、タック性の評価を行っていない。 In addition, about the comparative example 2 whose tackiness evaluation is C, evaluation other than the following tackiness is not performed. Moreover, about Example 8, since the membrane | film | coat was formed from the dry film, tackiness evaluation was not performed.
 (2)解像性
 各実施例及び比較例のテストピースにおける硬化物からなる層に形成された穴を観察し、その結果を次のように評価した。
A:穴の底の直径が40μm以上である。
B:穴の底の直径が25μm以上40μm未満である。
C:穴の底の直径が25μm未満であり、或いは明確な穴が形成されない。
(2) Resolution The hole formed in the layer which consists of hardened | cured material in the test piece of each Example and a comparative example was observed, and the result was evaluated as follows.
A: The diameter of the bottom of the hole is 40 μm or more.
B: The diameter of the bottom of the hole is 25 μm or more and less than 40 μm.
C: The diameter of the bottom of the hole is less than 25 μm, or no clear hole is formed.
 (3)耐メッキ性
 各実施例及び比較例のテストピースにおける硬化物からなる層の上に、市販の無電解ニッケルメッキ浴を用いてニッケルメッキ層を形成してから、市販の無電解金メッキ浴を用いて金メッキ層を形成した。これにより、硬化物からなる層の上に、ニッケルメッキ層及び金メッキ層からなる金属層を形成した。硬化物からなる層及び金属層を目視で観察した。また、金属層に対してセロハン粘着テープ剥離試験をおこなった。その結果を次のように評価した。
A:硬化物からなる層及び金属層の外観に異常は認められず、セロハン粘着テープ剥離試験による金属層の剥離は生じなかった。
B:硬化物からなる層に変色が認められるが、セロハン粘着テープ剥離試験による金属層の剥離は生じなかった。
C:硬化物からなる層の浮き上がりが認められ、セロハン粘着テープ剥離試験による金属層の剥離が生じた。
(3) Plating resistance After a nickel plating layer is formed on a layer made of a cured product in the test pieces of the examples and comparative examples using a commercially available electroless nickel plating bath, a commercially available electroless gold plating bath is used. Was used to form a gold plating layer. Thereby, the metal layer which consists of a nickel plating layer and a gold plating layer was formed on the layer which consists of hardened | cured material. The layer and metal layer which consisted of hardened | cured material were observed visually. Moreover, the cellophane adhesive tape peeling test was done with respect to the metal layer. The results were evaluated as follows.
A: No abnormality was observed in the appearance of the layer made of the cured product and the metal layer, and the metal layer was not peeled by the cellophane adhesive tape peel test.
B: Although discoloration was recognized in the layer which consists of hardened | cured material, peeling of the metal layer by the cellophane adhesive tape peeling test did not arise.
C: Lifting of the layer made of the cured product was observed, and the metal layer was peeled off by the cellophane adhesive tape peeling test.
 (4)線間絶縁性
 各実施例及び比較例のテストピースにおける導体配線(くし型電極)にDC30Vのバイアス電圧を印加しながら、プリント配線板を121℃、97%R.H.の試験環境下に100時間曝露した。この試験環境下における硬化物からなる層のくし型電極間の電気抵抗値を常時測定し、その結果を次の評価基準により評価した。
A:試験開始時から100時間経過するまでの間、電気抵抗値が常に106Ω以上を維持した。
B:試験開始時から80時間経過するまでは電気抵抗値が常に106Ω以上を維持したが、試験開始時から100時間経過する前に電気抵抗値が106Ω未満となった。
C:試験開始時から60時間経過するまでは電気抵抗値が常に106Ω以上を維持したが、試験開始時から80時間経過する前に電気抵抗値が106Ω未満となった。
D:試験開始時から60時間経過する前に電気抵抗値が106Ω未満となった。
(4) Insulation between lines While applying a bias voltage of DC 30 V to the conductor wiring (comb electrode) in the test pieces of the examples and comparative examples, the printed wiring board was placed at 121 ° C. and 97% R.D. H. The test environment was exposed for 100 hours. The electrical resistance value between the comb-type electrodes of the cured product layer in this test environment was constantly measured, and the result was evaluated according to the following evaluation criteria.
A: The electric resistance value was constantly maintained at 10 6 Ω or more until 100 hours passed from the start of the test.
B: The electric resistance value was always maintained at 10 6 Ω or more until 80 hours passed from the start of the test, but the electric resistance value became less than 10 6 Ω before 100 hours passed from the start of the test.
C: The electric resistance value was always maintained at 10 6 Ω or more until 60 hours passed from the start of the test, but the electric resistance value became less than 10 6 Ω before 80 hours passed from the start of the test.
D: The electric resistance value was less than 10 6 Ω before 60 hours passed from the start of the test.
 (5)層間絶縁性
 各実施例及び比較例のテストピースにおける硬化物からなる層の上に導電テープを貼り付けた。この導電テープにDC100Vのバイアス電圧を印加しながら、テストピースを121℃、97%R.H.の試験環境下に50時間曝露した。この試験環境下における硬化物からなる層の導体配線と導電テープとの間の電気抵抗値を常時測定し、その結果を次の評価基準により評価した。
A:試験開始時から50時間経過するまでの間、電気抵抗値が常に106Ω以上を維持した。
B:試験開始時から35時間経過するまでは電気抵抗値が常に106Ω以上を維持したが、試験開始時から50時間経過する前に電気抵抗値が106Ω未満となった。
C:試験開始時から20時間経過するまでは電気抵抗値が常に106Ω以上を維持したが、試験開始時から35時間経過する前に電気抵抗値が106Ω未満となった。
D:試験開始時から20時間経過する前に電気抵抗値が106Ω未満となった。
(5) Interlayer insulation The conductive tape was affixed on the layer which consists of hardened | cured material in the test piece of each Example and a comparative example. While applying a bias voltage of DC 100 V to the conductive tape, the test piece was placed at 121 ° C. and 97% R.D. H. The test environment was exposed for 50 hours. The electrical resistance value between the conductive wiring of the layer made of the cured product and the conductive tape in this test environment was constantly measured, and the result was evaluated according to the following evaluation criteria.
A: The electric resistance value was constantly maintained at 10 6 Ω or more until 50 hours passed from the start of the test.
B: The electric resistance value was always maintained at 10 6 Ω or more until 35 hours passed from the start of the test, but the electric resistance value became less than 10 6 Ω before 50 hours passed from the start of the test.
C: The electric resistance value was always maintained at 10 6 Ω or more until 20 hours passed from the start of the test, but the electric resistance value became less than 10 6 Ω before 35 hours passed from the start of the test.
D: The electric resistance value was less than 10 6 Ω before 20 hours passed from the start of the test.
 (6)ガラス転移温度
 テフロン(登録商標)製の部材の上に硬化物からなる層を形成した。硬化物からなる層の形成方法は、テストピースにおける硬化物からなる層を形成する場合と同じとした。部材から硬化物からなる層を剥がしてから、この層のガラス転移温度をTMA(Thermal Mechanical Analysis)で測定した。
(6) Glass transition temperature A layer made of a cured product was formed on a member made of Teflon (registered trademark). The method for forming the layer made of the cured product was the same as that for forming the layer made of the cured product in the test piece. After the layer made of the cured product was peeled off from the member, the glass transition temperature of this layer was measured by TMA (Thermal Mechanical Analysis).
 (7)銅メッキ密着性試験
 (7-1)粗化耐性
 各実施例及び比較例のテストピースにおける硬化物からなる層の外表面を、一般的なデスミア処理に基いた下記手順で粗化させた。デスミア用膨潤液として市販されている膨潤液(アトテックジャパン(株)製のスウェリング・ディップ・セキュリガンスP)を用いて膨潤処理を60℃で5分間行い、硬化物の表面を膨潤させた。そして、この膨潤された表面に対して湯洗を行った。続いて過マンガン酸カリウムを含有し、デスミア液として市販されている酸化剤(アトテックジャパン(株)製のコンセントレート・コンパクトCP)を用いて粗化処理を80℃で10分間行い、湯洗後の表面を粗化した。このように粗化された表面に対して湯洗を行い、更に、この表面におけるデスミア液の残渣を中和液(アトテックジャパン(株)製のリダクションソリューション・セキュリガントP)を用いて40℃で5分間除去した。そして、中和後の表面を水洗した。このようにして粗面が付与された皮膜(感光性樹脂組成物の硬化物からなる層)の膜厚を測定し、デスミア液に対する硬化物の粗化耐性を次の評価基準により評価した。
A:粗化による膜厚の減少が0μm超3.5μm未満である。
B:粗化による膜厚の減少が3.5μm以上、10μm未満である。
C:粗化による膜厚の減少が10μm以上である。
(7) Copper plating adhesion test (7-1) Roughening resistance The outer surface of the cured layer in the test pieces of each Example and Comparative Example was roughened by the following procedure based on a general desmear treatment. It was. Swelling treatment (Swelling Dip Securigans P manufactured by Atotech Japan Co., Ltd.) commercially available as a swelling liquid for desmear was performed at 60 ° C. for 5 minutes to swell the surface of the cured product. Then, the swollen surface was washed with hot water. Subsequently, using a oxidizer (concentrate compact CP manufactured by Atotech Japan Co., Ltd.) containing potassium permanganate and commercially available as a desmear liquid, roughening treatment is performed at 80 ° C. for 10 minutes, and after washing with hot water. The surface of was roughened. The surface roughened in this manner is washed with hot water, and the desmear liquid residue on this surface is further removed at 40 ° C. using a neutralizing liquid (Atotech Japan Co., Ltd. Reduction Solution Securigant P). Removed for 5 minutes. And the surface after neutralization was washed with water. Thus, the film thickness of the film | membrane (layer which consists of hardened | cured material of the photosensitive resin composition) to which the rough surface was provided was measured, and the roughening tolerance of the hardened | cured material with respect to a desmear liquid was evaluated by the following evaluation criteria.
A: The decrease in film thickness due to roughening is more than 0 μm and less than 3.5 μm.
B: The reduction in film thickness due to roughening is 3.5 μm or more and less than 10 μm.
C: The reduction in film thickness due to roughening is 10 μm or more.
 (7-2)銅メッキ層の密着性
 各実施例及び比較例のテストピースにおける硬化物からなる層に、上記(7-1)の方法で粗面を付与した後、市販の薬液を用いてテストピースの粗面に無電解銅メッキ処理で初期配線を形成した。この初期配線を硬化物と共に150℃で1時間加熱した。更に電解銅メッキ処理により、2A/dmの電流密度の下で市販の薬液から初期配線に厚さ33μmの銅を直接析出させた。続いて銅を析出させたテストピースを180℃で30分間加熱して銅メッキ層を形成した。このようにして形成された銅メッキ層と、テストピースにおける硬化物との密着性を次の評価基準により評価した。ここで、無電解銅メッキ処理後及び電解銅メッキ処理後の両方の加熱時にテストピースにブリスターが確認されない場合、銅メッキ層と硬化物との密着強度を下記の手順で評価した。この密着強度はJIS-C6481に準拠して測定された。
S:無電解銅メッキ処理後の加熱時にブリスターが確認されず、電解銅メッキ処理後の加熱時でもブリスターが確認されなかった。また、銅の密着強度は0.4kN/m以上であった。
A:無電解銅メッキ処理後の加熱時にブリスターが確認されず、電解銅メッキ処理後の加熱時でもブリスターが確認されなかった。また、銅の密着強度は0.3kN/m以上、0.4kN/m未満であった。
B:無電解銅メッキ処理後の加熱時にブリスターが確認されず、電解銅メッキ処理後の加熱時でもブリスターが確認されなかった。また、銅の密着強度は0.3kN/m未満であった。
C:無電解銅メッキ処理後の加熱時、あるいは電解銅メッキ処理後の加熱時にブリスターが確認された。
(7-2) Adhesiveness of copper plating layer After applying a rough surface to the layer made of the cured product in the test piece of each example and comparative example by the method of (7-1) above, using a commercially available chemical solution Initial wiring was formed on the rough surface of the test piece by electroless copper plating. This initial wiring was heated at 150 ° C. for 1 hour together with the cured product. Furthermore, by electrolytic copper plating treatment, copper having a thickness of 33 μm was directly deposited on the initial wiring from a commercially available chemical solution under a current density of 2 A / dm 2 . Subsequently, the test piece on which copper was deposited was heated at 180 ° C. for 30 minutes to form a copper plating layer. The adhesion between the copper plating layer thus formed and the cured product in the test piece was evaluated according to the following evaluation criteria. Here, when a blister was not confirmed in the test piece at the time of heating both after the electroless copper plating treatment and after the electrolytic copper plating treatment, the adhesion strength between the copper plating layer and the cured product was evaluated by the following procedure. This adhesion strength was measured according to JIS-C6481.
S: Blisters were not confirmed during heating after the electroless copper plating treatment, and no blisters were confirmed during heating after the electrolytic copper plating treatment. Moreover, the adhesive strength of copper was 0.4 kN / m or more.
A: Blister was not confirmed at the time of heating after the electroless copper plating treatment, and no blister was confirmed at the time of heating after the electrolytic copper plating treatment. Moreover, the adhesive strength of copper was 0.3 kN / m or more and less than 0.4 kN / m.
B: Blister was not confirmed at the time of heating after electroless copper plating treatment, and blister was not confirmed at the time of heating after electrolytic copper plating treatment. Moreover, the adhesive strength of copper was less than 0.3 kN / m.
C: Blisters were confirmed during heating after the electroless copper plating treatment or during heating after the electrolytic copper plating treatment.
 実施例1~9及び比較例1~2の評価結果を下記表3~4に示す。 The evaluation results of Examples 1 to 9 and Comparative Examples 1 and 2 are shown in Tables 3 to 4 below.
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004
 [実施例10~21及び比較例3~6]
 [テストピースの作製]
 実施例10~21及び比較例3~6の各々の感光性樹脂組成物を、ポリエチレンテレフタレート製のフィルム上にアプリケータで塗布してから、95℃で25分加熱することで乾燥させることにより、フィルム上に厚み25μmのドライフィルムを形成した。
[Examples 10 to 21 and Comparative Examples 3 to 6]
[Production of test pieces]
Each of the photosensitive resin compositions of Examples 10 to 21 and Comparative Examples 3 to 6 was coated on a polyethylene terephthalate film with an applicator and then dried by heating at 95 ° C. for 25 minutes. A dry film having a thickness of 25 μm was formed on the film.
 実施例10~21及び比較例3~6の各々のテストピースを実施例8と同様にして作製した。ただし、プリント配線板にドライフィルムを加熱ラミネートした直後の最初の露光時における紫外線の強度を250mJ/cmに設定した。そして、皮膜に1000mJ/cmの条件で紫外線を照射した後の皮膜を加熱する温度も160℃に設定した。 Test pieces of Examples 10 to 21 and Comparative Examples 3 to 6 were produced in the same manner as in Example 8. However, the intensity of ultraviolet rays at the time of the first exposure immediately after laminating the dry film on the printed wiring board was set to 250 mJ / cm 2 . And the temperature which heats the membrane | film | coat after irradiating a ultraviolet-ray on the conditions of 1000 mJ / cm < 2 > was also set to 160 degreeC.
 [評価試験]
 実施例10~21及び比較例3~6の各々のテストピースを、下記手順で評価した。その結果を下記表5~表7に示す。
[Evaluation test]
The test pieces of Examples 10 to 21 and Comparative Examples 3 to 6 were evaluated by the following procedure. The results are shown in Tables 5 to 7 below.
 (8)現像性
 各実施例及び比較例について、前記現像処理後のプリント配線板の非露光部を観察し、その結果を次のように評価した。
良好:露光されていない皮膜が全て除去されている。
不適切:露光されていない皮膜の一部がプリント配線板上に残存した。
(8) Developability For each example and comparative example, the unexposed portion of the printed wiring board after the development treatment was observed, and the results were evaluated as follows.
Good: All the unexposed film is removed.
Improper: Part of the unexposed film remained on the printed wiring board.
 (9)解像性
 実施例1~9及び比較例1~2のテストピースと同様の手順、及び同様の評価基準で、各実施例及び比較例のテストピースの解像性を評価した。
(9) Resolution The resolution of the test pieces of each example and comparative example was evaluated using the same procedure and the same evaluation criteria as those of the test pieces of Examples 1 to 9 and Comparative Examples 1 and 2.
 (10)耐メッキ性
 実施例1~9及び比較例1~2のテストピースと同様の手順、及び同様の評価基準で、各実施例及び比較例のテストピースの耐メッキ性を評価した。
(10) Plating resistance The plating resistance of the test pieces of each Example and Comparative Example was evaluated by the same procedure and the same evaluation criteria as those of the test pieces of Examples 1 to 9 and Comparative Examples 1 and 2.
 (11)線間絶縁性
 暴露時間を150時間にした以外は、実施例1~9及び比較例1~2のテストピースと同様の手順で、各実施例及び比較例のテストピースにおけるくし型電極間の電気抵抗値を常時測定した。その結果を次の評価基準により評価した。
A:試験開始時から150時間経過するまでの間、電気抵抗値が常に106Ω以上を維持した。
B:試験開始時から100時間経過するまでは電気抵抗値が常に106Ω以上を維持したが、試験開始時から150時間経過する前に電気抵抗値が106Ω未満となった。
C:試験開始時から100時間経過する前に電気抵抗値が106Ω未満となった。
(11) Insulation between lines Comb-type electrodes in the test pieces of Examples and Comparative Examples in the same procedure as the test pieces of Examples 1 to 9 and Comparative Examples 1 and 2 except that the exposure time was 150 hours The electrical resistance value was measured constantly. The results were evaluated according to the following evaluation criteria.
A: The electric resistance value was constantly maintained at 10 6 Ω or more until 150 hours passed from the start of the test.
B: The electric resistance value was always maintained at 10 6 Ω or more until 100 hours passed from the start of the test, but the electric resistance value was less than 10 6 Ω before 150 hours passed from the start of the test.
C: The electrical resistance value was less than 10 6 Ω before 100 hours passed from the start of the test.
 (12)層間絶縁性
 試験環境を85℃、85%R.H.に、曝露時間を2000時間にした以外は、実施例1~8及び比較例1~3のテストピースと同様の手順で、各実施例及び比較例のテストピースにおける導体配線と導電テープとの間の電気抵抗値を常時測定した。その結果を次の評価基準により評価した。
A:試験開始時から2000時間経過するまでの間、電気抵抗値が常に10Ω以上を維持した。
B:試験開始時から1000時間経過するまでは電気抵抗値が常に10Ω以上を維持したが、試験開始時から2000時間経過する前に電気抵抗値が10Ω未満となった。
C:試験開始時から1000時間経過する前に電気抵抗値が10Ω未満となった。
(12) Interlayer insulation The test environment is 85 ° C., 85% R.D. H. In addition, in the same procedure as the test pieces of Examples 1 to 8 and Comparative Examples 1 to 3 except that the exposure time was 2000 hours, the conductor wiring and the conductive tape in the test pieces of each Example and Comparative Example were The electrical resistance value of was constantly measured. The results were evaluated according to the following evaluation criteria.
A: The electric resistance value was constantly maintained at 10 8 Ω or more until 2000 hours passed from the start of the test.
B: The electric resistance value was always maintained at 10 8 Ω or more until 1000 hours passed from the start of the test, but the electric resistance value became less than 10 8 Ω before 2000 hours passed from the start of the test.
C: The electric resistance value was less than 10 8 Ω before 1000 hours passed from the start of the test.
 (13)PCT(プレッシャクッカ試験)
 各実施例及び比較例のテストピースを121℃、100%RHの環境下で120時間放置した後、硬化物からなる層の外観を次の評価基準により評価した。
A:硬化物からなる層に異常は見られなかった。
B:硬化物からなる層に変色が見られた。
C:硬化物からなる層に大きな変色が見られ、一部膨れが発生していた。
(13) PCT (pressure cooker test)
The test pieces of each Example and Comparative Example were allowed to stand in an environment of 121 ° C. and 100% RH for 120 hours, and then the appearance of the cured layer was evaluated according to the following evaluation criteria.
A: No abnormality was found in the layer made of the cured product.
B: Discoloration was observed in the layer made of the cured product.
C: A large discoloration was observed in the layer made of the cured product, and partial swelling occurred.
 (14)銅メッキ密着性試験
 各実施例及び比較例の感光性樹脂組成物を、ポリエチレンテレフタレート製のフィルム上にアプリケータで塗布してから、95℃で25分加熱することで乾燥させることにより、フィルム上に厚み30μmのドライフィルムを形成した。
(14) Copper plating adhesion test By applying the photosensitive resin composition of each Example and Comparative Example on a film made of polyethylene terephthalate with an applicator, and then drying by heating at 95 ° C for 25 minutes. A dry film having a thickness of 30 μm was formed on the film.
 このドライフィルムを用いて、上記と同じ方法で、テストピースを得た。 Using this dry film, a test piece was obtained by the same method as described above.
 (14-1)粗化耐性
 実施例1~9及び比較例1~2と同様の手順で、各実施例及び比較例のテストピースの外表面に粗面を付与すると共にデスミア液に対する硬化物の粗化耐性を評価した。
(14-1) Roughening resistance In the same procedure as in Examples 1 to 9 and Comparative Examples 1 and 2, the outer surface of the test piece of each Example and Comparative Example was given a rough surface and the cured product against desmear liquid Roughening resistance was evaluated.
 (14-2)銅メッキ層の密着性
 実施例1~9及び比較例1~2と同様の手順で、各実施例及び比較例のテストピースにおける硬化物からなる層に銅メッキ層を形成すると共にこの銅メッキ層と、硬化物との密着強度を評価した。
(14-2) Adhesiveness of copper plating layer In the same procedure as in Examples 1 to 9 and Comparative Examples 1 and 2, a copper plating layer is formed on a layer made of a cured product in the test pieces of each Example and Comparative Example. In addition, the adhesion strength between the copper plating layer and the cured product was evaluated.
 実施例10~21及び比較例3~6の評価結果を下記表5~7に示す。 The evaluation results of Examples 10 to 21 and Comparative Examples 3 to 6 are shown in Tables 5 to 7 below.
Figure JPOXMLDOC01-appb-T000005
Figure JPOXMLDOC01-appb-T000005
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000007
 以上の実施形態で明らかなように、本発明に係る第1の態様の感光性樹脂組成物は、カルボキシル基含有樹脂(A)と、エチレン性不飽和結合を一分子中に少なくとも一つ有する不飽和化合物(B)と、光重合開始剤(C)と、エポキシ化合物(D)と、メラミン及びメラミン誘導体の群から選択される少なくとも1種の化合物を含有する成分(E)とを含有し、前記カルボキシル基含有樹脂(A)がビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂(A1)を含有する。 As apparent from the above embodiment, the photosensitive resin composition of the first aspect according to the present invention is a non-polymer having a carboxyl group-containing resin (A) and at least one ethylenically unsaturated bond in one molecule. A saturated compound (B), a photopolymerization initiator (C), an epoxy compound (D), and a component (E) containing at least one compound selected from the group of melamine and melamine derivatives, The carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) having a bisphenolfluorene skeleton.
 第1の態様によれば、感光性樹脂組成物がビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂を含有していても、優れた現像性を得ることができ、しかもメッキ処理の前工程で、感光性樹脂組成物の硬化物を含む層の厚みを酸化剤で薄くさせ難くすることができ、且つ硬化物の表面を酸化剤で粗化することができる。 According to the first aspect, even when the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, excellent developability can be obtained, and in the previous step of the plating treatment, The thickness of the layer containing the cured product of the resin composition can be made difficult to reduce with an oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.
 第2の態様の感光性樹脂組成物では、第1の態様において、前記カルボキシル基含有樹脂(A1)が、ビスフェノールフルオレン骨格を有するエポキシ化合物(a1)と不飽和基含有カルボン酸(a2)との反応物である中間体と、酸無水物との反応物であってもよい。 In the photosensitive resin composition of the second aspect, in the first aspect, the carboxyl group-containing resin (A1) is an epoxy compound (a1) having a bisphenolfluorene skeleton and an unsaturated group-containing carboxylic acid (a2). It may be a reaction product of an intermediate that is a reactant and an acid anhydride.
 第2の態様によれば、感光性樹脂組成物に優れた現像性を付与することができる。 According to the second aspect, excellent developability can be imparted to the photosensitive resin composition.
 第3の態様の感光性樹脂組成物では、第1又は第2の態様において、前記エポキシ化合物(D)が結晶性エポキシ樹脂を含有してもよい。 In the photosensitive resin composition of the third aspect, in the first or second aspect, the epoxy compound (D) may contain a crystalline epoxy resin.
 第3の態様によれば、感光性樹脂組成物の現像性を向上させることができる。 According to the third aspect, the developability of the photosensitive resin composition can be improved.
 第4の態様の感光性樹脂組成物は、第1乃至第3の態様のいずれか1つにおいて、さらに、無機フィラー(K)を含有してもよい。 The photosensitive resin composition of the fourth aspect may further contain an inorganic filler (K) in any one of the first to third aspects.
 第4の態様によれば、メッキ処理に適した粗面を感光性樹脂組成物の硬化物に付与することができ、硬化物と前記メッキ層との密着性を向上させることができる。 According to the 4th aspect, the rough surface suitable for a plating process can be provided to the hardened | cured material of the photosensitive resin composition, and the adhesiveness of hardened | cured material and the said plating layer can be improved.
 第5の態様の感光性樹脂組成物では、第4の態様において、前記無機フィラー(K)がシリカ(k)を含有してもよい。 In the photosensitive resin composition of the fifth aspect, in the fourth aspect, the inorganic filler (K) may contain silica (k).
 第5の態様によれば、感光性樹脂組成物の硬化物の表面でシリカ(k)が位置する難腐食箇所であっても、その難腐食箇所を適度に腐食させることができる。これにより、よりメッキ処理に適した粗面を硬化物に付与することができ、硬化物とメッキ層との密着性をさらに向上させることができる。 According to the 5th aspect, even if it is a difficult corrosion location where silica (k) is located on the surface of the hardened material of the photosensitive resin composition, the difficult corrosion location can be appropriately corroded. Thereby, the rough surface more suitable for a plating process can be provided to hardened | cured material, and the adhesiveness of hardened | cured material and a plating layer can further be improved.
 第6の態様の感光性樹脂組成物では、第5の態様において、前記シリカ(k)の平均粒子径が1μm以下であってもよい。 In the photosensitive resin composition of the sixth aspect, in the fifth aspect, the average particle diameter of the silica (k) may be 1 μm or less.
 第6の態様によれば、感光性樹脂組成物の硬化物に形成される粗面の粗さを細かくすることができる。これにより硬化物の表面積が増加することに伴ってアンカー効果が大きくなり粗面とメッキ層との密着性を向上させることができる。 According to the 6th aspect, the roughness of the rough surface formed in the hardened | cured material of the photosensitive resin composition can be made fine. As a result, the anchor effect increases as the surface area of the cured product increases, and the adhesion between the rough surface and the plating layer can be improved.
 第7の態様の感光性樹脂組成物では、第1乃至第6の態様のいずれか1つにおいて、前記光重合開始剤(C)はアシルフォスフィンオキサイド系光重合開始剤(C1)を含有してもよい。 In the photosensitive resin composition of the seventh aspect, in any one of the first to sixth aspects, the photopolymerization initiator (C) contains an acylphosphine oxide photopolymerization initiator (C1). May be.
 第7の態様によれば、感光性樹脂組成物がカルボキシル基含有樹脂(A1)を含有するにもかかわらず、感光性樹脂組成物を紫外線で露光する場合に感光性樹脂組成物に高い感光性を付与できる。また、電気的絶縁性に優れた硬化物が得られる。 According to the seventh aspect, even when the photosensitive resin composition contains the carboxyl group-containing resin (A1), the photosensitive resin composition has high photosensitivity when the photosensitive resin composition is exposed to ultraviolet rays. Can be granted. Moreover, the hardened | cured material excellent in electrical insulation is obtained.
 第8の態様の感光性樹脂組成物では、第1乃至第7の態様のいずれか1つにおいて、前記光重合開始剤(C)はヒドロキシケトン系光重合開始剤(C2)を含有してもよい。 In the photosensitive resin composition according to the eighth aspect, in any one of the first to seventh aspects, the photopolymerization initiator (C) may contain a hydroxyketone photopolymerization initiator (C2). Good.
 第8の態様によれば、ヒドロキシケトン系光重合開始剤(C2)を含有しない場合と比べて、感光性樹脂組成物に更に高い感光性を付与できる。 According to the eighth aspect, higher photosensitivity can be imparted to the photosensitive resin composition as compared with the case where no hydroxyketone photopolymerization initiator (C2) is contained.
 第9の態様の感光性樹脂組成物では、第1乃至第8の態様のいずれか1つにおいて、前記光重合開始剤(C)はビス(ジエチルアミノ)ベンゾフェノン(C3)を含有してもよい。 In the photosensitive resin composition of the ninth aspect, in any one of the first to eighth aspects, the photopolymerization initiator (C) may contain bis (diethylamino) benzophenone (C3).
 第9の態様によれば、感光性樹脂組成物から形成される塗膜を部分的に露光してから現像する場合、露光されない部分の硬化が抑制されることで、解像性が特に高くなる。このため感光性樹脂組成物の硬化物で非常に微細なパターンを形成することが可能となる。 According to the ninth aspect, when the coating film formed from the photosensitive resin composition is partially exposed and then developed, the resolution is particularly improved by suppressing the curing of the unexposed part. . For this reason, it becomes possible to form a very fine pattern with the hardened | cured material of the photosensitive resin composition.
 第10の様態のドライフィルムは、第1乃至第9の態様のいずれか1つの感光性樹脂組成物の乾燥物である。 The dry film of the tenth aspect is a dried product of the photosensitive resin composition of any one of the first to ninth aspects.
 第10の様態によれば、感光性樹脂組成物がビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂を含有していても、優れた現像性を得ることができ、しかもメッキ処理の前工程で、ドライフィルムの硬化物を含む層の厚みを酸化剤で薄くさせ難くすることができ、且つ硬化物の表面を酸化剤で粗化することができる。 According to the tenth aspect, even if the photosensitive resin composition contains a carboxyl group-containing resin having a bisphenolfluorene skeleton, excellent developability can be obtained, and in the previous step of the plating treatment, a dry film can be obtained. The thickness of the layer containing the cured product can be made difficult to reduce with an oxidizing agent, and the surface of the cured product can be roughened with an oxidizing agent.
 第11の様態のプリント配線板は、第1乃至第9の態様のいずれか1つの感光性樹脂組成物の硬化物を含む層間絶縁層を備える。 The printed wiring board according to the eleventh aspect includes an interlayer insulating layer containing a cured product of the photosensitive resin composition according to any one of the first to ninth aspects.
 第11の様態によれば、優れた層間絶縁層を備えるプリント配線板を得ることができる。 According to the eleventh aspect, a printed wiring board having an excellent interlayer insulating layer can be obtained.
 第12の様態のプリント配線板は、第1乃至第9の態様のいずれか1つの感光性樹脂組成物の硬化物を含むソルダーレジスト層を備える。 The printed wiring board according to the twelfth aspect includes a solder resist layer containing a cured product of the photosensitive resin composition according to any one of the first to ninth aspects.
 第12の様態によれば、優れたソルダーレジスト層を備えるプリント配線板を得ることができる。 According to the twelfth aspect, a printed wiring board having an excellent solder resist layer can be obtained.
 第13の様態の感光性樹脂組成物の製造方法は、ビスフェノールフルオレン骨格を有するエポキシ化合物(a1)と、不飽和基含有カルボン酸(a2)とを反応させて、中間体を得ることと、前記中間体と酸無水物とを反応させて、カルボキシル基含有樹脂(A1)を合成することと、前記カルボキシル基含有樹脂(A1)を含有するカルボキシル基含有樹脂(A)と、エチレン性不飽和結合を一分子中に少なくとも一つ有する不飽和化合物(B)と、光重合開始剤(C)と、エポキシ化合物(D)と、成分(E)とを混合して、感光性樹脂組成物を得ることと、を含み、前記成分(E)は、メラミン及びメラミン誘導体の群から選択される少なくとも1種の化合物を含有する。 The method for producing a photosensitive resin composition according to a thirteenth aspect comprises reacting an epoxy compound (a1) having a bisphenolfluorene skeleton with an unsaturated group-containing carboxylic acid (a2) to obtain an intermediate, An intermediate and an acid anhydride are reacted to synthesize a carboxyl group-containing resin (A1), a carboxyl group-containing resin (A) containing the carboxyl group-containing resin (A1), and an ethylenically unsaturated bond An unsaturated compound (B) having at least one per molecule, a photopolymerization initiator (C), an epoxy compound (D), and a component (E) are mixed to obtain a photosensitive resin composition. The component (E) contains at least one compound selected from the group of melamine and melamine derivatives.
 第13の様態によれば、ビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂を含有していても、優れた現像性を有する感光性樹脂組成物を得ることができる。しかもメッキ処理の前工程で感光性樹脂組成物の硬化物に粗面を付与する際、硬化物を含む層の厚みを酸化剤で薄くさせ難くすることができる。 According to the thirteenth aspect, a photosensitive resin composition having excellent developability can be obtained even when a carboxyl group-containing resin having a bisphenolfluorene skeleton is contained. And when giving a rough surface to the hardened | cured material of the photosensitive resin composition by the pre-process of plating process, it can be made hard to make the thickness of the layer containing hardened | cured material thin with an oxidizing agent.

Claims (12)

  1.  感光性樹脂組成物であって、
     カルボキシル基含有樹脂(A)と、
     エチレン性不飽和結合を一分子中に少なくとも一つ有する不飽和化合物(B)と、
     光重合開始剤(C)と、
     エポキシ化合物(D)と、
     メラミン及びメラミン誘導体の群から選択される少なくとも1種の化合物を含有する成分(E)と、
     を含有し、
     前記カルボキシル基含有樹脂(A)は、ビスフェノールフルオレン骨格を有するカルボキシル基含有樹脂(A1)を含有する。
    A photosensitive resin composition comprising:
    A carboxyl group-containing resin (A);
    An unsaturated compound (B) having at least one ethylenically unsaturated bond in one molecule;
    A photopolymerization initiator (C);
    An epoxy compound (D);
    Component (E) containing at least one compound selected from the group of melamine and melamine derivatives;
    Containing
    The carboxyl group-containing resin (A) contains a carboxyl group-containing resin (A1) having a bisphenolfluorene skeleton.
  2.  前記カルボキシル基含有樹脂(A1)は、ビスフェノールフルオレン骨格を有するエポキシ化合物(a1)と不飽和基含有カルボン酸(a2)との反応物である中間体と、酸無水物との反応物である、
     請求項1に記載の感光性樹脂組成物。
    The carboxyl group-containing resin (A1) is a reaction product of an intermediate which is a reaction product of an epoxy compound (a1) having a bisphenolfluorene skeleton and an unsaturated group-containing carboxylic acid (a2), and an acid anhydride.
    The photosensitive resin composition according to claim 1.
  3.  前記エポキシ化合物(D)は、結晶性エポキシ樹脂を含有する、
     請求項1又は2に記載の感光性樹脂組成物。
    The epoxy compound (D) contains a crystalline epoxy resin,
    The photosensitive resin composition of Claim 1 or 2.
  4.  さらに、無機フィラー(K)を含有する、
     請求項1乃至3のいずれか1項に記載の感光性樹脂組成物。
    Furthermore, containing an inorganic filler (K),
    The photosensitive resin composition of any one of Claims 1 thru | or 3.
  5.  前記無機フィラー(K)は、シリカ(k)を含有する、
     請求項4に記載の感光性樹脂組成物。
    The inorganic filler (K) contains silica (k).
    The photosensitive resin composition of Claim 4.
  6.  前記シリカ(k)の平均粒子径は、1μm以下である、
     請求項5に記載の感光性樹脂組成物。
    The average particle diameter of the silica (k) is 1 μm or less.
    The photosensitive resin composition of Claim 5.
  7.  前記光重合開始剤(C)は、アシルフォスフィンオキサイド系光重合開始剤(C1)を含有する、
     請求項1乃至6のいずれか1項に記載の感光性樹脂組成物。
    The photopolymerization initiator (C) contains an acyl phosphine oxide photopolymerization initiator (C1).
    The photosensitive resin composition of any one of Claims 1 thru | or 6.
  8.  前記光重合開始剤(C)は、ヒドロキシケトン系光重合開始剤(C2)を含有する、
     請求項1乃至7のいずれか1項に記載の感光性樹脂組成物。
    The photopolymerization initiator (C) contains a hydroxyketone photopolymerization initiator (C2).
    The photosensitive resin composition of any one of Claims 1 thru | or 7.
  9.  前記光重合開始剤(C)は、ビス(ジエチルアミノ)ベンゾフェノン(C3)を含有する、
     請求項1乃至8のいずれか1項に記載の感光性樹脂組成物。
    The photopolymerization initiator (C) contains bis (diethylamino) benzophenone (C3).
    The photosensitive resin composition of any one of Claims 1 thru | or 8.
  10.  請求項1乃至9のいずれか1項に記載の感光性樹脂組成物の乾燥物である、
     ドライフィルム。
    It is a dried product of the photosensitive resin composition according to any one of claims 1 to 9.
    Dry film.
  11.  請求項1乃至9のいずれか1項に記載の感光性樹脂組成物の硬化物を含む層間絶縁層を備える、
     プリント配線板。
    An interlayer insulating layer containing a cured product of the photosensitive resin composition according to any one of claims 1 to 9,
    Printed wiring board.
  12.  請求項1乃至9のいずれか1項に記載の感光性樹脂組成物の硬化物を含むソルダーレジスト層を備える、
     プリント配線板。
    A solder resist layer comprising a cured product of the photosensitive resin composition according to any one of claims 1 to 9,
    Printed wiring board.
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TWI656403B (en) 2019-04-11
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TW201704858A (en) 2017-02-01
KR20170102307A (en) 2017-09-08

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