TW201613732A - Substrate conveyor robot and method for operating same - Google Patents

Substrate conveyor robot and method for operating same

Info

Publication number
TW201613732A
TW201613732A TW104121750A TW104121750A TW201613732A TW 201613732 A TW201613732 A TW 201613732A TW 104121750 A TW104121750 A TW 104121750A TW 104121750 A TW104121750 A TW 104121750A TW 201613732 A TW201613732 A TW 201613732A
Authority
TW
Taiwan
Prior art keywords
pulley
arms
conveyor robot
substrate conveyor
operating same
Prior art date
Application number
TW104121750A
Other languages
English (en)
Other versions
TWI581929B (zh
Inventor
Isao Kato
Iori Kurata
Masayuki Saito
Hirohiko Goto
Original Assignee
Kawasaki Heavy Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Heavy Ind Ltd filed Critical Kawasaki Heavy Ind Ltd
Publication of TW201613732A publication Critical patent/TW201613732A/zh
Application granted granted Critical
Publication of TWI581929B publication Critical patent/TWI581929B/zh

Links

Classifications

    • H10P72/7602—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • H10P72/3202—
    • H10P72/33—
    • H10P72/3302—
    • H10P72/3402—

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW104121750A 2014-10-10 2015-07-03 Substrate transfer robot and its operation method TWI581929B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2014/077170 WO2016056119A1 (ja) 2014-10-10 2014-10-10 基板搬送ロボットおよびその運転方法

Publications (2)

Publication Number Publication Date
TW201613732A true TW201613732A (en) 2016-04-16
TWI581929B TWI581929B (zh) 2017-05-11

Family

ID=55652774

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104121750A TWI581929B (zh) 2014-10-10 2015-07-03 Substrate transfer robot and its operation method

Country Status (6)

Country Link
US (1) US10269613B2 (zh)
JP (1) JP6453353B2 (zh)
KR (1) KR102075827B1 (zh)
CN (1) CN106796907B (zh)
TW (1) TWI581929B (zh)
WO (1) WO2016056119A1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
CN106463438B (zh) * 2014-01-28 2019-09-10 布鲁克斯自动化公司 基板运输设备
JP6701007B2 (ja) * 2016-06-27 2020-05-27 川崎重工業株式会社 ワーク保持機構
TWI724971B (zh) 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
JP7183635B2 (ja) * 2018-08-31 2022-12-06 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
JP7638906B2 (ja) * 2019-05-21 2025-03-04 パーシモン テクノロジーズ コーポレイション 非対称のデュアルエンドエフェクタロボットアーム
US11850742B2 (en) * 2019-06-07 2023-12-26 Applied Materials, Inc. Dual robot including splayed end effectors and systems and methods including same
JP6880519B2 (ja) 2019-11-11 2021-06-02 株式会社安川電機 ロボットシステム、ロボットの制御方法、半導体製造システム
TWI834061B (zh) * 2021-09-10 2024-03-01 鴻勁精密股份有限公司 載送機構及其應用之輸送裝置、作業機
WO2023188177A1 (ja) * 2022-03-30 2023-10-05 平田機工株式会社 基板搬送システム及び移載ロボット制御装置
JP2024106800A (ja) * 2023-01-27 2024-08-08 ニデックインスツルメンツ株式会社 ロボットシステムおよび産業用ロボットの制御方法
US20250033156A1 (en) * 2023-07-28 2025-01-30 Applied Materials, Inc. Swapper for a cluster tool
US20260008175A1 (en) * 2024-07-08 2026-01-08 Persimmon Technologies Corporation Extended-Reach High-Throughput Material-Handling Robot

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JPH05109866A (ja) 1991-10-16 1993-04-30 Nec Corp ウエハ移載ロボツト
JPH11188670A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
JP2000072248A (ja) * 1998-08-27 2000-03-07 Rorze Corp 基板搬送装置
US6986261B2 (en) 2002-11-15 2006-01-17 Tokyo Electron Limited Method and system for controlling chiller and semiconductor processing system
JP2004288719A (ja) * 2003-03-19 2004-10-14 Tokyo Electron Ltd 基板搬送装置及び基板処理装置
JP2006049530A (ja) 2004-08-04 2006-02-16 Sharp Corp 基板のロット編成装置
JP4473075B2 (ja) 2004-08-27 2010-06-02 川崎重工業株式会社 搬送ロボットおよびそのアーム構造体
JP4970128B2 (ja) * 2007-04-27 2012-07-04 日本電産サンキョー株式会社 産業用ロボット及び集合処理装置
CN103053017B (zh) 2010-08-24 2015-09-02 株式会社爱发科 输送装置
KR102427795B1 (ko) * 2010-11-10 2022-08-01 브룩스 오토메이션 인코퍼레이티드 기판 처리 장치 및 기판 운송 장치
KR102879642B1 (ko) * 2011-03-11 2025-10-30 브룩스 오토메이션 인코퍼레이티드 기판 처리 장치
JP6110612B2 (ja) * 2012-07-19 2017-04-05 川崎重工業株式会社 基板搬送装置
JP5990359B2 (ja) * 2012-10-04 2016-09-14 平田機工株式会社 搬入出ロボット
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CN105579201B (zh) * 2014-09-03 2018-03-09 株式会社爱发科 运送装置以及真空装置
TWI724971B (zh) * 2016-06-28 2021-04-11 美商應用材料股份有限公司 包括間隔上臂與交錯腕部的雙機器人以及包括該者之系統及方法
US10099377B2 (en) * 2016-06-29 2018-10-16 Applied Materials, Inc. Methods and systems providing misalignment correction in robots

Also Published As

Publication number Publication date
WO2016056119A1 (ja) 2016-04-14
US20170294335A1 (en) 2017-10-12
KR20170063957A (ko) 2017-06-08
JP6453353B2 (ja) 2019-01-16
US10269613B2 (en) 2019-04-23
CN106796907B (zh) 2020-04-03
KR102075827B1 (ko) 2020-02-10
JPWO2016056119A1 (ja) 2017-07-20
TWI581929B (zh) 2017-05-11
CN106796907A (zh) 2017-05-31

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