TW201529456A - 空浮搬運裝置 - Google Patents

空浮搬運裝置 Download PDF

Info

Publication number
TW201529456A
TW201529456A TW103128097A TW103128097A TW201529456A TW 201529456 A TW201529456 A TW 201529456A TW 103128097 A TW103128097 A TW 103128097A TW 103128097 A TW103128097 A TW 103128097A TW 201529456 A TW201529456 A TW 201529456A
Authority
TW
Taiwan
Prior art keywords
air supply
plate
port
suction
holes
Prior art date
Application number
TW103128097A
Other languages
English (en)
Chinese (zh)
Inventor
Koich Tsunoda
Akihiko Ito
Takahiro Yasuda
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of TW201529456A publication Critical patent/TW201529456A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW103128097A 2013-08-22 2014-08-15 空浮搬運裝置 TW201529456A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013172730A JP6226419B2 (ja) 2013-08-22 2013-08-22 浮上搬送装置

Publications (1)

Publication Number Publication Date
TW201529456A true TW201529456A (zh) 2015-08-01

Family

ID=52483560

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103128097A TW201529456A (zh) 2013-08-22 2014-08-15 空浮搬運裝置

Country Status (3)

Country Link
JP (1) JP6226419B2 (ja)
TW (1) TW201529456A (ja)
WO (1) WO2015025784A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11214449B2 (en) 2017-07-11 2022-01-04 Corning Incorporated Glass processing apparatus and methods

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10513011B2 (en) * 2017-11-08 2019-12-24 Core Flow Ltd. Layered noncontact support platform
US10745215B2 (en) 2018-12-27 2020-08-18 Core Flow Ltd. Port arrangement for noncontact support platform
KR102396254B1 (ko) * 2021-11-17 2022-05-09 황희진 디스플레이 패널 부상 스테이지
KR102396243B1 (ko) * 2021-11-17 2022-05-09 황희진 세척수단을 갖는 디스플레이 패널 부상 스테이지 및 이의 세척방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1776300A4 (en) * 2004-04-14 2011-05-11 Coreflow Scient Solutions Ltd NON-CONTACT SUPPORT PLATFORMS FOR SETTING THE DISTANCE
JP4554397B2 (ja) * 2005-02-23 2010-09-29 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4664117B2 (ja) * 2005-03-03 2011-04-06 住友重機械工業株式会社 搬送物浮上ユニット、搬送物浮上装置、及びステージ装置
JP4553376B2 (ja) * 2005-07-19 2010-09-29 東京エレクトロン株式会社 浮上式基板搬送処理装置及び浮上式基板搬送処理方法
JP2007238193A (ja) * 2006-03-06 2007-09-20 Kanto Auto Works Ltd 物品の搬送装置
JP5312760B2 (ja) * 2007-07-18 2013-10-09 住友重機械工業株式会社 搬送物浮上装置及びこれを用いたステージ装置
EP2250109B1 (en) * 2008-03-11 2015-01-14 Coreflow Ltd. Method and system for locally controlling support of a flat object
KR100985135B1 (ko) * 2008-11-05 2010-10-05 세메스 주식회사 기판 처리 장치
JP5819859B2 (ja) * 2011-01-14 2015-11-24 オイレス工業株式会社 非接触搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11214449B2 (en) 2017-07-11 2022-01-04 Corning Incorporated Glass processing apparatus and methods
TWI791553B (zh) * 2017-07-11 2023-02-11 美商康寧公司 玻璃加工設備及方法

Also Published As

Publication number Publication date
JP2015040105A (ja) 2015-03-02
JP6226419B2 (ja) 2017-11-08
WO2015025784A1 (ja) 2015-02-26

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