TW201529456A - Levitation transportation device - Google Patents

Abstract

Provided is a levitation transportation device having simple pipework for discharging compressed gas from a conveyance surface. A plurality of discharge ports (301) are formed on the conveying surface (300) of an inward/outward conveying rail (3) and a plurality of intake ports (311) are formed on the rear surface (310) of the inward/outward conveying rail (3), and the discharge ports (301) and the intake ports (311) are linked by an intake channel (lattice-shaped groove (314)) inside the inward/outward conveying rail (3). An intake manifold (5) is installed on the rear surface (310) side of the inward/outward conveying rail (3), and intake port linking ports (505) corresponding to the intake ports (311) on the rear surface (310) of the inward/outward conveying rail (3) are formed on intake square pipe parts (500) of the intake manifold (5), and the intake port linking ports (505) are linked to the corresponding intake ports (311) through joints (9). At least one intake nipple attachment port (506) to which is attached an intake nipple (70a) connected to an intake hose (7a), is formed in the intake square pipe parts (500).

Description

Airborne handling device

The present invention relates to an airborne transport device that transports a thin plate-shaped transport object in a non-contact manner.

Among the production lines and the like, an empty floating conveyance device that conveys a thin plate-shaped conveyance object such as a glass substrate from a conveyance surface of a conveyance rail and conveys it in a non-contact manner is known. For example, Patent Document 1 discloses an air-floating transport device that can optimize the air-lifting height and posture of a transport target with respect to a transport surface of a transport rail, and improve the efficiency of the compressed gas. In the air-floating and transporting device, a plurality of compressed gas discharge ports are formed on the conveying surface of the conveying rail, and the conveying surface is partitioned into a plurality of empty floating regions in the conveying direction, and the air-fueling region can be independently controlled from the compressed gas spray. The discharge pressure of the compressed gas at the outlet.

[Previous Technical Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-190890

[Summary of the Invention]

In general, the air-floating conveying device is formed inside a conveyance rail, and a plurality of flow passages that are connected to a plurality of compressed gas discharge ports formed on the conveyance surface of the conveyance rail are formed, and the inside of the conveyance rail (the surface opposite to the conveyance surface) A gas supply port connected to the flow path is formed. A gas supply pipe joint is installed at the gas supply port, and the gas supply pipe joint is connected to the hose of the gas supply pump, and the gas supply port supplies the compressed gas.

Here, in order to make the pressure of the compressed gas discharged from each compressed gas discharge port, that is, the pressure of the compressed gas in the flow path uniform, a plurality of gas supply ports are formed to be dispersed and disposed on the inside of the conveyance rail. The gas supply ports are respectively installed at the gas supply ports, and the hoses of the gas supply pumps must be connected to the gas supply pipe joints. Further, in order to make the pressure of the compressed gas supplied to each of the air supply ports uniform, it is necessary to adjust the length of the air supply pump hose or to adjust the maneuverability of the air supply pump in a limited space. Therefore, in the conventional air-floating apparatus, when the number of intake ports is increased due to the increase in the size of the apparatus, the number of parts of the required air supply pipe joint and the hose is increased, and the cost is increased from the transport rail. The piping for discharging compressed gas on the conveying surface is very complicated. Moreover, the use of a slender hose for gas supply can cause pressure loss.

The present invention has been made in view of the above circumstances, and an object of the invention is to provide an air-floating conveying apparatus which is easy to operate a pipe for discharging compressed air from a conveying surface, has reduced pressure loss, and is low in cost.

In order to solve the problem, the air-floating conveying device of the present invention is a discharge port in which a plurality of compressed gases are formed on a conveying surface of a loading/unloading rail, and a plurality of compressed gases are formed on a conveying rail on the opposite side of the conveying surface. The air supply port, the discharge ports and the air supply ports are coupled to each other through a flow path formed in the conveyance rail. Further, a manifold is provided on the inner side of the conveyance rail, and a plurality of air supply port connection ports respectively corresponding to the plurality of air supply ports formed on the inner side of the conveyance rail are formed on the upper surface of the manifold opposite to the inside of the conveyance rail. The gas supply port connection ports are connected to the respective gas supply ports. An air supply pipe joint mounting port is formed in the manifold, and an air supply pipe joint for connecting the air supply hose is installed at the air supply pipe joint mounting port.

For example, the present invention is an air transport device that transports a transport object in a non-contact manner in a transport direction, and includes a transport rail and a gas supply manifold having a plurality of compressed gas discharge ports formed therein. a surface of the gas supply port on which the plurality of compressed gases are formed on the opposite side of the conveying surface; and a plurality of the discharge ports formed on the conveying surface and a plurality of the gas supply ports formed in the inner surface Air supply,

The air supply manifold includes: a plurality of air supply port connection ports respectively corresponding to the plurality of air supply ports, and an air supply pipe joint for connecting a hose for connecting the air supply pump, opposite to the inner surface of the conveyance rail; And a smaller number of air supply pipe joint mounting ports than the above-mentioned air supply connection ports.

According to the present invention, the plurality of air supply ports formed in the transport rail are respectively coupled to the air supply port connection ports of the corresponding manifolds, and the air supply pipe of the air supply pump and the air supply pipe of the air supply pipe joint mounting port of the manifold are installed. Connector connection. Therefore, it is not necessary to separately install the air supply pipe joints at a plurality of air supply ports formed in the transport rail, and it is not necessary to connect the hoses of the air supply pumps to the respective air supply pipe joints. Therefore, it is possible to reduce the burden and cost of discharging the control pipe for the compressed gas from the conveying surface, and to reduce the pressure loss of the air supply passage.

1‧‧‧Air handling device

2‧‧‧Handling track

3‧‧‧ moving out of orbit

4‧‧‧Operating track

5‧‧‧ gas supply manifold

6‧‧‧ gas supply and suction tube

7a, 7b‧‧‧ gas supply hose

8‧‧‧Attraction hose

9‧‧‧Connector

30‧‧‧First move-in board

31‧‧‧Second moving in and out board

32, 43‧‧‧ throttle board

40‧‧‧First work board

41‧‧‧second work board

42‧‧‧ third working board

50‧‧‧Two rows of grooved aluminum frames

51‧‧‧End plate

52‧‧‧With leaf spring T-shaped nut

53‧‧‧Bolts

54‧‧‧Air supply pipe joint installation fixture

55‧‧‧Bolts

56‧‧‧Washers

57a, 57b, 57c, 57d, 57e, 57f‧‧ o ring

60‧‧‧Three rows of grooved aluminum frame

61‧‧‧End board

62‧‧‧With leaf spring T-shaped nut

63‧‧‧ bolt

64‧‧‧Gas and suction pipe joint installation fixture

65‧‧‧ bolt

70a, 70b‧‧‧ gas supply pipe joints

80‧‧‧Attraction pipe joint

90‧‧‧ connector joint body

91‧‧‧The flange of the joint

300‧‧‧The first transport surface for loading and unloading boards

301‧‧‧The first discharge port for loading and unloading boards

302‧‧‧The first through hole for exhausting the inlet and outlet panels

303‧‧‧First move inside and out of the board

304‧‧‧The first through hole for the discharge of the inlet and outlet panels

310‧‧‧The second move out of the inside of the board

311‧‧‧Two air inlets for loading and unloading boards

312‧‧‧The through hole for exhaust of the second loading and exiting plate

313‧‧‧Second second moving out of the board

314‧‧‧The second trough of the loading and unloading board

315‧‧‧through air supply through hole for the second loading and exiting board

400‧‧‧Transport surface of the first work board

401‧‧‧ spout of the first working board

402‧‧‧The suction port of the first work board

403‧‧‧The inside of the first work board

404‧‧‧through hole for the discharge of the first work plate

405‧‧‧through hole for attraction of the first work board

410‧‧‧The inside of the second work board

411‧‧‧ gas supply port for the second working plate

412‧‧‧Exhaust port of the second working plate

413‧‧‧Top of the second work board

414‧‧‧through hole for gas supply for the second working plate

415‧‧‧ trench for the second working plate

416‧‧‧through hole for exhaust of the second working plate

420‧‧‧Top of the third work board

421‧‧‧through hole for the discharge connection of the third work plate

422‧‧‧through hole for suction connection of the third work plate

423‧‧‧The inside of the third work board

424‧‧‧The groove of the third working plate

500‧‧‧Two rows of grooved aluminum frame for gas supply angle tube

501‧‧‧Two rows of grooved aluminum frames for the upper part of the supply angle tube

502‧‧‧Two rows of grooved aluminum frames for the bottom of the angle tube for gas supply

503‧‧‧T-shaped groove of two rows of grooved aluminum frames

504‧‧‧Two columns of grooved aluminum frame corner posts

505‧‧‧Two-row grooved aluminum frame air supply port for the air supply port

506‧‧‧Two-row grooved aluminum frame for air supply pipe joints for air supply pipe joints

507‧‧‧Two-row through-hole for bolt insertion in the corner post of the grooved aluminum frame

508‧‧‧through holes for the corner posts of two rows of grooved aluminum frames

540‧‧‧Top of the air supply pipe joint mounting fixture

541‧‧‧Round groove

542‧‧‧Air supply pipe fitting hole

600a‧‧‧Three-row grooved aluminum frame for gas supply angle tube

600b‧‧‧Three-row grooved aluminum frame for suction angle tube

601a‧‧‧Three rows of three-row grooved aluminum frame for the upper part of the angle tube

601b‧‧‧Three-row grooved aluminum frame for the upper part of the suction angle tube

602a‧‧‧Three rows of grooved aluminum frame for the bottom of the angle tube for gas supply

602b‧‧‧Three rows of grooved aluminum frame for the lower part of the suction angle tube

603‧‧‧T-shaped groove of three rows of grooved aluminum frame

604‧‧‧Three columns of grooved aluminum frame corner posts

605a‧‧‧Three-row grooved aluminum frame air supply port for air supply port

605b‧‧‧Exhaust port connection port for the angle tube part of the three-row grooved aluminum frame

606a‧‧‧Three-row grooved aluminum frame for air supply pipe joints for air supply pipe joints

606b‧‧‧Three-row grooved aluminum frame for suction pipe joint installation mouth

607‧‧‧through hole for bolt insertion in the corner post of three rows of grooved aluminum frames

608‧‧‧through holes for the corner posts of three rows of grooved aluminum frames

640‧‧‧Air supply and suction pipe joint mounting fixture

641, 642‧‧‧ annular groove

643‧‧‧Air supply pipe fitting hole

644‧‧‧Attraction fitting mounting hole

910‧‧‧ peripheral surface of the joint body

911‧‧ ‧ one end of the joint body

912‧‧‧The other end of the joint body

Fig. 1 is a front elevational view of an air-floating conveying device 1 according to an embodiment of the present invention.

Fig. 2 is a rear elevational view of the idling transport device 1 shown in Fig. 1.

3(A) is a cross-sectional view taken along line A-A of the idling transport device 1 shown in Fig. 1, and Fig. 3(B) is a cross-sectional view taken along line B-B of the idling transport device 1 shown in Fig. 1.

4(A) is a magnified view of a portion A of the idling transport device 1 shown in Fig. 3(A), and Fig. 4(B) is a vacant transport device 1 shown in Fig. 3(B). A magnified view of Part B.

Fig. 5 is a magnified view of a portion C of the idling transport device 1 shown in Fig. 3(A), and Fig. 5(B) is a vacant transport device 1 shown in Fig. 3(B). Magnified view of Part D.

Fig. 6(A) is a front view of the first carry-in/out board 30 which is a component of the carry-in rail 3, and Fig. 6(B) is a sixth view. (A) is a cross-sectional view taken along the line C-C of the first carry-in/out board 30, and Fig. 6(C) is a rear view of the first carry-in/out board 30 shown in Fig. 6(A).

Fig. 7(A) is a front view of the second carry-in/out board 31 which is a component of the carry-in rail 3, and Fig. 7(B) is a second carry-out shown in Fig. 7(A). The DD sectional view of the inlet plate 31, and the seventh (C) drawing is a rear view of the second loading/unloading plate 31 shown in Fig. 7(A).

Fig. 8(A) is a front view of the first working plate 40 constituting the component of the work rail 4, and Fig. 8(B) is a first working plate shown in Fig. 8(A). The EE sectional view of 40, and the eighth (C) drawing is a rear view of the first working plate 40 shown in Fig. 8(A).

Fig. 9(A) is a front view of the third working plate 42 constituting the component of the working rail 4, and Fig. 9(B) is a third working plate shown in Fig. 9(A). A GG sectional view of 42 and a 9th (C) drawing are rear views of the third working plate 42 shown in Fig. 9(A).

Fig. 10 is a front view of the second working plate 41 constituting the components of the work rail 4, and Fig. 10(B) is a second working plate shown in Fig. 10(A). A FF sectional view of 41, and a 10th (C) drawing is a rear view of the second working plate 41 shown in Fig. 10(A).

Fig. 11(A) is a front view of the two rows of grooved aluminum frames 50 constituting the components of the air supply manifold 5, and Fig. 11(B) is the two of the 11(A) drawings. HH sectional view of the column groove type aluminum frame 50, the eleventh (C) is a cross-sectional view of the two rows of the grooved aluminum frame 50 shown in Fig. 11(A), and Fig. 11(D) is a JJ of the two rows of the grooved aluminum frame 50 shown in Fig. 11(A). Cutaway view.

Fig. 12(A) is a front view of a three-row groove type aluminum frame 60 which is a component of the air supply and suction manifold 6, and Fig. 12(B) shows a figure 12(A). The JJ cross-sectional view of the three-row grooved aluminum frame 60, the 12th (C) view is the KK cross-sectional view of the three-row grooved aluminum frame 60 shown in Fig. 12(A), and the 12th (D) is the 12th ( A) is a LL cross-sectional view of the three-row grooved aluminum frame 60 shown in the figure, and a MM cross-sectional view of the three-row grooved aluminum frame 60 shown in Fig. 12(A) is shown in Fig. 12(E).

13(A) and 13(B) of Fig. 13 are a top view and a front view of the joint 9, and Fig. 13(C) is a N-N cross-sectional view of the joint 9 shown in Fig. 13(B).

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. For convenience of explanation, the conveyance direction is defined as the X direction, and the direction perpendicular to the conveyance direction is defined as the Y direction, and the directions are appropriately shown in the respective drawings.

1 and 2 are front and rear views of the air-floating transport device 1 according to the embodiment of the present invention, and FIGS. 3(A) and 3(B) are the air-floating transport device 1 shown in FIG. AA cross-sectional view and BB cross-sectional view. Further, Fig. 4(A) is an enlarged view of a portion A of the idling transport device 1 shown in Fig. 3(A), and Fig. 4(B) is a third (B) chart. An enlarged view of the B portion of the idling transport device 1 is shown, and Fig. 5(A) is an enlarged view of a C portion of the idling transport device 1 shown in Fig. 3(A), and Fig. 5(B) is a third (Fig. 5) B) An enlarged view of a portion D of the idling transport device 1 shown in the drawing.

In the idling conveyance device 1 of the present embodiment, a thin plate-shaped conveyance target such as a large-sized glass substrate used for a flat display panel such as a liquid crystal display panel or a plasma display panel is transported in a non-contact manner. As shown in the figure, the air-floating transport device 1 includes a transport rail 2 for transporting the transport target from the transport surfaces 300 and 400 and transporting them in a non-contact manner; and the air supply hoses 7a and 7b are connected to each other (not shown). The air supply pump 8 is connected to a suction pump (not shown), and the air supply manifold 5 is configured to introduce the compressed gas supplied from the air supply pump into the transport rail 2 through the air supply hose 7a; The suction manifold 6 also introduces the compressed gas supplied from the air supply pump into the conveyance rail 2 through the air supply hose 7b, and the negative pressure generated by the suction of the suction pump through the suction hose 8 from the conveyance rail. (2) Inhalation; and a joint 9 for connecting the gas supply manifold 5 and the gas supply and suction manifold to the conveyance rail 2.

The conveyance rail 2 includes a work rail 4 that is disposed in the work area 2a such as a resist coating to be transported, and a transport area 2b that is disposed in front of each of the work areas 2a in the transport direction (X direction) and is located at the rear. The carry-in/out track 2 of the carry-out area 2c. Here, in the work area 2a, it is required to maintain a high-precision floating amount of the conveyance target. On the other hand, in the carry-in area 2b and the carry-out area 2c, the required crystallinity of the air floating amount of the transport target is lower than the work area 2a.

The loading/unloading rail 3 includes a first loading/unloading plate 30 having a conveying surface 300, and a second loading/unloading plate 31 which is superposed on the opposite side of the conveying surface 300 from the first loading/unloading plate 3 and the throttle plate 32. It is disposed between the first carry-in/out board 30 and the second carry-in/out board 31. A plurality of compressed gas discharge ports 301 and exhaust through holes 302 are formed in the conveying surface 300 of the first loading/unloading plate 30, and are disposed inside the second loading/unloading plate 31 (located in the first loading/unloading plate 30). On the opposite side of the conveying surface 300, a surface 310 that is not overlapped with the first loading/unloading plate 30, a plurality of compressed gas supply ports 311 and exhaust through holes 312 are formed. Further, in the drawing, only a part of the discharge port 301, the exhaust through hole 302, the air supply port 311, and the exhaust through hole 312 are given symbols for simplification.

6(A) is a front view of the first carry-in/out board 30, and FIG. 6(B) is a CC cross-sectional view of the first carry-in/out board 30 shown in FIG. 6(A), and FIG. 6(C) The rear view of the first carry-in/out board 30 shown in Fig. 6(A).

As shown in the figure, a plurality of discharge ports 301 and a plurality of exhaust through holes 302 are alternately arranged in a lattice shape on the conveyance surface 300 of the first carry-in/out board 30. Here, the direction in which the discharge port 301 and the exhaust through-hole 302 are arranged (the A1 direction in the sixth (A) diagram) is preferably inclined with respect to the conveyance direction (X direction). As described above, when the arrangement direction of the discharge port 301 and the exhaust through hole 302 is set to be parallel or perpendicular to the conveyance direction, the discharge port 301 and the exhaust passage for the vertical direction (Y direction) of the conveyance direction can be improved. By arranging the density of the holes 302, the conveyance target can be conveyed more stably in the conveyance direction.

In addition, the first loading/unloading plate 30 is formed in each of the discharge ports 301 formed on the conveying surface 300, and is formed on the inner surface (the surface facing the second loading/unloading plate 31) that penetrates the surface opposite to the conveying surface 300. The discharge through hole 304 is connected to the discharge port 301 in the surface 300. Here, the discharge through hole 304 is a through hole having a larger inner diameter than the inner diameter of the side of the conveyance surface 300 on the inner surface 303 side of the first carry-in/out plate 30, and can be compressed from the discharge port 301. The gas imparts a moderate throttling effect. Further, in the drawing, only a part of the discharge through-holes 304 are given symbols for simplification.

Fig. 7(A) is a front view of the second carry-in/out board 31, and Fig. 7(B) is a DD cross-sectional view of the second carry-in/out board 31 shown in Fig. 7(A), and Fig. 7(C) The rear view of the second carry-in/out board 31 shown in Fig. 7(A).

As shown in the figure, the upper surface 313 of the surface opposite to the inner surface 310 of the second loading/unloading plate 31 (the surface facing the first loading/unloading plate 30) penetrates through a plurality of through holes for the exhaust gas formed in the inner surface 310. 312 corresponds to the plurality of exhaust through holes 302 formed in the first carry-in/out board 30, and the upper surface 313 of the inner surface 310 of the second carry-in/out board 31 is opposite to the inner surface 303 of the first carry-in/out board 30. When the second carry-in/out board 31 is superposed on the first carry-in/out board 30 at a predetermined position, it is provided at a position that is connected to the exhaust through hole 302 of the corresponding first work board 40.

Further, in the inner surface 310 of the second carry-in/out board 31, the plurality of air supply ports 311 are formed in the vertical direction (Y direction) along the conveyance direction. The plural column arrangement. Further, although not shown, the inner surface 310 of the second loading/unloading plate 31 is formed with screw holes for fixing the air supply manifold 5 at both sides of the row of the air supply ports 311.

On the upper surface 313 of the second carry-in/out board 31, a lattice-like groove 314 disposed in the inner surface 303 of the first carry-in/out board 30 corresponding to the discharge through hole 304 is formed. The lattice-shaped groove 314 overlaps the second carry-in/out board 31 on the first carry-in/out board 30 so that the upper surface 313 of the second carry-in/out board 31 is opposite to the inner side 303 of the first carry-in/out board 30. This is connected to a plurality of discharge through holes 304 formed in the first carry-in/out board 30.

Further, the second carry-in/out board 31 is formed with an air supply through hole 315 that connects the air supply port 311 and the groove 314 formed in the upper surface 313 to each of the air supply ports 311 formed in the inner surface 310. The second loading/unloading plate 31 and the first loading/unloading plate 30 are overlapped with the upper surface 313 of the second loading/unloading plate 31 so as to face the inner surface 303 of the first loading/unloading plate 30, thereby forming the second The groove 314 of the upper surface 313 of the loading and unloading plate 31 has a compressed gas supplied from the air supply port 311 formed in the inner surface 310 of the second loading/unloading groove 31 from the conveying surface 300 formed on the first loading/unloading plate 30. The discharge port 301 discharges the function of the air supply passage.

Although not disclosed, a plurality of flow holes penetrating through holes in the thickness direction are formed in the throttle plate 32. The throttle plate 32 is disposed between the discharge through-hole 304 of the first carry-in/out board 30 and the groove 314 of the second carry-in/out board 31, and the exhaust through hole of the first carry-in/out board 30. 302 and between the exhaust through holes 312 of the second carry-in/out board 31, This allows an appropriate throttling effect to be applied to the compressed gas discharged from the discharge port 301 of the conveyance surface 300 of the first carry-in/out plate 30 and the gas flowing into the exhaust through hole 302 of the first carry-in/out plate 30.

The work rail 4 includes a first work plate 40 having a conveyance surface 400, a second work plate 41 that is located on the opposite side of the conveyance surface 400 with respect to the first work plate 40, and is disposed in the first work. The third working plate 42 between the plate 40 and the second working plate 41; and the throttle plate 43 disposed between the first working plate 40 and the third working plate 42 are formed. A plurality of compressed gas discharge ports 401 and suction ports 402 are formed on the conveying surface 400 of the first working plate 40, and are located on the inside of the second working plate 41 (in the opposite direction to the conveying surface 400 of the first working plate 40) The side faces 410 are formed with a plurality of air supply ports 411 and exhaust ports 412, respectively. Further, in the drawing, only a part of the discharge port 401 and the suction port 402 are given symbols for simplification.

Fig. 8(A) is a front view of the first working plate 40, and Fig. 8(B) is a EE sectional view of the first working plate 40 shown in Fig. 8(A), and Fig. 8(C) is a view 8(A) is a rear view of the first work panel 40.

As shown in the figure, a plurality of ejection ports 401 and a plurality of suction ports 402 are alternately arranged in a lattice shape on the conveying surface 400 of the first working plate 40. Here, the arrangement direction of the discharge port 401 and the suction port 402 (the A2 direction in the eighth (A) view) is the same as the arrangement direction A1 of the discharge port 301 and the exhaust through hole 302 shown in FIG. 6(A). It is preferable to incline with respect to the conveyance direction (X direction). By the above, with the discharge port 401 and When the arrangement direction of the suction ports 402 is set to be parallel or perpendicular to the conveyance direction, the arrangement density of the discharge port 401 and the suction port 402 in the vertical direction (Y direction) of the conveyance direction can be increased, whereby the conveyance port can be more stably conveyed. Handling of the object to be transported in the direction.

Further, the first working plate 40 is connected to the inside of the surface (the surface facing the third working plate 41) 403 which is formed on the surface opposite to the conveying surface 400 in each of the discharge ports 401 formed on the conveying surface 400. The through hole 404 for discharging the discharge port 401 of the surface 400. The discharge through hole 404 is a through hole having an inner diameter on the inner surface 403 side of the first operation plate 40 larger than the inner diameter on the side of the conveyance surface 400, and an appropriate section can be applied to the compressed gas discharged from the discharge port 401. Flow effect. Further, the first working plate 40 is formed with a suction through hole 405 that is connected to the suction port 402 of the conveying surface 400 so as to penetrate into the respective suction ports 402 of the conveying surface 400. The suction through hole 405 is a through hole having an inner diameter on the inner surface 403 side of the first working plate 40 larger than the inner diameter on the side of the conveying surface 400, and an appropriate throttling effect can be imparted to the gas sucked by the suction port 402. Further, in the drawing, only a part of the discharge through hole 404 and the suction through hole 405 are given symbols for simplification.

Fig. 9(A) is a front view of the third working plate 42, and Fig. 9(B) is a GG sectional view of the third working plate 42 shown in Fig. 9(A), and Fig. 9(C) is the first 9(A) is a rear view of the third work panel 42.

As shown in the figure, the third working plate 42 is formed in each of the suction through holes 405 formed in the first working plate 40. One surface (upper surface) 420 opposite to the inner surface 403 of the industrial panel 40, and a suction connection through hole 422 located on the other surface (inside) 423 of the opposite side of the upper surface 420 facing the second working plate 41 . The suction connecting through hole 422 is such that the upper surface 420 of the third working plate 42 faces the inner surface 403 of the first working plate 40, and the third working plate 42 is superposed on the first working plate 40 at a predetermined position. In this case, it is provided at a position that is connected to the suction through hole 405 of the corresponding first work plate 40.

Further, the upper surface 420 of the third working plate 42 is formed with a lattice-like groove 424 disposed in the inner surface 403 of the first working plate 40 corresponding to the discharge through hole 404. The lattice-shaped groove 424 is such that the upper surface 420 of the third working plate 42 faces the inner surface 403 of the first working plate 40, and the third working plate 42 is superposed on the first working plate 40 at a predetermined position. Thereby, it is connected to the plurality of discharge through holes 404 formed in the first working plate 40. Further, at least one of the discharge connection through holes 421 penetrating through the groove bottom and the inner surface 423 of the groove 424 formed in the upper surface 420 is formed in the third operation plate 42. Thereby, the upper surface 420 of the third working plate 42 is opposed to the inner surface 403 of the first working plate 40, and the third working plate 42 is superposed on the first working plate 40 at a predetermined position. The groove 424 of the upper surface 420 of the three-working plate has a function as an air supply passage for supplying compressed gas to the discharge connection through hole 421 from the discharge port 401 formed in the conveyance surface 400 of the first operation plate 40. Further, in the drawing, only a part of the discharge connection through hole 421 and the suction connection through hole 422 are given symbols for simplification.

Figure 10(A) is a front view of the second work board 41, Fig. 10(B) is a cross-sectional view taken along line F-F of the second working plate 41 shown in Fig. 10(A), and Fig. 10(C) is a rear view of the second working plate 41 shown in Fig. 10(A).

As shown in the figure, in the inner surface 410 of the second working plate 41, a plurality of air supply ports 411 are arranged in a line in the vertical direction (Y direction) along the conveyance direction. Similarly, the plurality of exhaust ports 412 are also arranged in a row from the row of the air supply ports 411 at a predetermined interval in the vertical direction (Y direction) along the transport direction. Further, although not shown, in the inner surface 410 of the second working plate 41, for example, a gas supply is formed between the row of the air supply port 411 and the row of the exhaust port 412 and at both sides of the rows. A screw hole for fixing the manifold 6 is attracted.

Further, the second working plate 41 is formed with the upper surface (the surface facing the third working plate 42) 413 and the inner surface 410 of the surface on the opposite side of the inner surface 410 in each of the air supply ports 411 formed in the inner surface 410. The gas supply through hole 414 to which the gas supply port 411 is connected. Here, the air supply port 411 corresponds to the plurality of discharge connection through holes 421 formed in the third work plate 42, and the second work plate 41 and the third work plate are overlapped at predetermined positions so that the second operation is performed. When the upper surface 413 of the plate 41 faces the inner surface 423 of the third working plate 42, the air supply through hole 414 connected to the air supply port 411 is a discharge connecting through hole corresponding to the air supply port 411. The location of the 421 link.

On the upper surface 413 of the second working plate 41, a lattice-like groove 415 corresponding to the arrangement of the suction connecting through holes 422 in the inner surface 423 of the third working plate 42 is formed. The grid-like groove 415 is at a predetermined The position of the second work plate 41 is overlapped with the third work plate 42 such that the upper surface 413 of the second work plate 41 faces the inner surface 423 of the third work plate 42, thereby forming the third work plate A plurality of suction connection plugs 42 are connected by a through hole 422. Further, the second working plate 41 is formed with an exhaust through hole 416 that is formed in the exhaust port 412 formed in the inner surface 410 and that is connected to the groove 415 formed on the upper surface 413 and the exhaust port 412. Thereby, the second work plate 41 is superposed on the third work plate 42 at a predetermined position such that the upper surface 415 of the second work plate 41 and the inner surface 423 of the third work plate 42 face each other, thereby being formed in the first The groove 415 of the upper surface 413 of the second working plate 41 is formed as a second working plate 41 through the exhaust through hole 416 as the gas that is sucked by the suction connecting through hole 422 of the third working plate 42. The exhaust port 412 of the inner portion 410 performs a function of attracting the exhaust.

Further, in order to accommodate the flange 91, which will be described later, of the joint 9 in the second working plate 41, as shown in Fig. 5(B), the diameters of the air supply port 411 and the exhaust port 412 are larger than the flange 91. The outer diameter is large, and the air supply through hole 414 and the exhaust through hole 416 are formed with a through hole having a diameter smaller than the outer diameter of the flange 91 at a position deeper than the thickness of the flange 91.

Although not shown in the drawing, the throttle valve 43 is formed with a plurality of flow holes that penetrate the minute through holes in the rear direction of the plate. The throttle plate 43 is interposed between the discharge through hole 404 of the first work plate 40 and the groove 424 of the third work plate 42, and the suction through hole 405 and the second of the first work plate 40. Between the suction and connection through holes 422 of the work plate 42 The compressed gas discharged from the discharge port 401 of the conveying surface 400 of the first working plate 40 and the gas sucked by the suction port 402 of the conveying surface 400 of the first working plate 40 can be appropriately throttled.

As shown in Fig. 2, the air supply manifold 5 is disposed in the inner surface 310 of the second carry-in/out board 31 of the carry-in/out rail 3 in the vertical direction (Y direction) along the transport direction, and is covered in the inner surface 310. The air supply port 311 is arranged in a row in the vertical direction (Y direction) of the conveyance direction (see Fig. 7). The air supply manifold 5 is provided with two rows of groove-shaped aluminum frames 50 fixed to the inner surface 310 side of the second carry-in/out board 31 by bolts 55; and is attached to the long direction of the two rows of grooved aluminum frames 50 (handling a pair of end plates 51 at both ends of the vertical direction of the direction; slidably inserted along the longitudinal direction of the two rows of grooved aluminum frames 50, respectively, formed on the lower surface 502 side of the two rows of grooved aluminum frames 50 a two-row T-shaped groove 503 with a leaf spring T-shaped nut 52; and a nut 53 that is locked with a T-shaped nut 52 attached thereto, is fixed to the two rows of grooved aluminum frame 50 The air pipe joint mounting jig 54 is constructed.

Fig. 11(A) is a front view of the two rows of the grooved aluminum frame 50, and Fig. 11(B) is a cross-sectional view of the HH of the two rows of the grooved aluminum frame 50 shown in Fig. 11(A), the eleventh (C) Fig. 11 is a cross-sectional view taken along line II of the two-row groove type aluminum frame 50 shown in Fig. 11(A), and Fig. 11(D) is a JJ cross-sectional view of the two-row groove type aluminum frame 50 shown in Fig. 11(A).

As shown in the figure, the two rows of grooved aluminum frames 50 are provided with an upper surface 501 opposed to the inner surface 310 of the second carry-in/out board 31 and a lower surface 502 positioned on the opposite side of the upper surface 501. The inner portion 10 is hollow and two in the long direction. Open An angled gas supply pipe portion 500 having a substantially square shape, and a gas supply angle pipe are provided along the longitudinal direction of the gas supply angle pipe portion 500 on both sides in the longitudinal direction of the gas supply angle pipe portion 500. Two rows of T-shaped grooves 503 of the lower surface 502 of the portion 500; and two leg portions 504 that respectively form the groove bottom of the T-shaped groove 503.

In the upper surface 501 of the air supply angle tube portion 500, a plurality of air supply port connection ports 505 are formed along the longitudinal direction of the air supply angle tube portion 500. When the two-row groove type aluminum frame 50 is fixed to the inner surface 310 side of the second carry-in/out board 31, the air supply port connection port 505 is formed in the inner surface 310 of the second carry-in/out board 31. The position of the air supply port 311 is relative (see Figure 4(B)). In the lower surface 502 of the air supply angle pipe 500, an air supply pipe joint mounting port 506 for mounting the air supply pipe joint 70a attached to the front end portion of the air supply hose 7a is formed. Here, the number of the air supply pipe joint mounting ports 506 is smaller than the number of the air supply port connection ports 505.

A leaf spring T-shaped nut 52 is housed in the T-shaped groove 503 so as to be slidable. The air supply pipe joint jig 54 is formed with an air supply pipe joint mounting hole 542 to which a screw hole (through hole) for the air supply pipe joint 70a is attached (see Fig. 4(A)). In order to match the position of the air supply pipe joint mounting hole 542 with the position of the air supply pipe joint mounting opening 506 of the lower surface 502 of the air supply angle pipe portion 500, the attached leaf spring T inserted into each of the T-shaped grooves 503, respectively. The bolt 53 of the letter nut 52 is fastened to the two-row groove type aluminum frame 50 by the air supply pipe joint mounting jig 54. Further, the air supply pipe joint 70a is a gas supply pipe joint mounting hole for locking the external thread formed at the front end portion of the air supply pipe joint 70a to the air supply pipe joint mounting jig 54. In 542, the air supply pipe joint mounting port 506 is connected to the lower surface 502 of the air supply angle pipe portion 500 through the air supply pipe joint mounting jig 54.

Further, as shown in Fig. 4(A), a ring may be provided around the air supply pipe joint mounting hole 542 in the upper surface 540 of the air supply pipe joint mounting jig 54 opposed to the lower surface 502 of the air supply angle pipe portion 500. The annular groove 541 receives the O-ring 57d in the annular groove 541, thereby preventing the gas in the air supply angle tube portion 500 from the gap between the air supply pipe joint 70a and the air supply pipe joint mounting port 506 and the angle pipe portion for air supply. The gap 502 between the lower portion 502 of the 500 and the upper surface 540 of the air supply pipe joint mounting jig 54 is leaked.

A through hole 508 penetrating both end faces is formed in the corner portion 504 in the longitudinal direction. The pair of end plates 51 are formed on the longitudinal end faces of the two rows of the grooved aluminum frame 50, for example, through holes 508 that are screwed to the respective corner post portions 504. Thereby, the opening of the both end faces of the longitudinal direction of the corner pipe part 500 for air supply is enclosed by the end plate 51. Further, among the side faces of the corner portion of the corner portion 504, a bolt insertion through hole 507 is formed at a position on both ends in the longitudinal direction of the side surface of the groove bottom portion of the T-shaped groove 503, and the bolt insertion is penetrated through the bolt insertion hole. The hole 507 fastens the bolt 55 to the screw hole of the inner surface 310 of the second carry-in/out plate 31, thereby fixing the two rows of the grooved aluminum frame 50 to the inner surface 310 of the second carry-in/out board 31 (see FIG. 2). ).

Further, as shown in Figs. 4(A) and 4(B), the upper surface 501 of the two rows of the grooved aluminum frame 50 and the inner surface 310 of the second carry-in/out plate 31 are interposed therebetween. The washer 56 that passes through the bolt 55 of the screw hole of the inner surface 310 of the second loading and unloading plate 31 passes. Thereby, the upper surface 501 and the second loading and unloading of the air supply angle tube portion 500 of the two rows of the grooved aluminum frame 50 are carried out. A gap t is formed between the inner faces 310 of the plates 31.

The two rows of grooved aluminum frames 50 are ready to use.

The air supply and suction manifold 6 is disposed in the inner surface 410 of the second work plate 41 of the work rail 4 in the vertical direction (Y direction) along the conveyance direction, and is arranged in a row in the conveyance direction in the inner surface 410. The air supply port 411 and the exhaust port 412 in the vertical direction (Y direction) (refer to Fig. 10). The air supply/suction manifold 6 is provided with a three-row groove type aluminum frame 60 that is fixed to the inner surface 410 side of the second operation plate 41 by bolts 65, and is attached to the longitudinal direction of the three-row groove type aluminum frame 60 ( a pair of end plates 61 on both end faces in the vertical direction of the conveyance direction; three rows of T-shaped grooves 603 formed on the lower faces 602a and 602b of the three-row groove type aluminum frame 60, respectively, along the three-row groove type The attached leaf spring T-shaped nut 62 of the aluminum frame 60 is slidably inserted in the longitudinal direction; and is fixed to the three-row groove type aluminum frame 60 by bolts 63 latched with the attached leaf spring T-shaped nut 62 The air supply and suction pipe joint mounting jig 64 is constructed.

Fig. 12(A) is a front view of the three-row grooved aluminum frame 60, and Fig. 12(B) is a JJ cross-sectional view of the three-row grooved aluminum frame 60 shown in Fig. 12(A), the 12th (C) The figure is a KK cross-sectional view of the three-row groove type aluminum frame 60 shown in Fig. 12(A), and the DL cross-sectional view of the three-row groove type aluminum frame 60 shown in Fig. 12(A). Fig. 12(E) is a MM sectional view showing the three-row groove type aluminum frame 60 shown in Fig. 12(A).

As shown in the figure, the three-row groove type aluminum frame 60 is provided with a surface (upper surface) 601a opposed to the inner surface 410 of the second working plate 41, and the upper surface The surface (the lower surface) 602a on the opposite side of the surface 601a has a substantially rectangular air supply angle tube portion 600a which is hollow at both ends in the longitudinal direction and is disposed in parallel with the air supply angle tube portion 600a, and has a second operation A substantially square-shaped suction angle tube portion 600b having a hollow inner surface and a long end in the longitudinal direction (the upper surface) 601b of the plate 41 and a surface (the lower surface) 602b on the opposite side of the upper surface 601b; The one side of the longitudinal direction of the angled tube portion 600a that is not adjacent to the suction angle tube portion 600b, and the three columns of T-shaped between the air supply angle tube portion 600a and the suction angle tube portion 600b. The groove 603; and the three corner pillar portions 604 constituting the groove bottom of the T-shaped groove 603, respectively. The T-shaped groove 603 provided on the side not adjacent to the suction angle tube portion 600b in the longitudinal direction of the gas supply angle tube portion 600a is provided in the supply angle tube portion 600a and the suction angle. The T-shaped groove 603 between the tube portions 600b is provided so as to sandwich the lower surface 602a of the gas supply angle tube portion 600a in the longitudinal direction of the air supply angle tube portion 600a. Moreover, the T-shaped groove 603 which is provided on the side not adjacent to the air supply angle tube portion 600a among the both sides in the longitudinal direction of the suction angle tube portion 600b is provided in the supply angle tube portion 600a and the suction The T-shaped groove 603 between the corner tube portions 600b is provided so as to sandwich the lower surface 602b of the suction angle tube portion 600b in the longitudinal direction of the suction angle tube portion 600b.

A plurality of air supply port connection ports 605a are formed in the upper surface 601a of the air supply angle tube portion 600a. When the three rows of the grooved aluminum frame 60 are fixed to the inner surface 410 side of the second operation plate 41, the air supply port connection ports 605a are formed in plural numbers formed on the inner surface 410 of the second operation plate 41. The position corresponding to the air supply port 411. Also, in the corner pipe section for air supply The lower surface 602a of the 600a is formed with an air supply pipe joint mounting port 606a for mounting the air supply pipe joint 70b attached to the front end portion of the air supply hose 7b. Here, the number of the air supply pipe joint mounting ports 606a is smaller than the number of the air supply port connecting ports 605a.

Similarly, a plurality of exhaust port connection ports 605b are formed in the upper surface 601b of the suction angle tube portion 600b. When the three rows of the grooved aluminum frame 60 are fixed to the inner surface 410 side of the second operation plate 41, the exhaust port connection ports 605b are formed in plural numbers formed on the inner surface 410 of the second operation plate 41. The position of the exhaust port 412 corresponds to. Further, a suction pipe joint mounting port 606b for attaching the suction pipe joint 80 attached to the front end portion of the suction hose 8 is formed in the lower surface 602b of the suction angle pipe portion 600b. Here, the number of suction pipe joint mounting ports 606b is smaller than the number of the exhaust port coupling ports 605b.

A leaf spring T-shaped nut 62 is housed in the T-shaped groove 603 so as to be slidable. In the air supply and suction pipe joint mounting jig 64, an air supply pipe joint mounting hole 643 to which a screw hole (through hole) for the air supply pipe joint 70b is attached, and a suction pipe to which a screw hole (through hole) for the suction pipe joint 80 is attached are formed. Connector mounting hole 644 (see Figure 5(A)). The air supply and suction pipe joint mounting jig 64 is such that the position of the air supply pipe joint mounting hole 643 coincides with the position of the air supply pipe joint mounting port 606a of the lower surface 602a of the air supply angle pipe portion 600a, and the suction pipe joint mounting hole 644 is attracted. The position is in correspondence with the position of the suction pipe joint mounting opening 606b of the lower surface 602b of the suction angle tube portion 600b, and the bolt 63 that is interlocked with the attached leaf spring T-shaped nut 62 inserted in each of the T-shaped grooves 603, respectively. , fixed in the three rows of ditch Slotted aluminum frame 60. Further, the air supply pipe joint 70b is detachable from the air supply pipe joint mounting hole 643 of the air supply and suction pipe joint mounting jig 64 by the external thread formed at the front end portion of the air supply pipe joint 70b, and is permeable to the air supply and suction pipe joint. The mounting jig 64 is coupled to the air supply pipe joint mounting opening 606a of the lower surface 602a of the air supply angle pipe portion 600a. Similarly, the suction pipe joint 80 can be passed through the air supply and suction pipe by locking the external thread formed on the front end portion of the suction pipe joint 80 to the suction pipe joint mounting hole 644 of the air supply and suction pipe joint mounting jig 64. The joint mounting jig 64 is coupled to the suction pipe joint mounting opening 606b of the lower surface 602b of the suction angle tube portion 600b.

Further, as shown in Fig. 5(A), the upper surface 640 of the air supply and suction pipe joint mounting jig 64 facing the lower surface 602a of the air supply angle tube portion 600a and the lower surface 602b of the suction angle tube 600b is provided in the air supply pipe. An annular groove 641 is provided around the joint mounting opening 606a, and an annular groove 642 is provided around the suction pipe joint mounting hole 644, and the O-rings 57e and 57f are accommodated in the annular grooves 641 and 642 to prevent The gas in the gas supply angle pipe portion 600a is separated from the gap between the gas supply pipe joint 70b and the gas supply pipe joint mounting port 606a, the lower surface 602a of the gas supply angle pipe portion 600a, and the upper surface 640 of the gas supply and suction pipe joint mounting jig 64. The leakage and the prevention of air from the gap between the suction pipe joint 80 and the suction pipe joint mounting port 606b and the lower surface 602b of the suction angle pipe portion 600b and the upper surface 640 of the air supply and suction pipe joint mounting jig 64 enter the suction. Inside the corner tube portion 600b.

A through hole 608 through which the both end faces penetrate the longitudinal direction is formed in the three corner post portions 604. The pair of end plates 61 are on both end sides in the longitudinal direction of the three rows of grooved aluminum frames 60, for example, the spiral bolts are locked to the respective corner post portions 604. Hole 608. Therefore, the end plate 61 can close the end faces of the air supply angle tube portion 600a and the suction angle tube portion 600b in the longitudinal direction. Further, in the side surface of each of the corner post portions 604, a bolt insertion through hole 607 is formed at a position of both end portions in the longitudinal direction of the side surface of the groove bottom portion constituting the T-shaped groove 503, and the bolt insertion is performed through the bolts. The bolt 65 is fastened to the screw hole of the inner surface 410 of the second working plate 41 by the through hole 607, and the three rows of the grooved aluminum frame 60 can be fixed to the inner surface 410 of the second working plate 41 (refer to Fig. 2). .

Further, as shown in FIGS. 5(A) and 5(B), the air supply/suction pipe joint 6 is attached to the inner surface 410 of the second work plate 41 so that the three-row groove type aluminum frame 60 is provided. The upper surface 601a of the air supply angle tube portion 600a and the upper surface 601b of the suction angle tube portion 600b are in close contact with the inner surface 410 of the second operation plate 41.

The three-row grooved aluminum frame 60 is a ready-to-use product.

The joint 9 is attached to the air supply port 311 formed in the inner surface 310 of the second carry-in/out board 31 of the carry-in/out rail 3, and the air supply formed in the inner surface 410 of the second work board 41 of the work rail 4, respectively. The port 411 and the exhaust port 412 are connected by the joint 9 between the air supply port 311 and the air supply port connection port 505 of the air supply manifold 5 corresponding to the air supply port 311; the air supply port 411 corresponds to The air supply port 411 is provided between the air supply port and the air supply port connection port 605a of the suction manifold 6; and the air supply port 412 and the air supply port connection port of the air supply and suction manifold 6 corresponding to the exhaust port 412 Between 605b.

Figures 13(A) and 13(B) are top and front views of the joint 9, and Figure 13(C) is the joint 9 shown in Figure 13(B). N-N section view.

As shown, the joint 9 includes a cylindrical joint main body 90 and a flange 91 formed on the outer peripheral surface 910 of the joint main body 90.

The joint main body 90 has an air supply port 311 inserted into the inner surface 310 of the second carry-in/out plate 31 formed in the carry-in/out rail 3, or inserted into the inner surface 410 of the second work plate 41 formed on the work rail 4 One end portion 911 of the air supply port 411 or the exhaust port 412, and an air supply port connection port 505 inserted in the upper surface 501 of the air supply angle tube portion 500 of the air supply manifold 5, or inserted into The other end of the air supply port connection port 605a of the upper surface 601a of the air supply angle tube portion 600a of the air supply/suction manifold 6a or the air outlet port 605b of the upper surface 601b of the suction angle tube portion 600b. Part 912.

The flange 91 may be formed to protrude radially outward from the outer peripheral surface of the joint main body 90 between the end portion 911 of the joint main body 90 and the other end portion 912. The outer peripheral surface of the flange 91 is provided with a groove for accommodating an O-ring 57a to be described later in the peripheral direction thereof. The outer diameter r of the flange 91 is a gas supply port 311 formed in the inner surface 310 of the second carry-in/out plate 31 of the carry-in/out rail 3, and an air supply angle pipe portion 500 formed in the air supply manifold 5. a gas supply port connection port 505 of the upper surface 501; an air supply port connection port 605a formed in the upper surface 601a of the air supply angle tube portion 600a of the air supply/suction manifold 6; and a gas supply and suction manifold The exhaust port connecting port 605b of the upper surface 601b of the suction angle tube portion 600b has a large diameter and is larger than the air supply port 411 and the exhaust port of the inner surface 410 of the second working plate 41 formed on the working rail 4. The diameter of the 412 is small. Also, the thickness h of the flange 91 is a ratio: The thickness t of the gasket 56 disposed between the two rows of the grooved aluminum frame 60 and the inner surface 310 of the second carry-in/out plate 31 (see FIG. 4(B)); and the air supply port of the second work plate 41 The thickness j of the large-diameter portion 417a of the gas supply through-hole 414 connected to the 411 (see FIG. 5(B)); and the large-sized exhaust through-hole 416 connected to the exhaust port 412 of the second working plate 41 The thickness k of the diameter portion 417b (see Fig. 5(B)) is thin.

In addition, as shown in Fig. 4(B), one end portion 911 is inserted into the air supply port 311 formed in the inner surface 310 of the second carry-in/out board 31 of the carry-in/out rail 3, and the other side is provided. The end portion 912 is inserted into the periphery of the flange 91 of the joint 9 of the air supply port connection port 505 formed in the upper surface 501 of the air supply angle tube portion 500 of the air supply manifold 5, and is axially compressed in the axial direction. An O-ring 57a having a thickness thicker than the thickness t of the gasket 56. Therefore, the compressed gas supplied to the gas supply angle tube portion 500 does not leak to the outside, and can be supplied to the gas supply port 301 connected to the gas supply port 311 of the second carry-in/out plate 31 through the joint main body 90 of the joint 9 . Hole 315.

Further, as shown in Fig. 5(B), one end portion 911 is also inserted into the air supply port 411 of the inner surface 410 of the second work plate 41 formed on the work rail 4, and the other end portion is inserted. The O-ring 57b is disposed outside the flange 91 of the joint 9 of the gas supply port connection port 605a formed in the upper surface 601a of the gas supply angle tube portion 600a of the gas supply and suction manifold 6. The O-ring 57b and the flange 91 are housed in a large-diameter portion 417a of the air supply through hole 414 that is connected to the air supply port 411 of the second working plate 41. The thickness of the O-ring 57b in the axial direction is thicker than the thickness j of the large-diameter portion 417a of the air supply through-hole 414, and is compressed toward the axial direction, and thus The compressed gas to the gas supply angle tube portion 600a does not leak to the outside, and is supplied to the gas supply through hole 414 that is connected to the gas supply port 411 of the second operation plate 41 through the joint main body 90 of the joint 9.

Further, as shown in Fig. 5(B), one end portion 911 is inserted into the exhaust port 412 of the inner surface 410 of the second working plate 41 formed on the working rail 4, and the other end portion 912 is inserted. The O-ring 57c is disposed outside the flange 91 of the joint 9 that is inserted into the gas supply port connection port 605b of the upper surface 601b of the suction angle tube portion 600b of the air supply/suction manifold 6b. The O-ring 57c and the flange 91 are housed in a large-diameter portion 417b of the exhaust through hole 416 that is coupled to the exhaust port 412 of the second working plate 41. The thickness of the O-ring 57c in the axial direction is thicker than the thickness k of the large-diameter portion 417b, and is compressed toward the axial direction. Therefore, the gas flowing into the exhaust through-hole 416 of the second working plate 41 does not leak to the outside. The fitting main body 90 of the joint 9 can flow into the suction angle tube portion 600b.

In the air-floating conveying device 1 having the above configuration, the compressed air output from the air supply pump (not shown) is supplied to the air supply manifold 5 through the air supply hose 7a and the air supply pipe joint 70a, and is supplied to the air supply manifold 5 for air supply. The manifold 5 is supplied to a plurality of air supply ports 311 formed in the inner surface 310 of the second carry-in/out board 31. The compressed air supplied to each of the air supply ports 311 is transmitted through the air supply through holes 315 of the second carry-in/out board 31, the grooves 314, and the discharge through holes 304 of the first carry-in/out board 30, and is formed in the first carry-out. The discharge port 301 of the conveyance surface 300 of the inlet plate 30 is ejected. Further, a part of the compressed air discharged from the discharge port 301 of the conveyance surface 300 flows into the exhaust through hole 302 formed in the conveyance surface 300 of the first carry-in/out board 30, The exhaust through hole 312 of the second carry-in/out plate 31 is discharged from the inner surface 310 of the second carry-in/out plate 31 and the upper surface 501 of the air supply angle tube portion 500 of the air supply manifold 5 to the gap t external. Thereby, the object to be transported can be transported at an appropriate height that is floating on the loading/unloading rail.

In addition, the compressed air output from the air supply pump (not shown) is supplied to the air supply/suction manifold 6 through the air supply hose 7b and the air supply pipe joint 70b, and is supplied to the air supply and suction manifold 6 to be formed. A plurality of air supply ports 411 are formed in the inner surface 410 of the second working plate 41. The compressed air supplied to each of the air supply ports 411 is the air supply through hole 414 of the second operation plate 41, the discharge connection through hole 421 of the third operation plate 42, the groove 424, and the first work plate 40. The discharge through hole 404 is ejected from the discharge port 401 formed on the conveyance surface 400 of the first work plate 40. The air sucked by the plurality of suction ports 402 formed on the conveyance surface 400 of the first work plate 40 is the suction through hole 405 of the first work plate 40 and the suction connection through hole of the third work plate 42. 422, the groove 415 of the second working plate 41, and the exhaust through hole 416 are discharged from the plurality of exhaust ports 412 formed in the inner surface 410 of the second working plate 41 to the air supply and suction manifold 6. The air supply and suction manifold 6, the suction pipe joint 80, and the suction hose 8 are sent to a suction pump (not shown). In this way, the transport target can be transported to the carry-in/out rail 4 more accurately than the carry-in/out rail 3 at an appropriate height.

Next, an example of the manufacturing process of the air-floating conveying device 1 having the above configuration will be described.

(1) Production of transport rail 2

The inner surface 303 of the first loading/unloading plate 30 is placed on the upper surface 313 of the second loading/unloading plate 31 so as to overlap the first loading/unloading plate 30 and the second loading/unloading plate 31 at a predetermined position and fixed by bolts or the like. Thereby, the carry-in board 3 for the required number of sheets is produced. Further, the inner surface 403 of the first working plate 40 is opposed to the upper surface 420 of the third working plate 42, and the upper surface 413 of the second working plate 41 is opposed to the inner surface 423 of the third working plate 42. The first work plate 40, the third work plate 42, and the second work plate 41 are superimposed on each other in a predetermined position and fixed by bolts or the like, thereby producing a required number of work rails 4. Then, the required number of sheets are carried out of the in-use rail 3 and the work panel 4, and the respective conveyance surfaces 300 and 400 are placed on the same surface upward, and are arranged in a desired order on a frame (not shown), such as a bolt. Fix this.

As described above, the transport rail 2 is assembled.

(2) Production of gas supply manifold 5

The attached leaf spring T-shaped nut 52 is inserted into the two rows of T-shaped grooves 503 provided in the two rows of grooved aluminum frames 50, respectively. Next, the air supply pipe joint mounting jig 54 is disposed such that the position of the air supply pipe joint mounting hole 542 of the air supply pipe joint mounting jig 54 coincides with the position of the air supply pipe joint mounting opening 506 of the lower surface 502 of the air supply angle pipe portion 500, and the insertion is used. The air supply pipe joint mounting jig 54 is fixed to the air supply by the attached leaf spring T-shaped nut 52 of each T-shaped groove 503 and the bolt 53 respectively latched with the T-shaped nut 52 attached thereto. The lower surface 502 of the angle tube portion 500 is used. Subsequently, through The air supply pipe joint mounting jig 54 attaches the air supply pipe joint 70a to the air supply pipe joint mounting port 506 of the air supply angle pipe portion 500, and spirally locks the end plate 51 to the respective corner post portions 504 of the two rows of grooved aluminum frame 50. The through hole 508 closes the opening of the longitudinal end faces of the supply angle tube portion 500 of the two rows of the grooved aluminum frame 50. As described above, the required gas supply manifold 5 is assembled.

(3) Production of gas supply and suction manifold 6

The attached leaf spring T-shaped nut 62 is inserted into the three-row T-shaped groove 603 provided in the three-row groove type aluminum frame 60, respectively. Next, the air supply and suction pipe joint mounting jig 64 is disposed such that the position of the air supply pipe joint mounting hole 643 of the air supply and suction pipe joint mounting jig 64 is the same as the air supply pipe joint mounting port 606a of the lower surface 602a of the air supply angle pipe portion 600a. The positions are identical, and the position of the suction pipe joint mounting hole 644 of the air supply and suction pipe joint mounting jig 64 coincides with the position of the suction pipe joint mounting port 606b of the lower surface 602b of the suction angle pipe portion 600b. Further, the air supply and suction pipe joints are installed by using the attached leaf spring T-shaped nut 62 inserted into each of the T-shaped grooves 603 and the bolts 63 respectively locked with the attached leaf spring T-shaped nuts 62. The jig 64 is fixed to the lower surface 602a of the air supply angle tube portion 600a and the lower surface 602b of the suction angle tube portion 600b. Then, the air supply pipe joint 70b is attached to the air supply pipe joint mounting port 606a of the air supply angle pipe portion 600a through the air supply and suction pipe joint mounting jig 64, and the suction pipe joint 80 is attached to the suction angle pipe portion 600b. The pipe joint mounting port 606b, and the end plate 61 is screwed to each corner post portion 604 of the three-row groove type aluminum frame 60. The through hole 608 closes the openings of the gas supply angle tube portion 600a and the suction angle tube portion 600b of the three-row groove type aluminum frame 60 in the longitudinal direction.

As described above, the gas supply and suction manifold 6 of the required number of stages is assembled.

(4) Installation of the carrier rail 2 by the air supply manifold 5

The conveyance rail 2 is reversed so that the inner surface 310 of the second carry-in/out board 31 of the carry-in/out rail 3 is upward, and the joint 9 in which the O-ring 57a is attached to the outer periphery of the flange 91 is inserted into the end portion 911 side. A plurality of air supply ports 311 are formed in the inner surface 310. A washer 56 is disposed around the screw hole (not shown) provided in the inner portion 310, which is latched with the bolt 55. Then, one end portion 911 is inserted into the other end portion 912 of the joint 9 of each of the air supply ports 311 arranged in the vertical direction (Y direction) in the conveyance direction, and is inserted into the upper surface of the air supply angle tube portion 500. A plurality of air supply port connection ports 505 of 501. Thereby, the required supply manifold 5 is positioned and positioned at a predetermined position in the vertical direction of the conveyance direction. Thereafter, each of the air supply manifolds 5 is fixed to the inner surface 310 of the second carry-in/out board 31 by bolts 55.

As described above, the air supply manifold 5 having the required number of passes is passed through the gap t defined by the thickness of the washer 56, and is attached to the inner surface 310 of the second carry-in/out board 31 of the carry-in/out rail 3.

(5) Installation of the carrier rail 2 by the air supply and suction manifold 6

The conveyance rail 2 is reversed so that the inner surface 410 of the second carry-in/out board 41 of the work rail 4 is upward, and the flange 91 is formed from the one end portion 911 side. The joint 9 in which the O-ring 57b is provided is inserted into the plurality of air supply ports 411 and the exhaust ports 412 formed in the inner surface 410, and the large-diameter portion of the air supply through-hole 414 connected to the air supply port 411. The large diameter portion 417b of the ventilating through hole 416, which is connected to the exhaust port 412, accommodates the flange 91 of the joint 9 and the O-ring 57b at the periphery thereof. Then, one end portion 911 is inserted into the other end portion 912 of the joint 9 of each of the air supply ports 411 arranged in the vertical direction (Y direction) in the conveyance direction, and is inserted into the upper surface of the air supply angle tube portion 600a. a plurality of air supply port connection ports 605a of 601a are adjacent to the air supply ports 411, and one end portion 911 is inserted into the joint 9 of each of the exhaust ports 412 arranged in the vertical direction (Y direction) in the conveyance direction. The other end portion 912 is inserted into a plurality of exhaust port connection ports 605b formed in the upper surface 601b of the suction angle tube portion 600b. Thereby, the required supply and supply manifold 6 is positioned at a predetermined position in the vertical direction of the conveyance direction. Thereafter, the air supply/suction manifold 6 is fixed to the inner surface 410 of the second working plate 41 by bolts 65.

As described above, the required supply and supply manifold 6 can be mounted in close contact with the inner surface 410 of the second working plate 41 of the working rail 4.

(6) Connection of air supply pump and suction pump

The conveyance rail 2 in which the air supply manifold 5 and the air supply and suction manifold 6 are reversely mounted, the lower surface 502 of the air supply angle pipe portion 500 of the air supply manifold 5, and the air supply and suction The gas supply angle tube portion 600a of the tube 6 and the lower surfaces 602a and 602b of the suction angle tube portion 600b are upward, and are not shown. The air supply hoses 7a and 7b of the air supply pump are connected to the air supply pipe joints 70a and 70b attached to the lower surface 502 of the air supply angle pipe unit 500 and the lower surface 602a of the air supply angle pipe unit 600a, and are not shown. The suction hose 8 for the suction pump is connected to the suction pipe joint 80 attached to the lower surface 602b of the suction angle tube portion 600b. The transport surface 300 of the carry-in/out rail 3 and the transport surface 400 of the work rail 4 are turned upward to return the transport rail 2 to the original position. According to the above description, the assembly of the floating transport device 1 is completed.

Hereinabove, an embodiment of the present invention has been described.

In the idling transport device 1 according to the present embodiment, a plurality of discharge ports 301 of compressed gas are formed on the transport surface 300 of the carry-in/out track 3, and the inner surface 310 of the carry-in/out track 3 on the opposite side of the transport surface 300 is provided. The air supply port 311 is formed with a plurality of compressed gas, and the air outlets 301 and the air supply ports 311 are connected to each other through the air supply passages (lattice-shaped grooves 314) formed in the loading/unloading rails 3. In addition, one or more air supply manifolds 5 are provided on the inner surface 310 side of the carry-in/out rail 3, and the air supply angle pipe portion of the air supply manifold 5 facing the inner surface 310 of the carry-in/out rail 3 is provided. The upper surface 501 of the 500 is formed with a plurality of air supply port connection ports 505 corresponding to the plurality of air supply ports 311 formed in the inner surface 310 of the loading/unloading rail 3. The air supply port connection ports 505 are connected to the corresponding air supply ports 311 through the joints 9, respectively. At least one air supply pipe joint mounting port 506 is formed in the lower surface 502 of the air supply angle pipe portion 500, and the air supply pipe mounting port 506 is connected to the air supply hose 7a to which the air supply pump (not shown) is connected. Air pipe joint 70a.

As described above, according to the embodiment of the present embodiment, it will be formed in carrying out The plurality of air supply ports 311 of the inner surface 310 of the intake rail 3 are connected to the air supply port connection port 505 corresponding to the upper surface 501 of the air supply angle tube portion 500 of the air supply manifold 5 via the joint 9, and The air supply hose 7a is connected to the air supply pipe joint mounting port 506 formed in the lower surface 502 of the air supply angle pipe portion 500 through the air supply pipe joint 70a. Here, the number of the air supply pipe joint mounting ports 506 is smaller than the number of the air supply port connection ports 505. Therefore, the air supply pipe joints 70a are attached to the plurality of air supply ports 311 formed in the inner surface 310 of the loading/unloading rails 3, and the plurality of air supply hoses 7a are surrounded by a limited space and connected to the respective air supply pipe joints 70a. In the case of the comparison, it is possible to reduce the time and labor required for the piping operation for the compressed gas discharge of the loading and unloading rail 3, and the burden on the operator can be reduced.

Further, the number of the air supply pipe joint mounting ports 506 is smaller than the number of the air supply port connecting ports 505. For example, even if the size of the device is increased, the number of required air supply pipe joints and the number of hoses can be suppressed, and the cost can be reduced.

In addition, when the air supply port 311 of the carry-in/out rail 3 is directly connected to the air supply manifold 5, it is possible to suppress the supply of air to each of the air supply ports of the carry-in/out rail 3 by using a plurality of elongated hoses. Pressure loss.

In the air-floating and transporting device 1 according to the present embodiment, the air supply manifold 5 is attached to the inside of the second carry-in/out board 31 of the carry-in/out rail 3 with a gap t defined by the thickness of the washer 56. 310. Thereby, the exhaust through hole 312 of the carry-in/out rail 3 is not closed by the upper surface 501 of the air supply angle pipe portion 500 of the air supply manifold 5. Therefore, the excess gas on the side of the conveying surface 300 of the in-use rail 3 is carried out (only The object to be transported floats from the transport surface 30 to a gas other than the predetermined height, and the exhaust can be efficiently exhausted through the gap t.

In the air-floating and transporting device 1 according to the present embodiment, the joint 9 is inserted into each of the air supply ports 311 formed in the inner surface 310 of the loading/unloading rail 3 from the one end portion 911 side, and the joints 9 are provided. The other end portion 912 is inserted into a plurality of air supply port connection ports 505 formed in the upper surface 501 of the air supply angle tube portion 500 of the air supply manifold 5, thereby providing the air supply manifold 5 for loading and unloading. The inside 310 of the track 3. Therefore, the joint 9 has a function of a positioning jig for a predetermined mounting position of the carry-in/out rail 3 of the air supply manifold 5, and it is easy to mount the air supply manifold 5 to the carry-in/out rail 3.

Further, in the idling conveying device 1 according to the present embodiment, the O-ring 57a having a thickness thicker than the thickness t of the washer 56 is compressed in the axial direction on the outer peripheral side of the flange 91 of the joint 9. Therefore, the compressed gas supplied to the air supply manifold 5 does not leak to the outside, and can be supplied to the air supply through hole 315 that is connected to the air supply port 311 formed in the inner surface 310 of the carry-in/out rail 3.

Moreover, in the air-floating conveying device 1 according to the present embodiment, the air supply manifold 5 is produced by using the two-row groove type aluminum frame 50. By using the both products as the two-row groove type aluminum frame 50, the manufacturing cost of the floating carrier 1 can be reduced.

Further, in the idling transport device 1 according to the present embodiment, the lattice 314 is formed in the upper surface 313 of the second carry-in/out rail 31, and the first carry-in/out board 30 and the second carry-in/out board 31 are overlapped. The upper surface 313 is opposed to the inner surface 303 of the first loading/unloading plate 30, and is provided with an air supply passage for connecting a plurality of discharge ports 301 formed on the conveying surface 300 and a plurality of air supply ports 311 formed in the inner surface 310. Move out into orbit 3. Therefore, for example, it is possible to easily produce the carry-in/out rail 3 having an air supply path of a complicated pattern having a lattice shape inside.

Further, the idling transport device 1 according to the present embodiment is a discharge port 401 and a suction port 402 in which a plurality of compressed gases are formed on the transport surface 400 of the work rail 4, and the work rail 4 on the opposite side of the transport surface 400 In the inner portion 410, a plurality of compressed gas supply ports 411 and an exhaust port 412 are formed, and the discharge port 401 and the air supply port 411 are connected to each other through an air supply passage (a lattice-shaped groove 424) formed in the working rail 4, The suction port 402 and the exhaust port 412 are connected to each other through the suction passages (lattice-shaped grooves 415) formed in the working rail 4. One or more air supply and suction manifolds 6 are provided on the inner side 410 side of the work rail 4, and the air supply angle pipe portion of the air supply and suction manifold 6 facing the inner surface 410 of the work rail 4 is provided. The upper surface 601a of the 600a is formed with a plurality of air supply port connection ports 605a corresponding to the plurality of air supply ports 411 formed in the inner surface 410 of the working rail 4, and the air supply port connection ports 605a are respectively transmitted through the joint 9, Connected to the corresponding air supply port 411. Similarly, the upper surface 601b of the air supply angle tube portion 600b of the air supply/suction manifold 6 facing the inner surface 410 of the work rail 4 is formed with a plurality of exhaust gases formed on the inner surface 410 of the work rail 4. Each of the ports 412 corresponds to a plurality of exhaust port connecting ports 605b, and the exhaust port connecting ports 605b are respectively connected to the corresponding exhaust ports 412 through the joints 9. Further, under the air supply angle tube portion 600a At least one air supply pipe joint mounting port 606a is formed in the surface 602a, and an air supply pipe joint 70b for connecting the air supply hose 7b of the air supply pump (not shown) is attached to the air supply pipe joint mounting port 606a. Similarly, at least one suction pipe joint mounting port 606b is formed in the lower surface 602b of the suction angle pipe portion 600b, and a suction pipe for connecting the suction hose 8 of a suction pump (not shown) is attached to the suction pipe joint mounting port 606b. Connector 80.

As described above, according to the present embodiment, the plurality of air supply ports 411 formed in the inner surface 410 of the working rail 4 are respectively transmitted through the joint 9 and connected to the air supply angle tube portion 600a formed in the air supply and suction manifold 6. The air supply port connection port 605a corresponding to the upper surface 601a is connected to the air supply pipe joint mounting port 606a formed in the lower surface 602a of the air supply angle pipe portion 600a through the air supply pipe joint 70b, and is formed. The plurality of exhaust ports 412 of the inner surface 410 of the working rail 4 are respectively transmitted through the joint 9, and are connected to the exhaust port connecting port 605b corresponding to the upper surface 601b of the suction angle tube portion 600b formed in the air supply and suction manifold 6. The suction hose 8 is connected to the suction pipe joint mounting opening 606b formed in the lower surface 602b of the suction angle pipe portion 600b through the suction pipe joint 80. Here, the number of the air supply pipe joint mounting port 606a and the suction pipe joint mounting port 606b is smaller than the number of the air supply port connecting port 605a and the air port connecting port 605b, respectively. Therefore, the air supply pipe joint 70b and the suction pipe joint 80 are attached to the plurality of air supply ports 411 and the exhaust ports 412 formed in the inner surface 410 of the working rail 4, respectively, in the same manner as the carry-in/out rails 3, and the respective air supply pipe joints 70b. When the suction pipe joint 80 is connected to the air supply hose 7b and the suction hose 8, the discharge of the compressed gas and the suction for the work rail 4 can be deleted. The time and labor required for pipe work reduces the burden on the operators. Further, for example, even if the size of the apparatus is increased, the number of required air supply pipe joints, the suction pipe joints, and the number of hoses can be suppressed, and the cost can be reduced.

In addition, the air supply port 411 and the exhaust port 412 formed in the inner surface 410 of the work rail 4 are directly connected to the air supply/suction manifold 6, and the elongated hose is connected to each of the work rails 4. In the case of the port 411 and each of the exhaust ports 412, pressure loss can be suppressed.

In the air-floating and transporting device 1 according to the present embodiment, the joint 9 is inserted into the air supply port 411 and the exhaust port 412 formed in the inner surface 410 of the working rail 4 from the one end portion 911 side, and The other end portion 912 of the joint 9 is inserted into a plurality of air supply port connection ports 605a formed in the air supply angle tube portion 600a of the air supply/suction manifold 6 and the upper surfaces 601a and 601b of the suction angle tube portion 600b. The exhaust port connection port 605b is provided to provide the air supply/suction manifold 6 to the inner surface 410 of the work rail 4. Therefore, the joint 9 has a function of a positioning jig for a predetermined mounting position of the working rail 4 of the air supply and suction manifold 6, and the installation work of the air supply/suction manifold 6 to the carry-in rail 4 is facilitated.

In the air-floating conveying device 1 according to the present embodiment, the air supply through hole is connected to the outer side of the flange 91 of the air intake joint 9 so as to be axially compressed in the axial direction and connected to the air supply port 411. The O-ring 57b having a thickness j of the large diameter portion 417a of 414 is thick. Therefore, the compressed gas supplied to the air supply/suction manifold 6 does not leak to the outside, and the air supply through hole 414 that is connected to the air supply port 411 formed in the inner surface 410 of the working rail 4 can be supplied. Similarly, it can also be on the peripheral side of the flange 91 of the joint 9, toward The axial compression is disposed in the O-ring 57c having a thickness in the axial direction and a thickness k of the large-diameter portion 417b of the exhaust through-hole 416 that is connected to the exhaust port 412. Therefore, the gas flowing into the exhaust through-hole 416 does not. When leaking to the outside, it can flow into the gas supply and suction manifold 6.

Further, in the air-floating conveying device 1 according to the present embodiment, the air supply/suction manifold 6 is produced using the three-row groove type aluminum frame 60. The use of the both products as the three-row grooved aluminum frame 60 can reduce the manufacturing cost of the floating handling device 1.

Further, in the idling transport device 1 according to the present embodiment, a lattice-shaped groove 424 is formed on the upper surface 420 of the third work plate 42, and the first work plate 40 and the third work plate 42 are overlapped to make the third work. The upper surface 420 of the plate 42 faces the inner surface 403 of the first working plate 40, and the groove 415 is formed in the upper surface 413 of the second working plate 41, and the third working plate 42 and the second working plate are overlapped. 41, the upper surface 413 is opposed to the inner surface 423 of the third working plate 42, and the air supply passages 401 formed on the conveying surface 400 and the plurality of air supply ports 411 formed in the inner surface 410 are formed, and the inner portion is formed. A plurality of suction ports 402 formed on the conveyance surface 400 are provided with a work rail 4 that is coupled to a plurality of exhaust ports 412 formed in the inner surface 410. Therefore, for example, it is possible to easily produce the work rail 4 having the grid-shaped complicated air supply passage and the suction passage.

Further, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

For example, the above embodiment is a loading/unloading track 3, The conveyance rails 2 are produced by arranging the rails 4 and 4 in the conveyance direction in the order of the work rails 4 and the loading/unloading rails 3. However, the invention is not limited thereto. The conveyance rail 2 may arrange a predetermined number of carry-in/out rails 3 and a predetermined number of work rails 4 in the transport direction in a desired order. Further, the conveyance rail 2 may have only a predetermined number of the carry-in/out rails 3 arranged in the conveyance direction, or only a predetermined number of the work rails 4 may be arranged in the conveyance direction.

Further, in the above-described embodiment, the lattice-shaped grooves 314 having the function of the air supply passage in the loading/unloading rail 3 are formed on the upper surface 313 of the second carry-in/out board 31, but the present invention is not limited thereto. Instead of or in addition to the upper surface 313 of the second carry-in/out board 31, a lattice-like groove having an air supply function may be formed in the inner surface 303 of the first carry-in/out board 30. Further, a groove of a pattern other than a lattice shape may be formed.

Further, in the above-described embodiment, the lattice-shaped groove 424 having the function of the air supply passage in the working rail 4 is formed on the upper surface 420 of the third working plate 42, and the inside of the working rail 4 is provided as the suction function. The lattice-like groove 415 is formed on the upper surface 413 of the second work board 41, but the present invention is not limited thereto. Instead of or in addition to the upper surface 420 of the third working plate 42, a lattice-like groove having an air supply function may be formed on the inner surface 403 of the first working plate 40. Similarly, instead of or in addition to the upper surface 413 of the second working plate 41, a lattice-like groove having a suction function may be formed on the inner surface 423 of the third working plate 42. Alternatively, a groove as a suction function is formed on the upper surface 420 of the third work plate 42 and the inner surface 403 of the first work plate 40. One of the smaller ones or the groove serving as the air supply passage function is formed on at least one of the upper surface 413 of the second working plate 41 and the inner surface 423 of the third working plate 42. Further, a groove of a pattern other than a lattice shape may be formed.

Further, in the above embodiment, the gap 56 is formed between the air supply manifold 5 and the inner surface 310 of the carry-in/out rail 3 by using the washer 56, but the present invention is not limited thereto. A gap t may be formed between the air supply manifold 5 and the inner surface 310 of the carry-in/out rail 3 by a method other than the washer 56. For example, a joint 9 having a flange 91 having a proper amount of protrusion may be used, and the thickness of the flange 91 of the joint 9 may be appropriately spaced between the air supply manifold 5 and the inner surface 310 of the carry-in rail 3. Clearance t.

Further, in the above-described embodiment, the air supply manifold 5 is formed using the two-row groove type aluminum frame 50, but the present invention is not limited thereto. Alternatively, the air supply manifold may be formed by using an aluminum frame in which two or more corner pipe portions are disposed with a T-shaped groove interposed therebetween, whereby the plurality of vertical faces in the conveyance direction are disposed on the inner surface 310 of the work rail 3 The rows of the gas supply ports 311 in the direction are connected to the gas supply manifold in a plurality of rows. It is also possible to use the dedicated components instead of the aluminum frame of the product to produce the gas supply manifold 6.

Further, in the above-described embodiment, the air supply/suction manifold 6 is formed using the three-row groove type aluminum frame 60, but the present invention is not limited thereto. It is also possible to form a gas supply and suction manifold by using an aluminum frame in which four or more even-angle pipe portions are disposed with T-shaped grooves interposed therebetween, thereby arranging plural numbers in the inner surface 410 of the work rail 4 The row of the air supply ports 411 and the exhaust port 412 in the vertical direction of the conveyance direction are connected in pairs to the air supply and suction manifold. Can also replace the aluminum frame of the product with a dedicated zero group The gas supply and suction manifold 6 is fabricated.

In the above-described embodiment, a substrate such as a large-sized glass substrate used for a flat display panel such as a liquid crystal display panel or a plasma display panel is used as a transfer target. However, the substrate is not limited to a substrate. Handle a sheet-shaped conveyer that is easy to bend.

1‧‧‧Air handling device

5‧‧‧ gas supply manifold

6‧‧‧ gas supply and suction tube

7a, 7b‧‧‧ gas supply hose

8‧‧‧Attraction hose

50‧‧‧Two rows of grooved aluminum frames

51‧‧‧End plate

53‧‧‧Bolts

54‧‧‧Air supply pipe joint installation fixture

55‧‧‧Bolts

60‧‧‧Three rows of grooved aluminum frame

61‧‧‧End board

63‧‧‧ bolt

64‧‧‧Gas and suction pipe joint installation fixture

65‧‧‧ bolt

310‧‧‧The second move out of the inside of the board

312‧‧‧The through hole for exhaust of the second loading and exiting plate

410‧‧‧The inside of the second work board

Claims (19)

An air-floating and transporting device is an air-floating transporting device that transports a transporting object in a non-contact manner in a transporting direction, and is characterized in that it includes a transporting rail and a transporting surface, and a plurality of compressed gas outlets are formed; a gas supply port having a plurality of compressed gases formed on the opposite side of the conveying surface; and an air supply passage connecting a plurality of the discharge ports formed on the conveying surface and a plurality of the gas supply ports formed in the inner surface And a gas supply manifold having: a plurality of gas supply port connection ports respectively opposite to a plurality of gas supply ports formed in the inner side of the conveying rail, and a gas supply pipe joint mounting port, and a gas supply pump connected thereto The air supply pipe joint for the hose, the number of the gas pipe joint mounting ports is smaller than the number of the gas supply port joints. The vacant conveying apparatus according to the first aspect of the invention, wherein the plurality of exhausting through holes are formed in the conveying rail, and the conveying surface that penetrates the conveying rail and the inner surface of the conveying rail are A gap is formed between the inside of the conveyance rail and the gas supply manifold, and a part of the compressed gas discharged from a plurality of the discharge ports formed on the conveyance surface of the conveyance rail passes through the plurality of exhaust gases. The through holes are used to exhaust from the gap. The air-floating transport device according to claim 2, further comprising: a gasket interposed in the inner surface of the transport rail and the The gas supply manifold and the bolt pass through the gasket to fix the gas supply manifold to the conveyance rail, and the width of the gap is determined more than the thickness of the gasket. The air-floating conveying device according to any one of the first to third aspects of the present invention, further comprising a gas supply joint provided in each of the air supply ports, and connected to the air supply port The above-mentioned air supply port connection port opposite to the mouth. The air-fed conveying device according to claim 4, wherein the air supply joint has a cylindrical joint main body, one end portion is inserted into the air supply port, and the other end portion is inserted into the air supply port. The gas supply port connection port facing the gas supply port and the flange have an outer diameter larger than a diameter of the gas supply port and the gas supply port connection port facing the gas supply port, and form a peripheral surface from the joint body Further, the air-floating transport device further includes a sealing member that closes between the inner surface of the transport rail and a surface of the flange facing the inner surface, and the air supply manifold and the air supply manifold The above-mentioned flange is between the other side of the face. The air-floating conveying device according to claim 5, wherein the sealing member is axially compressed in the axial direction and has a thickness larger than a thickness of the flange of the air supply joint and surrounds the flange. O ring of the outer edge. The air-floating conveying device according to any one of the first aspect, wherein the air supply manifold has a longitudinal direction along the longitudinal direction of the air supply manifold Both sides of the above-mentioned gas supply manifold Two rows of T-shaped groove members are slidably accommodated in the longitudinal direction, and the gas supply pipe joints are inserted into the T-shaped snails respectively inserted into the two rows of T-shaped grooves. The bolt of the cap latch is fixed to the jig of the air supply manifold to be attached to the air supply pipe joint mounting port. The air-floating conveying device according to the fourth aspect of the invention, wherein the air supply manifold has a longitudinal direction along the longitudinal direction of the air supply manifold, and is integrally formed on both sides of the air supply manifold The two rows of T-shaped groove members are slidably received in the longitudinal direction, and the gas supply pipe joints are locked by the T-shaped nut bolts respectively inserted into the two rows of T-shaped grooves. The bolt is fixed to the jig of the air supply manifold to be attached to the air supply pipe joint mounting port. The air-floating conveying device according to any one of the first aspect, wherein the conveying rail includes: a first plate having a first surface and the above-described conveying rail The conveying surface and the second surface are located on opposite sides of the first surface, and the second plate has a third surface, the inner surface constituting the conveying rail, and the fourth surface located on the opposite side of the third surface And superimposing on the second surface of the first plate, wherein the first plate has a plurality of discharge ports formed between the first surface and the second surface and connected to the discharge port at the respective discharge ports. In the through hole, in the second plate, a plurality of gas supply passages that penetrate between the third surface and the fourth surface and are connected to the gas supply port are formed in each of the gas supply ports The perforation is formed in at least one of the second surface of the first plate and the fourth surface of the second plate as the air supply passage, and is connected to the plurality of discharge through holes and the plurality of gas supply through holes The groove. The air transporting device according to claim 4, wherein the transport rail includes: a first plate having a first surface, the transport surface constituting the transport rail, and a second surface located at the first On the opposite side of the surface, and the second plate, the third surface, the inner surface constituting the transport rail, and the fourth surface are located on opposite sides of the third surface and overlap the second surface of the first plate In the first plate, a plurality of discharge through holes that are inserted between the first surface and the second surface and connected to the discharge port are formed in each of the discharge ports, and the second plate is formed in each of the second plates a plurality of air supply through holes penetrating between the third surface and the fourth surface and connected to the air supply port, and a second surface of the first plate and a fourth surface of the second plate At least one of the surfaces is formed with a groove that is connected to the plurality of discharge through holes and the plurality of gas supply through holes as the air supply passage. The air transporting device according to claim 7, wherein the transport rail includes: a first plate having a first surface, the transport surface constituting the transport rail, and a second surface located at the first The opposite side of the face, and The second plate has a third surface, the inner surface constituting the transport rail, and a fourth surface positioned on the opposite side of the third surface and superposed on the second surface of the first plate, in the first surface The plate has a plurality of discharge through holes formed between the first surface and the second surface and connected to the discharge port, and the second plate is formed in each of the air supply ports. a plurality of air supply through holes connected between the third surface and the fourth surface and connected to the air supply port, at least one of the second surface of the first plate and the fourth surface of the second plate A groove that is connected to the plurality of discharge through holes and the plurality of gas supply through holes as the air supply passage is formed. The air transporting device according to claim 8, wherein the transport rail includes a first plate having a first surface, the transport surface constituting the transport rail, and a second surface located at the first surface On the opposite side of the surface, and the second plate, the third surface, the inner surface constituting the transport rail, and the fourth surface are located on opposite sides of the third surface and overlap the second surface of the first plate In the first plate, a plurality of discharge through holes that are inserted between the first surface and the second surface and connected to the discharge port are formed in each of the discharge ports, and the second plate is formed in each of the second plates The air supply port is formed with a plurality of air supply passages extending between the third surface and the fourth surface and connected to the air supply port The perforation is formed in at least one of the second surface of the first plate and the fourth surface of the second plate, and the plurality of discharge through holes and the plurality of gas supply through holes are connected as the air supply passage The groove. The air transporting device according to claim 1, wherein the transport rail further includes a suction port formed on the transport surface of the transport rail, and an exhaust port in the inner side of the transport rail And a plurality of suction ports formed between the plurality of suction ports formed on the transport surface and the plurality of exhaust ports formed on the inner surface, wherein the air transport device further includes a suction manifold. The suction manifold includes a plurality of exhaust port connection ports, and a plurality of the exhaust ports formed on the inner surface of the transport rail, and a suction pipe joint mounting port, and a soft portion to which the suction pump is attached The suction pipe joint for the pipe is used in an amount smaller than the number of the above-mentioned exhaust port connection ports. The air-floating conveying device according to claim 13, further comprising: a plurality of air supply joints provided in the air supply ports, and the air supply port connection port facing the air supply port is connected to The air supply port and the plurality of suction connectors are provided at the respective exhaust ports, and the exhaust port connection port facing the exhaust port is coupled to the supply port. The air-fed conveying device according to claim 14, wherein the air supply joint has a cylindrical joint main body, and one end portion is inserted into the air supply port, and the other end portion is provided. Inserting into the air supply port connection port opposite to the air supply port, and the flange has a ratio An outer diameter of the gas supply port and the gas supply port connection port facing the gas supply port is formed to protrude from a peripheral surface of the joint main body of the gas supply joint, and the suction joint has a cylinder The joint main body has one end inserted into the exhaust port, and the other end inserted into the exhaust port connecting port facing the exhaust port, and a flange having a larger exhaust port than the exhaust port And an outer diameter of the exhaust port connecting port having a large diameter, and protruding from a peripheral surface of the joint main body of the suction joint, the floating conveying device further comprising: a first sealing member that closes the inner side of the conveying rail And a surface of the flange of the gas supply joint facing the inside, and the other of the flanges of the gas supply manifold and the gas supply joint facing the gas supply manifold Between the surfaces, and the second sealing member, the inner side of the transport rail and the surface of the flange of the suction joint facing the inner surface, and the suction manifold and the suction The suction manifold between the opposing surface of the flange with the other joint. The air-floating conveying device according to claim 15, wherein the first sealing member has a thickness in the axial direction that is thicker than a thickness of the flange of the air supply joint, and is axially compressed and disposed to surround the protrusion. The O-ring of the outer edge of the rim has a thickness in the axial direction that is thicker than a thickness of the flange of the suction joint, and axially compresses an O-ring that is disposed to surround the outer edge of the flange. Such as applying for any of the patent scopes 13, 14, 15 and 16. In the above-described air-fed carrier, the air supply manifold and the suction manifold are arranged and integrally formed, and the position between the air supply manifold and the suction manifold is sandwiched between the air supply and the manifold. The gas manifold and the positions on both sides of the suction manifold are integrally formed in the gas supply manifold and the suction manifold along each of the longitudinal direction of the gas supply manifold and the suction manifold The T-shaped nut is slidably received in the three rows of the T-shaped grooved members in the longitudinal direction, and the gas supply pipe joint is inserted into the two columns attached to the gas supply manifold. a clamp of the T-shaped nut bolt of the font groove member is fixed to the air supply pipe joint mounting port by a clamp fixed to the air supply manifold, and the suction pipe joint is inserted into the clamp A bolt fixed to the suction manifold is attached to the suction pipe joint mounting port by the bolt of the T-shaped nut latching the T-shaped groove member attached to the two rows of the manifold. The vacant conveying apparatus according to any one of the preceding claims, wherein the conveying rail includes: a first plate having a first surface and the conveying surface constituting the conveying rail And the second surface is located on the opposite side of the first surface, and the second plate has a third surface, the inner surface constituting the transport rail, and the fourth surface, located on the opposite side of the third surface, The third plate has a fifth surface disposed between the first plate and the second plate, overlapping with the second surface of the first plate, and a sixth surface overlapping the fourth surface of the second plate In the first plate, a plurality of discharge through holes penetrating between the first surface and the second surface and connected to the discharge port are formed in the respective discharge ports, and the plurality of discharge openings are formed in the respective suction ports. a plurality of suction through holes that are connected to the suction port between the second surface and the second surface, and the second plate is formed between the third surface and the fourth surface in each of the air supply ports a plurality of air supply through holes connected to the air supply port, and a plurality of exhaust gas passages penetrating between the third surface and the fourth surface and connected to the exhaust port are formed in each of the exhaust ports In the third plate, a plurality of through-holes for air supply connection are formed between the fifth surface and the sixth surface and connected to the plurality of the discharge through holes or the plurality of gas supply through holes. And a plurality of suction connection through holes that are formed between the fifth surface and the sixth surface and connected to the plurality of the plurality of suction through holes or the plurality of exhaust through holes, and the first plate Two sides and the above third board At least one of the fifth surface is formed with a plurality of grooves for connecting the plurality of discharge through holes and the plurality of gas supply connection through holes as the air supply passage, or a plurality of the suction passages a through-hole and a plurality of grooves connected to the plurality of suction connecting through-holes, and at least one of the fourth surface of the second plate and the sixth surface of the third plate is formed as a plurality of the suction channels The exhaust through hole and the plurality of grooves that are connected to the suction connecting through hole, or a groove that is connected to the plurality of gas supply through holes and the plurality of gas supply connecting through holes. If the air-floating handling device described in claim 17 is applied, The transport rail includes a first plate having a first surface, the transport surface constituting the transport rail, and a second surface located on an opposite side of the first surface, and a second plate having a third surface a third surface of the inner surface of the transport rail that is opposite to the third surface, and a third surface having a fifth surface disposed between the first plate and the second plate, and The second surface of the first plate is overlapped, and the sixth surface is overlapped with the fourth surface of the second plate. The first plate is formed with the first surface and the second surface at the respective ejection openings. a plurality of discharge through holes that are connected to the discharge port, and a plurality of suction through holes that are inserted between the first surface and the second surface and connected to the suction port are formed in each of the suction ports. In the second plate, a plurality of air supply through holes penetrating between the third surface and the fourth surface and connected to the air supply port are formed in each of the air supply ports, and the air outlets are formed in the air outlets. Between the third surface and the fourth surface a plurality of exhaust through holes connected to the exhaust port, and the third plate is formed to penetrate between the fifth surface and the sixth surface, and to form a plurality of the plurality of discharge through holes or the plurality of gas supply through holes a plurality of through-holes for gas supply connection, and a plurality of suction connections connected to the plurality of suction through holes or the plurality of exhaust through holes are formed between the fifth surface and the sixth surface Forming, in the through hole, at least one of the second surface of the first plate and the fifth surface of the third plate, and the plurality of the discharge through holes and the plurality of gas supply ports as the air supply passage a groove connected by a through hole, Or a groove that is connected to the plurality of the suction through holes and the plurality of suction connection through holes as the suction passage, and at least the fourth surface of the second plate and the sixth surface of the third plate One of the plurality of exhausting through holes and the plurality of the suction connecting through holes as the suction passages, or a plurality of the air supply through holes and the plurality of the air supply passages The groove for connecting the through-holes for the gas supply connection.