TW201524284A - Electronic element and sheet material - Google Patents

Electronic element and sheet material Download PDF

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Publication number
TW201524284A
TW201524284A TW103138729A TW103138729A TW201524284A TW 201524284 A TW201524284 A TW 201524284A TW 103138729 A TW103138729 A TW 103138729A TW 103138729 A TW103138729 A TW 103138729A TW 201524284 A TW201524284 A TW 201524284A
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TW
Taiwan
Prior art keywords
substrate
sheet
resin
electronic
insulating layer
Prior art date
Application number
TW103138729A
Other languages
Chinese (zh)
Inventor
Hidenobu Kobayashi
Kazunori Matsudo
Jun Mikoshiba
Original Assignee
Toyo Ink Sc Holdings Co Ltd
Toyochem Co Ltd
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Publication date
Application filed by Toyo Ink Sc Holdings Co Ltd, Toyochem Co Ltd filed Critical Toyo Ink Sc Holdings Co Ltd
Publication of TW201524284A publication Critical patent/TW201524284A/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0007Casings
    • H05K9/002Casings with localised screening
    • H05K9/0022Casings with localised screening of components mounted on printed circuit boards [PCB]
    • H05K9/0024Shield cases mounted on a PCB, e.g. cans or caps or conformal shields
    • H05K9/0031Shield cases mounted on a PCB, e.g. cans or caps or conformal shields combining different shielding materials
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0064Earth or grounding circuit
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials
    • H05K9/0081Electromagnetic shielding materials, e.g. EMI, RFI shielding

Abstract

An electronic element of the invention has: an electronic substrate, which has a wiring substrate having a mounting surface, and a plurality of electronic components mounted on the mounting surface of the wiring substrate; a sheet material, which is laminated on the electronic substrate, and has a sheet-typed base material having conductivity, and at least one insulating layer disposed at the electronic substrate side of the base material and having a size including at least one of the electronic component; and a grounding portion, which grounds the base material of the sheet material, and fixes the sheet material and the electronic substrate. From this, an electronic element of easily removed heat-release from the electronic component, thin type and high reliability is provided.

Description

電子元件以及片材 Electronic components and sheets

本發明是有關於一種電子元件以及片材。 The present invention relates to an electronic component and a sheet.

於智慧型電話(smart phone)等電子設備中,為了保護搭載於配線基板上的電子零件不受例如電磁波等的影響,而進行以下操作:將具有導電性的箱狀的屏蔽罐以覆蓋電子零件的方式設置於配線基板上(例如參照專利文獻1)。 In an electronic device such as a smart phone, in order to protect an electronic component mounted on a wiring board from electromagnetic waves or the like, the following operation is performed: a conductive box-shaped shield can is covered to cover the electronic component. The method is provided on the wiring board (for example, refer to Patent Document 1).

[現有技術文獻] [Prior Art Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本專利第4857927號 [Patent Document 1] Japanese Patent No. 4857927

然而,該屏蔽罐通常是由金屬所構成,故於減小尺寸(特別是薄型化)的方面存在極限。因此存在以下問題:無法應對將屏蔽罐設置於配線基板上而成的電子元件、進而組入有電子元件的電子設備進一步薄型化的要求。 However, the shield can is usually made of metal, so there is a limit in reducing the size (especially thinning). Therefore, there is a problem in that it is impossible to cope with the demand for further thinning of an electronic component in which a shield can is provided on a wiring substrate and an electronic device in which an electronic component is incorporated.

另外,金屬製的屏蔽罐為硬質,並無柔軟性或其柔軟性 極低。因此,於將屏蔽罐設置(接合)於配線基板上時,為了防止電子零件破損,必須於屏蔽罐與電子零件之間設置具備一定尺寸的間隙。該情況亦妨礙電子元件的薄型化。 In addition, the metal shield can is hard and has no softness or softness. Very low. Therefore, when the shield can is placed (joined) on the wiring board, in order to prevent the electronic component from being damaged, it is necessary to provide a gap having a certain size between the shield can and the electronic component. This also hinders the thinning of electronic components.

此外,該電子元件亦存在以下問題:因設置所述間隙,而難以將電子零件的放熱有效地去除。 Further, this electronic component has a problem in that it is difficult to effectively remove the heat release of the electronic component by providing the gap.

因此,本發明在於提供一種容易將自電子零件的放熱去除、薄型且可靠性高的電子元件,以及發揮充分的電磁波屏蔽效果、並且可實現所得的電子元件的薄型化的片材。 Therefore, the present invention provides a sheet which is easy to remove heat from an electronic component, is thin and highly reliable, and exhibits a sufficient electromagnetic wave shielding effect and can reduce the thickness of the obtained electronic component.

此種目的是藉由以下的本發明而達成。 This object is achieved by the present invention below.

本發明的電子元件的特徵在於具有:電子基板,具備具有安裝面的配線基板、及安裝於該配線基板的所述安裝面上的多個電子零件;片材,積層於所述電子基板上,且具備具有導電性的片狀的基材、及設置於該基材的所述電子基板側且具備包含至少一個所述電子零件的尺寸的至少一個絕緣層;以及接地部,將所述片材的所述基材接地,並且將所述片材與所述電子基板固定。 An electronic component according to the present invention includes an electronic substrate including a wiring substrate having a mounting surface, and a plurality of electronic components mounted on the mounting surface of the wiring substrate; and a sheet laminated on the electronic substrate And a sheet-like substrate having conductivity and at least one insulating layer provided on the electronic substrate side of the substrate and having a size including at least one of the electronic components; and a ground portion for the sheet The substrate is grounded and the sheet is fixed to the electronic substrate.

本發明的電子元件中,較佳為所述接地部含有設置於所述配線基板的所述安裝面側的接地配線,所述絕緣層具有俯視小於所述基材的尺寸,所述基材於自所述絕緣層露出的露出區域中與所述接地配線 接觸。 In the electronic component of the present invention, preferably, the ground portion includes a ground wiring provided on the mounting surface side of the wiring substrate, and the insulating layer has a size smaller than a size of the substrate in a plan view, and the substrate is In the exposed area exposed from the insulating layer and the ground wiring contact.

本發明的電子元件中,較佳為所述配線基板的所述安裝面具備經所述接地配線所劃分、且安裝既定的所述電子零件的多個安裝區域,所述至少一個絕緣層包含與各所述安裝區域相對應而設置的多個所述絕緣層。 In the electronic component of the present invention, it is preferable that the mounting surface of the wiring board includes a plurality of mounting regions that are divided by the ground wiring and that mount the predetermined electronic component, and the at least one insulating layer includes Each of the mounting regions corresponds to a plurality of the insulating layers.

本發明的電子元件中,較佳為所述基材含有硬化性樹脂的硬化物、及分散於該硬化物中的導電性粒子。 In the electronic component of the present invention, it is preferable that the substrate contains a cured product of a curable resin and conductive particles dispersed in the cured product.

本發明的電子元件中,較佳為所述硬化性樹脂為熱硬化性樹脂及光硬化性樹脂中的至少一種。 In the electronic component of the present invention, it is preferable that the curable resin is at least one of a thermosetting resin and a photocurable resin.

本發明的電子元件中,較佳為所述導電性粒子的平均粒徑為1μm~100μm。 In the electronic component of the present invention, it is preferable that the conductive particles have an average particle diameter of from 1 μm to 100 μm.

本發明的電子元件中,較佳為所述基材具備含有所述硬化性樹脂的硬化物及所述導電性粒子的本體部、以及與該本體部接觸而設置的金屬膜。 In the electronic component of the present invention, it is preferable that the substrate includes a cured portion containing the curable resin, a main portion of the conductive particles, and a metal film provided in contact with the main portion.

本發明的電子元件中,較佳為所述金屬膜具備俯視與所述絕緣層大致相等的尺寸。 In the electronic component of the present invention, it is preferable that the metal film has a size that is substantially equal to the insulating layer in plan view.

本發明的電子元件中,較佳為所述金屬膜具備俯視與所述本體部大致相等的尺寸。 In the electronic component of the present invention, it is preferable that the metal film has a size that is substantially equal to the main body portion in plan view.

本發明的電子元件中,較佳為所述金屬膜的平均厚度為所述基材的平均厚度的0.004%~2500%。 In the electronic component of the present invention, it is preferable that the average thickness of the metal film is 0.004% to 2500% of the average thickness of the substrate.

本發明的電子元件中,較佳為所述基材具有第1部分及 第2部分,其中所述第1部分是與所述絕緣層接觸而設置,且含有第1導電性粒子,所述第2部分是設置於所述第1部分的與所述絕緣層為相反之側,且以較所述第1導電性粒子於所述第1部分中的含量更多的量而含有第2導電性粒子。 In the electronic component of the present invention, preferably, the substrate has a first portion and In a second aspect, the first portion is provided in contact with the insulating layer and includes first conductive particles, and the second portion is opposite to the insulating layer provided on the first portion The second conductive particles are contained in an amount larger than the content of the first conductive particles in the first portion.

本發明的電子元件中,較佳為所述基材的平均厚度為2μm~500μm。 In the electronic component of the present invention, it is preferred that the substrate has an average thickness of from 2 μm to 500 μm.

本發明的電子元件中,較佳為所述絕緣層的所述電子基板側的面是由平滑面所構成。 In the electronic component of the present invention, it is preferable that the surface of the insulating layer on the side of the electronic substrate is composed of a smooth surface.

本發明的電子元件中,較佳為所述絕緣層的所述電子基板側的面是由粗糙面所構成。 In the electronic component of the present invention, it is preferable that the surface of the insulating layer on the side of the electronic substrate is composed of a rough surface.

本發明的電子元件中,較佳為於將所述基材的平均厚度設定為100時,所述絕緣層的平均厚度為50~200的比例。 In the electronic component of the present invention, when the average thickness of the substrate is set to 100, the average thickness of the insulating layer is preferably 50 to 200.

本發明的電子元件中,較佳為所述絕緣層含有樹脂、及分散於該樹脂中且導熱率高於所述樹脂的導熱率的導熱性粒子。 In the electronic component of the present invention, it is preferable that the insulating layer contains a resin and thermally conductive particles dispersed in the resin and having a thermal conductivity higher than a thermal conductivity of the resin.

本發明的電子元件中,較佳為所述導熱性粒子的構成材料含有氧化鋁、氮化鋁、氮化硼中的至少一種。 In the electronic component of the present invention, it is preferable that the constituent material of the thermally conductive particles contains at least one of alumina, aluminum nitride, and boron nitride.

本發明的電子元件中,較佳為所述導熱性粒子於所述絕緣層中的含量為25重量%~95重量%。 In the electronic component of the present invention, it is preferable that the content of the thermally conductive particles in the insulating layer is 25% by weight to 95% by weight.

本發明的電子元件中,較佳為更具有保護層,該保護層是設置於所述基材的與所述電子基板為相反之側,且具備保護所述基材的功能。 In the electronic component of the present invention, it is preferable to further have a protective layer which is provided on the opposite side of the substrate from the electronic substrate and has a function of protecting the substrate.

本發明的電子元件中,較佳為所述片材是以如下方式構 成:於積層於所述電子基板上之前的狀態下,所述電子零件的邊緣部接觸的第1區域的平均厚度大於所述第1區域以外的第2區域的平均厚度。 In the electronic component of the present invention, it is preferred that the sheet is constructed as follows In a state before being laminated on the electronic substrate, an average thickness of the first region in contact with the edge portion of the electronic component is larger than an average thickness of the second region other than the first region.

本發明的電子元件中,較佳為所述多個電子零件包含並列設置的2個以上的所述電子零件,且所述片材是以如下方式構成:於積層於所述電子基板之前的狀態下,與所述並列設置的電子零件的邊緣部連續而接觸的呈直線狀的第1區域的平均厚度大於所述第1區域以外的第2區域的平均厚度。 In the electronic component of the present invention, preferably, the plurality of electronic components include two or more of the electronic components arranged in parallel, and the sheet is configured in a state before being laminated on the electronic substrate. Next, the average thickness of the linear first region that continuously contacts the edge portion of the electronic component arranged in parallel is larger than the average thickness of the second region other than the first region.

本發明的電子元件中,較佳為於將所述片材積層於所述電子基板之前的狀態下,將所述片材的所述第1區域的平均厚度設定為A[μm]、所述第2區域的平均厚度設定為B[μm]時,A/B為1.05~3。 In the electronic component of the present invention, it is preferable that the average thickness of the first region of the sheet is set to A [μm] in a state before the sheet is laminated on the electronic substrate. When the average thickness of the second region is set to B [μm], A/B is 1.05 to 3.

本發明的電子元件中,較佳為所述片材更具有在所述電子基板側且與所述基材的邊緣部相對應的位置處,與所述絕緣層分離而設置的至少一個絕緣部。 In the electronic component of the present invention, it is preferable that the sheet has at least one insulating portion provided at a position corresponding to an edge portion of the substrate on the electronic substrate side and separated from the insulating layer. .

本發明的電子元件中,較佳為所述至少一個絕緣部包含沿著所述基材的邊緣部彼此空開間隔而設置的多個所述絕緣部。 In the electronic component of the present invention, it is preferable that the at least one insulating portion includes a plurality of the insulating portions which are provided at intervals along an edge portion of the base material.

本發明的電子元件中,較佳為所述絕緣部是沿著所述基材的邊緣部而形成為框狀。 In the electronic component of the present invention, it is preferable that the insulating portion is formed in a frame shape along an edge portion of the base material.

本發明的電子元件中,較佳為所述絕緣部的平均厚度小於所述絕緣層的平均厚度。 In the electronic component of the present invention, it is preferable that an average thickness of the insulating portion is smaller than an average thickness of the insulating layer.

本發明的電子元件中,較佳為所述片材的設有所述絕緣部的部分構成自所述電子基板上分離所述片材時握持的握持部。 In the electronic component of the present invention, it is preferable that a portion of the sheet on which the insulating portion is provided constitutes a grip portion that is held when the sheet is separated from the electronic substrate.

另外,本發明的片材為積層於電子基板上、且以經由接地部而固定於所述電子基板上的方式使用的片材,其中所述電子基板具有具備安裝面的配線基板、及安裝於該配線基板的所述安裝面上的多個電子零件,並且所述片材的特徵在於具有:片狀的基材,於將該片材積層於所述電子基板上的狀態下,與所述接地部接觸且具備導電性;以及至少一個絕緣層,於將該片材積層於所述電子基板上的狀態下,位於所述基材的所述電子基板側,且具備包含至少一個所述電子零件的尺寸。 Further, the sheet of the present invention is a sheet which is laminated on an electronic substrate and is fixed to the electronic substrate via a ground portion, wherein the electronic substrate has a wiring board having a mounting surface, and is mounted on a plurality of electronic components on the mounting surface of the wiring substrate, and the sheet is characterized by: a sheet-shaped substrate, in a state in which the sheet is laminated on the electronic substrate, and The grounding portion is in contact with and electrically conductive; and at least one insulating layer is disposed on the electronic substrate side of the substrate in a state in which the sheet is laminated on the electronic substrate, and is provided with at least one of the electrons The size of the part.

本發明的片材中,較佳為所述基材具有與所述絕緣層接觸而設置且具備黏著性的第1部分、及設置於該第1部分的與所述絕緣層為相反之側的第2部分。 In the sheet of the present invention, it is preferable that the substrate has a first portion which is provided in contact with the insulating layer and has adhesiveness, and a side opposite to the insulating layer which is provided on the first portion. part 2.

本發明的片材中,較佳為所述第1部分含有第1樹脂、及分散於該第1樹脂中的第1導電性粒子,且所述第2部分含有第2樹脂、及以較所述第1導電性粒子於所述第1部分中的含量更多的量而分散於該第2樹脂中的第2導電性粒子。 In the sheet of the present invention, it is preferable that the first portion contains a first resin and first conductive particles dispersed in the first resin, and the second portion contains a second resin and The second electroconductive particle in which the content of the first electroconductive particle is more than the content in the first portion is dispersed in the second resin.

本發明的片材中,較佳為相對於所述第1樹脂100重量份,所述第1導電性粒子於所述第1部分中的含量為1重量份~100重量份。 In the sheet of the present invention, the content of the first conductive particles in the first portion is preferably from 1 part by weight to 100 parts by weight based on 100 parts by weight of the first resin.

本發明的片材中,較佳為相對於所述第2樹脂100重量 份,所述第2導電性粒子於所述第2部分中的含量為100重量份~1500重量份。 The sheet of the present invention preferably has a weight of 100% relative to the second resin. The content of the second conductive particles in the second portion is from 100 parts by weight to 1,500 parts by weight.

本發明的片材中,較佳為所述第1導電性粒子的形狀與所述第2導電性粒子的形狀不同。 In the sheet of the present invention, it is preferable that the shape of the first conductive particles is different from the shape of the second conductive particles.

本發明的片材中,較佳為所述第1導電性粒子的形狀為樹枝狀或球狀。 In the sheet of the present invention, it is preferable that the shape of the first conductive particles is dendritic or spherical.

根據所述構成的本發明,藉由使用具備高的柔軟性的片材,於將該片材積層於配線基板上時,無需考慮電子零件的破損。因此,可縮小片材與電子零件之間隔,直至該些構件密接或接觸。藉此,可實現將片材積層於電子基板上而成的電子元件的進一步的薄型化。進而,可經由片材將電子零件的放熱高效地去除。 According to the present invention having the above configuration, by using a sheet having high flexibility, it is not necessary to consider damage of the electronic component when the sheet is laminated on the wiring board. Therefore, the interval between the sheet and the electronic component can be reduced until the members are in close contact or contact. Thereby, it is possible to further reduce the thickness of the electronic component in which the sheet is laminated on the electronic substrate. Further, the heat release of the electronic component can be efficiently removed via the sheet.

因此,根據本發明,可提供一種容易將自電子零件的放熱去除、薄型且可靠性高的電子元件,以及發揮充分的電磁波屏蔽效果、並且可實現所得的電子元件的薄型化的片材。 Therefore, according to the present invention, it is possible to provide an electronic component which is easy to remove heat from the electronic component, is thin and highly reliable, and has a sufficient electromagnetic wave shielding effect and can realize a thinning of the obtained electronic component.

1‧‧‧片材 1‧‧‧Sheet

2‧‧‧基材 2‧‧‧Substrate

2a‧‧‧露出區域 2a‧‧‧ exposed area

2X‧‧‧下層 2X‧‧‧Under

2Y‧‧‧上層 2Y‧‧‧Upper

20‧‧‧本體部 20‧‧‧ Body Department

21‧‧‧樹脂 21‧‧‧Resin

22‧‧‧導電性粒子 22‧‧‧Electrical particles

23‧‧‧金屬膜 23‧‧‧Metal film

24‧‧‧耳部 24‧‧ Ears

25‧‧‧樹脂 25‧‧‧Resin

26‧‧‧導電性粒子 26‧‧‧Electrical particles

3‧‧‧絕緣層 3‧‧‧Insulation

3a‧‧‧第1絕緣層 3a‧‧‧1st insulation layer

3b‧‧‧第2絕緣層 3b‧‧‧2nd insulation layer

3c‧‧‧第3絕緣層 3c‧‧‧3rd insulation layer

31‧‧‧樹脂 31‧‧‧Resin

32‧‧‧導熱性粒子 32‧‧‧thermal particles

33‧‧‧第1區域 33‧‧‧1st area

34‧‧‧第2區域 34‧‧‧2nd area

35‧‧‧絕緣部 35‧‧‧Insulation

4‧‧‧硬塗層 4‧‧‧hard coating

10‧‧‧電子元件 10‧‧‧Electronic components

100‧‧‧電子基板 100‧‧‧Electronic substrate

110‧‧‧配線基板 110‧‧‧Wiring substrate

101‧‧‧安裝面 101‧‧‧Installation surface

101a‧‧‧第1安裝區域 101a‧‧‧1st installation area

101b‧‧‧第2安裝區域 101b‧‧‧2nd installation area

101c‧‧‧第3安裝區域 101c‧‧‧3rd installation area

111‧‧‧基板 111‧‧‧Substrate

112‧‧‧配線 112‧‧‧Wiring

113‧‧‧接地配線 113‧‧‧ Grounding Wiring

114‧‧‧導電性銷 114‧‧‧Electrical sales

120‧‧‧半導體晶片 120‧‧‧Semiconductor wafer

圖1為表示本發明的電子元件的構成的分解立體圖。 Fig. 1 is an exploded perspective view showing the configuration of an electronic component of the present invention.

圖2為表示第1實施形態的片材的構成(接合於電子基板上的狀態)的縱剖面圖(圖1中的A-A線剖面圖)。 2 is a longitudinal cross-sectional view (a cross-sectional view taken along line A-A in FIG. 1) showing a configuration of a sheet according to the first embodiment (a state joined to an electronic substrate).

圖3為表示第2實施形態的片材的構成(接合於電子基板上之前的狀態)的放大剖面圖。 3 is an enlarged cross-sectional view showing a configuration of a sheet according to a second embodiment (a state before being bonded to an electronic substrate).

圖4(a)、圖4(b)為表示第3實施形態的片材的構成(接合於電子基板上之前的狀態)的放大剖面圖。 4(a) and 4(b) are enlarged cross-sectional views showing a configuration of a sheet according to a third embodiment (a state before being bonded to an electronic board).

圖5(a)、圖5(b)為表示第4實施形態的片材的構成(接合於電子基板上之前的狀態)的圖(圖5(a)為表示絕緣層附近的俯視圖,圖5(b)為表示圖5(a)中的B-B線剖面的中央部的圖)。 5(a) and 5(b) are views showing a configuration of a sheet according to a fourth embodiment (a state before being bonded to an electronic substrate) (Fig. 5(a) is a plan view showing the vicinity of the insulating layer, Fig. 5; (b) is a figure which shows the center part of the cross section of the BB line in FIG. 5 (a).

圖6為表示第4實施形態的片材的其他構成(接合於電子基板上之前的狀態)的俯視圖。 Fig. 6 is a plan view showing another configuration of the sheet according to the fourth embodiment (a state before being bonded to the electronic board).

圖7(a)、圖7(b)為表示第5實施形態的片材的構成(接合於電子基板上之前的狀態)的圖(圖7(a)為俯視圖,圖7(b)為表示圖7(a)中的C-C線剖面的中央部以及端部的圖)。 7(a) and 7(b) are views showing a configuration of a sheet according to a fifth embodiment (a state before being bonded to an electronic substrate) (Fig. 7(a) is a plan view, and Fig. 7(b) is a view Fig. 7(a) is a view showing a central portion and an end portion of a CC line cross section).

圖8為表示第5實施形態的片材的其他構成(接合於電子基板上之前的狀態)的俯視圖。 8 is a plan view showing another configuration (a state before being bonded to an electronic substrate) of the sheet according to the fifth embodiment.

圖9(a)、圖9(b)為表示第6實施形態的電子元件的端部的構成的縱剖面圖。 (a) and (b) of FIG. 9 are longitudinal cross-sectional views showing a configuration of an end portion of an electronic component according to a sixth embodiment.

圖10為表示第7實施形態的片材的構成(接合於電子基板上之前的狀態)的放大剖面圖。 Fig. 10 is an enlarged cross-sectional view showing a configuration of a sheet according to a seventh embodiment (a state before being bonded to an electronic board).

以下,根據隨附圖式所示的較佳實施形態對本發明的電子元件及片材加以詳細說明。 Hereinafter, the electronic component and sheet of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

圖1為表示本發明的電子元件的構成的分解立體圖。再者,以下為便於說明,將圖1中的上側設定為「上」,下側設定為 「下」。 Fig. 1 is an exploded perspective view showing the configuration of an electronic component of the present invention. In addition, for convenience of explanation, the upper side in FIG. 1 is set to "up", and the lower side is set to "under".

本發明的電子元件10具有電子基板100、及接合(積層)於電子基板100上的片材1。首先,於片材1的說明之前,對電子基板100加以說明。再者,電子基板100例如可列舉可撓性印刷基板、剛性印刷基板、剛性可撓性基板等。 The electronic component 10 of the present invention has an electronic substrate 100 and a sheet 1 bonded (laminated) on the electronic substrate 100. First, the electronic substrate 100 will be described before the description of the sheet 1. In addition, examples of the electronic substrate 100 include a flexible printed circuit board, a rigid printed circuit board, and a rigid flexible board.

電子基板100具備具有安裝面101的配線基板110、及安裝於該配線基板110的安裝面101上的多個半導體晶片(電子零件)120。再者,半導體晶片120例如可列舉:中央處理單元(Central Processing Unit,CPU)晶片、記憶體晶片、電源晶片、音源晶片等。 The electronic substrate 100 includes a wiring substrate 110 having a mounting surface 101 and a plurality of semiconductor wafers (electronic components) 120 mounted on the mounting surface 101 of the wiring substrate 110. Further, examples of the semiconductor wafer 120 include a central processing unit (CPU) chip, a memory chip, a power supply chip, and a sound source wafer.

配線基板110是由基板111、及形成於該基板111上的配線112以及接地配線(接地部)113所構成。配線112的一端部連接於電源,另一端部連接於半導體晶片120的端子。接地配線113是以避開配線112的方式而形成為框狀,且經接地。於本實施形態中,如圖1所示,藉由該接地配線113將安裝面101劃分成第1安裝區域101a、第2安裝區域101b、第3安裝區域101c。於第1安裝區域101a~第3安裝區域101c中,分別安裝有既定的半導體晶片120。 The wiring board 110 is composed of a substrate 111, a wiring 112 formed on the substrate 111, and a ground wiring (ground portion) 113. One end of the wiring 112 is connected to the power source, and the other end is connected to the terminal of the semiconductor wafer 120. The ground wiring 113 is formed in a frame shape so as to avoid the wiring 112, and is grounded. In the present embodiment, as shown in FIG. 1, the mounting surface 101 is divided into the first mounting region 101a, the second mounting region 101b, and the third mounting region 101c by the ground wiring 113. A predetermined semiconductor wafer 120 is mounted in each of the first mounting region 101a to the third mounting region 101c.

於該構成的電子基板100上接合片材1。以下,對片材1加以說明。 The sheet 1 is bonded to the electronic substrate 100 of this configuration. Hereinafter, the sheet 1 will be described.

<第1實施形態> <First embodiment>

首先,對片材1的第1實施形態加以說明。 First, the first embodiment of the sheet 1 will be described.

圖2為表示第1實施形態的片材的構成(接合於電子基板上之狀態)的縱剖面圖(圖1中的A-A線剖面圖)。再者,以下為便於說明,將圖2中的上側設定為「上」,下側設定為「下」。 2 is a longitudinal cross-sectional view (a cross-sectional view taken along line A-A in FIG. 1) showing a configuration of a sheet according to the first embodiment (a state joined to an electronic substrate). In the following, for convenience of explanation, the upper side in FIG. 2 is set to "up" and the lower side is set to "down".

如圖2所示,片材1具有具備導電性的片狀的基材2、設置於基材2的下表面(其中一面)上的絕緣層3、及設置於基材2的上表面(另一面)上的硬塗層4。該片材1是將絕緣層3置於電子基板100側而接合於電子基板100上。 As shown in FIG. 2, the sheet 1 has a sheet-like base material 2 having an electric conductivity, an insulating layer 3 provided on a lower surface (one surface) of the base material 2, and an upper surface provided on the base material 2 (another Hard coating 4 on one side). This sheet 1 is bonded to the electronic substrate 100 by placing the insulating layer 3 on the side of the electronic substrate 100.

基材2只要具有導電性即可,亦可由金屬膜構成,但較佳為如本實施形態般,由含有樹脂21的固化物或硬化物及導電性粒子22的樹脂膜所構成。再者,基材2亦可為該些金屬膜與樹脂膜的膜的組合,亦可為兩種以上的不同的樹脂膜的組合。關於此種組合的構成,將於下文的實施形態中表示。另外,於由金屬膜來構成基材2的情形時,該金屬膜可使用與導電性粒子22中列舉的金屬相同的金屬來形成。 The base material 2 may be formed of a metal film as long as it has conductivity. However, it is preferably composed of a resin film containing a cured product or a cured product of the resin 21 and the conductive particles 22 as in the present embodiment. Further, the substrate 2 may be a combination of the metal film and the film of the resin film, or a combination of two or more different resin films. The configuration of such a combination will be shown in the following embodiments. Further, in the case where the substrate 2 is composed of a metal film, the metal film can be formed using the same metal as that exemplified for the conductive particles 22.

另外,基材2可根據配線基板110的種類(目的)而將其導電性設定為等向導電性或異向導電性。再者,所謂等向導電性,是指基材2於其厚度方向及面方向上具有導電性,所謂異向導電性,是指基材2僅於其厚度方向上具有導電性。 Further, the base material 2 can be set to have an isotropic conductivity or an anisotropic conductivity depending on the type (purpose) of the wiring substrate 110. In addition, the isotropic conductivity means that the base material 2 has electrical conductivity in the thickness direction and the surface direction, and the term "isotropic conductivity" means that the base material 2 has conductivity only in the thickness direction thereof.

樹脂21例如可列舉熱塑性樹脂、硬化性樹脂等,可使用該些樹脂中的一種或將兩種以上組合使用。另外,硬化性樹脂例如可列舉:熱硬化性樹脂、光硬化性樹脂、厭氧硬化性樹脂、反應硬化性樹脂等,較佳為熱硬化性樹脂及光硬化性樹脂中的至 少一種。使用硬化性樹脂、特別是熱硬化性樹脂及光硬化性樹脂中的至少一種作為樹脂21所帶來的效果將於下文中加以說明。 The resin 21 may, for example, be a thermoplastic resin or a curable resin, and one of these resins may be used or two or more types may be used in combination. In addition, examples of the curable resin include a thermosetting resin, a photocurable resin, an anaerobic curable resin, and a reaction curable resin, and are preferably a thermosetting resin or a photocurable resin. One less. The effect of using at least one of a curable resin, particularly a thermosetting resin and a photocurable resin, as the resin 21 will be described later.

熱塑性樹脂例如可列舉:聚烯烴系樹脂、乙烯系樹脂、苯乙烯-丙烯酸系樹脂、二烯系樹脂、萜烯系樹脂、石油系樹脂、纖維素系樹脂、聚醯胺系樹脂、聚胺基甲酸酯系樹脂、聚酯系樹脂、聚碳酸酯系樹脂、氟系樹脂等。 Examples of the thermoplastic resin include a polyolefin resin, an ethylene resin, a styrene-acrylic resin, a diene resin, a terpene resin, a petroleum resin, a cellulose resin, a polyamide resin, and a polyamine group. A formate resin, a polyester resin, a polycarbonate resin, a fluorine resin, or the like.

熱硬化性樹脂只要為於一分子中具有1個以上的可用於由加熱引起的交聯反應的官能基的樹脂即可。該官能基例如可列舉:羥基、酚性羥基、甲氧基甲基、羧基、胺基、環氧基、氧雜環丁烷基、噁唑啉基、噁嗪基、氮丙啶基、硫醇基、異氰酸基(isocyanato)、封閉化異氰酸基、封閉化羧基、矽烷醇基等。 The thermosetting resin may be one which has one or more functional groups which can be used for a crosslinking reaction by heating in one molecule. Examples of the functional group include a hydroxyl group, a phenolic hydroxyl group, a methoxymethyl group, a carboxyl group, an amine group, an epoxy group, an oxetanyl group, an oxazolinyl group, an oxazinyl group, an aziridine group, and sulfur. An alcohol group, an isocyanato group, a blocked isocyanate group, a blocked carboxyl group, a stanol group or the like.

該熱硬化性樹脂的具體例例如可列舉:丙烯酸系樹脂、馬來酸系樹脂、聚丁二烯系樹脂、聚酯系樹脂、聚胺基甲酸酯系樹脂、脲系樹脂、環氧系樹脂、氧雜環丁烷系樹脂、苯氧系樹脂、聚醯亞胺系樹脂、聚醯胺系樹脂、聚醯胺醯亞胺系樹脂、苯酚系樹脂、甲酚系樹脂、三聚氰胺系樹脂、醇酸系樹脂、胺基系樹脂、聚乳酸系樹脂、噁唑啉系樹脂、苯并噁嗪系樹脂、矽酮系樹脂、氟系樹脂等。 Specific examples of the thermosetting resin include an acrylic resin, a maleic resin, a polybutadiene resin, a polyester resin, a polyurethane resin, a urea resin, and an epoxy resin. Resin, oxetane resin, phenoxy resin, polyimide resin, polyamine resin, polyamidoximine resin, phenol resin, cresol resin, melamine resin, An alkyd resin, an amine resin, a polylactic acid resin, an oxazoline resin, a benzoxazine resin, an anthrone resin, a fluorine resin, or the like.

另外,於使用熱硬化性樹脂的情形時,基材2較佳為除了含有熱硬化性樹脂以外,視需要而含有與所述官能基反應而形成化學交聯的樹脂或低分子化合物般的硬化劑。此種硬化劑並無特別限定,例如可列舉:苯酚酚醛清漆樹脂等酚系硬化劑,二氰 二胺(dicyandiamide)、芳香族二胺等胺系硬化劑般的可於相對較高的溫度下進行硬化反應的硬化劑,異氰酸酯系硬化劑,環氧系硬化劑,氮丙啶系硬化劑,金屬螯合物系硬化劑等可於相對較低的溫度(例如120℃以下)下進行硬化反應的硬化劑。 Further, in the case of using a thermosetting resin, the substrate 2 preferably contains a resin or a low molecular compound which reacts with the functional group to form a chemical crosslinking, in addition to the thermosetting resin. Agent. The curing agent is not particularly limited, and examples thereof include a phenolic curing agent such as a phenol novolak resin, and dicyandiamide. a curing agent capable of curing at a relatively high temperature like an amine-based curing agent such as dicyandiamide or an aromatic diamine, an isocyanate-based curing agent, an epoxy-based curing agent, and an aziridine-based curing agent. A metal chelate-based hardener or the like which can be subjected to a hardening reaction at a relatively low temperature (for example, 120 ° C or lower).

再者,可單獨使用該些硬化劑中的一種,亦可將兩種以上組合使用。藉由適當選擇硬化劑的種類、該些硬化劑的組合及含量等,可控制積層於電子基板100上之前(使用前)的片材1中的基材2的硬化程度(完全硬化狀態或半硬化狀態)、流動性的程度(固體狀態或凝膠狀態)以及黏著性的程度(高黏著性、低黏著性或非黏著性)中的至少一個。 Further, one of the hardeners may be used alone, or two or more of them may be used in combination. The degree of hardening of the substrate 2 in the sheet 1 before (before use) laminated on the electronic substrate 100 can be controlled by appropriately selecting the kind of the curing agent, the combination and content of the curing agents, and the like (completely hardened state or half) At least one of a hardened state, a degree of fluidity (solid state or gel state), and a degree of adhesiveness (high adhesion, low adhesion, or non-adhesiveness).

另一方面,光硬化性樹脂只要為於一分子中具有1個以上的藉由光而引起交聯反應的不飽和鍵的樹脂即可。光硬化性樹脂的具體例例如可列舉:丙烯酸系樹脂、馬來酸系樹脂、聚丁二烯系樹脂、聚酯系樹脂、聚胺基甲酸酯系樹脂、環氧系樹脂、氧雜環丁烷系樹脂、苯氧系樹脂、聚醯亞胺系樹脂、聚醯胺系樹脂、酚系樹脂、醇酸系樹脂、胺基系樹脂、聚乳酸系樹脂、噁唑啉系樹脂、苯并噁嗪系樹脂、矽酮系樹脂、氟系樹脂等。 On the other hand, the photocurable resin may be one which has one or more unsaturated bonds which cause a crosslinking reaction by light in one molecule. Specific examples of the photocurable resin include an acrylic resin, a maleic resin, a polybutadiene resin, a polyester resin, a polyurethane resin, an epoxy resin, and an oxygen heterocycle. Butane resin, phenoxy resin, polyamidene resin, polyamine resin, phenol resin, alkyd resin, amine resin, polylactic acid resin, oxazoline resin, benzo An oxazine resin, an anthrone resin, a fluorine resin, or the like.

本實施形態的基材2中,於此種樹脂21的固化物或硬化物中分散有導電性粒子22。藉由該構成,基材2(片材1)發揮電磁波屏蔽效果。導電性粒子22例如可列舉金屬粒子、碳粒子、導電性樹脂粒子等,可使用該些粒子中的一種或將兩種以上組合使用。 In the base material 2 of the present embodiment, the conductive particles 22 are dispersed in the cured product or the cured product of the resin 21. With this configuration, the substrate 2 (sheet 1) exerts an electromagnetic wave shielding effect. Examples of the conductive particles 22 include metal particles, carbon particles, conductive resin particles, and the like, and one type of these particles may be used or two or more types may be used in combination.

構成金屬粒子的金屬例如可列舉:金、鉑、銀、銅、鎳、鋁、鐵或該些金屬的合金,或者氧化銦錫(Indium Tin Oxide,ITO)、氧化銻錫(Antimony Tin Oxide,ATO)等,就價格及導電性的方面而言較佳為銅。另外,金屬粒子亦可為具備由金屬構成的核體、及被覆該核體且由金屬構成的被覆層的粒子。該金屬粒子例如可列舉:利用由銀所構成的被覆層將由銅所構成的核體被覆而成的銀塗佈銅粒子等。 Examples of the metal constituting the metal particles include gold, platinum, silver, copper, nickel, aluminum, iron, or an alloy of these metals, or indium tin oxide (ITO), antimony tin Oxide (ATO). ), etc., copper is preferred in terms of price and conductivity. Further, the metal particles may be particles having a core body made of a metal and a coating layer made of a metal and covering the core body. Examples of the metal particles include silver-coated copper particles obtained by coating a core body made of copper with a coating layer made of silver.

另外,構成碳粒子的碳例如可列舉:乙炔黑、科琴黑(Ketjen black)、爐黑(furnace black)、碳奈米管、碳奈米纖維、石墨(graphite)、富勒烯、石墨烯等。另外,構成導電性樹脂粒子的導電性樹脂例如可列舉:聚(3,4-伸乙基二氧噻吩)、聚乙炔、聚噻吩等。 Further, examples of the carbon constituting the carbon particles include acetylene black, Ketjen black, furnace black, carbon nanotube, carbon nanofiber, graphite, fullerene, and graphene. Wait. In addition, examples of the conductive resin constituting the conductive resin particles include poly(3,4-extended ethyldioxythiophene), polyacetylene, and polythiophene.

導電性粒子22的平均粒徑較佳為1μm~100μm左右,更佳為3μm~75μm左右,進而佳為5μm~50μm左右。藉由將導電性粒子22的平均粒徑設定為所述範圍,可提高基材2中的導電性粒子22的填充率。因此,可進一步提高基材2(片材1)的電磁波屏蔽效果。另外,例如於與樹脂21混合而製備樹脂組成物時,其流動性變良好,故成形為基材2的成形性提高。 The average particle diameter of the conductive particles 22 is preferably about 1 μm to 100 μm, more preferably about 3 μm to 75 μm, and still more preferably about 5 μm to 50 μm. By setting the average particle diameter of the conductive particles 22 to the above range, the filling rate of the conductive particles 22 in the substrate 2 can be increased. Therefore, the electromagnetic wave shielding effect of the substrate 2 (sheet 1) can be further improved. Further, for example, when the resin composition is prepared by mixing with the resin 21, the fluidity thereof is improved, so that the moldability of the base material 2 is improved.

另外,導電性粒子22的形狀可為球狀、針狀、鱗片狀、樹枝狀等任意形狀。再者,導電性粒子22的平均粒徑可藉由通常的雷射繞射法、散射法等進行測定而求出,可將假定與該微粒子集合體的投影面積相等的圓時的直徑的平均值設定為平均粒徑。 Further, the shape of the conductive particles 22 may be any shape such as a spherical shape, a needle shape, a scale shape, or a dendritic shape. Further, the average particle diameter of the conductive particles 22 can be obtained by measurement by a normal laser diffraction method, a scattering method, or the like, and the average diameter of a circle which is assumed to be equal to the projected area of the fine particle assembly can be obtained. The value is set to the average particle diameter.

導電性粒子22於基材2中的含量並無特別限定,相對於樹脂21的100重量份,較佳為100重量份~1500重量份,更佳為100重量份~1000重量份。藉由將導電性粒子22於基材2中的含量設定為所述範圍,無論導電性粒子22的種類如何,均可對基材2賦予必要且充分的導電性,可充分提高基材2的電磁波屏蔽效果。另外,含有樹脂21與導電性粒子22的樹脂組成物的流動性提高,更容易形成基材2,故亦較佳。 The content of the conductive particles 22 in the substrate 2 is not particularly limited, and is preferably from 100 parts by weight to 1,500 parts by weight, more preferably from 100 parts by weight to 1000 parts by weight, per 100 parts by weight of the resin 21 . By setting the content of the conductive particles 22 in the substrate 2 to the above range, the substrate 2 can be provided with necessary and sufficient conductivity regardless of the type of the conductive particles 22, and the substrate 2 can be sufficiently improved. Electromagnetic wave shielding effect. Further, the resin composition containing the resin 21 and the conductive particles 22 is improved in fluidity and is more likely to form the substrate 2, which is also preferable.

另外,基材2的平均厚度亦無特別限定,較佳為2μm~500μm左右,更佳為5μm~100μm左右。藉由將基材2的平均厚度設定為所述範圍,可防止基材2的機械強度的降低,並且實現基材2的薄型化。 Further, the average thickness of the substrate 2 is not particularly limited, but is preferably about 2 μm to 500 μm, more preferably about 5 μm to 100 μm. By setting the average thickness of the substrate 2 to the above range, it is possible to prevent the mechanical strength of the substrate 2 from being lowered and to reduce the thickness of the substrate 2.

再者,基材2例如亦可含有著色劑(顏料、染料)、阻燃劑、填充劑(無機添加劑)、潤滑劑、抗黏連劑、金屬鈍化劑、增黏劑、分散劑、矽烷偶合劑、防銹劑、銅抑制劑、還原劑、抗氧化劑、增稠樹脂、塑化劑、紫外線吸收劑、消泡劑、流平調整劑等。 Further, the substrate 2 may further contain, for example, a coloring agent (pigment, dye), a flame retardant, a filler (inorganic additive), a lubricant, an anti-blocking agent, a metal deactivator, a tackifier, a dispersing agent, a decane couple. Mixture, rust inhibitor, copper inhibitor, reducing agent, antioxidant, thickening resin, plasticizer, ultraviolet absorber, antifoaming agent, leveling agent, etc.

著色劑例如可列舉:有機顏料、碳黑、群青、鐵丹、鋅白、氧化鈦、石墨(graphite)等。阻燃劑例如可列舉:含鹵素阻燃劑、含磷阻燃劑、含氮阻燃劑、無機阻燃劑等。填充劑例如可列舉:玻璃纖維、二氧化矽、滑石、陶瓷等。 Examples of the colorant include organic pigments, carbon black, ultramarine blue, iron oxide, zinc white, titanium oxide, graphite, and the like. Examples of the flame retardant include a halogen-containing flame retardant, a phosphorus-containing flame retardant, a nitrogen-containing flame retardant, and an inorganic flame retardant. Examples of the filler include glass fiber, cerium oxide, talc, ceramics, and the like.

另外,潤滑劑例如可列舉:脂肪酸酯、烴樹脂、石蠟、高級脂肪酸、脂肪酸醯胺、脂肪族醇、金屬皂、改質矽酮等。抗 黏連劑例如可列舉:碳酸鈣、二氧化矽、聚甲基倍半矽氧烷、矽酸鋁鹽等。 Further, examples of the lubricant include a fatty acid ester, a hydrocarbon resin, a paraffin wax, a higher fatty acid, a fatty acid decylamine, an aliphatic alcohol, a metal soap, a modified fluorenone, and the like. anti- Examples of the binder include calcium carbonate, cerium oxide, polymethylsesquioxanes, and aluminum citrate.

於此種基材2的下表面(電子基板100側的面)上,設有絕緣層3。本實施形態中,如圖1所示,於基材2的下表面上,設有與安裝面101(配線基板110)的第1安裝區域100a相對應的第1絕緣層3a、與第2安裝區域100b相對應的第2絕緣層3b、及與第3安裝區域100c相對應的第3絕緣層3c。 An insulating layer 3 is provided on the lower surface (surface on the side of the electronic substrate 100) of the substrate 2. In the present embodiment, as shown in FIG. 1, the first insulating layer 3a corresponding to the first mounting region 100a of the mounting surface 101 (wiring substrate 110) and the second mounting are provided on the lower surface of the substrate 2. The second insulating layer 3b corresponding to the region 100b and the third insulating layer 3c corresponding to the third mounting region 100c.

第1絕緣層3a~第3絕緣層3c(以下,有時亦將該些絕緣層統稱而簡稱為「絕緣層3」)分別具備俯視小於基材2、且於將片材1積層於電子基板100上的狀態下包含1個以上的半導體晶片120的尺寸。藉由該構成,基材2的下表面上形成有自第1絕緣層3a~第3絕緣層3c露出的帶狀的露出區域2a。因此,該露出區域2a呈與配線基板110的接地配線113的形狀相對應的形狀。於將片材1接合於配線基板110上的狀態下,露出區域2a與接地配線113接觸,從而將基材2接地。即,基材2的露出區域2a構成將片材1連接(接合)於配線基板110的連接部(接合部)。 Each of the first insulating layer 3a to the third insulating layer 3c (hereinafter, collectively referred to as "insulating layer 3") may be provided in a plan view smaller than the substrate 2, and the sheet 1 may be laminated on the electronic substrate. The size of one or more semiconductor wafers 120 is included in the state of 100. With this configuration, the strip-shaped exposed region 2a exposed from the first insulating layer 3a to the third insulating layer 3c is formed on the lower surface of the substrate 2. Therefore, the exposed region 2a has a shape corresponding to the shape of the ground wiring 113 of the wiring substrate 110. In a state where the sheet 1 is bonded to the wiring substrate 110, the exposed region 2a is in contact with the ground wiring 113, and the substrate 2 is grounded. In other words, the exposed region 2a of the substrate 2 constitutes a connection portion (joining portion) that connects (joins) the sheet 1 to the wiring substrate 110.

例如,於基材2含有硬化性樹脂作為樹脂21的情形時,藉由在使基材2的露出區域2a與配線基板110的接地配線113接觸後,使硬化性樹脂硬化,可藉由其硬化物於該接觸部分中將片材1與電子基板100接合(固定)。 For example, when the base material 2 contains a curable resin as the resin 21, the curable resin can be hardened by bringing the exposed region 2a of the base material 2 into contact with the ground wiring 113 of the wiring substrate 110. The sheet 1 is bonded (fixed) to the electronic substrate 100 in the contact portion.

絕緣層3只要具備充分的絕緣性即可,可使用硬質樹脂或硬化性樹脂(特別是熱硬化性樹脂)來形成。硬質樹脂的具體 例例如可列舉:丙烯酸系、聚胺基甲酸酯、聚胺基甲酸酯脲、環氧樹脂(epoxy)、環氧酯、聚酯、聚碳酸酯、聚苯硫醚等,可使用該些樹脂中的一種或將兩種以上組合使用。另一方面,硬化性樹脂可使用與樹脂21中列舉的硬化性樹脂相同的樹脂。 The insulating layer 3 may be formed of a hard resin or a curable resin (particularly, a thermosetting resin) as long as it has sufficient insulating properties. Hard resin specific Examples thereof include acrylic, polyurethane, polyurethane urea, epoxy, epoxy ester, polyester, polycarbonate, and polyphenylene sulfide. One of these resins may be used in combination of two or more. On the other hand, as the curable resin, the same resin as the curable resin exemplified in the resin 21 can be used.

另外,於使用熱硬化性樹脂作為硬化性樹脂的情形時,絕緣層3亦可含有與基材2中記載的硬化劑相同的硬化劑。藉此,可控制積層於電子基板100上之前(使用前)的片材1中的絕緣層3的硬化程度(完全硬化狀態或半硬化狀態)、流動性的程度(固體狀態或凝膠狀態)以及黏著性的程度(高黏著性、低黏著性或非黏著性)中的至少一個。 Further, when a thermosetting resin is used as the curable resin, the insulating layer 3 may contain the same curing agent as the curing agent described in the substrate 2. Thereby, the degree of hardening (completely hardened state or semi-hardened state) of the insulating layer 3 in the sheet 1 before (before use) laminated on the electronic substrate 100, the degree of fluidity (solid state or gel state) can be controlled. And at least one of the degree of adhesion (high adhesion, low adhesion or non-adhesiveness).

另外,絕緣層3例如亦可含有著色劑(顏料、染料)、阻燃劑、填充劑(無機添加劑)、潤滑劑、抗黏連劑、金屬鈍化劑、增黏劑、分散劑、矽烷偶合劑、防銹劑、銅抑制劑、還原劑、抗氧化劑、增稠樹脂、塑化劑、紫外線吸收劑、消泡劑、流平調整劑等。 In addition, the insulating layer 3 may also contain, for example, a coloring agent (pigment, dye), a flame retardant, a filler (inorganic additive), a lubricant, an anti-blocking agent, a metal deactivator, a tackifier, a dispersing agent, a decane coupling agent. , rust inhibitors, copper inhibitors, reducing agents, antioxidants, thickening resins, plasticizers, UV absorbers, defoamers, leveling agents, etc.

絕緣層3的平均厚度並無特別限定,於將基材2的平均厚度設定為100時,較佳為50~200左右的比例,更佳為75~150左右的比例。具體而言,絕緣層3的平均厚度較佳為1μm~1000μm左右,更佳為3μm~200μm左右。藉此,絕緣層3可維持充分的絕緣性,並且對絕緣層3(片材1)賦予對電子基板100的表面的優異追隨性。 The average thickness of the insulating layer 3 is not particularly limited. When the average thickness of the substrate 2 is set to 100, the ratio is preferably about 50 to 200, and more preferably about 75 to 150. Specifically, the average thickness of the insulating layer 3 is preferably from about 1 μm to about 1000 μm, more preferably from about 3 μm to about 200 μm. Thereby, the insulating layer 3 can maintain sufficient insulation and impart excellent followability to the surface of the electronic substrate 100 to the insulating layer 3 (sheet 1).

另外,就促進自半導體晶片120的放熱的觀點而言,較 佳為如圖2所示,絕緣層3與半導體晶片120的表面密接,藉由將絕緣層3的平均厚度與基材2的平均厚度的關係設定為所述範圍,可進一步提高絕緣層3對半導體晶片120的表面的密接性。再者,為了使絕緣層3密接於半導體晶片120的表面,只要於將片材1接合於電子基板100上時,於減壓下或真空下進行該操作即可。 In addition, as far as promotion of heat release from the semiconductor wafer 120 is concerned, As shown in FIG. 2, the insulating layer 3 is in close contact with the surface of the semiconductor wafer 120, and by setting the relationship between the average thickness of the insulating layer 3 and the average thickness of the substrate 2 to the above range, the insulating layer 3 can be further improved. Adhesion of the surface of the semiconductor wafer 120. Further, in order to adhere the insulating layer 3 to the surface of the semiconductor wafer 120, the operation may be performed under reduced pressure or under vacuum when the sheet 1 is bonded to the electronic substrate 100.

另外,絕緣層3的下表面(與半導體晶片120的接觸面)可由平滑面構成,亦可由粗糙面構成。若由平滑面來構成絕緣層3的下表面(電子基板100側的面),則可增大絕緣層3與半導體晶片120的表面的接觸面積,可提高由片材1所得的放熱效果。另一方面,若由粗糙面來構成絕緣層3的下表面,則可稍許減少絕緣層3與半導體晶片120的表面的接觸面積,可於電子基板100的回收時更容易地將絕緣層3(片材1)自半導體晶片120上去除。 Further, the lower surface (contact surface with the semiconductor wafer 120) of the insulating layer 3 may be composed of a smooth surface or a rough surface. When the lower surface (the surface on the electronic substrate 100 side) of the insulating layer 3 is formed by the smooth surface, the contact area between the insulating layer 3 and the surface of the semiconductor wafer 120 can be increased, and the heat radiation effect by the sheet 1 can be improved. On the other hand, if the lower surface of the insulating layer 3 is formed of a rough surface, the contact area of the insulating layer 3 with the surface of the semiconductor wafer 120 can be slightly reduced, and the insulating layer 3 can be more easily removed during the recovery of the electronic substrate 100 ( Sheet 1) is removed from the semiconductor wafer 120.

另一方面,於基材2的上表面(與電子基板100為相反側的面)上,設有具備保護基材2的功能的硬塗層(保護層)4。藉此,可較佳地防止基材2的破損。 On the other hand, a hard coat layer (protective layer) 4 having a function of protecting the substrate 2 is provided on the upper surface of the substrate 2 (the surface opposite to the electronic substrate 100). Thereby, damage of the substrate 2 can be preferably prevented.

此種硬塗層4例如較佳為由具有α,β-不飽和雙鍵的二官能以上的多官能或單官能單體、乙烯型單體、烯丙基型單體、單官能(甲基)丙烯酸酯單體、多官能(甲基)丙烯酸酯單體般的自由基聚合系單體的聚合物(硬化物)所構成。藉由以該單體的聚合物來構成硬塗層4,硬塗層4的強度增大,防止基材2的破損的效果進一步提高。 Such a hard coat layer 4 is preferably, for example, a difunctional or higher polyfunctional or monofunctional monomer having an α,β-unsaturated double bond, a vinyl monomer, an allyl monomer, and a monofunctional (methyl group). A polymer (cured product) of a radical polymerizable monomer such as an acrylate monomer or a polyfunctional (meth) acrylate monomer. By forming the hard coat layer 4 from the polymer of the monomer, the strength of the hard coat layer 4 is increased, and the effect of preventing breakage of the substrate 2 is further improved.

再者,具有α,β-不飽和雙鍵的二官能以上的單體可為例如分子量小於1000的分子量相對較低的單體(所謂狹義的單體),亦可為例如重量平均分子量為1000以上且小於10000的分子量相對較高的寡聚物或預聚物。此處,具有α,β-不飽和雙鍵的寡聚物例如可列舉:聚酯(甲基)丙烯酸酯、聚(甲基)丙烯酸胺基甲酸酯、環氧(甲基)丙烯酸酯、(甲基)丙烯酸化馬來酸改質聚丁二烯等。 Further, the difunctional or higher monomer having an α,β-unsaturated double bond may be, for example, a monomer having a relatively low molecular weight of less than 1000 (so-called narrowly defined monomer), and may have, for example, a weight average molecular weight of 1,000. An oligomer or prepolymer having a relatively high molecular weight of less than 10,000 above. Here, examples of the oligomer having an α,β-unsaturated double bond include polyester (meth) acrylate, poly(meth) acrylate urethane, and epoxy (meth) acrylate. (Meth)acrylated maleic acid modified polybutadiene and the like.

乙烯型單體例如可列舉:苯乙烯、α-甲基苯乙烯、二乙烯基苯、N-乙烯基吡咯啶酮、乙酸乙烯酯、N-乙烯基甲醛、N-乙烯基己內醯胺、烷基乙烯基醚等。另外,烯丙基型單體例如可列舉:異三聚氰酸三甲基丙烯酸酯、三聚氰酸三烯丙酯等。 Examples of the vinyl monomer include styrene, α-methylstyrene, divinylbenzene, N-vinylpyrrolidone, vinyl acetate, N-vinylformaldehyde, and N-vinylcaprolactam. Alkyl vinyl ether and the like. Further, examples of the allyl type monomer include triisomeric cyanuric acid trimethacrylate and triallyl cyanurate.

單官能(甲基)丙烯酸酯單體例如可列舉:2-(甲基)丙烯醯氧基乙基鄰苯二甲酸酯、2-(甲基)丙烯醯氧基乙基-2-羥基乙基鄰苯二甲酸酯、2-(甲基)丙烯醯氧基乙基六氫鄰苯二甲酸酯、2-(甲基)丙烯醯氧基丙基鄰苯二甲酸酯、(甲基)丙烯酸-2-乙基己酯、2-乙基己基卡必醇(甲基)丙烯酸酯、(甲基)丙烯酸-2-羥基丁酯、(甲基)丙烯酸-2-羥基乙酯、(甲基)丙烯酸-2-羥基丙酯、(甲基)丙烯酸-2-甲氧基乙酯、(甲基)丙烯酸-3-甲氧基丁酯、(甲基)丙烯酸-4-羥基丁酯、(甲基)丙烯酸苄酯、丁二醇單(甲基)丙烯酸酯、(甲基)丙烯酸丁氧基乙酯、(甲基)丙烯酸丁酯、己內酯(甲基)丙烯酸酯、(甲基)丙烯酸鯨蠟酯、甲酚(甲基)丙烯酸酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸二環戊酯、(甲基)丙烯酸二環戊烯酯、(甲基)丙烯酸二環戊烯氧基乙酯、二乙二醇單乙醚(甲基)丙烯酸酯、(甲基)丙烯酸二甲 基胺基乙酯、二丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸異戊酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸異丁酯、(甲基)丙烯酸異癸酯、(甲基)丙烯酸異辛酯、(甲基)丙烯酸異硬脂酯、(甲基)丙烯酸異肉豆蔻酯、月桂氧基聚乙二醇(甲基)丙烯酸酯、(甲基)丙烯酸月桂酯、甲氧基二丙二醇(甲基)丙烯酸酯、甲氧基三丙二醇(甲基)丙烯酸酯、甲氧基聚乙二醇(甲基)丙烯酸酯、甲氧基三乙二醇(甲基)丙烯酸酯、(甲基)丙烯酸甲酯、新戊二醇苯甲酸酯(甲基)丙烯酸酯、壬基苯氧基聚乙二醇(甲基)丙烯酸酯、壬基苯氧基聚丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸八氟戊酯、辛氧基聚乙二醇-聚丙二醇(甲基)丙烯酸酯、(甲基)丙烯酸辛酯、對枯基苯氧基乙二醇(甲基)丙烯酸酯、(甲基)丙烯酸全氟辛基乙酯、(甲基)丙烯酸苯氧酯、苯氧基二乙二醇(甲基)丙烯酸酯、(甲基)丙烯酸苯氧基乙酯、苯氧基六乙二醇(甲基)丙烯酸酯、苯氧基四乙二醇(甲基)丙烯酸酯、聚乙二醇(甲基)丙烯酸酯、(甲基)丙烯酸硬脂酯、琥珀酸(甲基)丙烯酸酯、(甲基)丙烯酸第三丁酯、(甲基)丙烯酸第三丁基環己酯、(甲基)丙烯酸四氟丙酯、(甲基)丙烯酸四氫糠酯、(甲基)丙烯酸三溴苯酯、(甲基)丙烯酸十三烷基酯、(甲基)丙烯酸三氟乙酯、(甲基)丙烯酸-β-羧基乙酯、ω-羧基-聚己內酯(甲基)丙烯酸酯、或該些單體的衍生物或改質品等。 Examples of the monofunctional (meth) acrylate monomer include 2-(meth) propylene oxiranyl ethyl phthalate and 2-(methyl) propylene methoxyethyl 2- hydroxyethyl Phthalates, 2-(methyl)propenyloxyethylhexahydrophthalate, 2-(meth)acryloxypropyl phthalate, (A) 2-ethylhexyl acrylate, 2-ethylhexyl carbitol (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth)acrylate, 2-methoxyethyl (meth)acrylate, 3-methoxybutyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate Ester, benzyl (meth) acrylate, butanediol mono (meth) acrylate, butoxyethyl (meth) acrylate, butyl (meth) acrylate, caprolactone (meth) acrylate, Cetyl (meth)acrylate, cresol (meth) acrylate, cyclohexyl (meth) acrylate, dicyclopentanyl (meth) acrylate, dicyclopentenyl (meth) acrylate, (a) Dicyclopentenyloxyethyl acrylate, diethylene glycol monoethyl ether (meth) acrylate, dimethyl (meth) acrylate Aminoethyl ester, dipropylene glycol (meth) acrylate, phenyl (meth) acrylate, ethyl (meth) acrylate, isoamyl (meth) acrylate, isobornyl (meth) acrylate, ( Isobutyl methacrylate, isodecyl (meth) acrylate, isooctyl (meth) acrylate, isostearyl (meth) acrylate, isomyristyl (meth) acrylate, lauric oxy-poly Ethylene glycol (meth) acrylate, lauryl (meth) acrylate, methoxy dipropylene glycol (meth) acrylate, methoxy tripropylene glycol (meth) acrylate, methoxy polyethylene glycol ( Methyl) acrylate, methoxytriethylene glycol (meth) acrylate, methyl (meth) acrylate, neopentyl glycol benzoate (meth) acrylate, nonyl phenoxy polyethyl b Glycol (meth) acrylate, nonyl phenoxy polypropylene glycol (meth) acrylate, octafluoropentyl (meth) acrylate, octyloxy polyethylene glycol - polypropylene glycol (meth) acrylate, Octyl (meth)acrylate, p-cumylphenoxyethylene glycol (meth)acrylate, perfluorooctylethyl (meth)acrylate, phenoxy (meth)acrylate, phenoxydiethyl Glycol Acrylate, phenoxyethyl (meth)acrylate, phenoxy hexaethylene glycol (meth) acrylate, phenoxytetraethylene glycol (meth) acrylate, polyethylene glycol (A) Acrylate, stearyl (meth) acrylate, methacrylate (meth) acrylate, tert-butyl (meth) acrylate, t-butyl cyclohexyl (meth) acrylate, (methyl) Tetrafluoropropyl acrylate, tetrahydrofurfuryl (meth) acrylate, tribromophenyl (meth) acrylate, tridecyl (meth) acrylate, trifluoroethyl (meth) acrylate, (methyl) Acrylic acid-β-carboxyethyl ester, ω-carboxy-polycaprolactone (meth) acrylate, or derivatives or modified products of these monomers.

多官能(甲基)丙烯酸酯單體例如可列舉:1,3-丁二醇二(甲基)丙烯酸酯、1,4-丁二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、1,9-壬二醇二(甲基)丙烯酸酯、雙酚A二(甲基)丙烯 酸酯、雙酚F二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、六氫鄰苯二甲酸二(甲基)丙烯酸酯、羥基三甲基乙酸新戊二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、羥基三甲基乙酸酯新戊二醇二(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、鄰苯二甲酸二(甲基)丙烯酸酯、聚乙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、聚四亞甲基二醇二(甲基)丙烯酸酯、雙酚A二縮水甘油醚二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、三環癸烷二甲醇二(甲基)丙烯酸酯、二羥甲基二環戊烷二(甲基)丙烯酸酯、新戊二醇改質三羥甲基丙烷二(甲基)丙烯酸酯、三丙二醇二(甲基)丙烯酸酯、三甘油二(甲基)丙烯酸酯、二丙二醇二(甲基)丙烯酸酯、甘油三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、磷酸三(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基丙烷苯甲酸酯三(甲基)丙烯酸酯、三((甲基)丙烯醯氧基乙基)異三聚氰酸酯、二(甲基)丙烯酸化異三聚氰酸酯、二季戊四醇六(甲基)丙烯酸酯、二季戊四醇羥基五(甲基)丙烯酸酯、二-三羥甲基丙烷四(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、或者該些單體的衍生物或改質品等。 Examples of the polyfunctional (meth) acrylate monomer include 1,3-butylene glycol di(meth) acrylate, 1,4-butanediol di(meth) acrylate, and 1,6-hexane. Alcohol di(meth)acrylate, 1,9-nonanediol di(meth)acrylate, bisphenol A di(meth)propene Acid ester, bisphenol F di(meth) acrylate, diethylene glycol di(meth) acrylate, hexahydrophthalic acid di(meth) acrylate, hydroxy trimethyl acetic acid neopentyl glycol (Meth) acrylate, neopentyl glycol di(meth) acrylate, hydroxytrimethyl acetate neopentyl glycol di(meth) acrylate, pentaerythritol di(meth) acrylate, phthalic acid Di(meth)acrylate formic acid, polyethylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, polytetramethylene glycol di(meth)acrylate, bisphenol A Glycidyl ether di(meth)acrylate, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, tricyclodecane dimethanol di(meth)acrylate, two Hydroxymethyldicyclopentane di(meth)acrylate, neopentyl glycol modified trimethylolpropane di(meth)acrylate, tripropylene glycol di(meth)acrylate, triglycerin di(methyl) Acrylate, dipropylene glycol di(meth)acrylate, tris(meth)acrylate, pentaerythritol tri(meth)acrylate, tris(meth)acrylate,trimethylol Alkane tri(meth)acrylate, trimethylolpropane benzoate tri(meth)acrylate, tris((meth)propenyloxyethyl)isocyanate, di(methyl) Acrylic isocyanurate, dipentaerythritol hexa(meth) acrylate, dipentaerythritol hydroxypenta(meth) acrylate, di-trimethylolpropane tetra(meth) acrylate, pentaerythritol tetra (a) Acrylate, or a derivative or modified product of the monomers.

再者,硬塗層4例如亦可由聚對苯二甲酸乙二酯(Polyethylene terephthalate,PET)、聚對苯二甲酸丁二酯(Polybutylene terephthalate,PBT)般的聚酯系樹脂、聚甲基丙烯酸甲酯般的丙烯酸系樹脂、聚乙烯、聚丙烯、乙烯-乙酸乙烯酯共聚物般的聚烯烴系樹脂等熱塑性樹脂所構成。 Further, the hard coat layer 4 may be, for example, a polyethylene terephthalate (PET), a polybutylene terephthalate (PBT)-like polyester resin, or a polymethacrylic acid. A thermoplastic resin such as a methyl ester-like acrylic resin, a polyolefin resin such as polyethylene, polypropylene or an ethylene-vinyl acetate copolymer.

另外,硬塗層4例如亦可含有著色劑(顏料、染料)、阻燃劑、填充劑(無機添加劑)、潤滑劑、抗黏連劑、金屬鈍化劑、增黏劑、分散劑、矽烷偶合劑、防銹劑、銅抑制劑、還原劑、抗氧化劑、增稠樹脂、塑化劑、紫外線吸收劑、消泡劑、流平調整劑等。 In addition, the hard coat layer 4 may also contain, for example, a colorant (pigment, dye), a flame retardant, a filler (inorganic additive), a lubricant, an anti-blocking agent, a metal passivating agent, a tackifier, a dispersing agent, a decane couple. Mixture, rust inhibitor, copper inhibitor, reducing agent, antioxidant, thickening resin, plasticizer, ultraviolet absorber, antifoaming agent, leveling agent, etc.

於由單體的聚合物(硬化物)來構成硬塗層4的情形時,硬塗層4的平均厚度並無特別限定,較佳為0.1μm~10μm左右,更佳為0.5μm~5μm左右。另一方面,於由熱塑性樹脂的固化物來構成硬塗層4的情形時,硬塗層4的平均厚度較佳為1μm~50μm左右,更佳為5μm~30μm左右。藉由將硬塗層4的平均厚度設定為所述範圍,可維持片材1的可撓性,並且更可靠地防止基材2的破損。 When the hard coat layer 4 is composed of a polymer (cured material) of a monomer, the average thickness of the hard coat layer 4 is not particularly limited, but is preferably about 0.1 μm to 10 μm, more preferably about 0.5 μm to 5 μm. . On the other hand, when the hard coat layer 4 is composed of a cured product of a thermoplastic resin, the average thickness of the hard coat layer 4 is preferably from about 1 μm to about 50 μm, more preferably from about 5 μm to about 30 μm. By setting the average thickness of the hard coat layer 4 to the above range, the flexibility of the sheet 1 can be maintained, and the damage of the substrate 2 can be more reliably prevented.

再者,保護層不限定於硬塗層4,亦可為吸收來自外部的應力或衝擊的緩衝層、印刷層等,亦可為將該些層組合而成的積層體。 Further, the protective layer is not limited to the hard coat layer 4, and may be a buffer layer or a printed layer that absorbs stress or impact from the outside, or may be a laminated body in which the layers are combined.

如上述般的片材1例如可藉由如下方式製造。 The sheet 1 as described above can be produced, for example, in the following manner.

首先,將硬塗層用樹脂組成物塗敷於剝離片上後,使之硬化或固化。藉此獲得硬塗層4。 First, the resin composition for a hard coat layer is applied onto a release sheet, and then cured or cured. Thereby, the hard coat layer 4 is obtained.

繼而,將基材用樹脂組成物塗敷於硬塗層4上後,使之半硬化、硬化或固化。藉此獲得基材2。於該狀態下,基材2可具有黏著性,亦可不具有黏著性。 Then, after the base resin composition is applied onto the hard coat layer 4, it is semi-hardened, hardened, or cured. Thereby, the substrate 2 was obtained. In this state, the substrate 2 may have adhesiveness or may not have adhesiveness.

然後,將絕緣層用樹脂組成物塗敷於基材2上後,使之 半硬化、硬化或固化。藉此獲得絕緣層3。於該狀態下,絕緣層3可具有黏著性,亦可不具有黏著性。 Then, the resin composition for the insulating layer is applied onto the substrate 2, and then Semi-hardened, hardened or cured. Thereby, the insulating layer 3 is obtained. In this state, the insulating layer 3 may have adhesiveness or may not have adhesiveness.

塗敷各樹脂組成物的方法例如可使用凹版塗佈方式、吻合塗佈方式、模塗方式、狹縫塗佈方式、缺角輪塗佈(comma coat)方式、刮刀(blade)方式、輥塗方式、刀片塗佈(knife coat)方式、噴霧塗佈方式、棒塗方式、旋塗方式、浸漬塗佈方式等。 The method of applying each resin composition can be, for example, a gravure coating method, an anastomosis coating method, a die coating method, a slit coating method, a comma coat method, a blade method, or a roll coating method. The method, the knife coating method, the spray coating method, the bar coating method, the spin coating method, the dip coating method, and the like.

再者,關於片材1,亦可分別形成各層後,將該些層彼此接合而形成。 Further, the sheet 1 may be formed by separately forming the respective layers and joining the layers.

另外,片材1中,亦可於基材2與硬塗層(保護層)4之間,設置例如導熱層、水蒸氣阻障層、阻氧層、低介電常數層、高介電常數層、低介電正切層、高介電正切層、耐熱性層等的一個以上的層。 Further, in the sheet 1, between the substrate 2 and the hard coat layer (protective layer) 4, for example, a heat conductive layer, a water vapor barrier layer, an oxygen barrier layer, a low dielectric constant layer, and a high dielectric constant may be provided. One or more layers of a layer, a low dielectric tangent layer, a high dielectric tangent layer, a heat resistant layer, and the like.

以如下方式將此種片材1接合於電子基板100上。 This sheet 1 is bonded to the electronic substrate 100 in the following manner.

首先,將絕緣層3置於電子基板100側,設定為將片材1積層於電子基板100上的狀態。繼而,於該狀態下,對電子基板100加熱壓接片材1,結果絕緣層3密接於半導體晶片120的表面,並且基材2的露出區域2a與接地配線113接觸,將片材1固定(接合)於電子基板100上。藉此獲得電子元件10。再者,藉由在減壓下或真空下進行加熱壓接,絕緣層3對半導體晶片120的表面的密接度提高。結果,不僅發揮由片材1所得的電磁波屏蔽效果,亦發揮良好的放熱效果。 First, the insulating layer 3 is placed on the electronic substrate 100 side, and is set in a state in which the sheet 1 is laminated on the electronic substrate 100. Then, in this state, the pressure-bonding sheet 1 is heated to the electronic substrate 100, and as a result, the insulating layer 3 is in close contact with the surface of the semiconductor wafer 120, and the exposed region 2a of the substrate 2 is in contact with the ground wiring 113 to fix the sheet 1 ( Bonded to the electronic substrate 100. Thereby the electronic component 10 is obtained. Further, the adhesion of the insulating layer 3 to the surface of the semiconductor wafer 120 is improved by heating and pressure bonding under reduced pressure or under vacuum. As a result, not only the electromagnetic wave shielding effect obtained by the sheet 1 but also a good heat release effect is exhibited.

再者,於基材2含有熱硬化性樹脂且為半硬化狀態的情 形時,藉由所述加熱加壓,熱硬化性樹脂硬化,藉由其硬化物將基材2的露出區域2a牢固地接合於接地配線113上。另外,藉由熱硬化性樹脂的硬化,基材2(片材1)自身的機械強度亦提高。另外,於基材2含有光硬化性樹脂的情形時,於所述加熱壓接後,對基材2的露出區域2a照射光(活性放射線)。藉此,光硬化性樹脂硬化,藉由其硬化物將基材2的露出區域2a牢固地接合於接地配線113上。進而,於基材2是由金屬膜所構成的情形時,於所述加熱壓接之前於接地配線113上設置焊材(焊料),藉此經由焊材將基材2的露出區域2a牢固地接合於接地配線113上。 Furthermore, the substrate 2 contains a thermosetting resin and is semi-hardened. In the case of the shape, the thermosetting resin is cured by the heating and pressing, and the exposed region 2a of the substrate 2 is firmly bonded to the ground wiring 113 by the cured product. Further, the mechanical strength of the base material 2 (sheet 1) itself is also improved by the hardening of the thermosetting resin. In the case where the base material 2 contains a photocurable resin, light (active radiation) is applied to the exposed region 2a of the substrate 2 after the heating and pressure bonding. Thereby, the photocurable resin is cured, and the exposed region 2a of the substrate 2 is firmly bonded to the ground wiring 113 by the cured product. Further, when the base material 2 is composed of a metal film, a solder material (solder) is provided on the ground wiring 113 before the heat sealing, whereby the exposed region 2a of the substrate 2 is firmly fixed via the solder material. It is bonded to the ground wiring 113.

此種電子元件10容易將自半導體晶片120的放熱去除,為薄型且具有高的可靠性,例如可用於智慧型電話等行動電話、個人電腦、輸入板(tablet)終端機、發光二極體(Light Emitting Diode,LED)照明、有機電致發光(Electroluminescence,EL)照明、液晶電視、有機EL電視、數位相機、數位攝像機、汽車等的車載零件等。 Such an electronic component 10 is easy to remove the heat release from the semiconductor wafer 120, and is thin and has high reliability, and can be used, for example, in a mobile phone such as a smart phone, a personal computer, a tablet terminal, and a light-emitting diode ( Light Emitting Diode, LED) lighting, organic electroluminescence (EL) lighting, LCD TVs, organic EL TVs, digital cameras, digital cameras, automotive parts, etc.

<第2實施形態> <Second embodiment>

繼而,對本發明的第2實施形態加以說明。 Next, a second embodiment of the present invention will be described.

圖3為表示第2實施形態的片材的構成(接合於電子基板上之前的狀態)的放大剖面圖。以下,對第2實施形態加以說明,但以與所述第1實施形態的不同點為中心進行說明,關於相同的事項,省略其說明。再者,以下為便於說明,將圖3中的上側設定為「上」,下側設定為「下」。 3 is an enlarged cross-sectional view showing a configuration of a sheet according to a second embodiment (a state before being bonded to an electronic substrate). In the following, the second embodiment will be described, but the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In the following, for convenience of explanation, the upper side in FIG. 3 is set to "up" and the lower side is set to "down".

對於第2實施形態的片材1而言,絕緣層3(第1絕緣層3a~第3絕緣層3c)的構成不同,除此以外與所述第1實施形態相同。即,如圖3所示,第2實施形態的絕緣層3含有樹脂31、及分散於該樹脂31中且導熱率高於樹脂31的導熱率的導熱性粒子32。藉由絕緣層3含有導熱性粒子32,片材1的導熱性提高,由片材1所得的放熱效果進一步增大。 In the sheet material 1 of the second embodiment, the configuration of the insulating layer 3 (the first insulating layer 3a to the third insulating layer 3c) is the same as that of the first embodiment. That is, as shown in FIG. 3, the insulating layer 3 of the second embodiment contains the resin 31 and the thermally conductive particles 32 dispersed in the resin 31 and having a thermal conductivity higher than that of the resin 31. When the insulating layer 3 contains the thermally conductive particles 32, the thermal conductivity of the sheet 1 is improved, and the heat releasing effect by the sheet 1 is further increased.

導熱性粒子32的構成材料例如可列舉:氧化鈣、氧化鎂、氧化鋁般的金屬氧化物,氫氧化鋁、氫氧化鎂般的金屬氫氧化物,氮化鋁、氮化硼般的金屬氮化物,碳酸鈣、碳酸鎂般的金屬碳酸鹽,矽酸鈣般的金屬矽酸鹽,結晶性二氧化矽、非晶性二氧化矽、碳化矽般的矽化合物等,可使用該些材料中的一種或將兩種以上組合使用。 Examples of the constituent material of the thermally conductive particles 32 include metal oxides such as calcium oxide, magnesium oxide, and aluminum oxide, metal hydroxides such as aluminum hydroxide and magnesium hydroxide, and metal nitrogens such as aluminum nitride and boron nitride. Compounds, calcium carbonate, magnesium carbonate-like metal carbonates, calcium citrate-like metal silicates, crystalline cerium oxide, amorphous cerium oxide, cerium carbide-like cerium compounds, etc., can be used in these materials. One type or a combination of two or more types.

該些材料中,導熱性粒子32的構成材料較佳為氧化鋁、氮化鋁及氮化硼中的至少一種,就耐熱性及絕緣可靠性高的方面而言,更佳為氧化鋁。另外,球狀氧化鋁就可於絕緣層3中最密填充的方面而言優異,即便於增多填充量的情形時,亦可防止絕緣層3的彈性模量不需要地上升,就此方面而言尤佳。再者,導熱性粒子32亦可含有多種粒子。 Among these materials, the constituent material of the thermally conductive particles 32 is preferably at least one of alumina, aluminum nitride, and boron nitride, and more preferably alumina in terms of heat resistance and high insulation reliability. Further, the spherical alumina can be excellent in the most dense filling of the insulating layer 3, and even when the filling amount is increased, the elastic modulus of the insulating layer 3 can be prevented from undesirably rising, in this respect, Especially good. Further, the thermally conductive particles 32 may contain a plurality of types of particles.

導熱性粒子32的平均粒徑並無特別限定,較佳為0.1μm~250μm左右,更佳為0.5μm~100μm左右。該平均粒徑的導熱性粒子32容易均勻分散於絕緣層3中,故可進一步提高絕緣層3的導熱性。 The average particle diameter of the thermally conductive particles 32 is not particularly limited, but is preferably about 0.1 μm to 250 μm, more preferably about 0.5 μm to 100 μm. Since the thermally conductive particles 32 having the average particle diameter are easily dispersed uniformly in the insulating layer 3, the thermal conductivity of the insulating layer 3 can be further improved.

另外,導熱性粒子32的形狀可為球狀、針狀、鱗片狀、樹枝狀等的任意形狀。再者,導熱性粒子32的平均粒徑可藉由通常的雷射繞射法、散射法等進行測定而求出,可將假定與其微粒子集合體的投影面積相等的圓時的直徑的平均值設定為平均粒徑。 Further, the shape of the thermally conductive particles 32 may be any shape such as a spherical shape, a needle shape, a scale shape, or a dendritic shape. In addition, the average particle diameter of the thermally conductive particles 32 can be determined by a normal laser diffraction method, a scattering method, or the like, and the average value of the diameters of a circle which is assumed to be equal to the projected area of the fine particle assembly can be obtained. Set to the average particle size.

導熱性粒子32於絕緣層3中的含量並無特別限定,較佳為25重量%~95重量%左右,更佳為35重量%~85重量%左右。藉由將導熱性粒子32於絕緣層3中的含量設定為所述範圍,可防止絕緣層3的機械強度降低,並且充分提高絕緣層3的導熱性。 The content of the thermally conductive particles 32 in the insulating layer 3 is not particularly limited, but is preferably about 25% by weight to about 95% by weight, more preferably about 35% by weight to about 85% by weight. By setting the content of the thermally conductive particles 32 in the insulating layer 3 to the above range, the mechanical strength of the insulating layer 3 can be prevented from being lowered, and the thermal conductivity of the insulating layer 3 can be sufficiently improved.

再者,樹脂31可使用與所述第1實施形態中絕緣層3中可使用的樹脂相同的樹脂。另外,絕緣層3亦可含有與所述第1實施形態中記載的硬化劑相同的硬化劑。 Further, as the resin 31, the same resin as that which can be used in the insulating layer 3 in the first embodiment can be used. Further, the insulating layer 3 may contain the same curing agent as the curing agent described in the first embodiment.

於如上所述的第2實施形態中,亦發揮與所述第1實施形態相同的作用、效果。 In the second embodiment as described above, the same actions and effects as those of the first embodiment are also exhibited.

<第3實施形態> <Third embodiment>

繼而,對本發明的第3實施形態加以說明。 Next, a third embodiment of the present invention will be described.

圖4(a)、圖4(b)為表示第3實施形態的片材的構成(接合於電子基板上之前的狀態)的放大剖面圖。以下,對第3實施形態加以說明,但以與所述第1實施形態的不同點為中心進行說明,關於相同的事項,省略其說明。再者,以下為便於說明,將圖4(a)、圖4(b)中的上側設定為「上」,下側設定為「下」。 4(a) and 4(b) are enlarged cross-sectional views showing a configuration of a sheet according to a third embodiment (a state before being bonded to an electronic board). In the following, the third embodiment will be described, but the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In the following, for convenience of explanation, the upper side in FIGS. 4(a) and 4(b) is set to "up" and the lower side is set to "down".

對於第3實施形態的片材1而言,基材2的構成不同,除此以外與所述第1實施形態相同。即,如圖4(a)及圖4(b)所示,第3實施形態的基材2具備含有樹脂21及導電性粒子22的本體部20、以及於該本體部20的絕緣層3側與本體部20接觸而設置的金屬膜23。藉由基材2含有金屬膜23,而更佳地發揮基材2(片材1)的電磁波屏蔽效果及放熱效果。 The sheet material 1 of the third embodiment is the same as the first embodiment except that the structure of the base material 2 is different. That is, as shown in FIGS. 4(a) and 4(b), the base material 2 of the third embodiment includes the main body portion 20 including the resin 21 and the conductive particles 22, and the insulating layer 3 side of the main body portion 20. A metal film 23 provided in contact with the body portion 20. When the base material 2 contains the metal film 23, the electromagnetic wave shielding effect and the heat radiation effect of the base material 2 (sheet 1) are more preferably exhibited.

該金屬膜23可藉由以下方法而獲得:將由導電性粒子22中列舉的金屬所形成的金屬箔貼附(接合)於本體部20上的方法;對導電性粒子22中列舉的金屬氧化物(例如ITO、ATO)進行蒸鍍或濺鍍,藉此於本體部20上形成蒸鍍膜或濺鍍膜的方法;印刷導電性膏(例如銀膏),藉此於本體部20上形成印刷膜的方法等。再者,於由金屬箔來構成金屬膜23的情形時,就導電性及成本的方面而言,較佳為各種銅箔,更佳為軋壓銅箔或電解銅箔。 The metal film 23 can be obtained by a method of attaching (bonding) a metal foil formed of a metal exemplified by the conductive particles 22 to the body portion 20; a metal oxide exemplified for the conductive particles 22 (For example, ITO or ATO), a method of forming a vapor deposited film or a sputter film on the main body portion 20 by vapor deposition or sputtering, and printing a conductive paste (for example, silver paste) to form a printed film on the main body portion 20 Method, etc. Further, in the case where the metal film 23 is composed of a metal foil, various copper foils are preferable in terms of conductivity and cost, and more preferably rolled copper foil or electrolytic copper foil.

另外,金屬膜23的平均厚度並無特別限定,較佳為基材2的平均厚度的0.004%~2500%左右,更佳為0.025%~75%左右。藉由將金屬膜23的平均厚度設定為所述範圍,可防止基材2(片材1)的可撓性降低,並且充分地發揮基材2的電磁波屏蔽效果及放熱效果。 Further, the average thickness of the metal film 23 is not particularly limited, but is preferably about 0.004% to 2500%, more preferably about 0.025% to 75%, of the average thickness of the substrate 2. By setting the average thickness of the metal film 23 to the above range, it is possible to prevent the flexibility of the base material 2 (sheet 1) from being lowered, and to sufficiently exhibit the electromagnetic wave shielding effect and the heat radiation effect of the substrate 2.

金屬膜23的具體的平均厚度較佳為如下。例如於由蒸鍍膜構成金屬膜23的情形時,其平均厚度較佳為50nm~300nm左右,更佳為75nm~200nm左右。於由濺鍍膜來構成金屬膜23的情形時,其平均厚度較佳為20nm~80nm左右,更佳為25nm ~70nm左右。另外,於由金屬箔或印刷膜來構成金屬膜23的情形時,其平均厚度較佳為0.01μm~20μm左右,更佳為0.1μm~15μm左右。 The specific average thickness of the metal film 23 is preferably as follows. For example, when the metal film 23 is formed of a vapor deposited film, the average thickness thereof is preferably about 50 nm to 300 nm, more preferably about 75 nm to 200 nm. In the case where the metal film 23 is formed of a sputter film, the average thickness thereof is preferably about 20 nm to 80 nm, more preferably 25 nm. ~70nm or so. Further, when the metal film 23 is formed of a metal foil or a printed film, the average thickness thereof is preferably about 0.01 μm to 20 μm, more preferably about 0.1 μm to 15 μm.

再者,金屬膜23可如圖4(a)所示般為俯視與絕緣層3大致相等的尺寸,亦可如圖4(b)所示般為俯視與本體部20大致相等的尺寸。圖4(a)所示的構成的情況下,可利用露出區域2a的本體部20,將片材1牢固地接合於電子基板100上。另一方面,圖4(b)所示的構成的情況下,可藉由例如雷射照射等將露出區域2a的金屬膜23與配線基板110的接地配線113進行金屬接合。因此,可實現片材1與電子基板100之間的極高的接合。 Further, as shown in FIG. 4(a), the metal film 23 may have a size substantially equal to that of the insulating layer 3 in plan view, or may be substantially equal to the main body portion 20 in plan view as shown in FIG. 4(b). In the case of the configuration shown in FIG. 4(a), the sheet 1 can be firmly bonded to the electronic substrate 100 by the main body portion 20 of the exposed region 2a. On the other hand, in the case of the configuration shown in FIG. 4(b), the metal film 23 of the exposed region 2a and the ground wiring 113 of the wiring substrate 110 can be metal-bonded by, for example, laser irradiation. Therefore, extremely high bonding between the sheet 1 and the electronic substrate 100 can be achieved.

另外,此種金屬膜23亦可呈絲網(mesh)形狀、具有藉由沖孔(punching)所形成的多個貫通孔的形狀。藉由呈該形狀,可對金屬膜23賦予水蒸氣透過性。 Further, the metal film 23 may have a mesh shape and a shape having a plurality of through holes formed by punching. By having such a shape, the metal film 23 can be imparted with water vapor permeability.

於如上所述的第3實施形態中,亦發揮與所述第1實施形態相同的作用、效果。 In the third embodiment as described above, the same actions and effects as those of the first embodiment are also exhibited.

再者,金屬膜23只要以與本體部20接觸的方式設置即可,亦可設置於硬塗層4側來代替絕緣層3側,亦可設置於本體部20的厚度方向中途的任意位置,亦可為該等的組合。 In addition, the metal film 23 may be provided so as to be in contact with the main body portion 20, and may be provided on the hard coat layer 4 side instead of the insulating layer 3 side, or may be provided at any position in the middle of the thickness direction of the main body portion 20. It can also be a combination of these.

<第4實施形態> <Fourth embodiment>

繼而,對本發明的第4實施形態加以說明。 Next, a fourth embodiment of the present invention will be described.

圖5(a)、圖5(b)為表示第4實施形態的片材的構成(接合於電子基板上之前的狀態)的圖(圖5(a)為表示絕緣層 3a附近的俯視圖,圖5(b)為表示圖5(a)中的B-B線剖面的中央部的圖),圖6為表示第4實施形態的片材的其他構成(接合於電子基板上之前的狀態)的俯視圖。以下,對第4實施形態加以說明,但以與所述第1實施形態的不同點為中心進行說明,關於相同的事項,省略其說明。再者,以下為便於說明,將圖5(b)及圖6中的上側設定為「上」,下側設定為「下」。 (a) and (b) of FIG. 5 are views showing a configuration of a sheet according to a fourth embodiment (a state before being bonded to an electronic substrate) (Fig. 5(a) shows an insulating layer Fig. 5(b) is a plan view showing a central portion of a cross section taken along the line BB in Fig. 5(a), and Fig. 6 is a view showing another configuration of the sheet according to the fourth embodiment (before joining on an electronic substrate) Top view of the state). In the following, the fourth embodiment will be described, but the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In the following, for convenience of explanation, the upper side in FIGS. 5(b) and 6 is set to "up" and the lower side is set to "down".

第4實施形態的片材1於將片材1接合於電子基板100上之前的狀態(片材1的使用前的狀態)下,絕緣層3的厚度不均勻,除此以外與所述第1實施形態相同。即,如圖5(a)及圖5(b)所示,第4實施形態的絕緣層3於接合(積層)於電子基板100上之時,半導體晶片120的邊緣部接觸的第1區域33的平均厚度大於第1區域33以外的第2區域34的平均厚度。於圖5(a)及圖5(b)的構成中,第1區域33與半導體晶片120的外周形狀相對應,俯視呈四角形的框狀。 In the state before the sheet 1 is bonded to the electronic substrate 100 (the state before use of the sheet 1), the thickness of the insulating layer 3 is not uniform, and the first sheet is the same as the first one. The embodiment is the same. In other words, as shown in FIGS. 5(a) and 5(b), when the insulating layer 3 of the fourth embodiment is bonded (laminated) on the electronic substrate 100, the first region 33 where the edge portion of the semiconductor wafer 120 contacts The average thickness is larger than the average thickness of the second region 34 other than the first region 33. In the configuration of FIGS. 5(a) and 5(b), the first region 33 corresponds to the outer peripheral shape of the semiconductor wafer 120, and has a rectangular frame shape in plan view.

藉由該構成,於因半導體晶片120的邊緣部接觸而被擠出的片材1的部分(第1區域33)中,確保僅可彌補擠出量的充分厚度。因此,於將片材1接合於電子基板100上時,即便片材1於第1區域33中被擠出,亦可防止片材1斷裂。 With this configuration, in the portion (first region 33) of the sheet 1 that is extruded by the edge portion of the semiconductor wafer 120, a sufficient thickness can be secured only for the amount of extrusion. Therefore, when the sheet 1 is bonded to the electronic substrate 100, even if the sheet 1 is extruded in the first region 33, the sheet 1 can be prevented from being broken.

於將片材1接合於電子基板100上之前的狀態下,將片材1的第1區域33的平均厚度設定為A[μm]、第2區域34的平均厚度設定為B[μm]時,A/B較佳為1.05~3左右,更佳為1.05~1.4左右,進而佳為1.1~1.25左右。藉此,能更可靠地防止絕緣 層3(片材1)的斷裂。 When the average thickness of the first region 33 of the sheet 1 is set to A [μm] and the average thickness of the second region 34 is set to B [μm] in a state before the sheet 1 is bonded to the electronic substrate 100, A/B is preferably about 1.05~3, more preferably about 1.05~1.4, and then about 1.1~1.25. Thereby, insulation can be prevented more reliably Breaking of layer 3 (sheet 1).

此種絕緣層3可藉由以下方式獲得:藉由所述第1實施形態中記載的方法形成絕緣層3的基材2側的均勻厚度的部分後,於該部分的第1區域33上堆積形成四角形的框形狀。 Such an insulating layer 3 can be obtained by forming a portion of the insulating layer 3 having a uniform thickness on the side of the substrate 2 by the method described in the first embodiment, and then depositing it on the first region 33 of the portion. A square frame shape is formed.

於如上所述的第4實施形態中,亦發揮與所述第1實施形態相同的作用、效果。 In the fourth embodiment as described above, the same actions and effects as those of the first embodiment are exhibited.

再者,第1區域33不限定於圖5(a)所示的區域,只要設定為特別容易產生片材1的斷裂的區域即可。例如,圖1所示的電子基板100中,於紙面近前側,於左右方向上並列設置有2個半導體晶片120,於該情形時,第1區域33可如圖6所示般,設定為沿著並列設置的2個半導體晶片120的邊緣部連續而接觸的直線狀的區域。通常,於密集配置有半導體晶片120的部位,片材1被擠出的程度變大。因此,藉由將圖6所示般的橫跨2個半導體晶片120的直線狀的區域設定為第1區域33,並增大該第1區域33中的絕緣層3(片材1)的厚度,可充分防止片材1的斷裂。 In addition, the first region 33 is not limited to the region shown in FIG. 5( a ), and may be set to a region where the sheet 1 is particularly likely to be broken. For example, in the electronic substrate 100 shown in FIG. 1, two semiconductor wafers 120 are arranged side by side in the left-right direction on the front side of the paper surface. In this case, the first region 33 can be set as the edge as shown in FIG. A linear region in which the edge portions of the two semiconductor wafers 120 arranged in parallel are continuously in contact with each other. Generally, the extent to which the sheet 1 is extruded is increased at a portion where the semiconductor wafer 120 is densely arranged. Therefore, by setting the linear region across the two semiconductor wafers 120 as shown in FIG. 6 as the first region 33, the thickness of the insulating layer 3 (sheet 1) in the first region 33 is increased. The breakage of the sheet 1 can be sufficiently prevented.

另外,於將片材1接合於電子基板100上之前的狀態下,片材1只要其第1區域33的平均厚度大於第2區域34的平均厚度即可,該構成亦可藉由以下方式實現:代替使絕緣層3的厚度局部形成得大,而將基材2的厚度局部形成得大,或將硬塗層4的厚度局部形成得大,或該些方式的組合。 Further, in a state before the sheet 1 is bonded to the electronic substrate 100, the sheet 1 may have an average thickness of the first region 33 larger than the average thickness of the second region 34, and the configuration may be realized by the following means. Instead of partially forming the thickness of the insulating layer 3, the thickness of the substrate 2 is partially formed large, or the thickness of the hard coat layer 4 is locally formed large, or a combination of the above.

<第5實施形態> <Fifth Embodiment>

繼而,對本發明的第5實施形態加以說明。 Next, a fifth embodiment of the present invention will be described.

圖7(a)、圖7(b)為表示第5實施形態的片材的構成(接合於電子基板上之前的狀態)的圖(圖7(a)為俯視圖,圖7(b)為表示圖7(a)中的C-C線剖面的中央部及端部的圖),圖8為表示第5實施形態的片材的其他構成(接合於電子基板上之前的狀態)的俯視圖。以下,對第5實施形態加以說明,但以與所述第1實施形態的不同點為中心加以說明,關於相同的事項,省略其說明。再者,以下為便於說明,將圖7(b)中的上側設定為「上」,下側設定為「下」。 7(a) and 7(b) are views showing a configuration of a sheet according to a fifth embodiment (a state before being bonded to an electronic substrate) (Fig. 7(a) is a plan view, and Fig. 7(b) is a view Fig. 8 is a plan view showing another configuration (a state before being bonded to the electronic substrate) of the sheet according to the fifth embodiment, in the center portion and the end portion of the CC line cross section in Fig. 7(a). In the following, the fifth embodiment will be described, but the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In the following, for convenience of explanation, the upper side in FIG. 7(b) is set to "up" and the lower side is set to "down".

第5實施形態的片材1具有沿著基材2的下表面的邊緣部與絕緣層3分離而設置的絕緣部35,除此以外與所述第1實施形態相同。即,如圖7(a)及圖7(b)所示,絕緣部35是以包圍第1絕緣層~第3絕緣層(3a~3c)的方式,沿著基材2的下表面的邊緣部而形成為四角形的框狀。藉由該構成,於將片材1接合(積層)於電子基板100上的狀態下,可於片材1的邊緣部防止基材2與配線基板110的安裝面101直接接觸。因此,可防止基材2與配線基板110之間的非本意的短路,獲得可靠性高的電子元件10。 The sheet 1 of the fifth embodiment has the insulating portion 35 which is provided apart from the insulating layer 3 along the edge portion of the lower surface of the base material 2, and is the same as the above-described first embodiment. That is, as shown in FIGS. 7(a) and 7(b), the insulating portion 35 surrounds the lower surface of the substrate 2 so as to surround the first to third insulating layers (3a to 3c). The part is formed into a square frame shape. With this configuration, in a state where the sheet 1 is joined (laminated) on the electronic substrate 100, the substrate 2 can be prevented from directly contacting the mounting surface 101 of the wiring substrate 110 at the edge portion of the sheet 1. Therefore, an unintentional short circuit between the substrate 2 and the wiring substrate 110 can be prevented, and the highly reliable electronic component 10 can be obtained.

另外,於電子基板100的回收時將片材1自電子基板100上剝離時,藉由握持片材1的形成有絕緣部35的部分,而成為剝離操作的起點,可容易地進行該剝離操作。即,片材1的設有絕緣部35的部分構成自積層有片材1的電子基板100上分離片材1 時握持的握持部。尤其於圖7(a)所示的構成中,絕緣部35是沿著基材2的邊緣部而形成為框狀,故自片材1全周的任一部位均可開始剝離操作。 In addition, when the sheet 1 is peeled off from the electronic substrate 100 at the time of collection of the electronic substrate 100, the portion of the sheet 1 on which the insulating portion 35 is formed is used as a starting point of the peeling operation, and the peeling can be easily performed. operating. That is, the portion of the sheet 1 on which the insulating portion 35 is provided constitutes the separated sheet 1 on the electronic substrate 100 from which the sheet 1 is laminated. Hold the grip. In particular, in the configuration shown in FIG. 7(a), since the insulating portion 35 is formed in a frame shape along the edge portion of the substrate 2, the peeling operation can be started from any portion of the entire circumference of the sheet 1.

該絕緣部35的構成材料較佳為使用與所述第1實施形態的絕緣層3中列舉的硬質樹脂相同的材料。藉由以硬質樹脂來構成絕緣部35,可防止將絕緣部35接合於配線基板110的安裝面101上。因此,可於將片材1自電子基板100上剝離時,更容易且可靠地握持片材1的形成有絕緣部35的部分。 The constituent material of the insulating portion 35 is preferably the same material as the hard resin exemplified in the insulating layer 3 of the first embodiment. By forming the insulating portion 35 with a hard resin, it is possible to prevent the insulating portion 35 from being bonded to the mounting surface 101 of the wiring substrate 110. Therefore, when the sheet 1 is peeled off from the electronic substrate 100, the portion of the sheet 1 on which the insulating portion 35 is formed can be gripped more easily and reliably.

另外,絕緣部35的平均厚度較佳為設定得小於絕緣層3的平均厚度。藉此,可設定為使絕緣部35與配線基板110的安裝面101輕輕地接觸的狀態。因此,於將片材1自電子基板100上剝離時,片材1的形成有絕緣部35的部分更容易握持。 Further, the average thickness of the insulating portion 35 is preferably set to be smaller than the average thickness of the insulating layer 3. Thereby, the insulating portion 35 can be set to be in light contact with the mounting surface 101 of the wiring substrate 110. Therefore, when the sheet 1 is peeled off from the electronic substrate 100, the portion of the sheet 1 on which the insulating portion 35 is formed is more easily held.

再者,該絕緣部35例如可利用與絕緣層3相同的方法來形成,可藉由與絕緣層3相同的步驟來形成,亦可藉由與絕緣層3不同的步驟來形成。 Further, the insulating portion 35 can be formed by the same method as the insulating layer 3, for example, by the same steps as the insulating layer 3, or by a step different from the insulating layer 3.

於如上所述的第5實施形態中,亦發揮與所述第1實施形態相同的作用、效果。 In the fifth embodiment as described above, the same actions and effects as those of the first embodiment are also exhibited.

另外,如圖8所示,亦可於基材2上設置沿著其邊緣部彼此空開間隔而形成的多個耳部24,並於各耳部24的下表面上設置絕緣部35。即,亦可沿著基材2的邊緣部彼此空開間隔而設置多個絕緣部35。根據該構成,可將電子基板100於彎折耳部24的狀態下收容於電子設備的框體內。因此,可防止於電子設備的 組裝作業中耳部24成為障礙。 Further, as shown in FIG. 8, a plurality of ear portions 24 which are formed to be spaced apart from each other along the edge portion thereof may be provided on the base material 2, and an insulating portion 35 may be provided on the lower surface of each of the ear portions 24. That is, a plurality of insulating portions 35 may be provided along the edge portions of the base material 2 at intervals. According to this configuration, the electronic substrate 100 can be housed in the casing of the electronic device in a state where the ear portion 24 is bent. Therefore, it can be prevented from being used in electronic equipment The ear portion 24 becomes an obstacle in the assembly work.

再者,就設定為電子基板100回收時的剝離操作的起點的觀點而言,亦可僅設置1個耳部24(絕緣部35)。 In addition, as for the starting point of the peeling operation at the time of collecting the electronic substrate 100, only one ear portion 24 (insulating portion 35) may be provided.

<第6實施形態> <Sixth embodiment>

繼而,對本發明的第6實施形態加以說明。 Next, a sixth embodiment of the present invention will be described.

圖9(a)、圖9(b)為表示第6實施形態的電子元件的端部的構成的縱剖面圖。以下,對第6實施形態加以說明,但以與所述第1實施形態的不同點為中心加以說明,關於相同的事項,省略其說明。再者,以下為便於說明,將圖9(a)、圖9(b)中的上側設定為「上」,下側設定為「下」。 (a) and (b) of FIG. 9 are longitudinal cross-sectional views showing a configuration of an end portion of an electronic component according to a sixth embodiment. In the following, the sixth embodiment will be described, but the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In the following, for convenience of explanation, the upper side in FIGS. 9(a) and 9(b) is set to "up" and the lower side is set to "down".

如圖9(a)所示,第6實施形態的片材1可為具有由金屬膜所構成的基材2、及設置於基材2的下表面(其中一面)上的絕緣層3的二層構成。另外,於接地配線113的上表面上,沿著接地配線113的長度方向,空開既定的間隔而設有多個導電性銷114。各導電性銷114是使針尖(頂部)朝向上方而配置。 As shown in Fig. 9 (a), the sheet 1 of the sixth embodiment may be a substrate 2 having a metal film and an insulating layer 3 provided on the lower surface (one side) of the substrate 2. Layer composition. Further, on the upper surface of the ground wiring 113, a plurality of conductive pins 114 are provided at predetermined intervals along the longitudinal direction of the ground wiring 113. Each of the conductive pins 114 is disposed such that the needle tip (top portion) faces upward.

根據該構成,於將片材1積層於電子基板100上時,藉由導電性銷114將基材2的露出區域2a刺穿,使之與接地配線113接觸。藉此,可將基材2接地,並且將片材1與電子基板100固定。因此,本實施形態中,藉由接地配線113與導電性銷114而構成接地部。 According to this configuration, when the sheet 1 is laminated on the electronic substrate 100, the exposed region 2a of the substrate 2 is pierced by the conductive pin 114 to be in contact with the ground wiring 113. Thereby, the substrate 2 can be grounded, and the sheet 1 can be fixed to the electronic substrate 100. Therefore, in the present embodiment, the grounding portion is formed by the ground wiring 113 and the conductive pin 114.

再者,導電性銷114亦可與接地配線113一體地形成。另外,亦可省略接地配線113而使導電性銷114直接接地。該導 電性銷114可使用與第1實施形態的導電性粒子22中列舉的金屬相同的金屬來形成。 Further, the conductive pin 114 may be formed integrally with the ground wiring 113. Further, the ground wiring 113 may be omitted and the conductive pin 114 may be directly grounded. The guide The electric pin 114 can be formed using the same metal as the metal exemplified in the conductive particles 22 of the first embodiment.

另外,亦可如圖9(b)所示般以如下方式構成:使基材2的露出區域2a與接地配線113接觸後,藉由導電性銷114朝向配線基板110(基板111)刺穿露出區域2a。 Further, as shown in FIG. 9(b), the exposed region 2a of the substrate 2 may be brought into contact with the ground wiring 113, and then exposed by the conductive pin 114 toward the wiring substrate 110 (substrate 111). Area 2a.

於如上所述的第6實施形態中,亦發揮與所述第1實施形態相同的作用、效果。再者,片材1當然亦可為與第1實施形態~第5實施形態的片材1相同的構成。 In the sixth embodiment as described above, the same actions and effects as those of the first embodiment are also exhibited. Further, the sheet 1 may of course have the same configuration as the sheet 1 of the first embodiment to the fifth embodiment.

<第7實施形態> <Seventh embodiment>

繼而,對本發明的第7實施形態加以說明。 Next, a seventh embodiment of the present invention will be described.

圖10為表示第7實施形態的片材的構成(接合於電子基板上之前的狀態)的放大剖面圖。以下,對第7實施形態加以說明,但以與所述第1實施形態的不同點為中心加以說明,關於相同的事項,省略其說明。再者,以下為便於說明,將圖10中的上側設定為「上」,下側設定為「下」。 Fig. 10 is an enlarged cross-sectional view showing a configuration of a sheet according to a seventh embodiment (a state before being bonded to an electronic board). In the following, the seventh embodiment will be described, but the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In the following, for convenience of explanation, the upper side in FIG. 10 is set to "up" and the lower side is set to "down".

對於第7實施形態的片材1而言,基材2的構成不同,除此以外與所述第1實施形態相同。即,如圖10所示,第7實施形態的基材2具有與絕緣層3接觸而設置的下層(第1部分)2X、及設置於該下層2X上(與絕緣層3為相反之側)的上層(第2部分)2Y。 The sheet material 1 of the seventh embodiment is the same as the first embodiment except that the structure of the base material 2 is different. That is, as shown in FIG. 10, the base material 2 of the seventh embodiment has a lower layer (first portion) 2X provided in contact with the insulating layer 3, and a lower layer 2X provided on the lower layer 2X (opposite to the insulating layer 3). The upper level (part 2) 2Y.

下層2X含有樹脂(第1樹脂)25、及分散於該樹脂25中的導電性粒子(第1導電性粒子)26,上層2Y含有樹脂(第2 樹脂)21、及分散於該樹脂21中的導電性粒子(第2導電性粒子)22。另外,以導電性粒子22於上層2Y中的含量多於導電性粒子25於下層2X中的含量的方式進行設定。 The lower layer 2X contains a resin (first resin) 25 and conductive particles (first conductive particles) 26 dispersed in the resin 25, and the upper layer 2Y contains a resin (second Resin) 21 and conductive particles (second conductive particles) 22 dispersed in the resin 21. Further, the content of the conductive particles 22 in the upper layer 2Y is set to be larger than the content of the conductive particles 25 in the lower layer 2X.

藉由該構成,可使上層2Y發揮高的電磁波屏蔽性,並且對下層2X根據樹脂25的種類等而賦予黏著性。因此,於將本實施形態的片材1積層於電子基板100上時,藉由利用下層2X的黏著性,可將片材1(基材2)的露出區域2a貼附固定於接地配線113上。 With this configuration, the upper layer 2Y can exhibit high electromagnetic wave shielding properties, and the lower layer 2X can be provided with adhesiveness depending on the type of the resin 25 or the like. Therefore, when the sheet 1 of the present embodiment is laminated on the electronic substrate 100, the exposed region 2a of the sheet 1 (substrate 2) can be attached and fixed to the ground wiring 113 by the adhesiveness of the lower layer 2X. .

因此,可省略如第1實施形態般對電子基板100加熱壓接片材1的操作,即,可藉由操作者的手動操作將片材1貼附於電子基板100上。因此,可提高電子基板100的生產效率。另外,因可省略加熱壓接的操作,故可防止由此時的加熱導致半導體晶片120劣化的情況,可獲得可靠性更高的電子元件10。 Therefore, the operation of heating the pressure-bonding sheet 1 to the electronic substrate 100 as in the first embodiment can be omitted, that is, the sheet 1 can be attached to the electronic substrate 100 by manual operation by an operator. Therefore, the production efficiency of the electronic substrate 100 can be improved. Further, since the operation of the thermocompression bonding can be omitted, it is possible to prevent the semiconductor wafer 120 from being deteriorated by the heating at this time, and the electronic component 10 having higher reliability can be obtained.

關於樹脂25,就對下層2X賦予更高的黏著性的觀點而言,較佳為玻璃轉移溫度為0℃以下的樹脂(包含橡膠),更佳為玻璃轉移溫度為-10℃以下的樹脂(包含橡膠),進而佳為玻璃轉移溫度為-20℃以下的樹脂(包含橡膠)。該樹脂(包含橡膠)的具體例例如可列舉:丙烯酸系樹脂、胺基甲酸酯系樹脂般的各種樹脂,天然橡膠、合成橡膠般的各種橡膠,苯乙烯嵌段共聚物般的各種熱塑性彈性體等。另外,下層2X亦可含有與所述第1實施形態中記載的硬化劑相同的硬化劑。 The resin 25 is preferably a resin having a glass transition temperature of 0 ° C or lower (including rubber), and more preferably a resin having a glass transition temperature of -10 ° C or less, from the viewpoint of imparting higher adhesion to the lower layer 2X. Containing rubber), and preferably a resin (including rubber) having a glass transition temperature of -20 ° C or lower. Specific examples of the resin (including rubber) include various resins such as an acrylic resin and an urethane resin, various rubbers such as natural rubber and synthetic rubber, and various thermoplastic elastomers such as styrene block copolymers. Body and so on. Further, the lower layer 2X may contain the same curing agent as the curing agent described in the first embodiment.

下層2X亦可具有等向導電性或異向導電性的任一種導 電性,較佳為具有異向導電性。藉此,可將上層2Y中流通的電流經由下層2X更順暢地傳至接地配線113,更佳地發揮基材2(片材1)的電磁波屏蔽效果。分散於樹脂25中的導電性粒子26可使用種類及平均粒徑與所述第1實施形態中記載的導電性粒子22相同的粒子。 The lower layer 2X may also have any conductivity of isotropic conductivity or anisotropic conductivity. Electrically, it is preferred to have anisotropic conductivity. Thereby, the current flowing through the upper layer 2Y can be more smoothly transmitted to the ground wiring 113 via the lower layer 2X, and the electromagnetic wave shielding effect of the substrate 2 (sheet 1) can be more effectively exhibited. The conductive particles 26 dispersed in the resin 25 can be the same as those of the conductive particles 22 described in the first embodiment.

導電性粒子26的形狀亦可設定為與所述第1實施形態中記載的導電性粒子22相同的形狀,較佳為樹枝狀或球狀。若為樹枝狀或球狀的導電性粒子26,則即便其於下層2X中的含量相對較少,亦可對下層2X賦予必要且充分的導電性。另外,藉由將導電性粒子26於下層2X中的含量設定為少量,可進一步提高下層2X的黏著性。進而,藉由使用樹枝狀或球狀的導電性粒子26,容易對下層2X賦予異向導電性。再者,樹枝狀的導電性粒子26及球狀的導電性粒子26可僅使用該等的任一者,亦可將兩者組合使用。 The shape of the conductive particles 26 may be the same as that of the conductive particles 22 described in the first embodiment, and is preferably dendritic or spherical. When the conductive particles 26 are dendritic or spherical, even if the content in the lower layer 2X is relatively small, necessary and sufficient conductivity can be imparted to the lower layer 2X. Further, by setting the content of the conductive particles 26 in the lower layer 2X to a small amount, the adhesion of the lower layer 2X can be further improved. Further, by using the dendritic or spherical conductive particles 26, it is easy to impart anisotropic conductivity to the lower layer 2X. Further, the dendritic conductive particles 26 and the spherical conductive particles 26 may be used alone or in combination of the two.

相對於樹脂25的100重量份,導電性粒子26於下層2X中的含量較佳為1重量份~100重量份,更佳為10重量份~50重量份。藉由將導電性粒子26於下層2X中的含量設定為所述範圍,可對下層2X賦予必要且充分的導電性,可充分提高基材2的電磁波屏蔽效果。另外,含有樹脂25與導電性粒子26的樹脂組成物的流動性提高,更容易形成下層2X,故亦較佳。 The content of the conductive particles 26 in the lower layer 2X is preferably from 1 part by weight to 100 parts by weight, more preferably from 10 parts by weight to 50 parts by weight, per 100 parts by weight of the resin 25 . By setting the content of the conductive particles 26 in the lower layer 2X to the above range, necessary and sufficient conductivity can be imparted to the lower layer 2X, and the electromagnetic wave shielding effect of the substrate 2 can be sufficiently improved. Further, the resin composition containing the resin 25 and the conductive particles 26 is improved in fluidity, and it is more preferable to form the lower layer 2X.

另一方面,設置於下層2X上的上層2Y所含有的樹脂21及導電性粒子22可設定為與所述第1實施形態中記載者相同的 構成。另外,上層2Y亦可含有與所述第1實施形態中記載的硬化劑相同的硬化劑。 On the other hand, the resin 21 and the conductive particles 22 contained in the upper layer 2Y provided on the lower layer 2X can be set to be the same as those described in the first embodiment. Composition. Further, the upper layer 2Y may contain the same curing agent as the curing agent described in the first embodiment.

上層2Y亦可具有等向導電性或異向導電性的任一種導電性,較佳為等向導電性。藉此,可藉由上層2Y可靠地捕捉電磁波,並將所轉變的電流迅速地傳至下層2X。尤其藉由將下層2X設定為與上層2Y的等向導電性不同的導電性即異向導電性,可使下層2X與上層2Y分擔不同的作用,更佳地發揮基材2(片材1)的電磁波屏蔽效果。 The upper layer 2Y may have any conductivity of isotropic conductivity or anisotropic conductivity, and is preferably isotropic conductivity. Thereby, electromagnetic waves can be reliably captured by the upper layer 2Y, and the converted current can be quickly transmitted to the lower layer 2X. In particular, by setting the lower layer 2X to an isotropic conductivity which is different from the isotropic conductivity of the upper layer 2Y, the lower layer 2X and the upper layer 2Y can share different functions, and the substrate 2 (sheet 1) can be more effectively exhibited. Electromagnetic wave shielding effect.

就對上層2Y賦予等向導電性的觀點而言,導電性粒子22的形狀較佳為與導電性粒子26不同的形狀(特別是鱗片狀)。若為鱗片狀的導電性粒子22,則上層2Y可大量含有導電性粒子22,可具有充分的等向導電性。 The shape of the conductive particles 22 is preferably a shape different from the conductive particles 26 (particularly, a scaly shape) from the viewpoint of imparting an isotropic conductivity to the upper layer 2Y. In the case of the scaly conductive particles 22, the upper layer 2Y can contain a large amount of the conductive particles 22, and can have sufficient isotropic conductivity.

相對於樹脂21的100重量份,導電性粒子22於上層2Y中的含量較佳為100重量份~1500重量份,更佳為100重量份~1000重量份。藉由將導電性粒子22於上層2Y中的含量設定為所述範圍,可對上層2Y賦予必要且充分的導電性,可充分提高基材2的電磁波屏蔽效果。另外,含有樹脂21與導電性粒子21的樹脂組成物的流動性提高,更容易形成上層2Y,故亦較佳。 The content of the conductive particles 22 in the upper layer 2Y is preferably from 100 parts by weight to 1,500 parts by weight, more preferably from 100 parts by weight to 1000 parts by weight, per 100 parts by weight of the resin 21 . By setting the content of the conductive particles 22 in the upper layer 2Y to the above range, it is possible to impart necessary and sufficient conductivity to the upper layer 2Y, and the electromagnetic wave shielding effect of the substrate 2 can be sufficiently improved. Further, the resin composition containing the resin 21 and the conductive particles 21 is improved in fluidity, and it is more preferable to form the upper layer 2Y.

再者,於本實施形態的基材2中,將下層2X的平均厚度設定為Tx[μm]、上層2Y的平均厚度設定為Ty[μm]時,該些厚度之比Ty/Tx並無特別限定,較佳為1~7.5左右,更佳為2~5左右。藉由將比Ty/Tx設定為所述範圍,可獲得發揮更高的電磁 波屏蔽效果的基材2。具體而言,下層2X的平均厚度較佳為0.5μm~150μm左右,更佳為1.5μm~25μm左右,上層2Y的平均厚度較佳為1.5μm~350μm左右,更佳為3.5μm~75μm左右。 Further, in the substrate 2 of the present embodiment, when the average thickness of the lower layer 2X is set to Tx [μm] and the average thickness of the upper layer 2Y is set to Ty [μm], the ratio of the thicknesses Ty/Tx is not particularly large. The limit is preferably about 1 to 7.5, more preferably about 2 to 5. By setting the ratio Ty/Tx to the above range, it is possible to obtain a higher electromagnetic force. The substrate 2 of the wave shielding effect. Specifically, the average thickness of the lower layer 2X is preferably about 0.5 μm to 150 μm, more preferably about 1.5 μm to 25 μm, and the average thickness of the upper layer 2Y is preferably about 1.5 μm to 350 μm, more preferably about 3.5 μm to 75 μm.

另外,上層2Y亦可由與所述第3實施形態及第6實施形態中記載的金屬膜相同的金屬膜所構成。 Further, the upper layer 2Y may be composed of the same metal film as the metal film described in the third embodiment and the sixth embodiment.

於此種基材2的下表面(電子基板100側的面)上,設有絕緣層3。該絕緣層3可設定為與所述第1實施形態或第2實施形態中記載的絕緣層相同的構成,除此以外,可使用與所述上層2Y相同的含有樹脂21與硬化劑的樹脂組成物來形成。再者,絕緣層3可具有黏著性,亦可不具有黏著性。 An insulating layer 3 is provided on the lower surface (surface on the side of the electronic substrate 100) of the substrate 2. The insulating layer 3 can be configured in the same manner as the insulating layer described in the first embodiment or the second embodiment, and a resin containing a resin 21 and a curing agent similar to the upper layer 2Y can be used. Things are formed. Furthermore, the insulating layer 3 may have adhesiveness or may not have adhesiveness.

如上所述,本實施形態的片材1較佳為藉由操作者的手動操作而貼附於電子基板100上。此時,若絕緣層3具有黏著性,則可容易地進行片材1對電子基板100的定位,亦可進一步提高電子元件10的生產效率,另一方面,若絕緣層3不具有黏著性,則即便暫且將片材1貼附於電子基板100上亦容易自電子基板100上剝離,可容易地進行片材1對電子基板100的位置修正。 As described above, the sheet 1 of the present embodiment is preferably attached to the electronic substrate 100 by manual operation by an operator. At this time, if the insulating layer 3 has adhesiveness, the positioning of the sheet 1 on the electronic substrate 100 can be easily performed, and the production efficiency of the electronic component 10 can be further improved. On the other hand, if the insulating layer 3 does not have adhesiveness, Even if the sheet 1 is attached to the electronic substrate 100 for a while, it is easy to peel off from the electronic substrate 100, and the positional correction of the sheet 1 to the electronic substrate 100 can be easily performed.

再者,於下層2X、上層2Y及絕緣層3中的至少一個層為半硬化狀態及/或凝膠狀態的情形時,亦可將片材1固定(積層)於電子基板100上之後,使該狀態的層進行後硬化。藉此,可將片材1接合於電子基板100上,並且亦可提高片材1的機械強度。 Further, when at least one of the lower layer 2X, the upper layer 2Y, and the insulating layer 3 is in a semi-hardened state and/or a gel state, the sheet 1 may be fixed (laminated) on the electronic substrate 100, and then The layer in this state is post-hardened. Thereby, the sheet 1 can be bonded to the electronic substrate 100, and the mechanical strength of the sheet 1 can also be improved.

例如,若使用含有玻璃轉移溫度為0℃以下的樹脂(包含橡膠)、所述第1實施形態所記載般的可於相對較低的溫度下進 行硬化反應的第1硬化劑、可於較該第1硬化劑更高的溫度下進行硬化反應的第2硬化劑、及導電性粒子26的樹脂組成物來形成下層2X,則可於片材1的使用前,藉由第1硬化劑的作用將下層2X設定為凝膠狀態(半固體狀態),藉由將片材1固定(積層)於電子基板100上之後的後硬化,利用第2硬化劑的作用將下層2X設定為固體狀態。 For example, a resin containing a glass transition temperature of 0 ° C or lower (including rubber) can be used at a relatively low temperature as described in the first embodiment. The first curing agent that is subjected to the hardening reaction, the second curing agent that can perform the curing reaction at a higher temperature than the first curing agent, and the resin composition of the conductive particles 26 form the lower layer 2X, and the sheet can be formed on the sheet. Before the use of the first layer 2X, the lower layer 2X is set to a gel state (semi-solid state), and the sheet 1 is fixed (laminated) on the electronic substrate 100, and then cured. The action of the hardener sets the lower layer 2X to a solid state.

另外,片材1可與所述第1實施形態同樣地,藉由依序塗敷構成各層的樹脂組成物來形成硬塗層4、上層2Y、下層2X及絕緣層3而製造。再者,本實施形態中,因下層2X具有黏著性,故片材1亦可藉由如下方式製造:預先製作將硬塗層4、上層2Y及下層2X積層而成的積層體,將另行製作的絕緣層3貼附於積層體的下層2X上。 In addition, the sheet 1 can be produced by sequentially coating the resin composition constituting each layer in the same manner as in the first embodiment to form the hard coat layer 4, the upper layer 2Y, the lower layer 2X, and the insulating layer 3. Further, in the present embodiment, since the lower layer 2X has adhesiveness, the sheet 1 can be produced by preliminarily producing a laminate in which the hard coat layer 4, the upper layer 2Y, and the lower layer 2X are laminated. The insulating layer 3 is attached to the lower layer 2X of the laminated body.

於如上所述的第7實施形態中,亦發揮與所述第1實施形態相同的作用、效果。 In the seventh embodiment as described above, the same actions and effects as those of the first embodiment are also exhibited.

再者,亦可於下層2X與上層2Y之間,設置1個以上的任意目的之中間層。該中間層例如可列舉:用以提高下層2X與上層2Y的密接性的密接層、所述第3實施形態的金屬膜23等。於設置密接層作為中間層的情形時,該密接層例如較佳為由構成下層2X的樹脂組成物與構成上層2Y的樹脂組成物的混合物來構成。 Further, an intermediate layer of one or more arbitrary purposes may be provided between the lower layer 2X and the upper layer 2Y. The intermediate layer may, for example, be an adhesive layer for improving the adhesion between the lower layer 2X and the upper layer 2Y, the metal film 23 of the third embodiment, or the like. In the case where the adhesion layer is provided as the intermediate layer, the adhesion layer is preferably composed of, for example, a mixture of the resin composition constituting the lower layer 2X and the resin composition constituting the upper layer 2Y.

以上,根據圖示的實施形態對本發明的電子元件及片材進行了說明,但本發明不限定於該些實施形態。例如,構成電子 元件及片材的各部亦可替換成可發揮同樣功能的任意構成者。另外,亦可附加任意的構成物。 Although the electronic component and the sheet of the present invention have been described above based on the illustrated embodiment, the present invention is not limited to the embodiments. For example, forming an electronic The components and the parts of the sheet may be replaced by any constituents that can perform the same function. Further, any constituent may be added.

再者,電子元件及片材亦可將所述第1實施形態~第7實施形態中的任意構成組合。另外,所述各實施形態的片材具有硬塗層(保護層),但硬塗層(保護層)只要視需要而設置即可,亦可省略。另外,接地部只要將片材的基材接地(連接於基準電位)即可,其形態或形狀並無特別限定。 Further, the electronic component and the sheet may be combined with any of the first to seventh embodiments. Further, the sheet of each of the above embodiments has a hard coat layer (protective layer), but the hard coat layer (protective layer) may be provided as needed, and may be omitted. In addition, the ground portion may be grounded (connected to a reference potential) of the substrate of the sheet, and the form or shape thereof is not particularly limited.

另外,片材可為具備1個絕緣層、且利用該1個絕緣層將整個電子零件覆蓋的構成,亦可成為利用1個片材覆蓋1個電子零件般的構成。 In addition, the sheet may have a configuration in which one insulating layer is provided and the entire electronic component is covered by the one insulating layer, and one sheet may be used to cover one electronic component.

另外,於構成片材的各部(各層)中,亦存在於接合(積層)於電子基板上時稍許被擠出的部位,但於以平均值(平均厚度)來規定各部的厚度的情形時,其值於接合於電子基板上的前後大致相等。 In addition, in each of the portions (each layer) constituting the sheet, a portion which is slightly extruded when bonded (laminated) on the electronic substrate is used. However, when the thickness of each portion is defined by an average value (average thickness), The values are substantially equal before and after bonding to the electronic substrate.

[產業上之可利用性] [Industrial availability]

本發明的電子元件具有:電子基板,具備具有安裝面的配線基板、及安裝於該配線基板的所述安裝面上的多個電子零件;片材,積層於該電子基板上,且具備具有導電性的片狀的基材、及設置於該基材的所述電子基板側且具備包含至少一個所述電子零件的尺寸的至少一個絕緣層;以及接地部,將該片材的所述基材接地,並且將所述片材與所述電子基板固定。藉此,可提供一種容易將自電子零件的放熱去除、薄型且可靠性高的電子元 件。因此,本發明具有產業上之可利用性。 An electronic component of the present invention includes an electronic substrate including a wiring substrate having a mounting surface, and a plurality of electronic components mounted on the mounting surface of the wiring substrate; and a sheet laminated on the electronic substrate and having a conductive a substrate having a sheet shape and at least one insulating layer provided on the electronic substrate side of the substrate and having a size including at least one of the electronic components; and a ground portion, the substrate of the sheet Grounding and fixing the sheet to the electronic substrate. Thereby, it is possible to provide an electronic element which is easy to remove the heat release from the electronic component, and is thin and highly reliable. Pieces. Therefore, the present invention has industrial applicability.

1‧‧‧片材 1‧‧‧Sheet

2a‧‧‧露出區域 2a‧‧‧ exposed area

3a‧‧‧第1絕緣層 3a‧‧‧1st insulation layer

3b‧‧‧第2絕緣層 3b‧‧‧2nd insulation layer

3c‧‧‧第3絕緣層 3c‧‧‧3rd insulation layer

10‧‧‧電子元件 10‧‧‧Electronic components

100‧‧‧電子基板 100‧‧‧Electronic substrate

110‧‧‧配線基板 110‧‧‧Wiring substrate

101‧‧‧安裝面 101‧‧‧Installation surface

101a‧‧‧第1安裝區域 101a‧‧‧1st installation area

101b‧‧‧第2安裝區域 101b‧‧‧2nd installation area

101c‧‧‧第3安裝區域 101c‧‧‧3rd installation area

111‧‧‧基板 111‧‧‧Substrate

113‧‧‧接地配線 113‧‧‧ Grounding Wiring

120‧‧‧半導體晶片 120‧‧‧Semiconductor wafer

Claims (17)

一種電子元件,其特徵在於具有:電子基板,具備具有安裝面的配線基板、及安裝於所述配線基板的所述安裝面上的多個電子零件;片材,積層於所述電子基板上,具備:具有導電性的片狀的基材、及設置於所述基材的所述電子基板側且具備包含至少一個所述電子零件的尺寸的至少一個絕緣層;以及接地部,將所述片材的所述基材接地,並且將所述片材與所述電子基板固定。 An electronic component comprising: an electronic substrate; a wiring board having a mounting surface; and a plurality of electronic components mounted on the mounting surface of the wiring substrate; and a sheet laminated on the electronic substrate Providing a sheet-like substrate having conductivity and at least one insulating layer provided on the electronic substrate side of the substrate and having a size including at least one of the electronic components; and a ground portion The substrate of the material is grounded and the sheet is fixed to the electronic substrate. 如申請專利範圍第1項所述的電子元件,其中所述接地部含有設置於所述配線基板的所述安裝面側的接地配線,所述絕緣層具備俯視小於所述基材的尺寸,所述基材於自所述絕緣層露出的露出區域中與所述接地配線接觸。 The electronic component according to claim 1, wherein the ground portion includes a ground wiring provided on the mounting surface side of the wiring substrate, and the insulating layer has a size smaller than a size of the substrate in a plan view. The substrate is in contact with the ground wiring in an exposed region exposed from the insulating layer. 如申請專利範圍第2項所述的電子元件,其中所述配線基板的所述安裝面具備經所述接地配線所劃分、且安裝既定的所述電子零件的多個安裝區域,所述至少一個絕緣層包含與各所述安裝區域相對應而設置的多個所述絕緣層。 The electronic component according to claim 2, wherein the mounting surface of the wiring substrate includes a plurality of mounting regions divided by the ground wiring and mounted with the predetermined electronic component, the at least one The insulating layer includes a plurality of the insulating layers provided corresponding to the respective mounting regions. 如申請專利範圍第1項所述的電子元件,其中所述基材含有硬化性樹脂的硬化物、及分散於所述硬化物中的導電性粒子。 The electronic component according to claim 1, wherein the substrate contains a cured product of a curable resin and conductive particles dispersed in the cured product. 如申請專利範圍第4項所述的電子元件,其中所述基材具 備:含有所述硬化性樹脂的硬化物及所述導電性粒子的本體部、以及與所述本體部接觸而設置的金屬膜。 The electronic component of claim 4, wherein the substrate has A cured body containing the curable resin, a main body portion of the conductive particles, and a metal film provided in contact with the main body portion. 如申請專利範圍第1項所述的電子元件,其中所述基材具有第1部分及第2部分,其中所述第1部分是與所述絕緣層接觸而設置,且含有第1導電性粒子,所述第2部分是設置於所述第1部分的與所述絕緣層為相反之側,且以較所述第1導電性粒子於所述第1部分中的含量更多的量而含有第2導電性粒子。 The electronic component according to claim 1, wherein the substrate has a first portion and a second portion, wherein the first portion is provided in contact with the insulating layer and contains the first conductive particles The second portion is provided on the opposite side of the insulating layer from the first portion, and is contained in an amount larger than the content of the first conductive particles in the first portion. The second conductive particles. 如申請專利範圍第1項所述的電子元件,其中所述絕緣層含有樹脂、及分散於所述樹脂中且導熱率高於所述樹脂的導熱率的導熱性粒子。 The electronic component according to claim 1, wherein the insulating layer contains a resin and thermally conductive particles dispersed in the resin and having a thermal conductivity higher than a thermal conductivity of the resin. 如申請專利範圍第1項所述的電子元件,更具有保護層,所述保護層是設置於所述基材的與所述電子基板為相反之側,且具備保護所述基材的功能。 The electronic component according to claim 1, further comprising a protective layer provided on a side opposite to the electronic substrate of the substrate and having a function of protecting the substrate. 如申請專利範圍第1項所述的電子元件,其中所述片材更具有在所述電子基板側且與所述基材的邊緣部相對應的位置處,與所述絕緣層分離而設置的至少一個絕緣部。 The electronic component according to claim 1, wherein the sheet is further provided at a position corresponding to an edge portion of the substrate on the electronic substrate side and separated from the insulating layer. At least one insulating portion. 如申請專利範圍第9項所述的電子元件,其中所述片材的設有所述絕緣部的部分構成自所述電子基板上分離所述片材時握持的握持部。 The electronic component according to claim 9, wherein the portion of the sheet on which the insulating portion is provided constitutes a grip portion that is held when the sheet is separated from the electronic substrate. 一種片材,其是積層於電子基板上,且以經由接地部而固定於所述電子基板上的方式使用的片材,其中所述電子基板具備具有安裝面的配線基板、及安裝於所述配線基板的所述安裝面上 的多個電子零件;並且所述片材的特徵在於具有:片狀的基材,於將所述片材積層於所述電子基板上的狀態下,與所述接地部接觸且具備導電性;以及至少一個絕緣層,於將所述片材積層於所述電子基板上的狀態下,位於所述基材的所述電子基板側,且具備包含至少一個所述電子零件的尺寸。 A sheet used for laminating on an electronic substrate and fixed to the electronic substrate via a ground portion, wherein the electronic substrate includes a wiring substrate having a mounting surface, and is mounted on the sheet The mounting surface of the wiring substrate And a plurality of electronic components; and the sheet material is characterized in that: a sheet-shaped base material is in contact with the ground portion and has conductivity in a state in which the sheet material is laminated on the electronic substrate; And at least one insulating layer is disposed on the electronic substrate side of the substrate in a state where the sheet is laminated on the electronic substrate, and has a size including at least one of the electronic components. 如申請專利範圍第11項所述的片材,其中所述基材具有與所述絕緣層接觸而設置且具備黏著性的第1部分、及設置於所述第1部分的與所述絕緣層為相反之側的第2部分。 The sheet according to claim 11, wherein the substrate has a first portion provided in contact with the insulating layer and having adhesiveness, and the insulating layer disposed on the first portion The second part of the opposite side. 如申請專利範圍第12項所述的片材,其中所述第1部分含有第1樹脂、及分散於所述第1樹脂中的第1導電性粒子,所述第2部分含有第2樹脂、及以較所述第1導電性粒子於所述第1部分中的含量更多的量而分散於所述第2樹脂中的第2導電性粒子。 The sheet according to claim 12, wherein the first portion contains a first resin and first conductive particles dispersed in the first resin, and the second portion contains a second resin. And the second conductive particles dispersed in the second resin in an amount larger than the content of the first conductive particles in the first portion. 如申請專利範圍第13項所述的片材,其中相對於所述第1樹脂100重量份,所述第1導電性粒子於所述第1部分中的含量為1重量份~100重量份。 The sheet according to claim 13, wherein the content of the first conductive particles in the first portion is from 1 part by weight to 100 parts by weight based on 100 parts by weight of the first resin. 如申請專利範圍第13項所述的片材,其中相對於所述第2樹脂100重量份,所述第2導電性粒子於所述第2部分中的含量為100重量份~1500重量份。 The sheet according to claim 13, wherein the content of the second conductive particles in the second portion is from 100 parts by weight to 1,500 parts by weight based on 100 parts by weight of the second resin. 如申請專利範圍第13項所述的片材,其中所述第1導電 性粒子的形狀與所述第2導電性粒子的形狀不同。 The sheet of claim 13, wherein the first conductive material The shape of the particles is different from the shape of the second conductive particles. 如申請專利範圍第13項所述的片材,其中所述第1導電性粒子的形狀為樹枝狀或球狀。 The sheet according to claim 13, wherein the first conductive particles have a dendritic shape or a spherical shape.
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