TW201501814A - Exhaust valve system - Google Patents

Abstract

The purpose of the present invention is to provide an exhaust valve system which can perform an exhaust valve processing in a short period of time, and inhibit degrading of coating liquid so as to reutilize the coating liquid exhausted by the exhaust valve processing. The present invention discloses an exhaust valve system for a coating device. The coating device makes use of a mouth-shaped plate part having a manifold stored therein the coating liquid and a slit nozzle to eject the coating liquid from the slit nozzle, and performs a scanning to form a coating on a substrate. The exhaust valve system is constituted by: a coating liquid supply hole arranged in the mouth-shaped plate part for supplying the coating liquid to the manifold; and an exhaust valve hole for exhausting the air existed in the manifold by supplying the coating liquid from the coating liquid supply hole. The exhaust valve system includes: an exhaust valve slot for storing the coating liquid containing the air exhausted from the exhaust valve hole; and a pressure reducer for reducing the pressure of the exhaust valve slot.

Description

Exhaust system

The present invention relates to an exhaust system of a coating apparatus for applying a coating liquid onto a substrate, and more particularly to a user who discharges air present in the die plate.

In a flat panel display such as a liquid crystal display or a plasma display, a resist liquid is applied to a substrate composed of glass or the like (referred to as a coated substrate). This coated substrate is formed by a coating device that uniformly applies a resist liquid (hereinafter referred to as a coating liquid). In other words, the coating apparatus includes a platen on which the substrate is placed, and a coating unit having a die-shaped plate portion for discharging the coating liquid, and the coating liquid is ejected from the slit nozzle of the die plate portion while being performed. A coating operation in which the substrate and the coating unit are relatively moved, and a coating film having a specific thickness is formed on the substrate.

In general, for example, the exhaust gas enthalpy treatment shown in Patent Document 1 below is performed before such a coating operation. In other words, in the die plate portion, a manifold for temporarily storing a coating liquid supplied by a pump or the like is provided, and when the nozzle is mixed with air such as a bubble or a gas trap, the coating operation is performed, and the coating is performed. The pressure of the liquid is liable to change, and it becomes an important factor in uneven coating. Therefore, by discharging the air existing in the manifold by performing the exhaust enthalpy treatment, the coating liquid can be stably ejected from the slit nozzle, and the occurrence of coating unevenness can be suppressed.

Specifically, as shown in FIG. 5, in the die plate portion 100, in addition to the coating liquid supply hole 101 for supplying the coating liquid, a plurality of exhaust vent holes 103 for discharging the air of the manifold 102 are provided. Next, the exhaust boring holes 103 are provided with the exhaust boring grooves 104, and the exhaust boring holes 103 and the exhaust boring grooves 104 are connected in a one-to-one manner by the exhaust enthalpy piping 105. Exhaust gas In the treatment, the coating liquid is supplied from the coating liquid supply hole 101, and the air existing in the manifold 102 is discharged together with the coating liquid from the slit nozzle 106 and the exhaust boring 103. Then, the coating liquid is continuously supplied from the coating liquid supply hole 101, and all of the air of the manifold 102 is discharged to fill the manifold 102 with the coating liquid. After the exhaust enthalpy treatment is completed, a coating operation is performed to form a stable coating film on the substrate.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-131788

Previously, the coating liquid (including the coating liquid of air) stored in the exhaust gutter was discarded. However, in recent years, as the price of the liquid crystal panel has decreased, there is a demand for reusing the coating liquid stored in the exhaust gutter. Therefore, the coating liquid stored in the exhaust grate is completely removed by the bubble removing device (after degassing), and returned to the pump that supplies the coating liquid to the manifold to be reused.

However, it takes time to perform the exhaust gas treatment before the coating, and it takes a long time to realize the recycling of the coating liquid stored in the exhaust gas discharge tank by the bubble removing device. As a result, there is a problem that the production work time of the entire coating apparatus is prolonged. Moreover, after taking time, the coating liquid stored in the exhaust gutter is exposed to the atmosphere for a long time, and the coating liquid is deteriorated. If such a coating liquid is reused, there is a problem that the quality of the coating film is affected.

The present invention has been made in view of the above problems, and it is an object of the invention to provide an exhaust gas enthalpy system which can perform exhaust gas enthalpy treatment in a short period of time and can suppress deterioration of a coating liquid and reuse a coating liquid discharged and discharged by an exhaust gas.

In order to solve the above problems, the exhaust enthalpy system of the present invention is characterized in that it is a type An exhausting system of a coating apparatus for spraying a coating liquid from the slit nozzle and scanning the substrate by a die plate portion having a manifold and a slit nozzle for storing the coating liquid on the substrate A coating film is formed in the mouth plate portion, and a coating liquid supply hole for supplying a coating liquid to the manifold and a coating liquid supplied from the coating liquid supply hole are provided. And discharging an exhaust boring hole of the air existing in the manifold, and comprising: an exhaust sump that stores a coating liquid containing air discharged from the exhaust boring hole; and a pressure reducing device that exhausts the exhaust The pressure of the gutter is decompressed.

According to the exhaust enthalpy system, the pressure of the exhaust sump is decompressed by the pressure reducer, and when the air and the coating liquid (air mixture) containing air are discharged from the exhaust boring hole, Since the pressure of the tank is lower than that in the case of exhaust gas treatment at atmospheric pressure, it is easy to discharge the air mixed liquid from the exhaust port in a short time.

Then, by depressurizing the exhaust sump, the coating liquid stored in the exhaust sump is exposed to a pressure state in which the atmospheric pressure is low, so that the coating liquid is easily discharged as compared with the case where the exhaust sump is at atmospheric pressure. The air contained in the air (easy to degas), and the air contained in the coating liquid can be removed in a short time. Further, by continuously reducing the pressure in the exhaust gutter, it is possible to remove the air dissolved in the coating liquid which is difficult to remove at atmospheric pressure. Therefore, the exhaust gas enthalpy treatment can be performed in a short time, and when the coating liquid in the exhaust gas sump is reused, deterioration of the coating liquid can be suppressed.

Further, a configuration may be adopted in which a plurality of exhaust boring holes are provided in the die plate, and each of the exhaust boring holes is connected to the exhaust sump by a pipe, and each of the exhaust boring holes is bored. The discharged coating liquid containing air is stored in a common exhaust sump.

According to this configuration, space saving can be achieved as compared with the case where the exhaust sump is provided separately from the exhaust boring. On the other hand, if a plurality of exhaust gutters are provided, it is necessary to individually perform the pressure setting at the time of decompressing the exhaust grate in order to match the amount of the coating liquid discharged from each of the exhaust ports. From this point of view, it is also desirable to store the coating liquid containing air discharged from each of the exhaust boring holes in the common exhaust sump.

Further, a configuration may be adopted in which a pressurizer that pressurizes the pressure of the exhaust gutter is provided, and the pressurizer pressurizes the exhaust chute to deaerate the exhaust gas. The coating liquid in the gutter is returned to the manifold of the above-mentioned lip plate portion.

According to this configuration, after the degassing is completed, the coating liquid stored in the exhaust grate is pressurized by the pressurizing device to return to the manifold. That is, since the coating liquid in the exhaust grate is returned to the manifold immediately after the completion of the degassing without passing through the bubble removing device, the exposure time of the degassed coating liquid to the atmosphere is relatively high. In a short time, it is possible to suppress the deterioration of the coating liquid as much as possible and return to the manifold.

Further, a pressure regulator in which the pressure reducer and the pressurizer are common may be used.

According to this configuration, by providing the pressure regulator and the pressurizer as common pressure regulators, the number of parts of the apparatus can be reduced and the cost can be suppressed.

According to the exhaust gas enthalpy system of the present invention, the exhaust gas enthalpy treatment can be performed in a short time, and the coating liquid can be prevented from being deteriorated, and the coating liquid discharged by the exhaust gas treatment can be reused.

2‧‧‧Abutment

10‧‧‧Substrate

21‧‧‧ board

22‧‧‧ Track

25‧‧‧ Waste tray

30‧‧‧ Coating unit

31‧‧‧ legs

33‧‧‧Linear motor

34‧‧‧Mouth plate department

34a‧‧‧Slit nozzle

35‧‧‧ slider

37‧‧‧ Track

41‧‧‧岐管

41a‧‧‧Central Department

41b‧‧‧Side end

42‧‧‧ Coating solution supply hole

43‧‧‧Exhaust boring

43L‧‧‧Exhaust boring

43R‧‧‧Exhaust boring

44‧‧‧ venting holes

51‧‧‧ Coating liquid supply pump

51a‧‧‧Pipe

51b‧‧‧Valves

52‧‧‧Exhaust piping

52a‧‧‧Exhaust valve

53‧‧‧Exhaust gas piping

53a‧‧‧Exhaust valve

54‧‧‧Connectors

55‧‧‧Supply piping

60‧‧‧Exhaust trough

70‧‧‧pressure regulator

70a‧‧‧Vacuum ejector

71‧‧‧vacuum

71a‧‧‧Vacuum piping

72‧‧‧ Pressure space

72a‧‧‧Square piping

73‧‧‧Exhaust gas

73a‧‧‧Exhaust piping

73b‧‧‧Exhaust valve

74‧‧‧Air pump

100‧‧‧ mouth plate department

101‧‧‧ Coating solution supply hole

102‧‧‧岐管

103‧‧‧Exhaust boring

104‧‧‧Exhaust gutter

105‧‧‧Exhaust gas piping

106‧‧‧Slit nozzle

531‧‧‧ parallel part

532‧‧‧ vertical part

X‧‧‧axis direction

Y‧‧‧ axis direction

Z‧‧‧Axis direction

Fig. 1 is a perspective view showing a coating apparatus according to an embodiment of the present invention.

Fig. 2 is a schematic view showing the vicinity of the leg portion of the coating unit.

Fig. 3 is a view schematically showing a piping path of the lip plate portion and the exhaust chute.

Fig. 4 is a view showing the manifold of the lip plate portion.

Fig. 5 is a view showing the configuration of a lip plate portion and an exhaust gutter of the prior coating device.

Embodiments of the present invention will be described using the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view schematically showing a coating device provided with an exhaust groove of the present invention, Fig. 2 is a view showing a vicinity of a leg portion of a coating unit of a coating device, and Fig. 3 is a schematic view showing a die plate portion. And the piping path of the exhaust gutter, and FIG. 4 shows the manifold of the lip plate. Picture.

As shown in FIG. 1 to FIG. 4, the coating apparatus is formed on a substrate 10 to form a coating film of a liquid material (hereinafter referred to as a coating liquid) such as a chemical liquid or a resist liquid, and is provided with a base 2 and The platen 21 on which the substrate 10 is placed is configured as a coating unit 30 that is movable in a specific direction with respect to the platen 21.

In the following description, the direction in which the coating unit 30 is moved is referred to as the X-axis direction, and the direction orthogonal to the horizontal plane is referred to as the Y-axis direction, and the direction orthogonal to both the X-axis and the Y-axis direction is defined as The Z axis direction will be described.

In the base 2 described above, a platen 21 is disposed at a central portion thereof. The platen 21 is placed on the substrate 10 to be loaded. A substrate holding mechanism is provided on the platen 21, and the substrate 10 is held by the substrate holding mechanism. Specifically, a plurality of suction holes formed on the surface of the platen 21 are formed, and the substrate 10 can be adsorbed and held on the surface of the platen 21 by causing attraction to the suction holes.

Further, a plate elevating mechanism for moving the substrate 10 up and down is provided in the platen 21. Specifically, a plurality of pin holes are formed in the surface of the platen 21, and a lift pin (not shown) that can be moved up and down in the Z-axis direction is embedded in the pin hole. In other words, when the lift pin is carried into the substrate 10 while protruding from the surface of the platen 21, the front end portion of the lift pin abuts against the substrate 10 to hold the substrate 10. Then, the lift pins are lowered in this state and housed in the pin holes, whereby the substrate 10 can be placed on the surface of the platen 21.

Further, the coating unit 30 is a person who sprays a coating liquid onto the substrate 10 and forms a coating film. As shown in FIGS. 1 and 2, the coating unit 30 has a leg portion 31 coupled to the base 2 and a lip plate portion 34 extending in the Y-axis direction, and is mounted so as to be able to span the base 2 in the Y-axis direction. The upper state moves in the X-axis direction. Specifically, the rails 22 extending in the X-axis direction are respectively provided at both end portions of the base 2 in the Y-axis direction, and the leg portions 31 are attached to the rails 22 so as to be freely slidable. Next, a linear motor 33 is attached to the leg portion 31, and by driving the linear motor 33, the coating unit 30 can be moved in the X-axis direction and stopped at an arbitrary position.

Further, in the leg portion 31 of the coating unit 30, as shown in Fig. 2, a die-shaped plate portion 34 to which a coating liquid is applied is attached. Specifically, the leg portion 31 is provided with a rail 37 extending in the Z-axis direction and a slider 35 sliding along the rail 37, and the slider 35 is coupled to the lip plate portion 34. Next, a ball screw mechanism driven by a servo motor is attached to the slider 35, and the servo motor is driven to move the slider 35 in the Z-axis direction and can be stopped at an arbitrary position. That is, the lip plate portion 34 is supported so as to be in contact with or away from the substrate 10 held by the platen 21.

Further, the lip plate portion 34 is a method in which a coating liquid is discharged and a coating film is formed on the substrate 10. The lip plate portion 34 has a columnar member having a shape extending in one direction, and is provided to be substantially orthogonal to the traveling direction of the coating unit 30. In the die plate portion 34, a slit nozzle 34a extending in the longitudinal direction is formed, and the coating liquid supplied to the die plate portion 34 is ejected from the slit nozzle 34a in the same direction in the longitudinal direction. Therefore, the coating unit 30 is moved in the X-axis direction in a state where the coating liquid is ejected from the slit nozzle 34a, and a coating film having a constant thickness is formed on the substrate 10 in the longitudinal direction of the slit nozzle 34a. In the present embodiment, the operation of moving the coating unit 30 in a state where the coating liquid is ejected from the slit nozzle 34a by applying the coating liquid is referred to as a coating operation.

Further, as shown in FIGS. 3 and 4, the die plate portion 34 has a manifold 41 for storing a coating liquid, and a coating liquid supply hole 42 for supplying a coating liquid to the manifold 41; The hole 43 discharges air such as a bubble or a gas trap existing in the manifold 41. Here, the exhaust boring hole 43 is specifically referred to as an exhaust boring hole 43L on the left side toward the paper surface, and the exhaust boring hole 43 on the right side is specifically referred to as an exhaust boring hole 43R, in each case. In the case of an indistinguishable case, it is simply referred to as an exhaust bore 43.

The manifold 41 temporarily stores the portion of the coating liquid supplied, and in the present embodiment, is formed inside the lip plate portion 34 along the longitudinal direction. Specifically, it has a shape extending in the longitudinal direction of the lip plate portion 34, and is formed to be the highest in the central portion 41a of the central portion 41a in the longitudinal direction, and is formed at the side end portion 41b of the both end portions in the longitudinal direction. Low, lower part It is connected to the slit nozzle 34a. The upper portion of the central portion 41a communicates with the exhaust hole 44, and the coating liquid supply hole 42 communicates with the lower portion of the exhaust hole 44. The coating liquid supply hole 42 is connected to the supply pipe 55 by the application liquid supply pump 51 that supplies the coating liquid, and when the coating liquid supply pump 51 is actuated to supply the coating liquid, the coating liquid supply hole 42 is supplied. The coating liquid is supplied to the manifold 41. Then, the air in the manifold 41 and the air supplied to the coating liquid are simultaneously collected by the buoyancy force in the center portion 41a and discharged through the exhaust hole 44.

Further, the exhaust hole 44 is connected to the exhaust pipe 52, and the exhaust pipe 52 is connected to the exhaust port 60. That is, the air of the manifold 41 and the coating liquid (also referred to as air mixing liquid) in which the air is mixed are supplied through the exhaust pipe 44 through the exhaust hole 44, and are discharged to the exhaust port. 60. In the piping, an exhaust valve 52a is provided. The coating operation is performed in a state in which the exhaust valve 52a is closed, whereby the coating liquid supplied during the coating operation does not leak through the exhaust hole 44.

The exhaust gutter 60 is a type of air for storing the manifold 41 and a coating liquid mixed with the coating liquid. In the present embodiment, the exhaust gutter 60 is provided only in one coating device, and is provided in the leg portion 31 of the coating unit 30 (see FIG. 2). An exhaust pipe 52 connected to the die plate portion 34 and an exhaust port pipe 53 to be described later are connected to the exhaust groove 60, and the air discharged from the manifold 41 and the coating liquid containing air are collected in the exhaust gas.弁 60. Further, since the exhaust groove 60 is attached to the leg portion 31, even if the coating unit 30 moves, the distance between the lip plate portion 34 and the exhaust groove 60 does not change. Therefore, the exhaust pipe 52 and the exhaust manifold 53 connected to the exhaust sump 60 are held at a constant length. Further, in the present embodiment, the exhaust sump 60 and the coating liquid supply pump 51 are connected by a pipe 51a. In the pipe 51a, a valve 52b is provided, and by opening and closing the valve 52b, the connection state of the exhaust port 60 and the coating liquid supply pump 51 can be controlled.

The exhaust boring holes 43 are provided for exhausting the air in the manifold 41 during the exhaust enthalpy treatment, and are provided one by one in the longitudinal direction of the lip plate portion 34, for a total of two. Here, the exhaust enthalpy treatment is performed so as not to spray air from the slit nozzle 34a onto the substrate 10. The treatment of the air of the tube 41 is usually carried out prior to the coating operation. Specifically, after the sputum tube 41 is washed, or the lip plate portion 34 is replaced with the new slab portion 34, the coating liquid is supplied from the coating liquid supply hole 42. In other words, the coating liquid is supplied from the coating liquid supply hole 42, and the air of the manifold 41 and the coating liquid containing air are extruded from the slit nozzle 34a, the exhaust hole 44, and the exhaust port 43. Thus, air is exhausted from the manifold 41.

The exhaust bore 43 is formed to communicate with the manifold 41 and is connected to the exhaust manifold 53. Thereby, the air of the manifold 41 and the coating liquid containing air are discharged from the exhaust port 43 through the exhaust manifold 53 to the exhaust pocket 60 during the exhaust gas treatment. The exhaust manifolds 53 are connected to the common exhaust pockets 60, and the air discharged from either of the exhaust bores 43 and the coating liquid containing the air are discharged to the exhaust pockets 60. The exhaust manifold 53 has a parallel portion 531 extending along the lip plate portion 34 and a vertical portion 532 orthogonal thereto. That is, the joint 54 which is changed in the direction of 90 degrees is connected to the parallel portion 531 which is opposite to the side connected to the exhaust bore 43, and the vertical portion 532 which is connected to the joint 54 is connected to the exhaust pocket 60. Thereby, the air discharged from the exhaust boring hole 43 and the coating liquid containing air are discharged to the exhaust sump 60 via the parallel portion 531 and the vertical portion 532.

Further, the exhaust manifold 53 is set such that the pressure loss generated in the exhaust manifold 53 is equal. Specifically, the pressure loss is set by adjusting the pipe diameter and the pipe length of the exhaust port piping 53. In other words, as shown in FIG. 3, the exhaust manifold 53 is the same diameter as the parallel portion 531 (in FIG. 3, the thickness of the line of the exhaust manifold 53 indicates the diameter of the pipe). Since the exhaust groove 60 is provided in the vicinity of the exhaust bore 43R, the parallel portion 531 of the exhaust manifold 53 is shorter than the one connected to the exhaust bore 43L and connected to the exhaust bore 43R. Therefore, when only the parallel portion 531 is compared, the pressure loss is such that the exhaust bore 43L is large. On the other hand, in the case of comparing the vertical portion 532, the exhaust manifold 53 connected to the exhaust bore 43R is formed to have a smaller diameter than the exhaust manifold 53 connected to the exhaust bore 43L. That is, the pressure loss of the vertical portion 532 is set such that the exhaust manifold 53 connected to the exhaust bore 43R is large. That is, due to the exhaust 弁 The grooves 60 are provided in common, and the lengths of the exhaust manifolds 53 connected to the exhaust ports 43 are different. Therefore, by forming one portion of the exhaust manifold 53 into a small diameter, the exhaust manifold 53 is integrally formed. The pressure loss is equal in any of the exhaust manifolds 53. In the present embodiment, the parallel portion 531 of the exhaust manifold 53 connected to the exhaust bore 43 uses a pipe of the same diameter, and only the vertical portion 532 adjusts the pressure loss using the exhaust manifold 53 having a different diameter. Thus, by making the parallel portion 531 of the exhaust manifold 53 directly connected to the exhaust bore 43 the same diameter, the manufacturing cost of the lip plate portion 34 can be reduced, and the diameter of the vertical portion 532 can be easily changed. Adjustment of loss. Further, the pressure loss is set to be equal, and it is not only completely identical, and it is only necessary to smoothly discharge the air from the exhaust boring holes 43 of either one, and the degree of discharge is the same.

Further, in the present embodiment, the total value of the pressure loss generated in all of the exhaust manifolds 53 is set to be smaller than the pressure loss generated in the slit nozzle 34a so as not to take in the air from the slit nozzle 34a. . Thereby, it is possible to suppress the amount by which the supplied coating liquid is unnecessarily discharged from the slit nozzle 34a during the exhaust gas enthalpy treatment. In other words, when the coating liquid is supplied from the coating liquid supply hole 42 during the exhaust gas treatment, the air existing in the manifold 41 is discharged from the slit nozzle 34a, the exhaust hole, and the exhaust port 43, and the coating liquid is stored. At the time of the tube 41, the air rises by buoyancy, and the air and the coating liquid containing the air are discharged from the exhaust hole and the exhaust port 43. In this state, the smaller the pressure loss value generated in the slit nozzles 34a, the smaller the pressure loss value generated in the slit nozzles 34a, the easier it is to discharge than the self-venting bores 43. It is discharged from the slit nozzle 34a. However, since the air rises in buoyancy, a large amount of the coating liquid which is not mixed with air is discharged from the slit nozzles 34a which are easily discharged. Therefore, the total value of the pressure loss generated in the exhaust manifold 53 is set to be smaller than the pressure loss generated in the slit nozzle 34a from the range in which the air is not sucked from the slit nozzle 34a, and is not easily obtained from the slit nozzle 34a. Exhaust, even if the air rises by buoyancy, the discharge from the slit nozzle 34a can be suppressed, and the coating liquid can be prevented from being discarded indiscriminately.

Moreover, the suction of the air from the slit nozzle 34a as described herein is as follows. When the total value of the pressure loss of all the exhaust gas exhaust pipes 53 opened by the gas valve 53a is significantly smaller than the pressure loss generated in the slit nozzle 34a, the air is taken in from the slit nozzle 34a, and the liquid flows to the exhaust gas pipe 53. In other cases, the coating liquid supplied from the coating liquid supply hole 42 is distributed to the slit nozzle 34a and the exhaust manifold 56 in accordance with the ratio of the pressure loss. In this case, the coating liquid is supplied from the coating liquid supply hole 42. In the coating liquid, a large amount of liquid flows to the exhaust manifold 53. In other words, the range in which the air is not sucked from the slit nozzle 34a means that the coating liquid supplied from the coating liquid supply hole 42 is not sucked into the air from the slit nozzle 34a, and the air and the air containing coating are applied to the maximum extent. The liquid is discharged to the state of the exhaust manifold 53.

Further, an exhaust port valve 53a is provided in the exhaust port pipe 53. In the coating operation, the coating liquid supplied during the coating operation is prevented from leaking through the exhaust bore 43 by closing the exhaust port valve 53a.

Further, a pressure regulator 70 is connected to the exhaust sump 60. The pressure regulator 70 adjusts the pressure of the exhaust grate 60 to perform decompression or pressurization in the exhaust grate 60.

In the present embodiment, the vacuum ejector 70a is used as the pressure regulator 70. The vacuum ejector 70a is attached to the waste liquid tray 25, and by actuating the vacuum ejector 70a, the inside of the exhaust sump 60 can be decompressed or pressurized.

The vacuum injector 70a has three turns, that is, a vacuum port 71, a pressure port 72, and an exhaust port 73. Next, when the compressed air (pressure) is supplied from the pressure chamber 72 and discharged from the exhaust port 73, a negative pressure can be generated in the vacuum port 71.

In the present embodiment, the vacuum manifold 71 is connected to the vacuum port 71, and the vacuum port 71 communicates with the exhaust port 60 through the vacuum pipe 71a. That is, air can be reciprocated to and from the vacuum ejector 70a and the exhaust sump 60 through the vacuum piping 71a.

Further, a pressure pipe 72a is connected to the pressure chamber 72, and the pressure port 72 is connected to the pressure pump 74 through the pressure pipe 72a. That is, the compressed air (pressure) can be supplied from the pressure air pump 74 to the vacuum injector 70a through the pressure pipe 72a and the pressure chamber 72. Further, it is desirable that the pressure pump 74 can control the pressure value of the pressure supplied to the vacuum injector 70a. That is, the exhaust sump The pressure value during the decompression and pressurization in 60 is approximately proportional to the pressure value of the pressure supplied to the vacuum injector 70a. Further, a regulator (not shown) for adjusting the pressure may be provided between the pressure pipings 72a, and the pressure value of the pressure supplied to the vacuum injectors 70a may be controlled.

Further, an exhaust pipe 73a is connected to the exhaust port 73. An exhaust valve 73b is attached to the exhaust pipe 73a, and the air in the vacuum injector 70a can be discharged by opening the exhaust valve 73b. Therefore, when the air is supplied from the pressure air pump 74 and discharged from the exhaust pipe 73a in a state where the exhaust valve 73b is opened, a negative pressure can be generated in the vacuum pipe 71a, and the pressure in the exhaust groove 60 can be decompressed ( A vacuum ejector 70a) as a pressure reducer. Further, when the air is supplied from the pressure air pump 74 in a state where the exhaust valve 73b is closed, air that is not available inside the vacuum ejector 70a is supplied to the exhaust sump 60 through the vacuum pipe 71a, thereby allowing the platoon to be discharged. The air sump 60 is pressurized (the vacuum ejector 70a as a pressurizer).

Further, when the vacuum ejector 70a is not supplied to the vacuum ejector 70a, the exhaust sump 60 can be set to the atmosphere open state by opening the exhaust valve 73b to be described later. That is, by appropriately controlling the pressure supply to the vacuum injector 70a and the exhaust valve 73b, the pressure state of the exhaust manifold can be set to any of a reduced pressure, a pressurized, and an open air state as needed. It is assumed that the exhaust gutter is set to an open atmosphere, whereby an exhaust enthalpy of the usual siphon effect can also be implemented.

By actuating the vacuum ejector 70a, it is possible to perform the exhaust enthalpy treatment. In other words, when the coating liquid is supplied from the coating liquid supply hole 42 by the exhaust enthalpy treatment, the air of the manifold 41 and the coating liquid containing air are squeezed from the slit nozzle 34a, the exhaust hole 44, and the exhaust boring hole 43. Press out. At this time, when the vacuum ejector 70a is actuated to decompress the inside of the exhaust sump 60, it is easier to discharge from the vent hole 44 and the exhaust boring hole 43 as compared with the case where the inside of the exhaust sump 60 is at atmospheric pressure. Air and coating liquid containing air. In other words, the air discharged from the exhaust port 44 and the exhaust port 43 and the coating liquid containing the air flow through the exhaust manifold 53 and the exhaust pipe 52 to the exhaust slot 60 by the siphon effect. The pressure in the exhaust grate 60 is reduced to promote the flow thereof. That is, the amount of air per unit time and the coating liquid containing air can be increased. Therefore, by operating the vacuum ejector 70a as a pressure reducer, the exhaust enthalpy treatment can be completed in advance as compared with the case where the vacuum ejector 70a is not actuated and the exhaust sump 60 is at atmospheric pressure. In addition, the total amount of the coating liquid supplied to the manifold 41 by the coating liquid supply pump 51 during the exhaust gas treatment by the vacuum ejector 70a can be increased from the exhaust boring hole 43. The ratio of the coating liquid. In other words, since the coating liquid containing air present in the manifold 41 of the lip plate portion 34 is more easily discharged from the exhaust manifold 53, the amount of the coating liquid discharged indiscriminately can be suppressed.

Further, by operating the vacuum ejector 70a, the air-containing coating liquid stored in the exhaust sump 60 can be simultaneously subjected to bubble removal treatment in the exhaust enthalpy treatment. That is, when the exhaust gas enthalpy treatment is performed, the coating liquid (air mixture liquid) containing air is stored in the exhaust sump 60. At this time, by operating the vacuum ejector 70a as a pressure reducer, the inside of the exhaust sump 60 is decompressed and maintained at a pressure lower than a larger air pressure. Therefore, the air (bubbles) stored in the air mixed in the exhaust grate 60 is likely to float up to the liquid surface, and the floating bubbles disappear in the liquid surface. In other words, by decompressing the inside of the exhaust grate 60, the bubble (air) in the air mixture is promoted as compared with the case where the inside of the exhaust grate 60 is at atmospheric pressure, even in the exhaust gas treatment. The bubble removal process is performed. Therefore, since the bubble removing process is simultaneously performed in the exhaust gas enthalpy treatment, the degassing process can be started when the coating liquid containing air is less in the exhaust sump 60, so that it is more exhausted than the exhaust gas. The gutter 60 stores a certain amount of the coating liquid, and then depressurizes and degassing, so that the bubble removal treatment can be performed more efficiently.

Then, the removal of the air in the manifold 41 of the lip plate portion 34 is completed, and after the discharge of the air and the coating liquid containing the air toward the exhaust gutter 60 is completed, the vacuum injector 70a is continued to be continued. The bubble removing process of the coating liquid containing air in the exhaust gutter 60 is performed. That is, it is not necessary to transfer the coating liquid containing air in the exhaust grate 60 to another bubble removing device, and the bubble removing process can be performed. Therefore, the deterioration of the coating liquid caused by the contact of the coating liquid with the atmosphere can be suppressed as much as possible, and the regeneration of the coating liquid can be performed in a short time.

Further, the vacuum ejector 70a as the pressure regulator 70 can also function as a pressurizer. Specifically, when the exhaust valve 73b of the exhaust pipe 73a is in the closed state and air is supplied from the pressure pump 74, the flow from the vacuum pump 70a is prevented from flowing from the vacuum injector 70a to the exhaust pipe 73a. The air is supplied to the vacuum piping 71a. That is, by supplying air to the vacuum piping 71a, the air flows to the exhaust sump 60, and the inside of the exhaust sump 60 can be pressurized. Further, at this time, the valve 51b of the pipe 51a is closed.

By operating the vacuum ejector 70a as a pressurizer, the coating liquid can be reused immediately after the degassing treatment of the coating liquid is completed. Specifically, after the exhaust gas enthalpy treatment and the degassing treatment are completed, the exhaust valve 52a and the exhaust gas damper valve 53a are closed, and the communication between the manifold and the exhaust sump 60 is cut off. Next, when the exhaust valve 73b is in the closed state and the pressure is supplied from the pressure pump, the air from the pressure pump 74 flows into the exhaust pocket 60 through the vacuum piping 71a, and pressurizes the inside of the exhaust pocket 60. Then, when the valve 51b is in the open state and the inside of the exhaust sump 60 is pressurized, the coating liquid for removing air bubbles in the exhaust sump 60 is supplied to the coating liquid supply pump 51 through the pipe 51a. In other words, the coating liquid in the exhaust sump 60 is supplied to the coating liquid supply pump 51 and returned to the manifold 41 without being exposed to the atmosphere, so that the coating liquid in the exhaust sump 60 is not generated. Degradation by oxidation or the like can be reused.

Further, the waste liquid tray 25 receives the coating liquid discharged from the slit nozzle 34a at the time of exhaust gas treatment. The vacuum ejector 70a is attached in a posture in which the exhaust pipe 73a is oriented toward the center side of the waste liquid tray 25. Therefore, even if the coating liquid containing air is sucked into the vacuum piping 71a and discharged from the exhaust pipe 73a in order to depressurize the inside of the exhaust grate 60, it is possible to prevent the coating liquid containing the air from being discharged. The waste tray 25 is soiled to the bottom plate on which the coating device is disposed.

According to the coating apparatus of the above embodiment, when the pressure of the exhaust grate 60 is reduced by the pressure reducer, and the air and the coating liquid (air mixture) containing air are discharged from the exhaust port, As compared with the case where the pressure of the exhaust sump 60 is atmospheric pressure, the air mixed liquid is more likely to be discharged from the exhaust boring hole 43 in a short time. Then, by venting the exhaust groove 60 Under reduced pressure, the coating liquid stored in the exhaust grate 60 is exposed to a relatively low pressure, so that the air in the coating liquid is more easily discharged than the case where the exhaust gutter 60 is at atmospheric pressure (easy to degas) ), and the air of the coating liquid can be removed in a short time. Therefore, when the exhaust gas enthalpy treatment can be performed in a short time and the coating liquid in the exhaust sump 60 is reused, deterioration of the coating liquid can be suppressed.

Further, in the above-described embodiment, an example in which the pressure regulator 70 having two functions of a pressure reducer and a pressurizer is used may be separately provided, and a pressure reducer or a pressurizer may be separately provided. In the case of being separately provided, for example, the vacuum pump may be configured to communicate with the exhaust manifold 60 as a pressure reducer through a pipe, and the pressure pump 74 may be communicated to the exhaust groove 60 as a pressurizer through a pipe.

Further, in the above-described embodiment, the application of the coating liquid in the exhaust sump 60 after degassing by the pressurizer is returned to the manifold 41, and the coating liquid may be supplied. The pump 51 is returned from the exhaust grate 60 to the composition of the coating liquid after degassing. In other words, the coating liquid supply pump 51 is sucked by the valve 51b in the open state, and the coating liquid of the exhaust gas groove 60 is temporarily stored in the coating liquid supply pump 51, and thereafter, The coating liquid supply pump 51 is discharged, and the degassed coating liquid can be returned to the manifold 41. At this time, the suction operation of the coating liquid supply pump 51 can be assisted by the pressurizer. Further, the exhaust sump 60 itself may be moved to return the coating liquid in the exhaust sump 60 after degassing to the manifold 41.

Further, in the above embodiment, an example in which the common exhaust groove 60 is used has been described, and the exhaust groove 60 may be used for each of the exhaust holes 43. In this case, the diameters and lengths of the exhaust port piping 53 and the exhaust pipe 52 must be appropriately adjusted so that the pressure losses of the exhaust manifold 53 and the exhaust pipe 52 are the same.

25‧‧‧ Waste tray

34‧‧‧Mouth plate department

34a‧‧‧Slit nozzle

42‧‧‧ Coating solution supply hole

43‧‧‧Exhaust boring

43L‧‧‧Exhaust boring

43R‧‧‧Exhaust boring

44‧‧‧ venting holes

51‧‧‧ Coating liquid supply pump

51a‧‧‧Pipe

51b‧‧‧Valves

52‧‧‧Exhaust piping

52a‧‧‧Exhaust valve

53‧‧‧Exhaust gas piping

53a‧‧‧Exhaust valve

54‧‧‧Connectors

60‧‧‧Exhaust trough

70‧‧‧pressure regulator

70a‧‧‧Vacuum ejector

71‧‧‧vacuum

71a‧‧‧Vacuum piping

72‧‧‧ Pressure space

72a‧‧‧Square piping

73‧‧‧Exhaust gas

73a‧‧‧Exhaust piping

73b‧‧‧Exhaust valve

74‧‧‧Air pump

531‧‧‧ parallel part

532‧‧‧ vertical part

Claims (5)

An exhaust gas enthalpy system, characterized in that it is an exhaust enthalpy system of a coating device, which is formed by a stencil portion having a manifold and a slit nozzle for storing a coating liquid The slit nozzle ejects the coating liquid and scans to form a coating film on the substrate, and the exhaust port system is provided in the mouth plate portion, and a coating liquid supply hole for supplying the coating liquid to the manifold is provided. And discharging the coating liquid from the coating liquid supply hole to discharge the exhaust hole of the air existing in the manifold, and the exhaust gas system includes: an exhaust gas groove, which is stored from the exhaust gas orifice a discharge liquid containing air; and a pressure reducer that decompresses the pressure of the exhaust gas sump. The exhaust enthalpy system of claim 1, wherein a plurality of exhaust boring holes are provided in the mouth plate portion, and each exhaust vent is connected to the exhaust sump by a pipe, and each exhaust gas is exhausted. The coating liquid containing air discharged from the bore is stored in the common exhaust sump. The exhaust gas system of claim 1, comprising a pressurizing device that pressurizes the pressure of the exhaust gas groove, wherein the pressurizer pressurizes the exhaust gas groove, and the gas is degassed. The coating liquid in the exhaust gutter is returned to the manifold of the above-mentioned lip plate portion. The exhaust gas system of claim 2, comprising a pressurizing device for pressurizing the pressure of the exhaust gas groove, wherein the pressurizing device pressurizes the exhaust gas groove to remove the gas after the degassing The coating liquid in the exhaust gutter is returned to the manifold of the above-mentioned lip plate portion. The exhaust gas system of any one of claims 1 to 4, wherein the pressure reducer and the pressurizer are common pressure regulators.