TW201429656A - Industrial robot - Google Patents

Abstract

The present application provides an industrial robot having an arm disposed in a vacuum and having an inside space at least partially being at atmospheric pressure, wherein the industrial robot is capable of minimizing operational error in installing a seal member to ensure the airtightness of the inside space of the arm even when the size of the industrial robot is increased. In the industrial robot, an arm (14) is formed in a hollow shape having an inside space (45) surrounded by a top surface section (85a), a bottom surface section (85b) and a side surface section (85c). The arm (14) is disposed in a vacuum. The inside space (45) is at atmospheric pressure. A plurality of through-holes (85g) communicating with the inside space (45) are formed on the top surface section (85a). The through-holes (85g) are sealed with a lid member (86), and a seal member is disposed between the top surface section (85a) and the lid member (86). A plurality of recessed sections (85n) are formed on a surface of the bottom surface section (85b) opposite the top surface section (85a). At least some of the recess sections (85n) are overlaid on the through-holes (85g) when seen from a direction opposite to the top surface section (85a) and the bottom surface section (85b).

Description

Industrial robot

The present invention relates to an industrial robot for use in a vacuum.

Heretofore, a vacuum robot that transports a substrate in a vacuum has been known (for example, refer to Patent Document 1). The vacuum robot described in Patent Document 1 includes a hand that mounts a substrate, an arm that has a hand connected to the distal end side, and a body that is coupled to a proximal end side of the arm. The arm includes: an arm base rotatably coupled to the body portion; a first arm having a base end side rotatably coupled to the arm base; and a second arm having a base end side rotatably coupled to the first arm The front side of the arm. Further, the arm includes: a first link having a base end side rotatably coupled to the arm base; and a second link having a base end side rotatably coupled to the front end side of the first link; the first link The rod is connected to the front end side of the first arm and the front end side of the first link, and the second connecting link is connected to the front end side of the second arm and the front end side of the second link.

In the vacuum robot described in Patent Document 1, the arm base and the first arm are formed in a hollow shape. Further, the second arm, the first link, the second link, the first connecting link, and the second connecting link are also formed in a hollow shape. An arm driving motor for driving the arm and a first reduction gear for reducing the rotation of the arm driving motor and transmitting the same to the first arm are disposed inside the arm base. The base end side of the first arm is fixed to the output shaft of the first reduction gear. A second reduction gear that decelerates the rotation of the arm drive motor and transmits the rotation to the second arm is disposed on the front end side of the first arm. The base end side of the second arm is fixed to the output shaft of the second reduction gear.

Further, in the vacuum robot described in Patent Document 1, one of the main body portions is fixed to the bottom surface of the vacuum container, and the arm and the hand are disposed in a vacuum. Formed into a hollow arm base and Airtightness is ensured in the internal space of the first arm, and the internal space of the arm base and the first arm becomes atmospheric pressure. In other words, the arm drive motor, the first reducer, and the second reducer are disposed in the air. On the other hand, the second arm, the first link, the second link, the first connecting link, and the second connecting link are formed with an opening that communicates with the internal space of the second arm, the first arm, and the first arm. The internal space of the link, the second link, the first connecting link, and the second connecting link is a vacuum. In other words, the bearing that connects the arm base and the first link or the bearing that rotatably connects the first link and the second link is rotatably disposed in the vacuum. Further, in the vacuum robot, the arm bases are formed by joining two divided casings having a substantially bottomed cylindrical shape divided into two in the vertical direction. In order to ensure the airtightness of the internal space of the arm base, an annular sealing member is disposed in the joint portion of the two divided casings, and the two divided casings are joined while sandwiching the sealing member.

Prior technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open Publication No. 2011-101912

In the vacuum robot described in Patent Document 1, the two divided casings are joined in a state in which the annular sealing member is sandwiched. Therefore, in the vacuum robot, when the robot is increased in size and the arm base is increased in size, the sealing member is also increased in size, so that the operation of the sealing member when assembling the arm base becomes complicated. Further, when the operation of the sealing member becomes complicated, an operation error in which the sealing member cannot be reliably held between the two divided casings is generated, and the possibility of ensuring the airtightness of the internal space of the arm base is also high. .

Therefore, an object of the present invention (first invention) is to provide an industrial robot having an arm that is disposed in a vacuum and at least a part of its internal space becomes atmospheric pressure, and that the industrial robot can be reduced in size to ensure installation. The operation of the airtight seal member of the inner space of the arm is incorrect.

Further, in the vacuum robot described in Patent Document 1, even if the arm is placed in a vacuum, Since the internal space of the arm base and the first arm becomes atmospheric pressure, the arm drive motor disposed inside the arm base can be cooled. Further, in the vacuum robot, even if the temperature of the substrate mounted on the hand is high, the arm base and the first arm can be cooled from the inside, and the temperature rise of the arm base or the first arm can be suppressed. Therefore, thermal expansion of the arm base or the first arm can be suppressed. Further, in the vacuum robot, even if the arm is placed in a vacuum, the arm drive motor, the first reducer, and the second reducer are disposed in the air, and thus the arm drive motor, the first reducer, and the second reducer are disposed. Lubricants do not need to use high-priced lubricants such as vacuum lubricants, as long as they use lubricants such as lubricants used in atmospheric pressure. Therefore, the initial cost and running cost of the vacuum robot can be reduced.

However, in the vacuum robot, since the internal spaces of the second arm, the first link, the second link, the first connecting link, and the second connecting link that constitute the arm are vacuumed, they are mounted on the substrate of the hand. When the temperature is high, the temperature of the second arm, the first link, and the second link is increased, and the amount of thermal expansion of the second arm, the first link, and the second link is increased. When the amount of thermal expansion of the second arm, the first link, the second link, and the like is increased, the substrate to be transported on the hand is largely displaced from the original target arrival position.

Further, in the vacuum robot, the bearing of the arm base and the first link or the bearing that rotatably connects the first link and the second link is rotatably disposed in the vacuum, so that it is mounted on the hand. When the temperature of the substrate is high, the temperature of the bearings rises, and the life of the bearings decreases. Moreover, since these bearings are disposed in a vacuum, it is necessary to use a high-priced lubricant such as a vacuum lubricating oil as a lubricant for the bearings. Therefore, in the vacuum robot, the initial cost and the running cost become high.

Therefore, the object of the present invention (second invention) is to provide an industrial robot that can prevent the object to be transported from shifting from the target arrival position even if the temperature of the object to be transported in the hand is high. The handling accuracy of the object to be transported is improved, and the initial cost and the running cost can be reduced.

In order to solve the above problem, the industrial robot according to the first aspect of the present invention includes an arm having a flat first flat portion and a flat second flat portion and the first flat portion. And a side surface portion that connects the outer peripheral end of the first planar portion and the outer peripheral end of the second planar portion; and at least a part of the arm is formed to have the first planar portion and the first planar portion 2 The inner space surrounded by the flat portion and the side portion is hollow, and the arm is disposed in a vacuum, the inner space of the arm is atmospheric pressure, and a plurality of through holes communicating with the inner space are formed in the first flat portion, and the arm is fixed to the first a plurality of cover members covering the through hole in the planar portion, and a plurality of sealing members disposed between the first planar portion and the cover member to prevent air from flowing out of the internal space, and the first planar portion of the second planar portion The opposing surface is formed with a plurality of concave portions at least partially overlapping the through hole when viewed from the opposing direction of the first planar portion and the second planar portion.

In the industrial robot according to the first aspect of the present invention, a plurality of through holes that communicate with the internal space are formed in the first planar portion that constitutes the arm that is disposed in the vacuum and whose internal space is atmospheric. Further, in the first aspect of the invention, the arm includes: a plurality of cover members fixed to the first planar portion and covering the plurality of through holes; and a plurality of sealing members disposed on the first planar portion and the cover member Prevent air from flowing out of the internal space. Therefore, in the first aspect of the invention, even if the industrial robot is increased in size and the arm is increased in size, the size of each of the plurality of sealing members can be reduced, and as a result, the arm can be easily operated when the arm is assembled. Sealing member. Therefore, in the present invention (first invention), even if the industrial robot is increased in size, it is possible to reduce the number of work errors in the case of installing a sealing member for ensuring the airtightness of the internal space of the arm.

Here, when the internal space of the arm disposed in the vacuum becomes atmospheric pressure, the arm formed in a hollow shape is deformed so as to protrude outward by the internal pressure. In the first aspect of the present invention, at least a part of the opposing surface of the second planar portion and the first planar portion is formed in a recessed manner when viewed from the opposing direction of the first planar portion and the second planar portion. Since the plurality of recesses are formed by the through holes, the arm can face the pair of the first plane portion and the second plane portion. The arms are deformed in such a manner that they are substantially equally convex toward the outer sides of the direction. In other words, when the concave portion is not formed on the opposing surface of the second planar portion and the first planar portion, the strength of the first planar portion in which the plurality of through holes are formed is lower than the strength of the second planar portion, so that the arm is easily borrowed. The first flat portion side of the arm is deformed so as to be larger toward the outer side than the second flat portion side of the arm by the internal pressure. In the first aspect of the present invention, the first flat portion and the first flat portion are deformed. A plurality of concave portions are formed on the opposing surface of the flat portion, and the strength of the second planar portion can be made close to the strength of the first planar portion. Therefore, the arm can be substantially equal to both outer sides of the first planar portion side and the second planar portion side. The way of the protrusion deforms the arm. Therefore, in the first aspect of the invention, even if a plurality of through holes are formed in the first flat portion, the arm can be prevented from being deformed so as to be inclined toward one side of the opposing direction of the first flat portion and the second flat portion. Or the arm is deformed in a twisted manner, and as a result, the positional accuracy of the front end side of the arm can be ensured.

In the first aspect of the present invention, it is preferable that the inner circumferential surface of the through hole substantially coincides with the inner circumferential surface of the concave portion when viewed from the opposing direction of the first planar portion and the second planar portion. Further, in the first aspect of the invention, it is preferable that the through hole is formed in a circular shape, and the concave portion is formed in a circular shape having an inner diameter equal to an inner diameter of the through hole. According to this configuration, it is easy to deform the arm so that the arm is equally convex toward both outer sides of the opposing direction of the first planar portion and the second planar portion. Therefore, even if a plurality of through holes are formed in the first plane portion, it is possible to effectively suppress the arm from being deformed so as to be inclined toward one side of the opposing direction of the first plane portion and the second plane portion, or the arm is twisted. The deformation, as a result, improves the positional accuracy of the front end side of the arm.

In the first aspect of the invention, it is preferable that the internal space is formed by cutting using a cutting tool inserted from the through hole, and the first flat portion, the second flat portion, and the side surface portion are integrated. According to this configuration, it is easier to prevent air from flowing out of the internal space than when the first planar portion, the second planar portion, and the side surface portion formed separately from each other are joined to each other to form an internal space. Moreover, as described above, it is possible to reduce the vacuum from the first planar portion, the second planar portion, and the side surface portion as compared with the case where the first planar portion, the second planar portion, and the side surface portion are integrally formed by the cast material. The amount of gas released from the atmosphere (external gas).

In order to solve the above problems, the industrial robot according to the second aspect of the invention includes a main body portion, an arm having a base end side rotatably coupled to the main body portion, and a hand portion rotatably coupled to the arm portion The front end side of the arm; and the hand and the arm are disposed in a vacuum, the entire arm is formed in a hollow shape, and the internal space of the arm becomes atmospheric pressure.

In the industrial robot according to the second aspect of the invention, the entire arm is formed in a hollow shape, and the internal space of the arm becomes atmospheric pressure. Therefore, in the second aspect of the invention, even if the temperature of the object to be conveyed which is carried in the hand and carried in the vacuum is high, the entire arm can be cooled from the inside of the arm, and the temperature rise of the entire arm can be suppressed. Therefore, in the second aspect of the invention, even if the temperature of the object to be conveyed which is carried in the hand and carried in the vacuum is high, the thermal expansion of the entire arm can be suppressed, and as a result, the object to be conveyed can be prevented from reaching the target position. The offset is increased to improve the transport accuracy of the object to be transported.

Further, in the second aspect of the invention, the entire arm is formed in a hollow shape, and the internal space of the arm is at atmospheric pressure. Therefore, even if the temperature of the object to be conveyed which is carried in the hand and carried in the vacuum is high, the arrangement can be suppressed. The temperature of all the bearings inside the arm rises, thereby suppressing the decline in the life of the bearings. Further, in the second aspect of the invention, since the internal space of the arm is at atmospheric pressure, a lubricant such as a lubricating oil used in atmospheric pressure can be used as a lubricant for a motor or a reducer disposed inside the arm. Use high-priced lubricants such as vacuum lubricants. Therefore, in the present invention, the initial cost and the running cost of the industrial robot can be reduced.

In the second aspect of the invention, the arm is composed of a plurality of arm portions that are rotatably coupled to each other, and each of the plurality of arm portions is formed in a hollow shape. In this case, for example, the arm includes a first arm portion as an arm portion, and a base end side thereof is rotatably coupled to the main body portion, and a second arm portion as an arm portion is rotatably provided at a proximal end side thereof It is connected to the front end side of the first arm portion, and the hand portion is rotatably coupled to the front end side thereof.

In the second aspect of the invention, the industrial robot includes a first motor for rotating the second arm portion with respect to the first arm portion, and a second motor for the hand portion. relatively Rotating at the second arm; the first reducer decelerates and transmits the rotation of the first motor to the second arm; and the second reducer decelerates the rotation of the second motor and transmits the rotation to the hand; The first speed reducer constitutes at least a part of the first joint portion that connects the first arm portion and the second arm portion, and is disposed inside the first arm portion, and the second speed reducer constitutes the second arm portion and the second arm portion. At least a part of the joint portion is disposed inside the second arm portion. Moreover, in this case, it is preferable that the first motor and the second motor are disposed inside the first arm portion.

According to this configuration, the first reduction gear unit constitutes at least a part of the first joint portion, and the second reduction gear unit constitutes at least a part of the second joint portion, so that the rigidity of the first joint portion and the second joint portion can be improved. Further, according to this configuration, since the first motor and the second motor are disposed inside the first arm portion, the second arm can be downsized. When the second motor is disposed inside the first arm portion, the transmission path of the power from the second motor to the hand becomes long. However, the second reduction gear constitutes the second joint portion. At least a part of the hand can be directly fixed to the output side of the second reduction gear. Therefore, for example, the second reduction gear is disposed so as to constitute the first joint portion, and the second reduction gear can improve the stopping accuracy of the hand as compared with the case where the hand is connected via the belt and the pulley. As a result, the conveyance can be improved. The object transfer accuracy.

In the invention (second invention), it is preferable that the industrial robot includes a cooling mechanism disposed in an internal space of the arm. According to this configuration, the entire arm can be effectively cooled from the inside of the arm, and the temperature rise of the entire arm can be effectively suppressed.

As described above, in the industrial robot having the arm that is disposed in a vacuum and at least a part of the internal space thereof is at atmospheric pressure, the industrial robot can be reduced in size to ensure installation. The operation of the airtight seal member of the inner space of the arm is incorrect.

As described above, in the industrial robot according to the second aspect of the invention, even if the temperature of the object to be transported in the hand and carried in the vacuum is high, the object to be transported can be suppressed. The target arrival position is shifted to improve the conveyance accuracy of the object to be transported, and to reduce the initial cost and the running cost.

1‧‧‧Robots (industrial robots)

2‧‧‧ glass substrate

3‧‧‧ Manufacturing System

4‧‧‧Transfer chamber

5~10‧‧‧Processing chamber

13‧‧‧Hands

14‧‧‧ Arm

15‧‧‧ Body Department

16‧‧‧ Lifting mechanism

17‧‧‧Shell

18‧‧‧Flange

20‧‧‧ base

21‧‧‧Fork

23‧‧‧1st arm (arm)

24‧‧‧2nd arm (arm)

25‧‧‧ Joint Department

26‧‧‧ Joints (Part 1)

27‧‧‧ Joints (2nd Joint)

28‧‧‧weight

31, 40‧‧‧ motor

32, 50, 51, 62‧‧‧ hollow rotating shaft

33, 61‧‧‧ reducer

34, 55, 65‧‧‧ Keeping components

35, 71, 72‧‧‧ Magnetic fluid seal

36‧‧‧ Bellows

38‧‧‧screw components

39‧‧‧ nut components

45, 66‧‧‧ internal space

46‧‧‧Motor (1st motor)

47‧‧‧Motor (2nd motor)

48‧‧‧Reducer (1st reducer)

52, 53, 57, 58, 60, 63‧‧‧ pulleys

54, 59, 64‧‧‧ belt

70‧‧‧Cooling tube

73‧‧‧Tension pulley

80, 85‧‧‧arm body

80a, 85a‧‧‧ upper surface part (1st plane part)

80b, 85b‧‧‧ the following face (2nd plane)

80c, 85c‧‧‧ side section

80d, 80k, 85d‧‧‧ inserted through holes

80e, 80m, 85e, 85f, 85m‧‧‧ working holes

80f, 85g‧‧‧through holes

80g‧‧‧ slot department

80n, 85n‧‧‧ recess

80p‧‧‧ Mounting

81, 82, 83, 86, 87, 88, 89 ‧ ‧ cover members

AR‧‧‧Atmosphere

C1, C2‧‧‧ Rotation Center

VR‧‧‧vacuum area

Fig. 1 is a plan view showing a state in which an industrial robot according to an embodiment of the present invention is incorporated in a manufacturing system of an organic EL (Electroluminescence) display.

Fig. 2 is a view showing the industrial robot shown in Fig. 1, (A) is a plan view, and (B) is a side view.

Fig. 3 is a cross-sectional view showing the internal structure of the industrial robot shown in Fig. 2 from the side.

Fig. 4 is an enlarged view of the first arm portion and the joint portion shown in Fig. 3;

Fig. 5 is an enlarged view of the second arm portion and the joint portion shown in Fig. 3;

Fig. 6 is a view showing the arm body of the second arm portion shown in Fig. 5, (A) is a plan view, and (B) is a cross-sectional view taken along line E-E of (A).

Fig. 7 is an enlarged view of a portion F of Fig. 6(A).

Fig. 8 is an enlarged view of a portion G of Fig. 6(B).

9(A) to (C) are diagrams for explaining the movement of the industrial robot when the self-made process chamber shown in Fig. 1 is carried out of the substrate and carried into another process chamber.

10(A) to (C) are diagrams for explaining the movement of the industrial robot when the substrate is carried into the process chamber shown in Fig. 1.

Fig. 11 is a plan view showing an industrial robot according to another embodiment of the present invention.

Fig. 12 is a plan view showing an industrial robot according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(summary structure of industrial robot)

Fig. 1 is a view showing an industrial robot 1 according to an embodiment of the present invention incorporated in an organic EL display A top view of the state of the manufacturing system 3 of the display. Fig. 2 is a view showing the industrial robot 1 shown in Fig. 1, (A) is a plan view, and (B) is a side view. Fig. 3 is a cross-sectional view showing the internal structure of the industrial robot 1 shown in Fig. 2 from the side.

The industrial robot 1 (hereinafter, referred to as "the robot 1") of the present embodiment is a glass substrate 2 (hereinafter referred to as "substrate 2") for transporting an organic EL (organic electroluminescence) display as a transfer target. Robot. This robot 1 is suitable for a robot that transports a relatively large substrate 2. As shown in FIG. 1, the robot 1 is assembled and used in the manufacturing system 3 of an organic EL display.

The manufacturing system 3 includes a transfer chamber 4 disposed at the center (hereinafter referred to as "chamber 4"), and a plurality of process chambers 5 to 10 disposed so as to surround the chamber 4 (hereinafter, referred to as "chamber 5~10"). The inside of the chamber 4 and the chambers 5 to 10 becomes a vacuum. A portion of the robot 1 is disposed inside the chamber 4. The following fork portion 21 constituting the robot 1 enters the chambers 5 to 10, and the robot 1 transports the substrate 2 between the chambers 5 to 10. That is, the robot 1 transports the substrate 2 in a vacuum. Various devices and the like are disposed in the chambers 5 to 10, and the substrate 2 transported by the robot 1 is housed. Further, in the chambers 5 to 10, various processes are performed on the substrate 2. A more specific configuration of the manufacturing system 3 will be described below.

As shown in FIGS. 2 and 3, the robot 1 includes a hand 13 on which a substrate 2 is mounted, an arm 14 having a hand 13 rotatably coupled to the distal end side thereof, and a body portion 15 rotatably coupled thereto. The base end side of the arm 14; and a lifting mechanism 16 that raises and lowers the body portion 15. The main body portion 15 and the elevating mechanism 16 are housed in a casing 17 having a substantially bottomed cylindrical shape. A flange 18 formed in a disk shape is fixed to the upper end of the casing 17. A through hole in which the upper end portion of the main body portion 15 is disposed is formed in the flange 18. In FIG. 2(A), the illustration of the main body portion 15, the elevating mechanism 16, the casing 17, and the like is omitted.

The hand 13 and the arm 14 are disposed on the upper side of the body portion 15. Further, the hand 13 and the arm 14 are disposed on the upper side of the flange 18. As described above, one portion of the robot 1 is disposed inside the chamber 4. Specifically, the portion of the robot 1 that is closer to the upper side than the lower end surface of the flange 18 is disposed in the chamber 4 Internal. That is, the portion of the robot 1 that is further above the lower end surface of the flange 18 is disposed in the vacuum region VR, and the hand portion 13 and the arm 14 are disposed in a vacuum. On the other hand, the portion of the robot 1 that is lower than the lower end surface of the flange 18 is disposed in the atmosphere region AR (in the atmosphere).

The hand 13 includes a base portion 20 coupled to the arm 14 and four fork portions 21 on which the substrate 2 is mounted. The fork portion 21 is formed in a straight line shape. The two fork portions 21 of the four fork portions 21 are arranged in parallel in a state in which they are spaced apart from each other by a predetermined interval. The two fork portions 21 are fixed to the base portion 20 so as to protrude from one side of the base portion 20 in the horizontal direction. The remaining two fork portions 21 are fixed to the base portion 20 so as to protrude from the base portion 20 toward the opposite side of the two fork portions 21 projecting from the base portion 20 toward one side in the horizontal direction.

The arm 14 is composed of two arm portions of the first arm portion 23 and the second arm portion 24. The first arm portion 23 and the second arm portion 24 are formed in a hollow shape. That is, the entire arm 14 is formed in a hollow shape. The proximal end side of the first arm portion 23 is rotatably coupled to the main body portion 15. The proximal end side of the second arm portion 24 is rotatably coupled to the front end side of the first arm portion 23. In other words, the first arm portion 23 and the second arm portion 24 are coupled to each other so as to be rotatable relative to each other. The hand 13 is rotatably coupled to the front end side of the second arm portion 24.

The joint portion between the arm 14 and the main body portion 15 (that is, the joint portion between the first arm portion 23 and the main body portion 15) serves as the joint portion 25. The connection portion between the first arm portion 23 and the second arm portion 24 serves as the joint portion 26 . The joint portion between the arm 14 and the hand portion 13 (that is, the joint portion between the second arm portion 24 and the hand portion 13) serves as the joint portion 27. The distance between the center of rotation of the second arm portion 24 with respect to the first arm portion 23 and the center of rotation of the first arm portion 23 with respect to the main body portion 15 and the rotation of the second arm portion 24 with respect to the first arm portion 23 The distance between the center and the hand 13 with respect to the center of rotation of the second arm portion 24 is equal. In the present embodiment, the joint portion 26 connects the first joint portion of the first arm portion 23 and the second arm portion 24, and the joint portion 27 connects the second arm portion 24 and the second joint portion of the hand portion 13.

The first arm portion 23 is attached to the main body portion 15 so as to extend from the main body portion 15 to one side in the horizontal direction. A weight 28 extending from the main body portion 15 to the opposite side of the direction in which the first arm portion 23 extends (that is, the other side in the horizontal direction) is attached to the first arm portion 23. The second arm portion 24 is disposed above the first arm portion 23 . Further, the hand 13 is disposed above the second arm portion 24.

A motor 31 for rotating the first arm portion 23 with respect to the main body portion 15 is attached to the main body portion 15. Further, the main body portion 15 includes a hollow rotating shaft 32 that fixes the proximal end side of the first arm portion 23, a speed reducer 33 that decelerates the rotation of the motor 31 and transmits it to the first arm portion 23, and a holding member 34. In a substantially cylindrical shape, the housing of the speed reducer 33 is held and the hollow rotating shaft 32 is rotatably held.

The speed reducer 33 is a hollow speed reducer in which a through hole is formed in the center of the diameter direction. The speed reducer 33 is disposed such that the center of the shaft of the through hole coincides with the center of the axis of the hollow rotating shaft 32. A motor 31 is coupled to the input side of the reduction gear 33 via a pulley and a belt. A lower end of the hollow rotating shaft 32 is fixed to the output side of the speed reducer 33. The lower end surface of the proximal end side of the first arm portion 23 is fixed to the upper end of the hollow rotating shaft 32. The hollow rotating shaft 32 is disposed on the inner peripheral side of the holding member 34, and a bearing is disposed between the outer peripheral surface of the hollow rotating shaft 32 and the inner peripheral surface of the holding member 34.

A magnetic fluid seal 35 that prevents air from flowing out into the vacuum region VR is disposed in the joint portion 25. The magnetic fluid seal 35 is disposed between the outer circumferential surface of the hollow rotating shaft 32 and the inner circumferential surface of the holding member 34. Further, a bellows 36 for preventing air from flowing out into the vacuum region VR is disposed in the joint portion 25. Specifically, a bellows 36 is disposed on the outer peripheral side of the magnetic fluid seal 35 and on the outer peripheral side of the holding member 34. The lower end of the bellows 36 is fixed to the holding member 34, and the upper end of the bellows 36 is fixed to the flange 18. When the motor 40 constituting the elevating mechanism 16 is rotated to raise and lower the main body portion 15, the bellows 36 expands and contracts.

The elevating mechanism 16 includes a screw member 38 that is disposed in the axial direction in the up-down direction, a nut member 39 that is engaged with the screw member 38, and a motor 40 that rotates the screw member 38. The screw member 38 is rotatably attached to the bottom surface side of the housing 17. The motor 40 is mounted on the bottom surface side of the housing 17. The screw member 38 is coupled to the motor 40 via a pulley and a belt. The nut member 39 is attached to the body portion 15 via a specific bracket. In the present embodiment, when the motor 40 rotates, the screw member 38 rotates, and the body portion 15 moves up and down together with the nut member 39. Furthermore, the lifting mechanism 16 includes a guiding shaft for guiding the body portion 15 in the up and down direction, and is engaged with the guiding shaft A guide block that guides the shaft and slides up and down.

(Configuration of the inside of the first arm portion and the second arm portion and the configuration of the joint portion)

4 is an enlarged view of the first arm portion 23 and the joint portion 26 shown in FIG. 3. FIG. 5 is an enlarged view of the second arm portion 24 and the joint portion 27 shown in FIG. 3.

As described above, the first arm portion 23 and the second arm portion 24 are formed in a hollow shape. The inner space 45 of the first arm portion 23 formed in a hollow shape is provided with a motor 46 as a first motor for rotating the second arm portion 24 with respect to the first arm portion 23, and a hand 13 for the hand 13 The motor 47 as the second motor that is rotated with respect to the second arm portion 24. The joint portion 26 includes a reduction gear 48 as a first reduction gear that decelerates the rotation of the motor 46 and transmits it to the second arm portion 24. The speed reducer 48 is a hollow speed reducer in which a through hole is formed in the center of the diameter direction. Further, the joint portion 26 includes a hollow rotating shaft 50 and a hollow rotating shaft 51 disposed on the outer peripheral side of the hollow rotating shaft 50 and coaxial with the hollow rotating shaft 50. Further, a bearing is disposed between the outer circumferential surface of the hollow rotating shaft 50 and the inner circumferential surface of the hollow rotating shaft 51.

A motor 46 is coupled to the input side of the reduction gear 48 via pulleys 52 and 53 and a belt 54. On the output side of the reduction gear 48, the lower end of the hollow rotary shaft 51 is fixed. The speed reducer 48 is disposed such that the center of the shaft of the through hole coincides with the center of the axis of the hollow rotating shaft 51. The upper end of the hollow rotating shaft 51 is fixed to the lower surface of the proximal end side of the second arm portion 24. The housing of the reduction gear 48 is fixed to a holding member 55 formed in a substantially cylindrical shape. The holding member 55 is fixed to the front end side of the first arm portion 23. Further, the holding member 55 is disposed on the outer peripheral side of the hollow rotating shaft 51. When the motor 46 rotates, the power of the motor 46 is transmitted to the proximal end side of the second arm portion 24 via the pulleys 52, 53, the belt 54, the speed reducer 48, and the like, and the second arm portion 24 is rotated.

A pulley 57 is fixed to the lower end side of the hollow rotating shaft 50. A pulley 58 is fixed to the output shaft of the motor 47. A belt 59 is placed on the pulley 57 and the pulley 58. A pulley 60 is fixed to the upper end of the hollow rotating shaft 50. The pulley 60 is disposed inside the proximal end side of the second arm portion 24 that is formed in a hollow shape. The joint portion 27 includes a speed reducer 61 as a second speed reducer that decelerates the rotation of the motor 47 and transmits it to the hand portion 13, and a hollow rotating shaft 62. The reducer 61 is in the diameter direction thereof A hollow reducer having a through hole is formed in the center.

A pulley 63 is fixed to the input side of the speed reducer 61. A belt 64 is placed on the pulley 60 and the pulley 63. A lower end of the hollow rotating shaft 62 is fixed to the output side of the speed reducer 61. The speed reducer 61 is disposed such that the center of the shaft of the through hole coincides with the center of the axis of the hollow rotating shaft 62. The upper end of the hollow rotating shaft 62 is fixed to the lower surface of the base portion 20 of the hand portion 13. The housing of the reduction gear 61 is fixed to a holding member 65 formed in a substantially cylindrical shape. The holding member 65 is fixed to the front end side of the second arm portion 24. Further, the holding member 65 is disposed on the outer peripheral side of the hollow rotating shaft 62. When the motor 47 rotates, the power of the motor 47 is transmitted to the base portion 20 of the hand portion 13 via the pulleys 57, 58, 60, 63, the belts 59, 64, the speed reducer 61, and the like, whereby the hand portion 13 is rotated.

The internal space 45 of the first arm portion 23 is sealed, and the pressure of the internal space 45 becomes atmospheric pressure. Further, the internal space 66 of the second arm portion 24 is also sealed, and the pressure of the internal space 66 also becomes atmospheric pressure. That is, the internal spaces 45 and 66 of the arm 14 become atmospheric pressure. Further, the internal space 45 and the internal space 66 communicate via the inner peripheral side of the hollow rotating shaft 50. Further, a through hole (not shown) that communicates with the inner peripheral side of the hollow rotating shaft 32 is formed on the lower surface of the proximal end side of the first arm portion 23, and the internal space 45 communicates with the inside of the body portion 15 that becomes atmospheric pressure. .

As described above, the motors 46, 47 are disposed in the internal space 45. Further, the speed reducer 48 is disposed in the internal space 45 on the front end side of the first arm portion 23, and the speed reducer 61 is disposed in the internal space 66 on the front end side of the second arm portion 24. That is, the motors 46 and 47 and the speed reducers 48 and 61 are disposed in the atmosphere. The cooling pipe 70 for cooling the motor 46 is wound around the motor 46. The cooling air can be supplied to the cooling pipe 70, and the motor 46 can be cooled by the compressed air inside the cooling pipe 70. Further, in the present embodiment, since the amount of heat generated by the motor 47 is smaller than the amount of heat generated by the motor 46, the cooling tube is not wound around the motor 47.

A magnetic fluid seal 71 for ensuring a sealed state of the internal space 45 is disposed in the joint portion 26, and a magnetic fluid seal 72 for ensuring a sealed state of the internal space 66 is disposed in the joint portion 27. In other words, the joint portion 26 is provided with a magnetic fluid seal 71 that prevents air from flowing out from the internal space 45 to the vacuum region VR, and the joint portion 27 is provided with air from the internal space. 66 a magnetic fluid seal 72 that flows out of the vacuum region VR. The magnetic fluid seal 71 is disposed between the outer circumferential surface of the hollow rotating shaft 51 and the inner circumferential surface of the holding member 55, and the magnetic fluid seal 72 is disposed between the outer circumferential surface of the hollow rotating shaft 62 and the inner circumferential surface of the holding member 65. Further, a tension pulley 73 for adjusting the tension of the belt 64 is disposed in the internal space 66.

(Configuration of the first arm portion and the second arm portion)

Fig. 6 is a view showing the arm main body 80 of the second arm portion 24 shown in Fig. 5, (A) is a plan view, and (B) is a cross-sectional view taken along line E-E of (A). Fig. 7 is an enlarged view of a portion F of Fig. 6(A). Fig. 8 is an enlarged view of a portion G of Fig. 6(B).

The second arm portion 24 includes an arm body 80 and a plurality of cover members 81. The arm body 80 includes an upper surface portion 80a constituting an upper surface of the arm body 80, and a lower surface portion 80b constituting a lower surface of the arm body 80 and substantially parallel to the upper surface portion 80a with a specific gap therebetween. The opposite side is disposed; and the side surface portion 80c is connected to the outer peripheral end of the upper surface portion 80a and the outer peripheral end of the lower surface portion 80b. The upper surface portion 80a and the lower surface portion 80b are formed in a flat plate shape that is elongated and substantially oblong, and is opposed to each other in the vertical direction. The side surface portion 80c is formed in a tubular shape having a substantially elongated and elongated shape when viewed from the vertical direction. A space surrounded by the upper surface portion 80a, the lower surface portion 80b, and the side surface portion 80c serves as the internal space 66. In the present embodiment, the upper surface portion 80a is the first flat portion, and the lower surface portion 80b is the second flat portion. In the following description, the proximal end sides of the second arm portions 24 of the upper surface portion 80a and the lower surface portion 80b are referred to as "base end sides", and the second arm portions 24 of the upper surface portion 80a and the lower surface portion 80b are provided. The front end side is set to "front end side".

An insertion hole 80d through which the hollow rotating shaft 62 or the holding member 65 is inserted is formed on the front end side of the upper surface portion 80a. A working hole 80e for assembling the joint portion 26 is formed on the proximal end side of the upper surface portion 80a. The insertion hole 80d and the working hole 80e are formed in a circular hole shape penetrating the upper surface portion 80a. A plurality of through holes 80f that communicate with the internal space 66 are formed between the insertion hole 80d of the upper surface portion 80a and the working hole 80e. In the present embodiment, the four through holes 80f are formed in the upper surface portion 80a at a fixed interval. The through hole 80f is formed in a circular hole shape. That is, the through hole 80f is formed in a circular shape. Moreover, in this embodiment, the inner diameter of the working hole 80e and the through hole 80f The inner diameters are equal.

An annular groove portion 80g is formed on the upper surface of the upper surface portion 80a so as to be recessed downward. In this embodiment, five groove portions 80g are formed. Each of the four groove portions 80g of the five groove portions 80g is formed to surround each of the four through holes 80f, and the remaining one groove portion 80g is formed to surround the working hole 80e.

An insertion hole 80k through which the hollow rotating shaft 50 is inserted is formed on the proximal end side of the lower surface portion 80b. A working hole 80m for assembling the joint portion 27 is formed on the front end side of the lower surface portion 80b. The insertion hole 80k and the working hole 80m are formed in a circular hole shape penetrating the lower surface portion 80b. The insertion hole 80k is formed on the lower side of the working hole 80e formed in the upper surface portion 80a, and the working hole 80m is formed on the lower side of the insertion hole 80d formed in the upper surface portion 80a.

On the upper surface of the lower surface portion 80b (i.e., the surface opposite to the upper surface portion 80a), a plurality of concave portions 80n recessed downward are formed. The concave portion 80n is formed so as not to penetrate the lower surface portion 80b. In the present embodiment, the four recessed portions 80n are formed at a fixed interval. The recess 80n is formed in a circular shape. Specifically, the concave portion 80n is formed in a circular shape having an inner diameter equal to the inner diameter of the through hole 80f. The four recessed portions 80n are formed at the same distance from the four through holes 80f. Moreover, the recessed portion 80n is formed so as to overlap the through hole 80f when viewed from the up-and-down direction, and the inner peripheral surface of the through hole 80f substantially coincides with the inner peripheral surface of the recessed portion 80n when viewed in the vertical direction. Further, a mount 80p for attaching the tension pulley 73 is formed in the recess 80n disposed on the most proximal end side.

The arm body 80 is formed of an aluminum alloy. The arm body 80 is formed by cutting a block of an aluminum alloy, and the upper surface portion 80a, the lower surface portion 80b, and the side surface portion 80c are integrated. That is, the internal space 66 is formed by cutting using a cutting tool inserted through the through hole 80f, the insertion holes 80d and 80k, and the working holes 80e and 80m, and the internal space 66 is formed by cutting, thereby forming The upper surface portion 80a, the lower surface portion 80b, and the side surface portion 80c.

The cover member 81 is formed in a disk shape having an outer diameter larger than the inner diameter of the through hole 80f. Cover member The outer diameter of 81 is larger than the outer diameter of the groove portion 80g formed into an annular shape. The cover member 81 is fixed to the upper surface of the upper surface portion 80a so as to cover the through hole 80f. An annular sealing member (not shown) that prevents air from flowing out of the internal space 66 is disposed between the upper surface portion 80a and the lid member 81. The sealing member is fitted into the groove portion 80g formed to surround the through hole 80f.

The working hole 80e is covered by a cover member 82 formed in the same shape as the cover member 81. That is, the lid member 82 is fixed to the upper surface of the upper surface portion 80a so as to cover the working hole 80e. An annular sealing member (not shown) that prevents air from flowing out of the internal space 66 is disposed between the upper surface portion 80a and the lid member 82. The sealing member is fitted into the groove portion 80g formed to surround the working hole 80e. A disk-shaped lid member 83 is fixed to the lower surface of the lower surface portion 80b so as to cover the working hole 80m. An annular sealing member (not shown) that prevents air from flowing out of the internal space 66 is disposed between the lower surface portion 80b and the lid member 83. This sealing member is fitted into an annular groove portion formed on the outer peripheral side of the cover member 83.

Similarly to the second arm portion 24, the first arm portion 23 includes an arm portion 85 and a plurality of cover members 86. As shown in FIG. 4, the arm body 85 includes an upper surface portion 85a constituting an upper surface of the arm body 85, and a lower surface portion 85b constituting a lower surface of the arm body 85 and interposed from the upper surface portion 85a. The side surface portion 85c is connected to the outer peripheral end of the upper surface portion 85a and the outer peripheral end of the lower surface portion 85b. The upper surface portion 85a and the lower surface portion 85b are formed in a flat plate shape of an elongated substantially oblong shape. The side surface portion 85c is formed in a tubular shape having a substantially elongated and elongated shape when viewed from the vertical direction. A space surrounded by the upper surface portion 85a, the lower surface portion 85b, and the side surface portion 85c serves as the internal space 45. In the present embodiment, the upper surface portion 85a is a first flat portion, and the lower surface portion 85b is a second flat portion. In the following description, the proximal end sides of the first arm portions 23 of the upper surface portion 85a and the lower surface portion 85b are referred to as "base end sides", and the first arm portions 23 of the upper surface portion 85a and the lower surface portion 85b are provided. The front end side is set to "front end side".

An insertion hole 85d through which the hollow rotating shafts 50, 51 or the holding member 55 are inserted is formed on the front end side of the upper surface portion 85a. Further, a working hole 85e for attaching the motors 46 and 47 is formed on the front end side of the upper surface portion 85a, and a working hole 85f for assembling the joint portion 25 is formed on the proximal end side of the upper surface portion 85a. The insertion hole 85d and the working holes 85e and 85f are formed in a circular hole shape penetrating the upper surface portion 85a.

A plurality of through holes 85g that communicate with the internal space 45 are formed between the working hole 85e of the upper surface portion 85a and the working hole 85f. In the present embodiment, the two through holes 85g are formed in the upper surface portion 85a at a predetermined interval. The through hole 85g is formed in a circular hole shape. That is, the through hole 85g is formed in a circular shape. Further, in the present embodiment, the inner diameters of the working holes 85e and 85f are equal to the inner diameter of the through hole 85g. An annular groove portion is formed on the upper surface of the upper surface portion 85a so as to be recessed downward. In this embodiment, five groove portions are formed. Each of the five groove portions is formed to surround each of the insertion hole 85d, the working holes 85e and 85f, and the two through holes 85g.

On the front end side of the lower surface portion 85b, a working hole 85m for assembling the joint portion 26 or the motors 46, 47 is formed. The working hole 85m is formed in a circular hole shape penetrating the lower surface portion 85b. Further, the working hole 85m is formed on the lower side of the insertion hole 85d and the working hole 85e formed in the upper surface portion 85a.

On the upper surface of the lower surface portion 85b (i.e., the surface opposite to the upper surface portion 85a), a plurality of concave portions 85n recessed downward are formed. The concave portion 85n is formed so as not to penetrate the lower surface portion 85b. In the present embodiment, the two concave portions 85n are formed at a specific pitch. The recess 85n is formed in a circular shape. Specifically, the concave portion 85n is formed in a circular shape having an inner diameter equal to the inner diameter of the through hole 85g. The two recessed portions 85n are formed at the same distance from the two through holes 85g. Moreover, the concave portion 85n is formed so as to overlap the through hole 85g when viewed from the up-and-down direction, and the inner circumferential surface of the through hole 85g substantially coincides with the inner circumferential surface of the concave portion 85n when viewed from the vertical direction.

The arm body 85 is cut by the block of the aluminum alloy in the same manner as the arm body 80. It is formed by cutting, and the upper surface portion 85a, the lower surface portion 85b, and the side surface portion 85c are integrated. In other words, the internal space 45 is formed by cutting using a cutting tool inserted through the through hole 85g, the insertion hole 85d, and the working holes 85e, 85f, and 85m, and the internal space 45 is formed by cutting, thereby forming The upper surface portion 85a, the lower surface portion 85b, and the side surface portion 85c.

The cover member 86 is formed in a disk shape having an outer diameter larger than the inner diameter of the through hole 85g. The outer diameter of the cover member 86 is larger than the outer diameter of the annular groove portion formed on the upper surface of the upper surface portion 85a. The cover member 86 is fixed to the upper surface of the upper surface portion 85a so as to cover the through hole 85g. An annular sealing member (not shown) that prevents air from flowing out of the internal space 45 is disposed between the upper surface portion 85a and the lid member 86. The sealing member is fitted into a groove portion formed to surround the through hole 85g.

Further, a cover member 87 formed in the same shape as the cover member 86 is fixed to the upper surface of the upper surface portion 85a so as to cover the working hole 85f. An annular sealing member (not shown) that prevents air from flowing out from the internal space 45 is disposed between the upper surface portion 85a and the lid member 87. The sealing member is fitted into a groove portion formed to surround the working hole 85f. Further, a cover member 88 having a substantially bottomed cylindrical shape is fixed to the upper surface of the upper surface portion 85a so as to cover the working hole 85e. An annular sealing member (not shown) that prevents air from flowing out of the internal space 45 is disposed between the upper surface portion 85a and the lid member 88. The sealing member is fitted into a groove portion formed to surround the working hole 85e.

A disk-shaped cover member 89 is fixed to the lower surface of the lower surface portion 85b so as to cover the working hole 85m. An annular sealing member (not shown) that prevents air from flowing out of the internal space 45 is disposed between the lower surface portion 85b and the lid member 89. This sealing member is fitted into an annular groove portion formed on the outer peripheral side of the cover member 89.

(Composition of manufacturing system)

As described above, the manufacturing system 3 includes a plurality of chambers 5 to 10 disposed in such a manner as to surround the chamber 4. In the manufacturing system 3 of the present embodiment, six chambers are arranged to surround the chamber 4 Room 5~10. Hereinafter, in FIG. 1, each of the three directions orthogonal to each other is defined as an X direction, a Y direction, and a Z direction. The robot 1 is disposed such that its vertical direction coincides with the Z direction. Therefore, in the following, the Z direction is set to the up and down direction. In the following, the X1 direction side is set to the "right" side, the X2 direction side is set to the "left" side, the Y1 direction side is set to the "front" side, and the Y2 direction side is set to the "rear (back)" side. .

The chamber 4 is formed in such a manner that the shape when viewed from the up-and-down direction is substantially octagonal. The chamber 5 is disposed to be connected to the left end of the chamber 4, and the chamber 6 is disposed to be connected to the right end of the chamber 4. Further, the chamber 7 and the chamber 8 are disposed to be connected to the rear end of the chamber 4. The chamber 7 and the chamber 8 are adjacent to each other in the left-right direction. In the present embodiment, the chamber 7 is disposed on the left side, and the chamber 8 is disposed on the right side. Further, the chamber 9 and the chamber 10 are disposed to be connected to the front end of the chamber 4. The chamber 9 and the chamber 10 are adjacent to each other in the left-right direction. In this embodiment, the chamber 9 is disposed on the left side, and the chamber 10 is disposed on the right side.

When the chambers 5 and 6 are viewed from the up-and-down direction, the imaginary lines passing through the first arm portion 23 with respect to the center of rotation C1 of the main body portion 15 and parallel to the left-right direction pass through the center positions of the chambers 5 and 6 in the front-rear direction. Mode configuration. The chambers 7 and 8 are disposed so as to pass through a center line in the left-right direction between the chambers 7 and 8 by a imaginary line that is rotated by the center C1 and parallel to the front-rear direction. That is, the center positions of the chambers 7 and 8 in the left-right direction are shifted with respect to the center of rotation C1. Similarly, the chambers 9 and 10 are disposed so as to pass through the center position in the left-right direction between the chambers 9 and 10 by the imaginary line that is rotated by the center C1 and parallel to the front-rear direction. That is, the center positions of the chambers 9, 10 in the left-right direction are shifted with respect to the center of rotation C1. Further, in the right and left direction, the chamber 7 and the chamber 9 are disposed at the same position, and the chamber 8 and the chamber 10 are disposed at the same position.

(general action of industrial robot)

FIG. 9 is a view for explaining the movement of the industrial robot 1 when the self-made process chamber 5 shown in FIG. 1 carries out the substrate 2 and carries the substrate 2 into the process chamber 6. FIG. 10 is a view for explaining the movement of the industrial robot 1 when the substrate 2 is carried into the process chamber 7 shown in FIG.

The robot 1 drives the motors 31, 40, 46, 47 to transfer the substrates between the chambers 5 to 10. 2. For example, as shown in FIG. 9, the robot 1 carries out the substrate 2 from the chamber 5 and carries the substrate 2 into the chamber 6. In other words, as shown in FIG. 9(A), the robot 1 is configured to extend the arm 14 and mount the substrate 2 in the chamber 5, and then, as shown in FIG. 9(B), the contracting arm 14 is extended to the first arm portion 23 and the second portion. The arm portion 24 is carried out from the chamber 5 until the arm portion 24 is overlapped in the vertical direction. Thereafter, after the robot 1 rotates the hand 13 by 180°, the arm 14 is extended, and as shown in FIG. 9(C), the substrate 2 is carried into the chamber 6.

Further, for example, the robot 1 carries the substrate 2 carried out from the chamber 5 into the chamber 7 (see FIG. 10). At this time, the robot 1 first drives the motors 31, 46, 47 from the state of the contracting arm 14 as shown in FIG. 10(A), as shown in FIG. 10(B), with the fork portion 21 being parallel to the front-rear direction and the substrate 2 The hand 13 is placed on the rear end side of the hand 13 so that the hand 13 in the left-right direction is substantially aligned with the center of the cavity 7 of the second arm 24 and the center of the chamber 7 in the left-right direction. The first arm portion 23 and the second arm portion 24 are rotated. Thereafter, the robot 1 extends the arm 14 and carries the substrate 2 into the chamber 7 as shown in Fig. 10(C).

Similarly, the robot 1 carries the substrate 2 carried out from the chamber 5 into the chamber 9, for example. At this time, the robot 1 first drives the motors 31, 46, 47 from the state of the contracting arm 14, and the fork portion 21 is parallel to the front-rear direction, and the substrate 2 is disposed on the front end side of the hand portion 13, and is rotated in the left-right direction. The center portion C2 and the center of the chamber 9 in the left-right direction substantially coincide with each other, and the hand portion 13, the first arm portion 23, and the second arm portion 24 are rotated. Thereafter, the robot 1 extends the arm 14 and carries it into the chamber 2 into the substrate 2.

Further, the robot 1 carries the substrate 2 carried out from the chamber 5 into the chamber 8, for example. At this time, the robot 1 first drives the motors 31, 46, 47 from the state of the contracting arm 14, and the fork portion 21 is parallel to the front-rear direction, and the substrate 2 is disposed on the rear end side of the hand portion 13, and is rotated in the left-right direction. The center portion C2 and the center of the chamber 8 in the left-right direction substantially coincide with each other, and the hand portion 13, the first arm portion 23, and the second arm portion 24 are rotated. Thereafter, the robot 1 extends the arm 14 and carries the substrate 2 into the chamber 8.

Further, the robot 1 carries the substrate 2 carried out from the chamber 5 into the chamber 10, for example. At this time, the robot 1 first drives the motors 31, 46, 47 from the state of the contracting arm 14 to the fork 21 is parallel to the front-rear direction, and the substrate 2 is disposed on the front end side of the hand portion 13, and the center portion C2 is substantially aligned with the center of the chamber 10 in the left-right direction in the left-right direction, so that the hand portion 13 and the first arm are provided. The portion 23 and the second arm portion 24 are rotated. Thereafter, the robot 1 extends the arm 14 and carries the substrate 2 into the chamber 10.

At the time of carrying out and loading the substrate 2, the hand 13 and the first arm portion 23 have the same angle of rotation of the first arm portion 23 with respect to the main body portion 15 and the angle of rotation of the hand portion 13 with respect to the second arm portion 24. The rotation direction of the first arm portion 23 with respect to the main body portion 15 and the rotation direction of the hand portion 13 with respect to the second arm portion 24 are reversed. In other words, the motors 31 and 47 have the same angle of rotation of the first arm portion 23 with respect to the main body portion 15 and the angle of rotation of the hand portion 13 with respect to the second arm portion 24, and the first arm portion 23 is opposed to the body portion 15. The rotation direction rotates in such a manner that the hand 13 is rotated in the opposite direction to the second arm portion 24. Therefore, the orientation of the hand 13 at the time of carrying out the substrate 2 and at the time of loading is kept constant.

(The main effect of this form)

As described above, in the present aspect, the arm main body 80 is formed with a plurality of through holes 80f, and the cover member 81 covering the through hole 80f and the upper surface portion 80a of the arm main body 80 are formed. An annular sealing member that prevents air from flowing out of the internal space 66 that becomes atmospheric pressure is disposed. Therefore, in the present embodiment, even if the robot 1 is increased in size and the second arm portion 24 is increased in size, the size of each of the plurality of sealing members can be reduced, and as a result, the second arm portion 24 can be easily assembled. Operate the sealing member. Similarly, in the present embodiment, a plurality of through holes 85g are formed in the arm main body 85, and between the cover member 86 that covers the through hole 85g and the upper surface portion 85a of the arm main body 85, air is prevented from becoming atmospheric pressure. The inner space 45 flows out of the annular sealing member. Therefore, in the present embodiment, even if the robot 1 is increased in size and the first arm portion 23 is increased in size, the size of each of the plurality of sealing members can be reduced, and as a result, the first arm portion 23 can be easily assembled. Operate the sealing member. Therefore, in the present embodiment, even if the robot 1 is increased in size, it is possible to reduce the number of work errors in mounting the sealing member for ensuring the airtightness of the internal spaces 45 and 66 of the arm 14.

In the present aspect, the internal space 66 of the second arm portion 24 disposed in the vacuum is at atmospheric pressure, so that the second arm portion 24 formed in a hollow shape is outwardly biased by internal pressure. In the present embodiment, the upper surface of the lower surface portion 80b of the arm main body 80 is formed with a concave portion 80n that overlaps the through hole 80f when viewed from the vertical direction. Therefore, the second arm portion can be oriented upward and downward. The second arm portion 24 is deformed such that the sides are substantially equally convex 24 .

In other words, when the concave portion 80n is not formed on the upper surface of the lower surface portion 80b, the strength of the upper surface portion 80a of the plurality of through holes 80f is lower than the strength of the lower surface portion 80b, so that the second arm portion 24 is easily used. The pressure on the inside is deformed in such a manner that the upper side is larger than the lower side. In the present embodiment, the concave portion 80n is formed on the upper surface of the lower surface portion 80b, so that the strength of the lower surface portion 80b is close to that of the upper surface portion 80a. With the strength, the second arm portion 24 can be deformed so that the second arm portion 24 is substantially equally convex toward the upper and lower sides. Therefore, in the present embodiment, even if the plurality of through holes 80f are formed in the upper surface portion 80a, the second arm portion 24 can be prevented from being deformed so as to be inclined in one of the upward and downward directions, or the second arm portion 24 can be twisted. Deformation.

In the same manner as in the first aspect of the invention, the internal space 45 of the first arm portion 23 disposed in the vacuum is at atmospheric pressure, so that the first arm portion 23 formed in a hollow shape is outwardly biased by internal pressure. In the present embodiment, the upper surface of the lower surface portion 85b of the arm main body 85 is formed with a concave portion 85n that overlaps the through hole 85g when viewed from the vertical direction. Therefore, the first arm portion 23 can be oriented upward and downward. The first arm portion 23 is deformed such that the both sides are substantially equally convex. Therefore, in the present embodiment, even if a plurality of through holes 85g are formed in the upper surface portion 85a, the first arm portion 23 can be prevented from being deformed so as to be inclined in one of the upward and downward directions, or the first arm portion 23 can be twisted. Deformation.

In the present aspect, in the present aspect, even if the plurality of through holes 80f and 85g are formed in the upper surface portions 80a and 85a, the arm 14 can be prevented from being deformed so as to be inclined one side in the up-down direction, or the arm 14 can be restrained. Deformed in a twisted manner, thus ensuring the position of the front end of the arm 14 Precision. Therefore, in the present embodiment, even if a plurality of through holes 80f and 85g are formed in the upper surface portions 80a and 85a, the substrate 2 can be accurately conveyed to a specific position of the chambers 5 to 10. In other words, in the present embodiment, the substrate 2 can be prevented from shifting from the target arrival position and the conveyance accuracy of the substrate 2 can be improved.

In the present embodiment, the inner circumferential surface of the through hole 80f substantially coincides with the inner circumferential surface of the concave portion 80n, and the inner circumferential surface of the through hole 85g and the inner circumference of the concave portion 85n are observed in the vertical direction. Since the first arm portion 23 and the second arm portion 24 are likely to be substantially uniformly convex toward the upper and lower sides, the first arm portion 23 and the second arm portion 24 are easily deformed. Therefore, in the present embodiment, even if a plurality of through holes 80f and 85g are formed in the upper surface portions 80a and 85a, it is possible to effectively suppress the arm 14 from being deformed in such a manner that it is inclined in one of the upward and downward directions, or the arm 14 is twisted. As a result, the positional accuracy of the front end side of the arm 14 can be improved as a result.

(First Invention) In the present embodiment, the arm main bodies 80 and 85 are formed by cutting a block of an aluminum alloy. Therefore, in the present embodiment, it is easier to prevent air than when the arm portions 80, 85 are formed by joining the upper surface portions 80a, 85a, the lower surface portions 80b, 85b, and the side surface portions 80c, 85c to each other to form the arm portions 80, 85. It flows out from the internal spaces 45 and 66. Further, in the present embodiment, the amount of release of the gas (outside gas) released from the arm portions 80 and 85 into the vacuum can be reduced as compared with the case where the arm portions 80 and 85 are formed by casting.

As described above, in the present aspect (second invention), the entire arm 14 is formed in a hollow shape, and the internal spaces 45 and 66 of the arm 14 are at atmospheric pressure. Therefore, in the present embodiment, even if the temperature of the substrate 2 mounted on the hand 13 and transported in a vacuum is high, the entire arm 14 can be cooled from the inside of the arm 14, and the temperature rise of the entire arm 14 can be suppressed. Therefore, in the present embodiment, even if the temperature of the substrate 2 carried by the hand 13 is high, the thermal expansion of the entire arm 14 can be suppressed, and as a result, the substrate 2 can be accurately conveyed to a specific position of the chambers 5 to 10. . In other words, in the present embodiment, even if the temperature of the substrate 2 carried on the hand 13 is high, the substrate 2 can be prevented from shifting from the target arrival position and the conveyance accuracy of the substrate 2 can be improved.

Further, in the present aspect (the second invention), the entire arm 14 is formed in a hollow shape, and the arm 14 is Since the internal spaces 45 and 66 are at atmospheric pressure, even if the temperature of the substrate 2 carried by the hand 13 is high, the temperature of all the bearings disposed inside the arm 14 can be suppressed from rising, and the life can be suppressed from being lowered. In other words, in the present embodiment, even if the temperature of the substrate 2 carried by the hand 13 is high, the life of all the bearings constituting the motors 46 and 47, the speed reducers 48 and 61, the tension pulley 73, and the like can be reduced. Further, in the present embodiment, since the internal spaces 45 and 66 of the arm 14 are at atmospheric pressure, the lubricants used in the motors 46 and 47 or the speed reducers 48 and 61 disposed inside the arm 14 are used as long as the lubricating oil used in the atmospheric pressure is used. A lubricant such as a vacuum lubricant can be used instead of a lubricant such as a vacuum lubricant. Therefore, in the present embodiment, the initial cost and the running cost of the robot 1 can be reduced.

Further, in the present aspect (second invention), since the internal spaces 45 and 66 of the arm 14 are at atmospheric pressure, the self-motors 46, 47, the speed reducers 48, 61, the pulleys 52, 53, 57 can be prevented in the vacuum region VR. , 58, 60, 63 and belts 54, 59, 64 generate gas (external gas). Further, in the present embodiment, the internal spaces 45 and 66 of the arm 14 are at atmospheric pressure, and the surface area of the arm 14 disposed in the vacuum region VR can be reduced. Therefore, the amount of external air generated from the arm 14 can be reduced in the vacuum region VR. Therefore, in the present embodiment, in the manufacturing step of the substrate 2, occurrence of a failure due to external air can be suppressed.

(Second Invention) In the present embodiment, a part of the joint portion 26 is formed by the speed reducer 48, and a part of the joint portion 27 is formed by the speed reducer 61. Therefore, in the present embodiment, the rigidity of the joint portions 26 and 27 can be improved.

(Second Invention) In the present embodiment, the motor 47 is disposed inside the first arm portion 23. Therefore, in the present embodiment, the second arm portion 24 can be made smaller than in the case where the motor 47 is disposed inside the second arm portion 24. Further, when the motor 47 is disposed inside the first arm portion 23, the transmission path of the power from the motor 47 to the hand portion 13 becomes long. In the present embodiment, the joint portion 27 is constituted by the speed reducer 61. In some cases, the hand 13 is directly fixed to the output side of the speed reducer 61. Therefore, in the present embodiment, for example, the reduction gear 61 is disposed so as to form the joint portion 26, and the speed reducer 61 and the hand 13 are connected via a belt and a pulley. The stop precision of the hand 13 is improved, and as a result, the conveyance precision of the substrate 2 can be improved. In other words, when the speed reducer 61 is disposed so as to form the joint portion 26, and the speed reducer 61 and the hand 13 are connected via a belt and a pulley, the belt for connecting the speed reducer 61 and the hand 13 is decelerated. When the hand 13 is stopped, the belt is extended and the stopping accuracy of the hand 13 is easily lowered. In the present embodiment, the load before the deceleration is applied to the belt 64, so that the elongation of the belt 64 when the hand 13 is stopped can be suppressed. , to improve the stopping accuracy of the hand 13 .

(Change example 1 of industrial robot)

Fig. 11 is a plan view showing an industrial robot 1 according to another embodiment of the present invention (second invention).

In the above embodiment, the arm 14 is composed of one first arm portion 23 and one second arm portion 24. In addition, for example, as shown in FIG. 11, the arm 14 may be composed of one first arm portion 23 and two second arm portions 24. In this case, the first arm portion 23 is formed in a substantially V shape or a linear shape, and the center portion thereof is rotatably coupled to the base end portion of the body portion 15 . Further, as shown in FIG. 11, the second arm portion 24 is rotatably coupled to each of the two distal end sides of the first arm portion 23, and is formed on each of the two distal end sides of the first arm portion 23. Joint portion 26.

In other words, in the same manner as in the above-described embodiment, a part of the joint portion 26 is formed by the speed reducer 48, and a part of the joint portion 27 is formed by the speed reducer 61. Further, the motors 46 and 47 and the speed reducer 48 are disposed in the inner space 45 of the first arm portion 23 on the two distal end sides of the first arm portion 23, respectively, and the second end portions of the second arm portions 24 are respectively second. A reduction gear 61 is disposed in the internal space 66 of the arm portion 24. Further, the internal spaces 45 and 66 become atmospheric pressure. Further, in this case, only the two fork portions 21 projecting toward one side in the horizontal direction are attached to the base portion 20 of the hand portion 13. In addition, in FIG. 8, the same code|symbol is attached|subjected by the structure similar to the structure of the above-mentioned form, or the structure corresponding to the structure of the above-mentioned form.

(Change example 2 of industrial robot)

Fig. 12 is a plan view showing an industrial robot 1 according to another embodiment of the present invention (second invention).

In the above form, the robot 1 includes one arm 14. In addition to this, for example, as shown in FIG. 12, the robot 1 may include two arms 14 that are rotatably coupled to the body portion 15 at the proximal end side. In other words, in the same manner as in the above-described embodiment, a part of the joint portion 26 is formed by the speed reducer 48, and a part of the joint portion 27 is formed by the speed reducer 61. Further, on the front end side of the first arm portion 23, the motors 46 and 47 and the speed reducer 48 are disposed in the internal space 45 of the first arm portion 23, and the second arm portion 24 is provided on the front end side of the second arm portion 24, respectively. The internal space 66 is provided with a speed reducer 61. Further, the internal spaces 45 and 66 become atmospheric pressure. Further, in this case, only the two fork portions 21 projecting toward one side in the horizontal direction are attached to the base portion 20 of the hand portion 13. Incidentally, in FIG. 12, the same components as those of the above-described configuration or the configurations corresponding to the above-described configurations are denoted by the same reference numerals.

(Other embodiments)

The above-described embodiment is an example of a preferred embodiment of the present invention, and is not limited thereto, and various modifications can be made without departing from the spirit and scope of the invention.

In the above embodiment, the arm 14 is composed of one first arm portion 23 and one second arm portion 24. In addition, for example, as shown in FIG. 11, the arm 14 may be composed of one first arm portion 23 and two second arm portions 24. In this case, the first arm portion 23 is formed in a substantially V shape or a linear shape, and the center portion thereof is rotatably coupled to the base end portion of the body portion 15 . Further, as shown in FIG. 11 , the second arm portion 24 is rotatably coupled to the two distal end sides of the first arm portion 23 , and the joint portion 26 is formed on each of the distal end sides of the first arm portion 23 . Moreover, in this case, for example, only the two fork portions 21 projecting toward one side in the horizontal direction are attached to the base portion 20 of the hand portion 13. Incidentally, in FIG. 11, the same components as those of the above-described configuration or the configurations corresponding to the above-described configurations are denoted by the same reference numerals.

Further, in the above-described embodiment, the robot 1 includes one arm 14. However, as shown in FIG. 12, the robot 1 may include two arms 14 that are rotatably coupled to the main body portion 15 at the proximal end side. In this case, for example, only the two fork portions 21 projecting toward one side in the horizontal direction are attached to the base portion 20 of the hand portion 13. Furthermore, in FIG. 12, the same configuration as or above The same components are denoted by the same reference numerals.

In the above-described embodiment, the concave portion 80n is formed so as to overlap the through hole 80f when viewed from the up-and-down direction. When viewed from the vertical direction, the inner circumferential surface of the through hole 80f substantially coincides with the inner circumferential surface of the concave portion 80n. In addition, for example, when the concave portion 80n is viewed from the up-and-down direction, one portion of the concave portion 80n may be formed to overlap the through hole 80f, and the inner circumferential surface of the through hole 80f and the concave portion 80n may be formed when viewed from the vertical direction. The circumference is offset. Similarly, in the above-described embodiment, the concave portion 85n is formed so as to overlap the through hole 85g when viewed from the up-and-down direction. When viewed from the vertical direction, the inner circumferential surface of the through hole 85g substantially coincides with the inner circumferential surface of the concave portion 85n, but When the concave portion 85n is viewed from the up-and-down direction, one portion of the concave portion 85n may be formed to overlap the through hole 85g. When viewed from the vertical direction, the inner circumferential surface of the through hole 85g is offset from the inner circumferential surface of the concave portion 85n.

In the above embodiment, the inner diameter of the recessed portion 80n is equal to the inner diameter of the through hole 80f. In addition, for example, the inner diameter of the recessed portion 80n may be larger than the inner diameter of the through hole 80f or may be smaller than the inner diameter of the through hole 80f. Similarly, the inner diameter of the recessed portion 85n is equal to the inner diameter of the through hole 85g, but the inner diameter of the recessed portion 85n may be larger than the inner diameter of the through hole 85g or may be smaller than the inner diameter of the through hole 85g. Further, in the above-described embodiment, the through holes 80f and 85g are formed in a circular shape, but the through holes 80f and 85g may be formed in a polygonal shape or may be formed in an elliptical shape or an oblong shape. Further, in the above embodiment, the concave portions 80n and 85n are formed in a circular shape, but the concave portions 80n and 85n may be formed in a polygonal shape or may be formed in an elliptical shape or an oblong shape.

In the above embodiment, the concave portions 80n and 85n are formed so as not to penetrate the lower surface portions 80b and 85b. Other than this, for example, the concave portions 80n and 85n may be formed so as to penetrate the lower surface portions 80b and 85b. In this case, a cover member that covers the recesses 80n, 85n is fixed to the lower surface of the lower surface portions 80b, 85b. Further, a sealing member that prevents air from flowing out from the internal spaces 45 and 66 is disposed between the cover member and the lower surface portions 80b and 85b.

In the above aspect, the internal space 45 of the first arm portion 23 and the internal space 66 of the second arm portion 24 become atmospheric pressure. In addition, for example, the internal space 45 or the internal space 66 may also be called It is a vacuum. Further, in the above-described embodiment, the arm 14 is composed of two arm portions of the first arm portion 23 and the second arm portion 24. However, the arm 14 may be constituted by one arm portion or may be composed of three or more arm portions. In the case where the arm 14 is composed of three or more arm portions, the internal space of all the arm portions may be atmospheric pressure, or the inner space may be a vacuum arm portion.

In the above aspect, the robot 1 includes a motor 46 for rotating the second arm portion 24 with respect to the first arm portion 23, and a motor 47 for rotating the hand portion 13 with respect to the second arm portion 24. In addition to this, for example, the second arm portion 24 can be rotated with respect to the first arm portion 23 by one motor, and the hand portion 13 can be rotated with respect to the second arm portion 24 to constitute a power. The transfer mechanism from the motor to the arm 14.

In the above-described form, the speed reducer 48 is disposed in the internal space 45 on the front end side of the first arm portion 23. In addition to this, for example, a reduction gear 48 may be disposed in the internal space 66 on the proximal end side of the second arm portion 24. Further, in the above embodiment, the motor 47 is disposed in the internal space 45 of the first arm portion 23, but the motor 47 may be disposed in the internal space 66 of the second arm portion 24. Further, in the above embodiment, the motor 46 is disposed in the internal space 45 of the first arm portion 23, but the motor 46 may be disposed in the internal space 66 of the second arm portion 24. Further, in the above-described embodiment, the speed reducer 61 is disposed in the internal space 66 of the second arm portion 24, but the speed reducer 61 may be disposed in the internal space 45 of the first arm portion 23. In this case, in the joint portion 26, the speed reducer 48 and the speed reducer 61 are disposed so as to overlap in the axial direction.

In the above aspect, the robot 1 includes a motor 46 for rotating the second arm portion 24 with respect to the first arm portion 23, and a motor 47 for rotating the hand portion 13 with respect to the second arm portion 24. In addition, for example, the second arm portion 24 may be rotated with respect to the first arm portion 23 by one motor, and the hand portion 13 may be rotated with respect to the second arm portion 24 to constitute a power. The transfer mechanism from the motor to the arm 14.

In the above aspect, the arm 14 is composed of two arm portions of the first arm portion 23 and the second arm portion 24. In addition to this, for example, the arm 14 may be composed of three or more arm portions. In this case, each of the three or more arms is formed in a hollow shape, and each of the three or more arms is formed. The internal space becomes atmospheric pressure.

In the above aspect, an air-cooled or water-cooled cooling mechanism may be disposed in the internal spaces 45 and 66. For example, the cooling pipe having the discharge port for the compressed air for cooling may be disposed in the internal spaces 45 and 66. In this case, for example, a cooling pipe is disposed so as to supply compressed air to the bearing or magnetic fluid seals 71 and 72 of the reducers 48 and 61. Moreover, in this case, for example, the cooling pipes disposed in the internal spaces 45 and 66 are connected to a supply source of compressed air disposed in the atmosphere inside the casing 17 or outside the casing 17. Further, the cooling pipe and the supply source of the compressed air are connected by a through hole formed in the lower surface of the proximal end side of the first arm portion 23 and a pipe which is wound around the inner peripheral side of the hollow rotating shaft 32. Further, in this case, for example, a solenoid valve is disposed inside the casing 17, and the solenoid valve is opened and closed, and compressed air is supplied from the discharge port of the cooling pipe or the discharge port of the self-cooling pipe is adjusted. The amount of compressed air supplied. Further, in this case, for example, a detecting device such as a temperature sensor that detects the temperature of the internal spaces 45, 66 is disposed at an appropriate position in the internal spaces 45, 66, and the solenoid valve is opened and closed based on the detection result of the detecting device. . Moreover, in this case, for example, the compressed air supplied to the internal spaces 45 and 66 circulates through the entire internal spaces 45 and 66 and is discharged to the body portion 15 side. In this case, the entire arm 14 is effectively cooled from the inside of the arm 14, so that the temperature rise of the entire arm 14 can be effectively suppressed.

In the above-described embodiment, the object to be transported by the robot 1 is the substrate 2 for the organic EL display. However, the object to be transported by the robot 1 may be a glass substrate for a liquid crystal display, or may be a semiconductor wafer or the like. . Further, in the above-described form, the robot 1 is a robot for transporting a transport object, but the robot 1 may be a robot used in other applications such as a welding robot.

1‧‧‧Robots (industrial robots)

13‧‧‧Hands

14‧‧‧ Arm

15‧‧‧ Body Department

16‧‧‧ Lifting mechanism

17‧‧‧Shell

18‧‧‧Flange

20‧‧‧ base

21‧‧‧Fork

23‧‧‧1st arm (arm)

24‧‧‧2nd arm (arm)

25‧‧‧ Joint Department

26‧‧‧ Joints (Part 1)

27‧‧‧ Joints (2nd Joint)

28‧‧‧weight

31, 40‧‧‧ motor

32‧‧‧ hollow rotating shaft

33, 61‧‧‧ reducer

34‧‧‧Retaining components

35‧‧‧Magnetic fluid seal

36‧‧‧ Bellows

38‧‧‧screw components

39‧‧‧ nut components

45, 66‧‧‧ internal space

46‧‧‧Motor (1st motor)

47‧‧‧Motor (2nd motor)

48‧‧‧Reducer (1st reducer)

80, 85‧‧‧arm body

81, 82, 83, 86, 87, 88, 89 ‧ ‧ cover members

AR‧‧‧Atmosphere

VR‧‧‧vacuum area

Claims (11)

An industrial robot comprising: an arm having a flat first flat portion; and a flat second planar portion disposed substantially parallel to the first flat portion with a predetermined gap therebetween; And a side surface portion connecting the outer peripheral end of the first planar portion and the outer peripheral end of the second planar portion; and at least a portion of the arm is formed to be surrounded by the first planar portion, the second planar portion, and the side surface portion The inner space is hollow, and the arm is disposed in a vacuum, the inner space is at atmospheric pressure, and a plurality of through holes that communicate with the inner space are formed in the first flat portion, and the arm includes a plurality of cover members. Fixed to the first planar portion and covering the through hole; and a plurality of sealing members disposed between the first planar portion and the cover member to prevent air from flowing out from the internal space; and in the second planar portion The opposing surface of the first planar portion is formed to have at least a portion and the above-described direction when viewed from a direction opposite to the first planar portion and the second planar portion. A plurality of overlapping holes recess. The industrial robot according to claim 1, wherein the inner circumferential surface of the through hole substantially coincides with the inner circumferential surface of the concave portion when viewed from the opposite direction. The industrial robot according to claim 1 or 2, wherein the through hole is formed in a circular shape, and the concave portion is formed in a circular shape having an inner diameter equal to an inner diameter of the through hole. The industrial robot according to claim 1 or 2, wherein the internal space is formed by cutting using a cutting tool inserted from the through hole, and the first flat portion, the second flat portion, and the side portion are Be one. The industrial robot according to claim 3, wherein the internal space is formed by cutting using a cutting tool inserted from the through hole, and the first planar portion, the second planar portion, and the side surface portion are integrated . An industrial robot comprising: a body portion; an arm having a base end side rotatably coupled to the body portion; and a hand portion rotatably coupled to the front end side of the arm; and the hand portion The arm is disposed in a vacuum, and the entire arm is formed in a hollow shape, and the internal space of the arm is atmospheric pressure. The industrial robot according to claim 6, wherein the arm is composed of a plurality of arm portions that are rotatably coupled to each other, and each of the plurality of arm portions is formed in a hollow shape. The industrial robot according to claim 7, wherein the arm includes: a first arm portion as the arm portion, a base end side of which is rotatably coupled to the main body portion; and a second arm portion as the arm portion The proximal end side is rotatably coupled to the front end side of the first arm portion, and the hand portion is rotatably coupled to the distal end side thereof. The industrial robot according to claim 8, comprising: a first motor for rotating the second arm portion with respect to the first arm portion; and a second motor for making the hand portion relative to the first portion The arm is rotated, the first reducer decelerates and transmits the rotation of the first motor to the second arm portion, and the second reduction gear that decelerates the rotation of the second motor and transmits the rotation to the hand And the first speed reducer is configured to connect at least a part of the first joint portion of the first arm portion and the second arm portion, and is disposed inside the first arm portion, and the second speed reducer is configured to connect the second portion At least a part of the arm portion and the second joint portion of the hand portion are disposed inside the second arm portion. The industrial robot of claim 9, wherein the first motor and the second motor are configured It is placed inside the first arm. The industrial robot according to any one of claims 6 to 10, comprising a cooling mechanism disposed in the internal space.